WO2018097446A1

WO2018097446A1 - Screw fastening device for probe card and probe card assembling device having same

Info

Publication number: WO2018097446A1
Application number: PCT/KR2017/007729
Authority: WO
Inventors: 이재환; 윤민환; 구황섭; 김현제; 정희석
Original assignee: 주식회사 기가레인
Priority date: 2016-11-23
Filing date: 2017-07-18
Publication date: 2018-05-31

Abstract

The present invention relates to a screw fastening device for a probe card and a probe card assembling device having the same, the present invention comprising: a plurality of screws which are fastened to the probe card; a plurality of fastening portions which come into contact with the plurality of screws and rotate together with the plurality of screws; and a plurality of driving units which transfer rotational force to the plurality of fastening portions, and wherein the plurality of driving units are interlocked with each other and rotate in the same direction when at least one of the plurality of driving units rotates. Therefore, the present invention provides an effect of being capable of resolving a concentrated load generated at the time of sequential fastening by simultaneously fastening the screws for assembling the probe card instead of the sequential fastening.

Description

Screw fastening device for probe card and probe card assembly device having same

The present invention relates to a screw fastening device for a probe card and a probe card assembling device having the same, and more particularly, a screw fastening device for a probe card for fastening the screws used in the assembly of the probe card and a probe card assembly having the same Relates to a device.

In general, a probe card electrically connects a wafer and a semiconductor device inspection device to test a semiconductor device for defects at the wafer level, and transmits an electrical signal of the inspection device to a pad formed on the wafer, and returns from the pad. Apparatus for transmitting signals to inspection equipment of semiconductor devices.

The probe card is assembled by using a plurality of screws. Recently, the size and weight of the probe card are increasing, and the size and weight increase are concentrated in the conventional manner, and the weight of the probe card is not distributed when the screws are sequentially tightened. There is a problem of concentrated load that is assembled inclined to the concentrated portion.

This problem is also a problem that some of the pads formed on the wafer does not contact the probe card is not properly tested.

The present invention has been made in order to solve the above-mentioned conventional problems, the screw fastening device for the probe card for solving the problem of the concentrated load through the simultaneous assembly of the screw rather than the sequential assembly of the conventional method and the assembly of the probe card having the same It is an object to provide a device.

In addition, to provide a probe card screw fastening device and a probe card assembly device having the same to increase the flatness when assembling the probe card by using the stage portion, and to facilitate the assembly of the probe card by using the lifting drive portion. For other purposes.

The present invention for achieving the above object, a plurality of screws fastened to the probe card; A plurality of fastening parts contacting the plurality of screws and rotating together with the plurality of screws; And a plurality of driving units for transmitting rotational force to the plurality of fastening units, wherein the plurality of driving units are interlocked with each other when at least one of the plurality of driving units rotates to rotate in the same direction.

The plurality of drive unit of the present invention, the first drive unit; And a second driving part spaced apart from the first driving part, and an interlocking part transferring a rotational force of the first driving part to the second driving part so that the first driving part and the second driving part rotate forward in the same direction. It is characterized by including.

The plurality of driving units of the present invention includes a plurality of auxiliary driving units that rotate in the same direction in association with the plurality of driving units, wherein the plurality of auxiliary driving units, when at least one of the plurality of auxiliary driving units rotates It is linked to rotate in the same direction.

The plurality of auxiliary driving unit of the present invention, the first auxiliary driving unit; And a second auxiliary driving part spaced apart from the first auxiliary driving part, wherein the rotational force of the first auxiliary driving part is rotated to the second auxiliary driving part so that the first auxiliary driving part and the second auxiliary driving part are rotated forward in the same direction. It characterized in that it comprises a linking unit for transmitting.

The linkage portion of the present invention is composed of a gear, the linkage portion is characterized in that the first drive and the second drive disposed on both sides in the reverse direction to reverse rotation in the same direction.

The linkage part of the present invention is configured as a timing belt, and the linkage part may be rotated forward in the same direction so that the first drive part and the second drive part disposed on both sides in the same direction.

The present invention includes a first rotation guide of a circular shape, which is installed to rotate to be engaged with the outer periphery of the second drive unit, the tooth is formed on the inner peripheral surface, the first rotation guide is interlocked with the second drive unit in the same direction Rotate to.

