WO2019080347A1 - 一种吸附装置、吸附系统和搬运设备 - Google Patents

一种吸附装置、吸附系统和搬运设备

Info

Publication number
WO2019080347A1
WO2019080347A1 PCT/CN2017/118649 CN2017118649W WO2019080347A1 WO 2019080347 A1 WO2019080347 A1 WO 2019080347A1 CN 2017118649 W CN2017118649 W CN 2017118649W WO 2019080347 A1 WO2019080347 A1 WO 2019080347A1
Authority
WO
WIPO (PCT)
Prior art keywords
suction
end surface
nozzle
adsorption device
fixed
Prior art date
Application number
PCT/CN2017/118649
Other languages
English (en)
French (fr)
Inventor
吴伟
Original Assignee
惠科股份有限公司
重庆惠科金渝光电科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 惠科股份有限公司, 重庆惠科金渝光电科技有限公司 filed Critical 惠科股份有限公司
Priority to US15/745,064 priority Critical patent/US10889006B2/en
Publication of WO2019080347A1 publication Critical patent/WO2019080347A1/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass

Definitions

  • the present application belongs to the technical field of handling equipment, and more particularly to an adsorption device, an adsorption system, and a handling device.
  • a suction nozzle for adsorbing substrates is provided on a conveying device for moving substrates, and After the nozzle adsorbs the substrate, the substrate is transported. Before moving, the substrate may be offset due to various reasons, or the substrate may be broken due to collision. When the nozzle of the conveying device is not adsorbed to the substrate or hits the gap, the substrate may not be attracted. Sometimes the adsorption device stops running and reports an error, which greatly affects production efficiency.
  • the purpose of the present application is to provide an adsorption device, an adsorption system, and a handling device to solve the technical problem that the suction nozzle of the adsorption device cannot be adsorbed to the substrate due to the misalignment or displacement of the substrate when the adsorption device adsorbs the substrate.
  • the application provides an adsorption device comprising:
  • a base having a first end surface
  • the nozzle is disposed on the first end surface, the number of the nozzles is at least three, and at least three of the nozzles are surrounded to form a force receiving region;
  • a driving component configured to adjust an area of the force receiving area, wherein the driving component is fixed on the base.
  • the number of the nozzles is four and the force-receiving area is rectangular.
  • the method further includes:
  • An air suction pipe for transmitting gas to the air suction device, wherein the suction nozzle is provided with an air inlet hole, and the air suction pipe is in communication with the air inlet hole.
  • the nozzle has a suction cup.
  • one end of the suction cup is recessed toward the inner side to form a first accommodating cavity, and the air inlet hole is in communication with the first accommodating cavity.
  • a vent hole is formed in a sidewall of the first accommodating cavity, and the vent hole is in communication with the air inlet hole.
  • the inner side of the first receiving cavity is a spherical surface.
  • the first end surface is provided with a sliding slot
  • the sliding slot has a first groove wall, a second groove wall opposite to the first groove wall, and the first groove wall and the a bottom plate of the second groove wall, the first groove wall extending toward the inner side of the sliding groove to form a first extension plate and the second groove wall extending toward the inner side of the sliding groove to form a second extension plate, the first extension a slit is formed between the plate and the second extension plate, and the slit extends in the same direction as the extension direction of the sliding groove;
  • the chute, the first extension plate and the second extension plate enclose a second receiving cavity
  • a fixing plate adapted to the slit is disposed on the nozzle, a sliding block sliding along the sliding slot is disposed in the second receiving cavity, and the fixing plate is disposed in the slit And fixedly connected with the sliding block.
  • the thickness of the fixing plate is the same as the width of the slit.
  • the second receiving cavity has a rectangular cross section.
  • a ball is disposed between the sliding block and the sliding slot.
  • the number of the balls is plural, and a plurality of the balls are evenly distributed between the sliding block and the bottom plate.
  • the driving component is a double-piston double-acting cylinder
  • the double-piston double-acting cylinder has a first telescopic end and a second telescopic end that are independently stretched or synchronously stretched, and the first telescopic end is disposed on the first telescopic end.
  • One of the suction nozzles and/or the second telescopic end is provided with one of the suction nozzles.
  • a return spring is further included, one end of the return spring being fixedly coupled to the nozzle, and the other end of the return spring being fixed to the base.
  • the drive assembly is located in a telescoping direction of the return spring.
  • the base is provided with an opening, and the first end surface of the edge of the opening is provided with the suction a fixed-wheel device for steering the traction direction of the first traction line in a one-to-one correspondence
  • the fixed wheel device comprising a bracket fixed to the first end surface and fixed to the bracket and a runner that is movably connected to the bracket, the runner having a wire slot for placing the first traction wire;
  • a unidirectional cylinder is fixed on the second end surface of the base opposite to the first end surface, and the one-way cylinder extends toward a side end to form a third telescopic end, and the third telescopic end wears Provided in the opening and the distance of the third telescopic end from the first end surface in an extended state is smaller than a distance of the rotating wheel from the first end surface;
  • One end of the first traction line is fixedly connected to the nozzle, and the other end of the first traction line is fixedly connected to the third telescopic end, and the first traction line is clamped in the slot and The first traction line is movably connected to the runner.
  • the second traction line further includes a motor fixed to the first end surface of the force receiving region, the motor having a rotating shaft extending outward of the first end surface, the rotating shaft being vertical
  • One end of the second traction line is fixedly connected to the nozzle, and the other end of the second traction line is fixedly connected to the surface of the rotating shaft.
  • the second pull line is parallel to the first end face.
  • the present application also proposes an adsorption system comprising a mechanical arm and a suction device, the mechanical arm having a grip for gripping an object, the base being fixed to the grip.
  • the present application also provides a handling apparatus comprising a guide rail, a mover slidably disposed on the guide rail, and the adsorption system, the mechanical arm being fixed to the mover.
  • the beneficial effect of the adsorption device of the present application is that a suction nozzle that is movably connected to the first end surface is disposed on the first end surface of the adsorption device, and the number of the suction nozzles is not less than three, and the suction nozzle is surrounded to form a force receiving region.
  • the nozzle can adjust the size of the area of the force receiving area driven by the driving component, so that the nozzle can be moved to a new position when the substrate sucked by the suction nozzle is not attracted to the substrate due to misalignment or displacement. To attract the substrate.
  • FIG. 1 is a front view of a first embodiment of an adsorption device according to an embodiment of the present application
  • FIG. 2 is a front view of a nozzle provided by an embodiment of the present application.
  • Figure 3 is a top plan view of the nozzle provided by the embodiment of the present application.
  • Figure 4 is a cross-sectional structural view taken along line A-A of Figure 3;
  • Figure 5 is a top plan view 2 of the nozzle provided by the embodiment of the present application.
  • Figure 6 is a top plan view 3 of the nozzle provided by the embodiment of the present application.
  • Figure 7 is a cross-sectional structural view taken along line B-B of Figure 6;
  • FIG. 8 is a schematic diagram of the extension of a double-piston double-acting cylinder of the adsorption device according to an embodiment of the present application.
