CN103885218B - A kind of detection method of substrate and pick-up unit - Google Patents
A kind of detection method of substrate and pick-up unit Download PDFInfo
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- CN103885218B CN103885218B CN201410092883.3A CN201410092883A CN103885218B CN 103885218 B CN103885218 B CN 103885218B CN 201410092883 A CN201410092883 A CN 201410092883A CN 103885218 B CN103885218 B CN 103885218B
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Abstract
The invention discloses a kind of detection method and pick-up unit of substrate, the detection method of this substrate comprises: the original image of substrate to be measured under predetermined lighting condition is converted to gray level image; Obtain identification parameter detected value corresponding to described substrate to be measured according to described gray level image, described identification parameter is the parameter relevant to gray scale; The identification parameter statistical value that described identification parameter detected value and many groups pre-set is compared respectively, from described many group identification parameter statistical values, determines the one group of identification parameter statistical value mated with described identification parameter detected value; The statistics of the identification parameter detected value of the multiple substrates produced under each group identification parameter statistical value have recorded corresponding explained hereafter condition; Determine that the explained hereafter condition of described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter standard value that described identification parameter detected value mates.Invention increases the accuracy that substrate detects.
Description
Technical field
The present invention relates to detection technique field, particularly a kind of detection method of substrate and pick-up unit.
Background technology
Thin Film Transistor-LCD TFT-LCD, as the display element of the products such as mobile phone, Pad, notebook computer, display and televisor, has become indispensable in life now.
In order to ensure the performance of display, to various test be carried out in the process of display production and selling, wherein just comprising the test of the display performance (as flicker, Mura etc.) to display panel.
But the accuracy of the test result of a lot of test is all relevant to the explained hereafter condition of panel.But not having a kind of method that can identify substrate process working condition in prior art, therefore all in prior art tests all have nothing to do with the explained hereafter condition of substrate, cause test result to be inaccurate.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of detection method and the pick-up unit that can identify the explained hereafter condition of substrate.
To achieve these goals, embodiments provide a kind of detection method of substrate, comprising:
The original image of substrate to be measured under predetermined lighting condition is converted to gray level image;
Obtain identification parameter detected value corresponding to described substrate to be measured according to described gray level image, described identification parameter is the parameter relevant to gray scale;
The identification parameter statistical value that described identification parameter detected value and many groups pre-set is compared respectively, from described many group identification parameter statistical values, determines the one group of identification parameter statistical value mated with described identification parameter detected value; The statistics of the identification parameter detected value of the multiple substrates produced under each group identification parameter statistical value have recorded corresponding explained hereafter condition;
Determine that the explained hereafter condition of described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter statistical value that described identification parameter detected value mates.
Above-mentioned detection method, wherein, described substrate can be split as multiple panels, and described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and the homogeneous parameter of panel gray scale.
Above-mentioned detection method, wherein, when described identification parameter is panel average gray parameter, the identification parameter detected value obtaining described substrate to be measured corresponding specifically comprises:
Determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check point with the panel grey parameter detected value calculating each panel;
The detected value of panel average gray parameter is calculated according to the panel grey parameter detected value of multiple panels.
Above-mentioned detection method, wherein, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, the identification parameter detected value obtaining described substrate to be measured corresponding specifically comprises:
Determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check point with the panel grey parameter detected value calculating each panel;
The detected value of panel average gray parameter is calculated according to the panel grey parameter detected value of multiple panels;
Determine that the detected value of the homogeneous parameter of described panel gray scale is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
Above-mentioned detection method, wherein, also comprises:
According to each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determine and the Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured is set;
The multiple gray scale detection values corresponding to diverse location of described substrate to be measured are determined according to described gray level image;
The Mura detected parameters of setting and described gray scale detection value is utilized to carry out Mura detection to described substrate to be measured.
Above-mentioned detection method, wherein, also comprises:
When there is not the one group of identification parameter statistical value mated with described identification parameter detected value in described many group identification parameter statistical values, record described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured;
The corresponding identification parameter statistical value of explained hereafter condition corresponding to described substrate to be measured is obtained according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured.
