WO2018021178A1 - Robot industriel - Google Patents

Robot industriel Download PDF

Info

Publication number
WO2018021178A1
WO2018021178A1 PCT/JP2017/026444 JP2017026444W WO2018021178A1 WO 2018021178 A1 WO2018021178 A1 WO 2018021178A1 JP 2017026444 W JP2017026444 W JP 2017026444W WO 2018021178 A1 WO2018021178 A1 WO 2018021178A1
Authority
WO
WIPO (PCT)
Prior art keywords
bearing
housing
rotating shaft
magnetic fluid
arm
Prior art date
Application number
PCT/JP2017/026444
Other languages
English (en)
Japanese (ja)
Inventor
矢澤　隆之
志村　芳樹
陽介 高瀬
啓太 粟野
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Priority to CN201780044605.2A priority Critical patent/CN109476018B/zh
Priority to JP2017541391A priority patent/JP6918698B2/ja
Priority to KR1020197002066A priority patent/KR102158254B1/ko
Publication of WO2018021178A1 publication Critical patent/WO2018021178A1/fr

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/50—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall
    • F16J15/52—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall by means of sealing bellows or diaphragms

Definitions

  • the present invention relates to an industrial robot used in a vacuum, for example.
  • Patent Document 1 an industrial robot that conveys a substrate in a vacuum is known (for example, see Patent Document 1).
  • the industrial robot described in Patent Document 1 includes a hand on which a substrate is mounted, an arm to which the hand is connected to the distal end side, a main body part to which the base end side of the arm is connected, and an elevating mechanism for raising and lowering the main body part It has.
  • the arm is composed of two arm parts, a first arm part and a second arm part.
  • the main body includes a hollow rotating shaft to which the base end side of the arm is fixed, a speed reducer having an output shaft to which the hollow rotating shaft is coupled, and a substantially cylindrical holding member disposed on the outer peripheral side of the hollow rotating shaft. And a member.
  • the case body of the reduction gear is fixed to the holding member, and the holding member is fixed to the frame of the main body.
  • a bearing that rotatably supports the hollow rotating shaft is disposed between the outer peripheral surface of the hollow rotating shaft and the inner peripheral surface of the holding member in the main body. Yes.
  • the bearings are arranged at two locations with a predetermined interval in the axial direction of the hollow rotating shaft.
  • a magnetic fluid seal is disposed between the outer peripheral surface of the hollow rotating shaft and the inner peripheral surface of the holding member to prevent the outflow of air to the vacuum region.
  • a bellows for preventing the outflow of air to the vacuum region is disposed on the outer peripheral side of the holding member. The upper end of the bellows is fixed to the upper end of the case body in which the main body and the lifting mechanism are accommodated, and the lower end of the bellows is fixed to the lower end of the holding member.
  • the connecting portion (joint portion) between the arm and the hand, and the connecting portion (joint portion) between the first arm portion and the second arm portion are a reduction gear and a hollow. And a rotating shaft.
  • the hand is fixed to the upper end of the hollow rotating shaft
  • the second arm portion is fixed to the upper end of the hollow rotating shaft.
  • the lower end of the hollow rotating shaft is fixed to the output shaft of the speed reducer.
  • the output shaft of the speed reducer is rotatably supported by a bearing disposed between the output shaft of the speed reducer and the case body of the speed reducer.
  • the hollow rotating shaft is rotatably supported by the bearing via the output shaft of the speed reducer.
  • the case body of the speed reducer is fixed to the holding member.
  • the holding member In the connecting portion between the arm and the hand, the holding member is fixed to the distal end side of the arm (specifically, the distal end side of the second arm portion), and in the connecting portion between the first arm portion and the second arm portion, The holding member is fixed to the distal end side of the first arm portion.
  • a magnetic fluid seal is disposed between the outer peripheral surface of the hollow rotating shaft and the inner peripheral surface of the holding member to prevent the outflow of air to the vacuum region.
  • the magnetic fluid seal includes, for example, a magnet and a pole piece arranged so as to sandwich the magnet in the axial direction of the hollow rotating shaft.
  • the magnet and the pole piece are fixed to the holding member via a magnetic fluid seal housing.
  • the pole piece is formed in an annular shape, and the inner peripheral surface of the pole piece is opposed to the outer peripheral surface of the hollow rotating shaft via a predetermined gap.
  • the hollow rotating shaft is formed of a magnetic member, and a magnetic fluid is held in a gap between the inner peripheral surface of the pole piece and the outer peripheral surface of the hollow rotating shaft.
