WO2018003097A1 - Dispositif de mesure optique de surface intérieure - Google Patents

Dispositif de mesure optique de surface intérieure Download PDF

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Publication number
WO2018003097A1
WO2018003097A1 PCT/JP2016/069540 JP2016069540W WO2018003097A1 WO 2018003097 A1 WO2018003097 A1 WO 2018003097A1 JP 2016069540 W JP2016069540 W JP 2016069540W WO 2018003097 A1 WO2018003097 A1 WO 2018003097A1
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WIPO (PCT)
Prior art keywords
motor
optical
tube
optical path
optical fiber
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PCT/JP2016/069540
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English (en)
Japanese (ja)
Inventor
大志 山崎
正人 森本
拓也 舘山
隆文 淺田
Original Assignee
並木精密宝石株式会社
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Application filed by 並木精密宝石株式会社 filed Critical 並木精密宝石株式会社
Priority to JP2018524689A priority Critical patent/JP6865441B2/ja
Priority to PCT/JP2016/069540 priority patent/WO2018003097A1/fr
Publication of WO2018003097A1 publication Critical patent/WO2018003097A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G02B23/26—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes using light guides

Definitions

  • the present invention allows an optical measurement probe to enter the inner peripheral surface or deep hole inner diameter of an object to be measured, emits a light beam to the inner surface or deep hole bottom surface, captures reflected light three-dimensionally, and observes the internal shape.
  • the present invention relates to an optical inner surface measuring apparatus for measuring dimensions and geometric accuracy.
  • the quality of finished processing and geometric accuracy of fuel injection nozzle parts for automobile engines greatly affects the power performance and fuel consumption efficiency of automobiles, but these inspections are generally performed by roundness measuring instruments, surface roughness meters, etc. Inspected using a contact-type measuring machine such as a length measuring machine using a linear scale. However, in recent years, optical non-contact measuring machines have been introduced for the purpose of not scratching the object to be measured.
  • an image diagnostic technique is a technique that is widely used in equipment machines, medical sites, and the like.
  • an image diagnostic technique is a technique that is widely used in equipment machines, medical sites, and the like.
  • light sensor is used to irradiate the inner surface and detect the intensity of reflected light
  • a method of automatically inspecting for the presence or absence of surface scratches as judged by a computer is employed.
  • an X-ray CT capable of observing a tomographic image for observing an affected part inside a human body, nuclear magnetic resonance, an OCT image by an endoscope using light coherence (light interference using near-infrared light).
  • Methods such as tomography are being studied and utilized.
  • observation or dimensional measurement of scratches on the inner peripheral surface by irradiating light on the inner peripheral surface of a machine part having a hole or a precision inner diameter has been studied.
  • Typical structures of these observation and measurement devices are as shown in Patent Documents 1 to 3, for example.
  • the probe is inserted into the inner peripheral surface of the hole to be measured, and the light beam from the condenser lens (3) is converted into an optical path changing means.
  • the mirror 18 is rotated 360 degrees, and the angle of the mirror is changed due to the change in centrifugal force, and the radiation angle of the light beam is changed, whereby the light beam is emitted in a three-dimensional direction to measure the three-dimensional shape.
  • the heat generated by the motor that rotates in the probe propagates to the object to be measured. It could not be measured.
  • the present invention has been made in view of the above-described conventional circumstances, and the problem is that the measurement probe is inserted into the inner peripheral surface or deep hole inner diameter of the object to be measured, or the hole of a long and bent pipe.
  • Rotating and radiating light rays to the inner peripheral surface or deep hole bottom collecting reflected light three-dimensionally, computer processing, observing 3D image data, measuring dimensions and measuring geometric accuracy.
  • a more important requirement is to prevent the heat generated from the rotating motor from propagating to the object to be measured and its own rotating radiation section.
  • an optical inner surface measuring apparatus that measures the inner peripheral surface of a measured object and measures the dimensional accuracy by using an optical measurement method (such as optical interference method or spectral interference method)
  • the built-in optical fiber and at least one or more optical path conversion means at the distal end of the optical fiber, a motor for rotating the optical path conversion means in the tube, and the gas taken from the distal end side from the motor is
  • the tube is evacuated from the front side of the motor through the inside of the tube, and a hard light-transmitting pipe is attached to the tip of the tube, the light-transmitting pipe is inserted into the inner diameter of the object to be measured, and the light beam guided through the optical fiber is It is emitted from the optical path changing means, irradiated to the circumferential surface of the object to be measured through the translucent pipe, and the reflected light is detected through the translucent pipe. It was.
  • the optical probe for measurement can enter the hole of the object to be measured and the light can be emitted, the measurement can be performed stably without the influence of the surface shape and roughness, and the motor built in the optical probe can be used. It has a cooling function that prevents the propagation of heat generation, and the influence of bearing runout and vibration of the motor in the probe for measurement can be eliminated by measurement using a translucent pipe, which is the standard for measurement. The accuracy of the inner peripheral surface can be measured.
  • FIG. 1 is a configuration diagram of an optical inner surface measuring apparatus according to an embodiment of the present invention.
