WO2018198360A1

WO2018198360A1 - Vapor chamber

Info

Publication number: WO2018198360A1
Application number: PCT/JP2017/017060
Authority: WO
Inventors: 拓生若岡; 宗一久米; 治中尾; 近川　修; 竜宏沼本
Original assignee: 株式会社村田製作所
Priority date: 2017-04-28
Filing date: 2017-04-28
Publication date: 2018-11-01
Also published as: CN211060713U

Abstract

The present invention provides a vapor chamber having a housing, a column disposed in an internal space of the housing so as to support the housing from within, a working fluid that is sealed in the internal space of the housing, at least one metal foil disposed in the internal space of the housing, and at least one wick disposed in the internal space of the housing, the metal foil having a hollow protrusion and/or a plurality of grooves on one main surface, and the metal foil and the wick being at least partially sandwiched between the column and a main inner surface of the housing in a laminated state.

Description

Vapor chamber

The present invention relates to a vapor chamber.

In recent years, the amount of heat generated due to higher integration and higher performance of elements has increased. Moreover, since the heat generation density increases with the miniaturization of products, heat dissipation measures have become important. This situation is particularly remarkable in the field of mobile terminals such as smartphones and tablets. In recent years, a graphite sheet or the like is often used as a heat countermeasure member, but since the amount of heat transport is not sufficient, use of various heat countermeasure members has been studied. In particular, the use of a vapor chamber, which is a planar heat pipe, has been studied because it is possible to diffuse heat very effectively.

The vapor chamber is usually provided with a capillary structure called a wick on the inner wall of the housing in order to recirculate the working fluid. In the upper part of the wick, a support body for supporting the housing from the inside is usually arranged, whereby deformation of the housing due to decompression, external force, for example, contact with other parts of the housing Prevents deformation.

For example, Patent Document 1 describes a vapor chamber having a wick structure 15 on the inner wall of a casing and a supporting plate 17 that contacts the wick structure 15 inside the casing. .

US Patent Application Publication No. 2011/0011565

However, in the vapor chamber of Patent Document 1, if the support plate is soft enough to protect the wick, the support plate does not have sufficient strength to support the housing, and the housing may be crushed. If the support plate is hardened so as to maintain the strength of the housing, the wick may be crushed between the inner wall of the housing and the support plate.

Therefore, an object of the present invention is to provide a vapor chamber in which deformation of the casing is suppressed and a wick provided inside the casing is difficult to be crushed.

In order to solve the above problems, a vapor chamber according to an aspect of the present invention includes a housing, a column disposed in an internal space of the housing so as to support the housing from the inside, A hydraulic fluid sealed in an internal space; at least one metal foil disposed in the internal space of the housing; and at least one wick disposed in the internal space of the housing; Has at least one of a hollow convex portion and a plurality of grooves on one main surface, and the metal foil and the wick are stacked on at least a part of the metal foil and the main surface of the housing. And the pillar.

Further, in the vapor chamber of one embodiment, when the metal foil has the convex portion, the metal foil has a concave portion having a shape corresponding to the convex portion on a main surface opposite to the main surface where the convex portion exists, In the case of having the groove, the main surface opposite to the main surface where the groove exists has a convex portion having a shape corresponding to the groove.

Further, in the vapor chamber of one embodiment, the casing is composed of two opposing sheets whose outer edge portions are sealed.

In one embodiment, the vapor chamber includes at least two wicks and the metal foil, and a part of the wick and the metal foil are sandwiched between one main inner surface of the housing and the pillar. The other wick and the metal foil are sandwiched between the main inner surface facing the one main inner surface and the column.

Moreover, in the vapor chamber of one embodiment, the convex portion has a substantially cylindrical shape.

Further, in the vapor chamber of one embodiment, the convex portion has a substantially quadrangular prism shape.

Moreover, in the vapor chamber of one embodiment, the circle equivalent diameter of the upper surface of the convex portion is 1 μm or more and 500 μm or less.

Moreover, in the vapor chamber of one embodiment, a part of the groove is formed along the first direction, and the other groove is formed along the second direction.

