CN109426013A - A kind of analysis method of color membrane substrates defect, detection restorative procedure and device - Google Patents
A kind of analysis method of color membrane substrates defect, detection restorative procedure and device Download PDFInfo
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- CN109426013A CN109426013A CN201710730999.9A CN201710730999A CN109426013A CN 109426013 A CN109426013 A CN 109426013A CN 201710730999 A CN201710730999 A CN 201710730999A CN 109426013 A CN109426013 A CN 109426013A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Liquid Crystal (AREA)
Abstract
The present invention provides analysis method, detection restorative procedure and the device of a kind of color membrane substrates defect, the analysis method of the color membrane substrates defect, comprising: obtain the data of the filtration parameter for the first quantity detection defect that automated optical detection equipment is detected from multiple color membrane substrates samples；Obtain the data that the second quantity that prosthetic appliance is repaired from the first quantity detection defect repairs the filtration parameter of defect；The data for the filtration parameter that data and the second quantity to the filtration parameter of the first quantity detection defect repair defect are analyzed, it obtains the data of the filtration parameter of detection defect and repairs the variance data of the data of the filtration parameter of defect, the corresponding filter area of filtration parameter is determined according to variance data.In the present invention, comprehensive detection defect and the data for repairing defect, it determines the filter area for filtering the filtration parameter of color membrane substrates defect, the defect for not needing to repair can be filtered using the filter area, save the time of prosthetic appliance confirmation detection defect.
Description
Technical field
The present invention relates to color membrane substrates defect detecting technique field more particularly to a kind of analysis sides of color membrane substrates defect
Method, detection restorative procedure and device.
Background technique
Currently, after each procedure for completing Thin Film Transistor-LCD (TFT-LCD) color membrane substrates, usually all
Need by color membrane substrates be sent into automated optical detection equipment (AOI) carry out microdefect detection, through AOI detect have it is microcosmic
The color membrane substrates of defect also need to be sent into reparation (Repair) equipment and carry out defect repair.Whether the microdefect of AOI detection is complete
Repair the quality for directly affecting color membrane substrates in portion.In actual production, the microdefect of AOI detection only has 30% or so needs and repairs
Multiple, remaining 70% defect is in reparing process or invisible or do not need to repair.But for the product for guaranteeing color membrane substrates
Matter, this 70% microdefect require to be confirmed in prosthetic appliance, cause the time to waste, seriously affect production capacity.
The time that the defect repaired is not needed to reduce confirmation wastes, and in existing method, can use and relax AOI defect
Detection standard, or in the direct filtration fraction defect of prosthetic appliance, but both filter types fully rely on engineer experience,
Filter effect can not quantify, and AOI missed detection risk and prosthetic appliance leakage repair that risk is uncontrollable, not can guarantee the product of color membrane substrates
Matter.
Summary of the invention
In view of this, the present invention provides analysis method, detection restorative procedure and the device of a kind of color membrane substrates defect, it is comprehensive
It detects defect and repairs the data of defect, determine the filter area for filtering the filtration parameter of color membrane substrates defect, can adopt
The defect for not needing to repair is filtered with the filter area, saves the time of prosthetic appliance confirmation detection defect.
In order to solve the above technical problems, the present invention provides a kind of analysis method of color membrane substrates defect, comprising:
Obtain the mistake for the first quantity detection defect that automated optical detection equipment is detected from multiple color membrane substrates samples
Filter the data of parameter；
Obtain the filtering that the second quantity that prosthetic appliance is repaired from first quantity detection defect repairs defect
The data of parameter；
Data and second quantity to the filtration parameter of first quantity detection defect repair the mistake of defect
The data of filter parameter are analyzed, and the data of the filtration parameter of the detection defect and the number for the filtration parameter for repairing defect are obtained
According to variance data, the corresponding filter area of the filtration parameter is determined according to the variance data.
Preferably, the filtration parameter include defect size, defect grayscale value and defect grayscale value with it is corresponding normal
At least one of grayscale difference of grayscale value.
Preferably, when the filtration parameter includes defect size, the filtering to first quantity detection defect
The data for the filtration parameter that the data of parameter and second quantity repair defect are analyzed, and the detection defect is obtained
The variance data of the data of the filtration parameter of the data and reparation defect of filtration parameter, determines the mistake according to the variance data
The step of filter parameter corresponding filter area includes:
The data of the defect size of defect are detected according to first quantity and second quantity repairs defect
The data of defect size determine the distributed number of the detection defect and the different defect sizes for repairing defect；
According to the distributed number of the detection defect and the different defect sizes for repairing defect, the detection defect is obtained
The variance data of the data of the defect size of the data and reparation defect of defect size, determines described lack according to the variance data
Fall into the corresponding filter area of size.
Preferably, the step of distributed number of the determination detection defect and the different defect sizes for repairing defect is wrapped
It includes:
The first value range for determining the defect size of all detection defects, first value range is divided into multiple
First defect size subregion, wherein the length of every one first defect size subregion is identical；
Determine the quantity of the detection defect in each first defect size subregion；
According to the quantity of the first defect size subregion and corresponding detection defect, the defect of the detection defect is obtained
The column distribution map of size；
Lorentz curve fitting is carried out to the column distribution map of the defect size of the detection defect, the detection is obtained and lacks
The Lorentz curve of sunken defect size；
The second value range for determining all defect sizes for repairing defect, second value range is divided into multiple
Second defect size subregion, wherein the length of every one second defect size subregion is identical；
Determine the quantity of the reparation defect in each second defect size subregion；
According to the second defect size subregion and the corresponding quantity for repairing defect, the defect for repairing defect is obtained
The column distribution map of size；
Lorentz curve fitting is carried out to the column distribution map of the defect size for repairing defect, described repair is obtained and lacks
The Lorentz curve of sunken defect size；
Wherein, the distributed number according to the detection defect and the different defect sizes for repairing defect, obtains described
It detects the data of the defect size of defect and repairs the variance data of the data of the defect size of defect, according to the variance data
The step of determining the defect size corresponding filter area include:
By the Lorentz of the Lorentz curve of the defect size of the detection defect and the defect size for repairing defect
Curve is integrated into the same coordinate system and is compared, according to comparison result obtain it is described detection defect defect size data with
The variance data of the data of the defect size of defect is repaired, and the corresponding mistake of the defect size is determined according to the variance data
Filter range.
