WO2018171166A1 - Top-emitting organic light-emitting device and component thereof - Google Patents

Top-emitting organic light-emitting device and component thereof Download PDF

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WO2018171166A1
WO2018171166A1 PCT/CN2017/105493 CN2017105493W WO2018171166A1 WO 2018171166 A1 WO2018171166 A1 WO 2018171166A1 CN 2017105493 W CN2017105493 W CN 2017105493W WO 2018171166 A1 WO2018171166 A1 WO 2018171166A1
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layer
sub
emitting
light
organic
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French (fr)
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Dan Wang
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Priority to US15/761,493 priority patent/US10446794B2/en
Priority to JP2019548455A priority patent/JP7142640B2/ja
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/81Anodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/85Arrangements for extracting light from the devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/85Arrangements for extracting light from the devices
    • H10K50/858Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301Details of OLEDs
    • H10K2102/302Details of OLEDs of OLED structures
    • H10K2102/3023Direction of light emission
    • H10K2102/3026Top emission
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H10K50/125OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
    • H10K50/13OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light comprising stacked EL layers within one EL unit
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/50OLEDs integrated with light modulating elements, e.g. with electrochromic elements, photochromic elements or liquid crystal elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/649Aromatic compounds comprising a hetero atom
    • H10K85/657Polycyclic condensed heteroaromatic hydrocarbons
    • H10K85/6572Polycyclic condensed heteroaromatic hydrocarbons comprising only nitrogen in the heteroaromatic polycondensed ring system, e.g. phenanthroline or carbazole

Definitions

  • the present disclosure generally relates to the field of organic electroluminescent display technology and, more particularly, to a component of top-emitting organic light-emitting diode (OLED) device and a top-emitting OLED device.
  • OLED organic light-emitting diode
  • OLED Organic Light-Emitting Diode
  • LCD Organic Light-Emitting Diode
  • advantages e.g., active light-emitting capability, good temperature characteristics, low power consumption, fast response, flexibility, ultra-thin thickness, and low cost.
  • OLED flat panel display technology is moving toward a phase at which mass production technology is increasingly mature and market demand is rapidly growing.
  • a small organic molecule material used in a light extraction layer in an OLED device may be sensitive to moisture and oxygen. Further, the light extraction layer and a thin film encapsulation (TFE) layer above the light extraction layer may have a poor refractive index matching, resulting in a loss of light through the TFE layer.
  • TFE thin film encapsulation
  • the present disclosure provides a component of top-emitting organic light-emitting device.
  • the component includes an anode, a light-emitting layer over the anode, a cathode over the light-emitting layer, a light extraction layer over the cathode, and an encapsulation layer over the light extraction layer.
  • a material of the light extraction layer includes an inorganic material.
  • Another aspect of the present disclosure provides a method for fabricating a component of top-emitting organic light-emitting device.
  • the method includes forming an anode over a substrate, forming a light-emitting layer over the anode, forming a cathode over the light-emitting layer, forming a light extraction layer over the cathode, and forming an encapsulation layer over the light extraction layer.
  • a material of the light extraction layer includes an inorganic material.
