WO2017175803A1 - 被覆切削工具 - Google Patents
被覆切削工具 Download PDFInfo
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- WO2017175803A1 WO2017175803A1 PCT/JP2017/014268 JP2017014268W WO2017175803A1 WO 2017175803 A1 WO2017175803 A1 WO 2017175803A1 JP 2017014268 W JP2017014268 W JP 2017014268W WO 2017175803 A1 WO2017175803 A1 WO 2017175803A1
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- composite nitride
- cutting tool
- coated cutting
- nitride layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/141—Specially shaped plate-like cutting inserts, i.e. length greater or equal to width, width greater than or equal to thickness
- B23B27/145—Specially shaped plate-like cutting inserts, i.e. length greater or equal to width, width greater than or equal to thickness characterised by having a special shape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
- B23C5/16—Milling-cutters characterised by physical features other than shape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
- B23C5/16—Milling-cutters characterised by physical features other than shape
- B23C5/165—Milling-cutters characterised by physical features other than shape with chipbreaking or chipdividing equipment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/3442—Applying energy to the substrate during sputtering using an ion beam
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2226/00—Materials of tools or workpieces not comprising a metal
- B23B2226/12—Boron nitride
- B23B2226/125—Boron nitride cubic [CBN]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2251/00—Details of tools for drilling machines
- B23B2251/50—Drilling tools comprising cutting inserts
Definitions
- the present invention relates to a coated cutting tool.
- Patent Document 1 two types of compounds of Ti x Al 1-x N and Ti y Al 1-y N (0 ⁇ x ⁇ 0.5, 0.5 ⁇ y ⁇ 1) are alternately repeated. Coated cutting tools that have been laminated and become aluminum-rich as a whole of the laminate have been proposed.
- Patent Document 1 has a problem that although a cutting tool having a lamination cycle of 0.4 to 50 nm and a thin film lamination exhibits high wear resistance, the tool is liable to be damaged.
- the present invention has been made to solve these problems, and an object of the present invention is to provide a coated cutting tool having a long tool life with improved fracture resistance without deteriorating wear resistance.
- the inventors of the present invention have made studies on extending the tool life of the coated cutting tool, and improved the fracture resistance without reducing the wear resistance by improving the layer structure and composition of the coating layer. As a result, it has been found that the tool life of the coated cutting tool can be extended, and the present invention has been completed.
- a coated cutting tool comprising a substrate and a coating layer formed on the surface of the substrate, wherein the coating layer is represented by the following formula (1): (Ti x Al 1-x ) N (1) (In the formula, x represents the atomic ratio of Ti element to the total of Ti element and Al element, and satisfies 0.10 ⁇ x ⁇ 0.35.)
- M represents at least one element selected from the group consisting of Zr, Hf, V, Nb, Ta, Cr, Mo, W, Si, and Y
- y represents a Ti element, an Al element, and M.
- the first composite nitride layer has a lattice constant of 0.400 nm to 0.430 nm.
- the coated cutting tool containing the phase which is the following, and the phase whose lattice constant is 0.755 nm or more and 0.810 nm or less.
- the first composite nitride layer has a cubic crystal system, a phase having a lattice constant of 0.410 nm to 0.420 nm, and a cubic crystal system, and a lattice constant of 0.770 nm.
- the average thickness T 1 of the per layer of the first composite nitride layer is 4nm or 200nm or less, [1] coated cutting tool according to any one of - [3].
- the average thickness T 2 of the per layer of the second composite nitride layer is 4nm or 200nm or less, [1] coated cutting tool according to any one of - [4].
- the ratio [T 1 / T 2 ] of the average thickness T 1 per layer of the first composite nitride layer to the average thickness T 2 per layer of the second composite nitride layer is 0
- the coated cutting tool according to any one of claims 1 to 5, which is 10 or more and 1.30 or less.
- the ratio [T 1 / T 2 ] of the average thickness T 1 of the first composite nitride layer to the average thickness T 2 of the second composite nitride layer per layer is 0
- the coated cutting tool according to any one of [1] to [7], wherein an average thickness of the alternately laminated structure is 1.5 ⁇ m or more and 12.0 ⁇ m or less.
- the coating layer has a lower layer between the base material and the alternate laminated structure, and the lower layer includes Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, A single layer or a laminate of a compound comprising at least one element selected from the group consisting of Al, Si and Y and at least one element selected from the group consisting of C, N, O and B, and
- the coated cutting tool according to any one of [1] to [8], wherein the average thickness of the layer is 0.1 ⁇ m or more and 3.5 ⁇ m or less.
- the coating layer has an upper layer on the surface of the alternately laminated structure, and the upper layer includes Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, and Y.
- a single layer or a laminate of a compound comprising at least one element selected from the group consisting of and at least one element selected from the group consisting of C, N, O and B, and the average thickness of the upper layer Is a coated cutting tool according to any one of [1] to [9], which is 0.1 ⁇ m or more and 3.5 ⁇ m or less.
