WO2019058434A1 - Measurement device - Google Patents

Measurement device Download PDF

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Publication number
WO2019058434A1
WO2019058434A1 PCT/JP2017/033766 JP2017033766W WO2019058434A1 WO 2019058434 A1 WO2019058434 A1 WO 2019058434A1 JP 2017033766 W JP2017033766 W JP 2017033766W WO 2019058434 A1 WO2019058434 A1 WO 2019058434A1
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WIPO (PCT)
Prior art keywords
electrodes
component
measurement
pair
wires
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PCT/JP2017/033766
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French (fr)
Japanese (ja)
Inventor
利幸 澤田
Original Assignee
株式会社Ｆｕｊｉ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 株式会社Ｆｕｊｉ filed Critical 株式会社Ｆｕｊｉ
Priority to JP2019542847A priority Critical patent/JP6852171B2/en
Priority to PCT/JP2017/033766 priority patent/WO2019058434A1/en
Publication of WO2019058434A1 publication Critical patent/WO2019058434A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer

Definitions

  • the present disclosure relates to a measurement device that measures the electrical characteristics of a component mounted on a circuit board.
  • FIGS. 1 and 2 of Patent Document 1 there is described a measurement apparatus including one measurement electrode composed of two long shape probes.
  • the pair of measurement electrodes are provided in a state of being protruded from the upper surface of the XY table of the measurement apparatus.
  • a component is moved to a pair of measurement electrodes by an insulating nozzle which is a nozzle manufactured from a material having an insulating property, and two component electrodes each of which are a pair of electrodes of the component To be touched. Thereby, the electrical properties of the component are measured.
  • the measuring electrodes each include two probes and two probe blocks respectively holding the two probes.
  • each of the measurement electrodes one of the two probes is held by the probe block via an elastic member.
  • the movement of the slide block causes two probes to be brought close to the component held by the insulating nozzle and brought into contact with the component electrodes. Thereby, the electrical properties of the component are measured.
  • An object of the present disclosure is a measuring device provided with a measurement electrode to which each of the component electrodes can contact even if each of the component electrodes has a round shape.
  • the aim is to obtain a measuring device which has a different structure than the measuring device described.
  • each of the pair of measurement electrodes includes a plurality of wires.
  • the plurality of wires are elastically deformed when the part is pressed against each of the pair of measurement electrodes. Therefore, even when each of the component electrodes has a round shape, each of the component electrodes can be stably brought into contact with at least one of the plurality of wires.
  • the structure of the measuring device according to the present disclosure is different from the structure of the measuring device shown in FIGS. 1 and 2 of Patent Document 1 and the structure of the measuring device shown in FIGS.
  • FIG. 1 is a perspective view of a placement machine including a measurement device that is an embodiment of the present disclosure. It is a perspective view of the above-mentioned measuring device. It is a perspective view (conceptual view) of parts measured by the above-mentioned measuring device. It is a front view (conceptual view) of the above-mentioned part. It is a perspective view which shows the principal part of the said measuring apparatus. It is a partial cross section figure of the above-mentioned measuring device. It is a figure which shows the periphery of the control apparatus of the said mounting machine.
  • the mounting machine shown in FIG. 1 mounts the component s on the circuit board P, and includes an apparatus body 2, a circuit board transport / holding device 4, a component supply device 6, a head moving device 8 and the like.
  • the circuit board transport holding device 4 transports and holds a circuit board P (hereinafter referred to as a substrate P), and in FIG. 1, the transport direction of the substrate P is the x direction, and the width direction of the substrate P is the y The thickness direction of the substrate P is taken as the z direction.
  • the y direction and the z direction are the front-rear direction and the up-down direction of the mounting machine, respectively.
  • the x direction, the y direction, and the z direction are orthogonal to one another.
  • the component supply device 6 supplies an electronic component (hereinafter referred to as a component) s mounted on the substrate P, and includes a plurality of tape feeders 14 in the present embodiment.
  • the head moving device 8 holds the mounting head 16 as a working head and moves it in the x, y and z directions, and the mounting head 16 has a suction nozzle 18 for suctioning and holding the component s.
  • the mounting head 16 has a function of selectively supplying a negative pressure and a positive pressure to the tip of the suction nozzle 18.
  • symbol 20 shows a camera.
  • the camera 20 picks up an image of the component s held by the suction nozzle 18, and based on the image picked up by the camera 20, it is determined whether or not the component s is to be mounted on the substrate P Be done.
  • symbol 22 shows a nozzle station.
  • the nozzle station 22 accommodates a plurality of suction nozzles including an insulation nozzle 24 (see FIG. 5) which is a suction nozzle made of an insulating material which is an insulating material, and is replaced as appropriate.
  • Reference numeral 26 denotes a measuring device.
  • the measuring device 26 measures the electrical characteristics of the component s, and is provided on the main body of the circuit board transport and holding device 4 via the trash can 28.
  • L inductance
  • C capacitor
  • R resistance
  • Z '(impedance) and the like correspond, and one or more of these are measured by the measuring device 26.
  • the part s whose electrical characteristics are to be measured in the present measuring device 26 is a square chip having a functional part p provided in the middle part and a part electrode q provided at both ends as shown in FIG. is there.
  • the functional part p is covered with an insulating material on the outside.
  • the direction in which the component electrodes q are provided at both ends is referred to as the longitudinal direction.
  • the orthogonal direction is referred to as the width direction.
  • the length L in the longitudinal direction is not necessarily longer than the length M in the width direction.
  • the part s has a plurality of sizes in which at least one of the longitudinal length L and the widthwise length M is different.
  • the component electrode q of the component s may form a round shape as shown in FIG.
  • the component electrode q may form a round shape due to manufacturing convenience of the component s.
  • the measuring device 26 includes a plurality of measurement electrode pairs 46 configured of measurement electrodes 42 and 44 which are a pair of electrodes.
  • the measurement electrode pairs 46 are respectively provided in a plurality of concave portions 49 provided on the upper surface (xy plane) of the measurement stand 48.
  • Each of the measurement electrodes 42 and 44 includes a plurality of wires 50 and a holding portion 52 for holding the plurality of wires 50.
  • Each of the plurality of wires 50 and the holding portion 52 are each made of a material that can function as an electrode.
  • Each of the plurality of wires 50 is flexible, that is, flexible enough to be elastically deformed by contact with the component s.
  • the holding portion 52 has a generally disk shape and is rigid.
  • the plurality of wires 50 are provided in a posture extending substantially perpendicularly to the end face 52s of the holding portion 52 in a state of covering the end face 52s of the holding portion 52.
  • the plurality of wires 50 are not provided side by side in a single row, but are provided in a plurality of rows or in a planar (two-dimensional) manner.
  • the measurement electrodes 42 and 44 include a bundle of the wires 50, and as shown in FIGS. 5 and 6, generally have a brush shape.
  • each of the plurality of wires 50 has approximately the same length and approximately the same thickness.
  • Each of the plurality of wires 50 can be, for example, one having a diameter of 0.02 to 0.06 mm, desirably one having a diameter of 0.03 to 0.05 mm.
  • each of the measurement electrodes 42 and 44 can include, for example, several tens to several tens of thousands of wires 50, and desirably several tens to several thousands (for example, 20 to 9,000). It can be Furthermore, desirably, 50 to 3000 can be included.
  • the wire 50 has a density 400/1 mm 2 or more, it is desirable to provide in 1800/1 mm 2 or less.
  • lead wires 54 and 56 are connected to the holding portions 52 of the measurement electrodes 42 and 44, respectively, and the power supply 60 is connected to one of the lead wires 54 and 56 (in the present embodiment, the lead wire 54).
  • the other (the lead wire 56 in this embodiment) is grounded, and an LCR measurement unit 62 as a measurement unit is provided between the lead wires 54 and 56.
  • the measurement electrode 42 is an anode, and the measurement electrode 42 is a cathode 44.
  • each of the plurality of wires 50 and the holding portion 52 is made of a material that can function as an electrode, at least one of the plurality of wires 50 in each of the measurement electrodes 42 and 44 When the component electrode q of the component s contacts, a current can be supplied to the component s, and the LCR measurement unit 62 can measure the electrical characteristics of the component s.
  • the size of each of the measurement electrodes 42 and 44 (for example, when the holding portion 52 has a generally disc shape, the distance r from the center of the holding portion 52 to the shortest wire 50)
  • the distance d (e.g., the distance between the centers of the measurement electrodes 42 and 44) may be determined based on the size of the part s to be measured and the like.
  • the size r and the distance d of each of the measurement electrodes 42 and 44 are the same as those of the component electrodes q of the components s of a plurality of sizes for which the electrical characteristics are to be measured. It is designed to contact at least one of the constituent wires 50.
  • the measuring apparatus shown in FIG. 6 consider a part s whose electrical characteristics can be measured.
  • the electric characteristics of the parts s not less than the parts s indicated by the two-dot chain line and the parts not larger than the part s It can be measured.
  • the part s shown by the two-dot chain line has a length L in the longitudinal direction larger by a set value ⁇ a or more than a value (d ⁇ 2r) obtained by subtracting twice the size r from the interval d, as shown in equation (1) It is part s.
  • each of the component electrodes q is for measurement It is possible to contact at least one of the plurality of wires 50 of the electrodes 42 and 44.
  • the component s indicated by the broken line has a value (L-2N) obtained by subtracting twice the length N of the component electrode q from the length L in the longitudinal direction, as shown in the equation (2), with a size r
  • the component s is smaller by a set value ⁇ b or more than a value (d + 2r) obtained by adding 2 times the value of d.