In order to better realize above-mentioned purpose, the embodiment of the present invention additionally provides a kind of pick-up unit of substrate, comprising:
Modular converter, for being converted to gray level image by the original image of substrate to be measured under predetermined lighting condition;
Parameter detecting value acquisition module, for obtaining identification parameter detected value corresponding to described substrate to be measured according to described gray level image, described identification parameter is the parameter relevant to gray scale;
Matching module, compares respectively for the identification parameter statistical value described identification parameter detected value and many groups pre-set, and determines the one group of identification parameter statistical value mated with described identification parameter detected value from described many group identification parameter statistical values; The statistics of the identification parameter detected value of the multiple substrates produced under each group identification parameter statistical value have recorded corresponding explained hereafter condition;
Determination module, for determining that the explained hereafter condition of described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter statistical value that described identification parameter detected value mates.
Above-mentioned pick-up unit, wherein, described substrate can be split as multiple panels, and described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and the homogeneous parameter of panel gray scale.
Above-mentioned pick-up unit, wherein, when described identification parameter is panel average gray parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
First computing unit, for the gray-scale value according to described multiple check point with calculate the panel grey parameter detected value of each panel;
Second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels.
Above-mentioned pick-up unit, wherein, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
First computing unit, for the gray-scale value according to described multiple check point with calculate the panel grey parameter detected value of each panel;
Second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels;
3rd computing unit, for determining that the detected value of the homogeneous parameter of described panel gray scale is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
Above-mentioned pick-up unit, wherein, also comprises:
Detected parameters determination module, for according to each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determines and arranges the Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured;
Gray scale detection value acquisition module, for obtaining the multiple gray scale detection values corresponding to diverse location of described substrate to be measured according to described gray level image;
Detection module, carries out Mura detection for utilizing the Mura detected parameters of setting and described gray scale detection value to described substrate to be measured.
Above-mentioned pick-up unit, wherein, also comprises:
Logging modle, for detected parameters when there is not the one group of identification parameter statistical value mated with described identification parameter detected value in described many group identification parameter statistical values, records described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured;
Set up module, for setting up the corresponding identification parameter statistical value of explained hereafter condition corresponding to described substrate to be measured according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured.
In the embodiment of the present invention, after obtaining the gray level image be converted to by the original image of substrate to be measured, obtain the identification parameter detected value relevant to gray scale based on gray level image.Then the detected value of this identification parameter and the many groups of identification parameter statistical values obtained according to the tester substrate of known manufacturing condition are contrasted one by one, after obtaining the one group of identification parameter statistical value matched, just can confirm that the manufacturing condition corresponding to one group of identification parameter statistical value matched is exactly the explained hereafter condition of this substrate to be measured.
Owing to being identify substrate to be measured, therefore, it is possible to obtain recognition result accurately according to the numerical value that manufacturing condition " can be recorded " accurately.
Meanwhile, in the embodiment of the present invention, when identifying, only need to obtain substrate to be measured image and after once changing, according to some parameters relevant to gray scale of Image Acquisition after conversion, and then carry out the computing of mating according to these parameters, realization simply.
Accompanying drawing explanation
Fig. 1 represents the schematic diagram for explaining substrate and panel;
Fig. 2 represents the schematic flow sheet of the detection method of the substrate of the embodiment of the present invention;
The moving average curve used when Fig. 3 represents that Mura detects and the schematic diagram of detection curve;
Fig. 4 represents the structural representation of the pick-up unit of the substrate of the embodiment of the present invention.
Embodiment
In the detection method of the substrate of the embodiment of the present invention and pick-up unit, the parameter relevant to gray scale according to the image of the substrate produced carries out the identification of substrate process working condition.
Before the embodiment of the present invention is further elaborated, first several concepts that the application relates to are described, so that better understand the embodiment of the present invention.
< substrate and panel >
Briefly, liquid crystal panel is that in the middle of two-layer very thin glass substrate, parcel one deck liquid crystal molecule is formed.During production, the glass substrate of employing has a fixing size, then is formed the liquid crystal panel of various sizes by cutting.
Therefore, according to the difference of economic cut lengths, Liquid crystal production line has also been divided into different algebraically, and the substrate size as 5 line acmes in generation is 1200*1300mm, and 8 generation line substrate size be 2160*2460mm.On the whole, panel algebraically is higher, and the size of panel is larger, and the number of screen of cutting is more, utilization factor and benefit higher.
As shown in Figure 1, the substrate in the specific embodiment of the invention refer to cutting before overall glass plate 101, and panel refers to the little piecemeal 102 on described substrate, and these piecemeals finally make the display unit becoming electron device.