  • First optical probe sectional view of the optical inner surface measuring apparatus Rotation operation explanatory diagram of the same optical probe Illustration of scanning angle of the same optical probe Illustration of scanning angle of the same optical probe 3D scanning range explanatory diagram of the same optical probe
  • Explanatory drawing of calibration method for the same optical probe Explanatory diagram of temperature change of the optical probe Measurement variation explanation of the optical inner surface measuring device
  • Second optical probe sectional view of the optical inner surface measuring apparatus Explanatory drawing of load limiting mechanism of slider for optical probe Operation diagram when the slider is overloaded
  • an optical inner surface measuring apparatus for observing and measuring an object to be measured includes an optical fiber built in the tube and at least one optical path at the tip of the optical fiber.
  • the tube has a motor for rotating the optical path conversion means in the tube, and the gas taken in from the tip side of the motor is exhausted from the front side of the motor through the tube, and the tip of the tube is hard light-transmitting
  • a light pipe is inserted into the inner diameter of the object to be examined, and the light beam guided from the optical fiber by the optical path changing means emits a light beam in the circumferential direction through the light transparent pipe, and the reflected light Is again detected through the translucent pipe.
  • the measurement probe since the measurement probe is allowed to enter the hole of the object to be measured and light can be emitted from the vicinity of the hole to the inner peripheral surface at a substantially right angle, stable measurement can be performed without the influence of the surface shape and roughness. Further, the propagation of heat generated from the motor built in the optical probe can be prevented by the cooling action caused by the inflow of gas. In addition, the influence of bearing vibration and vibration of the motor with a built-in optical probe, which is a cause of variation in measurement accuracy, can be eliminated by measuring the inner surface of the object to be measured with reference to the dimension of the light-transmitting pipe. By these things, it is possible to accurately and accurately measure the inner diameter and inner peripheral surface.
  • the first motor and a second motor disposed on the rear side of the first motor, the first optical path changing means operated by the first motor, and the second motor operated by the second motor.
  • a fixed-side optical fiber that has two optical path conversion means and is disposed in a non-rotatable manner on the tube via a fixture on the rear side of the second motor, and rotates integrally with the rotary shaft of the first motor or the second motor.
  • the rotating shafts of the first motor and the second motor are each hollow, and at least a part of the rotating side optical fiber on the tip side is rotated by the first motor.
  • the shaft is hollowly inserted into the hollow hole of the shaft portion, and at least a part of the rear side is fixed to the hollow hole of the rotation shaft portion of the second motor.
  • the first optical path conversion means is the second optical path conversion means.
  • the rotating shaft of the first motor Are rotatably disposed in the integral, the second optical path changing means is configured so as to be located between the rotation-side first optical path changing means and the first motor located on the tip of the optical fiber with.
  • the gas taken in from the front end side of the motor is guided to the front side of the motor via the gap between the rotating portion and the fixed portion of the motor in the tube and exhausted.
  • the motor coil part which is the heat source of the motor, can be directly cooled with the introduced gas, so that propagation of heat from the motor in the measurement probe can be prevented more reliably and more accurate accuracy measurement is possible.
  • the tube and the light transmissive pipe is fixed to the sliding member, and when the light transmissive pipe or the tube is in contact with the test object, a contact load of a certain level or more.
  • the sliding member is configured to slide together with the translucent pipe to prevent damage.
  • the tube or the light-transmitting pipe which has a low strength and is easily damaged because of the intake hole, prevents damage when it comes into contact with the object to be examined. Accuracy measurement is possible.
  • FIG. 1 to 8 show an embodiment of an optical inner surface measuring apparatus according to the present invention.
  • FIG. 1 is a configuration diagram of an optical inner surface measuring apparatus according to an embodiment of the present invention.
  • a stand 81 is fixed to the measuring machine base 80, and a slider 82 is moved up and down together with the optical probe 34 by a slider motor 83.
  • the device under test 100 is set on a measurement base 80, and the tip of the optical probe 34 or the translucent pipe 21 is configured to enter and exit the deep hole of the device under test 100.
  • the light beam irradiates the inner peripheral surface of the object to be measured 100 through the translucent pipe 21 fixed to the tip of the tube 6, and this reflected light passes through the inside of the tube 6 through the translucent pipe 21 and is fixed to the fixed side optical fiber.
  • This optical inner surface measuring device has a diameter measuring function, a roundness measuring function, and a cylindricity measuring function obtained by three-dimensional display.
  • FIG. 2 is a sectional view of the tip of the optical probe 34 of the optical inner surface measuring apparatus according to the embodiment of the present invention.
  • the fixed-side optical fiber 1 for guiding the light beam from the rear end side to the front end side of the optical probe 34 is inserted into a sufficiently long tube 6 and fixed by the optical fiber fixture 4.
  • Rotating side optical fiber 2 is rotatably arranged at the front end side of fixed side optical fiber 1.
  • First optical path conversion means 3a, 3b made of a substantially flat mirror or the like is further attached to the distal end side of the rotation side optical fiber 2 independently of the rotation side optical fiber 2 and rotated by the first motor 12. In this case, the light beam is radiated in a 360-degree circumferential direction.
