WO2018113168A1 - 显示面板、显示面板的制程及其应用的光罩 - Google Patents
显示面板、显示面板的制程及其应用的光罩 Download PDFInfo
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- WO2018113168A1 WO2018113168A1 PCT/CN2017/083787 CN2017083787W WO2018113168A1 WO 2018113168 A1 WO2018113168 A1 WO 2018113168A1 CN 2017083787 W CN2017083787 W CN 2017083787W WO 2018113168 A1 WO2018113168 A1 WO 2018113168A1
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- Prior art keywords
- light
- spacer
- spacers
- different
- display panel
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13396—Spacers having different sizes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70416—2.5D lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70575—Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength
Definitions
- the present application relates to the field of display technologies, and more particularly to a display panel, a process for displaying the display panel, and a photomask.
- the liquid crystal display has many advantages such as thin body, power saving, no radiation, and has been widely used.
- Most of the liquid crystal displays on the market are backlight type liquid crystal displays, which include a liquid crystal panel and a backlight module.
- the working principle of the liquid crystal panel is to place liquid crystal molecules in two parallel glass substrates, and apply a driving voltage on the two glass substrates to control the rotation direction of the liquid crystal molecules to refract the light of the backlight module to generate a picture.
- a thin film transistor liquid crystal display includes a liquid crystal panel including a color filter substrate (CF Substrate, also referred to as a color filter substrate) and a thin film transistor array substrate (Thin Film Transistor Substrate, TFT Substrate).
- CF Substrate also referred to as a color filter substrate
- TFT Substrate Thin Film Transistor Substrate
- a transparent electrode is present on the opposite inner side of the substrate.
- a layer of liquid crystal molecules (LC) is sandwiched between the two substrates.
- the liquid crystal panel controls the orientation of the liquid crystal molecules by an electric field, changes the polarization state of the light, and realizes the purpose of display by the penetration and blocking of the optical path by the polarizing plate.
- the color photoresist layer for example: R/G/B photoresist
- the light shielding layer by multiple photoresist coating, exposure and development [
- a BM (black matrix) layer also called a black matrix
- a spacer layer for example, PS (photo spacer)
- the color photoresist layer, the light shielding layer and the support layer need different processes to be completed separately, the process of the process is complicated.
- the technical problem to be solved by the present application is to provide a process for a display panel capable of saving a process.
- the present application also provides a display panel formed by the above process.
- the present application also provides a photomask for the above process.
- the present application discloses a process for displaying a display panel, the display panel includes a substrate, and the process includes the following steps:
- the respective spacers are respectively illuminated by at least two different wavelengths of light to control the photoinitiators such that the different spacers have different amounts of shrinkage.
- the photoinitiator in the step of doping the photoinitiator in the colloid of the spacer: the photoinitiator is also doped in the colloid in which the opacifier is made.
- the shade of the present application is equivalent to a light shielding layer (Black Matrix) in the display panel of the prior art, and the photoinitiator is doped in the gel for making the shade, so that when exposed to light of different wavelengths, the light is blocked.
- the substance also reacts with the photoinitiator to form a cross-linking reaction to form a shrinkage amount, thereby controlling the height of the shading.
- the step of respectively irradiating the corresponding spacers by the at least two different wavelengths of light to control the photoinitiators such that the spacers have different shrinkage amounts irradiating a mask with the same light source Filtering different wavelengths of light through the reticle.
- the same light source can be directly used, and the light source is simple, and it is not necessary to perform multiple different light sources.
- the same light source filters out different wavelengths of light, and then controls the shrinkage between different spacers by the combination of different wavelengths of light and the photoinitiator to achieve the first spacer and the second spacer. Control of the difference between the spacers.
- the spacer comprises at least two first spacers having a gap and a second spacer, the photoinitiators in each of the spacers being the same.
- the same photoinitiator is disposed in different spacers, and the different spacers generate different degrees of cross-linking reaction under different wavelengths of light, thereby making different places
- the spacers form different degrees of shrinkage, thus achieving different spacers with a gap.
- the application uses different wavelengths of light to illuminate the same photoinitiator and spacer, and controls the different spacers to produce different degrees of cross-linking reaction by the action of different wavelengths of light, thereby controlling the shrinkage of different spacers, and the control effect is good. So that the gap between the different spacers reaches the preset requirement. In addition, this is set in the production process, and it is not necessary to make different settings for different spacers, and the setting is simple.
- the light-initiating agent is disposed in the shade, the shade and the second spacer are disposed at a height, the first spacer is higher than the second spacer, and the second spacer Located between the first spacer and the shade.
- the light shielding material of the present application is equivalent to a light shielding layer (Black Matrix) in the prior art display panel, and the same light initiator is disposed in the light shield as the spacer, so that when irradiated with light of different wavelengths, The shade also produces a cross-linking reaction with the photoinitiator to form a shrinkage amount to control the height of the shade.
- first spacer is disposed higher than the second spacer and the shade
- second spacer is disposed and the shade is equal
- the second spacer is disposed between the first spacer and the shade, such that The poor control effect is better, which makes the display panel display better.
- the difference between the first spacer and the second spacer is greater than or equal to 0.5 um.
- the difference between the first spacer and the second spacer is less than 0.5 um, the display panel has a large influence and affects other processes, which increases the difficulty of the entire display panel.
- the amount of contraction between different spacers is controlled by the combination of different wavelengths of light and the photoinitiator, so that the control of the gap between the first spacer and the second spacer is greater than or equal to 0.5 um, which facilitates the whole
- the display panel is made smoothly to prevent the display panel from being affected by the limited difference.
- the spacers have different photoinitiators.
- Different photoinitiators respectively correspond to different wavelengths of light, and different wavelengths of light are respectively combined with different photoinitiators, so that different photoinitiators can generate different degrees of cross-linking with different spacers by different wavelengths of light.
- the reaction in turn, produces varying degrees of shrinkage to achieve different spacer formation gaps.
- the present application further discloses a photomask, which is applied to the process of the above display panel, and the photomask includes:
- the filter layer includes at least three filter portions, and the filter portion includes the first space a first filter portion corresponding to the spacer, a second filter portion corresponding to the second spacer, and a third filter portion corresponding to the shade, wherein the first filter portion passes only the first wavelength light The second filter portion and the third filter portion are only allowed to pass the second wavelength light;
- the light shielding layer includes a first light shielding block, a second light shielding block, a third light shielding block, and a fourth light shielding block, wherein the first light shielding portion is disposed in the first light shielding block and the second light shielding block
- the second filter portion is disposed between the second light blocking block and the third light blocking block
- the third filter portion is disposed between the third light blocking block and the fourth light blocking block;
- the carrier is permeable to light, and the filter layer and the light shielding layer are disposed on the carrier.
- the filter portion includes a metal grating for passing a predetermined wavelength.
- the metal grating filters the preset wavelength light and passes only the predetermined wavelength light to filter out other wavelengths of light to prevent other wavelengths from passing.
- the filter portion comprises a transparent medium for passing light of a predetermined wavelength.
- the transparent medium allows the predetermined wavelength of light to pass through, or the transparent medium transmits light of the same color wavelength; and absorbs other wavelengths of light to prevent other wavelengths of light from passing through, or absorbs light of other color wavelengths, preventing other color wavelengths of light.
- the filter portion comprises a metal grating for passing light of a predetermined wavelength and a transparent medium
- the metal grating is stacked on the transparent medium.
- the metal grating filters the preset wavelength light and passes only the predetermined wavelength light to filter out other wavelengths of light to prevent other wavelengths from passing.
- the transparent medium allows the predetermined wavelength of light to pass through, or the transparent medium transmits light of the same color wavelength; and absorbs other wavelengths of light to prevent other wavelengths of light from passing.
- the metal gratings are stacked on a transparent medium to ensure that the light-transmitting regions can be completely overlapped, so that the two work together, the metal grating realizes filtering and the transparent medium absorbs, so that the filtering effect is better.
- the filter portion comprises a metal grating for passing light of a predetermined wavelength and a transparent medium, and the transparent medium is stacked on the metal grating.
- the filter layer is directly disposed on the carrier, and the light shielding layer is directly disposed on the filter layer.
- the carrier acts as a carrier and the opaque layer is directly It is placed on the filter layer, which makes the shading effect of the light shielding layer better.
- the filter layer is directly disposed on the carrier, the light shielding layer is directly disposed on the carrier, and at least three of the filter portions are disposed between the light shielding layers. This is another way to set the layers of the reticle. This arrangement saves space in the filter layer and saves filter material.
- the carrier comprises a light transmissive glass substrate.
