WO2018168740A1 - Outil de coupe à revêtement de surface présentant une couche de revêtement dure présentant une excellente résistance à l'écaillage et résistance à l'usure - Google Patents

Outil de coupe à revêtement de surface présentant une couche de revêtement dure présentant une excellente résistance à l'écaillage et résistance à l'usure Download PDF

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Publication number
WO2018168740A1
WO2018168740A1 PCT/JP2018/009421 JP2018009421W WO2018168740A1 WO 2018168740 A1 WO2018168740 A1 WO 2018168740A1 JP 2018009421 W JP2018009421 W JP 2018009421W WO 2018168740 A1 WO2018168740 A1 WO 2018168740A1
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Prior art keywords
layer
average
composite
carbonitride
cutting tool
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PCT/JP2018/009421
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English (en)
Japanese (ja)
Inventor
佐藤 賢一
光亮 柳澤
卓也 石垣
西田 真
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三菱マテリアル株式会社
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Priority claimed from JP2018020646A external-priority patent/JP6957824B2/ja
Application filed by 三菱マテリアル株式会社 filed Critical 三菱マテリアル株式会社
Publication of WO2018168740A1 publication Critical patent/WO2018168740A1/fr

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23CMILLING
    • B23C5/00Milling-cutters
    • B23C5/16Milling-cutters characterised by physical features other than shape
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36Carbonitrides

Definitions

  • the present invention is an ultra-high-speed intermittent cutting process that involves high heat generation of alloy steel and the like, and an impact load is applied to the cutting edge.
  • the hard coating layer has excellent chipping resistance and wear resistance.
  • the present invention relates to a surface-coated cutting tool (hereinafter sometimes referred to as a coated tool) that exhibits excellent cutting performance over a long period of use.
  • WC tungsten carbide
  • TiCN titanium carbonitride
  • cBN cubic boron nitride
  • Patent Document 1 has a NaCl-type face-centered cubic structure on the surface of a tool base and is represented by the composition formula: (Ti 1-X Al X ) (C Y N 1-Y ) (provided that the atomic ratio is The average composition X avg of Al is 0.60 ⁇ X avg ⁇ 0.95, the average composition Y avg of C is 0 ⁇ Y avg ⁇ 0.005) and a hard coating layer including at least a TiAlCN layer is formed,
  • the TiAlCN layer using an electron beam backscattering diffractometer, the inclination angle number distribution was determined by measuring the inclination angle formed by the normal of the ⁇ 111 ⁇ face of the TiAlCN crystal grain with respect to the normal direction of the tool base surface, The highest peak is present in the inclination angle section within the range of 0 to 12 degrees, and the sum of the frequencies existing within the range of 0 to 12 degrees is 45% or more of the entire degrees in the
  • Patent Document 2 As in Patent Document 1, high heat generation of stainless steel or the like is accompanied, and chipping resistance of the hard coating layer in high-speed intermittent cutting processing in which an impact load is applied to the cutting edge.
  • the composition formula (Ti 1-X Al X ) (C Y N 1-Y ) (provided that the average composition X avg of Al is 0.60 in terms of atomic ratio).
  • the average composition Y avg of C is 0 ⁇ Y avg ⁇ 0.005), and a hard coating layer including at least a TiAlCN layer having a NaCl-type face-centered cubic structure is formed,
  • the inclination angle number distribution was determined by measuring the inclination angle formed by the normal of the ⁇ 100 ⁇ plane of the TiAlCN crystal grains with respect to the normal direction of the tool base surface.
  • Inclined angle in the range of 0 to 12 degrees The sum of the frequencies existing in the range of 0 to 12 degrees is 45% or more of the entire frequencies in the inclination angle frequency distribution, and is perpendicular to the thickness direction of the TiAlCN layer.
  • a coated tool having a structure that occupies an area ratio of 50% or more of the whole in a plane perpendicular to the thickness direction has been proposed.
