WO2018097446A1 - Dispositif de fixation de vis pour carte sonde et dispositif d'assemblage de carte sonde comprenant ce dernier - Google Patents

Dispositif de fixation de vis pour carte sonde et dispositif d'assemblage de carte sonde comprenant ce dernier Download PDF

Info

Publication number
WO2018097446A1
WO2018097446A1 PCT/KR2017/007729 KR2017007729W WO2018097446A1 WO 2018097446 A1 WO2018097446 A1 WO 2018097446A1 KR 2017007729 W KR2017007729 W KR 2017007729W WO 2018097446 A1 WO2018097446 A1 WO 2018097446A1
Authority
WO
WIPO (PCT)
Prior art keywords
driving
probe card
unit
driving unit
same direction
Prior art date
Application number
PCT/KR2017/007729
Other languages
English (en)
Korean (ko)
Inventor
이재환
윤민환
구황섭
김현제
정희석
Original Assignee
주식회사 기가레인
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020170050959A external-priority patent/KR102227072B1/ko
Application filed by 주식회사 기가레인 filed Critical 주식회사 기가레인
Priority to CN201780072383.5A priority Critical patent/CN109983347B/zh
Publication of WO2018097446A1 publication Critical patent/WO2018097446A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer

Definitions

  • the present invention relates to a screw fastening device for a probe card and a probe card assembling device having the same, and more particularly, a screw fastening device for a probe card for fastening the screws used in the assembly of the probe card and a probe card assembly having the same Relates to a device.
  • a probe card electrically connects a wafer and a semiconductor device inspection device to test a semiconductor device for defects at the wafer level, and transmits an electrical signal of the inspection device to a pad formed on the wafer, and returns from the pad.
  • the probe card is assembled by using a plurality of screws. Recently, the size and weight of the probe card are increasing, and the size and weight increase are concentrated in the conventional manner, and the weight of the probe card is not distributed when the screws are sequentially tightened. There is a problem of concentrated load that is assembled inclined to the concentrated portion.
  • This problem is also a problem that some of the pads formed on the wafer does not contact the probe card is not properly tested.
  • the present invention has been made in order to solve the above-mentioned conventional problems, the screw fastening device for the probe card for solving the problem of the concentrated load through the simultaneous assembly of the screw rather than the sequential assembly of the conventional method and the assembly of the probe card having the same It is an object to provide a device.
  • the present invention for achieving the above object, a plurality of screws fastened to the probe card; A plurality of fastening parts contacting the plurality of screws and rotating together with the plurality of screws; And a plurality of driving units for transmitting rotational force to the plurality of fastening units, wherein the plurality of driving units are interlocked with each other when at least one of the plurality of driving units rotates to rotate in the same direction.
  • the plurality of drive unit of the present invention the first drive unit; And a second driving part spaced apart from the first driving part, and an interlocking part transferring a rotational force of the first driving part to the second driving part so that the first driving part and the second driving part rotate forward in the same direction. It is characterized by including.
  • the plurality of driving units of the present invention includes a plurality of auxiliary driving units that rotate in the same direction in association with the plurality of driving units, wherein the plurality of auxiliary driving units, when at least one of the plurality of auxiliary driving units rotates It is linked to rotate in the same direction.
  • the plurality of auxiliary driving unit of the present invention the first auxiliary driving unit; And a second auxiliary driving part spaced apart from the first auxiliary driving part, wherein the rotational force of the first auxiliary driving part is rotated to the second auxiliary driving part so that the first auxiliary driving part and the second auxiliary driving part are rotated forward in the same direction.
  • It characterized in that it comprises a linking unit for transmitting.
  • the linkage portion of the present invention is composed of a gear, the linkage portion is characterized in that the first drive and the second drive disposed on both sides in the reverse direction to reverse rotation in the same direction.
  • the linkage part of the present invention is configured as a timing belt, and the linkage part may be rotated forward in the same direction so that the first drive part and the second drive part disposed on both sides in the same direction.
  • the present invention includes a first rotation guide of a circular shape, which is installed to rotate to be engaged with the outer periphery of the second drive unit, the tooth is formed on the inner peripheral surface, the first rotation guide is interlocked with the second drive unit in the same direction Rotate to.
  • the present invention includes a second rotation guide of a circular shape is installed to be engaged to the outer periphery of the second auxiliary drive unit, the tooth shape is formed on the inner peripheral surface, the second rotation guide is interlocked with the second auxiliary drive unit It is characterized by rotating in the same direction.
  • the fastening part and the driving part of the present invention are disposed with a driving part supporting plate interposed therebetween, and the fastening part and the driving part are coupled to a connecting rod passing through the driving part supporting plate, and are rotated in the same direction.
