CN109751959B - Line width measuring method - Google Patents
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- CN109751959B CN109751959B CN201910045878.XA CN201910045878A CN109751959B CN 109751959 B CN109751959 B CN 109751959B CN 201910045878 A CN201910045878 A CN 201910045878A CN 109751959 B CN109751959 B CN 109751959B
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Abstract
The invention provides a line width measuring method, which comprises the steps of firstly obtaining an image of a display substrate, then obtaining edge positions of two opposite side edges of a line to be measured according to gray information of the image, and finally obtaining the line width of the line to be measured according to the edge positions, wherein the process of obtaining the edge position of one side edge of the line to be measured specifically comprises the following steps: scanning is carried out in a scanning area of an image along a scanning line, data processing is carried out, a brightness transverse distribution curve L (X) is obtained, threshold brightness is set, the threshold brightness corresponds to n position coordinates on the brightness transverse distribution curve L (X), the n position coordinates are sequenced according to the scanning direction, and the m position coordinate is set as a standard edge position coordinate.
Description
Technical Field
The invention relates to the technical field of display, in particular to a line width measuring method.
Background
In the field of Display technology, flat panel Display devices such as Liquid Crystal Displays (LCDs) and Active Matrix Organic Light-Emitting diodes (AMOLED) displays have been widely used because of their advantages such as thin body, high image quality, power saving, and no radiation, for example: a mobile phone, a Personal Digital Assistant (PDA), a digital camera, a computer screen or a notebook screen, etc.
The display panel is an important component of the liquid crystal display and the organic light emitting diode display. Taking a display panel of a liquid crystal display as an example, the liquid crystal display panel generally comprises a Color Filter (CF) substrate, a Thin Film Transistor (TFT) substrate, a Liquid Crystal (LC) sandwiched between the Color Filter substrate and the TFT substrate, and a Sealant (Sealant). The Array substrate of the thin film transistor is a main component in the LCD device and the AMOLED device at present, and is directly related to the development direction of the high performance flat panel display device, and is used for providing a driving circuit for a display.
In the manufacturing process of the display panel, monitoring and measuring of Critical Dimension (CD) are very important, and the accuracy of the measurement result will affect the performance of the whole display device. For example, in a TFT array substrate, the line width of the strip electrodes distributed at intervals is the critical dimension of the array substrate, and affects the performance of the display device, such as transmittance. Generally, the line width is measured by a line width measuring machine, the line width measuring machine captures an image of a pattern to be measured by an image capturing device, such as a Charge Coupled Device (CCD) lens, and the line width is measured by computer processing, the edge position of the strip electrode to be measured is obtained according to the gray value variation of the image, and then the line width of the strip electrode to be measured is obtained by further calculating the obtained edge position, but the line width is often calculated incorrectly by using the existing calculation method.
The reason for this is that, in actual use, the scanning area cannot be set to be too large in order to reduce interference of surrounding patterns, but too small a width of the scanning area easily makes it impossible to find desired detection points in the scanning area. In addition, in the calculation process of obtaining the edge position, because in some special areas, the difference between the manufactured pattern and the standard set pattern is large, the distribution boundary of each strip-shaped electrode in the line width measurement area is fuzzy, or the edge of a product in the production process may be irregular and has a burr phenomenon, when the edge position is searched, a plurality of position results appear, and the first position result is usually selected as the edge position coordinate in the calculation process, so that the edge position of the strip-shaped electrode to be detected obtained by the existing calculation method according to the gray value change condition is often incorrect, and the line width of the strip-shaped electrode to be detected finally obtained is incorrect.
Disclosure of Invention
The invention aims to provide a line width measuring method which can eliminate the influence of adverse conditions such as irregular product edges, burrs, larger difference with set patterns or fuzzy edges and the like in the line width measuring process and accurately measure the line width.
