WO2018135365A1 - Applicator head and applicator device - Google Patents

Applicator head and applicator device Download PDF

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Publication number
WO2018135365A1
WO2018135365A1 PCT/JP2018/000440 JP2018000440W WO2018135365A1 WO 2018135365 A1 WO2018135365 A1 WO 2018135365A1 JP 2018000440 W JP2018000440 W JP 2018000440W WO 2018135365 A1 WO2018135365 A1 WO 2018135365A1
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WO
WIPO (PCT)
Prior art keywords
pressure chamber
coating
coating head
liquid
main body
Prior art date
Application number
PCT/JP2018/000440
Other languages
French (fr)
Japanese (ja)
Inventor
賢司 前田
中谷　政次
鵬摶 李
Original Assignee
日本電産株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産株式会社 filed Critical 日本電産株式会社
Priority to JP2018563288A priority Critical patent/JPWO2018135365A1/en
Priority to KR1020197019136A priority patent/KR20190092479A/en
Priority to CN201880006474.3A priority patent/CN110167684A/en
Publication of WO2018135365A1 publication Critical patent/WO2018135365A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet

Definitions

  • the present invention relates to a coating head and a coating apparatus.
  • a coating apparatus is used when applying a coating solution onto an object.
  • the pressure chamber is filled with the coating solution, and the pressurizing unit including the piezoelectric element deflects the liquid contact film toward the inside of the pressure chamber, thereby applying pressure to the coating solution.
  • the coating liquid is discharged from the discharge port continuous to the pressure chamber.
  • Japanese Unexamined Patent Application Publication No. 2016-392 discloses a method for flowing out a small amount of liquid.
  • the volume variable passage portion of the liquid passage is pressurized from the outside and contracted in the direction in which the internal volume decreases, so that the liquid in the volume variable passage portion becomes the downstream passage portion and the upstream passage portion. Extruded on both sides.
  • the minute amount of liquid is dropped accurately.
  • the present invention has been made in view of the above problems, and aims to appropriately discharge a coating solution having a wide range of viscosities.
  • An exemplary coating head of the present invention includes: a main body part that forms a part of a pressure chamber filled with a coating liquid; a liquid contact film that forms another part of the pressure chamber; and the liquid contact film A pressure unit that discharges the coating liquid from a discharge port continuous with the pressure chamber by bending toward the inside of the pressure chamber, and the main body unit has the liquid contact film in a constant state. It has a volume changing section that can change the volume of the pressure chamber.
  • a coating liquid having a wide range of viscosity can be appropriately discharged.
  • FIG. 1 is a diagram illustrating a configuration of a coating apparatus according to the first embodiment.
  • FIG. 2 is a cross-sectional view showing the coating head.
  • FIG. 3 is a cross-sectional view showing the coating head.
  • FIG. 4 is a diagram illustrating a piping model.
  • FIG. 5 is a cross-sectional view showing another example of the coating head.
  • FIG. 6 is a cross-sectional view showing the coating head.
  • FIG. 7 is a cross-sectional view showing a coating head according to the second embodiment.
  • FIG. 8 is a cross-sectional view showing the coating head.
  • FIG. 9 is a cross-sectional view showing another example of the coating head.
  • FIG. 10 is a cross-sectional view showing the coating head.
  • FIG. 10 is a cross-sectional view showing the coating head.
  • FIG. 11 is a cross-sectional view showing another example of the coating head.
  • FIG. 12 is a bottom view showing a part of the coating head.
  • FIG. 13 is a cross-sectional view showing another example of the coating head.
  • FIG. 14 is a cross-sectional view showing another example of the coating head.
  • FIG. 15 is a cross-sectional view showing another example of the coating head.
  • FIG. 1 is a diagram showing a configuration of a coating apparatus 1 according to an exemplary first embodiment of the present invention.
  • the coating apparatus 1 is an apparatus that applies a predetermined coating liquid onto an object 9 that is a substrate such as a printed board or a semiconductor substrate.
  • the object 9 may be a machine part or the like.
  • the coating liquid include various adhesives (epoxy, UV curing, etc.), sealants, underfill agents, greases, and the like. *
  • the coating apparatus 1 includes a control unit 10, a moving mechanism 2, a coating head 3, and a coating liquid supply unit 4.
  • the control unit 10 is responsible for overall control of the coating apparatus 1.
  • the moving mechanism 2 includes a stage 21 and a stage moving mechanism 22.
  • the stage 21 holds the object 9.
  • the stage moving mechanism 22 moves the stage 21 relative to the coating head 3.
  • the moving direction of the stage 21 by the stage moving mechanism 22 is, for example, two directions perpendicular to each other. Typically, these moving directions are perpendicular to the direction in which the coating liquid is discharged by the coating head 3.
  • the stage moving mechanism 22 may be capable of rotating the stage 21 around an axis parallel to the discharge direction. *
  • the coating liquid supply unit 4 supplies the coating liquid to a pressure chamber 32 (see FIG. 2) described later in the coating head 3.
  • the coating liquid supply unit 4 includes a coating liquid tank 41, a supply flow path 42, and a pressure adjustment unit 43.
  • the coating liquid tank 41 stores the coating liquid.
  • the inside of the coating liquid tank 41 is sealed.
  • One end of the supply channel 42 is connected to the coating liquid tank 41, and the other end is connected to the coating head 3. That is, the inside of the coating liquid tank 41 and the pressure chamber 32 of the coating head 3 are spatially continuous via the supply channel 42.
  • the coating liquid tank 41 is disposed above the coating head 3 in the vertical direction.
  • the pressure adjustment unit 43 includes, for example, a pressure adjustment pump.
  • the pressure adjusting unit 43 adjusts the pressure in the coating liquid tank 41 to an arbitrary value within a pressure range including atmospheric pressure. For example, the pressure in the coating liquid tank 41 is adjusted to a negative pressure lower than the atmospheric pressure. *
  • FIG. 2 is a cross-sectional view showing the coating head 3.
  • the coating head 3 includes a main body part 31, a liquid contact film 34, and a pressure part 35.
  • the main body 31 is made of, for example, metal.
  • the main body portion 31 includes a main body annular portion 311, a holding portion 312, and a volume changing portion 36.
  • the main body annular portion 311 is an annular member centered on the center line C1.
  • the inner side surface of the main body annular portion 311 forms the side surface of the pressure chamber 32.
  • the pressure chamber 32 is an internal space of the coating head 3 and has, for example, a cylindrical shape centered on the center line C1.
  • the pressure chamber 32 is filled with a coating liquid.
  • a supply port 322 is provided on the side surface of the pressure chamber 32.
  • a discharge port 321 is provided on the bottom surface of the pressure chamber 32. The supply port 322 and the discharge port 321 are continuous with the pressure chamber 32. Details of the holding unit 312 and the volume changing unit 36 will be described later. *
  • the liquid contact film 34 is a diaphragm formed of metal or the like.
  • the liquid contact film 34 faces the discharge port 321.
  • the liquid contact film 34 forms a surface facing the bottom surface of the pressure chamber 32.
  • a part of the pressure chamber 32 is formed by the main body 31, and another part of the pressure chamber 32 is formed by the liquid contact film 34.
  • the surface of the liquid contact film 34 on the pressure chamber 32 side is a liquid contact surface in contact with the coating liquid in the pressure chamber 32.
  • the outer edge portion of the liquid contact film 34 is fixed to the main body annular portion 311 of the main body portion 31. Except for the discharge port 321 and the supply port 322, the pressure chamber 32 is sealed by the main body 31 and the liquid contact film 34.
  • a discharge port or the like for removing bubbles contained in the coating solution in the pressure chamber 32 may be provided as necessary. *
  • the pressure unit 35 includes a piezoelectric element 351.
  • the piezoelectric element 351 is fixed to a surface different from the liquid contact surface in the liquid contact film 34.
  • a drive circuit (not shown) supplies a drive voltage to the piezoelectric element 351
  • the piezoelectric element 351 performs an expansion / contraction operation, and the amount of bending of the liquid contact film 34 changes.
  • the pressurizing unit 35 deflects the liquid contact film 34 toward the inside of the pressure chamber 32, whereby the coating liquid is discharged from the discharge port 321.
  • the direction in which the pressurizing unit 35 bends the liquid contact film 34 includes a direction orthogonal to the liquid contact film 34 that is not bent.
  • the direction orthogonal to the wetted film 34 is referred to as “film normal direction”.
  • the film normal direction is parallel to the center line C ⁇ b> 1 of the ejection port 321.
  • the film normal direction coincides with the discharge direction of the coating liquid.
  • the holding portion 312 is attached to a surface of the main body annular portion 311 opposite to the liquid contact film 34.
  • the holding portion 312 is formed with a hole 313 centered on the center line C1.
  • the diameter of the hole 313 is smaller than the diameter of the pressure chamber 32.
  • the holding portion 312 forms an outer edge portion of the bottom surface of the pressure chamber 32.
  • the holding unit 312 is formed of, for example, metal. *
  • the volume changing unit 36 includes a facing portion 371.
  • the facing portion 371 faces the liquid contact film 34 in the film normal direction.
  • the facing portion 371 includes a movable portion 372 that can move in the film normal direction.
  • the movable part 372 includes a cylindrical member 373 and a discharge plate 374.
  • the cylindrical member 373 and the discharge plate 374 are made of, for example, metal.
  • the cylindrical member 373 has a cylindrical shape centered on the center line C1 and extends in the film normal direction.
  • One end 375 of the cylindrical member 373 in the film normal direction is disposed on the inner side of the pressure chamber 32.
  • the end portion 375 is referred to as “inner side end portion 375”.
  • the other end of the cylindrical member 373 is disposed outside the pressure chamber 32.
  • the end portion is referred to as “external side end portion”.
  • the tubular member 373 is a member that continues from the inside of the pressure chamber 32 to the outside and connects the inside and the outside of
  • the cylindrical member 373 is held by the holding unit 312. Specifically, a female screw is formed on the entire side surface of the hole 313 or on a part of the side surface in the film normal direction.
  • a male screw is formed on the outer surface of the cylindrical member 373.
  • the male screw is formed from the inner side end 375 to the vicinity of the outer side end, for example.
  • the male screw is fitted to the female screw by a screw action. Therefore, by rotating the cylindrical member 373 in one rotation direction around the center line C1, the cylindrical member 373 moves to the liquid contact film 34 side in the film normal direction (see FIG. 3 described later). . By rotating the cylindrical member 373 in the other rotation direction, the cylindrical member 373 moves to the opposite side to the liquid contact film 34 in the film normal direction.
  • the cylindrical member 373 is held by the holding unit 312 while being movable in the film normal direction.
  • the male screw is fitted to the female screw in a state where the seal tape is wound around the male screw on the outer surface of the cylindrical member 373.
  • the seal member 33 is configured by a portion of the seal tape between the outer side surface of the tubular member 373 and the side surface of the hole 313.
  • the discharge plate 374 is a plate-like member provided with the discharge port 321 described above.
  • the diameter of the discharge port 321 may be arbitrarily determined.
  • the discharge plate 374 is perpendicular to the center line C1.
  • the discharge plate 374 is attached to the inner side end 375 and is disposed inside the pressure chamber 32.
  • the coating liquid discharged from the discharge port 321 passes through the cylindrical member 373 and travels toward the object 9. Since the periphery of the discharge port 321 is surrounded by the cylindrical member 373 outside the pressure chamber 32, the influence of the surrounding wind can be suppressed when the coating liquid is discharged. Since the inner diameter of the cylindrical member 373 is sufficiently large, in principle, the coating liquid that passes through the cylindrical member 373 does not adhere to the inner side surface of the cylindrical member 373.
  • the inner surface of the cylindrical member 373 may be other than the cylindrical surface as long as it is a cylindrical surface. Further, the diameter of the inner surface may gradually increase from the inner side end portion 375 toward the outer side end portion. *
  • the cylindrical member 373 includes a flange portion 376.
  • the flange portion 376 is provided at the outer end and is disposed outside the pressure chamber 32.
  • a portion including the flange portion 376 in the outer side end portion can be regarded as a screw head.
  • a cross-shaped groove centering on the center line C1 is formed on the end surface of the flange portion 376.
  • the outer shape of the flange portion 376 may be a polygon such as a hexagon. Also in this case, the cylindrical member 373 can be easily rotated. *
  • the control unit 10 controls the moving mechanism 2 and the coating head 3 to apply the coating liquid onto the object 9. Specifically, when the moving mechanism 2 moves the stage 21, the position of the application target on the object 9 is arranged at a position facing the discharge port 321. Then, by supplying a driving voltage to the piezoelectric element 351, droplets of the coating liquid are discharged from the discharge port 321 toward the position. Since the piezoelectric element 351 has high responsiveness, it is possible to easily reduce and adjust the amount of droplets by controlling the driving voltage. In the coating apparatus 1, the application liquid is applied to all the application target positions on the object 9 by repeatedly moving the object 9 and discharging the application liquid. *
  • the position of the movable part 372 in the film normal direction is changed according to the viscosity of the coating liquid to be coated on the object 9.
  • the cylindrical member 373 is arranged at a position shown in FIG. 2 away from the liquid contact film 34 in the film normal direction.
  • the cylindrical member 373 is disposed at a position shown in FIG. 3 that is close to the liquid contact film 34 in the film normal direction. 2 and 3, the distance between the liquid contact film 34 and the discharge plate 374 is indicated by arrows denoted by L1 and L2. *
  • the central part of the bottom surface of the pressure chamber 32 is a discharge plate 374.
