WO2024018846A1 - Heat diffusing device, and electronic apparatus - Google Patents

Heat diffusing device, and electronic apparatus Download PDF

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Publication number
WO2024018846A1
WO2024018846A1 PCT/JP2023/023601 JP2023023601W WO2024018846A1 WO 2024018846 A1 WO2024018846 A1 WO 2024018846A1 JP 2023023601 W JP2023023601 W JP 2023023601W WO 2024018846 A1 WO2024018846 A1 WO 2024018846A1
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WO
WIPO (PCT)
Prior art keywords
wick
support
diffusion device
heat diffusion
thickness
Prior art date
Application number
PCT/JP2023/023601
Other languages
French (fr)
Japanese (ja)
Inventor
誠士 森上
竜宏 沼本
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株式会社村田製作所
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Publication of WO2024018846A1 publication Critical patent/WO2024018846A1/en

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating

Definitions

  • the present invention relates to heat diffusion devices and electronic equipment.
  • the vapor chamber has a structure in which a working medium (also referred to as working fluid) and a wick that transports the working medium by capillary force are enclosed inside a housing.
  • the working medium absorbs heat from the heat generating elements of electronic components in the evaporator, evaporates in the vapor chamber, moves within the vapor chamber, is cooled, and returns to the liquid phase. .
  • the working medium that has returned to the liquid phase moves again to the evaporation section on the heating element side by the capillary force of the wick, and cools the heating element.
  • the vapor chamber can operate independently without external power, and can diffuse heat two-dimensionally at high speed using the latent heat of vaporization and latent heat of condensation of the working medium.
  • Patent Document 1 discloses a casing including an upper casing sheet and a lower casing sheet facing each other joined at outer edges and having an internal space, a hydraulic fluid sealed in the internal space, and the lower casing.
  • a microchannel arranged in the inner space of the sheet and forming a flow path for the working fluid;
  • a sheet-shaped wick arranged in the inner space of the casing and in contact with the microchannel;
  • a vapor chamber is disclosed in which a contact area between the wick and the microchannel is 5% to 40% of the area of the internal space when viewed in plan.
  • FIG. 1 of Patent Document 1 shows, as an embodiment of the vapor chamber, a structure in which a wick is sandwiched between a convex part of a microchannel formed on a lower housing sheet and a column formed on an upper housing sheet. It is shown. Further, Patent Document 1 describes that the unevenness of the microchannels is formed by etching the lower casing sheet, and that the pillars are formed by etching the upper casing sheet.
  • the present invention was made in order to solve the above problems, and an object of the present invention is to provide a heat diffusion device that can simplify the design of the casing. Furthermore, an object of the present invention is to provide an electronic device including the above heat diffusion device.
  • the heat diffusion device of the present invention includes a casing having a first inner surface and a second inner surface facing each other in the thickness direction and provided with an internal space, and a working medium sealed in the internal space of the casing.
  • a sheet-like wick disposed in the internal space of the casing; a sheet member disposed in the internal space of the casing that is the same as or different from the wick; and a sheet member integrated with the wick.
  • the electronic device of the present invention includes the heat diffusion device of the present invention.
  • thermoelectric device that can simplify the design of the casing. Furthermore, according to the present invention, it is possible to provide an electronic device including the above heat diffusion device.
  • FIG. 1 is a perspective view schematically showing an example of a heat diffusion device according to a first embodiment of the present invention.
  • FIG. 2 is a cross-sectional view schematically showing an example of the heat diffusion device according to the first embodiment of the present invention.
  • FIG. 3 is a plan view schematically showing an example of a wick, a first support, and a second support that constitute the heat diffusion device according to the first embodiment of the present invention.
  • FIG. 4 is an example of a cross-sectional view of the wick shown in FIG. 3 taken along line AA.
  • FIG. 5 is an example of a cross-sectional view of the wick and the first support shown in FIG. 3 taken along line BB.
  • FIG. 6 is an example of a cross-sectional view of the wick and the second support shown in FIG. 3 taken along line CC.
  • FIG. 7 is another example of a cross-sectional view of the wick shown in FIG. 3 taken along line AA.
  • FIG. 8 is a cross-sectional view schematically showing an example of a heat diffusion device according to a second embodiment of the present invention.
  • FIG. 9 is a sectional view showing a first modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.
  • FIG. 10 is a sectional view showing a second modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.
  • FIG. 11 is a sectional view showing a third modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.
  • the heat diffusion device of the present invention will be explained below.
  • the present invention is not limited to the following embodiments, and can be modified and applied as appropriate without changing the gist of the present invention.
  • the present invention also includes a combination of two or more of the individual preferred configurations of the present invention described below.
  • the heat diffusion device of the present invention is characterized in that the first support is integrated with the wick, and the second support is integrated with the sheet member.
  • the first support is integrated with the wick
  • the second support is integrated with the sheet member.
  • a housing is constructed from an upper housing sheet and a lower housing sheet that face each other and whose outer edges are joined, the inner surfaces of the upper and lower housing sheets have a fine and complicated structure.
  • the upper and lower housing sheets can have a simple bathtub shape. Therefore, the manufacturing cost of the housing can be reduced.
  • the method of forming the first support or the second support is not particularly limited, but for example, by bending and recessing a part of the metal foil constituting the wick or sheet member by processing such as press processing, the recessed portion may be formed.
  • the first support or the second support can be formed on the substrate. In this case, compared to the case where the first support body and the second support body are formed on the inner surface of the casing by processing such as etching, the metal volume of the support body part can be reduced, so the weight of the heat diffusion device can be reduced. becomes possible.
  • the first support is integrated with the wick
  • the wick means that there is no interface between the first support and the wick. 1 This means that the boundary between the support and the wick cannot be determined.
  • a copper pillar as a first support and a copper mesh as a wick are fixed by diffusion bonding or spot welding, it is not possible to bond the entire surface between the first support and the wick. Due to this difficulty, a gap is created between the first support and the wick. In such a structure, since a boundary can be discerned between the first support and the wick, it can be said that the first support and the wick are not integrally constituted.
  • the second support is integrated with the sheet member
  • the second support means that there is no interface between the second support and the sheet member; Specifically, this means that the boundary between the second support and the sheet member cannot be determined.
  • the sheet member may be the same member as the wick, or may be a different member from the wick.
  • the first support body is integrated with the wick
  • the second support body is also integrated with the wick.
  • heat diffusion device of the present invention An embodiment of the heat diffusion device of the present invention will be described below using a vapor chamber as an example.
  • the heat diffusion device of the present invention is also applicable to heat diffusion devices such as heat pipes.
  • the sheet member is the same member as the wick. That is, the wick also serves as a sheet member. Therefore, there is no sheet member separate from the wick.
  • FIG. 1 is a perspective view schematically showing an example of a heat diffusion device according to a first embodiment of the present invention.
  • FIG. 2 is a cross-sectional view schematically showing an example of the heat diffusion device according to the first embodiment of the present invention.
  • FIG. 2 is an example of a cross-sectional view of the heat diffusion device shown in FIG. 1 taken along line II-II.
  • the vapor chamber (thermal diffusion device) 1 shown in FIGS. 1 and 2 includes a hollow casing 10 that is hermetically sealed.
  • the housing 10 has a first inner surface 11a and a second inner surface 12a facing each other in the thickness direction Z.
  • the housing 10 is provided with an internal space.
  • the vapor chamber 1 further includes a working medium 20 sealed in the internal space of the housing 10 , a sheet-like wick 30 disposed in the internal space of the housing 10 , and a plurality of vapor chambers integrated with the wick 30 .
  • the housing 10 is provided with an evaporation section that evaporates the enclosed working medium 20.
  • a heat source HS which is a heat generating element, is arranged on the outer surface of the housing 10.
  • the heat source HS include electronic components of electronic equipment, such as a central processing unit (CPU).
  • CPU central processing unit
  • a portion of the internal space of the housing 10 that is near the heat source HS and is heated by the heat source HS corresponds to the evaporation section.
  • the vapor chamber 1 has a planar shape as a whole. That is, it is preferable that the housing 10 has a planar shape as a whole.
  • plan shape includes plate shape and sheet shape, and the dimension in the width direction X (hereinafter referred to as width) and the dimension in the length direction Y (hereinafter referred to as length) is It means a shape that is considerably large relative to its dimensions (hereinafter referred to as thickness or height), for example, a shape whose width and length are 10 times or more, preferably 100 times or more, the thickness.
  • the size of the vapor chamber 1, that is, the size of the housing 10, is not particularly limited.
  • the width and length of the vapor chamber 1 can be set as appropriate depending on the application.
  • the width and length of the vapor chamber 1 are, for example, 5 mm or more and 500 mm or less, 20 mm or more and 300 mm or less, or 50 mm or more and 200 mm or less.
  • the width and length of the vapor chamber 1 may be the same or different.
  • the casing 10 is composed of a first sheet 11 and a second sheet 12 that face each other and whose outer edges are joined.
  • the materials constituting the first sheet 11 and the second sheet 12 have characteristics suitable for use as a heat diffusion device such as a vapor chamber, e.g. It is not particularly limited as long as it has thermal conductivity, strength, flexibility, flexibility, etc.
  • the material constituting the first sheet 11 and the second sheet 12 is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing these as main components, and particularly preferably copper. It is.
  • the materials constituting the first sheet 11 and the second sheet 12 may be the same or different, but are preferably the same.
  • the first sheet 11 and the second sheet 12 are joined to each other at their outer edges.
  • the method of such joining is not particularly limited, but for example, laser welding, resistance welding, diffusion bonding, brazing welding, TIG welding (tungsten-inert gas welding), ultrasonic bonding, or resin sealing can be used, and preferably Laser welding, resistance welding or brazing can be used.
  • the thickness of the first sheet 11 and the second sheet 12 is not particularly limited, but each is preferably 10 ⁇ m or more and 200 ⁇ m or less, more preferably 30 ⁇ m or more and 100 ⁇ m or less, and even more preferably 40 ⁇ m or more and 60 ⁇ m or less.
  • the thickness of the first sheet 11 and the second sheet 12 may be the same or different. Further, the thickness of each of the first sheet 11 and the second sheet 12 may be the same over the entirety, or may be partially thin.
  • each of the first sheet 11 and the second sheet 12 may have an outer edge portion thicker than a portion other than the outer edge portion.
  • the overall thickness of the vapor chamber 1 is not particularly limited, but is preferably 50 ⁇ m or more and 500 ⁇ m or less.
  • the planar shape of the casing 10 viewed from the thickness direction Z is not particularly limited, and examples thereof include polygons such as triangles and rectangles, circles, ellipses, and combinations thereof. Further, the planar shape of the casing 10 may be an L-shape, a C-shape (U-shape), a staircase shape, or the like. Furthermore, the housing 10 may have a through hole. The planar shape of the casing 10 may be a shape depending on the use of the heat diffusion device such as the vapor chamber, the shape of the part where the heat diffusion device such as the vapor chamber is installed, and other components existing nearby.
  • the working medium 20 is not particularly limited as long as it can cause a gas-liquid phase change in the environment inside the casing 10, and for example, water, alcohol, CFC substitutes, etc. can be used.
  • working medium 20 is an aqueous compound, preferably water.
  • the wick 30 has a capillary structure that can move the working medium 20 by capillary force.
  • the material constituting the wick 30 is not particularly limited, but is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing these as main components, and copper is particularly preferred. .
  • the material forming the wick 30 may be the same as or different from the material forming the housing 10.
  • the size and shape of the wick 30 are not particularly limited, it is preferable, for example, that the wick 30 be arranged continuously in the internal space of the housing 10.
  • the wick 30 may be disposed in the entire internal space of the casing 10 when viewed from the thickness direction Z, or the wick 30 may be disposed in a part of the internal space of the casing 10 when viewed from the thickness direction Z. You can leave it there.
  • the thickness of the wick 30 is not particularly limited, but is, for example, 5 ⁇ m or more and 50 ⁇ m or less.
  • the wick 30 may have a plurality of through holes 31 penetrating in the thickness direction Z.
  • the wick 30 is separated from the first inner surface 11a via the first support 40 and is separated from the second inner surface 12a via the second support 50.
  • the first support body 40 may or may not be in contact with the first inner surface 11a. When the first support body 40 is in contact with the first inner surface 11a, the first support body 40 may or may not be joined to the first inner surface 11a.
  • the second support body 50 may or may not be in contact with the second inner surface 12a. When the second support body 50 is in contact with the second inner surface 12a, the second support body 50 may or may not be joined to the second inner surface 12a.
  • the first support body 40 includes, for example, a plurality of columnar members.
  • columnar means a shape in which the ratio of the length of the long side of the bottom surface is less than 5 times the length of the short side of the bottom surface.
  • the first support body 40 may include a plurality of rail-shaped members.
  • “rail shape” means a shape in which the ratio of the length of the long side of the bottom surface is 5 times or more to the length of the short side of the bottom surface.
  • a liquid phase working medium 20 is held between the first supports 40 . Thereby, the heat transport performance of the vapor chamber 1 can be improved.
  • the shape of the first support body 40 is not particularly limited, but may have a shape such as a columnar shape, an elliptical columnar shape, a prismatic shape, a truncated cone shape, or a truncated pyramid shape. Can be mentioned.
  • the cross-sectional shape perpendicular to the extending direction of the first support body 40 is not particularly limited; , a shape that is a combination of these, etc.
  • the first support body 40 may have a tapered shape whose width becomes narrower from the wick 30 toward the first inner surface 11a. Thereby, the flow path between the first supports 40 can be widened on the housing 10 side.
  • the height of the first support body 40 may be the same or different in one vapor chamber.
  • the second support body 50 includes, for example, a plurality of columnar members. Alternatively, the second support body 50 may include a plurality of rail-like members.
  • the housing 10 and the wick 30 are supported by the second support body 50.
  • the shape of the second support body 50 is not particularly limited; Can be mentioned.
  • the cross-sectional shape perpendicular to the extending direction of the second support body 50 is not particularly limited; , a shape that is a combination of these, etc.
  • the second support body 50 may have a tapered shape whose width becomes narrower from the wick 30 toward the second inner surface 12a. Thereby, the flow path between the second supports 50 can be widened on the housing 10 side.
  • the height of the second support body 50 may be the same or different in one vapor chamber.
  • the method for forming the first support 40 and the second support 50 is not particularly limited, but for example, by bending and recessing a part of the metal foil constituting the wick 30 by processing such as press working, a recessed portion may be formed.
  • the first support 40 and the second support 50 can be formed.
  • the process of forming the first support body 40 and the process of forming the second support body 50 may be performed at once. Since a vapor space is formed in the recessed portion of the first support 40, thermal conductivity is improved. Note that when press working is performed on the metal foil, depending on the condition of the press working, a through hole may be formed in a recessed portion when a part of the metal foil is bent.
  • the thickness of the metal foil before being processed such as press working is constant. However, the metal foil may become thinner in bent areas. Therefore, as in the example shown in FIG. 2, it is preferable that the thickness of the first support body 40 is the same as the thickness of the wick 30 or smaller than the thickness of the wick 30. Further, it is preferable that the thickness of the second support body 50 is the same as the thickness of the wick 30 or smaller than the thickness of the wick 30. The thickness of the first support body 40 is the same as the thickness of the wick 30, or is smaller than the thickness of the wick 30, and the thickness of the second support body 50 is the same as the thickness of the wick 30, or , is more preferably smaller than the thickness of the wick 30.
  • FIG. 3 is a plan view schematically showing an example of a wick, a first support, and a second support that constitute the heat diffusion device according to the first embodiment of the present invention.
  • FIG. 4 is an example of a cross-sectional view of the wick shown in FIG. 3 taken along line AA.
  • FIG. 5 is an example of a cross-sectional view of the wick and the first support shown in FIG. 3 taken along line BB.
  • FIG. 6 is an example of a cross-sectional view of the wick and the second support shown in FIG. 3 taken along line CC.
  • the wick 30 has a plurality of through holes 31 that penetrate in the thickness direction Z.
  • the working medium 20 can move within the through hole 31 due to capillary action. It is preferable that the through hole 31 be provided in a portion where the first support body 40 is not present when viewed from the thickness direction Z. Although the shape of the through hole 31 is not particularly limited, it is preferable that the cross section in a plane perpendicular to the thickness direction Z is circular or elliptical.
  • the arrangement of the through holes 31 is not particularly limited, but it is preferable that the through holes 31 are arranged uniformly in a predetermined area, more preferably evenly throughout, for example. 31 are arranged so that the center-to-center distance (pitch) is constant.
  • the distance between the centers of the through holes 31 is, for example, 3 ⁇ m or more and 150 ⁇ m or less.
  • the diameter of the through hole 31 is, for example, 100 ⁇ m or less.
  • the diameter of the smallest part is defined as the diameter of the through-hole 31.
  • the through-hole 31 can be formed, for example, by punching the metal foil that constitutes the wick 30 by press working.
  • the press work to form the first support body 40 and the press work to form the through hole 31 may be performed at once, and the press work to form the second support body 50 and the press work to form the through hole 31 may be performed all at once.
  • the first support body 40 includes a plurality of columnar members. Although the first support body 40 is not provided with the through hole 31 in FIGS. 3 and 5, the through hole 31 may be provided, for example, at the bottom (concave portion) of the first support body 40.
  • the arrangement of the first supports 40 is not particularly limited, but is preferably arranged evenly in a predetermined area, more preferably evenly over the entire area, for example, so that the center-to-center distance (pitch) of the first supports 40 is constant. be done.
  • the distance between the centers of adjacent first supports 40 is, for example, 60 ⁇ m or more and 800 ⁇ m or less.
  • the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the first support 40 on the wick 30 side is, for example, 20 ⁇ m or more and 500 ⁇ m or less.
  • the height of the first support body 40 is, for example, 10 ⁇ m or more and 100 ⁇ m or less.