  • the diameter of the auxiliary drive unit of the present invention is characterized in that it is formed smaller or larger than the diameter of the drive unit.
  • the drive unit of the present invention the first drive unit; A second driver spaced apart from the first driver; And a third driving part spaced apart from the second driving part, wherein the first driving part and the second driving part are configured to transmit a rotational force of the first driving part to the second driving part so as to rotate forward in the same direction. 1 linkage; And a second interlocking part configured to transmit a rotational force of the second driving part to the third driving part so that the second driving part and the third driving part rotate forward in the same direction.
  • the second driving part includes: A first gear part configured of a gear in contact with the first linkage part; And a second gear part configured of a gear in contact with the second interlocking part.
  • the fastening portion of the present invention the tubular body portion coupled to the lower portion of the drive unit; A protruding contact portion coupled to a lower portion of the body portion; And a spring inserted into the body part, one end of which is supported by the body part and the other end of which is in contact with the other end of the contact part so that the contact part has elasticity.
  • a probe card assembling apparatus comprising a screw fastening device for a probe card according to claim 1, comprising: a stage unit, wherein the probe card includes a plurality of probe pins, a space converter, and a PCB; The part may include a first space in which the plurality of probe pins are spaced apart from a bottom; A second space in which the space transformer is mounted; And a third space formed between the space converter and the PCB.
  • the third space portion of the present invention is characterized in that the inlet port is connected to the vacuum pump is formed.
  • the third space portion of the present invention is characterized in that the horizontal cross section has a circular shape, is formed smaller than the diameter of the PCB so that the PCB is mounted on the top is sealed.
  • a first sealing member is interposed on a mounting surface on which the space transducer of the second space part is mounted, and a second sealing member is interposed on a mounting surface on which the PCB is mounted.
  • a probe card assembling apparatus comprising the screw fastening device for a probe card according to claim 1, comprising: a lift driver; the lift driver comprising: a lever rotatably installed; A ball screw rotated according to the rotation of the lever; And an elevating link for converting the rotation of the ball screw into elevating drive.
  • the elevating link of the present invention a pair of transfer blocks are respectively installed on both ends of the ball screw is moved in the opposite direction by the rotation distance is stretched apart; A pair of cross bars installed by the lower end hinged to the pair of transfer blocks so as to cross each other from above; And a fixed table configured to hinge-couple the upper ends of the pair of crossing bars to maintain a constant distance between the upper ends of the pair of crossing bars.
  • the present invention is installed on the lower portion of the elevating drive unit so that the elevating drive unit is separated from the base base for supporting the floor; And a guide part installed in the vertical longitudinal direction on the base part to support the screw fastening device for the probe card.
  • the present invention provides an effect that can solve the concentrated load generated during the sequential fastening by simultaneously tightening the screws for assembling the probe card rather than sequential fastening.
  • the first rotation guide rotates in conjunction with the second driving unit and the fifth driving unit, thereby providing an effect that the fastening unit rotates at the same interval even when any one of the driving units is damaged.
  • the second rotation guide like the first rotation guide, rotates in association with the plurality of second auxiliary driving units and the third auxiliary driving unit, and provides an effect that the fastening unit rotates at the same interval even when any one of the auxiliary driving units is damaged. do.
  • the fastening part Provides the effect of continuing to rotate at equal intervals.
  • the second driving unit, the third driving unit and the fourth driving unit provide an effect of allowing the plurality of interlocking units to interlock at the same time through the first gear unit and the second gear unit.
  • the contact portions are elastically supported so that a part of the contact portions do not contact the screws, thereby providing an effect of contacting all the plurality of screws.
  • stage portion increases the flatness of the assembly of the probe card, and provides the effect that the assembly of the probe card can be made convenient by using the lifting drive.
  • FIG. 1 is a block diagram showing a screw fastening device for a probe card according to an embodiment of the present invention and a probe card assembly device having the same.
  • Figure 2 is an exploded perspective view showing a screw fastening device for a probe card according to an embodiment of the present invention.
  • Figure 3 is a block diagram showing a fastening portion of the screw fastening device for a probe card according to an embodiment of the present invention.
  • Figure 4 is a cut perspective view showing a probe card assembly apparatus according to an embodiment of the present invention.
  • FIG. 5 is a configuration diagram showing the operation of the screw fastening device for a probe card according to an embodiment of the present invention.