- the glass substrate plays a supporting role, and carries the first light shielding layer and the filter layer, and the light transmissive glass substrate has good light transmission effect.
- the glass substrate in the photomask of the present application can be made of quartz glass, which is easy to take.
- the carrier comprises a metal film, and the metal film is provided with a through hole for transmitting light.
- the metal film plays a supporting role and carries the first light shielding layer and the filter layer.
- the metal film has high strength and good bearing effect.
- a through hole is formed in the metal film to transmit light.
- the present application further discloses a display panel, the display panel comprising:
- a spacer disposed on the substrate, wherein the spacer is provided with a photoinitiator for controlling the amount of shrinkage of the spacer in cooperation with a predetermined wavelength of light;
- the spacer is disposed between the substrates, and the shade and the spacer are disposed in the same layer.
- the spacer comprises at least two first spacers having a gap and a second spacer, the photoinitiators in each of the spacers being the same.
- the same photoinitiator is disposed in different spacers, and the different spacers generate different degrees of cross-linking reaction under different wavelengths of light, thereby causing different spacers to form different degrees of shrinkage, thus realizing different spacers.
- the application uses different wavelengths of light to illuminate the same photoinitiator and spacer, and controls the different spacers to produce different degrees of cross-linking reaction by the action of different wavelengths of light, thereby controlling the shrinkage of different spacers, and the control effect is good. So that the gap between the different spacers reaches the preset requirement. In addition, this is set in the production process, and it is not necessary to make different settings for different spacers, and the setting is simple.
- the photoinitiator is disposed in the shade, and the shade and the second spacer are equal in height It is provided that the first spacer is higher than the second spacer, and the second spacer is located between the first spacer and the shade.
- the light shielding material of the present application is equivalent to a light shielding layer (Black Matrix) in the prior art display panel, and the same light initiator is disposed in the light shield as the spacer, so that when irradiated with light of different wavelengths, The shade also produces a cross-linking reaction with the photoinitiator to form a shrinkage amount to control the height of the shade.
- first spacer is disposed higher than the second spacer and the shade
- second spacer is disposed and the shade is equal
- the second spacer is disposed between the first spacer and the shade, such that The poor control effect is better, which makes the display panel display better.
- the difference between the first spacer and the second spacer is greater than or equal to 0.5 um.
- the difference between the first spacer and the second spacer is less than 0.5 um, the display panel has a large influence and affects other processes, which increases the difficulty of the entire display panel.
- the amount of contraction between different spacers is controlled by the combination of different wavelengths of light and the photoinitiator, so that the control of the gap between the first spacer and the second spacer is greater than or equal to 0.5 um, which facilitates the whole
- the display panel is made smoothly to prevent the display panel from being affected by the limited difference.
- the spacers have different photoinitiators.
- Different photoinitiators respectively correspond to different wavelengths of light, and different wavelengths of light are respectively combined with different photoinitiators, so that different photoinitiators can generate different degrees of cross-linking with different spacers by different wavelengths of light.
- the reaction in turn, produces varying degrees of shrinkage to achieve different spacer formation gaps.
- the spacers and the shades are disposed on the same layer of the substrate, and the spacers and the shades are simultaneously processed in the same process, thereby saving the manufacturing process of the display panel.
- the present application also provides a photoinitiator in the colloid of the spacer, the photoinitiator is used to cooperate with the predetermined wavelength of light, and the irradiation of the predetermined wavelength light causes a difference between the photoinitiator and the different spacers.
- Cross-linking reaction Specifically, the irradiation of different wavelengths of light causes different crosslinking reactions between the photoinitiator and the different spacers, thereby causing different amounts of shrinkage between different spacers, thereby controlling the gap between the spacers. Within the appropriate range, the gap between the individual spacers is adapted to various design requirements.
- FIG. 1 is a partial structural schematic view of a display panel of the present application
- FIG. 2 is a partial structural schematic view of a display panel according to an embodiment of the present application.
- FIG. 3 is a partial structural schematic view of a display panel according to an embodiment of the present application.
- FIG. 4 is a partial schematic view showing a process of a display panel according to an embodiment of the present application.
- FIG. 5 is a flow chart of a process of a display panel according to an embodiment of the present application.
- FIG. 6 is a flow chart of a process of a display panel according to an embodiment of the present application.
- FIG. 7 is a flow chart of a process of a display panel according to an embodiment of the present application.
- FIG. 8 is a flow chart of a process of a display panel according to an embodiment of the present application.
- FIG. 9 is a schematic structural view of a photomask according to an embodiment of the present application.
- first and second are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, features defining “first” and “second” may include one or more of the features either explicitly or implicitly.
- a plurality means two or more unless otherwise stated.
- the term “comprises” and its variations are intended to cover a non-exclusive inclusion.
- FIG. 1 is a partial structural diagram of a display panel of the present application. Specifically, a plurality of spacers are disposed on the same layer of the substrate 11 of the display panel 10 .
- spacers and shades can be simultaneously provided in the process of the display panel 10. In this way, the manufacturing process of the existing display panel saves the process, and the process of the display panel is simple.
- the gap between the different spacers is limited, and generally the difference between the different spacers is less than 0.5 um.
- the height difference between the height H11 of the first spacer 12 and the height H12 of the second spacer 13 is less than 0.5 um.
- an embodiment of the present application discloses a display panel, which includes a substrate 110, a spacer 120, and a light shield 130.
- the spacer 120 is disposed.
- a spacer 120 is disposed in the spacer 120 for mating with a predetermined wavelength of light.
- the photoinitiator 140 that controls the amount of shrinkage of the spacer 120; the spacer 120 is disposed between the substrates 110, and the opacifier 130 and the spacer 120 are disposed in the same layer.
- FIG. 4 is a partial process diagram of a process of displaying a panel according to an embodiment of the present application.
- the display panel of the embodiment of the present application places the spacer 120 and the light shielding 130 on the same layer of the substrate 110, so that during the process of the display panel 100, the spacers 120 and the shades can be simultaneously processed in one process. 130, this saves the manufacturing process of the display panel 100.
- an embodiment of the present application further provides a photoinitiator 140 in the spacer 120.
- the photoinitiator 140 is used to cooperate with a predetermined wavelength of light, and the photoinitiator and the different spacers are irradiated by the predetermined wavelength of light.
- a different cross-linking reaction occurs between 120.
- the irradiation of different wavelengths of light causes different crosslinking reactions between the photoinitiator 140 and the different spacers 120, thereby causing different amounts of shrinkage between the different spacers 120, thereby controlling the spacing between the spacers 120.
- the tolerances are within a suitable range such that the difference between the individual spacers 120 is suitable for various design requirements.
- an embodiment of the present application not only reduces the manufacturing process of the display panel, but also conveniently controls the amount of shrinkage of different spacers, thereby further facilitating control of the gap between the different spacers, that is, controlling the height between the spacers.
- the spacer 120 includes at least two first spacers 121 and second spacers 122 having a gap, and the photoinitiators in each of the spacers 120 are the same. .
- the same photoinitiator is disposed in different spacers, and the different spacers generate different degrees of cross-linking reaction under different wavelengths of light, thereby causing different spacers to form different degrees of shrinkage, thus realizing different spacers.
- An embodiment of the present application uses different wavelengths of light to illuminate the same photoinitiator and spacer, and controls the different spacers to produce different degrees of cross-linking reaction by the action of different wavelengths of light, thereby controlling the shrinkage of different spacers.
- the control effect is good, so that the gap between different spacers reaches the preset requirement. In addition, this is set in the production process, and it is not necessary to make different settings for different spacers, and the setting is simple.
- the light-initiating agent 140 is disposed in the light-shielding body 130.
- the light-shielding material 130 in one embodiment of the present application is equivalent to a light-shielding layer (Black Matrix) in the prior art display panel.
- the light-initiator 140 is disposed in the shade 130 so as to be disposed in the spacer 120, so that when exposed to light of different wavelengths, the light-shielding 130 also reacts with the photo-initiator 140 to form a shrinkage amount, thereby controlling The shade 130 height.
- the shade 130 and the second spacer 122 are disposed at equal height, the first spacer is higher than the second spacer, and the second spacer is located at the first spacer and the shade between.
- the first spacer 121 is disposed higher than the second spacer 122 and the shade 130
- the second spacer 122 is disposed to be equal to the shade 130
- the first spacer 121 and the second spacer 122 are disposed.
- the height control of the shade 130 is better, that is, the control effect on the gap is better, so that the display effect of the display panel is better.
- the difference between the first spacer 121 and the second spacer 122 is greater than or equal to 0.5 um, specifically, the height H1 of the first spacer 121 and the second spacer.
