JP2004141866A - Fluid discharge method and fluid discharging device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid discharge method and a fluid discharging device for intermittently quantitatively discharging at high speed and with high precision various liquids, such as, an adhesive, clean solder, phosphor, an electrode material, grease, paint, hot melt, chemicals and food, in production processes in the fields of electronic parts, electric appliances or a display. <P>SOLUTION: A fluid replenishing device for supplying fluid is disposed on two surfaces relatively moving in the direction of a space, a continuous flow replenished from the fluid replenishing device is converted into an intermittent flow by using pressure variation due to the variation of the space between the relatively moving faces, and intermittent discharge amount per dot is adjusted by the number of revolutions of the fluid replenishing device. <P>COPYRIGHT: (C)2004,JPO

Description

The present invention relates to a fluid discharge method and a fluid discharge device of a small flow rate required in various fields such as information / precision equipment, machine tools, FA, or various production processes such as semiconductors, liquid crystals, displays, and surface mounting. is there.

Liquid ejecting devices (dispensers) have been used in various fields, but with the recent demand for miniaturization and high recording density of electronic components, a small amount of fluid material is supplied with high accuracy and stability. There is a growing need for control technology. For example, in the field of displays such as plasma displays, CRTs, and organic ELs, there is a great demand for patterning phosphor / electrode materials directly on a panel surface without using a mask, instead of conventional methods such as screen printing and photolithography. To summarize the dispenser's challenges for that,
(I) Finer coating amount (ii) Higher accuracy of coating amount (iii) Shorter coating time.

By the way, the machining accuracy in machining is on the order of micron to sub-micron. In the field of semiconductors and electronic components, submicron processing is common, but in the field of machining, which is progressing with mechatronics, the demand for ultra-precision processing is rapidly increasing. In recent years, with the introduction of ultra-precision processing technology, magnetostrictive elements represented by giant magnetostrictive elements and piezoelectric elements have been applied as micro-actuators. There has been proposed an ejection apparatus that ejects a very small amount of liquid droplets at high speed by using the electromagnetic strain element as a source of fluid pressure.

For example, Japanese Patent Application Laid-Open No. 2000-167467 discloses a method of ejecting an arbitrary single droplet using a giant magnetostrictive element. In FIG. 24, reference numeral 502 denotes a cylinder made of a non-magnetic material such as a glass pipe or a stainless steel pipe. At the end of the cylinder 502, a liquid storage section 503 and an injection nozzle 504 having a fine injection port are formed. Inside the cylinder 502, an actuator 505 made of a bar-shaped giant magnetostrictive material is movably housed. A piston 506 is provided at the end of the actuator 505 facing the injection nozzle 504 so as to be able to come and go.

ス プ リ ン グ A spring 508 is interposed between the other end of the actuator 505 and the stopper 507 at the end of the cylinder 502 to urge the actuator 505 to advance by the spring 508. A coil 509 is wound around the outer periphery of the cylinder 502 at a position close to the piston 506.

In the injection device having the above configuration, an instantaneous magnetic field is applied to the giant magnetostrictive material by instantaneously flowing a current through the coil 509 to generate an instantaneous transient displacement due to an elastic wave at the axial end of the giant magnetostrictive material. Let it. According to the operation, the liquid filled in the cylinder 502 can be ejected from the nozzle 504 as one minute droplet.

Conventionally, an air pulse type dispenser as shown in FIG. 25 has been widely used as a liquid ejection apparatus, and the technique is introduced in, for example, "Automation Technology '93 .25 Vol. 7".

The dispenser according to this method applies a fixed amount of air supplied from a constant pressure source to the inside 601 of the container 600 (cylinder) in a pulsed manner, and outputs a fixed amount of liquid corresponding to the rise in the pressure in the cylinder 600 from the nozzle 602. It is to discharge.

デ ィ ス For the purpose of high-speed intermittent coating, a dispenser as shown in FIG. 26 (hereinafter referred to as “jet type” for convenience) has been put to practical use. 550 is a micrometer, 551 is a spring, 552 is a piston seal member, 553 is a piston chamber, 554 is a heater, 555 is a needle, 556 is a coating material flowing toward a sheet portion, and 557 is a dot-shaped material flying from a dispenser. It is a coating material. 27A and 27B are model diagrams showing the vicinity 558 of the discharge unit in FIG. 26. FIG. 27A shows a suction process, and FIG. 27B shows a discharge process. Reference numeral 559 denotes a spherical convex portion formed at the discharge side end of the needle 555, 560 denotes a discharge tip portion, 561 denotes a spherical concave portion formed in the discharge tip portion 560, and 562 denotes a discharge nozzle. Reference numeral 563 denotes a pump chamber formed by the convex portion 559 and the concave portion 561 each having a spherical shape.

In FIG. 27A, which is the suction process, when the supply air pulse of the piston chamber 553 is ON, the needle 555 rises against the spring 551. At this time, the suction portion 564 formed between the spherical convex portion 559 and the concave portion 561 is in an open state, and the coating material 556 is filled from the suction portion 564 into the pump chamber 563. In FIG. 27B, which is the ejection step, when the air pulse is OFF, that is, when no air pressure is applied to the piston chamber 553, the needle 555 is lowered by the force of the spring 551. At this time, the suction part 564 is in a shielded state, and the fluid in the pump chamber 563 is compressed in the closed space excluding the discharge nozzle 562, so that a high pressure is generated and the fluid flies and flows out.

イ ン ク ジ ェ ッ ト Development has been made to apply the ink jet system, which has been widely used as a consumer printer, as an industrial coating device. FIG. 28 shows a conventional example of a head section in an ink jet recording apparatus (Japanese Patent Laid-Open No. 11-10866). 651 is a base, 652 is a vibration plate, 653 is a laminated piezoelectric element, 654 is an ink chamber, and 655 is A common ink chamber, 656 is an ink flow path (throttle section), 657 is a nozzle plate, and 658 is a discharge nozzle. When a voltage is applied to the piezoelectric element 653 which is a pressure applying unit, the piezoelectric element 653 deforms the vibration plate 652 in the thickness direction, and the volume of the ink chamber 654 decreases. As a result, the fluid is compressed and the pressure in the ink chamber 654 rises, so that a part of the fluid flows back through the ink flow path 656 to the common ink chamber 655, but the rest is discharged from the nozzle 658 to the atmosphere. Is done.

JP-A-11-10866

In the field of circuit formation, which is becoming more and more precise and ultra-fine in recent years, or in the fields of forming electrodes, ribs, and phosphor screens of picture tubes such as PDPs and CRTs, and manufacturing processes of liquid crystals, optical discs, organic ELs, etc. Many of the fluid materials to be used are high viscosity powdered fluids. In order to replace the conventional method with a direct patterning method using a dispenser, a small amount of high-viscosity powder fluid containing fine particles having an average outer diameter of several microns to several tens of microns, for example, a phosphor, a conductive capsule, a solder, The biggest issue is how to apply electrode materials and the like finely onto the target substrate with high reliability at high speed, high accuracy, without clogging of the flow path, and with high reliability.

Hereinafter, the problems of the following prior art will be described by taking a phosphor layer forming process of a plasma display panel as an example.

[1] Problems of the screen printing method and the photolithography method [2] Problems of direct patterning of the phosphor layer using the conventional dispenser technology First, the above-mentioned [1] will be described.

(1) Structure of Plasma Display Panel FIG. 29 shows an example of the structure of a plasma display panel (hereinafter, PDP). The PDP is roughly composed of a front plate 800 and a rear plate 801. A plurality of sets of linear transparent electrodes 803 are formed on a first substrate 802 which is a transparent substrate constituting the front plate 800. In addition, a plurality of sets of linear electrodes 805 that are orthogonal to the linear transparent electrodes are provided in parallel on the second substrate 804 that forms the back plate 801. The two substrates are opposed to each other via a bias rib 806 on which a phosphor layer is formed, and a discharge gas is sealed in the bias rib 806. When a voltage equal to or higher than the threshold is applied between the electrodes of the two substrates, discharge occurs at a position where the electrodes are orthogonal to each other to emit a discharge gas, and the emission can be observed through the transparent first substrate 802. An image can be displayed on the first substrate side by controlling the discharge position (discharge point). In order to perform color display by the PDP, a phosphor that emits a desired color by ultraviolet rays emitted at each discharge point at the time of discharge is formed at a position (partition of a barrier rib) corresponding to each discharge point. In order to perform full color display, each phosphor of RGB is formed.

構成 The configuration of the front plate 800 and the back plate 801 will be described in more detail.

(4) The front plate 800 is formed by forming a plurality of sets of two linear transparent electrodes 803 in parallel on the inner surface side of a first substrate 802 made of a transparent substrate such as a glass substrate using ITO or the like. A bus electrode 807 for reducing the line resistance value is formed on the inner surface of the linear transparent electrode 803. A dielectric layer 808 covering these transparent electrodes 803 and bus electrodes 807 is formed on the entire inner surface of the front plate 800, and a MgO layer 809 as a protective layer is formed on the entire surface of the dielectric layer 808. .

On the other hand, on the inner surface side of the second substrate 804 of the back plate 801, a plurality of linear address electrodes 805 orthogonal to the linear transparent electrodes 803 of the front plate 800 are formed of a silver material or the like in parallel. Further, a dielectric layer 810 covering the address electrodes 805 is formed on the entire inner surface of the back plate 801. On the dielectric layer 810, barrier ribs (partitions) 806 having a predetermined height are provided between the address electrodes 805 to separate the address electrodes 805 and maintain a constant gap between the front plate 800 and the back plate 801. It protrudes and is formed. With the barrier ribs 806, cells 811 are formed along each address electrode 805, and phosphors 812 of each of RGB are sequentially formed on the inner surface thereof. PDPs having a cell structure include those having a single discharge point in an independent cell as shown in FIG. 29 and those having a cell structure (not shown) in which each discharge point is partitioned by a partition in each row. In recent years, the “independent cell method” has been attracting attention as a method that can improve the performance of PDPs. The reason is that, by surrounding the cells in a waffle shape with four barrier ribs, light leakage between adjacent cells can be prevented, and the area of the light emitter can be increased. As a result, it is a feature of the "independent cell system" that the luminous efficiency and the luminous amount (brightness) can be increased and a high-contrast image can be realized. The phosphor layer formed on the cell wall is generally thickly thickened to about 10 to 40 μm in order to improve the color developability. In order to form the RGB phosphor layer, each cell is filled with a phosphor coating solution and then dried to remove volatile components, thereby forming a thick phosphor on the inner surface of the cell and simultaneously discharging. A space for filling the neutral gas is created. In order to form such a thick-film phosphor pattern, the coating material containing the phosphor is formed of a high-viscosity paste-like fluid (a phosphor paste) of several thousands mPas to tens of thousands of mPas with a reduced amount of solvent. ) And conventionally applied to a substrate by screen printing or photolithography.

(2) Problems of the conventional screen printing method When the conventional screen printing method is adopted, if the screen is enlarged, the screen plate is greatly elongated due to tension, and it is difficult to position the screen printing plate with high accuracy over the entire screen. became. In addition, when the phosphor material is to be filled, the material is loaded even to the top of the partition wall, and in the case of the “independent cell system”, there is a problem that crosstalk between barrier ribs is caused. For this reason, it has been necessary to take measures such as introducing a polishing step to remove the material attached to the top portion of the partition wall. In addition, the difference in squeegee pressure changes the filling amount of the phosphor material, and the pressure adjustment is very delicate, and often depends on the skill of the operator. Therefore, it is not easy to obtain a constant filling amount in all the independent cells over the entire area of the back plate.

(3) Problems of conventional photolithography In the case of conventional photolithography, there are the following problems. In this method, after the photosensitive phosphor paste is pressed into the cells between the ribs, only the photosensitive composition pressed into the predetermined cells is left by the exposure and development steps. After that, through a baking step, organic substances in the photosensitive composition are eliminated to form a pattern of the phosphor layer. In this method, since the paste used contains the phosphor powder, the sensitivity to ultraviolet rays is low, and it has been difficult to make the thickness of the phosphor layer 10 μm or more. Therefore, there is a problem that sufficient luminance cannot be obtained.

In addition, when photolithography is employed, exposure and development steps are indispensable for each color, but since the phosphor is contained at a high concentration in the paste coating layer, the loss of the phosphor due to development removal is large, Since the effective utilization rate of the phosphor is less than 30%, there is a large cost problem.

[2] Problems in direct patterning of the phosphor layer using the conventional dispenser technology (1) Problems in air nozzle type dispensers Air nozzle type dispensers widely used in the field of circuit mounting and the like Attempts have been made in the past to apply it to a picture tube using FIG. 25). In the case of the air nozzle type, it is difficult to continuously apply a high-viscosity fluid at a high speed, so that the fine particles are applied after being diluted with a low-viscosity fluid. In the case of applying a fluorescent substance to a picture tube such as a PDP or a CRT, the particle size of the fine particles is, for example, 3 to 9 μm, and the specific gravity thereof is about 4 to 5. In this case, there is a problem in that when the flow of the fluid stops, the fine particles are immediately deposited inside the flow channel because the single particle is heavy. Further, the air type dispenser has a drawback that response is poor. This drawback is due to the compressibility of the air enclosed in the cylinder and the nozzle resistance when passing the air through the narrow gap. That is, in the case of the air system, the time constant of the fluid circuit determined by the volume of the cylinder and the nozzle resistance is large, and after the input pulse is applied, it takes 0.07 to 0.1 until the fluid starts discharging and is transferred onto the substrate. A time delay of about a second must be expected.

In the case of a discharge device using a piezoelectric material or a giant magnetostrictive material as a driving source as described above with reference to FIG. 24, the proposal is directed to the application of a fluid that does not contain powder, and the above-described problem relating to the powder fluid application process is addressed. Is expected to be difficult. When applying a fluid using an instantaneous transient displacement due to an elastic wave, the storage portion 503 must be constantly filled with the fluid without any gap in a state where the volume is constant. There is no description on how to supply the fluid to the liquid storage unit 503 in order to supplement the fluid that is consumed every moment.

(2) Issues with jet dispensers
In the case of the dispenser shown in FIG. 26, the application speed is sufficiently faster than the conventional dispensers such as the pneumatic type and the thread groove type, and it is also possible to cope with a high-viscosity fluid. Further, in this method, the fluid can be made to fly from the nozzle and intermittently applied while the distance between the nozzle and the facing surface is sufficiently large. As described above, it is difficult to apply a coating method of causing a fluid to fly from a nozzle by an air type or a screw groove type in which a steep pulse-like generated pressure cannot be generated.

As described above, the closed space 563 excluding the discharge nozzle 562 is formed by engaging the spherical convex portion formed at the end of the needle 555 with the spherical concave portion formed on the discharge side as described above. This is a method in which a high pressure is generated to cause a fluid to fly and flow out by compressing the closed space.

In this case, in the compression step, the gap in the suction portion 564 between the relatively moving members (the convex portion and the concave portion) becomes zero, and the phosphor fine particles having an average particle diameter of 3 to 9 μm are mechanically pressed and destroyed. . Due to various inconveniences resulting therefrom, that is, clogging of the flow passage, deterioration of the sealing performance of the suction portion 564 due to abrasion of the members, and the like, it is often difficult to apply the method to application of powdered fluid such as phosphor.

課題 Another problem of the above method is to ensure the accuracy of the absolute amount of coating per dot, assuming continuous use for a long time. Assuming that the phosphor is intermittently applied in the “independent cell” of the PDP, several tens of heads are required in consideration of the production tact during mass production. In the dispenser, the amount of application per dot is determined by the volume of the closed space, that is, the stroke of the needle 555 and the sealing performance of the suction section 564. However, it is expected that it is extremely difficult in practice to keep the stroke and absolute position of each of the needles 555 of the dozens of dispensers and the sealing performance of the suction portion 564 with wear constant for a long time without variation. You.

(3) Problems of Ink Jet System In the case of the ink jet system shown in FIG. 28, the viscosity of the fluid is limited to 10 to 50 mPa · s due to the driving method and the structural limitation, and cannot be applied to a high viscosity fluid. The particle size of the powder contained in the fluid is limited to about 0.1 μm from the viewpoint of clogging.

低 In order to draw a fine pattern using an inkjet method, a low-viscosity nanopaste in which particles having an average particle size of about 5 nm are covered with a dispersant and independently dispersed has been developed. It is assumed that a phosphor layer is formed on the inner wall of the barrier rib (partition) of the above-mentioned “independent cell” of the PDP using the nanopaste. However, in the process of filling each cell with the phosphor coating solution and then drying, as described above, a phosphor material containing a phosphor is used to thicken the phosphor layer of about 10 to 40 μm as described above. Uses a paste-like fluid having a high viscosity with a reduced amount of solvent. In the case of a low-viscosity nanopaste whose phosphor content can be reduced only to a low level, a phosphor layer having a predetermined thickness cannot be formed because the absolute amount of the phosphor is insufficient. In addition, in order to obtain high brightness of the display, phosphor fine particles with a particle size of several microns are usually optimal. However, at this stage, the phosphor particle size cannot be easily changed. It is.