In order to achieve the above object, the present invention first provides a line width measuring method, which comprises the following steps:
step S1, providing a display substrate with a circuit to be tested, and shooting an image of the display substrate;
step S2, obtaining edge positions of two opposite side edges of the circuit to be tested according to the gray scale information of the image, and then obtaining the line width of the circuit to be tested according to the edge positions;
the process of obtaining the edge position of one side edge of the line to be detected according to the gray scale information of the image specifically comprises the following steps: selecting a scanning area from the image, scanning the scanning area along a scanning line which is vertically intersected with the side edge of the line to be detected correspondingly, and performing data processing to obtain a brightness transverse distribution curve L (X), obtain a corresponding relation between brightness and position coordinates, setting a threshold brightness, wherein the threshold brightness corresponds to n position coordinates on the brightness transverse distribution curve L (X), n is a natural number which is larger than 1, sequencing the n position coordinates according to the scanning direction, and setting the mth position coordinate as a standard edge position coordinate, wherein m is a natural number which is larger than or equal to 1 and smaller than or equal to n, and the standard edge position coordinate is the position coordinate of the edge position of the side edge, so that the edge position of the line to be detected is determined.
In the process of obtaining the edge position of one side edge of the line to be detected, the scanning area scans from the outer side to the inner side of the side edge of the line to be detected and performs data processing.
In the process of obtaining the edge position of one side edge of the line to be detected, the line to be detected is scanned for multiple times, so that the standard edge position coordinates of a plurality of position points which are distributed on the side edge at intervals are obtained.
In the process of obtaining the edge position of one side edge of the line to be measured, a plurality of position points corresponding to the obtained standard edge position coordinates are distributed on the side edge at equal intervals.
In the process of acquiring the standard edge position coordinates, the set threshold luminance is a value between the maximum luminance value and the minimum luminance value on the corresponding luminance lateral distribution curve l (x).
In the process of acquiring the standard edge position coordinates, the set threshold luminance is 50% of the sum of the maximum luminance value and the minimum luminance value on the corresponding luminance lateral distribution curve l (x).
In the process of obtaining the standard edge position coordinates, if two position coordinates corresponding to the threshold brightness on the corresponding brightness transverse distribution curve l (x) are set, the first position coordinate in the scanning direction is set as the standard edge position coordinate.
In the process of obtaining the standard edge position coordinates, the number of the position coordinates corresponding to the threshold brightness on the corresponding brightness transverse distribution curve l (x) is three, and the second position coordinate in the scanning direction is set as the standard edge position coordinate.
The display substrate is a color film substrate, and the circuit to be tested is a row of pixel units of the color film substrate.
The display substrate is a TFT array substrate, and the circuit to be tested is a strip electrode of the TFT array substrate.
The invention has the beneficial effects that: the line width measuring method provided by the invention comprises the steps of firstly obtaining an image of a display substrate, then obtaining edge positions of two opposite side edges of a line to be measured according to gray information of the image, and finally obtaining the line width of the line to be measured according to the edge positions, wherein the process of obtaining the edge position of one side edge of the line to be measured specifically comprises the following steps: scanning is carried out in a scanning area of an image along a scanning line, data processing is carried out, a brightness transverse distribution curve L (X) is obtained, threshold brightness is set, the threshold brightness corresponds to n position coordinates on the brightness transverse distribution curve L (X), the n position coordinates are sequenced according to the scanning direction, and the m position coordinate is set as a standard edge position coordinate.
Drawings
For a better understanding of the nature and technical aspects of the present invention, reference should be made to the following detailed description of the invention, taken in conjunction with the accompanying drawings, which are provided for purposes of illustration and description and are not intended to limit the invention.
In the drawings, there is shown in the drawings,
FIG. 1 is a schematic flow chart of a line width measurement method according to the present invention;
fig. 2 is a schematic diagram of an image of the display panel acquired in step S1 of the line width measuring method of the present invention;
fig. 3 is a schematic diagram of obtaining an edge position of an edge of the line to be measured in step S2 of the line width measurement method according to the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Referring to fig. 1, the present invention provides a line width measuring method, including the following steps:
step S1, providing the display substrate with the circuit to be tested, and capturing an image of the display substrate.
Specifically, in this embodiment, as shown in fig. 2, the display substrate is a TFT array substrate, and the line to be tested is a strip electrode of the TFT array substrate. In addition, the display substrate may also be a color film substrate of a liquid crystal display panel, and the line to be tested is a row of pixel units of the color film substrate.
Step S2, edge positions of two opposite side edges of the line to be tested are obtained according to the gray scale information of the shot image, and then the line width of the line to be tested is obtained according to the edge positions.
