WO2018135365A1 - 塗布ヘッドおよび塗布装置 - Google Patents

塗布ヘッドおよび塗布装置 Download PDF

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Publication number
WO2018135365A1
WO2018135365A1 PCT/JP2018/000440 JP2018000440W WO2018135365A1 WO 2018135365 A1 WO2018135365 A1 WO 2018135365A1 JP 2018000440 W JP2018000440 W JP 2018000440W WO 2018135365 A1 WO2018135365 A1 WO 2018135365A1
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Prior art keywords
pressure chamber
coating
coating head
liquid
main body
Prior art date
Application number
PCT/JP2018/000440
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English (en)
French (fr)
Japanese (ja)
Inventor
賢司 前田
中谷　政次
鵬摶 李
Original Assignee
日本電産株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産株式会社 filed Critical 日本電産株式会社
Priority to KR1020197019136A priority Critical patent/KR20190092479A/ko
Priority to JP2018563288A priority patent/JPWO2018135365A1/ja
Priority to CN201880006474.3A priority patent/CN110167684A/zh
Publication of WO2018135365A1 publication Critical patent/WO2018135365A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet

Definitions

  • the present invention relates to a coating head and a coating apparatus.
  • a coating apparatus is used when applying a coating solution onto an object.
  • the pressure chamber is filled with the coating solution, and the pressurizing unit including the piezoelectric element deflects the liquid contact film toward the inside of the pressure chamber, thereby applying pressure to the coating solution.
  • the coating liquid is discharged from the discharge port continuous to the pressure chamber.
  • Japanese Unexamined Patent Application Publication No. 2016-392 discloses a method for flowing out a small amount of liquid.
  • the volume variable passage portion of the liquid passage is pressurized from the outside and contracted in the direction in which the internal volume decreases, so that the liquid in the volume variable passage portion becomes the downstream passage portion and the upstream passage portion. Extruded on both sides.
  • the minute amount of liquid is dropped accurately.
  • the present invention has been made in view of the above problems, and aims to appropriately discharge a coating solution having a wide range of viscosities.
  • An exemplary coating head of the present invention includes: a main body part that forms a part of a pressure chamber filled with a coating liquid; a liquid contact film that forms another part of the pressure chamber; and the liquid contact film A pressure unit that discharges the coating liquid from a discharge port continuous with the pressure chamber by bending toward the inside of the pressure chamber, and the main body unit has the liquid contact film in a constant state. It has a volume changing section that can change the volume of the pressure chamber.
  • a coating liquid having a wide range of viscosity can be appropriately discharged.
  • FIG. 1 is a diagram illustrating a configuration of a coating apparatus according to the first embodiment.
  • FIG. 2 is a cross-sectional view showing the coating head.
  • FIG. 3 is a cross-sectional view showing the coating head.
  • FIG. 4 is a diagram illustrating a piping model.
  • FIG. 5 is a cross-sectional view showing another example of the coating head.
  • FIG. 6 is a cross-sectional view showing the coating head.
  • FIG. 7 is a cross-sectional view showing a coating head according to the second embodiment.
  • FIG. 8 is a cross-sectional view showing the coating head.
  • FIG. 9 is a cross-sectional view showing another example of the coating head.
  • FIG. 10 is a cross-sectional view showing the coating head.
  • FIG. 10 is a cross-sectional view showing the coating head.
  • FIG. 11 is a cross-sectional view showing another example of the coating head.
  • FIG. 12 is a bottom view showing a part of the coating head.
  • FIG. 13 is a cross-sectional view showing another example of the coating head.
  • FIG. 14 is a cross-sectional view showing another example of the coating head.
  • FIG. 15 is a cross-sectional view showing another example of the coating head.
  • FIG. 1 is a diagram showing a configuration of a coating apparatus 1 according to an exemplary first embodiment of the present invention.
  • the coating apparatus 1 is an apparatus that applies a predetermined coating liquid onto an object 9 that is a substrate such as a printed board or a semiconductor substrate.
  • the object 9 may be a machine part or the like.
  • the coating liquid include various adhesives (epoxy, UV curing, etc.), sealants, underfill agents, greases, and the like. *
  • the coating apparatus 1 includes a control unit 10, a moving mechanism 2, a coating head 3, and a coating liquid supply unit 4.
  • the control unit 10 is responsible for overall control of the coating apparatus 1.