  • the discharge plate 374 moves in the film normal direction together with the cylindrical member 373. Therefore, when the liquid contact film 34 is in a constant state, for example, when the driving voltage is not supplied to the piezoelectric element 351, the volume of the pressure chamber 32 depends on the position of the cylindrical member 373 in the film normal direction. Change. Specifically, the volume of the pressure chamber 32 decreases as the cylindrical member 373 approaches the liquid contact film 34. When the amount of deflection of the liquid contact film 34 generated by the pressurizing unit 35 is constant, the smaller the volume of the pressure chamber 32, the greater the rate of change of the volume by the pressurizing unit 35, and the coating liquid in the pressure chamber 32 becomes larger.
  • the applied pressure increases. Therefore, even if the coating liquid has a high viscosity, it is possible to appropriately discharge the coating liquid from the discharge port 321 by reducing the volume of the pressure chamber 32.
  • the movable distance of the cylindrical member 373 is, for example, several hundred ⁇ m to several mm. In the application head 3, the volume of the pressure chamber 32 can be reduced to, for example, 10% of the maximum volume.
  • the relationship between the viscosity of the coating liquid and the amount of droplets and the position of the cylindrical member 373 in the film normal direction is acquired in advance by performing an experiment or the like.
  • the position where the cylindrical member 373 should be arranged in the film normal direction is specified from the viscosity of the coating liquid actually used and the desired amount of droplets.
  • the cylindrical member 373 is arrange
  • a coating head of a comparative example in which the volume changing unit is omitted, that is, the volume of the pressure chamber is constant is assumed.
  • the coating head of the comparative example for example, by producing a relatively small volume of the pressure chamber, it is possible to discharge a coating liquid having a high viscosity.
  • the pressure applied to the coating liquid in the pressure chamber becomes excessively high, and the droplets of the coating liquid cannot be discharged appropriately.
  • the maximum amount of deflection that the piezoelectric element can cause in the wetted film is, for example, several ⁇ m to several tens of ⁇ m. Therefore, by adjusting only the bent amount of the wetted film, the coating liquid having a high viscosity and the viscosity can be reduced. It is difficult to properly discharge both low coating liquids.
  • the volume of the pressure chamber 32 in a state where the liquid contact film 34 is constant can be changed by the volume changing unit 36.
  • the coating liquid of a wide range of viscosity can be discharged appropriately.
  • the coating head 3 can appropriately discharge a coating solution having a viscosity range of 100 millipascal seconds (mPa ⁇ s) to 300,000 mPa ⁇ s. *
  • Equation 1 ⁇ is a viscosity coefficient (viscosity) [Pa ⁇ s]
  • L is a tube length [m]
  • V is a flow rate [m3 / s]
  • D is a tube inner diameter [m].
  • the inner diameter D of the pipe has a great influence on the pressure loss.
  • the liquid contact film 34 and the discharge port 321 correspond to the inlet side and the outlet side in the piping model of FIG.
  • the pressure loss increases. Therefore, the energy efficiency related to the discharge of the coating liquid in the coating head is lowered.
  • the coating liquid may not be discharged depending on the pressure applied to the coating liquid in the pressure chamber.
  • the coating head 3 when the volume of the pressure chamber 32 is reduced, the length of the pressure chamber 32 corresponding to the tube length L is reduced without changing the diameter of the pressure chamber 32. Specifically, the movable portion 372 provided with the discharge port 321 is moved to the liquid contact film 34 side in the film normal direction, and the distance between the liquid contact film 34 and the discharge port 321 is reduced. As a result, the pressure loss between the liquid contact film 34 and the discharge port 321 can be reduced, and the coating liquid can be discharged more reliably. In addition, the energy efficiency related to the discharge of the coating liquid in the coating head 3 can be increased, and heat generation in the coating head 3 can also be suppressed. *
  • the coating head 3 that moves the cylindrical member 373 can easily change the volume of the pressure chamber 32 without adopting a complicated structure. As a result, the range of the viscosity of the dischargeable coating liquid can be increased. Moreover, the structure of the coating head 3 can be simplified and the coating head 3 can be easily downsized. By forming a female screw and a male screw on the side surface of the hole 313 and the outer surface of the cylindrical member 373, the cylindrical member 373 can be easily moved in the normal direction of the membrane. Depending on the design of the coating head 3, the female screw and the male screw may be omitted, and the cylindrical member 373 may be press-fitted into the hole 313 of the holding unit 312. The same applies to the coating head 3 shown in FIGS. *
  • the cylindrical member 373 in the film normal direction in a state where the coating solution is not filled in the pressure chamber 32. Thereby, an excessively large pressure acts on the wetted film 34 to prevent the wetted film 34 from being damaged.
  • the movable part 372 is preferably removed from the holding part 312 and the inside of the coating head 3 is cleaned. Further, the sealing member 33 is peeled off, and a sealing tape that becomes a new sealing member 33 is wound around the cylindrical member 373, and then the cylindrical member 373 is fitted into the holding portion 312.
  • the thickness of the holding portion 312 may be larger than the movable distance of the cylindrical member 373. Accordingly, when the volume of the pressure chamber 32 is changed without removing the movable portion 372 from the holding portion 312, the portion where the coating liquid is attached to the outer surface of the cylindrical member 373 is prevented from being exposed to the outside. .
  • the viscosity of the coating liquid slightly varies depending on the ambient temperature, even if the discharge amount of the coating liquid is adjusted by slightly changing the amount of bending caused by the pressurizing unit 35 in the liquid contact film 34. Good. *
  • FIGS. 5 and 6 are cross-sectional views showing other examples of the coating head 3, and correspond to FIGS. 2 and 3, respectively.
  • an auxiliary member 378 is added to the coating head 3 of FIGS.
  • Other configurations are the same as those in FIGS. 2 and 3, and the same reference numerals are given to the same configurations. *
  • the auxiliary member 378 is an annular member centered on the center line C1 and is included in the facing portion 371.
  • a female screw is formed on the inner side surface of the auxiliary member 378.
  • the tubular member 373 is inserted into both the auxiliary member 378 and the hole 313 of the holding portion 312. When the tubular member 373 is tightened with respect to the hole 313, the auxiliary member 378 is in contact with both between the flange portion 376 and the holding portion 312.
  • the length of the auxiliary member 378 to be used is changed according to the position where the cylindrical member 373 is to be disposed. Specifically, a plurality of auxiliary members 378 having different lengths are prepared in advance according to a plurality of positions of the cylindrical member 373.
  • the position where the cylindrical member 373 should be arranged in the film normal direction is specified according to the viscosity of the coating liquid and the like.
  • One auxiliary member 378 corresponding to the position is selected, and the cylindrical member 373 is inserted into the auxiliary member 378. The cylindrical member 373 is further inserted into the hole 313 of the holding unit 312.
  • the tubular member 373 is tightened until the auxiliary member 378 contacts both the flange portion 376 and the holding portion 312. Thereby, the distance between the discharge plate 374 attached to the end of the cylindrical member 373 and the liquid contact film 34 can be managed with high accuracy, and the volume of the pressure chamber 32 can be adjusted with high accuracy.
  • the internal thread on the inner surface of the auxiliary member 378 may be omitted as necessary.
  • FIGS. 7 and 8 are cross-sectional views showing a coating head 3a according to a second exemplary embodiment of the present invention.
  • replaceable facing portions 381a and 381b are provided in place of the facing portion 371 of FIGS.
  • the holding portion 312 is omitted, and the structure of the seal member 33a is different from the seal member 33 of FIGS.
  • Other configurations are the same as those in FIGS. 2 and 3, and the same reference numerals are given to the same configurations. *
  • Each of the facing portion 381a shown in FIG. 7 and the facing portion 381b shown in FIG. 8 includes a plate-like portion 382 and a cylindrical protruding portion 383.
  • the plate-like portion 382 has a disc shape centered on the center line C1, and spreads perpendicularly to the center line C1.
  • the plate-like portion 382 is provided with a discharge port 321.
  • the cylindrical protruding portion 383 is provided on the main surface of the plate-like portion 382 facing the liquid contact film 34.
  • the cylindrical protrusion 383 has a cylindrical shape with the center line C1 as the center.
  • the cylindrical protrusion 383 is press-fitted into the inner surface of the main body annular portion 311 and is fixed to the main body annular portion 311.
  • An annular recess is formed on the inner side surface of the main body annular portion 311.
  • a seal member 33a such as an O-ring is provided in the annular recess.
  • the length of the cylindrical protruding portion 383 in the film normal direction is different.
  • the wall thickness of the cylindrical protrusion 383 is the same.
  • another facing portion having a different length of the cylindrical protruding portion 383 is prepared.
  • one facing portion is selected from the plurality of facing portions 381a and 381b in accordance with the viscosity of the coating liquid applied on the object 9. For example, when using a coating liquid having a relatively low viscosity, an opposing portion having a short length of the cylindrical protrusion 383, for example, an opposing portion 381a in FIG. 7 is selected.
  • a facing portion having a long cylindrical protrusion 383, for example, a facing portion 381b in FIG. 8 is selected.
  • the volume of the pressure chamber 32 when selecting the facing portion 381b in FIG. 8 is smaller than that when selecting the facing portion 381a in FIG. *
  • the facing portion can be replaced with another facing portion, and the volume of the pressure chamber 32 when the facing portion is used for the main body 31 is the same as that of the other facing portion. This is different from the volume of the pressure chamber 32 when used in the main body 31. That is, in the volume changing unit 36 of the coating head 3a, the volume of the pressure chamber 32 in a state where the liquid contact film 34 is constant can be changed by exchanging the facing part. Accordingly, it is possible to appropriately discharge a coating liquid having a wide range of viscosity.
  • FIGS. 9 and 10 are diagrams showing another example of the coating head 3a.
  • a hole 384 is formed instead of the discharge port 321 in the facing portions 381a and 381b of FIGS.
  • the diameter of the hole 384 is sufficiently larger than a discharge port 321 provided in a discharge plate 385 described later.
  • the inner side surface of the cylindrical protrusion 383 is continuous with the inner side surface of the hole 384 and extends in parallel to the center line C1.
  • a discharge plate 385 is attached to the end of the cylindrical protrusion 383 on the liquid contact film 34 side.
  • the discharge plate 385 is perpendicular to the center line C1, and a discharge port 321 is provided at the center.
  • the discharge plate 385 is disposed inside the pressure chamber 32. *
  • the lengths of the cylindrical protruding portions 383 in the film normal direction are different from each other. Therefore, the volume of the pressure chamber 32 when one opposing portion is used for the main body 31 is different from the volume of the pressure chamber 32 when another opposing portion is used for the main body 31. Thereby, it becomes possible to appropriately discharge a coating liquid having a wide range of viscosity.
  • each of the one facing portion and the other facing portion includes the discharge port 321, and the distance between the liquid contact film 34 and the discharge port 321 when the one facing portion is used for the main body portion 31 is This distance differs from the case where the other facing portion is used for the main body portion 31.
  • the volume of the pressure chamber 32 when the one facing portion is used is smaller than when the other facing portion is used, the liquid contact film 34 and the discharge port 321 when the one facing portion is used. Is also smaller than when the other facing portion is used.
  • the coating heads 3 and 3a and the coating apparatus 1 can be variously modified. *
  • the position of the discharge port 321 may be fixed with respect to the main body annular portion 311.
  • the discharge port 321 is provided in the holding unit 312 fixed to the main body annular portion 311.
  • the movable part 372 includes a plurality of screws 379.
  • the holding portion 312 is provided with a plurality of screw holes 314, and the plurality of screws 379 are respectively screwed into the plurality of screw holes 314. It is fitted by action. Ends of the plurality of screws 379 are disposed in the pressure chamber 32.
  • a plurality of screws 379 are movable in the film normal direction. In the plurality of screws 379, the volume of the pressure chamber 32 can be easily changed by changing the length of the portion disposed in the pressure chamber 32. *
  • the discharge plate 374 may be attached on the inner surface of the cylindrical member 373, that is, on the inner side of the cylindrical member 373. Also in this case, when the volume of the pressure chamber 32 is reduced, the distance between the liquid contact film 34 and the discharge plate 374 is also reduced, and the pressure loss between the liquid contact film 34 and the discharge port 321 is reduced. be able to. In addition, the influence of the surrounding wind can be suppressed in discharging the coating liquid. *
  • seal member 33a such as an O-ring is provided between the cylindrical member 373 of the facing portion 371 and the main body annular portion 311.
  • a seal member 33 a is provided between the cylindrical member 373 and the holding unit 312.
  • the seal member 33 formed of a seal tape is provided between the screw 379 included in the facing portion 371 and the side surface of the screw hole 314.
  • the seal member 33a is provided between the facing portions 381a to 381d and the main body annular portion 311.
  • the seal member 33 that prevents the coating liquid from passing between the facing portions 371, 381a to 381d and the portions of the main body 31 other than the facing portions 371, 381a to 381d. , 33a are provided. Thereby, the leakage of the coating liquid can be suppressed.
  • the volume changing unit 36 may be provided on the side surface of the pressure chamber 32.
  • a screw protruding inward from the side surface of the pressure chamber 32 is provided, and the volume of the pressure chamber 32 is changed by changing the length of a portion of the screw disposed in the pressure chamber 32.
  • the discharge port 321 may be provided at a position other than the bottom surface of the pressure chamber 32, for example, at the side surface of the pressure chamber 32.
  • the stage 21 may be fixed, and the coating head 3 may be moved by a moving mechanism. That is, the moving mechanism may move the object 9 to which the coating liquid is applied relative to the coating head 3.
  • the coating head and the coating apparatus according to the present invention can be used for various purposes.

