WO2017186172A1 - 用于片盒夹持的机械手及自动片盒搬运装置 - Google Patents

用于片盒夹持的机械手及自动片盒搬运装置 Download PDF

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Publication number
WO2017186172A1
WO2017186172A1 PCT/CN2017/082506 CN2017082506W WO2017186172A1 WO 2017186172 A1 WO2017186172 A1 WO 2017186172A1 CN 2017082506 W CN2017082506 W CN 2017082506W WO 2017186172 A1 WO2017186172 A1 WO 2017186172A1
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WIPO (PCT)
Prior art keywords
cassette
end effector
robot
flange
automatic
Prior art date
Application number
PCT/CN2017/082506
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English (en)
French (fr)
Inventor
许琦欣
杜荣
李玲雨
Original Assignee
上海微电子装备（集团）股份有限公司
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Application filed by 上海微电子装备（集团）股份有限公司 filed Critical 上海微电子装备（集团）股份有限公司
Priority to SG11201809553XA priority Critical patent/SG11201809553XA/en
Priority to KR1020187034010A priority patent/KR20190002560A/ko
Priority to JP2018556399A priority patent/JP6753950B2/ja
Priority to US16/097,550 priority patent/US11383940B2/en
Publication of WO2017186172A1 publication Critical patent/WO2017186172A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/905—Control arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
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    • H01L21/6773—Conveying cassettes, containers or carriers
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    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
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    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • H—ELECTRICITY
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    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped

Definitions

  • the present invention relates to the field of mechanical technology, and in particular to a robot hand and an automatic cassette handling device for clamping a cassette.
  • the automatic material transfer system (AMHS) has been widely adopted, including Stocker. , OHT or AGV, etc.
  • AMHS automatic material transfer system
  • the AMHS is dispatched through the MES system, and the silicon chip cassette is directly transferred from the stocker to the interface of each machine, and then the machine is instructed to be automated, which changes the low-efficiency mode that was completely transported by manual before, and greatly improves the advanced IC.
  • the automation level of the process line effectively saves labor costs, improves product output, and increases customer value.
  • the OHT system has been used for material management in the 12-inch semiconductor production line of the former process, but for many downstream packaging production lines, it also faces the problem of updating the material automation system, and the 12-inch product is coming.
  • the labor force will be seriously short in the future and the labor cost will be higher and higher, so the cassette transportation
  • the demand for robots will increase.
  • due to the size and profit of the packaging plant it is unable to support OHT system investment such as the former semiconductor production line, so develop a convenient and economical automatic cassette transfer solution and equipment. Be a top priority.
  • the identification of the position of the cassette plays a vital role.
  • the existing solutions are generally two kinds, one of which, for the OHT system, the OHT equipment directly loads the cassette from the Stocker, directly reaches the load interface of the machine through the track, and places the cassette to the machine through the telescopic rope.
  • the position of the cassette in the stocker is taught by the stocker's mechanical arm to the respective storage position, and the positional relationship between the OHT equipment and the cassette is tracked and mechanically positioned. It is guaranteed that when the OHT equipment places the cassette on the machine, the positional relationship of the remaining load interfaces is also guaranteed by the track and machine layout.
  • a photodetector is used to detect a method of fixing a sticker on a shelf, and the cartridge is positioned by the marker recognition.
  • the program is subject to two points:
  • the mark is damaged during long-term use, which affects the measurement accuracy, resulting in the inability to accurately capture the cassette;
  • the mark must have a certain precision relationship with the positioning plate on which the cassette is placed, which increases the cost of manufacturing the shelf.
  • the present invention provides a robot for clamping a cassette, the robot for clamping the cassette, comprising: a robot arm, and an end portion disposed at an end of the robot arm And a visual positioning component disposed on the end effector;
  • the visual positioning component is configured to position a flange of a top of the cassette
  • the end effector includes a concave surface adapted to the top flange of the cassette, the end effector gripping the flange of the top of the cassette by the concave surface depending on the flange position of the cassette.
  • the visual positioning component comprises: a horizontal positioning structure and a vertical positioning structure, wherein the horizontal positioning structure is used for capturing the horizontal direction of the surface of the cassette
  • the vertical positioning structure is configured to capture features in a vertical direction of the surface of the cassette, and position the cassette according to a feature in a horizontal direction of the surface of the cassette and a feature in a vertical direction of the surface of the cassette Flange position.
  • the horizontal positioning structure comprises a first camera, the lens of the first camera being perpendicular to a side wall of either side of the end effector.
  • the vertical positioning structure comprises a second camera and a mirror, and the second camera and the mirror are both disposed on the end effector On one side of the side wall.
  • the end effector is a C-shaped semi-closed structure with support plates on both sides.
  • the end effector further includes a boss disposed at the front end of the concave surface for preventing the cassette from slipping.
  • the concave surface is provided with at least one in-position sensor for sensing whether the concave surface holds the cassette.
  • the sonar sensor disposed on the end effector is configured to perform safety detection on the cassette transporting stroke.
  • At least two positioning pins are disposed on the concave surface, and the positioning pins correspond to the slits of the flange.
  • the end effector and the end of the mechanical arm are inverted L-shaped.
  • the end effector can perform a 360 degree rotational movement about the end of the mechanical arm.