  • the hollow rotating shaft may be inclined with respect to the bearing that supports the hollow rotating shaft.
  • the gap between the inner peripheral surface of the pole piece of the magnetic fluid seal and the outer peripheral surface of the hollow rotating shaft changes, and the inner peripheral surface of the pole piece and the hollow rotating shaft The magnetic fluid cannot be held between the outer peripheral surface and the magnetic fluid seal may not function.
  • the hand or the like collides with a structure or the like around the industrial robot during the operation of the industrial robot, in particular, the connecting portion between the arm and the hand, the first arm portion and the first arm portion.
  • the hollow rotating shaft may receive an impact, and the hollow rotating shaft may be momentarily inclined with respect to the bearing supporting the hollow rotating shaft.
  • the magnetic fluid seal may be impacted and the magnetic fluid seal may be damaged.
  • an industrial robot of the present invention includes an arm, a rotation shaft to which the base end side of the arm is fixed, a bearing that rotatably supports the rotation shaft, and a bearing that holds the bearing.
  • a pole piece whose peripheral surface faces the outer peripheral surface of the rotating shaft, a magnetic fluid held between the inner peripheral surface of the pole piece and the outer peripheral surface of the rotating shaft, a housing for holding the magnet and the pole piece, A second bearing disposed between the outer peripheral surface of the rotation shaft and the housing so that the rotation shaft can be relatively rotated with respect to the housing;
  • an industrial robot of the present invention includes an arm composed of a plurality of arm parts that are rotatably connected to each other, a hand that is rotatably connected to the tip side of the arm, A rotating shaft to which the arm portion or the hand is fixed, a bearing that rotatably supports the rotating shaft, a bearing holding member that holds the bearing, and a magnetic fluid seal device that is disposed on the outer peripheral side of the rotating shaft
  • the magnetic fluid seal device includes a magnet, a pole piece formed in an annular shape and having an inner peripheral surface facing the outer peripheral surface of the rotating shaft, and a pole piece The magnetic fluid held between the inner peripheral surface and the outer peripheral surface of the rotating shaft, the housing holding the magnet and the pole piece, and the rotating shaft so that the rotating shaft can be rotated relative to the housing. Between the outer peripheral surface and the housing. And the seal holding member holds the housing so that the housing tilts following the inclination of the rotation shaft when the rotation shaft is inclined with respect to the bearing. It is characterized by.
  • the second bearing is disposed between the housing of the magnetic fluid seal device and the outer peripheral surface of the rotating shaft.
  • the seal holding member that holds the magnetic fluid seal device holds the housing so that the housing tilts following the tilt of the rotating shaft when the rotating shaft tilts with respect to the bearing. . Therefore, in the present invention, even if the rotation shaft is inclined with respect to the bearing, it is possible to suppress the fluctuation amount of the gap between the inner peripheral surface of the pole piece held by the housing and the outer peripheral surface of the rotation shaft. . Therefore, in the present invention, even if the rotation shaft is inclined with respect to the bearing, it is possible to appropriately hold the magnetic fluid between the inner peripheral surface of the pole piece and the outer peripheral surface of the rotation shaft. As a result, it is possible to maintain the function of the magnetic fluid seal device.
  • the seal holding member that holds the magnetic fluid seal device holds the housing so that the housing tilts following the tilt of the rotating shaft when the rotating shaft tilts with respect to the bearing. Therefore, even if the rotation shaft is subjected to an impact and is momentarily inclined with respect to the bearing, the magnetic fluid seal device is less likely to receive the impact. Therefore, in the present invention, even if the rotating shaft receives an impact and is momentarily inclined with respect to the bearing, damage to the magnetic fluid seal device can be prevented.
  • the seal holding member is, for example, a bellows disposed so as to cover the outer peripheral side of the rotating shaft, and the housing is fixed to one end of the bellows.
  • the bellows is deformed so that the housing is inclined following the inclination of the rotation shaft.
  • the magnetic fluid seal device receives an impact because the bellows is deformed so that the housing tilts following the tilt of the rotating shaft when the rotating shaft is momentarily greatly tilted with respect to the bearing. It becomes difficult.