Preferably, the filtration parameter includes the grayscale of defect grayscale value and defect grayscale value with corresponding normal grayscale value
When difference, the data and second quantity of the filtration parameter to first quantity detection defect repair defect
The data of filtration parameter are analyzed, and the data of the filtration parameter of the detection defect and the filtration parameter for repairing defect are obtained
The variance data of data, the step of determining the filtration parameter corresponding filter area according to the variance data include:
It determines the detection defect and repairs distributed number of the defect in different grayscale；
According to the detection defect and distributed number of the defect in different grayscale is repaired, all grayscale are divided into multiple
Grayscale subregion；
Determine the grayscale value for detecting defect from the grayscale difference of corresponding normal grayscale value on different grayscale subregions
Distributed number, and, determine it is described repair defect grayscale value from the grayscale difference of corresponding normal grayscale value in different ashes
Distributed number on rank subregion；
According to it is described detection defect grayscale value from the grayscale difference of corresponding normal grayscale value on different grayscale subregions
Distributed number and it is described repair defect grayscale value from the grayscale difference of corresponding normal grayscale value in different grayscale subregions
On distributed number, obtain the detection defect grayscale value and the grayscale difference of corresponding normal grayscale value and it is described repair it is scarce
The variance data of sunken grayscale value and the grayscale difference of corresponding normal grayscale value, and different ashes are determined according to the variance data
The corresponding filter area of grayscale difference of rank subregion.
The present invention also provides a kind of detection restorative procedures of color membrane substrates defect, comprising:
Obtain the filter area for detecting the filtration parameter of color membrane substrates defect, the filter area of the filtration parameter by
The analysis method of above-mentioned color membrane substrates defect obtains；
According to the filter area of the filtration parameter, the defect of color membrane substrates is detected or repaired.
Preferably, the filter area according to the filtration parameter is detected or is repaired to the defect of color membrane substrates
Method include:
Using the filter area of the filtration parameter as determining defects condition to color film base on automated optical detection equipment
Plate carries out optical detection, detects to the defects of described filter area is not belonging to, and obtains detection defect.
Preferably, the filter area according to the filtration parameter is detected or is repaired to the defect of color membrane substrates
Method include:
Whether belong to filter area in the detection defect that prosthetic appliance judges that automated optical detection equipment obtains, is not belonged to
In the detection defect in the filter area as filtered detection defect, and the filtered detection defect is repaired
It is multiple.
The present invention also provides a kind of analytical equipments of color membrane substrates defect, comprising:
First obtains module, the first number detected from multiple color membrane substrates samples for obtaining automated optical detection equipment
The parameter information of amount detection defect；
Second obtains module, the second quantity repaired from first quantity detection defect for obtaining prosthetic appliance
A parameter information for repairing defect；
Determining module, data and second quantity for the filtration parameter to first quantity detection defect
The data for repairing the filtration parameter of defect are analyzed, and are obtained the data of the filtration parameter of the detection defect and are repaired defect
The variance data of the data of filtration parameter determines the corresponding filter area of the filtration parameter according to the variance data.
Preferably, the filtration parameter include defect size, defect grayscale value and defect grayscale value with it is corresponding normal
At least one of grayscale difference of grayscale value.
Preferably, when the filtration parameter includes defect size, the determining module includes:
First determination unit, the data and described second of the defect size for detecting defect according to first quantity
Quantity repairs the data of the defect size of defect, determines the quantity of the detection defect and the different defect sizes for repairing defect
Distribution；
Second determination unit, for according to it is described detection defect and repair defect different defect sizes distributed number,
The variance data of the data of the defect size of the detection defect and the data for the defect size for repairing defect is obtained, according to described
Variance data determines the corresponding filter area of the defect size.
Preferably, first determination unit, the first value range of the defect size for determining all detection defects,
First value range is divided into multiple first defect size subregions, wherein the length of every one first defect size subregion
It is identical；Determine the quantity of the detection defect in each first defect size subregion；According to the first defect size subregion
With the quantity of corresponding detection defect, the column distribution map of the defect size of the detection defect is obtained；To the detection defect
The column distribution map of defect size carry out Lorentz curve fitting, the Lorentz for obtaining the defect size of the detection defect is bent
Line；The second value range for determining all defect sizes for repairing defect, is divided into multiple second for second value range
Defect size subregion, wherein the length of every one second defect size subregion is identical；Determine each second defect size subregion
In reparation defect quantity；According to the second defect size subregion and the corresponding quantity for repairing defect, described repair is obtained
The column distribution map of the defect size of multiple defect；It is bent that Lorentz is carried out to the column distribution map of the defect size for repairing defect
Line fitting obtains the Lorentz curve of the defect size for repairing defect；
Second determination unit, for lacking the Lorentz curve of the defect size of the detection defect and described repair
The Lorentz curve of sunken defect size, which is integrated into the same coordinate system, to be compared, and is obtained the detection according to comparison result and is lacked
The variance data of the data of the defect size of the data and reparation defect of sunken defect size, and determined according to the variance data
The corresponding filter area of the defect size.
Preferably, the filtration parameter includes the grayscale of defect grayscale value and defect grayscale value with corresponding normal grayscale value
When difference, the determining module includes:
Third determination unit, for determining the detection defect and repairing distributed number of the defect in different grayscale；
Division unit will own for the distributed number according to the detection defect and reparation defect in different grayscale
Grayscale is divided into multiple grayscale subregions；
4th determination unit, for determining the grayscale value for detecting defect and the grayscale difference of corresponding normal grayscale value
Distributed number on different grayscale subregions, and, determine the grayscale value for repairing defect and corresponding normal grayscale value
Distributed number of the grayscale difference on different grayscale subregions；
5th determination unit, for according to the grayscale value for detecting defect and the grayscale difference of corresponding normal grayscale value
Distributed number on different grayscale subregions and the grayscale value for repairing defect and the grey scale of corresponding normal grayscale value
It is worth the distributed number on different grayscale subregions, obtains the grayscale value for detecting defect and the grayscale of corresponding normal grayscale value
Difference and grayscale value and the variance data of the grayscale difference of corresponding normal grayscale value for repairing defect, and according to the difference
Heteromerism according to the different grayscale subregions of determination the corresponding filter area of grayscale difference.
The present invention also provides a kind of detection prosthetic devices of color membrane substrates defect, comprising:
Module is obtained, for obtaining the filter area of the filtration parameter for detecting color membrane substrates defect, the filtering ginseng
Method obtains several filter areas from the above analysis；
Filtering module is detected or is repaired to the defect of color membrane substrates for the filter area according to the filtration parameter
It is multiple.
Preferably, the detection prosthetic device of the color membrane substrates defect includes automated optical detection equipment, the filter module
Block carries out optical detection to color membrane substrates using the filter area of the filtration parameter as determining defects condition, described to being not belonging to
The defects of filter area is detected, and detection defect is obtained.
Preferably, the detection prosthetic device of the color membrane substrates defect includes prosthetic appliance, and the filtering module judgement is certainly
Whether the detection defect that dynamic optics detection equipment obtains belongs to filter area, obtains the detection being not belonging in the filter area and lacks
It falls into and is used as filtered detection defect, and the filtered detection defect is repaired.