  • FIG. 1 illustrates a schematic view of an exemplary component of top-emitting organic light-emitting diode (OLED) device according to various disclosed embodiments of the present disclosure
  • FIG. 2 illustrates a schematic view of another exemplary component of top-emitting OLED device according to various disclosed embodiments of the present disclosure
  • FIG. 3 illustrates a schematic view of another exemplary component of top-emitting OLED device according to various disclosed embodiments of the present disclosure
  • FIG. 4 illustrates a schematic view of another exemplary component of top-emitting OLED device according to various disclosed embodiments of the present disclosure
  • FIG. 5 illustrates a schematic view of an exemplary top-emitting OLED device according to various disclosed embodiments of the present disclosure
  • FIG. 6 illustrates a comparison between optical output results of an exemplary component of top-emitting OLED device and a reference component of top-emitting OLED device
  • FIG. 7 illustrates a view of luminance versus thickness of epoxy resin layer
  • FIG. 8 illustrates a comparison between optical output results of another exemplary component of top-emitting OLED device and a reference component of top-emitting OLED device
  • FIG. 9 illustrates a view of current efficiency versus thickness of epoxy resin layer
  • FIG. 10 illustrates a comparison between optical output results of another exemplary component of top-emitting OLED device and a reference component of top-emitting OLED device
  • FIG. 11 illustrates a view of luminance versus thickness of corrugated polymer layer
  • FIG. 12 illustrates a flow chart of an exemplary fabrication method for an exemplary component of top-emitting organic light-emitting device according to various disclosed embodiments of the present disclosure
  • FIG. 13 illustrates a flow chart of another exemplary fabrication method for an exemplary component of top-emitting organic light-emitting device according to various disclosed embodiments of the present disclosure
  • FIG. 14 illustrates a flow chart of another exemplary fabrication method for an exemplary component of top-emitting organic light-emitting device according to various disclosed embodiments of the present disclosure.
  • FIG. 15 illustrates a flow chart of another exemplary fabrication method for an exemplary component of top-emitting organic light-emitting device according to various disclosed embodiments of the present disclosure.
  • OLED devices can be divided into three types: bottom-emitting OLED devices, dual-side-emitting OLED devices, and top-emitting OLED devices.
  • a bottom-emitting OLED device is an OLED device that emits light through a substrate of the OLED device.
  • a dual-side-emitting OLED device is an OLED device that emits light through both the substrate and a top of the device.
  • a top-emitting OLED device is an OLED device that emits light through the top of the device.
  • the top-emitting OLED devices have broad applications, and may be have one of two types of structures: a structure having independent Red-Green-Blue (RGB) color pixels, and a structure including a white light source and color films.
  • the top-emitting OLED device may have a high luminous efficiency, a high color purity, etc.
  • a waveguide mode and a surface plasma mode may exist, causing an external quantum efficiency of the top-emitting OLED device generally to be only at approximately 20%.
  • the external quantum efficiency may be improved by methods such as an external light extraction or an internal light extraction.
  • the external light extraction method may generally use an organic capping layer having a high refractive index as a light extraction layer.
  • the light extraction layer may include an aromatic-ring organic material that is sensitive to moisture and oxygen or another organic material that is sensitive to moisture and oxygen.
  • an inorganic/organic/inorganic thin film structure may generally need to be deposited over the light extraction layer of the top-emitting OLED device to serve as a thin film encapsulation (TFE) layer for the electrode material and the light extraction layer, and to shield moisture and oxygen.
  • TFE thin film encapsulation
  • the light extraction layer may generally use a small organic molecule material that can be formed by evaporation, e.g., N, N'-Bis- (1-naphthalenyl) -N, N'-bis-phenyl- (1, 1'-biphenyl) -4, 4'-diamine (NPB) , 4, 4'-Bis (N-carbazolyl) -1, 1'-biphenyl (CBP) , etc.
  • the organic small molecular materials may be sensitive to moisture and oxygen.
  • the light extraction layer and the TFE layer located above the light extraction layer may have a poor refractive index matching, hindering light escape. Generally, a loss of the light through the TFE layer may be approximately 8%.
  • FIG. 1 illustrates a schematic view of an exemplary component of top-emitting OLED device according to various disclosed embodiments of the present disclosure.
  • the exemplary component includes an anode 1, a light-emitting layer 2 disposed over the anode 1, a cathode 3 disposed over the light-emitting layer 2, a light extraction layer 4 disposed over the cathode 3, and an encapsulation layer 5 disposed over the light extraction layer 4.
  • a material of the light extraction layer 4 may include a metal oxide.
  • the encapsulation layer 5 includes a first organic sub-layer 501 disposed over the light extraction layer 4 and a first inorganic sub-layer 502 disposed over the first organic sub-layer 501.
  • a material of the light extraction layer in the component of top-emitting OLED device of the present disclosure may include a metal oxide.
  • the metal oxide may have a higher refractive index than an organic material having an aromatic ring used in the light extraction layer in the existing technology.