  • FIG. 9 is a schematic view showing the shrinkage of a double-piston double-acting cylinder of the adsorption device according to an embodiment of the present application.
  • FIG. 10 is a schematic diagram of elongation of a one-way telescopic cylinder of an adsorption device according to an embodiment of the present application
  • Figure 11 is a schematic view showing the contraction of a one-way telescopic cylinder of the adsorption device according to an embodiment of the present application.
  • Figure 12 is a front elevational view 2 of the adsorption device according to an embodiment of the present application.
  • Figure 13 is a cross-sectional structural view taken along line C-C of Figure 12;
  • Figure 14 is a cross-sectional structural view taken along line D-D of Figure 12;
  • Figure 15 is a cross-sectional structural view taken along line C-C of Figure 12;
  • Figure 16 is a front elevational view 3 of the adsorption device according to an embodiment of the present application.
  • Figure 17 is a front elevational view 4 of the adsorption device according to an embodiment of the present application.
  • Figure 18 is a front elevational view 5 of the adsorption device according to an embodiment of the present application.
  • Figure 19 is a front view of the adsorption device of the embodiment of the present application.
  • Figure 20 is a front view showing the suction device of the embodiment of the present application.
  • FIG. 21 is a front view showing a schematic diagram of an adsorption device according to an embodiment of the present application.
  • first and second are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated.
  • features defining “first” and “second” may include one or more of the features either explicitly or implicitly.
  • the meaning of "a plurality” is two or more unless specifically and specifically defined otherwise.
  • the adsorption device 1 comprises:
  • the base 11 has a first end surface 112;
  • the suction nozzle 12, the suction nozzle 12 is disposed on the first end surface 112, the number of the suction nozzles 12 is at least three, and at least three suction nozzles 12 enclose a force receiving region (not shown);
  • a driving component (not shown) is used to adjust the size of the force receiving area, and the driving component is fixed on the base 11.
  • the nozzles 12 are movably connected to the first end surface 112 on the first end surface 112 thereof, and the number of the suction nozzles 12 is at least three, and the at least three suction nozzles 12 enclose a force receiving area, the nozzle 12 can adjust the size of the area of the force receiving area under the driving of the driving component, so that when the adsorbed substrate (not shown) can be attracted to the substrate due to misalignment or offset, the nozzle 12 can be moved to A new location to attract the substrate.
  • the nozzle 12 is for adsorbing a substrate.
  • the first end surface 112 is a flat surface.
  • the first end surface 112 may also be a curved surface or other shape as long as the movement of the nozzle 12 is not affected and the nozzle 12 can normally adsorb the substrate. This is not a single limitation.
  • FIG. 1 to FIG. 4, FIG. 8, FIG. 9 and FIG. 16 as one embodiment of the adsorption device 1 provided by the present application, the number of the suction nozzles 12 is four, and the force receiving area is rectangular.
  • the shape of the force receiving area may be rectangular, and most of the substrates are cut into a rectangular shape, which is favorable for the adsorption device 1 to adsorb the substrate.
  • the force-receiving area can also be other shapes, as long as the movement of the nozzle 12 is not affected and the nozzle 12 can normally adsorb the substrate, which is not limited herein.
  • the number of the nozzles 12 is four, two of which are a group, a total of two groups, and the four nozzles 12 are surrounded by a rectangular shape, so that the substrate can be stably adsorbed. At the same time, the number of nozzles 12 is also relatively small, saving costs.
  • the number of the nozzles 12 may be other than not less than three, as long as the substrate can be adsorbed, which is not limited herein.
  • the method further includes:
  • An air suction pipe (not shown) for conveying the gas to the air suction device, the suction nozzle 12 is provided with an air inlet hole 1212, and the air suction pipe is in communication with the air inlet hole 1212.
  • the gas enters the air suction device from the air inlet hole 1212 through the air suction pipe, and suction can be generated at the suction cup 121.
  • suction cup 121 comes into contact with the substrate, the suction force increases the adsorption strength between the suction cup 121 and the substrate.
  • the nozzle 12 is a hollow cylinder, wherein one end of the cylinder is in contact with the substrate, and the hollow tube of the cylinder serves as the air inlet hole 1212.
  • the substrate can be adsorbed on the suction nozzle 12 by sucking the gas into the intake hole 1212, which is not limited herein.
  • the suction nozzle 12 has a suction cup 121.
  • the suction cup 121 can adsorb the substrate more firmly.
  • one end of the suction cup 121 is recessed toward the inner side to form a first accommodating cavity 1211 , and the air inlet hole 1212 is connected to the first accommodating cavity 1211 . through.
  • the suction cup 121 has a first accommodating cavity 1211.
  • the air pressure in the first accommodating cavity 1211 is lower than the external air pressure, so that the atmospheric pressure fixes the suction cup 121 firmly on the substrate, which greatly enhances the relationship between the suction cup 121 and the substrate.
  • Adsorption capacity The air inlet hole 1212 is in communication with the first accommodating cavity 1211, so that the gas in the first accommodating cavity 1211 can be further discharged to the air suction device through the air inlet hole 1212, thereby further reducing the air pressure in the first accommodating cavity 1211. The adsorption force between the chuck 121 and the substrate is enhanced.
  • the suction cup 121 is made of an elastically deformable material. When the suction cup 121 is in contact with the substrate, the substrate is not damaged, and the suction cup 121 can also serve as a buffer between the nozzle 12 and the substrate, and the nozzle is reduced. 12 The probability of injury to the substrate.
  • the suction cup 121 has an adsorption surface, which facilitates the suction of the substrate by the suction cup 121, and enhances the adhesion between the suction cup 121 and the substrate.
  • a vent hole (not shown), a vent hole and an air inlet hole 1212 are defined in a sidewall of the first accommodating cavity 1211 . Connected. Thus, the gas in the first accommodating chamber 1211 can sequentially enter the getter through the vent hole and the air inlet hole 1212.
  • the inner side surface of the first accommodating cavity 1211 is a spherical surface.
  • the inner side surface of the first accommodating cavity 1211 adopts a spherical structure, so that when the suction cup 121 adsorbs the substrate, the spherical structure enhances the resilience of the suction cup 121, and the enhancement of the resilience can enhance the suction of the suction cup 121.
  • the first end surface 112 defines a sliding slot 111
  • the sliding slot 111 has a first slot wall (not shown).
  • the first extension plate 1111 and the second extension plate 1112 have a slit 1113 therebetween, and the extending direction of the slit 1113 and the extending direction of the sliding groove 111 the same;
  • the chute 111, the first extension plate 1111 and the second extension plate 1112 enclose a second receiving cavity
  • the suction nozzle 12 is provided with a fixing plate 124 adapted to the slit 1113.
  • the second receiving cavity is provided with a sliding block 122 sliding along the sliding slot 111.
  • the fixing plate 124 is disposed through the slit 1113 and the sliding block 122. Fixed connection.
