WO2019037490A1

WO2019037490A1 - Color film substrate defect analysis method, and detection and repair method and apparatus

Info

Publication number: WO2019037490A1
Application number: PCT/CN2018/087864
Authority: WO
Inventors: 李鹏; 李坚; 李志宾; 冯孟; 孙瑞雪; 丁秀娟; 赵帅
Original assignee: 京东方科技集团股份有限公司; 鄂尔多斯市源盛光电有限责任公司
Priority date: 2017-08-23
Filing date: 2018-05-22
Publication date: 2019-02-28
Also published as: CN109426013A; CN109426013B

Abstract

A color film substrate defect analysis method, and a detection and repair method and apparatus. The color film substrate defect analysis method comprises: obtaining data of filter parameters of a first number of inspected defects inspected by an automatic optical inspection device from a plurality of color film substrate samples; obtaining data of filter parameters of a second number of repaired defects repaired by a repair device from the first number of inspected defects; and analyzing the data of the filter parameters of the first number of inspected defects and the data of the filter parameters of the second number of repaired defects to obtain discrepant data between the data of the filter parameters of the inspected defects and the data of the filter parameters of the repaired defects, and determining the filter scope corresponding to the filter parameters according to the discrepant data.

Description

Color film substrate defect analysis method, detection and repair method and device

Cross-reference to related applications

The present application claims priority to Chinese Patent Application No. 201710730999.9, filed on Jan. 23,,,,,,,,,,

Technical field

The present disclosure relates to the field of color film substrate defect detection technology, and in particular, to a color film substrate defect analysis method, a detection and repair method and device.

Background technique

At present, after completing each process of a thin film transistor liquid crystal display (TFT-LCD) color film substrate, it is generally required to feed the color film substrate into an automatic optical detection device (AOI) for microscopic defect detection, which is detected by the AOI. The micro-defective color film substrate also needs to be sent to a repair device for defect repair. Whether all the microscopic defects detected by AOI directly affect the quality of the color film substrate. In actual production, only about 30% of the microscopic defects detected by AOI need to be repaired, and the remaining 70% of defects are not visible in the repair process or need not be repaired. However, in order to ensure the quality of the color film substrate, these 70% micro defects need to be confirmed in the repair equipment, resulting in wasted time and seriously affecting the production capacity.

In order to reduce the time waste of confirming the defects that need not be repaired, in the related art, the AOI defect detection standard may be relaxed, or some defects may be directly filtered in the repairing device, but the two filtering methods completely rely on the engineer experience, and the filtering effect is not quantifiable. The risk of AOI missed inspection and the risk of repairing equipment repair are uncontrollable, and the quality of the color film substrate cannot be guaranteed.

Summary of the invention

The present disclosure provides a method for analyzing defects of a color film substrate, including:

Obtaining data of a filter parameter of the first number of detected defects detected by the automatic optical detecting device from the plurality of color film substrate samples;

Obtaining data of a filtering parameter of the second number of repair defects repaired by the repair device from the first number of detected defects;

And analyzing data of the filtering parameter of the first number of detected defects and the filtering parameter of the second number of repairing defects, obtaining data of the filtering parameter of the detected defect and filtering parameters of the repairing defect The difference data of the data is determined according to the difference data, and the filtering range corresponding to the filtering parameter is determined.

Optionally, the filtering parameter includes at least one of a defect size, a defect grayscale value, and a grayscale difference value of the defect grayscale value and the corresponding normal grayscale value.

Optionally, when the filtering parameter includes a defect size, the data of the filtering parameter of the first quantity of detected defects and the filtering parameter of the second quantity of repairing defects are analyzed, and the obtained The step of detecting the difference between the data of the filtering parameter of the defect and the data of the filtering parameter of the defect, and determining the filtering range corresponding to the filtering parameter according to the difference data includes:

Determining, according to the data of the defect size of the first number of detected defects and the defect size of the second number of repair defects, a quantity distribution of different defect sizes of the detected defect and the repair defect;

Obtaining difference data of the data of the defect size of the detected defect and the data of the defect size of the repair defect according to the quantity distribution of the different defect sizes of the detected defect and the repair defect, and determining the defect size according to the difference data Corresponding filter range.

Optionally, the step of determining the quantity distribution of the different defect sizes of the detected defect and the repair defect includes:

Determining, by the first value range, the first value range of the defect size of all the detected defects, and dividing the first value range into a plurality of first defect size partitions, wherein each first defect size partition has the same length;

Determining the number of detected defects in each of the first defect size partitions;

Obtaining a columnar distribution map of the defect size of the detected defect according to the first defect size partition and the corresponding number of detected defects;

Performing a Lorentz curve fitting on the columnar profile of the defect size of the detected defect to obtain a Lorentz curve of the defect size of the detected defect;

Determining a second range of values of defect sizes of all repair defects, dividing the second value range into a plurality of second defect size partitions, wherein each second defect size partition has the same length;

Determining the number of repair defects in each of the second defect size partitions;

Obtaining a columnar distribution map of the defect size of the repair defect according to the second defect size partition and the number of corresponding repair defects;

Performing a Lorentz curve fitting on the columnar profile of the defect size of the repair defect to obtain a Lorentz curve of the defect size of the repair defect;

The difference data of the defect size of the detected defect and the data of the defect size of the repair defect are obtained according to the quantity distribution of the different defect sizes of the detected defect and the repair defect, and the difference data is determined according to the difference data. The step of filtering the range corresponding to the defect size includes:

Comparing the Lorenz curve of the defect size of the detected defect and the Lorentz curve of the defect size of the repair defect into the same coordinate system for comparison, and obtaining the data of the defect size of the detected defect according to the comparison result The difference data of the data of the defect size of the defect is repaired, and the filtering range corresponding to the defect size is determined according to the difference data.