The present invention includes a second rotation guide of a circular shape is installed to be engaged to the outer periphery of the second auxiliary drive unit, the tooth shape is formed on the inner peripheral surface, the second rotation guide is interlocked with the second auxiliary drive unit It is characterized by rotating in the same direction.

The fastening part and the driving part of the present invention are disposed with a driving part supporting plate interposed therebetween, and the fastening part and the driving part are coupled to a connecting rod passing through the driving part supporting plate, and are rotated in the same direction.

Between the drive unit support plate and the connecting rod of the present invention is characterized in that a bearing is installed.

The diameter of the auxiliary drive unit of the present invention is characterized in that it is formed smaller or larger than the diameter of the drive unit.

The drive unit of the present invention, the first drive unit; A second driver spaced apart from the first driver; And a third driving part spaced apart from the second driving part, wherein the first driving part and the second driving part are configured to transmit a rotational force of the first driving part to the second driving part so as to rotate forward in the same direction. 1 linkage; And a second interlocking part configured to transmit a rotational force of the second driving part to the third driving part so that the second driving part and the third driving part rotate forward in the same direction. The second driving part includes: A first gear part configured of a gear in contact with the first linkage part; And a second gear part configured of a gear in contact with the second interlocking part.

The fastening portion of the present invention, the tubular body portion coupled to the lower portion of the drive unit; A protruding contact portion coupled to a lower portion of the body portion; And a spring inserted into the body part, one end of which is supported by the body part and the other end of which is in contact with the other end of the contact part so that the contact part has elasticity.

A probe card assembling apparatus comprising a screw fastening device for a probe card according to claim 1, comprising: a stage unit, wherein the probe card includes a plurality of probe pins, a space converter, and a PCB; The part may include a first space in which the plurality of probe pins are spaced apart from a bottom; A second space in which the space transformer is mounted; And a third space formed between the space converter and the PCB.

The third space portion of the present invention is characterized in that the inlet port is connected to the vacuum pump is formed.

The third space portion of the present invention is characterized in that the horizontal cross section has a circular shape, is formed smaller than the diameter of the PCB so that the PCB is mounted on the top is sealed.

A first sealing member is interposed on a mounting surface on which the space transducer of the second space part is mounted, and a second sealing member is interposed on a mounting surface on which the PCB is mounted.

A probe card assembling apparatus comprising the screw fastening device for a probe card according to claim 1, comprising: a lift driver; the lift driver comprising: a lever rotatably installed; A ball screw rotated according to the rotation of the lever; And an elevating link for converting the rotation of the ball screw into elevating drive.

The elevating link of the present invention, a pair of transfer blocks are respectively installed on both ends of the ball screw is moved in the opposite direction by the rotation distance is stretched apart; A pair of cross bars installed by the lower end hinged to the pair of transfer blocks so as to cross each other from above; And a fixed table configured to hinge-couple the upper ends of the pair of crossing bars to maintain a constant distance between the upper ends of the pair of crossing bars.

The present invention is installed on the lower portion of the elevating drive unit so that the elevating drive unit is separated from the base base for supporting the floor; And a guide part installed in the vertical longitudinal direction on the base part to support the screw fastening device for the probe card.

As described above, the present invention provides an effect that can solve the concentrated load generated during the sequential fastening by simultaneously tightening the screws for assembling the probe card rather than sequential fastening.

In addition, the first rotation guide rotates in conjunction with the second driving unit and the fifth driving unit, thereby providing an effect that the fastening unit rotates at the same interval even when any one of the driving units is damaged.

In addition, the second rotation guide, like the first rotation guide, rotates in association with the plurality of second auxiliary driving units and the third auxiliary driving unit, and provides an effect that the fastening unit rotates at the same interval even when any one of the auxiliary driving units is damaged. do.

In addition, since the operation environment varies according to the diameter difference between the auxiliary driving part and the driving part, the position where the damage occurs due to wear is different, so that even when any one of the driving parts is damaged, the auxiliary driving part is not damaged at the same position, so that the fastening part Provides the effect of continuing to rotate at equal intervals.

In addition, the second driving unit, the third driving unit and the fourth driving unit provide an effect of allowing the plurality of interlocking units to interlock at the same time through the first gear unit and the second gear unit.

In addition, when the plurality of screws fastened to the probe card are not positioned on the same horizontal line, the contact portions are elastically supported so that a part of the contact portions do not contact the screws, thereby providing an effect of contacting all the plurality of screws.