Abstract

The applicator head according to the present invention comprises: a body section that forms part of a pressure chamber filled with a coating fluid; a liquid-contacting membrane that forms another part of the pressure chamber; and a compressing part that discharges the coating fluid from a discharge port communicating with the pressure chamber by bending the liquid-containing membrane toward the interior of the pressure chamber. The body section comprises a volume-altering part that is capable of altering the volume of the pressure chamber with the liquid-contacting membrane in a fixed state. It is preferable that the direction in which the compressing part bends the liquid-contacting membrane include one direction orthogonal to the liquid-contacting membrane, and that the volume-altering part have a facing part that faces the liquid-contacting membrane in the one direction.

Description

塗布ヘッドおよび塗布装置Coating head and coating device
　本発明は、塗布ヘッドおよび塗布装置に関する。 The present invention relates to a coating head and a coating apparatus.
　従来、対象物上に塗布液を塗布する際に、塗布装置が利用される。塗布装置の塗布ヘッドでは、圧力室に塗布液が充填され、圧電素子を含む加圧部が接液膜を圧力室の内部に向けて撓ませることにより、当該塗布液に圧力が付与される。これにより、当該圧力室に連続する吐出口から塗布液が吐出される。　 Conventionally, a coating apparatus is used when applying a coating solution onto an object. In the coating head of the coating apparatus, the pressure chamber is filled with the coating solution, and the pressurizing unit including the piezoelectric element deflects the liquid contact film toward the inside of the pressure chamber, thereby applying pressure to the coating solution. Thereby, the coating liquid is discharged from the discharge port continuous to the pressure chamber. *
　なお、特開２０１６－３９２号公報では、微量液体流出方法が開示されている。当該方法では、液体通路の容量可変通路部分を外側から加圧して、その内容積が減少する方向に収縮させることにより、当該容量可変通路部分内の液体が、下流側通路部分、上流側通路部分の双方に押し出される。このとき、これらの液体通路抵抗に応じて、下流側通路部分には微小量の液体が押し出されるため、微量液体が精度よく滴下される。　　
特開２０１６－３９２号公報 Note that Japanese Unexamined Patent Application Publication No. 2016-392 discloses a method for flowing out a small amount of liquid. In this method, the volume variable passage portion of the liquid passage is pressurized from the outside and contracted in the direction in which the internal volume decreases, so that the liquid in the volume variable passage portion becomes the downstream passage portion and the upstream passage portion. Extruded on both sides. At this time, since a minute amount of liquid is pushed out into the downstream passage portion according to these liquid passage resistances, the minute amount of liquid is dropped accurately.
Japanese Unexamined Patent Publication No. 2016-392
　ところで、近年、塗布装置おいて用いられる塗布液の種類は、多様化している。一方、塗布液の粘度は、塗布液の種類により異なる。塗布液の粘度が高くなると、圧力損失が大きくなるため、塗布液が吐出口から適切に吐出されなくなる。加圧部が接液膜に生じさせる撓み量を大きくして、塗布液に付与する圧力を大きくすることも考えられるが、実際には、撓み量の増大にはある程度の限界がある。したがって、広範囲の粘度の塗布液を適切に吐出することが可能な新規な塗布ヘッドが求められている。　 Incidentally, in recent years, the types of coating liquids used in coating apparatuses have been diversified. On the other hand, the viscosity of the coating solution varies depending on the type of coating solution. When the viscosity of the coating liquid increases, the pressure loss increases, so that the coating liquid is not properly discharged from the discharge port. Although it is conceivable to increase the amount of bending applied to the coating liquid by increasing the amount of bending caused by the pressurizing portion on the liquid contact film, in practice, there is a certain limit to the increase in the amount of bending. Accordingly, there is a need for a novel coating head that can appropriately eject a coating solution having a wide range of viscosity. *
　本発明は上記課題に鑑みなされたものであり、広範囲の粘度の塗布液を適切に吐出することを目的としている。 The present invention has been made in view of the above problems, and aims to appropriately discharge a coating solution having a wide range of viscosities.
　本発明の例示的な塗布ヘッドは、塗布液が充填される圧力室の一部を形成する本体部と、前記圧力室の他の一部を形成する接液膜と、前記接液膜を前記圧力室の内部に向けて撓ませることにより、前記圧力室に連続する吐出口から前記塗布液を吐出させる加圧部と、を備え、前記本体部が、前記接液膜が一定の状態における前記圧力室の容積を変更可能とする容積変更部を有する。 An exemplary coating head of the present invention includes: a main body part that forms a part of a pressure chamber filled with a coating liquid; a liquid contact film that forms another part of the pressure chamber; and the liquid contact film A pressure unit that discharges the coating liquid from a discharge port continuous with the pressure chamber by bending toward the inside of the pressure chamber, and the main body unit has the liquid contact film in a constant state. It has a volume changing section that can change the volume of the pressure chamber.
　本発明によれば、広範囲の粘度の塗布液を適切に吐出することができる。 According to the present invention, a coating liquid having a wide range of viscosity can be appropriately discharged.
図１は、第１の実施形態に係る塗布装置の構成を示す図である。FIG. 1 is a diagram illustrating a configuration of a coating apparatus according to the first embodiment. 図２は、塗布ヘッドを示す断面図である。FIG. 2 is a cross-sectional view showing the coating head. 図３は、塗布ヘッドを示す断面図である。FIG. 3 is a cross-sectional view showing the coating head. 図４は、配管モデルを示す図である。FIG. 4 is a diagram illustrating a piping model. 図５は、塗布ヘッドの他の例を示す断面図である。FIG. 5 is a cross-sectional view showing another example of the coating head. 図６は、塗布ヘッドを示す断面図である。FIG. 6 is a cross-sectional view showing the coating head. 図７は、第２の実施形態に係る塗布ヘッドを示す断面図である。FIG. 7 is a cross-sectional view showing a coating head according to the second embodiment. 図８は、塗布ヘッドを示す断面図である。FIG. 8 is a cross-sectional view showing the coating head. 図９は、塗布ヘッドの他の例を示す断面図である。FIG. 9 is a cross-sectional view showing another example of the coating head. 図１０は、塗布ヘッドを示す断面図である。FIG. 10 is a cross-sectional view showing the coating head. 図１１は、塗布ヘッドの他の例を示す断面図である。FIG. 11 is a cross-sectional view showing another example of the coating head. 図１２は、塗布ヘッドの一部を示す底面図である。FIG. 12 is a bottom view showing a part of the coating head. 図１３は、塗布ヘッドの他の例を示す断面図である。FIG. 13 is a cross-sectional view showing another example of the coating head. 図１４は、塗布ヘッドの他の例を示す断面図である。FIG. 14 is a cross-sectional view showing another example of the coating head. 図１５は、塗布ヘッドの他の例を示す断面図である。FIG. 15 is a cross-sectional view showing another example of the coating head.
（第１の実施形態）　図１は、本発明の例示的な第１の実施形態に係る塗布装置１の構成を示す図である。塗布装置１は、プリント基板、半導体基板等の各種基板である対象物９上に所定の塗布液を塗布する装置である。対象物９は、機械部品等であってもよい。塗布液は、例えば、各種接着剤（エポキシ、ＵＶ硬化等）、封止剤、アンダーフィル剤、グリース等である。　 First Embodiment FIG. 1 is a diagram showing a configuration of a coating apparatus 1 according to an exemplary first embodiment of the present invention. The coating apparatus 1 is an apparatus that applies a predetermined coating liquid onto an object 9 that is a substrate such as a printed board or a semiconductor substrate. The object 9 may be a machine part or the like. Examples of the coating liquid include various adhesives (epoxy, UV curing, etc.), sealants, underfill agents, greases, and the like. *
　塗布装置１は、制御部１０と、移動機構２と、塗布ヘッド３と、塗布液供給部４と、を含む。制御部１０は、塗布装置１の全体制御を担う。移動機構２は、ステージ２１と、ステージ移動機構２２と、を含む。ステージ２１は、対象物９を保持する。ステージ移動機構２２は、塗布ヘッド３に対してステージ２１を移動する。ステージ移動機構２２によるステージ２１の移動方向は、例えば、互いに垂直な２方向である。典型的には、これらの移動方向は、塗布ヘッド３による塗布液の吐出方向に垂直である。ステージ移動機構２２は、ステージ２１を吐出方向に平行な軸を中心として回転可能であってもよい。　 The coating apparatus 1 includes a control unit 10, a moving mechanism 2, a coating head 3, and a coating liquid supply unit 4. The control unit 10 is responsible for overall control of the coating apparatus 1. The moving mechanism 2 includes a stage 21 and a stage moving mechanism 22. The stage 21 holds the object 9. The stage moving mechanism 22 moves the stage 21 relative to the coating head 3. The moving direction of the stage 21 by the stage moving mechanism 22 is, for example, two directions perpendicular to each other. Typically, these moving directions are perpendicular to the direction in which the coating liquid is discharged by the coating head 3. The stage moving mechanism 22 may be capable of rotating the stage 21 around an axis parallel to the discharge direction. *
　塗布液供給部４は、塗布ヘッド３における後述の圧力室３２（図２参照）に塗布液を供給する。塗布液供給部４は、塗布液タンク４１と、供給流路４２と、圧力調整部４３と、を含む。塗布液タンク４１は、塗布液を貯溜する。塗布液タンク４１の内部は、密閉されている。供給流路４２の一端は、塗布液タンク４１に接続され、他端は、塗布ヘッド３に接続される。すなわち、供給流路４２を介して、塗布液タンク４１の内部と塗布ヘッド３の圧力室３２とが空間的に連続する。塗布液タンク４１は、塗布ヘッド３よりも鉛直方向上方に配置される。圧力調整部４３は、例えば圧力調整ポンプを含む。圧力調整部４３により、塗布液タンク４１内の圧力が、大気圧を含む圧力範囲内の任意の値に調整される。例えば、塗布液タンク４１内の圧力は、大気圧よりも低い負圧に調整される。　 The coating liquid supply unit 4 supplies the coating liquid to a pressure chamber 32 (see FIG. 2) described later in the coating head 3. The coating liquid supply unit 4 includes a coating liquid tank 41, a supply flow path 42, and a pressure adjustment unit 43. The coating liquid tank 41 stores the coating liquid. The inside of the coating liquid tank 41 is sealed. One end of the supply channel 42 is connected to the coating liquid tank 41, and the other end is connected to the coating head 3. That is, the inside of the coating liquid tank 41 and the pressure chamber 32 of the coating head 3 are spatially continuous via the supply channel 42. The coating liquid tank 41 is disposed above the coating head 3 in the vertical direction. The pressure adjustment unit 43 includes, for example, a pressure adjustment pump. The pressure adjusting unit 43 adjusts the pressure in the coating liquid tank 41 to an arbitrary value within a pressure range including atmospheric pressure. For example, the pressure in the coating liquid tank 41 is adjusted to a negative pressure lower than the atmospheric pressure. *
　図２は、塗布ヘッド３を示す断面図である。図２では、後述の吐出口３２１の中心線Ｃ１を含む面における塗布ヘッド３の断面を示している。塗布ヘッド３は、本体部３１と、接液膜３４と、加圧部３５と、を含む。本体部３１は、例えば金属等により形成される。本体部３１は、本体環状部３１１と、保持部３１２と、容積変更部３６と、を含む。本体環状部３１１は、中心線Ｃ１を中心とする環状の部材である。本体環状部３１１の内側面は、圧力室３２の側面を形成する。圧力室３２は、塗布ヘッド３の内部空間であり、例えば中心線Ｃ１を中心とする円柱状である。圧力室３２には、塗布液が充填される。圧力室３２の側面には、供給口３２２が設けられる。圧力室３２の底面には、吐出口３２１が設けられる。供給口３２２および吐出口３２１は、圧力室３２に連続する。保持部３１２および容積変更部３６の詳細については後述する。　 FIG. 2 is a cross-sectional view showing the coating head 3. In FIG. 2, the cross section of the coating head 3 in the surface containing the centerline C1 of the discharge outlet 321 mentioned later is shown. The coating head 3 includes a main body part 31, a liquid contact film 34, and a pressure part 35. The main body 31 is made of, for example, metal. The main body portion 31 includes a main body annular portion 311, a holding portion 312, and a volume changing portion 36. The main body annular portion 311 is an annular member centered on the center line C1. The inner side surface of the main body annular portion 311 forms the side surface of the pressure chamber 32. The pressure chamber 32 is an internal space of the coating head 3 and has, for example, a cylindrical shape centered on the center line C1. The pressure chamber 32 is filled with a coating liquid. A supply port 322 is provided on the side surface of the pressure chamber 32. A discharge port 321 is provided on the bottom surface of the pressure chamber 32. The supply port 322 and the discharge port 321 are continuous with the pressure chamber 32. Details of the holding unit 312 and the volume changing unit 36 will be described later. *
　接液膜３４は、金属等により形成されるダイアフラムである。圧力室３２において、接液膜３４は吐出口３２１に対向する。接液膜３４は、圧力室３２における底面に対向する面を形成する。塗布ヘッド３では、本体部３１により圧力室３２の一部が形成され、接液膜３４により圧力室３２の他の一部が形成される。接液膜３４の圧力室３２側の表面は、圧力室３２内の塗布液と接触する接液面である。接液膜３４の外縁部は、本体部３１の本体環状部３１１に固定される。吐出口３２１および供給口３２２を除き、圧力室３２は、本体部３１および接液膜３４により密閉される。塗布ヘッド３では、圧力室３２内の塗布液に含まれる気泡を除去するための排出口等が、必要に応じて設けられてもよい。　 The liquid contact film 34 is a diaphragm formed of metal or the like. In the pressure chamber 32, the liquid contact film 34 faces the discharge port 321. The liquid contact film 34 forms a surface facing the bottom surface of the pressure chamber 32. In the coating head 3, a part of the pressure chamber 32 is formed by the main body 31, and another part of the pressure chamber 32 is formed by the liquid contact film 34. The surface of the liquid contact film 34 on the pressure chamber 32 side is a liquid contact surface in contact with the coating liquid in the pressure chamber 32. The outer edge portion of the liquid contact film 34 is fixed to the main body annular portion 311 of the main body portion 31. Except for the discharge port 321 and the supply port 322, the pressure chamber 32 is sealed by the main body 31 and the liquid contact film 34. In the coating head 3, a discharge port or the like for removing bubbles contained in the coating solution in the pressure chamber 32 may be provided as necessary. *