Further, in the vapor chamber of one embodiment, the first direction and the second direction are orthogonal.

Moreover, in the vapor chamber of one embodiment, the width of the groove is 1 μm or more and 500 μm or less.

Moreover, in the vapor chamber of one embodiment, the depth of the groove and the height of the convex portion are 1 μm or more and 100 μm or less.

Moreover, in the vapor chamber of one embodiment, the distance between adjacent ones of the convex portion and the groove is 1 μm or more and 500 μm or less.

Furthermore, according to the present invention, a heat dissipation device comprising the vapor chamber of the present invention is provided.

Furthermore, according to the present invention, an electronic apparatus comprising the vapor chamber of the present invention or the heat dissipation device of the present invention is provided.

According to the present invention, there are provided a vapor chamber in which deformation of the casing is suppressed and a wick provided inside the casing is not easily crushed, and a heat dissipation device and an electronic apparatus including the vapor chamber.

It is a schematic cross section of the vapor chamber of one embodiment of the present invention. It is a schematic cross section of the vapor chamber of one embodiment of the present invention. It is a perspective view of metal foil of one embodiment of the present invention. It is a perspective view of metal foil of one embodiment of the present invention. It is a perspective view of metal foil of one embodiment of the present invention. It is a perspective view of metal foil of one embodiment of the present invention. It is a perspective view of metal foil of one embodiment of the present invention. It is a perspective view of metal foil of one embodiment of the present invention. It is a schematic cross section of the vapor chamber of one embodiment of the present invention. It is a schematic cross section of the vapor chamber of one embodiment of the present invention.

Hereinafter, the vapor chamber of the present invention will be described in detail with reference to the drawings.

FIG. 1, FIG. 2, FIG. 9, and FIG. 10 are cross-sectional views of

vapor chambers

1a, 1b, 1c, and 1d, respectively, according to an embodiment of the present invention. As shown in these drawings, the vapor chamber of the present invention includes a housing 2, a column 3 disposed in the internal space of the housing 2 so as to support the housing 2 from the inside, and an interior of the housing 2. It has at least one metal foil 5 arranged in the space and at least one wick 4 arranged in the internal space of the housing 2. Moreover, although not shown in figure, a hydraulic fluid is further enclosed in the housing | casing 2 of the vapor chamber of this invention. The metal foil 5 has at least one of a hollow convex portion 8 and a plurality of grooves 10 on one main surface. At least a part of the metal foil 5 and the wick 4 are sandwiched between the main inner surface of the housing 2 and the column 3 in a stacked state. In the vapor chamber of the present invention, since the casing 2 is supported from the inside by the pillar 3, it is possible to suppress deformation due to decompression inside the casing and deformation due to a load from outside the casing. In the vapor chamber of the present invention, the pressure from the pillar 3 can be applied to the wick 4, but the metal foil 5 and the wick 4 are stacked between the main inner surface of the housing 2 and the pillar 3. Therefore, when the metal foil 5 having at least one of the hollow convex portion 8 and the plurality of grooves 10 functions as a cushioning material, the load applied to the wick can be reduced, and the deterioration of the wick function is suppressed. can do.

In the embodiment shown in FIG. 1, the metal foil 5 has a convex portion 8 as shown in FIG. In the embodiment shown in FIG. 2, the metal foil 5 has a plurality of grooves 10 as shown in FIG. In FIG. 1, the metal foil 5 has a concave portion having a shape corresponding to the convex portion on the main surface facing the main surface where the convex portion 8 exists. In FIG. 2, the metal foil 5 has a convex portion having a shape corresponding to the groove on the main surface facing the main surface where the groove 10 exists.

In the following, each configuration of the vapor chamber will be described in detail.

The housing 2 only needs to have two opposing main inner surfaces. The main inner surface of the housing may be polygonal or circular. In this specification, the main inner surface refers to the surface having the largest area among the surfaces defining the internal space of the housing and the surface facing the surface.