- the height difference between the heights H2 of 122 is greater than or equal to 0.5 um.
- the display panel has a large influence and affects other processes, which increases the difficulty of the entire display panel.
- the present application controls the amount of shrinkage between different spacers by the cooperation of different wavelengths of light and the photoinitiator 140, so that the control of the difference between the first spacer 121 and the second spacer 122 is greater than or equal to 0.5 um.
- the difference between the first spacer 121 and the second spacer 122 is 0.5 um to 0.6 um, that is, the difference between H1 and H2 is 0.5 um to 0.6 um. .
- the same photoinitiator is added to the spacer and the shading, and the different spacers and the shading can generate different degrees of shrinkage by irradiation of light of different wavelengths.
- an embodiment of the present application may also adopt other methods:
- the photoinitiator in each of the spacers is different.
- Different photoinitiators respectively correspond to different wavelengths of light, and different wavelengths of light are respectively combined with different photoinitiators, so that different photoinitiators can generate different degrees of cross-linking with different spacers by different wavelengths of light.
- the reaction in turn, produces varying degrees of shrinkage to achieve different spacer formation gaps.
- the photoinitiator in each of the spacers and the shade is different.
- Different photoinitiators respectively correspond to different wavelengths of light, and different wavelengths of light are respectively combined with different photoinitiators, so that different photoinitiators are generated with different wavelengths and shades by different wavelengths of light.
- the cross-linking reaction in turn, produces varying degrees of shrinkage to control the height of the different spacers and shades.
- the spacer 120 and the light shield 130 are all made of the same material, so that the process is more convenient in the process of the display panel. Further, an embodiment of the present application may select a BCS (Black Color Filter Spacer) material for the spacer and the light shielding material, and the material not only functions as a support but also has good light shielding performance. Of course, it should be noted that other materials may be used for the spacers and the shades in an embodiment of the present application.
- BCS Black Color Filter Spacer
- an embodiment of the present application discloses a process for displaying a display panel.
- the display panel 100 includes a substrate 110 , and the process includes the following steps:
- the respective spacers 120 are respectively illuminated by at least two different wavelengths of light to control the photoinitiator 140 such that the different spacers 120 have different amounts of shrinkage.
- FIG. 4 is a partial process diagram of a display panel process according to an embodiment of the present application
- FIG. 5 is a flow chart of a display panel process according to an embodiment of the present application.
- the process of the display panel according to an embodiment of the present application includes step S101, step S102, and step S103.
- step S101 the photoinitiator 140 is doped in the colloid of the spacer 120.
- Step S102 coating the colloid on the substrate 110 to form a spacer, and providing the shade 130 on the same layer.
- Step S103 respectively irradiating corresponding spacers by at least two different wavelengths of light to control the photoinitiators such that different spacers have different shrinkage amounts.
- FIG. 6 is a flowchart of another display panel process according to an embodiment of the present invention.
- the process of the display panel according to an embodiment of the present application includes step S201, step S202, and step S203.
- step S201 the photoinitiator 140 is doped in the colloid of the spacer 120, and the photoinitiator is doped in the colloid in which the opacifier is made.
- Step S202 coating a colloid for forming a spacer on the substrate 110 to form a spacer 120, and coating a colloid for forming a shading on the substrate 110 to form a shade 130.
- Step S203 respectively irradiating corresponding spacers and shades by at least two different wavelengths of light to control the photoinitiators such that different spacers and shades have different shrinkage amounts.
- FIG. 7 is a flowchart of a display panel process according to an embodiment of the present application.
- the process of the display panel of the embodiment of the present application includes step S301 , step S302 , and step S303 .
- step S301 the photoinitiator 140 is doped in the colloid of the spacer 120.
- Step S302 coating a colloid for forming a spacer on the substrate 110 to form a spacer 120.
- Step S303 illuminating corresponding spacers by using at least two different wavelengths of light, specifically, illuminating a reticle with the same light source 300, filtering out light of different wavelengths through the reticle to control the light start
- the agents cause different spacers to have different amounts of shrinkage.
- the reticle in the process of displaying the panel in an embodiment of the present application can be seen in FIG. 9 .
- the same light source 300 can be directly used, and the use of the light source is simple, and it is not necessary to perform multiple different light source illuminations.
- the same light source filters out different wavelengths of light, and then controls the shrinkage between different spacers by the combination of different wavelengths of light and the photoinitiator to achieve the first spacer and the first spacer. The control of the difference between the two spacers.
- the light source 300 emits a first set of light rays L1.
- the first set of light rays L1 has a plurality of light beams of different wavelengths, which are irradiated onto the photomask 200.
- the photomask 200 filters the first set of light rays L1 and passes through the light.
- the second group of light rays L2 of the cover 200 has two different wavelengths, and two different wavelengths of light are respectively irradiated onto the first spacers 121 and the second spacers 122 by the light of two different wavelengths, thereby making the first spacers
- the photoinitiator 140 in the 121 and second spacers 122 produces varying degrees of crosslinking reaction, which in turn produces varying degrees of shrinkage.
- FIG. 8 is a flowchart of a display panel process according to an embodiment of the present invention.
- the process of the display panel of the embodiment of the present application includes steps S401, S402, and S403.
- step S401 the photoinitiator 140 is doped in the colloid of the spacer 120, and the photoinitiator is doped in the colloid in which the opacifier is made.
- Step S402 coating a colloid for forming a spacer on the substrate 110 to form a spacer 120, and coating a colloid for forming a shading on the substrate 110 to form a shade 130.
- Step S403 illuminating the corresponding spacers by using at least two different wavelengths of light, specifically, illuminating a reticle 200 with the same light source 300, and filtering the light of different wavelengths through the reticle 200 to control the
- the photoinitiator allows different spacers to have different amounts of shrinkage.
- the reticle in the process of displaying the panel in an embodiment of the present application can be seen in FIG. 9 .
- the same light source 300 can be directly used, and the use of the light source is simple, and it is not necessary to perform multiple different light source illuminations.
- the same light source filters out different wavelengths of light, and then controls the shrinkage between different spacers and the shade by the cooperation of different wavelengths of light and the photoinitiator to achieve the first interval. Control of the difference between the object and the second spacer, and control of the height of the shade.
- the light source 300 emits a first set of light rays L1.
- the first set of light rays L1 has a plurality of light beams of different wavelengths, which are irradiated onto the photomask 200.
- the photomask 200 filters the first set of light rays L1 and passes through the light.
- the second group of light rays L2 of the cover 200 has two different wavelengths, and two different wavelengths of light are respectively irradiated onto the first spacers 121 and the second spacers 122 by the light of two different wavelengths, thereby making the first spacers
- the photoinitiator 140 in the 121 and second spacers 122 produces varying degrees of crosslinking reaction, which in turn produces varying degrees of shrinkage.
- one wavelength of light is irradiated onto the first spacer 121; the other wavelength of light is irradiated onto the second spacer and the shade, so that in the case where the spacer and the shade are made of the same material, the second spacer and The shade can be contoured.
- the spacer 120 and the light shielding material 130 are all made of the same material, that is, the spacer and the light shielding material can adopt the same colloid, so that the manufacturing process is simpler in the process of the display panel.
- an embodiment of the present application may select a spacer and a shade to select a BCS (Black Color filter). Spacer, black color filter spacer) material, which not only plays a supporting role, but also has good shading performance.
- BCS Black Color filter
- the spacer 120 and the light shielding 130 are disposed on the same layer of the substrate 110, so that during the manufacturing process of the display panel 100, as shown in FIG.
- the spacer 120 and the light shield 130 are simultaneously processed in the middle, thereby saving the manufacturing process of the display panel 100.
- a photoinitiator 140 is disposed in the spacer 120.
- the photoinitiator 140 is configured to cooperate with a predetermined wavelength of light, and the photoinitiator and the different spacers 120 are irradiated by the predetermined wavelength of light. Different cross-linking reactions occur between them. Specifically, the irradiation of different wavelengths of light causes different crosslinking reactions between the photoinitiator 140 and the different spacers 120, thereby causing different amounts of shrinkage between the different spacers 120, thereby controlling the spacing between the spacers 120.
- the tolerances are within a suitable range such that the difference between the individual spacers 120 is suitable for various design requirements.
- an embodiment of the present application not only reduces the manufacturing process of the display panel, but also conveniently controls the amount of shrinkage of different spacers, thereby further facilitating control of the gap between the different spacers, that is, controlling the height between the spacers.
- the process of the display panel is simple, and the display effect of the display panel is better.