  • the sliding block 122 slides in the second accommodating cavity 1114, and the suction nozzle 12 is fixed on the sliding block 122 by the fixing plate 124.
  • the sliding block 122 is restricted in the second accommodating cavity 1114 during the sliding process and can be along
  • the sliding direction of the sliding groove 111 is slid, and the suction nozzle 12 does not appear to be separated from the bottom plate under the restriction of the sliding block 122, thereby ensuring the stability of the suction nozzle 12 during the movement.
  • the thickness of the fixing plate 124 is the same as the width of the slit 1113 . It is possible to prevent the sliding block 122 from coming off the second accommodating cavity 114 during the sliding process.
  • the area that the sliding block 122 can sway is limited to the range of the second accommodating cavity 1114. Referring to FIG. 13, if the cross-sectional area of the second accommodating cavity 1114 and the cross-sectional area of the sliding block 122 are the same, then The slider 122 does not sway during operation.
  • the pressure of the suction nozzle 12 is applied to the first extension plate 1111 and the second extension plate 1112, that is, the first extension plate 1111 and the The second extension plate 1112 also serves as a support in this case.
  • the second receiving cavity 1114 has a rectangular cross section. As such, when the sliding block 122 slides in the second accommodating cavity 1114, sloshing is less likely to occur.
  • a ball 123 is disposed between the sliding block 122 and the sliding slot 111 .
  • the balls 123 greatly reduce the friction between the inner walls of the second accommodating cavity 1114 of the sliding block 122.
  • the balls 123 are movably coupled to the slider 122.
  • the number of the balls 123 is plural, and the plurality of balls 123 are evenly distributed on the sliding block 122 and the bottom plate. between.
  • the balls 123 evenly distributed between the sliding block 122 and the bottom plate avoid the vibration of the sliding block 122.
  • the driving component is a double piston double acting cylinder 13
  • the double piston double acting cylinder 13 has independent expansion or contraction or
  • the first telescopic end 131 and the second telescopic end 132 are synchronously stretched, and a suction nozzle 12 is disposed on the first telescopic end 131 and/or a second telescopic end 132 is disposed on the second telescopic end 132.
  • the dual-piston double-acting cylinder 13 is used, and the movement of the two nozzles 12 can be controlled at the same time, which saves cost.
  • the suction nozzle 12 is fixed to the first telescopic end 131 and/or the second telescopic end 132 of the double-piston double-acting cylinder 13, and the first telescopic end 131 and/or the second is controlled by the double-piston double-acting cylinder 13.
  • the movement of the telescopic end 132 can effectively control the position of the suction nozzle 12, and the control process is also very simple and is advantageous for production.
  • a return spring 14 is further included.
  • One end of the return spring 14 is fixedly connected to the suction nozzle 12 , and the other end of the return spring 14 is fixed to the base. 11 on.
  • the return spring 14 can return the displaced nozzle 12 to the original position, does not require an additional device, has a simple structure, is easy to produce, and reduces the cost.
  • the return spring 14 is fixed to the base 11.
  • a fixing post 19 and a return spring 14 may be disposed on the base 11 .
  • One end is fixed on the fixing post 19, and the other end of the return spring 14 is fixed on the suction nozzle 12.
  • the return spring 14 is parallel to the first end surface 112, so that the suction nozzle 12 is not reset during operation.
  • the spring 14 has a certain angle with the first end surface 112 to generate a force for pressing the suction nozzle 12 against the first end surface 112, reducing the friction between the suction nozzle 12 and the first end surface 112.
  • the tensioning direction of the return spring 14 is parallel to the sliding slot 111, so that the force generated by the return spring 14 against the width direction of the slit 1213 can be avoided, thereby reducing the suction nozzle 12 and the base 11. Friction between.
  • the driving assembly is located in the telescopic direction of the return spring 14.
  • the driving assembly is located in the telescopic direction of the return spring 14, facilitating the return spring 14 to pull the suction nozzle 12 back to the starting position, where the starting position refers to the suction nozzle 12 before the driving assembly changes the force receiving region. Where it is.
  • a first traction line 153 for moving the suction nozzle 12 is further included, and the base 11 is provided with an opening 114.
  • the first end surface 112 of the edge of the opening 114 is provided with a fixed wheel device 15 for steering the traction direction of the first traction wire 153 in one-to-one correspondence with the number of the suction nozzles 12.
  • the fixed wheel device 15 is fixed to the first a bracket 151 on the end surface 112 and a runner 152 fixed to the bracket 151 and movably coupled to the bracket 151, the runner 152 having a wire slot for placing the first pull wire 153;
  • a unidirectional cylinder 16 is fixed to the second end surface 113 of the base 11 opposite to the first end surface 112.
  • the unidirectional cylinder 16 extends toward the one end to form a third telescopic end 161.
  • the third telescopic end 161 is disposed. The distance from the first end surface 112 in the elongated state is smaller than the distance of the runner 152 from the first end surface 112;
  • One end of the first traction wire 153 is fixedly connected to the suction nozzle 12, and the other end of the first traction wire 153 is fixedly connected to the third telescopic end 161.
  • the first traction wire 153 is locked in the wire slot and the first traction wire 153 and the runner 152 active connections.
  • the runner 152 on the fixed wheel device 15 functions as the first traction line 153.
  • the return spring 14 starts to contract, and the return spring 14 pulls the suction nozzle 12 and the first traction wire 153 to retract the retractable spring 14 in the contraction direction, thereby realizing the force surrounded by the suction nozzle 12.
  • the expansion of the area When the third telescopic end 161 is contracted, the third telescopic end 161 pulls the first traction wire 153 to move toward the third telescopic end 161, and at the same time, the suction nozzle 12 rotates along the chute 111 under the pulling of the first traction wire 153.
  • the wheel 152 is moved in the direction to achieve a reduction in the force receiving area surrounded by the suction nozzle 12.
  • a one-way cylinder 16 can simultaneously control the movement of the plurality of nozzles 12, saving the number of cylinders required.
  • the third telescopic end 161 is disposed in the opening 114 and the distance of the third telescopic end 161 from the first end surface 112 in the extended state is smaller than the distance of the reel 152 from the first end surface 112, so that the third telescopic end 161 is in the When extending or contracting, the first pull wire 153 connected to the suction nozzle 12 and the third telescopic end 161 can always abut on the runner 152.
  • a second traction wire 154 is further included, and a motor 17 is fixed on the first end surface 112 of the force receiving region.
  • the motor 17 has a rotating shaft 171 extending outwardly of the first end surface 112.
  • the rotating shaft 171 is perpendicular to the first end surface 112.
  • One end of the second pulling wire 154 is fixedly connected to the suction nozzle 12, and the other end of the second pulling wire 154 and the surface of the rotating shaft 171. Fixed connection.