To summarize the above considerations, a method that has the potential to replace the screen printing method and photolithography method, for example, a direct patterning method that realizes the formation of an independent cell phosphor layer of a PDP cannot be found at this stage. .

Hereinafter, a brief description will be given of a past proposal relating to the intermittent application dispenser of the present inventor. In order to respond to various demands in recent years relating to minute flow rate coating, the present inventor has disclosed in Japanese Patent Application No. 2000-188899 a method in which a relative linear motion and a rotary motion are provided between a piston and a cylinder, and a fluid is provided by a rotary motion. The proposed application method is to provide a transport device, and to control the discharge amount by changing the relative gap between the fixed side and the rotation side using linear motion, and have applied for a “fluid supply device and fluid supply method”. .

In the above proposal, a thrust dynamic pressure seal is formed on a relative movement surface between a discharge side end surface of a piston and a facing surface thereof, and fluid is shut off and controlled by a dynamic pressure sealing effect when a gap between the facing surfaces is narrowed. .

Japanese Patent Application No. 2000-208072 proposes a dispenser in which a piston and a cylinder accommodating the piston are independently driven by using two independent linear motion devices to form a positive displacement pump.

In addition, an intermittent discharge method using a squeeze pressure generated by performing a theoretical analysis on the dispenser structure disclosed in Japanese Patent Application No. 2000-188899 and using a squeeze pressure generated by abruptly changing a gap between a piston end surface and a relative moving surface is disclosed. An apparatus is being proposed (Japanese Patent Application No. 2001-110945). This squeeze pressure is known as the dynamic pressure effect of the fluid bearing. To use this squeeze pressure, the gap between the piston end face and the opposing face is narrow, for example, set to 20 to 30 μm or less. There is a need to.

The present invention proposes a coating principle based on a new discovery, which was not disclosed in the above proposal. In other words, as a result of rigorous theoretical analysis assuming that the applied fluid is a viscous fluid, the interaction between the pump characteristics of the fluid supply source and the flow rate fluctuation caused by abruptly changing the piston position causes the piston end face and its opposing face to interact. It has been found that even when the gap between them is sufficiently large, a high generated pressure equal to or higher than the squeeze effect (ie, the secondary squeeze pressure) can be obtained.

Therefore, the present invention proposes a fluid discharge method and a fluid discharge device using the secondary squeeze pressure. If this discharge principle is used, the management of the gap between the piston end surface and the opposing surface may be simple, the structure is simple, and the total discharge amount per dot can be set by, for example, the rotation speed of the fluid supply source pump. Therefore, a fluid discharge method and fluid discharge capable of realizing an ultra-high-speed and ultra-micro volume intermittent fluid discharge with easy handling in practical use, high flow rate per dot, and high reliability for powder fluids It is an object of the present invention to provide a device.

た め In order to achieve the above object, the present invention is configured as follows.

According to the first aspect of the present invention, the fluid is supplied from the fluid supply device to the gap while relatively moving the two members in the gap direction of the gap formed between the two opposing surfaces of the two members. A fluid that intermittently discharges the fluid using a pressure change caused by changing the gap, and that adjusts a discharge amount of the fluid per dot by pressure and flow characteristics of the fluid replenishing device. An ejection method is provided.

According to a second aspect of the present invention, there is provided the fluid discharge method according to the first aspect, wherein the pressure / flow rate characteristics of the fluid replenishing device are set by changing the rotation speed of the fluid replenishing device. I do.

According to a third aspect of the present invention, a minimum value or average value of the gap as h _0, the gap h ₀ in the general proportional intermittent discharge amount of the fluid per one dot with respect to the clearance h ₀ of the setting range as _{0 <h} 0 _{<h x,} the setting range of the gap _{h 0} where intermittent discharge amount becomes substantially constant with respect to the gap _{h 0} and _h 0> _{h x,} and, _{h x} is 0 <h 0 _<an envelope of the intermittent discharge quantity per the 1 dot for h ₀ in the region of h _x, h _0> at intermittent discharge amount per the one dot in the area of the h _x is not dependent on h ₀ substantially constant when the intersection of the made part of the value, to provide a fluid ejecting method according to the first aspect, characterized in that the intermittent discharge by setting the gap to the range of h _0> h _x.

According to the fourth aspect of the present invention, the fluid pressure generated in inverse proportion to the size of the gap formed between the two opposing surfaces of the two members and in proportion to the time differential of the gap is determined by a primary squeeze pressure, proportional to the time derivative of the gap, and the fluid pressure generated in proportion to the internal resistance of the fluid supply device and secondary squeeze pressure, h ₀ the minimum value or average value of the gap as the setting range of the gap h ₀ with intermittent discharge amount of the fluid per dot is schematically proportional to said clearance h ₀ 0 <h 0 _<a h _x, the intermittent discharge amount the gap h ₀ the setting range of the gap _{h 0} to be approximately constant and _h 0> _{h x} respect, and, _{h x} is, _{0 <h} 0 <against _{h 0} in the region of _{h x} intermittent discharge quantity per the dot In the region of h ₀ > h _x , When intermittent discharge amount per Tsu bets is the intersection of the value of the portion to be a substantially constant without depending on the h _0, by setting the gap to the range of h _0> h _x by the action of the secondary squeeze pressure The fluid ejection method according to the first aspect, characterized by performing intermittent ejection.

According to the fifth aspect of the present invention, the fluid pressure generated in inverse proportion to the size of the gap between the two opposing surfaces of the two members and in proportion to the time derivative of the gap is determined by the primary squeezing. a pressure proportional to the time derivative of the gap, and the fluid pressure generated in proportion to the internal resistance of the fluid supply device and secondary squeeze pressure, a minimum value or average value of the gap as h _0, 1 the gap h 0 the setting range of _{0 <h 0} <h _x, intermittent discharge amount is approximately constant with respect to the gap h ₀ with intermittent discharge amount per dot is schematically proportional to said clearance h ₀ the setting range of the gap _{h 0} and _h 0> _{h x,} and, _{h x} is, _{0 <h} 0 <an envelope of the intermittent discharge quantity per the 1 dot for _{h 0} in the region of _{h x, h} 0> intermittent discharge amount per the one dot in the area of the h _x When the intersection of the value of the portion to be a substantially constant without depending on the h _0, the gap h ₀ h ₀ ≒ h _x or, 0 _<h 0 <adjusting the discharge amount is set to a range of h _x The fluid ejection method according to the first aspect is provided.

According to a sixth aspect of the present invention, _{h x} is, _{0 <h} 0 <an envelope of the intermittent discharge of curves per dot for _{h 0} in the region of _{h x,} above the region of h 0> _{h x} curve provides a fluid ejecting method according to the third aspect, characterized in that the intersection of the value of the portion to be a substantially constant with respect to h _0.

According to a seventh aspect of the present invention, a fluid internal resistance of the fluid supply device Rs (kgsec / mm ^5), opposite between the two determined depending on the gap h ₀ of the facing surfaces between the member the two members When the fluid resistance in the radial direction of the surface is Rp (kgsec / mm ⁵ ) and the fluid resistance of the discharge port is Rn (kgsec / mm ⁵ ),

として、関数φを定義するとき、ｈ_ｘは、０＜ｈ＜ｈ_ｘの領域におけるｈに対する曲線φの包絡線と、ｈ_０＞ｈ_ｘの領域で曲線φがｈ_０に依存しないで概略一定となる部分の値の交点であることを特徴とする第３の態様に記載の流体吐出方法を提供する。

When defining the function φ, h _x is substantially constant independently of h ₀ in the region of 0 <h <h _x and the envelope of the curve φ with respect to h in the region of h ₀ > h _x. The fluid discharge method according to the third aspect is provided, wherein the fluid discharge method is an intersection of the values of the following parts.

According to the eighth aspect of the present invention, the maximum value of the time derivative of the gap is Vmax, the average radius of the outer peripheral portion of the facing surface between the two members is r ₀ (mm), and the average radius of the discharge port opening. Is r _i (mm), and the maximum flow rate of the fluid replenishing device is Qmax,

であることを特徴とする第１の態様に記載の流体吐出方法を提供する。

The fluid ejection method according to the first aspect is provided.

According to the ninth aspect of the present invention, a plurality of sets of the two members relatively moved in the gap direction by the independent axial driving devices are arranged, and one set of the fluid replenishing device is provided between the two members. The fluid ejecting method according to the first aspect, wherein the fluid ejecting method supplies the fluid.

According to the tenth aspect of the present invention, the gap between the opposing surfaces of the two members is set near h ₀ ≒ h _x or in the range of 0 <h ₀ <h _x to adjust each ejection amount. A fluid ejection method according to a ninth aspect is provided.

According to the eleventh aspect of the present invention, the same ejection amount per dot is applied for the same time while the ejection nozzle and the substrate are relatively moved by utilizing the fact that the application target surface of the substrate is geometrically symmetric. The fluid ejection method according to the first aspect, wherein the fluid is ejected intermittently so as to periodically apply the fluid over an interval.

According to a twelfth aspect of the present invention, there is provided the fluid ejection method according to the first aspect, wherein the surface to be applied is a display panel.

According to the thirteenth aspect of the present invention, fluid is supplied to the opposing surfaces of the two members relatively moving in the gap direction by the fluid replenishing device, and the gap between the two opposing surfaces is defined as h (mm). Is dh / dt, the average radius of the outer peripheral portion of the opposing surface between the two members is r ₀ (mm), and the average radius of the discharge port opening communicating the gap and the outside is r _i (mm). , The viscosity coefficient of the fluid is μ (kgsec / mm ² ), the fluid internal resistance of the fluid replenishing device is Rs (kgsec / mm ⁵ ), and the fluid resistance in the radial direction of the facing surface between the two members is Rp (kgsec / mm2). mm ^5), the fluid resistance of the discharge port as the Rn (kgsec / mm ^5), the sum of the maximum pressure and supply pressure of the fluid supply device Ps 0, the frequency of the intermittent discharge f (1 / sec), primary The squeeze pressure Psqu1 and the secondary squeeze pressure Psqu2

として定義し、上記隙間ｈの時間微分ｄｈ／ｄｔが最大値をもつときの第１次スクイーズ圧力Ｐｓｑｕ１＝Ｐｓｑｕ１０、第２次スクイーズ圧力Ｐｓｑｕ２＝Ｐｓｑｕ２０とするとき、Ｐｓ０＋Ｐｓｑｕ１０＋Ｐｓｑｕ２０＜０とすることを特徴とする第１の態様に記載の流体吐出方法を提供する。

When the time derivative dh / dt of the gap h has the maximum value, the primary squeeze pressure Psqu1 = Psqu10, and the secondary squeeze pressure Psqu2 = Psqu20, Ps0 + Psqu10 + Psqu20 <0. The fluid ejection method according to the first aspect is provided.

According to the fourteenth aspect of the present invention, in the coating process of applying as the discharge while relatively moving the surface to be coated and the discharge nozzle communicating with the gap, the displacement input for providing the gap between the two opposing surfaces is provided. Considering that the phase is advanced approximately Δθ = π / 2 with respect to the signal Sh, the relative position between the application target surface and the ejection nozzle and the timing of the displacement input signal Sh are matched. A fluid ejection method according to a first aspect is provided.

According to a fifteenth aspect of the present invention, there is provided the fluid discharge method according to the first aspect, wherein the two members are relatively moved by an electromagnetic strain element.

According to a sixteenth aspect of the present invention, the amplitude of the two members relatively moving in the gap direction immediately before the stop of application is larger than the amplitude at the time of steady intermittent application. A fluid ejection method is provided.

According to the seventeenth aspect of the present invention, while the dispenser that discharges the fluid through the gap is relatively moved with respect to the substrate on which the independent rib surrounded by the barrier rib is formed geometrically symmetrically, The method according to the first aspect, which is a method for forming a phosphor layer of a plasma display panel, wherein the paste is intermittently discharged to sequentially apply the phosphor paste to the inside of the independent cell to form a phosphor layer. And a method for discharging fluid.

According to an eighteenth aspect of the present invention, the phosphor paste is applied by flying from the discharge nozzle with the distance H between the top of the barrier rib and the tip of the discharge nozzle being 0.5 mm or more. A fluid ejection method according to a seventeenth aspect is provided.

According to a nineteenth aspect of the present invention, there is provided the fluid discharging method according to the eighteenth aspect, wherein the H is 1.0 mm or more.

According to the twentieth aspect of the present invention, a plurality of sets of two opposing surfaces of two members relatively moving in the gap direction by independent axial driving devices are arranged, and one set of the fluid replenishing device is provided with these two fluid replenishing devices. A flow correction device capable of dividing and supplying a fluid between two opposing surfaces of a member and varying a fluid passage resistance in a flow path connecting the two surfaces of the fluid replenishing device and the two relatively moving members. The fluid discharge method according to the first aspect, wherein each discharge amount is adjusted by providing a device.

According to a twenty-first aspect of the present invention, in two coating method of intermittently applied while changing the gap between the two opposing surfaces in the amplitude h ₁ of the member for relative movement, than the amplitude h ₁ with a large amplitude h ₂ 2 One after interrupting the discharge to increase the gap between the opposing surfaces of the members, the center value of the gap after interruption, so gradually becomes equal to the center value of the cut-off just before the gap, a plurality of times intermittently coated with said amplitude h ₁ A fluid ejection method according to the first aspect is provided.

According to the twenty-second aspect of the present invention, the time at the end of the (n−1) th application from the start of the application is T _n−1 , the time at the start of the nth application is T _n , and the time interval ΔT = T _n −T _n. The liquid ejection method according to the first aspect, characterized in that, when ₋₁ , the value of ΔT is set to adjust the amount of application per dot for the n-th time.

According to a twenty-third aspect of the present invention, two members relatively moving in the gap direction,
A discharge chamber formed by these two members,
A fluid replenishing device for supplying a fluid to the discharge chamber,
An inlet provided on the upstream side of the fluid supply device,
A fluid discharge device including a discharge port that communicates with the discharge chamber and the outside,
Fluid is intermittently discharged from a discharge port by utilizing a pressure change caused by a change in a gap formed by the two members, and a discharge amount per dot is adjusted by setting pressure and flow characteristics of the fluid supply device. A fluid ejection device characterized by the following.

According to the twenty-fourth aspect of the present invention, the fluid pressure generated in inverse proportion to the size of the gap between the two opposing surfaces of the two members and in proportion to the time differential of the gap is determined as the primary squeeze pressure, when proportional to the time derivative of the gap, and a fluid pressure secondary squeeze pressure generated in proportion to the internal resistance of the fluid supply device, a minimum value or average value of the gap as h _0, per dot 0 setting range of the gap h ₀ intermittent discharge amount is in general proportional to said clearance h ₀ <h 0 _{<h x,} the gap h for intermittent discharge amount becomes substantially constant with respect to the clearance h ₀ the setting range of ₀ and _h 0> _{h x,} and, _{h x} is, _{0 <h} 0 <an envelope of the intermittent discharge quantity per the 1 dot for _{h 0} in the region of _{h x,} h 0> of _{h x} Yi to h ₀ intermittent discharge quantity per the one dot area When the not intersection of the value of the portion to be approximately constant, 23rd aspect, wherein that the intermittent discharge by the gap h _0> is set to a range of h _x action of the secondary squeeze pressure And a fluid ejection device according to (1).

According to a twenty-fifth aspect of the present invention, a fluid pressure that is inversely proportional to the size of the gap between the opposing surfaces between the two members and that is generated in proportion to the time derivative of the gap is defined as a primary squeeze pressure; when proportional to the time derivative of the gap, and the fluid pressure generated in proportion to the internal resistance of the fluid supply device and the secondary squeeze pressure, 0 the minimum value or the setting range of the average value h ₀ of the gap < h ₀ <h _x, and the setting range of the gap h ₀ that is substantially constant with respect to the gap h ₀ is h ₀ > h _x , and h _x is h in the range of 0 <h ₀ <h _x and intermittent discharge of the envelope per the one dot with respect to _0, when h _0> intermittent discharge amount of the 1-dot per an area of h _x is the intersection of the value of the portion to be a substantially constant without depending on the h ₀ is , the gap _{h 0} ≒ _{h x} or, 0 _<h 0 _< to provide a fluid ejecting apparatus according to the 23rd aspect, wherein the adjusting the discharge amount is set to a range of _x.