  • a 3 to 25 ⁇ m wear-resistant coating layer formed by CVD is formed on a tool substrate, and the coating layer includes at least Ti 1-1.
  • the coating layer includes at least Ti 1-1.
  • the thickness when expressed in X Al X C y C z, the thickness of 1.5 ⁇ 17 .mu.m which satisfies 0.70 ⁇ x ⁇ 1,0 ⁇ y ⁇ 0.25 and 0.75 ⁇ z ⁇ 1.15 Ti 1-X Al X having a TiAlCN layer having a lamellar structure with a lamellar spacing of less than 150 nm, the cutting edge having the same crystal structure, and Ti and Al having different stoichiometry.
  • C y C z is composed of periodically alternately arranged a Ti 1-X Al X C y C z, further, Ti 1-X Al X C y C z layer is at least 90 vol% or more is face-centered cubic
  • the TC value of the layer is TC (111)> 1 5 satisfied, the half value width of the X-ray diffraction peak intensity of ⁇ 111 ⁇ plane is coated tool have been proposed less than 1 degree.
  • the coated tool has even more chipping resistance, chipping resistance, Abnormal damage resistance such as peel resistance is required, and excellent wear resistance is required over a long period of use.
  • the coated tools proposed in Patent Documents 1 to 3 are accompanied by high heat generation of alloy steel and the like, and in ultra high-speed intermittent cutting where an impact load is applied to the cutting edge, Abrasion is not yet sufficient, and it cannot be said that satisfactory cutting performance is provided over a long period of use.
  • the cutting speed of the ultra-high-speed intermittent cutting in this specification refers to a speed twice or more the normal cutting speed.
  • the present invention solves the above-described problems, and provides a coated tool that exhibits excellent chipping resistance, particularly wear resistance, over a long period of use, even when subjected to ultra-high-speed intermittent cutting of alloy steel or the like.
  • the purpose is to provide.
  • the present inventors have disclosed a composite nitride or composite carbonitride (hereinafter, referred to as “TiAlCN” or “(Ti 1-x Al x ) (C y N 1-y )”) layer of Ti and Al.
  • TiAlCN composite nitride or composite carbonitride
  • (Ti 1-x Al x ) (C y N 1-y )) layer of Ti and Al As a result of diligent research to improve the chipping resistance, particularly wear resistance, of a coated tool provided with a hard coating layer containing at least a hard coating layer on the surface of the tool substrate, the following knowledge was obtained.
  • the TiAlCN crystal grains that make up the TiAlCN layer have high toughness in ultra-high-speed interrupted cutting of alloy steel, etc., but they do not have sufficient hardness, so both the chipping resistance and wear resistance are sufficient. In order to obtain a tool in combination, it is desired to improve the hardness of the TiAlCN layer, that is, the wear resistance.
  • the present inventors in TiAlCN crystal grains constituting the TiAlCN layer, containing at least one of a predetermined amount of Si and B, the hardness is improved, Furthermore, when intensive studies were made on the lattice strain in each crystal lattice of the crystal grains containing at least one of the predetermined amount of Si and B, the crystal grains containing a NaCl-type face-centered cubic structure were contained, and When X-ray diffraction is performed on crystal grains having a NaCl-type face-centered cubic structure, and the plane spacing between the (111) plane and the (200) plane is calculated as d (111) and d (200), When the absolute value ⁇ A of the difference between the lattice constants A (111) and A (200) calculated from d (111) and d (200) is within the range of 0.007 to 0.050 mm, It has been found that a TiAlCN layer containing a predetermined amount of at least one of Si and B further improves the wear resistance without impair
  • a TiAlCN layer that is a composite nitride or carbonitride containing a predetermined amount Me, that is, a NaCl-type face-centered cubic structure of a TiAlMeCN layer.