  • the metal oxide may have more a stable chemical property than the organic material having an aromatic ring in the existing technology.
  • the metal oxide may not easily have a chemical reaction with moisture and oxygen in the air, making the chemical properties of the light extraction layer more stable.
  • the metal oxide may have a smaller molecular size and more closely packed molecules, and may be hard for moisture and oxygen to pass through. Accordingly, the light extraction layer may protect the underlying electrodes and light-emitting layer.
  • the light extraction layer may have a refractive index matching that of the encapsulation layer, which includes the first organic sub-layer having a relatively low refractive index and the first inorganic sub-layer having a relatively high refractive index.
  • the first organic sub-layer has the relatively low refractive index and the first inorganic sub-layer has the relatively high refractive index such that the first organic sub-layer and the first inorganic sub-layer can match with each other to form a unit for improving light transmittance.
  • the anode, the light-emitting layer, and the cathode are not restricted, and may be selected according to various application scenarios.
  • materials of the anode, the light-emitting layer, and the cathode of the disclosure may include materials of an anode, a light-emitting layer, and a cathode of a top-emitting OLED device in the existing technology, respectively.
  • the material of the anode may include, for example, silver (Ag) , indium-tin-oxide/silver/indium-tin-oxide (ITO/Ag /ITO) , or nickel-chromium alloy.
  • the material of the light-emitting layer can include, for example, tris (8-quinolinolato) aluminum (Alq3) , which may improve an electron injection at a cathode of the top-emitting OLED device.
  • the light-emitting layer may include different light-emitting regions, e.g., a red light-emitting region emitting red light, a green light-emitting region emitting green light, and a blue light-emitting region emitting blue light.
  • the material of the cathode can include, for example, a translucent cathode material.
  • the material of the cathode can include, for example, copper phthalocyanine (CuPc) or magnesium-silver alloy.
  • the metal oxide may include at least one of aluminum oxide, zinc oxide, zirconium oxide, or titanium oxide.
  • a refractive index of a light extraction layer containing the metal oxide may generally range from approximately 1.7 to approximately 2.1.
  • the metal oxide may include zinc oxide.
  • the light extraction layer containing zinc oxide may have a relatively high refractive index of approximately 2.0.
  • a thickness of the light extraction layer may be, for example, approximately 50 nm.
  • Atomic Layer Deposition (ALD) method may be used to prepare a dense atomic-layer deposition film by controlling precursors to enter into a reaction chamber alternately. Due to the existence of time difference, two precursors may not exist simultaneously in the reaction chamber. Thus, reactions in the manner of chemical vapor deposition (CVD) may be prevented.
  • an inert gas such as argon, may be introduced to expel at least some of one or more first reaction products, e.g., one or more reaction by-products, and excess precursor. Only one layer of atoms may be grown per reaction due to a self-limiting nature of the reaction.
  • a precursor trimethylaluminum (TMA) may be introduced into the reaction chamber in a form of pulses. TMA may react with the hydroxyl on the Si substrate.
  • the reaction product (—O—) Al (CH 3 ) 2 may be adsorbed at the surface, and a gas reaction product CH 4 and excess precursor TMA may be expelled out from the reaction chamber by introducing an inert gas. Then a precursor water vapor may be introduced to react with the reaction product adsorbed at the surface, i.e., (—O—) Al (CH 3 ) 2 .
  • reaction products e.g., one or more reaction by-products, and excess water vapor may be expelled out of the reaction chamber by introducing an inert gas.
  • one cycle is completed. Then a next cycle may continue.
  • a deposition temperature of an Al 2 O 3 film may generally be, for example, approximately 80 °C.
  • a thickness of the film may depend on the number of cycles. In some embodiments, a 1 nm-thick film may need 10 cycles to complete.
  • diethyl zinc as a zinc precursor and water as an oxygen precursor may be introduced alternately into a reaction chamber to form the ZnO film.
  • an exposure time of a precursor may be approximately 60 s
  • a reaction environment may include N 2
  • a temperature may be approximately 130°.