The advantageous effects of the above technical solutions of the present invention are as follows:
Combine the data of the filtration parameter of the detection defect of automated optical detection equipment and the reparation defect of prosthetic appliance
Filtration parameter data, data to the filtration parameter of detection defect and the data of filtration parameter for repairing defect compare
Compared with the variance data both obtained determines the corresponding filter area of filtration parameter according to variance data, so that the filtering model determined
It is more accurate to enclose, and can be filtered to the defect for not needing to repair using the filter area, saves prosthetic appliance confirmation inspection
Out the time of defect, improve production capacity.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below by institute in the description to the embodiment of the present invention
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without any creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the flow diagram of the analysis method of the color membrane substrates defect of the embodiment of the present invention one；
Fig. 2 is the flow diagram of the analysis method of the color membrane substrates defect of the embodiment of the present invention two；
Fig. 3 is the flow diagram of the analysis method of the color membrane substrates defect of the embodiment of the present invention three；
Fig. 4 is the distribution map of the defect size for the detection defect that the automated optical detection equipment of the embodiment of the present invention detects；
Fig. 5 is the distribution map of the defect size of the reparation defect of the prosthetic appliance reparation of the embodiment of the present invention；
Fig. 6 is the defect size of the reparation defect in the Lorentz curve and Fig. 5 of the defect size of the detection defect in Fig. 4
Lorentz curve integration schematic diagram；
Fig. 7 is the long-range navigation of the Lorentz curve of the defect size of the detection defect in Fig. 6 and the defect size of reparation defect
Hereby curve makees the schematic diagram after normalized；
Fig. 8 is the flow diagram of the analysis method of the color membrane substrates defect of the embodiment of the present invention four；
Fig. 9 is the reparation of detection defect and prosthetic appliance reparation that the automated optical detection equipment of the embodiment of the present invention detects
Distributed number figure of the defect in different grayscale；
Figure 10 is that defect and reparation defect and the grayscale difference of corresponding normal grayscale value are detected on different grayscale subregions
Schematic diagram；
Figure 11 is actually to detect after the defect of color membrane substrates is detected or repaired using the filter area of grayscale difference
The distributed number figure of defect and reparation defect in different grayscale；
Figure 12 is the flow diagram of the detection restorative procedure of the color membrane substrates defect of the embodiment of the present invention；
Figure 13 is the structural block diagram of the analytical equipment of the color membrane substrates defect of the embodiment of the present invention；
Figure 14 is the structural block diagram of the detection prosthetic device of the color membrane substrates defect of the embodiment of the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
Attached drawing, the technical solution of the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is this hair
Bright a part of the embodiment, instead of all the embodiments.Based on described the embodiment of the present invention, ordinary skill
Personnel's every other embodiment obtained, shall fall within the protection scope of the present invention.
Referring to FIG. 1, Fig. 1 is the flow diagram of the analysis method of the color membrane substrates defect of the embodiment of the present invention one, it should
Analysis method includes:
Step 11: obtaining the first quantity detection that automated optical detection equipment is detected from multiple color membrane substrates samples and lack
The data of sunken filtration parameter；
For example, can be color using a batch that automated optical detection equipment carried out defects detection and repaired equipment was repaired
Ilm substrate is as sample.
The filtration parameter may include defect size, defect grayscale value and defect grayscale value and corresponding normal grayscale
At least one of grayscale difference of value etc..So-called normal grayscale value refers to that corresponding with defect grayscale value there is no the coloured silks of defect
The grayscale value of the same area of ilm substrate.
Step 12: obtaining the second quantity that prosthetic appliance is repaired from first quantity detection defect and repair defect
Filtration parameter data；
Step 13: the data and second quantity of the filtration parameter of first quantity detection defect are repaired and lacked
The data of sunken filtration parameter are analyzed, and the data for obtaining the filtration parameter of the detection defect and the filtering for repairing defect are joined
The variance data of several data determines the corresponding filter area of the filtration parameter according to the variance data.
In the embodiment of the present invention, the data and reparation of the filtration parameter of the detection defect of automated optical detection equipment are combined
The data of the filtration parameter of the reparation defect of equipment, the filtration parameter of data and reparation defect to the filtration parameter of detection defect
Data be compared, the variance data both obtained determines the corresponding filter area of filtration parameter according to variance data so that
Determining filter area is more accurate, can be filtered to the defect for not needing to repair using the filter area, save and repair
The time of multiple equipment confirmation detection defect, improve production capacity.
Below for different types of filtration parameter, to the analysis method of the color membrane substrates defect in the embodiment of the present invention into
Row is described in detail.
Referring to FIG. 2, Fig. 2 is the flow diagram of the analysis method of the color membrane substrates defect of the embodiment of the present invention two, it should
Analysis method includes:
Step 21: obtaining the first quantity detection that automated optical detection equipment is detected from multiple color membrane substrates samples and lack
The data of sunken defect size；
In the embodiment of the present invention, the defect size can refer to the area of defect or the other sizes information of defect.
Step 22: obtaining the second quantity that prosthetic appliance is repaired from first quantity detection defect and repair defect
Defect size data；
Step 23: the data of the defect size of defect being detected according to first quantity and second quantity is repaired
The data of the defect size of defect determine the distributed number of the detection defect and the different defect sizes for repairing defect；
Step 24: according to the distributed number of the detection defect and the different defect sizes for repairing defect, obtaining the inspection
The variance data of the data of the defect size of the data of the defect size of defect and reparation defect out, it is true according to the variance data
Determine the corresponding filter area of the defect size.
In the embodiment of the present invention, detection defect and the quantity of different defect sizes for repairing defect are counted, it can be with
According to the distributed number of different defect sizes, quantification is distributed less defect size, because of the defect that distributed number is less
Size description is possible to not need to be repaired, and may thereby determine that the corresponding filter area of defect size.
Referring to FIG. 3, Fig. 3 is the flow diagram of the analysis method of the color membrane substrates defect of the embodiment of the present invention three, it should
Analysis method includes:
Step 31: obtaining the first quantity detection that automated optical detection equipment is detected from multiple color membrane substrates samples and lack
The data of sunken defect size；
Step 32: obtaining the second quantity that prosthetic appliance is repaired from first quantity detection defect and repair defect
Defect size data；
Step 33: determining the first value range of the defect size of all detection defects, first value range is drawn
It is divided into multiple first defect size subregions, wherein the length of every one first defect size subregion is identical；
For example, first value range can be A < Size≤B, the first value range is divided into a point of " B+1-A "
Area, each subregion are respectively as follows: A < Size≤A+1, A+1 < Size≤A+2 ... ..., B-1 < Size≤B, and wherein Size is that defect is big
It is small.
For example, the minimum value of defect size is 15 in the first quantity detection defect, and the maximum value of defect size is
140, the first value range for detecting the defect size of defect can be 15≤Size≤140, and 15≤Size≤140 are divided into
" 140+1-15 " a subregion, each subregion are respectively as follows: 15≤Size≤16,16 < Size≤17 ... ..., 139 < Size≤140.