  • the industrial robot includes a reduction gear having an output shaft to which a rotation shaft is connected, and the bearing is built in the reduction device and constitutes a part of the reduction gear and rotatably supports the output shaft.
  • a bearing holding member is a case body of a reduction gear. If comprised in this way, it will become possible to use the commercially available standard reduction gear with a built-in bearing for an industrial robot as it is. Therefore, the assembly process of the industrial robot can be simplified, and the cost of the industrial robot can be reduced.
  • the industrial robot includes a rotation prevention member that prevents the rotation shaft and the housing from rotating together, and the rotation prevention member is formed of an elastic body and is connected to the housing and the bearing holding member. preferable.
  • the rotation shaft is rotatably supported. Even if the rotation shaft is tilted with respect to the bearing, the function of the magnetic fluid seal device can be maintained. Further, in the present invention, in an industrial robot including a magnetic fluid seal device disposed on the outer peripheral side of a rotation shaft to which the base end side or the like of the arm is fixed, the rotation shaft receives an impact, and the rotation shaft is Even when the bearing is supported so as to be pivotable, the magnetic fluid seal device can be prevented from being damaged even if it is momentarily inclined.
  • (A) is a top view
  • (B) is a side view.
  • It is sectional drawing for demonstrating the internal structure of the E section of FIG. It is an enlarged view of the F section of FIG.
  • FIG. 1A and 1B are views of an industrial robot 1 according to an embodiment of the present invention, in which FIG. 1A is a plan view and FIG. 1B is a side view.
  • FIG. 2 is a cross-sectional view for explaining the internal structure of the portion E in FIG.
  • the industrial robot 1 (hereinafter referred to as “robot 1”) of the present embodiment is for transporting a glass substrate (not shown, hereinafter referred to as “substrate”) for an organic EL (organic electroluminescence) display. It is a robot.
  • the robot 1 is a robot suitable for transporting a relatively large substrate.
  • the robot 1 is used by being incorporated in an organic EL display manufacturing system.
  • This manufacturing system includes, for example, a transfer chamber disposed at the center and a plurality of process chambers disposed so as to surround the transfer chamber, and the inside of the transfer chamber and the process chamber is in a vacuum.
  • a part of the robot 1 is disposed inside the transfer chamber.
  • the robot 1 includes a hand 3 on which a substrate is mounted, an arm 4 to which the hand 3 is pivotably connected to a distal end side, and a main body 5 to which a proximal end side of the arm 4 is pivotally connected. Yes.
  • the robot 1 also includes a lifting mechanism (not shown) that lifts and lowers the main body 5.
  • the lifting mechanism and the main body 5 are accommodated in a substantially bottomed cylindrical case body 7.
  • a flange 8 formed in a disc shape is fixed to the upper end of the case body 7.
  • a through hole in which the upper end side portion of the main body 5 is disposed is formed at the center of the flange 8.
  • the hand 3 and the arm 4 are arranged on the upper side of the main body 5. Further, the hand 3 and the arm 4 are disposed on the upper side of the flange 8. As described above, a part of the robot 1 is disposed inside the transfer chamber. Specifically, a portion of the robot 1 above the lower end surface of the flange 8 is disposed inside the transfer chamber. That is, the part above the lower end surface of the flange 8 of the robot 1 is disposed in the vacuum region VR, and the hand 3 and the arm 4 are disposed in a vacuum. On the other hand, the portion of the robot 1 below the lower end surface of the flange 8 is disposed in the atmospheric region AR (in the atmosphere).
  • the hand 3 includes a base 10 connected to the arm 4 and four forks 11 on which a substrate is mounted.
  • the fork part 11 is formed in a straight line.
  • two fork parts 11 are arranged in parallel with a predetermined distance from each other.
  • the two fork portions 11 are fixed to the base portion 10 so as to protrude from the base portion 10 to one side in the horizontal direction.
  • the remaining two fork portions 11 are fixed to the base portion 10 so as to protrude from the base portion 10 toward the opposite side of the two fork portions 11 protruding from the base portion 10 to one side in the horizontal direction.
  • the arm 4 is composed of two arm parts, a first arm part 13 and a second arm part 14.
  • the base end side of the first arm portion 13 is connected to the main body portion 5.
  • the proximal end side of the second arm portion 14 is rotatably connected to the distal end side of the first arm portion 13. That is, the 1st arm part 13 and the 2nd arm part 14 are connected so that rotation is mutually possible.
  • the hand 3 is rotatably connected to the distal end side of the second arm portion 14.