- the difference between the first spacer 121 and the second spacer 122 is greater than or equal to 0.5 um by illumination of light of different wavelengths, specifically, the first spacer
- the height difference between the height H1 of 121 and the height H2 of the second spacer 122 is greater than or equal to 0.5 um.
- the display panel has a large influence and affects other processes, which increases the difficulty of the entire display panel.
- the present application controls the amount of shrinkage between different spacers by the cooperation of different wavelengths of light and the photoinitiator 140, so that the control of the difference between the first spacer 121 and the second spacer 122 is greater than or equal to 0.5 um. It is convenient to make the entire display panel smooth, and to prevent the display effect of the display panel from being affected by the limited difference.
- An optional option of an embodiment of the present application is that the difference between the first spacer 121 and the second spacer 122 is 0.5 um to 0.6 um, that is, the difference between H1 and H2 is 0.5 um to 0.6 um. .
- the first spacer 121 is disposed higher than the second spacer 122 and the shade 130, and the second spacer 122 is disposed equal to the shade 130, and the first spacer 121 and the second spacer
- the height control of the object 122 and the shade 130 is better, that is, the control effect on the gap is better, and the display effect of the display panel is better.
- an embodiment of the present disclosure discloses a reticle 200.
- the reticle 200 is applied to the process of the display panel described above.
- the reticle 200 includes:
- the filter layer 220 includes at least three filter portions, and the filter portion includes a first filter portion 221 corresponding to the first spacer and a second spacer 122 a second filter portion 222 and a third filter portion corresponding to the shade 130, wherein the first filter portion 221 is only allowed to pass light of a first wavelength, and the second filter portion 222 and the third filter portion Only the second wavelength of light passes;
- the light shielding layer 230 includes at least four light shielding blocks, and specifically includes a first light shielding block 231, a second light shielding block 232, a third light shielding block 233, and a fourth light shielding block 234, the first light filtering layer
- the portion 221 is disposed between the first light blocking block 231 and the second light blocking block 232
- the second filter portion 222 is disposed between the second light blocking block 232 and the third light blocking block 233
- the third a filter portion is disposed between the third light blocking block 233 and the fourth light blocking block 234;
- the carrier 210 is permeable to light, and the filter layer 220 and the light shielding layer 230 are disposed on the carrier 210.
- the carrier comprises a transparent glass substrate, that is to say, the carrier is directly supported by the glass substrate, the glass substrate plays a supporting role, and the light shielding layer and the filter layer are carried, and the transparent glass substrate has good light transmission effect.
- the glass substrate in the photomask of the present application can be made of quartz glass, which is easy to take.
- the carrier may also be carried by other means, for example, the carrier comprises a metal film, that is, the carrier is carried by a metal film, and the metal film is provided with a through hole for light transmission.
- the metal film plays a supporting role and carries the first light shielding layer and the filter layer.
- the metal film has high strength and good bearing effect.
- a through hole is formed in the metal film to transmit light.
- the light shielding layer is disposed on the filter layer, so that the setting effect is good, and the shading effect of the light shielding layer is made Better.
- the light shielding layer of the present application can also be directly disposed on the carrier, that is, the light shielding layer and the filter layer are directly disposed on the carrier, so that the arrangement can save the space occupied by the filter layer and save the filter layer. material.
- the filter portion includes a metal grating for passing a predetermined wavelength, wherein the metal grating filters the predetermined wavelength light and passes only the predetermined wavelength light to filter out other wavelengths of light to prevent other wavelengths from passing.