　加圧部３５は、圧電素子３５１を含む。圧電素子３５１は、接液膜３４における接液面とは異なる面に固定される。図示省略の駆動回路が圧電素子３５１に駆動電圧を供給することにより、圧電素子３５１が伸縮動作を行い、接液膜３４の撓み量が変化する。接液膜３４が吐出口３２１に向かって撓む際に、圧力室３２内の塗布液に圧力が付与され、吐出口３２１から外部に塗布液が吐出される。このように、加圧部３５が接液膜３４を圧力室３２の内部に向けて撓ませることにより、吐出口３２１から塗布液が吐出される。図１の塗布ヘッド３において加圧部３５が接液膜３４を撓ませる方向は、撓んでいない状態の接液膜３４に直交する方向を含む。以下の説明では、接液膜３４に直交する方向を「膜法線方向」という。図２の塗布ヘッド３では、膜法線方向は、吐出口３２１の中心線Ｃ１に平行である。膜法線方向は、塗布液の吐出方向に一致する。　 The pressure unit 35 includes a piezoelectric element 351. The piezoelectric element 351 is fixed to a surface different from the liquid contact surface in the liquid contact film 34. When a drive circuit (not shown) supplies a drive voltage to the piezoelectric element 351, the piezoelectric element 351 performs an expansion / contraction operation, and the amount of bending of the liquid contact film 34 changes. When the liquid contact film 34 bends toward the discharge port 321, pressure is applied to the coating solution in the pressure chamber 32, and the coating solution is discharged from the discharge port 321 to the outside. As described above, the pressurizing unit 35 deflects the liquid contact film 34 toward the inside of the pressure chamber 32, whereby the coating liquid is discharged from the discharge port 321. In the coating head 3 of FIG. 1, the direction in which the pressurizing unit 35 bends the liquid contact film 34 includes a direction orthogonal to the liquid contact film 34 that is not bent. In the following description, the direction orthogonal to the wetted film 34 is referred to as “film normal direction”. In the coating head 3 of FIG. 2, the film normal direction is parallel to the center line C <b> 1 of the ejection port 321. The film normal direction coincides with the discharge direction of the coating liquid. *
　保持部３１２は、本体環状部３１１において接液膜３４とは反対側の面に取り付けられる。保持部３１２には、中心線Ｃ１を中心とする孔部３１３が形成される。孔部３１３の直径は、圧力室３２の直径よりも小さい。保持部３１２は、圧力室３２の底面の外縁部を形成する。保持部３１２は、例えば金属等により形成される。　 The holding portion 312 is attached to a surface of the main body annular portion 311 opposite to the liquid contact film 34. The holding portion 312 is formed with a hole 313 centered on the center line C1. The diameter of the hole 313 is smaller than the diameter of the pressure chamber 32. The holding portion 312 forms an outer edge portion of the bottom surface of the pressure chamber 32. The holding unit 312 is formed of, for example, metal. *
　容積変更部３６は、対向部３７１を含む。対向部３７１は、膜法線方向において接液膜３４に対向する。対向部３７１は、膜法線方向に移動可能な可動部３７２を含む。可動部３７２は、筒状部材３７３と、吐出板３７４と、を含む。筒状部材３７３および吐出板３７４は、例えば金属等により形成される。筒状部材３７３は、中心線Ｃ１を中心とする円筒状であり、膜法線方向に延びる。膜法線方向における筒状部材３７３の一方の端部３７５は、圧力室３２の内部側に配置される。以下、当該端部３７５を「内部側端部３７５」という。筒状部材３７３の他方の端部は、圧力室３２の外部側に配置される。以下、当該端部を「外部側端部」という。筒状部材３７３は、圧力室３２の内部から外部まで連続し、圧力室３２の内部と外部をつなぐ部材である。　 The volume changing unit 36 includes a facing portion 371. The facing portion 371 faces the liquid contact film 34 in the film normal direction. The facing portion 371 includes a movable portion 372 that can move in the film normal direction. The movable part 372 includes a cylindrical member 373 and a discharge plate 374. The cylindrical member 373 and the discharge plate 374 are made of, for example, metal. The cylindrical member 373 has a cylindrical shape centered on the center line C1 and extends in the film normal direction. One end 375 of the cylindrical member 373 in the film normal direction is disposed on the inner side of the pressure chamber 32. Hereinafter, the end portion 375 is referred to as “inner side end portion 375”. The other end of the cylindrical member 373 is disposed outside the pressure chamber 32. Hereinafter, the end portion is referred to as “external side end portion”. The tubular member 373 is a member that continues from the inside of the pressure chamber 32 to the outside and connects the inside and the outside of the pressure chamber 32. *
　筒状部材３７３は、保持部３１２により保持される。詳細には、孔部３１３の側面の全体、または、膜法線方向における当該側面の一部の範囲には、雌ねじが形成される。筒状部材３７３の外側面には、雄ねじが形成される。雄ねじは、例えば内部側端部３７５から外部側端部の近傍まで形成される。当該雄ねじは、当該雌ねじに対してねじ作用により嵌め合わされる。したがって、筒状部材３７３を中心線Ｃ１を中心とする一の回転方向に回転することにより、筒状部材３７３が、膜法線方向における接液膜３４側に移動する（後述の図３参照）。筒状部材３７３を他の回転方向に回転することにより、筒状部材３７３が膜法線方向における接液膜３４とは反対側に移動する。筒状部材３７３は、膜法線方向に移動可能な状態で、保持部３１２により保持される。図２の塗布ヘッド３では、例えば、シールテープを筒状部材３７３の外側面の雄ねじに巻いた状態で、当該雄ねじが雌ねじに嵌め合わされる。筒状部材３７３の外側面と孔部３１３の側面との間のシールテープの部位により、シール部材３３が構成される。　 The cylindrical member 373 is held by the holding unit 312. Specifically, a female screw is formed on the entire side surface of the hole 313 or on a part of the side surface in the film normal direction. A male screw is formed on the outer surface of the cylindrical member 373. The male screw is formed from the inner side end 375 to the vicinity of the outer side end, for example. The male screw is fitted to the female screw by a screw action. Therefore, by rotating the cylindrical member 373 in one rotation direction around the center line C1, the cylindrical member 373 moves to the liquid contact film 34 side in the film normal direction (see FIG. 3 described later). . By rotating the cylindrical member 373 in the other rotation direction, the cylindrical member 373 moves to the opposite side to the liquid contact film 34 in the film normal direction. The cylindrical member 373 is held by the holding unit 312 while being movable in the film normal direction. In the coating head 3 of FIG. 2, for example, the male screw is fitted to the female screw in a state where the seal tape is wound around the male screw on the outer surface of the cylindrical member 373. The seal member 33 is configured by a portion of the seal tape between the outer side surface of the tubular member 373 and the side surface of the hole 313. *
　吐出板３７４は、既述の吐出口３２１が設けられる板状の部材である。吐出口３２１の直径は任意に決定されてよい。吐出板３７４は、中心線Ｃ１に垂直である。吐出板３７４は、内部側端部３７５に取り付けられ、圧力室３２の内部に配置される。吐出口３２１から吐出される塗布液は、筒状部材３７３内を通過して対象物９に向かう。圧力室３２の外部において、吐出口３２１の周囲が筒状部材３７３により囲まれていることにより、塗布液の吐出の際に、周囲の風の影響を抑制することが可能となる。なお、筒状部材３７３の内径は、十分に大きいため、原則として、筒状部材３７３内を通過する塗布液が、筒状部材３７３の内側面に付着することはない。筒状部材３７３の内側面は、筒状の面であるならば、円筒面以外であってもよい。また、内部側端部３７５から外部側端部に向かって、内側面の直径が漸次増大してもよい。　 The discharge plate 374 is a plate-like member provided with the discharge port 321 described above. The diameter of the discharge port 321 may be arbitrarily determined. The discharge plate 374 is perpendicular to the center line C1. The discharge plate 374 is attached to the inner side end 375 and is disposed inside the pressure chamber 32. The coating liquid discharged from the discharge port 321 passes through the cylindrical member 373 and travels toward the object 9. Since the periphery of the discharge port 321 is surrounded by the cylindrical member 373 outside the pressure chamber 32, the influence of the surrounding wind can be suppressed when the coating liquid is discharged. Since the inner diameter of the cylindrical member 373 is sufficiently large, in principle, the coating liquid that passes through the cylindrical member 373 does not adhere to the inner side surface of the cylindrical member 373. The inner surface of the cylindrical member 373 may be other than the cylindrical surface as long as it is a cylindrical surface. Further, the diameter of the inner surface may gradually increase from the inner side end portion 375 toward the outer side end portion. *
　筒状部材３７３は、フランジ部３７６を含む。フランジ部３７６は、外部側端部に設けられ、圧力室３２の外部に配置される。外部側端部において、フランジ部３７６を含む部位は、ねじ頭と捉えることが可能である。図２の下側から中心線Ｃ１に沿ってフランジ部３７６を見た場合に、フランジ部３７６の端面には、例えば、中心線Ｃ１を中心とする十字状の溝が形成される。これにより、当該十字状の溝を利用して、筒状部材３７３を容易に回転することが可能である。フランジ部３７６の外形が、六角形等の多角形とされてもよい。この場合も、筒状部材３７３を容易に回転することが可能である。　 The cylindrical member 373 includes a flange portion 376. The flange portion 376 is provided at the outer end and is disposed outside the pressure chamber 32. A portion including the flange portion 376 in the outer side end portion can be regarded as a screw head. When the flange portion 376 is viewed from the lower side of FIG. 2 along the center line C1, for example, a cross-shaped groove centering on the center line C1 is formed on the end surface of the flange portion 376. Thereby, the cylindrical member 373 can be easily rotated using the cross-shaped groove. The outer shape of the flange portion 376 may be a polygon such as a hexagon. Also in this case, the cylindrical member 373 can be easily rotated. *
　図１の塗布装置１における通常動作では、制御部１０が、移動機構２および塗布ヘッド３を制御することにより、対象物９上に塗布液が塗布される。具体的には、移動機構２がステージ２１を移動することにより、対象物９上の塗布対象の位置が、吐出口３２１に対向する位置に配置される。そして、圧電素子３５１に駆動電圧を供給することにより、吐出口３２１から上記位置に向かって塗布液の液滴が吐出される。圧電素子３５１は高い応答性を有するため、駆動電圧の制御により、液滴の量の微小化および調整を容易に行うことが可能である。塗布装置１では、対象物９の移動および塗布液の吐出を繰り返すことにより、対象物９上の全ての塗布対象の位置に塗布液が塗布される。　 In the normal operation of the coating apparatus 1 in FIG. 1, the control unit 10 controls the moving mechanism 2 and the coating head 3 to apply the coating liquid onto the object 9. Specifically, when the moving mechanism 2 moves the stage 21, the position of the application target on the object 9 is arranged at a position facing the discharge port 321. Then, by supplying a driving voltage to the piezoelectric element 351, droplets of the coating liquid are discharged from the discharge port 321 toward the position. Since the piezoelectric element 351 has high responsiveness, it is possible to easily reduce and adjust the amount of droplets by controlling the driving voltage. In the coating apparatus 1, the application liquid is applied to all the application target positions on the object 9 by repeatedly moving the object 9 and discharging the application liquid. *
　塗布ヘッド３では、対象物９上に塗布する塗布液の粘度に合わせて、膜法線方向における可動部３７２の位置が変更される。例えば、同じ量の液滴を吐出する場合に、粘度が比較的低い塗布液を用いるときには、筒状部材３７３が、膜法線方向において接液膜３４から離れた図２に示す位置に配置される。粘度が比較的高い塗布液を用いるときには、筒状部材３７３が、膜法線方向において接液膜３４に近づいた図３に示す位置に配置される。図２および図３では、接液膜３４と吐出板３７４との間の距離を符号Ｌ１，Ｌ２を付す矢印にて示している。　 In the coating head 3, the position of the movable part 372 in the film normal direction is changed according to the viscosity of the coating liquid to be coated on the object 9. For example, when ejecting the same amount of droplets and using a coating liquid having a relatively low viscosity, the cylindrical member 373 is arranged at a position shown in FIG. 2 away from the liquid contact film 34 in the film normal direction. The When a coating solution having a relatively high viscosity is used, the cylindrical member 373 is disposed at a position shown in FIG. 3 that is close to the liquid contact film 34 in the film normal direction. 2 and 3, the distance between the liquid contact film 34 and the discharge plate 374 is indicated by arrows denoted by L1 and L2. *
　圧力室３２の底面の中央部は、吐出板３７４である。既述のように、吐出板３７４は、筒状部材３７３と共に膜法線方向に移動する。したがって、接液膜３４が一定の状態である、例えば、圧電素子３５１に駆動電圧を供給していない場合に、膜法線方向における筒状部材３７３の位置に応じて、圧力室３２の容積が変化する。具体的には、筒状部材３７３が接液膜３４に近づくに従って、圧力室３２の容積が小さくなる。加圧部３５により生じる接液膜３４の撓み量が一定である場合、圧力室３２の容積が小さいほど、加圧部３５による当該容積の変化率が大きくなり、圧力室３２内の塗布液に付与される圧力が大きくなる。よって、粘度が高い塗布液であっても、圧力室３２の容積を小さくすることにより、当該塗布液を吐出口３２１から適切に吐出することが可能となる。筒状部材３７３の可動距離は、例えば数百μｍ～数ｍｍである。塗布ヘッド３では、圧力室３２の容積を、例えば最大容積の１０％まで小さくすることが可能である。　 The central part of the bottom surface of the pressure chamber 32 is a discharge plate 374. As described above, the discharge plate 374 moves in the film normal direction together with the cylindrical member 373. Therefore, when the liquid contact film 34 is in a constant state, for example, when the driving voltage is not supplied to the piezoelectric element 351, the volume of the pressure chamber 32 depends on the position of the cylindrical member 373 in the film normal direction. Change. Specifically, the volume of the pressure chamber 32 decreases as the cylindrical member 373 approaches the liquid contact film 34. When the amount of deflection of the liquid contact film 34 generated by the pressurizing unit 35 is constant, the smaller the volume of the pressure chamber 32, the greater the rate of change of the volume by the pressurizing unit 35, and the coating liquid in the pressure chamber 32 becomes larger. The applied pressure increases. Therefore, even if the coating liquid has a high viscosity, it is possible to appropriately discharge the coating liquid from the discharge port 321 by reducing the volume of the pressure chamber 32. The movable distance of the cylindrical member 373 is, for example, several hundred μm to several mm. In the application head 3, the volume of the pressure chamber 32 can be reduced to, for example, 10% of the maximum volume. *