  • the second support body 50 includes a plurality of columnar members. Although the second support body 50 is not provided with the through hole 31 in FIGS. 3 and 6, the through hole 31 may be provided, for example, at the bottom (concave portion) of the second support body 50.
  • the arrangement of the second supports 50 is not particularly limited, but is preferably arranged evenly in a predetermined area, more preferably evenly over the entire area, for example, so that the center-to-center distance (pitch) of the second supports 50 is constant. be done. By arranging the second supports 50 evenly, uniform strength can be ensured over the entire heat diffusion device such as a vapor chamber.
  • the distance between the centers of adjacent second supports 50 is, for example, 100 ⁇ m or more and 5000 ⁇ m or less.
  • the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the second support 50 on the wick 30 side is, for example, 100 ⁇ m or more and 2000 ⁇ m or less, preferably 300 ⁇ m or more and 1000 ⁇ m or less.
  • the height of the first support 40 is preferably smaller than the height of the second support 50.
  • the distance between the centers of adjacent first supports 40 is preferably smaller than the distance between the centers of adjacent second supports 50.
  • the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the first support 40 on the wick 30 side is the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the second support 50 on the wick 30 side. Preferably smaller.
  • a convex portion 32 may be provided on the upper side).
  • a convex portion 32 is provided at the periphery of the through hole 31 in a direction approaching the second inner surface 12a, the vapor of the working medium 20 flowing in the space between the wick 30 and the second inner surface 12a will be absorbed by the convex portion 32. It flows around the outer periphery. Therefore, the flow of the vapor of the working medium 20 can be prevented from coming into direct contact with the liquid level of the working medium 20 in the through hole 31 . Therefore, the influence of the flow of steam in the direction opposite to the capillary force of the wick 30, so-called counterflow, can be reduced. As a result, the maximum heat transport amount is improved.
  • FIG. 7 is another example of a cross-sectional view of the wick shown in FIG. 3 taken along line AA.
  • a convex portion 33 may be provided on the lower side).
  • a convex portion 33 is provided at the periphery of the through hole 31 in a direction approaching the first inner surface 11a, the working medium 20 in contact with the surface surrounded by the inner wall of the convex portion 33 is sucked up into the through hole 31 by capillary force. It will be done. Therefore, when the liquid amount of the working medium 20 is small, specifically, even when the liquid level of the working medium 20 is located closer to the first inner surface 11a than the wick 30, the amount of liquid in the through hole 31 is small. The working medium 20 can be sucked up. As a result, even when the amount of working medium 20 is small, deterioration in heat soaking performance and heat transport performance is suppressed.
  • the convex portion 33 is provided on the periphery of the through hole 31 in the direction approaching the first inner surface 11a, even if the amount of the working medium 20 is small, the thermal uniformity performance and heat transport performance will deteriorate. For example, changes in the design value of the amount of working medium 20 injected in the manufacturing process, variations in the amount of injected working medium 20 in the manufacturing process, fluctuations in the amount of working medium 20 during use, etc. It has little effect on soaking performance or heat transport performance. In other words, if the convex portion 33 is provided on the periphery of the through hole 31 in a direction approaching the first inner surface 11a, it can be said that the robustness against the amount of the working medium 20 is improved.
  • the convex portion 32 or the convex portion 33 may be provided only on a part of the periphery of the through hole 31, it is preferably provided on the entire periphery of the through hole 31.
  • the convex portion 32 or the convex portion 33 can be formed, for example, by punching the metal foil that constitutes the wick 30 by press working. In that case, the convex portion 32 or the convex portion 33 may be formed at the same time as the through hole 31, or may be formed separately from the through hole 31. In punching by press working, the shape of the convex portion 32 or the convex portion 33 can be adjusted by appropriately adjusting the depth of punching and the like. Note that the punching depth means, for example, how far the punch is pushed in the punching direction when punching is performed.
  • the dimensions of the convex portion 32 or the convex portion 33 are not particularly limited, and for example, the height of the convex portion 32 or the convex portion 33 may be larger than the diameter of the through hole 31, or may be smaller than the diameter of the through hole 31. , may be the same as the diameter of the through hole 31.
  • the shape of the convex portion 32 is not particularly limited, and for example, in the cross section along the thickness direction Z, the distance between the outer walls of the convex portion 32 increases in the direction approaching the second inner surface 12a (in the upward direction in FIG. 4). It may be a tapered shape that becomes narrower, or it may be an inverted tapered shape that the distance between the outer walls of the convex portion 32 becomes wider. In these cases, the convex portion 32 may have a shape that is convex toward the second inner surface 12a side (upper side in FIG. 4) in the cross section along the thickness direction Z, and may have a convex shape toward the first inner surface 11a side (lower side in FIG. 4). ) may have a convex shape. Further, the convex portion 32 may have a lid portion that narrows the opening of the convex portion 32 at the end on the second inner surface 12a side.
  • the shape of the convex portion 33 is not particularly limited, and for example, in a cross section along the thickness direction Z, the shape between the outer walls of the convex portion 33 is It may be a tapered shape in which the distance between the convex portions 33 is narrow, or it may be a reverse tapered shape in which the distance between the outer walls of the convex portions 33 is widened.
  • the convex portion 33 may have a shape that is convex toward the second inner surface 12a side (upper side in FIG. 7) in the cross section along the thickness direction Z, and may have a convex shape toward the first inner surface 11a side (lower side in FIG. 7). ) may have a convex shape.
  • the convex portion 33 may have a lid portion that narrows the opening of the convex portion 33 at the end on the first inner surface 11a side.
  • the protrusions 32 and the protrusions 33 may be provided at the periphery of the through hole 31 in a mixed manner.
  • the portion 33 may not be provided.
  • the sheet member is a member different from the wick. Therefore, a sheet member exists separately from the wick.
  • FIG. 8 is a cross-sectional view schematically showing an example of a heat diffusion device according to the second embodiment of the present invention.
  • the vapor chamber (thermal diffusion device) 2 shown in FIG. 8 includes a hollow casing 10 that is hermetically sealed.
  • the housing 10 has a first inner surface 11a and a second inner surface 12a facing each other in the thickness direction Z.
  • the housing 10 is provided with an internal space.
  • the vapor chamber 2 further includes a working medium 20 sealed in the internal space of the housing 10 , a sheet-like wick 30 disposed in the internal space of the housing 10 , and a sheet disposed in the internal space of the housing 10 . It includes a member 35, a plurality of first supports 40 integrated with the wick 30, and a plurality of second supports 50 integrated with the sheet member 35.
  • the vapor chamber 2 shown in FIG. 8 is the same as the vapor chamber 1 shown in FIG. 2 except that the sheet member 35 is a different member from the wick 30 and the second support body 50 is integrated with the sheet member 35. It has the following configuration.
  • the wick 30 may have a plurality of through holes 31 penetrating in the thickness direction Z.
  • the material constituting the sheet member 35 is not particularly limited, but is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing these as main components, and particularly preferably copper. be.
  • the material constituting the sheet member 35 may be the same as the material constituting the housing 10, or may be different. Furthermore, the material forming the sheet member 35 may be the same as or different from the material forming the wick 30.
  • the size and shape of the sheet member 35 are not particularly limited, it is preferable, for example, that the sheet member 35 is arranged continuously in the internal space of the casing 10.
  • the sheet member 35 may be disposed in the entire internal space of the casing 10 when viewed from the thickness direction Z, or the sheet member 35 may be disposed in a part of the internal space of the casing 10 when viewed from the thickness direction Z. may be placed.
  • the size and shape of the sheet member 35 may be the same as or different from the size and shape of the wick 30.
  • the thickness of the sheet member 35 is not particularly limited, but is, for example, 5 ⁇ m or more and 50 ⁇ m or less.
  • the thickness of the sheet member 35 may be the same as the thickness of the wick 30, may be greater than the thickness of the wick 30, or may be smaller than the thickness of the wick 30.
  • the sheet member 35 is arranged between the second inner surface 12a and the second support body 50. It is preferable that the second support body 50 is in contact with the wick 30.
  • the sheet member 35 may or may not be in contact with the second inner surface 12a. When the sheet member 35 is in contact with the second inner surface 12a, the sheet member 35 may or may not be joined to the second inner surface 12a.
  • the sheet member 35 does not have a through hole 31 penetrating in the thickness direction Z.
  • the second support body 50 may have a tapered shape whose width becomes narrower from the second inner surface 12a toward the wick 30, as shown in FIG. Thereby, the flow path between the second supports 50 can be widened on the wick 30 side.
  • the method for forming the first support 40 and the second support 50 is not particularly limited, but for example, by bending and recessing a part of the metal foil constituting the wick 30 by processing such as press working, a recessed portion may be formed.
  • the first support body 40 in the recessed part and bending and recessing a part of the metal foil constituting the sheet member 35 by processing such as press working, the second support body 50 can be formed in the recessed part. can. Since a vapor space is formed in the recessed portion of the first support 40, thermal conductivity is improved. Note that when press working is performed on the metal foil, depending on the condition of the press working, a through hole may be formed in a recessed portion when a part of the metal foil is bent.
  • the thickness of the metal foil before being processed such as press working is constant. However, the metal foil may become thinner in bent areas. Therefore, as in the example shown in FIG. 8, it is preferable that the thickness of the first support body 40 is the same as the thickness of the wick 30 or smaller than the thickness of the wick 30. Further, it is preferable that the thickness of the second support body 50 is the same as the thickness of the sheet member 35 or smaller than the thickness of the sheet member 35. The thickness of the first support body 40 is the same as the thickness of the wick 30, or is smaller than the thickness of the wick 30, and the thickness of the second support body 50 is the same as the thickness of the sheet member 35, Alternatively, it is more preferable that the thickness is smaller than the thickness of the sheet member 35.
  • the preferred arrangement of the through holes 31 is the same as in the first embodiment. Further, the distance between the centers of the through holes 31 and the preferable range of the diameter of the through holes 31 are also the same as in the first embodiment.
  • the preferred arrangement of the first support body 40 is the same as in the first embodiment.
  • the distance between the centers of adjacent first supports 40 the equivalent circle diameter of a cross section perpendicular to the height direction of the end of the first support 40 on the wick 30 side, and the height of the first support 40
  • the preferred range is also the same as in the first embodiment.
  • the preferred arrangement of the second support body 50 is the same as in the first embodiment.
  • the distance between the centers of adjacent second supports 50, the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the second support 50 on the wick 30 side, and the height of the second support 50 The preferred range is also the same as in the first embodiment.
  • the height of the first support 40 is preferably smaller than the height of the second support 50.
  • the distance between the centers of adjacent first supports 40 is preferably smaller than the distance between the centers of adjacent second supports 50.
  • the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the first support 40 on the wick 30 side is the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the second support 50 on the wick 30 side. Preferably smaller.
  • the wick 30 is configured so that the height, center-to-center distance, or equivalent circle diameter of the first support 40 and the second support 50 satisfy the above relationship.
  • the metal foil is less likely to be torn when forming the through hole 31 in the metal foil.
  • FIG. 9 is a sectional view showing a first modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.
  • the wick 30A is similar to the wick 30, but the first support 40A is not recessed.
  • the materials constituting the wick 30A and the first support body 40A are not particularly limited, and examples thereof include resins, metals, ceramics, mixtures thereof, and laminates.
  • the material constituting the wick 30A and the first support body 40A is preferably metal.
  • the wick 30A and the first support 40A can be produced by, for example, an etching technique, a printing technique using multilayer coating, or another multilayer technique.
  • FIG. 10 is a sectional view showing a second modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.
  • the first support 40B is similar to the first support 40A, but the wick 30B is made of a porous material. Since the wick 30B is made of a porous material, the capillary force of the wick 30B can be improved.
  • the porous body constituting the wick 30B is, for example, a porous sintered body such as a porous metal sintered body, a porous ceramic sintered body, or a porous body such as a porous metal body, a porous ceramic body, a porous resin body, etc.
  • a porous sintered body such as a porous metal sintered body, a porous ceramic sintered body, or a porous body such as a porous metal body, a porous ceramic body, a porous resin body, etc.
  • a porous sintered body such as a porous metal sintered body, a porous ceramic sintered body, or a porous body such as a porous metal body, a porous ceramic body, a porous resin body, etc.
  • One example is the body.
  • the wick 30B may or may not have a through hole penetrating in the thickness direction Z.
  • the wick 30B and the first support body 40B can be produced, for example, by a method such as a printing technique using multilayer coating using metal paste or ceramic paste.
  • FIG. 11 is a sectional view showing a third modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.
  • the wick 30C and the first support 40C are made of a porous material.
  • the porous bodies constituting the wick 30C and the first support body 40C include, for example, porous sintered bodies such as metal porous sintered bodies and ceramic porous sintered bodies, or metal porous bodies, ceramic porous bodies, Examples include porous bodies such as porous resin bodies.
  • the wick 30C may or may not have a through hole penetrating in the thickness direction Z.
  • the wick 30C and the first support 40C can be produced, for example, by a method such as a printing technique using multilayer coating using metal paste or ceramic paste.
  • the content of metal or ceramics in the paste for forming the first support 40C may be the same as the content of metal or ceramics in the paste for forming the wick 30C, and The content of metal or ceramics in the paste for forming the wick 30C may be lower than that of the metal or ceramics in the paste for forming the wick 30C.
  • the first support body 40C by making the content of metal or ceramics in the paste for forming the first support body 40C larger than the content of metal or ceramics in the paste for forming the wick 30C, the first support body 40C The density of the wick 30C can be made larger than that of the wick 30C. As a result, the strength of the first support body 40C can be increased.
  • the sheet member and the second support can also have the same configuration as the modified example of the wick and the first support described above. That is, the second support body does not need to be recessed like the first support body 40A shown in FIG.
  • the sheet member may be made of a porous material, like a wick 30B shown in FIG. 10.
  • the sheet member and the second support may be made of a porous body, as in the wick 30C and the first support 40C shown in FIG.
  • the sheet member preferably does not have a porous structure, but may have a porous structure similarly to the wick. In that case, the sheet member may have the same porous structure as the wick, or may have a different porous structure from the wick. When the sheet member has a porous structure, the sheet member may be arranged between the second inner surface and the second support, or between the wick and the second support.
  • the heat diffusion device of the present invention is not limited to the above-described embodiments, and various applications and modifications can be made within the scope of the present invention regarding the configuration, manufacturing conditions, etc. of the heat diffusion device.
  • the casing may have one evaporation section or a plurality of evaporation sections. That is, one heat source may be arranged on the outer wall surface of the casing, or a plurality of heat sources may be arranged.
  • the first sheet and the second sheet may overlap so that their edges coincide, or may be shifted and overlap.
  • the material constituting the first sheet and the material constituting the second sheet may be different.
  • stress applied to the housing can be dispersed.
  • different materials for both sheets one function can be obtained with one sheet, and another function can be obtained with the other sheet.
  • the above-mentioned functions are not particularly limited, but include, for example, a heat conduction function, an electromagnetic wave shielding function, and the like.
  • the heat diffusion device of the present invention can be installed in electronic equipment for the purpose of heat radiation. Therefore, electronic equipment including the heat diffusion device of the present invention is also one of the present inventions. Examples of the electronic device of the present invention include a smartphone, a tablet terminal, a notebook computer, a game device, a wearable device, and the like. As described above, the heat diffusion device of the present invention operates independently without requiring external power, and can diffuse heat two-dimensionally at high speed by utilizing the latent heat of vaporization and latent heat of condensation of the working medium. Therefore, an electronic device including the heat diffusion device of the present invention can effectively dissipate heat in a limited space inside the electronic device.
  • a casing having a first inner surface and a second inner surface facing each other in the thickness direction and provided with an internal space; a working medium sealed in the internal space of the housing; a sheet-like wick disposed in the internal space of the housing; a sheet member that is disposed in the internal space of the casing and is the same or a different member from the wick; a plurality of first supports integrated with the wick; a plurality of second supports integrated with the sheet member; The wick is spaced apart from the first inner surface via the first support and spaced from the second inner surface via the second support.
  • ⁇ 4> The heat diffusion device according to any one of ⁇ 1> to ⁇ 3>, wherein the height of the first support is smaller than the height of the second support.
  • ⁇ 5> The heat diffusion device according to any one of ⁇ 1> to ⁇ 4>, wherein the distance between the centers of the adjacent first supports is smaller than the distance between the centers of the adjacent second supports.
  • the equivalent circle diameter of the cross section perpendicular to the height direction of the wick side end of the first support is the circle equivalent diameter of the cross section perpendicular to the height direction of the wick side end of the second support.
  • ⁇ 7> The heat diffusion device according to any one of ⁇ 1> to ⁇ 6>, wherein the thickness of the first support is the same as the thickness of the wick or smaller than the thickness of the wick.
  • ⁇ 8> The heat diffusion device according to any one of ⁇ 1> to ⁇ 7>, wherein the thickness of the second support is the same as the thickness of the sheet member or smaller than the thickness of the sheet member.
  • ⁇ 9> The heat diffusion device according to any one of ⁇ 1> to ⁇ 8>, wherein the wick has a plurality of through holes penetrating in the thickness direction.
  • ⁇ 12> An electronic device comprising the heat diffusion device according to any one of ⁇ 1> to ⁇ 11>.
  • the heat diffusion device of the present invention can be used for a wide range of applications in the field of mobile information terminals and the like. For example, it can be used to lower the temperature of a heat source such as a CPU and extend the usage time of electronic devices, and can be used for smartphones, tablet terminals, notebook computers, etc.