  • FIG. 3 is an enlarged view of a portion F in FIG.
  • the main body 5 includes a rotation shaft 15 to which the base end side of the arm 4 (that is, the base end side of the first arm portion 13) is fixed, a motor (not shown) that rotates the rotation shaft 15, and the motor.
  • a speed reducer 16 that decelerates the rotation of the motor and transmits it to the first arm portion 13, and a main body frame 17 of the main body portion 5.
  • the main body 5 includes a magnetic fluid seal device 18 disposed on the outer peripheral side of the rotating shaft 15 and a bellows 19 disposed so as to cover the outer peripheral side of the rotating shaft 15.
  • the main body 5 includes a rotation preventing member 20 that prevents a rotation of a housing 31 (described later) constituting the magnetic fluid sealing device 18 and a rotation shaft 15.
  • the main body frame 17 is formed, for example, in a cylindrical shape with a bottom whose upper end is open.
  • the rotation shaft 15 is formed in a substantially cylindrical shape.
  • the rotation shaft 15 is formed of a magnetic member.
  • a lower surface on the base end side of the first arm portion 13 is fixed to the upper end of the rotation shaft 15.
  • a part of the rotation shaft 15 is disposed in a through hole formed in the flange 8.
  • the rotation shaft 15 of this embodiment is formed by fixing three substantially cylindrical shaft portions that are divided in the vertical direction.
  • the reducer 16 is a hollow reducer in which a through hole is formed in the center in the radial direction.
  • the reduction gear 16 is disposed so that the axial center of the through hole of the reduction gear 16 and the axial center of the rotation shaft 15 coincide.
  • the speed reducer 16 of this embodiment is an eccentric oscillating speed reducer (RV speed reducer).
  • the speed reducer 16 includes an input gear 21, a bearing 22 that rotatably supports the input gear 21, an output shaft 23 to which the rotating shaft 15 is coupled, a bearing 24 that rotatably supports the output shaft 23, And a case body 25 in which these components are accommodated.
  • a cylindrical member 26 formed in a cylindrical shape is disposed on the inner peripheral side of the speed reducer 16.
  • the reduction gear 16 may be a reduction gear other than the RV reduction gear.
  • the case body 25 is fixed to the main body frame 17.
  • the bearing 22 is, for example, a ball bearing.
  • the inner ring of the bearing 22 is fixed to the input gear 21, and the outer ring of the bearing 22 is fixed to the case body 25.
  • the bearing 22 is arrange
  • a motor that rotates the rotation shaft 15 is connected to the input gear 21 via a pulley and a belt.
  • the cylindrical member 26 is disposed on the inner peripheral side of the input gear 21. A lower end portion of the cylindrical member 26 is fixed to the case body 25.
  • the lower end of the rotating shaft 15 is fixed to the upper end of the output shaft 23.
  • the power input to the input gear 21 is decelerated and transmitted to the output shaft 23.
  • the bearing 24 is, for example, a ball bearing.
  • the outer ring of the bearing 24 is fixed to the output shaft 23, and the inner ring of the bearing 24 is fixed to the case body 25.
  • the bearing 24 is arrange
  • the bearing 24 rotatably supports the output shaft 23, and the rotation shaft 15 is fixed to the output shaft 23. That is, the bearing 24 supports the rotation shaft 15 so as to be rotatable.
  • the bearing 24 is built in the speed reducer 16 and constitutes a part of the speed reducer 16.
  • the case body 25 of this embodiment is a bearing holding member that holds the bearing 24.
  • the magnetic fluid seal device 18 is provided to prevent the outflow of air to the vacuum region VR.
  • the magnetic fluid seal device 18 is disposed on the outer peripheral side of the lower end portion of the rotating shaft 15.
  • the magnetic fluid sealing device 18 is disposed on the inner peripheral side of the upper end portion of the main body frame 17. Further, the magnetic fluid sealing device 18 is disposed above the speed reducer 16.
  • the magnetic fluid seal device 18 includes a plurality of magnets 28, a plurality of pole pieces 29 that are formed in an annular shape and whose inner peripheral surface faces the outer peripheral surface of the rotating shaft 15, and pole pieces 29
  • the magnetic fluid 30 held between the inner peripheral surface of the rotary shaft 15 and the outer peripheral surface of the rotary shaft 15, the housing 31 holding the plurality of magnets 28 and the pole piece 29, and the relative rotation of the rotary shaft 15 with respect to the housing 31.
  • a bearing 32 as a second bearing disposed between the outer peripheral surface of the rotating shaft 15 and the housing 31 is provided.
  • the magnet 28, the pole piece 29, and the magnetic fluid 30 are not shown.
  • the magnet 28 is a permanent magnet.
  • the magnet 28 is formed in an annular shape, for example, and is disposed so as to surround the rotating shaft 15.