  • the second pulling wire 154 is fixed to the surface of the rotating shaft 171, and the rotating shaft 171 rotates in any one direction in the initial position (the second pulling wire 154 is not wound around the rotating shaft 171), assuming that the initial rotating direction is the counterclockwise rotating direction, and the second pulling The wire 154 starts to be wound around the rotating shaft 171, the return spring 14 is stretched, and the force receiving area becomes small.
  • a motor 17 can control the movement of the plurality of suction nozzles 12, i.e., the motor 17 controls the enlargement and reduction of the area of the force receiving area.
  • the rotating shaft 171 can control the movement stroke of the suction nozzle 12 over a wide range and continuously by rotating different angles, and it is very convenient to change the size of the area.
  • the second traction wire 154 is parallel to the first end surface 112 .
  • the nozzle 12 is only subjected to a force parallel to the first end surface 112. It is avoided that in the direction perpendicular to the first end surface 112, the suction nozzle 12 is brought close to and abuts on the first end surface 112 to increase the resistance, or appears away from the first end surface 112 because of the relationship between the suction nozzle 12 and the first end surface 112. The distance is too far to affect the stability of the suction nozzle 12 to adsorb the substrate.
  • FIG. 19 a specific embodiment of the adsorption device 1 provided by the present application.
  • the base 11 is provided with a fixing post 19, one end of the return spring 14 is fixed on the fixing post 19, and the rest spring 14 is further
  • the first end and the suction nozzle 12 further include a second traction line 154.
  • the second end surface 113 is fixed with a motor 17, a motor 17, and the motor 17 has a rotating shaft 171.
  • the rotating shaft 171 is disposed at the opening 114, and one end of the second pulling line 154
  • the second end of the second pull wire 154 is fixedly connected to the surface of the rotating shaft 171.
  • the second pulling wire 154 is fixed to the surface of the rotating shaft 171. In the initial position (the second pulling wire 154 is not wound around the rotating shaft 171), the rotating shaft 171 rotates in any one direction, assuming that the initial rotating direction is the counterclockwise rotating direction, and the second pulling line 154 Starting to wrap around the rotating shaft 171, the return spring 14 is stretched, and the force receiving area becomes small.
  • a motor 17 can control the movement of the plurality of suction nozzles 12, i.e., control the enlargement and reduction of the area of the force receiving area.
  • the rotating shaft 171 can control the movement stroke of the suction nozzle 12 over a wide range and continuously by rotating different angles, and it is very convenient to change the size of the area.
  • an adsorption system including a mechanical arm (not shown) and a suction device 1 having a mechanical arm for The gripper's claw (not shown) is grasped, and the base 11 is fixed to the gripper.