According to a twenty-sixth aspect of the present invention, a plurality of sets of the two members relatively moving in the gap direction by the independent axial driving devices are arranged, and one set of the fluid replenishing device is provided on an opposing surface of these two members. The fluid discharge device according to the twenty-third aspect, wherein a fluid is divided and supplied between the fluid discharge devices.

According to the twenty-seventh aspect of the present invention, a plurality of sets of the two members relatively moved in the gap direction by the independent axial driving devices are arranged, and one set of the fluid replenishing device applies fluid to these two members. supplies by dividing technique, the or each two minimum value or average value of each h ₀ ≒ h _x vicinity of the gap between the opposing surfaces of the members, 0 <h 0 _<the discharge is set to a range of h _x A fluid ejection device according to a twenty-fifth aspect, wherein the fluid ejection device adjusts the amount.

According to a twenty-eighth aspect of the present invention, there is provided the fluid discharge device according to the twenty-third aspect, wherein the fluid replenishing device is a pump whose flow rate can be varied according to the number of revolutions.

According to a twenty-ninth aspect of the present invention, there is provided the fluid discharge device according to the twenty-eighth aspect, wherein the fluid replenishing device comprises a thread groove pump.

According to a thirtieth aspect of the present invention, a minimum value or average value of the gap between the opposing surfaces of the two members when the h _0, h _0> first 23, which is a 0.05mm The fluid ejection device according to the aspect is provided.

According to a thirty-first aspect of the present invention, a sleeve for housing a shaft,
A housing for housing the shaft and the sleeve;
A device for rotating the sleeve relative to the housing;
An axial driving device that applies the axial relative displacement to the housing relative to the housing;
A discharge chamber formed by the discharge-side end surface of the shaft and the housing,
A fluid replenishing device that supplies fluid to the discharge chamber using relative rotation of the sleeve and the housing,
A suction port and a discharge port for a fluid that communicates the discharge chamber with the outside,
A fluid ejecting apparatus comprising: a device for pumping the fluid flowing into the ejection chamber to the ejection port side by the axial driving device;
Utilizing a pressure change due to the fluctuation of the gap in the discharge chamber, a continuous flow supplied from the fluid supply device is converted into an intermittent flow, and an intermittent discharge amount per dot is adjusted by setting a rotation speed. A fluid ejection device characterized by the following.

According to a thirty-second aspect of the present invention, there is provided the fluid discharge device according to the thirty-first aspect, wherein the shaft and the sleeve have an integrated structure.

According to a thirty-third aspect of the present invention, an axial drive device that provides an axial relative displacement between a shaft and a housing;
A discharge chamber formed by the end surface of the shaft and the housing,
A fluid replenishing device for supplying fluid to the discharge chamber,
A flow passage communicating the discharge chamber with the fluid replenishing device;
An inlet provided in the fluid supply device;
In the fluid discharge device including the discharge chamber and a discharge port communicating the outside,
Utilizing a pressure change due to the fluctuation of the gap in the discharge chamber, the continuous flow supplied from the fluid supply device is converted into an intermittent flow, and the intermittent discharge amount per dot is changed from the number of rotations or from the flow passage. A fluid discharge device is provided, which is adjusted by setting the gap in a section connected to the discharge port.

According to a thirty-fourth aspect of the present invention, the fluid is supplied to a plurality of sets of the discharge chambers through a flow passage divided from one set of the fluid replenishing device. And a fluid discharge device.

According to a thirty-fifth aspect of the present invention, there is provided the fluid discharge device according to the thirty-third aspect, wherein the flow passage is a flexible pipe that is easily deformed.

According to a thirty-sixth aspect of the present invention, there is provided the fluid ejection device according to the twenty-third aspect, wherein the device for relatively moving the two members is an electromagnetic strain element.

According to the thirty-seventh aspect of the present invention, the fluid is supplied from the fluid replenishing device to the gap while the two members are relatively moved in the gap direction, and the discharge is performed by utilizing the pressure change caused by changing the gap. controls the blocking and opening, a minimum value or average value of the gap as h _0, the discharge amount Q of the steady state is a setting range of the gap h ₀ in the general proportional relationship to the clearance h ₀ 0 < h ₀ when _{<h x,} the discharge amount of the setting range of the gap _{h 0} which is a substantially constant _h 0 with respect to the gap _{h 0>} and _{h x,} set the gap in the range of _h 0> _{h x} And a fluid ejection method characterized by ejecting the fluid.

The following effects can be obtained by the fluid ejection method and the fluid ejection device using the present invention.

(1) It can correspond to a high viscosity fluid of several thousand to several tens of thousands of mPa · s (cps).

(2) No clogging occurs even with a discharge material containing a powder diameter of several μm or more.

(3) Intermittent fluid discharge can be performed in a short cycle of the order of msec or less.

(4) The fluid to be discharged can fly a long distance away from the discharge nozzle by 0.5 to 1.0 mm or more.

(5) The fluid ejection amount per dot can be secured with high accuracy.

(6) Multi-heading is easy and the structure is simple.
If the present invention is applied to, for example, phosphor coating, electrode formation, surface mounting dispenser, or microlens molding of PDP and CRT displays, the advantages can be fully exhibited and the effect is enormous.

前 Before continuing the description of the present invention, the same parts are denoted by the same reference numerals or the same names in the accompanying drawings.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings.

FIG. 1 is a model diagram showing a first embodiment of the present invention. Reference numeral 1 denotes a piston, which is accommodated in the housing 2 so as to be movable in the axial direction. Reference numeral 3 denotes a sleeve for housing the outer peripheral portion of the piston 1, which is housed so as not to move in the axial direction with respect to the housing 2 on the fixed side but to be movable in the rotation direction.

The piston 1 is driven by an axial driving device (arrow 4), and the sleeve 3 is driven by a rotation transmitting device (arrow 5). Reference numeral 6 denotes a thread groove (a black portion in FIG. 1) formed on the relative movement surface between the sleeve 3 and the housing 2, and reference numeral 7 denotes a fluid suction port. In the present embodiment, a thread groove pump is used for the fluid supply device.

Reference numeral 8 denotes an end surface of the piston 1, 9 denotes a fixed-side facing surface thereof, 10 denotes a discharge nozzle formed in the center of the fixed-side facing surface 9, and 11 denotes an opening of the discharge nozzle 10 formed in the fixed-side facing surface 9. is there. The piston end face 8 and the fixed-side facing face 9 are two faces that relatively move in the gap direction.

# 12 is a coating fluid supplied between the sleeve 3 and the housing 2. Reference numeral 13 denotes a discharge chamber end (piston outer peripheral portion) formed between the lower end of the sleeve 3 and the housing 2. Inside the discharge chamber end 13, fluid is constantly supplied by a thread groove pump which is an example of a fluid replenishing device. Is supplied.

The axial driving device 4 (specific structure is not shown) is provided between the piston 1 and the housing 2, and changes the axial relative position between the members 1 and 2. The axial driving device 4 is configured by a piezoelectric actuator (100 in FIG. 9) and the like, for example, as described later in the first embodiment. With this axial driving device 4, the gap h between the piston end surface 8 and the facing surface 9 can be changed.

In the present embodiment, the configuration conditions are different from the previous proposal (Japanese Patent Application No. 2001-110945) as follows.

(I) Assuming that the minimum value of the gap h between the end faces of the piston is h = h _min , h _min is sufficiently large in this embodiment, for example, h _min = 150 μm.

(Ii) The thread groove pump is designed to be close to a metering pump, and its internal resistance Rs is sufficiently large.

When the gap h is changed at a high frequency, the discharge chamber 14 (piston end face), which is a gap between the piston end face 8 and the opposed face 9, is produced by a secondary squeeze effect newly discovered in the present proposal, which will be described later. Fluctuating pressure is generated.

{Circle around (5)} at the center of the piston end surface 8 is referred to as the upstream side of the discharge nozzle 10, and the gap formed between the screw groove and the housing 2 is referred to as the screw groove chamber 16. A fixed amount of fluid is continuously supplied to the discharge chamber 14 by a thread groove pump.

The above-mentioned application example of the present invention is that the continuous flow (Analog) supplied from the pump is A / D-converted into an intermittent flow (Digital) by using the secondary squeeze effect, so that the distance between the piston end face and the opposing face is changed. This is based on the idea that the fluid can be intermittently applied at a high speed while keeping the gap h sufficiently large.
[1] Theoretical analysis (1) Derivation of basic equations Now, in order to clarify the principle and effects of the present invention, the basic equations of a squeeze pump (tentative name) will be derived.

When a viscous fluid is present in a narrow gap between opposing planes and the interval between the gaps changes with time, the fluid pressure is expressed by the Reynolds equation in the following polar coordinates with the term of squeeze action Can be obtained by solving

（１）式において、Ｐは圧力、μは流体の粘性係数、ｈは対向面間の隙間、ｒは半径方向位置、ｔは時間である。また、右辺が、隙間が変化するときに発生するスクイーズアクション効果をもたらす項である。図２に、スクイーズポンプ部の寸法関係を示す。なお、各記号における添字ｉは、図１における吐出ノズルの開口部１１の位置における値、添字０は吐出室端部１３（ピストン外周部）における値であることを示す。

In the equation (1), P is a pressure, μ is a viscosity coefficient of a fluid, h is a gap between opposed surfaces, r is a radial position, and t is time. The right side is a term that provides a squeeze action effect that occurs when the gap changes. FIG. 2 shows the dimensional relationship of the squeeze pump section. The subscript i in each symbol indicates a value at the position of the opening 11 of the discharge nozzle in FIG. 1, and the subscript 0 indicates a value at the discharge chamber end 13 (piston outer peripheral portion).

として、（１）式の両辺を積分する。

Then, both sides of the equation (1) are integrated.

以下、未定定数ｃ_１，ｃ_２を求める。圧力勾配と流量の関係は

Hereinafter, the undetermined constants c ₁ and c ₂ are obtained. The relationship between pressure gradient and flow rate is

ｒ＝ｒ_ｉ（図２参照）における流量Ｑ＝Ｑ_ｉとして、（２）式と（４）式からｃ_１を求めると

Assuming that flow rate Q = Q _{i at} r = r _i (see FIG. 2), c ₁ is obtained from equations (2) and (4).

さて、吐出室端部１３と、流体吸入口７間の流体抵抗Ｒｓが無視できない場合、吐出室端部１３（図２におけるｒ＝ｒ_０の位置）における圧力Ｐ＝Ｐ_０は

Now, when the fluid resistance Rs between the discharge chamber end 13 and the fluid suction port 7 cannot be ignored, the pressure P = P ₀ at the discharge chamber end 13 (the position r = r ₀ in FIG. 2) becomes

流体補給装置にねじ溝ポンプを用いた場合、流体抵抗Ｒｓはねじ溝ポンプの内部抵抗に等しい。また、上式においてＰ_Ｓ０は供給源圧力であり、ねじ溝ポンプの最大発生圧力Ｐｍａｘと、材料をねじ溝に供給するためのエアーによる補給圧力Ｐｓｕｐの和（Ｐ_Ｓ０＝Ｐｓｕｐ＋Ｐｍａｘ）に相当する。Ｑ_０はｒ＝ｒ_０における流量であり、（４）式から、

When a thread groove pump is used for the fluid supply device, the fluid resistance Rs is equal to the internal resistance of the thread groove pump. In the above equation, P _S0 is the supply source pressure, and corresponds to the sum of the maximum generated pressure Pmax of the thread groove pump and the supply pressure Psup by the air for supplying the material to the thread groove (P _S0 = Psup + Pmax). Q ₀ is the flow rate at r = r ₀ , and from equation (4),

（３）式、（５）〜（７）式から未定定数ｃ_２が求まる。

(3), (5) - (7) is obtained undetermined constant _{c 2} from the equation.

ここで、任意の位置ｒにおける圧力Ｐを次のようにおく。

Here, the pressure P at an arbitrary position r is set as follows.

但し、

However,

吐出ノズルの開口部：ｒ＝ｒ_ｉ（図１の１１）において、Ｐ_ｉ＝Ａ＋ＢＱ_ｉとする。吐出ノズルの流体抵抗をＲ_ｎすれば、吐出ノズルを通過する流量はＱ_ｎ＝Ｐ_ｉ／Ｒ_ｎである。

At the opening of the discharge nozzle: r = r _i (11 in FIG. 1), it is assumed that P _i = A + BQ _i . If the fluid resistance of the discharge nozzle _{R n,} flow through the discharge nozzle is _{Q n = P i / R n} .

From the flow continuity, Q _i = Q _n , and the discharge nozzle upstream pressure P _i (the pressure at the point 15 in FIG. 1) is obtained as follows. A _i, the _{B i} is the value of A, B when the r = _{r i} in (10). Hereinafter referred discharge nozzle upstream pressure _{P i} and the discharge pressure _{P i.}

ここで、第１次スクイーズ圧力Ｐｓｑｕ１、第２次スクイーズ圧力Ｐｓｑｕ２を次のように定義する。

Here, the primary squeeze pressure Psqu1 and the secondary squeeze pressure Psqu2 are defined as follows.

The primary squeeze pressure Psqu1 is caused by a well-known squeeze effect generated between the piston end face 8 and the opposed face 9 by sharply changing the gap between the piston end face 8 and the relative movement face 9 thereof. The narrower the pressure, the greater the pressure.

The present invention has found a method of generating the secondary squeeze pressure Psqu2 and a method of applying this function to, for example, ultra-high-speed intermittent coating, and the principle is as follows. By abruptly changing the gap between the piston end surface and the relative movement surface, a flow rate variation occurs between the piston end surface and the fluid supply source. This flow rate change corresponds to a change in the volume of the discharge chamber 14 (the end face of the piston) when the gap is changed. For example, when the volume is reduced and the fluid resistance of the discharge nozzle is large, the fluid having no escape on the discharge side flows back to the thread groove pump side. As a result, a pressure Psqu2 proportional to the internal resistance Rs of the thread groove pump is generated.
From the expressions (11) and (12), the pressure Pi on the upstream side of the discharge nozzle is rearranged.

吐出ノズルを通過する流量Ｑ_ｉは

The flow rate Q _i passing through the discharge nozzle is

吐出ノズルのノズル半径をｒ_ｎ、ノズル長さをｌ_ｎとおくと、吐出ノズル抵抗は

If the nozzle radius of the discharge nozzle is r _n and the nozzle length is l _n , the discharge nozzle resistance becomes

また、Ｒ_ｐは吐出ノズルの開口部（図１の１１）とピストン外周部（図１の吐出室端部１３）の間の流体抵抗である。

_Rp is the fluid resistance between the opening of the discharge nozzle (11 in FIG. 1) and the outer periphery of the piston (end 13 of the discharge chamber in FIG. 1).

Ｒ_ｓは、前述したように、ピストン外周部（図１の吐出室端部１３）と供給源側（吸入口７）の流路間の流体抵抗（ねじ溝ポンプの場合は内部抵抗）である。

As described above, R _s is a fluid resistance (an internal resistance in the case of a thread groove pump) between the outer peripheral portion of the piston (the discharge chamber end 13 in FIG. 1) and the flow path on the supply source side (the suction port 7). .

(2) Equivalent Circuit Model Based on the above analysis results, the relationship between the pressure generating source and the load resistance is represented by an equivalent electric circuit model as shown in FIG.

(3) When the minimum clearance hmin between the piston end surface and the opposing surface is sufficiently large: Given the conditions shown in Table 1 and the piston input waveform shown in FIG. 4, the pressure P _i at the opening of the discharge nozzle is calculated by the following equation (11). FIG. 5 shows the results obtained by using this method. A section of 0 ≦ t ≦ 2.0 msec corresponds to one cycle as the intermittent discharge device.

ピ ス ト ン The piston input waveform was evaluated by changing the stroke in three cases (hst = 10, 20, 30 μm) while the minimum gap between the piston end surface and the opposing surface was kept constant (hmin = 150 μm).

5, in both cases of stroke, the pressure has a waveform that varies around the _P ic = 3.5MPa.

Shows the analysis result of the flow rate Q _i that passes through the discharge nozzle in FIG. When the discharge nozzle resistance was Rn, flow _rate: a Q _{i =} P _i / Rn. Like the pressure waveform, the flow rate Qi has a different amplitude depending on the stroke, but has a waveform that fluctuates around Qic = 49 mm ³ / sec.

That is, it can be seen that the average flow rate does not depend on the size of the piston stroke, but is determined by the operating point (A in FIG. 8) determined by the thread groove pump characteristics and the discharge nozzle resistance.
The reason is as follows. In the equation (11), if h → ∞, the primary squeeze pressures Psqu1 → 0 and Rp → 0, so the following equation is obtained. Here, it is assumed that _Ps0 ≒ _Pmax , and Rs = _Pmax / _Qmax .