  • the present invention has been made based on the above findings, “(1) Surface-coated cutting in which a hard coating layer is provided on the surface of a tool base made of any of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, or cubic boron nitride-based ultrahigh-pressure sintered body
  • the hard coating layer is a composite nitride or composite carbonitride layer of Ti, Al, and Me (where Me is at least one of Si and B) having an average layer thickness of 1.0 to 20.0 ⁇ m.
  • composition formula (Ti 1-xy Al x Me y ) (C z N 1-z )
  • the ratio z (where x, y, and z are atomic ratios) are 0.60 ⁇ x ⁇ 0.95, 0.005 ⁇ y ⁇ 0.100, 0.60 ⁇ x + y ⁇ 0.95, respectively.
  • the present invention provides a surface-coated cutting tool in which a hard coating layer is provided on the surface of a tool substrate, and includes at least a TiAlMeCN layer having an average layer thickness of 1.0 to 20.0 ⁇ m as the hard coating layer.
  • a hard coating layer is provided on the surface of a tool substrate, and includes at least a TiAlMeCN layer having an average layer thickness of 1.0 to 20.0 ⁇ m as the hard coating layer.
  • ⁇ A satisfies 0.007 ⁇ ⁇ ⁇ A ⁇ 0.050 ⁇ . Therefore, in the surface-coated cutting tool of the present invention, since the TiAlMeCN layer containing Me has an appropriate lattice strain (0.007 ⁇ ⁇ ⁇ A ⁇ 0.050 ⁇ ) and high hardness is achieved, high heat generation such as alloy steel is generated. In addition, the TiAlMeCN layer has excellent chipping resistance and exhibits excellent wear resistance over a long period of use when subjected to ultra-high-speed intermittent cutting where an impact load acts on the cutting edge. .
  • the hard coating layer of the present invention includes at least a TiAlMeCN layer represented by the composition formula: (Ti 1-xy Al x Me y ) (C z N 1-z ) (where Me is at least Si, B) One).
  • This TiAlMeCN layer has high hardness and excellent wear resistance, but the effect is particularly remarkable when the average layer thickness is 1.0 to 20.0 ⁇ m. This is because when the average layer thickness is less than 1.0 ⁇ m, the layer thickness is too thin to ensure sufficient wear resistance over a long period of use, whereas when the average layer thickness exceeds 20.0 ⁇ m, TiAlMeCN This is because the crystal grains of the layer are easily coarsened and chipping is likely to occur. Therefore, the average layer thickness is set to 1.0 to 20.0 ⁇ m.
  • the TiAlMeCN layer in the present invention is The content of Al in the total amount of Ti, Al and Me (hereinafter referred to as the “average content ratio of Al”) x, The content of Me in the total amount of Ti, Al and Me (hereinafter referred to as “the average content of Me”) y, The average content ratio (hereinafter referred to as “average content ratio of C”) z of the total amount of C and C in C is: 0.60 ⁇ x ⁇ 0.95, 0.005 ⁇ y ⁇ 0.100, 0.60 ⁇ x + y ⁇ 0.95, 0.0000 ⁇ z ⁇ 0.0050 (where x, y, and z are Both are determined so as to satisfy the atomic ratio).
  • the average Al content ratio x is less than 0.60, the TiAlMeCN layer is inferior in hardness, so that the wear resistance is not sufficient when subjected to ultra-high-speed intermittent cutting of alloy steel or the like.
  • the average content ratio y of Me is less than 0.005
  • the improvement of hardness, which is an effect of adding Me is not sufficiently exhibited, and when it exceeds 0.10, segregation of Me to the grain boundary occurs.
  • the toughness is lowered and the chipping resistance is impaired.
  • the sum of the average content ratio x of Al and the average content ratio y of Me exceeds 0.60, and if it exceeds 0.95, the content ratio of Ti is relatively reduced.
  • the average content ratio x of Al and the average content ratio of Me were determined as 0.60 ⁇ x ⁇ 0.95, 0.005 ⁇ y ⁇ 0.100, and 0.60 ⁇ x + y ⁇ 0.95.