  • the effect of the adsorption system provided by the present application is that the adsorption device 1 of the present application is provided on the first end surface 112 thereof with the nozzle 12 movably connected to the first end surface 112, and the number of the suction nozzles 12 No less than three, the suction nozzle 12 encloses a force receiving area, and the suction nozzle 12 can adjust the size of the area of the force receiving area driven by the driving component, so that when the substrate sucked by the suction nozzle 12 is misaligned or biased When the nozzle 12 is prevented from being attracted to the substrate, the nozzle 12 can be moved to a new position to adsorb the substrate.
  • the pawl has at least one degree of freedom that can be rotated.
  • the gripper can grip the base 11 with great flexibility and transfer the position of the base 11.
  • the present application further provides a handling device (not shown), including a guide rail, a mover and an adsorption system sliding on the guide rail, and the mechanical arm is fixed. On the mover.
  • the suction device 1 of the present application is provided on the first end surface 112 thereof with the nozzle 12 movably connected to the first end surface 112, and the number of the suction nozzles 12 is not If there are less than three, the suction nozzle 12 encloses a force receiving area, and the suction nozzle 12 can adjust the size of the area of the force receiving area driven by the driving component, so that when the substrate sucked by the suction nozzle 12 is misaligned or offset When the nozzle 12 is unable to be attracted to the substrate, the nozzle 12 can be moved to a new position to adsorb the substrate.
  • the mechanical arm is fixed on the mover, so that the mover can move the mechanical arm along the guide rail, which is very convenient.

Abstract

一种吸附装置(1)，包括底座(11)，底座(11)具有第一端面(112)；吸嘴(12)，吸嘴(12)设置于第一端面(112)上，吸嘴(12)的数量不少于三个，吸嘴(12)围设形成受力区域；驱动组件，用于调整受力区域面积大小，驱动组件固定于底座(11)上。吸附装置(1)在其第一端面(112)上设置有与该第一端面(112)活动连接的吸嘴(12)，该吸嘴(12)可以在驱动组件的驱动下调整受力区域面积的大小，如此，当被吸附的基板因出现错位或者偏移造成吸嘴(12)无法吸附到基板时，吸嘴(12)可以移动到新的位置来吸附住基板。

Description

一种吸附装置、吸附系统和搬运设备 技术领域
本申请属于搬运设备技术领域，更具体地说，是涉及一种吸附装置、吸附系统和搬运设备。
 背景技术
现代各行各业中，对基板的加工涉及到各个领域，包括玻璃板、金属板等。特别是在显示技术领域，玻璃基板有众多的应用，而在基板在生产的过程中，需要在不同的位置进行搬移操作，通常用于搬移基板的搬运装置上设置有吸附基板的吸嘴，通过吸嘴吸附基板后，再将基板进行搬运。在搬移之前，往往因为各种原因导致基板出现偏移，或者是基板碰撞破碎造成缺口，当搬运装置的吸嘴没有吸附到基板或者碰到了缺口上，则可能出现无法将基板吸附住的问题，有时会导致吸附设备停止运行而报错，极大影响了生产效率。
 技术问题
本申请的目的在于提供一种吸附装置、吸附系统和搬运设备，以解决吸附装置吸附基板时，因为基板错位或偏移造成吸附装置的吸嘴无法吸附到基板的技术问题。
 技术解决方案
本申请提供一种吸附装置，包括：
底座，所述底座具有第一端面；
吸嘴，所述吸嘴设置于所述第一端面上，所述吸嘴的数量为至少三个，至少三个所述吸嘴围设形成受力区域；
驱动组件，用于调整所述受力区域面积大小，所述驱动组件固定于所述底座上。
在一个实施例中，所述吸嘴的数量为四个，所述受力区域为矩形。
在另一个实施例中，还包括：
吸气装置；
吸气管，用于将气体传输至所述吸气装置，所述吸嘴上设置有进气孔，所述吸气管与所述进气孔相连通。
在一个实施例中，所述吸嘴具有吸盘。
在一个实施例中，所述吸盘的一端往内侧凹陷形成第一容置腔，所述进气孔与所述第一容置腔相连通。
在一个实施例中，所述第一容置腔的侧壁上开设有通气孔，所述通气孔与所述进气孔相连通。
在一个实施例中，所述第一容置腔的内侧面为球面。
在一个实施例中，所述第一端面开设有滑槽，所述滑槽具有第一槽壁、与所述第一槽壁相对的第二槽壁以及连接所述第一槽壁和所述第二槽壁的底板，所述第一槽壁往所述滑槽内侧延伸形成第一延伸板和所述第二槽壁往所述滑槽内侧延伸形成第二延伸板，所述第一延伸板和所述第二延伸板之间具有狭缝，所述狭缝的延伸方向与所述滑槽的延伸方向相同；
所述滑槽、所述第一延伸板和所述第二延伸板围设形成第二容置腔；
所述吸嘴上设置有与所述狭缝适配的固定板，所述第二容置腔内设置有沿着所述滑槽滑动的滑动块，所述固定板穿设于所述狭缝并与所述滑动块固定连接。
在一个实施例中，所述固定板的厚度与所述狭缝的宽度相同。
在一个实施例中，所述第二容置腔的横截面为矩形。
在一个实施例中，所述滑动块与所述滑槽之间设置有滚珠。
在一个实施例中，所述滚珠的数量为多个，且多个所述滚珠均匀分布于所述滑动块与所述底板之间。
在一个实施例中，所述驱动组件为双活塞双作用气缸，所述双活塞双作用气缸具有相互独立伸缩或者同步伸缩的第一伸缩端和第二伸缩端，所述第一伸缩端上设置有一个所述吸嘴和/或所述第二伸缩端上设置有一个所述吸嘴。
在一个实施例中，还包括复位弹簧，所述复位弹簧的一端与所述吸嘴固定连接，所述复位弹簧的另一端固定于所述底座上。
在一个实施例中，所述驱动组件位于所述复位弹簧的伸缩方向上。
在一个实施例中，还包括用于牵引所述吸嘴移动的第一牵引线，所述底座上设置有开孔，在所述开孔边缘的所述第一端面上设置有与所述吸嘴数量一一对应的用于将所述第一牵引线的牵引方向转向的定轮装置，所述定轮装置包括固定于所述第一端面上的支架和固定于所述支架上且与所述支架活动连接的转轮，所述转轮具有用于放置所述第一牵引线的线槽；
