CN103885218A - Detection method and device for substrate - Google Patents
Detection method and device for substrate Download PDFInfo
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- CN103885218A CN103885218A CN201410092883.3A CN201410092883A CN103885218A CN 103885218 A CN103885218 A CN 103885218A CN 201410092883 A CN201410092883 A CN 201410092883A CN 103885218 A CN103885218 A CN 103885218A
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Abstract
The invention discloses a detection method and device for a substrate. The detection method for the substrate includes the steps of converting an original image of the substrate to be detected under the preset illumination condition into a gray level image, obtaining a recognition parameter detection value which is related to the grey level and corresponds to the substrate to be detected according to the gray level image, comparing the recognition parameter detection value with multiple sets of preset recognition parameter statistic values, determining the set of recognition parameter statistic values matched with the recognition parameter detection value in the multiple recognition parameter statistic values, and determining the process production condition of the substrate to be detected to be the process production condition corresponding to a set of recognition parameter standard values matched with the recognition parameter detection value, wherein the statistical results of recognition parameter detection values of multiple substrates produced under the corresponding process production condition are recorded in each set of recognition parameter statistic values. By the adoption of the detection method and device for the substrate, the accuracy of substrate detection is improved.
Description
Technical field
The present invention relates to detection method and the pick-up unit in detection technique field, particularly a kind of substrate.
Background technology
Thin Film Transistor-LCD TFT-LCD, as the display element of the products such as mobile phone, Pad, notebook computer, display and televisor, has become indispensable in life now.
In order to ensure the performance of display, in the process of display production and selling, to carry out various tests, wherein just comprise the test of the display performance (as flicker, Mura etc.) to display panel.
But the accuracy of the test result of a lot of tests is all relevant to the explained hereafter condition of panel.But in prior art, do not have a kind of method that can identify substrate process working condition, therefore in prior art all test all with the explained hereafter conditional independence of substrate, cause test result to be inaccurate.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of detection method and pick-up unit of the explained hereafter condition that can identify substrate.
To achieve these goals, the embodiment of the present invention provides a kind of detection method of substrate, comprising:
Original image by substrate to be measured under predetermined lighting condition is converted to gray level image;
Obtain according to described gray level image the identification parameter detected value that described substrate to be measured is corresponding, described identification parameter is the parameter relevant to gray scale;
Described identification parameter detected value and the many groups of identification parameter statistical values that set in advance are compared respectively, from described many group identification parameter statistical values, determine the one group of identification parameter statistical value mating with described identification parameter detected value; Each group identification parameter statistical value has recorded the statistics of the identification parameter detected value of multiple substrates of producing under corresponding explained hereafter condition;
The explained hereafter condition of determining described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter standard value of described identification parameter detected value coupling.
Above-mentioned detection method, wherein, described substrate can be split as multiple panels, and described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and panel gray scale homogeneous parameter.
Above-mentioned detection method, wherein, when described identification parameter is panel average gray parameter, obtains the identification parameter detected value that described substrate to be measured is corresponding and specifically comprise:
Determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
Calculate the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels.
Above-mentioned detection method, wherein, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, obtains the identification parameter detected value that described substrate to be measured is corresponding and specifically comprise:
Determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
Calculate the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels;
The detected value of determining described panel gray scale homogeneous parameter is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
Above-mentioned detection method, wherein, also comprises:
According to the each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determine and the setting Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured;
Determine the multiple gray scale detection values corresponding to diverse location of described substrate to be measured according to described gray level image;
Utilize the Mura detected parameters and the described gray scale detection value that arrange to carry out Mura detection to described substrate to be measured.
Above-mentioned detection method, wherein, also comprises:
In the time there is not the one group of identification parameter statistical value mating with described identification parameter detected value in described many group identification parameter statistical values, record described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured;
Obtain according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured the corresponding identification parameter statistical value of explained hereafter condition that described substrate to be measured is corresponding.
In order better to realize above-mentioned purpose, the embodiment of the present invention also provides a kind of pick-up unit of substrate, comprising:
Modular converter, for by substrate to be measured, the original image under predetermined lighting condition is converted to gray level image;
Parameter detecting value acquisition module, for obtain the identification parameter detected value that described substrate to be measured is corresponding according to described gray level image, described identification parameter is the parameter relevant to gray scale;
Matching module for described identification parameter detected value and the many groups of identification parameter statistical values that set in advance are compared respectively, is determined the one group of identification parameter statistical value mating with described identification parameter detected value from described many group identification parameter statistical values; Each group identification parameter statistical value has recorded the statistics of the identification parameter detected value of multiple substrates of producing under corresponding explained hereafter condition;
Determination module, for the explained hereafter condition of determining described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter standard value of described identification parameter detected value coupling.