  • the average content ratio z of C contained in the TiAlMeCN layer is a minute amount in the range of 0.0000 ⁇ z ⁇ 0.0050, the adhesion between the TiAlMeCN layer and the tool substrate or the lower layer is improved, and By improving lubricity, the impact during cutting is relieved, and as a result, the chipping resistance and fracture resistance of the TiAlMeCN layer are improved.
  • the average content ratio z of C when the average content ratio z of C deviates from the range of 0.0000 ⁇ z ⁇ 0.0050, the toughness of the TiAlMeCN layer is lowered, and chipping resistance and chipping resistance are adversely lowered. Therefore, the average content ratio z of C was determined to be 0.0000 ⁇ z ⁇ 0.0050. Further, when the average content ratio s (where s is an atomic ratio) of Cl contained in the TiAlMeCN layer is in the range of 0.0001 ⁇ s ⁇ 0.0040, the lubricity is improved without reducing the toughness of the layer. be able to. That is, if the average chlorine content is less than 0.0001, the effect of improving lubricity is small. On the other hand, if the average chlorine content exceeds 0.0040, chipping resistance is lowered, which is not preferable. Therefore, the average Cl content is defined as 0.0001 ⁇ s ⁇ 0.0040.
  • a hard strain of the TiAlCN layer is introduced.
  • the introduction of the lattice strain by controlling the film forming conditions can be performed by, for example, a thermal CVD method using NH 3 when forming the TiAlMeCN layer. Specifically, it is as follows.
  • the chemical vapor deposition apparatus to be used includes a gas group A composed of NH 3 and H 2 , TiCl 4 , AlCl 3 , N 2 , Al (CH 3 ) 3 , H 2, and at least one of SiCl 4 and BCl 3 (hereinafter,
  • the gas group B consisting of “MeCl x ”) is supplied into the reactor from the separate gas supply pipes, and the supply of the gas group A and the gas group B into the reactor is, for example, constant.
  • the gas is supplied so that the gas flows for a time shorter than that period, and the gas supply of the gas group A and the gas group B has a phase difference shorter than the gas supply time.
  • a reaction gas is supplied to the surface of the tool base, and the supply ratio N 2 / (AlCl 3 + Al (CH 3 ) 3 ) is relatively large for N 2 , AlCl 3 , and Al (CH 3 ) 3 that are gas components.
  • N 2 / (AlCl 3 + Al (CH 3 ) 3 ) is relatively large for N 2 , AlCl 3 , and Al (CH 3 ) 3 that are gas components.
  • ⁇ A tends to increase generally.
  • Reaction gas composition (volume% with respect to the total of gas group A and gas group B): Gas group A: NH 3 : 2.0 to 6.0%, H 2 : 65 to 75%, Gas group B: AlCl 3 : 0.50 to 0.90%, TiCl 4 : 0.2 to 0.3%, MeCl x : 0.10 to 0.20%, N 2 : 3.0 to 12.0 %, Al (CH 3 ) 3 : 0.00 to 0.10%, H 2 : remaining, N 2 / (AlCl 3 + Al (CH 3 ) 3 ): 3.0 to 24.0 Reaction atmosphere pressure: 4.5 to 5.0 kPa, Reaction atmosphere temperature: 700 to 900 ° C.
  • Supply cycle 6.0 to 9.0 seconds
  • Gas supply time per cycle 0.15 to 0.25 seconds
  • Phase difference in supply of gas group A and gas group B 0.10 to 0.20 seconds
  • n is an integer
  • the lattice spacings d (111) and d (200) between the (111) plane and the (200) plane are calculated.
  • ⁇ A satisfies 0.007 ⁇ ⁇ ⁇ A ⁇ 0.050 ⁇
  • the TiAlMeCN layer comes to have a high hardness. As a result, high heat generation occurs and an impact load is applied to the cutting edge. Even when subjected to ultra high-speed intermittent cutting that acts, it exhibits excellent wear resistance.