- the coated cutting tool according to any one of [1] to [10] wherein the average thickness of the entire coating layer is 1.5 ⁇ m or more and 15.0 ⁇ m or less.
- the present embodiment a mode for carrying out the present invention (hereinafter simply referred to as “the present embodiment”) will be described in detail, but the present invention is not limited to the present embodiment described below.
- the present invention can be variously modified without departing from the gist thereof.
- the coated cutting tool of this embodiment includes a base material and a coating layer formed on the surface of the base material.
- the base material in this embodiment is not particularly limited as long as it can be used as a base material for a coated cutting tool.
- the substrate include cemented carbide, cermet, ceramics, cubic boron nitride sintered body, diamond sintered body, and high speed steel.
- the base material is at least one selected from the group consisting of cemented carbide, cermet, ceramics, and cubic boron nitride sintered body, since it is further excellent in wear resistance and fracture resistance. .
- the average thickness of the entire coating layer when the average thickness of the entire coating layer is 1.5 ⁇ m or more, the wear resistance tends to be further improved. On the other hand, when the average thickness of the entire coating layer is 15.0 ⁇ m or less, the fracture resistance tends to be further improved. Therefore, the average thickness of the entire coating layer is preferably 1.5 ⁇ m or more and 15.0 ⁇ m or less. Among these, from the same viewpoint as described above, the overall average thickness of the coating layer is more preferably 2.0 ⁇ m or more and 10.0 ⁇ m or less.
- the coating layer of this embodiment has an alternately laminated structure in which two or three different layers having different compositions are alternately laminated. At least one layer in the alternately laminated structure includes a specific layer described below (hereinafter referred to as “first composite nitride layer”).
- the first composite nitride layer according to this embodiment has the following formula (1): (Ti x Al 1-x ) N (1) Since the compound which has the composition represented by this is contained, it is excellent in oxidation resistance.
- the compound having the composition represented by the above formula (1) in the first composite nitride layer of the present embodiment preferably includes cubic crystals, or cubic crystals and hexagonal crystals.
- x represents the atomic ratio of Ti element to the total of Ti element and Al element, and satisfies 0.10 ⁇ x ⁇ 0.35.
- the atomic ratio x of the Ti element is 0.10 or more, the content of Al can be reduced, so that the abundance ratio of hexagonal crystals can be further reduced, and as a result, a decrease in wear resistance can be suppressed.
- the atomic ratio x of the Ti element is 0.35 or less, the decrease in oxidation resistance can be suppressed by increasing the Al content.
- At least one layer in the alternately laminated structure of the coating layers of the present embodiment includes a specific layer described below (hereinafter referred to as “second composite nitride layer”).
- the second composite nitride layer according to this embodiment has the following formula (2): (Ti y Al z M 1-yz ) N (2) Since it contains a compound having a composition represented by the formula, it is excellent in wear resistance.
- the compound having the composition represented by the above formula (2) in the second composite nitride layer of the present embodiment preferably includes cubic crystals, or cubic crystals and hexagonal crystals.
- M represents at least one element selected from the group consisting of Zr, Hf, V, Nb, Ta, Cr, Mo, W, Si and Y
- y represents Ti element and Al.
- the atomic ratio of Ti element to the sum of the element and the element represented by M is shown
- z represents the atomic ratio of the Al element to the sum of the Ti element, Al element and the element represented by M, and 0.30 ⁇ y ⁇ 0.90, 0.10 ⁇ z ⁇ 0.70, and y + z ⁇ 1 are satisfied.
- the atomic ratio y of the Ti element is 0.30 or more, the decrease in wear resistance can be suppressed by increasing the Ti content, and when it is 0.90 or less, the Al content increases.
- a decrease in oxidation resistance can be suppressed.
- the atomic ratio z of the Al element is 0.10 or more, a decrease in oxidation resistance can be suppressed by increasing the Al content, and when it is 0.70 or less, the Ti content increases. Thus, it is possible to suppress a decrease in wear resistance. Further, by containing the element represented by M, wear resistance and fracture resistance are improved. Among them, when the atomic ratio y of Ti element is 0.30 or more and 0.80 or less and / or the atomic ratio z of Al element is 0.20 or more and 0.70 or less, wear resistance and oxidation resistance This is preferable because it is more excellent in balance.
- the atomic ratio y of Ti element is 0.50 or more and 0.70 or less and / or the atomic ratio z of Al element is 0.30 or more and 0.50 or less.
- y + z is 0.05 or more and 0.30 or less, it is preferable because the balance between wear resistance and oxidation resistance is excellent, and from the same viewpoint, y + z is 0.10 or more and 0.20 or less. More preferred.
- the element represented by M is at least one element selected from the group consisting of Zr, V, Nb, Cr, Mo, W, and Si from the viewpoint of more effectively and reliably achieving the effects of the present invention. It is preferable.
