WO2016148056A1 - Outil de coupe à revêtement de surface, doté de couches de revêtement rigides présentant une excellente résistance à l'écaillage - Google Patents

Outil de coupe à revêtement de surface, doté de couches de revêtement rigides présentant une excellente résistance à l'écaillage Download PDF

Info

Publication number
WO2016148056A1
WO2016148056A1 PCT/JP2016/057745 JP2016057745W WO2016148056A1 WO 2016148056 A1 WO2016148056 A1 WO 2016148056A1 JP 2016057745 W JP2016057745 W JP 2016057745W WO 2016148056 A1 WO2016148056 A1 WO 2016148056A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
avg
average
crystal grains
upper layer
Prior art date
Application number
PCT/JP2016/057745
Other languages
English (en)
Japanese (ja)
Inventor
佐藤 賢一
翔 龍岡
健志 山口
Original Assignee
三菱マテリアル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2016041383A external-priority patent/JP6590255B2/ja
Application filed by 三菱マテリアル株式会社 filed Critical 三菱マテリアル株式会社
Priority to EP16764886.4A priority Critical patent/EP3269478B1/fr
Priority to US15/557,784 priority patent/US10456841B2/en
Priority to KR1020177028482A priority patent/KR20170126485A/ko
Priority to CN201680015433.1A priority patent/CN107405695B/zh
Publication of WO2016148056A1 publication Critical patent/WO2016148056A1/fr

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23CMILLING
    • B23C5/00Milling-cutters
    • B23C5/16Milling-cutters characterised by physical features other than shape
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36Carbonitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers

Definitions

  • the present invention has high heat generation of carbon steel, cast iron, alloy steel, etc., and has high chipping resistance with a hard coating layer in high-speed intermittent cutting processing in which an impact load is applied to the cutting edge.
  • the present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits excellent cutting performance over a long period of use.
  • WC tungsten carbide
  • TiCN titanium carbonitride
  • cBN cubic boron nitride
  • the conventional coated tool formed with the Ti—Al composite nitride layer is relatively excellent in wear resistance, but it tends to cause abnormal wear such as chipping when used under high-speed intermittent cutting conditions. Accordingly, various proposals have been made for improving the hard coating layer.
  • Patent Document 1 discloses a composite nitridation of Al and Ti that satisfies the composition formula (Al x Ti 1-x ) N (wherein x is 0.40 to 0.65) in the tool base surface.
  • the crystal orientation analysis by EBSD is performed on the composite nitride layer made of a material layer, the area ratio of crystal grains having a crystal orientation ⁇ 100> within a range of 0 to 15 degrees from the normal direction of the surface polished surface is 50 %, And when the angle between adjacent crystal grains is measured, the crystallographic arrangement in which the proportion of the small-angle grain boundaries (0 ⁇ ⁇ 15 °) is 50% or more is made of Al and Ti.
  • the hard coating layer exhibits excellent fracture resistance even under high-speed intermittent cutting conditions.
  • this coating tool forms a hard coating layer by physical vapor deposition, it is difficult to increase the Al content ratio x to 0.65 or more, and it is desired to further improve the cutting performance. .
  • Patent Document 2 discloses that a chemical vapor deposition is performed in a mixed reaction gas of TiCl 4 , AlCl 3 , and NH 3 in a temperature range of 650 to 900 ° C., whereby an Al content ratio x is 0.65 to
  • a (Ti 1-x Al x ) N layer having a thickness of 0.95 can be formed by vapor deposition
  • this reference further describes an Al 2 O 3 layer on the (Ti 1-x Al x ) N layer. Therefore, the value of the Al content ratio x is increased from 0.65 to 0.95 to form a (Ti 1-x Al x ) N layer. It is not clear what kind of influence the cutting performance has.
  • Patent Document 3 a TiCN layer and an Al 2 O 3 layer are used as an inner layer, and a cubic structure (Ti 1-x Al) including a cubic structure or a hexagonal structure is formed thereon by chemical vapor deposition.
  • x ) N layer (wherein x is 0.65 to 0.90 in atomic ratio) is coated as an outer layer, and a compressive stress of 100 to 1100 MPa is applied to the outer layer, whereby the heat resistance and fatigue strength of the coated tool It has been proposed to improve.
  • the Al content ratio x can be increased, and a cubic structure is formed. Therefore, although a hard coating layer having a predetermined hardness and excellent wear resistance can be obtained, there is a problem that the adhesion strength with the tool base is not sufficient and the toughness is inferior. Furthermore, although the coated tool described in Patent Document 3 has a predetermined hardness and excellent wear resistance, it is inferior in toughness, so high-speed intermittent cutting of carbon steel, cast iron, alloy steel, etc.
  • the present invention has excellent toughness and excellent chipping resistance and wear resistance over a long period of use even when subjected to high-speed intermittent cutting of carbon steel, cast iron, alloy steel, etc. It aims at providing the covering tool which exhibits.
  • the present inventors have at least a composite nitride or composite carbonitride of Ti and Al (hereinafter referred to as “(Ti, Al) (C, N)” or “(Ti 1-x Al x ) ( C y N 1-y ) ”may be indicated)).
  • a composite nitride or composite carbonitride of Ti and Al hereinafter referred to as “(Ti, Al) (C, N)” or “(Ti 1-x Al x ) ( C y N 1-y ) ”may be indicated
  • the present inventors have made a hard coating layer by forming a hard coating layer made of (Ti, Al) (C, N) having a NaCl-type face-centered cubic structure into at least a two-layer structure having different Al content ratios.
  • the lower layer (Ti, Al) (C) has a relatively low Al content compared to the upper (Ti, Al) (C, N) layer.
  • N) layer has high adhesion strength with the tool base and excellent peeling resistance, but the upper layer (Ti, Al) (C, N) layer has a relatively high Al content ratio.
  • a hard coating layer made of (Ti, Al) (C, N) having a NaCl type face centered cubic structure is composed of an upper layer having a relatively high Al content and a lower layer having a relatively low Al content.
  • the hard coating layer has excellent toughness and resistance. Even if it is used for high-speed intermittent cutting of carbon steel, cast iron, alloy steel, etc., it has excellent chipping resistance and wear resistance, and it has excellent cutting over a long period of use. It was found that it performs well.
  • the inventors of the present invention have also studied the X-ray diffraction peak intensity I (200) from the (200) plane and the X-ray diffraction peak intensity I (from the (111) plane in the (Ti, Al) (C, N) crystal grains. 111), when the value of I (200) / I (111) in the upper layer exceeds 10, and when the value of I (200) / I (111) in the lower layer is less than 3, the value is further increased. It has been found that it exhibits excellent chipping resistance and wear resistance.
  • the present inventors when the Al content ratio is increased sequentially from the tool base side toward the hard coating layer surface side in the lower layer, or the lower layer is configured as a plurality of layers, It has been found that when the Al content in each layer is increased from the substrate side toward the hard coating layer surface side, the peel resistance is further improved.
  • the present invention has been made based on the above findings, “(1) Surface coating in which a hard coating layer is formed on the surface of a tool base made of any of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, or cubic boron nitride-based ultrahigh-pressure sintered body
  • the hard coating layer includes at least a composite nitride or composite carbonitride layer of Ti and Al having an average layer thickness of 1 to 20 ⁇ m
  • the composite nitride or composite carbonitride layer includes at least a composite nitride or composite carbonitride phase having a NaCl-type face-centered cubic structure
  • the composite nitride or composite carbonitride layer includes an upper layer in which a periodic composition change of Ti and Al is present in crystal grains having a NaCl type face centered cubic structure, and a NaCl type face centered cubic.
  • At least a lower layer in which no periodic composition change of Ti and Al exists in the crystal grains having a structure (D)
  • the upper layer is represented by a composition formula: (Ti 1-x Al x ) (C y N 1-y )
  • the average content ratio Y avg in the total amount of C and N (where X avg and Y avg are atomic ratios) is 0.70 ⁇ X avg ⁇ 0.95 and 0 ⁇ Y avg ⁇ 0.005, respectively.
  • the X-ray diffraction peak intensity from the (200) plane of the crystal grains having the NaCl-type face-centered cubic structure of the upper layer is I (200), and the X-ray diffraction peak intensity from the (111) plane is The surface-coated cutting tool according to (1), wherein I (111) satisfies I (200) / I (111)> 10.
  • the X-ray diffraction peak intensity from the (200) plane of the crystal grains having the NaCl-type face-centered cubic structure of the lower layer is I (200), and the X-ray diffraction peak intensity from the (111) plane is The surface-coated cutting tool according to (1) or (2), wherein I (111) satisfies I (200) / I (111) ⁇ 3.
  • the lower layer has a composition gradient, and the content ratio u of the total amount of Ti and Al in the lower layer gradually increases from the tool base surface side to the upper layer side.
  • the lower layer is composed of a plurality of layers having different compositions, and the content ratio u of the total amount of Ti and Al in each layer increases from the tool base side to the upper layer side.
  • (6) In the crystal grains having the NaCl-type face-centered cubic structure in which the periodic composition change of Ti and Al in the upper layer exists, the average of the local maximum value and the average of the local minimum values of x that periodically change