  • a material of the first organic sub-layer may include, for example, an epoxy resin.
  • the first organic sub-layer may have a smaller refractive index than the light extraction layer, such that a refractive index gradient may be formed to suppress a total reflection of light.
  • a thickness of the first organic sub-layer may be, for example, approximately 1 ⁇ m to approximately 8 ⁇ m, and a refractive index of the first organic sub-layer may be approximately 1.56.
  • a material of the first inorganic sub-layer may include, for example, at least one of a silicon oxide, a silicon nitride, or a silicon oxynitride.
  • the first inorganic sub-layer may have a refractive index higher than the first organic sub-layer, such that a light transmittance may be improved.
  • a material of the first inorganic sub-layer may include, for example, a silicon nitride (SiN) .
  • a refractive index of the first inorganic sub-layer may be, for example, approximately 1.84.
  • a thickness of the first inorganic sub-layer may be, for example, approximately 800 nm.
  • FIG. 2 illustrates a schematic view of another exemplary component of top-emitting OLED device according to various disclosed embodiments of the present disclosure.
  • the component shown in FIG. 2 is similar to the component shown in FIG. 1, except that in the component shown in FIG. 2, the encapsulation layer 5 further includes a second organic sub-layer 503 disposed over the first inorganic sub-layer 502.
  • a material of the second organic sub-layer 503 can include, for example, a corrugated polymer.
  • the corrugated polymer may include a self-assembled regular array formed by at least one of polystyrene, polymethylmethacrylate (PMMA) , phenolic resin, or another multi-block polymer having a similar structure.
  • PMMA polymethylmethacrylate
  • a thickness of the second organic sub-layer may generally be approximately 1 ⁇ m to approximately 8 ⁇ m, and may have nearly no influence on light output.
  • the corrugated polymer may have a periodic wrinkle structure, and may have a scattering effect on outputted light, thereby reducing a total reflection of light and improving a transmittance of light.
  • FIG. 3 shows another exemplary component of top-emitting OLED device consistent with embodiments of the disclosure.
  • the component includes the anode 1, the light-emitting layer 2 disposed over the anode 1, the cathode 3 disposed over the light-emitting layer 2, the light extraction layer 4 disposed over the cathode 3, and the encapsulation layer 5 disposed over the light extraction layer 4.
  • a material of the light extraction layer 4 may include a metal oxide.
  • the encapsulation layer 5 includes a third organic sub-layer 504, and a material of the third organic sub-layer may include a corrugated polymer.
  • a material of the light extraction layer in the component of top-emitting OLED device of the present disclosure may include a metal oxide having a higher refractive index than an organic material having an aromatic ring used in the light extraction layer in the existing technology.
  • the metal oxide may have a more stable chemical property than the organic material having an aromatic ring in the existing technology.
  • the metal oxide may not easily have a chemical reaction with moisture and oxygen in the air, making the chemical properties of the light extraction layer more stable.
  • the metal oxide may have a smaller molecular size and more closely packed molecules, and may be hard for moisture and oxygen to pass through. Accordingly, the light extraction layer may protect the underlying electrodes and light-emitting layer.
  • the light extraction layer in conjunction with the third organic sub-layer in the encapsulation layer above the light extraction layer, may suppress a total reflection of light and improve a transmittance of light.
  • the anode, the light-emitting layer, and the cathode are not restricted, and may be selected according to various application scenarios.
  • Materials of the anode, the light-emitting layer, and the cathode may include, for example, materials of an anode, a light-emitting layer, and a cathode of a top-emitting OLED device in the existing technology, respectively.
  • the anode, the light-emitting layer, and the cathode reference can be made to the above descriptions of the anode, the light-emitting layer and the cathode in described embodiments.
  • the metal oxide may include at least one of an aluminum oxide, a zinc oxide, a zirconium oxide, or a titanium oxide.
  • a refractive index of the light extraction layer containing a metal oxide may generally be approximately 1.7 to approximately 2.1.
  • the metal oxide may include a zinc oxide.