In addition, the use of the stage portion increases the flatness of the assembly of the probe card, and provides the effect that the assembly of the probe card can be made convenient by using the lifting drive.

1 is a block diagram showing a screw fastening device for a probe card according to an embodiment of the present invention and a probe card assembly device having the same.

Figure 2 is an exploded perspective view showing a screw fastening device for a probe card according to an embodiment of the present invention.

Figure 3 is a block diagram showing a fastening portion of the screw fastening device for a probe card according to an embodiment of the present invention.

Figure 4 is a cut perspective view showing a probe card assembly apparatus according to an embodiment of the present invention.

5 is a configuration diagram showing the operation of the screw fastening device for a probe card according to an embodiment of the present invention.

Figure 6 is a block diagram showing the operation of the screw fastening device for a probe card according to an embodiment of the present invention.

Figure 7 is a block diagram showing a drive unit of the screw fastening device for a probe card according to an embodiment of the present invention.

8 is a block diagram showing a drive unit of the screw fastening device for a probe card according to an embodiment of the present invention.

Figure 9 is an exploded perspective view of the probe card assembly apparatus according to an embodiment of the present invention.

10 is a perspective view showing a stage of the probe card assembly apparatus according to an embodiment of the present invention.

11 is a block diagram showing the lifting drive unit of the probe card assembly apparatus according to an embodiment of the present invention.

110: fastening portion 120: drive unit support plate

130: driving unit 140: auxiliary driving unit

150: linkage 160: rotation guide

170: connecting rod 180: cover part

190: handle portion 510: stage portion

520: the elevating drive unit 530: the base unit

540: guide part

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

1 and 2, the screw fastening device 100 for a probe card for fastening a plurality of screws simultaneously to a probe card according to an embodiment of the present invention includes a fastening part 110, a driving part support plate 120, The driver 130, the auxiliary driver 140, the interlocking part 150, the cover part 180, and the handle part 190 are included.

The fastening part 110 is a fastening means which contacts a plurality of screws fastened to the probe card and rotates together with the plurality of screws. As shown in FIG. 3, the body part 111, the contact part 112, and the spring 113 are provided. It includes.

The body part 111 is a cylindrical structure, and receives the rotational force from the drive part 130 and rotates in the same direction as the drive part 130.

The contact portion 112 is a protruding fastening member coupled to the lower portion of the body portion 111 and contacts the screw fastened to the probe card to transmit the rotational force transmitted from the body portion 111 to the screw.

Spring 113 is an elastic member inserted into the body portion 111, one end is supported by the body portion 111 and the other end is in contact with the other end of the contact portion 112 so that the contact portion 112 has elasticity. .

Therefore, when a plurality of screws fastened to the probe card 300 are not positioned on the same horizontal line, a part of the contact portion 112 does not come into contact with the screw. In this case, the contact portion 112 is elastic and all the plurality of screws There is an effect of contact.

The driving unit support plate 120 is a supporting member that supports the lower portion of the driving unit 130 and the auxiliary driving unit 140. As shown in FIG. 4, a surface where the driving unit 130 and the auxiliary driving unit 140 contact each other is formed of a flat plate. The first driving unit support plate 121 supporting the lower portion of the driving unit 130 and the second driving unit support plate 122 supporting the lower portion of the auxiliary driving unit 140 are included.

The driving unit support plate 120 is provided with a plurality of connection holes 123 for connecting between the fastening unit 110 and the driving unit 130, the driving unit 130, and the auxiliary driving unit 140.

The fastening unit 110, the driving unit 130, and the auxiliary driving unit 140 are coupled to the connecting rod 170 penetrating through the connecting hole 123 and rotated in the same direction.

In this case, a bearing may be installed between the connecting hole 123 and the connecting rod 170 to smoothly rotate the connecting rod 170.

The driving unit 130 is a plurality of driving means for transmitting rotational force to the plurality of fastening units 110. When at least one of the plurality of driving units 130 rotates, the driving unit 130 interlocks with each other and rotates in the same direction. As shown in FIG. 6, the first driver 131, the second driver 132, the third driver 133, the fourth driver 134, and the fifth driver 135 are included.

The interlocking portion 150 is installed as a medium for transmitting rotational force so that the plurality of driving units 130 can interlock with each other, and the interlocking portion 150 is formed of a first interlocking portion 151 composed of gears and a timing belt. And a linkage 152.

The first driving unit 131 is a gear installed to interlock with the handle unit 190 among the plurality of driving units, and transmits the rotational force transmitted from the handle unit 190 to the plurality of second driving units 132.