  • the robot arm has 6 degrees of freedom.
  • the present invention also provides an automatic cassette handling device, the automatic cassette handling device comprising: an automatic navigation trolley, a carrier frame mounted on the automatic navigation trolley, and a carrier frame disposed on the carrier frame for clamping the cartridge Robot.
  • a cassette placement mechanism disposed on the carrier frame is further disposed, and the robot is disposed at a corner of the carrier frame with respect to the cassette placement mechanism.
  • the robot for gripping the cassette includes a robot arm, an end effector disposed at an end of the robot arm, and a setting A visual positioning component on the end effector.
  • the invention locates the flange position of the film box by the visual positioning component to realize the recognition of the film box, that is, according to the characteristics of the film box itself, no additional adhesive mark is needed, and the measurement precision and the precision of grasping the film box are improved.
  • the end effector uses the flange on the end effector that fits the top flange of the cassette to hold the flange on the top of the cassette to carry the cassette; in addition, the flange is held in the concave surface.
  • the positioning pin on the concave surface and the slit of the flange realize the self-centering of the cassette, which further improves the precision of the positioning of the cassette.
  • FIG. 1 is a schematic structural view of an automatic cassette transporting device according to an embodiment of the present invention.
  • FIG. 2 is a schematic structural view of an end effector according to an embodiment of the present invention.
  • FIG. 3 is a schematic structural view of a flange of a top end of an end effector holding a cassette according to an embodiment of the present invention
  • FIG. 4 is a schematic structural view of an in-position sensor in an embodiment of the present invention.
  • 1-manipulator arm 2-end end effector; 20-support plate; 21-concave surface; 22-bolt; 23-in-position sensor; 24-sonic sensor; 25-positioning pin; 3-visual positioning component; Positioning structure; 300-first camera; 31-vertical positioning structure; 310-second camera; 311-mirror; 40-flange; 5-carrier frame.
  • FIG. 1 is a schematic structural view of an automatic cassette handling device according to the present invention.
  • the automatic cassette handling device includes: an automatic navigation trolley, and a carrier frame mounted on the automatic navigation trolley. 5.
  • the number of the cassette placement mechanisms is two, and the upper and lower layers are distributed.
  • the robot mainly includes: a mechanical arm 1, an end effector 2 disposed at an end of the mechanical arm 1, and a visual positioning component disposed on the end effector 2.
  • the visual positioning assembly is used to position the flange 40 (which is characteristic of the cassette itself) at the top of the cassette;
  • the end effector 2 includes a flange 40 that fits over the top of the cassette Concave surface 21, according to the measured position of the flange 40 of the cassette
  • the end effector 2 grips the flange 40 at the top of the cassette by the concave surface 21.
  • the position of the flange 40 of the cassette is positioned by the visual positioning component to realize the recognition of the cassette.
  • the position of the cassette 40 can be obtained after the position of the flange 40 of the cassette is obtained.
  • the position of the carried cassettes eliminates the need for additional adhesive markings, improving measurement accuracy and capturing the accuracy of the cassette.
  • the cassette is carried by the end effector 2, and the carrying of the cassette is carried out mainly by the flange 40 on the top of the cassette by the concave surface 21 on the end effector 2, thereby showing that the flange 40 of the cassette is not only It plays a role of identification and also plays a role in cooperating with the end effector 2 to carry the cassette.
  • the specific working flow of the robot carrying the cassette is: when the cassette is grasped, the end effector 2 extends from the space between the flange 40 at the top of the cassette and the main body of the cassette to a certain position. After that, the cassette is lifted vertically upward; when the cassette is placed, the cassette is placed in the cassette placement position on the automatic cassette handling device, and the end effector 2 is moved in the vertical downward direction and separated from the cassette. Take out.
  • the robot arm 1 of the robot is a 6-degree-of-freedom robot arm 1
  • the end effector 2 is capable of 360-degree rotational movement about the end of the robot arm 1, and the end effector 2 is in operation with the end joint of the robot arm 1
  • the last joint of the arm 1 is located below the end effector 2, so as to maximally save the position of the end effector 2 for the placement of the cassette (such as shelves, sheets)
  • the box placement mechanism, etc.) occupy the height space of each layer while reducing the moment to the end of the robot arm 1.
  • At least two positioning pins 25 are disposed on the concave surface 21, the positioning pins 25 are aligned with the slits of the flange 40, and the slits of the flange 40 are triangular or cylindrical, corresponding
  • the position of the positioning pin 25 needs to match the shape of the flange 40 of the top of the cassette, and the shape of the positioning pin 25 is not limited to a triangle or a cylinder, as long as the positioning pin 25 can be accommodated.
  • the center of the positioning pin 25 coincides with the geometric center of the slit.
  • the self-centering of the gripped cassette is realized, thereby further improving the accuracy of positioning the cassette.
  • the position of the cassette on the end effector 2 is in a precisely controllable range, so that the cassette can be accurately placed Go to the van.
  • the end effector adopts a passive passive manner
  • the end effector 2 is a C-shaped semi-closed structure with support plates 20 on both sides, and the C-shaped semi-closed structure can play a similar "oblique” Pull the bridge" zipper function.
  • FIG. 3 shows that the end effector 2 is a C-shaped semi-closed structure with support plates 20 on both sides, and the C-shaped semi-closed structure can play a similar "oblique" Pull the bridge" zipper function.