Optionally, when the filtering parameter includes a grayscale value of the defect grayscale value and the defect grayscale value and the corresponding normal grayscale value, the data and the filtering parameter of the first number of detected defects are The data of the filter parameter of the second number of repair defects is analyzed, and the difference data between the data of the filter parameter of the detected defect and the data of the filter parameter of the repair defect is obtained, and the filter parameter is determined according to the difference data. The steps of filtering range include:

Determining the number distribution of the detected defects and the repair defects on different gray levels;

Dividing all gray levels into a plurality of gray level partitions according to the quantity distribution of the detected defects and the repair defects on different gray levels;

Determining a quantity distribution of gray scale values of the detected defects and corresponding gray scale values on different gray scale partitions, and determining gray scale values of the repair defects and corresponding normal gray scale values The number distribution of grayscale differences on different grayscale partitions;

And according to the quantity distribution of the grayscale value of the detected defect and the grayscale value of the corresponding normal grayscale value on different grayscale partitions, and the grayscale value of the repairing defect and the gray of the corresponding normal grayscale value a quantity distribution of the step difference values on different gray-scale partitions, obtaining a gray-scale difference between the gray-scale value of the detected defect and the corresponding normal gray-scale value, and a gray-scale value of the repaired defect and a corresponding normal gray-scale value The difference data of the grayscale difference values of the values, and determining the filtering range corresponding to the grayscale difference values of the different grayscale partitions according to the difference data.

The present disclosure also provides a method for detecting and repairing defects of a color film substrate, including:

Obtaining a filtering range of a filtering parameter for detecting a defect of the color filter substrate, wherein a filtering range of the filtering parameter is obtained by an analysis method of the defect of the color film substrate;

The defect of the color filter substrate is detected or repaired according to the filtering range of the filter parameter.

Optionally, the method for detecting or repairing defects of the color filter substrate according to the filtering range of the filtering parameter includes:

The color filter substrate is optically detected as a defect determination condition on the automatic optical detecting device, and defects not included in the filtering range are detected to obtain a detected defect.

The repairing device determines whether the detected defect obtained by the automatic optical detecting device belongs to the filtering range, obtains the detected defect that does not belong to the filtering range as the detected detecting defect, and performs the filtered detected defect. repair.

The present disclosure also provides an analysis device for a defect of a color film substrate, comprising:

a first acquiring module, configured to acquire parameter information of a first quantity of detected defects detected by the automatic optical detecting device from the plurality of color film substrate samples;

a second acquiring module, configured to acquire parameter information of a second number of repair defects repaired by the repairing device from the first number of detected defects;

a determining module, configured to analyze data of the first number of filtering parameters of the detected defects and the filtering parameters of the second number of repairing defects, to obtain data and repair of the filtering parameters of the detected defects The difference data of the data of the filter parameter of the defect, and determining the filter range corresponding to the filter parameter according to the difference data.

Optionally, when the filtering parameter includes a defect size, the determining module includes:

a first determining unit, configured to determine different defect sizes of the detected defect and the repair defect according to the data of the defect size of the first number of detected defects and the data of the defect size of the second number of repair defects Quantity distribution;

a second determining unit, configured to obtain, according to the quantity distribution of the different defect sizes of the detected defect and the repair defect, difference data of the data of the defect size of the detected defect and the data of the defect size of the repair defect, according to the The difference data determines a filtering range corresponding to the defect size.

Optionally, the first determining unit is configured to determine a first value range of all the defect sizes of the detected defects, and divide the first value range into a plurality of first defect size partitions, where each Determining the length of the first defect size partition; determining the number of detected defects in each of the first defect size partitions; obtaining the detection defect according to the first defect size partition and the corresponding number of detected defects a columnar profile of the defect size; performing a Lorentz curve fitting on the columnar profile of the defect size of the detected defect to obtain a Lorentz curve of the defect size of the detected defect; determining defects of all repair defects a second value range of the size, the second value range is divided into a plurality of second defect size partitions, wherein each second defect size partition has the same length; determining each of the second defect size partitions The number of repair defects; according to the second defect size partition and the number of corresponding repair defects, a columnar map of the defect size of the repair defect is obtained; Size distribution cylindrical trap for Lorenz curve fitting, the Lorenz curve to obtain the defect size defect repair;

The second determining unit is configured to integrate the Lorentz curve of the defect size of the detected defect and the Lorentz curve of the defect size of the repair defect into the same coordinate system for comparison, according to the comparison result The difference data of the data of the defect size of the defect and the data of the defect size of the repair defect are described, and the filtering range corresponding to the defect size is determined according to the difference data.

Optionally, when the filtering parameter includes a grayscale value of a defect grayscale value and a defect grayscale value and a corresponding normal grayscale value, the determining module includes:

a third determining unit, configured to determine a quantity distribution of the detected defect and the repair defect on different gray levels;

a dividing unit, configured to divide all gray levels into a plurality of gray level partitions according to the quantity distribution of the detected defects and the repair defects on different gray levels;

a fourth determining unit, configured to determine a quantity distribution of a grayscale value of the detected defect and a grayscale difference of the corresponding normal grayscale value on different grayscale partitions, and determine a grayscale value of the repaired defect The number distribution of grayscale differences with corresponding normal grayscale values on different grayscale partitions;

a fifth determining unit, configured to: according to the quantity distribution of the grayscale value of the detected defect and the grayscale difference of the corresponding normal grayscale value on different grayscale partitions, and the grayscale value of the repairing defect and corresponding The number distribution of the grayscale difference values of the normal grayscale values on different grayscale partitions, and the grayscale difference between the grayscale value of the detected defect and the corresponding normal grayscale value and the grayscale of the repairing defect are obtained The difference data of the grayscale difference between the value and the corresponding normal grayscale value, and determining the filtering range corresponding to the grayscale difference of the different grayscale partitions according to the difference data.

The present disclosure also provides a detection and repair device for a defect of a color film substrate, comprising:

An obtaining module, configured to obtain a filtering range of a filtering parameter for detecting a defect of the color filter substrate, wherein a filtering range of the filtering parameter is obtained by the foregoing analyzing method;

And a filtering module, configured to detect or repair defects of the color filter substrate according to the filtering range of the filtering parameter.

Optionally, the detecting and repairing device for the defect of the color filter substrate comprises an automatic optical detecting device, and the filtering module optically detects the color filter substrate by using the filtering range of the filtering parameter as a defect determining condition, Defects within the filtering range are detected and defects are detected.