  • the periodic composition change of Ti and Al is ⁇ 001> of the crystal grains.
  • the period along the orientation is 3 to 100 nm, and the total amount of Ti and Al in the plane perpendicular to the orientation is The surface-coated cutting tool according to any one of (1) to (6), wherein a change in the content ratio Xo is less than or equal to 0.01.
  • fine crystal grains having a hexagonal crystal structure are present at grain boundaries of crystal grains having a NaCl-type face-centered cubic structure in the layer. (1) to (7), wherein the area ratio of the fine crystal grains is 5 area% or less, and the average grain diameter R of the fine crystal grains is 0.01 to 0.3 ⁇ m.
  • the surface-coated cutting tool according to any one of 1).
  • the hard coating layer of the coated tool of the present invention includes at least a (Ti, Al) (C, N) layer represented by a composition formula: (Ti 1-x Al x ) (C y N 1-y ).
  • This (Ti, Al) (C, N) layer has high hardness and excellent wear resistance, but the effect is particularly remarkable when the average layer thickness is 1 to 20 ⁇ m. The reason is that if the average layer thickness is less than 1 ⁇ m, the layer thickness is so thin that sufficient wear resistance over a long period of use cannot be ensured. On the other hand, if the average layer thickness exceeds 20 ⁇ m, Ti and Crystal grains of the Al composite nitride or composite carbonitride layer are likely to be coarsened, and chipping is likely to occur.
  • the average layer thickness is set to 1 to 20 ⁇ m.
  • the average layer thickness in the lower layer of the hard coating layer of the present invention is 0.3 to 1.5 ⁇ m, the adhesion strength is further improved and the chipping resistance is further improved.
  • the hard coating layer of the present invention is an upper layer in which periodic compositional changes of Ti and Al are present in crystal grains having a NaCl-type face-centered cubic structure. And at least a lower layer in which a periodic composition change of Ti and Al does not exist in crystal grains having a NaCl type face-centered cubic structure, and a typical form of the lower layer is as shown in FIG.
  • the lower layer has a substantially uniform composition
  • the lower layer has a continuous increase in the Al content in the layer from the tool base surface side to the upper layer.
  • the lower layer is configured as a laminated structure composed of a plurality of layers, and the laminated structure is formed from the tool base side toward the upper layer side.
  • the average content ratios X avg and C of the total amount of Ti and Al in Al are 0.70 ⁇ X avg ⁇ 0.95 and 0 ⁇ Y avg ⁇ 0.005, respectively.
  • X avg and Y avg are atomic ratios
  • the average content ratio X avg of Al is less than 0.70, the (Ti, Al) (C, N) layer is inferior in oxidation resistance, and is used for high-speed intermittent cutting of alloy steel or the like. Has insufficient wear resistance.
  • the average content ratio X avg of Al exceeds 0.95, the precipitation amount of hexagonal crystals inferior in hardness increases and the hardness decreases, so that the wear resistance decreases. Therefore, the average content ratio X avg of Al was determined as 0.70 ⁇ X avg ⁇ 0.95.
  • the average content ratio Y avg of the C component contained in the (Ti, Al) (C, N) layer is a very small amount in the range of 0 ⁇ Y avg ⁇ 0.005
  • the lubricity improves, thereby cutting.
  • the chipping resistance and chipping resistance of the (Ti, Al) (C, N) layer are improved.
  • the toughness of the (Ti, Al) (C, N) layer is lowered, so that chipping resistance and fracture resistance are reduced. It is lowered and not preferable.
  • the average content ratio Y avg of C was determined as 0 ⁇ Y avg ⁇ 0.005.
  • the content rate of C excludes the inevitable content rate of C contained without intentionally using a gas containing C as a gas raw material, and is a value obtained by subtracting the inevitable content rate of C.
  • Y avg was determined as 0 ⁇ Y avg .
  • the lower layer when represented by the composition formula: (Ti 1-u Al u ) (C v N 1-v ), the average content ratio U avg in the total amount of Ti and Al in Al and C in C And the average content ratio V avg in the total amount of N and N (where U avg and V avg are both atomic ratios) satisfy 0 ⁇ U avg ⁇ 0.70 and 0 ⁇ Y avg ⁇ 0.005, respectively. So as to control the composition. The reason is that when the average content ratio U avg of Al is less than 0.70, the (Ti, Al) (C, N) layer has excellent adhesion strength with the tool base or the base layer coated on the tool base.
  • the average content ratio U avg of Al in the lower layer was determined as 0 ⁇ U avg ⁇ 0.70.
  • the average content ratio V avg of the C component contained in the lower layer is a minute amount in the range of 0 ⁇ V avg ⁇ 0.005
  • the average content ratio V avg of the C component deviates from the range of 0 ⁇ V avg ⁇ 0.005
  • the toughness of the (Ti, Al) (C, N) layer is lowered, chipping resistance and fracture resistance are lowered, which is not preferable. Therefore, the average content ratio V avg of C in the lower layer was determined as 0 ⁇ V avg ⁇ 0.005.
  • the lower layer is configured as a laminated structure of a plurality of (Ti, Al) (C, N) layers, and is formed from the (Ti, Al) (C, N) layer located on the tool base side.
  • the Al content of the (Ti, Al) (C, N) layer located on the upper layer side is relatively high, an X-ray diffraction peak appears depending on the number of lower layers constituting the layer.
  • I (200) and I (111) are average values of the maximum intensities of the respective peaks.
  • the peak of the lower layer will appear on the lower angle side than the upper layer, and from this relationship, identify the peak of the lower layer and the upper layer Can do.
  • the lower layer is a single layer that satisfies the composition formula: (Ti 1-u Al u ) (C v N 1-v ) (where 0 ⁇ U avg ⁇ 0.70, 0 ⁇ V avg ⁇ 0.005).
  • One (Ti, Al) (C, N) layer can be formed.
  • the lower layer When the lower layer is formed of a single (Ti, Al) (C, N) layer, it can be formed as a substantially uniform composition layer over the entire lower layer, but it accounts for the total amount of Ti and Al in Al.
  • the content ratio can also be formed as a single layer having a composition gradient structure that sequentially increases from the tool base side toward the upper layer side. And when it forms as a lower layer provided with such a composition gradient structure, it has the outstanding adhesive strength with respect to both a tool base
  • the upper layer is higher than the (Ti, Al) (C, N) layer located on the tool base side. It is desirable that the Al content ratio of the (Ti, Al) (C, N) layer located on the side is relatively increased and is gradually increased step by step. In such a case, the adhesion strength between the tool base and the lower layer, the adhesion strength between the lower layer and the upper layer, and the adhesion strength between the lower layers consisting of multiple layers are excellent, chipping resistance, and peeling resistance. Improves.
  • the crystal lattice Adhesion is improved by sequentially relaxing the mismatches.
  • the crystal grains having a NaCl-type face-centered cubic structure in which the periodic composition change of Ti and Al in the upper layer of the present invention exists the periodic composition change of Ti and Al is present in the crystal grains,
  • the crystal grains are distorted and the hardness is improved.
  • the difference ⁇ x between the average of the maximum value and the minimum value of x in the composition formula, which is an index of the magnitude of the composition change of Ti and Al, is smaller than 0.03, the above-described distortion of the crystal grains is small and sufficient. Hardness improvement is not expected.
  • FIG. 5 shows Ti and Al obtained by performing a line analysis by energy dispersive X-ray spectroscopy (EDS) using a transmission electron microscope to show the change in composition of Ti and Al present in crystal grains. An example of the graph which shows the periodic composition change of is shown.
  • EDS energy dispersive X-ray spectroscopy