  • the visual positioning component includes: a horizontal positioning structure 30 and a vertical positioning structure 31 for capturing features in a horizontal direction of the surface of the cassette, the vertical positioning structure For capturing features in the vertical direction of the surface of the cassette, positioning the position of the flange 40 of the cassette according to the features in the horizontal direction of the surface of the cassette and the features in the vertical direction of the surface of the cassette, ie, determining method
  • the spatial location of the blue 40 is such that the subsequent end effector 2 accurately performs the grip handling work.
  • the horizontal positioning structure 30 includes a first camera 300, the first camera 300 is disposed in the middle of the end effector 2, and the lens of the first camera 300 is vertically oriented to the support plate on either side of the end effector 2.
  • the vertical positioning structure 31 includes a second camera 310 and a mirror 311, and the second camera 310 and the mirror 311 are disposed on the side wall of the one side support plate 20 of the end effector 2 And mounted on the support plate 20 on the opposite side of the support plate 20 facing the lens of the first camera 300.
  • the end effector 2 further includes a boss 22 and at least one in-position sensor 23 disposed at the front end of the concave surface 21 to avoid the risk of the cassette slipping when the robot is suddenly powered off; At least one in-position sensor 23 is disposed on the concave surface 21, and a preferred in-position sensor 23 is disposed on the concave surface 21 in contact with the flange 40 for sensing whether the concave surface 21 holds the cassette.
  • the in-position sensor 23 includes a mechanical switch structure. When the cassette is self-centering, the cassette triggers a mechanical switch structure to generate an in-position signal. Please refer to FIG. 4 for the mechanical switch structure.
  • the robot in this embodiment further includes a sound disposed on the end effector 2
  • the cymbal sensor 24 is mounted on the support plate 20 on either side of the end effector 2 as a safety detecting sensor during the execution of the transport, and once an object is detected within the range of the sonar threshold, the robot 1 immediately stops the work.
  • a vertical laser sensor is further disposed on both sides of the carrier frame 5 to realize obstacle detection in the height direction of the automatic cassette handling device.
  • the workflow of picking up the cassette from the shelf based on the above automatic cassette handling device mainly includes:
  • Different parking positions are set for different layers of the shelf; firstly, the side of the flange 40 is horizontally measured by the first camera 300, and the X, Y, Z, and Rx of the cassette are obtained through the slit side features of the flange 40, and then the second The camera 310 is brought into the position of the slit of the flange 40, and the X, Y, and Rz of the cassette are obtained through the top view feature of the slit; and the end effector is inserted from below the flange 40 at the top of the cassette for grasping.
  • the present invention also provides a cassette handling system using the above-described automatic cassette handling device, the working process of which is as follows:
  • the control box of the cassette handling system delivers the cassette handling task, including: cassette ID, starting point, destination and other information.
  • the dispatching server performs optimal scheduling according to the position and idle condition of the automatic cassette handling device in the whole plant, determines the automatic cassette handling device for performing the specific task, and sends the cassette ID and the starting point to the automatic automatic movement of the automatic cassette handling device.
  • the navigation car after this step is executed, the automatic cassette handling device has completely understood the task information to be executed.
  • the automatic navigation trolley of the automatic cassette handling device plans an optimal path for each handling device that performs the carrying task, and performs an autonomous obstacle avoidance bypass when the obstacle is encountered during the traveling, the automatic cassette The handling device calculates the coordinates of the map to be reached according to the selected station position and the position of the cassette. After reaching the target point, the automatic navigation trolley adjusts the direction to the set direction, and the side of the arm is close to the target position (shelf or machine) Taiwan), began to prepare to carry out the task of carrying.
  • Cassette handling The cassette handling task is divided into taking the cassette from the shelf/machine, or placing the cassette on the shelf/machine. The operation of extracting the cassette is as follows:
  • the automatic handling device moves to the loading interface/shelf of the machine.
  • the shelf is a three-layer structure, since the cassette is at different heights of the three layers of the shelf, hereinafter referred to as the high, middle and low layers, when the cassette is grabbed, the The strategy of different positions of the automatic cassette handling device is to reasonably improve the stability of the handling of the automatic cassette handling device. For example, when the cassette is in the upper layer, the automatic cassette handling device stops at a distance of about 100 mm from the shelf to get as close as possible to the shelf, shortening the movement distance and gripping torque of the robot, and reducing the possibility of tipping.
  • the box is above the manipulator mounting plane, and the manipulator has a large moving space.
  • the automatic cassette handling device stops at a distance of about 400 mm from the shelf, and is far away from the shelf. At this time, the cassette is close to the mounting plane of the robot, and the movement space of the robot is small, and the movement track of the manipulator needs to be planned to avoid the same Automatically navigate the car to collide or interfere.
  • the design is considered according to the strategy of the cassette in the upper scheme and the strategy of the cassette in the lower scheme.
  • the distance of the flange 40 from the Y-direction of the first camera 300 can be determined by detecting the position of the slit in the flange 40 from the image.
  • the method of identifying the incision may be a template matching algorithm based on contour or gray scale, matching based on corner points and descriptors thereof, an algorithm based on line detection, and the like.