  • the moving mechanism 2 includes a stage 21 and a stage moving mechanism 22.
  • the stage 21 holds the object 9.
  • the stage moving mechanism 22 moves the stage 21 relative to the coating head 3.
  • the moving direction of the stage 21 by the stage moving mechanism 22 is, for example, two directions perpendicular to each other. Typically, these moving directions are perpendicular to the direction in which the coating liquid is discharged by the coating head 3.
  • the stage moving mechanism 22 may be capable of rotating the stage 21 around an axis parallel to the discharge direction. *
  • the coating liquid supply unit 4 supplies the coating liquid to a pressure chamber 32 (see FIG. 2) described later in the coating head 3.
  • the coating liquid supply unit 4 includes a coating liquid tank 41, a supply flow path 42, and a pressure adjustment unit 43.
  • the coating liquid tank 41 stores the coating liquid.
  • the inside of the coating liquid tank 41 is sealed.
  • One end of the supply channel 42 is connected to the coating liquid tank 41, and the other end is connected to the coating head 3. That is, the inside of the coating liquid tank 41 and the pressure chamber 32 of the coating head 3 are spatially continuous via the supply channel 42.
  • the coating liquid tank 41 is disposed above the coating head 3 in the vertical direction.
  • the pressure adjustment unit 43 includes, for example, a pressure adjustment pump.
  • the pressure adjusting unit 43 adjusts the pressure in the coating liquid tank 41 to an arbitrary value within a pressure range including atmospheric pressure. For example, the pressure in the coating liquid tank 41 is adjusted to a negative pressure lower than the atmospheric pressure. *
  • FIG. 2 is a cross-sectional view showing the coating head 3.
  • the coating head 3 includes a main body part 31, a liquid contact film 34, and a pressure part 35.
  • the main body 31 is made of, for example, metal.
  • the main body portion 31 includes a main body annular portion 311, a holding portion 312, and a volume changing portion 36.
  • the main body annular portion 311 is an annular member centered on the center line C1.
  • the inner side surface of the main body annular portion 311 forms the side surface of the pressure chamber 32.
  • the pressure chamber 32 is an internal space of the coating head 3 and has, for example, a cylindrical shape centered on the center line C1.
  • the pressure chamber 32 is filled with a coating liquid.
  • a supply port 322 is provided on the side surface of the pressure chamber 32.
  • a discharge port 321 is provided on the bottom surface of the pressure chamber 32. The supply port 322 and the discharge port 321 are continuous with the pressure chamber 32. Details of the holding unit 312 and the volume changing unit 36 will be described later. *
  • the liquid contact film 34 is a diaphragm formed of metal or the like.
  • the liquid contact film 34 faces the discharge port 321.
  • the liquid contact film 34 forms a surface facing the bottom surface of the pressure chamber 32.
  • a part of the pressure chamber 32 is formed by the main body 31, and another part of the pressure chamber 32 is formed by the liquid contact film 34.
  • the surface of the liquid contact film 34 on the pressure chamber 32 side is a liquid contact surface in contact with the coating liquid in the pressure chamber 32.
  • the outer edge portion of the liquid contact film 34 is fixed to the main body annular portion 311 of the main body portion 31. Except for the discharge port 321 and the supply port 322, the pressure chamber 32 is sealed by the main body 31 and the liquid contact film 34.
  • a discharge port or the like for removing bubbles contained in the coating solution in the pressure chamber 32 may be provided as necessary. *
  • the pressure unit 35 includes a piezoelectric element 351.
  • the piezoelectric element 351 is fixed to a surface different from the liquid contact surface in the liquid contact film 34.
  • a drive circuit (not shown) supplies a drive voltage to the piezoelectric element 351
  • the piezoelectric element 351 performs an expansion / contraction operation, and the amount of bending of the liquid contact film 34 changes.
  • the pressurizing unit 35 deflects the liquid contact film 34 toward the inside of the pressure chamber 32, whereby the coating liquid is discharged from the discharge port 321.
  • the direction in which the pressurizing unit 35 bends the liquid contact film 34 includes a direction orthogonal to the liquid contact film 34 that is not bent.
  • the direction orthogonal to the wetted film 34 is referred to as “film normal direction”.
  • the film normal direction is parallel to the center line C ⁇ b> 1 of the ejection port 321.