  • the component electrode q Of each of the plurality of wires 50 of the measurement electrodes 42 and 44 can be brought into contact with each other.
  • L-2 N ⁇ d + 2 r- ⁇ b (2)
  • the set values ⁇ a and ⁇ b are margin values for the wire 50 to be in good contact with the component electrode q.
  • a plurality of pairs (3 pairs in the present embodiment) of measuring electrodes 46a, b, c having different sizes r and intervals d are provided.
  • provision of three measurement electrode pairs 46 enables electrical characteristics to be determined in many sizes (each of the measurement electrode pairs 46a, b and c). If the sizes of the measurable parts s do not overlap, it becomes possible to measure the electrical characteristics of the parts s of six or more different sizes).
  • the component s when measuring the electrical characteristics, the component s is pressed against the wire 50, but since the wire 50 is flexible, it is elastically deformed. Thereby, even if each of the component electrodes q has a round shape, and even if the component s is small, at least one of the plurality of wires 50 is added to each of the component electrodes q. Stable contact. In this case, even if the wire 50 is elastically deformed, the influence on the measured values of the electrical characteristics is small.
  • control device 100 includes a computer-based controller 102 and a plurality of drive circuits 104.
  • the controller 102 includes an execution unit 110, a storage unit 112, an input / output unit 114, and the like.
  • the substrate transport / holding device 4, the component supply device 6, and the head moving device 8 respectively drive circuits 104 in the input / output unit 114. While being connected through, the working head 16, the measuring device 26, the display 116, the camera 20, etc. are connected.
  • the storage unit 112 stores a plurality of programs such as an LCR measurement program represented by the flowchart of FIG. 8 and a table.
  • a timer 124 provided in the controller 102 measures time.
  • step 1 it is determined whether or not a measurement command of the electrical characteristics of the component s has been issued.
  • S2 the part s is pressed against one of the measurement electrode pairs 46a to 46c (for example, the measurement electrode pair 46b) determined by the size of the part s. .
  • the wire 50 is elastically deformed and brought into contact with each of the component electrodes q.
  • the mounting head 16 is moved to the nozzle station 22 and the insulating nozzle 24 is attached.
  • the mounting head 16 is moved to the component feeding device 6, and the component s held by the tape feeder 14 newly attached by the insulating nozzle 24 is picked up. Then, the mounting head 16 is moved to the measurement electrode pair 46 b of the measurement device 26 and lowered. As a result, the component s is pressed against the measurement electrode pair 46b.
  • the charge removal time is the time required to remove static electricity of a capacity that is estimated to be possessed by part s, and is determined beforehand by experiment etc., or theoretically based on the size of part s, characteristics, etc. Can do things like
  • the component s is held by the insulating nozzle 24, static elimination is not performed via the insulating nozzle 24.
  • the measurement electrode 44 since the measurement electrode 44 is grounded, the charge stored in the component s is released through the measurement electrode 44 and the charge is removed.
  • a voltage is applied between the measurement electrodes 42 and 44 in S4, the current is measured by the LCR measurement unit 62, and the electrical characteristics of the component s are determined. . L, C, R and the like can be obtained based on the voltage applied between the measurement electrodes 42 and 44, the current flowing, and the like.
  • the mounting head 16 is moved to the substrate P with the component s held by the insulating nozzle 24, and the component s is mounted. If the measured value and the standard value do not match, the part s is discarded to the trash can 28 in S7. If the measured value and the standard value substantially match, the part s is appropriate, and therefore, it is less necessary to discard the part s.
  • the insulating nozzle 24 is used, the charge amount of the component s is small because the charge is removed in S3. Therefore, the component s can be used for mounting on the substrate P.
  • each of the measurement electrode pairs 46 includes the plurality of wires 50 provided in a planar manner (x direction and y direction), even if there is an error in the length L of the component s, the insulating nozzle Even if there is an error in the position 24, the component electrode q can be stably brought into contact with at least one wire 50 of each of the measurement electrodes 42 and 44. For example, each of the component electrodes q can be easily brought into contact with the measurement electrode pair 46 as compared with a measurement device in which the measurement electrode is configured of one needle-like probe.
  • the measurement electrodes 42 and 44 include the plurality of flexible wires 50, the wire 50 is elastically deformed by pressing the component s. Thereby, even if the component electrode q has a round shape or the component s is small, at least one wire 50 can be stably brought into contact with each of the component electrodes q.
  • each of the plurality of wires 50 included in each of the measurement electrodes 42 and 44 it is not indispensable to make each of the plurality of wires 50 included in each of the measurement electrodes 42 and 44 into the same thickness and the same length. At least one of the thickness and the length can be different between a part of the plurality of wires 50 and the other part.
  • each of the measuring electrodes 120 and 122 includes a plurality of wires 124 and a holding portion 126 for holding a plurality of wires 124.
  • the protruding length from the end face 126s of the holding portion 126 is made longer than the wire 124b located at the periphery of the wire 124a located.
  • the wire 124a located at the central portion and having a long projecting length from the end face 126s can be thinner than the wire 124b located at the periphery and having a short projecting length from the end face 126.
  • the density in the central part can be higher than in the peripheral part.
  • the central portion is, for example, a portion having a radius of 0.6r or less of the radius r of the holding portion 126, a portion of 0.5r or less, a portion of 0.4r or less, a portion of 0.3r or less, 0.2r.
  • each of the measuring electrodes 130 and 132 includes a plurality of wires 134 and a holding portion 136 for holding a plurality of wires 134, but among the plurality of wires 134, The protruding length of the holding portion 136 from the end face 136s is shorter than that of the wire 134b positioned at the periphery of the positioned wire 134a.
  • the wires 124b located at the periphery can be thinner than the wires 124a located at the center.
  • each of the measurement electrodes 140 and 142 includes a plurality of wires 144 and a holder 146 for holding the wires 144.
  • Each holding portion 146 has a stepped shape having a large diameter portion 146 b and a small diameter portion 146 s.
  • a stepped hole 150 having a large diameter hole 150b and a small diameter hole 150s is formed in the central portion of the recess 49 of the measurement table 48, and the small diameter portion 146s of the holding portion 146 is The small diameter hole portion 150s is slidably fitted.
  • the measurement electrodes 140 and 142 are elastically held in the vertical direction.
  • the plurality of wires may be arranged in a row with respect to the holding portion.
  • the end face of the holder may be polygonal.
  • each of the three measurement electrode pairs 46a, b, c be designed to be able to measure the electrical characteristics of the components s of a plurality of sizes, and the three measurement electrode pairs 46a, One or two of b and c measurement electrode pairs may be designed to measure the electrical characteristics of one size of the component s.
  • the plurality of recesses 49 opened on the upper surface of the measurement table 48 can be provided with a function as a guide when pressing the component s, and the side wall of the recess 49 is matched to the components s of multiple sizes It can be provided in position.
  • the provision of the recess 49 is not essential, and the measurement electrode pair 46 can be provided so as to project upward from the top surface of the measurement table 48.
  • the measurement electrode pair 46 can be provided so as to be movable in the vertical direction or in the lateral direction.
  • the measurement electrode pair 46 including a plurality of wires can be brought close to contact with the part electrode q. Also in this case, since the wire is flexible, the wire can be brought into stable contact with the component electrode q.
  • step of S3 is not essential.
  • the present disclosure can be variously modified and improved based on the knowledge of those skilled in the art, in addition to the aspects described in the above embodiments. It can be implemented in a form.
  • a mounting machine which picks up a component supplied by a component supply device and mounts it on a circuit board, and a pair of measurement electrodes, which are a pair of electrodes, is a pair of electrodes of the component.
  • a measuring device for measuring an electrical property of a component by bringing a component electrode into contact with the component electrode A measuring apparatus, wherein each of the pair of measuring electrodes includes a plurality of wires.
  • each of the pair of measuring electrodes generally has a brush shape.
  • Each of the pair of measurement electrodes includes a holder that holds the plurality of wires, and the measurement device is provided between the pair of holders, and the electrical characteristic of the part is measured.
  • the measurement device according to any one of (1) to (3), which includes a measurement unit that measures
  • each of the plurality of wires is nonuniform in each of the pair of measurement electrodes. If the material from which the wire is made is the same, it will be more susceptible to elastic deformation if the wire is thin than if it is thick. For example, a long protruding wire can be thinner than a short protruding wire.
  • the distance between the pair of measurement electrodes is set such that each of the component electrodes of a plurality of sizes of components can contact at least one of the plurality of wires in each of the pair of measurement electrodes.
  • the measuring apparatus according to any one of (1) to (8).
  • Each of the pair of component electrodes can be in contact with at least one wire in each of the pair of measurement electrodes, even if the components have different sizes.
  • the measuring device includes a measuring table provided on the mounting machine, The measuring device according to any one of the items (1) to (11), wherein each of the pair of measuring electrodes is provided so as to protrude from the upper surface of the measuring table.
  • the measuring apparatus includes a measuring table provided on the mounting machine, The measuring apparatus according to any one of (1) to (12), wherein each of the pair of measuring electrodes is provided on the measuring table via an elastic member.
  • the measurement device includes an electrode moving device for moving the pair of measurement electrodes closer to or away from the component. With the component held, the pair of measurement electrodes approaches the component and contacts the pair of component electrodes respectively, whereby the electrical characteristics of the component are measured.