< explained hereafter condition >
The technological process of production, refers in process of production, and laborer utilizes the tool of production by various starting material, semi-manufacture by certain equipment, process continuously in a certain order, finally makes it the method and the process that become finished product.
In specific embodiments of the invention, specific to the explained hereafter flow process of the substrate of liquid crystal display, manufacturing condition can be one or more in following various condition:
The classification of the photoresist used;
Glue spreader tell glue speed;
The exposure of exposure machine;
The exposure time interval of exposure machine.
Although those skilled in the art all know, the substrate produced is certainly closely related with these factors, and these factors can be detected by what mode, are technological difficulties of this area always.Inventor is on the basis of a large amount of creative work, the manufacturing condition of the image information of substrate to substrate that utilize of novelty detects, and solves this area and relatively simple and reliable method cannot be used for a long time to detect the problem of the manufacturing condition of substrate.
As shown in Figure 2, the detection method of the substrate of the embodiment of the present invention comprises:
Step 201, is converted to gray level image by the original image of substrate to be measured under predetermined lighting condition;
Step 202, obtain identification parameter detected value corresponding to described substrate to be measured according to described gray level image, described identification parameter is the parameter relevant to gray scale;
Step 203, compares respectively by the identification parameter statistical value that described identification parameter detected value and many groups pre-set, and determines the one group of identification parameter statistical value mated with described identification parameter detected value from described many group identification parameter statistical values; The statistics of the identification parameter detected value of the multiple substrates produced under each group identification parameter statistical value have recorded corresponding explained hereafter condition;
Step 204, determines that the explained hereafter condition of described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter statistical value that described identification parameter detected value mates.
In the detection method of the substrate of the embodiment of the present invention, after obtaining the gray level image be converted to by the original image of substrate to be measured, obtain the identification parameter detected value relevant to gray scale based on gray level image.Then the detected value of this identification parameter and the many groups of identification parameter statistical values obtained according to the tester substrate of known manufacturing condition are contrasted one by one, after obtaining the one group of identification parameter statistical value matched, just can confirm that the manufacturing condition corresponding to one group of identification parameter statistical value matched is exactly the explained hereafter condition of this substrate to be measured.
In the specific embodiment of the invention, first carry out the statistics of identification parameter according to the substrate of existing known manufacturing condition, when sample size is more time, the identification parameter statistical value of the substrate under this manufacturing condition can be obtained.
Then carry out these numerical value that manufacturing condition " can be recorded " accurately to identify substrate to be measured, therefore, it is possible to obtain recognition result accurately.
Meanwhile, in the embodiment of the present invention, when identifying, only need to obtain substrate to be measured image and after once changing, according to some parameters relevant to gray scale of Image Acquisition after conversion, and then carry out the computing of mating according to these parameters, realization simply.
Mention, described substrate can be split as multiple panels before, and described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and the homogeneous parameter of panel gray scale in a particular embodiment of the present invention.
First as follows to above several conceptual illustration.
< substrate average gray value >
Substrate average gray value is the average gray value added up in units of the sampled point on substrate, and substrate average gray value X equals: A1/B1, wherein:
A1 is the gray-scale value sum of all sampled points be distributed on substrate;
B1 is sampled point quantity.
< panel average gray parameter >
Panel average gray value is the average gray value added up in units of alienable panel on substrate, and panel average gray parameter Y equals: A2/B2, wherein:
A2 is the gray-scale value sum of all panels on substrate;
B2 is the panel quantity on substrate.
The gray-scale value of each block panel is the average gray value added up in units of the sampled point on panel, and the gray-scale value of panel equals: A21/B21, wherein:
A21 is the gray-scale value sum of all sampled points be distributed on panel;
B21 is sampled point quantity.
In a particular embodiment of the present invention, for the gray-scale value of each block panel, in order to ensure the accuracy of gray-scale value, following selection can be done to sampled point:
1, Stochastic choice; Or
2, selection is positioned at the Spot detection point of face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point.
Certainly, can also be that other mode is selected, not limit one by one at this.
The homogeneous parameter > of < panel gray scale
The homogeneous parameter of panel gray scale is for characterizing the homogeneity of panel gray scale, and the homogeneous parameter Z of panel gray scale equals: A3/Y, wherein:
A3 is maximal value in the gray-scale value of all panels or minimum value.