  • the magnet 28 is magnetized so that the magnetic pole on the upper surface and the magnetic pole on the lower surface are different.
  • the pole piece 29 is made of a magnetic member such as a magnetic steel plate.
  • the pole piece 29 is arranged so as to sandwich each of the plurality of magnets 28 in the vertical direction (the axial direction of the rotation shaft 15). Further, the pole piece 29 is formed in an annular shape, for example, and is disposed so as to surround the rotating shaft 15. A certain gap is formed between the inner peripheral surface of the pole piece 29 and the outer peripheral surface of the rotating shaft 15.
  • a magnetic path that passes through the magnet 28, the pole piece 29, and the rotating shaft 15 is formed by the action of the magnet 28, and is formed in a gap between the inner peripheral surface of the pole piece 29 and the outer peripheral surface of the rotating shaft 15. As described above, the magnetic fluid 30 is held.
  • the housing 31 is formed in a substantially cylindrical shape with a flange having a flange 31a.
  • the housing 31 is arranged so that the axial center of the housing 31 formed in a substantially cylindrical shape coincides with the axial center of the rotating shaft 15.
  • the plurality of magnets 28 and the pole piece 29 are fixed to the inner peripheral surface on the upper end side of the housing 31.
  • An annular cover portion 31 b that covers the magnet 28 and the pole piece 29 from above is formed at the upper end of the housing 31.
  • the bearing 32 is disposed below the magnet 28 and the pole piece 29.
  • the bearing 32 is, for example, a ball bearing.
  • the outer ring of the bearing 32 is fixed to the inner peripheral surface on the lower end side of the housing 31, and the inner ring of the bearing 32 is fixed to the outer peripheral surface of the rotating shaft 15.
  • the bellows 19 is provided to prevent the outflow of air to the vacuum region VR.
  • the bellows 19 is formed in a cylindrical shape that can be expanded and contracted.
  • One end (lower end) of the bellows 19 is fixed to the upper surface of the flange portion 31 a of the housing 31. That is, the housing 31 is fixed to one end of the bellows 19.
  • the other end (upper end) of the bellows 19 is fixed to the flange 8.
  • the case body 7 accommodates an elevating mechanism that raises and lowers the main body 5.
  • the bellows 19 expands and contracts.
  • An O-ring 33 is disposed between the upper surface of the flange portion 31a and the lower end surface of the bellows 19 to prevent air from flowing out between the upper surface of the flange portion 31a and the lower end surface of the bellows 19. .
  • the housing 31 is fixed to the lower end of the bellows 19, and the magnetic fluid seal device 18 is held by the bellows 19 while being hung on the bellows 19.
  • the housing 31 is connected to the flange 8 via the bellows 19.
  • the bellows 19 is arranged so that the housing 31 is inclined following the inclination of the rotation shaft 15. Deform. That is, the bellows 19 holds the housing 31 so that the housing 31 tilts following the tilt of the rotating shaft 15 when the rotating shaft 15 tilts with respect to the bearing 24.
  • the bellows 19 of this embodiment is a seal holding member that holds the magnetic fluid sealing device 18.
  • the rotation stop member 20 is a spring member formed in a substantially L shape. That is, the rotation stop member 20 is formed of an elastic body. Specifically, the rotation preventing member 20 includes two plate springs 35 and 36 and a block-shaped connection member 37 that connects the two plate springs 35 and 36. The leaf springs 35 and 36 are formed in a flat plate shape. The plate spring 35 is disposed so that the thickness direction of the plate spring 35 and the vertical direction coincide with each other, and the plate spring 36 has the thickness direction of the plate spring 36 and the radial direction of the rotary shaft 15 matched. Has been placed.
  • the inner portion of the leaf spring 35 in the radial direction of the rotating shaft 15 is fixed to the flange portion 31 a of the housing 31, and the lower end portion of the leaf spring 36 is fixed to the inner peripheral side of the main body frame 17.
  • the outer portion of the leaf spring 35 and the upper end portion of the leaf spring 36 in the radial direction of the rotation shaft 15 are fixed to the connection member 37. That is, one end of the rotation stop member 20 formed in a substantially L shape is connected to the housing 31, and the other end of the rotation stop member 20 is connected to the main body frame 17. The other end of the rotation preventing member 20 is also connected to the case body 25 via the main body frame 17.
  • the rotation stop member 20 restricts the movement of the housing 31 in the circumferential direction of the rotation shaft 15.
  • the rotation preventing member 20 does not hinder the movement of the housing 31 following the tilt of the rotation shaft 15.
  • the rotating shaft 15 is deformed in the radial direction and the vertical direction.