  • the electrode moving device may move the pair of measurement electrodes in the vertical direction or in the lateral direction (x direction or y direction).
  • a mounting machine for picking up components supplied by a component supply device and mounting the components on a circuit board The measurement device according to any one of the items (1) to (14);
  • a work head having an insulation nozzle which is a suction nozzle which can be held by suction and which is made of an insulating material which is a material having insulation properties;
  • a head moving device for moving the working head;
  • a head movement control device that controls movement of the working head by controlling the head movement device; At least one of the pair of measurement electrodes is grounded;
  • the mounting machine includes a working head control unit which causes the insulating nozzle to hold the component while controlling the working head so that the electrical property of the component is measured.
  • the work head control unit is configured by the part that controls the work head 16 of the control device 100 and the like.

Abstract

Provided is a measurement device that is equipped with measurement electrodes that can contact component electrodes even when the component electrodes have a round shape, and that has a different structure from the structure of a measurement device disclosed in Patent Document 1. In this measurement device, a pair of measurement electrodes each include a plurality of wires. When a component is pressed onto the pair of measurement electrodes, the plurality of wires are made to elastically deform. Therefore, each component electrode can be made to stably contact at least one wire out of the plurality of wires even when the component electrodes have a round shape. Furthermore, the structure of the measurement device is different from the structure of the measurement device disclosed in Patent Document 1.

Description

測定装置measuring device
　本開示は、回路基板に装着される部品の電気的特性の測定を行う測定装置に関するものである。 The present disclosure relates to a measurement device that measures the electrical characteristics of a component mounted on a circuit board.
　特許文献１の図１，２には、２つの長手形状を成すプローブから構成された測定用電極を１対含む測定装置が記載されている。１対の測定用電極は測定装置のＸＹテーブルの上面から突出した状態で設けられる。本測定装置において、絶縁性を有する材料で製造されたノズルである絶縁ノズルによって部品が一対の測定用電極へ移動させられ、部品の一対の電極である部品電極が、それぞれ、２つずつのプローブに接触させられる。それにより、部品の電気的特性が測定される。
　特許文献１の図３～５に記載の測定装置において、測定用電極は、それぞれ、２つのプローブと、２つのプローブをそれぞれ保持する２つのプローブブロックとを含む。測定用電極の各々において、２つのプローブのうちの１つは、プローブブロックに弾性部材を介して保持される。本測定装置において、スライドブロックの移動により、２つずつのプローブが、絶縁ノズルに保持された部品に接近させられ、部品電極に接触させられる。それにより、部品の電気的特性が測定される。 In FIGS. 1 and 2 of Patent Document 1, there is described a measurement apparatus including one measurement electrode composed of two long shape probes. The pair of measurement electrodes are provided in a state of being protruded from the upper surface of the XY table of the measurement apparatus. In the present measuring device, a component is moved to a pair of measurement electrodes by an insulating nozzle which is a nozzle manufactured from a material having an insulating property, and two component electrodes each of which are a pair of electrodes of the component To be touched. Thereby, the electrical properties of the component are measured.
In the measuring apparatus described in FIGS. 3 to 5 of Patent Document 1, the measuring electrodes each include two probes and two probe blocks respectively holding the two probes. In each of the measurement electrodes, one of the two probes is held by the probe block via an elastic member. In the present measuring device, the movement of the slide block causes two probes to be brought close to the component held by the insulating nozzle and brought into contact with the component electrodes. Thereby, the electrical properties of the component are measured.
特公平７－１０５６２９号Toko 7-1 05 659
概要Overview
解決しようとする課題Problem to be solved
　本開示の課題は、仮に、部品電極の各々がラウンド状を成している場合であっても、部品電極の各々が接触可能な測定用電極を備えた測定装置であって、特許文献１に記載の測定装置とは異なる構造を成す測定装置を得ることである。 An object of the present disclosure is a measuring device provided with a measurement electrode to which each of the component electrodes can contact even if each of the component electrodes has a round shape. The aim is to obtain a measuring device which has a different structure than the measuring device described.
課題を解決するための手段、作用および効果Means, action and effect for solving the problem
　本開示に係る測定装置においては、一対の測定用電極の各々が、それぞれ、複数のワイヤを含むものとされる。部品が一対の測定用電極の各々に押し付けられた場合に、複数のワイヤは弾性変形させられる。そのため、部品電極の各々がラウンド状を成している場合であっても、部品電極の各々を、それぞれ、複数のワイヤのうちの少なくとも１本ずつに安定して接触させることができる。
　また、本開示に係る測定装置の構造は、特許文献１の図１，２に示す測定装置の構造、図３～５に示す測定装置の構造と異なる。 In the measurement device according to the present disclosure, each of the pair of measurement electrodes includes a plurality of wires. The plurality of wires are elastically deformed when the part is pressed against each of the pair of measurement electrodes. Therefore, even when each of the component electrodes has a round shape, each of the component electrodes can be stably brought into contact with at least one of the plurality of wires.
Further, the structure of the measuring device according to the present disclosure is different from the structure of the measuring device shown in FIGS. 1 and 2 of Patent Document 1 and the structure of the measuring device shown in FIGS.
本開示の一実施形態である測定装置を含む装着機の斜視図である。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of a placement machine including a measurement device that is an embodiment of the present disclosure. 上記測定装置の斜視図である。It is a perspective view of the above-mentioned measuring device. 上記測定装置によって測定された部品の斜視図（概念図）である。It is a perspective view (conceptual view) of parts measured by the above-mentioned measuring device. 上記部品の正面図（概念図）である。It is a front view (conceptual view) of the above-mentioned part. 上記測定装置の要部を示す斜視図である。It is a perspective view which shows the principal part of the said measuring apparatus. 上記測定装置の一部断面図である。It is a partial cross section figure of the above-mentioned measuring device. 上記装着機の制御装置の周辺を示す図である。It is a figure which shows the periphery of the control apparatus of the said mounting machine. 上記制御装置の記憶部に記憶されたLCR測定プログラムを表すフローチャートである。It is a flowchart showing the LCR measurement program memorize | stored in the memory | storage part of the said control apparatus. 上記測定装置の別の一部断面図である。It is another partial cross section figure of the said measuring apparatus. 上記測定装置のさらに別の一部断面図である。It is another partial cross section figure of the said measuring apparatus. 上記測定装置の別の一部断面図である。It is another partial cross section figure of the said measuring apparatus.
実施形態Embodiment
　以下、本開示の一実施形態である測定装置を含む装着機について図面に基づいて詳細に説明する。
　図１に示す装着機は、部品ｓを回路基板Ｐに装着するものであり、装置本体２，回路基板搬送保持装置４，部品供給装置６，ヘッド移動装置８等を含む。
　回路基板搬送保持装置４は、回路基板Ｐ（以下、基板Ｐと略称する）を搬送して保持するものであり、図１において、基板Ｐの搬送方向をｘ方向、基板Ｐの幅方向をｙ方向、基板Ｐの厚み方向をｚ方向とする。ｙ方向、ｚ方向は、それぞれ、装着機の前後方向、上下方向である。これら、ｘ方向、ｙ方向、ｚ方向は互いに直交する。部品供給装置６は、基板Ｐに装着される電子部品（以下、部品と略称する）ｓを供給するものであり、本実施例においては、複数のテープフィーダ１４を含む。ヘッド移動装置８は、作業ヘッドとしての装着ヘッド１６を保持してｘ、ｙ、ｚ方向へ移動させるものであり、装着ヘッド１６は、部品ｓを吸着して保持する吸着ノズル１８を有する。装着ヘッド１６は、吸着ノズル１８の先端に負圧と正圧とを選択的に供給する機能を有する。 Hereinafter, a mounting machine including a measuring device which is an embodiment of the present disclosure will be described in detail based on the drawings.
The mounting machine shown in FIG. 1 mounts the component s on the circuit board P, and includes an apparatus body 2, a circuit board transport / holding device 4, a component supply device 6, a head moving device 8 and the like.
The circuit board transport holding device 4 transports and holds a circuit board P (hereinafter referred to as a substrate P), and in FIG. 1, the transport direction of the substrate P is the x direction, and the width direction of the substrate P is the y The thickness direction of the substrate P is taken as the z direction. The y direction and the z direction are the front-rear direction and the up-down direction of the mounting machine, respectively. The x direction, the y direction, and the z direction are orthogonal to one another. The component supply device 6 supplies an electronic component (hereinafter referred to as a component) s mounted on the substrate P, and includes a plurality of tape feeders 14 in the present embodiment. The head moving device 8 holds the mounting head 16 as a working head and moves it in the x, y and z directions, and the mounting head 16 has a suction nozzle 18 for suctioning and holding the component s. The mounting head 16 has a function of selectively supplying a negative pressure and a positive pressure to the tip of the suction nozzle 18.
　また、符号２０はカメラを示す。カメラ２０は、吸着ノズル１８によって保持された部品ｓを撮像するものであり、カメラ２０によって撮像された画像に基づいて、部品ｓが基板Ｐに装着される予定のものであるか否かが判定される。符号２２は、ノズルステーションを示す。ノズルステーション２２には、絶縁性を有する材料である絶縁材で製造された吸着ノズルである絶縁ノズル２４（図５参照）を含む複数の吸着ノズルが収容され、適宜交換される。 Moreover, the code | symbol 20 shows a camera. The camera 20 picks up an image of the component s held by the suction nozzle 18, and based on the image picked up by the camera 20, it is determined whether or not the component s is to be mounted on the substrate P Be done. The code | symbol 22 shows a nozzle station. The nozzle station 22 accommodates a plurality of suction nozzles including an insulation nozzle 24 (see FIG. 5) which is a suction nozzle made of an insulating material which is an insulating material, and is replaced as appropriate.