Above-mentioned pick-up unit, wherein, described substrate can be split as multiple panels, and described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and panel gray scale homogeneous parameter.
Above-mentioned pick-up unit, wherein, when described identification parameter is panel average gray parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
The first computing unit, for according to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
The second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels.
Above-mentioned pick-up unit, wherein, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
The first computing unit, for according to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
The second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels;
The 3rd computing unit, for the detected value of determining described panel gray scale homogeneous parameter is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
Above-mentioned pick-up unit, wherein, also comprises:
Detected parameters determination module, for according to the each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determines and the setting Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured;
Gray scale detection value acquisition module, for obtaining the multiple gray scale detection values corresponding to diverse location of described substrate to be measured according to described gray level image;
Detection module, carries out Mura detection for Mura detected parameters and the described gray scale detection value of utilizing setting to described substrate to be measured.
Above-mentioned pick-up unit, wherein, also comprises:
Logging modle, in the time there is not the one group of identification parameter statistical value mating with described identification parameter detected value in described many group identification parameter statistical values, records described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured for detection of parameter;
Set up module, for setting up according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured the corresponding identification parameter statistical value of explained hereafter condition that described substrate to be measured is corresponding.
In the embodiment of the present invention, obtain after the gray level image being converted to by the original image of substrate to be measured, obtain the identification parameter detected value relevant to gray scale based on gray level image.Then the detected value of this identification parameter and the many groups of identification parameter statistical values that obtain according to the tester substrate of known manufacturing condition are contrasted one by one, after the one group of identification parameter statistical value that obtains matching, just can confirm the one group of explained hereafter condition that the corresponding manufacturing condition of identification parameter statistical value is exactly this substrate to be measured matching.
Owing to being that numerical value according to can " recording " accurately manufacturing condition is identified substrate to be measured, therefore can obtain recognition result accurately.
Meanwhile, in the embodiment of the present invention, in identifying, after only needing to obtain the image of substrate to be measured and once changing, according to some parameters relevant to gray scale of Image Acquisition after conversion, and then the computing of mating according to these parameters, realize simple.
Brief description of the drawings
Fig. 1 represents the schematic diagram for explaining substrate and panel;
Fig. 2 represents the schematic flow sheet of the detection method of the substrate of the embodiment of the present invention;
The moving average curve that Fig. 3 uses while representing Mura detection and the schematic diagram of detection curve;
Fig. 4 represents the structural representation of the pick-up unit of the substrate of the embodiment of the present invention.
Embodiment
In the detection method and pick-up unit of the substrate of the embodiment of the present invention, the parameter relevant to gray scale of the image of the substrate that foundation is produced carried out the identification of substrate process working condition.
Before the embodiment of the present invention is further elaborated, the several concepts that first the application related to describe, so that better understand the embodiment of the present invention.
< substrate and panel >
Briefly, liquid crystal panel is that in the middle of two-layer very thin glass substrate, parcel one deck liquid crystal molecule forms.When production, the glass substrate of employing has a fixing size, then forms the liquid crystal panel of various sizes by cutting.
Therefore, according to the difference of economic cut lengths, Liquid crystal production line has also been divided into different algebraically, if the substrate size in 5 line acmes in generation is 1200*1300mm, and 8 generation line substrate size be 2160*2460mm.On the whole, panel algebraically is higher, and the size of panel is larger, and the number of screen of cutting is more, and utilization factor and benefit are just higher.
As shown in Figure 1, the substrate in the specific embodiment of the invention refers to the overall glass plate 101 before cutting, and panel refers to the little piecemeal 102 on described substrate, the final display unit that becomes electron device of making of these piecemeals.
< explained hereafter condition >
The technological process of production, refers in process of production, laborer utilize the tool of production by various starting material, semi-manufacture by certain equipment, process continuously in a certain order, finally make it to become method and the process of finished product.
In specific embodiments of the invention, specific to the explained hereafter flow process of the substrate of liquid crystal display, manufacturing condition can be one or more in following various condition:
The classification of the photoresist using;
The glue speed of telling of glue spreader;
The exposure of exposure machine;
The exposure time interval of exposure machine.