  • Figure 6 is a block diagram showing the operation of the screw fastening device for a probe card according to an embodiment of the present invention.
  • Figure 7 is a block diagram showing a drive unit of the screw fastening device for a probe card according to an embodiment of the present invention.
  • FIG. 8 is a block diagram showing a drive unit of the screw fastening device for a probe card according to an embodiment of the present invention.
  • Figure 9 is an exploded perspective view of the probe card assembly apparatus according to an embodiment of the present invention.
  • FIG. 10 is a perspective view showing a stage of the probe card assembly apparatus according to an embodiment of the present invention.
  • FIG. 11 is a block diagram showing the lifting drive unit of the probe card assembly apparatus according to an embodiment of the present invention.
  • fastening portion 120 drive unit support plate
  • driving unit 140 auxiliary driving unit
  • connecting rod 180 cover part
  • handle portion 510 stage portion
  • the elevating drive unit 530 the base unit
  • the screw fastening device 100 for a probe card for fastening a plurality of screws simultaneously to a probe card includes a fastening part 110, a driving part support plate 120, The driver 130, the auxiliary driver 140, the interlocking part 150, the cover part 180, and the handle part 190 are included.
  • the fastening part 110 is a fastening means which contacts a plurality of screws fastened to the probe card and rotates together with the plurality of screws. As shown in FIG. 3, the body part 111, the contact part 112, and the spring 113 are provided. It includes.
  • the body part 111 is a cylindrical structure, and receives the rotational force from the drive part 130 and rotates in the same direction as the drive part 130.
  • the contact portion 112 is a protruding fastening member coupled to the lower portion of the body portion 111 and contacts the screw fastened to the probe card to transmit the rotational force transmitted from the body portion 111 to the screw.
  • Spring 113 is an elastic member inserted into the body portion 111, one end is supported by the body portion 111 and the other end is in contact with the other end of the contact portion 112 so that the contact portion 112 has elasticity. .
  • the contact portion 112 is elastic and all the plurality of screws There is an effect of contact.
  • the driving unit support plate 120 is a supporting member that supports the lower portion of the driving unit 130 and the auxiliary driving unit 140. As shown in FIG. 4, a surface where the driving unit 130 and the auxiliary driving unit 140 contact each other is formed of a flat plate.
  • the first driving unit support plate 121 supporting the lower portion of the driving unit 130 and the second driving unit support plate 122 supporting the lower portion of the auxiliary driving unit 140 are included.
  • the driving unit support plate 120 is provided with a plurality of connection holes 123 for connecting between the fastening unit 110 and the driving unit 130, the driving unit 130, and the auxiliary driving unit 140.
  • the fastening unit 110, the driving unit 130, and the auxiliary driving unit 140 are coupled to the connecting rod 170 penetrating through the connecting hole 123 and rotated in the same direction.
  • a bearing may be installed between the connecting hole 123 and the connecting rod 170 to smoothly rotate the connecting rod 170.
  • the driving unit 130 is a plurality of driving means for transmitting rotational force to the plurality of fastening units 110. When at least one of the plurality of driving units 130 rotates, the driving unit 130 interlocks with each other and rotates in the same direction. As shown in FIG. 6, the first driver 131, the second driver 132, the third driver 133, the fourth driver 134, and the fifth driver 135 are included.
  • the interlocking portion 150 is installed as a medium for transmitting rotational force so that the plurality of driving units 130 can interlock with each other, and the interlocking portion 150 is formed of a first interlocking portion 151 composed of gears and a timing belt. And a linkage 152.
  • the first driving unit 131 is a gear installed to interlock with the handle unit 190 among the plurality of driving units, and transmits the rotational force transmitted from the handle unit 190 to the plurality of second driving units 132.
  • the first driving unit 131 may obtain a rotational force through a power source that generates a rotational force, such as a motor, in addition to the handle unit 190 that obtains the rotational force by turning the handle by the operator's force.
  • a power source that generates a rotational force, such as a motor
  • the first driver 131 is not a gear that is interpreted only as a gear disposed at the center of the plurality of drivers 130, and receives a rotational force from the handle 190 and transmits the rotational force to the plurality of second drivers 132. It is preferred to be interpreted.
  • the second drive unit 132 is a gear spaced apart from the first drive unit 131 so as to be interlocked with each other. As shown in FIG. 7, the second drive unit 132 is configured to rotate the rotational force by the first link unit 151 formed of a gear from the first drive unit 131. The transmission is rotated in the same direction as the first driving unit 131.
  • the first interlocking part 151 rotates in the opposite direction so that the first driving part 131 and the second driving part 132 installed on both sides rotate forward in the same direction.
  • the third drive unit 133 is a gear spaced apart from the second drive unit 132 so as to be interlocked with each other. As shown in FIG. 8, the rotational force is driven by the second link unit 152 formed of a timing belt from the second drive unit 132. Received to rotate in the same direction as the second drive unit 132.