The process of obtaining the edge position of one side edge of the line to be detected according to the gray scale information of the image specifically comprises the following steps: selecting a scanning area from the image, scanning the scanning area along a scanning line which is vertically intersected with the side edge of the line to be detected correspondingly, and performing data processing to obtain a brightness transverse distribution curve L (X), obtain a corresponding relation between brightness and position coordinates, setting a threshold brightness, marking n position coordinates corresponding to the threshold brightness on the brightness transverse distribution curve L (X), wherein n is a natural number which is greater than 1, sequencing the n position coordinates according to the scanning direction, and setting an m-th position coordinate as a standard edge position coordinate according to an actual situation, wherein m is a natural number which is greater than or equal to 1 and less than or equal to n, and the standard edge position coordinate is the position coordinate of the edge position of the side edge, so that the edge position of the side edge of the line to be detected is determined.
Specifically, in the process of acquiring the edge position of one side edge of the line to be measured, the scanning is performed from the outside to the inside of the side edge of the line to be measured in the scanning area, and data processing is performed.
Specifically, in the process of acquiring the standard edge position coordinates, the set threshold luminance is a value between the maximum luminance value and the minimum luminance value on the corresponding luminance lateral distribution curve l (x).
Specifically, in the process of acquiring the standard edge position coordinates, the set threshold luminance is 50% of the sum of the maximum luminance value and the minimum luminance value on the corresponding luminance lateral distribution curve l (x).
Specifically, as shown in fig. 3, in the process of acquiring the standard edge position coordinates, the edge positions of the two opposite side edges of the line to be measured are actually the position a and the position B, however, since the gray scale difference between the area F outside the line to be measured and the area G inside the line to be measured is not large in the acquired picture of the display substrate, when the edge positions of the two opposite side edges of the line to be measured are acquired according to the gray scale information of the image, the position C and the position D inside the position a and the position B are easily regarded as the edge positions. For example, when determining the edge position of the left edge of the line to be measured in fig. 2, two position coordinates corresponding to the threshold brightness on the corresponding brightness transverse distribution curve l (x) appear, which are the position coordinates of the position a and the position C, respectively, and if the position coordinate of the position C is subsequently taken as the standard edge position coordinate, the line width measurement is abnormal, so the present invention sets the first position coordinate in the scanning direction, i.e., the position coordinate of the position a, as the standard edge position coordinate, and also as the position coordinate corresponding to the actual edge position, so the line width can be accurately measured, and the error rate of CD measurement is reduced.
Specifically, if the edge position of the left edge of the line to be measured in fig. 2 is determined under the condition that the edge of the line to be measured has a burr, since the gray level around the position a changes unclear, it is easy to regard the position E outside the position a as the edge position during the detection, that is, in the process of obtaining the standard edge position coordinates, three position coordinates corresponding to the brightness of the upper threshold horizontal distribution curve l (x) will appear, which are respectively the position coordinates of the position E, the position a and the position C, if the position coordinates of the position E are subsequently taken as the standard edge position coordinates, the measured value of the line width will be too large, the present invention sets the second position coordinate in the scanning direction, that is, the position coordinate of the position a, as the standard edge position coordinate, and also as the position coordinate corresponding to the actual edge position, so that the line width can be measured accurately, the error rate of CD measurements is reduced.
Specifically, in the process of obtaining the edge position of one side edge of the line to be detected, the line to be detected is scanned for multiple times, so that the standard edge position coordinates of multiple position points distributed at intervals on the side edge are obtained, that is, the side edge is subjected to multi-point detection, and the multi-point detection mode can improve the detection precision and can automatically delete the peculiar points. Further, in the process of obtaining the edge position of one side edge of the line to be measured, a plurality of position points corresponding to the obtained plurality of standard edge position coordinates are distributed on the side edge at equal intervals.
In the line width measuring method, in the process of obtaining the edge position of one side edge of a line to be measured, n position coordinates corresponding to the upper threshold brightness of a transverse distribution curve L (X) are sequenced according to the scanning direction, and the m-th position coordinate is set as the standard edge position coordinate according to the actual situation, so that the influence of adverse conditions such as irregular product edges, burrs, larger difference with a set graph or fuzzy edges and the like can be eliminated in the line width measuring process, the line width is accurately measured, the error rate of CD measurement is reduced, and the measuring accuracy of the existing machine is improved.