- each composite nitride layer when the composition of each composite nitride layer is expressed as (Ti 0.35 Al 0.65 ) N, the atomic ratio of Ti element to the total of Ti element and Al element is 0.35.
- the atomic ratio of Al element to the sum of Ti element and Al element is 0.65. That is, it means that the amount of Ti element with respect to the sum of Ti element and Al element is 35 atomic%, and the amount of Al element with respect to the sum of Ti element and Al element is 65 atomic%.
- the first composite nitride layer in the coated cutting tool of the present embodiment includes a phase having a lattice constant of 0.400 nm to 0.430 nm
- the first composite nitride layer becomes dense, and the coated cutting tool Excellent wear resistance.
- the 1st composite nitride layer of the coated cutting tool of this embodiment contains the phase whose lattice constant is 0.755 nm or more and 0.810 nm or less, it suppresses the progress of the crack (crack) generated during processing. In order to achieve the effect, the coated cutting tool has excellent fracture resistance.
- the first composite nitride layer preferably includes a phase having a lattice constant of 0.410 nm to 0.430 nm and a phase having a lattice constant of 0.760 nm to 0.800 nm. More preferably, it includes a phase having a lattice constant of 0.410 nm to 0.420 nm and a phase having a lattice constant of 0.770 nm to 0.795 nm.
- the first composite nitride layer of the coated cutting tool of the present embodiment if the crystal system of the phase having a lattice constant of 0.400 nm to 0.430 nm is a cubic crystal, the first composite nitride layer has wear resistance. It is preferable because it has a tendency to be more excellent. In the first composite nitride layer of the coated cutting tool of the present embodiment, if the crystal system of the phase having a lattice constant of 0.755 nm or more and 0.810 nm or less is a cubic crystal, the first composite nitride layer is This is preferable because it has a tendency to further improve the wearability.
- a phase crystal system having a lattice constant of 0.410 nm to 0.430 nm and a phase crystal system having a lattice constant of 0.760 nm to 0.800 nm are more preferably cubic, and the crystal system of a phase having a lattice constant of 0.410 nm to 0.420 nm and a phase having a lattice constant of 0.770 nm to 0.795 nm are both cubic. More preferably, it is a crystal.
- the second composite nitride layer in the coated cutting tool of the present embodiment includes a phase having a lattice constant of 0.400 nm or more and 0.430 nm or less
- the second composite nitride layer becomes denser, and the coated cutting tool is This is preferable because it is further excellent in wear resistance.
- the second composite nitride layer of the coated cutting tool of the present embodiment if the crystal system of the phase having a lattice constant of 0.400 nm or more and 0.430 nm or less is a cubic crystal, the second composite nitride layer has wear resistance. This is preferable because it has a tendency to be more excellent.
- the first composite nitride layer in the coated cutting tool of the present embodiment has two phases having different lattice constants, and thus has excellent wear resistance and fracture resistance.
- the second composite nitride layer in the coated cutting tool of the present embodiment exhibits good wear resistance, particularly in steel processing, due to the high Ti content ratio.
- the abrasion resistance of a coated cutting tool improves.
- the coating layer has an alternate laminated structure, cracks generated during processing are likely to progress in a direction parallel to the interface between the first composite nitride layer and the second composite nitride layer, and the cracks reach the substrate. The effect of suppressing the progress is obtained, and as a result, the fracture resistance is improved.
- the lattice constant can be obtained from the relational expression (shown below) between the obtained lattice plane spacing and the lattice constant.
- Bragg's formula: 2d ⁇ / sin ⁇
- a 2 d 2 ⁇ (h 2 + k 2 + l 2 )
- a 2 d 2 ⁇ ⁇ 4/3 ⁇ (h 2 + k 2 + l 2 ) + l 2 ⁇ (c / a) 2 ⁇
- d is the lattice spacing
- ⁇ is the wavelength of the tube used for the measurement
- ⁇ is the incident angle
- a is the lattice constant
- h, k, and l are surface indices.
- the lattice spacing and the crystal system in each composite nitride layer of this embodiment can be derived using a commercially available transmission microscope (TEM).
- TEM transmission microscope
- FIB focused ion beam
- a thin film sample having a cross-section of the coating layer as an observation surface is prepared, and using a TEM apparatus TeknaiOsiris (product name) manufactured by FEI Co., Ltd. Can be measured.
- the crystal system of the crystal grains contained in each composite nitride layer is obtained by irradiating the region of each composite nitride layer with an electron beam having a spot diameter corresponding to the thickness of each composite nitride layer, thereby limiting the field-of-view electron diffraction image. (SAD).
- SAD field-of-view electron diffraction image.
- attached Fourier transform software may be used for the lattice spacing and crystal system of each composite nitride layer.
- each diffraction surface index and grating plane spacing can be measured using analysis software manufactured by Gatan.
- a magnification capable of observing a lattice image of a measurement location, and more preferably at a magnification of 500,000 times or more.
- a Fourier transform image (hereinafter referred to as “FFT image”) is used. Can be obtained.