  • the periodic composition change of Ti and Al in the crystal grains having the NaCl-type face-centered cubic structure in the upper layer is equivalent crystals represented by ⁇ 001> of the crystal grains having the NaCl-type face-centered cubic structure. It is desirable to exist with a period of 3 to 100 nm along one of the azimuths. However, if the period is less than 3 nm, the toughness tends to decrease, whereas if it exceeds 100 nm, the effect of improving the hardness cannot be expected, and it is expressed by ⁇ 001> of crystal grains having a NaCl-type face-centered cubic structure. Chipping resistance is particularly improved when the period existing along one of the equivalent crystal orientations is 3 to 100 nm.
  • FIG. 6 shows that for a crystal grain having a periodic composition change of Ti and Al, the periodic composition change exists along one of the equivalent crystal orientations represented by ⁇ 001> of the crystal grain. And it is the schematic diagram showing that the composition change of Ti and Al in the surface orthogonal to the direction is small.
  • the area ratio of the fine crystal grains having a hexagonal crystal structure exceeds 5 area%, the ratio of the crystal grains of the NaCl-type face-centered cubic structure is relatively reduced, so that the hardness is decreased. It is desirable to be 5 area% or less.
  • the grain boundary slip is suppressed when the average grain size R is less than 0.01 ⁇ m.
  • the thickness exceeds 0.3 ⁇ m, the strain in the layer increases and the hardness decreases, so that the average grain size R of the fine crystal grains having a hexagonal crystal structure is 0.01 to 0.00. It is desirable that the thickness be 3 ⁇ m.
  • the lower layer and the upper layer of the present invention can be formed by, for example, the following chemical vapor deposition method in which the reaction gas composition is periodically changed on the tool base surface.
  • a gas group A composed of NH 3 and H 2 and a gas group B composed of TiCl 4 , AlCl 3 , N 2 , and H 2 are supplied into the reactor from respective separate gas supply pipes.
  • the gas group A and the gas group B are supplied into the reaction apparatus, for example, at a constant time interval so that the gas flows for a time shorter than the cycle.
  • the reaction gas composition on the surface of the tool base is changed to (a) a gas group A, (b) a mixed gas of the gas group A and the gas group B, (C)
  • the gas group B can be changed with time.
  • the gas supply method for example, the gas supply port is rotated, the tool base is rotated, or the tool base is reciprocated to change the reaction gas composition on the tool base surface. This can be realized by changing the mixture gas in time, (b) the mixed gas of the gas group A and the gas group B, and (c) the mixed gas mainly of the gas group B.
  • the reaction gas composition (volume% with respect to the total of the gas group A and the gas group B) on the surface of the tool base, for example, the upper layer of the present invention has NH 3 as the gas group A: 2.0 to 3.0%. H 2 : 65 to 75%, gas group B as AlCl 3 : 0.7 to 0.9%, TiCl 4 : 0.2 to 0.3%, N 2 : 0.0 to 12.0%, C 2 H 4 : 0 to 0.5%, H 2 : remaining, reaction atmosphere pressure: 4.5 to 5.0 kPa, reaction atmosphere temperature: 700 to 750 ° C., supply cycle 3 to 4 seconds, gas supply per cycle
  • a predetermined composition and a predetermined target layer thickness ( Ti, Al) (C, N) layers can be deposited.
  • the upper layer having a relatively high Al content ratio and the lower layer having a relatively low Al content ratio may be formed by, for example, the ratio of AlCl 3 and TiCl 4 , the supply cycle, They can be made separately by adjusting the phase difference between the gas supply A and the gas supply B.
  • the upper layer in which the composition change is formed in the crystal grains having the NaCl-type face-centered cubic structure is supplied so that the time required for the gas group A and the gas group B to reach the tool base surface is different. By doing so, a local compositional difference between Ti and Al is formed in the crystal grains, and in order to stabilize it, rearrangement of atoms occurs, and a periodic change in composition is formed.
  • the upper layer with excellent wear resistance and dramatically improved toughness is formed, so when used for high-speed intermittent cutting where intermittent and impact loads are applied to the cutting edge.
  • the hard coating layer exhibits excellent chipping resistance, and excellent cutting performance is exhibited over a long period of use.
  • the (Ti, Al) (C, N) layer of the present invention alone has a sufficient effect, but the Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride oxide layer.
  • An underlayer having a total average layer thickness of 0.1 to 20 ⁇ m can be provided.
  • the outermost surface layer including the aluminum oxide layer can be provided with a total average layer thickness of 1 to 25 ⁇ m.
  • the total of the underlayer If the average layer thickness is less than 0.1 ⁇ m, the effect of the underlayer is not sufficiently exhibited. On the other hand, if it exceeds 20 ⁇ m, the crystal grains are likely to be coarsened and chipping is likely to occur.
  • the outermost surface layer including the aluminum oxide layer when providing the outermost surface layer including the aluminum oxide layer, if the total average layer thickness of the outermost surface layer is less than 1 ⁇ m, the effect of the outermost surface layer is not sufficiently achieved, while the total average layer thickness of the outermost surface layer is If it exceeds 25 ⁇ m, the crystal grains tend to become coarse and chipping tends to occur.
  • the hard coating layer of the present invention includes at least a (Ti, Al) (C, N) layer, and the (Ti, Al) (C, N) layer includes an upper layer having a relatively high Al content.
  • a periodic compositional change is formed in the (Ti, Al) (C, N) crystal grains having a NaCl-type face-centered cubic structure of the upper layer, which is composed of a lower layer having a relatively low Al content. Therefore, the hard coating layer has excellent toughness and wear resistance. Therefore, even when it is subjected to high-speed intermittent cutting of carbon steel, cast iron, alloy steel, etc., excellent chipping resistance, Exhibits abrasion.
  • the X-ray diffraction peak intensity from the (200) plane of the (Ti, Al) (C, N) crystal grains having the NaCl-type face-centered cubic structure of the hard coating layer is from the I (200) and (111) planes.
  • the X-ray diffraction peak intensity of I is I (111)
  • the upper layer satisfies I (200) / I (111)> 10
  • the lower layer satisfies I (200) / I (111) ⁇ 3
  • the wear resistance of the upper layer and the chipping resistance / peeling resistance of the lower layer can be further improved.
  • composition gradient structure in which the Al content ratio sequentially increases sequentially from the tool base side to the upper layer side in the lower layer, or the lower layer is configured as a laminated structure of a plurality of layers, By gradually increasing the Al content ratio of each of the plurality of layers from the substrate side to the upper layer side, the adhesion strength between the tool substrate-lower layer-upper layer is improved, and chipping resistance / The peelability can be further improved.
  • the coated tool of the present invention in which the hard coating layer is formed on the surface of the tool base, is used for high-speed intermittent cutting of carbon steel, cast iron, alloy steel, etc. in which impact and intermittent high loads act on the cutting edge. Even in such a case, it exhibits excellent chipping resistance and wear resistance, and exhibits excellent cutting performance over a long period of use.
  • An example of a schematic cross-sectional view of the hard coating layer of the coated tool of the present invention is shown, and (a) to (c) show three typical forms of the lower layer.
  • An example of the X-ray diffraction chart of the coated tool of the present invention in which the lower layer is a single layer is shown, and peak intensities I (111) and I (200) are calculated for the lower layer and the upper layer, respectively.
  • the lower layer is configured as a laminated structure of a plurality of (Ti, Al) (C, N) layers, and is positioned on the upper layer side of the (Ti, Al) (C, N) layer positioned on the tool base side ( 2 shows an example of an X-ray diffraction chart of a coated tool of the present invention having a lower layer in which the Al content of the (Ti, Al) (C, N) layer is relatively high, and the peak intensity I (111) for the lower layer and the upper layer, respectively. ) And I (200).