In summary, the line width measuring method provided by the present invention first obtains an image of a display substrate, then obtains edge positions of two opposite side edges of a line to be measured according to gray scale information of the image, and finally obtains a line width of the line to be measured according to the edge positions, wherein the process of obtaining the edge position of one side edge of the line to be measured specifically includes: scanning is carried out in a scanning area of an image along a scanning line, data processing is carried out, a brightness transverse distribution curve L (X) is obtained, threshold brightness is set, the threshold brightness corresponds to n position coordinates on the brightness transverse distribution curve L (X), the n position coordinates are sequenced according to the scanning direction, and the m position coordinate is set as a standard edge position coordinate.
As described above, it will be apparent to those skilled in the art that various other changes and modifications can be made based on the technical solution and the technical idea of the present invention, and all such changes and modifications should fall within the protective scope of the appended claims.
Claims (9)
1. A line width measuring method is characterized by comprising the following steps:
step S1, providing a display substrate with a circuit to be tested, and shooting an image of the display substrate;
step S2, obtaining edge positions of two opposite side edges of the circuit to be tested according to the gray scale information of the image, and then obtaining the line width of the circuit to be tested according to the edge positions;
the process of obtaining the edge position of one side edge of the line to be detected according to the gray scale information of the image specifically comprises the following steps: selecting a scanning area from the image, scanning the scanning area along a scanning line which is vertically intersected with the side edge of the line to be detected correspondingly, and performing data processing to obtain a brightness transverse distribution curve L (X), obtain a corresponding relation between brightness and position coordinates, setting a threshold brightness, wherein the threshold brightness corresponds to n position coordinates on the brightness transverse distribution curve L (X), n is a natural number which is greater than 1, sequencing the n position coordinates according to the scanning direction, and setting the mth position coordinate as a standard edge position coordinate, wherein m is a natural number which is greater than or equal to 1 and less than or equal to n, and the standard edge position coordinate is the position coordinate of the edge position of the side edge, so that the edge position of the line to be detected is determined;
in the process of obtaining the edge position of one side edge of the line to be detected, the line to be detected is scanned for multiple times, so that the standard edge position coordinates of a plurality of position points which are distributed on the side edge at intervals are obtained.
2. The line width measurement method according to claim 1, wherein in acquiring the edge position of one side edge of the line to be measured, scanning is performed in the scanning area from outside to inside of the side edge of the line to be measured, and data processing is performed.
3. The line width measuring method according to claim 1, wherein in the process of obtaining the edge position of one side edge of the line to be measured, a plurality of position points corresponding to the obtained plurality of standard edge position coordinates are distributed at equal intervals on the side edge.
4. The line width measurement method according to claim 1, wherein the threshold luminance is set to a value between a maximum luminance value and a minimum luminance value on the corresponding luminance lateral distribution curve l (x) in obtaining the standard edge position coordinates.
5. The line width measurement method according to claim 4, wherein in obtaining the standard edge position coordinates, the threshold luminance is set to 50% of the sum of the maximum luminance value and the minimum luminance value on the corresponding luminance lateral distribution curve L (X).
6. The line width measuring method according to claim 2, wherein in the process of obtaining the standard edge position coordinates, the position coordinates corresponding to the threshold luminance on the luminance transverse distribution curve l (x) are two, and wherein the first position coordinate in the scanning direction is set as the standard edge position coordinate.
7. The line width measuring method according to claim 2, wherein in the process of obtaining the standard edge position coordinates, the corresponding position coordinates of the threshold luminance on the luminance transverse distribution curve l (x) are three, and wherein the second position coordinate in the scanning direction is set as the standard edge position coordinate.
8. The method for measuring the line width of claim 1, wherein the display substrate is a color film substrate, and the line to be measured is an array of pixel units of the color film substrate.
9. The method according to claim 1, wherein the display substrate is a TFT array substrate, and the line under test is a stripe electrode of the TFT array substrate.
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| CN112985268A (en) * | 2021-02-18 | 2021-06-18 | 广东省梅州市质量计量监督检测所 | PCB line width detection method based on sub-pixels under coaxial light source illumination condition |
| CN113533785B (en) * | 2021-07-22 | 2023-04-07 | 中国计量科学研究院 | Scanning electron microscope-based nano line width self-adaptive measurement method and system |
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