　塗布ヘッド３の使用の一例では、実験等を行うことにより、塗布液の粘度および液滴の量と、膜法線方向における筒状部材３７３の位置との関係が予め取得される。実際に用いる塗布液の粘度および液滴の所望量から、膜法線方向において筒状部材３７３を配置すべき位置が特定される。そして、塗布ヘッド３において筒状部材３７３が当該位置に配置され、対象物９上への塗布液の塗布が行われる。　 In an example of use of the coating head 3, the relationship between the viscosity of the coating liquid and the amount of droplets and the position of the cylindrical member 373 in the film normal direction is acquired in advance by performing an experiment or the like. The position where the cylindrical member 373 should be arranged in the film normal direction is specified from the viscosity of the coating liquid actually used and the desired amount of droplets. And the cylindrical member 373 is arrange | positioned in the said position in the application head 3, and application | coating of the coating liquid on the target object 9 is performed. *
　ここで、容積変更部を省略した、すなわち、圧力室の容積が一定である比較例の塗布ヘッドを想定する。比較例の塗布ヘッドでは、例えば、圧力室の容積を比較的小さく作製することにより、粘度が高い塗布液が吐出可能となる。一方、粘度が低い塗布液を吐出する際に、圧力室内の塗布液に付与される圧力が過度に高くなってしまい、当該塗布液の液滴を適切に吐出することができない。なお、圧電素子が接液膜に生じさせることが可能な最大撓み量は、例えば数μｍ～十数μｍであるため、接液膜の撓み量の調整のみにより、粘度が高い塗布液および粘度が低い塗布液の双方を適切に吐出することは困難である。　 Here, a coating head of a comparative example in which the volume changing unit is omitted, that is, the volume of the pressure chamber is constant is assumed. In the coating head of the comparative example, for example, by producing a relatively small volume of the pressure chamber, it is possible to discharge a coating liquid having a high viscosity. On the other hand, when a coating liquid having a low viscosity is discharged, the pressure applied to the coating liquid in the pressure chamber becomes excessively high, and the droplets of the coating liquid cannot be discharged appropriately. The maximum amount of deflection that the piezoelectric element can cause in the wetted film is, for example, several μm to several tens of μm. Therefore, by adjusting only the bent amount of the wetted film, the coating liquid having a high viscosity and the viscosity can be reduced. It is difficult to properly discharge both low coating liquids. *
　これに対し、塗布ヘッド３では、接液膜３４が一定の状態における圧力室３２の容積が、容積変更部３６により変更可能である。これにより、広範囲の粘度の塗布液を適切に吐出することができる。例えば、塗布ヘッド３では、１００ミリパスカル秒（ｍＰａ・ｓ）以上３０万ｍＰａ・ｓ以下の粘度範囲の塗布液を適切に吐出することが可能である。　 On the other hand, in the coating head 3, the volume of the pressure chamber 32 in a state where the liquid contact film 34 is constant can be changed by the volume changing unit 36. Thereby, the coating liquid of a wide range of viscosity can be discharged appropriately. For example, the coating head 3 can appropriately discharge a coating solution having a viscosity range of 100 millipascal seconds (mPa · s) to 300,000 mPa · s. *
　ところで、図４に示す配管モデルを考えた場合に、入口側の圧力Ｐ１と出口側の圧力Ｐ２との差、すなわち、圧力損失は、一般的に数１により表される。数１において、μは粘性係数（粘度）［Ｐａ・ｓ］、Ｌは管長さ［ｍ］、Ｖは流量［ｍ３／ｓ］、Ｄは管内径［ｍ］である。　 By the way, when the piping model shown in FIG. 4 is considered, the difference between the pressure P1 on the inlet side and the pressure P2 on the outlet side, that is, the pressure loss is generally expressed by Equation 1. In Equation 1, μ is a viscosity coefficient (viscosity) [Pa · s], L is a tube length [m], V is a flow rate [m3 / s], and D is a tube inner diameter [m]. *
　（数１）　Ｐ１－Ｐ２＝１２８μＬＶ／πＤ４　 (Equation 1) P1-P2 = 128μLV / πD4
　数１より、管内径Ｄが圧力損失に大きな影響を及ぼすことが判る。図２の塗布ヘッド３では、接液膜３４および吐出口３２１が、図４の配管モデルにおける入口側および出口側にそれぞれ対応する。圧力室３２の容積を小さくする場合に、仮に、圧力室３２の直径を小さくするときには、圧力損失が大きくなってしまう。したがって、塗布ヘッドにおける塗布液の吐出に係るエネルギー効率が低くなる。また、圧力損失が大きい場合、圧力室内の塗布液に付与される圧力によっては塗布液が吐出できない恐れがある。　 From Equation 1, it can be seen that the inner diameter D of the pipe has a great influence on the pressure loss. In the coating head 3 of FIG. 2, the liquid contact film 34 and the discharge port 321 correspond to the inlet side and the outlet side in the piping model of FIG. In the case where the volume of the pressure chamber 32 is reduced, if the diameter of the pressure chamber 32 is reduced, the pressure loss increases. Therefore, the energy efficiency related to the discharge of the coating liquid in the coating head is lowered. In addition, when the pressure loss is large, the coating liquid may not be discharged depending on the pressure applied to the coating liquid in the pressure chamber. *
　これに対し、塗布ヘッド３では、圧力室３２の容積を小さくする場合に、圧力室３２の直径を変更することなく、管長さＬに相当する圧力室３２の長さが小さくされる。具体的には、吐出口３２１が設けられた可動部３７２を、膜法線方向の接液膜３４側に移動して、接液膜３４と吐出口３２１との間の距離が小さくされる。その結果、接液膜３４と吐出口３２１との間の圧力損失を低減することができ、塗布液をより確実に吐出することができる。また、塗布ヘッド３における塗布液の吐出に係るエネルギー効率を高くすることが可能となり、塗布ヘッド３における発熱も抑制することができる。　 On the other hand, in the coating head 3, when the volume of the pressure chamber 32 is reduced, the length of the pressure chamber 32 corresponding to the tube length L is reduced without changing the diameter of the pressure chamber 32. Specifically, the movable portion 372 provided with the discharge port 321 is moved to the liquid contact film 34 side in the film normal direction, and the distance between the liquid contact film 34 and the discharge port 321 is reduced. As a result, the pressure loss between the liquid contact film 34 and the discharge port 321 can be reduced, and the coating liquid can be discharged more reliably. In addition, the energy efficiency related to the discharge of the coating liquid in the coating head 3 can be increased, and heat generation in the coating head 3 can also be suppressed. *
　筒状部材３７３を移動する塗布ヘッド３では、複雑な構造を採用することなく、圧力室３２の容積の大幅な変更を容易に行うことができる。その結果、吐出可能な塗布液の粘度の範囲を大きくすることができる。また、塗布ヘッド３の構造を簡素化して、塗布ヘッド３の小型化を容易に実現することができる。孔部３１３の側面および筒状部材３７３の外側面に雌ねじおよび雄ねじを形成することより、筒状部材３７３を膜法線方向に容易に移動することができる。塗布ヘッド３の設計によっては、上記雌ねじおよび雄ねじが省略され、筒状部材３７３が保持部３１２の孔部３１３に圧入されてもよい。後述の図５および図６の塗布ヘッド３において同様である。　 The coating head 3 that moves the cylindrical member 373 can easily change the volume of the pressure chamber 32 without adopting a complicated structure. As a result, the range of the viscosity of the dischargeable coating liquid can be increased. Moreover, the structure of the coating head 3 can be simplified and the coating head 3 can be easily downsized. By forming a female screw and a male screw on the side surface of the hole 313 and the outer surface of the cylindrical member 373, the cylindrical member 373 can be easily moved in the normal direction of the membrane. Depending on the design of the coating head 3, the female screw and the male screw may be omitted, and the cylindrical member 373 may be press-fitted into the hole 313 of the holding unit 312. The same applies to the coating head 3 shown in FIGS. *
　なお、塗布ヘッド３において、圧力室３２の容積を変更する際には、圧力室３２内に塗布液が充填されていない状態で筒状部材３７３を膜法線方向に移動することが好ましい。これにより、接液膜３４に過度に大きい圧力が作用して、接液膜３４が損傷すること等が防止される。塗布液の種類を変更する際には、好ましくは、可動部３７２が保持部３１２から取り外され、塗布ヘッド３の内部の洗浄が行われる。また、シール部材３３を剥がし、新たなシール部材３３となるシールテープが筒状部材３７３に巻き直された上で、筒状部材３７３が保持部３１２に嵌め込まれる。　 In the coating head 3, when changing the volume of the pressure chamber 32, it is preferable to move the cylindrical member 373 in the film normal direction in a state where the coating solution is not filled in the pressure chamber 32. Thereby, an excessively large pressure acts on the wetted film 34 to prevent the wetted film 34 from being damaged. When changing the type of coating liquid, the movable part 372 is preferably removed from the holding part 312 and the inside of the coating head 3 is cleaned. Further, the sealing member 33 is peeled off, and a sealing tape that becomes a new sealing member 33 is wound around the cylindrical member 373, and then the cylindrical member 373 is fitted into the holding portion 312. *
　塗布ヘッド３において、保持部３１２の厚さが、筒状部材３７３の可動距離よりも大きくされてもよい。これにより、可動部３７２を保持部３１２から取り外すことなく圧力室３２の容積を変更する際に、筒状部材３７３の外側面において塗布液が付着した部位が、外部に露出することが防止される。周囲の温度により塗布液の粘度が僅かに変動する場合等には、加圧部３５が接液膜３４に生じさせる撓み量を僅かに変更することにより、塗布液の吐出量が調整されてもよい。　 In the coating head 3, the thickness of the holding portion 312 may be larger than the movable distance of the cylindrical member 373. Accordingly, when the volume of the pressure chamber 32 is changed without removing the movable portion 372 from the holding portion 312, the portion where the coating liquid is attached to the outer surface of the cylindrical member 373 is prevented from being exposed to the outside. . When the viscosity of the coating liquid slightly varies depending on the ambient temperature, even if the discharge amount of the coating liquid is adjusted by slightly changing the amount of bending caused by the pressurizing unit 35 in the liquid contact film 34. Good. *
　図５および図６は、塗布ヘッド３の他の例を示す断面図であり、図２および図３にそれぞれ対応する。図５および図６の塗布ヘッド３では、図２および図３の塗布ヘッド３に対し、補助部材３７８が追加される。他の構成は、図２および図３と同じであり、同じ構成に同じ符号を付す。　 5 and 6 are cross-sectional views showing other examples of the coating head 3, and correspond to FIGS. 2 and 3, respectively. In the coating head 3 of FIGS. 5 and 6, an auxiliary member 378 is added to the coating head 3 of FIGS. Other configurations are the same as those in FIGS. 2 and 3, and the same reference numerals are given to the same configurations. *
　補助部材３７８は、中心線Ｃ１を中心とする環状の部材であり、対向部３７１に含まれる。補助部材３７８の内側面には、例えば、雌ねじが形成される。筒状部材３７３は、補助部材３７８および保持部３１２の孔部３１３の双方に挿入される。筒状部材３７３が、孔部３１３に対して締め付けられることにより、補助部材３７８が、フランジ部３７６と保持部３１２との間において両者に接触する。　 The auxiliary member 378 is an annular member centered on the center line C1 and is included in the facing portion 371. For example, a female screw is formed on the inner side surface of the auxiliary member 378. The tubular member 373 is inserted into both the auxiliary member 378 and the hole 313 of the holding portion 312. When the tubular member 373 is tightened with respect to the hole 313, the auxiliary member 378 is in contact with both between the flange portion 376 and the holding portion 312. *
　塗布ヘッド３では、筒状部材３７３を配置すべき位置に応じて、使用する補助部材３７８の長さが変更される。詳細には、筒状部材３７３の複数通りの位置に合わせて、長さが異なる複数の補助部材３７８が予め準備される。塗布装置１において用いられる塗布液が決定されると、当該塗布液の粘度等に応じて、膜法線方向において筒状部材３７３を配置すべき位置が特定される。当該位置に対応する１つの補助部材３７８が選択され、当該補助部材３７８に筒状部材３７３が挿入される。筒状部材３７３は、保持部３１２の孔部３１３にさらに挿入される。そして、補助部材３７８が、フランジ部３７６および保持部３１２の双方に接触するまで、筒状部材３７３が締め付けられる。これにより、筒状部材３７３の端部に取り付けられた吐出板３７４と接液膜３４との間の距離を精度よく管理して、圧力室３２の容積を精度よく調整することができる。補助部材３７８の内側面の雌ねじは、必要に応じて省略されてもよい。　 In the coating head 3, the length of the auxiliary member 378 to be used is changed according to the position where the cylindrical member 373 is to be disposed. Specifically, a plurality of auxiliary members 378 having different lengths are prepared in advance according to a plurality of positions of the cylindrical member 373. When the coating liquid used in the coating apparatus 1 is determined, the position where the cylindrical member 373 should be arranged in the film normal direction is specified according to the viscosity of the coating liquid and the like. One auxiliary member 378 corresponding to the position is selected, and the cylindrical member 373 is inserted into the auxiliary member 378. The cylindrical member 373 is further inserted into the hole 313 of the holding unit 312. The tubular member 373 is tightened until the auxiliary member 378 contacts both the flange portion 376 and the holding portion 312. Thereby, the distance between the discharge plate 374 attached to the end of the cylindrical member 373 and the liquid contact film 34 can be managed with high accuracy, and the volume of the pressure chamber 32 can be adjusted with high accuracy. The internal thread on the inner surface of the auxiliary member 378 may be omitted as necessary. *
（第２の実施形態）　図７および図８は、本発明の例示的な第２の実施形態に係る塗布ヘッド３ａを示す断面図である。図７および図８の塗布ヘッド３ａでは、図２および図３の対向部３７１に代えて、交換可能な対向部３８１ａ，３８１ｂが設けられる。また、保持部３１２が省略され、シール部材３３ａの構造が図２および図３のシール部材３３と異なる。他の構成は、図２および図３と同じであり、同じ構成に同じ符号を付す。　 Second Embodiment FIGS. 7 and 8 are cross-sectional views showing a coating head 3a according to a second exemplary embodiment of the present invention. In the coating head 3a of FIGS. 7 and 8, replaceable facing portions 381a and 381b are provided in place of the facing portion 371 of FIGS. Further, the holding portion 312 is omitted, and the structure of the seal member 33a is different from the seal member 33 of FIGS. Other configurations are the same as those in FIGS. 2 and 3, and the same reference numerals are given to the same configurations. *