  • the TiAlMeCN layer having the lattice strain index ⁇ A defined above exhibits high hardness due to the presence of lattice strain in the layer by controlling the film formation conditions in addition to lattice strain, which is an improvement in hardness due to the addition of Me, As a result, excellent wear resistance is exhibited.
  • ⁇ A is less than 0.007 mm, the lattice strain is small, so the effect of improving the hardness is not sufficient.
  • ⁇ A exceeds 0.050 mm, the lattice strain becomes excessive. Therefore, since the chipping resistance at the time of cutting is lowered, the ⁇ A is set in the range of 0.007 ⁇ ⁇ ⁇ A ⁇ 0.050 ⁇ .
  • the present invention is the interplanar spacing of the (111) plane and the (200) plane obtained by performing X-ray diffraction on the crystal grains having the NaCl-type face-centered cubic structure constituting the TiAlMeCN layer.
  • the absolute value ⁇ A of the difference between the lattice constants A (111) and A (200) calculated from d (111) and d (200) is increased.
  • the present inventors have found that a coated tool excellent in both chipping resistance and wear resistance can be obtained by improving the wear resistance and applying this to a tool.
  • the average grain width W of each crystal grain having a NaCl-type face-centered cubic structure in the composite nitride or composite carbonitride layer is 0.10 to 2
  • the hardness and toughness of the crystal grains are improved, which is combined with the effect of the TiAlCN layer as a hard coating layer.
  • even more excellent characteristics can be exhibited. That is, by setting the average particle width W to 0.10 ⁇ m or more and 2.00 ⁇ m or less, the reactivity with the work material is reduced, the wear resistance is exhibited, the toughness is improved, and the chipping resistance is improved.
  • the average particle width W is more preferably 0.10 to 2.00 ⁇ m.
  • the average aspect ratio A is more preferably 2.0 to 10.0.
  • the average aspect ratio A refers to the surface of the tool base when the longitudinal section of the hard coating layer is observed in a range including a width of 100 ⁇ m and a height including the entire hard coating layer using a scanning electron microscope.
  • Lower layer and upper layer In the present invention, by providing the TiAlMeCN layer as the hard coating layer, it has sufficient chipping resistance and wear resistance, but Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride oxide When a lower layer comprising a Ti compound layer comprising one or more of the layers and having a total average layer thickness of 0.1 to 20.0 ⁇ m is provided, and / or an upper portion including at least an aluminum oxide layer When the layers are provided with a total average layer thickness of 1.0 to 25.0 ⁇ m, combined with the effects exhibited by these layers, it is possible to exhibit further excellent characteristics.
  • Ti consisting of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride layer, and having a total average layer thickness of 0.1 to 20.0 ⁇ m
  • a lower layer including a compound layer When a lower layer including a compound layer is provided, if the total average layer thickness of the lower layer is less than 0.1 ⁇ m, the effect of the lower layer is not sufficiently achieved. On the other hand, if it exceeds 20.0 ⁇ m, the crystal grains are likely to be coarsened. , Chipping is likely to occur. Further, if the total average layer thickness of the upper layer including the aluminum oxide layer is less than 1.0 ⁇ m, the effect of the upper layer is not sufficiently achieved. On the other hand, if it exceeds 25.0 ⁇ m, the crystal grains are likely to be coarsened and chipping is caused. It tends to occur.
  • the coated tool of the present invention will be specifically described with reference to examples.
  • the case where a WC-based cemented carbide or TiCN-based cermet is used as the tool substrate will be described.
  • WC powder, TiC powder, TaC powder, NbC powder, Cr 3 C 2 powder and Co powder each having an average particle diameter of 0.1 to 3 ⁇ m were prepared. These raw material powders are shown in Table 1. Then, after adding wax, ball mill mixing in acetone for 24 hours, drying under reduced pressure, press-molding into a green compact of a predetermined shape at a pressure of 98 MPa, and this green compact in a vacuum of 5 Pa , Sintered under vacuum at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour, and after sintering, WC-based cemented carbide tool bases A to C having an insert shape of ISO standard SEEN1203AFSN Each was manufactured.