In this case, the first driving unit 131 may obtain a rotational force through a power source that generates a rotational force, such as a motor, in addition to the handle unit 190 that obtains the rotational force by turning the handle by the operator's force.

In addition, the first driver 131 is not a gear that is interpreted only as a gear disposed at the center of the plurality of drivers 130, and receives a rotational force from the handle 190 and transmits the rotational force to the plurality of second drivers 132. It is preferred to be interpreted.

The second drive unit 132 is a gear spaced apart from the first drive unit 131 so as to be interlocked with each other. As shown in FIG. 7, the second drive unit 132 is configured to rotate the rotational force by the first link unit 151 formed of a gear from the first drive unit 131. The transmission is rotated in the same direction as the first driving unit 131.

In this case, the first interlocking part 151 rotates in the opposite direction so that the first driving part 131 and the second driving part 132 installed on both sides rotate forward in the same direction.

The third drive unit 133 is a gear spaced apart from the second drive unit 132 so as to be interlocked with each other. As shown in FIG. 8, the rotational force is driven by the second link unit 152 formed of a timing belt from the second drive unit 132. Received to rotate in the same direction as the second drive unit 132.

At this time, the second linking unit 152 rotates forward in the same direction so that the second driving unit 132 and the third driving unit 133 installed on both sides rotate forward in the same direction.

The fourth driving unit 134 is a gear installed to be interlocked with the third driving unit 133 and receives rotational force from the third driving unit 133 by the second interlocking unit 152 in the same direction as the third driving unit 133. Will rotate.

The fifth driving unit 135 is a gear installed to be interlocked with the fourth driving unit 134 and receives rotational force from the fourth driving unit 134 by the second interlocking unit 152 in the same direction as the fourth driving unit 134. Will rotate.

The second driving unit 132, the third driving unit 133, and the fourth driving unit 134 include a first gear unit 130a and a second gear unit 130b to be in contact with the plurality of interlocking units 150. .

Referring to the second driving unit 132, the first gear unit 130a is a gear in contact with the first linkage unit 151, and the second gear unit 130b is a gear in contact with the second linkage unit 152. Can be.

The first gear part 130a and the second gear part 130b are separately installed in a vertical position so as to be in contact with the plurality of interlocking parts 150 or to be provided with portions where the plurality of interlocking parts 150 contact each other. It may be divided into a first gear part 130a and a second gear part 130b according to a portion which is formed to be in contact with a large height.

Accordingly, the second driving unit 132, the third driving unit 133, and the fourth driving unit 134 simultaneously link the plurality of interlocking units 150 through the first gear unit 130a and the second gear unit 130b. You can do it.

When the driving unit 130 is composed of a plurality of gears and any one of the driving units 130 is damaged, the fastening unit 110 provided with the rotational force therefrom does not rotate at the same intervals so that the screw is not properly fastened to the probe card. Therefore, in order to solve such a case, the present invention proposes the auxiliary driving unit 140 and the rotation guide 160 for reinterlocking the rotational force as a solving means.

The auxiliary driving unit 140 is a plurality of auxiliary driving means for re-linking the rotational force to the plurality of driving units 130. When at least one of the plurality of auxiliary driving units rotates, the auxiliary driving unit 140 rotates in the same direction. As shown in FIG. 6, the first auxiliary driving unit 141, the second auxiliary driving unit 142, and the third auxiliary driving unit 143 are included.

The first auxiliary driving unit 141 is a gear installed to be coupled to the connecting rod together with the first driving unit 131 among the plurality of auxiliary driving units so as to rotate in the same direction in association with the first driving unit 131. The transmitted rotational force is transmitted to the plurality of auxiliary driving units 140.

The second auxiliary driving unit 142 is a gear spaced apart from the first auxiliary driving unit 141 and receives a rotational force by the first interlocking unit 151 configured as a gear from the first auxiliary driving unit 141. The auxiliary driving unit 141 rotates in the same direction.

In addition, the second auxiliary driving unit 142 is coupled to the connecting rod 170 together with the third driving unit 133 to be interlocked with the third driving unit 133 to rotate in the same direction.

The third auxiliary driving unit 143 is a gear spaced apart from the second auxiliary driving unit 142 and is coupled to the connecting rod 170 together with the fourth driving unit 134 to rotate in the same direction as the fourth driving unit 134. .