  • the second linking unit 152 rotates forward in the same direction so that the second driving unit 132 and the third driving unit 133 installed on both sides rotate forward in the same direction.
  • the fourth driving unit 134 is a gear installed to be interlocked with the third driving unit 133 and receives rotational force from the third driving unit 133 by the second interlocking unit 152 in the same direction as the third driving unit 133. Will rotate.
  • the fifth driving unit 135 is a gear installed to be interlocked with the fourth driving unit 134 and receives rotational force from the fourth driving unit 134 by the second interlocking unit 152 in the same direction as the fourth driving unit 134. Will rotate.
  • the second driving unit 132, the third driving unit 133, and the fourth driving unit 134 include a first gear unit 130a and a second gear unit 130b to be in contact with the plurality of interlocking units 150. .
  • the first gear unit 130a is a gear in contact with the first linkage unit 151
  • the second gear unit 130b is a gear in contact with the second linkage unit 152.
  • the first gear part 130a and the second gear part 130b are separately installed in a vertical position so as to be in contact with the plurality of interlocking parts 150 or to be provided with portions where the plurality of interlocking parts 150 contact each other. It may be divided into a first gear part 130a and a second gear part 130b according to a portion which is formed to be in contact with a large height.
  • the second driving unit 132, the third driving unit 133, and the fourth driving unit 134 simultaneously link the plurality of interlocking units 150 through the first gear unit 130a and the second gear unit 130b. You can do it.
  • the present invention proposes the auxiliary driving unit 140 and the rotation guide 160 for reinterlocking the rotational force as a solving means.
  • the auxiliary driving unit 140 is a plurality of auxiliary driving means for re-linking the rotational force to the plurality of driving units 130.
  • the auxiliary driving unit 140 rotates in the same direction.
  • the first auxiliary driving unit 141, the second auxiliary driving unit 142, and the third auxiliary driving unit 143 are included.
  • the first auxiliary driving unit 141 is a gear installed to be coupled to the connecting rod together with the first driving unit 131 among the plurality of auxiliary driving units so as to rotate in the same direction in association with the first driving unit 131.
  • the transmitted rotational force is transmitted to the plurality of auxiliary driving units 140.
  • the second auxiliary driving unit 142 is a gear spaced apart from the first auxiliary driving unit 141 and receives a rotational force by the first interlocking unit 151 configured as a gear from the first auxiliary driving unit 141.
  • the auxiliary driving unit 141 rotates in the same direction.
  • the second auxiliary driving unit 142 is coupled to the connecting rod 170 together with the third driving unit 133 to be interlocked with the third driving unit 133 to rotate in the same direction.
  • the third auxiliary driving unit 143 is a gear spaced apart from the second auxiliary driving unit 142 and is coupled to the connecting rod 170 together with the fourth driving unit 134 to rotate in the same direction as the fourth driving unit 134. .
  • the diameter of the auxiliary driving unit 140 may be smaller or larger than the diameter of the driving unit 130.
  • the auxiliary driving unit 140 does not cause damage at the same position, so that the fastening unit 110 continues to rotate at the same interval.
  • the rotation guide 160 includes a first rotation guide 161 for reinterlocking the rotational force of the driving unit 130 and a second rotation guide 162 for reinterlocking the rotational force of the auxiliary driving unit 140.
  • the first rotation guide 161 is installed to be engaged with the outer circumferences of the second driving unit 132 and the fifth driving unit 135 to rotate, and is a circular rotation guide having teeth formed on an inner circumferential surface thereof.
  • the first rotation guide 161 rotates in the same direction in association with the second driving unit 132 and the fifth driving unit 135.
  • the first rotation guide 161 receives the rotational force transmitted in the order of the first driving unit 131, the second driving unit 132, the third driving unit 133, the fourth driving unit 134, and the fifth driving unit 135.
  • the rotational force is re-interlocked by rotating together with the second driver 132 and the plurality of fifth drivers 135.
  • the third driving unit 133, the fourth driving unit 134, and the fifth driving unit 135 have normal rotational force. It is rotated slower than the normal drive unit 130 because it is rotated by receiving the lost rotational force is not received.
  • the second driving unit 132 that rotates by receiving the normal rotational force and the first rotation guide 161 that receives the rotational force from the second driving unit 132 and the fifth driving unit 135 to receive the rotational force reversely lost.
  • the first rotation guide 161 rotates in conjunction with the plurality of second driving units 132 and the plurality of fifth driving units 135 while the coupling unit 110 is damaged even when any one of the driving units 130 is damaged. Has the effect of rotating at equal intervals.
  • the second rotation guide 162 is installed to be engaged with the outer circumferences of the second auxiliary driving part 142 and the third auxiliary driving part 143 to rotate, and is a circular rotation guide having teeth formed on an inner circumferential surface thereof.