　符号２６は測定装置を示す。測定装置２６は、部品ｓの電気的特性を測定するものであり、ごみ箱２８を介して回路基板搬送保持装置４の本体に設けられる。部品ｓの電気的特性としては、Ｌ（インダクタンス）、Ｃ（キャパシタンス）、Ｒ（レジスタンス）、Ｚ′（インピーダンス）等が該当し、測定装置２６によってこれらのうちの１つ以上が測定される。
　本測定装置２６において電気的特性が測定される部品ｓは、図３等に示すように、中間部に設けられた機能部ｐと、両端部に設けられた部品電極ｑとを有する角チップである。機能部ｐは、外側が絶縁材によって覆われている。なお、本実施例において、部品ｓにおいて、両端部に部品電極ｑが設けられた方向（部品電極ｑ、機能部ｐ、部品電極ｑが並んだ方向である）を長手方向と称し、長手方向と直交する方向を幅方向と称する。ただし、長手方向の長さＬが幅方向の長さＭより長いとは限らない。部品ｓについては、長手方向の長さＬと幅方向の長さＭとの少なくとも一方が異なる複数のサイズのものがある。 Reference numeral 26 denotes a measuring device. The measuring device 26 measures the electrical characteristics of the component s, and is provided on the main body of the circuit board transport and holding device 4 via the trash can 28. As the electrical characteristics of the component s, L (inductance), C (capacitance), R (resistance), Z '(impedance) and the like correspond, and one or more of these are measured by the measuring device 26.
The part s whose electrical characteristics are to be measured in the present measuring device 26 is a square chip having a functional part p provided in the middle part and a part electrode q provided at both ends as shown in FIG. is there. The functional part p is covered with an insulating material on the outside. In the present embodiment, in the component s, the direction in which the component electrodes q are provided at both ends (the component electrode q, the functional portion p, and the component electrode q are arranged) is referred to as the longitudinal direction. The orthogonal direction is referred to as the width direction. However, the length L in the longitudinal direction is not necessarily longer than the length M in the width direction. The part s has a plurality of sizes in which at least one of the longitudinal length L and the widthwise length M is different.
　また、部品ｓの部品電極ｑは、図４に示すように、ラウンド状を成す場合がある。例えば、部品ｓがコンデンサを含む場合には、部品ｓの製造上の都合により部品電極ｑがラウンド状を成す場合があるのである。 Further, the component electrode q of the component s may form a round shape as shown in FIG. For example, in the case where the component s includes a capacitor, the component electrode q may form a round shape due to manufacturing convenience of the component s.
　測定装置２６は、図２，５，６に示すように、一対の電極である測定用電極４２，４４から構成された測定用電極対４６を複数対含む。測定用電極対４６は、測定台４８の上面（ｘｙ平面）に開口して設けられた複数の凹部４９にそれぞれ設けられる。 As shown in FIGS. 2, 5 and 6, the measuring device 26 includes a plurality of measurement electrode pairs 46 configured of measurement electrodes 42 and 44 which are a pair of electrodes. The measurement electrode pairs 46 are respectively provided in a plurality of concave portions 49 provided on the upper surface (xy plane) of the measurement stand 48.
　測定用電極４２，４４は、それぞれ、複数本のワイヤ５０と、複数本のワイヤ５０を保持する保持部５２とを含む。複数のワイヤ５０の各々と保持部５２とは、それぞれ、電極として機能し得る材料で製造されたものである。複数のワイヤ５０の各々は、それぞれ、可撓性、すなわち、部品ｓとの接触により容易に弾性変形し得る程度の可撓性を有するものである。保持部５２は、本実施例において、概して円盤状を成し、剛性を有するものである。複数のワイヤ５０は、保持部５２の端面５２ｓを覆う状態で、保持部５２の端面５２ｓに対してほぼ垂直に伸びた姿勢で設けられる。すなわち、複数のワイヤ５０は、一列に並んで設けられるのではなく、複数列に、または、平面的に（２次元的に）広がって設けられる。このように、測定用電極４２，４４は、ワイヤ５０の束を含むものであり、図５，６に示すように、概してブラシ状を成すものである。 Each of the measurement electrodes 42 and 44 includes a plurality of wires 50 and a holding portion 52 for holding the plurality of wires 50. Each of the plurality of wires 50 and the holding portion 52 are each made of a material that can function as an electrode. Each of the plurality of wires 50 is flexible, that is, flexible enough to be elastically deformed by contact with the component s. In the present embodiment, the holding portion 52 has a generally disk shape and is rigid. The plurality of wires 50 are provided in a posture extending substantially perpendicularly to the end face 52s of the holding portion 52 in a state of covering the end face 52s of the holding portion 52. That is, the plurality of wires 50 are not provided side by side in a single row, but are provided in a plurality of rows or in a planar (two-dimensional) manner. As described above, the measurement electrodes 42 and 44 include a bundle of the wires 50, and as shown in FIGS. 5 and 6, generally have a brush shape.
　なお、図６に示すように、本実施例において、測定用電極４２，４４の各々において、複数のワイヤ５０の各々は、互いにほぼ同じ長さ、ほぼ同じ太さとされる。
　複数のワイヤ５０の各々は、例えば、直径が０．０２～０．０６ｍｍのもの、望ましくは、０．０３～０．０５ｍｍのものとすることができる。また、測定用電極４２，４４の各々は、例えば、ワイヤ５０を、数十本～数万本含むものとすることができ、望ましくは数十本～数千本(例えば、２０本～９０００本)含むものとすることができる。さらに、望ましくは、５０本～３０００本含むものとすることができる。さらに、ワイヤ５０は、密度４００本／１ｍｍ２以上、１８００本／１ｍｍ２以下で設けることが望ましい。 As shown in FIG. 6, in the present embodiment, in each of the measurement electrodes 42 and 44, each of the plurality of wires 50 has approximately the same length and approximately the same thickness.
Each of the plurality of wires 50 can be, for example, one having a diameter of 0.02 to 0.06 mm, desirably one having a diameter of 0.03 to 0.05 mm. In addition, each of the measurement electrodes 42 and 44 can include, for example, several tens to several tens of thousands of wires 50, and desirably several tens to several thousands (for example, 20 to 9,000). It can be Furthermore, desirably, 50 to 3000 can be included. Further, the wire 50 has a density 400/1 mm 2 or more, it is desirable to provide in 1800/1 mm 2 or less.
　また、測定用電極４２，４４の各々の保持部５２には、それぞれ、リード線５４，５６が接続され、リード線５４，５６の一方（本実施例においては、リード線５４）に電源６０が接続され、他方（本実施例においては、リード線５６）がアースされ、リード線５４，５６の間に測定部としてのＬＣＲ測定部６２が設けられる。測定用電極４２が陽極、測定用電極４２が陰極４４とされる。複数のワイヤ５０、保持部５２は、それぞれ、電極として機能し得る材料によって製造されたものであるため、測定用電極４２，４４の各々において、複数のワイヤ５０のうちの少なくとも１本ずつに、部品ｓの部品電極ｑが接触した場合には、その部品ｓに電流を流すことができ、ＬＣＲ測定部６２によって、部品ｓの電気的特性を測定することができる。 Further, lead wires 54 and 56 are connected to the holding portions 52 of the measurement electrodes 42 and 44, respectively, and the power supply 60 is connected to one of the lead wires 54 and 56 (in the present embodiment, the lead wire 54). The other (the lead wire 56 in this embodiment) is grounded, and an LCR measurement unit 62 as a measurement unit is provided between the lead wires 54 and 56. The measurement electrode 42 is an anode, and the measurement electrode 42 is a cathode 44. Since each of the plurality of wires 50 and the holding portion 52 is made of a material that can function as an electrode, at least one of the plurality of wires 50 in each of the measurement electrodes 42 and 44 When the component electrode q of the component s contacts, a current can be supplied to the component s, and the LCR measurement unit 62 can measure the electrical characteristics of the component s.
　図６に示すように、測定用電極４２，４４の各々の大きさ（例えば、保持部５２が概して円盤状を成すものである場合に、保持部５２の中心から最短のワイヤ５０までの距離ｒで表すことができる）、間隔ｄ（例えば、測定用電極４２，４４の各々の中心同士の間隔）は、電気的特性が測定される部品ｓのサイズ等に基づいて決まる。換言すれば、測定用電極４２，４４の各々の大きさｒ、間隔ｄは、電気的特性を測定する対象である複数サイズの部品ｓの部品電極ｑが、それぞれ、測定用電極４２，４４を構成する少なくとも１本ずつのワイヤ５０に接触するように設計されるのである。 As shown in FIG. 6, the size of each of the measurement electrodes 42 and 44 (for example, when the holding portion 52 has a generally disc shape, the distance r from the center of the holding portion 52 to the shortest wire 50) The distance d (e.g., the distance between the centers of the measurement electrodes 42 and 44) may be determined based on the size of the part s to be measured and the like. In other words, the size r and the distance d of each of the measurement electrodes 42 and 44 are the same as those of the component electrodes q of the components s of a plurality of sizes for which the electrical characteristics are to be measured. It is designed to contact at least one of the constituent wires 50.