  • the light extraction layer containing zinc oxide may have a relatively high refractive index of approximately 2.0.
  • a thickness of the light extraction layer may be, for example, approximately 50 nm.
  • a material of the third organic sub-layer may include a corrugated polymer.
  • a corrugated polymer for structures and properties of the third organic sub-layer, reference can be made to descriptions of structures and properties of the second organic sub-layer shown in FIG. 2, which are not repeated here.
  • FIG. 4 illustrates a schematic view of another exemplary component of top-emitting OLED device according to various disclosed embodiments of the present disclosure.
  • the encapsulation layer 5 further includes a second inorganic sub-layer 505 between the light extraction layer 4 and the third organic sub-layer 504.
  • a material of the second inorganic sub-layer 505 may include, for example, at least one of a silicon oxide, a silicon nitride, or a silicon oxynitride.
  • the second inorganic sub-layer 505 not only may prevent the solvent from penetrating into the electrode material, but also may serve to further encapsulate the electrodes and the light-emitting layer. Further, the second inorganic sub-layer 505 may have little influence on a light transmittance.
  • the encapsulation layer 5 further includes a third inorganic sub-layer 506 disposed over the third organic sub-layer 504.
  • the third inorganic sub-layer 506 may include, for example, at least one of a silicon oxide, a silicon nitride, or a silicon oxynitride.
  • the present disclosure provides a top-emitting OLED device that includes any one of components of top-emitting OLED device consistent with the disclosure, e.g., any one of the exemplary components described above.
  • the component may be arranged over a substrate of the top-emitting OLED device.
  • the top-emitting OLED device may have a relatively high light transmittance.
  • FIG. 5 illustrates a schematic view of an exemplary top-emitting OLED device 500 according to various disclosed embodiments of the present disclosure.
  • the exemplary top-emitting OLED device 500 includes a component 591 of the disclosure.
  • the component 591 can be, for example, any one of the above-described exemplary components.
  • the top-emitting OLED device 500 may further include other suitable structures.
  • the top-emitting OLED device 500 includes a substrate 592. Any top-emitting OLED device including a component consistent with the disclosure is within the scope of the present disclosure.
  • the components consistent with the disclosure may be formed in vacuum.
  • Example 1 i.e., Example 1 of the disclosure, is described below.
  • a substrate is subject to ultrasonic cleaning in acetone, ethanol, and deionized water successively for 10 minutes, and then dried in an oven.
  • an anode is formed over the substrate by magnetron sputtering.
  • the anode can include, for example, ITO/Ag/ITO layers.
  • the prepared structure on the substrate is then placed in a vacuum evaporation chamber, and a vacuum level is held at approximately 10 -5 Pa.
  • a material is heated and sublimated by a heat source.
  • a light-emitting layer is formed over the anode by evaporation.
  • detailed layer structure can include, for example, hole injection sub-layer /hole transport sub-layer /light-emitting sub-layer /electron transport sub-layer /electron injection sub-layer.
  • a cathode is formed over the light-emitting layer by vacuum evaporation.
  • a thickness of the cathode can be, for example, approximately 14 nm.
  • a material of the cathode can be, for example, a magnesium-silver alloy.
  • a mass ratio of magnesium to silver can be, for example, approximately 2: 8 or approximately 9: 1.
  • a light extraction layer is deposited over the cathode by atomic layer deposition (ALD) .
  • a thickness of the light extraction layer may be, for example, approximately 50nm.
  • a material of the light extraction layer may include, for example, zinc oxide.
  • a first organic sub-layer is deposited over the light extraction layer by ink jet printing.
  • a thickness of the first organic sub-layer may be, for example, approximately 5 ⁇ m.
  • a material of the first organic sub-layer may include, for example, epoxy resin.
  • a first inorganic sub-layer is deposited over the first organic sub-layer by plasma enhanced chemical vapor deposition (PECVD) .
  • the first inorganic sub-layer may have a thickness of approximately 800 nm.
  • a material of the first inorganic sub-layer may include silicon nitride.
  • a component of top-emitting OLED device is thus formed.