Certainly, in some other embodiment of the invention, the first value range can not also be examined according to the first quantity
The minimum value of defect size and minimum value determine in defect out, for example, can determine based on experience value.
In the embodiment of the present invention, defect size is subjected to subregion, calculation amount can be effectively reduced, certainly, subregion is thinner, obtains
The result arrived is more accurate.
Step 34: determining the quantity of the detection defect in each first defect size subregion；
Step 35: according to the quantity of the first defect size subregion and corresponding detection defect, obtaining the detection and lack
The column distribution map of sunken defect size；
Referring to FIG. 4, the defect size for the detection defect that the automated optical detection equipment that Fig. 4 is the embodiment of the present invention detects
Distribution map.In Fig. 4, X-axis indicates defect size (Size), and Y-axis indicates the number of the detection defect on different defect size subregions
Amount.In the embodiment of the present invention, detect the defect size of defect the first value range can for 15≤Size≤140, by 15≤
Size≤140 are divided into 25 subregions, and each subregion is respectively as follows: 15≤Size≤20,20 < Size≤25 ... ..., 135 < Size
≤140.Column distribution map in Fig. 4 can embody the size distribution of the actual detection defect of automated optical detection equipment.
Step 36: Lorentz curve fitting being carried out to the column distribution map of the defect size of the detection defect, obtains institute
State the Lorentz curve of the defect size of detection defect；
The black curve in Fig. 4 is please referred to, then is the Lorentz curve of the defect size of detection defect, Lorentz fit is
The purpose that column distribution map is converted into Lorentz curve is to find automatic light by a kind of fitting closest to actual production data
The distribution peaks of the defect size of the practical detection defect of detection equipment are learned, convenient for finding the most optimized parameter between two peak values
Value.
Certainly, in some other embodiment of the invention, other approximating methods, such as Gauss curve fitting can also be used
Deng.
Step 37: determining the second value range of all defect sizes for repairing defect, second value range is drawn
It is divided into multiple second defect size subregions, wherein the length of every one second defect size subregion is identical；
Second value range for example can be C < Size≤D, and the first value range is divided into a point of " D+1-C "
Area, each subregion are respectively as follows: C < Size≤C+1, C+1 < Size≤C+2 ... ..., D-1 < Size≤D, and wherein Size is that defect is big
It is small.Preferably, second value range is identical as above-mentioned first value range, i.e. C is equal to A, and D is equal to B.
For example, the minimum value that the second quantity repairs defect size in defect is 15, and the maximum value of defect size is
140, the second value range for repairing the defect size of defect can be 15≤Size≤140, and 15≤Size≤140 are divided into
" 140+1-15 " a subregion, each subregion are respectively as follows: 15≤Size≤16,16 < Size≤17 ... ..., 139 < Size≤140.
Certainly, in some other embodiment of the invention, the second value range can not also be repaired according to the second quantity
The minimum value of defect size and minimum value determine in multiple defect, for example, can determine based on experience value, alternatively, directly with first
Value range takes identical range.
Step 38: determining the quantity of the reparation defect in each second defect size subregion；
Step 39: according to the second defect size subregion and the corresponding quantity for repairing defect, obtaining described repair and lack
The column distribution map of sunken defect size；
Referring to FIG. 5, Fig. 5 is the distribution of the defect size of the reparation defect of the prosthetic appliance reparation of the embodiment of the present invention
Figure.In Fig. 5, X-axis indicates defect size (Size), and Y-axis indicates the quantity of the reparation defect on different defect size subregions.This hair
In bright embodiment, repair the defect size of defect the second value range can for 15≤Size≤140, by 15≤Size≤
140 are divided into 25 subregions, and each subregion is respectively as follows: 15≤Size≤20,20 < Size≤25 ... ..., 135 < Size≤140.
Column distribution map in Fig. 5 can embody the actual size distribution for repairing defect of prosthetic appliance.
Step 310: Lorentz curve fitting being carried out to the column distribution map of the defect size for repairing defect, obtains institute
State the Lorentz curve for repairing the defect size of defect；
The black curve in Fig. 5 is please referred to, then is the Lorentz curve of the defect size of reparation defect, by column distribution map
The purpose for being converted into Lorentz curve is to find the distribution peaks of the defect size of prosthetic appliance actual repair defect.
Step 311: by the Lorentz curve of the defect size of the detection defect and the defect size for repairing defect
Lorentz curve be integrated into the same coordinate system and be compared, the defect size of the detection defect is obtained according to comparison result
Data and repair defect defect size data variance data, and the defect size is determined according to the variance data
Corresponding filter area.
Referring to FIG. 6, Fig. 6 is the reparation defect in the Lorentz curve and Fig. 5 of the defect size of the detection defect in Fig. 4
Defect size Lorentz curve integration schematic diagram.In Fig. 6, X-axis indicates defect size (Size), and Y-axis indicates different and lacks
Fall into the quantity of the detection defect and reparation defect on size subregion.In the embodiment of the present invention, the value range of defect size is 15
15≤Size≤140 are divided into 25 subregions by≤Size≤140, and each subregion is respectively as follows: 15≤Size≤20,20 < Size
≤ 25 ... ..., 135 < Size≤140.
That is, by the defect size of the reparation defect in the Lorentz curve and Fig. 5 of the defect size of the detection defect in Fig. 4
Lorentz curve be integrated into the same coordinate system and be compared, and the corresponding filtering model of defect size is determined according to comparison result
It encloses, by taking Fig. 6 as an example, from fig. 6 it can be seen that the number of the quantity of detection defect of the defect size after 110 and reparation defect
Amount tends to 0, therefore, the filter area of defect size can be set to greater than 110.
For the Lorentz curve and the defect size of reparation defect of the vivider defect size for showing detection defect
The distribution situation of Lorentz curve in the embodiment of the present invention, can also will detect defect and repair the total quantity of defect and do normalizing
Change processing, referring to FIG. 7, Fig. 7 is big for the Lorentz curve of the defect size of the detection defect in Fig. 6 and the defect of reparation defect
Small Lorentz curve makees the schematic diagram after normalized, can according to the detection defect after normalized defect it is big
The Lorentz curve of small Lorentz curve and the defect size for repairing defect, is arranged the filter area of defect size, by quantity
The lesser defect for not needing to repair accurately is filtered.
It is the color membrane substrates defect by taking filtration parameter includes defect size as an example to the embodiment of the present invention in above-described embodiment
Analysis method be illustrated, include below defect grayscale value and defect grayscale value and corresponding normal grayscale with filtration parameter
For the grayscale difference of value, the analysis method of the color membrane substrates defect of the embodiment of the present invention is illustrated.