  • the end surfaces of the rotation-side optical fiber 2 and the fixed-side optical fiber 1 are opposed to each other with a minute distance of about 5 microns, and the rotation-side optical fiber 22 including the rotating light-shielding plate 5 and the optical fiber fixing tool 4 is formed. High transmittance can be maintained between the optical fiber 2 and the fixed-side optical fiber 1, and the optical connection is made with almost no loss.
  • the light beam transmitted through the fixed-side optical fiber 1 and the rotating optical connector 22 is condensed and rotated at a slight angle toward the distal end.
  • the second optical path changing means 20 that emits a light beam toward the first optical path changing means 3 a and 3 b is attached to the tip of the rotation side optical fiber 2.
  • the first hollow rotating shaft 10 to which the first motor coil 7, the first bearings 9b and 9a, and the motor thrust plate 8 are fixed to the motor case 24 and the first rotor magnet 11 is attached rotates.
  • a voltage is applied to the first motor coil 7 from the electric wire 17, and the first optical path changing means 3 using a mirror or the like is attached to the rotating first hollow rotating shaft 10.
  • the second motor 19 is located behind the first motor 12, and the second bearings 16 a and 16 b and the second motor coil 15 are attached to the motor case 24.
  • the second bearings 16 a and 16 b are the second rotor magnets 14.
  • the second hollow rotating shaft 13 having a rotation is supported rotatably, and a voltage is applied from the second electric wire 18 to rotate.
  • the rotation-side optical fiber 2 is inserted and fixed in the hole 13a of the second hollow rotary shaft 13, and the second optical path conversion means 20 made of a prism or the like is attached to the tip of the rotation-side optical fiber 2, and these rotate integrally.
  • a part of the rotation-side optical fiber 2 is rotatably inserted into the hole of the first hollow rotation shaft of the first motor 12 and rotates relatively.
  • the first motor 12 and the second motor 19 are fixed to the motor case 24 with a gap by the fixing dowels 33a and 33b.
  • At the tip side of the first motor 12 at least one intake hole 6 a is formed in the tube 6 or the translucent pipe 21, and the pipe temperature sensor 31 is provided in the translucent pipe 21 or the tube 6. Is provided.
  • an intake tube 29 and an intake fan 30 are attached to the tube 6. Gas is sucked from the intake hole 6 a in FIG. 2, and the sucked gas is exhausted from the intake fan 29 until the first time.
  • the motor 12 and the second motor 19 are cooled to prevent heat generated from these motors from propagating to the translucent pipe 21 and the device under test 100, and the measurement dimensions of the device under test due to thermal expansion are prevented.
  • the first motor 12 shown in FIG. 2 is supplied with electric power from the first motor driver circuit 86 shown in FIG. 1 and driven to rotate.
  • the second motor 19 is supplied with voltage from the second motor driver circuit 87 and driven to rotate. .
  • a translucent pipe 21 capable of transmitting light rays is attached integrally with the tube 6.
  • the inner peripheral surface or outer peripheral surface of the translucent pipe 21 is coated with a coating or the like for reducing surface reflection and increasing light transmittance as necessary.
  • the first optical path changing means 3 is constituted by a rotatable mirror or prism, and has high reflection efficiency and can reduce the optical loss and perform highly accurate measurement.
  • the second optical path conversion means 20 is composed of a prism having a substantially flat surface inclined at the tip, and has high light-collecting properties, and can perform high-precision measurement with reduced optical loss.
  • light rays such as near infrared rays or laser light emitted from the measuring instrument main body 85 travel through the fixed-side optical fiber 1 built in the tube 6.
  • the guided light beam is a rotating optical connector. 2 and the rotation-side optical fiber 2, as shown in FIG. 2, it is emitted from the second optical path changing means 20, reflected by a substantially flat portion of the first optical path changing means 3a, and in a certain angular direction (in FIG. 2, ⁇ 1
  • the direction of the radiation is rotated 360 degrees and the radiation range at this time becomes an umbrella-shaped range of angle ⁇ 1 as shown in FIG.
  • the light further passes through the translucent pipe 21, and the light reflected from the inner peripheral surface of the object to be inspected 100 is transmitted in the reverse direction along the same optical path as above.
  • the rotation speed of the first motor 12 and the second motor 19 is, for example, the rotation speed of the first motor 12 is constant at 3600 rpm, while the rotation speed of the second motor 19 is rotated at a constant speed of 3570 rpm.
  • the first optical path conversion unit 3 rotates, and at the same time, the relative rotation angle phase with the second optical path conversion unit 21 gradually changes, and the light beam eventually rotates.
  • the light beam reflected by the means 3 is radiated in the entire circumferential direction at 360 degrees, and the radiation angle in the longitudinal direction gradually changes and changes as indicated by ⁇ 2 in FIG. That is, the radiation range of the light beam at this moment is changed to an inclined umbrella-shaped scanning range as shown in FIG.
  • the radiation direction of the light beam continuously changes in the range of ⁇ 1 to ⁇ 2, and the radiation region 79 of the light beam is repeatedly irradiated three-dimensionally in the range of ⁇ 1 + ⁇ 2.
  • the rotation pulse generator 28 generates one pulse per one rotation of the first optical path changing means 3 or the first hollow rotating shaft 10, and this pulse signal is sent to the first motor driver circuit of FIG.
  • the rotational speed of the first motor 12 is adjusted and sent to the computer 89 to be used as a trigger signal for rendering a three-dimensional digital image for each frame.
  • the procedure for measuring the inner diameter 100a of the DUT 100 is as follows.
  • the translucent pipe 21 of the optical probe 34 is inserted into the hole of the ring gauge 78 whose inner diameter dimension (D1) is known, and the inner peripheral surface of the ring gauge 78 from the outer diameter of the translucent pipe 21.
  • Difference (L1 ⁇ L2) and (L1′ ⁇ L2 ′) and distances L1 and L1 ′ from the inner peripheral surface of the ring gauge to the virtual midpoint of the optical probe 34 are obtained.
