WO2018198360A1 - Chambre à vapeur - Google Patents

Chambre à vapeur Download PDF

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Publication number
WO2018198360A1
WO2018198360A1 PCT/JP2017/017060 JP2017017060W WO2018198360A1 WO 2018198360 A1 WO2018198360 A1 WO 2018198360A1 JP 2017017060 W JP2017017060 W JP 2017017060W WO 2018198360 A1 WO2018198360 A1 WO 2018198360A1
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WO
WIPO (PCT)
Prior art keywords
vapor chamber
housing
metal foil
wick
convex portion
Prior art date
Application number
PCT/JP2017/017060
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English (en)
Japanese (ja)
Inventor
拓生 若岡
宗一 久米
治 中尾
近川　修
竜宏 沼本
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to PCT/JP2017/017060 priority Critical patent/WO2018198360A1/fr
Priority to CN201790001610.0U priority patent/CN211060713U/zh
Publication of WO2018198360A1 publication Critical patent/WO2018198360A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure

Definitions

  • the present invention relates to a vapor chamber.
  • the vapor chamber is usually provided with a capillary structure called a wick on the inner wall of the housing in order to recirculate the working fluid.
  • a support body for supporting the housing from the inside is usually arranged, whereby deformation of the housing due to decompression, external force, for example, contact with other parts of the housing Prevents deformation.
  • Patent Document 1 describes a vapor chamber having a wick structure 15 on the inner wall of a casing and a supporting plate 17 that contacts the wick structure 15 inside the casing. .
  • the support plate is soft enough to protect the wick, the support plate does not have sufficient strength to support the housing, and the housing may be crushed. If the support plate is hardened so as to maintain the strength of the housing, the wick may be crushed between the inner wall of the housing and the support plate.
  • an object of the present invention is to provide a vapor chamber in which deformation of the casing is suppressed and a wick provided inside the casing is difficult to be crushed.
  • a vapor chamber includes a housing, a column disposed in an internal space of the housing so as to support the housing from the inside, A hydraulic fluid sealed in an internal space; at least one metal foil disposed in the internal space of the housing; and at least one wick disposed in the internal space of the housing; Has at least one of a hollow convex portion and a plurality of grooves on one main surface, and the metal foil and the wick are stacked on at least a part of the metal foil and the main surface of the housing. And the pillar.
  • the metal foil when the metal foil has the convex portion, the metal foil has a concave portion having a shape corresponding to the convex portion on a main surface opposite to the main surface where the convex portion exists, In the case of having the groove, the main surface opposite to the main surface where the groove exists has a convex portion having a shape corresponding to the groove.
  • the casing is composed of two opposing sheets whose outer edge portions are sealed.
  • the vapor chamber includes at least two wicks and the metal foil, and a part of the wick and the metal foil are sandwiched between one main inner surface of the housing and the pillar. The other wick and the metal foil are sandwiched between the main inner surface facing the one main inner surface and the column.
  • the convex portion has a substantially cylindrical shape.
  • the convex portion has a substantially quadrangular prism shape.
  • the circle equivalent diameter of the upper surface of the convex portion is 1 ⁇ m or more and 500 ⁇ m or less.
  • a part of the groove is formed along the first direction, and the other groove is formed along the second direction.
  • the first direction and the second direction are orthogonal.
  • the width of the groove is 1 ⁇ m or more and 500 ⁇ m or less.
  • the depth of the groove and the height of the convex portion are 1 ⁇ m or more and 100 ⁇ m or less.
  • the distance between adjacent ones of the convex portion and the groove is 1 ⁇ m or more and 500 ⁇ m or less.
  • a heat dissipation device comprising the vapor chamber of the present invention is provided.
  • an electronic apparatus comprising the vapor chamber of the present invention or the heat dissipation device of the present invention is provided.
  • a vapor chamber in which deformation of the casing is suppressed and a wick provided inside the casing is not easily crushed, and a heat dissipation device and an electronic apparatus including the vapor chamber.
  • FIG. 1, FIG. 2, FIG. 9, and FIG. 10 are cross-sectional views of vapor chambers 1a, 1b, 1c, and 1d, respectively, according to an embodiment of the present invention.
  • the vapor chamber of the present invention includes a housing 2, a column 3 disposed in the internal space of the housing 2 so as to support the housing 2 from the inside, and an interior of the housing 2. It has at least one metal foil 5 arranged in the space and at least one wick 4 arranged in the internal space of the housing 2. Moreover, although not shown in figure, a hydraulic fluid is further enclosed in the housing