Referring to FIG. 8, Fig. 8 is the flow diagram of the analysis method of the color membrane substrates defect of the embodiment of the present invention four, it should
Analysis method includes:
Step 81: obtaining the first quantity detection that automated optical detection equipment is detected from multiple color membrane substrates samples and lack
The normal grayscale value of the data of sunken defect grayscale value and each detection defect；
Step 82: obtaining the second quantity that prosthetic appliance is repaired from first quantity detection defect and repair defect
Defect grayscale value data and it is each repair defect normal grayscale value；
Step 83: determining the detection defect and repair distributed number of the defect in different grayscale；
Referring to FIG. 9, Fig. 9 is the detection defect and prosthetic appliance that the automated optical detection equipment of the embodiment of the present invention detects
Distributed number figure of the reparation defect of reparation in different grayscale.Optical definitions grayscale is divided into 0~255 rank, color membrane substrates detection
Defect be all distributed in this 256 grayscale.X-axis indicates that standard gray scale (Gray) value, Y-axis indicate in different grayscale in Fig. 9
It detects defect and repairs the quantity of defect.It can be seen in figure 9 that detection defect and reparation defect are on each grayscale subregion
Distributed number is needed to filter, be divided to grayscale subregion to analyze defect on which grayscale subregion.
Step 84: according to the detection defect and repairing distributed number of the defect in different grayscale, all grayscale are drawn
It is divided into multiple grayscale subregions；
For example, all grayscale (0~255) can be divided into four subregions, the grey-scale range of subregion one is: 0 <
The grey-scale range of Gray1≤60, subregion two is: 60 Gray2≤110 <, the grey-scale range of subregion three is: 110 < Gray3≤
140, the grey-scale range of subregion four is: 140 Gray4≤255 <.
It is, of course, understood that the subregion of setting is more, more accurate filtering may be implemented.
Step 85: determining the grayscale value for detecting defect from the grayscale difference of corresponding normal grayscale value in different grayscale
Distributed number on subregion, and, determine that the grayscale value for repairing defect exists with the grayscale difference of corresponding normal grayscale value
Distributed number on different grayscale subregions；
Referring to FIG. 10, Figure 10 is to detect defect and reparation defect and corresponding normal grayscale value on different grayscale subregions
The schematic diagram of grayscale difference, Tu10Zhong, X-axis indicate that standard gray scale, Y-axis indicate detection defect on each grayscale subregion and repair defect
Grayscale value and the grayscale difference DELTA Gray of corresponding normal grayscale value.
Step 86: according to the grayscale value of the detection defect from the grayscale difference of corresponding normal grayscale value in different grayscale
Distributed number and the grayscale value for repairing defect on subregion are from the grayscale difference of corresponding normal grayscale value in different ashes
Distributed number on rank subregion, obtain grayscale value and the grayscale difference of corresponding normal grayscale value of the detection defect with it is described
Grayscale value and the variance data of the grayscale difference of corresponding normal grayscale value of defect are repaired, and according to variance data determination
The corresponding filter area of grayscale difference of different grayscale subregions.
For example, according to the variation of the Δ Gray corresponding with defect is repaired of the detection defect in Figure 10, to the ash of each division
The filter area of grayscale difference DELTA Gray on rank subregion is set, and the defect that each subregion does not need to repair is filtered respectively
Fall.
Following table 1 is please referred to, table 1 is the change according to the Δ Gray corresponding with defect is repaired of the detection defect in Figure 10
Change, the result that the filter area of the grayscale difference DELTA Gray on the grayscale subregion of each division is set:
Table 1
That is, filter area is grayscale difference less than 30, i.e., only to grayscale difference for 0 Gray1≤60 < of subregion
Defect more than or equal to 30 is detected or is repaired, and the defect for grayscale difference less than 30 is without detecting or repairing.
It is right using the filter area of the grayscale difference DELTA Gray on each grayscale subregion being arranged in the embodiment of the present invention
When the defect of color membrane substrates is detected or repaired, the quantity of the detection defect of automated optical detection equipment can reduce 3098
A, the quantity of the reparation defect of prosthetic appliance can reduce 7, that is to say, that with 0.03% defect omission factor, 0.114%
Rate is repaired in defect leakage, and defect total amount is reduced 13.76%.
Figure 11 is please referred to, Figure 11 is that the defect of color membrane substrates is detected or repaired using the filter area of grayscale difference
The distributed number figure of practical detection defect and reparation defect in different grayscale afterwards.X-axis indicates standard gray scale value, Y-axis in Figure 11
It indicates to detect defect in different grayscale and repairs the quantity of defect.Compare Figure 11 and Fig. 9, it can be seen that part gray-scale subregion
Detection defect and repair defect quantity be substantially reduced, i.e., by each subregion do not need repair defect filtered out respectively, from
And the time of prosthetic appliance confirmation detection defect can be reduced, effectively improve production capacity.
In above-described embodiment, filtration parameter includes defect grayscale value and defect grayscale value and corresponding normal grayscale value
Grayscale difference, certainly, in some other embodiment of the invention, filtration parameter can also only include defect grayscale value.
In some other embodiment of the invention, filtration parameter can also include defect size, defect grayscale value simultaneously
And the grayscale difference of defect grayscale value and corresponding normal grayscale value, so that the filter area of obtained filtration parameter is more quasi-
Really.
Preferably, in the embodiment of the present invention, in order to further increase filtration parameter filter area accuracy, can be with
After carrying out defect filtering to color membrane substrates using the filter area of the filtration parameter, defect filterability, defect omission factor are calculated
And/or defect leakage repairs rate etc. come whether reasonable to assess filter area, and obtains optimal filter area.
Wherein, defect filterability, defect omission factor and the defect leakage rate of repairing can be calculated using following formula:
The above embodiment of the present invention has operation simple, is easy the advantages of implementing, using the analysis method, can quickly obtain
Take the filter area of filtration parameter.Statistics shows under the premise of not influencing color membrane substrates quality, using in the embodiment of the present invention
The analysis method obtained filter area of filtration parameter the defect of color membrane substrates is detected or is repaired after, can be by color film base
The defect repair rate of plate is promoted by 30% or so to 60% or more, realizes that color membrane substrates defect repair production capacity promotes 20% or more.
Figure 12 is please referred to, Figure 12 is the process signal of the detection restorative procedure of the color membrane substrates defect of the embodiment of the present invention
Figure, the detection restorative procedure include:
Step 121: obtaining the filter area for detecting the filtration parameter of color membrane substrates defect, the mistake of the filtration parameter
Filter range analysis method of color membrane substrates defect as described in any of the above-described embodiment obtains；
Step 122: according to the filter area of the filtration parameter, the defect of color membrane substrates being detected or repaired.
In the embodiment of the present invention, the defect for not needing to repair can be filtered out using the filter area of filtration parameter, from
And the time of prosthetic appliance confirmation detection defect can be reduced, effectively improve production capacity.