　図７および図８に示す対向部３８１ａ，３８１ｂは、膜法線方向において接液膜３４に対向する。図７に示す対向部３８１ａおよび図８に示す対向部３８１ｂのそれぞれは、板状部３８２と、筒状突出部３８３と、を含む。板状部３８２は、中心線Ｃ１を中心とする円板状であり、中心線Ｃ１に対して垂直に広がる。板状部３８２には、吐出口３２１が設けられる。筒状突出部３８３は、板状部３８２における接液膜３４に対向する主面に設けられる。筒状突出部３８３は、中心線Ｃ１を中心とする筒状である。筒状突出部３８３は、本体環状部３１１の内側面に圧入され、本体環状部３１１に対して固定される。本体環状部３１１の内側面には、環状凹部が形成される。当該環状凹部には、Ｏリング等のシール部材３３ａが設けられる。　 7 and 8 oppose the wetted film 34 in the normal direction of the film. Each of the facing portion 381a shown in FIG. 7 and the facing portion 381b shown in FIG. 8 includes a plate-like portion 382 and a cylindrical protruding portion 383. The plate-like portion 382 has a disc shape centered on the center line C1, and spreads perpendicularly to the center line C1. The plate-like portion 382 is provided with a discharge port 321. The cylindrical protruding portion 383 is provided on the main surface of the plate-like portion 382 facing the liquid contact film 34. The cylindrical protrusion 383 has a cylindrical shape with the center line C1 as the center. The cylindrical protrusion 383 is press-fitted into the inner surface of the main body annular portion 311 and is fixed to the main body annular portion 311. An annular recess is formed on the inner side surface of the main body annular portion 311. A seal member 33a such as an O-ring is provided in the annular recess. *
　対向部３８１ａ，３８１ｂでは、膜法線方向における筒状突出部３８３の長さが異なる。筒状突出部３８３の肉厚は、同じである。好ましくは、図７および図８に示す対向部３８１ａ，３８１ｂ以外に、筒状突出部３８３の長さが異なる他の対向部が準備される。塗布装置１では、対象物９上に塗布する塗布液の粘度等に合わせて、複数の対向部３８１ａ，３８１ｂから１つの対向部が選択される。例えば、粘度が比較的低い塗布液を用いる際には、筒状突出部３８３の長さが短い対向部、例えば、図７の対向部３８１ａが選択される。粘度が比較的高い塗布液を用いる際には、筒状突出部３８３の長さが長い対向部、例えば、図８の対向部３８１ｂが選択される。図８の対向部３８１ｂを選択する場合における圧力室３２の容積は、図７の対向部３８１ａを選択する場合に比べて小さくなる。　 In the facing portions 381a and 381b, the length of the cylindrical protruding portion 383 in the film normal direction is different. The wall thickness of the cylindrical protrusion 383 is the same. Preferably, in addition to the facing portions 381a and 381b shown in FIGS. 7 and 8, another facing portion having a different length of the cylindrical protruding portion 383 is prepared. In the coating apparatus 1, one facing portion is selected from the plurality of facing portions 381a and 381b in accordance with the viscosity of the coating liquid applied on the object 9. For example, when using a coating liquid having a relatively low viscosity, an opposing portion having a short length of the cylindrical protrusion 383, for example, an opposing portion 381a in FIG. 7 is selected. When a coating liquid having a relatively high viscosity is used, a facing portion having a long cylindrical protrusion 383, for example, a facing portion 381b in FIG. 8 is selected. The volume of the pressure chamber 32 when selecting the facing portion 381b in FIG. 8 is smaller than that when selecting the facing portion 381a in FIG. *
　以上のように、塗布ヘッド３ａでは、対向部が、他の対向部と交換可能であり、当該対向部が本体部３１に用いられた場合における圧力室３２の容積が、当該他の対向部が本体部３１に用いられた場合における圧力室３２の容積と異なる。すなわち、塗布ヘッド３ａの容積変更部３６では、対向部の交換により、接液膜３４が一定の状態における圧力室３２の容積が変更可能である。これにより、広範囲の粘度の塗布液を適切に吐出することが実現される。　 As described above, in the coating head 3a, the facing portion can be replaced with another facing portion, and the volume of the pressure chamber 32 when the facing portion is used for the main body 31 is the same as that of the other facing portion. This is different from the volume of the pressure chamber 32 when used in the main body 31. That is, in the volume changing unit 36 of the coating head 3a, the volume of the pressure chamber 32 in a state where the liquid contact film 34 is constant can be changed by exchanging the facing part. Accordingly, it is possible to appropriately discharge a coating liquid having a wide range of viscosity. *
　図９および図１０は、塗布ヘッド３ａの他の例を示す図である。図９および図１０に示す対向部３８１ｃ，３８１ｄの板状部３８２では、図７および図８の対向部３８１ａ，３８１ｂにおける吐出口３２１に代えて、孔部３８４が形成される。孔部３８４の直径は、後述の吐出板３８５に設けられる吐出口３２１に比べて十分に大きい。また、筒状突出部３８３の内側面は、孔部３８４の内側面に連続して、中心線Ｃ１に平行に延びる。筒状突出部３８３における接液膜３４側の端部には、吐出板３８５が取り付けられる。吐出板３８５は、中心線Ｃ１に垂直であり、中央に吐出口３２１が設けられる。吐出板３８５は、圧力室３２の内部に配置される。　 9 and 10 are diagrams showing another example of the coating head 3a. In the plate-like portion 382 of the facing portions 381c and 381d shown in FIGS. 9 and 10, a hole 384 is formed instead of the discharge port 321 in the facing portions 381a and 381b of FIGS. The diameter of the hole 384 is sufficiently larger than a discharge port 321 provided in a discharge plate 385 described later. Further, the inner side surface of the cylindrical protrusion 383 is continuous with the inner side surface of the hole 384 and extends in parallel to the center line C1. A discharge plate 385 is attached to the end of the cylindrical protrusion 383 on the liquid contact film 34 side. The discharge plate 385 is perpendicular to the center line C1, and a discharge port 321 is provided at the center. The discharge plate 385 is disposed inside the pressure chamber 32. *
　複数の対向部３８１ｃ，３８１ｄでは、膜法線方向における筒状突出部３８３の長さが互いに異なる。したがって、一の対向部が本体部３１に用いられた場合における圧力室３２の容積が、他の対向部が本体部３１に用いられた場合における圧力室３２の容積と異なる。これにより、広範囲の粘度の塗布液を適切に吐出することが可能となる。　 In the plurality of facing portions 381c and 381d, the lengths of the cylindrical protruding portions 383 in the film normal direction are different from each other. Therefore, the volume of the pressure chamber 32 when one opposing portion is used for the main body 31 is different from the volume of the pressure chamber 32 when another opposing portion is used for the main body 31. Thereby, it becomes possible to appropriately discharge a coating liquid having a wide range of viscosity. *
　また、一の対向部および他の対向部のそれぞれが、吐出口３２１を含み、当該一の対向部が本体部３１に用いられた場合における接液膜３４と吐出口３２１との間の距離が、当該他の対向部が本体部３１に用いられた場合における当該距離と異なる。詳細には、一の対向部の使用時における圧力室３２の容積が、他の対向部の使用時よりも小さくなる場合に、当該一の対向部の使用時における接液膜３４と吐出口３２１との間の距離も、当該他の対向部の使用時よりも小さくなる。これにより、対向部の交換により圧力室３２の容積を小さくする際に、接液膜３４と吐出口３２１との間の圧力損失も低減することができる。　 In addition, each of the one facing portion and the other facing portion includes the discharge port 321, and the distance between the liquid contact film 34 and the discharge port 321 when the one facing portion is used for the main body portion 31 is This distance differs from the case where the other facing portion is used for the main body portion 31. Specifically, when the volume of the pressure chamber 32 when the one facing portion is used is smaller than when the other facing portion is used, the liquid contact film 34 and the discharge port 321 when the one facing portion is used. Is also smaller than when the other facing portion is used. Thereby, when the volume of the pressure chamber 32 is reduced by exchanging the facing portion, the pressure loss between the liquid contact film 34 and the discharge port 321 can also be reduced. *
　上記塗布ヘッド３，３ａおよび塗布装置１では様々な変形が可能である。　 The coating heads 3 and 3a and the coating apparatus 1 can be variously modified. *
　可動部３７２を含む塗布ヘッド３において、吐出口３２１の位置が、本体環状部３１１に対して固定されてもよい。例えば、図１１に示す塗布ヘッド３では、本体環状部３１１に固定された保持部３１２に、吐出口３２１が設けられる。可動部３７２は、複数のねじ３７９を含む。図１１の下側から保持部３１２を見た様子を示す図１２のように、保持部３１２には、複数のねじ孔３１４が設けられ、複数のねじ３７９は、複数のねじ孔３１４にそれぞれねじ作用により嵌め合わされる。複数のねじ３７９の端部は、圧力室３２内に配置される。図１１に示す塗布ヘッド３では、複数のねじ３７９が膜法線方向に移動可能である。複数のねじ３７９において、圧力室３２内に配置される部位の長さを変更することにより、圧力室３２の容積を容易に変更することができる。　 In the coating head 3 including the movable portion 372, the position of the discharge port 321 may be fixed with respect to the main body annular portion 311. For example, in the coating head 3 illustrated in FIG. 11, the discharge port 321 is provided in the holding unit 312 fixed to the main body annular portion 311. The movable part 372 includes a plurality of screws 379. As shown in FIG. 12 showing the state of viewing the holding portion 312 from the lower side of FIG. 11, the holding portion 312 is provided with a plurality of screw holes 314, and the plurality of screws 379 are respectively screwed into the plurality of screw holes 314. It is fitted by action. Ends of the plurality of screws 379 are disposed in the pressure chamber 32. In the coating head 3 shown in FIG. 11, a plurality of screws 379 are movable in the film normal direction. In the plurality of screws 379, the volume of the pressure chamber 32 can be easily changed by changing the length of the portion disposed in the pressure chamber 32. *
　図１３に示すように、吐出板３７４が、筒状部材３７３の内側面上、すなわち、筒状部材３７３の内方に取り付けられてもよい。この場合も、圧力室３２の容積を小さくする場合に、接液膜３４と吐出板３７４との間の距離も小さくして、接液膜３４と吐出口３２１との間の圧力損失を低減することができる。また、塗布液の吐出において、周囲の風の影響を抑制することができる。　 As shown in FIG. 13, the discharge plate 374 may be attached on the inner surface of the cylindrical member 373, that is, on the inner side of the cylindrical member 373. Also in this case, when the volume of the pressure chamber 32 is reduced, the distance between the liquid contact film 34 and the discharge plate 374 is also reduced, and the pressure loss between the liquid contact film 34 and the discharge port 321 is reduced. be able to. In addition, the influence of the surrounding wind can be suppressed in discharging the coating liquid. *
　図２および図３の塗布ヘッド３において、図７および図８のシール部材３３ａと同様のシール部材が設けられてもよい。例えば、図１４に示す塗布ヘッド３では、対向部３７１の筒状部材３７３と本体環状部３１１との間に、Ｏリング等のシール部材３３ａが設けられる。図１５に示す塗布ヘッド３では、筒状部材３７３と保持部３１２との間にシール部材３３ａが設けられる。また、上述の図１１の塗布ヘッド３では、対向部３７１に含まれるねじ３７９と、ねじ孔３１４の側面との間に、シールテープにより形成されるシール部材３３が設けられる。既述のように、図７ないし図１０の塗布ヘッド３ａでは、対向部３８１ａ～３８１ｄと本体環状部３１１との間にシール部材３３ａが設けられる。以上のように、塗布ヘッド３，３ａでは、対向部３７１，３８１ａ～３８１ｄと、本体部３１における対向部３７１，３８１ａ～３８１ｄ以外の部位との間に、塗布液の通過を防止するシール部材３３，３３ａが設けられる。これにより、塗布液の漏れを抑制することができる。　 2 and 3 may be provided with a seal member similar to the seal member 33a of FIGS. For example, in the coating head 3 shown in FIG. 14, a seal member 33 a such as an O-ring is provided between the cylindrical member 373 of the facing portion 371 and the main body annular portion 311. In the coating head 3 illustrated in FIG. 15, a seal member 33 a is provided between the cylindrical member 373 and the holding unit 312. In the coating head 3 of FIG. 11 described above, the seal member 33 formed of a seal tape is provided between the screw 379 included in the facing portion 371 and the side surface of the screw hole 314. As described above, in the coating head 3a of FIGS. 7 to 10, the seal member 33a is provided between the facing portions 381a to 381d and the main body annular portion 311. As described above, in the coating heads 3 and 3a, the seal member 33 that prevents the coating liquid from passing between the facing portions 371, 381a to 381d and the portions of the main body 31 other than the facing portions 371, 381a to 381d. , 33a are provided. Thereby, the leakage of the coating liquid can be suppressed. *
　塗布ヘッド３，３ａの設計によっては、容積変更部３６が圧力室３２の側面に設けられてもよい。例えば、圧力室３２の側面から内部に突出するねじが設けられ、当該ねじにおいて圧力室３２内に配置される部位の長さを変更することにより、圧力室３２の容積が変更される。また、本体部３１の形状等によっては、圧力室３２の底面以外の位置、例えば、圧力室３２の側面に吐出口３２１が設けられてもよい。　 Depending on the design of the coating heads 3 and 3 a, the volume changing unit 36 may be provided on the side surface of the pressure chamber 32. For example, a screw protruding inward from the side surface of the pressure chamber 32 is provided, and the volume of the pressure chamber 32 is changed by changing the length of a portion of the screw disposed in the pressure chamber 32. Further, depending on the shape or the like of the main body 31, the discharge port 321 may be provided at a position other than the bottom surface of the pressure chamber 32, for example, at the side surface of the pressure chamber 32. *
　塗布装置１において、ステージ２１が固定され、塗布ヘッド３が移動機構により移動されてもよい。すなわち、移動機構は、塗布液が塗布される対象物９を塗布ヘッド３に対して相対的に移動すればよい。　 In the coating apparatus 1, the stage 21 may be fixed, and the coating head 3 may be moved by a moving mechanism. That is, the moving mechanism may move the object 9 to which the coating liquid is applied relative to the coating head 3. *
　上記実施の形態および各変形例における構成は、相互に矛盾しない限り適宜組み合わされてよい。 The configurations in the above embodiment and each modification may be combined as appropriate as long as they do not contradict each other.
　本発明に係る塗布ヘッドおよび塗布装置は、様々な用途に利用することができる。 The coating head and the coating apparatus according to the present invention can be used for various purposes.
　１　　塗布装置
　２　　移動機構
　３，３ａ　　塗布ヘッド
　４　　塗布液供給部
　９　　対象物
　３１　　本体部
　３２　　圧力室
　３３，３３ａ　　シール部材
　３４　　接液膜
　３５　　加圧部
　３６　　容積変更部
　３１２　　保持部
　３１３　　（保持部の）孔部
　３２１　　吐出口
　３７１，３８１ａ～３８１ｄ　　対向部
　３７２　　可動部
　３７３　　筒状部材
　３７４　　吐出板
　３７５　　内部側端部
　３７６　　フランジ部
　３７８　　補助部材 DESCRIPTION OF SYMBOLS 1 Coating device 2 Moving mechanism 3, 3a Coating head 4 Coating liquid supply part 9 Object 31 Main body part 32 Pressure chamber 33, 33a Seal member 34 Liquid contact film 35 Pressurization part 36 Volume change part 312 Holding part 313 (Holding part 313 ) Hole 321 Discharge port 371, 381a to 381d Opposing part 372 Movable part 373 Tubular member 374 Discharge plate 375 Internal side end 376 Flange part 378 Auxiliary member