- the distance between the lattice planes can be derived from the distance between the transmitted wave (center spot) obtained at the center of the FFT image and the diffraction spot.
- the lattice constant can be obtained by identifying the crystal system from the ratio of the distances between the lattice planes derived from the FFT image. Specifically, the lattice constant can be obtained by substituting the lattice spacing into the relational expression between the lattice spacing and the lattice constant obtained for the identified crystal system.
- the lattice constant in a thin film sample, when a phase having a lattice constant of 0.755 nm or more and 0.810 nm or less is observed in a range of 1 ⁇ m in a direction parallel to the substrate, at least Preferably one or more are observed.
- coated cutting tool of the present embodiment if the average thickness T 1 of the per layer of the first composite nitride layer is 4nm or more, it is possible to form more first composite nitride layer of uniform thickness Therefore, it is preferable. On the other hand, if the average thickness T 1 is is 200nm or less, the hardness of the alternate stacked structure is further increased, the abrasion resistance of the coated cutting tool is preferable to further improved.
- the average thickness T 2 of per layer of the second composite nitride layer is 4nm or more, it can be formed more second composite nitride layer of uniform thickness Therefore, it is preferable.
- the average the second thickness T 2 is at 200nm or less, the hardness of the alternate stacked structure is further increased, the abrasion resistance of the coated cutting tool is preferable to further improved.
- the ratio of the average thickness T 1 per layer of the first composite nitride layer to the average thickness T 2 per layer of the second composite nitride layer [T 1 / T 2 ] is preferably 0.10 or more because the effect of suppressing the progress of cracks generated during processing is more sufficiently exhibited.
- an average thickness ratio [T 1 / T 2 ] of 1.30 or less is preferable because the balance between wear resistance and fracture resistance is further improved.
- the ratio [T 1 / T 2 ] of the average thickness T 1 per layer of the first composite nitride layer to the average thickness T 2 per layer of the second composite nitride layer is determined. 0.10 or more and 0.90 or less is more preferable.
- the average thickness of the alternately laminated structure when the average thickness of the alternately laminated structure is 1.5 ⁇ m or more, the wear resistance tends to be further improved. On the other hand, when the average thickness of the alternately laminated structure is 12.0 ⁇ m or less, the defect resistance tends to be further improved. Therefore, it is preferable that the average thickness of the alternately laminated structure is 1.5 ⁇ m or more and 12.0 ⁇ m or less.
- FIG. 1 is a schematic diagram showing an example of a cross-sectional structure of the coated cutting tool of the present embodiment.
- the coated cutting tool 8 includes a substrate 1 and a coating layer 7 formed on the surface of the substrate 1.
- the coating layer 7 is formed by laminating a lower layer 2, which will be described later, an alternating laminated structure 6, and an upper layer 5, which will be described later, in order from the substrate 1 side.
- the alternate laminated structure 6 is formed by alternately laminating first composite nitride layers 3 and second composite nitride layers 4 in order from the lower layer 2 side to the upper layer 5 side.
- Each of the layer 3 and the second composite nitride layer 4 has four layers. In this case, the number of repetitions is four. Further, for example, the first composite nitride layer 3 and the second composite nitride layer 4 are arranged in order from the lower layer 2 side to the upper layer 5 side.
- the coating layer 7 includes both the lower layer 2 and the upper layer 5, but the coating layer may include only the lower layer 2 and the upper layer 5, or may not include both. .
- the covering layer according to the present embodiment may be configured only by the alternately laminated structure of each composite nitride layer, but when the lower layer is provided between the base material and the alternately laminated structure (that is, the lower layer of the alternately laminated structure). Since the adhesion between the substrate and the alternately laminated structure is further improved, it is preferable.
- the lower layer is composed of at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, and Y from the same viewpoint as above.
- it contains a compound consisting of at least one element selected from the group consisting of C, N, O and B, and at least one selected from the group consisting of Ti, V, Nb, Cr, Mo, W, Al and Si. More preferably, it contains a compound consisting of a seed element and at least one element selected from the group consisting of C, N, O and B, and consists of Ti, V, Nb, Cr, Mo, W, Al and Si. More preferably, it contains a compound consisting of N and at least one element selected from the group.
- the lower layer may be a single layer or a multilayer of two or more layers.
- the average thickness of the lower layer is 0.1 ⁇ m or more and 3.5 ⁇ m or less because the adhesion between the substrate and the coating layer tends to be further improved.
- the average thickness of the lower layer is more preferably 0.3 ⁇ m or more and 3.0 ⁇ m or less, and further preferably 0.5 ⁇ m or more and 3.0 ⁇ m or less.
- the covering layer of the present embodiment may have an upper layer on the opposite side of the substrate having the alternately laminated structure (that is, the upper layer of the alternately laminated structure), preferably on the surface of the alternately laminated structure.
- the upper layer is composed of at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si and Y, and a group consisting of C, N, O and B It is more preferable to include a compound composed of at least one element selected from the above, since the wear resistance is further improved.