In some embodiments of the invention, the filtering model of filtration parameter can be set on automated optical detection equipment
It encloses, at this point, the filter area according to the filtration parameter, the method packet that the defect of color membrane substrates is detected or repaired
It includes: color membrane substrates being carried out using the filter area of the filtration parameter as determining defects condition on automated optical detection equipment
Optical detection is detected to the defects of described filter area is not belonging to, and obtains detection defect.
Automated optical detection equipment is using the filter area of the filtration parameter as determining defects condition to color membrane substrates
Optical detection is carried out, when obtaining detection defect, it is possible to reduce the quantity for the detection defect that automated optical detection equipment detects, from
And the time of prosthetic appliance confirmation detection defect can be reduced, effectively improve production capacity.
In other embodiment of the invention, the filter area of filtration parameter can be set on prosthetic appliance, this
When, the filter area according to the filtration parameter, the method that the defect of color membrane substrates is detected or repaired include:
Whether the detection defect that prosthetic appliance judges that automated optical detection equipment obtains belongs to filter area, obtains being not belonging to the filtering
Detection defect in range is repaired as filtered detection defect, and to the filtered detection defect.
Prosthetic appliance can repair filtered detection defect, not need to carry out repairing really again to detection defect
Recognize, is filtered in prosthetic appliance side better than being filtered in automated optical detection equipment side, because in prosthetic appliance mistake
Filter does not influence the practical detection defect of automated optical detection equipment, and automated optical detection equipment can be allowed preferably to monitor in actual production
The situation of change of defect.
Certainly, in other embodiment of the invention, it is also possible to automated optical detection equipment first, in accordance with existing
Determining defects condition to color membrane substrates carry out optical detection, obtain detection defect, then, then use the filtration parameter mistake
Filter range is filtered detection defect, obtains filtered detection defect, and repair to the filtered detection defect
It is multiple.
Prosthetic appliance can repair filtered detection defect, lack so as to reduce prosthetic appliance confirmation detection
The sunken time, effectively improve production capacity.Meanwhile automated optical detection equipment also can preferably monitor the change of defect in actual production
Change situation.
Figure 13 is please referred to, the embodiment of the present invention also provides a kind of analytical equipment of color membrane substrates defect, comprising:
First obtains module, the first number detected from multiple color membrane substrates samples for obtaining automated optical detection equipment
The parameter information of amount detection defect；
Second obtains module, the second quantity repaired from first quantity detection defect for obtaining prosthetic appliance
A parameter information for repairing defect；
Determining module, data and second quantity for the filtration parameter to first quantity detection defect
The data for repairing the filtration parameter of defect are analyzed, and are obtained the data of the filtration parameter of the detection defect and are repaired defect
The variance data of the data of filtration parameter determines the corresponding filter area of the filtration parameter according to the variance data.
In the embodiment of the present invention, the data and reparation of the filtration parameter of the detection defect of automated optical detection equipment are combined
The data of the filtration parameter of the reparation defect of equipment, the filtration parameter of data and reparation defect to the filtration parameter of detection defect
Data be compared, the variance data both obtained determines the corresponding filter area of filtration parameter according to variance data so that
Determining filter area is more accurate, can be filtered to the defect for not needing to repair using the filter area, save and repair
The time of multiple equipment confirmation detection defect, improve production capacity.
In the embodiment of the present invention, it is preferable that the filtration parameter includes defect size, defect grayscale value and defect grayscale
Value is at least one of with the grayscale difference of corresponding normal grayscale value.
In some embodiments of the invention, when the filtration parameter includes defect size, the determining module includes:
First determination unit, the data and described second of the defect size for detecting defect according to first quantity
Quantity repairs the data of the defect size of defect, determines the quantity of the detection defect and the different defect sizes for repairing defect
Distribution；
Second determination unit, for according to it is described detection defect and repair defect different defect sizes distributed number,
The variance data of the data of the defect size of the detection defect and the data for the defect size for repairing defect is obtained, according to described
Variance data determines the corresponding filter area of the defect size.
Preferably, first determination unit, the first value range of the defect size for determining all detection defects,
First value range is divided into multiple first defect size subregions, wherein the length of every one first defect size subregion
It is identical；Determine the quantity of the detection defect in each first defect size subregion；According to the first defect size subregion
With the quantity of corresponding detection defect, the column distribution map of the defect size of the detection defect is obtained；To the detection defect
The column distribution map of defect size carry out Lorentz curve fitting, the Lorentz for obtaining the defect size of the detection defect is bent
Line；The second value range for determining all defect sizes for repairing defect, is divided into multiple second for second value range
Defect size subregion, wherein the length of every one second defect size subregion is identical；Determine each second defect size subregion
In reparation defect quantity；According to the second defect size subregion and the corresponding quantity for repairing defect, described repair is obtained
The column distribution map of the defect size of multiple defect；It is bent that Lorentz is carried out to the column distribution map of the defect size for repairing defect
Line fitting obtains the Lorentz curve of the defect size for repairing defect；
Second determination unit, for lacking the Lorentz curve of the defect size of the detection defect and described repair
The Lorentz curve of sunken defect size, which is integrated into the same coordinate system, to be compared, and is obtained the detection according to comparison result and is lacked
The variance data of the data of the defect size of the data and reparation defect of sunken defect size, and determined according to the variance data
The corresponding filter area of the defect size.
In other embodiment of the invention, the filtration parameter include defect grayscale value and defect grayscale value with it is right
When the grayscale difference for the normal grayscale value answered, the determining module includes:
Third determination unit, for determining the detection defect and repairing distributed number of the defect in different grayscale；
Division unit will own for the distributed number according to the detection defect and reparation defect in different grayscale
Grayscale is divided into multiple grayscale subregions；
4th determination unit, for determining the grayscale value for detecting defect and the grayscale difference of corresponding normal grayscale value
Distributed number on different grayscale subregions, and, determine the grayscale value for repairing defect and corresponding normal grayscale value
Distributed number of the grayscale difference on different grayscale subregions；
5th determination unit, for according to the grayscale value for detecting defect and the grayscale difference of corresponding normal grayscale value
Distributed number on different grayscale subregions and the grayscale value for repairing defect and the grey scale of corresponding normal grayscale value
It is worth the distributed number on different grayscale subregions, obtains the grayscale value for detecting defect and the grayscale of corresponding normal grayscale value
Difference and grayscale value and the variance data of the grayscale difference of corresponding normal grayscale value for repairing defect, and according to the difference
Heteromerism according to the different grayscale subregions of determination the corresponding filter area of grayscale difference.
Figure 14 is please referred to, the embodiment of the present invention also provides a kind of detection prosthetic device of color membrane substrates defect, comprising:
Module is obtained, for obtaining the filter area of the filtration parameter for detecting color membrane substrates defect, the filtering ginseng
Several filter areas is obtained by the analysis method of the color membrane substrates defect in any of the above-described embodiment；
Filtering module is detected or is repaired to the defect of color membrane substrates for the filter area according to the filtration parameter
It is multiple.