Claims (11)

  1. 　塗布液が充填される圧力室の一部を形成する本体部と、　前記圧力室の他の一部を形成する接液膜と、　前記接液膜を前記圧力室の内部に向けて撓ませることにより、前記圧力室に連続する吐出口から前記塗布液を吐出させる加圧部と、を備え、　前記本体部が、前記接液膜が一定の状態における前記圧力室の容積を変更可能とする容積変更部を有する、塗布ヘッド。 A main body part forming a part of the pressure chamber filled with the coating liquid, a liquid contact film forming the other part of the pressure chamber, and bending the liquid contact film toward the inside of the pressure chamber. And a pressurizing part that discharges the coating liquid from a discharge port continuous to the pressure chamber, and the main body part is capable of changing the volume of the pressure chamber in a state where the liquid contact film is constant. An application head having a change portion.
  2. 　前記加圧部が前記接液膜を撓ませる方向は、前記接液膜に直交する一方向を含み、　前記容積変更部が、前記一方向において、前記接液膜に対向する対向部を有する、請求項１に記載の塗布ヘッド。 The direction in which the pressurizing unit deflects the wetted film includes one direction orthogonal to the wetted film, and the volume changing unit has a facing part that faces the wetted film in the one direction. The coating head according to claim 1.
  3. 　前記対向部が、前記一方向に移動可能な可動部を有する、請求項２に記載の塗布ヘッド。 The coating head according to claim 2, wherein the facing part has a movable part movable in the one direction.
  4. 　前記吐出口が前記可動部に設けられる、請求項３に記載の塗布ヘッド。 The coating head according to claim 3, wherein the discharge port is provided in the movable part.
  5. 　前記可動部が、　前記一方向に延び、前記圧力室の内部と外部をつなぐ筒状部材と、　前記吐出口が設けられる板状であり、前記一方向における前記筒状部材の内部側端部、または、前記筒状部材の内方に取り付けられる吐出板と、を有し、　前記本体部が、孔部が形成された保持部をさらに有し、　前記筒状部材が前記保持部に保持される、請求項３または４に記載の塗布ヘッド。 The movable portion is a plate-like member that extends in the one direction and connects the inside and the outside of the pressure chamber, and a plate-like shape provided with the discharge port, and an inner side end portion of the tubular member in the one direction; Or a discharge plate attached to the inside of the cylindrical member, the main body further includes a holding part in which a hole is formed, and the cylindrical member is held by the holding part The coating head according to claim 3 or 4.
  6. 　前記孔部の側面に雌ねじが形成され、前記筒状部材の外側面に雄ねじが形成される、請求項５に記載の塗布ヘッド。 The coating head according to claim 5, wherein a female screw is formed on a side surface of the hole and a male screw is formed on an outer surface of the cylindrical member.
  7. 　前記筒状部材が、前記圧力室の外部に配置されるフランジ部を有し、　前記対向部が、前記筒状部材が挿入される環状の補助部材をさらに有し、　前記補助部材が、前記フランジ部と前記保持部との間において両者に接触する、請求項５または６に記載の塗布ヘッド。 The cylindrical member has a flange portion arranged outside the pressure chamber, the opposing portion further has an annular auxiliary member into which the cylindrical member is inserted, and the auxiliary member is the flange The coating head according to claim 5, wherein the coating head is in contact with each other between a part and the holding part.
  8. 　前記対向部が、他の対向部と交換可能であり、　前記対向部が前記本体部に用いられた場合における前記圧力室の容積が、前記他の対向部が前記本体部に用いられた場合における前記圧力室の容積と異なる、請求項２に記載の塗布ヘッド。 The facing portion is replaceable with another facing portion, and the volume of the pressure chamber when the facing portion is used for the main body portion is the same as that when the other facing portion is used for the main body portion. The coating head according to claim 2, wherein the coating head has a volume different from that of the pressure chamber.
  9. 　前記対向部および前記他の対向部のそれぞれが、吐出口を含み、　前記対向部が前記本体部に用いられた場合における前記接液膜と前記吐出口との間の距離が、前記他の対向部が前記本体部に用いられた場合における前記距離と異なる、請求項８に記載の塗布ヘッド。 Each of the facing portion and the other facing portion includes a discharge port, and the distance between the liquid contact film and the discharge port when the facing portion is used for the main body portion is the other facing The coating head according to claim 8, wherein the part is different from the distance when the part is used for the main body part.
  10. 　前記対向部と、前記本体部の他の部位との間に、前記塗布液の通過を防止するシール部材が設けられる、請求項２ないし９のいずれか１つに記載の塗布ヘッド。 The coating head according to any one of claims 2 to 9, wherein a sealing member for preventing the coating liquid from passing is provided between the facing portion and another portion of the main body portion.
  11. 　請求項１ないし１０のいずれか１つに記載の塗布ヘッドと、　前記塗布ヘッドの前記圧力室に前記塗布液を供給する塗布液供給部と、　前記塗布液が塗布される対象物を前記塗布ヘッドに対して相対的に移動する移動機構と、を備える、塗布装置。 The coating head according to any one of claims 1 to 10, a coating liquid supply unit that supplies the coating liquid to the pressure chamber of the coating head, and an object to which the coating liquid is applied is the coating head. And a moving mechanism that moves relative to the coating device.
PCT/JP2018/000440 2017-01-17 2018-01-11 Applicator head and applicator device WO2018135365A1 (en)