- the upper layer is composed of at least one element selected from the group consisting of Ti, Nb, Cr, Mo, W, Al and Si, and a group consisting of C, N, O and B. More preferably, it includes a compound composed of at least one element selected, and includes a compound composed of N and at least one element selected from the group consisting of Ti, Nb, Cr, Mo, W, Al, and Si. And more preferred.
- the upper layer may be a single layer or a multilayer of two or more layers.
- the average thickness of the upper layer is 0.1 ⁇ m or more and 3.5 ⁇ m or less because it tends to be more excellent in wear resistance. From the same viewpoint, the average thickness of the upper layer is more preferably 0.2 ⁇ m or more and 2.0 ⁇ m or less, and further preferably 0.3 ⁇ m or more and 1.0 ⁇ m or less.
- the manufacturing method of the coating layer in the coated cutting tool of the present embodiment is not particularly limited, but for example, physical vapor deposition methods such as ion plating method, arc ion plating method, sputtering method, and ion mixing method Is mentioned. It is preferable to form a coating layer using physical vapor deposition because a sharp edge can be formed. Among these, the arc ion plating method is more preferable because it is more excellent in the adhesion between the coating layer and the substrate.
- the manufacturing method of the coated cutting tool of this embodiment will be described below using a specific example.
- the manufacturing method of the coated cutting tool of this embodiment is not specifically limited as long as the configuration of the coated cutting tool can be achieved.
- the base material processed into a tool shape is accommodated in a reaction container of a physical vapor deposition apparatus, and a metal evaporation source is installed in the reaction container. Thereafter, the inside of the reaction vessel is evacuated until the pressure becomes 1.0 ⁇ 10 ⁇ 2 Pa or less, and the substrate is heated by the heater in the reaction vessel until the temperature becomes 200 ° C. to 700 ° C. After heating, Ar gas is introduced into the reaction vessel, and the pressure in the reaction vessel is set to 0.5 Pa to 5.0 Pa.
- the substrate is heated until its temperature reaches 150 ° C. to 400 ° C. After heating, N 2 gas is introduced into the reaction vessel, and the pressure in the reaction vessel is set to 0.5 Pa to 5.0 Pa. Then, a lower layer may be formed by applying a bias voltage of ⁇ 50 V to ⁇ 80 V to the substrate and evaporating a metal evaporation source corresponding to the metal component of each layer by arc discharge with an arc current of 100 A to 150 A.
- the temperature of the substrate is controlled to be 150 ° C. to 400 ° C., and nitrogen gas (N 2 ), argon gas (Ar), and xenon gas (Xe) are controlled.
- N 2 nitrogen gas
- Ar argon gas
- Xe xenon gas
- Is introduced into the reaction vessel, and the pressure in the reaction vessel is adjusted to 1.0 to 4.0 Pa.
- a bias voltage of ⁇ 40 V to ⁇ 100 V is applied to the substrate, and the metal evaporation source corresponding to the metal component of the first composite nitride layer is evaporated by arc discharge with 35 A to 80 A.
- a layer may be formed.
- the atomic ratio of Al element to the total of Ti element and Al element is 0.65. It is preferable to use a metal evaporation source of 0.90 or less. Further, in order to form a phase having a lattice constant of 0.755 nm or more and 0.810 nm or less in the first composite nitride layer of the present embodiment, the atomic ratio of Al element to the total of Ti element and Al element is set to 0.
- the temperature of the base material is lowered to 150 to 400 ° C.
- the atmosphere in the reaction vessel of the physical vapor deposition apparatus is N 2 gas, Ar gas and Xe gas It is preferable to form the first composite nitride layer under the condition of a mixed gas atmosphere comprising: At this time, when the proportion of Xe gas in the reaction vessel is increased, the lattice constant tends to increase.
- the temperature of the substrate is controlled so as to be 150 ° C. to 400 ° C. If the temperature of the base material is the same as the temperature of the base material when forming the first composite nitride layer, the first composite nitride layer and the second composite nitride layer may be formed continuously. It is preferable because it is possible.
- N 2 gas or N 2 gas and Ar gas are introduced into the reaction vessel, and the pressure in the reaction vessel is set to 0.5 Pa to 5.0 Pa.
- a bias voltage of ⁇ 40 V to ⁇ 80 V is applied to the base material, and a metal evaporation source corresponding to the metal component of the second composite nitride layer is evaporated by arc discharge with an arc current of 80 A to 150 A, so that the second composite nitride is obtained.
- a physical layer may be formed.
- each composite is obtained by alternately evaporating two or more kinds of metal evaporation sources under the above-described conditions by arc discharge.
- the nitride layers may be formed alternately.
- By adjusting the arc discharge time of the metal evaporation source it is possible to control the thickness of each composite nitride layer constituting the alternately laminated structure.