  • the crystal grains having a periodic composition change of Ti and Al exists along one of the equivalent crystal orientations represented by ⁇ 001> of the crystal grains, and the composition change of Ti and Al in a plane perpendicular to the orientation Is a schematic diagram schematically showing that it is small.
  • WC powder, TiC powder, TaC powder, NbC powder, Cr 3 C 2 powder and Co powder all having an average particle diameter of 1 to 3 ⁇ m are prepared, and these raw material powders are blended as shown in Table 1. Blended into the composition, added with wax, mixed in a ball mill in acetone for 24 hours, dried under reduced pressure, pressed into a compact of a predetermined shape at a pressure of 98 MPa, and the compact was 1370 in a vacuum of 5 Pa.
  • Mo 2 C powder Mo 2 C powder
  • ZrC powder ZrC powder
  • NbC powder WC powder
  • Co powder all having an average particle diameter of 0.5 to 2 ⁇ m.
  • Ni powder are prepared, these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and then pressed into a compact at a pressure of 98 MPa.
  • the body was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1500 ° C. for 1 hour, and after sintering, a tool base D made of TiCN-based cermet having an ISO standard SEEN1203AFSN insert shape was produced.
  • a chemical vapor deposition apparatus is used on the surfaces of these tool bases A to D, Formation conditions A1 to E1 shown in Tables 4 and 5, that is, a gas group A composed of NH 3 and H 2 , a gas group B composed of TiCl 4 , AlCl 3 , N 2 and H 2 , and supply of each gas
  • the reaction gas composition (capacity% with respect to the total of the gas group A and the gas group B) is set as the gas group A, NH 3 : 0.5 to 1.0%, H 2 : 65 to 75%, the gas group.
  • reaction gas composition (volume% with respect to the total of the gas group A and the gas group B) is set as the gas group A: NH 3 : 2.0 to 3.0%, H 2 : 65 to 75%, As gas group B, AlCl 3 : 0.7 to 0.9%, TiCl 4 : 0.2 to 0.3%, N 2 : 0.0 to 12.0%, C 2 H 4 : 0 to 0.5 %, H 2 : remaining, reaction atmosphere pressure: 4.5 to 5.0 kPa, reaction atmosphere temperature: 700 to 750 ° C., supply cycle 3 to 4 seconds, gas supply time per cycle 0.15 to 0.25 seconds
  • the phase difference between gas supply A and gas supply B is 0.10 to 0.20 seconds, and the heat CV
  • Comparative coating tools 1 to 10 were manufactured by vapor-depositing the upper layer including the (Ti, Al) (C, N) layer shown in Table 10.
  • Comparative coating tools 1 to 10 were manufactured by vapor-depositing the upper layer including the (Ti, Al) (C, N) layer shown in Table 10.
  • Table 10 during the film forming process of the layer not provided with the lower layer (comparative coated tools 1 to 5) and the (Ti 1-x Al x ) (C y N 1-y ) layer, As shown in FIG.
  • a hard coating layer is formed so that there is no phase difference between the gas supply A and the gas supply B (see D ′, E ′, I ′, J ′).
  • the base layer and the outermost surface layer shown in Table 8 were formed for the comparative coated tools 4 to 8 under the forming conditions shown in Table 3.
  • the lower layer, the upper layer, the base layer, the outermost layer of the coated tools 1 to 10 of the present invention, and the hard coated layer of the comparative coated tools 1 to 10 are also described for convenience.
  • the cross section perpendicular to the tool substrate of the base layer and the outermost layer is measured using a scanning electron microscope (magnification 5000 times), and the layer thickness at five points in the observation field is measured.
  • the average layer thickness was measured and averaged, the average layer thickness substantially the same as the target layer thickness shown in Table 9 and Table 10 was shown.
  • the lower layer was observed using a transmission electron microscope (magnification 200000 times), and energy dispersive X-ray spectroscopy ( The average Al content ratio U avg was determined by performing surface analysis of the lower layer from the cross-section side using EDS). Further, the average Al content ratio X avg of the upper layer of the coated tool of the present invention and the upper layers of the comparative coated tools 1 to 10 is polished using an electron beam microanalyzer (EPMA, Electron-Probe-Micro-Analyzer).
  • EPMA electron beam microanalyzer
  • the sample was irradiated with an electron beam from the sample surface side, and the average Al content ratio X avg of Al was determined from the 10-point average of the analysis results of the obtained characteristic X-rays.
  • the average C content ratios V avg and Y avg were determined by secondary ion mass spectrometry (SIMS, Secondary-Ion-Mass-Spectroscopy).
  • the ion beam was irradiated in the range of 70 ⁇ m ⁇ 70 ⁇ m from the sample surface side, and the concentration in the depth direction was measured for the components emitted by the sputtering action.
  • the average C content ratios V avg and Y avg indicate the average value in the depth direction of the (Ti, Al) (C, N) layer.
  • the lower layer and the upper layer of the coated tools 1 to 10 of the present invention and the upper layer of the comparative coated tools 1 to 10 are subjected to X-ray diffraction using a Cu—K ⁇ ray as a radiation source by using an X-ray diffractometer.
  • the X-ray diffraction peak intensity from the (200) plane of the (Ti, Al) (C, N) crystal grains having a face-centered cubic structure is I (200)
  • the X-ray diffraction peak intensity from the (111) plane is It calculated
  • the magnification is set so that the composition change of about 10 cycles from the density of the composition falls within the measurement range based on the result of the surface analysis, and then by EDS along the normal direction of the tool base surface.
  • the line analysis is performed in a range of 5 cycles, and the difference between the average values of the maximum and minimum values of the periodic composition change of Ti and Al is obtained as the difference ⁇ x between the maximum value and the minimum value.
  • An average interval of 5 cycles was determined as a cycle of periodic composition change of Ti and Al.
  • the periodic composition change of Ti and Al is expressed by ⁇ 001> of (Ti, Al) (C, N) crystal grains having a NaCl type face centered cubic structure.
  • a line analysis by EDS along that orientation was performed for a range of 5 periods, and the period of Ti and Al
  • the difference between the average value of the local maximum value and the local minimum value is obtained as the difference ⁇ x between the local maximum value and the local minimum value, and the average interval of the 5 periods of the local maximum value is determined by the periodic composition change of Ti and Al.
  • the lower layer and the upper layer of the coated tools 1 to 10 of the present invention and the upper layer of the comparative coated tools 1 to 10 are cross sections in the direction perpendicular to the tool base surface.
  • it is set in a lens barrel of a field emission scanning electron microscope, and an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees is applied to the polished surface within the measurement range of the sectional polished surface with an irradiation current of 1 nA.
  • the coated tools 1 to 10 of the present invention and the comparative coated tools 1 to 10 are clamped at the tip of a tool steel cutter having a cutter diameter of 125 mm with a fixing jig.
  • the dry high-speed face milling, which is a kind of high-speed interrupted cutting of alloy steel, and a center-cut cutting test were performed, and the flank wear width of the cutting blade was measured.
  • Tool substrate Tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, Cutting test: Dry high-speed face milling, center cutting, Work material: JIS / SCM440 block material with a width of 100 mm and a length of 400 mm, Rotational speed: 994 min ⁇ 1 Cutting speed: 390 m / min, Cutting depth: 1.5 mm, Single-blade feed rate: 0.1 mm / tooth, Cutting time: 8 minutes, (Normal cutting speed is 220 m / min), Table 15 shows the results.
  • a chemical vapor deposition apparatus was used on the surfaces of the tool bases A to C made of WC-base cemented carbide and the tool base D made of TiCN-base cermet prepared in Example 1.
  • a lower layer made of (Ti, Al) (C, N) having a vapor deposition was formed.
  • the area ratio of fine crystal grains having a hexagonal structure and the value of the average grain size R were obtained.
