WO2017186172A1 - 用于片盒夹持的机械手及自动片盒搬运装置 - Google Patents
用于片盒夹持的机械手及自动片盒搬运装置 Download PDFInfo
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- WO2017186172A1 WO2017186172A1 PCT/CN2017/082506 CN2017082506W WO2017186172A1 WO 2017186172 A1 WO2017186172 A1 WO 2017186172A1 CN 2017082506 W CN2017082506 W CN 2017082506W WO 2017186172 A1 WO2017186172 A1 WO 2017186172A1
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- Prior art keywords
- cassette
- end effector
- robot
- flange
- automatic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
- B25J9/1697—Vision controlled systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/905—Control arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
Definitions
- the present invention relates to the field of mechanical technology, and in particular to a robot hand and an automatic cassette handling device for clamping a cassette.
- the automatic material transfer system (AMHS) has been widely adopted, including Stocker. , OHT or AGV, etc.
- AMHS automatic material transfer system
- the AMHS is dispatched through the MES system, and the silicon chip cassette is directly transferred from the stocker to the interface of each machine, and then the machine is instructed to be automated, which changes the low-efficiency mode that was completely transported by manual before, and greatly improves the advanced IC.
- the automation level of the process line effectively saves labor costs, improves product output, and increases customer value.
- the OHT system has been used for material management in the 12-inch semiconductor production line of the former process, but for many downstream packaging production lines, it also faces the problem of updating the material automation system, and the 12-inch product is coming.
- the labor force will be seriously short in the future and the labor cost will be higher and higher, so the cassette transportation
- the demand for robots will increase.
- due to the size and profit of the packaging plant it is unable to support OHT system investment such as the former semiconductor production line, so develop a convenient and economical automatic cassette transfer solution and equipment. Be a top priority.
- the identification of the position of the cassette plays a vital role.
- the existing solutions are generally two kinds, one of which, for the OHT system, the OHT equipment directly loads the cassette from the Stocker, directly reaches the load interface of the machine through the track, and places the cassette to the machine through the telescopic rope.
- the position of the cassette in the stocker is taught by the stocker's mechanical arm to the respective storage position, and the positional relationship between the OHT equipment and the cassette is tracked and mechanically positioned. It is guaranteed that when the OHT equipment places the cassette on the machine, the positional relationship of the remaining load interfaces is also guaranteed by the track and machine layout.
- a photodetector is used to detect a method of fixing a sticker on a shelf, and the cartridge is positioned by the marker recognition.
- the program is subject to two points:
- the mark is damaged during long-term use, which affects the measurement accuracy, resulting in the inability to accurately capture the cassette;
- the mark must have a certain precision relationship with the positioning plate on which the cassette is placed, which increases the cost of manufacturing the shelf.
- the present invention provides a robot for clamping a cassette, the robot for clamping the cassette, comprising: a robot arm, and an end portion disposed at an end of the robot arm And a visual positioning component disposed on the end effector;
- the visual positioning component is configured to position a flange of a top of the cassette
- the end effector includes a concave surface adapted to the top flange of the cassette, the end effector gripping the flange of the top of the cassette by the concave surface depending on the flange position of the cassette.
- the visual positioning component comprises: a horizontal positioning structure and a vertical positioning structure, wherein the horizontal positioning structure is used for capturing the horizontal direction of the surface of the cassette
- the vertical positioning structure is configured to capture features in a vertical direction of the surface of the cassette, and position the cassette according to a feature in a horizontal direction of the surface of the cassette and a feature in a vertical direction of the surface of the cassette Flange position.
- the horizontal positioning structure comprises a first camera, the lens of the first camera being perpendicular to a side wall of either side of the end effector.
- the vertical positioning structure comprises a second camera and a mirror, and the second camera and the mirror are both disposed on the end effector On one side of the side wall.
- the end effector is a C-shaped semi-closed structure with support plates on both sides.
- the end effector further includes a boss disposed at the front end of the concave surface for preventing the cassette from slipping.
- the concave surface is provided with at least one in-position sensor for sensing whether the concave surface holds the cassette.
- the sonar sensor disposed on the end effector is configured to perform safety detection on the cassette transporting stroke.
- At least two positioning pins are disposed on the concave surface, and the positioning pins correspond to the slits of the flange.
- the end effector and the end of the mechanical arm are inverted L-shaped.
- the end effector can perform a 360 degree rotational movement about the end of the mechanical arm.
- the robot arm has 6 degrees of freedom.