  • FIGS. 8 and 9 show the case where the gas is sucked from the intake hole 6a in FIGS. 1 and 2, and the first motor 12 and the second motor 19 are cooled by the operation of the intake fan 30, and the intake fan 30 is stopped.
  • the difference when not cooled is shown.
  • the translucent pipe 21 rises by 0.5 ° C. in about 20 seconds, but thereafter, the rise stops and a constant temperature is maintained, and there is almost no temperature propagation to the object 100 to be measured. It is possible to prevent the measurement accuracy from being wrong.
  • the temperature of the translucent pipe 21 rises by 3 ° C. in about 1 minute and continues to rise gradually thereafter, and the device under test 100 also starts to rise in temperature, making it difficult to perform highly accurate measurement.
  • FIG. 9 shows the magnitude of measurement variation when the inner diameter dimension is repeatedly measured on the DUT 100 with the inner surface measuring apparatus of the present invention.
  • the variation in the results of repeated measurements 100 times within 30 minutes under the condition with cooling was (repeated reproducibility: ⁇ ) within 0.05 micrometers, and high-accuracy measurement was possible. In the case where there was not, there was a variation of 0.15 micrometers, and high-precision measurement was difficult.
  • the computer 89 calculates the reflected light introduced from the inner peripheral surface 100 a of the DUT 100 of FIG. 1 through the optical fibers 1 and 2.
  • Dimensional measurements can be performed with the light pipe as a reference, three-dimensional data can be collected with the slider 82 stationary, and the propagation of heat from the motors 12 and 19 in the measurement probe 34 can be prevented. This eliminates the effects of bearing runout and vibration of the measuring probe internal motor, and enables accurate and accurate measurement of the inner diameter and inner peripheral surface.
  • FIG. 10 shows a cross section of the second optical probe of the optical surface measuring apparatus according to the present invention.
  • the motor case 24 is directly fixed inside the tube 6, and the gas introduced from the intake hole 6 a passes through a vent hole 8 a appropriately provided in the motor thrust plate 8, and at least the first motor 12.
  • the first motor is configured to be efficiently cooled by passing through the gap between the first motor coil 7 and the first rotor magnet 11.
  • the second motor 19 is also configured so that the gas can pass through the gap between the second motor coil 15 and the first rotor magnet 14 as necessary, and cooling can be performed further.
  • the gas taken in from the intake hole is guided to the near side of the motor (measuring instrument main body side with respect to the probe tip side) via the gap between the rotating part and the fixed part of the motor in the tube. Since the motor coil portion, which is a heat generation source, can be directly cooled with the introduced gas, propagation of heat from the motor in the measurement probe can be surely prevented, and more precise accuracy measurement can be performed.
  • the tube 6 with the vent holes 6a or the light-transmitting pipe 21 made of thin quartz or glass has a low strength, and it breaks if it is inadvertently brought into contact with the object 100 during measurement. There is a risk of doing. Therefore, as shown in FIG. 11, the tube 6 is slidably set with respect to the probe fixture 37, and is fixed to the sliding member 38 pressed by preload means 39a, 39b, 39c such as a ball, for example, to be measured.
  • the load limiter 40 composed of a combination of a ball and a notch is removed, and the optical probe 34 is slid upward in the drawing, and damage due to collision is prevented. ing.
  • the magnifying glass (camera) 35 always displays the state near the hole 100a of the object 100 to be measured on the monitor 90, and serves to urge the user of the measuring machine not to collide with the optical probe 34.
  • the optical probe 34 is fixed to the sliding member 38, and when the translucent pipe 21 or the tube 6 is in strong contact with the DUT 100, the sliding is caused by a certain contact load or more.
  • the member 38 can slide upward together with the translucent pipe 21 to prevent damage, and the accurate and accurate measurement of the inner diameter and inner peripheral surface can be performed safely.
  • the tube 6 has a diameter of about 2 millimeters or less, and the fixed-side optical fiber 1 penetrating through the tube 6 is a bendable glass fiber and has a diameter of 0.085 to 0.125 millimeters. The thing of the grade is adopted.
  • the first optical path conversion means 3 is composed of a mirror or a prism having a smooth reflecting surface, and its surface roughness and flatness are polished to an accuracy equal to or higher than that of a general optical component in order to increase the reflectance.
  • the first hollow rotating shaft 10 is made of metal or ceramics, and a hollow is formed by drawing with a die of molten metal or extrusion with a die of ceramics before firing, and finished by a polishing method or the like after the curing process.
  • the hole of the first hollow rotating shaft 10 has a diameter of 0.1 to 0.5 mm and is sufficiently larger than the diameter of the rotating optical fiber 2, so that the fixed optical fiber 1 fixed by the optical fiber fixture 4 is the first one. 1 There is no risk of contact with the hollow rotating shaft 10, and even if lightly touched, wear powder is not generated. Further, there is no problem that the rotational friction torque varies in this portion.
  • the measurement probe 34 by allowing the measurement probe 34 to enter the hole of the object to be measured 100 and radiating light from the hole, the measurement can be stably performed without the influence of the surface shape and roughness of the inner peripheral surface, Propagation of heat generation from the motors 12 and 19 in the optical probe 34 is prevented.
  • the optical inner diameter measuring device for observing and measuring the object to be measured using the optical measuring method of the present invention enables high-accuracy three-dimensional observation and geometric accuracy measurement of the inner surface of the deep hole.
  • High precision measurement of industrial precision mechanism parts such as fuel injection parts and water jet nozzle parts can be performed.
  • it is expected to be used for numerical diagnosis and treatment of minute lesion dimensions in the medical field.