The diameter of the auxiliary driving unit 140 may be smaller or larger than the diameter of the driving unit 130.

This is because the operating environment varies depending on the diameter difference between the auxiliary driving unit 140 and the driving unit 130, the position where the damage occurs due to wear and the like is different.

Therefore, even when any one of the driving unit 130 is damaged, the auxiliary driving unit 140 does not cause damage at the same position, so that the fastening unit 110 continues to rotate at the same interval.

The rotation guide 160 includes a first rotation guide 161 for reinterlocking the rotational force of the driving unit 130 and a second rotation guide 162 for reinterlocking the rotational force of the auxiliary driving unit 140.

The first rotation guide 161 is installed to be engaged with the outer circumferences of the second driving unit 132 and the fifth driving unit 135 to rotate, and is a circular rotation guide having teeth formed on an inner circumferential surface thereof.

The first rotation guide 161 rotates in the same direction in association with the second driving unit 132 and the fifth driving unit 135.

The first rotation guide 161 receives the rotational force transmitted in the order of the first driving unit 131, the second driving unit 132, the third driving unit 133, the fourth driving unit 134, and the fifth driving unit 135. The rotational force is re-interlocked by rotating together with the second driver 132 and the plurality of fifth drivers 135.

For example, when the second driving unit 132 is damaged and the rotational force shearing the third driving unit 133 is lost, the third driving unit 133, the fourth driving unit 134, and the fifth driving unit 135 have normal rotational force. It is rotated slower than the normal drive unit 130 because it is rotated by receiving the lost rotational force is not received.

At this time, the second driving unit 132 that rotates by receiving the normal rotational force and the first rotation guide 161 that receives the rotational force from the second driving unit 132 and the fifth driving unit 135 to receive the rotational force reversely lost. ) And the third driving unit 133, the fourth driving unit 134, and the fifth driving unit 135, which are rotated by receiving the lost rotational force, rotate to receive the normal rotational force. Relink.

Therefore, the first rotation guide 161 rotates in conjunction with the plurality of second driving units 132 and the plurality of fifth driving units 135 while the coupling unit 110 is damaged even when any one of the driving units 130 is damaged. Has the effect of rotating at equal intervals.

The second rotation guide 162 is installed to be engaged with the outer circumferences of the second auxiliary driving part 142 and the third auxiliary driving part 143 to rotate, and is a circular rotation guide having teeth formed on an inner circumferential surface thereof.

The second rotation guide 162 rotates in the same direction in association with the second auxiliary driving part 142 and the third auxiliary driving part 143.

The second rotation guide 162 transmits the rotational force transmitted in the order of the first auxiliary driver 141, the second auxiliary driver 142, and the third auxiliary driver 143 to the plurality of second auxiliary driver 142 and the third auxiliary driver. By rotating together with the drive unit 143, the rotational force is re-interlocked.

Accordingly, the second rotation guide 162 rotates in conjunction with the plurality of second auxiliary driving units 142 and the third auxiliary driving unit 143 in the same manner as the first rotation guide 161, and thus any of the auxiliary driving units 140. Even if one is damaged, there is an effect that the fastening part 110 rotates at the same interval.

As described above, the driving unit 130, the auxiliary driving unit 140, and the rotation guide 160 are interlocked with each other, even when any one of the driving unit 130, the auxiliary driving unit 140, and the rotation guide 160 is damaged. There is an effect of complementary mutual rotation force so that the fastening unit 110 rotates at the same interval.

The cover unit 180 is a cover member that covers the upper portion of the driving unit 130 and the auxiliary driving unit 140, and a through hole is formed to connect the driving unit 130, the auxiliary driving unit 140, and the handle unit 190. .

As shown in FIG. 9, the probe card assembly apparatus 500 of this embodiment includes the screw fastening apparatus 100 for probe cards, the stage part 510, and the lifting drive part 520. As shown in FIG.

The probe card 300 includes a plurality of probe pins 310, a space converter 320, and a PCB 330.

As shown in FIG. 10, the stage part 510 is a jig for supporting the probe card 300 during assembly, and includes a first space part 511, a second space part 512, and a third space part 513. ).

The first space 511 has a circular horizontal cross section and is a space in which the plurality of probe pins 310 are spaced apart from the bottom.

The second space part 512 has a circular horizontal cross section and is a space in which the space converter 320 is mounted.