  • the second rotation guide 162 rotates in the same direction in association with the second auxiliary driving part 142 and the third auxiliary driving part 143.
  • the second rotation guide 162 transmits the rotational force transmitted in the order of the first auxiliary driver 141, the second auxiliary driver 142, and the third auxiliary driver 143 to the plurality of second auxiliary driver 142 and the third auxiliary driver. By rotating together with the drive unit 143, the rotational force is re-interlocked.
  • the second rotation guide 162 rotates in conjunction with the plurality of second auxiliary driving units 142 and the third auxiliary driving unit 143 in the same manner as the first rotation guide 161, and thus any of the auxiliary driving units 140. Even if one is damaged, there is an effect that the fastening part 110 rotates at the same interval.
  • the driving unit 130, the auxiliary driving unit 140, and the rotation guide 160 are interlocked with each other, even when any one of the driving unit 130, the auxiliary driving unit 140, and the rotation guide 160 is damaged. There is an effect of complementary mutual rotation force so that the fastening unit 110 rotates at the same interval.
  • the cover unit 180 is a cover member that covers the upper portion of the driving unit 130 and the auxiliary driving unit 140, and a through hole is formed to connect the driving unit 130, the auxiliary driving unit 140, and the handle unit 190. .
  • the probe card assembly apparatus 500 of this embodiment includes the screw fastening apparatus 100 for probe cards, the stage part 510, and the lifting drive part 520. As shown in FIG. 9, the probe card assembly apparatus 500 of this embodiment includes the screw fastening apparatus 100 for probe cards, the stage part 510, and the lifting drive part 520. As shown in FIG. 9, the probe card assembly apparatus 500 of this embodiment includes the screw fastening apparatus 100 for probe cards, the stage part 510, and the lifting drive part 520. As shown in FIG.
  • the probe card 300 includes a plurality of probe pins 310, a space converter 320, and a PCB 330.
  • the stage part 510 is a jig for supporting the probe card 300 during assembly, and includes a first space part 511, a second space part 512, and a third space part 513. ).
  • the first space 511 has a circular horizontal cross section and is a space in which the plurality of probe pins 310 are spaced apart from the bottom.
  • the second space part 512 has a circular horizontal cross section and is a space in which the space converter 320 is mounted.
  • the first space portion 511 and the second space portion 512 preferably have a vertical cross section in a step shape, and the diameter of the second space portion 512 is preferably larger than the diameter of the first space portion 511.
  • the third space portion 513 has a circular horizontal cross section and is a space formed between the space converter 320 and the PCB 330.
  • the diameter of the third space portion 513 is preferably larger than the diameter of the second space portion 512.
  • an intake port connected to the vacuum pump is formed in the third space 513, and is formed smaller than the diameter of the PCB 330 so that the PCB 330 is mounted on the upper portion thereof to seal the third space 513. desirable.
  • the first sealing member 513a made of a rubber ring or the like is interposed on a mounting surface on which the space converter 320 of the second space portion 512 is mounted.
  • a second sealing member 513b made of a rubber ring or the like may be interposed on the mounting surface on which the PCB 330 is mounted.
  • the PCB 330 is pulled into the third space part 513 to be in close contact with each other, and when the probe card 300 is assembled in a close state, the flatness of the probe card 300 is maintained. Has the effect of improving.
  • the lifting drive unit 520 is a lifting drive means for lifting the probe card 300, and rotates in conjunction with the rotation of the lever 521, the lever 521 rotatably provided.
  • the ball screw 522, and the lifting link 523 for converting the rotation of the ball screw 522 to the lifting drive.
  • the lifting link 523 is provided at both ends of the ball screw 522, and is transferred in opposite directions by rotation so that the separation distance is stretched, and the lower end of the pair of transport blocks 523a is extended.
  • Fixed table that is hinged to the upper end of the pair of cross bars (523b), the pair of cross bars (523b) installed so as to cross each other from the top to maintain a constant top separation distance between the pair of cross bars (523b) ( 523c).
  • the ball screw 522 rotates in one direction, and the separation distance between the pair of feed blocks 523a is caused by the rotation of the ball screw 522.
  • the probe card 300 seated on the top of the fixed table 523c is raised as a result. Done.
  • the lifting driving part 520 is preferably installed on the base part 530 which is a base member supporting the floor so as to be spaced apart from the floor.
  • Guide portion 540 is a guide member provided on the outer periphery of the base portion 530, consisting of a guide installed in the vertical longitudinal direction on top of the base portion 530 to support the screw fastening device 100 for the probe card, Furthermore, the lifting of the lifting driving unit 520 may be guided.
  • the probe card 300 can be easily lifted and lowered to a desired position, thereby making it easy to assemble the probe card 300.
  • the present invention provides a screw fastening device for a probe card for fastening the screws used in the assembly of the probe card and a probe card assembly device having the same.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