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Abstract

A vapor chamber 1, which is one embodiment of a heat diffusing device, comprises a housing 10 which has a first inner surface 11a and a second inner surface 12a that face one another in a thickness direction Z and which is provided with an internal space, an operating medium 20 sealed in the internal space of the housing 10, a sheet-like wick 30 disposed in the internal space of the housing 10, a sheet member 35 which is disposed in the internal space of the housing 10 and which is a member that is the same as or different from the wick 30, a plurality of first supporting bodies 40 integrated with the wick 30, and a plurality of second supporting bodies 50 integrated with the sheet member 35; and the wick 30 is separated from the first inner surface 11a by means of the first supporting bodies 40 and is separated from the second inner surface 12a by means of the second supporting bodies 50.

Description

熱拡散デバイス及び電子機器Heat diffusion devices and electronic equipment

 本発明は、熱拡散デバイス及び電子機器に関する。 TECHNICAL FIELD The present invention relates to heat diffusion devices and electronic equipment.

 近年、素子の高集積化及び高性能化による発熱量が増加している。また、製品の小型化が進むことで、発熱密度が増加するため、放熱対策が重要となっている。この状況はスマートフォン及びタブレット等のモバイル端末の分野において特に顕著である。熱対策部材としては、グラファイトシート等が用いられることが多いが、その熱輸送量は充分ではないため、様々な熱対策部材の使用が検討されている。中でも、非常に効果的に熱を拡散させることが可能である熱拡散デバイスとして、面状のヒートパイプであるベーパーチャンバーの使用の検討が進んでいる。 In recent years, the amount of heat generated has been increasing due to higher integration and higher performance of elements. Furthermore, as products become smaller, the density of heat generation increases, making heat dissipation measures important. This situation is particularly noticeable in the field of mobile terminals such as smartphones and tablets. Graphite sheets and the like are often used as heat countermeasure members, but their heat transport capacity is not sufficient, so the use of various heat countermeasure members is being considered. Among these, the use of a vapor chamber, which is a planar heat pipe, is being considered as a heat diffusion device that can diffuse heat very effectively.

 ベーパーチャンバーは、筐体の内部に、作動媒体(作動液ともいう)と、毛細管力によって作動媒体を輸送するウィックとが封入された構造を有する。作動媒体は、電子部品等の発熱素子からの熱を吸収する蒸発部において発熱素子からの熱を吸収してベーパーチャンバー内で蒸発した後、ベーパーチャンバー内を移動し、冷却されて液相に戻る。液相に戻った作動媒体は、ウィックの毛細管力によって再び発熱素子側の蒸発部に移動し、発熱素子を冷却する。これを繰り返すことにより、ベーパーチャンバーは外部動力を有することなく自立的に作動し、作動媒体の蒸発潜熱及び凝縮潜熱を利用して、二次元的に高速で熱を拡散することができる。 The vapor chamber has a structure in which a working medium (also referred to as working fluid) and a wick that transports the working medium by capillary force are enclosed inside a housing. The working medium absorbs heat from the heat generating elements of electronic components in the evaporator, evaporates in the vapor chamber, moves within the vapor chamber, is cooled, and returns to the liquid phase. . The working medium that has returned to the liquid phase moves again to the evaporation section on the heating element side by the capillary force of the wick, and cools the heating element. By repeating this, the vapor chamber can operate independently without external power, and can diffuse heat two-dimensionally at high speed using the latent heat of vaporization and latent heat of condensation of the working medium.

 特許文献1には、外縁部で接合された対向する上部筐体シートと下部筐体シートとを含み、内部空間を有する筐体と、上記内部空間に封入された作動液と、上記下部筐体シートのうち上記内部空間に配置され、上記作動液の流路を構成するマイクロチャネルと、上記筐体の上記内部空間に配置され、上記マイクロチャネルに接触して配置されたシート状のウィックと、を備え、上記ウィックと上記マイクロチャネルの接触面積は、上記内部空間を平面視した面積に対して5%~40%である、ベーパーチャンバーが開示されている。 Patent Document 1 discloses a casing including an upper casing sheet and a lower casing sheet facing each other joined at outer edges and having an internal space, a hydraulic fluid sealed in the internal space, and the lower casing. A microchannel arranged in the inner space of the sheet and forming a flow path for the working fluid; a sheet-shaped wick arranged in the inner space of the casing and in contact with the microchannel; A vapor chamber is disclosed in which a contact area between the wick and the microchannel is 5% to 40% of the area of the internal space when viewed in plan.

国際公開第2021/229961号International Publication No. 2021/229961

 特許文献1の図1には、ベーパーチャンバーの一実施形態として、下部筐体シートに形成されたマイクロチャネルの凸状部と上部筐体シートに形成された支柱とでウィックが挟まれた構造が示されている。さらに、特許文献1には、マイクロチャネルの凹凸が下部筐体シートをエッチングすることにより形成されること、及び、支柱が上部筐体シートをエッチングすることにより形成されることが記載されている。 FIG. 1 of Patent Document 1 shows, as an embodiment of the vapor chamber, a structure in which a wick is sandwiched between a convex part of a microchannel formed on a lower housing sheet and a column formed on an upper housing sheet. It is shown. Further, Patent Document 1 describes that the unevenness of the microchannels is formed by etching the lower casing sheet, and that the pillars are formed by etching the upper casing sheet.

 特許文献1に記載されたベーパーチャンバーにおいて、微細で複雑な構造を有するマイクロチャネル及び支柱を筐体の内部空間に配置しようとすると、下部筐体シート及び上部筐体シートの設計が複雑化するため、筐体の製造コストが増加するおそれがある。 In the vapor chamber described in Patent Document 1, when attempting to arrange microchannels and struts having fine and complicated structures in the internal space of the casing, the design of the lower casing sheet and the upper casing sheet becomes complicated. , the manufacturing cost of the housing may increase.

 なお、上記の問題は、ベーパーチャンバーに限らず、ベーパーチャンバーと同様の構成によって熱を拡散させることが可能な熱拡散デバイスに共通する問題である。 Note that the above problem is not limited to vapor chambers, but is a problem common to thermal diffusion devices that can diffuse heat with a configuration similar to that of vapor chambers.

 本発明は、上記の問題を解決するためになされたものであり、筐体の設計を簡素化することが可能な熱拡散デバイスを提供することを目的とする。さらに、本発明は、上記熱拡散デバイスを備える電子機器を提供することを目的とする。 The present invention was made in order to solve the above problems, and an object of the present invention is to provide a heat diffusion device that can simplify the design of the casing. Furthermore, an object of the present invention is to provide an electronic device including the above heat diffusion device.

 本発明の熱拡散デバイスは、厚さ方向に対向する第1内面及び第2内面を有し、かつ、内部空間が設けられた筐体と、上記筐体の上記内部空間に封入された作動媒体と、上記筐体の上記内部空間に配置されたシート状のウィックと、上記筐体の上記内部空間に配置され、上記ウィックと同一の又は異なる部材であるシート部材と、上記ウィックと一体化されている複数の第1支持体と、上記シート部材と一体化されている複数の第2支持体と、を備え、上記ウィックは、上記第1支持体を介して上記第1内面から離れているとともに、上記第2支持体を介して上記第2内面から離れている。 The heat diffusion device of the present invention includes a casing having a first inner surface and a second inner surface facing each other in the thickness direction and provided with an internal space, and a working medium sealed in the internal space of the casing. a sheet-like wick disposed in the internal space of the casing; a sheet member disposed in the internal space of the casing that is the same as or different from the wick; and a sheet member integrated with the wick. a plurality of first supports integrated with the sheet member, and a plurality of second supports integrated with the sheet member, the wick being separated from the first inner surface via the first support. At the same time, it is separated from the second inner surface via the second support.

 本発明の電子機器は、本発明の熱拡散デバイスを備える。 The electronic device of the present invention includes the heat diffusion device of the present invention.

 本発明によれば、筐体の設計を簡素化することが可能な熱拡散デバイスを提供することができる。さらに、本発明によれば、上記熱拡散デバイスを備える電子機器を提供することができる。 According to the present invention, it is possible to provide a heat diffusion device that can simplify the design of the casing. Furthermore, according to the present invention, it is possible to provide an electronic device including the above heat diffusion device.

図1は、本発明の第1実施形態に係る熱拡散デバイスの一例を模式的に示す斜視図である。FIG. 1 is a perspective view schematically showing an example of a heat diffusion device according to a first embodiment of the present invention. 図2は、本発明の第1実施形態に係る熱拡散デバイスの一例を模式的に示す断面図である。FIG. 2 is a cross-sectional view schematically showing an example of the heat diffusion device according to the first embodiment of the present invention. 図3は、本発明の第1実施形態に係る熱拡散デバイスを構成するウィック、第1支持体及び第2支持体の一例を模式的に示す平面図である。FIG. 3 is a plan view schematically showing an example of a wick, a first support, and a second support that constitute the heat diffusion device according to the first embodiment of the present invention. 図4は、図3に示すウィックのA-A線に沿った断面図の一例である。FIG. 4 is an example of a cross-sectional view of the wick shown in FIG. 3 taken along line AA. 図5は、図3に示すウィック及び第1支持体のB-B線に沿った断面図の一例である。FIG. 5 is an example of a cross-sectional view of the wick and the first support shown in FIG. 3 taken along line BB. 図6は、図3に示すウィック及び第2支持体のC-C線に沿った断面図の一例である。FIG. 6 is an example of a cross-sectional view of the wick and the second support shown in FIG. 3 taken along line CC. 図7は、図3に示すウィックのA-A線に沿った断面図の別の一例である。FIG. 7 is another example of a cross-sectional view of the wick shown in FIG. 3 taken along line AA. 図8は、本発明の第2実施形態に係る熱拡散デバイスの一例を模式的に示す断面図である。FIG. 8 is a cross-sectional view schematically showing an example of a heat diffusion device according to a second embodiment of the present invention. 図9は、本発明の第2実施形態に係る熱拡散デバイスを構成するウィック、シート部材、第1支持体及び第2支持体の第1変形例を示す断面図である。FIG. 9 is a sectional view showing a first modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention. 図10は、本発明の第2実施形態に係る熱拡散デバイスを構成するウィック、シート部材、第1支持体及び第2支持体の第2変形例を示す断面図である。FIG. 10 is a sectional view showing a second modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention. 図11は、本発明の第2実施形態に係る熱拡散デバイスを構成するウィック、シート部材、第1支持体及び第2支持体の第3変形例を示す断面図である。FIG. 11 is a sectional view showing a third modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.