（１７）式の第２項は、ピストン端面８とその対向面９で形成されるピストン端面部１４の幾何学的な容積変化分に相当する。変位ｈの時間微分ｄｈ／ｄｔは正と負を交互に持つ周期関数であり、１周期における時間積分値は０である。
すなわち、第２次スクイーズ圧力Ｐｓｑｕ２は、ねじ溝の連続流量（Analog）を間欠流量（Digital）に変えるＡ／Ｄコンバータとしての役割を担うのである。

The second term in the expression (17) corresponds to a geometrical volume change of the piston end face portion 14 formed by the piston end face 8 and the opposed face 9. The time derivative dh / dt of the displacement h is a periodic function having alternating positive and negative, and the time integrated value in one cycle is zero.
That is, the secondary squeeze pressure Psqu2 plays a role as an A / D converter that changes the continuous flow rate (Analog) of the thread groove into an intermittent flow rate (Digital).

In FIG. 8, (I) shows the relationship between the pressure and the flow rate (referred to as pressure-flow rate characteristic) of the thread groove pump when the rotation speed N = 460 rpm, and the maximum pressure: Pmax = 10 MPa (at Q = 0); The flow rate Qmax = 77.35 mm ³ / sec (at P = 0). (III) is the fluid resistance of the discharge nozzle, and the intersection of (I) and (III) is the thread groove pump operating point A (Pic = 3.5 MPa, Qic = 49 mm ³ / sec).

の 一 Table 2 shows an example of the specifications of the thread groove that can obtain the characteristics of the pump.

The X-axis pressure in the graph of FIG. 8 is defined as a pressure difference (= P ₂ −P ₁ ) between the pressure P ₂ at the discharge chamber end 13 and the pressure P ₁ near the suction port 7. The thread groove pump can transport the largest flow rate when the differential pressure is minimal, that is, the piston 1 rises, the pressure of the lower end portion of the screw groove 6 (the discharge chamber end section 13) P _{2 =} -0. This is at 1 MPa (absolute vacuum). Accordingly, in the graph of FIG. 8, the maximum transport amount of the pump is the flow rate at the time of P = −0.1 MPa: Q ≒ 80 mm ³ / sec. However, since there is no large error, for convenience, P = 0 MPa (atmospheric pressure). Qmax at that time = 77.35 mm ³ / sec is the maximum flow rate.

(4) Improvement of sharpness Now, when a fluid mass is continuously struck on the substrate while relatively moving the ejection head and the substrate, the waveform of the ejection pressure becomes a negative pressure immediately before the start of coating, and a sharp peak immediately thereafter. It is preferable that a positive pressure is generated and the pressure again becomes negative. Due to the generation of the negative pressure after the ejection, the fluid at the tip of the ejection nozzle is sucked into the nozzle again, and separated from the fluid on the substrate or the flying fluid. That is, the cycle of “negative pressure → steep positive pressure → negative pressure” realizes extremely sharp intermittent application.

All of the pressure waveforms in FIG. 5 satisfy P _i > 0, and do not satisfy the condition for sharp intermittent application. Assuming that the maximum value of the time derivative (piston speed) dh / dt of the displacement h is Vmax, the condition that the pressure waveform has a section where the negative pressure P _i <0 is obtained from the equation (17).

（１８）式を満足させるＱｍａｘを得るには、流体補給装置にたとえばねじ溝ポンプを用いる場合には回転数を変えればよい。Ｑｍａｘを小さくする程、スクイーズポンプ部の容積増加に供給量が追従できず、負圧が発生する時間は長くなる。

In order to obtain Qmax that satisfies the expression (18), for example, when a thread groove pump is used in the fluid replenishing device, the rotation speed may be changed. As Qmax is reduced, the supply amount cannot follow the increase in the volume of the squeeze pump unit, and the time during which the negative pressure is generated becomes longer.

Under the conditions that the stroke is hst = 30 μm and the conditions of Table 1, the maximum flow rate is reduced to Qmax = 77.35 → 50 mm ³ / sec by changing the rotation speed of the thread groove from N = 460 → 300 rpm. The waveform is shown in FIG. 7 in comparison with the case where N = 460 rpm. FIG. 8 shows the pressure / flow rate characteristics of the thread groove pump when the rotation speed N = 300 rpm. At this time, the operating point of the pump shifts from A to B. In FIG. 7, when N = 300 rpm (Qmax = 50 mm ³ / sec), Expression 18 is satisfied, and the waveform of the discharge pressure becomes a negative pressure immediately before the start of the discharge. It has become. The reason why the negative pressure is generated is that, as described above, before and after the peak pressure is generated, the magnitude of the volume change of the piston end face exceeds the maximum flow rate Qmax that can be supplied by the thread groove pump.

The minimum value of the discharge pressure is P _i = -1.4 MPa because the analysis model assumes incompressibility. When the atmospheric pressure is set to P _i = 0.0 MPa (gauge pressure). , -0.1 MPa or less does not actually exist.

The setting of the negative pressure generation level may be adjusted based on the conditions of the process to be applied and the characteristics of the coating material, for example, spinnability (spinnability: difficulty in breaking the coating wire flowing out of the nozzle).

In the application example of the embodiment of the present invention described above, the generation of the primary squeeze pressure is suppressed as much as possible by setting the gap between the piston end surface and the opposing surface to be sufficiently large, and the secondary squeeze pressure is utilized. Thus, the continuous flow supplied from the fluid supply source is A / D converted into an intermittent flow to perform intermittent coating. In this case, the application amount per dot does not depend on the stroke of the piston, but is determined only by the pressure flow characteristics and the discharge nozzle fluid resistance of a pump as an example of a fluid supply device.
Therefore,
(I) The ejection amount per dot is constant (ii) The cycle is constant For the coating process in which the above (i) and (ii) are required simultaneously, the present coating method and apparatus are extremely effective means (method and apparatus). )I will provide a.

For example, it is effective when the R, G, and B phosphors are intermittently applied to independent cells (box-type ribs) on the back plate of a plasma display panel (PDP) that performs color display. In the case of the PDP, as described later in the embodiment of FIG. 15, independent cells are arranged on the panel in a grid-like shape with high precision and geometrically symmetrically. In this case, the present dispenser, which can dispense a fixed amount of material at high speed into the independent cell at the same time interval, can exhibit unparalleled ability.
That is, the application example of the above-described embodiment of the present invention focuses on the “geometric symmetry” of the application target, and replaces this symmetry with “time periodicity” to perform application. The following ultra-high-speed intermittent coating is realized.

Incidentally, in the case of forming a circuit, for example, when applying a solder, an adhesive or the like to a circuit board, the application time interval is usually random. Incidentally, in the case of the conventional air type dispenser, the application cycle is at most on the order of 0.05 to 0.1 second.

[2] Specific Embodiment FIG. 9 shows a specific first embodiment of a dispenser structure to which the present invention is applied, and an axial driving device is provided on a central shaft (piston) penetrating a hollow outer peripheral shaft. The configuration in the case is shown. Reference numeral 100 denotes a first actuator which is an example of an axial driving device, and uses a giant magnetostrictive element, a piezoelectric element, an electromagnetic solenoid, and the like. In the first embodiment, a laminated piezoelectric actuator having excellent responsiveness, high response and a large generated load is used.

# 101 is a piston driven in the axial direction by a piezoelectric actuator 100 as a first actuator. By the driving of the piston 101, the above-described squeeze pressure is generated on the discharge-side end face (discharge chamber) of the piston 101. The first actuator 100 is arranged inside the upper cylinder 102. Reference numeral 103 denotes a motor serving as a second actuator, which gives a relative rotational movement between the sleeve 104 that houses the piston 101 and the intermediate cylinder 105. 106 is a rotor of the motor 103 and 107 is a stator.

# 108 is a thread groove formed on the outer surface of the sleeve 104 and serving as an example of a fluid replenishing device for feeding a fluid to a discharge side. Between the sleeve 104 and the lower cylinder 109, a thread groove pump chamber 110 for obtaining a pumping action by the relative rotation of the sleeve 104 and the lower cylinder 109 is formed.

吸入 Further, the lower cylinder 109 is formed with a suction hole 111 communicating with the thread groove pump chamber 110. Reference numeral 112 denotes a discharge nozzle mounted on the lower end of the lower cylinder 109, and a discharge hole 113 is formed in the center. Reference numeral 114 denotes a discharge-side thrust end surface of the sleeve 104. 115 and 116 are ball bearings that support the sleeve 104.

Reference numeral 117 denotes a flange provided on the upper part of the piston 101; 118, a disk provided on the piezoelectric actuator 100; 119, a displacement sensor for detecting the axial position of the piston 101; It is a hinge portion formed to elastically deform in the direction. The dimensions of each member of the piezoelectric actuator 100 are determined so that an appropriate preload is applied by the elastic deformation of the hinge portion 120.

In the first embodiment, the piston 101 (center shaft) is configured to penetrate the inside of the sleeve, and the piston 101 and the sleeve 104 are driven by separate actuators. That is, the piston 101 is driven only in the axial direction, and the sleeve 104 is driven only in the rotation direction.

As the inventor has already proposed in Japanese Patent Application No. 2000-188899, a structure in which a giant magnetostrictive element (or a moving magnet) is used to apply linear motion to an axis and to apply rotational motion to the axis using a motor ( With a two-degree-of-freedom actuator structure), the central shaft and the sleeve can be integrated into one shaft.

FIG. 10 shows a second embodiment of the present invention, in which a thread groove pump which is an example of a fluid replenishing device and a piston are separated. Reference numeral 51 denotes a main shaft, which is housed in the housing 52 so as to be movable in the rotation direction. The main shaft 51 is driven to rotate by a rotation transmission device (arrow 53) such as a motor. Reference numeral 54 denotes a screw groove (a portion painted black in FIG. 10) formed on a relative movement surface between the main shaft 51 and the housing 52, and reference numeral 55 denotes a fluid suction port.

Reference numeral 56 denotes an axial driving device for moving the piston 57 in the axial direction (arrow 58), reference numeral 59 denotes an end surface of the piston 57, reference numeral 60 denotes a fixed-side facing surface thereof, and reference numeral 61 denotes a discharge nozzle mounted on the housing 52. The piston end surface 59 and the fixed-side facing surface 60 become two surfaces (discharge chambers) relatively moving in the gap direction. 62 is a spindle end, 63 is a piston outer periphery, and 64 is a flow passage connecting the spindle end 62 and the piston outer periphery 63. An application fluid 65 is constantly supplied to the piston outer peripheral portion 63 via a flow passage 64 by a thread groove pump 54 which is an example of a fluid replenishing device. Reference numeral 68 denotes a discharge chamber formed between the end surface of the piston 57 and the fixed-side facing surface 60. The axial driving device 56 (specific structure is not shown) changes the relative axial position between the piston 57 and the fixed housing 52. The point that the gap h between the piston end face 59 and the opposing face 60 is changed by the axial driving device 56 is the same as in the first embodiment in FIG. Also, similarly, the configuration conditions of the thread groove pump 54 and the piston 57 are as follows.
(I) Assuming that the minimum value of the gap h between the piston end face and the opposing face is h = h _min , h _min is sufficiently large, for example, h _min > 50 μm.

(Ii) The thread groove is designed to be close to a metering pump, and its internal resistance Rs is sufficiently large.

As shown in the second embodiment, the pump unit 66, which is an example of the fluid replenishing device, and a portion (piston drive unit 67) for driving the piston by the axial driving device are separated to form the coating device, and the above-described embodiment is realized. Depending on the target to which is applied, there are advantages such as the overall apparatus can be greatly simplified. For example, if the piston driving unit is configured using a piezoelectric element in the axial driving device, the piezoelectric element actuator can be made sufficiently compact.

補足 Supplement the principle of pressure generation of the present invention. Even if the secondary squeeze pressure is not used, pressure can be generated by forming a "throttle" in the flow passage between the "piston having means (or device) for changing the gap" and the "fluid supply source". . For example, in the case of the conventional ink jet system, 656 in FIG. 28 corresponds to the stop. In the compression / discharge process of the conventional ink jet system, the throttle contributes to pressure generation. However, at the time of the suction step, the throttle serves as a fluid resistance when fluid is supplied from the supply source to the piston portion (discharge chamber). Due to this fluid resistance, when a high-viscosity fluid having particularly poor fluidity is intermittently applied at a high speed, the fluid cannot be filled in the piston portion in a short time, and the intermittent application cycle is limited.

In the second embodiment of the present invention, a screw groove pump is used, and the screw groove pump can transport the largest flow rate when the differential pressure is minimum, that is, in the suction step in which the piston is raised. The maximum flow rate Qmax of the thread groove can be freely selected depending on the specifications of the thread groove, the number of revolutions, etc., regardless of the fluid viscosity. Therefore, in the dispenser of the above embodiment of the present invention, the restriction that the fluid filling time in the suction step gives to the intermittent cycle is avoided.

ね じ The role of the thread groove pump in the present invention may be considered to be a “one-way diode” in which the fluid easily flows in the forward direction (discharge side), but the backflow is difficult.

[3] In the case of a multi-head (1) The problem of multi-heading The above-described embodiment or example of the dispenser is a single head in which a pump unit and a piston driving unit, each of which is an example of a fluid supply device, are configured as a pair. Met.

方 Hereinafter, measures for further increasing the production tact time of the head of the present invention will be described.

As described above, a direct drawing method (direct patterning) using a dispenser is realized in order to solve the problems for forming the phosphor layer on the PDP, that is, the above-mentioned problems relating to the screen printing method and the photolithography method. There is a strong demand to have it done. However, even when a phosphor layer is formed on a panel surface using a dispenser, a production tact equivalent to a screen printing method is required.
When the present invention is applied to the process of intermittently applying the phosphor in the independent cell, the conditions of the above-described application process, (i) the ejection amount per dot is constant, (ii) the period is constant, and (iii) ultra-high speed The following conditions are required in addition to the application.

(Iv) Multi-head (v) Able to correct the flow rate of each head The reason for the above (v) will be described below. As shown in the second embodiment, a pump as an example of a fluid replenishing device and an axial driving device for driving a piston can be separated into an application device to form a plurality of piston driving units from one set of pump units. By branching and replenishing fluid to the section, a coating head having multiple nozzles can be realized.

In the perspective view of FIG. 11, reference numeral 200 denotes a pump unit as an example of a fluid replenishing device, and 201, 202, and 203 denote piston driving units A, B, and C each including a piezoelectric actuator and a piston. Reference numeral 204 denotes a housing in which a flow passage (corresponding to 64 in FIG. 10) connecting the pump unit 200 and the piston driving unit is formed.

FIG. 12 shows an equivalent circuit model in the case of a multi-head.

Psqu11, Psqu12, and Psqu13 are primary squeeze pressures of the respective piston driving units, Rp1, Rp2, and Rp3 are fluid resistances in the radial direction of the piston end faces, and Rn1, Rn2, and Rn3 are nozzle resistances. The magnitudes of Rp1 to Rp3 are inversely proportional to the cube of the gap h, as shown in equation (16). Rp1 to Rp3 are “variable resistances” that can adjust the flow rate without dismantling the coating device.

In the above-described embodiment, the gap h between the end face of the piston and the opposing face is set to be sufficiently large, and the generation of the primary squeeze pressure is suppressed as much as possible. (For example, the number of revolutions). When branching and replenishing fluid from a set of pump units to a plurality of piston drive units, if the dimensional accuracy, flow path resistance, etc. of each piston drive unit can be made strictly equal, the flow rate supplied from the pump unit will be Equally distributed. However, it is preferable that the flow rate accuracy can be finely adjusted for an application target such as a display which requires an application amount accuracy of several percent.

(2) Flow adjustment method Here, let us return to the basic equation (Eq. 11) derived again by this research.

The graph of FIG. 13 shows that the discharge pressure characteristics are obtained by using the equation (11) in the case where the minimum clearance of the piston is h _min = 15 μm and h _min = 150 μm under the condition that the rotation speed of the thread groove is N = 300 rpm. It was done. Contrary to the intuitive expectation, a comparison between the two shows the surprising result that as the minimum clearance h _{min of the} piston increases, the amplitude of the discharge pressure increases. The ejection amount per dot is larger when h _min = 150 μm.

When the minimum clearance h _{min of the} piston increases, the primary squeeze pressure Psqu1 → 0, but at the same time, the thrust fluid resistance Rp → 0 between the piston end surface and the opposing surface, so that the partial pressure ratio (= Rn / (Rs + Rp + Rn)) Increase (see equation 13)
In this analysis conditions, Psqu1 → 0 become than impact, because towards the effect of the partial pressure ratio is increased larger, the amplitude of the pressure Pi with increasing h _min is increasing.