Optionally, the detecting and repairing device of the color film substrate defect comprises a repairing device, and the filtering module determines whether the detected defect obtained by the automatic optical detecting device belongs to a filtering range, and obtains a detecting defect that does not belong to the filtering range. As a detected defect after filtration, the detected defect detected after the filtration is repaired.

The present disclosure also provides an analysis device for a defect of a color film substrate, comprising: a memory, a processor, and a computer program stored on the memory and operable on the processor, wherein the processor implements the computer program when the computer program is executed The steps in the analysis method of the color film substrate defect.

The present disclosure also provides a detection and repair device for a defect of a color film substrate, comprising: a memory, a processor, and a computer program stored on the memory and operable on the processor, wherein the processor executes the computer program The steps in the method for detecting and repairing defects of the color film substrate.

DRAWINGS

In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings to be used in the description of the embodiments of the present disclosure will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the present disclosure. Other drawings may also be obtained from those of ordinary skill in the art based on these drawings without the inventive labor.

1 is a schematic flow chart of a method for analyzing defects of a color filter substrate according to some embodiments of the present disclosure;

2 is a schematic flow chart of a method for analyzing defects of a color filter substrate according to some embodiments of the present disclosure;

3 is a schematic flow chart of a method for analyzing defects of a color filter substrate according to some embodiments of the present disclosure;

4 is a distribution diagram of defect sizes of detected defects detected by an automatic optical detecting device according to some embodiments of the present disclosure;

5 is a distribution diagram of defect sizes of repair defects repaired by a repair device according to some embodiments of the present disclosure;

6 is a schematic diagram showing the integration of the Lorentz curve of the defect size of the detected defect in FIG. 4 and the Lorentz curve of the defect size of the repair defect in FIG. 5;

7 is a schematic diagram of the Lorentz curve of the defect size of the detected defect in FIG. 6 and the Lorentz curve of the defect size of the repair defect;

FIG. 8 is a schematic flow chart of a method for analyzing defects of a color filter substrate according to some embodiments of the present disclosure; FIG.

9 is a quantity distribution diagram of detection defects detected by an automatic optical detecting device and repair defects of a repairing device repaired on different gray levels according to an embodiment of the present disclosure;

10 is a schematic diagram of gray-scale difference values between detected defects and repair defects and corresponding normal gray-scale values on different gray-scale partitions;

11 is a quantity distribution diagram of actual detection defects and repair defects on different gray scales after detecting or repairing defects of the color filter substrate by using the filter range of the gray scale difference;

12 is a schematic flow chart of a method for detecting and repairing defects of a color filter substrate according to some embodiments of the present disclosure;

FIG. 13 is a structural block diagram of an analysis apparatus for a defect of a color filter substrate according to some embodiments of the present disclosure; and

FIG. 14 is a structural block diagram of a detecting and repairing device for a defect of a color filter substrate according to an embodiment of the present disclosure.

Detailed ways

The technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. It is apparent that the described embodiments are part of the embodiments of the present disclosure, and not all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present disclosure are within the scope of the disclosure.

Please refer to FIG. 1. FIG. 1 is a schematic flow chart of a method for analyzing defects of a color filter substrate according to some embodiments of the present disclosure, where the analysis method includes:

Step 11: Acquire data of filtering parameters of the first number of detected defects detected by the automatic optical detecting device from the plurality of color film substrate samples;

For example, a batch of color film substrates that have been subjected to defect detection and repaired by the repair device may be used as samples by an automatic optical detecting device.

The filtering parameter may include at least one of a defect size, a defect grayscale value, and a grayscale difference value of the defect grayscale value and the corresponding normal grayscale value. The normal gray scale value refers to a gray scale value of the same region of the color filter substrate having no defect corresponding to the gray scale value of the defect.

Step 12: Obtain data of a filtering parameter of a second number of repair defects repaired by the repair device from the first number of detected defects;

Step 13: analyzing data of the first number of detection parameter of the detected defect and the data of the filtering parameter of the second quantity of the repair defect, and obtaining data of the filter parameter of the detected defect and repairing the defect Filtering the difference data of the data of the parameter, and determining, according to the difference data, a filtering range corresponding to the filtering parameter.

In the embodiment of the present disclosure, the data of the filtering parameter of the detection defect of the automatic optical detecting device and the filtering parameter of the repairing defect of the repairing device are integrated, the data of the filtering parameter for detecting the defect and the filtering parameter of the repairing defect are The data is compared to obtain the difference data of the two, and the filtering range corresponding to the filtering parameter is determined according to the difference data, so that the determined filtering range is more accurate, and the filtering range can be used to filter the defects that need not be repaired, thereby saving the repairing device confirmation check. The time of the defect has increased the production capacity.

The analysis method of the defect of the color filter substrate in the embodiment of the present disclosure will be described in detail below for different types of filter parameters.

Please refer to FIG. 2 . FIG. 2 is a schematic flowchart diagram of a method for analyzing defects of a color filter substrate according to some embodiments of the present disclosure, where the analysis method includes:

Step 21: Obtain data of a defect size of the first number of detected defects detected by the automatic optical detecting device from the plurality of color film substrate samples;

In the embodiment of the present disclosure, the defect size may refer to an area of a defect or other size information of the defect.

Step 22: Obtain data of a defect size of the second number of repair defects repaired by the repair device from the first number of detected defects;

Step 23: determining, according to the data of the defect size of the first number of detected defects and the defect size of the second number of repair defects, a quantity distribution of different defect sizes of the detected defect and the repair defect;

Step 24: Obtain difference data of the data of the defect size of the detected defect and the data of the defect size of the repair defect according to the quantity distribution of the different defect sizes of the detected defect and the repair defect, and determine the data according to the difference data. The filtering range corresponding to the defect size.

In the embodiment of the present disclosure, the number of different defect sizes of the detected defect and the repaired defect is counted, and the defect size with less quantity distribution may be determined according to the quantity distribution of different defect sizes, because the defect size indicating that the quantity distribution is less has It may not be necessary to make a repair so that the filtering range corresponding to the defect size can be determined.