La présente invention concerne un dispositif de fixation de vis pour une carte sonde et un dispositif d'assemblage de carte sonde comprenant ce dernier, la présente invention comprenant : une pluralité de vis fixées à la carte de sonde ; une pluralité de parties fixation qui entrent en contact avec la pluralité de vis et qui tournent en même temps que la pluralité de vis ; et une pluralité d'unités d'entraînement qui transfèrent une force de rotation à la pluralité de parties fixation, lesdites unités d'entraînement étant verrouillées les unes avec les autres et tournant dans la même direction lorsqu'au moins une unité d'entraînement de la pluralité d'unités d'entraînement tourne. Ainsi, la présente invention permet de résoudre une charge concentrée générée au moment de la fixation séquentielle par la fixation simultanée des vis pour l'assemblage de la carte sonde au lieu de la fixation séquentielle.
PCT/KR2017/007729 2016-11-23 2017-07-18 Dispositif de fixation de vis pour carte sonde et dispositif d'assemblage de carte sonde comprenant ce dernier WO2018097446A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201780072383.5A CN109983347B (zh) 2016-11-23 2017-07-18 探针卡用螺丝紧固装置以及具备它的探针卡组装装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20160156673 2016-11-23
KR10-2016-0156673 2016-11-23
KR1020170050959A KR102227072B1 (ko) 2016-11-23 2017-04-20 프로브 카드용 나사 체결 장치 및 이를 구비한 프로브 카드 조립장치
KR10-2017-0050959 2017-04-20