  • Example 2 i.e., Example 2 of the disclosure, is described below.
  • Example 2 differs from Example 1 in that, in Example 2, the component of top-emitting OLED device further includes a second organic sub-layer.
  • Polystyrene is self-assembled over the first inorganic sub-layer layer-by-layer by spin coating to form the second organic sub-layer containing a corrugated polymer.
  • Example 3 i.e., Example 3 of the disclosure, is described below.
  • Example 3 of the disclosure has the same anode, light-emitting layer, and cathode as Example 1 of the disclosure. The difference between Example 3 of the disclosure and Example 1 of the disclosure is described below.
  • a second inorganic sub-layer is deposited over the light extraction layer by PECVD.
  • a material of the second inorganic sub-layer may include silicon nitride.
  • PMMA Polymethylmethacrylate
  • a third inorganic sub-layer is deposited over the third organic sub-layer by PECVD.
  • a material of the third inorganic sub-layer may include a silicon nitride.
  • a component of a top-emitting OLED device is thus formed.
  • Reference Example 1 The anode, the light-emitting layer and the cathode of Reference Example 1 are the same as the anode, the light-emitting layer, and the cathode of Example 1 to Example 3 of the disclosure.
  • Reference Example 1 has a different light extraction layer and encapsulation layer as compared to Example 1 to Example 3 of the disclosure. Differences are described in the following.
  • a light extraction layer is formed over the cathode by vacuum evaporation.
  • a material of the light extraction layer may include N, N'-Bis- (1-naphthalenyl) -N, N'-bis-phenyl- (1, 1'-biphenyl) -4, 4'-diamine (NPB) .
  • a thin film encapsulation layer including silicon nitride/hexamethyldisiloxane (HMDSO) /silicon oxynitride is formed over the organic light-emitting layer.
  • a component of top-emitting OLED device is thus formed.
  • Reference Example 1 by using 'setfos' application software. As shown in FIGs. 6, 8, and 10, the components of the top-emitting OLED devices of the present disclosure (Example 1 to Example 3 of the disclosure) have higher transmittances than the component of top-emitting OLED device in the existing technology (Reference Example 1) .
  • FIG. 6 illustrates a comparison between optical output results of an exemplary component of top-emitting OLED device (Example 1) and the reference component of top-emitting OLED device (Reference Example 1) .
  • FIG. 7 illustrates a zoomed-in view of an inset in FIG. 6. The inset is located in an upper right portion of FIG. 6.
  • FIG. 7, i.e., the inset in FIG. 6, illustrates a view of luminance versus thickness of epoxy resin layer in Example 1. As shown in FIG. 7, in a range of approximately 1 ⁇ m to 8 ⁇ m, the thickness of the first organic sub-layer, i.e., the epoxy resin layer, almost has no influence on a luminance of the exemplary component of top-emitting OLED device.
  • FIG. 8 illustrates a comparison between optical output results of another exemplary component of top-emitting OLED device (Example 2) and the reference component of top-emitting OLED device (Reference Example 1) .
  • FIG. 9 illustrates a zoomed-in view of an inset in FIG. 8. The inset is located in an upper right portion of FIG. 8.
  • FIG. 9, i.e., the inset in FIG. 8. illustrates a view of current efficiency versus thickness of epoxy resin layer in Example 2. As shown in FIG. 9, in a range of approximately 1 ⁇ m to 8 ⁇ m, the thickness of the first organic sub-layer, i.e., the epoxy resin layer, almost has no influence on the current efficiency of the exemplary component of top-emitting OLED device.
  • FIG. 10 illustrates a comparison of optical output results of another exemplary component of top-emitting OLED device (Example 3) and the reference component of top-emitting OLED device (Reference Example 1) .
  • FIG. 11 illustrates a zoomed-in view of an inset in FIG. 10. The inset is located in an upper right portion of FIG. 10.
  • FIG. 11 illustrates a view of luminance versus thickness of corrugated polymer layer in Example 3. As shown in FIG. 11, in a range of approximately 1 ⁇ m to 8 ⁇ m, the thickness of the third organic sub-layer, i.e., the corrugated polymer layer, almost has no influence on the luminance of the exemplary component of top-emitting OLED device.