Please refer to FIG. 3 . FIG. 3 is a schematic flowchart diagram of a method for analyzing defects of a color filter substrate according to some embodiments of the present disclosure, where the analysis method includes:

Step 31: Obtain data of a defect size of the first number of detected defects detected by the automatic optical detecting device from the plurality of color film substrate samples;

Step 32: Obtain data of a defect size of the second number of repair defects repaired by the repair device from the first number of detected defects;

Step 33: Determine a first value range of the defect size of all detected defects, and divide the first value range into a plurality of first defect size partitions, wherein each first defect size partition has the same length;

For example, the first value range may be A<Size≤B, and the first value range is divided into “B+1-A” partitions, and each partition is: A<Size≤A+1, A +1<Size≤A+2,..., B-1<Size≤B, where Size is the defect size.

For example, the minimum value of the defect size in the first number of detected defects is 15, the maximum value of the defect size is 140, and the first value range of the defect size of the detected defect may be 15 ≤ Size ≤ 140, which will be 15 ≤Size≤140 is divided into “140+1-15” partitions, and each partition is: 15≤Size≤16, 16<Size≤17, ..., 139<Size≤140.

Of course, in some other embodiments of the present disclosure, the first range of values may not be determined based on the minimum and minimum values of the defect sizes in the first number of detected defects, for example, may be determined based on empirical values.

In the embodiment of the present disclosure, the size of the defect is partitioned, which can effectively reduce the amount of calculation. Of course, the finer the partition, the more accurate the result is.

Step 34: Determine the number of detected defects in each of the first defect size partitions;

Step 35: Obtain a columnar distribution map of the defect size of the detected defect according to the first defect size partition and the corresponding number of detected defects;

Please refer to FIG. 4. FIG. 4 is a distribution diagram of defect sizes detected by the automatic optical detecting device according to the embodiment of the present disclosure. In Fig. 4, the X axis represents the defect size (Size), and the Y axis represents the number of detected defects on the different defect size partitions. In the embodiment of the present disclosure, the first value range of the defect size of detecting the defect may be 15≤Size≤140, and 15≤Size≤140 is divided into 25 partitions, each partition is: 15≤Size≤20, 20 <Size ≤ 25, ..., 135 < Size ≤ 140. The columnar profile in Figure 4 can reflect the size distribution of the actual detected defects of the automated optical detection device.

Step 36: Perform a Lorentz curve fitting on the columnar profile of the defect size of the detected defect to obtain a Lorentz curve of the defect size of the detected defect;

Please refer to the black curve in Figure 4, which is the Lorentz curve for detecting the defect size of the defect. Lorentz fitting is a fitting closest to the actual production data, converting the columnar distribution into a Lorenz curve. The purpose is to find the distribution peak of the defect size of the automatic optical detection device actually detecting the defect, so as to find the optimal parameter value between the two peaks.

Of course, in other embodiments of the present disclosure, other fitting methods, such as Gaussian fitting, etc., may also be employed.

Step 37: Determine a second range of values of defect sizes of all repair defects, and divide the second value range into a plurality of second defect size partitions, wherein each second defect size partition has the same length;

The second value range may be, for example, C<Size≤D, and the first value range is divided into “D+1-C” partitions, and each partition is: C<Size≤C+1, C+ 1<Size≤C+2, . . . , D-1<Size≤D, where Size is the defect size. Optionally, the second value range is the same as the first value range, that is, C is equal to A, and D is equal to B.

For example, the minimum size of the defect in the second number of repair defects is 15, the maximum value of the defect size is 140, and the second value range of the defect size of the repair defect may be 15 ≤ Size ≤ 140, and 15 ≤ Size ≤140 is divided into "140+1-15" partitions, each partition is: 15 ≤ Size ≤ 16, 16 < Size ≤ 17, ..., 139 < Size ≤ 140.

Of course, in some other embodiments of the present disclosure, the second value range may not be determined according to the minimum value and the minimum value of the defect size in the second number of repair defects, for example, may be determined according to empirical values, or directly The first range of values takes the same range.

Step 38: Determine the number of repair defects in each of the second defect size partitions;

Step 39: Obtain a columnar distribution map of the defect size of the repair defect according to the second defect size partition and the number of corresponding repair defects;

Please refer to FIG. 5. FIG. 5 is a distribution diagram of defect sizes of repair defects repaired by the repair device according to an embodiment of the present disclosure. In Fig. 5, the X axis represents the defect size (Size), and the Y axis represents the number of repair defects on the different defect size partitions. In the embodiment of the present disclosure, the second value range of the defect size of the repair defect may be 15≤Size≤140, and 15≤Size≤140 is divided into 25 partitions, each partition is: 15≤Size≤20,20 <Size ≤ 25, ..., 135 < Size ≤ 140. The columnar profile in Figure 5 can reflect the size distribution of the actual repair defects of the repair equipment.

Step 310: Perform a Lorentz curve fitting on the columnar profile of the defect size of the repair defect to obtain a Lorentz curve of the defect size of the repair defect;

Referring to the black curve in Fig. 5, the Lorentz curve for repairing the defect size of the defect, the purpose of converting the columnar map into the Lorentz curve is to find the distribution peak of the defect size of the repairing device actually repairing the defect.

Step 311: Integrate the Lorentz curve of the defect size of the detected defect and the Lorentz curve of the defect size of the repair defect into the same coordinate system for comparison, and obtain the defect of the detected defect according to the comparison result. The difference data of the size data and the defect size data of the repair defect, and the filtering range corresponding to the defect size is determined according to the difference data.

Please refer to FIG. 6. FIG. 6 is a schematic diagram of the integration of the Lorentz curve of the defect size of the detected defect in FIG. 4 and the Lorentz curve of the defect size of the repair defect in FIG. In Fig. 6, the X axis represents the defect size (Size), and the Y axis represents the number of detected defects and repair defects on the partitions of different defect sizes. In the embodiment of the present disclosure, the size of the defect ranges from 15≤Size≤140, and 15≤Size≤140 is divided into 25 partitions, each partition is: 15≤Size≤20, 20<Size≤25,... ..., 135 <Size ≤ 140.