  • a TiAlMeCN layer was formed on the surfaces of these tool bases A to D by CVD using a CVD apparatus.
  • the CVD conditions are as follows. Formation conditions A to J shown in Tables 4 and 5, that is, from a gas group A composed of NH 3 and H 2 , TiCl 4 , AlCl 3 , MeCl x , Al (CH 3 ) 3 , N 2 , H 2
  • the reaction gas composition (capacity% with respect to the total of the gas group A and the gas group B) is set as NH 3 : 2.0 to 6.0% as the gas group A.
  • H 2 65 to 75%
  • gas group B as AlCl 3 : 0.50 to 0.90%
  • TiCl 4 0.2 to 0.3%
  • MeCl x 0.10 to 0.20%
  • N 2 3.0 to 12.0%
  • Al (CH 3 ) 3 0.00 to 0.10%
  • H 2 remaining
  • reaction atmosphere pressure 4.5 to 5.0 kPa
  • reaction atmosphere temperature 700 to 900 ° C.
  • the average layer thickness ( ⁇ m) shown in Table 8 is obtained by performing chemical vapor deposition on the surfaces of the tool bases A to D under the formation conditions A ′ to H ′ shown in Tables 4 and 5.
  • Comparative coating tools 1 to 15 were manufactured by vapor-depositing at least a TiAlMeCN layer or a hard coating layer containing TiAlCN. Similar to the coated tools 4 to 11 of the present invention, the comparative coated tools 4 to 11 were formed with the lower layer and / or the upper layer shown in Table 6 under the forming conditions shown in Table 3.
  • the cross sections (longitudinal cross sections) of the constituent layers of the inventive coated tools 1 to 15 and comparative coated tools 1 to 15 in the direction perpendicular to the tool substrate were measured using a scanning electron microscope (magnification 5000 times).
  • the average layer thickness was obtained by measuring and averaging the five layer thicknesses in the observation field, all were the average layer thicknesses shown in Table 7 and Table 8.
  • the average Al content x, the average Me content y, and the average Cl content s of the TiAlMeCN layer and TiAlCN layer are measured with an electron beam microanalyzer (Electron-Probe-).
  • an electron beam was irradiated from the sample surface side, and the average content ratio of Al, Me and Cl from the average of 10 points of the analysis result of the characteristic X-ray obtained x , Y and s were determined.
  • the average content ratio z of C was determined by secondary ion mass spectrometry (Secondary-Ion-Mass-Spectroscopy: SIMS).
  • the ion beam was irradiated in the range of 70 ⁇ m ⁇ 70 ⁇ m from the sample surface side, and the concentration in the depth direction was measured for the components emitted by the sputtering action.
  • the average content ratio z of C shows the average value of the depth direction about a TiAlMeCN layer or a TiAlCN layer.
  • the content ratio of C excludes the inevitable content ratio of C that is included without intentionally using a gas containing C as a gas raw material.
  • Tables 7 and 8 show the values of x, y, z, and s obtained above (all of x, y, z, and s are atomic ratios).
  • a (111) and A (200) corresponding to the lattice constant were calculated from the following equations.
  • Tables 7 and 8 show the values of d (111), d (200), A (111), A (200) and ⁇ A determined above.
  • the coated tools 1 to 15 of the present invention and the comparative coated tools 1 to 15 using a scanning electron microscope (magnification 5000 times and 20000 times) from the cross-sectional direction perpendicular to the tool substrate, the tool substrate surface and the horizontal direction
  • the (Ti 1-xy Al x Me y ) (C z N 1-z ) layer constituting the composite nitride or carbonitride layer existing in the range of 100 ⁇ m in length the NaCl type face centered cubic
  • Each crystal grain having a structure is observed from the side of the coating cross section perpendicular to the tool substrate surface, and the particle width w in the direction parallel to the substrate surface and the particle length l in the direction perpendicular to the substrate surface are measured.
