WO2022039337A1 - Dispositif de préhension à pas ajustable automatiquement - Google Patents

Dispositif de préhension à pas ajustable automatiquement Download PDF

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Publication number
WO2022039337A1
WO2022039337A1 PCT/KR2021/000386 KR2021000386W WO2022039337A1 WO 2022039337 A1 WO2022039337 A1 WO 2022039337A1 KR 2021000386 W KR2021000386 W KR 2021000386W WO 2022039337 A1 WO2022039337 A1 WO 2022039337A1
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WO
WIPO (PCT)
Prior art keywords
picker
elevating
pitch
coupled
lifting
Prior art date
Application number
PCT/KR2021/000386
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English (en)
Korean (ko)
Inventor
양해춘
신승암
Original Assignee
㈜토니텍
쑤저우 토니텍 세미컨덕터 씨오., 엘티디.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by ㈜토니텍, 쑤저우 토니텍 세미컨덕터 씨오., 엘티디. filed Critical ㈜토니텍
Publication of WO2022039337A1 publication Critical patent/WO2022039337A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Definitions

  • the present invention relates to a picker device capable of automatic pitch adjustment.
  • a pitch adjusting device having a two-point support structure is configured at the rear of the picker frame, and means for preventing backlash are provided at the upper and lower portions of the picker frame, respectively, so that shaking or inclination occurs when the pitch of the picker is adjusted.
  • It relates to a picker device capable of automatic pitch control that can provide semi-permanent durability by allowing the pitch to be adjusted by a link operation method as well as accurate pitch control by not doing so.
  • the pickers such as the cam plate method, the link method, and the cylindrical cam method can automatically adjust the pitch of the picker.
  • a gap adjusting device is configured, and the picker is configured to adjust the pitch while moving in a form supported by the moving block.
  • An object of the present invention is to provide a picker device capable of automatic pitch control capable of precisely controlling the movement amount of the picker.
  • the present invention provides a picker device capable of automatic pitch adjustment capable of accurate pitch adjustment by configuring means for preventing backlash in the upper and lower portions of the picker frame, respectively, so that shaking or inclination does not occur when the pitch of the picker is adjusted.
  • a picker device capable of automatic pitch adjustment capable of accurate pitch adjustment by configuring means for preventing backlash in the upper and lower portions of the picker frame, respectively, so that shaking or inclination does not occur when the pitch of the picker is adjusted.
  • Another object of the present invention is to provide a picker device capable of automatic pitch adjustment that can provide semi-permanent durability by allowing pitch adjustment in a link operation method.
  • a plurality of picker frames configured with operation guides respectively formed on the rear upper and lower sides, a pitch guide shaft passing through the plurality of picker frames, and the plurality of a picker assembly including springs respectively configured on upper and lower portions of the picker frame; a picker elevating device coupled to a rear portion of the picker assembly to elevate the entire picker assembly; and a plurality of adjustment links rotatably coupled to the operation guide to adjust the pitch of the plurality of picker frames, and a plurality of adjustment links rotatably coupled to the lower portions of the plurality of adjustment links, and the adjustment links during the lifting operation and a pitch adjusting device including a pitch adjusting member composed of a plurality of elevating link members for rotating the .
  • the plurality of picker frames is characterized in that it consists of first to eighth picker frames.
  • the spring includes a first spring connecting the first and fifth picker frames, respectively, a second spring connecting the second and sixth picker frames, respectively, and the third and a third spring connecting the seventh picker frame, respectively, and a fourth spring connecting the fourth and eighth picker frames, respectively.
  • a pitch support frame to which both ends of the pitch guide shaft are coupled, the pitch support frame is coupled, and the picker lifting device is coupled to the upper rear side, and the pitch adjusting device It is characterized in that the base frame for supporting the lifting operation of the further configured.
  • the picker lifting device may include: a connection frame coupled to the base frame; a first servo motor providing the predetermined rotational force; a first elevating block receiving the rotational force of the first servo motor and converting it into a linear motion; an elevating support block coupled to the connecting frame and connected to the first elevating block to elevate the connecting frame when the first elevating block is operated; and a first power transmitting member that transmits the rotational force of the first servo motor to the first lifting block side.
  • the pitch adjusting device includes: a second servo motor providing a predetermined rotational force; a second power transmission member connected to the second servo motor to transmit the rotational force; a second lifting block connected to the second power transmission member and converting the rotational force into linear motion; an elevating guide panel coupled to the second elevating block and performing elevating operation when the second elevating block is driven; and a lifting plate coupled to the lifting guide panel and having a coupling shaft connected to the pitch adjusting member toward the lower center.