  • FIG. 12 illustrates a flow chart of an exemplary fabrication method for an exemplary component of top-emitting organic light-emitting device according to various disclosed embodiments of the present disclosure. With reference to FIG. 12, the fabrication method is described below.
  • an anode is formed over a substrate.
  • the substrate may be placed in a vacuum chamber, and an anode may be formed over the substrate by magnetron sputtering.
  • the anode can include, for example, ITO/Ag/ITO layers.
  • a light-emitting layer is formed over the anode.
  • the light-emitting layer may be formed over the anode by, for example, evaporation.
  • the light-emitting layer can include, for example, structure of hole injection sub-layer /hole transport sub-layer /light-emitting sub-layer /electron transport sub-layer /electron injection sub-layer.
  • a cathode is formed over the light-emitting layer.
  • the cathode may be formed over the light-emitting layer by, for example, vacuum evaporation.
  • a material of the light extraction layer may include an inorganic material.
  • the light extraction layer may be deposited over the cathode by, for example, atomic layer deposition (ALD) .
  • the inorganic material may include, for example, a metal oxide.
  • the metal oxide may include at least one of an aluminum oxide, a zinc oxide, a zirconium oxide, or a titanium oxide.
  • a refractive index of the light extraction layer containing a metal oxide may generally be approximately 1.7 to approximately 2.1.
  • the metal oxide may include a zinc oxide.
  • the light extraction layer containing zinc oxide may have a relatively high refractive index of approximately 2.0.
  • a thickness of the light extraction layer may be, for example, approximately 50 nm.
  • an encapsulation layer is formed over the light extraction layer.
  • forming the encapsulation layer over the light extraction layer at S805 may include processes described below, with reference to FIG. 13.
  • FIG. 13 illustrates a flow chart of another exemplary fabrication method for an exemplary component of top-emitting organic light-emitting device according to various disclosed embodiments of the present disclosure.
  • a first organic sub-layer is formed over the light extraction layer.
  • the first organic sub-layer may be deposited over the light extraction layer by, for example, ink jet printing.
  • a first inorganic sub-layer is formed over the first organic sub-layer.
  • the first inorganic sub-layer may be deposited over the first organic sub-layer by, for example, plasma enhanced chemical vapor deposition (PECVD) .
  • PECVD plasma enhanced chemical vapor deposition
  • a material of the first inorganic sub-layer may include, for example, silicon nitride.
  • forming the encapsulation layer over the light extraction layer at S805 may include processes described below in addition to the above-described processes S811 and S812, with reference to FIG. 14.
  • FIG. 14 illustrates a flow chart of another exemplary fabrication method for an exemplary component of top-emitting organic light-emitting device according to various disclosed embodiments of the present disclosure.
  • a second organic sub-layer is formed over the first inorganic sub-layer.
  • a polystyrene may be self-assembled over the first inorganic sub-layer layer-by-layer by spin coating to form the second organic sub-layer containing a corrugated polymer.
  • a material of the first organic sub-layer may include, for example, an epoxy resin.
  • the first organic sub-layer may have a smaller refractive index than the light extraction layer, such that a refractive index gradient may be formed to suppress a total reflection of light.
  • a thickness of the first organic sub-layer may be, for example, approximately 1 ⁇ m to approximately 8 ⁇ m, and a refractive index of the first organic sub-layer may be approximately 1.56.
  • a material of the first inorganic sub-layer may include, for example, at least one of a silicon oxide, a silicon nitride, or a silicon oxynitride.
  • the first inorganic sub-layer may have a refractive index higher than the first organic sub-layer, such that a light transmittance may be improved.
  • a material of the first inorganic sub-layer may include, for example, a silicon nitride (SiN) .
  • a refractive index of the first inorganic sub-layer may be, for example, approximately 1.84.
  • a thickness of the first inorganic sub-layer may be, for example, approximately 800 nm.