In the embodiment of the present invention, the defect for not needing to repair can be filtered out using the filter area of filtration parameter, from
And the time of prosthetic appliance confirmation detection defect can be reduced, effectively improve production capacity.
In some embodiments of the invention, the detection prosthetic device of the color membrane substrates defect includes automated optical detection
Equipment, the filtering module carry out optics inspection to color membrane substrates using the filter area of the filtration parameter as determining defects condition
It surveys, is detected to the defects of described filter area is not belonging to, obtain detection defect.
In other embodiment of the invention, the detection prosthetic device of the color membrane substrates defect includes repairing to set
Standby, whether the detection defect that the filtering module judges that automated optical detection equipment obtains belongs to filter area, is not belonging to
Detection defect in the filter area is repaired as filtered detection defect, and to the filtered detection defect
It is multiple.
Unless otherwise defined, technical term or scientific term used in the present invention are should be in fields of the present invention
The ordinary meaning that personage with general technical ability is understood." first ", " second " used in the present invention and similar word
It is not offered as any sequence, quantity or importance, and is used only to distinguish different component parts.Equally, "one" or
The similar word such as " one " does not indicate that quantity limits yet, but indicates that there are at least one." connection " or " connected " etc. are similar
Word is not limited to physics or mechanical connection, but may include electrical connection, it is either direct or between
It connects."upper", "lower", "left", "right" etc. are only used for indicating relative positional relationship, when the absolute position for being described object changes
Afterwards, then the relative positional relationship also correspondingly changes.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art
For, without departing from the principles of the present invention, it can also make several improvements and retouch, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (16)
1. a kind of analysis method of color membrane substrates defect characterized by comprising
Obtain the filtering ginseng for the first quantity detection defect that automated optical detection equipment is detected from multiple color membrane substrates samples
Several data；
Obtain the filtration parameter that the second quantity that prosthetic appliance is repaired from first quantity detection defect repairs defect
Data；
Data and second quantity to the filtration parameter of first quantity detection defect repair the filtering ginseng of defect
Several data are analyzed, and the data of the data of the filtration parameter of the detection defect and the filtration parameter of reparation defect are obtained
Variance data determines the corresponding filter area of the filtration parameter according to the variance data.
2. the analysis method of color membrane substrates defect according to claim 1, which is characterized in that the filtration parameter includes lacking
Fall at least one of size, defect grayscale value and defect grayscale value and the grayscale difference of corresponding normal grayscale value.
3. the analysis method of color membrane substrates defect according to claim 2, which is characterized in that the filtration parameter includes lacking
When falling into size, the data and second quantity of the filtration parameter to first quantity detection defect repair defect
The data of filtration parameter analyzed, obtain the data of the filtration parameter of the detection defect and repair the filtration parameter of defect
Data variance data, the step of determining the filtration parameter corresponding filter area according to the variance data includes:
The data of the defect size of defect and the defect of second quantity reparation defect are detected according to first quantity
The data of size determine the distributed number of the detection defect and the different defect sizes for repairing defect；
According to the distributed number of the detection defect and the different defect sizes for repairing defect, the defect of the detection defect is obtained
The variance data of the data of the defect size of the data and reparation defect of size, determines that the defect is big according to the variance data
Small corresponding filter area.
4. the analysis method of color membrane substrates defect according to claim 3, which is characterized in that
The step of distributed number of the determination detection defect and the different defect sizes for repairing defect includes:
The first value range for determining the defect size of all detection defects, is divided into multiple first for first value range
Defect size subregion, wherein the length of every one first defect size subregion is identical；
Determine the quantity of the detection defect in each first defect size subregion；
According to the quantity of the first defect size subregion and corresponding detection defect, the defect size of the detection defect is obtained
Column distribution map；
Lorentz curve fitting is carried out to the column distribution map of the defect size of the detection defect, obtains the detection defect
The Lorentz curve of defect size；
The second value range for determining all defect sizes for repairing defect, is divided into multiple second for second value range
Defect size subregion, wherein the length of every one second defect size subregion is identical；
Determine the quantity of the reparation defect in each second defect size subregion；
According to the second defect size subregion and the corresponding quantity for repairing defect, the defect size for repairing defect is obtained
Column distribution map；
Lorentz curve fitting is carried out to the column distribution map of the defect size for repairing defect, obtains the reparation defect
The Lorentz curve of defect size；
Wherein, the distributed number according to the detection defect and the different defect sizes for repairing defect, obtains the detection
The variance data of the data of the defect size of the data and reparation defect of the defect size of defect, determines according to the variance data
The step of defect size corresponding filter area includes:
By the Lorentz curve of the Lorentz curve of the defect size of the detection defect and the defect size for repairing defect
It is integrated into the same coordinate system and is compared, the data and reparation of the defect size of the detection defect are obtained according to comparison result
The variance data of the data of the defect size of defect, and the corresponding filtering model of the defect size is determined according to the variance data
It encloses.
5. according to the analysis method of the described in any item color membrane substrates defects of claim 2-4, which is characterized in that the filtration parameter
It is described to first quantity when including defect grayscale value and defect grayscale value with the grayscale difference of corresponding normal grayscale value
The data for the filtration parameter that the data and second quantity for detecting the filtration parameter of defect repair defect are analyzed, and are obtained
The variance data of the data of the data and filtration parameter for repairing defect of the filtration parameter of the detection defect, according to the difference
Data determine that the step of filtration parameter corresponding filter area includes:
It determines the detection defect and repairs distributed number of the defect in different grayscale；
According to the detection defect and distributed number of the defect in different grayscale is repaired, all grayscale are divided into multiple grayscale
Subregion；
Determine number of the grayscale value of the detection defect from the grayscale difference of corresponding normal grayscale value on different grayscale subregions
Amount distribution, and, determine the grayscale value for repairing defect from the grayscale difference of corresponding normal grayscale value in different grayscale point
Distributed number in area；
Number according to the grayscale value of the detection defect from the grayscale difference of corresponding normal grayscale value on different grayscale subregions
The grayscale value of amount distribution and the reparation defect is from the grayscale difference of corresponding normal grayscale value on different grayscale subregions
Distributed number obtains the grayscale value for detecting defect and the grayscale difference of corresponding normal grayscale value and the reparation defect
The variance data of grayscale value and the grayscale difference of corresponding normal grayscale value, and different grayscale point are determined according to the variance data
The corresponding filter area of grayscale difference in area.
6. a kind of detection restorative procedure of color membrane substrates defect characterized by comprising
The filter area for detecting the filtration parameter of color membrane substrates defect is obtained, the filter area of the filtration parameter is by right
It is required that the analysis method of the described in any item color membrane substrates defects of 1-5 obtains；
According to the filter area of the filtration parameter, the defect of color membrane substrates is detected or repaired.