  • Tables 7 and 8 show the values of W and A determined above.
  • coated tools 1 to 15 and comparative coated tools 1 to 15 according to the present invention are described below with the various coated tools clamped at the tip of a cutter steel cutter having a cutter diameter of 125 mm by a fixing jig.
  • the dry high-speed face milling which is a kind of ultra-high-speed intermittent cutting of alloy steel, and a center-cut cutting test were performed, and the flank wear width of the cutting blade was measured.
  • Tool substrate WC-based cemented carbide, TiCN-based cermet, Cutting test: dry high-speed face milling, center cutting, Work material: Block material of JIS / SCM415 width 100mm, length 400mm, Rotational speed: 1146 min ⁇ 1 Cutting speed: 450 m / min, Incision: 1.5mm, Single blade feed: 0.1 mm / tooth, Cutting time: 8 minutes (Normal cutting speed: 200 m / min) Table 9 shows the results.
  • WC powder, TiC powder, ZrC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder and Co powder all having an average particle diameter of 0.1 to 3 ⁇ m are prepared as raw material powders.
  • NbC powder WC powder
  • Co powder and Ni powder all having an average particle diameter of 0.1 to 2 ⁇ m
  • These raw material powders were blended into the composition shown in Table 11, wet mixed with a ball mill for 24 hours, dried, and then pressed into a green compact at a pressure of 98 MPa.
  • a gas group B composed of TiCl 4 , AlCl 3 , MeCl x , N 2 , H 2 , and a method of supplying each gas, the reaction gas composition (capacity% relative to the total of the gas group A and the gas group B)
  • gas group A NH 3 : 2.0 to 6.0%, H 2 : 65 to 75%
  • gas group B AlCl 3 : 0.50 to 0.90%, TiCl 4 : 0.2 to 0 .3%, MeCl x : 0.10 to 0.20%, N 2 : 3.0 to 12.0%, Al (CH 3 ) 3 : 0.0 to 0.1%, H 2 : residue, reaction Atmospheric pressure: 4.5 to 5.0 kPa, reaction ambient temperature: 700 to 900 ° C., supply cycle 1.0 to 9.0 seconds, the gas supply time 0.15-0.25 sec per cycle, and phase difference 0.10-0.20 seconds gases group A and the gas group B, also, N 2, AlCl 3 , Al (CH
  • the average layer thickness, the average Al content ratio x, the average Me content ratio y, the average C content ratio z, and the average Cl content ratio s shown in Table 13 are shown.
  • Invention coated tools 16-30 were produced.
  • the lower layer and / or the upper layer shown in Table 12 were formed under the formation conditions shown in Table 3.
  • Comparative coating tools 16 to 30 shown in Table 14 were produced by vapor-depositing a hard coating layer in the same manner as the coating tool of the present invention. Similar to the coated tools 19 to 26 of the present invention, the comparative coated tools 19 to 26 were formed with the lower layer and / or the upper layer shown in Table 12 under the forming conditions shown in Table 3.
  • each component layer of the coated tool 16-30 of the present invention and the comparative coated tool 16-30 is measured using a scanning electron microscope (5000 times magnification), and the layer thickness at five points in the observation field is measured and averaged.
  • the average layer thickness was determined, the average layer thicknesses shown in Table 13 and Table 14 were all shown.
  • Cutting condition 1 Work material: JIS-S35C lengthwise equal length 4 round fluted round bars, Cutting speed: 450 m / min, Cutting depth: 1.0 mm, Feed: 0.15mm / rev, Cutting time: 5 minutes, (Normal cutting speed is 220 m / min),
  • Cutting condition 2 Work material: JIS / FCD450 lengthwise equidistant round bars with 4 vertical grooves, Cutting speed: 400 m / min, Cutting depth: 1.0 mm, Feed: 0.20 mm / rev, Cutting time: 5 minutes, (Normal cutting speed is 180 m / min), Table 15 shows the results of the cutting test.