The graph in FIG. 14B shows the ejection amount per dot with respect to the minimum clearance h _min of the piston under the condition of N = 300 rpm in FIG. 14A. When h _min exceeds about 0.1 mm, the ejection amount Qs per dot converges to a constant value Qs → Qse without depending on h _min . As described above, the convergence value Qse of the discharge amount is independent of the stroke of the piston, the minimum clearance, and the like, and the operating point determined by the pressure flow characteristic of the pump as an example of the fluid supply device and the pump load (discharge nozzle fluid resistance Rn). Is determined by

By the way, based on the knowledge obtained from the above analysis, the flow rate adjustment of each head may be selected from the following.

(I) When the variation in the flow rate between the heads is large, the piston is moved in a region that is strongly influenced by the primary squeeze pressure, that is, in a range of 0 <h _min <h _x where the gradient of the discharge amount with respect to the gap is steep. _Is set as the minimum gap h _min .

(Ii) When it is desired to ensure the application amount per dot with extremely high accuracy, the minimum clearance h _{min of the} piston is set near h _min ≒ h _x where the gradient of the discharge amount with respect to the clearance is smooth.

The _{h x is, 0 <h} min <envelope of Qs curves for _{h min} in the region of _{h x} and (I), the value at the intersection of the straight line (II) of Qs = Qse. In other words, the h _x is the intersection of the tangent at h ₀ of the total discharge amount Qs per dot, the total discharge quantity Q _s per one dot the tangent at the point to be substantially constant.

Arbitrary positioning control is possible for the displacement of the piston by disposing a displacement sensor for detecting the absolute position of the piston and performing closed-loop control. However, when using an electrostrictive element such as a piezoelectric element or a giant magnetostrictive element, there is a stroke limit (0 to several tens of microns). Therefore, adjustment of the minimum clearance h _min of the piston is performed by a mechanical method and electronic control. May be used in combination.

For example, after first mechanically positioning the piston position roughly, the piston position of each head may be corrected again using electronic control based on the data of the flow rate measurement.

In any of the above cases (i) and (ii), when the flow rate is adjusted in combination with the setting method of the output flow rate of the supply pump, the flow rate adjustment is performed at a place where the gap between the piston end face and the opposed face is sufficiently large. it can. For example, if the flow rate is too large and the minimum clearance h _{min of the} piston has to be set small, h _min can be set large by reducing the rotation speed of the thread groove pump. This is advantageous when handling powder fluid, as will be described later.

The above-described measure used for correcting the flow difference between the heads of the multi-head can also be applied to the case of the single head. In the case of a single head, the minimum clearance of the piston is set in the vicinity of h _min ≒ hx or in the range of 0 <h _min <hx, and instead of changing the motor rotation speed of the pump, high speed flow control can be performed by adjusting h _min. Can be. The responsiveness of the rotation speed control of the motor is at most on the order of 0.01 to 0.05 seconds and has a limit, but the control responsiveness of the piston driven by the electromagnetic strain element can be up to 0.001 seconds or less.

Instead of adjusting the flow rate with the minimum clearance h _min of the piston, the flow rate may be adjusted with the average value or the center value of the piston input displacement waveform.

When the minimum clearance of the piston is set near h _min ≒ hx, or in the range of 0 <h _min <hx, in order to improve the sharpness of the intermittent application, the time derivative of the clearance h has the maximum value in Expression 13. When the primary squeeze pressure Psqu1 = Psqu10 and the secondary squeeze pressure Psqu2 = Psqu20 at this time, the motor speed, piston stroke, intermittent frequency, etc. may be set so that Ps0 + Psqu10 + Psqu20 <0.

(2) Coating Apparatus and Coating Method As shown in an example in the perspective view of FIG. 11, a plurality of piston driving units are provided for one set of pump units as an example of a fluid replenishing device. If this is the case, the entire device can be significantly reduced in size. Normally, there is a limit to the miniaturization of a pump unit, which is an example of a fluid replenishing device, but a small-diameter piezoelectric actuator or the like can be applied to the piston driving unit. Can be smaller.

Further, the multi-head shown in FIG. 11 may be used as a subunit, and a plurality of subunits may be combined to form a coating apparatus.

Here, as shown in FIG. 15, it is assumed that the dispenser according to the embodiment or the example of the present invention having a multi-nozzle drives the phosphor into the independent cell of the PDP while relatively moving on the substrate. I do. Reference numeral 850 denotes a second substrate constituting a back plate, and reference numeral 851 denotes an independent cell formed by a barrier rib. The independent cell 851 is composed of cells 851R, 851G, and 851B into which phosphors of RGB colors are injected. As the phosphor 852, an R (red) phosphor 852R, a G (green) phosphor 852G, and a B (blue) phosphor 852B are used. In FIG. 15, only the nozzle portion of the dispenser is shown, and the illustration of the dispenser body is omitted.

Here, attention is focused on only one nozzle 853. In the present construction method in which the fluorescent material is caused to fly from the dispenser into the independent cell and is driven in, the distance H between the tip of the discharge nozzle 853 and the apex of the barrier rib 854 needs to be maintained as shown in the enlarged view of FIG. The reason is as follows. In the case of the embodiment, the volume of the PDP independent cell is, for example, V = 0.65 mm (length) × 0.25 mm (width) × 0.12 mm (depth) ≒ 0.02 mm ^3. It is necessary to fill the paste. This is because, as described above, it is necessary to form a thick phosphor layer on the inner wall of the cell after the volatile components are removed through the filling and drying steps of the phosphor coating liquid.

At the stage where the phosphor paste is being poured into the cell, the high-viscosity paste is not immediately filled in the entire cell container due to its poor fluidity. The meniscus has a shape filled with the paste from above while maintaining the shape raised above the barrier rib apex 854. Therefore, the meniscus is not flattened even at the stage when the coating in the target cell is completed. When the tip of the discharge nozzle 853 comes into contact with the raised phosphor meniscus during the coating process, the liquid adheres to the tip of the nozzle, and the fluid flowing out of the nozzle is affected by the fluid soul at the tip of the nozzle, causing various troubles. It becomes a factor. Therefore, it is necessary to keep a sufficient distance H between the tip of the discharge nozzle 853 and the barrier rib vertex 854.

Ｈ In the examples, H ≧ 0.5 mm was required in order to prevent the liquid from adhering to the nozzle tip. Further, if H ≧ 1.0 mm, prevention of liquid adhesion is sufficient, and highly reliable intermittent coating over a long period of time could be achieved.

The gap H between the tip of the discharge nozzle 853 and the opposing surface thereof is kept sufficiently large, and while maintaining the gap of the flow passage sufficiently larger than the particle diameter of the powder while flying high-viscosity powder fluid, a predetermined gap is maintained. The method of shooting at high speed in the “independent cell” is made possible by the dispenser of the above embodiment or example of the present invention.

(4) In the case of the conventional type, in the case of the “jet type dispenser” (FIG. 26) and in the case of the “ink jet type” (FIG. 28), the coating fluid was able to fly.

However, as described above, in the case of the “jet dispenser”, it is difficult to use a powder fluid having phosphor fine particles or the like for a long time because there is a mechanically zero sliding portion between the relatively moving members. . In addition, the "ink-jet type" is difficult to handle a high-viscosity fluid of 100 mPa · s or more and a powder fluid having a particle diameter of several microns from its principle and structure. Therefore, to summarize the characteristics of the coating apparatus using the present invention,
(1) It can correspond to a high-viscosity fluid of the order of thousands to tens of thousands of mPa · s (cps).
(2) No clogging occurs even with a coating material having a powder diameter of several μm or more.
(3) Intermittent application can be performed in a short cycle of the order of msec or less.
(4) The coating fluid can fly a long distance away from the discharge nozzle by 0.5 to 1.0 mm or more.
(5) The coating amount per dot can be secured with high accuracy.
(6) Multi-heading is easy and the structure is simple.
The above (1) to (6) are also necessary conditions for achieving the independent cell type phosphor layer by direct patterning using a dispenser instead of the conventional screen printing method and photolithography method. Hereinafter, the reason why the above conditions (1) to (6) are required and the reason why the present dispenser has the above characteristics will be supplemented a little.

The reason why the above (1) is required in forming the phosphor layer is that, as described above, after coating and drying, the phosphor layer having a thickness of about 10 to 40 μm is thickly formed on the rib wall surface. This is because it is necessary to use a high-viscosity paste-like fluid in which the amount of the solvent is reduced for the coating material containing. Further, one of the reasons that the present invention can cope with high-viscosity fluids on the order of thousands to tens of thousands of mPa · s (cps), specifically, on the order of 5,000 to 100,000 mPa · s, is that in the examples of the present invention, This is because a thread groove pump is used for the fluid replenishing device, and a pumping pressure for pumping a high-viscosity fluid to the piston side (discharge chamber) can be easily obtained by the thread groove pump. When a high-viscosity fluid is used, a large discharge pressure is generated because the squeeze pressure is proportional to the viscosity. When the generated pressure is P _i = 10 MPa, for example, when the piston diameter D _{o is} 3 mm from Table 1, the axial load f applied to the piston is 0.0015 ² × π × 10 × 10 ⁶ ≒ 70 N. In this embodiment, the piston uses an electromagnetically strained actuator having a large withstand load capable of withstanding the above load.

The reason (2) is required in forming the phosphor layer is that, as described above, in order to obtain a high luminance of the display, phosphor fine particles having a particle size of several microns are usually optimal. Because. In addition, the reason why the dispenser of the present invention is less likely to cause clogging in the flow path is that the secondary squeeze pressure can be used, so the minimum value h _min of the gap between the piston that is most likely to be clogged and its opposing surface is This is because it can be set sufficiently larger than the powder particle size, for example, h _min = 50 to 150 μm or more.

The reason (3) is required to achieve the independent cell type phosphor layer by direct patterning is as follows. For example, in the case of a 42-inch wide PDP, if the number of pixels is 852 RGB × 480 in width, the number of independent cells = 3 × 408960 ≒ 1.23 million. Assuming that the time T _P allowed for the phosphor application process is 30 seconds and 100 nozzles are mounted on the application device, the time per shot T _S = 30 × 100/12300000 ≒ 0.0024 seconds. This value is 1/100 or less of the response of the conventional pneumatic and screw groove type dispensers. Therefore, when mass production is considered, a high-speed response dispenser far exceeding the conventional type is required.

One of the reasons that the dispenser of the present invention can realize the above (3) is that the gap h _min between the piston end face and the opposing face can be set to a large value, for example, 50 to 150 μm or more. This is because the fluid resistance of the flow path leading from the supply pump to the discharge chamber (14 in FIG. 1 and 68 in FIG. 10) can be reduced as much as possible in the suction process with the piston raised. Since the fluid resistance of the radial flow path connected to the discharge nozzle is small, the filling time can be shortened even for a highly viscous fluid having poor fluidity.

Further, in the present dispenser, an electromagnetic strain actuator using a piezoelectric element, a giant magnetostrictive element, or the like having a high response of, for example, 0.1 msec or less can be effectively used. The limit of the stroke of the electromagnetic strain actuator is about 30 to 50 μm at a practical level. However, since the dispenser uses the secondary squeeze pressure, a large pressure can be generated even when the gap h _min is large. As can be seen from Equation 12, the secondary squeeze pressure does not depend on the absolute value of the gap h, but only on the differential dh / dt (speed) of the gap. Therefore, by utilizing the advantages of the electromagnetic strain actuator capable of obtaining a large speed dh / dt, a discharge pressure having a high peak of 5 to 10 MPa or more can be easily obtained in a sharp and short cycle.

In the case of a conventional “jet type dispenser” (FIG. 26), it seems easy to replace the mechanism for driving the needle 555 with an electromagnetic strain actuator. However, in this case, in the suction step of FIG. 27A, the gap of the suction portion 564 formed between the spherical convex portion 559 and the concave portion 561 can be at most several tens μm in the stroke of the electromagnetic strain actuator. As a result, in the case of a high-viscosity fluid, it takes a long time to fill the pump chamber 553 with the fluid, so that the advantage of the angle using the electromagnetic strain actuator having a high-speed response cannot be utilized.

The reason (4) above is required in forming the phosphor layer by direct patterning is that, as described above, the contact between the phosphor meniscus raised from the top of the barrier rib and the tip of the discharge nozzle during the coating process. It is necessary to prevent this. Further, the reason why the above (4) can be realized is that, as described above, the present dispenser utilizes the high-speed response of the electromagnetic strain actuator to easily perform a sharp discharge pressure having a high peak of 5 to 10 MPa or more. It is because it can be obtained. By utilizing the high peak pressure that overcomes the surface tension at the nozzle tip, long-range flight can be performed even with a high-viscosity fluid.

(5) The reason why the above (5) is required is that the accuracy of the phosphor filling amount in the independent cells needs to be, for example, about ± 5%. The reason (5) can be realized is that the amount of application per dot in the intermittent application of the dispenser basically depends on the stroke of the piston, the absolute position, and the viscosity of the application fluid. This is because the flow rate at the operating point of the characteristics and the discharge nozzle fluid resistance is determined only by the number of application times per unit time. Specifically, when a thread groove pump is used as the supply pump, a predetermined application amount per dot can be set only by changing the intermittent frequency and the rotation speed of the thread groove shaft.

In the case of a conventional dispenser, the stroke, the absolute position, and the viscosity of the application fluid of the piston all have a great influence on the discharge amount, so that strict control is required. For example, in the case of an air type dispenser, the discharge amount is inversely proportional to the fluid viscosity.
In the case of the jet type, the discharge amount is directly proportional to the stroke. In this dispenser,
The number of rotations of the thread groove shaft may be controlled using a DC servomotor so as to maintain a constant number of rotations, and the factor that impairs the accuracy of the intermittent application amount is small.

The reason (6) is required is that in the case of direct patterning, it is necessary to mount at least several tens of heads on the coating apparatus. In order to be able to replace the conventional construction method, maintenance properties comparable to those of the screen printing method and the photolithography method are required.
The reason (6) can be realized is that the application amount per dot in the intermittent application can be insensitive to the stroke and the absolute position of the piston in the present application apparatus, similarly to the above (5). This is because the configuration 67) can be simplified. That is, conventional dispensers require high-precision machining of members (57 and 52 in FIG. 10) that move relative to each other in the piston drive unit, accurate alignment between members during assembly, and ensuring absolute accuracy of piston stroke. These process controls are not so required in this dispenser. Therefore, the entire multi-head that independently drives a plurality of pistons can be greatly simplified.

(3) Diaphragm type head structure FIGS. 17A to 17D show a third embodiment of the present invention. A case is shown in which a discharge chamber (corresponding to 14 in FIG. 1 and 68 in FIG. 10) is formed by a diaphragm and its facing surface, and this diaphragm is directly driven by a piezoelectric actuator to change the gap between the diaphragm and its facing surface. The thread groove pump, which is an example of the fluid replenishing device, and the piston that generates the squeeze pressure are separately configured as in the second embodiment.

17A is a partial front sectional view, FIG. 17B is a side view, FIG. 17C is a top view, FIG. 17D is a view showing a flow passage formed by an upper bottom plate and a lower bottom plate, and FIG. 17E is an enlarged partial cross section of the diaphragm portion. FIG.

Reference numeral 301 denotes a main shaft, which is housed in the housing 302 so as to be movable in the rotation direction. The main shaft 301 is driven to rotate by a motor 303 which is an example of a rotation transmission device. 324 is a bearing for supporting the main shaft 301. Reference numeral 304 denotes a screw groove formed on a relative movement surface between the main shaft 301 and the housing 302, reference numeral 305 denotes a fluid suction port, reference numeral 306 denotes a syringe for storing the coating material 307, and reference numeral 308 denotes an air pipe for supplying auxiliary air pressure. Reference numeral 309 denotes a joint for connecting the output shaft 310 of the motor to the main shaft 301, and reference numeral 311 denotes a discharge port having a sufficiently large flow path diameter (about several millimeters) formed on the screw groove pump formed on the upper bottom plate.

Reference numeral 312 denotes a piston, 313 denotes a piezoelectric actuator which is an example of an axial driving device for moving the piston 312 in the axial direction, 314 denotes a housing for a piezoelectric actuator which fixes an upper end portion of the piezoelectric actuator 313, and 315 denotes an end face of the piston 312. . 316 is an upper bottom plate, 317 is a lower bottom plate, 318 is an intermediate sheet, and 319 is a flow passage formed between the upper bottom plate 316 and the lower bottom plate 317 by utilizing the thickness of the intermediate sheet 318. 320 is a diaphragm formed by reducing the thickness of the upper bottom plate 316, and 321 is a discharge nozzle mounted on the lower bottom plate 317. A discharge port 322 is formed in the lower bottom plate 317 and the discharge nozzle 321.