- each layer constituting the coating layer in the coated cutting tool of this embodiment can be measured from the cross-sectional structure of the coated cutting tool using an optical microscope, a scanning electron microscope (SEM), a TEM, or the like.
- the average thickness of each layer in the coated cutting tool of the present embodiment is from three or more cross sections in the vicinity of the position of 50 ⁇ m from the edge of the edge of the surface facing the metal evaporation source toward the center of the surface. It can be obtained by measuring the thickness of each layer and calculating the average value (arithmetic average value).
- composition of each layer constituting the coating layer in the coated cutting tool of the present embodiment is determined from the cross-sectional structure of the coated cutting tool of the present embodiment by using an energy dispersive X-ray analyzer (EDS) or a wavelength dispersive X-ray analyzer. (WDS) or the like can be used for measurement.
- EDS energy dispersive X-ray analyzer
- WDS wavelength dispersive X-ray analyzer
- the coated cutting tool of this embodiment is considered to have an effect that the tool life can be extended compared to the conventional case mainly due to the excellent wear resistance and fracture resistance (however, the tool life is extended).
- the possible factors are not limited to the above).
- Specific examples of the coated cutting tool of the present embodiment include milling or turning cutting edge exchangeable cutting inserts, drills, and end mills.
- Example 1 As a base material, a cemented carbide having a composition of 90.2WC-9.8Co (more than mass%) was prepared by processing into an ISO standard SEEN1203AGTN shape insert. A metal evaporation source was arranged in the reaction vessel of the arc ion plating apparatus so as to have the composition of each layer shown in Table 1 and Table 2. The prepared base material was fixed to the fixture of the turntable in the reaction vessel.
- the inside of the reaction vessel was evacuated until the pressure became a vacuum of 5.0 ⁇ 10 ⁇ 3 Pa or less.
- the substrate was heated with a heater in the reaction vessel until the temperature reached 450 ° C. After heating, Ar gas was introduced into the reaction vessel so that the pressure was 2.7 Pa.
- Ion bombardment treatment with Ar gas on the surface of the substrate by applying a bias voltage of ⁇ 400 V to the substrate in an Ar gas atmosphere at a pressure of 2.7 Pa, causing a 40 A current to flow through the tungsten filament in the reaction vessel. For 30 minutes. After completion of the ion bombardment treatment, the reaction vessel was evacuated until the pressure became 5.0 ⁇ 10 ⁇ 3 Pa or less.
- the substrate was controlled so that its temperature became the temperature shown in Table 3 (temperature at the start of film formation), and the gas having the composition shown in Table 3 was placed in the reaction vessel.
- the pressure was adjusted to the gas conditions shown in Table 3 by introducing the reaction vessel.
- the bias voltage shown in Table 3 was applied to the substrate, and the metal evaporation sources of the first composite nitride layer and the second composite nitride layer having the composition shown in Table 1 were alternately used.
- the first composite nitride layer and the second composite nitride layer were alternately formed on the surface of the substrate by evaporating by arc discharge with an arc current shown in Table 3.
- the gas conditions and pressure in the reaction vessel shown in Table 3 were controlled. Further, the thickness of the first composite nitride layer and the thickness of the second composite nitride layer were controlled by adjusting the respective arc discharge times so as to have the thicknesses shown in Table 1.
- the substrate was controlled so that its temperature became the temperature shown in Table 4 (temperature at the start of film formation), and a gas having the composition shown in Table 4 was introduced into the reaction vessel.
- the gas conditions in the reaction vessel were adjusted to the pressure shown in Table 4.
- the bias voltage shown in Table 4 was applied to the base material, the metal evaporation source having the composition shown in Table 2 was evaporated by arc discharge of the arc current shown in Table 4, and the thickness shown in Table 2 was formed on the surface of the base material.
- a single layer (A layer) having a thickness was formed.
- the heater was turned off and the sample temperature was 100 ° C. or lower, and then the sample was taken out from the reaction vessel.
- the “average thickness per layer” of the A layer is T 1
- the “average thickness per layer” of the B layer is T 2 .
- the average thickness of each layer of the obtained sample was measured by TEM observation of three cross sections in the vicinity of a position of 50 ⁇ m from the edge of the edge of the surface facing the metal evaporation source of the coated cutting tool toward the center of the surface. Then, the thickness of each layer was measured, and the average value (arithmetic average value) was calculated. Further, from the obtained average thickness T 1 per layer of the first composite nitride layer and the average thickness T 2 per layer of the second composite nitride layer, per layer of the second composite nitride layer the average ratio of the thickness T 1 of the per layer of for the average the second thickness T 2 first composite nitride layer [T 1 / T 2] was calculated. The results are also shown in Table 1 and Table 2. For convenience, the "average thickness per layer" of the A layer in the comparative product and T 1, the B layer "average thickness per layer” was T 2.
- composition of each layer of the obtained sample was measured using an EDS attached to the TEM in a cross section in the vicinity of a position from the edge of the edge of the surface of the coated cutting tool facing the metal evaporation source to 50 ⁇ m toward the center. did.