- the present invention also provides an automatic cassette handling device, the automatic cassette handling device comprising: an automatic navigation trolley, a carrier frame mounted on the automatic navigation trolley, and a carrier frame disposed on the carrier frame for clamping the cartridge Robot.
- a cassette placement mechanism disposed on the carrier frame is further disposed, and the robot is disposed at a corner of the carrier frame with respect to the cassette placement mechanism.
- the robot for gripping the cassette includes a robot arm, an end effector disposed at an end of the robot arm, and a setting A visual positioning component on the end effector.
- the invention locates the flange position of the film box by the visual positioning component to realize the recognition of the film box, that is, according to the characteristics of the film box itself, no additional adhesive mark is needed, and the measurement precision and the precision of grasping the film box are improved.
- the end effector uses the flange on the end effector that fits the top flange of the cassette to hold the flange on the top of the cassette to carry the cassette; in addition, the flange is held in the concave surface.
- the positioning pin on the concave surface and the slit of the flange realize the self-centering of the cassette, which further improves the precision of the positioning of the cassette.
- FIG. 1 is a schematic structural view of an automatic cassette transporting device according to an embodiment of the present invention.
- FIG. 2 is a schematic structural view of an end effector according to an embodiment of the present invention.
- FIG. 3 is a schematic structural view of a flange of a top end of an end effector holding a cassette according to an embodiment of the present invention
- FIG. 4 is a schematic structural view of an in-position sensor in an embodiment of the present invention.
- 1-manipulator arm 2-end end effector; 20-support plate; 21-concave surface; 22-bolt; 23-in-position sensor; 24-sonic sensor; 25-positioning pin; 3-visual positioning component; Positioning structure; 300-first camera; 31-vertical positioning structure; 310-second camera; 311-mirror; 40-flange; 5-carrier frame.
- FIG. 1 is a schematic structural view of an automatic cassette handling device according to the present invention.
- the automatic cassette handling device includes: an automatic navigation trolley, and a carrier frame mounted on the automatic navigation trolley. 5.
- the number of the cassette placement mechanisms is two, and the upper and lower layers are distributed.
- the robot mainly includes: a mechanical arm 1, an end effector 2 disposed at an end of the mechanical arm 1, and a visual positioning component disposed on the end effector 2.
- the visual positioning assembly is used to position the flange 40 (which is characteristic of the cassette itself) at the top of the cassette;
- the end effector 2 includes a flange 40 that fits over the top of the cassette Concave surface 21, according to the measured position of the flange 40 of the cassette
- the end effector 2 grips the flange 40 at the top of the cassette by the concave surface 21.
- the position of the flange 40 of the cassette is positioned by the visual positioning component to realize the recognition of the cassette.
- the position of the cassette 40 can be obtained after the position of the flange 40 of the cassette is obtained.
- the position of the carried cassettes eliminates the need for additional adhesive markings, improving measurement accuracy and capturing the accuracy of the cassette.
- the cassette is carried by the end effector 2, and the carrying of the cassette is carried out mainly by the flange 40 on the top of the cassette by the concave surface 21 on the end effector 2, thereby showing that the flange 40 of the cassette is not only It plays a role of identification and also plays a role in cooperating with the end effector 2 to carry the cassette.
- the specific working flow of the robot carrying the cassette is: when the cassette is grasped, the end effector 2 extends from the space between the flange 40 at the top of the cassette and the main body of the cassette to a certain position. After that, the cassette is lifted vertically upward; when the cassette is placed, the cassette is placed in the cassette placement position on the automatic cassette handling device, and the end effector 2 is moved in the vertical downward direction and separated from the cassette. Take out.
- the robot arm 1 of the robot is a 6-degree-of-freedom robot arm 1
- the end effector 2 is capable of 360-degree rotational movement about the end of the robot arm 1, and the end effector 2 is in operation with the end joint of the robot arm 1
- the last joint of the arm 1 is located below the end effector 2, so as to maximally save the position of the end effector 2 for the placement of the cassette (such as shelves, sheets)
- the box placement mechanism, etc.) occupy the height space of each layer while reducing the moment to the end of the robot arm 1.
- At least two positioning pins 25 are disposed on the concave surface 21, the positioning pins 25 are aligned with the slits of the flange 40, and the slits of the flange 40 are triangular or cylindrical, corresponding
- the position of the positioning pin 25 needs to match the shape of the flange 40 of the top of the cassette, and the shape of the positioning pin 25 is not limited to a triangle or a cylinder, as long as the positioning pin 25 can be accommodated.