The height (that is, the thickness of the vapor chamber) A of the housing 2 may be, for example, 100 μm or more and 600 μm or less, and preferably in the range of 200 μm or more and 500 μm or less. The width B of the housing 2 (that is, the width of the vapor chamber) B may be, for example, 5 mm or more and 500 mm or less, preferably 20 mm or more and 300 mm or less, more preferably 50 mm or more and 200 mm or less. Although not shown, the depth D (that is, the depth of the vapor chamber) of the housing 2 that is perpendicular to the arrow indicating the width B of the housing 2 and extends from the front to the back of the page is, for example, not less than 5 mm and not more than 500 mm. Preferably, it exists in the range of 20 mm or more and 300 mm or less, More preferably, it exists in the range of 50 mm or more and 200 mm or less. The height A, the width B, and the depth D described above may be uniform or different at any location of the housing 2.

The housing 2 may be integrally formed from a single member. For example, as shown in FIGS. 1, 2, 9, and 10, the opposite housing 2 whose outer edge is sealed is opposed to the housing 2. It may consist of two sheets. Moreover, you may form from two or more plate-shaped members. 1, 2, 9, and 10, the upper housing sheet 6 forms an upper main inner surface of the housing 2, and the lower housing sheet 7 forms a lower main inner surface of the housing 2. ing. In the housing 2, the upper housing sheet 6 and the lower housing sheet 7 are sealed with each other at their outer edge portions. The outer edge portions of the upper housing sheet 6 and the lower housing sheet 7 refer to a region of a predetermined distance inward from the end portion of the sheet. In the vapor chambers of FIGS. 1, 2, 9 and 10, the outer edge of the upper casing sheet 6 and the outer edge of the lower casing sheet 7 are, for example, laser welded, resistance welded, TIG welded (tungsten / non-coated). Active gas welding), diffusion bonding, brazing, resin sealing, ultrasonic bonding, and the like, preferably laser welding or resistance welding.

The shape of the housing 2 is not particularly limited. For example, the planar shape of the housing 2 (the shape viewed from the upper side in FIG. 1) may be a polygon such as a triangle or a rectangle, a circle, an ellipse, or a combination of these.

The material forming the housing 2 is not particularly limited, and for example, a metal member such as Cu, Ni, Al, Mg, Ti, Fe, and an alloy metal member containing these as a main component can be used. Cu or Cu alloy is used.

The thickness C of the wall surface constituting the housing 2 (in the illustrated example, the thickness of the housing sheet) may be, for example, 10 μm or more and 200 μm or less, preferably 30 μm or more and 100 μm or less, and more preferably Is in the range of 40 μm to 60 μm. The thickness C described above may be uniform or different at any location of the housing 2. For example, the thickness C of the upper housing sheet 6 and the thickness of the lower housing sheet 7 may be different.

Surfaces on the inner space side and outer space side of the housing 2 may be flat as shown in FIGS. 1, 2, 9 and 10, and as formed in the metal foil 5 in the present invention. Concavities and convexities, grooves and the like may be formed.

The pillar 3 is disposed in the housing 2 so as to support the housing 2 from the inside. 1, 2, 9, and 10, the column 3 has a columnar shape, but the shape of the column 3 is not limited to this, and a columnar shape having two bottom surfaces is used. Can do. As the shape of the column 3, for example, an arbitrary shape such as a columnar shape, a prismatic shape, or a frustum shape can be used. When one of the bottom surfaces of the pillars 3 is in contact with the wick and the other is not in contact with the wick, one of the bottom surfaces in contact with the wick has a larger area than the other plane, thereby effectively reducing the pressure applied to the wick. be able to. The pillar 3 may be fixed to the housing 2. When the bottom surface of the pillar 3 is in contact with the wick 4 or the metal foil 5, the pillar 3 may be fixed to the wick 4 or the metal foil 5.

The thickness of the pillar 3 is not particularly limited as long as it gives strength capable of suppressing deformation of the vapor chamber casing. For example, the equivalent circle diameter of the cross section perpendicular to the height direction of the pillar is 100 μm or more and 2000 μm or less. Preferably, it exists in the range of 300 micrometers or more and 1000 micrometers or less, More preferably, it exists in the range of 500 micrometers or more and 800 micrometers or less. By increasing the equivalent circle diameter of the column, deformation of the casing of the vapor chamber can be further suppressed. Further, by reducing the equivalent circle diameter of the column, it is possible to secure a wider space for moving the working fluid vapor. The column 3 preferably has a height not less than 0.08 times and not more than 0.9 times the height A of the housing 2, for example, in the range of 50 μm to 500 μm, preferably in the range of 100 μm to 400 μm, more preferably Can have a height in the range of 100 μm to 200 μm.