  • the rotation stop member 20 may be a single leaf spring formed in a substantially L shape. Further, the rotation preventing member 20 may be configured by a spring member other than the leaf spring.
  • the bearing 32 is disposed between the inner peripheral surface of the housing 31 of the magnetic fluid sealing device 18 and the outer peripheral surface of the rotating shaft 15. Further, in this embodiment, the housing 31 is fixed to the lower end of the bellows 19, and when the excessive load acts on the arm 4 and the rotation shaft 15 is inclined with respect to the bearing 24, the rotation shaft 15 is inclined. Following this, the bellows 19 is deformed so that the housing 31 tilts. Therefore, in this embodiment, even if the rotation shaft 15 is inclined with respect to the bearing 24, the fluctuation amount of the gap between the inner peripheral surface of the pole piece 29 held by the housing 31 and the outer peripheral surface of the rotation shaft 15 is suppressed. It becomes possible.
  • the magnetic fluid 30 can be appropriately held between the inner peripheral surface of the pole piece 29 and the outer peripheral surface of the rotation shaft 15. As a result, the function of the magnetic fluid sealing device 18 can be maintained.
  • the housing 31 is fixed to the lower end of the bellows 19 so that when the rotation shaft 15 is inclined with respect to the bearing 24, the housing 31 is inclined following the inclination of the rotation shaft 15. Since the bellows 19 is deformed, the hand 3 or the like collides with a structure or the like around the robot 1 during the operation of the robot 1, and the rotating shaft 15 receives an impact, and the rotating shaft 15 is instantaneously applied to the bearing 24. Even if it is greatly inclined, the magnetic fluid sealing device 18 is less susceptible to impact. Therefore, in this embodiment, even if the rotating shaft 15 receives an impact and is momentarily inclined with respect to the bearing 24, damage to the magnetic fluid seal device 18 can be prevented.
  • the main body 5 includes a rotation preventing member 20 that prevents the housing 31 and the rotation shaft 15 from rotating together, and the rotation prevention member 20 is arranged in the circumferential direction of the rotation shaft 15.
  • the movement is regulated. Therefore, in this embodiment, it is possible to prevent the bellows 19 from being twisted and prevent the bellows 19 from being fatigued.
  • the rotation shaft 15 is inclined with respect to the bearing 24, the radial direction and the vertical direction of the rotation shaft 15 are not affected by the movement of the housing 31 following the inclination of the rotation shaft 15. Since the rotation preventing member 20 is deformed, the rotation of the rotation shaft 15 and the housing 31 is prevented, and the rotation of the rotation shaft 15 with respect to the bearing 24 is prevented. It becomes possible to follow.
  • the bearing 24 that rotatably supports the rotating shaft 15 is built in the speed reducer 16 and constitutes a part of the speed reducer 16. Therefore, in this embodiment, a commercially available standard speed reducer 16 can be used for the robot 1 as it is. Therefore, in this embodiment, the assembly process of the robot 1 can be simplified, and the cost of the robot 1 can be reduced.
  • the robot 1 may not include a lifting mechanism that lifts and lowers the main body unit 5.
  • the main body 5 may not include the bellows 19.
  • the main body 5 does not include the bellows 19, for example, as shown in FIG. 4, the main body 5 has an O-ring 40 that contacts the upper surface of the flange 31 a of the housing 31 and a lower surface of the flange 31 a.
  • An O-ring 41 that contacts the annular seal contact portion 42a that opposes the upper surface of the flange 31a and crushes the O-ring 40, and an annular seal contact that opposes the lower surface of the flange 31a and crushes the O-ring 41
  • a seal contact member 42 having a portion 42b may be provided.
  • the seal contact member 42 is fixed to the flange 8.
  • the magnetic fluid seal device 18 is held by two O-rings 40 and 41. Further, in this case, when an excessive load acts on the arm 4 and the rotation shaft 15 is inclined with respect to the bearing 24, the O-ring is arranged so that the housing 31 is inclined following the inclination of the rotation shaft 15. 40 and 41 are deformed. That is, the O-rings 40 and 41 hold the housing 31 so that the housing 31 tilts following the tilt of the rotating shaft 15 when the rotating shaft 15 tilts with respect to the bearing 24. In this case, the O-rings 40 and 41 are seal holding members that hold the magnetic fluid sealing device 18.
  • the main body 5 includes the speed reducer 16, but the main body 5 rotates the rotating shaft 15 and a pulley fixed to the lower end of the rotating shaft 15 instead of the speed reducer 16. You may provide the pulley fixed to the output shaft of the motor to be made, and the belt spanned over these pulleys.
  • a bearing that rotatably supports the rotation shaft 15 is held by the main body frame 17 and directly supports the rotation shaft 15.