　ここで、図６に示す測定装置において、電気的特性を測定可能な部品ｓについて考える。測定用電極４２，４４の大きさｒ、間隔ｄである場合には、理論的に、二点鎖線に示す部品ｓ以上、破線に示す部品ｓ以下の大きさの部品ｓについて、電気的特性を測定することができる。
　二点鎖線に示す部品ｓは、(1)式に示すように、長手方向の長さＬが、間隔ｄから大きさｒの２倍を引いた値（ｄ－２ｒ）より設定値δａ以上大きい部品ｓである。このように、部品ｓの長手方向の長さＬが、測定用電極４２，４４の互いに最も接近しているワイヤ同士の間隔より設定値δａ以上長い場合に、部品電極ｑの各々が、測定用電極４２，４４の複数のワイヤ５０の少なくとも１本ずつに接触可能となる。
Ｌ＞ｄ－２ｒ＋δａ・・・(1) Here, in the measuring apparatus shown in FIG. 6, consider a part s whose electrical characteristics can be measured. In the case of the size r of the measurement electrodes 42 and 44 and the interval d, theoretically, the electric characteristics of the parts s not less than the parts s indicated by the two-dot chain line and the parts not larger than the part s It can be measured.
The part s shown by the two-dot chain line has a length L in the longitudinal direction larger by a set value δa or more than a value (d−2r) obtained by subtracting twice the size r from the interval d, as shown in equation (1) It is part s. Thus, when the length L in the longitudinal direction of the component s is longer than the distance between the wires of the measurement electrodes 42 and 44 closest to each other by the set value δa or more, each of the component electrodes q is for measurement It is possible to contact at least one of the plurality of wires 50 of the electrodes 42 and 44.
L> d-2r + δa (1)
　破線が示す部品ｓは、(2)式に示すように、長手方向の長さＬから部品電極ｑの長さＮの２倍を引いた値（Ｌ－２Ｎ）が、間隔ｄに大きさｒの２倍を加えた値（ｄ＋２ｒ）より設定値δｂ以上小さい部品ｓである。このように、部品ｓの機能部ｐの長さ（Ｌ－２Ｎ）が、測定用電極４２，４４の互いに最も離間しているワイヤ同士の間隔より設定値δｂ以上短い場合には、部品電極ｑの各々が、測定用電極４２，４４の複数のワイヤ５０のうちの少なくとも１本ずつに接触可能となる。
Ｌ－２Ｎ＜ｄ＋２ｒ－δｂ・・・(2)
　なお、設定値δａ、δｂは、部品電極ｑに良好にワイヤ５０が接触し得るための余裕値である。 The component s indicated by the broken line has a value (L-2N) obtained by subtracting twice the length N of the component electrode q from the length L in the longitudinal direction, as shown in the equation (2), with a size r The component s is smaller by a set value δb or more than a value (d + 2r) obtained by adding 2 times the value of d. As described above, when the length (L-2N) of the functional part p of the component s is shorter than the distance between the wires of the measurement electrodes 42 and 44 which are most distant from each other by the set value δb or more, the component electrode q Of each of the plurality of wires 50 of the measurement electrodes 42 and 44 can be brought into contact with each other.
L-2 N <d + 2 r-δ b (2)
The set values δa and δb are margin values for the wire 50 to be in good contact with the component electrode q.
　以上のことから、測定用電極４２，４４の各々の大きさｒ、間隔ｄである測定装置においては、(3)式に示すように、上記(1)式、(2)式を満たす範囲の複数のサイズの部品ｓの電気的特性の測定が可能となる。
　ｄ－２ｒ＋δａ＜Ｌ＜ｄ＋２ｒ－δｂ＋２Ｎ・・・(3)
　換言すれば、(3)式を満たす複数のサイズの部品ｓの電気的特性が測定できるように、測定用電極対４６の間隔ｄ、大きさｒが設計されるのである。 From the above, in the measurement apparatus having the size r and the distance d of each of the measurement electrodes 42 and 44, as shown in the equation (3), a range satisfying the above equations (1) and (2) It becomes possible to measure the electrical characteristics of multiple sized parts s.
d-2r + δa <L <d + 2r-δb + 2N (3)
In other words, the distance d and the size r of the measurement electrode pair 46 are designed so that the electrical characteristics of the plurality of sized components s satisfying the equation (3) can be measured.
　なお、本実施例に係る測定装置２６においては、大きさｒ、間隔ｄが異なる複数対（本実施例においては、３対）の測定用電極対４６ａ、ｂ、ｃが設けられる。３対の測定用電極対４６を設けることは不可欠ではないが、３対の測定用電極対４６を設けることにより、多くのサイズ(測定用電極対４６ａ、ｂ、ｃの各々において電気的特性を測定可能な部品ｓのサイズが重複しない場合には、互いに異なる６サイズ以上)の部品ｓの電気的特性を測定することが可能となる。 In the measuring apparatus 26 according to the present embodiment, a plurality of pairs (3 pairs in the present embodiment) of measuring electrodes 46a, b, c having different sizes r and intervals d are provided. Although it is not essential to provide three measurement electrode pairs 46, provision of three measurement electrode pairs 46 enables electrical characteristics to be determined in many sizes (each of the measurement electrode pairs 46a, b and c). If the sizes of the measurable parts s do not overlap, it becomes possible to measure the electrical characteristics of the parts s of six or more different sizes).
　また、電気的特性の測定の際に、ワイヤ５０に部品ｓが押し付けられるが、ワイヤ５０は可撓性を有するものであるため、弾性変形させられる。それにより、仮に、部品電極ｑの各々がラウンド状を成すものであっても、また、部品ｓが小さいものであっても、部品電極ｑの各々に複数のワイヤ５０のうちの少なくとも１本ずつを安定して接触させることができる。この場合において、ワイヤ５０が弾性変形させられても、電気的特性の測定値への影響は小さい。 Further, when measuring the electrical characteristics, the component s is pressed against the wire 50, but since the wire 50 is flexible, it is elastically deformed. Thereby, even if each of the component electrodes q has a round shape, and even if the component s is small, at least one of the plurality of wires 50 is added to each of the component electrodes q. Stable contact. In this case, even if the wire 50 is elastically deformed, the influence on the measured values of the electrical characteristics is small.
　当該装着機は制御装置１００を含む。制御装置１００は、図７に示すように、コンピュータを主体とするコントローラ１０２と、複数の駆動回路１０４とを含む。コントローラ１０２は、実行部１１０、記憶部１１２、入出力部１１４等を含み、入出力部１１４には、基板搬送保持装置４、部品供給装置６、ヘッド移動装置８が、それぞれ、駆動回路１０４を介して接続されるとともに、作業ヘッド１６、測定装置２６、ディスプレイ１１６、カメラ２０等が接続される。記憶部１１２には、図８のフローチャートで表されるLCR測定プログラム等の複数のプログラム、テーブルが記憶されている。また、コントローラ１０２に設けられたタイマ１２４によって時間が計測される。 The mounting machine includes the control device 100. As shown in FIG. 7, control device 100 includes a computer-based controller 102 and a plurality of drive circuits 104. The controller 102 includes an execution unit 110, a storage unit 112, an input / output unit 114, and the like. The substrate transport / holding device 4, the component supply device 6, and the head moving device 8 respectively drive circuits 104 in the input / output unit 114. While being connected through, the working head 16, the measuring device 26, the display 116, the camera 20, etc. are connected. The storage unit 112 stores a plurality of programs such as an LCR measurement program represented by the flowchart of FIG. 8 and a table. In addition, a timer 124 provided in the controller 102 measures time.
　以下、装着機の作動について説明する。
　新たなテープフィーダ１４のセット、テープフィーダ１４の交換が行われた場合等、部品ｓの電気的特性の測定指令が出された場合に、そのテープフィーダ１４に保持された部品ｓの電気的特性が測定される。 Hereinafter, the operation of the mounting machine will be described.
Electrical characteristics of the part s held by the tape feeder 14 when a command to measure the electrical characteristics of the part s is issued, such as when setting of a new tape feeder 14 or replacement of the tape feeder 14 is performed Is measured.
　部品ｓの電気的特性は、図８のフローチャートで表されるLCR測定プログラムの実行により測定される。
　ステップ１（以下、Ｓ１と略称する。他のステップについても同様とする）において、部品ｓの電気的特性の測定指令が出されたか否かが判定される。測定指令が出された場合には、Ｓ２において、部品ｓが、その部品ｓのサイズで決まる測定用電極対４６ａ～ｃのうちの１つ(例えば、測定用電極対４６ｂとする)に押し付けられる。ワイヤ５０は弾性変形させられ、部品電極ｑの各々に接触させられる。詳細には、装着ヘッド１６がノズルステーション２２へ移動させられ、絶縁ノズル２４が取り付けられる。次に、装着ヘッド１６が部品供給装置６へ移動させられ、絶縁ノズル２４によって新たに取り付けられたテープフィーダ１４に保持された部品ｓがピックアップされる。そして、装着ヘッド１６が測定装置２６の測定用電極対４６ｂへ移動させられて、下降させられる。それにより、部品ｓが測定用電極対４６ｂに押し付けられるのである。 The electrical characteristics of the part s are measured by the execution of the LCR measurement program represented by the flowchart of FIG.