  • the pitch adjusting member may include: an adjusting link comprising first and second adjusting links crossing each other; Rotating means rotatably coupled to the first and second control links, both of which are coupled to an operation guide to support rotation and elevating operations of the first and second control links; an elevating link member having an upper end and a lower end rotatably coupled to the lower portions of the first and second adjusting links, respectively, and comprising first and second elevating link members rotatably coupled to the coupling shaft; and a rotation support member for supporting rotational coupling of the elevating link member and the adjustment link.
  • FIG. 1 is a perspective view showing a picker device capable of automatic pitch adjustment according to an embodiment of the present invention
  • FIG. 2 is a bottom perspective view showing a picker device capable of automatic pitch adjustment according to an embodiment of the present invention
  • FIG. 3 is a front view showing a picker device capable of automatic pitch adjustment according to an embodiment of the present invention
  • FIG. 4 is a plan view showing a picker device capable of automatic pitch adjustment according to an embodiment of the present invention.
  • FIG. 5 and 6 are views showing a rear portion of a picker device capable of automatic pitch adjustment according to an embodiment of the present invention
  • FIG. 7 to 10 are views showing a pitch adjusting device of a picker device capable of automatic pitch adjustment according to an embodiment of the present invention.
  • a picker assembly comprising: a plurality of picker frames configured with operation guides respectively formed on upper and lower rear sides; a pitch guide shaft passing through the plurality of picker frames; and springs respectively configured on upper and lower portions of the plurality of picker frames ; a picker elevating device coupled to a rear portion of the picker assembly to elevate the entire picker assembly; and a plurality of adjustment links rotatably coupled to the operation guide part so as to adjust the pitch of the plurality of picker frames, and a plurality of adjustment links rotatably coupled to the lower portions of the plurality of adjustment links, and the adjustment links during the lifting operation and a pitch adjusting device including a pitch adjusting member composed of a plurality of elevating link members for rotating the .
  • the picker device capable of automatic pitch adjustment of the present invention includes a picker assembly 100 that raises and lowers so as to grip a semiconductor package, and an upper portion of the rear side of the picker assembly, and the picker assembly 100 It is configured in the rear part of the picker elevating device 200 and the picker assembly 100 for elevating the whole, and includes a pitch adjusting device 300 for adjusting the pitch interval of the pickers 130 by link operation.
  • the picker assembly 100 is coupled to the pitch adjusting device 300, and a plurality of picker frames 110 in which the picker 130 is configured to grip the semiconductor package at the lower end thereof, and the picker frame 110, An elevating shaft 120 supporting the picking operation of the picker 130, and a picker 130 for gripping the semiconductor package at the lower end are mounted, and a predetermined vacuum pressure is provided so that the picking operation of the picker 130 is performed.
  • a control sleeve 140 to, a pitch guide shaft 150 guiding movement in the lateral direction between the plurality of picker frames 110 and a spring preventing backlash occurring during pitch adjustment of the plurality of picker frames 110 . is made up of 160
  • the picker frame 110 includes a picker frame 112 that is mounted so that the picker 130 is coupled to the lower end to enable an elevating operation, and the control sleeve 140 is connected to the picker 130 at the upper end, and the picker frame ( It is configured on the upper part of the 112 and is configured to include a support bracket 114 for supporting the operation of the elevating shaft 120 .
  • the picker frame 110 is composed of a plurality in the lateral direction of the picker device, and in the present invention, there are a total of eight picker frames 110a, 110b, 110c, 110d, 110e, 110f, 110g, 110h. configured to be done.
  • the picker frame 110 is equipped with a spring 160 at the upper end and lower end thereof to reduce backlash generated during pitch adjustment to prevent shaking of the picker 130 .
  • the spring 160 is a first spring 160a connecting upper and lower ends of the first picker frame 110a and the fifth picker frame 110e among the first to eighth picker frames 110a to 110h, respectively. and a second spring 160b connecting the second and sixth picker frames 110b and 110f, respectively, and a third spring 160c connecting the third and seventh picker frames 110c and 110g, respectively; and a fourth spring 160d connecting the fourth and eighth picker frames 110d and 110h, respectively.
  • the picker frame 110 is configured on the rear upper and lower sides, respectively, and the upper and lower ends of the adjusting link 394 among the pitch adjusting members 390 to be described later are respectively connected, and when the adjusting link 394 is operated, the An operation guide 116 that supports the lowering operation and supports the pitch adjustment by moving the picker frame 110 in the lateral direction by a certain distance in response to the rising or falling operation amount of the adjusting link 394 at the same time. is composed
  • the lower end of the elevating shaft 120 is connected to the control sleeve 140 and is connected to a driving means including a driving cam and a driving motor to support the elevating operation of the control sleeve 140 .