  • the robot brings the second camera 310 directly above the slit of the flange 40 at the top of the cassette, according to the measured attitude of the flange 40 of the cassette relative to the X, Y, Z, Rx, etc. of the first camera 300. .
  • the two or more slits on the flange 40 are measured by a pattern matching method, and in combination with the nominal dimensions of the flange 40 itself, the X, Y, Rz positions of the flange 40 relative to the second camera 310 can be calculated.
  • the controller of the automatic cassette handling device controls the robot arm to place the cassette on the end effector onto its own cassette placement mechanism in a certain trajectory, which should not exceed the spatial projection range of the auto navigation trolley width direction.
  • the robot slows down until it is placed in place.
  • the RFID sensor reads the cassette information, records the handling data of the entire cassette, and feeds the cassette handling data back to the cassette handling system.
  • step a) The automatic handling device is in place, this step being the same as step a) of extracting the cassette.
  • the robotic arm brings the visual positioning component to the loading interface/array cassette fixing plate of the machine, and captures the feature points of the loading interface of the machine/the mounting plate of the shelf (such as the positioning on the loading interface of the standard machine) Pin), determine its center position, to match the contour of the cassette on the automatic cassette handling device or the center of the positioning pin of the fixed cassette to position the cassette.
  • the distance of the visual positioning component from the center of the feature point is x, y, z, Rz, and the end of the mechanical arm is obtained.
  • the deviation of the actuator from the placement position is x, y, z, Rz, and the end of the mechanical arm is obtained.
  • the robot arm then places the cassette on the loading interface or the shelf cassette placement plate of the machine according to a certain trajectory, and the trajectory does not exceed the spatial projection range of the base.
  • Lateral sonar is installed on both sides of the base. When carrying, the sonar is opened. When the moving object is sensed, the arm is decelerated to prevent injury and an alarm is issued to remind the person to stay away from the operation site.