In step 1 (hereinafter abbreviated as S1; the same applies to other steps), it is determined whether or not a measurement command of the electrical characteristics of the component s has been issued. When a measurement command is issued, in S2, the part s is pressed against one of the measurement electrode pairs 46a to 46c (for example, the measurement electrode pair 46b) determined by the size of the part s. . The wire 50 is elastically deformed and brought into contact with each of the component electrodes q. In particular, the mounting head 16 is moved to the nozzle station 22 and the insulating nozzle 24 is attached. Next, the mounting head 16 is moved to the component feeding device 6, and the component s held by the tape feeder 14 newly attached by the insulating nozzle 24 is picked up. Then, the mounting head 16 is moved to the measurement electrode pair 46 b of the measurement device 26 and lowered. As a result, the component s is pressed against the measurement electrode pair 46b.
　Ｓ３において、部品電極ｑがそれぞれ測定用電極４２，４４に接触させられた時点から除電時間が経過するのが待たれる。除電時間は、部品ｓが有していると推定される容量の静電気を除去するのに要する時間であり、予め実験等により求めたり、部品ｓの大きさ、特性等に基づいて理論的に求めたりすること等ができる。また、部品ｓは絶縁ノズル２４によって保持されるため、絶縁ノズル２４を介して除電が行われることもない。それに対して、本実施例においては、測定用電極４４がアースされているため、部品ｓに蓄えられた電荷は測定用電極４４を介して逃がされ、除電が行われるのである。
　そして、経過時間が除電時間に達した後に、Ｓ４において、測定用電極４２，４４の間に電圧が印加されて、ＬＣＲ測定部６２によって電流が測定されて、部品ｓの電気的特性が求められる。測定用電極４２，４４の間に印加された電圧、流れる電流等に基づき、Ｌ，Ｃ，Ｒ等が求められるのである。 In S3, it is waited for the static elimination time to elapse from the time when the component electrodes q are brought into contact with the measurement electrodes 42 and 44, respectively. The charge removal time is the time required to remove static electricity of a capacity that is estimated to be possessed by part s, and is determined beforehand by experiment etc., or theoretically based on the size of part s, characteristics, etc. Can do things like In addition, since the component s is held by the insulating nozzle 24, static elimination is not performed via the insulating nozzle 24. On the other hand, in the present embodiment, since the measurement electrode 44 is grounded, the charge stored in the component s is released through the measurement electrode 44 and the charge is removed.
Then, after the elapsed time reaches the charge removal time, a voltage is applied between the measurement electrodes 42 and 44 in S4, the current is measured by the LCR measurement unit 62, and the electrical characteristics of the component s are determined. . L, C, R and the like can be obtained based on the voltage applied between the measurement electrodes 42 and 44, the current flowing, and the like.
　部品ｓの電気的特性の測定後、Ｓ５において、測定された電気的特性である測定値がその部品ｓの規格値とほぼ一致するか否かが判定される。ほぼ一致する場合には、Ｓ６において、装着ヘッド１６は、部品ｓが絶縁ノズル２４によって保持された状態で、基板Ｐへ移動させられ、部品ｓが装着される。測定値と規格値とが不一致である場合には、Ｓ７において、部品ｓはごみ箱２８へ廃棄させられる。測定値と規格値とがほぼ一致する場合には、その部品ｓは適正なものであるため、その部品ｓを廃棄する必要性は低い。また、絶縁ノズル２４が利用されるが、Ｓ３において除電が行われるため、部品ｓの帯電量が少ない。そのため、部品ｓは、基板Ｐへの装着に使用することができる。 After the measurement of the electrical characteristics of the part s, it is determined in S5 whether or not the measured value, which is the measured electrical property, substantially matches the standard value of the part s. If they substantially match, in S6, the mounting head 16 is moved to the substrate P with the component s held by the insulating nozzle 24, and the component s is mounted. If the measured value and the standard value do not match, the part s is discarded to the trash can 28 in S7. If the measured value and the standard value substantially match, the part s is appropriate, and therefore, it is less necessary to discard the part s. In addition, although the insulating nozzle 24 is used, the charge amount of the component s is small because the charge is removed in S3. Therefore, the component s can be used for mounting on the substrate P.
　以上のように、本実施例においては、測定用電極対４６ａ、ｂ、ｃの各々において、それぞれ、複数サイズの部品ｓの電気的特性を測定することが可能となる。そのため、部品ｓのサイズ毎に測定用電極対を設ける必要がなく、その分、コストダウンを図ることができる。
　また、測定用電極対４６の各々が、平面的（ｘ方向およびｙ方向）に広がって設けられた複数のワイヤ５０を含むものであるため、部品ｓの長さＬの誤差があっても、絶縁ノズル２４の位置の誤差があっても、部品電極ｑをそれぞれ測定用電極４２，４４の少なくとも１本ずつのワイヤ５０に安定して接触させることができる。例えば、測定用電極が、１つの針状のプローブから構成されたものとされた測定装置に比較して、部品電極ｑの各々を容易に測定用電極対４６に接触させることが可能となる。 As described above, in the present embodiment, it is possible to measure the electrical characteristics of the components s of a plurality of sizes in each of the measurement electrode pairs 46a, b and c. Therefore, it is not necessary to provide a measurement electrode pair for each size of the component s, and the cost can be reduced accordingly.
In addition, since each of the measurement electrode pairs 46 includes the plurality of wires 50 provided in a planar manner (x direction and y direction), even if there is an error in the length L of the component s, the insulating nozzle Even if there is an error in the position 24, the component electrode q can be stably brought into contact with at least one wire 50 of each of the measurement electrodes 42 and 44. For example, each of the component electrodes q can be easily brought into contact with the measurement electrode pair 46 as compared with a measurement device in which the measurement electrode is configured of one needle-like probe.
　さらに、測定用電極４２，４４が、複数の可撓性を有するワイヤ５０を含むものであるため、部品ｓが押し付けられることにより、ワイヤ５０が弾性変形させられる。それにより、部品電極ｑがラウンド状を成すものであっても、または、部品ｓが小さくても、部品電極ｑの各々に、少なくとも１本ずつのワイヤ５０を安定して接触させることができる。 Furthermore, since the measurement electrodes 42 and 44 include the plurality of flexible wires 50, the wire 50 is elastically deformed by pressing the component s. Thereby, even if the component electrode q has a round shape or the component s is small, at least one wire 50 can be stably brought into contact with each of the component electrodes q.
　このように、複数のワイヤ５０を含む測定用電極４２，４４を備えた測定装置は、特許文献１に記載されていない。 Thus, the measuring device provided with the measurement electrodes 42 and 44 including the plurality of wires 50 is not described in Patent Document 1.
　なお、測定用電極４２，４４にそれぞれ含まれる複数のワイヤ５０の各々を、互いに同じ太さ、同じ長さのものとすることは不可欠ではない。複数のワイヤ５０のうちの一部分と他の部分とで、太さと長さとの少なくとも一方を異ならせることができる。 In addition, it is not indispensable to make each of the plurality of wires 50 included in each of the measurement electrodes 42 and 44 into the same thickness and the same length. At least one of the thickness and the length can be different between a part of the plurality of wires 50 and the other part.
　例えば、図９に示す測定装置において、測定用電極１２０，１２２は、それぞれ、複数のワイヤ１２４と複数のワイヤ１２４を保持する保持部１２６とを含むが、複数のワイヤ１２４のうち、中央部に位置するワイヤ１２４ａについては周辺部に位置するワイヤ１２４ｂより、保持部１２６の端面１２６ｓからの突出長さが長くされる。また、中央部に位置し、端面１２６ｓからの突出長さが長いワイヤ１２４ａについては、周辺部に位置し、端面１２６からの突出長さが短いワイヤ１２４ｂより、細くすることができる。さらに、中央部においては周辺部における場合より密度を高くすることもできる。それにより、安定して部品電極ｑにワイヤ１２４を接触させることが可能となる。なお、中央部とは、例えば、半径が、保持部１２６の半径ｒの０．６ｒ以下の部分、０．５ｒ以下の部分、０．４ｒ以下の部分、０．３ｒ以下の部分、０．２ｒ以下の部分等とすることができる。 For example, in the measuring apparatus shown in FIG. 9, each of the measuring electrodes 120 and 122 includes a plurality of wires 124 and a holding portion 126 for holding a plurality of wires 124. Of the plurality of wires 124, The protruding length from the end face 126s of the holding portion 126 is made longer than the wire 124b located at the periphery of the wire 124a located. Further, the wire 124a located at the central portion and having a long projecting length from the end face 126s can be thinner than the wire 124b located at the periphery and having a short projecting length from the end face 126. In addition, the density in the central part can be higher than in the peripheral part. Thereby, the wire 124 can be brought into contact with the component electrode q stably. The central portion is, for example, a portion having a radius of 0.6r or less of the radius r of the holding portion 126, a portion of 0.5r or less, a portion of 0.4r or less, a portion of 0.3r or less, 0.2r The following parts can be made.
　また、図１０に示す測定装置において、測定用電極１３０，１３２は、それぞれ、複数のワイヤ１３４と複数のワイヤ１３４を保持する保持部１３６とを含むが、複数のワイヤ１３４のうち、中央部に位置するワイヤ１３４ａについては周辺部に位置するワイヤ１３４ｂより、保持部１３６の端面１３６ｓからの突出長さが短くされる。また、周辺部に位置するワイヤ１２４ｂについては、中央部に位置するワイヤ１２４ａより、細くすることができる。 Further, in the measuring apparatus shown in FIG. 10, each of the measuring electrodes 130 and 132 includes a plurality of wires 134 and a holding portion 136 for holding a plurality of wires 134, but among the plurality of wires 134, The protruding length of the holding portion 136 from the end face 136s is shorter than that of the wire 134b positioned at the periphery of the positioned wire 134a. In addition, the wires 124b located at the periphery can be thinner than the wires 124a located at the center.