 以下、本発明の熱拡散デバイスについて説明する。
 しかしながら、本発明は、以下の実施形態に限定されるものではなく、本発明の要旨を変更しない範囲において適宜変更して適用することができる。なお、以下において記載する本発明の個々の好ましい構成を2つ以上組み合わせたものもまた本発明である。
The heat diffusion device of the present invention will be explained below.
However, the present invention is not limited to the following embodiments, and can be modified and applied as appropriate without changing the gist of the present invention. Note that the present invention also includes a combination of two or more of the individual preferred configurations of the present invention described below.

 本発明の熱拡散デバイスでは、第1支持体がウィックと一体化されているとともに、第2支持体がシート部材と一体化されていることを特徴としている。特許文献1に記載されている構造と異なり、エッチング等の加工により筐体の内面に第1支持体及び第2支持体を形成する必要がなくなるため、筐体の設計を簡素化することが可能となる。例えば、特許文献1と同様に、外縁部が接合された対向する上部筐体シート及び下部筐体シートから筐体が構成される場合、上下の筐体シートの内面に微細で複雑な構造を有する支持体がなくなることで、上下の筐体シートを単純なバスタブ形状とすることができる。そのため、筐体の製造コストを低減することができる。 The heat diffusion device of the present invention is characterized in that the first support is integrated with the wick, and the second support is integrated with the sheet member. Unlike the structure described in Patent Document 1, it is not necessary to form the first support body and the second support body on the inner surface of the housing by processing such as etching, so the design of the housing can be simplified. becomes. For example, as in Patent Document 1, when a housing is constructed from an upper housing sheet and a lower housing sheet that face each other and whose outer edges are joined, the inner surfaces of the upper and lower housing sheets have a fine and complicated structure. By eliminating the support, the upper and lower housing sheets can have a simple bathtub shape. Therefore, the manufacturing cost of the housing can be reduced.

 第1支持体又は第2支持体を形成する方法は特に限定されないが、例えば、ウィック又はシート部材を構成する金属箔の一部をプレス加工等の加工によって曲げて凹ませることにより、凹んだ部分に第1支持体又は第2支持体を形成することができる。この場合には、エッチング等の加工により筐体の内面に第1支持体及び第2支持体を形成する場合と比べて、支持体の部分の金属体積を減らせるため、熱拡散デバイスの軽量化が可能となる。 The method of forming the first support or the second support is not particularly limited, but for example, by bending and recessing a part of the metal foil constituting the wick or sheet member by processing such as press processing, the recessed portion may be formed. The first support or the second support can be formed on the substrate. In this case, compared to the case where the first support body and the second support body are formed on the inner surface of the casing by processing such as etching, the metal volume of the support body part can be reduced, so the weight of the heat diffusion device can be reduced. becomes possible.

 本発明の熱拡散デバイスにおいて、「第1支持体がウィックと一体化されている」とは、第1支持体とウィックとの間に界面が存在しないことを意味し、具体的には、第1支持体とウィックとの間に境界が判別できないことを意味する。例えば、第1支持体としての銅ピラーと、ウィックとしての銅メッシュとが、拡散接合又はスポット溶接等で固定された構造においては、第1支持体とウィックとの間を全面にわたって接合することが困難であるため、第1支持体とウィックとの間の一部には隙間が生じる。このような構造では、第1支持体とウィックとの間に境界が判別できるため、第1支持体とウィックとは一体的に構成されていないと言える。 In the heat diffusion device of the present invention, "the first support is integrated with the wick" means that there is no interface between the first support and the wick. 1 This means that the boundary between the support and the wick cannot be determined. For example, in a structure in which a copper pillar as a first support and a copper mesh as a wick are fixed by diffusion bonding or spot welding, it is not possible to bond the entire surface between the first support and the wick. Due to this difficulty, a gap is created between the first support and the wick. In such a structure, since a boundary can be discerned between the first support and the wick, it can be said that the first support and the wick are not integrally constituted.

 同様に、本発明の熱拡散デバイスにおいて、「第2支持体がシート部材と一体化されている」とは、第2支持体とシート部材との間に界面が存在しないことを意味し、具体的には、第2支持体とシート部材との間に境界が判別できないことを意味する。 Similarly, in the heat diffusion device of the present invention, "the second support is integrated with the sheet member" means that there is no interface between the second support and the sheet member; Specifically, this means that the boundary between the second support and the sheet member cannot be determined.

 本発明の熱拡散デバイスにおいて、シート部材は、ウィックと同一の部材であってもよく、ウィックと異なる部材であってもよい。シート部材がウィックと同一の部材である場合、第1支持体がウィックと一体化されているとともに、第2支持体もウィックと一体化されている。 In the heat diffusion device of the present invention, the sheet member may be the same member as the wick, or may be a different member from the wick. When the sheet member is the same member as the wick, the first support body is integrated with the wick, and the second support body is also integrated with the wick.

 以下に示す各実施形態は例示であり、異なる実施形態で示した構成の部分的な置換又は組み合わせが可能であることは言うまでもない。第2実施形態以降では、第1実施形態と共通の事項についての記述は省略し、異なる点についてのみ説明する。特に、同様の構成による同様の作用効果については、実施形態毎には逐次言及しない。 It goes without saying that each of the embodiments shown below is an example, and that parts of the configurations shown in different embodiments can be partially replaced or combined. In the second embodiment and subsequent embodiments, descriptions of matters common to the first embodiment will be omitted, and only different points will be described. In particular, similar effects due to similar configurations will not be mentioned for each embodiment.

 以下の説明において、各実施形態を特に区別しない場合、単に「本発明の熱拡散デバイス」という。 In the following description, unless the embodiments are particularly distinguished, they will simply be referred to as "the heat diffusion device of the present invention."

 本発明の熱拡散デバイスの一実施形態として、ベーパーチャンバーを例にとって以下に説明する。本発明の熱拡散デバイスは、ヒートパイプ等の熱拡散デバイスにも適用可能である。 An embodiment of the heat diffusion device of the present invention will be described below using a vapor chamber as an example. The heat diffusion device of the present invention is also applicable to heat diffusion devices such as heat pipes.

 以下に示す図面は模式的なものであり、その寸法又は縦横比の縮尺等は実際の製品とは異なる場合がある。図中、同一又は相当部分には同一符号を用いることとする。また、各図において、同一要素には同一符号を付して重複する説明を省略する。 The drawings shown below are schematic, and their dimensions, aspect ratio, etc. may differ from the actual product. In the figures, the same reference numerals are used for the same or corresponding parts. Further, in each figure, the same elements are given the same reference numerals and redundant explanations will be omitted.

 本明細書において、要素間の関係性を示す用語(例えば「垂直」、「平行」、「直交」等)及び要素の形状を示す用語は、厳格な意味のみを表す表現ではなく、実質的に同等な範囲、例えば数%程度の差異をも含むことを意味する表現である。 In this specification, terms that indicate relationships between elements (e.g., "perpendicular," "parallel," "orthogonal," etc.) and terms that indicate the shape of elements are not expressions that express only strict meanings, but substantially This expression means that it includes an equivalent range, for example, a difference of several percent.

[第1実施形態]
 本発明の第1実施形態に係る熱拡散デバイスでは、シート部材がウィックと同一の部材である。すなわち、ウィックがシート部材を兼ねる。したがって、ウィックとは別にシート部材が存在しない。
[First embodiment]
In the heat diffusion device according to the first embodiment of the present invention, the sheet member is the same member as the wick. That is, the wick also serves as a sheet member. Therefore, there is no sheet member separate from the wick.

 図1は、本発明の第1実施形態に係る熱拡散デバイスの一例を模式的に示す斜視図である。図2は、本発明の第1実施形態に係る熱拡散デバイスの一例を模式的に示す断面図である。図2は、図1に示す熱拡散デバイスのII-II線に沿った断面図の一例である。 FIG. 1 is a perspective view schematically showing an example of a heat diffusion device according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view schematically showing an example of the heat diffusion device according to the first embodiment of the present invention. FIG. 2 is an example of a cross-sectional view of the heat diffusion device shown in FIG. 1 taken along line II-II.

 図1及び図2に示すベーパーチャンバー(熱拡散デバイス)1は、気密状態に密閉された中空の筐体10を備える。筐体10は、厚さ方向Zに対向する第1内面11a及び第2内面12aを有する。筐体10には、内部空間が設けられている。ベーパーチャンバー1は、さらに、筐体10の内部空間に封入された作動媒体20と、筐体10の内部空間に配置されたシート状のウィック30と、ウィック30と一体化されている複数の第1支持体40と、ウィック30と一体化されている複数の第2支持体50と、を備える。 The vapor chamber (thermal diffusion device) 1 shown in FIGS. 1 and 2 includes a hollow casing 10 that is hermetically sealed. The housing 10 has a first inner surface 11a and a second inner surface 12a facing each other in the thickness direction Z. The housing 10 is provided with an internal space. The vapor chamber 1 further includes a working medium 20 sealed in the internal space of the housing 10 , a sheet-like wick 30 disposed in the internal space of the housing 10 , and a plurality of vapor chambers integrated with the wick 30 . 1 support body 40 and a plurality of second support bodies 50 that are integrated with the wick 30.

 筐体10には、封入した作動媒体20を蒸発させる蒸発部が設定される。図1に示すように、筐体10の外面には、発熱素子である熱源(heat source)HSが配置される。熱源HSとしては、電子機器の電子部品、例えば中央処理装置(CPU)等が挙げられる。筐体10の内部空間のうち、熱源HSの近傍であって熱源HSによって加熱される部分が、蒸発部に相当する。 The housing 10 is provided with an evaporation section that evaporates the enclosed working medium 20. As shown in FIG. 1, a heat source HS, which is a heat generating element, is arranged on the outer surface of the housing 10. Examples of the heat source HS include electronic components of electronic equipment, such as a central processing unit (CPU). A portion of the internal space of the housing 10 that is near the heat source HS and is heated by the heat source HS corresponds to the evaporation section.

 ベーパーチャンバー1は、全体として面状であることが好ましい。すなわち、筐体10は、全体として面状であることが好ましい。ここで、「面状」とは、板状及びシート状を包含し、幅方向Xの寸法(以下、幅という)及び長さ方向Yの寸法(以下、長さという)が厚さ方向Zの寸法(以下、厚さ又は高さという)に対して相当に大きい形状、例えば幅及び長さが、厚さの10倍以上、好ましくは100倍以上である形状を意味する。 It is preferable that the vapor chamber 1 has a planar shape as a whole. That is, it is preferable that the housing 10 has a planar shape as a whole. Here, "plane shape" includes plate shape and sheet shape, and the dimension in the width direction X (hereinafter referred to as width) and the dimension in the length direction Y (hereinafter referred to as length) is It means a shape that is considerably large relative to its dimensions (hereinafter referred to as thickness or height), for example, a shape whose width and length are 10 times or more, preferably 100 times or more, the thickness.

 ベーパーチャンバー1の大きさ、すなわち、筐体10の大きさは、特に限定されない。ベーパーチャンバー1の幅及び長さは、用途に応じて適宜設定することができる。ベーパーチャンバー1の幅及び長さは、各々、例えば、5mm以上500mm以下、20mm以上300mm以下又は50mm以上200mm以下である。ベーパーチャンバー1の幅及び長さは、同じであってもよく、異なっていてもよい。 The size of the vapor chamber 1, that is, the size of the housing 10, is not particularly limited. The width and length of the vapor chamber 1 can be set as appropriate depending on the application. The width and length of the vapor chamber 1 are, for example, 5 mm or more and 500 mm or less, 20 mm or more and 300 mm or less, or 50 mm or more and 200 mm or less. The width and length of the vapor chamber 1 may be the same or different.

 筐体10は、外縁部が接合された対向する第1シート11及び第2シート12から構成されることが好ましい。 It is preferable that the casing 10 is composed of a first sheet 11 and a second sheet 12 that face each other and whose outer edges are joined.

 筐体10が第1シート11及び第2シート12から構成される場合、第1シート11及び第2シート12を構成する材料は、ベーパーチャンバー等の熱拡散デバイスとして用いるのに適した特性、例えば熱伝導性、強度、柔軟性、可撓性等を有するものであれば、特に限定されない。第1シート11及び第2シート12を構成する材料は、好ましくは金属であり、例えば銅、ニッケル、アルミニウム、マグネシウム、チタン、鉄、又はそれらを主成分とする合金等であり、特に好ましくは銅である。第1シート11及び第2シート12を構成する材料は、同じであってもよく、異なっていてもよいが、好ましくは同じである。 When the housing 10 is composed of the first sheet 11 and the second sheet 12, the materials constituting the first sheet 11 and the second sheet 12 have characteristics suitable for use as a heat diffusion device such as a vapor chamber, e.g. It is not particularly limited as long as it has thermal conductivity, strength, flexibility, flexibility, etc. The material constituting the first sheet 11 and the second sheet 12 is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing these as main components, and particularly preferably copper. It is. The materials constituting the first sheet 11 and the second sheet 12 may be the same or different, but are preferably the same.

 筐体10が第1シート11及び第2シート12から構成される場合、第1シート11及び第2シート12は、これらの外縁部において互いに接合される。かかる接合の方法は、特に限定されないが、例えば、レーザー溶接、抵抗溶接、拡散接合、ロウ接、TIG溶接(タングステン-不活性ガス溶接)、超音波接合又は樹脂封止を用いることができ、好ましくはレーザー溶接、抵抗溶接又はロウ接を用いることができる。 When the housing 10 is composed of the first sheet 11 and the second sheet 12, the first sheet 11 and the second sheet 12 are joined to each other at their outer edges. The method of such joining is not particularly limited, but for example, laser welding, resistance welding, diffusion bonding, brazing welding, TIG welding (tungsten-inert gas welding), ultrasonic bonding, or resin sealing can be used, and preferably Laser welding, resistance welding or brazing can be used.

 第1シート11及び第2シート12の厚さは、特に限定されないが、各々、好ましくは10μm以上200μm以下、より好ましくは30μm以上100μm以下、さらに好ましくは40μm以上60μm以下である。第1シート11及び第2シート12の厚さは、同じであってもよく、異なっていてもよい。また、第1シート11及び第2シート12の各シートの厚さは、全体にわたって同じであってもよく、一部が薄くてもよい。 The thickness of the first sheet 11 and the second sheet 12 is not particularly limited, but each is preferably 10 μm or more and 200 μm or less, more preferably 30 μm or more and 100 μm or less, and even more preferably 40 μm or more and 60 μm or less. The thickness of the first sheet 11 and the second sheet 12 may be the same or different. Further, the thickness of each of the first sheet 11 and the second sheet 12 may be the same over the entirety, or may be partially thin.

 第1シート11及び第2シート12の形状は、特に限定されない。例えば、第1シート11及び第2シート12は、各々、外縁部が外縁部以外の部分よりも厚い形状であってもよい。 The shapes of the first sheet 11 and the second sheet 12 are not particularly limited. For example, each of the first sheet 11 and the second sheet 12 may have an outer edge portion thicker than a portion other than the outer edge portion.

 ベーパーチャンバー1全体の厚さは、特に限定されないが、好ましくは50μm以上500μm以下である。 The overall thickness of the vapor chamber 1 is not particularly limited, but is preferably 50 μm or more and 500 μm or less.