  • the film normal direction coincides with the discharge direction of the coating liquid.
  • the holding portion 312 is attached to a surface of the main body annular portion 311 opposite to the liquid contact film 34.
  • the holding portion 312 is formed with a hole 313 centered on the center line C1.
  • the diameter of the hole 313 is smaller than the diameter of the pressure chamber 32.
  • the holding portion 312 forms an outer edge portion of the bottom surface of the pressure chamber 32.
  • the holding unit 312 is formed of, for example, metal. *
  • the volume changing unit 36 includes a facing portion 371.
  • the facing portion 371 faces the liquid contact film 34 in the film normal direction.
  • the facing portion 371 includes a movable portion 372 that can move in the film normal direction.
  • the movable part 372 includes a cylindrical member 373 and a discharge plate 374.
  • the cylindrical member 373 and the discharge plate 374 are made of, for example, metal.
  • the cylindrical member 373 has a cylindrical shape centered on the center line C1 and extends in the film normal direction.
  • One end 375 of the cylindrical member 373 in the film normal direction is disposed on the inner side of the pressure chamber 32.
  • the end portion 375 is referred to as “inner side end portion 375”.
  • the other end of the cylindrical member 373 is disposed outside the pressure chamber 32.
  • the end portion is referred to as “external side end portion”.
  • the tubular member 373 is a member that continues from the inside of the pressure chamber 32 to the outside and connects the inside and the outside of
  • the cylindrical member 373 is held by the holding unit 312. Specifically, a female screw is formed on the entire side surface of the hole 313 or on a part of the side surface in the film normal direction.
  • a male screw is formed on the outer surface of the cylindrical member 373.
  • the male screw is formed from the inner side end 375 to the vicinity of the outer side end, for example.
  • the male screw is fitted to the female screw by a screw action. Therefore, by rotating the cylindrical member 373 in one rotation direction around the center line C1, the cylindrical member 373 moves to the liquid contact film 34 side in the film normal direction (see FIG. 3 described later). . By rotating the cylindrical member 373 in the other rotation direction, the cylindrical member 373 moves to the opposite side to the liquid contact film 34 in the film normal direction.
  • the cylindrical member 373 is held by the holding unit 312 while being movable in the film normal direction.
  • the male screw is fitted to the female screw in a state where the seal tape is wound around the male screw on the outer surface of the cylindrical member 373.
  • the seal member 33 is configured by a portion of the seal tape between the outer side surface of the tubular member 373 and the side surface of the hole 313.
  • the discharge plate 374 is a plate-like member provided with the discharge port 321 described above.
  • the diameter of the discharge port 321 may be arbitrarily determined.
  • the discharge plate 374 is perpendicular to the center line C1.
  • the discharge plate 374 is attached to the inner side end 375 and is disposed inside the pressure chamber 32.
  • the coating liquid discharged from the discharge port 321 passes through the cylindrical member 373 and travels toward the object 9. Since the periphery of the discharge port 321 is surrounded by the cylindrical member 373 outside the pressure chamber 32, the influence of the surrounding wind can be suppressed when the coating liquid is discharged. Since the inner diameter of the cylindrical member 373 is sufficiently large, in principle, the coating liquid that passes through the cylindrical member 373 does not adhere to the inner side surface of the cylindrical member 373.
  • the inner surface of the cylindrical member 373 may be other than the cylindrical surface as long as it is a cylindrical surface. Further, the diameter of the inner surface may gradually increase from the inner side end portion 375 toward the outer side end portion. *
  • the cylindrical member 373 includes a flange portion 376.
  • the flange portion 376 is provided at the outer end and is disposed outside the pressure chamber 32.
  • a portion including the flange portion 376 in the outer side end portion can be regarded as a screw head.
  • a cross-shaped groove centering on the center line C1 is formed on the end surface of the flange portion 376.
  • the outer shape of the flange portion 376 may be a polygon such as a hexagon. Also in this case, the cylindrical member 373 can be easily rotated. *
  • the control unit 10 controls the moving mechanism 2 and the coating head 3 to apply the coating liquid onto the object 9. Specifically, when the moving mechanism 2 moves the stage 21, the position of the application target on the object 9 is arranged at a position facing the discharge port 321. Then, by supplying a driving voltage to the piezoelectric element 351, droplets of the coating liquid are discharged from the discharge port 321 toward the position. Since the piezoelectric element 351 has high responsiveness, it is possible to easily reduce and adjust the amount of droplets by controlling the driving voltage. In the coating apparatus 1, the application liquid is applied to all the application target positions on the object 9 by repeatedly moving the object 9 and discharging the application liquid. *
  • the position of the movable part 372 in the film normal direction is changed according to the viscosity of the coating liquid to be coated on the object 9.