  • the metal foil 5 has at least one of a hollow convex portion 8 and a plurality of grooves 10 on one main surface.
  • At least a part of the metal foil 5 and the wick 4 are sandwiched between the main inner surface of the housing 2 and the column 3 in a stacked state.
  • the casing 2 since the casing 2 is supported from the inside by the pillar 3, it is possible to suppress deformation due to decompression inside the casing and deformation due to a load from outside the casing.
  • the pressure from the pillar 3 can be applied to the wick 4, but the metal foil 5 and the wick 4 are stacked between the main inner surface of the housing 2 and the pillar 3.
  • the metal foil 5 having at least one of the hollow convex portion 8 and the plurality of grooves 10 functions as a cushioning material, the load applied to the wick can be reduced, and the deterioration of the wick function is suppressed. can do.
  • the metal foil 5 has a convex portion 8 as shown in FIG.
  • the metal foil 5 has a plurality of grooves 10 as shown in FIG.
  • the metal foil 5 has a concave portion having a shape corresponding to the convex portion on the main surface facing the main surface where the convex portion 8 exists.
  • the metal foil 5 has a convex portion having a shape corresponding to the groove on the main surface facing the main surface where the groove 10 exists.
  • the housing 2 only needs to have two opposing main inner surfaces.
  • the main inner surface of the housing may be polygonal or circular.
  • the main inner surface refers to the surface having the largest area among the surfaces defining the internal space of the housing and the surface facing the surface.
  • the height (that is, the thickness of the vapor chamber) A of the housing 2 may be, for example, 100 ⁇ m or more and 600 ⁇ m or less, and preferably in the range of 200 ⁇ m or more and 500 ⁇ m or less.
  • the width B of the housing 2 (that is, the width of the vapor chamber) B may be, for example, 5 mm or more and 500 mm or less, preferably 20 mm or more and 300 mm or less, more preferably 50 mm or more and 200 mm or less.
  • the depth D (that is, the depth of the vapor chamber) of the housing 2 that is perpendicular to the arrow indicating the width B of the housing 2 and extends from the front to the back of the page is, for example, not less than 5 mm and not more than 500 mm. Preferably, it exists in the range of 20 mm or more and 300 mm or less, More preferably, it exists in the range of 50 mm or more and 200 mm or less.
  • the height A, the width B, and the depth D described above may be uniform or different at any location of the housing 2.
  • the housing 2 may be integrally formed from a single member.
  • the opposite housing 2 whose outer edge is sealed is opposed to the housing 2. It may consist of two sheets. Moreover, you may form from two or more plate-shaped members. 1, 2, 9, and 10, the upper housing sheet 6 forms an upper main inner surface of the housing 2, and the lower housing sheet 7 forms a lower main inner surface of the housing 2. ing.
  • the upper housing sheet 6 and the lower housing sheet 7 are sealed with each other at their outer edge portions.
  • the outer edge portions of the upper housing sheet 6 and the lower housing sheet 7 refer to a region of a predetermined distance inward from the end portion of the sheet. In the vapor chambers of FIGS.
  • the outer edge of the upper casing sheet 6 and the outer edge of the lower casing sheet 7 are, for example, laser welded, resistance welded, TIG welded (tungsten / non-coated). Active gas welding), diffusion bonding, brazing, resin sealing, ultrasonic bonding, and the like, preferably laser welding or resistance welding.
  • the shape of the housing 2 is not particularly limited.
  • the planar shape of the housing 2 (the shape viewed from the upper side in FIG. 1) may be a polygon such as a triangle or a rectangle, a circle, an ellipse, or a combination of these.
  • the material forming the housing 2 is not particularly limited, and for example, a metal member such as Cu, Ni, Al, Mg, Ti, Fe, and an alloy metal member containing these as a main component can be used. Cu or Cu alloy is used.
  • the thickness C of the wall surface constituting the housing 2 may be, for example, 10 ⁇ m or more and 200 ⁇ m or less, preferably 30 ⁇ m or more and 100 ⁇ m or less, and more preferably Is in the range of 40 ⁇ m to 60 ⁇ m.
  • the thickness C described above may be uniform or different at any location of the housing 2.
  • the thickness C of the upper housing sheet 6 and the thickness of the lower housing sheet 7 may be different.
  • Surfaces on the inner space side and outer space side of the housing 2 may be flat as shown in FIGS. 1, 2, 9 and 10, and as formed in the metal foil 5 in the present invention. Concavities and convexities, grooves and the like may be formed.