When described identification parameter is panel average gray parameter, the identification parameter detected value obtaining described substrate to be measured corresponding specifically comprises:
Determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check point with the panel grey parameter detected value calculating each panel;
The detected value of panel average gray parameter is calculated according to the panel grey parameter detected value of multiple panels.
When described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, the identification parameter detected value obtaining described substrate to be measured corresponding specifically comprises:
Determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check point with the panel grey parameter detected value calculating each panel;
The detected value of panel average gray parameter is calculated according to the panel grey parameter detected value of multiple panels;
Determine that the detected value of the homogeneous parameter of described panel gray scale is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
It should be understood that, in the embodiment of the present invention, when using the multiple identification parameter relevant to gray scale simultaneously, the manufacturing condition of substrate to be measured can be identified in each different aspect, can obtain from same object (gray scale image) again simultaneously, reduce while maximization recognition accuracy and realize difficulty and realize cost.
First the embodiment of the present invention needs to obtain the many groups of identification parameter statistical values corresponding with explained hereafter condition that are that pre-set, and concrete acquisition process is described as follows.
Assuming that known explained hereafter condition is divided in N, then need the operation (for explained hereafter condition A) carrying out following steps for each explained hereafter condition:
First, substrate that multiple (relevant with accuracy of identification, quantity is more, and accuracy of identification is higher) produced by already known processes condition A is chosen as statistical sample;
Secondly, identification parameter test value is obtained for each the sample substrate test chosen;
Finally, add up according to all test values, obtain the identification parameter statistical value that explained hereafter condition A is corresponding.
This statistical value can be various types of statistics, and for substrate average gray value, this substrate average gray statistical value can be:
The mean value of the substrate average gray test value of all sample substrate; Or
The interval that in the substrate average gray test value of all sample substrate, maximal value and minimum value are formed as end points.
As shown in the table, be a kind of signal of the identification parameter statistical value pre-set,
Certainly, can also be other statistics, not enumerate at this.
After obtaining often kind of each self-corresponding identification parameter statistical value of manufacturing condition, the identification of substrate production process conditions can be carried out.
Or comprising substrate average gray parameter for identification parameter is described as follows.
In the specific embodiment of the invention, after the substrate average gray parameter detecting value obtaining substrate to be measured, just need to compare with each group substrate average gray parameter statistics, find the group substrate average gray parameter statistics matched.
Mention, in a particular embodiment of the present invention, substrate average gray statistical value can be various forms, and under the different forms of expression, the implication of coupling is different, is respectively described below before.
When substrate average gray statistical value is the mean value of substrate average gray test value of all sample substrate, then the substrate average gray statistical value mated with the substrate average gray parameter detecting value of substrate to be measured is: with the substrate average gray statistical value that the absolute value of the difference of the substrate average gray parameter detecting value of substrate to be measured is minimum.
And when substrate average gray statistical value be in the substrate average gray test value of all sample substrate maximal value and minimum value as end points formed interval time, then the interval of mating with the substrate average gray parameter detecting value of substrate to be measured is: the interval comprising the substrate average gray parameter detecting value of described substrate to be measured.
How to mate for test value and multiple statistical value, in prior art, have various algorithm, may be used to, in the embodiment of the present invention, not describe in detail one by one at this.
Certainly, emerging in an endless stream for manufacturing condition, can real-time update database in the embodiment of the present invention, and be beneficial to follow-up detection and Identification, in this case, the detection method of the embodiment of the present invention, also comprises:
When there is not the one group of identification parameter statistical value mated with described identification parameter detected value in described many group identification parameter statistical values, record described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured;
The corresponding identification parameter statistical value of explained hereafter condition corresponding to described substrate to be measured is obtained according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured.
In the specific embodiment of the invention, after the manufacturing condition identifying substrate to be measured, can come to test more accurately according to its manufacturing condition.
It is uneven that Mura (Mu La) phenomenon refers to display brightness, causes the phenomenon of various vestige.The simplest determination methods is exactly, and in darkroom, be switched to black picture or other low grey menu, then go from various different angle, different liquid crystal display just has Mura miscellaneous, as travers, 45 degree of angle bead lines etc.
At present mainly read the image of substrate to be tested by configuration multiple stage image capture device and indirect illumination unit and processed and be converted to gray level image and carried out Mura test afterwards producing the method for line carrying out Mura test.
Can need to arrange various test parameter in Mura test process, and be all that an identical standard value is set for all test parameters in prior art, utilize this standard value to carry out Mura test to all substrates to be measured.