  • the cylindrical member 373 is arranged at a position shown in FIG. 2 away from the liquid contact film 34 in the film normal direction.
  • the cylindrical member 373 is disposed at a position shown in FIG. 3 that is close to the liquid contact film 34 in the film normal direction. 2 and 3, the distance between the liquid contact film 34 and the discharge plate 374 is indicated by arrows denoted by L1 and L2. *
  • the central part of the bottom surface of the pressure chamber 32 is a discharge plate 374.
  • the discharge plate 374 moves in the film normal direction together with the cylindrical member 373. Therefore, when the liquid contact film 34 is in a constant state, for example, when the driving voltage is not supplied to the piezoelectric element 351, the volume of the pressure chamber 32 depends on the position of the cylindrical member 373 in the film normal direction. Change. Specifically, the volume of the pressure chamber 32 decreases as the cylindrical member 373 approaches the liquid contact film 34. When the amount of deflection of the liquid contact film 34 generated by the pressurizing unit 35 is constant, the smaller the volume of the pressure chamber 32, the greater the rate of change of the volume by the pressurizing unit 35, and the coating liquid in the pressure chamber 32 becomes larger.
  • the applied pressure increases. Therefore, even if the coating liquid has a high viscosity, it is possible to appropriately discharge the coating liquid from the discharge port 321 by reducing the volume of the pressure chamber 32.
  • the movable distance of the cylindrical member 373 is, for example, several hundred ⁇ m to several mm. In the application head 3, the volume of the pressure chamber 32 can be reduced to, for example, 10% of the maximum volume.
  • the relationship between the viscosity of the coating liquid and the amount of droplets and the position of the cylindrical member 373 in the film normal direction is acquired in advance by performing an experiment or the like.
  • the position where the cylindrical member 373 should be arranged in the film normal direction is specified from the viscosity of the coating liquid actually used and the desired amount of droplets.
  • the cylindrical member 373 is arrange
  • a coating head of a comparative example in which the volume changing unit is omitted, that is, the volume of the pressure chamber is constant is assumed.
  • the coating head of the comparative example for example, by producing a relatively small volume of the pressure chamber, it is possible to discharge a coating liquid having a high viscosity.
  • the pressure applied to the coating liquid in the pressure chamber becomes excessively high, and the droplets of the coating liquid cannot be discharged appropriately.
  • the maximum amount of deflection that the piezoelectric element can cause in the wetted film is, for example, several ⁇ m to several tens of ⁇ m. Therefore, by adjusting only the bent amount of the wetted film, the coating liquid having a high viscosity and the viscosity can be reduced. It is difficult to properly discharge both low coating liquids.
  • the volume of the pressure chamber 32 in a state where the liquid contact film 34 is constant can be changed by the volume changing unit 36.
  • the coating liquid of a wide range of viscosity can be discharged appropriately.
  • the coating head 3 can appropriately discharge a coating solution having a viscosity range of 100 millipascal seconds (mPa ⁇ s) to 300,000 mPa ⁇ s. *
  • Equation 1 ⁇ is a viscosity coefficient (viscosity) [Pa ⁇ s]
  • L is a tube length [m]
  • V is a flow rate [m3 / s]
  • D is a tube inner diameter [m].
  • the inner diameter D of the pipe has a great influence on the pressure loss.
  • the liquid contact film 34 and the discharge port 321 correspond to the inlet side and the outlet side in the piping model of FIG.
  • the pressure loss increases. Therefore, the energy efficiency related to the discharge of the coating liquid in the coating head is lowered.
  • the coating liquid may not be discharged depending on the pressure applied to the coating liquid in the pressure chamber.
