WO2018034368A1 - Dispositif de nettoyage collecteur de poussière ayant une structure de buse rotative - Google Patents

Dispositif de nettoyage collecteur de poussière ayant une structure de buse rotative Download PDF

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Publication number
WO2018034368A1
WO2018034368A1 PCT/KR2016/009149 KR2016009149W WO2018034368A1 WO 2018034368 A1 WO2018034368 A1 WO 2018034368A1 KR 2016009149 W KR2016009149 W KR 2016009149W WO 2018034368 A1 WO2018034368 A1 WO 2018034368A1
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WO
WIPO (PCT)
Prior art keywords
dust collecting
nozzle
hood housing
cleaner
substrate
Prior art date
Application number
PCT/KR2016/009149
Other languages
English (en)
Korean (ko)
Inventor
황창배
Original Assignee
(주)엔티케이코퍼레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)엔티케이코퍼레이션 filed Critical (주)엔티케이코퍼레이션
Priority to CN201680087012.XA priority Critical patent/CN109311065B/zh
Priority to PCT/KR2016/009149 priority patent/WO2018034368A1/fr
Publication of WO2018034368A1 publication Critical patent/WO2018034368A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area

Definitions

  • the present invention relates to a dust collecting cleaner of a rotating nozzle structure. More specifically, a fluid such as air is sprayed from various rotating nozzles onto various electromagnetic plates, glass substrates, wafers, or display surfaces to remove foreign substances on the surface. It is about dust collecting cleaner.
  • the efficiency of such a cleaning device may be determined by the size of the removable fine particles and whether the substrate is damaged or not.
  • the fine particles corresponding to the impurities present on the semiconductor wafer, the LCD substrate, or the glass substrate may be removed by a dry or wet cleaning device, and the cleaning device having a brush or nozzle structure may be applied to remove such particles.
  • Korean Patent Registration No. 0749544, 'Substrate Cleaning Device and Substrate Cleaning Method' relates to a substrate cleaning method and a substrate cleaning device that can dry a substrate smoothly in a process of cleaning the surface to be processed.
  • An inlet through which dry gas flows into the second discharge port and an outflow through which dry gas flows out of the second discharge port The included and has the cross-sectional area of the outlet is disclosed with respect to the substrate cleaning apparatus is larger than the cross-sectional area of the inlet to prevent the drying gas flowing into the area in
  • the prior art is a substrate cleaning apparatus having a substrate transfer member for transporting while supporting the substrate and a rotatable nozzle member having a plurality of spray holes for spraying the cleaning fluid on the outer peripheral surface and rotatably installed in the transport path of the substrate Is disclosed.
  • the rotatable nozzle member includes a cylindrical body installed in the width direction of the substrate, a support on which both ends of the body are rotatably supported, and a driving unit for rotating the body, and the body receives the cleaning fluid from the cleaning fluid supply. It consists of a cylinder having a passageway, and a spray hole to which the cleaning fluid provided to the inner passage is sprayed, and the spray holes are provided radially and equidistantly to the body.
  • Known prior art can be applied in a limited manner depending on the size of the particulates or foreign matter present in the substrate, there is a problem that a region in which the particulates or foreign matter is not removed during the application may occur. Therefore, there is a need for a cleaning apparatus that allows foreign matter of any size to affect the performance of the substrate itself or a process related to the processing of the substrate, while at the same time allowing the cleaning effect to be uniformly distributed throughout the substrate.
  • a cleaning apparatus needs to be applied to prevent damage to the substrate in the cleaning process, but the prior art does not disclose such a cleaning apparatus.
  • the present invention is to solve the problems of the prior art has the following object.
  • An object of the present invention is to provide a dust collecting cleaner having a rotating nozzle structure that allows particles having an arbitrary size to be removed while preventing damage to the substrate during the cleaning process while applying a uniform spraying pressure over the substrate. It is.
  • the dust collecting cleaner of the rotary nozzle structure is formed with a path for collecting foreign matter, the hood housing formed in the placement space therein; A plurality of nozzle units disposed linearly along one direction of the hood housing; A feed tab for supplying compressed gas to the plurality of nozzle units; A guide plate disposed on both sides of the hood housing so as to extend in a horizontal direction, and a pair of nozzles including a dust collecting inlet formed at an interface between the hood housing and the guide plate, the nozzle units being spaced apart from each other and rotating do.
  • it further comprises at least one ionizer installed between the nozzle unit and the dust collecting inlet.
  • each nozzle unit comprises a rotary supply member; A positioning member extending in both directions of the rotational supply member; And nozzles disposed at both ends of the positioning member.
  • the inclined plane is formed at both ends of the positioning member, and the nozzle is disposed in the inclined plane.
  • the dust collecting inlet is connected to the dust collecting path, and the dust collecting path gradually widens while being inclined with respect to the inflow space and the inflow space extending upward in a narrow width. Is done.