  • the control sleeve 140 is equipped with a picker 130 for gripping the semiconductor package at the lower end at the upper end, and raises and lowers the picker 130 according to whether the elevating shaft 120 is driven, and provides a predetermined vacuum pressure. It is a component to which a vacuum pressure hose is connected so that the picking operation of the picker 130 is made.
  • the pitch guide shaft 150 passes through the plurality of picker frames 110 including the first to eighth picker frames 110a to 110h, and when the pitch adjusting device 300 is driven, the plurality of picker frames 110 are lateral to each other. It supports directional movement, and serves to prevent shaking or inclination that occurs during movement.
  • the pitch guide shaft 150 is configured to pass through the upper and lower portions of the plurality of picker frames 110, respectively, and is preferably configured to form a pair on the upper and lower portions of the plurality of picker frames 110, respectively.
  • the picker assembly 100 of the present invention it is located at the rear of the picker frame 110 , and the picker assembly 100 is independently coupled to the picker lifting device 200 and the pitch adjusting device 300 , respectively.
  • the base frame 102 and the base frame 102 are coupled to both ends of the front side, the pitch support frame 104 to which the end of the pitch guide shaft 150 is coupled is further configured.
  • the base frame 102 is equipped with a second elevating rail 370 of a pitch adjusting device 300 to be described later, and elevating the second elevating guide 380 moving along the second elevating rail 370 .
  • An elevation guide groove 102a for guiding the operation is further configured.
  • the base frame 102 is configured such that the connection frame 202 of the picker lifting device 200 is fixedly coupled to the upper rear side, so that the picker assembly 100 can be lifted or lowered according to whether the picker lifting device 200 is driven or not. is composed
  • the picker lifting device 200 includes a first servo motor 210 that provides a predetermined rotational force for lifting and lowering of the picker assembly 100 and a base frame 102 by receiving the rotational force of the first servomotor 210 to raise and lower the base frame 102 .
  • the first elevating block 230 coupled to the connecting frame 202, and the first elevating block using the rotational force of the elevating support block 240 and the first servo motor 210 connected to the first elevating block 232 are applied to the first elevating block.
  • (230) is configured to include a first power transmission member 220 for transmitting to the side.
  • the first power transmission member 220 may be configured of a conventional chain and power transmission means such as a sprocket, a belt, and a gear.
  • the first lifting block 230 when the first lifting block 230 is coupled to the first lifting shaft 232 connected to the first power transmitting member 220 , and rotational force is transmitted from the first power transmitting member 220 , the first lifting and lowering block 230 .
  • the shaft 232 is a component that supports the lifting and lowering by rotational operation.
  • the inner surface of the first elevating block 230 and the outer circumferential surface of the first elevating shaft 232 are configured to correspond to each other, and a spiral groove is formed to be coupled by a screw coupling method to form the inner surface of the first elevating block 232 . It may be configured such that the lifting operation is made along the , but is not limited thereto.
  • the first lifting block 230 may be coupled to a rear sealing cover (not shown) that seals the rear portion of the picker device, but is not limited thereto.
  • the first lifting block 232 is configured to be spaced apart from the upper portion by a predetermined interval, and is fixedly coupled to the rear portion of the connection frame 202 , while supporting the rotational operation of the first lifting shaft 232 , the first During the lifting operation of the lifting shaft 232 , the connecting frame 202 and the elevating support block 240 for elevating the base frame 102 coupled to the connecting frame 202 are configured.
  • connection frame 202 is coupled to a first lifting guide 260 that prevents shaking and inclination of the picker assembly 100 while the first lifting shaft 232 moves in the axial direction during the lifting operation.
  • a first elevating rail 250 coupled to the rear sealing cover and guiding the elevating operation of the first elevating guide 260 may be further configured.
  • the pitch adjusting device 300 is mounted on the lower portion of the base frame 102, and is coupled to the operation guide 116 formed in the rear portion of each of the plurality of picker frames 110 so that both the rotational operation and the lifting operation are possible. It is a component that adjusts the pitch of the plurality of picker frames 110 while moving the plurality of picker frames 110 in the lateral direction.
  • the pitch adjusting device 300 includes a second servo motor 310 providing a predetermined rotational force, a second power transmission member 320 connected to the second servomotor 310 to transmit the rotational force, and a second power transmission
  • the second elevating block 330 connected to the member 320 to convert the rotational force into linear motion, the elevating guide panel 340 connected to the second elevating block 330, and the elevating guide panel 340 are combined to elevate
  • the lifting plate 350 in which the operation is made, the coupling shaft 360 coupled to the lifting plate 350, the coupling shaft 360 and the plurality of picker frames 110 are respectively connected, and the lifting operation of the coupling shaft 360 is performed.