The first space portion 511 and the second space portion 512 preferably have a vertical cross section in a step shape, and the diameter of the second space portion 512 is preferably larger than the diameter of the first space portion 511.

The third space portion 513 has a circular horizontal cross section and is a space formed between the space converter 320 and the PCB 330.

The diameter of the third space portion 513 is preferably larger than the diameter of the second space portion 512.

In addition, an intake port connected to the vacuum pump is formed in the third space 513, and is formed smaller than the diameter of the PCB 330 so that the PCB 330 is mounted on the upper portion thereof to seal the third space 513. desirable.

At this time, in order to increase the sealing ratio of the third space portion 513, the first sealing member 513a made of a rubber ring or the like is interposed on a mounting surface on which the space converter 320 of the second space portion 512 is mounted. On the mounting surface on which the PCB 330 is mounted, a second sealing member 513b made of a rubber ring or the like may be interposed.

When the third space part 513 is sealed, the PCB 330 is pulled into the third space part 513 to be in close contact with each other, and when the probe card 300 is assembled in a close state, the flatness of the probe card 300 is maintained. Has the effect of improving.

9 and 11, the lifting drive unit 520 is a lifting drive means for lifting the probe card 300, and rotates in conjunction with the rotation of the lever 521, the lever 521 rotatably provided. The ball screw 522, and the lifting link 523 for converting the rotation of the ball screw 522 to the lifting drive.

The lifting link 523 is provided at both ends of the ball screw 522, and is transferred in opposite directions by rotation so that the separation distance is stretched, and the lower end of the pair of transport blocks 523a is extended. Fixed table that is hinged to the upper end of the pair of cross bars (523b), the pair of cross bars (523b) installed so as to cross each other from the top to maintain a constant top separation distance between the pair of cross bars (523b) ( 523c).

Therefore, in the lifting link 523, when the lever 521 is rotated in one direction, the ball screw 522 rotates in one direction, and the separation distance between the pair of feed blocks 523a is caused by the rotation of the ball screw 522. As the height of the pair of crossing bars 523b is narrowed and the fixed table 523c coupled to the pair of crossing bars 523b is raised, the probe card 300 seated on the top of the fixed table 523c is raised as a result. Done.

On the contrary, when the lever 521 is rotated in the other direction, the ball screw 522 rotates in the other direction, and the separation distance between the pair of feed blocks 523a is widened by the rotation of the ball screw 522. Since the height of the cross bar 523b is lowered and the fixed table 523c coupled to the pair of cross bars 523b is lowered, the probe card 300 seated on the fixed table 523c is lowered as a result.

The lifting driving part 520 is preferably installed on the base part 530 which is a base member supporting the floor so as to be spaced apart from the floor.

Guide portion 540 is a guide member provided on the outer periphery of the base portion 530, consisting of a guide installed in the vertical longitudinal direction on top of the base portion 530 to support the screw fastening device 100 for the probe card, Furthermore, the lifting of the lifting driving unit 520 may be guided.

Therefore, by using the lift driver 520, the probe card 300 can be easily lifted and lowered to a desired position, thereby making it easy to assemble the probe card 300.

The present invention described above can be embodied in many other forms without departing from the spirit or main features thereof. Therefore, the above embodiments are merely examples in all respects and should not be interpreted limitedly.

The present invention provides a screw fastening device for a probe card for fastening the screws used in the assembly of the probe card and a probe card assembly device having the same.

Claims

A plurality of screws fastened to the probe card;

A plurality of fastening parts contacting the plurality of screws and rotating together with the plurality of screws; And

Includes; a plurality of driving unit for transmitting a rotational force to the plurality of fastening portion,

And the plurality of driving units interlock with each other when at least one of the plurality of driving units rotates to rotate in the same direction.
The method of claim 1,

The plurality of driving units,

A first driver; And

And a second driver spaced apart from the first driver.

And an interlocking portion for transmitting the rotational force of the first driving portion to the second driving portion so that the first driving portion and the second driving portion rotate forward in the same direction.
The method of claim 2,

The plurality of driving unit includes a plurality of auxiliary driving unit to rotate in the same direction in conjunction with the plurality of driving unit,

The plurality of auxiliary driving unit, when at least one of the plurality of auxiliary driving unit is rotated interlocked with each other, the screw fastening device for a probe card, characterized in that.
The method of claim 3, wherein

The plurality of auxiliary driving unit,

A first auxiliary drive unit; And

And a second auxiliary driving part spaced apart from the first auxiliary driving part.