The material for forming the pillar 3 is not particularly limited, and for example, a metal member such as Cu, Ni, Al, Mg, Ti, and Fe, and an alloy metal member based on them can be used, preferably Cu. Cu alloy is used. In a preferred embodiment, the material forming the pillar is the same material as either or both of the first sheet and the second sheet.

The number of columns 3 disposed in the internal space of the housing 2, for example, 1mm may be 0.5 present less than 0.125 present per ^2, preferably at least 0.15 present per 1mm ² 0.35 It is in the following range. When the number of the pillars 3 is in such a range, the housing can be supported more effectively, and the difficulty of crushing the housing can be improved. The pillars 3 may be arranged at regular intervals as shown in FIGS. 1, 2, 9 and 10, for example, in lattice points so that the distance between the pillars is constant, and at irregular intervals. It may be arranged. By arranging the columns 3 evenly, a uniform strength can be ensured throughout the vapor chamber.

The ratio of the total area of the bottom surfaces of the pillars 3 arranged in the internal space of the housing 2 and in contact with the main inner surface of the housing 2 to the area of the main inner surface of the housing 2 may be, for example, 1% or more and 70% or less. Preferably, it is in the range of 5% to 50%.

The pillar 3 may be formed integrally with the housing 2, or may be manufactured separately from the housing 2 and then fixed to a predetermined portion of the housing 2.

The wick 4 is not particularly limited as long as it has a structure capable of moving the hydraulic fluid by capillary force. The capillary structure that exhibits the capillary force for moving the working fluid is not particularly limited, and may be a known structure used in a conventional vapor chamber. For example, examples of the capillary structure include fine structures having irregularities such as pores, grooves, and protrusions, such as a fiber structure, a groove structure, and a network structure.

The size and shape of the wick 4 are not particularly limited. For example, it is preferable that the wick 4 has a size and shape that can be continuously installed from the evaporation section to the condensation section inside the housing.

In the vapor chamber of the present invention shown in FIG. 1, FIG. 2, FIG. 9, and FIG. 10, the wick 4 has two main surfaces facing each other. At least one is arranged in the space. At least a part of the wick 4 is sandwiched between the main inner surface of the casing and the pillar in a state of being laminated with the metal foil 5.

The thickness of the wick 4 may be, for example, in the range of 5 μm to 200 μm, preferably in the range of 10 μm to 80 μm, and more preferably in the range of 30 μm to 50 μm. The thickness of the wick 4 may be uniform everywhere in the wick 4 and may be different as shown in FIG. Further, the wick 4 does not necessarily have to be formed over the entire main surface of the casing 2 of the vapor chamber, as shown in FIGS. 1, 2, 9 and 10, and is formed partially. May be.

The material of the wick 4 is not particularly limited, and for example, a porous body, a mesh, a sintered body, a nonwoven fabric and the like can be used, and a mesh and a nonwoven fabric are preferably used. The porous body used as the material of the wick 4 may be, for example, a metal porous body, a ceramic porous body, or a resin porous body. The mesh used as the material of the wick 4 may be, for example, a metal mesh, a resin mesh, or a surface-coated mesh, and is preferably a copper mesh, a SUS mesh, or a polyester. The sintered body used as the material of the wick 4 may be, for example, a metal porous sintered body or a ceramic porous sintered body, and preferably a copper or nickel porous sintered body. Since the pressure applied to the wick is reduced by the above-described structure in the present invention, a wick having insufficient strength for use in a normal vapor chamber can be used for the wick.