But the Mura image of substrate to be measured that various processes is produced is all not identical, uses same detected parameters setting value to carry out and detects the situation that just there will be undetected and/or flase drop, reduce the accuracy rate of detection.
When the PR glue of a line, (CF subsidiary factory uses the PR glue of multiple manufacturer, composition is different) and working condition (such as: the glue amount of telling of glue spreader, the exposure interval of exposure machine and exposure etc.) changes to some extent time, the face of substrate also can change to some extent, the Mura image generated is different, carry out detecting the situation that just there will be undetected and/or flase drop according to identical detected parameters setting value, reduce the accuracy rate of detection.
And in the embodiment of the present invention, after the manufacturing condition detecting substrate to be measured, can detect according to the detection criteria parameter corresponding with manufacturing condition that can meet testing requirement preset, improve the precision of detection.
That is: the detection method of the embodiment of the present invention can also comprise:
According to each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determine and the Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured is set;
The multiple gray scale detection values corresponding to diverse location of described substrate to be measured are determined according to described gray level image;
The Mura detected parameters of setting and described gray scale detection value is utilized to carry out Mura detection to described substrate to be measured.
With like recognition category be, in the specific embodiment of the invention, each self-corresponding Mura detection criteria parameter is all have recorded for different explained hereafter conditions, when after the explained hereafter condition identifying substrate to be measured, can determine Mura detection criteria parameter corresponding with it, the Mura detection criteria parameter utilizing this to determine and gray scale detection value can carry out Mura detection to substrate to be measured.
Below the detailed process that Mura detects is described below.
Mura detects and mainly utilizes two parameters (moving average and upper lower limit value) to detect.
Moving average M is used for gray scale detection curve (with the curve of diamond indicia in Fig. 3) smoothing process, obtains moving average curve (with the curve of square mark in Fig. 3).
Assuming that M=3, then as a gray-scale value detects sequence X
i(i=1,2,3 ..., N) corresponding gray-scale value moving average sequence X ', wherein the value of m element equals X ' m=(X
m-1+ X
m+ X
m-1)/3.
After obtaining mean value, determine upper lower limit value, by the upwards translation downwards of moving average curve, obtain two detection curves (with the curve of trigonometric sum cross mark in Fig. 3).
When the gray-scale value of the monitoring point on gray scale detection curve is outside two detection curve limited ranges, namely represent existing defects.
Can find, whether accurate and moving average and the upper lower limit value of Mura detection be closely related.
In the specific embodiment of the invention, after obtaining the original gradation detected value sequence of substrate, the moving average value sequence of substrate to be measured can be calculated according to the moving average in Mura detection criteria parameter, and then calculate two detection sequences according to the upper lower limit value in Mura detection criteria parameter, final basis judges each numerical value in original gradation detected value sequence, when this numerical value be not be in detect between two numerical value corresponding with it in sequence time, namely represent existing defects.
The embodiment of the present invention additionally provides a kind of pick-up unit of substrate, comprises as shown in Figure 4:
Modular converter, for being converted to gray level image by the original image of substrate to be measured under predetermined lighting condition;
Parameter detecting value acquisition module, for obtaining identification parameter detected value corresponding to described substrate to be measured according to described gray level image, described identification parameter is the parameter relevant to gray scale;
Matching module, compares respectively for the identification parameter statistical value described identification parameter detected value and many groups pre-set, and determines the one group of identification parameter statistical value mated with described identification parameter detected value from described many group identification parameter statistical values; The statistics of the identification parameter detected value of the multiple substrates produced under each group identification parameter statistical value have recorded corresponding explained hereafter condition;
Determination module, for determining that the explained hereafter condition of described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter statistical value that described identification parameter detected value mates.
In the pick-up unit of the embodiment of the present invention, described substrate can be split as multiple panels, and described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and the homogeneous parameter of panel gray scale.
In the pick-up unit of the embodiment of the present invention, when described identification parameter is panel average gray parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
First computing unit, for the gray-scale value according to described multiple check point with calculate the panel grey parameter detected value of each panel;
Second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels.