That is, the Lorentz curve of the defect size of the detected defect in FIG. 4 and the Lorentz curve of the defect size of the repair defect in FIG. 5 are integrated into the same coordinate system for comparison, and the defect size is determined according to the comparison result. The filtering range is shown in Fig. 6. As can be seen from Fig. 6, the number of detected defects and the number of repaired defects after the defect size tend to be 0, so the filtering range of the defect size can be determined as Greater than 110.

In order to more vividly show the Lorenz curve of the defect size of the detected defect and the distribution of the Lorentz curve of the defect size of the repair defect, in the embodiment of the present disclosure, the total number of detected defects and repair defects may also be For the normalization process, please refer to FIG. 7. FIG. 7 is a schematic diagram of the Lorentz curve of the defect size of the defect detected in FIG. 6 and the Lorentz curve of the defect size of the repair defect, which may be normalized. According to the Lorentz curve of the defect size of the detected defect after normalization and the Lorentz curve of the defect size of the repair defect, the filtering range of the defect size is set, and the small number of defects that do not need to be repaired are precisely filtered. .

In the above embodiment, the analysis method of the color film substrate defect of the embodiment of the present disclosure is described by taking the filter parameter including the defect size as an example. The following filter parameters include the defect gray scale value and the defect gray scale value and the corresponding normal gray scale value. The gray scale difference is taken as an example to describe the analysis method of the color film substrate defect of the embodiment of the present disclosure.

Please refer to FIG. 8. FIG. 8 is a schematic flowchart diagram of a method for analyzing defects of a color filter substrate according to some embodiments of the present disclosure, where the analysis method includes:

Step 81: Acquire data of a defect grayscale value of the first number of detected defects detected by the automatic optical detecting device from the plurality of color film substrate samples, and a normal grayscale value of each detected defect;

Step 82: Obtain data of a defect grayscale value of a second number of repair defects repaired by the repair device from the first number of detected defects, and a normal grayscale value of each repair defect;

Step 83: determining a quantity distribution of the detected defect and the repair defect on different gray levels;

Please refer to FIG. 9. FIG. 9 is a diagram showing the quantity distribution of the detection defects detected by the automatic optical detecting device and the repairing defects of the repairing device repaired on different gray levels according to the embodiment of the present disclosure. The optical definition gray scale is divided into 0 to 255 steps, and the defects detected by the color film substrate are distributed on the 256 gray scales. In Fig. 9, the X axis represents the standard Gray scale value, and the Y axis represents the number of defects detected and repair defects on different gray scales. It can be seen from Fig. 9 that the number of detected defects and repair defects on each gray-scale partition is distributed, thereby analyzing which gray-level partitions need to be filtered and dividing the gray-scale partition.

Step 84: Divide all gray levels into a plurality of gray level partitions according to the quantity distribution of the detected defects and the repair defects on different gray levels;

For example, all gray levels (0 to 255) can be divided into four partitions. The gray scale range of partition one is: 0<Gray1≤60, and the gray scale range of partition two is: 60<Gray2≤110, partition three. The grayscale range is: 110<Gray3≤140, and the grayscale range of the partition four is: 140<Gray4≤255.

Of course, it can be understood that the more partitions are set, the more accurate the filtering can be achieved.

Step 85: Determine a quantity distribution of the grayscale value of the detected defect and a grayscale value of the corresponding normal grayscale value on different grayscale partitions, and determine a grayscale value of the repairing defect and a corresponding normal The number distribution of grayscale values of grayscale values on different grayscale partitions;

Please refer to FIG. 10. FIG. 10 is a schematic diagram of gray-scale difference between detected defects and repair defects and corresponding normal gray-scale values on different gray-scale partitions. In FIG. 10, the X-axis represents the standard gray scale, and the Y-axis represents the gray scale. The gray scale value of the defect and the repair defect is detected on the step partition and the gray scale difference ΔGray of the corresponding normal gray scale value.

Step 86: According to the quantity distribution of the grayscale value of the detected defect and the grayscale value of the corresponding normal grayscale value on different grayscale partitions, and the grayscale value of the repairing defect and the corresponding normal grayscale a quantity distribution of grayscale differences of values on different grayscale partitions, obtaining grayscale values of the detected defects and grayscale values of corresponding normal grayscale values and corresponding grayscale values of the repaired defects The difference data of the grayscale difference values of the normal grayscale values, and determining the filtering range corresponding to the grayscale difference values of the different grayscale partitions according to the difference data.

For example, according to the change of ΔGray corresponding to the detected defect and the repair defect in FIG. 10, the filtering range of the gray-scale difference ΔGray on each divided gray-scale partition is set to prevent defects of each partition from being repaired. Filter out separately.

Please refer to Table 1 below. Table 1 is the result of setting the filtering range of the grayscale difference ΔGray on each divided grayscale partition according to the change of ΔGray corresponding to the detected defect and the repaired defect in FIG. :

Table 1

That is to say, for the partition 0<Gray1≤60, the filtering range is that the grayscale difference is less than 30, that is, only the defect with the grayscale difference greater than or equal to 30 is detected or repaired, and the defect with the grayscale difference of less than 30 is not Test or repair.

When the filtering range of the grayscale difference ΔGray on each grayscale partition set in the embodiment of the present disclosure is used to detect or repair the defect of the color filter substrate, the number of detected defects of the automatic optical detecting device can be reduced by 3098. The number of repair defects in the repair equipment can be reduced by seven, that is to say, the defect detection rate of 0.03% and the defect repair rate of 0.114% reduce the total defect amount by 13.76%.

Please refer to FIG. 11. FIG. 11 is a diagram showing the quantity distribution of actual detected defects and repair defects on different gray scales after detecting or repairing the defects of the color filter substrate by using the filter range of the gray scale difference. In Fig. 11, the X axis represents the standard gray scale value, and the Y axis represents the number of defects detected and repair defects on different gray scales. Comparing Fig. 11 and Fig. 9, it can be seen that the number of detection defects and repair defects of some gray-scale partitions is significantly reduced, that is, the defects that are not required to be repaired by each partition are separately filtered, thereby reducing the repair equipment to confirm the detection of defects. Time to effectively increase production capacity.