Publications (1)

Publication Number Publication Date
WO2018097446A1 true WO2018097446A1 (fr) 2018-05-31

Family

ID=62195453

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2017/007729 WO2018097446A1 (fr) 2016-11-23 2017-07-18 Dispositif de fixation de vis pour carte sonde et dispositif d'assemblage de carte sonde comprenant ce dernier

Country Status (1)

Country Link
WO (1) WO2018097446A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112453877A (zh) * 2020-11-24 2021-03-09 国网新疆电力有限公司巴州供电公司 低压电能表接线端螺丝紧固器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020093380A (ko) * 2001-06-08 2002-12-16 주식회사 유림하이테크산업 반도체 검사용 프로브 카드
KR20050067759A (ko) * 2003-12-29 2005-07-05 동부아남반도체 주식회사 반도체 검사장치
JP2009262293A (ja) * 2008-04-25 2009-11-12 Toyota Motor Corp ボルト締付装置
JP2010112422A (ja) * 2008-11-05 2010-05-20 Mitsubishi Heavy Ind Ltd ボルト締結方法及び装置
JP2016192549A (ja) * 2015-03-30 2016-11-10 株式会社東京精密 プローバ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020093380A (ko) * 2001-06-08 2002-12-16 주식회사 유림하이테크산업 반도체 검사용 프로브 카드
KR20050067759A (ko) * 2003-12-29 2005-07-05 동부아남반도체 주식회사 반도체 검사장치
JP2009262293A (ja) * 2008-04-25 2009-11-12 Toyota Motor Corp ボルト締付装置
JP2010112422A (ja) * 2008-11-05 2010-05-20 Mitsubishi Heavy Ind Ltd ボルト締結方法及び装置
JP2016192549A (ja) * 2015-03-30 2016-11-10 株式会社東京精密 プローバ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112453877A (zh) * 2020-11-24 2021-03-09 国网新疆电力有限公司巴州供电公司 低压电能表接线端螺丝紧固器

Similar Documents

Publication Publication Date Title
WO2010080012A2 (fr) Appareil de mise en panoramique et d'inclinaison
WO2013108992A1 (fr) Dispositif de pince doté de points de retenue
WO2011002202A2 (fr) Dispositif de préhension par succion capable de déplacement angulaire
WO2016111436A1 (fr) Système d'articulation de robot à rigidité variable
WO2012057410A1 (fr) Dispositif de transmission de puissance
WO2017138705A1 (fr) Robot de transfert de substrat
WO2018097446A1 (fr) Dispositif de fixation de vis pour carte sonde et dispositif d'assemblage de carte sonde comprenant ce dernier
WO2019198924A1 (fr) Dispositif de levage
WO2023013942A1 (fr) Carotteuse de forage de deux trous
WO2020071609A1 (fr) Dispositif modulaire pouvant être inséré dans un rail d'électrode
WO2020103258A1 (fr) Circuit de test, appareil de test de panneau d'affichage et appareil d'affichage.
WO2021133070A1 (fr) Articulation de roulis
WO2023158104A1 (fr) Étage de mouvement à axes multiples
WO2023008706A1 (fr) Module de tendeur et dispositif d'entraînement de stent le comprenant
WO2018004039A1 (fr) Appareil à socle auquel est rattachée une antenne capable d'un mouvement biaxial
WO2010058922A2 (fr) Appareil réglable en hauteur
WO2023074947A1 (fr) Appareil de verrouillage de cartouche pour multi-sondeur
WO2018016874A1 (fr) Appareil d'entraînement de type à frottement et carrousel comprenant celui-ci
WO2022025356A1 (fr) Dispositif de support pour corps moulé
WO2022092822A1 (fr) Dispositif de chargement de substrat pour multiples fours de diffusion
WO2022039332A1 (fr) Dispositif d'inspection de fissures pour structure
WO2022039337A1 (fr) Dispositif de préhension à pas ajustable automatiquement
WO2022270888A1 (fr) Dispositif rotatif pour tampon
WO2020190004A1 (fr) Dispositif de serrage pour antenne
WO2014185633A1 (fr) Support d'inspection de module de caméra

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17873685

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17873685

Country of ref document: EP

Kind code of ref document: A1