  • the values of the average Al content ratio U avg and the average C content ratio V avg on the tool base side of the lower layer are 1/4 of the average layer thickness of the lower layer from the interface between the lower layer and the tool base surface or the base layer to the upper layer side. Measurements were made at a distance of.
  • the value of the average Al content ratio U avg and the average C content ratio V avg on the upper layer side of the lower layer is 1 ⁇ 4 of the average layer thickness of the lower layer from the interface between the lower layer and the upper layer to the lower layer side. Measurements were taken at distance points.
  • the lower layer is observed using a transmission electron microscope (magnification 200000 times), and the magnification is adjusted using the energy dispersive X-ray spectroscopy (EDS) so that the lower layer enters the measurement range from the cross-sectional side.
  • EDS energy dispersive X-ray spectroscopy
  • coated tools 11 to 17 of the present invention were subjected to a dry high-speed face milling and center-cut cutting test under the following cutting conditions similar to those in Example 1, and the flank wear width of the cutting edge was measured.
  • Tool substrate Tungsten carbide-based cemented carbide, titanium carbonitride-based cermet
  • Cutting test Dry high-speed face milling, center cutting
  • Work material JIS / SCM440 block material with a width of 100 mm and a length of 400 mm
  • Rotational speed 994 min ⁇ 1
  • Cutting speed 390 m / min
  • Cutting depth 1.5 mm
  • Single-blade feed rate 0.1 mm / tooth
  • Cutting time 8 minutes
  • Table 15 shows the cutting test results.
  • a chemical vapor deposition apparatus was used on the surfaces of the tool bases A to C made of WC-base cemented carbide and the tool base D made of TiCN-base cermet prepared in Example 1. Under the formation conditions A3 to C3 shown in Table 13, a thermal CVD method was performed for a predetermined time, and a lower layer made of (Ti, Al) (C, N) was deposited.
  • the lower layer is formed of a laminated structure of a plurality of layers, ie, a first lower layer on the tool base side, a second lower layer located substantially in the middle, and a third lower layer on the upper layer side.
  • the concentration is substantially constant, but the Al concentration of each layer increases stepwise from the tool base side to the upper layer side as it goes from the first lower layer to the third lower layer.
  • an upper layer made of (Ti, Al) (C, N) having a predetermined layer thickness is deposited on the surface of the lower layer according to the formation conditions A, C, E, and G shown in Tables 6 and 7.
  • the inventive coated tools 18 to 25 shown in Table 14 were produced.
  • the base layer and the outermost layer shown in Table 10 were formed under the formation conditions shown in Table 3.
  • the layer thickness of each of the first lower layer, the second lower layer, the third lower layer, the underlayer and the upper layer, Average Al content ratio U avg , average C content ratio V avg value in each layer of the lower layer, average Al content ratio X avg in the upper layer, average C content ratio Y avg value, I (200) / I (111) Value, ⁇ x value, Xo value, area ratio of hexagonal fine crystal grains, and average grain size R were obtained. Table 14 shows the obtained values.
  • the above coated tools 18 to 25 of the present invention were subjected to dry high-speed face milling and center cut cutting tests under the following cutting conditions similar to those in Examples 1 and 2, and the flank wear width of the cutting edge was determined. It was measured.
  • Tool substrate Tungsten carbide-based cemented carbide, titanium carbonitride-based cermet
  • Cutting test Dry high-speed face milling, center cutting
  • Work material JIS / SCM440 block material with a width of 100 mm and a length of 400 mm
  • Rotational speed 993 min ⁇ 1
  • Cutting speed 390 m / min
  • Cutting depth 1.5 mm
  • Single-blade feed rate 0.1 mm / tooth
  • Cutting time 8 minutes
  • Table 15 shows the cutting test results.
  • WC powder, TiC powder, ZrC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder and Co powder each having an average particle diameter of 1 to 3 ⁇ m are prepared.
  • Compounded in the formulation shown in Table 16 added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, press-molded into a green compact of a predetermined shape at a pressure of 98 MPa.
  • vacuum sintering is performed at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour, and after sintering, the cutting edge is subjected to a honing process of R: 0.07 mm.
  • Tool bases ⁇ to ⁇ made of WC-base cemented carbide having the insert shape of CNMG120212 were manufactured.
  • NbC powder NbC powder
  • WC powder Co powder
  • Ni powder Ni powder each having an average particle diameter of 0.5 to 2 ⁇ m
  • These raw material powders were blended in the composition shown in Table 17, wet mixed for 24 hours with a ball mill, dried, and then pressed into a green compact at a pressure of 98 MPa.
  • a normal chemical vapor deposition apparatus is used on the surfaces of these tool bases ⁇ to ⁇ and tool base ⁇ ,
  • the lower layer is deposited by vapor deposition under the conditions shown in Table 19 among the formation conditions A1 to E1 shown in Tables 4 and 5, and then the table of the formation conditions A to G shown in Tables 6 and 7
  • the coated tools 26 to 30 of the present invention shown in Table 19 were manufactured by depositing the upper layer under the conditions shown in FIG.
  • the base layer and the outermost layer shown in Table 18 were formed under the formation conditions shown in Table 3.
  • Table 19 shows these values.
  • a normal chemical vapor deposition apparatus is used on the surfaces of the tool bases ⁇ to ⁇ and the tool base ⁇ , Under the conditions of formation conditions A2 to C2 shown in Table 4 and Table 11, the lower layer was formed by vapor deposition, and then under the conditions shown in Table 20 of the formation conditions A to G shown in Tables 6 and 7.
  • the coated tools 31 to 35 of the present invention shown in Table 20 were manufactured by vapor deposition of the upper layer.
  • the foundation layer and the outermost surface layer shown in Table 18 were formed under the formation conditions shown in Table 3.
  • a normal chemical vapor deposition apparatus is used on the surfaces of the tool bases ⁇ to ⁇ and the tool base ⁇ , Under the conditions of formation conditions A3 to C3 shown in Table 4 and Table 13, the lower layer was deposited, and then the conditions shown in Table 21 out of the formation conditions A to G shown in Table 6 and Table 7,
  • the coated tools 36 to 40 of the present invention shown in Table 21 were manufactured by vapor deposition of the upper layer.
  • the underlayer and the outermost surface layer shown in Table 18 were formed under the formation conditions shown in Table 3.
  • the thickness of each of the first lower layer, the second lower layer, the third lower layer, the underlayer and the upper layer, and the lower layer in each layer Average Al content ratio U avg , average C content ratio V avg value, upper layer average Al content ratio X avg , average C content ratio Y avg value, I (200) / I (111) value, ⁇ x value , Xo value, area ratio of hexagonal crystal grains and average grain size R were obtained.
  • Table 21 shows the values obtained above.
  • Cutting condition 1 Work material: JIS ⁇ S45C lengthwise equal 4 round grooved round bars, Cutting speed: 390 m / min, Cutting depth: 1.5 mm, Feed: 0.1 mm / rev, Cutting time: 5 minutes, (Normal cutting speed is 220 m / min),
  • Cutting condition 2 Work material: JIS / FCD700 lengthwise equal length 4 round bar with round groove, Cutting speed: 325 m / min, Cutting depth: 1.0 mm, Feed: 0.25 mm / rev, Cutting time: 5 minutes, (Normal cutting speed is 180 m / min), Table 22 shows the results of the cutting test.
  • cBN powder, TiN powder, TiC powder, Al powder, and Al 2 O 3 powder each having an average particle diameter in the range of 0.5 to 4 ⁇ m were prepared. These raw material powders are shown in Table 23. After blending into the blended composition, wet mixing with a ball mill for 80 hours, drying, and press-molding into a green compact with a diameter of 50 mm ⁇ thickness: 1.5 mm at a pressure of 120 MPa, and then this green compact Is sintered in a vacuum atmosphere at a pressure of 1 Pa at a predetermined temperature in the range of 900 to 1300 ° C. for 60 minutes to obtain a presintered body for a cutting edge piece, and this presintered body is separately prepared.