- the filter portion of the embodiment is not limited to the metal grating, and may further include a transparent medium for the predetermined wavelength of light to pass through, the transparent medium allows the predetermined wavelength of light to pass through, or the transparent medium allows the light of the same color wavelength to pass through.
- the other wavelengths of light are absorbed to prevent other wavelengths of light from passing through, or to absorb light of other color wavelengths, preventing the transmission of light of other color wavelengths.
- the filter portion includes the metal grating and the transparent medium
- the two are stacked, and in this embodiment, the metal grating is stacked on the transparent medium.
- the metal gratings are stacked on a transparent medium to ensure that the light-transmitting regions can be completely overlapped, so that the two work together, the metal grating realizes filtering and the transparent medium absorbs, so that the filtering effect is better.
- the material of the metal grating may be nickel or other materials; wherein the material of the transparent medium may be PMMA (Polymethyl Methacrylate) or other materials.
- PMMA Polymethyl Methacrylate
- the present application also discloses a display device, wherein the display device includes a display panel and a backlight module produced by the above display panel process, and the display device may be a liquid crystal display or an OLED display.
- the display device of the embodiment of the present application is a liquid crystal display
- the backlight module can be used as a light source for supplying sufficient light source with uniform brightness and uniform distribution.
- the backlight module of the embodiment may be front light type or In the backlight mode, it should be noted that the backlight module of the embodiment is not limited thereto.
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Abstract
一种显示面板(100)、显示面板(100)的制程及光罩(200),其中,显示面板(100)的制程包括以下步骤:在制作间隔物(120)的胶体内掺杂光起始剂(140);将胶体涂布在基板(110)上形成间隔物(120),并在同一层设置遮光物(130);通过至少两种不同的波长光线分别照射对应的间隔物(120),以控制光起始剂(140)使得不同间隔物(120)具有不同的收缩量。
Description
本申请涉及显示技术领域,更具体的说,涉及一种显示面板、显示面板的制程及光罩。
液晶显示器具有机身薄、省电、无辐射等众多优点,得到了广泛的应用。现有市场上的液晶显示器大部分为背光型液晶显示器,其包括液晶面板及背光模组(Backlight Module)。液晶面板的工作原理是在两片平行的玻璃基板当中放置液晶分子,并在两片玻璃基板上施加驱动电压来控制液晶分子的旋转方向,以将背光模组的光线折射出来产生画面。
其中,薄膜晶体管液晶显示器(Thin Film Transistor-Liquid Crystal Display,TFT-LCD)由于具有低的功耗、优异的画面品质以及较高的生产良率等性能,目前已经逐渐占据了显示领域的主导地位。同样,薄膜晶体管液晶显示器包含液晶面板和背光模组,液晶面板包括彩膜基板(Color Filter Substrate,CF Substrate,也称彩色滤光片基板)和薄膜晶体管阵列基板(Thin Film Transistor Substrate,TFT Substrate),上述基板的相对内侧存在透明电极。两片基板之间夹一层液晶分子(Liquid Crystal,LC)。液晶面板是通过电场对液晶分子取向的控制,改变光的偏振状态,并藉由偏光板实现光路的穿透与阻挡,实现显示的目的。
现有液晶面板的制程过程中,如在彩膜基板的制程中,需要通过多次光阻涂布、曝光、显影完成彩色光阻层(例如:R/G/B光阻)、遮光层[例如:BM(black matrix)层,也称黑矩阵]及间隔层[例如:PS(photo spacer)光阻)]等形成彩膜基板成品。由于彩色光阻层、遮光层及支撑层等需要不同的工艺分别完成,其制程过程复杂。
【发明内容】
本申请所要解决的技术问题是提供一种能够节省制程工艺的显示面板的制程。
此外,本申请还提供一种通过以上制程所形成的显示面板。
另外,本申请还提供一种用于以上制程的光罩。
本申请的目的是通过以下技术方案来实现的:
根据本申请的一个方面,本申请公开了一种显示面板的制程,所述显示面板包括基板,所述制程包括以下步骤:
在所述制作间隔物的胶体内掺杂光起始剂;
将胶体涂布在所述基板上形成间隔物,并在同一层设置遮光物;
通过至少两种不同的波长光线分别照射对应的间隔物,以控制所述光起始剂使得不同所述间隔物具有不同的收缩量。
其中,在所述在制作间隔物的胶体内掺杂光起始剂的步骤中:还在制作遮光物的胶体内掺杂所述光起始剂。本申请的遮光物相当于现有技术显示面板中的遮光层(BM层,Black Matrix),在制作遮光物的胶体内掺杂所述光起始剂,这样在受到不同波长光线照射时,遮光物同样和光起始剂产生交联反应,形成收缩量,以此来控制遮光物高度。
其中,在所述通过至少两种不同的波长光线分别照射对应的间隔物,以控制所述光起始剂使得不同所述间隔物具有不同的收缩量的步骤中:采用同一光源照射一光罩,通过所述光罩过滤出不同波长的光线。这样在显示面板的制程中,就可以直接采用同一光源,使用光源简单,无需进行多次不同光源照射。同一光源在光罩滤光的作用下,过滤出不同波长光线,进而通过不同波长光线与光起始剂的配合作用来控制不同间隔物之间的收缩量,实现对第一间隔物和第二间隔物之间断差的控制。
其中,所述间隔物包括至少两个具有断差的第一间隔物和第二间隔物,每个所述间隔物内的光起始剂相同。在不同间隔物内设置相同的光起始剂,在不同波长光线照射下使得不同间隔物产生不同程度的交联反应,进而使得不同间
隔物形成不同程度的收缩量,这样就实现了不同间隔物具有断差。本申请采用不同波长光线照射相同的光起始剂和间隔物上,通过不同波长光线的作用来控制不同间隔物产生不同程度的交联反应,进而控制不同间隔物的收缩量,其控制效果好,使得不同间隔物之间的断差达到预设的需求。另外,这样设置在生产工艺上,无需对不同的间隔物进行不同的设置,其设置简单。
其中,所述遮光物内设置有所述光起始剂,所述遮光物和第二间隔物等高设置,所述第一间隔物高于所述第二间隔物,所述第二间隔物位于所述第一间隔物和遮光物之间。本申请的遮光物相当于现有技术显示面板中的遮光层(BM层,Black Matrix),在遮光物内设置与间隔物内设置相同的光起始剂,这样在受到不同波长光线照射时,遮光物同样和光起始剂产生交联反应,形成收缩量,以此来控制遮光物高度。并且将第一间隔物设置高于第二间隔物及遮光物,将第二间隔物设置和遮光物等高,以及将第二间隔物设置在第一间隔物和遮光物之间,这样对断差的控制效果更好,使得显示面板的显示效果更好。
其中,所述第一间隔物和第二间隔物之间的断差值大于或等于0.5um。当第一间隔物和第二间隔物之间的断差值小于0.5um时,对显示面板的显示影响大,并影响其他制程,增加了整个显示面板的难度。本申请通过不同波长光线与光起始剂的配合作用来控制不同间隔物之间的收缩量,实现对第一间隔物和第二间隔物之间断差的控制大于或等于0.5um,就方便整个显示面板制成顺利,防止因断差值有限而影响显示面板的显示效果。
其中,至少有两个所述间隔物内的光起始剂不同。不同的光起始剂分别对应不同波长光线,通过不同波长光线分别与不同光起始剂配合,从而通过不同波长光线的照射,使得不同光起始剂分别与不同间隔物产生不同程度的交联反应,进而产生不同程度的收缩量,以实现不同间隔物形成断差。