  • the coating head 3 when the volume of the pressure chamber 32 is reduced, the length of the pressure chamber 32 corresponding to the tube length L is reduced without changing the diameter of the pressure chamber 32. Specifically, the movable portion 372 provided with the discharge port 321 is moved to the liquid contact film 34 side in the film normal direction, and the distance between the liquid contact film 34 and the discharge port 321 is reduced. As a result, the pressure loss between the liquid contact film 34 and the discharge port 321 can be reduced, and the coating liquid can be discharged more reliably. In addition, the energy efficiency related to the discharge of the coating liquid in the coating head 3 can be increased, and heat generation in the coating head 3 can also be suppressed. *
  • the coating head 3 that moves the cylindrical member 373 can easily change the volume of the pressure chamber 32 without adopting a complicated structure. As a result, the range of the viscosity of the dischargeable coating liquid can be increased. Moreover, the structure of the coating head 3 can be simplified and the coating head 3 can be easily downsized. By forming a female screw and a male screw on the side surface of the hole 313 and the outer surface of the cylindrical member 373, the cylindrical member 373 can be easily moved in the normal direction of the membrane. Depending on the design of the coating head 3, the female screw and the male screw may be omitted, and the cylindrical member 373 may be press-fitted into the hole 313 of the holding unit 312. The same applies to the coating head 3 shown in FIGS. *
  • the cylindrical member 373 in the film normal direction in a state where the coating solution is not filled in the pressure chamber 32. Thereby, an excessively large pressure acts on the wetted film 34 to prevent the wetted film 34 from being damaged.
  • the movable part 372 is preferably removed from the holding part 312 and the inside of the coating head 3 is cleaned. Further, the sealing member 33 is peeled off, and a sealing tape that becomes a new sealing member 33 is wound around the cylindrical member 373, and then the cylindrical member 373 is fitted into the holding portion 312.
  • the thickness of the holding portion 312 may be larger than the movable distance of the cylindrical member 373. Accordingly, when the volume of the pressure chamber 32 is changed without removing the movable portion 372 from the holding portion 312, the portion where the coating liquid is attached to the outer surface of the cylindrical member 373 is prevented from being exposed to the outside. .
  • the viscosity of the coating liquid slightly varies depending on the ambient temperature, even if the discharge amount of the coating liquid is adjusted by slightly changing the amount of bending caused by the pressurizing unit 35 in the liquid contact film 34. Good. *
  • FIGS. 5 and 6 are cross-sectional views showing other examples of the coating head 3, and correspond to FIGS. 2 and 3, respectively.
  • an auxiliary member 378 is added to the coating head 3 of FIGS.
  • Other configurations are the same as those in FIGS. 2 and 3, and the same reference numerals are given to the same configurations. *
  • the auxiliary member 378 is an annular member centered on the center line C1 and is included in the facing portion 371.
  • a female screw is formed on the inner side surface of the auxiliary member 378.
  • the tubular member 373 is inserted into both the auxiliary member 378 and the hole 313 of the holding portion 312. When the tubular member 373 is tightened with respect to the hole 313, the auxiliary member 378 is in contact with both between the flange portion 376 and the holding portion 312.
  • the length of the auxiliary member 378 to be used is changed according to the position where the cylindrical member 373 is to be disposed. Specifically, a plurality of auxiliary members 378 having different lengths are prepared in advance according to a plurality of positions of the cylindrical member 373.
  • the position where the cylindrical member 373 should be arranged in the film normal direction is specified according to the viscosity of the coating liquid and the like.
  • One auxiliary member 378 corresponding to the position is selected, and the cylindrical member 373 is inserted into the auxiliary member 378. The cylindrical member 373 is further inserted into the hole 313 of the holding unit 312.
  • the tubular member 373 is tightened until the auxiliary member 378 contacts both the flange portion 376 and the holding portion 312. Thereby, the distance between the discharge plate 374 attached to the end of the cylindrical member 373 and the liquid contact film 34 can be managed with high accuracy, and the volume of the pressure chamber 32 can be adjusted with high accuracy.
  • the internal thread on the inner surface of the auxiliary member 378 may be omitted as necessary.
  • FIGS. 7 and 8 are cross-sectional views showing a coating head 3a according to a second exemplary embodiment of the present invention.
  • replaceable facing portions 381a and 381b are provided in place of the facing portion 371 of FIGS.
  • the holding portion 312 is omitted, and the structure of the seal member 33a is different from the seal member 33 of FIGS.
  • Other configurations are the same as those in FIGS. 2 and 3, and the same reference numerals are given to the same configurations. *
  • Each of the facing portion 381a shown in FIG. 7 and the facing portion 381b shown in FIG. 8 includes a plate-like portion 382 and a cylindrical protruding portion 383.