  • the dust collecting cleaner according to the present invention enables the cleaning of all required areas by spraying a fluid such as a gas while rotating a pair of nozzles disposed to face each other.
  • the dust collecting cleaner according to the present invention allows the pressure applied to the substrate to be adjusted by adjusting the spray direction of the nozzle. As a result, damage to the substrate may be prevented by adjusting the pressure according to the type of the substrate.
  • the dust collecting cleaner according to the present invention enables the removal of various types of fine particles present in the substrate by spraying the fluid in various ways by forming nozzle tips having different shapes along the longitudinal direction in the nozzle unit. .
  • the cleaner according to the present invention allows the removal of foreign matters having a diameter of 3 ⁇ m or more, and the removal of foreign matters having a diameter of 1 ⁇ m or more floating around the substrate or its surroundings by additionally applying ultrasonic waves. do.
  • FIG. 1 illustrates an embodiment of a dust collecting cleaner according to the present invention.
  • FIG. 2 illustrates an embodiment in which an auxiliary device for improving performance is installed in a dust collecting cleaner according to the present invention.
  • FIG 3 is a view illustrating an embodiment of a nozzle unit installed in a dust collecting cleaner according to the present invention.
  • Figure 4 illustrates an embodiment of a process of dust collection by the dust collecting cleaner according to the present invention.
  • FIG. 5 shows an embodiment of the operating structure of the dust collecting cleaner according to the present invention.
  • FIG. 1 illustrates an embodiment of a dust collecting cleaner according to the present invention.
  • the dust collecting cleaner 10 includes a hood housing 11 formed with a path through which foreign substances are collected and formed in an arrangement space therein; A plurality of nozzle units 13a to 13n disposed linearly along one direction of the hood housing 11; A supply tap 12 for supplying compressed gas to the plurality of nozzle units 13a to 13n; Guide plates 16a and 16b disposed on both sides of the hood housing 11 to extend in a horizontal direction; And a pair of dust collecting inlets 14a and 14b formed at the interface between the hood housing 11 and the guide plates 16a and 16b, and spaced apart from each other in the nozzle units 13a to 13n to be rotated.
  • the nozzle tip is disposed.
  • the dust collecting cleaner 10 may be installed above the substrate to be transferred by the transfer apparatus, but is not limited thereto and may be installed at various positions according to the type or structure of the substrate.
  • the substrate may have a glass substrate, a metal substrate, a wafer, an LED substrate, a metal or nonmetal surface, but is not limited thereto and may have a plane having any material or size that requires removal of foreign matter.
  • the dust collecting cleaner 10 may be applied to remove foreign matter having an arbitrary diameter and may be applied to remove foreign matter attached to a surface having a diameter of 3 ⁇ m or more, for example. When an additional device for removing foreign matters is used, the foreign matter removing ability of the dust collecting cleaner 10 may be improved.
  • the dust collecting cleaner 10 according to the present invention may have a foreign material removal ability of 1 ⁇ m or more.
  • the size of the removable foreign matter can be improved by adding various devices, and the dust collecting cleaner 10 according to the present invention is not limited by the size of the removable particles.
  • the hood housing 11 may be disposed such that the nozzle units 13a to 13n are spaced apart from the substrate on which the foreign matter is to be removed by a predetermined distance.
  • it may be made of a hemispherical or polygonal roof structure in which a space where the nozzle units 13a to 13n are formed while the dust collecting induction path is formed, but is not limited thereto.
  • the shape or overall size of the hood housing 11 may be appropriately selected depending on the structure of the substrate, the extent to which foreign material removal is required, the spray rate or the pressure of the fluid.
  • a fluid supply unit for supplying a compressed fluid such as air may be disposed inside the hood housing 11.
  • the fluid supply unit can be a device such as, for example, a dispensing tube.
  • Compressed fluid may be supplied from an external source and supplied to the fluid supply unit through the supply tab 12. It can then be dispensed from the fluid supply unit to each nozzle unit 13a to 13n and sprayed toward the substrate through the nozzle.
  • the fluid supply unit may be fixed to the inside of the hood housing 11 by fixing means, and the supplied fluid may be supplied to the rotation supply member and transferred to the nozzle units 13a to 13n.
  • the rotary supply member may have various structures that can be coupled to the fluid supply unit and rotated.
  • a motor for example, a motor, a wiring connected to the motor, or a conduit for the induction of external air can be arranged inside the fluid supply unit.
  • the fluid supply unit may be in the shape of a rod member extending while having a polygonal cross section, but is not limited thereto.
  • the nozzle units 13a to 13n include the rotational supply member described above, and may be installed in an arrangement space formed in the longitudinal direction inside the hood housing 11.
  • the nozzle units 13a to 13n may be rotatably coupled to the fluid supply unit installed above the placement space and connected to the supply tab 12.
  • the nozzle units 13a to 13n can be disposed along the longitudinal direction of the hood housing 11 and can spray a fluid, such as air, onto the substrate through the nozzles disposed at both ends of each nozzle unit 13a to 13n. have.