In the pick-up unit of the embodiment of the present invention, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
First computing unit, for the gray-scale value according to described multiple check point with calculate the panel grey parameter detected value of each panel;
Second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels;
3rd computing unit, for determining that the detected value of the homogeneous parameter of described panel gray scale is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
In the pick-up unit of the embodiment of the present invention, also comprise:
Detected parameters determination module, for according to each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determines and arranges the Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured;
Gray scale detection value acquisition module, for obtaining the multiple gray scale detection values corresponding to diverse location of described substrate to be measured according to described gray level image;
Detection module, carries out Mura detection for utilizing the Mura detected parameters of setting and described gray scale detection value to described substrate to be measured.
In the pick-up unit of the embodiment of the present invention, also comprise:
Logging modle, for detected parameters when there is not the one group of identification parameter statistical value mated with described identification parameter detected value in described many group identification parameter statistical values, records described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured;
Set up module, for setting up the corresponding identification parameter statistical value of explained hereafter condition corresponding to described substrate to be measured according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured.
Those of ordinary skill in the art should be appreciated that and can modify to technical scheme of the present invention or equivalent replacement, and does not depart from the scope of technical solution of the present invention, and it all should be encompassed in the middle of right of the present invention.
Claims (12)
1. a detection method for substrate, is characterized in that, comprising:
The original image of substrate to be measured under predetermined lighting condition is converted to gray level image;
Obtain identification parameter detected value corresponding to described substrate to be measured according to described gray level image, described identification parameter is the parameter relevant to gray scale;
The identification parameter statistical value that described identification parameter detected value and many groups pre-set is compared respectively, from described many group identification parameter statistical values, determines the one group of identification parameter statistical value mated with described identification parameter detected value; The statistics of the identification parameter detected value of the multiple substrates produced under each group identification parameter statistical value have recorded corresponding explained hereafter condition;
Determine that the explained hereafter condition of described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter statistical value that described identification parameter detected value mates.
2. the detection method of substrate according to claim 1, it is characterized in that, described substrate can be split as multiple panels, described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and the homogeneous parameter of panel gray scale, and the homogeneous parameter of described panel gray scale equals: the maximal value in the gray-scale value of all panels or minimum value/panel average gray parameter.
3. detection method according to claim 2, is characterized in that, when described identification parameter is panel average gray parameter, the identification parameter detected value obtaining described substrate to be measured corresponding specifically comprises:
Determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check point with the panel grey parameter detected value calculating each panel;
The detected value of panel average gray parameter is calculated according to the panel grey parameter detected value of multiple panels.
4. the detection method of substrate according to claim 2, is characterized in that, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, the identification parameter detected value obtaining described substrate to be measured corresponding specifically comprises:
Determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check point with the panel grey parameter detected value calculating each panel;
The detected value of panel average gray parameter is calculated according to the panel grey parameter detected value of multiple panels;
Determine that the detected value of the homogeneous parameter of described panel gray scale is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
5. according to the detection method of the substrate in claim 1-4 described in any one, it is characterized in that, also comprise:
According to each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determine and the Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured is set;
The multiple gray scale detection values corresponding to diverse location of described substrate to be measured are determined according to described gray level image;
The Mura detected parameters of setting and described gray scale detection value is utilized to carry out Mura detection to described substrate to be measured.
6. according to the detection method of the substrate in claim 1-4 described in any one, it is characterized in that, also comprise:
When there is not the one group of identification parameter statistical value mated with described identification parameter detected value in described many group identification parameter statistical values, record described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured;
Identification parameter statistical value corresponding to explained hereafter condition corresponding to described substrate to be measured is obtained according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured.
7. a pick-up unit for substrate, is characterized in that, comprising:
Modular converter, for being converted to gray level image by the original image of substrate to be measured under predetermined lighting condition;
Parameter detecting value acquisition module, for obtaining identification parameter detected value corresponding to described substrate to be measured according to described gray level image, described identification parameter is the parameter relevant to gray scale;
Matching module, compares respectively for the identification parameter statistical value described identification parameter detected value and many groups pre-set, and determines the one group of identification parameter statistical value mated with described identification parameter detected value from described many group identification parameter statistical values; The statistics of the identification parameter detected value of the multiple substrates produced under each group identification parameter statistical value have recorded corresponding explained hereafter condition;
Determination module, for determining that the explained hereafter condition of described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter statistical value that described identification parameter detected value mates.
8. the pick-up unit of substrate according to claim 7, it is characterized in that, described substrate can be split as multiple panels, described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and the homogeneous parameter of panel gray scale, and the homogeneous parameter of described panel gray scale equals: the maximal value in the gray-scale value of all panels or minimum value/panel average gray parameter.