In the above embodiment, the filtering parameter includes a grayscale value of the defect and a grayscale difference between the grayscale value of the defect and the corresponding normal grayscale value. Of course, in some other embodiments of the present disclosure, the filtering parameter may also include only the gray of the defect. Order value.

In some other embodiments of the present disclosure, the filtering parameter may also include the defect size, the defect grayscale value, and the grayscale difference value of the defect grayscale value and the corresponding normal grayscale value, so that the filtering range of the obtained filtering parameter is obtained. more acurrate.

Optionally, in the embodiment of the present disclosure, in order to further improve the accuracy of the filtering range of the filtering parameter, the defect filtering rate and the defect detection rate may be calculated after the color filter substrate is subjected to defect filtering by using the filtering range of the filtering parameter. And/or defect miss rate, etc. to assess whether the filtering range is reasonable and to obtain an optimal filtering range.

Among them, the defect filtration rate, the defect miss detection rate and the defect miss repair rate can be calculated by the following formula:

The above embodiments of the present disclosure have the advantages of simple operation and easy implementation, and the filtering method of the filtering parameters can be quickly obtained by using the analysis method. The statistics show that the filter range of the filter parameters obtained by the analysis method in the embodiment of the present disclosure can detect the defects of the color filter substrate or repair the defects of the color filter substrate without affecting the quality of the color filter substrate. The rate has been raised from about 30% to over 60%, and the production capacity of color film substrate defects has been improved by more than 20%.

Please refer to FIG. 12 , which is a schematic flowchart of a method for detecting and repairing defects of a color filter substrate according to an embodiment of the present disclosure, and the method for detecting and repairing includes:

Step 121: Obtain a filtering range of a filtering parameter for detecting a defect of a color filter substrate, where a filtering range of the filtering parameter is obtained by an analysis method of a defect of a color filter substrate according to any one of the above embodiments;

Step 122: Detect or repair the defect of the color filter substrate according to the filtering range of the filtering parameter.

In the embodiment of the present disclosure, the filtering range of the filtering parameter can filter out defects that do not need to be repaired, thereby reducing the time for the repairing device to confirm the detection of defects, and effectively increasing the productivity.

In some embodiments of the present disclosure, the filtering range of the filtering parameter may be set on the automatic optical detecting device. At this time, the method for detecting or repairing the defect of the color filter substrate according to the filtering range of the filtering parameter The method comprises: performing optical detection on the color filter substrate on the automatic optical detecting device by using the filtering range of the filtering parameter as a defect determining condition, and detecting a defect that does not belong to the filtering range, thereby obtaining a detected defect.

The automatic optical detecting device uses the filtering range of the filtering parameter as the defect determining condition to optically detect the color filter substrate, and when the defect is detected, the number of detected defects detected by the automatic optical detecting device can be reduced, thereby reducing the number of detected defects The repair equipment confirms the time of detecting the defect and effectively increases the production capacity.

In some other embodiments of the present disclosure, a filtering range of the filtering parameter may be set on the repairing device. In this case, the method for detecting or repairing the defect of the color filter substrate according to the filtering range of the filtering parameter includes: The repairing device determines whether the detected defect obtained by the automatic optical detecting device belongs to the filtering range, obtains the detected defect that does not belong to the filtering range as the detected detecting defect, and performs the filtered detected defect. repair.

The repairing device can repair the detected defects detected after filtering, and does not need to confirm the repaired defects, and the filtering on the side of the repairing device is better than filtering on the side of the automatic optical detecting device, because the filtering is performed in the repairing device. It does not affect the actual detection of defects in the automatic optical inspection equipment, enabling the automatic optical inspection equipment to better monitor the changes in defects in actual production.

Of course, in some other embodiments of the present disclosure, the automatic optical detecting device may first perform optical detection on the color filter substrate according to the defect determination condition in the related art to obtain a detected defect, and then adopt the filtering parameter. The filtering range filters the detected defects, obtains the detected defects after filtering, and repairs the detected defects after the filtering.

The repairing device can repair the detected defect detected by the filter, thereby reducing the time for the repairing device to confirm the detected defect and effectively increasing the productivity. At the same time, automated optical inspection equipment is also able to better monitor changes in defects in actual production.

Referring to FIG. 13 , some embodiments of the present disclosure further provide an analysis device for a defect of a color filter substrate, including:

In an embodiment of the present disclosure, optionally, the filtering parameter includes at least one of a defect size, a defect grayscale value, and a grayscale difference value of the defect grayscale value and the corresponding normal grayscale value.

In some embodiments of the present disclosure, when the filtering parameter includes a defect size, the determining module includes:

In some other embodiments of the present disclosure, when the filtering parameter includes a grayscale value of a defect grayscale value and a defect grayscale value and a corresponding normal grayscale value, the determining module includes:

Referring to FIG. 14 , some embodiments of the present disclosure further provide a detection and repair device for a defect of a color film substrate, including:

An obtaining module, configured to obtain a filtering range of a filtering parameter for detecting a defect of the color filter substrate, wherein a filtering range of the filtering parameter is obtained by an analysis method of a defect of the color filter substrate in any of the above embodiments;

In some embodiments of the present disclosure, the color film substrate defect detecting and repairing device includes an automatic optical detecting device, and the filtering module optically detects the color filter substrate by using the filtering range of the filtering parameter as a defect determining condition. Detection of defects that are not within the filtering range is detected, and defects are detected.

In some other embodiments of the present disclosure, the detecting and repairing device for the defect of the color filter substrate comprises a repairing device, and the filtering module determines whether the detected defect obtained by the automatic optical detecting device belongs to the filtering range, and the filter does not belong to the filtering. The detected defect in the range is detected as a detected defect after the filtration, and the detected defect detected after the filtration is repaired.