  • It is configured to include a pitch adjusting member 390 for adjusting the pitch of the plurality of picker frames 110 while the link operation is made.
  • the second servo motor 310 is coupled to one side of the rear portion of the base frame 102 , and provides a predetermined rotational force so that the link operation of the pitch adjusting member 390 can be achieved.
  • the second power transmission member 320 has the same configuration as the first power transmission member 220 , and one end is connected to the second servo motor 310 , and the other end is the second elevating block 330 of the second elevating block 330 . It is connected to the shaft 336 and serves to transmit the rotational force of the second servo motor 310 to the second lifting shaft 336 .
  • the second elevating block 330 is connected to the second power transmitting member 320 and is a component supporting the pitch adjusting member 390 so that the elevating operation can be made, and the lower end of the second power transmitting member 320 is
  • the second lifting shaft 336 connected to, coupled to the base frame 102, and consisting of upper and lower lifting blocks 332 and 334 for supporting the rotational operation of the second lifting shaft 336.
  • the elevating guide panel 340 is coupled to the second elevating shaft 336, and when the second elevating shaft 336 rotates, the elevating operation is performed along the outer circumferential surface of the second elevating shaft 336.
  • the elevating guide panel 340 and the second elevating shaft 336 may be formed in the same way as the coupling method of the first elevating shaft 232 and the first elevating block 230 described above, but is not limited thereto. .
  • the lifting plate 350 has an upper surface coupled to the lifting guide panel 340, and a coupling shaft 360 that is coupled to the pitch adjusting member 390 as a lower surface is coupled to the lifting guide panel 340 when the lifting operation is performed. It serves to support the lifting operation of the lifting link member 392 of the shaft 360 and the pitch adjusting member 390 coupled to the coupling shaft 360 .
  • the elevating plate 350 is a component for elevating the coupling shaft 360 connected to the elevating link member 392 while the elevating operation is performed together with the elevating guide panel 340 .
  • This lifting plate 350 is connected to the lifting guide groove 102a configured in the base frame 102 to prevent shaking or inclination of the picker assembly 100 from occurring during the lifting operation, and the lifting guide groove 102a. ) may be configured to be lifted along the
  • a second elevating rail 370 coupled to the elevating guide groove 102a to support the elevating operation of the elevating plate 350, and coupled to the elevating plate 350, the second elevating rail 370 A second lifting guide 380 that ascends and descends along It will be possible to prevent the inclination from occurring.
  • the coupling shaft 360 is fixedly coupled to the elevating plate 350 by the coupling bracket 362, and is formed to protrude from the central portion of the front side of the coupling bracket 362, so that the ends of the plurality of elevating link members 392 are rotatable.
  • the plurality of lifting link members 392 move upward and downward, and the adjustment link 394 connected to the lifting link member 392 rotates. make this happen
  • the pitch adjusting member 390 is coupled to the operation guide 116 of the plurality of picker frames 110, respectively, and a link operation by rotation is performed depending on whether the coupling shaft 360 is lifted or not. It is a component that adjusts the pitch of the picker frames 110 to the same pitch.
  • the pitch adjusting member 390 is rotatably coupled to an adjusting link 394 coupled to the operation guide 116 for rotation and elevating operation, and the adjusting link 394, whether the coupling shaft 360 is elevating or not.
  • the lifting link member 394 for rotating the adjustment link 394 according to the It is rotatably coupled and configured to include a rotating means 398 for supporting the lifting operation of the adjustment link 394 while rotating along the inner surface of the operation guide 116 .
  • the control link 394 is composed of a plurality, and in the present invention, it is composed of first and second control links 394a and 394b configured in an X-shape, that is, the first and second control links. At 394a and 394b, all of the plurality of operation guides 116 configured in the plurality of picker frames 110 are connected to each other through the rotation means 398 .
  • the first adjustment link 394a is rotatably and elevating the upper part of the first to fourth picker frames 110a to 110d. It is rotatably and vertically coupled to the operation guide 116 configured at the lower portion of the 8-pick frames 110e to 110h.
  • the second adjustment link 394b is rotatably and elevatingly coupled to the operation guide 116 whose upper portion is configured on the upper portion of the fifth to eighth picker frames 110e to 110h, and the lower portion of the first to first to eighth picker frames 110e to 110h.
  • the four picker frames 110a to 110d are rotatably and vertically coupled to the operation guide 116 configured under the frames.