  • adhesive or non-sticky foreign matter adhered to the substrate may be introduced into the dust collecting inlets 14a and 14b by spraying the gas.
  • Guide plates 16a and 16b extending in the horizontal direction may be disposed on both sides of the hood housing 11.
  • the induction plates 16a and 16b may have an induction plane extending in parallel with the substrate or the dust collection plane, and may be made in an L shape in which one end is fixed to the outer side wall of the hood housing 11.
  • the induction plates 16a and 16b may function to guide air outside the dust collecting housing 11 to the dust collecting inlets 14a and 14b. Due to the structure of the dust collecting cleaner 10, air inside and outside the hood housing 11 may be collected inside the hood housing 11 based on the dust collecting inlets 14a and 14b.
  • the dust collecting inlets 14a and 14b may be formed at the interface between the hood housing 11 and the guide plates 16a and 16b, and may be connected to the discharge passage units 15a to 15m formed above the hood housing 11. have.
  • the dust collecting inlet 14a 14b may be formed to have a structure extending along the length direction of the hood housing 11 while forming a boundary between the lower end of the side wall of the hood housing 11 and the guide plates 16a and 16b. . Or along the inner face of the side wall of the hood housing 11.
  • the dust collecting inlets 14a and 14b may be a slit structure made by a pair of plates separated from each other. Air including foreign matter introduced through the dust collecting inlets 14a and 14b may be guided through an induction path formed along the side of the hood housing 11 to be discharged to the outside through the discharge passage units 15a to 15m.
  • FIG. 2 illustrates an embodiment in which an auxiliary device for improving performance is installed in a dust collecting cleaner according to the present invention.
  • the nozzle unit may be fixed to the nozzle frame 18 installed under the hood housing 11.
  • At least one ionizer 17a or 17b may be installed between the nozzle units 13a to 13n and the dust collecting inlets 14a and 14b.
  • the ionizers 17a and 17b may be fixed to the hood housing 11 by a fixed shaft, and may have a function of removing electrostatic charges generated in the process of separating the foreign matter by injecting gas onto the substrate surface. Air containing anion or cation may be sprayed by the ionizers 17a and 17b, and damage or a foreign matter of the substrate due to the generation of static electricity by the ionizers 17a and 17b may be in the form of a cluster. Can be prevented.
  • An ultrasonic unit may be installed together with the ionizers 17a and 17b.
  • the ultrasonic unit may be installed together with the ionizers 17a and 17b or separately from the ionizers 17a and 17b to remove fine particles adhered to the substrate surface.
  • the ionizers 17a and 17b or the ultrasonic unit may be selectively installed according to the type of the substrate, and are not necessarily installed.
  • Air containing foreign matter that converges to the dust collecting inlets 14a and 14b may be led to the discharge passage unit 15a through the dust collecting path DP formed in the hood housing 11.
  • suction means may be installed inside or outside the hood housing 11 to adjust the air flow in the dust collecting path DP.
  • the dust collecting fan 22 may be disposed above the hood housing 11 in an appropriate number, and the discharge passage unit 15a may be connected to the reservoir by the dust collecting hose.
  • the nozzle unit installed in the nozzle frame 18 may have a structure in which air to be sprayed converges to the dust collecting inlets 14a and 14b.
  • FIG 3 is a view illustrating an embodiment of a nozzle unit installed in a dust collecting cleaner according to the present invention.
  • the nozzle unit 13a includes a rotational supply member 31; A positioning member 32 extending in both directions of the rotational supply member 31; It consists of the nozzles 33a and 33b arrange
  • the rotational supply member 31 may be made into a cylindrical shape, and the positioning member 32 may be a cylindrical shape having a smaller diameter than the rotational supply member 31. And the position adjustment member 32 is arranged to penetrate the lower portion of the rotation supply member 31 so that the nozzle unit 13a can be T-shaped as a whole. Conical nozzles 33a and 33b are disposed at both ends of the positioning member 32 so that the fluid for cleaning the substrate may be sprayed in a predetermined direction.
  • An inclined plane 321 that is inclined along an extension direction may be formed at both ends of the positioning member 32, and nozzles 33a and 33b may be fixed to the inclined plane 321.
  • the inclined plane 321 may be inclined outward with respect to the positioning member 32, and the inclination angle may be, for example, 5 to 20 degrees, but is not limited thereto.
  • the nozzles 33a and 33b are disposed on the inclined plane 321 so that the spray direction of the fluid can be inclined with respect to the substrate. And by damaging the substrate by spraying the compressed gas in the inclined direction, air containing foreign matter can be led to the dust collection inlet.
  • One spray hole 332 may be formed at an end portion of the nozzle body 331 having a conical shape, and two spray holes 333 may be formed at the nozzle body 331.
  • the spray direction of the 2 spray holes 333 formed in the nozzle body 331 may be the same as or different from the spray direction of the 1 spray hole 332, and the 2 spray holes 333 may be the circumferential surface of the nozzle body 331. It may be formed in plurality along.
  • the nozzle 33a may be formed of a cone-shaped 1 nozzle body 331a and a cylinder-shaped 2 nozzle body 331b, and sprayed 1 at the end of the 1 nozzle body 331a.