(4) The diaphragm 320 and the fixed-side facing surface 323 are two surfaces that relatively move in the gap direction. The piezoelectric actuator 313, which is an example of the axial driving device, changes the relative position in the axial direction between the diaphragm 320 and the fixed-side facing surface 323. The point that the gap h (see FIG. 17E) of the relative movement surface is changed by this axial driving device is the same as the embodiment of FIGS.

(4) With the head structure of this embodiment, the flow passage from the outlet of the thread groove pump to the discharge port can be completely sealed, so that the seal of the piston portion is not required.

Also, since the output end of the electromagnetic strain actuator can be driven while being pressed directly against the diaphragm, the mass of the mechanically operating part can be reduced. That is, since the portion corresponding to the piston 57 in the structure of FIG. 10 can be reduced, the inertial load of the electromagnetic strain actuator can be reduced. As a result, intermittent coating at a higher frequency became possible.

FIG. 17A shows a simplified control block diagram of the present coating apparatus. 325 is a command signal generator for giving a driving method of the piezoelectric actuator 313, 326 is a control controller, 327 is a driver which is a driving power source of the piezoelectric actuator 313, and 328 is position information from a linear scale provided on the stage. Control based on command signals such as predetermined piston rise / fall waveform, intermittent period, amplitude, minimum gap, and information 328 from a linear scale that detects the relative speed and relative position between the coating apparatus and the substrate. The piezoelectric actuator 313 is driven by the driver 327 via the controller 326.

Although the piezoelectric actuator 313 is used in the embodiment as the axial driving device of the piston 312, a giant magnetostrictive actuator, which is one of the electromagnetic strain actuators, may be used.

(4) Another Method of Flow Rate Adjustment FIGS. 18A and 18B show a fourth embodiment of the present invention, in which the minimum number of pistons (312 in FIG. 17A) for generating the primary squeeze pressure and the secondary squeeze pressure is shown. This example shows a case where a flow rate correction function (apparatus) is separately provided in the middle of the flow path from the thread groove pump to each nozzle, instead of correcting the variation in the flow rate between the heads by setting the gap h _min . FIG. 18A is a front partial cross-sectional view, and FIG. 18B is a view showing a flow passage connecting the thread groove pump and the diaphragm. 351 is a main shaft, 352 is a housing, 353 is a motor, 354 is a screw groove, 355 is a suction port, 356 is a syringe of a coating material 357, and 358 is an air pipe. 359 is a joint, 360 is a discharge port having a sufficiently large flow path diameter (about several millimeters) on the thread groove pump side, 361 is a main piston, 362 is a piezoelectric actuator which is an example of an axial driving device, and 363 is a piezoelectric actuator. The housing 364 is an upper bottom plate, 365 is a lower bottom plate, 366 is an intermediate sheet, and 367 is a flow passage formed between the upper bottom plate 364 and the lower bottom plate 365. Reference numeral 368 denotes a main piston diaphragm formed by reducing the thickness of the upper bottom plate 364, and 369 denotes a discharge nozzle. 370 is a flow rate correcting piezoelectric actuator, and 371 is a flow rate correcting diaphragm formed by reducing the thickness of the upper bottom plate 365. It is the same as the third embodiment in that the main piston diaphragm 368 and its fixed-side facing surface are two surfaces that relatively move in the gap direction. However, in this case, the minimum clearance h _min of the main piston is sufficiently large, for example, h _min > 150 μm.

If caused to vary the displacement of the output shaft (sub piston) 372 of the flow rate correction piezoelectric actuator 370, it can be adjusted with the flow rate correction diaphragm 371 the gap h _S of the opposing surfaces. Be determined gap h _S is, thereafter to keep the gap h _S, a state in which always applies a constant voltage to flow rate correction piezoelectric actuator 370.

Explaining with the multi-head equivalent circuit model in FIG. 12, the magnitudes of Rp1 to Rp3 are inversely proportional to the cube of the gap h, as shown in equation (16). Rp1 to Rp3 for the main piston are Rp1 to Rp3 → 0 because h _min is sufficiently large. Instead, R'p1 to R'p3 (not shown) for flow rate correction are replaced. In the embodiment has set the h _S for this flow rate correction to 50μm or less, in a state of being actually fast intermittent application, by actually measuring the flow rate from each nozzle, experimentally h _S for flow rate correction You may decide.

In the embodiment, the piezoelectric actuator is used as the flow rate correcting actuator 370, but a mechanical correcting means (or device) may be used. For example, a manual type in which the output shaft of the micrometer is a sub-piston may be used.

(5) Start / End Control Method Hereinafter, a start / end control method when the independent cells of the PDP are intermittently applied using the present invention will be described. Here, returning to FIG. 15, it is assumed that a process in which a dispenser having a multi-nozzle drives a phosphor into an independent cell while relatively moving on a substrate. Here, attention is focused on only one nozzle 853.

Here, it is assumed that the panel surface has a “display area” 855 where a phosphor layer is formed, and a “non-display area” 856 where no phosphor layer is formed on the outer periphery of the display area 854. An outer boundary of the “non-display area” 856 is indicated by a chain line 857.

{Circle around (5)} The nozzle 853 that has traveled at high speed in the direction of the arrow 858 while intermittently coating the display area 855 on the panel surface cuts off the discharge of the dispenser and enters the non-display area 856 when the last intermittent coating is completed. In the non-display area 856, after a U-turn as indicated by an arrow 859, the display area 855 is again entered through the approach section, and the dispenser resumes intermittent ejection.

The graph of FIG. 19A is a displacement curve with respect to time of the piston, in which 950 is a piston, and 951 is a discharge chamber (corresponding to 14 in FIG. 1). FIG. 19B shows the rotation speed N of the motor with respect to time t. After the nozzle 853 drives the coating material into the cell at the end of the display area 855, the piston 950 rises in a steady displacement pattern. This step, i.e. at time t = T _1, the nozzle 853 at the same time starts running toward the non-display area 856, the piston 950 starts moving upward to draw a gentle slope angle 952 again. The volume increase amount _{Q P} in the discharge chamber 951 per unit time due to the piston 950 is raised, when the maximum flow rate of the screw groove pump was _{Q max,} if Q _{P> Q max,} the discharge was blocked state Keep (see equation 18). At time t = T _1, at the same time the rotational speed N → 0 of the screw groove pump motor. At this time, it is more preferable to shut off the auxiliary air pressure (308 in FIG. 17A). The responsiveness of the motor control and the air pressure control is about two orders of magnitude lower than that of the electromagnetic strain element, and the rise and fall times are at most T = 0.05 seconds. During this time T, the piston stroke and the piston diameter are set so that Q _P > Q _max is satisfied and the piston 950 can be kept rising.

When the nozzle 853 travels in the U-turn section (non-display area 856) of the end face of the panel, the relative speed between the nozzle 853 and the panel is zero and extremely low before and after. If the material continues to flow out of the nozzles in this section, the discharge from the plurality of nozzles will overlap, and the material will be deposited on the substrate (but in the non-display area 856). As a result, troubles such as the deposited material sticking to the tip of the discharge nozzle may occur. Therefore, it is preferable to keep the discharge cut off in the U-turn section. At time t = T ₃ resume discharge, this time taking into account the time Tm required for the rise of the motor, it is sufficient to start the rotation of the pre-motor. If the amount of application immediately after the start of ejection is unstable, the nozzle may be placed at the position of the non-display area 856 and the application to the independent cell may be started after discarding once or twice.

A method of moving from the application state to the cutoff state at a high speed, for example, when the discharge nozzle changes from the “display area” to the “non-display area” on the substrate, the method of stopping the discharge by raising the piston is a method of continuous line coating. Also applicable to cases. Further, a method of lowering or reducing the number of rotations of the motor simultaneously with the rise of the piston can also be applied to continuous line coating.

For example, in the case of continuous line application, after a continuous line is drawn in the "display area", a U-turn is performed while the discharge blocking state is maintained in the "non-display area". To start. Even in this case, since the secondary squeeze pressure found by the present invention can be used, the coating method and the dispenser structure described in the above [1] to [3] can be applied. For example, the minimum value of the clearance h of the piston end face when the _{h = h min, h} min> become so enough large hx, for example set to approximately _h min = 150 [mu] m. Therefore, even if the gap h fluctuates by several microns due to the thermal expansion of the member, the influence on the fluctuation of the continuous application flow rate is small. In addition, the method of obtaining hx, the method of correcting the flow rate of the multi-head, and the like may be obtained by replacing the intermittent flow rate with the continuous flow rate, and the above-described contents can be used.

[4] Other Supplementary Explanations [4-1] Method for Reducing the Weight of Piston Drive Unit A perspective view of FIG. 20 shows a fifth embodiment of the present invention, in which a pump unit and a piston drive unit, which are examples of a fluid replenishing device, are made flexible. In this configuration, the pump unit is arranged on the fixed side, and the piston drive unit is arranged on the stage side that runs at high speed. In this case, since the piston driving unit may be lightweight, it is advantageous for high-speed speed control and positioning control of the tip of the discharge nozzle with respect to the panel.

A panel # 150 is provided with a pair of Y-axis direction transfer devices 151 and 152 with both sides of the panel interposed therebetween. An X-axis direction transfer device 153 is mounted on the Y-axis direction transfer devices 151 and 152 so as to be movable in the YY ′ direction. Further, a Z-axis direction transfer device 154 is mounted on the X-axis direction transfer device 153 so as to be movable in the direction of the arrow XX ′. On the Z-axis direction transfer device 154, a piston drive unit 155 including a piezoelectric actuator and a piston is mounted.

A pump unit 156 is an example of a fluid replenishing device, and is disposed on a fixed side. A flexible pipe 157 is a flow path connecting the pump unit 156 (for example, corresponding to 66 in FIG. 10) and the piston driving unit 155 (for example, corresponding to 67 in FIG. 10). When compressibility due to the elasticity of the flexible pipe poses a problem in high-speed intermittent application, the present apparatus may be configured with the minimum clearance h _{min of the} piston sufficiently small.

[4-2] Method of Providing Application Suspended Section FIGS. 21A and 21B show an embodiment in which an “application suspended section” is provided for intermittent application. Specifically, this is a coating method in which the operation of hitting n equal-quantity dots at equal time intervals, pausing the application of one dot, and again hitting n equal-quantity dots at equal time intervals is repeated. For example, in the chip component bonding method for forming a circuit, since only one piece of bonding material needs to be bonded, this corresponds to a case where application suspension is required only for this part.

Ａ The graph of FIG. 21A is a displacement curve of the piston with respect to time, in which 750 is a piston, 751 is a discharge chamber (corresponding to 14 in FIG. 1), and 752 is a discharge nozzle. In FIG. 21B, reference numeral 753 denotes a substrate, and 754 denotes dots applied on the substrate 753.

As a starting point of time t = T _1, the piston 750 on a straight line 755 that gradually drops, while repeating increase and decrease of the same amplitude, performing the n partial intermittent application. At time t = _{T 2,} the piston 750 rises higher than the steady state. The value of the start point of the straight line 756 at the start of intermittent application is equal to the value of the linear 755 at t = _{T 1.} Assuming that the period of the piston in the steady state is ΔT, the time from a large rise to a fall again is 2ΔT. After t = T _3, the piston 750 is on a straight line 756 that gradually drops, while repeating increase and decrease of the same magnitude to repeat the intermittent application. end point of the value of the n component of intermittent application linear 756 at the time the finished is equal to the value of the linear 755 at t = T _2.

Between time t = T ₂ of time t = T _3, a section of the time width 2.DELTA.T, 2 times of coating total flow is charged into the discharge chamber 751 from the screw groove pump. However, the intermittent application at t = T _3, the piston since the amplitude component only lowered during the steady flow rate only applied in a steady state. The advantage of the present invention that the discharge pressure does not depend on the absolute value of the minimum clearance h _min when the minimum clearance h _{min of the} piston is large is utilized here.

流体 The fluid that has been accumulated one more time in the discharge chamber 751 is then discharged while being uniformly distributed by n intermittent applications. Therefore, if the present method and apparatus are used, the same application amount per dot can be intermittently applied in the entire section having the application pause portion.

The above method and apparatus are effective for an application process in which the time interval of the intermittent application is set to a constant value, for example, when the dispenser is fixed and the conveyor on which the substrate is mounted runs at a constant speed. is there.

[4-3] Method of Changing Intermittent Application Amount at a Certain Spot A case where the intermittent application amount is changed only at a certain spot will be described.

For example, when the application amount per dot of the n-th time after application is started is doubled as compared with the others, the following is performed. The time interval between the (n-2) th and (n-1) th time is ΔT _n−1 , the time interval between the (n−1) th and nth time is ΔT _n , and the time interval between the nth and (n + 1) th time is ΔT _{n + 1} . Here, ΔT _n = 2 × ΔT _n−1 and ΔT _n−1 = ΔT _{n + 1} are set. total flow total flow filled in the discharge chamber _{Q n = ΔT n-1 ×} Q max, in the n-th from the thread groove pump by the n-1 th is filled into the discharge chamber from the screw groove pump _{Q n} = [Delta] T _n * _Qmax = 2 * [Delta] Tn _-1 * _Qmax . _{Therefore, Q n = 2 × Q n-} 1. Assuming that the total flow rate filled into the discharge chamber from the thread groove pump is proportional to the coating amount per dot flowing out of the discharge nozzle, the coating amount at the n-th time is twice as large as the others. However, in the section from the end of the discharge to the start of the discharge (the above ΔT _n ), the stroke of the piston is set sufficiently large so that the discharge chamber can maintain a sufficiently negative pressure. As described above, the case where the application amount is doubled compared to the others only for the n-th application amount is described. Conversely, when the application amount is reduced to 倍 times the application amount only for the n-th application amount, ΔT _n = ΔT _n−1 / 2 and ΔT _n−1 = ΔT _{n + 1} may be set. Based on such a concept, the dispenser can set an arbitrary amount of coating at each spot.

に 対 し て While the conventional dispenser controls the application amount per dot by the mechanical displacement (stroke) of the piston, the present dispenser can control the application amount by controlling the time interval.

[4-4] As a method described above for obtaining the inflection point hx discharge amount Qs curves for clearance h _min, setting the piston end face and the minimum value h _min of the gap between the opposing surfaces, very particularly in the present invention is important. By setting h _min > hx, stable intermittent application independent of fluctuation (drift) of the piston stroke and the absolute position of the piston can be realized.

By setting h _min ≒ hx, fine flow correction between multiple heads can be performed. As a method of obtaining this inflection point hx,
(1) Experimental method The minimum value h _min of the gap between the end surface of the piston and the opposing surface is set, and the total ejection amount Qs per dot is obtained in a state where intermittent ejection is performed. The inflection point hx is obtained by plotting the measured value of Qs with respect to h _min .
(2) gives a theoretical methods (i) the input waveform exact way piston displacement h (t), determine the flow rate _{Q i} using equation (14). The flow rate Q _i of the discharge process section integrated over time t, determining the total discharge amount Qs per dot. The inflection point hx is obtained by plotting the theoretical value of Qs with respect to h _min . The graph of FIG. 14B is obtained by the above method.

(Ii) Simple method A method of obtaining the inflection point hx more easily will be described below.

As described above, if the minimum gap hmin is sufficiently large, the flow rate: Q _i is the amplitude varies depending on the size of the stroke hst, a waveform that varies around the operating point Q _ics.

That is, the average flow rate does not depend on the size of the piston stroke, but is determined by the operating point (for example, A in FIG. 8) determined by the thread groove pump characteristics and the discharge nozzle resistance. That is, when comparing the magnitude of the total ejection amount Qs per dot under the condition that the cycle is constant, the magnitude of the continuous flow rate when the stroke hst is zero may be compared.

In the equation (14), if hst = 0, Psqu1 → 0 and Psqu2 → 0. Since P _S0 does not depend on the gap h, the inflection point hx may be obtained by plotting the value of φ with respect to h using the following function φ of the gap h.

用 い る When a thread groove pump is used for the fluid supply device, the internal resistance is Rs = Pmax / Qmax. In many cases, the maximum flow rate Qmax and the maximum pressure Pmax of the pump can be theoretically obtained, but if it is difficult, the pressure / flow rate characteristics corresponding to the graph of FIG. 8 can be experimentally obtained by the following method. good.

The maximum flow rate Qmax measures the total flow rate per unit time by performing continuous discharge with the discharge nozzle detached. The maximum pressure Pmax may be measured by mounting a jig provided with a pressure sensor instead of the discharge nozzle and measuring the pressure in a state where the flow rate is zero. When a pump other than the thread groove pump is used as the fluid replenishing device, and when the pressure / flow rate characteristics do not have a linear relationship, the internal resistance Rs may be obtained from the inclination angle by linearizing the operating point.