  • the pillar 3 is disposed in the housing 2 so as to support the housing 2 from the inside. 1, 2, 9, and 10, the column 3 has a columnar shape, but the shape of the column 3 is not limited to this, and a columnar shape having two bottom surfaces is used. Can do.
  • one of the bottom surfaces of the pillars 3 is in contact with the wick and the other is not in contact with the wick, one of the bottom surfaces in contact with the wick has a larger area than the other plane, thereby effectively reducing the pressure applied to the wick. be able to.
  • the pillar 3 may be fixed to the housing 2. When the bottom surface of the pillar 3 is in contact with the wick 4 or the metal foil 5, the pillar 3 may be fixed to the wick 4 or the metal foil 5.
  • the thickness of the pillar 3 is not particularly limited as long as it gives strength capable of suppressing deformation of the vapor chamber casing.
  • the equivalent circle diameter of the cross section perpendicular to the height direction of the pillar is 100 ⁇ m or more and 2000 ⁇ m or less. Preferably, it exists in the range of 300 micrometers or more and 1000 micrometers or less, More preferably, it exists in the range of 500 micrometers or more and 800 micrometers or less.
  • the column 3 preferably has a height not less than 0.08 times and not more than 0.9 times the height A of the housing 2, for example, in the range of 50 ⁇ m to 500 ⁇ m, preferably in the range of 100 ⁇ m to 400 ⁇ m, more preferably Can have a height in the range of 100 ⁇ m to 200 ⁇ m.
  • the material for forming the pillar 3 is not particularly limited, and for example, a metal member such as Cu, Ni, Al, Mg, Ti, and Fe, and an alloy metal member based on them can be used, preferably Cu. Cu alloy is used.
  • the material forming the pillar is the same material as either or both of the first sheet and the second sheet.
  • the number of columns 3 disposed in the internal space of the housing 2, for example, 1mm may be 0.5 present less than 0.125 present per 2, preferably at least 0.15 present per 1mm 2 0.35 It is in the following range.
  • the pillars 3 may be arranged at regular intervals as shown in FIGS. 1, 2, 9 and 10, for example, in lattice points so that the distance between the pillars is constant, and at irregular intervals. It may be arranged. By arranging the columns 3 evenly, a uniform strength can be ensured throughout the vapor chamber.
  • the ratio of the total area of the bottom surfaces of the pillars 3 arranged in the internal space of the housing 2 and in contact with the main inner surface of the housing 2 to the area of the main inner surface of the housing 2 may be, for example, 1% or more and 70% or less. Preferably, it is in the range of 5% to 50%.
  • the pillar 3 may be formed integrally with the housing 2, or may be manufactured separately from the housing 2 and then fixed to a predetermined portion of the housing 2.
  • the wick 4 is not particularly limited as long as it has a structure capable of moving the hydraulic fluid by capillary force.
  • the capillary structure that exhibits the capillary force for moving the working fluid is not particularly limited, and may be a known structure used in a conventional vapor chamber.
  • examples of the capillary structure include fine structures having irregularities such as pores, grooves, and protrusions, such as a fiber structure, a groove structure, and a network structure.
  • the size and shape of the wick 4 are not particularly limited.
  • the wick 4 has a size and shape that can be continuously installed from the evaporation section to the condensation section inside the housing.
  • the wick 4 has two main surfaces facing each other. At least one is arranged in the space. At least a part of the wick 4 is sandwiched between the main inner surface of the casing and the pillar in a state of being laminated with the metal foil 5.
  • the thickness of the wick 4 may be, for example, in the range of 5 ⁇ m to 200 ⁇ m, preferably in the range of 10 ⁇ m to 80 ⁇ m, and more preferably in the range of 30 ⁇ m to 50 ⁇ m.
  • the thickness of the wick 4 may be uniform everywhere in the wick 4 and may be different as shown in FIG. Further, the wick 4 does not necessarily have to be formed over the entire main surface of the casing 2 of the vapor chamber, as shown in FIGS. 1, 2, 9 and 10, and is formed partially. May be.
  • the material of the wick 4 is not particularly limited, and for example, a porous body, a mesh, a sintered body, a nonwoven fabric and the like can be used, and a mesh and a nonwoven fabric are preferably used.
  • the porous body used as the material of the wick 4 may be, for example, a metal porous body, a ceramic porous body, or a resin porous body.
  • the mesh used as the material of the wick 4 may be, for example, a metal mesh, a resin mesh, or a surface-coated mesh, and is preferably a copper mesh, a SUS mesh, or a polyester.
  • the sintered body used as the material of the wick 4 may be, for example, a metal porous sintered body or a ceramic porous sintered body, and preferably a copper or nickel porous sintered body. Since the pressure applied to the wick is reduced by the above-described structure in the present invention, a wick having insufficient strength for use in a normal vapor chamber can be used for the wick.