  • the plate-like portion 382 has a disc shape centered on the center line C1, and spreads perpendicularly to the center line C1.
  • the plate-like portion 382 is provided with a discharge port 321.
  • the cylindrical protruding portion 383 is provided on the main surface of the plate-like portion 382 facing the liquid contact film 34.
  • the cylindrical protrusion 383 has a cylindrical shape with the center line C1 as the center.
  • the cylindrical protrusion 383 is press-fitted into the inner surface of the main body annular portion 311 and is fixed to the main body annular portion 311.
  • An annular recess is formed on the inner side surface of the main body annular portion 311.
  • a seal member 33a such as an O-ring is provided in the annular recess.
  • the length of the cylindrical protruding portion 383 in the film normal direction is different.
  • the wall thickness of the cylindrical protrusion 383 is the same.
  • another facing portion having a different length of the cylindrical protruding portion 383 is prepared.
  • one facing portion is selected from the plurality of facing portions 381a and 381b in accordance with the viscosity of the coating liquid applied on the object 9. For example, when using a coating liquid having a relatively low viscosity, an opposing portion having a short length of the cylindrical protrusion 383, for example, an opposing portion 381a in FIG. 7 is selected.
  • a facing portion having a long cylindrical protrusion 383, for example, a facing portion 381b in FIG. 8 is selected.
  • the volume of the pressure chamber 32 when selecting the facing portion 381b in FIG. 8 is smaller than that when selecting the facing portion 381a in FIG. *
  • the facing portion can be replaced with another facing portion, and the volume of the pressure chamber 32 when the facing portion is used for the main body 31 is the same as that of the other facing portion. This is different from the volume of the pressure chamber 32 when used in the main body 31. That is, in the volume changing unit 36 of the coating head 3a, the volume of the pressure chamber 32 in a state where the liquid contact film 34 is constant can be changed by exchanging the facing part. Accordingly, it is possible to appropriately discharge a coating liquid having a wide range of viscosity.
  • FIGS. 9 and 10 are diagrams showing another example of the coating head 3a.
  • a hole 384 is formed instead of the discharge port 321 in the facing portions 381a and 381b of FIGS.
  • the diameter of the hole 384 is sufficiently larger than a discharge port 321 provided in a discharge plate 385 described later.
  • the inner side surface of the cylindrical protrusion 383 is continuous with the inner side surface of the hole 384 and extends in parallel to the center line C1.
  • a discharge plate 385 is attached to the end of the cylindrical protrusion 383 on the liquid contact film 34 side.
  • the discharge plate 385 is perpendicular to the center line C1, and a discharge port 321 is provided at the center.
  • the discharge plate 385 is disposed inside the pressure chamber 32. *
  • the lengths of the cylindrical protruding portions 383 in the film normal direction are different from each other. Therefore, the volume of the pressure chamber 32 when one opposing portion is used for the main body 31 is different from the volume of the pressure chamber 32 when another opposing portion is used for the main body 31. Thereby, it becomes possible to appropriately discharge a coating liquid having a wide range of viscosity.
  • each of the one facing portion and the other facing portion includes the discharge port 321, and the distance between the liquid contact film 34 and the discharge port 321 when the one facing portion is used for the main body portion 31 is This distance differs from the case where the other facing portion is used for the main body portion 31.
  • the volume of the pressure chamber 32 when the one facing portion is used is smaller than when the other facing portion is used, the liquid contact film 34 and the discharge port 321 when the one facing portion is used. Is also smaller than when the other facing portion is used.
  • the coating heads 3 and 3a and the coating apparatus 1 can be variously modified. *
  • the position of the discharge port 321 may be fixed with respect to the main body annular portion 311.
  • the discharge port 321 is provided in the holding unit 312 fixed to the main body annular portion 311.
  • the movable part 372 includes a plurality of screws 379.
  • the holding portion 312 is provided with a plurality of screw holes 314, and the plurality of screws 379 are respectively screwed into the plurality of screw holes 314. It is fitted by action. Ends of the plurality of screws 379 are disposed in the pressure chamber 32.