The metal foil 5 is disposed in the internal space of the housing 2. Two or more metal foils 5 and wicks 4 may be arranged inside the housing 2. When at least two wicks 4 and metal foils 5 are present, as shown in FIG. 9, some wicks and metal foils are sandwiched between one main inner surface of the housing and the pillar, and the other The wick and the metal foil may be sandwiched between the main inner surface facing the one main inner surface and the column. Here, the pillar 3 for sandwiching some wicks and metal foil with the main inner surface of the housing and the pillar 3 for sandwiching other wicks and metal foil with the main inner surface facing the main inner surface are different columns. May be.

The metal foil 5 has at least one of a hollow convex portion 8 and a plurality of grooves 10 on one main surface thereof. When the metal foil 5 has at least one of the hollow convex portion 8 and the groove 10, pressure is applied to the main surface of the vapor chamber and pressure is applied to the wick 4 from the pillar 3. Since the hollow portion exists under the portion of the metal foil 5 that is in contact with the metal foil 5, the metal foil 5 is deformed, and the pressure applied to the wick 4 can be reduced. Thereby, it is possible to prevent the wick 4 from being crushed by the pillar 3. The convex part of the metal foil 5 is hollow. For example, as shown in FIG. 1, by providing a concave portion having a shape corresponding to the convex portion on the main surface opposite to the main surface where the convex portion exists, the convex portion can be formed into a hollow shape. The ratio of the volume of the hollow part inside the convex portion to the volume of the convex portion may be, for example, 1% or more and 99% or less, and preferably in the range of 10% or more and 70% or less. The volume of the convex part is the volume of the part protruding from the main surface of the metal foil on which the convex part is formed and the region surrounded by the boundary between the main surface and the convex part of the metal foil on which the convex part is formed. The sum of the volume of the pillars with the thickness of the metal foil as the height. When a hollow exists inside the portion protruding from the main surface of the metal foil on which the convex portion is formed, the volume means the volume including the hollow portion.

The convex portion 8 on the upper surface of the metal foil 5 may be formed over the entire upper surface of the metal foil as shown in FIGS. 3 and 1, and as shown in FIGS. 4 and 10, It may be partially formed on the upper surface. In the vapor chamber of FIG. 10, the convex portion 8 is partially formed on the upper surface of the metal foil 5, and the thickness of the wick where the convex portion 8 is not formed is set to the thickness of the wick where the convex portion 8 is formed. The thickness is increased as compared with the thickness. When the vapor chamber has such a configuration, the stress applied to the wick can be reduced in a region where a load is concentrated, and the transmittance of the wick can be increased in a thick region.

3 and 4 show the substantially quadrangular prism-shaped convex portion 8, but the present invention is not limited to this, and a convex portion having an arbitrary shape can be partially formed on the metal foil 5. For example, the convex portion on the upper surface of the metal foil 5 may have a substantially cylindrical shape as shown in FIG. Moreover, although not shown in figure, the convex part of the upper surface of the metal foil 5 may be frustum shape.

The equivalent circle diameter of the upper surface 12 of the convex portion of the metal foil 5 shown in FIG. 3 may be 1 μm or more and 500 μm or less, preferably 5 μm or more and 300 μm or less, more preferably 15 μm or more and 150 μm or less. is there. Since the upper surface 12 of the convex portion of the metal foil 5 has such a circle-equivalent diameter, the wick is reliably supported by the convex portion and the upper surface 12 of the convex portion is easily deformed. It can be effectively reduced.

The height E of the convex portion 8 on the upper surface of the metal foil 5 shown in FIG. 1 may be 1 μm or more and 100 μm or less, preferably 5 μm or more and 50 μm or less, and preferably 15 μm or more and 30 μm or less. . Since the convex portion 8 of the metal foil 5 has such a height E, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid can be enhanced.

3, the distance F between adjacent convex portions on the upper surface of the metal foil 5 may be 1 μm or more and 500 μm or less, preferably 5 μm or more and 300 μm or less, preferably 15 μm. It is in the range of 150 μm or less. Since the distance between adjacent ones of the convex portions on the upper surface of the metal foil 5 is in the above range, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid is enhanced. I can do it. In the present invention, that the convex portions 8 or the grooves 10 are adjacent to each other means that the convex portions 8 or the grooves 10 are adjacent to each other without any other convex portions 8 or the grooves 10 interposed therebetween.