Although those skilled in the art all know, the substrate produced certainly and these factors closely related, what mode is these factors can detect by, is technological difficulties of this area always.Inventor is on the basis of a large amount of creative works, the image information of utilizing substrate of novelty detects the manufacturing condition of substrate, has solved this area and cannot detect by relatively simple and reliable method for a long time the problem of the manufacturing condition of substrate.
As shown in Figure 2, the detection method of the substrate of the embodiment of the present invention comprises:
In the detection method of the substrate of the embodiment of the present invention, obtain after the gray level image being converted to by the original image of substrate to be measured, obtain the identification parameter detected value relevant to gray scale based on gray level image.Then the detected value of this identification parameter and the many groups of identification parameter statistical values that obtain according to the tester substrate of known manufacturing condition are contrasted one by one, after the one group of identification parameter statistical value that obtains matching, just can confirm the one group of explained hereafter condition that the corresponding manufacturing condition of identification parameter statistical value is exactly this substrate to be measured matching.
In the specific embodiment of the invention, first carry out the statistics of identification parameter according to the substrate of existing known manufacturing condition, in the time that sample size is more, can obtain the identification parameter statistical value of the substrate under this manufacturing condition.
Then carry out these numerical value that can " record " accurately manufacturing condition substrate to be measured is identified, therefore can obtain recognition result accurately.
Meanwhile, in the embodiment of the present invention, in identifying, after only needing to obtain the image of substrate to be measured and once changing, according to some parameters relevant to gray scale of Image Acquisition after conversion, and then the computing of mating according to these parameters, realize simple.
Mention, described substrate can be split as multiple panels before, comprises at least one in substrate average gray parameter, panel average gray parameter and panel gray scale homogeneous parameter at identification parameter described in specific embodiments of the invention.
First as follows to above several conceptual illustration.
< substrate average gray value >
Substrate average gray value is the average gray value of the statistics taking the sampled point on substrate as unit, and substrate average gray value X equals: A1/B1, wherein:
A1 is the gray-scale value sum that is distributed in all sampled points on substrate;
B1 is sampled point quantity.
< panel average gray parameter >
Panel average gray value is the average gray value of the statistics taking alienable panel on substrate as unit, and panel average gray parameter Y equals: A2/B2, wherein:
A2 is the gray-scale value sum of all panels on substrate;
B2 is the panel quantity on substrate.
The gray-scale value of each piece panel is the average gray value of the statistics taking the sampled point on panel as unit, and the gray-scale value of panel equals: A21/B21, wherein:
A21 is the gray-scale value sum that is distributed in all sampled points on panel;
B21 is sampled point quantity.
In specific embodiments of the invention, for the gray-scale value of each piece panel, in order to ensure the accuracy of gray-scale value, can do following selection to sampled point:
1, select at random; Or
2, select to be positioned at the Spot detection point of face plate center and be more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point.
Certainly, can also be that other mode is selected, do not limit one by one at this.
< panel gray scale homogeneous parameter >
Panel gray scale homogeneous parameter is for characterizing the homogeneity of panel gray scale, and panel gray scale homogeneous parameter Z equals: A3/Y, wherein:
A3 is maximal value or the minimum value in the gray-scale value of all panels.
In the time that described identification parameter is panel average gray parameter, obtains the identification parameter detected value that described substrate to be measured is corresponding and specifically comprise:
Determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
Calculate the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels.
When described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, obtains the identification parameter detected value that described substrate to be measured is corresponding and specifically comprise:
Determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
Calculate the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels;
The detected value of determining described panel gray scale homogeneous parameter is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
It should be understood that, in the embodiment of the present invention, while using the multiple identification parameter relevant to gray scale simultaneously, can each different aspect identify the manufacturing condition of substrate to be measured, can from same object (gray scale image), obtain again, in maximizing recognition accuracy, reduced and realized difficulty and realize cost simultaneously.
First the embodiment of the present invention needs to obtain the many groups of identification parameter statistical values corresponding with explained hereafter condition that set in advance, and concrete acquisition process is described as follows.
Suppose that known explained hereafter condition is divided in N, need to carry out for each explained hereafter condition the operation (taking explained hereafter condition A as example) of following steps:
First, choose multiple (relevant with accuracy of identification, quantity is more, and accuracy of identification is higher) by already known processes condition A produce substrate as statistical sample;
Secondly, obtain identification parameter test value for each sample substrate test of choosing;
Finally, add up according to all test values, obtain the identification parameter statistical value that explained hereafter condition A is corresponding.