9. the pick-up unit of substrate according to claim 8, is characterized in that, when described identification parameter is panel average gray parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
First computing unit, for the gray-scale value according to described multiple check point with calculate the panel grey parameter detected value of each panel;
Second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels.
10. the pick-up unit of substrate according to claim 8, is characterized in that, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image the gray-scale value of multiple check points of each panel and; Described multiple check point comprises the Spot detection point that is positioned at described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
First computing unit, for the gray-scale value according to described multiple check point with calculate the panel grey parameter detected value of each panel;
Second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels;
3rd computing unit, for determining that the detected value of the homogeneous parameter of described panel gray scale is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
The pick-up unit of 11. substrates according to any one of claims of claim 7-10, is characterized in that, also comprise:
Detected parameters determination module, for according to each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determines and arranges the Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured;
Gray scale detection value acquisition module, for obtaining the multiple gray scale detection values corresponding to diverse location of described substrate to be measured according to described gray level image;
Detection module, carries out Mura detection for utilizing the Mura detected parameters of setting and described gray scale detection value to described substrate to be measured.
The pick-up unit of 12. substrates according to any one of claims of claim 7-10, is characterized in that, also comprise:
Logging modle, for detected parameters when there is not the one group of identification parameter statistical value mated with described identification parameter detected value in described many group identification parameter statistical values, records described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured;
Set up module, for setting up identification parameter statistical value corresponding to explained hereafter condition corresponding to described substrate to be measured according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured.
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| CN104332421B (en) * | 2014-09-01 | 2017-05-03 | 上海华力微电子有限公司 | Performance detection method of scanning machine |
| CN106054421B (en) * | 2016-07-28 | 2019-06-18 | 京东方科技集团股份有限公司 | A kind of detection method and device of liquid crystal display panel defect |
| CN106773181B (en) * | 2017-01-16 | 2021-08-03 | 京东方科技集团股份有限公司 | Method and device for testing Mura around display panel |
| CN107144993B (en) * | 2017-06-30 | 2020-05-05 | 惠科股份有限公司 | Display panel detection method and device |
| CN107464236B (en) * | 2017-07-28 | 2020-05-05 | 武汉华星光电半导体显示技术有限公司 | Flexible display substrate defect discrimination method based on AOI |
| CN109426013B (en) * | 2017-08-23 | 2020-06-23 | 京东方科技集团股份有限公司 | Method and device for analyzing and detecting and repairing defects of color film substrate |
| CN108227250B (en) * | 2017-12-25 | 2021-03-16 | 武汉华显光电技术有限公司 | LCD quality inspection method, device, CIM system and computer storage medium |
| CN108563046B (en) * | 2018-01-15 | 2020-10-30 | 京东方科技集团股份有限公司 | Spacer supporting capacity evaluation method and device and computer readable storage medium |
| CN108387587B (en) * | 2018-01-22 | 2020-07-31 | 京东方科技集团股份有限公司 | Defect detection method and defect detection equipment |
| CN108406124B (en) * | 2018-03-28 | 2020-10-02 | 歌尔股份有限公司 | Laser marking method and system |
| CN111025698A (en) * | 2019-12-26 | 2020-04-17 | 惠州市华星光电技术有限公司 | Detection device and detection method for measuring flicker degree of display panel |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101119497A (en) * | 2006-08-04 | 2008-02-06 | 广达电脑股份有限公司 | Image processing apparatus and method thereof |
| CN102945547A (en) * | 2012-10-23 | 2013-02-27 | 鞍钢股份有限公司 | Method for homogenizing illumination of image on surface of cold-rolled steel plate |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100491942B1 (en) * | 2000-10-03 | 2005-05-30 | 세이코 엡슨 가부시키가이샤 | Image processing method, and image processing apparatus |
| JP2006254330A (en) * | 2005-03-14 | 2006-09-21 | National Printing Bureau | Quantitative evaluation method of gray scale image on paper or sheet-like base material |
-
2014
- 2014-03-13 CN CN201410092883.3A patent/CN103885218B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101119497A (en) * | 2006-08-04 | 2008-02-06 | 广达电脑股份有限公司 | Image processing apparatus and method thereof |
| CN102945547A (en) * | 2012-10-23 | 2013-02-27 | 鞍钢股份有限公司 | Method for homogenizing illumination of image on surface of cold-rolled steel plate |
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