  • a normal ultra high pressure sintering apparatus in a state of being superposed on a support piece made of WC base cemented carbide having Co: 8 mass%, WC: remaining composition, and diameter: 50 mm ⁇ thickness: 2 mm
  • Normal pressure 4 Pa
  • temperature Presence at a predetermined temperature in the range of 1200 to 1400 ° C.
  • Holding time 0.8 hours under high pressure sintering, and after sintering, the upper and lower surfaces are polished with a diamond grindstone, and used in a wire electric discharge machine.
  • the brazing part (corner part) of the insert body made of a WC-base cemented carbide having a diamond) is Ti- having a composition consisting of Zr: 37.5%, Cu: 25%, Ti: the remainder in mass%.
  • the cutting edge is subjected to honing processing with a width of 0.13 mm and an angle of 25 °, and further subjected to final polishing to achieve ISO. Standard CNGA12 Tool substrate b having a 412 insert shape, The filtrate was produced, respectively.
  • the lower layer is deposited on the surface of these tool bases a and b under the conditions shown in Table 25 out of the formation conditions A1 to E1 shown in Tables 4 and 5 using a normal chemical vapor deposition apparatus.
  • the coated tools 41 to 44 of the present invention shown in Table 25 are formed by depositing the upper layer under the conditions shown in Table 25 out of the formation conditions A to G shown in Tables 6 and 7. Manufactured.
  • coated tools 42 and 43, the base layer shown in Table 24 and the outermost surface layer were formed on the formation conditions shown in Table 3.
  • Table 25 shows these values.
  • the lower layer is vapor-deposited on the surface of the tool bases (a) and (b) under the conditions shown in Table 26 out of the formation conditions A2 to C2 shown in Tables 4 and 5 using an ordinary chemical vapor deposition apparatus.
  • the coated tools 45 to 47 of the present invention shown in Table 25 were manufactured by depositing the upper layer under the conditions shown in Table 26 among the formation conditions A to G shown in Tables 6 and 7. .
  • coated tool 46, the base layer shown in Table 24 and the outermost surface layer were formed on the formation conditions shown in Table 3.
  • the layer thickness of each layer, the average Al content in the initial stage of film formation (on the tool substrate side) and the late stage of film formation (on the upper layer side) Ratio U avg , average C content ratio V avg value, upper layer average Al content ratio X avg , average C content ratio Y avg value, I (200) / I (111) value, ⁇ x value, Xo value Value, the area ratio of the fine crystal grains having a hexagonal crystal structure, and the value of the average grain size R were obtained. Table 26 shows these values.
  • the lower layer is deposited on the surface of the tool bases i and b by using an ordinary chemical vapor deposition apparatus under the conditions shown in Table 27 out of the formation conditions A3 to C3 shown in Tables 4 and 5.
  • the coated tools 48 to 50 of the present invention shown in Table 27 were manufactured by vapor-depositing the upper layer under the conditions shown in Table 27 out of the formation conditions A to G shown in Tables 6 and 7. .
  • coated tool 49, the base layer shown in Table 24 and the outermost surface layer were formed on the formation conditions shown in Table 3.
  • the thickness of each of the first lower layer, the second lower layer, the third lower layer, the underlayer and the upper layer, and the lower layer in each layer Average Al content ratio U avg , average C content ratio V avg value, upper layer average Al content ratio X avg , average C content ratio Y avg value, I (200) / I (111) value, ⁇ x value , Xo value, area ratio of hexagonal crystal grains and average grain size R were obtained. Table 27 shows these values.
  • the following high-speed dry-type carburized and hardened alloy steel is used for the coated tools 41 to 50 of the present invention.
  • An intermittent cutting test was carried out, and the flank wear width of the cutting edge was measured.
  • Tool substrate Cubic boron nitride-based ultra-high pressure sintered body
  • Cutting test Dry high-speed intermittent cutting of carburized and quenched alloy steel
  • Work material JIS ⁇ SCr420 (Hardness: HRC60) lengthwise equidistant 4 round bars with longitudinal grooves
  • Cutting speed 260 m / min
  • Cutting depth 0.1 mm
  • Feed 0.12 mm / rev
  • Cutting time 4 minutes Table 28 shows the results of the cutting test.
  • the coated tool of the present invention is such that the (Ti, Al) (C, N) layer constituting the hard coating layer is an upper layer having a relatively high Al content. And a lower layer having a relatively low Al content, and periodic compositional changes are formed in the (Ti, Al) (C, N) crystal grains having the NaCl-type face-centered cubic structure of the upper layer. Therefore, since the hard coating layer has excellent toughness and wear resistance, it has excellent chipping resistance even when subjected to high-speed intermittent cutting processing such as carbon steel, cast iron, alloy steel, etc. Demonstrate wear resistance.
  • the (Ti, Al) (C, N) layer constituting the hard coating layer is composed of an upper layer having a relatively high Al content and a lower layer having a relatively low Al content.
  • the comparative coated tools 1 to 10 having no or no periodic composition change in the (Ti, Al) (C, N) crystal grains having the NaCl-type face-centered cubic structure of the upper layer have high heat
  • when used in high-speed intermittent cutting with intermittent and shocking high loads acting on the cutting edge it is apparent that the lifetime is reached in a short time due to the occurrence of chipping, chipping and the like.
  • the coated tool of the present invention can be used as a coated tool for high-speed intermittent cutting of various work materials, and has excellent chipping resistance and wear resistance over a long period of use. Since it exhibits, it can sufficiently satisfy the high performance of the cutting device, the labor saving and energy saving of the cutting work, and the cost reduction.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne un outil à revêtement, dans lequel les couches de revêtement rigides combinent une excellente dureté à une ténacité et présentent une excellente résistance à l'écaillage dans la coupe intermittente à grande vitesse. Cet outil à revêtement est un outil de coupe à revêtement de surface qui comprend une base d'outil, base sur la surface de laquelle ont été déposées au moins des couches de (Ti, Al) (C, N) en tant que couches de revêtement rigides, ces couches se composant : d'une couche supérieure comprenant des grains cristallins qui ont une structure cubique à faces centrées de type NaCl et dans lesquels il existe un changement périodique dans le rapport Ti/Al ; et d'une couche inférieure comprenant des grains cristallins qui ont une structure cubique à faces centrées de type NaCl et dans lesquels il n'existe pas de changement périodique dans le rapport Ti/Al. La couche supérieure présente une teneur en Al relativement plus élevée que la couche inférieure et a un rapport de I (200)/I(111) supérieur à 10. La couche inférieure a un rapport de I (200)/I(111) inférieur à 3. De préférence, la couche inférieure peut être une couche dans laquelle la teneur en Al augmente progressivement et en continu, du côté de la base de l'outil vers le côté de la couche supérieure, ou elle peut être composée de plusieurs couches dans lesquelles les teneurs en Al des couches respectives augmentent progressivement et par paliers, du côté de base de l'outil vers le côté de la couche supérieure.
PCT/JP2016/057745 2015-03-13 2016-03-11 Outil de coupe à revêtement de surface, doté de couches de revêtement rigides présentant une excellente résistance à l'écaillage WO2016148056A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP16764886.4A EP3269478B1 (fr) 2015-03-13 2016-03-11 Outil de coupe à revêtement de surface, doté de couches de revêtement rigides présentant une excellente résistance à l'écaillage
US15/557,784 US10456841B2 (en) 2015-03-13 2016-03-11 Surface-coated cutting tool in which hard coating layers exhibits excellent chipping resistance
KR1020177028482A KR20170126485A (ko) 2015-03-13 2016-03-11 경질 피복층이 우수한 내칩핑성을 발휘하는 표면 피복 절삭 공구
CN201680015433.1A CN107405695B (zh) 2015-03-13 2016-03-11 硬质包覆层发挥优异的耐崩刀性的表面包覆切削工具