 厚さ方向Zから見た筐体10の平面形状は特に限定されず、例えば、三角形又は矩形等の多角形、円形、楕円形、これらを組み合わせた形状等が挙げられる。また、筐体10の平面形状は、L字型、C字型(コの字型)、階段型等であってもよい。また、筐体10は貫通口を有してもよい。筐体10の平面形状は、ベーパーチャンバー等の熱拡散デバイスの用途、ベーパーチャンバー等の熱拡散デバイスの組み入れ箇所の形状、近傍に存在する他の部品に応じた形状であってもよい。 The planar shape of the casing 10 viewed from the thickness direction Z is not particularly limited, and examples thereof include polygons such as triangles and rectangles, circles, ellipses, and combinations thereof. Further, the planar shape of the casing 10 may be an L-shape, a C-shape (U-shape), a staircase shape, or the like. Furthermore, the housing 10 may have a through hole. The planar shape of the casing 10 may be a shape depending on the use of the heat diffusion device such as the vapor chamber, the shape of the part where the heat diffusion device such as the vapor chamber is installed, and other components existing nearby.

 作動媒体20は、筐体10内の環境下において気-液の相変化を生じ得るものであれば特に限定されず、例えば、水、アルコール類、代替フロン等を用いることができる。例えば、作動媒体20は水性化合物であり、好ましくは水である。 The working medium 20 is not particularly limited as long as it can cause a gas-liquid phase change in the environment inside the casing 10, and for example, water, alcohol, CFC substitutes, etc. can be used. For example, working medium 20 is an aqueous compound, preferably water.

 ウィック30は、毛細管力により作動媒体20を移動させることができる毛細管構造を有する。 The wick 30 has a capillary structure that can move the working medium 20 by capillary force.

 ウィック30を構成する材料は、特に限定されないが、好ましくは金属であり、例えば銅、ニッケル、アルミニウム、マグネシウム、チタン、鉄、又はそれらを主成分とする合金等であり、特に好ましくは銅である。ウィック30を構成する材料は、筐体10を構成する材料と同じであってもよく、異なっていてもよい。 The material constituting the wick 30 is not particularly limited, but is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing these as main components, and copper is particularly preferred. . The material forming the wick 30 may be the same as or different from the material forming the housing 10.

 ウィック30の大きさ及び形状は、特に限定されないが、例えば、筐体10の内部空間において連続してウィック30が配置されていることが好ましい。厚さ方向Zから見て、筐体10の内部空間の全体にウィック30が配置されていてもよく、厚さ方向Zから見て、筐体10の内部空間の一部にウィック30が配置されていてもよい。 Although the size and shape of the wick 30 are not particularly limited, it is preferable, for example, that the wick 30 be arranged continuously in the internal space of the housing 10. The wick 30 may be disposed in the entire internal space of the casing 10 when viewed from the thickness direction Z, or the wick 30 may be disposed in a part of the internal space of the casing 10 when viewed from the thickness direction Z. You can leave it there.

 ウィック30の厚さは、特に限定されないが、例えば、5μm以上50μm以下である。 The thickness of the wick 30 is not particularly limited, but is, for example, 5 μm or more and 50 μm or less.

 ウィック30は、厚さ方向Zに貫通する複数の貫通孔31を有してもよい。 The wick 30 may have a plurality of through holes 31 penetrating in the thickness direction Z.

 ウィック30は、第1支持体40を介して第1内面11aから離れているとともに、第2支持体50を介して第2内面12aから離れている。 The wick 30 is separated from the first inner surface 11a via the first support 40 and is separated from the second inner surface 12a via the second support 50.

 第1支持体40は、第1内面11aと接していてもよく、接していなくてもよい。第1支持体40が第1内面11aと接している場合、第1支持体40は、第1内面11aと接合されていてもよく、接合されていなくてもよい。 The first support body 40 may or may not be in contact with the first inner surface 11a. When the first support body 40 is in contact with the first inner surface 11a, the first support body 40 may or may not be joined to the first inner surface 11a.

 第2支持体50は、第2内面12aと接していてもよく、接していなくてもよい。第2支持体50が第2内面12aと接している場合、第2支持体50は、第2内面12aと接合されていてもよく、接合されていなくてもよい。 The second support body 50 may or may not be in contact with the second inner surface 12a. When the second support body 50 is in contact with the second inner surface 12a, the second support body 50 may or may not be joined to the second inner surface 12a.

 第1支持体40は、例えば、複数の柱状部材を含む。ここで、「柱状」とは、底面の長辺の長さの比が、底面の短辺の長さに対して5倍未満である形状を意味する。 The first support body 40 includes, for example, a plurality of columnar members. Here, "columnar" means a shape in which the ratio of the length of the long side of the bottom surface is less than 5 times the length of the short side of the bottom surface.

 あるいは、第1支持体40は、複数のレール状部材を含んでもよい。ここで、「レール状」とは、底面の長辺の長さの比が、底面の短辺の長さに対して5倍以上である形状を意味する。 Alternatively, the first support body 40 may include a plurality of rail-shaped members. Here, "rail shape" means a shape in which the ratio of the length of the long side of the bottom surface is 5 times or more to the length of the short side of the bottom surface.

 第1支持体40の間には、液相の作動媒体20が保持される。これにより、ベーパーチャンバー1の熱輸送性能を向上させることができる。 A liquid phase working medium 20 is held between the first supports 40 . Thereby, the heat transport performance of the vapor chamber 1 can be improved.

 第1支持体40が複数の柱状部材を含む場合、第1支持体40の形状は特に限定されないが、例えば、円柱形状、楕円柱形状、角柱形状、円錐台形状、角錐台形状等の形状が挙げられる。 When the first support body 40 includes a plurality of columnar members, the shape of the first support body 40 is not particularly limited, but may have a shape such as a columnar shape, an elliptical columnar shape, a prismatic shape, a truncated cone shape, or a truncated pyramid shape. Can be mentioned.

 第1支持体40が複数のレール状部材を含む場合、第1支持体40の延伸方向に垂直な断面形状は特に限定されないが、例えば、四角形状等の多角形状、半円形状、半楕円形状、これらを組み合わせた形状等が挙げられる。 When the first support body 40 includes a plurality of rail-like members, the cross-sectional shape perpendicular to the extending direction of the first support body 40 is not particularly limited; , a shape that is a combination of these, etc.

 第1支持体40は、図2に示すように、ウィック30から第1内面11aに向かって幅が狭くなるテーパー形状を有してもよい。これにより、筐体10側では第1支持体40の間の流路を広くすることができる。 As shown in FIG. 2, the first support body 40 may have a tapered shape whose width becomes narrower from the wick 30 toward the first inner surface 11a. Thereby, the flow path between the first supports 40 can be widened on the housing 10 side.

 第1支持体40の高さは、一のベーパーチャンバーにおいて、同じであってもよく、異なっていてもよい。 The height of the first support body 40 may be the same or different in one vapor chamber.

 第2支持体50は、例えば、複数の柱状部材を含む。あるいは、第2支持体50は、複数のレール状部材を含んでもよい。 The second support body 50 includes, for example, a plurality of columnar members. Alternatively, the second support body 50 may include a plurality of rail-like members.

 第2支持体50により、筐体10及びウィック30が支持される。 The housing 10 and the wick 30 are supported by the second support body 50.

 第2支持体50が複数の柱状部材を含む場合、第2支持体50の形状は特に限定されないが、例えば、円柱形状、楕円柱形状、角柱形状、円錐台形状、角錐台形状等の形状が挙げられる。 When the second support body 50 includes a plurality of columnar members, the shape of the second support body 50 is not particularly limited; Can be mentioned.

 第2支持体50が複数のレール状部材を含む場合、第2支持体50の延伸方向に垂直な断面形状は特に限定されないが、例えば、四角形状等の多角形状、半円形状、半楕円形状、これらを組み合わせた形状等が挙げられる。 When the second support body 50 includes a plurality of rail-like members, the cross-sectional shape perpendicular to the extending direction of the second support body 50 is not particularly limited; , a shape that is a combination of these, etc.

 第2支持体50は、図2に示すように、ウィック30から第2内面12aに向かって幅が狭くなるテーパー形状を有してもよい。これにより、筐体10側では第2支持体50の間の流路を広くすることができる。 As shown in FIG. 2, the second support body 50 may have a tapered shape whose width becomes narrower from the wick 30 toward the second inner surface 12a. Thereby, the flow path between the second supports 50 can be widened on the housing 10 side.

 第2支持体50の高さは、一のベーパーチャンバーにおいて、同じであってもよく、異なっていてもよい。 The height of the second support body 50 may be the same or different in one vapor chamber.

 第1支持体40及び第2支持体50を形成する方法は特に限定されないが、例えば、ウィック30を構成する金属箔の一部をプレス加工等の加工によって曲げて凹ませることにより、凹んだ部分に第1支持体40及び第2支持体50を形成することができる。第1支持体40を形成する加工と、第2支持体50を形成する加工とが一括で行われてもよい。第1支持体40の凹んだ部分には蒸気空間が形成されるため、熱伝導率が向上する。なお、金属箔にプレス加工を行う場合、プレス加工の具合によっては、金属箔の一部を曲げた際に凹んだ部分に貫通孔が形成されてもよい。 The method for forming the first support 40 and the second support 50 is not particularly limited, but for example, by bending and recessing a part of the metal foil constituting the wick 30 by processing such as press working, a recessed portion may be formed. The first support 40 and the second support 50 can be formed. The process of forming the first support body 40 and the process of forming the second support body 50 may be performed at once. Since a vapor space is formed in the recessed portion of the first support 40, thermal conductivity is improved. Note that when press working is performed on the metal foil, depending on the condition of the press working, a through hole may be formed in a recessed portion when a part of the metal foil is bent.

 プレス加工等の加工を行う前の金属箔の厚さは一定であることが好ましい。ただし、曲げられた部分では金属箔が薄くなることもある。そのため、図2に示す例のように、第1支持体40の厚さがウィック30の厚さと同じであるか、又は、ウィック30の厚さより小さいことが好ましい。また、第2支持体50の厚さがウィック30の厚さと同じであるか、又は、ウィック30の厚さより小さいことが好ましい。第1支持体40の厚さがウィック30の厚さと同じであるか、又は、ウィック30の厚さより小さく、かつ、第2支持体50の厚さがウィック30の厚さと同じであるか、又は、ウィック30の厚さより小さいことがより好ましい。 It is preferable that the thickness of the metal foil before being processed such as press working is constant. However, the metal foil may become thinner in bent areas. Therefore, as in the example shown in FIG. 2, it is preferable that the thickness of the first support body 40 is the same as the thickness of the wick 30 or smaller than the thickness of the wick 30. Further, it is preferable that the thickness of the second support body 50 is the same as the thickness of the wick 30 or smaller than the thickness of the wick 30. The thickness of the first support body 40 is the same as the thickness of the wick 30, or is smaller than the thickness of the wick 30, and the thickness of the second support body 50 is the same as the thickness of the wick 30, or , is more preferably smaller than the thickness of the wick 30.

 図3は、本発明の第1実施形態に係る熱拡散デバイスを構成するウィック、第1支持体及び第2支持体の一例を模式的に示す平面図である。図4は、図3に示すウィックのA-A線に沿った断面図の一例である。図5は、図3に示すウィック及び第1支持体のB-B線に沿った断面図の一例である。図6は、図3に示すウィック及び第2支持体のC-C線に沿った断面図の一例である。 FIG. 3 is a plan view schematically showing an example of a wick, a first support, and a second support that constitute the heat diffusion device according to the first embodiment of the present invention. FIG. 4 is an example of a cross-sectional view of the wick shown in FIG. 3 taken along line AA. FIG. 5 is an example of a cross-sectional view of the wick and the first support shown in FIG. 3 taken along line BB. FIG. 6 is an example of a cross-sectional view of the wick and the second support shown in FIG. 3 taken along line CC.

 図3及び図4に示す例では、ウィック30は、厚さ方向Zに貫通する複数の貫通孔31を有している。 In the example shown in FIGS. 3 and 4, the wick 30 has a plurality of through holes 31 that penetrate in the thickness direction Z.

 貫通孔31内において、作動媒体20は、毛細管現象により移動することができる。貫通孔31は、厚さ方向Zから見て、第1支持体40が存在しない部分に設けられていることが好ましい。貫通孔31の形状は特に限定されないが、厚さ方向Zに垂直な面での断面が円形又は楕円形であることが好ましい。 The working medium 20 can move within the through hole 31 due to capillary action. It is preferable that the through hole 31 be provided in a portion where the first support body 40 is not present when viewed from the thickness direction Z. Although the shape of the through hole 31 is not particularly limited, it is preferable that the cross section in a plane perpendicular to the thickness direction Z is circular or elliptical.

 ウィック30が厚さ方向Zに貫通する複数の貫通孔31を有する場合、貫通孔31の配置は特に限定されないが、好ましくは所定の領域において均等に、より好ましくは全体にわたって均等に、例えば貫通孔31の中心間距離(ピッチ)が一定となるように配置される。 When the wick 30 has a plurality of through holes 31 penetrating in the thickness direction Z, the arrangement of the through holes 31 is not particularly limited, but it is preferable that the through holes 31 are arranged uniformly in a predetermined area, more preferably evenly throughout, for example. 31 are arranged so that the center-to-center distance (pitch) is constant.

 貫通孔31の中心間距離は、例えば、3μm以上150μm以下である。貫通孔31の径は、例えば、100μm以下である。なお、厚さ方向Zで貫通孔31の径が異なる場合には、最も小さい部分の径を貫通孔31の径と定義する。 The distance between the centers of the through holes 31 is, for example, 3 μm or more and 150 μm or less. The diameter of the through hole 31 is, for example, 100 μm or less. In addition, when the diameter of the through-hole 31 differs in the thickness direction Z, the diameter of the smallest part is defined as the diameter of the through-hole 31.

 貫通孔31は、例えば、ウィック30を構成する金属箔に対して、プレス加工による打ち抜きを行うことによって形成することができる。第1支持体40を形成するプレス加工と、貫通孔31を形成するプレス加工とが一括で行われてもよく、第2支持体50を形成するプレス加工と、貫通孔31を形成するプレス加工とが一括で行われてもよい。 The through-hole 31 can be formed, for example, by punching the metal foil that constitutes the wick 30 by press working. The press work to form the first support body 40 and the press work to form the through hole 31 may be performed at once, and the press work to form the second support body 50 and the press work to form the through hole 31 may be performed all at once.

 図3及び図5に示す例では、第1支持体40は、複数の柱状部材を含む。図3及び図5では、第1支持体40に貫通孔31が設けられていないが、例えば第1支持体40の底部(凹んだ部分)に貫通孔31が設けられていてもよい。 In the example shown in FIGS. 3 and 5, the first support body 40 includes a plurality of columnar members. Although the first support body 40 is not provided with the through hole 31 in FIGS. 3 and 5, the through hole 31 may be provided, for example, at the bottom (concave portion) of the first support body 40.

 第1支持体40の配置は特に限定されないが、好ましくは所定の領域において均等に、より好ましくは全体にわたって均等に、例えば第1支持体40の中心間距離(ピッチ)が一定となるように配置される。 The arrangement of the first supports 40 is not particularly limited, but is preferably arranged evenly in a predetermined area, more preferably evenly over the entire area, for example, so that the center-to-center distance (pitch) of the first supports 40 is constant. be done.

 隣り合う第1支持体40の中心間距離は、例えば、60μm以上800μm以下である。第1支持体40のウィック30側の端部の高さ方向に垂直な断面の円相当径は、例えば、20μm以上500μm以下である。第1支持体40の高さは、例えば、10μm以上100μm以下である。 The distance between the centers of adjacent first supports 40 is, for example, 60 μm or more and 800 μm or less. The equivalent circle diameter of the cross section perpendicular to the height direction of the end of the first support 40 on the wick 30 side is, for example, 20 μm or more and 500 μm or less. The height of the first support body 40 is, for example, 10 μm or more and 100 μm or less.