18A and 18B, a flow correction function (eg, a fourth embodiment of the present invention) is provided in the flow passage from the fluid replenishing device (for example, a thread groove pump) to each nozzle. If the device is provided, or if there is a restrictor, the fluid resistance Rx of this portion may be added to the above Rs to obtain the apparent internal resistance (Rs + Rx → Rs) of the fluid replenishing device.

Fluid resistances Rn and Rp are usually obtained from well-known theoretical formulas (for example, formulas 15 and 16), but if the shape is complicated, numerical analysis may be used or may be obtained experimentally. In the case of an orifice having a shorter throttle portion than the inner diameter, the equation of linear resistance (for example, equation 15) does not hold, but in this case, the fluid resistance may be obtained by linearizing the operating point. .

Hereinafter, the features of the coating apparatus to which the present invention is applied will be additionally described.
(I) The discharge amount Qs is hardly affected by the viscosity of the application fluid.

In equation (14), the fluid resistances Rn, Rp, Rs are proportional to the viscosity μ. If the supply source pressure Ps0 ≒ the maximum screw groove pressure Pmax, Ps0 is proportional to the viscosity μ.

Accordingly, the viscosity μ of the denominator and the numerator in the equation (14) is canceled. Therefore, the discharge amount of the dispenser hardly depends on the viscosity. Usually, the viscosity of a fluid varies logarithmically with temperature. The insensitivity to the temperature change is a very advantageous feature in configuring a coating system.
(Ii) A high coating accuracy is obtained and the structure is simple.

When the dispenser of the present invention is applied to, for example, intermittent application of a PDP, as described above, the application amount per dot in the intermittent application is determined by “the pressure flow characteristic of the supply pump and the flow rate at the operating point of the discharge nozzle fluid resistance. "And" intermittent frequency ". For example, when a thread groove pump is used as an example of a supply source pump, if a discharge nozzle is mounted on the apparatus, the application amount per dot is determined only by the rotation speed N of the thread groove pump and the frequency f of intermittent application. You.

(4) Since the amount of application is insensitive to the stroke of the piston, the absolute positional accuracy of the piston, and the viscosity of the application fluid, the configuration of the piston drive unit (for example, 67 in FIG. 10) can be simplified.

Hereinafter, how the coating amount per dot is determined in the case of the conventional dispenser will be described.

The air-type dispenser applies a fixed amount of air supplied from a constant pressure source to the container (in 600 in FIG. 25) in a pulsed manner, and discharges a fixed amount of liquid from the nozzle 602 corresponding to an increase in the pressure in the container. It is to let. Therefore, (1) variations in the discharge amount due to the discharge pressure pulsation, (2) variations in the discharge amount due to the difference in head, and (3) changes in the discharge amount due to a change in the viscosity of the liquid, etc., are factors of the variation.

In the above (2), since the volume of the cavity 600 in the cylinder varies depending on the remaining amount of liquid H, when a fixed amount of high-pressure air is supplied, the degree of the pressure change in the cavity 600 greatly varies depending on the H. That's why. If the remaining amount of the liquid decreases, there is a problem that the application amount is reduced by, for example, about 50 to 60% as compared with the maximum value. For this purpose, measures have been taken such as detecting the liquid remaining amount H for each ejection and adjusting the pulse width so that the ejection amount becomes uniform.
The above (3) occurs, for example, when the viscosity of a material containing a large amount of solvent changes with time. As a countermeasure for this, a measure has been taken in which the tendency of the viscosity change with respect to the time axis is programmed in advance in a computer and the pulse width is adjusted so as to correct the influence of the viscosity change.

When performing intermittent coating using a conventional thread groove type dispenser (specific structure is not described), (1) an electromagnetic clutch is interposed between the motor and the screw groove, and this electromagnetic clutch is connected or released when the discharge is turned ON or OFF. (2) A method of rapidly starting or stopping rapidly using a DC servomotor has been used. However, since the response is determined by the time constant of the mechanical system in any of the above cases, the high-speed intermittent operation is limited. In addition, since there are many uncertainties in the rotation characteristics of the pump shaft during transient response (at the start and stop of rotation), strict control of the flow rate is difficult, and there is a limit to the coating accuracy.

In the case of the jet dispenser (FIG. 26), as described above, it is necessary to engage the spherical convex portion formed at the end of the needle 555 with the spherical concave portion formed on the discharge side with high precision. .

In the case of the ink jet system (FIG. 28), the diaphragm 652 is deformed in the thickness direction by the piezoelectric element 653 to reduce the volume of the ink chamber 654.

In any of the above-described coating methods, the volume of the space directly connected to the discharge nozzle is changed by some means (or device), and the coating amount is controlled by a diagram of “the change in the volume of the space = the coating amount per dot”. Was the way. In the case of the dispenser of the present invention, as described above, the volume change of the space due to the piston does not determine the application amount, but its role is to change the continuous flow rate (Analog) of the source pump into an intermittent flow rate (Digital). It is a D converter. Therefore, in this dispenser, the process management required by conventional dispensers, such as high-precision machining of members that move relatively in the piston drive unit, accurate alignment between members during assembly, and ensuring absolute accuracy of piston strokes, are performed. It is greatly simplified.

Therefore, the entire multi-head that independently drives a plurality of pistons can be largely structurally simplified.
(Iii) High reliability against clogging of the powder fluid in the flow path If the present invention is applied, the opening area of the flow path from the suction port of the pump to the discharge nozzle can be made sufficiently large, so that the reliability of the powder fluid can be improved. Is high.

In particular, the gap h between the piston end face, which is the flow passage leading to the discharge nozzle, and the opposing face can be made sufficiently large, which is extremely advantageous for preventing clogging of powder (for example, particle diameter of 7 to 9 μm in the case of a phosphor). Become.

For example, when the flow rate of each head is finely adjusted in a multi-head configuration, by using this method together with the method of setting the output flow rate of the supply pump (adjusting the flow rate by the number of rotations), the gradient of the discharge amount with respect to the gap is smooth. A minimum gap (for example, hmin = 50 μm in FIG. 15) may be set near hmin ≒ hx. This numerical value of 50 μm is sufficiently larger than the powder size (several microns to several tens microns) that is usually used. When the fine adjustment of the flow rate is performed in the fourth embodiment (FIGS. 18A and 18B), or when the component accuracy of each component is good and the flow rate variation between the heads can be ignored, the minimum gap hmin is 150 to 200 μm. Or you may set more.

The end face of the piston (for example, the discharge chamber 68 in FIG. 10) directly connected to the flow path of the discharge nozzle is a part where the direction of the flow path changes greatly. When handling powder fluid, troubles such as clogging are most likely to occur. It is a place. The fact that a large gap between the flow paths can be ensured at this portion is the most significant feature of the present invention. When applying a powder fluid such as a phosphor or an adhesive containing fine particles, the minimum gap δmin of the flow channel may be set to be larger than the fine particle diameter φd.

δmin> φd (20)

As described above, in the embodiments and examples of the present invention, the thread groove type pump is used for the fluid replenishing device. In order to realize the present invention, a pump of a type other than the thread groove type can be applied. However, in the case of the thread groove type, various parameters constituting the thread groove (radial clearance, thread groove angle, groove depth, groove and ridge) are used. Is advantageous in that the maximum pressure Pmax, the maximum flow rate Qmax, and the internal resistance Rs (= Pmax / Qmax) can be freely selected.

Also, since the flow path can be configured in a completely non-contact manner, it is advantageous when handling powder fluid.

In addition, the form of the pump as the fluid replenishing device in the present invention is not limited to the screw groove type, and other types of pumps are applicable. For example, a Mohno type, a gear type, a twin screw type, a syringe type pump, etc. called a snake pump can be applied. Alternatively, a pump that only pressurizes the fluid with high-pressure air may be used.

FIG. 22 is a model diagram in the case where a gear type is used as the fluid replenishing device in the present invention, wherein 700 is a gear pump, 701 is a flow passage, and 702a, 702b, 702c are, for example, axial driving devices constituted by a piezoelectric actuator or the like. , 703a, 703b, 703c are pistons.

ピ ス ト ン The shape of the piston constituting the piston drive unit and its opposing surface need not be circular. The piston may be rectangular in shape. In this case, the radius of a circle having an equivalent area is set as the average radius.

で は In each of the above embodiments and examples, one nozzle is provided for one head. As long as the accuracy of the parts can be ensured, one head may be equipped with n nozzles. In this case, for example, the above-described basic expression for obtaining the flow rate per dot may be calculated for n nozzles. For example, for nozzles of the same specification, calculation is performed as Rn → Rn / n. For example, when phosphor is intermittently applied in an independent cell, if a plurality of nozzle holes are arranged in the longitudinal direction of the rectangular independent rib, the nozzle can be applied to the whole area inside the cell, which is effective in preventing the applied fluid from protruding from the rib. It is a target. In the case of the example, the shape of the PDP independent cell was 0.65 mm (length) × 0.25 mm (width). In this case, for example, 0.65 mm may be divided into four, and nozzle holes may be formed at two places on the left and right (a total of three places) including the center. Further, by forming a nozzle hole for applying the same color phosphor in a direction perpendicular to the traveling direction of the stage and applying the phosphor in a plurality of independent cells, the productivity is further improved.

In the pumps of the present embodiment and the example that handle a minute flow rate, the stroke of the piston may be at most on the order of several tens of microns, and the limit of the stroke is a problem even if an electromagnetic strain element such as a giant magnetostrictive element or a piezoelectric element is used. Does not.

Also, when discharging a high-viscosity fluid, a large discharge pressure is expected to be generated due to the squeezing action. In this case, since a large thrust against a high fluid pressure is required for the axial driving device for driving the piston, it is preferable to use an electromagnetic strain type actuator capable of easily producing a force of several hundred to several thousand N. Since the electromagnetic strain element has a frequency response of several MHz or more, the piston can linearly move with high response. Therefore, the discharge amount of the high-viscosity fluid can be controlled with high response and high accuracy.

If responsiveness is sacrificed, a moving magnet type, a moving coil type linear motor, an electromagnetic solenoid, or the like may be used for the axial driving device for driving the piston. In this case, the restriction on the stroke is eliminated. (Not shown)
As can be seen from the equation (11) or the graphs of FIGS. 4 and 5, the pressure and flow generated by the squeeze effect have a phase of Δθ = π / 2 with respect to the displacement input waveform between the piston end face and the gap between the piston end face. It has an advanced waveform. That is, the fluid is discharged in a section where the piston is descending (dh / dt <0). For example, when intermittent coating is performed while moving the substrate to be coated on the stage, in order to aim at the coating location and perform coating with high positional accuracy, the phase is Δθ = π with respect to the displacement input signal Sh of the piston gap. The timing of the stage and the displacement input signal Sh may be adjusted in consideration of the fact that the coating is advanced by 1/2. For example, the stage may be moved while the piston is rising, and after stopping, the piston may be lowered to apply the liquid to the target substrate. (Not shown)
FIG. 23A and FIG. 23B show an application example of the present invention in the case of using a bimoreff type piezoelectric element used in a printer or the like. Two relatively moving surfaces are formed by using a Bimoref type piezoelectric element, and a discharge chamber formed between the two surfaces is connected to a thread groove pump which is an example of a fluid replenishing device.

# 900 denotes a main shaft, which is housed in the housing 901 so as to be movable in the rotation direction. The main shaft 900 is driven to rotate by a motor 902. Reference numeral 903 denotes a screw groove formed on a relative movement surface between the main shaft 900 and the housing 901. In this application example, a thread groove pump in which a groove 903 is formed on the surface of a main shaft 900 having an extremely small diameter or on the inner surface of a housing 901 that accommodates the main shaft 900 is used as a supply pump as a fluid replenishing device. This micro thread groove pump becomes a common fluid replenishing device that supplies fluid to a plurality of discharge chambers. Reference numeral 904 denotes a fluid suction port, reference numeral 905 denotes a thin diaphragm, reference numeral 906 denotes a bimorph type piezoelectric element (driving means in the gap direction) for deforming the diaphragm 905 in the thickness direction, and reference numeral 907 denotes a discharge nozzle mounted on the housing 901. The discharge-side end surface of the diaphragm 905 and its fixed-side facing surface are two surfaces that relatively move in the gap direction, and the space formed by these two surfaces is the discharge chamber 908. Reference numeral 909 denotes a spindle end, and 910 denotes a flow passage connecting the spindle end 909 and the discharge chamber 908. In the case of a piezoelectric actuator, there are several methods depending on the form of use of the deformation of the piezoelectric element, but in the above application example, the diaphragm and the piezoelectric body are laminated, and the deflection of the diaphragm due to the expansion and contraction of the piezoelectric body in the surface direction is used. Is used. In this case, many multi-heads can be integrated in one coating unit by a high-density nozzle arrangement, so that productivity is greatly improved. Further, in this application example, the flow passage 910 connecting the fluid replenishing device and the discharge chamber 908 does not have a throttle (equivalent to 656 in FIG. 28) required in the case of the conventional inkjet method. Since there is no throttle, which is a factor that causes a delay in filling when a high-viscosity fluid is sucked into the discharge chamber, a high-viscosity fluid can be used as compared with a conventional inkjet. For example, a high-viscosity fluid 10 times or more can be handled as compared with a conventional inkjet having a viscosity of about 100 mPa · s as a limit. In order to correct the variation in the flow rate between the heads, a flow rate correction function (device) may be provided in the middle of the flow path from the thread groove pump to each nozzle as shown in the fourth embodiment. However, even in this case, the fluid resistance of the throttle required for flow rate correction can be made sufficiently small so as not to hinder high-speed intermittent coating.

In the case of this application example, the principle of generation of the discharge pressure is not only the primary and secondary squeeze pressures, but also the pressure due to the elastic waves propagated in the liquid. However, in this case as well, the high internal resistance of the thread groove pump prevents backflow, which brings about an effect that the fluid efficiently flows out from the discharge nozzle.

程 As the piston or the diaphragm corresponding to this piston is driven at a higher frequency, the intermittent application approaches the continuous application without limit. The intermittent application may be made pseudo-continuous to draw a continuous line.

In this case, the same method as that for adjusting the coating amount per dot can be applied for adjusting the flow rate as a continuous line.

Further, if a long pipe having a small diameter is attached to the discharge side as a time delay element, and a discharge nozzle is provided at the end thereof, pseudo-continuous operation can be performed at a lower frequency. (Not shown)
The present invention, which can intermittently discharge a minute amount of fluid at high speed and high accuracy, can be applied not only to coating technology but also to various uses. For example, it can be applied as a means (method or apparatus) for manufacturing microlenses used in DVD optical pickups, cameras, printers, etc., instead of the conventional glass molding processing.

In the above description, only the intermittent coating is described. However, the structure of the coating apparatus disclosed in [2] Specific Embodiments and Examples or [3] In the case of a multi-head can be applied to the case of continuous coating. In this case, the flow rate may be adjusted by changing the gap between the piston end surface and the opposing surface. Alternatively, the start and end of the application line may be controlled using the generation of squeeze pressure accompanying the rise and fall of the piston. (Not shown)
Note that by appropriately combining any of the various embodiments described above, the effects of the respective embodiments can be achieved.

It is a partial sectional view of an example of a model of an application example of the present invention. FIG. 3 is a partial cross-sectional view showing a dimensional relationship of each component. It is a figure of an equivalent electric circuit model of an application example of the present invention. 4 is a graph showing an example of a displacement curve of a piston. 6 is a graph of an analysis result of a discharge pressure characteristic according to the present invention. 6 is a graph of an analysis result of a discharge flow rate characteristic according to the present invention. 9 is a graph of an analysis result obtained by comparing discharge pressure characteristics while changing the number of rotations. It is a figure which shows the relationship between the flow volume and pressure of a thread groove pump. FIG. 2 is a sectional view showing a first embodiment of the present invention. FIG. 7 is a partial cross-sectional view of a model showing a case where a thread groove pump and a piston are separated from each other in a second embodiment of the present invention. It is a perspective view showing a multi-head which is a 3rd example of the present invention. FIG. 3 is a diagram showing an equivalent electric circuit model in the case of a multi-head. 9 is a graph of an analysis result obtained by comparing discharge pressure characteristics while changing a minimum clearance of a piston. FIG. 3 is a partial cross-sectional view of a model around a piston. FIG. 14A is a graph showing the relationship between the total discharge amount per dot and the minimum piston clearance in the present invention in FIG. 14A. It is a perspective view showing the state where the dispenser of the present invention drives a fluorescent substance in the independent cell of PDP. FIG. 16 is an enlarged perspective view of FIG. 15. It is a front partial sectional view showing a 3rd embodiment of the present invention. It is a side view of the 3rd embodiment. FIG. 10 is a top view of the third embodiment. It is a figure showing only a flow path formed of an upper bottom plate and a lower bottom plate of the third embodiment. FIG. 17B is an enlarged partial cross-sectional view of the diaphragm part of FIG. 17A. It is a front partial sectional view showing a 4th embodiment of the present invention. It is a figure of the model which shows the flow path which connects a thread groove pump and a diaphragm. FIG. 5 is a diagram showing a displacement curve h with respect to time t of the piston. FIG. 6 is a diagram illustrating a motor rotation speed N with respect to time t. It is a perspective view showing a 5th embodiment of the present invention. FIG. 4 is a diagram illustrating a displacement waveform of a piston when an “interruption section” is provided in intermittent application. FIG. 4 is a diagram illustrating dots applied on a substrate. It is a partial sectional view of a model when a gear pump is used for a fluid replenishing device of the present invention. It is a top view which shows the example of application of this invention at the time of using a bimoreff-type piezoelectric element. It is a front partial cross-sectional view of the application example. It is a partial sectional view showing the example of the conventional device of the injection device using a giant magnetostrictive element. It is a partial sectional view showing the conventional air pulse system dispenser. It is a partial sectional view showing the conventional jet type dispenser. It is a partial sectional view of a model showing a suction process of a conventional jet type dispenser. It is a partial sectional view of a model showing a discharge process of a conventional jet type dispenser. FIG. 10 is a partial cross-sectional view illustrating a conventional ink jet. It is a perspective view showing the structure of a plasma display panel (PDP).