This statistical value can be various types of statisticses, and taking substrate average gray value as example, this substrate average gray statistical value can be:
The mean value of the substrate average gray test value of all sample substrate; Or
The interval that in the substrate average gray test value of all sample substrate, maximal value and minimum value form as end points.
As shown in the table, be a kind of signal of the identification parameter statistical value setting in advance,
Certainly, can also be other statistics, do not enumerate at this.
After obtaining every kind of each self-corresponding identification parameter statistical value of manufacturing condition, can carry out the identification of substrate production process conditions.
Or comprise that taking identification parameter substrate average gray parameter is described as follows as example.
In the specific embodiment of the invention, after obtaining the substrate average gray parameter detecting value of substrate to be measured, just need to compare with each group substrate average gray parametric statistics value, find the group substrate average gray parametric statistics value matching.
Mention, in specific embodiments of the invention, substrate average gray statistical value can be various forms before, and under the different forms of expression, the implication of coupling is different, is respectively described below.
When the mean value of the substrate average gray test value that substrate average gray statistical value is all sample substrate, the substrate average gray statistical value mating with the substrate average gray parameter detecting value of substrate to be measured is: with the substrate average gray statistical value of the absolute value minimum of the difference of the substrate average gray parameter detecting value of substrate to be measured.
And when maximal value and minimum value in the substrate average gray test value that substrate average gray statistical value is all sample substrate as end points form interval time, the interval of mating with the substrate average gray parameter detecting value of substrate to be measured is: the interval that comprises the substrate average gray parameter detecting value of described substrate to be measured.
How to mate for test value and multiple statistical value, in prior art, have various algorithms, may be used in the embodiment of the present invention, do not describe in detail one by one at this.
Certainly, for emerging in an endless stream of manufacturing condition, can real-time update database in the embodiment of the present invention, be beneficial to follow-up detection and Identification, in this case, the detection method of the embodiment of the present invention, also comprises:
In the time there is not the one group of identification parameter statistical value mating with described identification parameter detected value in described many group identification parameter statistical values, record described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured;
Obtain according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured the corresponding identification parameter statistical value of explained hereafter condition that described substrate to be measured is corresponding.
In the specific embodiment of the invention, identifying after the manufacturing condition of substrate to be measured, can test more accurately according to its manufacturing condition.
Mura(nurse draws) to refer to display brightness inhomogeneous for phenomenon, causes the phenomenon of various vestiges.The simplest determination methods is exactly, and is switched to black picture or other low grey menu in darkroom, then goes from various angle, and different liquid crystal display just has Mura miscellaneous, as travers, 45 degree angle bead lines etc.
At present mainly to read the image of substrate to be tested and its processing is converted to gray level image and carried out afterwards Mura test by configuring many image capture devices and indirect illumination unit producing the method for carrying out Mura test on line.
In Mura test process, can various test parameters need to be set, and be all that an identical standard value is set for all test parameters in prior art, utilize this standard value to carry out Mura test to all substrates to be measured.
But the Mura image of the substrate to be measured that various processes is produced is all not identical, detect the situation that just there will be undetected and/or flase drop by same detected parameters setting value, reduce the accuracy rate detecting.
When the PR of line glue, (CF subsidiary factory is used the PR glue of multiple manufacturers, composition is different) and working condition (for example: exposure interval and the exposure etc. of telling glue amount, exposure machine of glue spreader) while changing to some extent, the face of substrate also can change to some extent, the Mura image generating is different, detect according to identical detected parameters setting value the situation that just there will be undetected and/or flase drop, reduced the accuracy rate detecting.
And in the embodiment of the present invention, detecting after the manufacturing condition of substrate to be measured, can detect according to the predefined detection criteria parameter corresponding with manufacturing condition that can meet testing requirement, improve the precision detecting.
That is: the detection method of the embodiment of the present invention can also comprise:
According to the each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determine and the setting Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured;
Determine the multiple gray scale detection values corresponding to diverse location of described substrate to be measured according to described gray level image;
Utilize the Mura detected parameters and the described gray scale detection value that arrange to carry out Mura detection to described substrate to be measured.
With like recognition category be, in the specific embodiment of the invention, all record each self-corresponding Mura detection criteria parameter for different explained hereafter conditions, when identifying after the explained hereafter condition of substrate to be measured, can determine corresponding with it Mura detection criteria parameter, utilize this definite Mura detection criteria parameter and gray scale detection value to carry out Mura detection to substrate to be measured.