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2015050644 2015-03-13
JP2015-050644 2015-03-13
JP2016041383A JP6590255B2 (ja) 2015-03-13 2016-03-03 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP2016-041383 2016-03-03

Publications (1)

Publication Number Publication Date
WO2016148056A1 true WO2016148056A1 (fr) 2016-09-22

Family

ID=56918892

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/057745 WO2016148056A1 (fr) 2015-03-13 2016-03-11 Outil de coupe à revêtement de surface, doté de couches de revêtement rigides présentant une excellente résistance à l'écaillage

Country Status (1)

Country Link
WO (1) WO2016148056A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110191777A (zh) * 2017-01-18 2019-08-30 三菱综合材料株式会社 硬质包覆层发挥优异的耐崩刃性、耐磨性的表面包覆切削工具
CN110461615A (zh) * 2017-03-29 2019-11-15 京瓷株式会社 热敏头及热敏打印机
CN114173972A (zh) * 2019-10-10 2022-03-11 住友电工硬质合金株式会社 切削工具
US11359272B2 (en) * 2017-09-01 2022-06-14 Korloy Inc. Hard film having excellent wear resistance and toughness
CN114829676A (zh) * 2019-12-20 2022-07-29 瓦尔特公开股份有限公司 涂覆切削工具
CN115537772A (zh) * 2022-09-20 2022-12-30 株洲钻石切削刀具股份有限公司 一种涂层切削刀具

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004058217A (ja) * 2002-07-30 2004-02-26 Mitsubishi Materials Corp 高速重切削条件で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆超硬合金製切削工具
JP2008545063A (ja) * 2005-07-04 2008-12-11 フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ 硬質膜被覆された物体およびその製造方法
JP2011513594A (ja) * 2008-03-12 2011-04-28 ケンナメタル インコーポレイテッド 硬質材料で被覆された物体
JP2014061588A (ja) * 2012-08-28 2014-04-10 Mitsubishi Materials Corp 表面被覆切削工具
JP2014128837A (ja) * 2012-12-27 2014-07-10 Mitsubishi Materials Corp 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP2014210333A (ja) * 2013-04-01 2014-11-13 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004058217A (ja) * 2002-07-30 2004-02-26 Mitsubishi Materials Corp 高速重切削条件で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆超硬合金製切削工具
JP2008545063A (ja) * 2005-07-04 2008-12-11 フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ 硬質膜被覆された物体およびその製造方法
JP2011513594A (ja) * 2008-03-12 2011-04-28 ケンナメタル インコーポレイテッド 硬質材料で被覆された物体
JP2014061588A (ja) * 2012-08-28 2014-04-10 Mitsubishi Materials Corp 表面被覆切削工具
JP2014128837A (ja) * 2012-12-27 2014-07-10 Mitsubishi Materials Corp 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP2014210333A (ja) * 2013-04-01 2014-11-13 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110191777A (zh) * 2017-01-18 2019-08-30 三菱综合材料株式会社 硬质包覆层发挥优异的耐崩刃性、耐磨性的表面包覆切削工具
US11040402B2 (en) 2017-01-18 2021-06-22 Mitsubishi Materials Corporation Surface-coated cutting tool having hard coating layer exhibiting excellent chipping resistance and wear resistance
CN110461615A (zh) * 2017-03-29 2019-11-15 京瓷株式会社 热敏头及热敏打印机
US10882329B2 (en) 2017-03-29 2021-01-05 Kyocera Corporation Thermal head and thermal printer
US11359272B2 (en) * 2017-09-01 2022-06-14 Korloy Inc. Hard film having excellent wear resistance and toughness
CN114173972A (zh) * 2019-10-10 2022-03-11 住友电工硬质合金株式会社 切削工具
CN114173972B (zh) * 2019-10-10 2024-05-14 住友电工硬质合金株式会社 切削工具
CN114829676A (zh) * 2019-12-20 2022-07-29 瓦尔特公开股份有限公司 涂覆切削工具
CN114829676B (zh) * 2019-12-20 2023-11-14 瓦尔特公开股份有限公司 涂覆切削工具
CN115537772A (zh) * 2022-09-20 2022-12-30 株洲钻石切削刀具股份有限公司 一种涂层切削刀具
CN115537772B (zh) * 2022-09-20 2024-04-26 株洲钻石切削刀具股份有限公司 一种涂层切削刀具

Similar Documents

Publication Publication Date Title
JP6590255B2 (ja) 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6478100B2 (ja) 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6620482B2 (ja) 耐チッピング性にすぐれた表面被覆切削工具
JP5924507B2 (ja) 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6394898B2 (ja) 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
WO2014163081A1 (fr) Outil de coupe revêtu en surface
WO2014034730A1 (fr) Outil de coupe à surface enrobée
JP6391045B2 (ja) 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
WO2016148056A1 (fr) Outil de coupe à revêtement de surface, doté de couches de revêtement rigides présentant une excellente résistance à l'écaillage
JP6284034B2 (ja) 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6296294B2 (ja) 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
WO2015182711A1 (fr) Outil de coupe à revêtement de surface comprenant une couche de revêtement dure qui présente une excellente résistance à l'écaillage
WO2016052479A1 (fr) Outil de coupe revêtu en surface avec excellente résistance aux copeaux
JP2017056497A (ja) 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP2017030076A (ja) 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP2018118346A (ja) 硬質被覆層がすぐれた耐チッピング性、耐剥離性を発揮する表面被覆切削工具
JP7231885B2 (ja) 硬質被覆層が優れた耐チッピング性を発揮する表面被覆切削工具
JP6709536B2 (ja) 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6650108B2 (ja) 耐チッピング性、耐摩耗性にすぐれた表面被覆切削工具
JP7025727B2 (ja) 硬質被覆層が優れた耐チッピング性、耐摩耗性を発揮する表面切削工具
WO2016190332A1 (fr) Outil de coupe à surface revêtue doté d'une couche de revêtement rigide présentant une excellente résistance à l'écaillage
WO2017038840A1 (fr) Outil de découpe à surface revêtue doté d'une couche de revêtement rigide présentant une excellente résistance à l'écaillage
JP2018161739A (ja) 硬質被覆層が優れた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
JP6957824B2 (ja) 硬質被覆層が優れた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
WO2018181123A1 (fr) Outil de coupe à revêtement de surface présentant une couche de revêtement dure présentant une excellente résistance à l'écaillage et à l'usure

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16764886

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 15557784

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

REEP Request for entry into the european phase

Ref document number: 2016764886

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 20177028482

Country of ref document: KR

Kind code of ref document: A