Explanation of reference numerals

8, 9 Two surfaces that move relative to each other 6 Fluid replenishment device 7 Inlet 10 Outlet

Claims (37)

A pressure change caused by supplying a fluid from a fluid replenishing device to the gap while relatively moving the two members in a gap direction of a gap formed between two opposing surfaces of the two members, thereby changing the gap. A method of intermittently ejecting the fluid using the method and adjusting the ejection amount of the fluid per dot by the pressure and flow characteristics of the fluid replenishing device. The method according to claim 1, wherein the pressure / flow rate characteristics of the fluid replenishing device are set by changing the rotation speed of the fluid replenishing device. The minimum value or average value of the gap as h _0, the setting range of the gap h ₀ with intermittent discharge amount of the fluid per dot is schematically proportional to said clearance h ₀ 0 <h 0 _<h and _x, the setting range of the gap _{h 0} where intermittent discharge amount becomes substantially constant with respect to the gap _{h 0} and _h 0> _{h x,} and, _{h x} is, _{0 <h} 0 <h in the region of _{h x} and intermittent discharge of the envelope per the one dot with respect to _0, h _0> when the intermittent discharge amount of the 1-dot per an area of h _x is the intersection of the value of the portion to be a substantially constant without depending on the h ₀ the fluid ejection method according to claim 1, characterized in that the intermittent discharge by setting the gap to the range of h _0> h _x. The fluid pressure generated in inverse proportion to the size of the gap formed between the two opposing surfaces of the two members and in proportion to the time derivative of the gap is defined as a primary squeeze pressure, proportional to the derivative, and the fluid pressure generated in proportion to the internal resistance of the fluid supply device and secondary squeeze pressure, a minimum value or average value of the gap as h _0, intermittent discharge of fluid per dot amount setting range of the gap h ₀ in the general proportional relationship to the clearance h ₀ and 0 <h 0 _{<h x,} the gap h of the intermittent discharge amount becomes substantially constant with respect to the clearance h ₀ the setting range of ₀ and _h 0> _{h x,} and, _{h x} is, _{0 <h} 0 <an envelope of the intermittent discharge quantity per the 1 dot for _{h 0} in the region of _{h x,} h 0> of _{h x} The intermittent ejection amount per dot in the region is h _The intermittent discharge is effected by the action of the secondary squeezing pressure by setting the gap to be in the range of h ₀ > h _x when the intersection of the value of the part which becomes substantially constant without depending on ₀ is set. Item 7. The fluid discharging method according to Item 1. The fluid pressure generated in inverse proportion to the size of the gap between the two opposing surfaces of the two members and in proportion to the time derivative of the gap is defined as the primary squeeze pressure, and is proportional to the time derivative of the gap. and, and the fluid pressure generated in proportion to the internal resistance of the fluid supply device and secondary squeeze pressure, a minimum value or average value of the gap as h _0, 1 intermittent discharge amount per dot is the gap h ₀ setting range of the gap _{h 0} in the general proportional relationship to _{0 <h} 0 _{<h x,} the setting range of the gap _{h 0} where intermittent discharge amount becomes substantially constant with respect to the clearance _{h 0 h 0} > and _{h x,} and, _{h x} is, _{0 <h} 0 <an envelope of the intermittent discharge quantity per the 1 dot for _{h 0} in the region of _{h x,} h 0> in the region of _{h x} per the dot Summary one at intermittent discharge amount does not depend on h ₀ When the intersection of the made part of the value, the gap h ₀ h ₀ ≒ h _x or, 0 <h 0 _<to claim 1, characterized in that to adjust the discharge amount is set to a range of h _x The fluid discharge method according to the above. h _x is the envelope of the intermittent ejection amount curve per dot with respect to h ₀ in the region of 0 <h ₀ <h _x , and the curve is approximately constant with respect to h _{0 in} the region of h ₀ > h _x 4. The fluid ejection method according to claim 3, wherein the intersection is the intersection of values of the following parts. A fluid internal resistance of the fluid supply device ^{Rs (kgsec / mm 5),} 2 two radial fluid resistance of the facing surfaces between the opposing surfaces of the gap h ₀ dependent to determined the two members between members Rp ( kgsec / mm ⁵ ), and when the fluid resistance of the discharge port is Rn (kgsec / mm ⁵ ),

When defining the function φ, h _x is substantially constant independently of h ₀ in the region of 0 <h <h _x and the envelope of the curve φ with respect to h in the region of h ₀ > h _x. The fluid discharge method according to claim 3, wherein the intersection point is a value of a value of the following part. The maximum value of the time derivative of the gap is Vmax, the average radius of the outer peripheral portion of the facing surface between the two members is r ₀ (mm), the average radius of the discharge port opening is r _i (mm), and the fluid replenishing device. When the maximum flow rate of Q is defined as Qmax,

The fluid ejection method according to claim 1, wherein: A plurality of sets of the above two members relatively moving in the gap direction by independent axial driving devices are arranged, and one set of fluid replenishing devices supplies a fluid between these two members by dividing the fluid. The method for ejecting fluid according to claim 1, wherein Each two or gaps, respectively h ₀ ≒ h _x vicinity between the opposing surfaces of the members, 0 _<h 0 <claim 9, characterized in that set in a range of h _x modulate the ejection amount Fluid ejection method. Utilizing the fact that the application surface of the substrate is geometrically symmetric, the same ejection amount per dot is periodically applied at the same time interval while the ejection nozzle and the substrate are relatively moved. The method according to claim 1, wherein the fluid is ejected intermittently. The method according to claim 1, wherein the surface to be applied is a display panel. Fluid is supplied to the opposing surfaces of the two members relatively moving in the gap direction by the fluid replenishing device, the gap between the two opposing surfaces is h (mm), and the time derivative of h is dh / dt. The average radius of the outer peripheral portion of the opposing surface between the two members is r ₀ (mm), the average radius of the discharge port opening communicating the gap with the outside is r _i (mm), and the viscosity coefficient of the fluid is μ (kgsec / mm ² ), the fluid internal resistance of the fluid supply device is Rs (kgsec / mm ⁵ ), the fluid resistance in the radial direction of the facing surface between the two members is Rp (kgsec / mm ⁵ ), and the fluid resistance of the discharge port Is Rn (kgsec / mm ⁵ ), the sum of the maximum pressure and the replenishment pressure of the fluid replenishing device is Ps0, the frequency of intermittent discharge is f (1 / sec), the primary squeeze pressure Psqu1, and the secondary squeeze pressure Psqu2. To

When the time derivative dh / dt of the gap h has the maximum value, the primary squeeze pressure Psqu1 = Psqu10, and the secondary squeeze pressure Psqu2 = Psqu20, Ps0 + Psqu10 + Psqu20 <0. The method for ejecting fluid according to claim 1. In a coating process in which coating is performed as the discharge while relatively moving a surface to be coated and a discharge nozzle communicating with the gap, the phase is approximately Δθ with respect to a displacement input signal Sh that provides a gap between two opposing surfaces. 2. The fluid discharge method according to claim 1, wherein the relative position between the application target surface and the discharge nozzle and the timing of the displacement input signal Sh are matched in consideration of the fact that the coating is performed in advance of = π / 2. The method according to claim 1, wherein the two members are relatively moved by an electromagnetic strain element. 2. The fluid discharging method according to claim 1, wherein the amplitude of the two members relatively moving in the gap direction immediately before the stop of application is larger than the amplitude at the time of steady intermittent application. By intermittently discharging the phosphor paste while relatively moving a dispenser that discharges a fluid through a gap with respect to a substrate in which independent ribs surrounded by barrier ribs are formed geometrically symmetrically, The method according to claim 1, wherein the method is a method for forming a phosphor layer of a plasma display panel, in which the phosphor paste is sequentially applied to the inside of a cell to form a phosphor layer. 18. The method according to claim 17, wherein the phosphor paste is applied by flying from the discharge nozzle in a state where the distance H between the top of the barrier rib and the tip of the discharge nozzle is 0.5 mm or more. 19. The method according to claim 18, wherein H is 1.0 mm or more. A plurality of sets of two opposing surfaces of two members relatively moving in the gap direction by independent axial driving devices are arranged, and one set of the fluid replenishing device supplies fluid between the two opposing surfaces of these two members. Each flow rate is adjusted by providing a flow compensator that can vary the fluid passage resistance in the middle of the flow path connecting the two opposing surfaces of the fluid replenishing device and the two members that move relative to each other while supplying the power by dividing the flow. The method according to claim 1, wherein the fluid ejection is performed. While the gap between the two opposing surfaces of the two members that move relative to vary the amplitude h ₁ in the coating method of intermittently applied, increasing the gap between the opposing surfaces of the two members with a large amplitude h ₂ than the amplitude h ₁ after blocking the discharge Te, the center value of the gap after interruption, to gradually equal to the center value of the gap just before blocking, according to claim 1, characterized in that a plurality of times intermittently coated with said amplitude h ₁ Fluid ejection method. When the time at the end of the (n−1) th application from the start of application is T _n−1 , the time at the start of the nth application is T _n , and the time interval ΔT = T _n −T _n−1 , the value of the above ΔT The fluid ejection method according to claim 1, wherein the application amount per dot of the n-th time is adjusted by setting the following. Two members relatively moving in the gap direction,
A discharge chamber formed by these two members,
A fluid replenishing device for supplying a fluid to the discharge chamber,
An inlet provided on the upstream side of the fluid supply device,
A fluid discharge device including a discharge port that communicates with the discharge chamber and the outside,
Fluid is intermittently discharged from a discharge port by utilizing a pressure change caused by a change in a gap formed by the two members, and a discharge amount per dot is adjusted by setting pressure and flow characteristics of the fluid supply device. A fluid discharge device characterized by the above-mentioned. The fluid pressure generated in inverse proportion to the size of the gap between the two opposing surfaces of the two members and in proportion to the time derivative of the gap is proportional to the primary squeeze pressure, the time derivative of the gap, and when the fluid pressure generated in proportion to the internal resistance of the supply device and the secondary squeeze pressure, a minimum value or average value of the gap as h _0, intermittent discharge amount per dot is to the clearance h ₀ the setting range of the gap _{h 0} in the general proportional Te _{0 <h 0 <h x,} h 0 the setting range of the gap _{h 0} where intermittent discharge amount becomes substantially constant with respect to the clearance _{h 0> h x} And h _x is the envelope of the intermittent ejection amount per dot with respect to h ₀ in the region of 0 <h ₀ <h _x , and the intermittent ejection amount per dot in the region of h ₀ > h _x part but to be a substantially constant without depending on the h ₀ When the intersection value, the fluid ejecting apparatus according to claim 23, characterized in that by setting the gap to the range of h _0> h _x intermittently discharged by the action of the secondary squeeze pressure. A fluid pressure that is inversely proportional to the size of the gap between the opposing surfaces between the two members and that is generated in proportion to the time derivative of the gap is defined as a primary squeeze pressure, is proportional to the time derivative of the gap, and when the fluid pressure generated in proportion to the internal resistance of the fluid supply device and the secondary squeeze pressure, a minimum value or a setting range of the average value h ₀ of the gap and 0 <h 0 _{<h x,} the gap h the setting range of the gap _{h 0} to be substantially constant with respect to ₀ and _h 0> _{h x,} and, _{h x} is, _{0 <h} 0 <intermittent discharge amount per the 1 dot for _{h 0} in the region of _{h x} When the intersection of the envelope of the above and the value of the portion where the intermittent ejection amount per dot is approximately constant independent of h ₀ in the region of h ₀ > h _x is defined as h ₀ ｈhx or 0 _<a h 0 <discharge amount set in the range of _{h x} Fluid ejecting apparatus according to claim 23, characterized in that the sections. A plurality of sets of the above-mentioned two members which are relatively moved in the gap direction by independent axial driving devices are arranged, and one set of the fluid replenishing device divides and supplies fluid between the opposing surfaces of these two members. 24. The fluid ejection device according to claim 23, wherein: A plurality of sets of the two members relatively moving in the gap direction by independent axial driving devices are arranged, and one set of a fluid replenishing device separates and supplies fluid to these two members. two minimum value or average value of the gap between the opposing faces of the member h ₀ ≒ h _x near or respectively, claims and adjusting the 0 <h 0 _<set in a range of h _x each discharge quantity Item 27. The fluid ejection device according to item 25. 24. The fluid discharge device according to claim 23, wherein the fluid supply device is a pump whose flow rate can be varied according to the number of rotations. 29. The fluid discharging device according to claim 28, wherein the fluid replenishing device is constituted by a thread groove pump. When the minimum value or average value of the gap between the opposing surfaces of the two members and h _0, a fluid ejecting apparatus according to claim 23, characterized in that the h _0> 0.05 mm. A sleeve for storing the shaft,
A housing for housing the shaft and the sleeve;
A device for rotating the sleeve relative to the housing;
An axial driving device that applies the axial relative displacement to the housing relative to the housing;
A discharge chamber formed by the discharge-side end surface of the shaft and the housing,
A fluid replenishing device that supplies fluid to the discharge chamber using relative rotation of the sleeve and the housing,
A suction port and a discharge port for a fluid that communicates the discharge chamber with the outside,
A fluid ejecting apparatus comprising: a device for pumping the fluid flowing into the ejection chamber to the ejection port side by the axial driving device;
Utilizing a pressure change due to the fluctuation of the gap in the discharge chamber, a continuous flow supplied from the fluid supply device is converted into an intermittent flow, and an intermittent discharge amount per dot is adjusted by setting a rotation speed. A fluid discharge device characterized by the above-mentioned. 32. The fluid discharge device according to claim 31, wherein the shaft and the sleeve have an integrated structure. An axial driving device that gives an axial relative displacement between the shaft and the housing;
A discharge chamber formed by the end surface of the shaft and the housing,
A fluid replenishing device for supplying fluid to the discharge chamber,
A flow passage communicating the discharge chamber with the fluid replenishing device;
An inlet provided in the fluid supply device;
In the fluid discharge device including the discharge chamber and a discharge port communicating the outside,
Utilizing a pressure change due to the fluctuation of the gap in the discharge chamber, the continuous flow supplied from the fluid supply device is converted into an intermittent flow, and the intermittent discharge amount per dot is changed from the number of rotations or from the flow passage. The fluid discharge device is adjusted by setting the gap in a section connected to the discharge port. 34. The fluid discharge device according to claim 33, wherein a fluid is supplied to a plurality of sets of the discharge chambers through a flow passage divided from one set of the fluid supply device. 34. The fluid discharge device according to claim 33, wherein the flow passage is a flexible pipe that is easily deformed. 24. The fluid ejection device according to claim 23, wherein the device that relatively moves the two members is an electromagnetic strain element. While relatively moving the two members in the gap direction, the fluid is supplied from the fluid replenishing device to the gap, and the cutoff and opening of the discharge are controlled using the pressure change by changing the gap, and the gap is controlled. minimum value or an average value as h _0, 0 the setting range of the gap h ₀ in the general proportional relationship to the discharge quantity Q is the gap h ₀ in the steady <h 0 _{<h x,} the discharge amount above when the setting range of the gap h ₀ to be substantially constant against the gap h ₀ with h _0> h _x, fluid discharge, characterized in that discharging by setting the gap to the range of h _0> h _x Method.

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