  • the robot for clamping the cassette includes a mechanical arm, an end effector disposed at an end of the mechanical arm, and A visual positioning component on the end effector.
  • the invention locates the flange position of the film box by the visual positioning component to realize the recognition of the film box, that is, according to the characteristics of the film box itself, no additional adhesive mark is needed, and the measurement precision and the precision of grasping the film box are improved.
  • the end effector uses the flange on the end effector that fits the top flange of the cassette to hold the flange on the top of the cassette to carry the cassette; in addition, the flange is held in the concave surface.
  • the positioning pin on the concave surface and the slit of the flange realize the self-centering of the cassette, which further improves the precision of the positioning of the cassette.

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Abstract

一种用于片盒夹持的机械手及自动片盒搬运装置，包括机械臂（1）、设置于机械臂（1）末端的末端执行器（2）以及设置于末端执行器（2）上的视觉定位组件（3）。一方面，通过视觉定位组件（3）定位片盒的法兰位置以实现对片盒的识别，即依据片盒本身特征进行识别，无需额外黏贴标记，提高了测量精度及抓取片盒的精准度；另一方面，末端执行器（2）利用末端执行器（2）上与片盒顶部法兰相适配的凹面夹持片盒顶部法兰实现对片盒的搬运。

Description

用于片盒夹持的机械手及自动片盒搬运装置 技术领域
本发明涉及机械技术领域，特别涉及一种用于片盒夹持的机械手及自动片盒搬运装置。
背景技术
21世纪以来，自动化物流系统已经在工业领域得到广泛应用，在IC行业前道工艺FAB厂产线中，特别是12寸产线中，已经普遍采用了自动物料搬送系统(AMHS)，具体包括Stocker、OHT或AGV等。例如首先通过MES系统调度AMHS，直接将硅片片盒从Stocker直接搬送到各机台的接口上，然后命令机台进行自动化生产，改变了之前完全靠人工运输的低效率模式，大大提升先进IC工艺产线的自动化水平，有效地节约人力成本，提高产品产出，增加客户价值。
目前，世界范围内主要在前道工艺12寸半导体产线中已经采用了OHT系统进行物料管理，但对于许多后道封装产线来说也面临物料自动化系统更新的问题，而且12寸产品越来越占主导地位，满载荷的片盒重量约为7.5Kg，对于操作工来说较吃力，且有一定的风险；同时，劳动力在未来会严重短缺且劳动力成本越来越高，因此片盒运输机器人的需求量将会越来越大；此外，由于封装厂的规模和利润，无法支持诸如前道半导体产线的OHT系统投资，因此，研发一种便利、经济的自动片盒搬送方案和设备成为当务之急。
在全球范围内，一些电子厂和半导体厂房已经在用AGV小车代替人工搬运，通过在产线上配置搬运机器人，节省大量的体力劳动。但这种自动物料搬送系统产品的不足为：都是主要针对8寸片盒，不能满足12寸片盒的运输需求。
通常12寸片盒搬运设备只能携带一盒片盒，效率较低。此外该片盒搬运设备的片盒抓取方式不能适应从一般性的货架上抓取片盒的功能。其原因在于12寸片盒搬运设备的机械臂的臂长通常比较长，需要较大的搬运空间，而一般为了尽可能提高货架存储量，节省FAB内的空间，货架可能会做到3层，层间高度不超过450mm。这对于12寸片盒自动搬运设备而言，留给机械臂的空间非常有限。
为实现自动片盒搬运装置可以准确的搬运片盒，于片盒位置的识别起到至关重要作用。现有的解决方式大体为两种，其中一种，针对OHT系统而言，OHT设备从Stocker内直接装载片盒，通过轨道直接到达机台的负载接口上方，通过伸缩绳索将片盒放置到机台上，由于这一过程是一个结构化的工况，片盒在stocker中的位置通过stocker的机械臂对各存储位置进行示教，OHT设备与片盒之间的位置关系通过轨道和机械定位保证，OHT设备将片盒放置到机台上时，其余负载接口的位置关系同样通过轨道和机台布局保证。
另一种方式，使用光电探测器探测货架上固定粘贴标记的方法，通过标记识别进行片盒定位。该方案受制于两点：
1.标记在长期使用过程中破损，影响测量精度，导致无法准确抓取片盒；
2.标记必须与放置片盒的定位板存在一定精度关系，增加了货架制造的成本。
发明内容
本发明的目的在于提供一种自动片盒搬运装置及自动片盒搬运装置，以解决现有技术中自动片盒搬运装置存在的不足。
为解决上述技术问题，本发明提供一种用于片盒夹持的机械手，所述用于片盒夹持的机械手包括：机械臂、设置于所述机械臂的末端的末端执 行器以及设置于所述末端执行器上的视觉定位组件；
其中，所述视觉定位组件用于定位所述片盒顶部的法兰位置；