The detailed process below Mura being detected is described below.
It is mainly to utilize two parameters (moving average and upper lower limit value) to detect that Mura detects.
Moving average M is for carrying out smoothing processing to gray scale detection curve (Fig. 3 is with the curve of diamond indicia), obtains the moving average curve curve of square mark (in the Fig. 3 with).
Suppose M=3, as a gray-scale value detects sequence X
i(i=1,2,3 ..., N) corresponding gray-scale value moving average sequence X ', wherein the value of m element equals X ' m=(X
m-1+ X
m+ X
m-1)/3.
After obtaining mean value, determine upper lower limit value, by the upwards translation downwards of moving average curve, obtain two detection curves curve of trigonometric sum cross mark (in the Fig. 3 with).
In the time that the gray-scale value of the monitoring point on gray scale detection curve is outside two detection curve limited ranges, represent to exist defect.
Can find, it is accurately whether closely related with moving average and upper lower limit value that Mura detects.
In the specific embodiment of the invention, obtaining after the original gray scale detection value sequence of substrate, can calculate according to the moving average in Mura detection criteria parameter the moving average value sequence of substrate to be measured, and then calculate two detection sequences according to the upper lower limit value in Mura detection criteria parameter, final according to each numerical value in original gray scale detection value sequence is judged, when this numerical value is not in the time detecting in sequence between two corresponding with it numerical value, represent to exist defect.
The embodiment of the present invention also provides a kind of pick-up unit of substrate, comprises as shown in Figure 4:
Modular converter, for by substrate to be measured, the original image under predetermined lighting condition is converted to gray level image;
Parameter detecting value acquisition module, for obtain the identification parameter detected value that described substrate to be measured is corresponding according to described gray level image, described identification parameter is the parameter relevant to gray scale;
Matching module for described identification parameter detected value and the many groups of identification parameter statistical values that set in advance are compared respectively, is determined the one group of identification parameter statistical value mating with described identification parameter detected value from described many group identification parameter statistical values; Each group identification parameter statistical value has recorded the statistics of the identification parameter detected value of multiple substrates of producing under corresponding explained hereafter condition;
Determination module, for the explained hereafter condition of determining described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter standard value of described identification parameter detected value coupling.
In the pick-up unit of the embodiment of the present invention, described substrate can be split as multiple panels, and described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and panel gray scale homogeneous parameter.
In the pick-up unit of the embodiment of the present invention, when described identification parameter is panel average gray parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
The first computing unit, for according to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
The second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels.
In the pick-up unit of the embodiment of the present invention, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
The first computing unit, for according to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
The second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels;
The 3rd computing unit, for the detected value of determining described panel gray scale homogeneous parameter is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
In the pick-up unit of the embodiment of the present invention, also comprise:
Detected parameters determination module, for according to the each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determines and the setting Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured;
Gray scale detection value acquisition module, for obtaining the multiple gray scale detection values corresponding to diverse location of described substrate to be measured according to described gray level image;
Detection module, carries out Mura detection for Mura detected parameters and the described gray scale detection value of utilizing setting to described substrate to be measured.
In the pick-up unit of the embodiment of the present invention, also comprise:
Logging modle, in the time there is not the one group of identification parameter statistical value mating with described identification parameter detected value in described many group identification parameter statistical values, records described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured for detection of parameter;
Set up module, for setting up according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured the corresponding identification parameter statistical value of explained hereafter condition that described substrate to be measured is corresponding.
Those of ordinary skill in the art should be appreciated that and can modify or be equal to replacement technical scheme of the present invention, and do not depart from the spiritual scope of technical solution of the present invention, and it all should be encompassed in the middle of claim scope of the present invention.
Claims (12)
1. a detection method for substrate, is characterized in that, comprising:
Original image by substrate to be measured under predetermined lighting condition is converted to gray level image;
Obtain according to described gray level image the identification parameter detected value that described substrate to be measured is corresponding, described identification parameter is the parameter relevant to gray scale;
Described identification parameter detected value and the many groups of identification parameter statistical values that set in advance are compared respectively, from described many group identification parameter statistical values, determine the one group of identification parameter statistical value mating with described identification parameter detected value; Each group identification parameter statistical value has recorded the statistics of the identification parameter detected value of multiple substrates of producing under corresponding explained hereafter condition;
The explained hereafter condition of determining described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter standard value of described identification parameter detected value coupling.