  • the metal foil 5 is disposed in the internal space of the housing 2.
  • Two or more metal foils 5 and wicks 4 may be arranged inside the housing 2.
  • some wicks and metal foils are sandwiched between one main inner surface of the housing and the pillar, and the other
  • the wick and the metal foil may be sandwiched between the main inner surface facing the one main inner surface and the column.
  • the pillar 3 for sandwiching some wicks and metal foil with the main inner surface of the housing and the pillar 3 for sandwiching other wicks and metal foil with the main inner surface facing the main inner surface are different columns. May be.
  • the metal foil 5 has at least one of a hollow convex portion 8 and a plurality of grooves 10 on one main surface thereof.
  • pressure is applied to the main surface of the vapor chamber and pressure is applied to the wick 4 from the pillar 3. Since the hollow portion exists under the portion of the metal foil 5 that is in contact with the metal foil 5, the metal foil 5 is deformed, and the pressure applied to the wick 4 can be reduced. Thereby, it is possible to prevent the wick 4 from being crushed by the pillar 3.
  • the convex part of the metal foil 5 is hollow. For example, as shown in FIG.
  • the convex portion can be formed into a hollow shape.
  • the ratio of the volume of the hollow part inside the convex portion to the volume of the convex portion may be, for example, 1% or more and 99% or less, and preferably in the range of 10% or more and 70% or less.
  • the volume of the convex part is the volume of the part protruding from the main surface of the metal foil on which the convex part is formed and the region surrounded by the boundary between the main surface and the convex part of the metal foil on which the convex part is formed.
  • the convex portion 8 on the upper surface of the metal foil 5 may be formed over the entire upper surface of the metal foil as shown in FIGS. 3 and 1, and as shown in FIGS. 4 and 10, It may be partially formed on the upper surface.
  • the convex portion 8 is partially formed on the upper surface of the metal foil 5, and the thickness of the wick where the convex portion 8 is not formed is set to the thickness of the wick where the convex portion 8 is formed.
  • the thickness is increased as compared with the thickness.
  • the convex portion on the upper surface of the metal foil 5 may have a substantially cylindrical shape as shown in FIG.
  • the convex part of the upper surface of the metal foil 5 may be frustum shape.
  • the equivalent circle diameter of the upper surface 12 of the convex portion of the metal foil 5 shown in FIG. 3 may be 1 ⁇ m or more and 500 ⁇ m or less, preferably 5 ⁇ m or more and 300 ⁇ m or less, more preferably 15 ⁇ m or more and 150 ⁇ m or less. is there. Since the upper surface 12 of the convex portion of the metal foil 5 has such a circle-equivalent diameter, the wick is reliably supported by the convex portion and the upper surface 12 of the convex portion is easily deformed. It can be effectively reduced.
  • the height E of the convex portion 8 on the upper surface of the metal foil 5 shown in FIG. 1 may be 1 ⁇ m or more and 100 ⁇ m or less, preferably 5 ⁇ m or more and 50 ⁇ m or less, and preferably 15 ⁇ m or more and 30 ⁇ m or less. . Since the convex portion 8 of the metal foil 5 has such a height E, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid can be enhanced.
  • the distance F between adjacent convex portions on the upper surface of the metal foil 5 may be 1 ⁇ m or more and 500 ⁇ m or less, preferably 5 ⁇ m or more and 300 ⁇ m or less, preferably 15 ⁇ m. It is in the range of 150 ⁇ m or less. Since the distance between adjacent ones of the convex portions on the upper surface of the metal foil 5 is in the above range, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid is enhanced. I can do it.
  • that the convex portions 8 or the grooves 10 are adjacent to each other means that the convex portions 8 or the grooves 10 are adjacent to each other without any other convex portions 8 or the grooves 10 interposed therebetween.
  • the groove on the upper surface of the metal foil 5 may be formed over the entire upper surface of the metal foil or may be partially formed on the upper surface of the metal foil 5.
  • the width G of the groove on the upper surface of the metal foil 5 shown in FIG. 6 may be 1 ⁇ m or more and 500 ⁇ m or less, preferably 5 ⁇ m or more and 300 ⁇ m or less, and preferably 15 ⁇ m or more and 150 ⁇ m or less. Since the groove of the metal foil 5 has such a width G, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid can be enhanced.
  • the depth H of the groove on the upper surface of the metal foil 5 shown in FIG. 2 may be 1 ⁇ m or more and 100 ⁇ m or less, preferably 5 ⁇ m or more and 50 ⁇ m or less, and preferably 15 ⁇ m or more and 30 ⁇ m or less. Since the groove of the metal foil 5 has such a depth H, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid can be enhanced.