  • the main body frame 17 in this case is a bearing holding member that holds a bearing that rotatably supports the rotation shaft 15.
  • the main body 5 may not include the rotation stopper member 20. In this case, the bellows 19 prevents the rotation shaft 15 and the housing 31 from rotating together.
  • the connecting portion between the first arm portion 13 and the second arm portion 14 is substantially the same as the connecting portion between the arm 4 and the main body portion 5. It may be configured similarly.
  • the connecting portion between the first arm portion 13 and the second arm portion 14 is the second arm portion 14 (specifically, the base end side of the second arm portion 14). Is fixed to the distal end side of the first arm portion 13 and the case body 25 of the speed reducer 16 is fixed.
  • the frame 57 is provided.
  • the connecting portion between the first arm portion 13 and the second arm portion 14 is connected to the magnetic fluid seal device 18 disposed on the outer peripheral side of the rotating shaft 15 and the outer peripheral side of the rotating shaft 15.
  • a bellows 19 arranged so as to cover.
  • the upper end of the bellows 19 is fixed to the frame 57.
  • the lower end of the bellows 19 is fixed to the upper surface of the flange 31 a of the housing 31, and the magnetic fluid seal device 18 is held by the bellows 19 while being hung from the bellows 19.
  • the rotation preventing member 20 may not be provided at the connecting portion between the first arm portion 13 and the second arm portion 14.
  • the anti-rotation member 20 may be provided at the connecting portion between the first arm portion 13 and the second arm portion 14.
  • the connecting portion between the hand 3 and the arm 4 (that is, the connecting portion between the hand 3 and the second arm portion 14) is shown in FIG.
  • You may comprise similarly to the connection part of the 1st arm part 13 and the 2nd arm part 14.
  • FIG. That is, the connecting portion between the hand 3 and the arm 4 is fixed to the distal end side of the rotary shaft 15 on which the hand 3 is fixed to the upper end, the speed reducer 16 that transmits power to the hand 3, and the second arm portion 14.
  • a frame 57 to which the case body 25 of the speed reducer 16 is fixed, a magnetic fluid sealing device 18 disposed on the outer peripheral side of the rotating shaft 15, and a bellows disposed so as to cover the outer peripheral side of the rotating shaft 15. 19 may be provided.
  • the arm 4 is configured by one first arm part 13 and one second arm part 14, but as described in FIG.
  • the arm 4 may be configured by one first arm part and two second arm parts connected to the first arm part.
  • the center portion of the first arm portion is fixed to the upper end of the rotation shaft 15.
  • the robot 1 may include two arms whose base end side is rotatably connected to the main body 5.
  • the arm 4 may be comprised by the 3 or more arm part.
  • the object to be transported by the robot 1 is an organic EL display substrate, but the object to be transported by the robot 1 may be a glass substrate for a liquid crystal display, or a semiconductor. It may be a wafer or the like.
  • the robot 1 is a robot for conveying a conveyance target object, the robot 1 may be a robot used for another use.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Diaphragms And Bellows (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne un robot industriel comprenant : un arbre rotatif (15) auquel est fixé un côté extrémité base d'un bras ; un palier (24) qui porte en rotation l'arbre rotatif ; un dispositif de joint d'étanchéité magnétique (18) qui est disposé sur un côté circonférentiel externe de l'arbre rotatif ; et un élément de maintien de joint (19) qui maintient le dispositif de joint d'étanchéité magnétique. Le dispositif de joint d'étanchéité magnétique comprend : un boîtier (31) qui maintient un aimant et une pièce polaire ; un fluide magnétique qui est retenu entre une surface circonférentielle interne de la pièce polaire et une surface circonférentielle externe de l'arbre rotatif ; et un second palier (32) qui est disposé entre le boîtier et la surface circonférentielle externe de l'arbre rotatif. L'élément de maintien de joint maintient le boîtier de sorte que, lorsque l'arbre rotatif est incliné par rapport au palier (24), le boîtier s'incline conformément à l'inclinaison de l'arbre rotatif. La présente invention peut ainsi maintenir la fonction du dispositif de joint d'étanchéité magnétique qui est disposé sur le côté circonférentiel externe de l'arbre rotatif, même lorsque l'arbre rotatif, auquel un bras, etc. sont fixés, s'incline par rapport au palier (24) qui porte en rotation l'arbre rotatif.
PCT/JP2017/026444 2016-07-28 2017-07-21 Robot industriel WO2018021178A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201780044605.2A CN109476018B (zh) 2016-07-28 2017-07-21 工业用机器人
JP2017541391A JP6918698B2 (ja) 2016-07-28 2017-07-21 産業用ロボット
KR1020197002066A KR102158254B1 (ko) 2016-07-28 2017-07-21 산업용 로봇