所述底座上与所述第一端面相对的第二端面上固定有单向气缸，所述单向气缸往一侧端方向延伸形成有可伸缩的第三伸缩端，所述第三伸缩端穿设于所述开孔且所述第三伸缩端在伸长状态下离所述第一端面的距离小于所述转轮离所述第一端面的距离；
所述第一牵引线的一端与所述吸嘴固定连接，所述第一牵引线另一端与所述第三伸缩端固定连接，所述第一牵引线卡设于所述线槽中且所述第一牵引线与所述转轮活动连接。
在一个实施例中，还包括第二牵引线，所述受力区域中的所述第一端面上固定有一个电机，所述电机具有往所述第一端面外侧延伸的转轴，所述转轴垂直于所述第一端面，所述第二牵引线的一端与所述吸嘴固定连接，所述第二牵引线的另一端与所转轴表面固定连接。
在一个实施例中，所述第二牵引线与所述第一端面平行。
本申请还提出了一种吸附系统，包括机械臂和所述吸附装置，所述机械臂具有用于抓取物体的手爪，所述底座固定在所述手爪上。
本申请还提出了一种搬运设备，包括导轨、滑设于所述导轨上的动子和所述吸附系统，所述机械臂固定于所述动子上。
 有益效果
本申请吸附装置的有益的效果在于：在吸附装置的第一端面上设置有与该第一端面活动连接的吸嘴，吸嘴的数量不少于三个，吸嘴围设形成受力区域，该吸嘴可以在驱动组件的驱动下调整受力区域面积的大小，如此，当被吸嘴吸附的基板因出现错位或者偏移造成吸嘴无法吸附到基板时，吸嘴可以移动到新的位置来吸附住基板。
 附图说明
为了更清楚地说明本申请实施例中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。
图1为本申请实施例提供的吸附装置的主视示意图一；
图2为本申请实施例提供的吸嘴的主视示意图；
图3为本申请实施例提供的吸嘴的俯视示意图一；
图4为沿图3中A-A线的剖视结构图；
图5为本申请实施例提供的吸嘴的俯视示意图二；
图6为本申请实施例提供的吸嘴的俯视示意图三；
图7为沿图6中B-B线的剖视结构图；
图8为本申请实施例提供的吸附装置的双活塞双作用气缸伸长示意图；
图9为本申请实施例提供的吸附装置的双活塞双作用气缸收缩示意图；
图10为本申请实施例提供的吸附装置的单向伸缩气缸伸长示意图；
图11为本申请实施例提供的吸附装置的单向伸缩气缸收缩示意图；
图12为本申请实施例提供的吸附装置的主视示意图二；
图13为沿图12中C-C线的剖视结构图一；
图14为沿图12中D-D线的剖视结构图；
图15为沿图12中C-C线的剖视结构图二；
图16为本申请实施例提供的吸附装置的主视示意图三；
图17为本申请实施例提供的吸附装置的主视示意图四；
图18为本申请实施例提供的吸附装置的主视示意图五；
图19为本申请实施例提供的吸附装置的主视示意图六；
图20为本申请实施例提供的吸附装置的主视示意图七；
图21为本申请实施例提供的吸附装置的主视示意图八。
 本发明的实施方式
为了使本申请所要解决的技术问题、技术方案及有益效果更加清楚明白，以下结合附图及实施例，对本申请进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本申请，并不用于限定本申请。
需要说明的是，当元件被称为“固定于”或“设置于”另一个元件，它可以直接在另一个元件上或者间接在该另一个元件上。当一个元件被称为是“连接于”另一个元件，它可以是直接连接到另一个元件或间接连接至该另一个元件上。
需要理解的是，术语“长度”、“宽度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。
请一并参阅图1至图4、图8、图9和图16，现对本申请提供的吸附装置1进行说明。吸附装置1，包括：
底座11，底座11具有第一端面112；
吸嘴12，吸嘴12设置于第一端面112上，吸嘴12的数量为至少三个，至少三个吸嘴12围设形成受力区域（未图示）；
驱动组件（未图示），用于调整受力区域面积大小，驱动组件固定于底座11上。
通过在其第一端面112上设置有与该第一端面112活动连接的吸嘴12，吸嘴12的数量为至少三个，上述至少三个吸嘴12围设形成受力区域，该吸嘴12可以在驱动组件的驱动下调整受力区域面积的大小，如此，当被吸附的基板（未图示）因出现错位或者偏移造成吸嘴12无法吸附到基板时，吸嘴12可以移动到新的位置来吸附住基板。
吸嘴12是用于吸附基板的。
可选地，该第一端面112为平面，当然，在其他实施例中，第一端面112还可以为曲面或者其他形状，只要不影响吸嘴12的活动以及吸嘴12可以正常吸附基板即可，此处不作唯一限定。
可选地，图1至图4、图8、图9和图16，作为本申请提供的吸附装置1的一种具体实施方式，吸嘴12的数量为四个，受力区域为矩形。受力区域的形状可选为矩形，大部分基板都是切割呈矩形，有利于吸附装置1将基板吸附住。当然，受力区域还可以为其他形状，只要不影响吸嘴12的活动以及吸嘴12可以正常吸附基板即可，此处不作唯一限定。
在本实施例中，可选地，吸嘴12的数量为4个，其中2个为一组，一共2组，且该4个吸嘴12围设形成一个矩形，如此可以较为稳定地吸附基板，同时吸嘴12的数量也比较少，节省了成本。当然，在其他实施例中，吸嘴12的数量还可以为不少于3个的其他数量，只要能够将基板吸附住即可，此处不作唯一限定。
进一步地，请参阅图2和图5，作为本申请提供的吸附装置1的一种具体实施方式，还包括：
吸气装置（未图示）；
吸气管（未图示），用于将气体传输至吸气装置，吸嘴12上设置有进气孔1212，吸气管与进气孔1212相连通。
如此，气体从进气孔1212中经过吸气管进入吸气装置，可以在吸盘121处产生吸力，当吸盘121与基板接触时，该吸力增加了吸盘121与基板之间的吸附强度。
进一步地，请一并参阅图6至图7，吸嘴12是一个中空的圆柱体，其中该圆柱体的一端与基板接触，该圆柱体的中空管道充当进气孔1212。当然，在其他实施例中，只要能够通过将气体吸入进气孔1212而将基板吸附在吸嘴12上即可，此处不作唯一限定。
进一步地，请参阅图2，作为本申请提供的吸附装置1的一种具体实施方式，吸嘴12具有吸盘121。如此，吸盘121可以将基板吸附得更牢固。
进一步地，请参阅图5，作为本申请提供的吸附装置1的一种具体实施方式，吸盘121的一端往内侧凹陷形成第一容置腔1211，进气孔1212与第一容置腔1211相连通。如此，吸盘121具有第一容置腔1211，可以在吸盘121与基板之间挤压并发生形变的过程中，第一容置腔1211中的部分空气将会被挤压出来，当吸盘121与基板之间由挤压变成拉伸的过程中，第一容置腔1211中的气压低于外界的气压，使得大气压将吸盘121牢牢固定在基板上，大大增强了吸盘121与基板之间的吸附能力。进气孔1212与第一容置腔1211是连通的，使得第一容置腔1211中的气体能够进一步通过进气孔1212排出至吸气装置，进一步降低了第一容置腔1211中的气压，增强了吸盘121与基板之间的吸附力。
可选的，吸盘121采用可弹性形变的材料制成，该吸盘121与基板接触的时候，不会伤到基板，同时吸盘121还可以充当吸嘴12与基板之间的缓冲件，减少吸嘴12伤到基板的概率。可选地，吸盘121具有吸附性的表面，便于吸盘121吸附住基板，增强了吸盘121与基板之间吸附的牢固性。
进一步地，请参阅图5，作为本申请提供的吸附装置1的一种具体实施方式，第一容置腔1211的侧壁上开设有通气孔（未图示），通气孔与进气孔1212相连通。如此，第一容置腔1211中的气体可以依次通过通气孔和进气孔1212进入到吸气装置中。
可选地，请参阅图5，作为本申请提供的吸附装置1的一种具体实施方式，第一容置腔1211的内侧面为球面。如此，第一容置腔1211的内侧面采用球面的结构，使得吸盘121吸附基板时，该球面结构增强了吸盘121的复原能力，复原能力的增强可以增强吸盘121的吸力。