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  • Physics & Mathematics (AREA)
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  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
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  • Heart & Thoracic Surgery (AREA)
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Abstract

Le problème décrit par la présente invention est de permettre une mesure stable non affectée par la forme ou la rugosité de surface, et empêche les effets de la chaleur générée par un moteur logé dans une sonde de mesure, éliminent les effets de vibration ou de déviation des paliers du moteur, et réalisent correctement des mesures précises de diamètres intérieurs de haute précision et de surfaces périphériques intérieures dans un dispositif de mesure optique de surface intérieure. [Solution] la présente invention a trait à une fibre optique logée dans un tube, et au moins un moyen de conversion de chemin optique disposé sur la partie d'extrémité distale de la fibre optique, et comporte également un moteur pour entraîner en rotation le moyen de conversion de chemin optique, le moteur étant disposé à l'intérieur du tube. Un gaz aspiré depuis un emplacement situé plus loin vers le côté d'extrémité distale que le moteur passe à travers l'intérieur du tube et est évacué depuis un emplacement situé plus loin vers le côté avant du moteur. La présente invention est configurée de telle sorte qu'un tuyau translucide dur est fixé à la partie d'extrémité distale du tube, le tuyau translucide est inséré dans le diamètre intérieur d'un objet à mesurer, un faisceau lumineux guidé à travers la fibre optique est émis par le moyen de conversion de trajet optique et rayonné sur la surface périphérique interne de l'objet à mesurer à travers le tuyau translucide, et la lumière réfléchie par la surface périphérique interne est détectée à travers le tuyau translucide.
PCT/JP2016/069540 2016-06-30 2016-06-30 Dispositif de mesure optique de surface intérieure WO2018003097A1 (fr)