  • a material of the second organic sub-layer can include, for example, a corrugated polymer.
  • the corrugated polymer may include a self-assembled regular array formed by at least one of polystyrene, polymethylmethacrylate (PMMA) , phenolic resin, or another multi-block polymer having a similar structure.
  • a thickness of the second organic sub-layer may generally be approximately 1 ⁇ m to approximately 8 ⁇ m, and may have nearly no influence on light output.
  • the corrugated polymer may have a periodic wrinkle structure, and may have a scattering effect on outputted light, thereby reducing a total reflection of light and improving a transmittance of light.
  • forming the encapsulation layer over the light extraction layer at S805 may include processes described below, with reference to FIG. 15.
  • FIG. 15 illustrates a flow chart of another exemplary fabrication method for an exemplary component of top-emitting organic light-emitting device according to various disclosed embodiments of the present disclosure.
  • a second inorganic sub-layer is formed over the light extraction layer.
  • the second inorganic sub-layer may be deposited over the light extraction layer by, for example, PECVD.
  • a third organic sub-layer is formed over the second inorganic sub-layer.
  • PMMA polymethylmethacrylate
  • PMMA may be self-assembled over the second inorganic sub-layer layer-by-layer by spin coating to form a third organic sub-layer containing a corrugated polymer.
  • a third inorganic sub-layer is deposited over the third organic sub-layer.
  • the third inorganic sub-layer may be deposited over the third organic sub-layer by, for example, PECVD.
  • a material of the second inorganic sub-layer may include, for example, at least one of a silicon oxide, a silicon nitride, or a silicon oxynitride.
  • the second inorganic sub-layer not only may prevent the solvent from penetrating into the electrode material, but also may serve to further encapsulate the electrodes and the light-emitting layer. Further, the second inorganic sub-layer may have little influence on a light transmittance.
  • a material of the third organic sub-layer may include a corrugated polymer.
  • a corrugated polymer for structures and properties of the third organic sub-layer, reference can be made to descriptions of structures and properties of the second organic sub-layer, e.g., shown in FIG. 2, which are not repeated here.
  • the third inorganic sub-layer may include, for example, at least one of a silicon oxide, a silicon nitride, or a silicon oxynitride.
  • forming a third organic sub-layer at S822 may be performed without performing S821 and S823. That is, the third inorganic sub-layer may be deposited over the light extraction layer without the second inorganic sub-layer and the third organic sub-layer in between the light extraction layer and the third inorganic sub-layer.
  • the present disclosure provides a component of top-emitting OLED device.
  • the component of top-emitting OLED device may include an anode, a light emitting layer disposed over the anode, a cathode disposed over the light-emitting layer, a light extraction layer disposed over the cathode including a metal oxide as a material, and an encapsulation layer disposed over the light extraction layer.
  • the encapsulation layer may include a first organic sub-layer disposed over the light extraction layer and a first inorganic sub-layer disposed over the first organic sub-layer.
  • the light extraction layer of the component of top-emitting OLED device consistent with the disclosure may include a metal oxide having a high chemical stability and a high refractive index.
  • the light extraction layer not only may suppress an influence of moisture and oxygen on the underlying cathode, light-emitting layer, and anode, but also may improve the light transmittance through a refractive index matching between the light extraction layer and the encapsulation layer.
  • the term “the disclosure, ” “the present disclosure, ” or the like does not necessarily limit the claim scope to a specific embodiment, and the reference to exemplary embodiments of the disclosure does not imply a limitation on the invention, and no such limitation is to be inferred.
  • the claims may refer to “first, ” “second, ” etc., followed by a noun or element. Such terms should be understood as a nomenclature and should not be construed as giving the limitation on the number of the elements modified by such nomenclature unless specific number has been given. Any advantages and benefits described may or may not apply to all embodiments of the disclosure. It should be appreciated that variations may be made to the embodiments described by persons skilled in the art without departing from the scope of the present disclosure. Moreover, no element or component in the present disclosure is intended to be dedicated to the public regardless of whether the element or component is explicitly recited in the following claims.

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