进一步地，请参阅图12至图15，作为本申请提供的吸附装置1的一种具体实施方式，第一端面112开设有滑槽111，滑槽111具有第一槽壁（未图示）、与第一槽壁相对的第二槽壁（未图示）以及连接第一槽壁和第二槽壁的底板（未图示），第一槽壁往滑槽111内侧延伸形成第一延伸板1111和第二槽壁往滑槽111内侧延伸形成第二延伸板1112，第一延伸板1111和第二延伸板1112之间具有狭缝1113，狭缝1113的延伸方向与滑槽111的延伸方向相同；
滑槽111、第一延伸板1111和第二延伸板1112围设形成第二容置腔；
吸嘴12上设置有与狭缝1113适配的固定板124，第二容置腔内设置有沿着滑槽111滑动的滑动块122，固定板124穿设于狭缝1113并与滑动块122固定连接。
如此，滑动块122在第二容置腔1114内滑动，吸嘴12通过固定板124固定在滑动块122上，滑动块122在滑动的过程中被限制在第二容置腔1114内并可沿滑槽111的延伸方向滑动，吸嘴12在滑动块122的限制下不会出现与底板之间出现相互脱离的情况，保障了吸嘴12在运动过程中的稳定性。
可选地，请参阅图12至图15，作为本申请提供的吸附装置1的一种具体实施方式，固定板124的厚度与狭缝1113的宽度相同。可以避免滑动块122在滑动的过程中脱离出第二容置腔114。滑动块122所能晃动的区域被限制在第二容置腔1114的范围内，请参考图13，如果第二容置腔1114的横截面积和滑动块122的横截面积是一样的，则滑动块122在运行过程中不会出现晃动。与此同时，当吸嘴12吸附基板的一端朝下吸住基板的时候，吸嘴12的压力会被施加在第一延伸板1111和第二延伸板1112上，即第一延伸板1111和第二延伸板1112在这种情况下还起到支撑的作用。
可选地，请参阅图2和图5，作为本申请提供的吸附装置1的一种具体实施方式，第二容置腔1114的横截面为矩形。如此，滑动块122在第二容置腔1114中滑动的时候，不容易出现晃动。
进一步地，请参阅图12至图15，作为本申请提供的吸附装置1的一种具体实施方式，滑动块122与滑槽111之间设置有滚珠123。如此，滑动块122在第二容置腔1114中滑动的时候，滚珠123极大得减小了滑动块122第二容置腔1114内壁之间的摩擦力。可选地，滚珠123活动连接于滑动块122。
进一步地，请参阅图12至图15，作为本申请提供的吸附装置1的一种具体实施方式，所述滚珠123的数量为多个，且多个滚珠123均匀分布于滑动块122与底板之间。如此，滑动块122在第二容置腔1114中滑动的时候，均匀分布于滑动块122与底板之间的滚珠123避免了滑动块122的震动。
进一步地，请参阅图8、图9或图12，作为本申请提供的吸附装置1的一种具体实施方式，驱动组件为双活塞双作用气缸13，双活塞双作用气缸13具有相互独立伸缩或者同步伸缩的第一伸缩端131和第二伸缩端132，第一伸缩端131上设置有一个吸嘴12和/或第二伸缩端132上设置有一个吸嘴12。
如此，本实施例中，采用双活塞双作用气缸13，同时可以控制两个吸嘴12的运动，节省了成本，当然在其他实施例中，请参阅图10或图11，还可以为多个单向伸缩气缸18，该单向伸缩气缸18具有第四伸缩端181。如此，可以单独地控制每一个吸嘴12。
在本实施例中，吸嘴12固定在双活塞双作用气缸13的第一伸缩端131和/或第二伸缩端132，通过双活塞双作用气缸13控制第一伸缩端131和/或第二伸缩端132的运动，可以有效控制吸嘴12所在的位置，控制过程也十分简便，有利于生产。
进一步地，请参阅图16，作为本申请提供的吸附装置1的一种具体实施方式，还包括复位弹簧14，复位弹簧14的一端与吸嘴12固定连接，复位弹簧14的另一端固定于底座11上。
如此，复位弹簧14可以使得发生位移的吸嘴12回到原来的位置，不需要额外的装置，结构简单，便于生产，压低了成本，在本实施例中，复位弹簧14是固定在底座11上，在其他实施例中，请一并参阅图17、图19或图21，分别作为本申请提供的吸附装置1的一种具体实施方式，还可以在底座11上设置固定柱19，复位弹簧14的一端固定在固定柱19上，复位弹簧14的另一端固定于吸嘴12上，可选地，复位弹簧14与第一端面112平行，如此吸嘴12在运行的过程中，不会因为复位弹簧14与第一端面112之间有一定的夹角而产生一个将吸嘴12按压在第一端面112上的力，减少了吸嘴12与第一端面112之间的摩擦力。在其他实施例中，复位弹簧14的拉伸方向与滑槽111平行，如此可以避免复位弹簧14对吸嘴12在狭缝1113宽度方向上产生的力，从而减少了吸嘴12与底座11之间的摩擦力。
进一步地，请参阅图2和图5，作为本申请提供的吸附装置1的一种具体实施方式，驱动组件位于复位弹簧14的伸缩方向上。在本实施例中，驱动组件位于复位弹簧14的伸缩方向上，便于复位弹簧14牵引吸嘴12恢复到起始位置，此处的起始位置指的是驱动组件改变受力区域之前吸嘴12所在的位置。
进一步地，请参阅图16或图17，作为本申请提供的吸附装置1的一种具体实施方式，还包括用于牵引吸嘴12移动的第一牵引线153，底座11上设置有开孔114，在开孔114边缘的第一端面112上设置有与吸嘴12数量一一对应的用于将第一牵引线153的牵引方向转向的定轮装置15，定轮装置15包括固定于第一端面112上的支架151和固定于支架151上且与支架151活动连接的转轮152，转轮152具有用于放置第一牵引线153的线槽；
底座11上与第一端面112相对的第二端面113上固定有单向气缸16，单向气缸16往一侧端方向延伸形成有可伸缩的第三伸缩端161，第三伸缩端161穿设于开孔114且第三伸缩端161在伸长状态下离第一端面112的距离小于转轮152离第一端面112的距离；
第一牵引线153的一端与吸嘴12固定连接，第一牵引线153另一端与第三伸缩端161固定连接，第一牵引线153卡设于线槽中且第一牵引线153与转轮152活动连接。
如此，定轮装置15上的转轮152起到了第一牵引线153转向的作用。当第三伸缩端161伸长的时候，复位弹簧14开始收缩，复位弹簧14拉动吸嘴12和第一牵引线153往复位弹簧14的收缩方向移动，从而实现了吸嘴12围成的受力区域的扩大。当第三伸缩端161收缩的时候，第三伸缩端161拉动第一牵引线153往第三伸缩端161移动，同时，吸嘴12在第一牵引线153的拉动下沿着滑槽111往转轮152方向移动，从而实现了吸嘴12围成的受力区域的减小。
一个单向气缸16就可以同时控制多个吸嘴12的运动，节省了所需气缸的数量。
第三伸缩端161穿设于开孔114且第三伸缩端161在伸长状态下离第一端面112的距离小于转轮152离第一端面112的距离，使得第三伸缩端161无论是在伸出还是收缩的时候，连接于吸嘴12与第三伸缩端161上的第一牵引线153始终能够抵接在转轮152上。
进一步地，请参阅图20至图21，作为本申请提供的吸附装置1的一种具体实施方式，还包括第二牵引线154，受力区域中的第一端面112上固定有一个电机17，电机17具有往第一端面112外侧延伸的转轴171，转轴171垂直于第一端面112，第二牵引线154的一端与吸嘴12固定连接，第二牵引线154的另一端与所转轴171表面固定连接。
如此，第二牵引线154固定在转轴171表面，在初始位置（第二牵引线154没有缠绕在转轴171上）转轴171往任意一个方向旋转，假设初始旋转方向是逆时针旋转方向，第二牵引线154开始缠绕在转轴171上，复位弹簧14被拉伸，受力区域变小，当转轴171由逆时针方向变为顺时针方向旋转的时候，复位弹簧14收缩，受力区域增大；同样，在初始位置，假设初始旋转方向是顺时针旋转方向，第二牵引线154开始缠绕在转轴171上，复位弹簧14被拉伸，受力区域变小，当转轴171由顺时针方向变为逆时针方向旋转的时候，复位弹簧14收缩，受力区域增大。
在本实施例中，一个电机17就可以控制多个吸嘴12的运动，即电机17控制了受力区域面积的扩大和缩小。同时，转轴171通过转不同的角度，可以较大范围且连续性地控制吸嘴12的运动行程，非常方便地改变区域面积的大小。