  • the distance I between adjacent grooves on the upper surface of the metal foil 5 shown in FIG. 6 may be 1 ⁇ m to 500 ⁇ m, preferably 5 ⁇ m to 300 ⁇ m, preferably 15 ⁇ m to 150 ⁇ m. It is in the following range.
  • the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid can be enhanced. I can do it.
  • the grooves on the upper surface of the metal foil 5 may all be formed along one direction as shown in FIG. 6, and a part of the groove is formed along the first direction as shown in FIG. Others may be formed along the second direction. Since the groove is formed along two directions, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid in the surface direction can be enhanced.
  • the first direction and the second direction may be orthogonal to each other.
  • the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid in the surface direction Can be increased.
  • the metal foil 5 may have both the convex portion 8 and the groove 10 on the upper surface.
  • a metal foil 5 having quadrangular columnar and cylindrical convex portions 8 and grooves 10 may be used. Since the metal foil of the present invention has at least one of a hollow convex part and a plurality of grooves on one main surface, it plays a role of refluxing the working fluid. For this reason, in the vapor chamber of the present invention, since the reflux of the working fluid is promoted by both the wick 4 and the metal foil 5, it has excellent thermal diffusibility as compared with the vapor chamber not having the metal foil 5. .
  • the metal foil 5 is provided in contact with the casing 2, and the wick 4 is in contact with the metal foil 5 and not in contact with the casing 2.
  • the present invention is not limited to the illustrated example, and the wick and the metal foil may overlap each other and be sandwiched between the inner surface of the housing and the top of the column.
  • the metal foil 5 may be provided so that the wick 4 may be in contact with the housing 2 and may be in contact with the wick 4 but not in contact with the housing 2.
  • the metal foil 5 is provided so as to be in contact with the housing 2
  • the wick 4 is provided so as to be in contact with the metal foil 5 and not in contact with the housing 2
  • another metal foil 5 is provided so as to be in contact with the wick. May be further provided.
  • the working fluid is further sealed in the casing of the vapor chamber of the present invention.
  • the hydraulic fluid is vaporized by the heat from the heat source and becomes vapor. Thereafter, the working fluid that has become vapor moves in the housing, releases heat, and returns to the liquid.
  • the working fluid that has returned to the liquid is conveyed again to the heat source by capillary action due to the wick. And it is vaporized by the heat from the heat source again to become steam.
  • the vapor chamber of the present invention operates independently without the need for external power, and can rapidly diffuse heat in two dimensions using the latent heat of evaporation / condensation of the working fluid. .
  • the type of hydraulic fluid is not particularly limited, and for example, water, alcohols, alternative chlorofluorocarbons, etc. can be used, and water is preferably used.
  • a working fluid having a high viscosity that is not suitable for the working fluid can be used because it is usually difficult to reflux.
  • the vapor chamber of the present invention can be mounted on a heat dissipation device so as to be close to a heat source. Accordingly, the present invention also provides a heat dissipation device comprising the vapor chamber of the present invention. By providing the heat dissipation device of the present invention with the vapor chamber of the present invention, it is possible to effectively suppress an increase in temperature around the electronic component that generates heat and the component.
  • the vapor chamber or the heat dissipation device of the present invention can be mounted on an electronic device for the purpose of heat dissipation. Accordingly, the present invention provides an electronic apparatus comprising the vapor chamber or heat dissipation device of the present invention.
  • the electronic device of the present invention include a smartphone, a tablet terminal, a notebook computer, a game device, and a wearable device.
  • the vapor chamber of the present invention operates autonomously without requiring external power, and can diffuse heat at a high speed two-dimensionally using the latent heat of evaporation / condensation of the working fluid. Therefore, by providing the electronic apparatus with the vapor chamber or the heat dissipation device of the present invention, it is possible to effectively realize heat dissipation in a limited space inside the electronic apparatus.
  • the vapor chamber of the present invention can be used by being mounted on, for example, a smartphone, a tablet terminal, a notebook computer, a game device, a wearable device, or the like.