- the center of the positioning pin 25 coincides with the geometric center of the slit.
- the self-centering of the gripped cassette is realized, thereby further improving the accuracy of positioning the cassette.
- the position of the cassette on the end effector 2 is in a precisely controllable range, so that the cassette can be accurately placed Go to the van.
- the end effector adopts a passive passive manner
- the end effector 2 is a C-shaped semi-closed structure with support plates 20 on both sides, and the C-shaped semi-closed structure can play a similar "oblique” Pull the bridge" zipper function.
- FIG. 3 shows that the end effector 2 is a C-shaped semi-closed structure with support plates 20 on both sides, and the C-shaped semi-closed structure can play a similar "oblique" Pull the bridge" zipper function.
- the visual positioning component includes: a horizontal positioning structure 30 and a vertical positioning structure 31 for capturing features in a horizontal direction of the surface of the cassette, the vertical positioning structure For capturing features in the vertical direction of the surface of the cassette, positioning the position of the flange 40 of the cassette according to the features in the horizontal direction of the surface of the cassette and the features in the vertical direction of the surface of the cassette, ie, determining method
- the spatial location of the blue 40 is such that the subsequent end effector 2 accurately performs the grip handling work.
- the horizontal positioning structure 30 includes a first camera 300, the first camera 300 is disposed in the middle of the end effector 2, and the lens of the first camera 300 is vertically oriented to the support plate on either side of the end effector 2.
- the vertical positioning structure 31 includes a second camera 310 and a mirror 311, and the second camera 310 and the mirror 311 are disposed on the side wall of the one side support plate 20 of the end effector 2 And mounted on the support plate 20 on the opposite side of the support plate 20 facing the lens of the first camera 300.
- the end effector 2 further includes a boss 22 and at least one in-position sensor 23 disposed at the front end of the concave surface 21 to avoid the risk of the cassette slipping when the robot is suddenly powered off; At least one in-position sensor 23 is disposed on the concave surface 21, and a preferred in-position sensor 23 is disposed on the concave surface 21 in contact with the flange 40 for sensing whether the concave surface 21 holds the cassette.
- the in-position sensor 23 includes a mechanical switch structure. When the cassette is self-centering, the cassette triggers a mechanical switch structure to generate an in-position signal. Please refer to FIG. 4 for the mechanical switch structure.
- the robot in this embodiment further includes a sound disposed on the end effector 2
- the cymbal sensor 24 is mounted on the support plate 20 on either side of the end effector 2 as a safety detecting sensor during the execution of the transport, and once an object is detected within the range of the sonar threshold, the robot 1 immediately stops the work.
- a vertical laser sensor is further disposed on both sides of the carrier frame 5 to realize obstacle detection in the height direction of the automatic cassette handling device.
- the workflow of picking up the cassette from the shelf based on the above automatic cassette handling device mainly includes:
- Different parking positions are set for different layers of the shelf; firstly, the side of the flange 40 is horizontally measured by the first camera 300, and the X, Y, Z, and Rx of the cassette are obtained through the slit side features of the flange 40, and then the second The camera 310 is brought into the position of the slit of the flange 40, and the X, Y, and Rz of the cassette are obtained through the top view feature of the slit; and the end effector is inserted from below the flange 40 at the top of the cassette for grasping.
- the present invention also provides a cassette handling system using the above-described automatic cassette handling device, the working process of which is as follows:
- the control box of the cassette handling system delivers the cassette handling task, including: cassette ID, starting point, destination and other information.
- the dispatching server performs optimal scheduling according to the position and idle condition of the automatic cassette handling device in the whole plant, determines the automatic cassette handling device for performing the specific task, and sends the cassette ID and the starting point to the automatic automatic movement of the automatic cassette handling device.
- the navigation car after this step is executed, the automatic cassette handling device has completely understood the task information to be executed.
- the automatic navigation trolley of the automatic cassette handling device plans an optimal path for each handling device that performs the carrying task, and performs an autonomous obstacle avoidance bypass when the obstacle is encountered during the traveling, the automatic cassette The handling device calculates the coordinates of the map to be reached according to the selected station position and the position of the cassette. After reaching the target point, the automatic navigation trolley adjusts the direction to the set direction, and the side of the arm is close to the target position (shelf or machine) Taiwan), began to prepare to carry out the task of carrying.
- Cassette handling The cassette handling task is divided into taking the cassette from the shelf/machine, or placing the cassette on the shelf/machine. The operation of extracting the cassette is as follows:
- the automatic handling device moves to the loading interface/shelf of the machine.