进一步地，请参阅图20至图21，作为本申请提供的吸附装置1的一种具体实施方式，第二牵引线154与第一端面112平行。如此，第二牵引线154在牵引吸嘴12运动的过程中，吸嘴12只会受到一个与第一端面112平行的力。避免了在与第一端面112垂直的方向上，出现吸嘴12靠近并抵接在第一端面112上增加阻力，或者远离第一端面112而出现因为吸嘴12与第一端面112之间的距离过远而影响到吸嘴12吸附基板的稳定性。
进一步地，请一并参阅图19，作为本申请提供的吸附装置1的一种具体实施方式，底座11上设置固定柱19，复位弹簧14的一端固定在固定柱19上，复位弹簧14的另一端与吸嘴12上，还包括第二牵引线154，第二端面113上固定有电机17，电机17，电机17具有转轴171，转轴171穿设于开孔114，第二牵引线154的一端与吸嘴12固定连接，第二牵引线154的另一端与所转轴171表面固定连接。
如此，电机17不需要占用第一端面112上的空间，避免了电机17出现碰到基板而损坏基板的情况。第二牵引线154固定在转轴171表面，在初始位置（第二牵引线154没有缠绕在转轴171上）转轴171往任意一个方向旋转，假设初始旋转方向是逆时针旋转方向，第二牵引线154开始缠绕在转轴171上，复位弹簧14被拉伸，受力区域变小，当转轴171由逆时针方向变为顺时针方向旋转的时候，复位弹簧14收缩，受力区域增大；同样，在初始位置，假设初始旋转方向是顺时针旋转方向，第二牵引线154开始缠绕在转轴171上，复位弹簧14被拉伸，受力区域变小，当转轴171由顺时针方向变为逆时针方向旋转的时候，复位弹簧14收缩，受力区域增大。当然在图18中，弹簧的一端是直接固定在第一端面112上的。
在本实施例中，一个电机17就可以控制多个吸嘴12的运动，即控制了受力区域面积的扩大和缩小。同时，转轴171通过转不同的角度，可以较大范围且连续性地控制吸嘴12的运动行程，非常方便地改变区域面积的大小。
请参阅图1至图4、图8、图9和图16，本申请还提出了一种吸附系统（未图示），包括机械臂（未图示）和吸附装置1，机械臂具有用于抓取物体的手爪（未图示），底座11固定在手爪上。
本申请提供的吸附系统的效果在于：由于采用了上述吸附装置1，本申请吸附装置1在其第一端面112上设置有与该第一端面112活动连接的吸嘴12，吸嘴12的数量不少于三个，吸嘴12围设形成受力区域，该吸嘴12可以在驱动组件的驱动下调整受力区域面积的大小，如此，当被吸嘴12吸附的基板因出现错位或者偏移造成吸嘴12无法吸附到基板时，吸嘴12可以移动到新的位置来吸附住基板。
可选地，手爪具有可以转动的至少一个自由度。如此，手爪能够非常灵活地抓取底座11并转移底座11的位置。
请参阅图1至图4、图8、图9和图16，本申请还提出了一种搬运设备（未图示），包括导轨、滑设于导轨上的动子和吸附系统，机械臂固定于动子上。
本申请提供的搬运设备的效果在于：由于采用了上述吸附系统，本申请吸附装置1在其第一端面112上设置有与该第一端面112活动连接的吸嘴12，吸嘴12的数量不少于三个，吸嘴12围设形成受力区域，该吸嘴12可以在驱动组件的驱动下调整受力区域面积的大小，如此，当被吸嘴12吸附的基板因出现错位或者偏移造成吸嘴12无法吸附到基板时，吸嘴12可以移动到新的位置来吸附住基板。在本实施例中，机械臂固定在动子上，使得动子可以将机械臂沿着导轨运动，非常方便。
以上所述仅为本申请的较佳实施例而已，并不用以限制本申请，凡在本申请的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本申请的保护范围之内。

Claims (20)

  1. 一种吸附装置，包括：
    底座，所述底座具有第一端面；
    吸嘴，所述吸嘴设置于所述第一端面上，所述吸嘴的数量为至少三个，至少三个所述吸嘴围设形成受力区域；
    驱动组件，用于调整所述受力区域面积大小，所述驱动组件固定于所述底座上。
  2. 如权利要求1所述的一种吸附装置，所述吸嘴的数量为四个，四个所述吸嘴围成的所述受力区域为矩形。
  3. 如权利要求1所述的一种吸附装置，还包括：
    吸气装置；
    吸气管，用于将气体传输至所述吸气装置，所述吸嘴上设置有进气孔，所述吸气管与所述进气孔相连通。
  4. 如权利要求3所述的一种吸附装置，所述吸嘴具有吸盘。
  5. 如权利要求4所述的一种吸附装置，所述吸盘的一端往内侧凹陷形成第一容置腔，所述进气孔与所述第一容置腔相连通。
  6. 如权利要求5所述的一种吸附装置，所述第一容置腔的侧壁上开设有通气孔，所述通气孔与所述进气孔相连通。
  7. 如权利要求5所述的一种吸附装置，所述第一容置腔的内侧面为球面。
  8. 如权利要求1所述的一种吸附装置，所述第一端面开设有滑槽，所述滑槽具有第一槽壁、与所述第一槽壁相对的第二槽壁以及连接所述第一槽壁和所述第二槽壁的底板，所述第一槽壁往所述滑槽内侧延伸形成第一延伸板和所述第二槽壁往所述滑槽内侧延伸形成第二延伸板，所述第一延伸板和所述第二延伸板之间具有狭缝，所述狭缝的延伸方向与所述滑槽的延伸方向相同；
    所述滑槽、所述第一延伸板和所述第二延伸板围设形成第二容置腔；
    所述吸嘴上设置有与所述狭缝适配的固定板，所述第二容置腔内设置有沿着所述滑槽滑动的滑动块，所述固定板穿设于所述狭缝并与所述滑动块固定连接。
  9. 如权利要求8所述的一种吸附装置，所述固定板的厚度与所述狭缝的宽度相同。
  10. 如权利要求8所述的一种吸附装置，所述第二容置腔的横截面为矩形。
  11. 如权利要求8所述的一种吸附装置，所述滑动块与所述滑槽的内壁之间设置有滚珠。
  12. 如权利要求11所述的一种吸附装置，所述滚珠的数量为多个，且多个所述滚珠均匀分布于所述滑动块与所述底板之间。
  13. 如权利要求1所述的一种吸附装置，所述驱动组件为双活塞双作用气缸，所述双活塞双作用气缸具有相互独立伸缩或者同步伸缩的第一伸缩端和第二伸缩端，所述第一伸缩端上设置有一个所述吸嘴和/或所述第二伸缩端上设置有一个所述吸嘴。
  14. 如权利要求1所述的一种吸附装置，还包括复位弹簧，所述复位弹簧的一端与所述吸嘴固定连接，所述复位弹簧的另一端固定于所述底座上。
  15. 如权利要求14所述的一种吸附装置，所述驱动组件位于所述复位弹簧的伸缩方向上。
  16. 如权利要求14所述的一种吸附装置，还包括用于牵引所述吸嘴移动的第一牵引线，所述底座上设置有开孔，在所述开孔边缘的所述第一端面上设置有与所述吸嘴数量一一对应的用于将所述第一牵引线的牵引方向转向的定轮装置，所述定轮装置包括固定于所述第一端面上的支架和固定于所述支架上且与所述支架活动连接的转轮，所述转轮具有用于放置所述第一牵引线的线槽；
    所述底座上与所述第一端面相对的第二端面上固定有单向气缸，所述单向气缸往一侧端方向延伸形成有可伸缩的第三伸缩端，所述第三伸缩端穿设于所述开孔且所述第三伸缩端在伸长状态下离所述第一端面的距离小于所述转轮离所述第一端面的距离；
    所述第一牵引线的一端与所述吸嘴固定连接，所述第一牵引线另一端与所述第三伸缩端固定连接，所述第一牵引线卡设于所述线槽中且所述第一牵引线与所述转轮活动连接。
  17. 如权利要求14所述的一种吸附装置，还包括第二牵引线，所述受力区域中的所述第一端面上固定有一个电机，所述电机具有往所述第一端面外侧延伸的转轴，所述转轴垂直于所述第一端面，所述第二牵引线的一端与所述吸嘴固定连接，所述第二牵引线的另一端与所转轴表面固定连接。
  18. 如权利要求17所述的一种吸附装置，所述第二牵引线与所述第一端面平行。
  19. 一种吸附系统，包括机械臂和权利要求1所述的一种吸附装置，所述机械臂具有用于抓取物体的手爪，所述底座固定在所述手爪上。
  20. 一种搬运设备，包括导轨、滑设于所述导轨上的动子和权利要求19所述的一种吸附系统，所述机械臂固定于所述动子上。
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