  • the control link 394 has a rotation support member 396 formed at a central portion that intersects with each other, and a plurality of rotational support members 396 are rotated when the elevation link member 392 is lifted based on the axial center of the rotation support member 396 .
  • the picker frames 110 are configured to move at the same pitch.
  • the elevating link member 392 has a second upper end rotatably coupled to a lower portion of a first elevating link member 392a and a second adjusting link 394b rotatably coupled to a lower portion of the first adjusting link 394a. Consists of a lifting link member 392b, and the lower ends of the first and second elevating link members 392a and 392b are rotatably coupled by the coupling shaft 360 to raise and lower the coupling shaft 360. (360) is configured such that the first and second control links (394a, 394b) of the link operation is made while the rotation operation is made based on the center of the axis.
  • the lifting link member 392 is configured to be rotationally coupled by a rotation means 398 made of a rotation shaft or the like when combined with the adjustment link 392 .
  • picker assembly 102 base frame
  • pitch support frame 110 picker frame
  • control sleeve 150 pitch guide shaft
  • connection frame 210 first servo motor
  • first power transmission member 230 first elevating block
  • elevating support block 250 first elevating rail

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention comprend : un ensemble de préhension comprenant une pluralité de structures de préhension ayant des parties de guidage de fonctionnement respectivement formées au niveau des côtés supérieur et inférieur de l'arrière de celles-ci, un arbre de guidage de pas traversant la pluralité de structures de préhension, et des ressorts disposés respectivement au sommet et au fond de la pluralité de structures de préhension ; un dispositif de levage/abaissement de dispositif de préhension couplé à la partie arrière de l'ensemble de préhension pour lever/abaisser l'ensemble de préhension entier ; et un dispositif d'ajustement de pas comprenant un élément d'ajustement de pas, qui comprend une pluralité de liaisons d'ajustement couplées aux parties de guidage de fonctionnement de manière à pouvoir tourner et être levées/abaissées de telle sorte que les pas de la pluralité de structures de préhension sont ajustés, et une pluralité d'éléments de liaison de levage/abaissement qui sont accouplés de façon rotative aux parties inférieures de la pluralité de liaisons d'ajustement et qui font tourner les liaisons d'ajustement pendant une opération de levage/abaissement.
PCT/KR2021/000386 2020-08-20 2021-01-12 Dispositif de préhension à pas ajustable automatiquement WO2022039337A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020200104913A KR102376213B1 (ko) 2020-08-20 2020-08-20 자동 피치 조절이 가능한 픽커장치
KR10-2020-0104913 2020-08-20

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WO2022039337A1 true WO2022039337A1 (fr) 2022-02-24

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KR102575315B1 (ko) * 2023-05-04 2023-09-07 주식회사 케이티아이 픽커모듈 간격 조절장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090010248U (ko) * 2008-04-04 2009-10-08 한미반도체 주식회사 반도체 이송용 쏘팅픽커
KR100959372B1 (ko) * 2008-03-24 2010-05-24 미래산업 주식회사 반도체 소자 이송장치, 핸들러, 및 반도체 소자 제조방법
KR101533022B1 (ko) * 2014-12-03 2015-07-02 (주)에이티테크놀러지 반도체 소자 테스트 핸들러의 소자 이송장치
KR101605407B1 (ko) * 2014-10-28 2016-03-22 (주)케이엔씨 핸들러용 픽커
US9776334B2 (en) * 2013-03-14 2017-10-03 Kla-Tencor Corporation Apparatus and method for automatic pitch conversion of pick and place heads, pick and place head and pick and place device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100622415B1 (ko) * 2004-12-06 2006-09-19 미래산업 주식회사 반도체 소자 테스트 핸들러의 소자 반송장치
KR101152771B1 (ko) * 2011-12-06 2012-07-04 트윈테크(주) 테스트 핸들러용 반도체 부재 픽업 업다운 이송장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100959372B1 (ko) * 2008-03-24 2010-05-24 미래산업 주식회사 반도체 소자 이송장치, 핸들러, 및 반도체 소자 제조방법
KR20090010248U (ko) * 2008-04-04 2009-10-08 한미반도체 주식회사 반도체 이송용 쏘팅픽커
US9776334B2 (en) * 2013-03-14 2017-10-03 Kla-Tencor Corporation Apparatus and method for automatic pitch conversion of pick and place heads, pick and place head and pick and place device
KR101605407B1 (ko) * 2014-10-28 2016-03-22 (주)케이엔씨 핸들러용 픽커
KR101533022B1 (ko) * 2014-12-03 2015-07-02 (주)에이티테크놀러지 반도체 소자 테스트 핸들러의 소자 이송장치

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