And an interlocking portion configured to transmit the rotational force of the first auxiliary driving part to the second auxiliary driving part so that the first auxiliary driving part and the second auxiliary driving part are rotated forward in the same direction. .
The method according to claim 2 or 4,

The linkage portion is composed of a gear,

The interlocking portion of the screw fastening device for a probe card, characterized in that the first driving unit and the second driving unit disposed on both sides rotate in the opposite direction to the forward direction in the same direction.
The method according to claim 2 or 4,

The linkage portion is composed of a timing belt,

The interlocking part is a screw fastening device for a probe card, characterized in that for rotating the first drive unit and the second drive unit disposed on both sides in the same direction forward rotation.
The method of claim 2,

And a circular first rotation guide which is installed to be engaged with the outer circumference of the second driving unit and rotates, the tooth having a tooth formed on an inner circumferential surface thereof.

And the first rotation guide is interlocked with the second driving unit to rotate in the same direction.
The method of claim 4, wherein

A second rotation guide having a circular shape that is installed to be rotated by being engaged with an outer circumference of the second auxiliary driving part and has a tooth formed on an inner circumferential surface thereof;

And the second rotation guide rotates in the same direction in association with the second auxiliary driving part.
The method of claim 1,

The fastening part and the driving part are disposed with a driving part support plate therebetween,

The fastening unit and the driving unit is coupled to the connecting rod penetrating the drive unit support plate screw fastening apparatus, characterized in that rotated in the same direction.
The method of claim 9,

A screw fastening device for a probe card, characterized in that a bearing is installed between the drive unit support plate and the connecting rod.
The method of claim 3, wherein

And a diameter of the auxiliary driving part is smaller than or larger than that of the driving part.
The method of claim 1,

The driving unit,

A first driver;

A second driver spaced apart from the first driver; And

And a third driving part spaced apart from the second driving part.

A first interlocking portion configured to transmit a rotational force of the first driving portion to the second driving portion so that the first driving portion and the second driving portion rotate forward in the same direction; And

And a second interlocking portion formed of a timing belt for transmitting rotational force of the second driving portion to the third driving portion so that the second driving portion and the third driving portion rotate forward in the same direction.

The second drive unit,

A first gear part configured of a gear in contact with the first linkage part; And

And a second gear part comprising a gear in contact with the second interlocking part.
The method of claim 1,

The fastening portion,

A cylindrical body portion coupled to the lower portion of the driving portion;

A protruding contact portion coupled to a lower portion of the body portion; And

And a spring inserted into the body part and having one end supported by the body part so that the contact part has elasticity and the other end contacting the other end of the contact part.
A probe card assembling device comprising the screw fastening device for a probe card according to claim 1,

Including a stage unit,

The probe card includes a plurality of probe pins, a space converter and a PCB,

The stage unit,

A first space in which the plurality of probe pins are spaced apart from a bottom;

A second space in which the space transformer is mounted; And

And a third space formed between the space converter and the PCB.
The method of claim 14,

Probe card assembly apparatus, characterized in that the third space is formed with an inlet port connected to the vacuum pump.
The method of claim 15,

The third space portion is a horizontal cross-section of the probe card assembly apparatus, characterized in that the formed smaller than the diameter of the PCB so that the PCB is mounted on the top is sealed.
The method of claim 16,

A first sealing member is interposed on the mounting surface on which the space transducer of the second space part is mounted.

Probe card assembly device, characterized in that the second sealing member is interposed on the mounting surface on which the PCB is mounted.
A probe card assembling device comprising the screw fastening device for a probe card according to claim 1,

It includes a lifting drive unit;

The lifting drive unit,

A rotatably installed lever;

A ball screw rotated according to the rotation of the lever; And

And a lift link for converting the rotation of the ball screw into lift drive.
The method of claim 18,

The lifting link,

A pair of transfer blocks installed at both ends of the ball screw and moved in opposite directions by rotation so that the separation distance is stretched;

A pair of cross bars installed by the lower end hinged to the pair of transfer blocks so as to cross each other from above; And

And a fixed table that is hingedly coupled to the top of the pair of cross bars to maintain a constant distance between the top of the pair of cross bars.
The method of claim 19,

A base part installed at the lower part of the lifting driver so as to be spaced apart from the floor to support the floor; And

And a guide part installed in the vertical longitudinal direction on the base part to support the screw fastening device for the probe card.