7. the detection restorative procedure of color membrane substrates defect according to claim 6, which is characterized in that described according to the mistake
The filter area of parameter is filtered, the method that the defect of color membrane substrates is detected or repaired includes:
On automated optical detection equipment using the filter area of the filtration parameter as determining defects condition to color membrane substrates into
Row optical detection is detected to the defects of described filter area is not belonging to, and obtains detection defect.
8. the detection restorative procedure of color membrane substrates defect according to claim 6, which is characterized in that described according to the mistake
The filter area of parameter is filtered, the method that the defect of color membrane substrates is detected or repaired includes:
Whether belong to filter area in the detection defect that prosthetic appliance judges that automated optical detection equipment obtains, obtains being not belonging to institute
The detection defect in filter area is stated as filtered detection defect, and the filtered detection defect is repaired.
9. a kind of analytical equipment of color membrane substrates defect characterized by comprising
First obtains module, for obtaining the first quantity that automated optical detection equipment is detected from multiple color membrane substrates samples
Detect the parameter information of defect；
Second obtains module, repairs for obtaining the second quantity that prosthetic appliance is repaired from first quantity detection defect
The parameter information of multiple defect；
Determining module is repaired for the data of the filtration parameter to first quantity detection defect and second quantity
The data of the filtration parameter of defect are analyzed, and are obtained the data of the filtration parameter of the detection defect and are repaired the filtering of defect
The variance data of the data of parameter determines the corresponding filter area of the filtration parameter according to the variance data.
10. the analytical equipment of color membrane substrates defect according to claim 9, which is characterized in that the filtration parameter includes
At least one of defect size, defect grayscale value and defect grayscale value and grayscale difference of corresponding normal grayscale value.
11. the analytical equipment of color membrane substrates defect according to claim 10, which is characterized in that the filtration parameter includes
When defect size, the determining module includes:
First determination unit, the data and second quantity of the defect size for detecting defect according to first quantity
The data of a defect size for repairing defect determine the quantity point of the detection defect and the different defect sizes for repairing defect
Cloth；
Second determination unit is obtained for the distributed number according to the detection defect and the different defect sizes for repairing defect
The variance data of the data of the data and defect size for repairing defect of the defect size of the detection defect, according to the difference
Data determine the corresponding filter area of the defect size.
12. the analytical equipment of color membrane substrates defect according to claim 11, which is characterized in that
First determination unit, the first value range of the defect size for determining all detection defects, by described first
Value range is divided into multiple first defect size subregions, wherein the length of every one first defect size subregion is identical；It determines every
The quantity of detection defect in the one first defect size subregion；According to the first defect size subregion and corresponding detection
The quantity of defect obtains the column distribution map of the defect size of the detection defect；To the defect size for detecting defect
Column distribution map carries out Lorentz curve fitting, obtains the Lorentz curve of the defect size of the detection defect；It determines all
Second value range is divided into multiple second defect sizes point by the second value range for repairing the defect size of defect
Area, wherein the length of every one second defect size subregion is identical；Determine that the reparation in each second defect size subregion lacks
Sunken quantity；According to the second defect size subregion and the corresponding quantity for repairing defect, lacking for the reparation defect is obtained
Fall into the column distribution map of size；Lorentz curve fitting is carried out to the column distribution map of the defect size for repairing defect, is obtained
To the Lorentz curve of the defect size for repairing defect；
Second determination unit, for by the Lorentz curve of the defect size of the detection defect and described repairing defect
The Lorentz curve of defect size, which is integrated into the same coordinate system, to be compared, and obtains the detection defect according to comparison result
The variance data of the data of the defect size of the data and reparation defect of defect size, and according to variance data determination
The corresponding filter area of defect size.
13. according to the analytical equipment of the described in any item color membrane substrates defects of claim 10-12, which is characterized in that the filtering
Parameter include defect grayscale value and defect grayscale value with the grayscale difference of corresponding normal grayscale value when, the determining module packet
It includes:
Third determination unit, for determining the detection defect and repairing distributed number of the defect in different grayscale；
Division unit, for the distributed number according to the detection defect and reparation defect in different grayscale, by all grayscale
It is divided into multiple grayscale subregions；
4th determination unit, for determining the grayscale value for detecting defect with the grayscale difference of corresponding normal grayscale value not
With the distributed number on grayscale subregion, and, determine the grayscale value for repairing defect and the grayscale of corresponding normal grayscale value
Distributed number of the difference on different grayscale subregions；
5th determination unit, for according to it is described detection defect grayscale value with the grayscale difference of corresponding normal grayscale value not
Grayscale value with distributed number and the reparation defect on grayscale subregion exists with the grayscale difference of corresponding normal grayscale value
Distributed number on different grayscale subregions obtains the grayscale value for detecting defect and the grayscale difference of corresponding normal grayscale value
And grayscale value and the variance data of the grayscale difference of corresponding normal grayscale value for repairing defect, and according to the difference number
According to the corresponding filter area of grayscale difference of the different grayscale subregions of determination.
14. a kind of detection prosthetic device of color membrane substrates defect characterized by comprising
Obtain module, for obtaining the filter area of the filtration parameter for detecting color membrane substrates defect, the filtration parameter
Filter area is obtained by the analysis method of the described in any item color membrane substrates defects of claim 1-5；
Filtering module is detected or is repaired to the defect of color membrane substrates for the filter area according to the filtration parameter.
15. the detection prosthetic device of color membrane substrates defect according to claim 14, which is characterized in that the color membrane substrates
The detection prosthetic device of defect includes automated optical detection equipment, and the filtering module makees the filter area of the filtration parameter
Optical detection is carried out to color membrane substrates for determining defects condition, detects, obtains to the defects of described filter area is not belonging to
To detection defect.
16. the detection prosthetic device of color membrane substrates defect according to claim 14, which is characterized in that the color membrane substrates
The detection prosthetic device of defect includes prosthetic appliance, and the filtering module judges the detection defect that automated optical detection equipment obtains
Whether belong to filter area, obtains the detection defect being not belonging in the filter area as filtered detection defect, and right
The filtered detection defect is repaired.
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| PCT/CN2018/087864 WO2019037490A1 (en) | 2017-08-23 | 2018-05-22 | Color film substrate defect analysis method, and detection and repair method and apparatus |
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| CN110058439A (en) * | 2019-05-20 | 2019-07-26 | 成都中电熊猫显示科技有限公司 | The foreign matter minimizing technology and equipment of colorized optical filtering on piece |
| CN110782782A (en) * | 2019-11-28 | 2020-02-11 | 合肥维信诺科技有限公司 | Array substrate repairing method and system |
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| US11493453B2 (en) * | 2019-06-28 | 2022-11-08 | Kyocera Document Solutions Inc. | Belt inspection system, belt inspection method, and recording medium for belt inspection program |
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| CN109426013B (en) | 2020-06-23 |
| WO2019037490A1 (en) | 2019-02-28 |
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