  • the hole 332 may be formed.
  • an induction spray hole 338 having a function similar to that of the two spray holes 333 may be formed at a boundary portion between the one nozzle body 331a and the two nozzle body 331b.
  • An anti-vibration block B may be formed at one end of the two nozzle body 331b, and a fixing tab 337 coupled to the inclined plane 321 may be connected to the anti-vibration block B.
  • the induction spray hole 338 may be formed to be the same as or different from the one spray hole 332 in the spray direction while having a function of extending the spray range of the one spray hole 332.
  • the formation of two spray holes 333 or induction spray holes 338 allows the compressed air to be sprayed uniformly throughout the substrate. And thereby the air containing the foreign matter can be converged to the dust collection inlet.
  • Figure 4 illustrates an embodiment of a process of dust collection by the dust collecting cleaner according to the present invention.
  • the air containing foreign matter under the hood housing 11 is led to the dust collecting inlets 14a and 14b by the compressed gas sprayed from the nozzles 33a and 33b.
  • air positioned below the induction plates 16a and 16b may be guided to the dust collecting inlets 14a and 14b.
  • a dust collecting path may be formed inside the hood housing 11. Specifically, the dust collecting inlets 14a and 14b are connected to the dust collecting path, and the dust collecting path is gradually widened while being inclined with respect to the inflow space IS and the inflow space IS extending upward in a narrow width. It may be made of a dust collecting space (CS). If necessary, suction means may be provided, and the air guided to the dust collection inlet may be led to the discharge passage unit by the inflow space IS and the dust collection space CS.
  • CS dust collecting space
  • the dust collecting path may be made of a suitable structure in which gas floating on the substrate may be induced.
  • the inflow space IS may be formed by a passage formed by the outer wall 411 and the inner wall 421 connected to the dust collecting inlets 14a and 14b.
  • the lower end portion of the inner wall 421 may have a smaller extension length than the lower end portion of the outer wall 411, and the lower end portion of the inner wall 421 may form a curved surface inclined inward or curved inward.
  • the outer wall 411 and the inner wall 421 may be connected to the dust collecting outer wall 41 and the dust collecting inner wall 42 which form the dust collecting space CS so that the cross-sectional area becomes large while extending inwardly of the hood housing 11 so as to be inclined respectively. .
  • the dust collecting inner wall 42 may have a larger inclination than the dust collecting outer wall 41 so that the cross-sectional area of the dust collecting space CS may increase in the extending direction.
  • the dust collecting path may include a lower portion having a wide cross-sectional area, an intermediate portion having a narrow cross-sectional area, and an upper portion having the widest cross-sectional area.
  • the dust collecting space CS forming an upper portion having a wide cross-sectional area may have a relatively large slope. Due to this structure, the gas containing the foreign matter can be quickly discharged to the outside through the discharge passage unit in the dust collecting path.
  • FIG. 5 shows an embodiment of the operating structure of the dust collecting cleaner according to the present invention.
  • compressed air stored in the compressed air tank CA may be supplied to the dust collecting cleaner 10 through the adjusting unit 51.
  • Compressed air may be supplied to the nozzle unit of the dust collecting cleaner 10 through the supply tab 12, and the amount of compressed air supplied may be measured by the flow meter 52.
  • Air sprayed from the dust collecting cleaner 10 and containing foreign matter on the substrate may be introduced into the hood housing and transferred to the discharge passage units 15a and 15b.
  • the discharge passage units 15a and 15b may be connected to the air discharge manifold 54 by discharge hoses 53a and 53b such as flexible tubes.
  • the air exhaust manifold 54 may deliver the air including the foreign matter to the dust collecting reservoir 55 through the dust collecting pipe EP.
  • the dust collector 55 includes a suitable device for the treatment of foreign matter containing air, whereby the foreign matter containing air can be treated.
  • the dust collecting reservoir 55 may include a plurality of filter units.
  • the air including the foreign matter collected by the dust collecting cleaner 10 may be treated in various ways, and the present invention is not limited to the embodiment shown.
  • the dust collecting cleaner according to the present invention enables the cleaning of all required areas by spraying a fluid such as a gas while rotating a pair of nozzles disposed to face each other.
  • the dust collecting cleaner according to the present invention allows the pressure applied to the substrate to be adjusted by adjusting the spray direction of the nozzle. As a result, damage to the substrate may be prevented by pressure control according to the type of the substrate.
  • the dust collecting cleaner according to the present invention enables the removal of various types of fine particles present in the substrate by spraying the fluid in various ways by forming nozzle tips having different shapes along the longitudinal direction in the nozzle unit. .
  • the dust collecting cleaner according to the present invention for example, it is possible to remove the foreign matter having a diameter of 3 ⁇ m or more, and additionally by applying an ultrasonic wave can remove the foreign matter having a diameter of 1 ⁇ m or more floating around the substrate or its surroundings.