根据本申请的另一个方面,本申请还公开了一种光罩,所述光罩应用于以上所述显示面板的制程,所述光罩包括:
滤光层,所述滤光层包括至少三个滤光部,所述滤光部包括与所述第一间
隔物对应的第一滤光部、与所述第二间隔物对应的第二滤光部及与遮光物对应的第三滤光部,所述第一滤光部仅供第一波长光线通过,所述第二滤光部和第三滤光部仅供第二波长光线通过;
遮光层,所述遮光层包括有第一遮光块、第二遮光块、第三遮光块及第四遮光块,所述第一滤光部设置在所述第一遮光块和第二遮光块之间,所述第二滤光部设置在所述第二遮光块和第三遮光块之间,所述第三滤光部设置在所述第三遮光块和第四遮光块之间;
载体,所述载体可透光设置,所述滤光层和遮光层设置在所述载体上。
其中,所述滤光部包括有供预设波长通过的金属光栅。金属光栅对预设波长光线进行过滤,仅由预设波长光线通过,以过滤掉其他波长光线,防止其他波长光线通过。
其中,所述滤光部包括有供预设波长光线通过的透明介质。透明介质使得预设波长光线通过,或者说透明介质让与其同色波长的光透过;而将其他波长光线吸收,防止其他波长光线通过,或者说是吸收其他颜色波长的光,防止其他颜色波长光透过。
其中,所述滤光部包括有供预设波长光线通过的金属光栅和透明介质,所述金属光栅叠放到所述透明介质上。金属光栅对预设波长光线进行过滤,仅由预设波长光线通过,以过滤掉其他波长光线,防止其他波长光线通过。透明介质使得预设波长光线通过,或者说透明介质让与其同色波长的光透过;而将其他波长光线吸收,防止其他波长光线通过。在此将金属光栅叠放到透明介质上,以确保透光区域可以完全重叠,使其两者共同作用,金属光栅实现过滤以及透明介质实现吸收,这样就使得滤光效果更佳。
其中,所述滤光部包括有供预设波长光线通过的金属光栅和透明介质,所述透明介质叠放到所述金属光栅上。
其中,所述滤光层直接设置在所述载体上,所述遮光层直接设置在所述滤光层上。这是设置光罩各层的一种具体方式,载体起到承载作用,遮光层直接
设置在滤光层上,这样就使得遮光层的遮光效果更佳。
所述滤光层直接设置在所述载体上,所述遮光层直接设置在所述载体上,至少三个所述滤光部间隔设置在所述遮光层之间。这是设置光罩各层的又一种方式,这样设置可以节省滤光层的占用空间、节省滤光层材料。
其中,所述载体包括透光的玻璃基板。玻璃基板起到支撑作用,承载第一遮光层及过滤层,透光的玻璃基板透光效果好。而且本申请光罩中的玻璃基板可以采用石英玻璃,这样取材简便。
其中,所述载体包括金属膜,所述金属膜上设置有用于透光的通孔。金属膜起到支撑作用,承载第一遮光层及过滤层,金属膜强度大,承载效果好。另外,金属膜上设置通孔以便透光。
根据本申请的又一个方面,本申请还公开了一种显示面板,所述显示面板包括:
基板;
间隔物,所述间隔物设置在所述基板上,所述间隔物内设置有用于与预设波长光线配合的、控制所述间隔物收缩量的光起始剂;
遮光物,所述间隔物设置在所述基板之间,且所述遮光物和间隔物设置在同一层。
其中,所述间隔物包括至少两个具有断差的第一间隔物和第二间隔物,每个所述间隔物内的光起始剂相同。在不同间隔物内设置相同的光起始剂,在不同波长光线照射下使得不同间隔物产生不同程度的交联反应,进而使得不同间隔物形成不同程度的收缩量,这样就实现了不同间隔物具有断差。本申请采用不同波长光线照射相同的光起始剂和间隔物上,通过不同波长光线的作用来控制不同间隔物产生不同程度的交联反应,进而控制不同间隔物的收缩量,其控制效果好,使得不同间隔物之间的断差达到预设的需求。另外,这样设置在生产工艺上,无需对不同的间隔物进行不同的设置,其设置简单。
其中,所述遮光物内设置有所述光起始剂,所述遮光物和第二间隔物等高
设置,所述第一间隔物高于所述第二间隔物,所述第二间隔物位于所述第一间隔物和遮光物之间。本申请的遮光物相当于现有技术显示面板中的遮光层(BM层,Black Matrix),在遮光物内设置与间隔物内设置相同的光起始剂,这样在受到不同波长光线照射时,遮光物同样和光起始剂产生交联反应,形成收缩量,以此来控制遮光物高度。并且将第一间隔物设置高于第二间隔物及遮光物,将第二间隔物设置和遮光物等高,以及将第二间隔物设置在第一间隔物和遮光物之间,这样对断差的控制效果更好,使得显示面板的显示效果更好。
其中,所述第一间隔物和第二间隔物之间的断差值大于或等于0.5um。当第一间隔物和第二间隔物之间的断差值小于0.5um时,对显示面板的显示影响大,并影响其他制程,增加了整个显示面板的难度。本申请通过不同波长光线与光起始剂的配合作用来控制不同间隔物之间的收缩量,实现对第一间隔物和第二间隔物之间断差的控制大于或等于0.5um,就方便整个显示面板制成顺利,防止因断差值有限而影响显示面板的显示效果。
其中,至少有两个所述间隔物内的光起始剂不同。不同的光起始剂分别对应不同波长光线,通过不同波长光线分别与不同光起始剂配合,从而通过不同波长光线的照射,使得不同光起始剂分别与不同间隔物产生不同程度的交联反应,进而产生不同程度的收缩量,以实现不同间隔物形成断差。
在本申请显示面板的制程中,将间隔物和遮光物设置在基板的同一层上,并在同一个制程中同时加工出间隔物及遮光物,这样就节省了显示面板的制程工艺。
另外,本申请还在间隔物的胶体内设置光起始剂,光起始剂用于与预设波长光线配合,通过预设波长光线的照射使得光起始剂和不同间隔物之间产生不同的交联反应。具体是通过不同波长光线的照射使得光起始剂和不同间隔物之间产生不同的交联反应,进而使得不同的间隔物之间的收缩量不同,从而控制各个间隔物之间的断差在合适范围内,使得各个间隔物之间的断差适合各种设计要求。
图1是本申请一种显示面板的部分结构示意图;
图2是本申请一个实施例显示面板的部分结构示意图;
图3是本申请一个实施例显示面板的部分结构示意图;
图4是本申请一个实施例显示面板的制程的部分过程示意图;
图5是本申请一个实施例显示面板的制程的流程图;
图6是本申请一个实施例显示面板的制程的流程图;
图7是本申请一个实施例显示面板的制程的流程图;
图8是本申请一个实施例显示面板的制程的流程图;
图9是本申请一个实施例光罩的结构示意图。
这里所公开的具体结构和功能细节仅仅是代表性的,并且是用于描述本申请的示例性实施例的目的。但是本申请可以通过许多替换形式来具体实现,并且不应当被解释成仅仅受限于这里所阐述的实施例。
在本申请的描述中,需要理解的是,术语“中心”、“横向”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中,除非另有说明,“多个”的含义是两个或两个以上。另外,术语“包括”及其任何变形,意图在于覆盖不排他的包含。
在本申请的描述中,需要说明的是,除非另有明确的规定和限定,术语“安
装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本申请中的具体含义。
这里所使用的术语仅仅是为了描述具体实施例而不意图限制示例性实施例。除非上下文明确地另有所指,否则这里所使用的单数形式“一个”、“一项”还意图包括复数。还应当理解的是,这里所使用的术语“包括”和/或“包含”规定所陈述的特征、整数、步骤、操作、单元和/或组件的存在,而不排除存在或添加一个或更多其他特征、整数、步骤、操作、单元、组件和/或其组合。
下面参考图1至图9描述本申请的显示面板、显示面板的制程、显示装置及光罩。
申请人已设计了一种显示面板,如图1所示,图1为本申请一种显示面板的部分结构示意图,具体的,显示面板10的基板11的同一层上设置有多个间隔物和遮光物14,其中间隔物有第一间隔物12、第二间隔物13。从而,显示面板10的制程中就可以同时设置间隔物和遮光物。这样相比现有显示面板的制程工艺就节省了制程过程,使得显示面板的制程简单。
但是,在显示面板的实际制程过程中,申请人发现不同间隔物之间的断差有限,一般不同间隔物之间的断差值小于0.5um。具体的是,第一间隔物12的高度H11和第二间隔物13的高度H12的高度差小于0.5um。从而导致在显示面板的制程中,对第一间隔物12的高度H11、第二间隔物13的高度H12及遮光物14的高度H13的控制有限。
为此,申请人又设计了另外的技术方案,以解决以上技术问题,具体如下:
下面结合附图2至9和较佳的实施例对本申请作进一步详细说明。
根据本申请一实施例,如图2和图3所示,本申请一实施例公开了一种显示面板,所述显示面板包括基板110、间隔物120和遮光物130,所述间隔物120设置在所述基板110上,所述间隔物120内设置有用于与预设波长光线配合的、
控制所述间隔物120收缩量的光起始剂140;所述间隔物120设置在所述基板110之间,且所述遮光物130和间隔物120设置在同一层。
结合图4,图4为本申请一实施例显示面板制程的部分过程图。
本申请一实施例的显示面板将间隔物120和遮光物130设置在基板110的同一层上,从而在显示面板100的制程过程中,就可以在一个制程中同时加工出间隔物120及遮光物130,这样就节省了显示面板100的制程工艺。
另外,本申请一实施例还在间隔物120内设置光起始剂140,光起始剂140用于与预设波长光线配合,通过预设波长光线的照射使得光起始剂和不同间隔物120之间产生不同的交联反应。具体是通过不同波长光线的照射使得光起始剂140和不同间隔物120之间产生不同的交联反应,进而使得不同的间隔物120之间的收缩量不同,从而控制各个间隔物120之间的断差在合适范围内,使得各个间隔物120之间的断差适合各种设计要求。
这样本申请一实施例不仅减少了显示面板的制程,而且还方便控制不同间隔物的收缩量,进而更加便于控制不同间隔物之间的断差,也就是控制各个间隔物之间的高度。
在本申请一实施例中,具体的,所述间隔物120包括至少两个具有断差的第一间隔物121和第二间隔物122,每个所述间隔物120内的光起始剂相同。在不同间隔物内设置相同的光起始剂,在不同波长光线照射下使得不同间隔物产生不同程度的交联反应,进而使得不同间隔物形成不同程度的收缩量,这样就实现了不同间隔物具有断差。本申请一实施例采用不同波长光线照射相同的光起始剂和间隔物上,通过不同波长光线的作用来控制不同间隔物产生不同程度的交联反应,进而控制不同间隔物的收缩量,其控制效果好,使得不同间隔物之间的断差达到预设的需求。另外,这样设置在生产工艺上,无需对不同的间隔物进行不同的设置,其设置简单。