 図3及び図6に示す例では、第2支持体50は、複数の柱状部材を含む。図3及び図6では、第2支持体50に貫通孔31が設けられていないが、例えば第2支持体50の底部(凹んだ部分)に貫通孔31が設けられていてもよい。 In the example shown in FIGS. 3 and 6, the second support body 50 includes a plurality of columnar members. Although the second support body 50 is not provided with the through hole 31 in FIGS. 3 and 6, the through hole 31 may be provided, for example, at the bottom (concave portion) of the second support body 50.

 第2支持体50の配置は特に限定されないが、好ましくは所定の領域において均等に、より好ましくは全体にわたって均等に、例えば第2支持体50の中心間距離(ピッチ)が一定となるように配置される。第2支持体50を均等に配置することにより、ベーパーチャンバー等の熱拡散デバイスの全体にわたって均一な強度を確保することができる。 The arrangement of the second supports 50 is not particularly limited, but is preferably arranged evenly in a predetermined area, more preferably evenly over the entire area, for example, so that the center-to-center distance (pitch) of the second supports 50 is constant. be done. By arranging the second supports 50 evenly, uniform strength can be ensured over the entire heat diffusion device such as a vapor chamber.

 隣り合う第2支持体50の中心間距離は、例えば、100μm以上5000μm以下である。第2支持体50のウィック30側の端部の高さ方向に垂直な断面の円相当径は、例えば、100μm以上2000μm以下であり、好ましくは300μm以上1000μm以下である。第2支持体50の円相当径を大きくすることにより、筐体10の変形をより抑制することができる。一方、第2支持体50の円相当径を小さくすることにより、作動媒体20の蒸気が移動するための空間をより広く確保することができる。第2支持体50の高さは、例えば、50μm以上1000μm以下である。 The distance between the centers of adjacent second supports 50 is, for example, 100 μm or more and 5000 μm or less. The equivalent circle diameter of the cross section perpendicular to the height direction of the end of the second support 50 on the wick 30 side is, for example, 100 μm or more and 2000 μm or less, preferably 300 μm or more and 1000 μm or less. By increasing the equivalent circle diameter of the second support body 50, deformation of the housing 10 can be further suppressed. On the other hand, by reducing the equivalent circle diameter of the second support body 50, it is possible to secure a wider space for the vapor of the working medium 20 to move. The height of the second support body 50 is, for example, 50 μm or more and 1000 μm or less.

 第1支持体40の高さは、第2支持体50の高さより小さいことが好ましい。 The height of the first support 40 is preferably smaller than the height of the second support 50.

 隣り合う第1支持体40の中心間距離は、隣り合う第2支持体50の中心間距離より小さいことが好ましい。 The distance between the centers of adjacent first supports 40 is preferably smaller than the distance between the centers of adjacent second supports 50.

 第1支持体40のウィック30側の端部の高さ方向に垂直な断面の円相当径は、第2支持体50のウィック30側の端部の高さ方向に垂直な断面の円相当径より小さいことが好ましい。 The equivalent circle diameter of the cross section perpendicular to the height direction of the end of the first support 40 on the wick 30 side is the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the second support 50 on the wick 30 side. Preferably smaller.

 ウィック30が厚さ方向Zに貫通する複数の貫通孔31を有する場合、図4に示すように、貫通孔31の周縁には、第2内面12a(図2参照)に近接する方向(図4では上側)に凸部32が設けられていてもよい。 When the wick 30 has a plurality of through holes 31 penetrating in the thickness direction Z, as shown in FIG. A convex portion 32 may be provided on the upper side).

 貫通孔31の周縁において、第2内面12aに近接する方向に凸部32が設けられていると、ウィック30と第2内面12aとの間の空間を流れる作動媒体20の蒸気が凸部32の外周縁を迂回するように流れる。このため、作動媒体20の蒸気の流れが貫通孔31内の作動媒体20の液面と直接触れることを防止できる。したがって、ウィック30の毛細管力とは逆方向への蒸気の流れ、いわゆるカウンターフローの影響を低減できる。その結果、最大熱輸送量が向上する。 If a convex portion 32 is provided at the periphery of the through hole 31 in a direction approaching the second inner surface 12a, the vapor of the working medium 20 flowing in the space between the wick 30 and the second inner surface 12a will be absorbed by the convex portion 32. It flows around the outer periphery. Therefore, the flow of the vapor of the working medium 20 can be prevented from coming into direct contact with the liquid level of the working medium 20 in the through hole 31 . Therefore, the influence of the flow of steam in the direction opposite to the capillary force of the wick 30, so-called counterflow, can be reduced. As a result, the maximum heat transport amount is improved.

 図7は、図3に示すウィックのA-A線に沿った断面図の別の一例である。 FIG. 7 is another example of a cross-sectional view of the wick shown in FIG. 3 taken along line AA.

 ウィック30が厚さ方向Zに貫通する複数の貫通孔31を有する場合、図7に示すように、貫通孔31の周縁には、第1内面11a(図2参照)に近接する方向(図7では下側)に凸部33が設けられていてもよい。 When the wick 30 has a plurality of through holes 31 penetrating in the thickness direction Z, as shown in FIG. A convex portion 33 may be provided on the lower side).

 貫通孔31の周縁において、第1内面11aに近接する方向に凸部33が設けられていると、凸部33の内壁によって囲まれる面に接する作動媒体20が毛細管力により貫通孔31内に吸い上げられる。このため、作動媒体20の液量が少ない場合、具体的には、ウィック30よりも第1内面11a側に作動媒体20の液面が位置している場合であっても、貫通孔31内に作動媒体20を吸い上げることができる。その結果、作動媒体20の液量が少ない場合でも、均熱性能及び熱輸送性能の低下が抑制される。 If a convex portion 33 is provided at the periphery of the through hole 31 in a direction approaching the first inner surface 11a, the working medium 20 in contact with the surface surrounded by the inner wall of the convex portion 33 is sucked up into the through hole 31 by capillary force. It will be done. Therefore, when the liquid amount of the working medium 20 is small, specifically, even when the liquid level of the working medium 20 is located closer to the first inner surface 11a than the wick 30, the amount of liquid in the through hole 31 is small. The working medium 20 can be sucked up. As a result, even when the amount of working medium 20 is small, deterioration in heat soaking performance and heat transport performance is suppressed.

 このように、貫通孔31の周縁に、第1内面11aに近接する方向に凸部33が設けられていると、作動媒体20の液量が少ない場合でも、均熱性能及び熱輸送性能の低下が抑制されるため、例えば、製造工程における作動媒体20の注液量の設計値の変更、製造工程における作動媒体20の注液量のばらつき及び使用時における作動媒体20の液量の変動等が均熱性能又は熱輸送性能に与える影響が少ない。つまり、貫通孔31の周縁に、第1内面11aに近接する方向に凸部33が設けられていると、作動媒体20の液量に対するロバスト性が向上すると言える。 In this way, if the convex portion 33 is provided on the periphery of the through hole 31 in the direction approaching the first inner surface 11a, even if the amount of the working medium 20 is small, the thermal uniformity performance and heat transport performance will deteriorate. For example, changes in the design value of the amount of working medium 20 injected in the manufacturing process, variations in the amount of injected working medium 20 in the manufacturing process, fluctuations in the amount of working medium 20 during use, etc. It has little effect on soaking performance or heat transport performance. In other words, if the convex portion 33 is provided on the periphery of the through hole 31 in a direction approaching the first inner surface 11a, it can be said that the robustness against the amount of the working medium 20 is improved.

 凸部32又は凸部33は、貫通孔31の周縁の一部にのみ設けられていてもよいが、貫通孔31の周縁の全体に設けられていることが好ましい。 Although the convex portion 32 or the convex portion 33 may be provided only on a part of the periphery of the through hole 31, it is preferably provided on the entire periphery of the through hole 31.

 凸部32又は凸部33は、例えば、ウィック30を構成する金属箔に対して、プレス加工による打ち抜きを行うことによって形成することができる。その場合、凸部32又は凸部33は、貫通孔31と同時に形成されてもよく、貫通孔31とは別に形成されてもよい。プレス加工による打ち抜きにおいて、打ち抜きの深さ等を適宜調整することによって、凸部32又は凸部33の形状等を調整することができる。なお、打ち抜きの深さとは、例えば、パンチによって打ち抜きを行う際に、打ち抜き方向にどの程度までパンチを押し込みかを意味する。 The convex portion 32 or the convex portion 33 can be formed, for example, by punching the metal foil that constitutes the wick 30 by press working. In that case, the convex portion 32 or the convex portion 33 may be formed at the same time as the through hole 31, or may be formed separately from the through hole 31. In punching by press working, the shape of the convex portion 32 or the convex portion 33 can be adjusted by appropriately adjusting the depth of punching and the like. Note that the punching depth means, for example, how far the punch is pushed in the punching direction when punching is performed.

 凸部32又は凸部33の寸法は特に限定されず、例えば、凸部32又は凸部33の高さが、貫通孔31の径より大きくてもよく、貫通孔31の径より小さくてもよく、貫通孔31の径と同じでもよい。 The dimensions of the convex portion 32 or the convex portion 33 are not particularly limited, and for example, the height of the convex portion 32 or the convex portion 33 may be larger than the diameter of the through hole 31, or may be smaller than the diameter of the through hole 31. , may be the same as the diameter of the through hole 31.

 凸部32の形状は特に限定されず、例えば、厚さ方向Zに沿う断面において、第2内面12aに近接する方向(図4では上方向)に向かって、凸部32の外壁間の距離が狭くなるテーパー形状であってもよく、凸部32の外壁間の距離が広くなる逆テーパー形状であってもよい。これらの場合、凸部32は、厚さ方向Zに沿う断面において、第2内面12a側(図4では上側)に凸な形状であってもよく、第1内面11a側(図4では下側)に凸な形状であってもよい。また、凸部32は、第2内面12a側の端部において、凸部32の開口を狭める蓋部を有してもよい。 The shape of the convex portion 32 is not particularly limited, and for example, in the cross section along the thickness direction Z, the distance between the outer walls of the convex portion 32 increases in the direction approaching the second inner surface 12a (in the upward direction in FIG. 4). It may be a tapered shape that becomes narrower, or it may be an inverted tapered shape that the distance between the outer walls of the convex portion 32 becomes wider. In these cases, the convex portion 32 may have a shape that is convex toward the second inner surface 12a side (upper side in FIG. 4) in the cross section along the thickness direction Z, and may have a convex shape toward the first inner surface 11a side (lower side in FIG. 4). ) may have a convex shape. Further, the convex portion 32 may have a lid portion that narrows the opening of the convex portion 32 at the end on the second inner surface 12a side.

 同様に、凸部33の形状は特に限定されず、例えば、厚さ方向Zに沿う断面において、第1内面11aに近接する方向(図7では下方向)に向かって、凸部33の外壁間の距離が狭くなるテーパー形状であってもよく、凸部33の外壁間の距離が広くなる逆テーパー形状であってもよい。これらの場合、凸部33は、厚さ方向Zに沿う断面において、第2内面12a側(図7では上側)に凸な形状であってもよく、第1内面11a側(図7では下側)に凸な形状であってもよい。また、凸部33は、第1内面11a側の端部において、凸部33の開口を狭める蓋部を有してもよい。 Similarly, the shape of the convex portion 33 is not particularly limited, and for example, in a cross section along the thickness direction Z, the shape between the outer walls of the convex portion 33 is It may be a tapered shape in which the distance between the convex portions 33 is narrow, or it may be a reverse tapered shape in which the distance between the outer walls of the convex portions 33 is widened. In these cases, the convex portion 33 may have a shape that is convex toward the second inner surface 12a side (upper side in FIG. 7) in the cross section along the thickness direction Z, and may have a convex shape toward the first inner surface 11a side (lower side in FIG. 7). ) may have a convex shape. Further, the convex portion 33 may have a lid portion that narrows the opening of the convex portion 33 at the end on the first inner surface 11a side.

 ウィック30が厚さ方向Zに貫通する複数の貫通孔31を有する場合、貫通孔31の周縁には、凸部32及び凸部33が混在して設けられていてもよく、凸部32及び凸部33が設けられていなくてもよい。 When the wick 30 has a plurality of through holes 31 penetrating in the thickness direction Z, the protrusions 32 and the protrusions 33 may be provided at the periphery of the through hole 31 in a mixed manner. The portion 33 may not be provided.

[第2実施形態]
 本発明の第2実施形態に係る熱拡散デバイスでは、シート部材がウィックと異なる部材である。したがって、ウィックとは別にシート部材が存在する。
[Second embodiment]
In the heat diffusion device according to the second embodiment of the present invention, the sheet member is a member different from the wick. Therefore, a sheet member exists separately from the wick.

 図8は、本発明の第2実施形態に係る熱拡散デバイスの一例を模式的に示す断面図である。 FIG. 8 is a cross-sectional view schematically showing an example of a heat diffusion device according to the second embodiment of the present invention.

 図8に示すベーパーチャンバー(熱拡散デバイス)2は、気密状態に密閉された中空の筐体10を備える。筐体10は、厚さ方向Zに対向する第1内面11a及び第2内面12aを有する。筐体10には、内部空間が設けられている。ベーパーチャンバー2は、さらに、筐体10の内部空間に封入された作動媒体20と、筐体10の内部空間に配置されたシート状のウィック30と、筐体10の内部空間に配置されたシート部材35と、ウィック30と一体化されている複数の第1支持体40と、シート部材35と一体化されている複数の第2支持体50と、を備える。 The vapor chamber (thermal diffusion device) 2 shown in FIG. 8 includes a hollow casing 10 that is hermetically sealed. The housing 10 has a first inner surface 11a and a second inner surface 12a facing each other in the thickness direction Z. The housing 10 is provided with an internal space. The vapor chamber 2 further includes a working medium 20 sealed in the internal space of the housing 10 , a sheet-like wick 30 disposed in the internal space of the housing 10 , and a sheet disposed in the internal space of the housing 10 . It includes a member 35, a plurality of first supports 40 integrated with the wick 30, and a plurality of second supports 50 integrated with the sheet member 35.

 図8に示すベーパーチャンバー2は、シート部材35がウィック30と異なる部材であり、第2支持体50がシート部材35と一体化されている点を除いて、図2に示すベーパーチャンバー1と共通の構成を有する。 The vapor chamber 2 shown in FIG. 8 is the same as the vapor chamber 1 shown in FIG. 2 except that the sheet member 35 is a different member from the wick 30 and the second support body 50 is integrated with the sheet member 35. It has the following configuration.

 ウィック30は、厚さ方向Zに貫通する複数の貫通孔31を有してもよい。 The wick 30 may have a plurality of through holes 31 penetrating in the thickness direction Z.

 シート部材35を構成する材料は、特に限定されないが、好ましくは金属であり、例えば銅、ニッケル、アルミニウム、マグネシウム、チタン、鉄、又はそれらを主成分とする合金等であり、特に好ましくは銅である。シート部材35を構成する材料は、筐体10を構成する材料と同じであってもよく、異なっていてもよい。また、シート部材35を構成する材料は、ウィック30を構成する材料と同じであってもよく、異なっていてもよい。 The material constituting the sheet member 35 is not particularly limited, but is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing these as main components, and particularly preferably copper. be. The material constituting the sheet member 35 may be the same as the material constituting the housing 10, or may be different. Furthermore, the material forming the sheet member 35 may be the same as or different from the material forming the wick 30.