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  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

La présente invention concerne un dispositif de nettoyage collecteur de poussière ayant une structure de buse rotative et, plus particulièrement, un dispositif de nettoyage collecteur de poussière, ayant une structure de buse rotative, qui permet à un fluide tel que de l'air d'être pulvérisé par une pluralité de buses rotatives sur divers substrats électroniques, substrats de verre, tranches ou surfaces d'affichage et permet ainsi l'élimination de matières étrangères de la surface. Le dispositif de nettoyage collecteur de poussière, ayant une structure de buse rotative, comprend : un boîtier formant hotte (11) ayant un trajet dans lequel des matériaux étrangers sont récupérés et un espace de placement à l'intérieur de celui-ci ; une pluralité d'unités de buses (13a à 13n) disposées de manière linéaire dans la direction du boîtier formant hotte (11) ; une prise d'alimentation (12) pour fournir un gaz comprimé à la pluralité d'unités de buses (13a à 13n) ; des plaques de guidage (16a, 16b) disposées sur les deux côtés latéraux du boîtier formant hotte (11) de façon à s'étendre horizontalement ; des entrées de récupération de poussière (14a, 14b) formées sur les côtés de limite entre le boîtier formant hotte (11) et les plaques de guidage (16a, 16b), une paire de buses, qui sont disposées à distance l'une de l'autre et qui tournent, étant disposées sur chacune des unités de buses (13a à 13n).
PCT/KR2016/009149 2016-08-19 2016-08-19 Dispositif de nettoyage collecteur de poussière ayant une structure de buse rotative WO2018034368A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201680087012.XA CN109311065B (zh) 2016-08-19 2016-08-19 旋转喷嘴构造集尘系统
PCT/KR2016/009149 WO2018034368A1 (fr) 2016-08-19 2016-08-19 Dispositif de nettoyage collecteur de poussière ayant une structure de buse rotative