所述末端执行器包括一与所述片盒顶部法兰相适配的凹面，根据所述片盒的法兰位置所述末端执行器通过所述凹面夹持片盒顶部的法兰。
可选的，在所述的用于片盒夹持的机械手中，所述视觉定位组件包括：水平定位结构和垂向定位结构，所述水平定位结构用于捕捉所述片盒表面水平方向上的特征，所述垂向定位结构用于捕捉所述片盒表面垂直方向上的特征，根据所述片盒表面水平方向上的特征及所述片盒表面垂直方向上的特征定位所述片盒的法兰位置。
可选的，在所述的用于片盒夹持的机械手中，所述水平定位结构包括第一相机，所述第一相机的镜头垂直朝向所述末端执行器的任意一侧的侧壁。
可选的，在所述的用于片盒夹持的机械手中，所述垂向定位结构包括第二相机及反射镜，所述第二相机和所述反射镜均设置于所述末端执行器的一侧的侧壁上。
可选的，在所述的用于片盒夹持的机械手中，所述末端执行器为两侧带有支撑板的C字形半封闭结构。
可选的，在所述的用于片盒夹持的机械手中，所述末端执行器还包括设置于所述凹面前端的凸台，用于防止片盒滑落。
可选的，在所述的用于片盒夹持的机械手中，所述凹面上至少设有一个在位传感器，用于感知所述凹面是否夹持片盒。
可选的，在所述的用于片盒夹持的机械手中，还包括设置于所述末端执行器上的声呐传感器，用于对片盒搬运行程进行安全检测。
可选的，在所述的用于片盒夹持的机械手中，所述凹面上至少设有两个定位销，所述定位销与所述法兰的切口对应。
可选的，在所述的用于片盒夹持的机械手中，所述末端执行器与所述机械臂的末端呈倒L形。
可选的，在所述的用于片盒夹持的机械手中，所述末端执行器可绕所述机械臂的末端进行360度旋转运动。
可选的，在所述的用于片盒夹持的机械手中，所述机械臂具有6个自由度。
本发明还提供一种自动片盒搬运装置，所述自动片盒搬运装置包括：自动导航小车、架设在所述自动导航小车上的运载框架及设置于所述运载框架上用于片盒夹持的机械手。
可选的，在所述的自动片盒搬运装置中，还包括设置于所述运载框架上的片盒放置机构，所述机械手相对所述片盒放置机构设置于所述运载框架的一角。
在本发明所提供的用于片盒夹持的机械手及自动片盒搬运装置中，所述用于片盒夹持的机械手包括机械臂、设置于所述机械臂的末端的末端执行器以及设置于所述末端执行器上的视觉定位组件。本发明通过视觉定位组件定位所述片盒的法兰位置以实现对片盒的识别，即依据片盒本身特征进行识别，无需额外黏贴标记，提高了测量精度及抓取片盒的精准度；另一方面，末端执行器利用末端执行器上与所述片盒顶部法兰相适配的凹面夹持片盒顶部的法兰实现对片盒的搬运；此外，在凹面夹持法兰的同时，凹面上的定位销与法兰的切口对位实现了片盒的自定心，进一步提高了片盒定位的精准度。
附图说明
图1是本发明一实施例中自动片盒搬运装置的结构示意图；
图2是本发明一实施例中末端执行器的结构示意图；
图3是本发明一实施例中末端执行器的凹面夹持片盒顶部的法兰的结构示意图；
图4是本发明一实施例中在位传感器的结构示意图。
图中：
1-机械臂；2-末端执行器；20-支撑板；21-凹面；22-凸台；23-在位传感器；24-声呐传感器；25-定位销；3-视觉定位组件；30-水平定位结构；300-第一相机；31-垂向定位结构；310-第二相机；311-反射镜；40-法兰；5-运载框架。
具体实施方式
以下结合附图和具体实施例对本发明提出的用于片盒夹持的机械手及自动片盒搬运装置作进一步详细说明。根据下面说明和权利要求书，本发明的优点和特征将更清楚。需说明的是，附图均采用非常简化的形式且均使用非精准的比例，仅用以方便、明晰地辅助说明本发明实施例的目的。
请参考图1，其为本发明的自动片盒搬运装置的结构示意图，如图1所示，所述的自动片盒搬运装置包括：自动导航小车、架设在所述自动导航小车上的运载框架5、设置于所述运载框架5上的用于片盒夹持的机械手以及设置于所述运载框架5上的片盒放置机构；所述机械手相对所述片盒放置机构设置于所述运载框架5的一角。优选的，所述片盒放置机构数量为两个，呈上下层分布。
请参考图2、3，本实施例中，所述机械手主要包括：机械臂1、设置于所述机械臂1的末端的末端执行器2以及设置于所述末端执行器2上的视觉定位组件；其中，所述视觉定位组件用于定位所述片盒顶部的法兰40(属于片盒本身特征)位置；所述末端执行器2包括一与所述片盒顶部的法兰40相适配的凹面21，根据测得的所述片盒的法兰40的位置，所述末 端执行器2通过所述凹面21夹持片盒顶部的法兰40。通过视觉定位组件定位所述片盒的法兰40位置以实现对片盒的识别，由于片盒都有固定的规格，在获取片盒的法兰40的位置后即可获知片盒放置位置上承载的片盒的位置，无需额外黏贴标记，提高了测量精度及抓取片盒的精准度。接着，通过末端执行器2对片盒进行搬运，主要通过末端执行器2上的凹面21夹持片盒顶部的法兰40实现对片盒的搬运，由此可见，片盒的法兰40不仅起到识别的标定作用，还起到配合末端执行器2搬运片盒的作用。
请参考图1及图3，机械手搬运片盒的具体工作流程为：在抓取片盒时，末端执行器2从片盒顶部的法兰40与片盒主体之间的空间伸入至一定位置后，垂直向上将片盒托起；在放置片盒时，将片盒放在自动片盒搬运装置上的片盒放置位置上后，末端执行器2沿垂直向下方向运动与片盒脱离后抽出。优选机械手的机械臂1为6自由度的机械臂1，所述末端执行器2可绕所述机械臂1的末端进行360度旋转运动，末端执行器2在工作时与机械臂1的末端关节呈倒L形，具体来说，伸入货架时，机械臂1最后一个关节位于末端执行器2下方，以最大程度上节省末端执行器2的伸入对于片盒摆放位置(如货架、片盒放置机构等)每层高度空间的占用，同时降低对机械臂1末端的力矩。