As shown in FIG. 6, the groove on the upper surface of the metal foil 5 may be formed over the entire upper surface of the metal foil or may be partially formed on the upper surface of the metal foil 5. The width G of the groove on the upper surface of the metal foil 5 shown in FIG. 6 may be 1 μm or more and 500 μm or less, preferably 5 μm or more and 300 μm or less, and preferably 15 μm or more and 150 μm or less. Since the groove of the metal foil 5 has such a width G, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid can be enhanced.

The depth H of the groove on the upper surface of the metal foil 5 shown in FIG. 2 may be 1 μm or more and 100 μm or less, preferably 5 μm or more and 50 μm or less, and preferably 15 μm or more and 30 μm or less. Since the groove of the metal foil 5 has such a depth H, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid can be enhanced.

Further, the distance I between adjacent grooves on the upper surface of the metal foil 5 shown in FIG. 6 may be 1 μm to 500 μm, preferably 5 μm to 300 μm, preferably 15 μm to 150 μm. It is in the following range. When the distance between adjacent ones of the grooves on the upper surface of the metal foil 5 is in the above range, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid can be enhanced. I can do it.

The grooves on the upper surface of the metal foil 5 may all be formed along one direction as shown in FIG. 6, and a part of the groove is formed along the first direction as shown in FIG. Others may be formed along the second direction. Since the groove is formed along two directions, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid in the surface direction can be enhanced.

Further, as shown in FIG. 7, the first direction and the second direction may be orthogonal to each other. By forming the groove on the upper surface of the metal foil 5 along two directions intersecting at 90 degrees, the capillary force is high and the transmittance is low, so that the auxiliary effect of the function of the wick for returning the working fluid in the surface direction Can be increased.

In the vapor chamber of the present invention, the metal foil 5 may have both the convex portion 8 and the groove 10 on the upper surface. For example, as shown in FIG. 8, a metal foil 5 having quadrangular columnar and cylindrical convex portions 8 and grooves 10 may be used. Since the metal foil of the present invention has at least one of a hollow convex part and a plurality of grooves on one main surface, it plays a role of refluxing the working fluid. For this reason, in the vapor chamber of the present invention, since the reflux of the working fluid is promoted by both the wick 4 and the metal foil 5, it has excellent thermal diffusibility as compared with the vapor chamber not having the metal foil 5. .

In each of the vapor chambers shown in FIGS. 1, 2, 9 and 10, the metal foil 5 is provided in contact with the casing 2, and the wick 4 is in contact with the metal foil 5 and not in contact with the casing 2. However, the present invention is not limited to the illustrated example, and the wick and the metal foil may overlap each other and be sandwiched between the inner surface of the housing and the top of the column. For example, the metal foil 5 may be provided so that the wick 4 may be in contact with the housing 2 and may be in contact with the wick 4 but not in contact with the housing 2. Further, the metal foil 5 is provided so as to be in contact with the housing 2, the wick 4 is provided so as to be in contact with the metal foil 5 and not in contact with the housing 2, and another metal foil 5 is provided so as to be in contact with the wick. May be further provided.

Although not shown in FIG. 1, FIG. 2, FIG. 9, and FIG. 10, the working fluid is further sealed in the casing of the vapor chamber of the present invention. The hydraulic fluid is vaporized by the heat from the heat source and becomes vapor. Thereafter, the working fluid that has become vapor moves in the housing, releases heat, and returns to the liquid. The working fluid that has returned to the liquid is conveyed again to the heat source by capillary action due to the wick. And it is vaporized by the heat from the heat source again to become steam. By repeating this, the vapor chamber of the present invention operates independently without the need for external power, and can rapidly diffuse heat in two dimensions using the latent heat of evaporation / condensation of the working fluid. .

The type of hydraulic fluid is not particularly limited, and for example, water, alcohols, alternative chlorofluorocarbons, etc. can be used, and water is preferably used.
In the vapor chamber of the present invention, since the return of the working fluid is promoted by both the wick 4 and the metal foil 5, a working fluid having a high viscosity that is not suitable for the working fluid can be used because it is usually difficult to reflux.