　さらに、測定用電極を、測定台４８に、弾性部材を介して取り付けることもできる。
　例えば、図１１に示す測定装置において、測定用電極１４０、１４２の各々は、複数のワイヤ１４４と、ワイヤ１４４を保持する保持部１４６とを含む。保持部１４６は、それぞれ、大径部１４６ｂと小径部１４６ｓとを有する段付き形状を成す。それに対して、測定台４８の凹部４９の中央部には、それぞれ、大径穴部１５０ｂと小径穴部１５０ｓとを有する段付き形状を成す穴１５０が形成され、保持部１４６の小径部１４６ｓが小径穴部１５０ｓに摺動可能に嵌合される。また、測定台４８に形成された穴１５０の小径穴部１５０ｓと大径穴部１５０ｂとの間の段面１５０ｄと、保持部１４６の小径部１４６ｓと大径部１４６ｂとの間の段面１４６ｄとの間には、弾性部材としてのスプリング１５２が設けられる。それにより、測定用電極１４０，１４２が上下方向に弾性的に保持される。 Furthermore, the measuring electrode can be attached to the measuring stand 48 via an elastic member.
For example, in the measurement apparatus shown in FIG. 11, each of the measurement electrodes 140 and 142 includes a plurality of wires 144 and a holder 146 for holding the wires 144. Each holding portion 146 has a stepped shape having a large diameter portion 146 b and a small diameter portion 146 s. On the other hand, a stepped hole 150 having a large diameter hole 150b and a small diameter hole 150s is formed in the central portion of the recess 49 of the measurement table 48, and the small diameter portion 146s of the holding portion 146 is The small diameter hole portion 150s is slidably fitted. Further, a step surface 150d between the small diameter hole portion 150s and the large diameter hole portion 150b of the hole 150 formed in the measurement table 48, and a step surface 146d between the small diameter portion 146s and the large diameter portion 146b of the holding portion 146 And a spring 152 as an elastic member. Thus, the measurement electrodes 140 and 142 are elastically held in the vertical direction.
　図１１に示す測定装置において、部品ｓが電極１４０，１４２に強く押し付けられた場合には、スプリング１５２が伸縮させられる。そのため、複数のワイヤ１４４の各々の過度な変形を抑制することができる。 In the measuring apparatus shown in FIG. 11, when the component s is strongly pressed against the electrodes 140 and 142, the spring 152 is expanded and contracted. Therefore, excessive deformation of each of the plurality of wires 144 can be suppressed.
　また、複数のワイヤは、保持部に対して一列に並べて設けることもできる。
　さらに、保持部は、端面が多角形状を成すものとすることもできる。 Also, the plurality of wires may be arranged in a row with respect to the holding portion.
Furthermore, the end face of the holder may be polygonal.
　また、３対の測定用電極対４６ａ、ｂ、ｃの各々が、複数のサイズの部品ｓの電気的特性を測定可能に設計されることは不可欠ではなく、３対の測定用電極対４６ａ、ｂ、ｃのうちの１対または２対の測定用電極対については、１つのサイズの部品ｓの電気的特性を測定するために設計されるようにすることもできる。 Moreover, it is not essential that each of the three measurement electrode pairs 46a, b, c be designed to be able to measure the electrical characteristics of the components s of a plurality of sizes, and the three measurement electrode pairs 46a, One or two of b and c measurement electrode pairs may be designed to measure the electrical characteristics of one size of the component s.
　さらに、測定台４８の上面に開口する複数の凹部４９は、部品ｓを押し付ける場合のガイドとしての機能を備えたものとすることができ、凹部４９の側壁を、複数サイズの部品ｓに合わせた位置に設けることができる。それに対して、凹部４９を設けることは不可欠ではなく、測定台４８の上面から上方へ突出する状態で測定用電極対４６を設けることもできる。 Furthermore, the plurality of recesses 49 opened on the upper surface of the measurement table 48 can be provided with a function as a guide when pressing the component s, and the side wall of the recess 49 is matched to the components s of multiple sizes It can be provided in position. On the other hand, the provision of the recess 49 is not essential, and the measurement electrode pair 46 can be provided so as to project upward from the top surface of the measurement table 48.
　また、測定用電極対４６は、上下方向または横方向に移動可能に設けることもできる。例えば、絶縁ノズル２４によって保持された部品ｓに対して、複数のワイヤを含む測定用電極対４６を接近させて、部品電極ｑに接触させることもできる。この場合においても、ワイヤが可撓性を有するものであるため、ワイヤを部品電極ｑに安定して接触させることができる。 Also, the measurement electrode pair 46 can be provided so as to be movable in the vertical direction or in the lateral direction. For example, with respect to the part s held by the insulating nozzle 24, the measurement electrode pair 46 including a plurality of wires can be brought close to contact with the part electrode q. Also in this case, since the wire is flexible, the wire can be brought into stable contact with the component electrode q.
　さらに、Ｓ３のステップは不可欠ではない。除電時間が非常に短い場合には、無視することも可能である等、その他、本開示は、前記実施形態に記載の態様の他、当業者の知識に基づいて種々の変更、改良を施した形態で実施することができる。 Furthermore, the step of S3 is not essential. The present disclosure can be variously modified and improved based on the knowledge of those skilled in the art, in addition to the aspects described in the above embodiments. It can be implemented in a form.
　２６：測定装置　４２，４４，１２０，１２２，１３０，１３２，１４０，１４２：測定用電極　４６：測定用電極対　４８：測定台　５０，１２４，１３４，１４４：ワイヤ　５２，１２６，１３６，１４６：保持部　６０：電源　６２：ＬＣＲ測定部　１００：制御装置　１５２：スプリング 26: measuring device 42, 44, 120, 122, 130, 132, 140, 142: measuring electrode 46: measuring electrode pair 48: measuring table 50, 124, 134, 144: wire 52, 126, 136, 146: Holding part 60: Power supply 62: LCR measurement part 100: Control device 152: Spring
特許請求可能な態様Claimable aspect
　以下の各項に、特許請求可能な態様を記載する。
（１）部品供給装置によって供給された部品をピックアップして回路基板に装着する装着機に設けられ、一対の電極である一対の測定用電極に、それぞれ、前記部品の一対の電極である一対の部品電極が接触させられることにより、前記部品の電気的特性を測定する測定装置であって、
　前記一対の測定用電極の各々が、それぞれ、複数のワイヤを含む測定装置。 The following sections describe the claimable embodiments.
(1) A mounting machine which picks up a component supplied by a component supply device and mounts it on a circuit board, and a pair of measurement electrodes, which are a pair of electrodes, is a pair of electrodes of the component. What is claimed is: 1. A measuring device for measuring an electrical property of a component by bringing a component electrode into contact with the component electrode,
A measuring apparatus, wherein each of the pair of measuring electrodes includes a plurality of wires.
（２）前記複数のワイヤが、それぞれ、可撓性を有するものである(1)項に記載の測定装置。 (2) The measuring device according to (1), wherein each of the plurality of wires has flexibility.
（３）前記一対の測定用電極の各々が、概して、ブラシ状を成すものである(1)項または(2)項に記載の測定装置。 (3) The measuring device according to (1) or (2), wherein each of the pair of measuring electrodes generally has a brush shape.
（４）前記一対の測定用電極の各々が、それぞれ、前記複数のワイヤをそれぞれ保持する保持部を含み、当該測定装置が、一対の前記保持部の間に設けられ、前記部品の電気的特性を測定する測定部を含む(1)項ないし(3)項のいずれか１つに記載の測定装置。 (4) Each of the pair of measurement electrodes includes a holder that holds the plurality of wires, and the measurement device is provided between the pair of holders, and the electrical characteristic of the part is measured. The measurement device according to any one of (1) to (3), which includes a measurement unit that measures
（５）前記一対の測定用電極の各々において、前記複数のワイヤの各々の前記保持部からの突出長さが、互いに同じとされた(4)項に記載の測定装置。
　突出長さが同じであるとは、厳密な意味において同じである必要はなく、ほぼ同じであればよい。 (5) The measuring device according to (4), wherein in each of the pair of measurement electrodes, the projection length of each of the plurality of wires from the holding portion is the same as each other.
The same extension length does not have to be the same in a strict sense, and may be almost the same.
（６）前記一対の測定用電極の各々において、前記複数のワイヤの各々の前記保持部からの突出長さが、不均一とされた(4)項に記載の測定装置。
　例えば、複数のワイヤの各々において、保持部の中央部に位置するワイヤの突出長さを周辺部に位置するワイヤより長くしたり、中央部に位置するワイヤの突出長さを周辺部に位置するワイヤより短くしたりすること等ができる。 (6) The measuring device according to (4), wherein in each of the pair of measuring electrodes, the protruding length of each of the plurality of wires from the holding portion is uneven.
For example, in each of the plurality of wires, the protrusion length of the wire located at the central portion of the holding portion is made longer than the wire located at the peripheral portion, or the protrusion length of the wire located at the central portion is located at the peripheral portion It can be made shorter than the wire.
（７）前記一対の測定用電極の各々において、前記複数のワイヤの各々の太さが、互いにほぼ同じとされた(1)項ないし(6)項のいずれか１つに記載の測定装置。 (7) The measuring device according to any one of (1) to (6), wherein in each of the pair of measurement electrodes, the thickness of each of the plurality of wires is substantially the same as each other.