- the shelf is a three-layer structure, since the cassette is at different heights of the three layers of the shelf, hereinafter referred to as the high, middle and low layers, when the cassette is grabbed, the The strategy of different positions of the automatic cassette handling device is to reasonably improve the stability of the handling of the automatic cassette handling device. For example, when the cassette is in the upper layer, the automatic cassette handling device stops at a distance of about 100 mm from the shelf to get as close as possible to the shelf, shortening the movement distance and gripping torque of the robot, and reducing the possibility of tipping.
- the box is above the manipulator mounting plane, and the manipulator has a large moving space.
- the automatic cassette handling device stops at a distance of about 400 mm from the shelf, and is far away from the shelf. At this time, the cassette is close to the mounting plane of the robot, and the movement space of the robot is small, and the movement track of the manipulator needs to be planned to avoid the same Automatically navigate the car to collide or interfere.
- the design is considered according to the strategy of the cassette in the upper scheme and the strategy of the cassette in the lower scheme.
- the distance of the flange 40 from the Y-direction of the first camera 300 can be determined by detecting the position of the slit in the flange 40 from the image.
- the method of identifying the incision may be a template matching algorithm based on contour or gray scale, matching based on corner points and descriptors thereof, an algorithm based on line detection, and the like.
- the robot brings the second camera 310 directly above the slit of the flange 40 at the top of the cassette, according to the measured attitude of the flange 40 of the cassette relative to the X, Y, Z, Rx, etc. of the first camera 300. .
- the two or more slits on the flange 40 are measured by a pattern matching method, and in combination with the nominal dimensions of the flange 40 itself, the X, Y, Rz positions of the flange 40 relative to the second camera 310 can be calculated.
- the controller of the automatic cassette handling device controls the robot arm to place the cassette on the end effector onto its own cassette placement mechanism in a certain trajectory, which should not exceed the spatial projection range of the auto navigation trolley width direction.
- the robot slows down until it is placed in place.
- the RFID sensor reads the cassette information, records the handling data of the entire cassette, and feeds the cassette handling data back to the cassette handling system.
- step a) The automatic handling device is in place, this step being the same as step a) of extracting the cassette.
- the robotic arm brings the visual positioning component to the loading interface/array cassette fixing plate of the machine, and captures the feature points of the loading interface of the machine/the mounting plate of the shelf (such as the positioning on the loading interface of the standard machine) Pin), determine its center position, to match the contour of the cassette on the automatic cassette handling device or the center of the positioning pin of the fixed cassette to position the cassette.
- the distance of the visual positioning component from the center of the feature point is x, y, z, Rz, and the end of the mechanical arm is obtained.
- the deviation of the actuator from the placement position is x, y, z, Rz, and the end of the mechanical arm is obtained.
- the robot arm then places the cassette on the loading interface or the shelf cassette placement plate of the machine according to a certain trajectory, and the trajectory does not exceed the spatial projection range of the base.
- Lateral sonar is installed on both sides of the base. When carrying, the sonar is opened. When the moving object is sensed, the arm is decelerated to prevent injury and an alarm is issued to remind the person to stay away from the operation site.
- the robot for clamping the cassette includes a mechanical arm, an end effector disposed at an end of the mechanical arm, and A visual positioning component on the end effector.
- the invention locates the flange position of the film box by the visual positioning component to realize the recognition of the film box, that is, according to the characteristics of the film box itself, no additional adhesive mark is needed, and the measurement precision and the precision of grasping the film box are improved.
- the end effector uses the flange on the end effector that fits the top flange of the cassette to hold the flange on the top of the cassette to carry the cassette; in addition, the flange is held in the concave surface.
- the positioning pin on the concave surface and the slit of the flange realize the self-centering of the cassette, which further improves the precision of the positioning of the cassette.