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JP2018563288A JPWO2018135365A1 (en) 2017-01-17 2018-01-11 Coating head and coating device
KR1020197019136A KR20190092479A (en) 2017-01-17 2018-01-11 Dispensing head and dispensing device
CN201880006474.3A CN110167684A (en) 2017-01-17 2018-01-11 Applicator head and applying device

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JP2017-006019 2017-01-17

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004141866A (en) * 2002-09-30 2004-05-20 Matsushita Electric Ind Co Ltd Fluid discharge method and fluid discharging device
JP2007130546A (en) * 2005-11-09 2007-05-31 Pioneer Electronic Corp Ink jet head and manufacturing apparatus of plasma display panel
JP2011147889A (en) * 2010-01-22 2011-08-04 Toray Eng Co Ltd Device for discharging minute droplet
JP2013139745A (en) * 2012-01-04 2013-07-18 AdvanJet Viscous non-contact injection method and device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100384545C (en) * 2002-09-30 2008-04-30 松下电器产业株式会社 Fluid discharge device and discharge method
CN100515773C (en) * 2004-11-17 2009-07-22 兄弟工业株式会社 Ink jet head
KR20130143542A (en) * 2011-02-15 2013-12-31 파나소닉 주식회사 Liquid discharge device and liquid discharge method
JP5802347B1 (en) 2014-05-20 2015-10-28 エンジニアリングシステム株式会社 Trace liquid dropping method and trace liquid dispenser

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004141866A (en) * 2002-09-30 2004-05-20 Matsushita Electric Ind Co Ltd Fluid discharge method and fluid discharging device
JP2007130546A (en) * 2005-11-09 2007-05-31 Pioneer Electronic Corp Ink jet head and manufacturing apparatus of plasma display panel
JP2011147889A (en) * 2010-01-22 2011-08-04 Toray Eng Co Ltd Device for discharging minute droplet
JP2013139745A (en) * 2012-01-04 2013-07-18 AdvanJet Viscous non-contact injection method and device

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