本实施例中，所述凹面21上至少设有两个定位销25，所述定位销25与所述法兰40的切口对位，所述法兰40的切口为三角形或圆柱形，相应的，所述定位销25的位置需与片盒顶部的法兰40的切口相配合且形状相吻合，所述定位销25的横截面不局限为三角形或圆柱形，只要定位销25能够容置于法兰40的切口中，且定位销25的中心与切口的几何中心重合即可。利用法兰40自身具有的切口与设置于凹面21上的定位销25对位，实现对抓取后的片盒的自定心，从而进一步提高了片盒定位的精准度。使片盒在末端执行器2上的位置在精密可控范围，便于片盒能够被准确放置 到搬运车上。
如图3所示，所述末端执行器采用被动式无源方式，所述末端执行器2为两侧带有支撑板20的C字形半封闭结构，利用C字形半封闭结构可起到类似“斜拉桥”拉锁的功能。如图2所示，所述视觉定位组件包括：水平定位结构30及垂向定位结构31，所述水平定位结构30用于捕捉所述片盒表面水平方向上的特征，所述垂向定位结构用于捕捉所述片盒表面垂直方向上的特征，根据所述片盒表面水平方向上的特征及所述片盒表面垂直方向上的特征定位所述片盒的法兰40位置，即确定法兰40的空间具体位置，以便后续末端执行器2准确执行夹持搬运工作。
其中，所述水平定位结构30包括第一相机300，所述第一相机300设置于所述末端执行器2的中间，第一相机300的镜头垂直朝向末端执行器2上的任意一侧支撑板20；所述垂向定位结构31包括第二相机310及反射镜311，所述第二相机310和所述反射镜311均设置于所述末端执行器2的一侧支撑板20的侧壁上，且安装在第一相机300的镜头朝向的支撑板20相对一侧的支撑板20上。以实现最大程度上降低第二相机310与待测片盒的法兰40之间的间距，便于末端执行器2进入片盒摆放位置后对片盒顶部的法兰40进行测量。
所述末端执行器2还包括凸台22及至少一个在位传感器23，所述凸台22设置于所述凹面21的前端，以避免机械手突然断电时，出现片盒滑落的危险；所述凹面21上至少设置有一个在位传感器23，优选的在位传感器23设置于所述凹面21上与所述法兰40接触的区域上，用于感知所述凹面21是否夹持片盒。优选地，所述在位传感器23包括一个机械开关结构，当片盒自定心后，片盒触发机械开关结构，从而产生在位信号，所述机械开关结构具体请参考图4。
较佳的，本实施例中的机械手还包括设置于所述末端执行器2上的声 呐传感器24，安装在末端执行器2上的任意一侧支撑板20上，作为搬运执行过程中的安全检测传感器，一旦声呐阈值范围内有物体被探测到，则机械臂1立即停止作业。
在所述运载框架5的两侧还设置有垂向激光传感器，以实现对自动片盒搬运装置在高度方向上的障碍探测。
基于上述自动片盒搬运装置从货架中抓取片盒的工作流程，主要包括：
针对货架不同层设置不同的停车位置；先通过第一相机300对法兰40的侧面进行水平测量，通过法兰40的切口侧面特征获取片盒的X、Y、Z、Rx，再将第二相机310带入到法兰40的切口位置上方，通过切口的俯视特征获取片盒的X、Y、Rz；从片盒顶部的法兰40下方伸入末端执行器进行抓取。
本发明还提供一种使用上述自动片盒搬运装置的片盒搬运系统，所述片盒搬运系统的工作过程如下：
1)远程调度：片盒搬运系统的控制端下发片盒搬运任务，包含：片盒ID、起始点、目的地等信息。调度服务器根据全厂区内自动片盒搬运装置的位置及空闲情况，进行最优化调度，确定具体执行任务的自动片盒搬运装置，并发送片盒ID和起始点到该自动片盒搬运装置的自动导航小车，该步骤执行后，自动片盒搬运装置已经完全清楚将要执行的任务信息。
2)移动至目标位置：自动片盒搬运装置的自动导航小车为每一辆执行搬运任务的搬运装置规划最优路径，在行进间遇到障碍物时，进行自主避障绕行，自动片盒搬运装置根据所选择的工位位置以及片盒位置，计算出需要到达的地图坐标，抵达目标点后，自动导航小车调整朝向至设定的方向，将机械臂一侧靠近目标位置(货架或机台)，开始准备执行搬运任务。
3)片盒搬运：片盒搬运任务分为从货架/机台上取片盒，或将片盒放置到货架/机台上，提取片盒的操作如下：
a)自动搬运装置运动到机台的装载接口/货架，若货架为三层结构，由于片盒在货架三层不同的高度，以下简称高、中、低层，抓取片盒时，可采用将自动片盒搬运装置停靠位置不同的策略，以合理的提高自动片盒搬运装置搬运的稳定性。如：当片盒在上层时，自动片盒搬运装置停靠在距离货架100mm的距离左右，以尽可能的接近货架，缩短机械手的运动距离和抓取力矩，减小倾翻的可能，此时片盒在机械手安装平面上方，机械手具有较大的运动空间，通过规划机械手的运动轨迹，使其不会同自动导航小车碰撞或干涉。当片盒在下层时，自动片盒搬运装置停靠在距离货架400mm的距离左右，距离货架较远，此时片盒靠近机械手的安装平面，机械手运动空间较小，需规划机械手的运动轨迹避免同自动导航小车碰撞或干涉。当片盒在中层时，根据片盒在上层方案和片盒在下层方案的策略折中考虑设计。
b)将末端执行器上的第一相机300侧转向货架，使声呐传感器24和第一相机300的镜头面对片盒。利用第一相机300测量片盒的法兰40距离第一相机300的X方向距离X，具体为通过测量镜头的放大倍率
Figure PCTCN2017082506-appb-000001
第一相机300的镜头焦距f，可转换得到X，
Figure PCTCN2017082506-appb-000002
c)法兰40距离第一相机300的Y方向距离可通过从图像中检测法兰40上切口的位置，来进行切口定位。识别切口的方法可以为基于轮廓或灰度的模板匹配算法、基于角点及其描述符的匹配、基于直线检测的算法等。
d)根据法兰40距离第一相机300的X方向距离和Y方向距离使用Hough变换或类似的直线测量算法，计算法兰40相对于第一相机300的Z方向距离及Rx旋转。
e)机械手根据所测量到的片盒的法兰40相对于第一相机300的X,Y,Z,Rx等姿态，将第二相机310带到片盒顶部的法兰40的切口的正上方。
f)通过图形匹配的方法测量法兰40上两个以上切口，再结合法兰40本身的名义尺寸，可以计算出法兰40相对于第二相机310的X，Y，Rz位置。