2. detection method according to claim 1, is characterized in that, described substrate can be split as multiple panels, and described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and panel gray scale homogeneous parameter.
3. detection method according to claim 2, is characterized in that, when described identification parameter is panel average gray parameter, obtains the identification parameter detected value that described substrate to be measured is corresponding and specifically comprises:
Determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
Calculate the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels.
4. detection method according to claim 2, is characterized in that, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, obtains the identification parameter detected value that described substrate to be measured is corresponding and specifically comprises:
Determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
According to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
Calculate the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels;
The detected value of determining described panel gray scale homogeneous parameter is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
5. according to the detection method described in any one in claim 1-4, it is characterized in that, also comprise:
According to the each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determine and the setting Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured;
Determine the multiple gray scale detection values corresponding to diverse location of described substrate to be measured according to described gray level image;
Utilize the Mura detected parameters and the described gray scale detection value that arrange to carry out Mura detection to described substrate to be measured.
6. according to the detection method described in claim 1-4, it is characterized in that, also comprise:
In the time there is not the one group of identification parameter statistical value mating with described identification parameter detected value in described many group identification parameter statistical values, record described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured;
Obtain according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured the corresponding identification parameter statistical value of explained hereafter condition that described substrate to be measured is corresponding.
7. a pick-up unit for substrate, is characterized in that, comprising:
Modular converter, for by substrate to be measured, the original image under predetermined lighting condition is converted to gray level image;
Parameter detecting value acquisition module, for obtain the identification parameter detected value that described substrate to be measured is corresponding according to described gray level image, described identification parameter is the parameter relevant to gray scale;
Matching module for described identification parameter detected value and the many groups of identification parameter statistical values that set in advance are compared respectively, is determined the one group of identification parameter statistical value mating with described identification parameter detected value from described many group identification parameter statistical values; Each group identification parameter statistical value has recorded the statistics of the identification parameter detected value of multiple substrates of producing under corresponding explained hereafter condition;
Determination module, for the explained hereafter condition of determining described substrate to be measured is: the explained hereafter condition corresponding with one group of identification parameter standard value of described identification parameter detected value coupling.
8. pick-up unit according to claim 7, is characterized in that, described substrate can be split as multiple panels, and described identification parameter comprises at least one in substrate average gray parameter, panel average gray parameter and panel gray scale homogeneous parameter.
9. pick-up unit according to claim 8, is characterized in that, when described identification parameter is panel average gray parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
The first computing unit, for according to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
The second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels.
10. pick-up unit according to claim 8, is characterized in that, when described identification parameter is panel average gray parameter and panel gray scale homogeneous parameter, parameter detecting value acquisition module specifically comprises:
Panel gray scale and statistic unit, for determine according to described gray level image multiple check points of each panel gray-scale value and; Described multiple check point comprises and is positioned at the Spot detection point of described face plate center and is more than or equal to multiple periphery check points of preset distance with the distance of described Spot detection point;
The first computing unit, for according to the gray-scale value of described multiple check points with calculate the panel grey parameter detected value of each panel;
The second computing unit, for calculating the detected value of panel average gray parameter according to the panel grey parameter detected value of multiple panels;
The 3rd computing unit, for the detected value of determining described panel gray scale homogeneous parameter is: the business of the detected value of the minimum value of panel grey parameter detected value or maximal value and panel average gray parameter.
11. according to the pick-up unit described in any one in claim 7-11, it is characterized in that, also comprises:
Detected parameters determination module, for according to the each self-corresponding Mura detection criteria parameter of pre-recorded different process working condition, determines and the setting Mura detection criteria parameter corresponding with the explained hereafter condition of described substrate to be measured;
Gray scale detection value acquisition module, for obtaining the multiple gray scale detection values corresponding to diverse location of described substrate to be measured according to described gray level image;
Detection module, carries out Mura detection for Mura detected parameters and the described gray scale detection value of utilizing setting to described substrate to be measured.
12. according to the pick-up unit described in any one in claim 7-11, it is characterized in that, also comprises:
Logging modle, in the time there is not the one group of identification parameter statistical value mating with described identification parameter detected value in described many group identification parameter statistical values, records described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured for detection of parameter;
Set up module, for setting up according to described substrate to be measured and identification parameter detected value corresponding to follow-up substrate to be measured the corresponding identification parameter statistical value of explained hereafter condition that described substrate to be measured is corresponding.
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