Unless otherwise defined, technical terms or scientific terms used in the present disclosure should be understood in the ordinary meaning of those of ordinary skill in the art. The words "first," "second," and similar terms used in the present disclosure do not denote any order, quantity, or importance, but are used to distinguish different components. Similarly, the words "a" or "an" and the like do not denote a quantity limitation, but mean that there is at least one. The words "connected" or "connected" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Upper", "lower", "left", "right", etc. are only used to indicate the relative positional relationship, and when the absolute position of the object to be described is changed, the relative positional relationship is also changed accordingly.

The above is a preferred embodiment of the present disclosure, and it should be noted that those skilled in the art can also make several improvements and refinements without departing from the principles of the present disclosure. It should be considered as the scope of protection of this disclosure.

Claims

A method for analyzing defects of a color film substrate, comprising:

Obtaining data of a filter parameter of the first number of detected defects detected by the automatic optical detecting device from the plurality of color film substrate samples;

Obtaining data of a filtering parameter of the second number of repair defects repaired by the repair device from the first number of detected defects;

And analyzing data of the filtering parameter of the first number of detected defects and the filtering parameter of the second number of repairing defects, obtaining data of the filtering parameter of the detected defect and filtering parameters of the repairing defect The difference data of the data is determined according to the difference data, and the filtering range corresponding to the filtering parameter is determined.
The method of analyzing a defect of a color filter substrate according to claim 1, wherein the filter parameter comprises at least one of a defect size, a defect grayscale value, and a grayscale difference value of the defect grayscale value and the corresponding normal grayscale value. .
The method for analyzing a defect of a color filter substrate according to claim 2, wherein said filter parameter includes data of said filter parameter of said first number of detected defects and said second number of times when said filter parameter includes a defect size The data of the filter parameter of the repair defect is analyzed, and the difference data of the data of the filter parameter of the detected defect and the data of the filter parameter of the repair defect is obtained, and the step of determining the filter range corresponding to the filter parameter according to the difference data includes: :

Determining, according to the data of the defect size of the first number of detected defects and the defect size of the second number of repair defects, a quantity distribution of different defect sizes of the detected defect and the repair defect;

Obtaining difference data of the data of the defect size of the detected defect and the data of the defect size of the repair defect according to the quantity distribution of the different defect sizes of the detected defect and the repair defect, and determining the defect size according to the difference data Corresponding filter range.
The method of analyzing a defect of a color filter substrate according to claim 3, wherein

The step of determining the quantity distribution of the different defect sizes of the detected defect and the repair defect includes:

Determining a first range of values of all the defect sizes of the detected defects, and dividing the first range of values into a plurality of first defect size partitions, wherein each first defect size partition has the same length;

Determining the number of detected defects in each of the first defect size partitions;

Obtaining a columnar distribution map of the defect size of the detected defect according to the first defect size partition and the corresponding number of detected defects;

Performing a Lorentz curve fitting on the columnar profile of the defect size of the detected defect to obtain a Lorentz curve of the defect size of the detected defect;

Determining a second range of values of defect sizes of all repair defects, dividing the second value range into a plurality of second defect size partitions, wherein each second defect size partition has the same length;

Determining the number of repair defects in each of the second defect size partitions;

Obtaining a columnar distribution map of the defect size of the repair defect according to the second defect size partition and the number of corresponding repair defects;

Performing a Lorentz curve fitting on the columnar profile of the defect size of the repair defect to obtain a Lorentz curve of the defect size of the repair defect;

The difference data of the defect size of the detected defect and the data of the defect size of the repair defect are obtained according to the quantity distribution of the different defect sizes of the detected defect and the repair defect, and the difference data is determined according to the difference data. The step of filtering the range corresponding to the defect size includes:

Comparing the Lorenz curve of the defect size of the detected defect and the Lorentz curve of the defect size of the repair defect into the same coordinate system for comparison, and obtaining the data of the defect size of the detected defect according to the comparison result The difference data of the data of the defect size of the defect is repaired, and the filtering range corresponding to the defect size is determined according to the difference data.
The method for analyzing a defect of a color filter substrate according to any one of claims 2 to 4, wherein, when the filter parameter includes a grayscale value of a defect grayscale value and a defect grayscale value and a corresponding normal grayscale value, And analyzing data of the first number of filtering parameters of the detected defects and the filtering parameters of the second number of repairing defects, and obtaining data of the filtering parameters of the detected defects and filtering of the repairing defects The step of determining the filtering range corresponding to the filtering parameter according to the difference data of the parameter data includes:

Determining the number distribution of the detected defects and the repair defects on different gray levels;

Dividing all gray levels into a plurality of gray level partitions according to the quantity distribution of the detected defects and the repair defects on different gray levels;

Determining a quantity distribution of gray scale values of the detected defects and corresponding gray scale values on different gray scale partitions, and determining gray scale values of the repair defects and corresponding normal gray scale values The number distribution of grayscale differences on different grayscale partitions;

And according to the quantity distribution of the grayscale value of the detected defect and the grayscale value of the corresponding normal grayscale value on different grayscale partitions, and the grayscale value of the repairing defect and the gray of the corresponding normal grayscale value a quantity distribution of the step difference values on different gray-scale partitions, obtaining a gray-scale difference between the gray-scale value of the detected defect and the corresponding normal gray-scale value, and a gray-scale value of the repaired defect and a corresponding normal gray-scale value The difference data of the grayscale difference values of the values, and determining the filtering range corresponding to the grayscale difference values of the different grayscale partitions according to the difference data.
A method for detecting and repairing defects of a color film substrate, comprising:

Obtaining a filtering range of a filter parameter for detecting a defect of a color filter substrate by using the analysis method of the defect of the color filter substrate according to any one of claims 1 to 5;

The defect of the color filter substrate is detected or repaired according to the filtering range of the filter parameter.
The method for detecting and repairing defects of a color filter substrate according to claim 6, wherein the method for detecting or repairing defects of the color filter substrate according to the filtering range of the filter parameter comprises:

The color filter substrate is optically detected as a defect determination condition on the automatic optical detecting device, and defects not included in the filtering range are detected to obtain a detected defect.
The method for detecting and repairing defects of a color filter substrate according to claim 6, wherein the method for detecting or repairing defects of the color filter substrate according to the filtering range of the filter parameter comprises:

The repairing device determines whether the detected defect obtained by the automatic optical detecting device belongs to the filtering range, obtains the detected defect that does not belong to the filtering range as the detected detecting defect, and performs the filtered detected defect. repair.
An analysis device for a defect of a color film substrate, comprising:

a first acquiring module, configured to acquire parameter information of a first quantity of detected defects detected by the automatic optical detecting device from the plurality of color film substrate samples;

a second acquiring module, configured to acquire parameter information of a second number of repair defects repaired by the repairing device from the first number of detected defects;

a determining module, configured to analyze data of the first number of filtering parameters of the detected defects and the filtering parameters of the second number of repairing defects, to obtain data and repair of the filtering parameters of the detected defects The difference data of the data of the filter parameter of the defect, and determining the filter range corresponding to the filter parameter according to the difference data.
The apparatus for analyzing defects of a color filter substrate according to claim 9, wherein the filter parameter includes at least one of a defect size, a defect grayscale value, and a grayscale difference value of the defective grayscale value and the corresponding normal grayscale value. .
The apparatus for analyzing a defect of a color filter substrate according to claim 10, wherein when the filter parameter includes a defect size, the determining module comprises:

a first determining unit, configured to determine different defect sizes of the detected defect and the repair defect according to the data of the defect size of the first number of detected defects and the data of the defect size of the second number of repair defects Quantity distribution;

a second determining unit, configured to obtain, according to the quantity distribution of the different defect sizes of the detected defect and the repair defect, difference data of the data of the defect size of the detected defect and the data of the defect size of the repair defect, according to the The difference data determines a filtering range corresponding to the defect size.
The apparatus for analyzing a defect of a color filter substrate according to claim 11, wherein

The first determining unit is configured to determine a first value range of the defect size of all detected defects, and divide the first value range into a plurality of first defect size partitions, wherein each first defect size The lengths of the partitions are the same; determining the number of detected defects in each of the first defect size partitions; and obtaining the defect size of the detected defects according to the first defect size partition and the corresponding number of detected defects a columnar distribution map; performing a Lorentz curve fitting on the columnar distribution map of the defect size of the detected defect, obtaining a Lorenz curve of the defect size of the detected defect; determining a second defect size of all the repaired defects a value range, the second value range is divided into a plurality of second defect size partitions, wherein each second defect size partition has the same length; determining a repair defect in each of the second defect size partitions a quantity; a columnar distribution map of the defect size of the repair defect according to the second defect size partition and the corresponding number of repair defects; a defect size of the repair defect Perform a histogram of the Lorentzian curve fit, the Lorenz curve to obtain the defect size defect repair;

The second determining unit is configured to integrate the Lorentz curve of the defect size of the detected defect and the Lorentz curve of the defect size of the repair defect into the same coordinate system for comparison, according to the comparison result The difference data of the data of the defect size of the defect and the data of the defect size of the repair defect are described, and the filtering range corresponding to the defect size is determined according to the difference data.
The apparatus for analyzing defects of a color filter substrate according to any one of claims 10 to 12, wherein, when the filter parameter includes a gray scale difference between a defect gray scale value and a defect gray scale value and a corresponding normal gray scale value, The determining module includes:

a third determining unit, configured to determine a quantity distribution of the detected defect and the repair defect on different gray levels;

a dividing unit, configured to divide all gray levels into a plurality of gray level partitions according to the quantity distribution of the detected defects and the repair defects on different gray levels;

a fourth determining unit, configured to determine a quantity distribution of a grayscale value of the detected defect and a grayscale difference of the corresponding normal grayscale value on different grayscale partitions, and determine a grayscale value of the repaired defect The number distribution of grayscale differences with corresponding normal grayscale values on different grayscale partitions;

a fifth determining unit, configured to: according to the quantity distribution of the grayscale value of the detected defect and the grayscale difference of the corresponding normal grayscale value on different grayscale partitions, and the grayscale value of the repairing defect and corresponding The number distribution of the grayscale difference values of the normal grayscale values on different grayscale partitions, and the grayscale difference between the grayscale value of the detected defect and the corresponding normal grayscale value and the grayscale of the repairing defect are obtained The difference data of the grayscale difference between the value and the corresponding normal grayscale value, and determining the filtering range corresponding to the grayscale difference of the different grayscale partitions according to the difference data.
A detection and repair device for a defect of a color film substrate, comprising:

An acquisition module, configured to obtain a filtering range of a filter parameter for detecting a defect of a color filter substrate by using the analysis method of the defect of the color filter substrate according to any one of claims 1 to 5;

And a filtering module, configured to detect or repair defects of the color filter substrate according to the filtering range of the filtering parameter.
The apparatus for detecting and repairing defects of a color filter substrate according to claim 14, wherein the detecting and repairing device for the defect of the color filter substrate comprises an automatic optical detecting device, and the filtering module determines the filtering range of the filtering parameter as a defect Conditions The optical film substrate is optically detected, and defects not included in the filtering range are detected to obtain a detected defect.
The apparatus for detecting and repairing defects of a color filter substrate according to claim 14, wherein the detecting and repairing device for the defect of the color filter substrate comprises a repairing device, and the filtering module determines whether the detected defect obtained by the automatic optical detecting device belongs to the filtering In the range, a detection defect that does not belong to the filtration range is obtained as a detected defect after filtration, and the detected defect detected after the filtration is repaired.
An apparatus for analyzing a defect of a color film substrate, comprising: a memory, a processor, and a computer program stored on the memory and operable on the processor, wherein the processor executes the computer program as claimed in claim 1 A step in any one of the methods for analyzing a defect of the color filter substrate.
A detection and repair device for a color film substrate defect, comprising: a memory, a processor, and a computer program stored on the memory and operable on the processor, wherein the processor executes the computer program as claimed in claim 6 -8 The steps in the method for detecting and repairing defects of the color film substrate.