- the results are also shown in Table 1 and Table 2.
- the composition ratio of the metal element of each layer of Table 1 and Table 2 shows the atomic ratio of each metal element with respect to the whole metal element in the metal compound which comprises each layer.
- the lattice constant and crystal system of the obtained sample were derived using a commercially available TEM.
- a FIB processing machine manufactured by FEI Co., Ltd.
- a thin film sample having a cross-section of the coating layer as an observation surface was prepared.
- a lattice image of each composite nitride layer was taken at a magnification of 500,000 times using a TEM apparatus TecnaiOsiris (product name) manufactured by FEI Co., Ltd.
- An FFT image was obtained from the photographed image using analysis software manufactured by Gatan.
- the lattice spacing was derived from the intensity (center spot) obtained at the center of the FFT image and the distance between the diffraction spots, and the crystal system and lattice constant were determined. The results are shown in Tables 5 and 6. For the comparative product, the crystal system and lattice constant of the A layer and the B layer were measured.
- the evaluations of the wear resistance test of the invention products were all evaluations of “B” or higher, and the evaluations of the comparative products were “B” or “C”. Therefore, it can be seen that the wear resistance of the inventive product is equal to or greater than that of the comparative product.
- the evaluations of the fracture resistance test of the invention products were all “A” or “B” evaluations, and the evaluations of the comparative products were all “C”.
- Example 2 As a base material, a cemented carbide having a composition of 90.2WC-9.8Co (more than mass%) was prepared by processing into an ISO standard SEEN1203AGTN shape insert. A metal evaporation source was arranged in the reaction vessel of the arc ion plating apparatus so as to have the composition of each layer shown in Table 8 and Table 9. The prepared base material was fixed to the fixture of the turntable in the reaction vessel.
- the inside of the reaction vessel was evacuated until the pressure became a vacuum of 5.0 ⁇ 10 ⁇ 3 Pa or less.
- the substrate was heated with a heater in the reaction vessel until the temperature reached 450 ° C. After heating, Ar gas was introduced into the reaction vessel so that the pressure was 2.7 Pa.
- Ion bombardment treatment with Ar gas on the surface of the substrate by applying a bias voltage of ⁇ 400 V to the substrate in an Ar gas atmosphere at a pressure of 2.7 Pa, causing a 40 A current to flow through the tungsten filament in the reaction vessel. For 30 minutes. After completion of the ion bombardment treatment, the reaction vessel was evacuated until the pressure became 5.0 ⁇ 10 ⁇ 3 Pa or less.
- the substrate was heated until its temperature reached 350 ° C., and N 2 gas was introduced into the reaction vessel so that the pressure in the reaction vessel was 3.0 Pa. Thereafter, a bias voltage of ⁇ 50 V was applied to the base material, and a metal evaporation source having the composition shown in Table 8 was evaporated by arc discharge with an arc current of 120 A to form a lower layer.
- inventive products 14 to 17 the substrate was controlled so that its temperature became the temperature shown in Table 10 (temperature at the start of film formation), and a gas having the composition shown in Table 10 was introduced into the reaction vessel.
- the gas conditions in the reaction vessel were adjusted to the pressure shown in Table 10.
- the bias voltage shown in Table 10 was applied to the base material, and the metal evaporation sources of the first composite nitride layer and the second composite nitride layer having the composition shown in Table 8 were alternately used.
- the first composite nitride layer and the second composite nitride layer were alternately formed on the surface of the lower layer by evaporation by arc discharge shown in Table 10.
- the gas conditions and pressure in the reaction vessel shown in Table 10 were controlled. Further, the thickness of the first composite nitride layer and the thickness of the second composite nitride layer were controlled by adjusting the respective arc discharge times so as to have the thicknesses shown in Table 8.
- the substrate was heated until its temperature reached 350 ° C., and N 2 gas was introduced so that the pressure in the reaction vessel became 3.0 Pa. Thereafter, a bias voltage of ⁇ 50 V was applied to the base material, and the metal evaporation source shown in Table 8 was evaporated by arc discharge with an arc current of 120 A to form an upper layer.
- the substrate was heated until its temperature reached 350 ° C., and N 2 gas was introduced into the reaction vessel so that the pressure in the reaction vessel became 3.0 Pa. Thereafter, a bias voltage of ⁇ 50 V was applied to the substrate, and the metal evaporation source having the composition shown in Table 9 was evaporated by arc discharge with an arc current of 120 A, thereby forming a lower layer.
- the substrate was controlled so that its temperature became the temperature shown in Table 11 (temperature at the start of film formation), and a gas having the composition shown in Table 11 was introduced into the reaction vessel.
- the gas conditions in the reaction vessel were adjusted to the pressure shown in Table 11.
- the bias voltage shown in Table 11 was applied to the substrate, and the metal evaporation sources of the A layer and B layer having the composition shown in Table 9 were alternately turned on by arc discharge shown in Table 11.