The vapor chamber of the present invention can be mounted on a heat dissipation device so as to be close to a heat source. Accordingly, the present invention also provides a heat dissipation device comprising the vapor chamber of the present invention. By providing the heat dissipation device of the present invention with the vapor chamber of the present invention, it is possible to effectively suppress an increase in temperature around the electronic component that generates heat and the component.

The vapor chamber or the heat dissipation device of the present invention can be mounted on an electronic device for the purpose of heat dissipation. Accordingly, the present invention provides an electronic apparatus comprising the vapor chamber or heat dissipation device of the present invention. Examples of the electronic device of the present invention include a smartphone, a tablet terminal, a notebook computer, a game device, and a wearable device. As described above, the vapor chamber of the present invention operates autonomously without requiring external power, and can diffuse heat at a high speed two-dimensionally using the latent heat of evaporation / condensation of the working fluid. Therefore, by providing the electronic apparatus with the vapor chamber or the heat dissipation device of the present invention, it is possible to effectively realize heat dissipation in a limited space inside the electronic apparatus.

The vapor chamber of the present invention can be used by being mounted on, for example, a smartphone, a tablet terminal, a notebook computer, a game device, a wearable device, or the like.

DESCRIPTION OF SYMBOLS

1a Vapor chamber

1b Vapor chamber 1c Vapor chamber 1d Vapor chamber 2 Case 3 Pillar 4 Wick 5 Metal foil 6 Upper case sheet 7 Lower case sheet 8 Convex part 9 Concave part 10 Groove 11 Convex part 12 Convex part top surface

Claims

A housing,
Pillars arranged in the internal space of the housing to support the housing from the inside;
Hydraulic fluid sealed in the internal space of the housing;
At least one metal foil disposed in the internal space of the housing;
And at least one wick disposed in the internal space of the housing,
The metal foil has at least one of a hollow convex portion and a plurality of grooves on one main surface,
The metal foil and the wick are sandwiched between the main inner surface of the housing and the pillar in a stacked state in at least a part of them.
Vapor chamber.
When the metal foil has the convex portion, the metal foil has a concave portion having a shape corresponding to the convex portion on the main surface opposite to the main surface on which the convex portion exists, and when the metal foil has the groove, the groove exists. The vapor chamber of Claim 1 which has a convex part of the shape corresponding to this groove | channel on the main surface facing the main surface to do.
The vapor chamber according to claim 1, wherein the casing is composed of two opposing sheets whose outer edge portions are sealed.
There are at least two of the wick and the metal foil, respectively, a part of the wick and the metal foil are sandwiched between one main inner surface of the housing and the pillar, and the other wick and the metal foil are the 1 The vapor chamber according to claim 1, wherein the vapor chamber is sandwiched between a main inner surface facing the main inner surface and the column.
The vapor chamber according to any one of claims 1 to 4, wherein the convex portion has a substantially cylindrical shape.
The vapor chamber according to any one of claims 1 to 4, wherein the convex portion has a substantially quadrangular prism shape.
The vapor chamber according to any one of claims 1 to 6, wherein an equivalent circle diameter on an upper surface of the convex portion is not less than 1 µm and not more than 500 µm.
The vapor chamber according to any one of claims 1 to 7, wherein a part of the groove is formed along the first direction, and the other groove is formed along the second direction.
The vapor chamber according to claim 8, wherein the first direction and the second direction are orthogonal.
10. The vapor chamber according to claim 1, wherein a width of the groove is 1 μm or more and 500 μm or less.
The vapor chamber according to any one of claims 1 to 10, wherein a depth of the groove and a height of the convex portion are 1 μm or more and 100 μm or less.
The vapor chamber according to any one of claims 1 to 11, wherein a distance between adjacent ones of the convex portion and the groove is 1 μm or more and 500 μm or less.
A heat dissipating device comprising the vapor chamber according to any one of claims 1 to 12.
An electronic apparatus comprising the vapor chamber according to any one of claims 1 to 12 or the heat dissipation device according to claim 13.