（８）前記一対の測定用電極の各々において、前記複数のワイヤの各々の太さが、不均一とされた(1)項ないし(6)項のいずれか１つに記載の測定装置。
　ワイヤを製造する材料が同じである場合には、ワイヤが細い場合は太い場合より弾性変形し易くなる。例えば、突出長さの長いワイヤを突出長さの短いワイヤより細くすることができる。 (8) The measuring device according to any one of (1) to (6), wherein the thickness of each of the plurality of wires is nonuniform in each of the pair of measurement electrodes.
If the material from which the wire is made is the same, it will be more susceptible to elastic deformation if the wire is thin than if it is thick. For example, a long protruding wire can be thinner than a short protruding wire.
（９）前記一対の測定用電極の間隔が、前記一対の測定用電極の各々における複数のワイヤのうちの少なくとも１本ずつに、複数サイズの部品の部品電極の各々が接触可能な大きさとされた(1)項ないし(8)項のいずれか１つに記載の測定装置。
　部品のサイズが異なっても、一対の部品電極の各々を、それぞれ、一対の測定用電極の各々における少なくとも１本ずつのワイヤに接触させることができる。 (9) The distance between the pair of measurement electrodes is set such that each of the component electrodes of a plurality of sizes of components can contact at least one of the plurality of wires in each of the pair of measurement electrodes The measuring apparatus according to any one of (1) to (8).
Each of the pair of component electrodes can be in contact with at least one wire in each of the pair of measurement electrodes, even if the components have different sizes.
（１０）当該測定装置が、前記測定用電極を複数対含む(1)項ないし(9)項のいずれか１つに記載の測定装置。 (10) The measurement device according to any one of (1) to (9), wherein the measurement device includes a plurality of pairs of the measurement electrodes.
（１１）前記一対の測定用電極のうちの少なくとも一方が接地された(1)項ないし(10)項のいずれか１つに記載の測定装置。 (11) The measuring apparatus according to any one of (1) to (10), wherein at least one of the pair of measuring electrodes is grounded.
（１２）当該測定装置が、前記装着機に設けられた測定台を含み、
　前記一対の測定用電極の各々が、それぞれ、前記測定台の上面から突出して設けられた(1)項ないし(11)項のいずれか１つに記載の測定装置。 (12) The measuring device includes a measuring table provided on the mounting machine,
The measuring device according to any one of the items (1) to (11), wherein each of the pair of measuring electrodes is provided so as to protrude from the upper surface of the measuring table.
（１３）当該測定装置が、前記装着機に設けられた測定台を含み、
　前記一対の測定用電極の各々が、前記測定台に、それぞれ、弾性部材を介して設けられた(1)項ないし(12)項のいずれか１つに記載の測定装置。 (13) The measuring apparatus includes a measuring table provided on the mounting machine,
The measuring apparatus according to any one of (1) to (12), wherein each of the pair of measuring electrodes is provided on the measuring table via an elastic member.
（１４）当該測定装置が、前記一対の測定用電極を前記部品に対して接近・離間させる電極移動装置を含む(1)項ないし(13)項のいずれか１つに記載の測定装置。
  部品が保持された状態で、一対の測定用電極が、前記部品に接近し、一対の部品電極にそれぞれ接触し、それにより、部品の電気的特性が測定される。電極移動装置は、一対の測定用電極を、上下方向に移動させるものであっても、横方向（ｘ方向またはｙ方向）に移動させるものであってもよい。 (14) The measurement device according to any one of (1) to (13), wherein the measurement device includes an electrode moving device for moving the pair of measurement electrodes closer to or away from the component.
With the component held, the pair of measurement electrodes approaches the component and contacts the pair of component electrodes respectively, whereby the electrical characteristics of the component are measured. The electrode moving device may move the pair of measurement electrodes in the vertical direction or in the lateral direction (x direction or y direction).
（１５）部品供給装置によって供給された部品をピックアップして回路基板に装着する装着機であって、
　前記(1)項ないし(14)項のいずれかに記載の測定装置と、
　前記部品を吸着して保持可能であって、絶縁性を有する材料である絶縁材で製造された吸着ノズルである絶縁ノズルを有する作業ヘッドと、
　その作業ヘッドを移動させるヘッド移動装置と、
　そのヘッド移動装置を制御することにより、前記作業ヘッドの移動を制御するヘッド移動制御装置と
を含み、
　前記一対の測定用電極のうちの少なくとも一方が接地され、
　前記ヘッド移動制御装置が、前記作業ヘッドを、前記部品供給装置と、前記測定装置と、前記回路基板との間で移動させるものである装着機。 (15) A mounting machine for picking up components supplied by a component supply device and mounting the components on a circuit board,
The measurement device according to any one of the items (1) to (14);
A work head having an insulation nozzle which is a suction nozzle which can be held by suction and which is made of an insulating material which is a material having insulation properties;
A head moving device for moving the working head;
A head movement control device that controls movement of the working head by controlling the head movement device;
At least one of the pair of measurement electrodes is grounded;
A mounting machine, wherein the head movement control device moves the working head between the component supply device, the measuring device, and the circuit board.
（１６）当該装着機は、前記作業ヘッドを制御することにより、前記部品の電気的特性が測定される間、前記絶縁ノズルに、前記部品を保持させる作業ヘッド制御部を含む(15)項に記載の装着機。
　上記実施例において、制御装置１００の作業ヘッド１６を制御する部分等により作業ヘッド制御部が構成される。 (16) The mounting machine includes a working head control unit which causes the insulating nozzle to hold the component while controlling the working head so that the electrical property of the component is measured. The mounting machine described.
In the above-described embodiment, the work head control unit is configured by the part that controls the work head 16 of the control device 100 and the like.

Claims (8)

  1. 　部品供給装置によって供給された部品をピックアップして回路基板に装着する装着機に設けられ、一対の電極である一対の測定用電極に、それぞれ、前記部品の一対の電極である一対の部品電極が接触させられることにより、前記部品の電気的特性を測定する測定装置であって、
    　前記一対の測定用電極の各々が、それぞれ、複数のワイヤを含む測定装置。     A pair of component electrodes, which are a pair of electrodes of the component, are provided respectively in a pair of measurement electrodes that are a pair of electrodes that are provided in a mounting machine that picks up components supplied by a component supply device and mount them on a circuit board. What is claimed is: 1. A measuring device for measuring an electrical property of the component by being brought into contact with the component,
    A measuring apparatus, wherein each of the pair of measuring electrodes includes a plurality of wires.
  2. 　前記複数のワイヤが、それぞれ、可撓性を有するものである請求項１に記載の測定装置。 The measurement device according to claim 1, wherein each of the plurality of wires has flexibility.
  3. 　前記一対の測定用電極の各々が、概してブラシ状を成すものとされた請求項１または２に記載の測定装置。 The measuring device according to claim 1 or 2, wherein each of the pair of measuring electrodes has a generally brush shape.
  4. 　前記一対の測定用電極の各々が、それぞれ、前記複数のワイヤをそれぞれ保持する保持部を含み、当該測定装置が、一対の前記保持部の間に設けられ、前記部品の電気的特性を測定する測定部を含む請求項１ないし３のいずれか１つに記載の測定装置。 Each of the pair of measurement electrodes includes a holder that holds the plurality of wires, and the measurement device is provided between the pair of holders to measure the electrical characteristics of the component. The measuring device according to any one of claims 1 to 3 including a measuring unit.
  5. 　前記一対の測定用電極の各々において、前記複数のワイヤの各々の前記保持部からの突出長さが、互いに同じとされた請求項４に記載の測定装置。 5. The measuring apparatus according to claim 4, wherein in each of the pair of measuring electrodes, the protruding length of each of the plurality of wires from the holding portion is equal to each other.
  6. 　前記一対の測定用電極の各々において、前記複数のワイヤのうち前記保持部の中央部に位置する前記ワイヤの前記保持部からの突出長さが、周辺部に位置する前記ワイヤより長くされた請求項４に記載の測定装置。 In each of the pair of measurement electrodes, a protrusion length from the holding portion of the wire positioned at a central portion of the holding portion among the plurality of wires is longer than the wire positioned at a peripheral portion Item 5. The measuring device according to item 4.
  7. 　前記一対の測定用電極の間隔が、前記一対の測定用電極の各々における複数のワイヤのうちの少なくとも１本ずつに、複数サイズの部品の部品電極の各々が接触可能な大きさとされた請求項１ないし６のいずれか１つに記載の測定装置。 The distance between the pair of measurement electrodes is set such that each of the component electrodes of a plurality of sizes of components can be in contact with at least one of the plurality of wires in each of the pair of measurement electrodes. The measuring device according to any one of 1 to 6.
  8. 　当該測定装置が、前記装着機に設けられた測定台を含み、
    　前記一対の測定用電極の各々が、前記測定台に、それぞれ、弾性部材を介して設けられた請求項１ないし７のいずれか１つに記載の測定装置。     The measuring device includes a measuring table provided on the mounting machine,
    The measurement device according to any one of claims 1 to 7, wherein each of the pair of measurement electrodes is provided on the measurement stand via an elastic member.
PCT/JP2017/033766 2017-09-19 2017-09-19 Measurement device WO2019058434A1 (en)

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JPH09199897A (en) * 1995-11-06 1997-07-31 Framatome Connectors Internatl Method for electronic component assembling on printed wiring board and device for the assembling
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