  • the cubic crystal grains of the TiAlMeCN layer have a predetermined Al content rate, Me content rate, C content rate, Cl content rate, and Since the lattice strain satisfying 0.007 ⁇ ⁇ ⁇ A ⁇ 0.050 ⁇ is formed, the hardness is high, and as a result, it is accompanied by high heat generation and the cutting blade is subjected to intermittent / impact high loads. Even when used for high-speed intermittent cutting, it exhibits excellent wear resistance over a long period of use without the occurrence of chipping or chipping.
  • the cubic crystal grains constituting the TiAlMeCN layer and the TiAlCN layer satisfy a predetermined Al content rate, Me content rate, C content rate, Cl content rate, 0.007 ⁇ ⁇ ⁇ A ⁇ 0.050 ⁇ . It is clear that the comparative coated tool in which no lattice strain is formed reaches the end of its life in a short time due to the occurrence of abnormal damage such as chipping or the progress of wear in ultra high-speed intermittent cutting.
  • the coated tool of the present invention can be used not only for ultra high-speed intermittent cutting of alloy steel but also as a coated tool for various work materials, and also exhibits excellent cutting performance over a long period of use. Therefore, it is possible to sufficiently satisfy the high performance of the cutting device, the labor saving and energy saving of the cutting work, and the cost reduction.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

La présente invention concerne un outil de coupe à revêtement de surface qui fait preuve d'une excellente résistance à l'écaillage et résistance à l'usure lorsqu'il est utilisé pour la coupe intermittente à ultra-haute vitesse d'aciers alliés et analogues. L'outil de coupe à revêtement de surface présente, sur la surface d'un substrat d'outil, une couche de revêtement dure contenant (Ti1-x-yA1xMey)(CzN1-z) (Me est au moins l'un parmi Si et B. 0,60 ≤ x < 0,95, 0,005 ≤ y ≤ 0,100, 0,60 < x + y ≤ 0,95, et 0,0000 ≤ z ≤ 0,0050), où, concernant la quantité totale d'atomes constituant une phase TiAlMeCN, le rapport des teneurs moyennes occupé par le Cl satisfait 0,0001 ≤ s ≤ 0,0040, et ΔA, qui est la valeur absolue de la différence entre A(111) et A(200) définis comme A(111)=31/2d(111) et A(200)=2d(200), satisfait 0,007 Å ≤ ΔA ≤ 0,050 Å, d(111) et d(200) étant calculés à partir de l'espacement interplanaire des grains cristallins ayant une structure de type NaCl dans la couche de TiAlMeCN.
PCT/JP2018/009421 2017-03-14 2018-03-12 Outil de coupe à revêtement de surface présentant une couche de revêtement dure présentant une excellente résistance à l'écaillage et résistance à l'usure WO2018168740A1 (fr)

Applications Claiming Priority (4)

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JP2017-048382 2017-03-14
JP2017048382 2017-03-14
JP2018020646A JP6957824B2 (ja) 2017-03-14 2018-02-08 硬質被覆層が優れた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
JP2018-020646 2018-02-08

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0890310A (ja) * 1994-09-19 1996-04-09 Mitsubishi Materials Corp 表面被覆切削工具
JP2006152321A (ja) * 2004-11-25 2006-06-15 Hitachi Tool Engineering Ltd 硬質皮膜被覆部材及びその被覆方法
JP2008132564A (ja) * 2006-11-28 2008-06-12 Sumitomo Electric Ind Ltd 表面被覆切削工具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0890310A (ja) * 1994-09-19 1996-04-09 Mitsubishi Materials Corp 表面被覆切削工具
JP2006152321A (ja) * 2004-11-25 2006-06-15 Hitachi Tool Engineering Ltd 硬質皮膜被覆部材及びその被覆方法
JP2008132564A (ja) * 2006-11-28 2008-06-12 Sumitomo Electric Ind Ltd 表面被覆切削工具

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