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016148109 2016-07-28
JP2016-148109 2016-07-28

Publications (1)

Publication Number Publication Date
WO2018021178A1 true WO2018021178A1 (fr) 2018-02-01

Family

ID=61016081

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/026444 WO2018021178A1 (fr) 2016-07-28 2017-07-21 Robot industriel

Country Status (4)

Country Link
JP (1) JP6918698B2 (fr)
KR (1) KR102158254B1 (fr)
CN (1) CN109476018B (fr)
WO (1) WO2018021178A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109343475A (zh) * 2018-09-14 2019-02-15 广州大学 一种基于磁流体的两栖软体机器人及其运动控制方法
JP2021048289A (ja) * 2019-09-19 2021-03-25 川崎重工業株式会社 傾き調整装置、及びそれを備えるロボット
WO2023062776A1 (fr) * 2021-10-14 2023-04-20 ヤマハ発動機株式会社 Robot

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653086U (ja) * 1992-12-28 1994-07-19 株式会社ダイヘン 真空チャンバの防塵装置
JP2002276821A (ja) * 2001-02-20 2002-09-25 Varian Semiconductor Equipment Associates Inc 圧力差シール装置
JP2010007790A (ja) * 2008-06-27 2010-01-14 Daihen Corp 動力伝達機構
JP2011101912A (ja) * 2009-11-10 2011-05-26 Yaskawa Electric Corp アーム機構およびそれを備えた真空ロボット
JP2014131823A (ja) * 2013-01-07 2014-07-17 Nidec Sankyo Corp 産業用ロボット

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012008321A1 (fr) * 2010-07-14 2012-01-19 日本電産サンキョー株式会社 Robot industriel, procédé de commande de robot industriel et procédé de programmation par apprentissage du robot industriel
CN201858294U (zh) * 2010-11-03 2011-06-08 中国第一汽车集团公司 全密封活塞式弹簧制动缸总成
EP2698297B1 (fr) * 2011-04-14 2021-02-24 Nabtesco Automotive Corporation Récepteur de freinage, élément soufflet et élément douille
WO2014106914A1 (fr) * 2013-01-07 2014-07-10 日本電産サンキョー株式会社 Robot industriel

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653086U (ja) * 1992-12-28 1994-07-19 株式会社ダイヘン 真空チャンバの防塵装置
JP2002276821A (ja) * 2001-02-20 2002-09-25 Varian Semiconductor Equipment Associates Inc 圧力差シール装置
JP2010007790A (ja) * 2008-06-27 2010-01-14 Daihen Corp 動力伝達機構
JP2011101912A (ja) * 2009-11-10 2011-05-26 Yaskawa Electric Corp アーム機構およびそれを備えた真空ロボット
JP2014131823A (ja) * 2013-01-07 2014-07-17 Nidec Sankyo Corp 産業用ロボット

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109343475A (zh) * 2018-09-14 2019-02-15 广州大学 一种基于磁流体的两栖软体机器人及其运动控制方法
CN109343475B (zh) * 2018-09-14 2024-02-13 广州大学 一种基于磁流体的两栖软体机器人及其运动控制方法
JP2021048289A (ja) * 2019-09-19 2021-03-25 川崎重工業株式会社 傾き調整装置、及びそれを備えるロボット
JP2021145130A (ja) * 2019-09-19 2021-09-24 川崎重工業株式会社 傾き調整装置、及びそれを備えるロボット
JP7299808B2 (ja) 2019-09-19 2023-06-28 川崎重工業株式会社 傾き調整装置、及びそれを備えるロボット
WO2023062776A1 (fr) * 2021-10-14 2023-04-20 ヤマハ発動機株式会社 Robot

Also Published As

Publication number Publication date
JP6918698B2 (ja) 2021-08-11
KR102158254B1 (ko) 2020-09-21
CN109476018B (zh) 2022-06-28
KR20190020787A (ko) 2019-03-04
CN109476018A (zh) 2019-03-15
JPWO2018021178A1 (ja) 2019-05-09

Similar Documents

Publication Publication Date Title
JP6499826B2 (ja) 産業用ロボット
WO2018021178A1 (fr) Robot industriel
JP4971063B2 (ja) 搬送装置
JP5480562B2 (ja) 産業用ロボット
JP6313963B2 (ja) 産業用ロボット
US20080019816A1 (en) Drive Source And Transportation Robot
CN103079777B (zh) 旋转体的旋转范围限制机构及工业用机器人
JP2014034106A (ja) 産業用ロボット
JP4749124B2 (ja) 真空用直線搬送装置
WO2012147557A1 (fr) Mécanisme de rotation, robot industriel et procédé permettant de revenir à la position initiale d'un corps rotatif
JP4697658B2 (ja) 位置決めテーブル装置
JP4749123B2 (ja) 耐モーメント対策静圧気体軸受機構
CN105127985B (zh) 工业用机器人
CN105555487A (zh) 工业用机器人
JP4648161B2 (ja) ダブルアーム列式基板搬送用ロボット
JP2014037027A (ja) 搬送装置
JP5295265B2 (ja) 処理装置
JP6007111B2 (ja) 産業用ロボット
JP2002096285A (ja) 搬送装置における２軸出力エンコーダの配置
JP4233520B2 (ja) ハンドリング用ロボット
KR20230048603A (ko) 산업용 로봇 및 제조 시스템
KR20230048598A (ko) 산업용 로봇
CN102460674A (zh) 基板传输装置
KR20220099449A (ko) 반도체 기판 이송 로봇
KR101455940B1 (ko) 웨이퍼 연마장치

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2017541391

Country of ref document: JP

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17834186

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20197002066

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17834186

Country of ref document: EP

Kind code of ref document: A1