 シート部材35の大きさ及び形状は、特に限定されないが、例えば、筐体10の内部空間において連続してシート部材35が配置されていることが好ましい。厚さ方向Zから見て、筐体10の内部空間の全体にシート部材35が配置されていてもよく、厚さ方向Zから見て、筐体10の内部空間の一部にシート部材35が配置されていてもよい。シート部材35の大きさ及び形状は、ウィック30の大きさ及び形状と同じであってもよく、異なっていてもよい。 Although the size and shape of the sheet member 35 are not particularly limited, it is preferable, for example, that the sheet member 35 is arranged continuously in the internal space of the casing 10. The sheet member 35 may be disposed in the entire internal space of the casing 10 when viewed from the thickness direction Z, or the sheet member 35 may be disposed in a part of the internal space of the casing 10 when viewed from the thickness direction Z. may be placed. The size and shape of the sheet member 35 may be the same as or different from the size and shape of the wick 30.

 シート部材35の厚さは、特に限定されないが、例えば、5μm以上50μm以下である。シート部材35の厚さは、ウィック30の厚さと同じでもよく、ウィック30の厚さより大きくてもよく、ウィック30の厚さより小さくてもよい。 The thickness of the sheet member 35 is not particularly limited, but is, for example, 5 μm or more and 50 μm or less. The thickness of the sheet member 35 may be the same as the thickness of the wick 30, may be greater than the thickness of the wick 30, or may be smaller than the thickness of the wick 30.

 図8に示す例では、シート部材35は、第2内面12aと第2支持体50との間に配置されている。第2支持体50は、ウィック30と接していることが好ましい。 In the example shown in FIG. 8, the sheet member 35 is arranged between the second inner surface 12a and the second support body 50. It is preferable that the second support body 50 is in contact with the wick 30.

 シート部材35は、第2内面12aと接していてもよく、接していなくてもよい。シート部材35が第2内面12aと接している場合、シート部材35は、第2内面12aと接合されていてもよく、接合されていなくてもよい。 The sheet member 35 may or may not be in contact with the second inner surface 12a. When the sheet member 35 is in contact with the second inner surface 12a, the sheet member 35 may or may not be joined to the second inner surface 12a.

 シート部材35は、厚さ方向Zに貫通する貫通孔31を有しないことが好ましい。 It is preferable that the sheet member 35 does not have a through hole 31 penetrating in the thickness direction Z.

 第2支持体50は、図8に示すように、第2内面12aからウィック30に向かって幅が狭くなるテーパー形状を有してもよい。これにより、ウィック30側では第2支持体50の間の流路を広くすることができる。 The second support body 50 may have a tapered shape whose width becomes narrower from the second inner surface 12a toward the wick 30, as shown in FIG. Thereby, the flow path between the second supports 50 can be widened on the wick 30 side.

 第1支持体40及び第2支持体50を形成する方法は特に限定されないが、例えば、ウィック30を構成する金属箔の一部をプレス加工等の加工によって曲げて凹ませることにより、凹んだ部分に第1支持体40を形成するとともに、シート部材35を構成する金属箔の一部をプレス加工等の加工によって曲げて凹ませることにより、凹んだ部分に第2支持体50を形成することができる。第1支持体40の凹んだ部分には蒸気空間が形成されるため、熱伝導率が向上する。なお、金属箔にプレス加工を行う場合、プレス加工の具合によっては、金属箔の一部を曲げた際に凹んだ部分に貫通孔が形成されてもよい。 The method for forming the first support 40 and the second support 50 is not particularly limited, but for example, by bending and recessing a part of the metal foil constituting the wick 30 by processing such as press working, a recessed portion may be formed. By forming the first support body 40 in the recessed part and bending and recessing a part of the metal foil constituting the sheet member 35 by processing such as press working, the second support body 50 can be formed in the recessed part. can. Since a vapor space is formed in the recessed portion of the first support 40, thermal conductivity is improved. Note that when press working is performed on the metal foil, depending on the condition of the press working, a through hole may be formed in a recessed portion when a part of the metal foil is bent.

 プレス加工等の加工を行う前の金属箔の厚さは一定であることが好ましい。ただし、曲げられた部分では金属箔が薄くなることもある。そのため、図8に示す例のように、第1支持体40の厚さがウィック30の厚さと同じであるか、又は、ウィック30の厚さより小さいことが好ましい。また、第2支持体50の厚さがシート部材35の厚さと同じであるか、又は、シート部材35の厚さより小さいことが好ましい。第1支持体40の厚さがウィック30の厚さと同じであるか、又は、ウィック30の厚さより小さく、かつ、第2支持体50の厚さがシート部材35の厚さと同じであるか、又は、シート部材35の厚さより小さいことがより好ましい。 It is preferable that the thickness of the metal foil before being processed such as press working is constant. However, the metal foil may become thinner in bent areas. Therefore, as in the example shown in FIG. 8, it is preferable that the thickness of the first support body 40 is the same as the thickness of the wick 30 or smaller than the thickness of the wick 30. Further, it is preferable that the thickness of the second support body 50 is the same as the thickness of the sheet member 35 or smaller than the thickness of the sheet member 35. The thickness of the first support body 40 is the same as the thickness of the wick 30, or is smaller than the thickness of the wick 30, and the thickness of the second support body 50 is the same as the thickness of the sheet member 35, Alternatively, it is more preferable that the thickness is smaller than the thickness of the sheet member 35.

 ウィック30が厚さ方向Zに貫通する複数の貫通孔31を有する場合、貫通孔31の好ましい配置は第1実施形態と同様である。また、貫通孔31の中心間距離、及び、貫通孔31の径の好ましい範囲についても、第1実施形態と同様である。 When the wick 30 has a plurality of through holes 31 penetrating in the thickness direction Z, the preferred arrangement of the through holes 31 is the same as in the first embodiment. Further, the distance between the centers of the through holes 31 and the preferable range of the diameter of the through holes 31 are also the same as in the first embodiment.

 第1支持体40の好ましい配置は第1実施形態と同様である。また、隣り合う第1支持体40の中心間距離、第1支持体40のウィック30側の端部の高さ方向に垂直な断面の円相当径、及び、第1支持体40の高さの好ましい範囲についても、第1実施形態と同様である。 The preferred arrangement of the first support body 40 is the same as in the first embodiment. In addition, the distance between the centers of adjacent first supports 40 , the equivalent circle diameter of a cross section perpendicular to the height direction of the end of the first support 40 on the wick 30 side, and the height of the first support 40 The preferred range is also the same as in the first embodiment.

 第2支持体50の好ましい配置は第1実施形態と同様である。また、隣り合う第2支持体50の中心間距離、第2支持体50のウィック30側の端部の高さ方向に垂直な断面の円相当径、及び、第2支持体50の高さの好ましい範囲についても、第1実施形態と同様である。 The preferred arrangement of the second support body 50 is the same as in the first embodiment. In addition, the distance between the centers of adjacent second supports 50, the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the second support 50 on the wick 30 side, and the height of the second support 50 The preferred range is also the same as in the first embodiment.

 第1支持体40の高さは、第2支持体50の高さより小さいことが好ましい。 The height of the first support 40 is preferably smaller than the height of the second support 50.

 隣り合う第1支持体40の中心間距離は、隣り合う第2支持体50の中心間距離より小さいことが好ましい。 The distance between the centers of adjacent first supports 40 is preferably smaller than the distance between the centers of adjacent second supports 50.

 第1支持体40のウィック30側の端部の高さ方向に垂直な断面の円相当径は、第2支持体50のウィック30側の端部の高さ方向に垂直な断面の円相当径より小さいことが好ましい。 The equivalent circle diameter of the cross section perpendicular to the height direction of the end of the first support 40 on the wick 30 side is the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the second support 50 on the wick 30 side. Preferably smaller.

 シート部材35がウィック30と異なる部材である場合には、第1支持体40及び第2支持体50の高さ、中心間距離又は円相当径が上記の関係を満たすことにより、ウィック30を構成する金属箔に貫通孔31を形成する際に金属箔が破れにくくなる。 When the sheet member 35 is a member different from the wick 30, the wick 30 is configured so that the height, center-to-center distance, or equivalent circle diameter of the first support 40 and the second support 50 satisfy the above relationship. The metal foil is less likely to be torn when forming the through hole 31 in the metal foil.

 図9は、本発明の第2実施形態に係る熱拡散デバイスを構成するウィック、シート部材、第1支持体及び第2支持体の第1変形例を示す断面図である。 FIG. 9 is a sectional view showing a first modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.

 図9に示す例では、ウィック30Aはウィック30と同様であるが、第1支持体40Aが凹んでいない。 In the example shown in FIG. 9, the wick 30A is similar to the wick 30, but the first support 40A is not recessed.

 ウィック30A及び第1支持体40Aを構成する材料は特に限定されないが、例えば、樹脂、金属、セラミックス、又はそれらの混合物、積層物等が挙げられる。ウィック30A及び第1支持体40Aを構成する材料は金属が好ましい。 The materials constituting the wick 30A and the first support body 40A are not particularly limited, and examples thereof include resins, metals, ceramics, mixtures thereof, and laminates. The material constituting the wick 30A and the first support body 40A is preferably metal.

 ウィック30A及び第1支持体40Aは、例えば、エッチング技術、多層塗りによる印刷技術、その他の多層技術等の方法により作製することができる。 The wick 30A and the first support 40A can be produced by, for example, an etching technique, a printing technique using multilayer coating, or another multilayer technique.

 図10は、本発明の第2実施形態に係る熱拡散デバイスを構成するウィック、シート部材、第1支持体及び第2支持体の第2変形例を示す断面図である。 FIG. 10 is a sectional view showing a second modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.

 図10に示す例では、第1支持体40Bは第1支持体40Aと同様であるが、ウィック30Bが多孔質体から構成される。ウィック30Bが多孔質体から構成されることで、ウィック30Bの毛細管力を向上させることができる。 In the example shown in FIG. 10, the first support 40B is similar to the first support 40A, but the wick 30B is made of a porous material. Since the wick 30B is made of a porous material, the capillary force of the wick 30B can be improved.

 ウィック30Bを構成する多孔質体としては、例えば、金属多孔質焼結体、セラミックス多孔質焼結体等の多孔質焼結体、又は、金属多孔体、セラミックス多孔体、樹脂多孔体等の多孔体が挙げられる。 The porous body constituting the wick 30B is, for example, a porous sintered body such as a porous metal sintered body, a porous ceramic sintered body, or a porous body such as a porous metal body, a porous ceramic body, a porous resin body, etc. One example is the body.

 ウィック30Bは、厚さ方向Zに貫通する貫通孔を有してもよく、有しなくてもよい。 The wick 30B may or may not have a through hole penetrating in the thickness direction Z.

 ウィック30B及び第1支持体40Bは、例えば、金属ペースト又はセラミックスペーストを用いた多層塗りによる印刷技術等の方法により作製することができる。 The wick 30B and the first support body 40B can be produced, for example, by a method such as a printing technique using multilayer coating using metal paste or ceramic paste.

 図11は、本発明の第2実施形態に係る熱拡散デバイスを構成するウィック、シート部材、第1支持体及び第2支持体の第3変形例を示す断面図である。 FIG. 11 is a sectional view showing a third modification of the wick, sheet member, first support, and second support that constitute the heat diffusion device according to the second embodiment of the present invention.

 図11に示す例では、ウィック30C及び第1支持体40Cが多孔質体から構成される。 In the example shown in FIG. 11, the wick 30C and the first support 40C are made of a porous material.

 ウィック30C及び第1支持体40Cを構成する多孔質体としては、例えば、金属多孔質焼結体、セラミックス多孔質焼結体等の多孔質焼結体、又は、金属多孔体、セラミックス多孔体、樹脂多孔体等の多孔体が挙げられる。 The porous bodies constituting the wick 30C and the first support body 40C include, for example, porous sintered bodies such as metal porous sintered bodies and ceramic porous sintered bodies, or metal porous bodies, ceramic porous bodies, Examples include porous bodies such as porous resin bodies.

 ウィック30Cは、厚さ方向Zに貫通する貫通孔を有してもよく、有しなくてもよい。 The wick 30C may or may not have a through hole penetrating in the thickness direction Z.

 ウィック30C及び第1支持体40Cは、例えば、金属ペースト又はセラミックスペーストを用いた多層塗りによる印刷技術等の方法により作製することができる。この際、第1支持体40Cを形成するためのペースト中の金属又はセラミックスの含有量は、ウィック30Cを形成するためのペースト中の金属又はセラミックスの含有量と同じでもよく、ウィック30を形成するためのペースト中の金属又はセラミックスの含有量より少なくてもよく、ウィック30Cを形成するためのペースト中の金属又はセラミックスの含有量より多くてもよい。例えば、第1支持体40Cを形成するためのペースト中の金属又はセラミックスの含有量を、ウィック30Cを形成するためのペースト中の金属又はセラミックスの含有量より多くすることで、第1支持体40Cの密度をウィック30Cの密度より大きくすることができる。その結果、第1支持体40Cの強度を上げることができる。 The wick 30C and the first support 40C can be produced, for example, by a method such as a printing technique using multilayer coating using metal paste or ceramic paste. At this time, the content of metal or ceramics in the paste for forming the first support 40C may be the same as the content of metal or ceramics in the paste for forming the wick 30C, and The content of metal or ceramics in the paste for forming the wick 30C may be lower than that of the metal or ceramics in the paste for forming the wick 30C. For example, by making the content of metal or ceramics in the paste for forming the first support body 40C larger than the content of metal or ceramics in the paste for forming the wick 30C, the first support body 40C The density of the wick 30C can be made larger than that of the wick 30C. As a result, the strength of the first support body 40C can be increased.

 本発明の第2実施形態に係る熱拡散デバイスでは、シート部材及び第2支持体についても、上述したウィック及び第1支持体の変形例と同様の構成を採ることができる。すなわち、図9に示す第1支持体40Aのように、第2支持体が凹んでいなくてもよい。その場合、図10に示すウィック30Bのように、シート部材が多孔質体から構成されてもよい。あるいは、図11に示すウィック30C及び第1支持体40Cのように、シート部材及び第2支持体が多孔質体から構成されてもよい。 In the heat diffusion device according to the second embodiment of the present invention, the sheet member and the second support can also have the same configuration as the modified example of the wick and the first support described above. That is, the second support body does not need to be recessed like the first support body 40A shown in FIG. In that case, the sheet member may be made of a porous material, like a wick 30B shown in FIG. 10. Alternatively, the sheet member and the second support may be made of a porous body, as in the wick 30C and the first support 40C shown in FIG.

 本発明の第2実施形態に係る熱拡散デバイスにおいて、シート部材は、多孔構造を有しないことが好ましいが、ウィックと同様に多孔構造を有してもよい。その場合、シート部材は、ウィックと同じ多孔構造を有してもよく、ウィックと異なる多孔構造を有してもよい。シート部材が多孔構造を有する場合、シート部材は、第2内面と第2支持体との間に配置されてもよく、ウィックと第2支持体との間に配置されてもよい。 In the heat diffusion device according to the second embodiment of the present invention, the sheet member preferably does not have a porous structure, but may have a porous structure similarly to the wick. In that case, the sheet member may have the same porous structure as the wick, or may have a different porous structure from the wick. When the sheet member has a porous structure, the sheet member may be arranged between the second inner surface and the second support, or between the wick and the second support.