进一步的,所述遮光物130内设置有所述光起始剂140,本申请一实施例的遮光物130相当于现有技术显示面板中的遮光层(BM层,Black Matrix),在
遮光物130内设置与间隔物120内设置相同的光起始剂140,这样在受到不同波长光线照射时,遮光物130同样和光起始剂140产生交联反应,形成收缩量,以此来控制遮光物130高度。
更进一步的,所述遮光物130和第二间隔物122等高设置,所述第一间隔物高于所述第二间隔物,所述第二间隔物位于所述第一间隔物和遮光物之间。本申请一实施例将第一间隔物121设置高于第二间隔物122及遮光物130,将第二间隔物122设置和遮光物130等高,第一间隔物121、第二间隔物122及遮光物130的高度控制更好,也就是对断差的控制效果更好,使得显示面板的显示效果更好。
在本申请一实施例中,所述第一间隔物121和第二间隔物122之间的断差值大于或等于0.5um,具体的是,第一间隔物121的高度H1和第二间隔物122的高度H2之间的高度差大于或等于0.5um。当第一间隔物121和第二间隔物122之间的断差值小于0.5um时,对显示面板的显示影响大,并影响其他制程,增加了整个显示面板的难度。本申请通过不同波长光线与光起始剂140的配合作用来控制不同间隔物之间的收缩量,实现对第一间隔物121和第二间隔物122之间断差的控制大于或等于0.5um,就方便整个显示面板制成顺利,防止因断差值有限而影响显示面板的显示效果。本申请一实施例的可选选择是第一间隔物121和第二间隔物122之间的断差值为0.5um至0.6um,也就是H1和H2之间的差值为0.5um至0.6um。
本申请一实施例的更可选方式是在间隔物及遮光物中加入同样的光起始剂,通过不同波长光线的照射即可使得不同间隔物及遮光物产生不同程度的收缩量。然而,需要说明的是,本申请一实施例还可以采用其他方式:
比如:每个所述间隔物内的光起始剂不同。不同的光起始剂分别对应不同波长光线,通过不同波长光线分别与不同光起始剂配合,从而通过不同波长光线的照射,使得不同光起始剂分别与不同间隔物产生不同程度的交联反应,进而产生不同程度的收缩量,以实现不同间隔物形成断差。
比如:每个所述间隔物及遮光物内的光起始剂都不同。不同的光起始剂分别对应不同波长光线,通过不同波长光线分别与不同光起始剂配合,从而通过不同波长光线的照射,使得不同光起始剂分别与不同间隔物及遮光物产生不同程度的交联反应,进而产生不同程度的收缩量,以控制不同间隔物、遮光物的高度。
其中,在本申请一实施例中,间隔物120和遮光物130都采用相同的材料,这样在显示面板的制程中,使得制程更加简便。进一步的,本申请一实施例可选将间隔物和遮光物选择BCS(Black Color filter Spacer,黑色彩色滤光片间隔物)材料,该材料不仅能够起到支撑的作用,而且其遮光性能好。当然,需要说明的是,本申请一实施例中的间隔物和遮光物还可以采用其他材料。
如图4至图8所示,本申请一实施例公开了一种显示面板的制程,结合图2和图3,其中,所述显示面板100包括基板110,所述制程包括以下步骤:
在制作间隔物120的胶体内掺杂光起始剂140;
将胶体涂布在基板110上形成间隔物120,并在同一层设置遮光物130;
通过至少两种不同的波长光线分别照射对应的间隔物120,以控制所述光起始剂140使得不同所述间隔物120具有不同的收缩量。
图4为本申请一实施例显示面板制程的部分过程图,图5为本申请一实施例一种显示面板制程的流程图。
如图5所示,结合图4,本申请一实施例显示面板的制程包括步骤S101、步骤S102和步骤S103。
具体的,步骤S101:在制作间隔物120的胶体内掺杂光起始剂140。
步骤S102:将胶体涂布在基板110上形成间隔物,并在同一层设置遮光物130。
步骤S103:通过至少两种不同的波长光线分别照射对应的间隔物,以控制所述光起始剂使得不同所述间隔物具有不同的收缩量。
如图6所示,图6为本申请一实施例另一种显示面板制程的流程图,结合图4,本申请一实施例显示面板的制程包括步骤S201、步骤S202和步骤S203。
具体的,步骤S201:在制作间隔物120的胶体内掺杂光起始剂140,以及在制作遮光物的胶体内掺杂所述光起始剂。
步骤S202:将用于制作间隔物的胶体涂布在基板110上形成间隔物120,以及将用于制作遮光物的胶体涂布在基板110上形成遮光物130。
步骤S203:通过至少两种不同的波长光线分别照射对应的间隔物和遮光物,以控制所述光起始剂使得不同所述间隔物和遮光物具有不同的收缩量。
如图7所示,图7为本申请一实施例又一种显示面板制程的流程图,结合图4,本申请一实施例显示面板的制程包括步骤S301、步骤S302和步骤S303。
具体的,步骤S301:在制作间隔物120的胶体内掺杂光起始剂140。
步骤S302:将用于制作间隔物的胶体涂布在基板110上形成间隔物120。
步骤S303:通过至少两种不同的波长光线分别照射对应的间隔物,具体的是,采用同一光源300照射一光罩,通过所述光罩过滤出不同波长的光线,以控制所述光起始剂使得不同所述间隔物具有不同的收缩量。
其中,本申请一实施例显示面板制程中的光罩可参见图9。
这样在显示面板的制程中,就可以直接采用同一光源300,使用光源简单,无需进行多次不同光源照射。同一光源在光罩200滤光的作用下,过滤出不同波长光线,进而通过不同波长光线与光起始剂的配合作用来控制不同间隔物之间的收缩量,实现对第一间隔物和第二间隔物之间断差的控制。
更具体的是,光源300发出第一组光线L1,第一组光线L1具有多个不同波长的光线,其照射到光罩200上,光罩200对第一组光线L1进行过滤,穿过光罩200的第二组光线L2具有两个不同波长,通过两个不同波长的光线,两个不同波长的光线分别照射到第一间隔物121和第二间隔物122上,从而使得第一间隔物121及第二间隔物122内的光起始剂140产生不同程度的交联反应,进而产生不同程度的收缩量。
如图8所示,图8为本申请一实施例又一种显示面板制程的流程图,结合图4,本申请一实施例显示面板的制程包括步骤S401、步骤S402和步骤S403。
具体的,步骤S401:在制作间隔物120的胶体内掺杂光起始剂140,以及在制作遮光物的胶体内掺杂所述光起始剂。
步骤S402:将用于制作间隔物的胶体涂布在基板110上形成间隔物120,以及将用于制作遮光物的胶体涂布在基板110上形成遮光物130。
步骤S403:通过至少两种不同的波长光线分别照射对应的间隔物遮光物,具体的是,采用同一光源300照射一光罩200,通过所述光罩200过滤出不同波长的光线,以控制所述光起始剂使得不同所述间隔物具有不同的收缩量。
其中,本申请一实施例显示面板制程中的光罩可参见图9。
这样在显示面板的制程中,就可以直接采用同一光源300,使用光源简单,无需进行多次不同光源照射。同一光源在光罩200滤光的作用下,过滤出不同波长光线,进而通过不同波长光线与光起始剂的配合作用来控制不同间隔物及遮光物之间的收缩量,实现对第一间隔物和第二间隔物之间断差的控制,以及对遮光物高度的控制。
更具体的是,光源300发出第一组光线L1,第一组光线L1具有多个不同波长的光线,其照射到光罩200上,光罩200对第一组光线L1进行过滤,穿过光罩200的第二组光线L2具有两个不同波长,通过两个不同波长的光线,两个不同波长的光线分别照射到第一间隔物121和第二间隔物122上,从而使得第一间隔物121及第二间隔物122内的光起始剂140产生不同程度的交联反应,进而产生不同程度的收缩量。其中,一个波长的光线照射到第一间隔物121上;另一个波长的光线照射到第二间隔物和遮光物上,从而在间隔物和遮光物采用相同材料的情况下,第二间隔物和遮光物可以等高。
其中,间隔物120和遮光物130都采用相同的材料,也就是间隔物和遮光物可以采用相同的胶体,这样在显示面板的制程中,使得制程更加简便。进一步的,本申请一实施例可选将间隔物和遮光物选择BCS(Black Color filter
Spacer,黑色彩色滤光片间隔物)材料,该材料不仅能够起到支撑的作用,而且其遮光性能好。当然,需要说明的是,本申请一实施例中的间隔物和遮光物还可以采用其他材料,比如:。。。
在本申请一实施例的显示面板制程中,将间隔物120和遮光物130设置在基板110的同一层上,从而在显示面板100的制程过程中,如图4所示,就可以在一个制程中同时加工出间隔物120及遮光物130,这样就节省了显示面板100的制程工艺。
另外,本申请一实施例在间隔物120内设置光起始剂140,光起始剂140用于与预设波长光线配合,通过预设波长光线的照射使得光起始剂和不同间隔物120之间产生不同的交联反应。具体是通过不同波长光线的照射使得光起始剂140和不同间隔物120之间产生不同的交联反应,进而使得不同的间隔物120之间的收缩量不同,从而控制各个间隔物120之间的断差在合适范围内,使得各个间隔物120之间的断差适合各种设计要求。
这样本申请一实施例不仅减少了显示面板的制程,而且还方便控制不同间隔物的收缩量,进而更加便于控制不同间隔物之间的断差,也就是控制各个间隔物之间的高度。使得显示面板的制程简单,显示面板的显示效果更好。
在本申请显示面板的制程中,通过不同波长光线的照射,使得所述第一间隔物121和第二间隔物122之间的断差值大于或等于0.5um,具体的是,第一间隔物121的高度H1和第二间隔物122的高度H2之间的高度差大于或等于0.5um。当第一间隔物121和第二间隔物122之间的断差值小于0.5um时,对显示面板的显示影响大,并影响其他制程,增加了整个显示面板的难度。本申请通过不同波长光线与光起始剂140的配合作用来控制不同间隔物之间的收缩量,实现对第一间隔物121和第二间隔物122之间断差的控制大于或等于0.5um,就方便整个显示面板制成顺利,防止因断差值有限而影响显示面板的显示效果。本申请一实施例的可选选择是第一间隔物121和第二间隔物122之间的断差值为0.5um至0.6um,也就是H1和H2之间的差值为0.5um至0.6um。
进一步的,本申请一实施例将第一间隔物121设置高于第二间隔物122及遮光物130,将第二间隔物122设置和遮光物130等高,第一间隔物121、第二间隔物122及遮光物130的高度控制更好,也就是对断差的控制效果更好,使得显示面板的显示效果更好。
如图9所示,本申请一实施例公开了一种光罩200,所述光罩200应用于以上所述显示面板的制程,结合图2至图8,所述光罩200包括:
滤光层220,所述滤光层220包括至少三个滤光部,所述滤光部包括与所述第一间隔物应的第一滤光部221、与所述第二间隔物122对应的第二滤光部222及与遮光物130对应的第三滤光部,所述第一滤光部221仅供第一波长光线通过,所述第二滤光部222和第三滤光部仅供第二波长光线通过;
遮光层230,所述遮光层230包括有至少四个遮光块,具体包括有第一遮光块231、第二遮光块232、第三遮光块233及第四遮光块234,所述第一滤光部221设置在所述第一遮光块231和第二遮光块232之间,所述第二滤光部222设置在所述第二遮光块232和第三遮光块233之间,所述第三滤光部设置在所述第三遮光块233和第四遮光块234之间;
载体210,所述载体210可透光设置,所述滤光层220和遮光层230设置在所述载体210上。
其中,所述载体包括透明的玻璃基板,也就是说载体直接使用玻璃基板来进行支撑,玻璃基板起到支撑作用,承载遮光层及滤光层,透明的玻璃基板透光效果好。而且本申请光罩中的玻璃基板可以采用石英玻璃,这样取材简便。然而,所述载体也可以采用其他进行承载,比如:所述载体包括金属膜,也就是载体用金属膜进行承载,所述金属膜上设置有用于透光的通孔。金属膜起到支撑作用,承载第一遮光层及过滤层,金属膜强度大,承载效果好。另外,金属膜上设置通孔以便透光。
其中,遮光层设置在滤光层上,这样设置效果好,使得遮光层的遮光效果
更佳。当然,需要说明的是,本申请的遮光层也可以直接设置在载体上,也就是遮光层和滤光层都直接设置到载体上,这样设置可以节省滤光层的占用空间、节省滤光层材料。
所述滤光部包括有供预设波长通过的金属光栅,其中,金属光栅对预设波长光线进行过滤,仅由预设波长光线通过,以过滤掉其他波长光线,防止其他波长光线通过。需要说明的是,本实施例滤光部并不限于金属光栅,还可以包括供预设波长光线通过的透明介质,透明介质使得预设波长光线通过,或者说透明介质让与其同色波长的光透过;而将其他波长光线吸收,防止其他波长光线通过,或者说是吸收其他颜色波长的光,防止其他颜色波长光透过。进一步的,当滤光部包括金属光栅和透明介质时,两者叠放设置,本实施例可选方式是金属光栅叠放到透明介质上。在此将金属光栅叠放到透明介质上,以确保透光区域可以完全重叠,使其两者共同作用,金属光栅实现过滤以及透明介质实现吸收,这样就使得滤光效果更佳。其中,金属光栅的材质可以有镍或其他材料;其中,透明介质的材料可以有PMMA(Polymethyl Methacrylate,聚甲基丙烯酸甲酯)或其他材料。当然,需要说明的是,将透明介质叠放到金属光栅上也可以。
本申请还公开了一种显示装置,其中所述显示装置包括通过以上显示面板制程生产的显示面板以及背光模组,该显示装置可以为液晶显示器,也可以为OLED显示器。其中,当本本申请实施例的显示装置为液晶显示器时,背光模组可作为光源,用于供应充足的亮度与分布均匀的光源,本实施例的背光模组可以为前光式,也可以为背光式,需要说明的是,本实施例的背光模组并不限于此。
以上内容是结合具体的可选实施方式对本申请所作的进一步详细说明,不能认定本申请的具体实施只局限于这些说明。对于本申请所属技术领域的普通
技术人员来说,在不脱离本申请构思的前提下,还可以做出若干简单推演或替换,都应当视为属于本申请的保护范围。
Claims (16)
- 一种显示面板的制程,所述显示面板包括基板,所述制程包括以下步骤:在制作间隔物的胶体内掺杂光起始剂;将胶体涂布在基板上形成间隔物,并在同一层设置遮光物;通过至少两种不同的波长光线分别照射对应的所述间隔物,以控制所述光起始剂使得不同所述间隔物具有不同的收缩量;在所述在制作间隔物的胶体内掺杂光起始剂的步骤包括:还在制作遮光物的胶体内掺杂所述光起始剂;在所述通过至少两种不同的波长光线分别照射对应的间隔物,以控制所述光起始剂使得不同所述间隔物具有不同的收缩量的步骤包括:采用同一光源照射一光罩,通过所述光罩过滤出不同波长的光线;所述间隔物包括至少两个具有断差的第一间隔物和第二间隔物,每个所述间隔物内的光起始剂相同;所述遮光物内设置有所述光起始剂,所述遮光物和第二间隔物等高设置,所述第一间隔物高于所述第二间隔物,所述第二间隔物位于所述第一间隔物和遮光物之间;所述第一间隔物和第二间隔物之间的断差值大于或等于0.5um。
- 一种显示面板的制程,所述显示面板包括基板,所述制程包括以下步骤:在制作间隔物的胶体内掺杂光起始剂;将胶体涂布在基板上形成间隔物,并在同一层设置遮光物;通过至少两种不同的波长光线分别照射对应的所述间隔物,以控制所述光起始剂使得不同所述间隔物具有不同的收缩量。
- 如权利要求2所述的显示面板的制程,其中,在所述在制作间隔物的胶体内掺杂光起始剂的步骤包括:还在制作遮光物的胶体内掺杂所述光起始剂。
- 如权利要求2所述的显示面板的制程,其中,在所述通过至少两种不同的波长光线分别照射对应的间隔物,以控制所述光起始剂使得不同所述间隔物 具有不同的收缩量的步骤包括:采用同一光源照射一光罩,通过所述光罩过滤出不同波长的光线。
- 如权利要求2所述的显示面板,其中,所述间隔物包括至少两个具有断差的第一间隔物和第二间隔物,每个所述间隔物内的光起始剂相同。
- 如权利要求5所述的显示面板的制程,其中,所述遮光物内设置有所述光起始剂,所述遮光物和第二间隔物等高设置,所述第一间隔物高于所述第二间隔物,所述第二间隔物位于所述第一间隔物和遮光物之间。
- 如权利要求5所述的显示面板的制程,其中,所述第一间隔物和第二间隔物之间的断差值大于或等于0.5um。
- 如权利要求2所述的显示面板的制程,其中,至少有两个所述间隔物内的光起始剂不同。
- 一种应用于显示面板制程的光罩,包括:滤光层,所述滤光层包括至少三个滤光部,所述滤光部包括与所述第一间隔物对应的第一滤光部、与所述第二间隔物对应的第二滤光部及与遮光物对应的第三滤光部,所述第一滤光部仅供第一波长光线通过,所述第二滤光部和第三滤光部仅供第二波长光线通过;遮光层,所述遮光层包括有第一遮光块、第二遮光块、第三遮光块及第四遮光块,所述第一滤光部设置在所述第一遮光块和第二遮光块之间,所述第二滤光部设置在所述第二遮光块和第三遮光块之间,所述第三滤光部设置在所述第三遮光块和第四遮光块之间;载体,所述载体可透光设置,所述滤光层和遮光层设置在所述载体上。
- 如权利要求9所述的光罩,其中,所述滤光部包括有供预设波长通过的金属光栅。
- 如权利要求9所述的光罩,其中,所述滤光部包括有供预设波长光线通过的透明介质。
- 如权利要求9所述的光罩,其中,所述滤光部包括有供预设波长光线 通过的金属光栅和透明介质,所述金属光栅叠放到所述透明介质上。
- 如权利要求9所述的光罩,其中,所述滤光部包括有供预设波长光线通过的金属光栅和透明介质,所述透明介质叠放到所述金属光栅上。
- 如权利要求9所述的光罩,其中,所述滤光层直接设置在所述载体上,所述遮光层直接设置在所述滤光层上。
- 如权利要求9所述的光罩,其中,所述滤光层直接设置在所述载体上,所述遮光层直接设置在所述载体上,至少三个所述滤光部间隔设置在多个所述遮光层之间。
- 如权利要求9所述的光罩,其中,所述载体包括透光的玻璃基板。
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| CN202025167U (zh) * | 2011-03-22 | 2011-11-02 | 京东方科技集团股份有限公司 | 彩膜基板 |
| CN105182679B (zh) * | 2015-10-19 | 2020-04-21 | 京东方科技集团股份有限公司 | 掩膜板及其制作方法、利用掩膜板构图的方法、滤光片 |
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2016
- 2016-12-20 CN CN201611194904.8A patent/CN106773345B/zh active Active
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2017
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- 2017-05-10 WO PCT/CN2017/083787 patent/WO2018113168A1/zh not_active Ceased
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| JP2005091853A (ja) * | 2003-09-18 | 2005-04-07 | Toppan Printing Co Ltd | 感光性組成物およびそれを用いて形成したフォトスペーサを有するカラーフィルタ |
| CN101373323A (zh) * | 2007-08-22 | 2009-02-25 | Hoya株式会社 | 光掩模和光掩模的制造方法 |
| CN101398612A (zh) * | 2007-09-29 | 2009-04-01 | Hoya株式会社 | 光掩膜及光掩膜的制造方法、以及图案转印方法 |
| CN106054531A (zh) * | 2016-07-18 | 2016-10-26 | 深圳市华星光电技术有限公司 | 正性黑色光阻材料的制备方法及显示基板的制作方法 |
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| CN106125391A (zh) * | 2016-08-27 | 2016-11-16 | 深圳市华星光电技术有限公司 | 显示面板及显示装置 |
| CN106526948A (zh) * | 2016-11-09 | 2017-03-22 | 惠科股份有限公司 | 一种应用于显示面板制程的光罩 |
Also Published As
| Publication number | Publication date |
|---|---|
| US11644744B2 (en) | 2023-05-09 |
| CN106773345A (zh) | 2017-05-31 |
| US20210124255A1 (en) | 2021-04-29 |
| CN106773345B (zh) | 2019-12-24 |
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