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

La présente invention concerne une chambre à vapeur comportant un boîtier, une colonne disposée dans un espace interne du boîtier de façon à soutenir le boîtier de l'intérieur, un fluide de travail qui est scellé dans l'espace interne du boîtier, au moins une feuille métallique disposée dans l'espace interne du boîtier, et au moins une mèche disposée dans l'espace interne du boîtier, la feuille métallique comportant une saillie creuse et/ou une pluralité de rainures sur une surface principale, et la feuille métallique et la mèche étant au moins partiellement intercalées entre la colonne et une surface interne principale du boîtier dans un état stratifié.
PCT/JP2017/017060 2017-04-28 2017-04-28 Chambre à vapeur WO2018198360A1 (fr)

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Application Number Priority Date Filing Date Title
PCT/JP2017/017060 WO2018198360A1 (fr) 2017-04-28 2017-04-28 Chambre à vapeur
CN201790001610.0U CN211060713U (zh) 2017-04-28 2017-04-28 均热板、散热器件以及电子设备

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PCT/JP2017/017060 WO2018198360A1 (fr) 2017-04-28 2017-04-28 Chambre à vapeur

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WO2018198360A1 true WO2018198360A1 (fr) 2018-11-01

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021006753A (ja) * 2019-06-28 2021-01-21 住友理工株式会社 蒸発器およびその製造方法
WO2023171408A1 (fr) * 2022-03-09 2023-09-14 株式会社村田製作所 Dispositif de thermodiffusion et appareil électronique
WO2024018846A1 (fr) * 2022-07-20 2024-01-25 株式会社村田製作所 Dispositif de diffusion de chaleur et appareil électronique

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JP2004077120A (ja) * 2002-08-21 2004-03-11 Samsung Electronics Co Ltd 平板型熱伝逹装置及びその製造方法
US20090205812A1 (en) * 2008-02-14 2009-08-20 Meyer Iv George Anthony Isothermal vapor chamber and support structure thereof
US20110315351A1 (en) * 2010-06-23 2011-12-29 Celsia Technologies Taiwan, I Vapor chamber having composite supporting structure
US8316921B2 (en) * 2009-07-13 2012-11-27 Fu Zhun Precision Industry (Shen Zhen) Co., Ltd. Plate type heat pipe and heat sink using the same
US20160161193A1 (en) * 2014-09-15 2016-06-09 Kelvin Thermal Technologies, Inc. Polymer-based microfabricated thermal ground plane

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Publication number Priority date Publication date Assignee Title
JPS54108050A (en) * 1978-02-13 1979-08-24 Oki Electric Cable Flat board type heat pipe
JP2004077120A (ja) * 2002-08-21 2004-03-11 Samsung Electronics Co Ltd 平板型熱伝逹装置及びその製造方法
US20090205812A1 (en) * 2008-02-14 2009-08-20 Meyer Iv George Anthony Isothermal vapor chamber and support structure thereof
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JP7430894B2 (ja) 2019-06-28 2024-02-14 国立大学法人東海国立大学機構 蒸発器およびその製造方法
WO2023171408A1 (fr) * 2022-03-09 2023-09-14 株式会社村田製作所 Dispositif de thermodiffusion et appareil électronique
WO2024018846A1 (fr) * 2022-07-20 2024-01-25 株式会社村田製作所 Dispositif de diffusion de chaleur et appareil électronique

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