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Automation & Control Theory (AREA)
- Human Computer Interaction (AREA)
- Manipulator (AREA)
- Forklifts And Lifting Vehicles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (14)
- 一种用于片盒夹持的机械手,其特征在于,包括:机械臂、设置于所述机械臂的末端的末端执行器以及设置于所述末端执行器上的视觉定位组件;其中,所述视觉定位组件用于定位所述片盒顶部的法兰位置;所述末端执行器包括一与所述片盒顶部法兰相适配的凹面,根据所述片盒的法兰位置所述末端执行器通过所述凹面夹持片盒顶部的法兰。
- 如权利要求1所述的用于片盒夹持的机械手,其特征在于,所述视觉定位组件包括:水平定位结构和垂向定位结构,所述水平定位结构用于捕捉所述片盒表面水平方向上的特征,所述垂向定位结构用于捕捉所述片盒表面垂直方向上的特征,根据所述片盒表面水平方向上的特征及所述片盒表面垂直方向上的特征定位所述片盒的法兰位置。
- 如权利要求2所述的用于片盒夹持的机械手,其特征在于,所述水平定位结构包括第一相机,所述第一相机的镜头垂直朝向所述末端执行器的任意一侧的侧壁。
- 如权利要求2所述的用于片盒夹持的机械手,其特征在于,所述垂向定位结构包括第二相机及反射镜,所述第二相机和所述反射镜均设置于所述末端执行器的一侧的侧壁上。
- 如权利要求1所述的用于片盒夹持的机械手,其特征在于,所述末端执行器为两侧带有支撑板的C字形半封闭结构。
- 如权利要求1所述的用于片盒夹持的机械手,其特征在于,所述末端执行器还包括设置于所述凹面前端的凸台,用于防止片盒滑落。
- 如权利要求1所述的用于片盒夹持的机械手,其特征在于,所述凹面上至少设有一个在位传感器,用于感知所述凹面是否夹持片盒。
- 如权利要求1所述的用于片盒夹持的机械手,其特征在于,还包括设置于所述末端执行器上的声呐传感器,用于对片盒搬运行程进行安全检测。
- 如权利要求1所述的用于片盒夹持的机械手,其特征在于,所述凹面上至少设有两个定位销,所述定位销与所述法兰的切口对应。
- 如权利要求1所述的用于片盒夹持的机械手,其特征在于,所述末端执行器与所述机械臂的末端呈倒L形。
- 如权利要求1所述的用于片盒夹持的机械手,其特征在于,所述末端执行器可绕所述机械臂的末端进行360度旋转运动。
- 如权利要求1所述的用于片盒夹持的机械手,其特征在于,所述机械臂具有6个自由度。
- 一种自动片盒搬运装置,其特征在于,包括:自动导航小车、架设在所述自动导航小车上的运载框架及设置于所述运载框架上如权利要求1-12中任一项所述的用于片盒夹持的机械手。
- 如权利要求13所述的自动片盒搬运装置,其特征在于,还包括设置于所述运载框架上的片盒放置机构,所述机械手相对所述片盒放置机构设置于所述运载框架的一角。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG11201809553XA SG11201809553XA (en) | 2016-04-29 | 2017-04-28 | Robot arm for holding cassette and automatic cassette transfer device |
KR1020187034010A KR20190002560A (ko) | 2016-04-29 | 2017-04-28 | 자동 카세트 이송장치 및 카세트 홀딩을 위한 로봇 암. |
JP2018556399A JP6753950B2 (ja) | 2016-04-29 | 2017-04-28 | カセットハンドリングロボットマニピュレータ、及び自動カセット搬送装置 |
US16/097,550 US11383940B2 (en) | 2016-04-29 | 2017-04-28 | Robot arm for holding cassette and automatic cassette transfer device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CN201610285759.8 | 2016-04-29 | ||
CN201610285759.8A CN107324041B (zh) | 2016-04-29 | 2016-04-29 | 用于片盒夹持的机械手及自动片盒搬运装置 |
Publications (1)
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WO2017186172A1 true WO2017186172A1 (zh) | 2017-11-02 |
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ID=60161846
Family Applications (1)
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PCT/CN2017/082506 WO2017186172A1 (zh) | 2016-04-29 | 2017-04-28 | 用于片盒夹持的机械手及自动片盒搬运装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US11383940B2 (zh) |
JP (1) | JP6753950B2 (zh) |
KR (1) | KR20190002560A (zh) |
CN (1) | CN107324041B (zh) |
SG (1) | SG11201809553XA (zh) |
TW (1) | TWI637455B (zh) |
WO (1) | WO2017186172A1 (zh) |
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Also Published As
Publication number | Publication date |
---|---|
SG11201809553XA (en) | 2018-11-29 |
US11383940B2 (en) | 2022-07-12 |
JP2019519097A (ja) | 2019-07-04 |
KR20190002560A (ko) | 2019-01-08 |
JP6753950B2 (ja) | 2020-09-09 |
TWI637455B (zh) | 2018-10-01 |
TW201742180A (zh) | 2017-12-01 |
US20190152721A1 (en) | 2019-05-23 |
CN107324041A (zh) | 2017-11-07 |
CN107324041B (zh) | 2019-11-26 |
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