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JP2018524689A JP6865441B2 (ja) 2016-06-30 2016-06-30 光学式内面測定装置
PCT/JP2016/069540 WO2018003097A1 (fr) 2016-06-30 2016-06-30 Dispositif de mesure optique de surface intérieure

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113455993A (zh) * 2021-07-05 2021-10-01 南宁市第一人民医院 内镜性能检查装置
JP2022186613A (ja) * 2021-06-03 2022-12-15 キヤノン ユーエスエイ，インコーポレイテッド 中空シャフトモータを用いる光ファイバ回転継手

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JPS612119A (ja) * 1984-06-14 1986-01-08 Hitachi Cable Ltd 光フアイバスコ−プ
JP2001501719A (ja) * 1996-05-30 2001-02-06 サントル ド ピロリーズ ド マリノウ（セーペーエム） コークス炉の内視鏡検査プローブ
WO2011132664A1 (fr) * 2010-04-23 2011-10-27 コニカミノルタオプト株式会社 Sonde et son procédé d'utilisation
JP2015518398A (ja) * 2012-04-10 2015-07-02 コンメド コーポレイション ３６０度パニング立体内視鏡

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
JPS612119A (ja) * 1984-06-14 1986-01-08 Hitachi Cable Ltd 光フアイバスコ−プ
JP2001501719A (ja) * 1996-05-30 2001-02-06 サントル ド ピロリーズ ド マリノウ（セーペーエム） コークス炉の内視鏡検査プローブ
WO2011132664A1 (fr) * 2010-04-23 2011-10-27 コニカミノルタオプト株式会社 Sonde et son procédé d'utilisation
JP2015518398A (ja) * 2012-04-10 2015-07-02 コンメド コーポレイション ３６０度パニング立体内視鏡

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022186613A (ja) * 2021-06-03 2022-12-15 キヤノン ユーエスエイ，インコーポレイテッド 中空シャフトモータを用いる光ファイバ回転継手
US11796741B2 (en) 2021-06-03 2023-10-24 Canon U.S.A., Inc. Fiber optic rotary joint employing hollow shaft motor
JP7411723B2 (ja) 2021-06-03 2024-01-11 キヤノン ユーエスエイ，インコーポレイテッド 中空シャフトモータを用いる光ファイバ回転継手
CN113455993A (zh) * 2021-07-05 2021-10-01 南宁市第一人民医院 内镜性能检查装置

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