g)根据求得的法兰40相对于第二相机310的X，Y，Rz位置移动末端执行器2，使之插入法兰底部，法兰的切口与末端执行器2上定位销25配合，之后末端执行器2将片盒托起并自定心，同时触发片盒在位传感器的机械开关结构，自动片盒搬运装置的控制器接收片盒在位信号。
h)自动片盒搬运装置的控制器控制机械臂按一定轨迹将末端执行器上的片盒放置到其自身的片盒放置机构上，该轨迹应不超过自动导航小车宽度方向的空间投影范围。放置片盒至片盒放置机构上片盒放置位置时，机械手放慢速度下降，直至放置到位。
i)片盒到位后，RFID传感器读取片盒信息，并记录整个片盒的搬运数据，将片盒搬运数据反馈至片盒搬运系统。
j)根据定义的任务序列执行下一项任务。
4)放置片盒。将片盒放置在货架上的操作步骤如下：
a)自动搬运装置运动到位，该步骤与提取片盒的步骤a)相同。
b)将末端执行器的视觉定位组件侧转向货架(面向片盒的Facial Datum Plane)。
c)机械臂将视觉定位组件带到机台的装载接口/货架片盒固定板上方，捕捉机台的装载接口/货架片盒固定板上的特征点(如标准机台的装载接口上的定位销)，确定其中心位置，用来与自动片盒搬运装置上片盒的轮廓或固定片盒的定位销中心进行配合，使片盒定位。
d)根据机台的装载接口/货架片盒固定板特征点在视觉定位组件下的位置，换算视觉定位组件距离特征点中心的x,y,z，Rz向距离，进而求得机械臂的末端执行器相对于放置位置的偏差。
e)根据已知的片盒放置位置，将末端执行器叉入片盒顶部的法兰40的 底部，并将片盒托起，机械臂方可带动片盒上升，即可以与片盒的定位销脱离(做x-y向运动)。
f)根据求得的距离，机械臂随后按一定轨迹将片盒放置到机台的装载接口或货架片盒放置板上，该轨迹不超过底座的空间投影范围。
g)在底座的两侧装有侧向声呐，在进行搬运时，声呐开启，当有感知到移动对象接近时，机械臂减速，以防伤人，并发出警报，提醒人员远离操作现场。
h)放置片盒至机台的装载接口/货架片盒放置机构上方时，机械手放慢速度下降，直至放置稳定。
i)片盒搬运完成后，并记录整个片盒的搬运数据。
j)将片盒搬运数据反馈至片盒搬运系统。
k)根据定义的任务序列执行下一项任务。
综上，在本发明所提供的用于片盒夹持的机械手中，所述用于片盒夹持的机械手包括机械臂、设置于所述机械臂的末端的末端执行器以及设置于所述末端执行器上的视觉定位组件。本发明通过视觉定位组件定位所述片盒的法兰位置以实现对片盒的识别，即依据片盒本身特征进行识别，无需额外黏贴标记，提高了测量精度及抓取片盒的精准度；另一方面，末端执行器利用末端执行器上与所述片盒顶部法兰相适配的凹面夹持片盒顶部的法兰实现对片盒的搬运；此外，在凹面夹持法兰的同时，凹面上的定位销与法兰的切口对位实现了片盒的自定心，进一步提高了片盒定位的精准度。
上述描述仅是对本发明较佳实施例的描述，并非对本发明范围的任何限定，本发明领域的普通技术人员根据上述揭示内容做的任何变更、修饰，均属于权利要求书的保护范围。

Claims (14)

  1. 一种用于片盒夹持的机械手，其特征在于，包括：机械臂、设置于所述机械臂的末端的末端执行器以及设置于所述末端执行器上的视觉定位组件；
    其中，所述视觉定位组件用于定位所述片盒顶部的法兰位置；
    所述末端执行器包括一与所述片盒顶部法兰相适配的凹面，根据所述片盒的法兰位置所述末端执行器通过所述凹面夹持片盒顶部的法兰。
  2. 如权利要求1所述的用于片盒夹持的机械手，其特征在于，所述视觉定位组件包括：水平定位结构和垂向定位结构，所述水平定位结构用于捕捉所述片盒表面水平方向上的特征，所述垂向定位结构用于捕捉所述片盒表面垂直方向上的特征，根据所述片盒表面水平方向上的特征及所述片盒表面垂直方向上的特征定位所述片盒的法兰位置。
  3. 如权利要求2所述的用于片盒夹持的机械手，其特征在于，所述水平定位结构包括第一相机，所述第一相机的镜头垂直朝向所述末端执行器的任意一侧的侧壁。
  4. 如权利要求2所述的用于片盒夹持的机械手，其特征在于，所述垂向定位结构包括第二相机及反射镜，所述第二相机和所述反射镜均设置于所述末端执行器的一侧的侧壁上。
  5. 如权利要求1所述的用于片盒夹持的机械手，其特征在于，所述末端执行器为两侧带有支撑板的C字形半封闭结构。
  6. 如权利要求1所述的用于片盒夹持的机械手，其特征在于，所述末端执行器还包括设置于所述凹面前端的凸台，用于防止片盒滑落。
  7. 如权利要求1所述的用于片盒夹持的机械手，其特征在于，所述凹面上至少设有一个在位传感器，用于感知所述凹面是否夹持片盒。
  8. 如权利要求1所述的用于片盒夹持的机械手，其特征在于，还包括设置于所述末端执行器上的声呐传感器，用于对片盒搬运行程进行安全检测。
  9. 如权利要求1所述的用于片盒夹持的机械手，其特征在于，所述凹面上至少设有两个定位销，所述定位销与所述法兰的切口对应。
  10. 如权利要求1所述的用于片盒夹持的机械手，其特征在于，所述末端执行器与所述机械臂的末端呈倒L形。
  11. 如权利要求1所述的用于片盒夹持的机械手，其特征在于，所述末端执行器可绕所述机械臂的末端进行360度旋转运动。
  12. 如权利要求1所述的用于片盒夹持的机械手，其特征在于，所述机械臂具有6个自由度。
  13. 一种自动片盒搬运装置，其特征在于，包括：自动导航小车、架设在所述自动导航小车上的运载框架及设置于所述运载框架上如权利要求1-12中任一项所述的用于片盒夹持的机械手。
  14. 如权利要求13所述的自动片盒搬运装置，其特征在于，还包括设置于所述运载框架上的片盒放置机构，所述机械手相对所述片盒放置机构设置于所述运载框架的一角。
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