  • a plurality of screws 379 are movable in the film normal direction. In the plurality of screws 379, the volume of the pressure chamber 32 can be easily changed by changing the length of the portion disposed in the pressure chamber 32. *
  • the discharge plate 374 may be attached on the inner surface of the cylindrical member 373, that is, on the inner side of the cylindrical member 373. Also in this case, when the volume of the pressure chamber 32 is reduced, the distance between the liquid contact film 34 and the discharge plate 374 is also reduced, and the pressure loss between the liquid contact film 34 and the discharge port 321 is reduced. be able to. In addition, the influence of the surrounding wind can be suppressed in discharging the coating liquid. *
  • seal member 33a such as an O-ring is provided between the cylindrical member 373 of the facing portion 371 and the main body annular portion 311.
  • a seal member 33 a is provided between the cylindrical member 373 and the holding unit 312.
  • the seal member 33 formed of a seal tape is provided between the screw 379 included in the facing portion 371 and the side surface of the screw hole 314.
  • the seal member 33a is provided between the facing portions 381a to 381d and the main body annular portion 311.
  • the seal member 33 that prevents the coating liquid from passing between the facing portions 371, 381a to 381d and the portions of the main body 31 other than the facing portions 371, 381a to 381d. , 33a are provided. Thereby, the leakage of the coating liquid can be suppressed.
  • the volume changing unit 36 may be provided on the side surface of the pressure chamber 32.
  • a screw protruding inward from the side surface of the pressure chamber 32 is provided, and the volume of the pressure chamber 32 is changed by changing the length of a portion of the screw disposed in the pressure chamber 32.
  • the discharge port 321 may be provided at a position other than the bottom surface of the pressure chamber 32, for example, at the side surface of the pressure chamber 32.
  • the stage 21 may be fixed, and the coating head 3 may be moved by a moving mechanism. That is, the moving mechanism may move the object 9 to which the coating liquid is applied relative to the coating head 3.
  • the coating head and the coating apparatus according to the present invention can be used for various purposes.

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  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
PCT/JP2018/000440 2017-01-17 2018-01-11 塗布ヘッドおよび塗布装置 WO2018135365A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020197019136A KR20190092479A (ko) 2017-01-17 2018-01-11 도포 헤드 및 도포 장치
JP2018563288A JPWO2018135365A1 (ja) 2017-01-17 2018-01-11 塗布ヘッドおよび塗布装置
CN201880006474.3A CN110167684A (zh) 2017-01-17 2018-01-11 涂敷头和涂敷装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017006019 2017-01-17
JP2017-006019 2017-01-17

Publications (1)

Publication Number Publication Date
WO2018135365A1 true WO2018135365A1 (ja) 2018-07-26

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JP2004141866A (ja) * 2002-09-30 2004-05-20 Matsushita Electric Ind Co Ltd 流体吐出方法及び流体吐出装置
JP2007130546A (ja) * 2005-11-09 2007-05-31 Pioneer Electronic Corp インクジェットヘッド及びプラズマディスプレイパネルの製造装置
JP2011147889A (ja) * 2010-01-22 2011-08-04 Toray Eng Co Ltd 微小液滴吐出装置
JP2013139745A (ja) * 2012-01-04 2013-07-18 AdvanJet 粘性非接触噴射方法および装置

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US7131555B2 (en) * 2002-09-30 2006-11-07 Matsushita Electric Industrial Co., Ltd. Method and device for discharging fluid
CN100515773C (zh) * 2004-11-17 2009-07-22 兄弟工业株式会社 喷墨头
KR20130143542A (ko) * 2011-02-15 2013-12-31 파나소닉 주식회사 액체 토출 장치 및 액체 토출 방법
JP5802347B1 (ja) 2014-05-20 2015-10-28 エンジニアリングシステム株式会社 微量液体滴下方法および微量液体ディスペンサ

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
JP2004141866A (ja) * 2002-09-30 2004-05-20 Matsushita Electric Ind Co Ltd 流体吐出方法及び流体吐出装置
JP2007130546A (ja) * 2005-11-09 2007-05-31 Pioneer Electronic Corp インクジェットヘッド及びプラズマディスプレイパネルの製造装置
JP2011147889A (ja) * 2010-01-22 2011-08-04 Toray Eng Co Ltd 微小液滴吐出装置
JP2013139745A (ja) * 2012-01-04 2013-07-18 AdvanJet 粘性非接触噴射方法および装置

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JPWO2018135365A1 (ja) 2019-11-07
CN110167684A (zh) 2019-08-23

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