[その他の実施形態]
 本発明の熱拡散デバイスは、上記実施形態に限定されるものではなく、熱拡散デバイスの構成、製造条件等に関し、本発明の範囲内において、種々の応用、変形を加えることが可能である。
[Other embodiments]
The heat diffusion device of the present invention is not limited to the above-described embodiments, and various applications and modifications can be made within the scope of the present invention regarding the configuration, manufacturing conditions, etc. of the heat diffusion device.

 本発明の熱拡散デバイスにおいて、筐体は、1個の蒸発部を有してもよく、複数の蒸発部を有してもよい。すなわち、筐体の外壁面には、1個の熱源が配置されてもよく、複数の熱源が配置されてもよい。 In the heat diffusion device of the present invention, the casing may have one evaporation section or a plurality of evaporation sections. That is, one heat source may be arranged on the outer wall surface of the casing, or a plurality of heat sources may be arranged.

 本発明の熱拡散デバイスにおいて、筐体が第1シート及び第2シートから構成される場合、第1シートと第2シートとは、端部が一致するように重なっていてもよいし、端部がずれて重なっていてもよい。 In the heat diffusion device of the present invention, when the casing is composed of a first sheet and a second sheet, the first sheet and the second sheet may overlap so that their edges coincide, or may be shifted and overlap.

 本発明の熱拡散デバイスにおいて、筐体が第1シート及び第2シートから構成される場合、第1シートを構成する材料と、第2シートを構成する材料とは異なっていてもよい。例えば、強度の高い材料を第1シートに用いることにより、筐体にかかる応力を分散させることができる。また、両者の材料を異なるものとすることにより、一方のシートで一の機能を得、他方のシートで他の機能を得ることができる。上記の機能としては、特に限定されないが、例えば、熱伝導機能、電磁波シールド機能等が挙げられる。 In the heat diffusion device of the present invention, when the casing is composed of a first sheet and a second sheet, the material constituting the first sheet and the material constituting the second sheet may be different. For example, by using a material with high strength for the first sheet, stress applied to the housing can be dispersed. Moreover, by using different materials for both sheets, one function can be obtained with one sheet, and another function can be obtained with the other sheet. The above-mentioned functions are not particularly limited, but include, for example, a heat conduction function, an electromagnetic wave shielding function, and the like.

 本発明の熱拡散デバイスは、放熱を目的として電子機器に搭載され得る。したがって、本発明の熱拡散デバイスを備える電子機器も本発明の1つである。本発明の電子機器としては、例えばスマートフォン、タブレット端末、ノートパソコン、ゲーム機器、ウェアラブルデバイス等が挙げられる。本発明の熱拡散デバイスは上記のとおり、外部動力を必要とせず自立的に作動し、作動媒体の蒸発潜熱及び凝縮潜熱を利用して、二次元的に高速で熱を拡散することができる。そのため、本発明の熱拡散デバイスを備える電子機器により、電子機器内部の限られたスペースにおいて、放熱を効果的に実現することができる。 The heat diffusion device of the present invention can be installed in electronic equipment for the purpose of heat radiation. Therefore, electronic equipment including the heat diffusion device of the present invention is also one of the present inventions. Examples of the electronic device of the present invention include a smartphone, a tablet terminal, a notebook computer, a game device, a wearable device, and the like. As described above, the heat diffusion device of the present invention operates independently without requiring external power, and can diffuse heat two-dimensionally at high speed by utilizing the latent heat of vaporization and latent heat of condensation of the working medium. Therefore, an electronic device including the heat diffusion device of the present invention can effectively dissipate heat in a limited space inside the electronic device.

 本明細書には、以下の内容が開示されている。 The following contents are disclosed in this specification.

<1>
 厚さ方向に対向する第1内面及び第2内面を有し、かつ、内部空間が設けられた筐体と、
 上記筐体の上記内部空間に封入された作動媒体と、
 上記筐体の上記内部空間に配置されたシート状のウィックと、
 上記筐体の上記内部空間に配置され、上記ウィックと同一の又は異なる部材であるシート部材と、
 上記ウィックと一体化されている複数の第1支持体と、
 上記シート部材と一体化されている複数の第2支持体と、を備え、
 上記ウィックは、上記第1支持体を介して上記第1内面から離れているとともに、上記第2支持体を介して上記第2内面から離れている、熱拡散デバイス。
<1>
A casing having a first inner surface and a second inner surface facing each other in the thickness direction and provided with an internal space;
a working medium sealed in the internal space of the housing;
a sheet-like wick disposed in the internal space of the housing;
a sheet member that is disposed in the internal space of the casing and is the same or a different member from the wick;
a plurality of first supports integrated with the wick;
a plurality of second supports integrated with the sheet member;
The wick is spaced apart from the first inner surface via the first support and spaced from the second inner surface via the second support.

<2>
 上記シート部材は、上記ウィックと同一の部材である、<1>に記載の熱拡散デバイス。
<2>
The heat diffusion device according to <1>, wherein the sheet member is the same member as the wick.

<3>
 上記シート部材は、上記ウィックと異なる部材である、<1>に記載の熱拡散デバイス。
<3>
The heat diffusion device according to <1>, wherein the sheet member is a member different from the wick.

<4>
 上記第1支持体の高さは、上記第2支持体の高さより小さい、<1>~<3>のいずれか1つに記載の熱拡散デバイス。
<4>
The heat diffusion device according to any one of <1> to <3>, wherein the height of the first support is smaller than the height of the second support.

<5>
 隣り合う上記第1支持体の中心間距離は、隣り合う上記第2支持体の中心間距離より小さい、<1>~<4>のいずれか1つに記載の熱拡散デバイス。
<5>
The heat diffusion device according to any one of <1> to <4>, wherein the distance between the centers of the adjacent first supports is smaller than the distance between the centers of the adjacent second supports.

<6>
 上記第1支持体の上記ウィック側の端部の高さ方向に垂直な断面の円相当径は、上記第2支持体の上記ウィック側の端部の高さ方向に垂直な断面の円相当径より小さい、<1>~<5>のいずれか1つに記載の熱拡散デバイス。
<6>
The equivalent circle diameter of the cross section perpendicular to the height direction of the wick side end of the first support is the circle equivalent diameter of the cross section perpendicular to the height direction of the wick side end of the second support. The heat diffusion device according to any one of <1> to <5>, which is smaller.

<7>
 上記第1支持体の厚さが上記ウィックの厚さと同じであるか、又は、上記ウィックの厚さより小さい、<1>~<6>のいずれか1つに記載の熱拡散デバイス。
<7>
The heat diffusion device according to any one of <1> to <6>, wherein the thickness of the first support is the same as the thickness of the wick or smaller than the thickness of the wick.

<8>
 上記第2支持体の厚さが上記シート部材の厚さと同じであるか、又は、上記シート部材の厚さより小さい、<1>~<7>のいずれか1つに記載の熱拡散デバイス。
<8>
The heat diffusion device according to any one of <1> to <7>, wherein the thickness of the second support is the same as the thickness of the sheet member or smaller than the thickness of the sheet member.

<9>
 上記ウィックは、上記厚さ方向に貫通する複数の貫通孔を有する、<1>~<8>のいずれか1つに記載の熱拡散デバイス。
<9>
The heat diffusion device according to any one of <1> to <8>, wherein the wick has a plurality of through holes penetrating in the thickness direction.

<10>
 上記貫通孔の周縁には、上記第2内面に近接する方向に凸部が設けられている、<9>に記載の熱拡散デバイス。
<10>
The heat diffusion device according to <9>, wherein a convex portion is provided on a peripheral edge of the through hole in a direction approaching the second inner surface.

<11>
 上記貫通孔の周縁には、上記第1内面に近接する方向に凸部が設けられている、<9>又は<10>に記載の熱拡散デバイス。
<11>
The heat diffusion device according to <9> or <10>, wherein a convex portion is provided on a peripheral edge of the through hole in a direction approaching the first inner surface.

<12>
 <1>~<11>のいずれか1つに記載の熱拡散デバイスを備える、電子機器。
<12>
An electronic device comprising the heat diffusion device according to any one of <1> to <11>.

 本発明の熱拡散デバイスは、携帯情報端末等の分野において、広範な用途に使用できる。例えば、CPU等の熱源の温度を下げ、電子機器の使用時間を延ばすために使用することができ、スマートフォン、タブレット端末、ノートパソコン等に使用することができる。 The heat diffusion device of the present invention can be used for a wide range of applications in the field of mobile information terminals and the like. For example, it can be used to lower the temperature of a heat source such as a CPU and extend the usage time of electronic devices, and can be used for smartphones, tablet terminals, notebook computers, etc.

 1、2 ベーパーチャンバー(熱拡散デバイス)
 10 筐体
 11 第1シート
 11a 第1内面
 12 第2シート
 12a 第2内面
 20 作動媒体
 30、30A、30B、30C ウィック
 31 貫通孔
 32、33 凸部
 35 シート部材
 40、40A、40B、40C 第1支持体
 50 第2支持体
 HS 熱源
 X 幅方向
 Y 長さ方向
 Z 厚さ方向
1, 2 Vapor chamber (thermal diffusion device)
10 Housing 11 First sheet 11a First inner surface 12 Second sheet 12a Second inner surface 20 Working medium 30, 30A, 30B, 30C Wick 31 Through hole 32, 33 Convex portion 35 Sheet member 40, 40A, 40B, 40C First Support body 50 Second support body HS Heat source X Width direction Y Length direction Z Thickness direction

Claims (12)

 厚さ方向に対向する第1内面及び第2内面を有し、かつ、内部空間が設けられた筐体と、
 前記筐体の前記内部空間に封入された作動媒体と、
 前記筐体の前記内部空間に配置されたシート状のウィックと、
 前記筐体の前記内部空間に配置され、前記ウィックと同一の又は異なる部材であるシート部材と、
 前記ウィックと一体化されている複数の第1支持体と、
 前記シート部材と一体化されている複数の第2支持体と、を備え、
 前記ウィックは、前記第1支持体を介して前記第1内面から離れているとともに、前記第2支持体を介して前記第2内面から離れている、熱拡散デバイス。
A casing having a first inner surface and a second inner surface facing each other in the thickness direction and provided with an internal space;
a working medium sealed in the internal space of the housing;
a sheet-like wick disposed in the internal space of the housing;
a sheet member that is disposed in the internal space of the casing and is the same as or different from the wick;
a plurality of first supports integrated with the wick;
a plurality of second supports integrated with the sheet member,
A heat spreading device, wherein the wick is spaced from the first inner surface via the first support and spaced from the second inner surface via the second support.
 前記シート部材は、前記ウィックと同一の部材である、請求項1に記載の熱拡散デバイス。 The heat diffusion device according to claim 1, wherein the sheet member is the same member as the wick.  前記シート部材は、前記ウィックと異なる部材である、請求項1に記載の熱拡散デバイス。 The heat diffusion device according to claim 1, wherein the sheet member is a member different from the wick.  前記第1支持体の高さは、前記第2支持体の高さより小さい、請求項1~3のいずれか1項に記載の熱拡散デバイス。 The heat diffusion device according to any one of claims 1 to 3, wherein the height of the first support is smaller than the height of the second support.  隣り合う前記第1支持体の中心間距離は、隣り合う前記第2支持体の中心間距離より小さい、請求項1~4のいずれか1項に記載の熱拡散デバイス。 The heat diffusion device according to any one of claims 1 to 4, wherein the distance between the centers of the adjacent first supports is smaller than the distance between the centers of the adjacent second supports.  前記第1支持体の前記ウィック側の端部の高さ方向に垂直な断面の円相当径は、前記第2支持体の前記ウィック側の端部の高さ方向に垂直な断面の円相当径より小さい、請求項1~5のいずれか1項に記載の熱拡散デバイス。 The equivalent circle diameter of the cross section perpendicular to the height direction of the wick side end of the first support is the circle equivalent diameter of the cross section perpendicular to the height direction of the wick side end of the second support. A heat spreading device according to any one of claims 1 to 5, which is smaller.  前記第1支持体の厚さが前記ウィックの厚さと同じであるか、又は、前記ウィックの厚さより小さい、請求項1~6のいずれか1項に記載の熱拡散デバイス。 The heat diffusion device according to any one of claims 1 to 6, wherein the thickness of the first support is the same as the thickness of the wick or smaller than the thickness of the wick.  前記第2支持体の厚さが前記シート部材の厚さと同じであるか、又は、前記シート部材の厚さより小さい、請求項1~7のいずれか1項に記載の熱拡散デバイス。 The heat diffusion device according to any one of claims 1 to 7, wherein the thickness of the second support is the same as the thickness of the sheet member or smaller than the thickness of the sheet member.  前記ウィックは、前記厚さ方向に貫通する複数の貫通孔を有する、請求項1~8のいずれか1項に記載の熱拡散デバイス。 The heat diffusion device according to any one of claims 1 to 8, wherein the wick has a plurality of through holes penetrating in the thickness direction.  前記貫通孔の周縁には、前記第2内面に近接する方向に凸部が設けられている、請求項9に記載の熱拡散デバイス。 The heat diffusion device according to claim 9, wherein a periphery of the through hole is provided with a convex portion in a direction approaching the second inner surface.  前記貫通孔の周縁には、前記第1内面に近接する方向に凸部が設けられている、請求項9又は10に記載の熱拡散デバイス。 The heat diffusion device according to claim 9 or 10, wherein a periphery of the through hole is provided with a convex portion in a direction approaching the first inner surface.  請求項1~11のいずれか1項に記載の熱拡散デバイスを備える、電子機器。 An electronic device comprising the heat diffusion device according to any one of claims 1 to 11.
PCT/JP2023/023601 2022-07-20 2023-06-26 Heat diffusing device, and electronic apparatus WO2024018846A1 (en)

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Citations (5)

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US20090236085A1 (en) * 2008-03-19 2009-09-24 Chin-Wen Wang Method for manufacturing supporting body within an isothermal plate and product of the same
CN201715908U (en) * 2010-06-07 2011-01-19 锘威科技(深圳)有限公司 Integral sintered flat heat pipe
US20110168359A1 (en) * 2010-01-08 2011-07-14 Cooler Master Co., Ltd. Heat-dissipating plate
CN103398613A (en) * 2013-07-22 2013-11-20 施金城 Vapor chamber and method for manufacturing same
WO2018198360A1 (en) * 2017-04-28 2018-11-01 株式会社村田製作所 Vapor chamber

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090236085A1 (en) * 2008-03-19 2009-09-24 Chin-Wen Wang Method for manufacturing supporting body within an isothermal plate and product of the same
US20110168359A1 (en) * 2010-01-08 2011-07-14 Cooler Master Co., Ltd. Heat-dissipating plate
CN201715908U (en) * 2010-06-07 2011-01-19 锘威科技(深圳)有限公司 Integral sintered flat heat pipe
CN103398613A (en) * 2013-07-22 2013-11-20 施金城 Vapor chamber and method for manufacturing same
WO2018198360A1 (en) * 2017-04-28 2018-11-01 株式会社村田製作所 Vapor chamber

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