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2016/009149 WO2018034368A1 (fr) 2016-08-19 2016-08-19 Dispositif de nettoyage collecteur de poussière ayant une structure de buse rotative

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WO2018034368A1 true WO2018034368A1 (fr) 2018-02-22

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CN (1) CN109311065B (fr)
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CN109675868A (zh) * 2019-01-17 2019-04-26 天津长荣科技集团股份有限公司 用于印刷质量检测的除尘装置

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CN114617515B (zh) * 2020-12-14 2024-07-23 Lg电子株式会社 出入口用卫生管理装置

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Publication number Priority date Publication date Assignee Title
JPH0585070U (ja) * 1992-04-20 1993-11-16 島田理化工業株式会社 基板の洗浄装置における液切り装置
JP2000162424A (ja) * 1998-11-27 2000-06-16 Fuji Photo Film Co Ltd カラーフィルタ基板現像装置
KR20080057496A (ko) * 2006-12-20 2008-06-25 엘지디스플레이 주식회사 세정용 브러시, 이를 구비하는 기판 세정 장치 및 기판세정 시스템
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KR20150088495A (ko) * 2014-01-24 2015-08-03 이훈행 파티클의 비산 방지 기능이 구비된 공기 분사식 세정기

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109675868A (zh) * 2019-01-17 2019-04-26 天津长荣科技集团股份有限公司 用于印刷质量检测的除尘装置

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CN109311065B (zh) 2022-03-25

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