- a layer and B layer were alternately formed on the surface of the lower layer.
- the gas conditions and pressure in the reaction vessel shown in Table 11 were controlled.
- the thickness of the A layer and the thickness of the B layer were controlled by adjusting the respective arc discharge times so as to have the thicknesses shown in Table 9.
- the substrate was heated until its temperature reached 350 ° C., and N 2 gas was introduced so that the pressure in the reaction vessel became 3.0 Pa. Thereafter, a bias voltage of ⁇ 50 V was applied to the base material, and the metal evaporation source shown in Table 9 was evaporated by arc discharge with an arc current of 120 A to form an upper layer.
- the heater was turned off, and the sample temperature was 100 ° C. or lower, and then the sample was taken out from the reaction vessel.
- the “average thickness per layer” of the A layer is T 1
- the “average thickness per layer” of the B layer is T 2 .
- the average thickness of each layer of the obtained sample was measured by TEM observation of three cross sections in the vicinity of a position of 50 ⁇ m from the edge of the edge of the surface facing the metal evaporation source of the coated cutting tool toward the center of the surface. Then, the thickness of each layer was measured, and the average value (arithmetic average value) was calculated. Further, from the obtained average thickness T 1 per layer of the first composite nitride layer and the average thickness T 2 per layer of the second composite nitride layer, per layer of the second composite nitride layer the average ratio of the thickness T 1 of the per layer of for the average the second thickness T 2 first composite nitride layer [T 1 / T 2] was calculated. The results are also shown in Table 8 and Table 9. For convenience, the "average thickness per layer" of the A layer in the comparative product and T 1, the B layer "average thickness per layer” was T 2.
- composition of each layer of the obtained sample was measured using an EDS attached to the TEM in a cross section in the vicinity of a position from the edge of the edge of the surface of the coated cutting tool facing the metal evaporation source to 50 ⁇ m toward the center. did.
- the results are also shown in Table 8 and Table 9.
- the composition ratio of the metal element of each layer of Table 8 and Table 9 shows the atomic ratio of each metal element to the whole metal element in the metal compound constituting each layer.
- the lattice constant and crystal system of the obtained sample were derived using a commercially available TEM.
- a FIB processing machine manufactured by FEI Co., Ltd.
- a thin film sample having a cross-section of the coating layer as an observation surface was prepared.
- a lattice image of each composite nitride layer was taken at a magnification of 500,000 times using a TEM apparatus TecnaiOsiris (product name) manufactured by FEI Co., Ltd.
- An FFT image was obtained from the photographed image using analysis software manufactured by Gatan.
- the lattice spacing was derived from the intensity (center spot) obtained at the center of the FFT image and the distance between the diffraction spots, and the crystal system and lattice constant were determined. The results are shown in Table 12 and Table 13. For the comparative product, the crystal system and lattice constant of the A layer and the B layer were measured.
- Example 2 Using the obtained sample, the same cutting test as in Example 1 was performed and evaluated. In addition, about 9.5 m or more as "A”, 8.5 m or more and less than 9.5 m was evaluated as “B”, and less than 8.5 m was evaluated as "C" about the working length until the tool life of the wear resistance test. . Moreover, about the processing length until the tool life of a fracture resistance test, 6.0 m or more was evaluated as "A", 5.0 m or more and less than 6.0 m was evaluated as B, and less than 5.0 m was evaluated as "C”. In this evaluation, “A” is the best, followed by “B”, and “C” is the worst. The more “A” or “B” is evaluated, the better the cutting performance is. Means that. The obtained evaluation results are shown in Table 14.
- the invention product is excellent in wear resistance and fracture resistance and has a long tool life even if it has an upper layer and a lower layer.
- the coated cutting tool of the present invention is excellent in wear resistance and chipping resistance, the tool life can be extended as compared with the prior art, so that industrial applicability is high in that respect.
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Abstract
Description
[1]基材と、前記基材の表面に形成された被覆層と、を含む被覆切削工具であって、前記被覆層は、下記式(1):
(TixAl1-x)N (1)
(式中、xはTi元素とAl元素との合計に対するTi元素の原子比を示し、0.10≦x≦0.35を満足する。)
で表される組成を有する化合物を含有する第1複合窒化物層と、下記式(2):
(TiyAlzM1-y-z)N (2)
(式中、MはZr、Hf、V、Nb、Ta、Cr、Mo、W、SiおよびYからなる群より選ばれる少なくとも1種の元素を示し、yはTi元素とAl元素とMで表される元素との合計に対するTi元素の原子比を示し、zはTi元素とAl元素とMで表される元素との合計に対するAl元素の原子比を示し、0.30≦y≦0.90、0.10≦z≦0.70、y+z≦1を満足する。)
で表される組成を有する化合物を含有する第2複合窒化物層とが交互に積層された交互積層構造を有し、前記第1複合窒化物層は、格子定数が0.400nm以上0.430nm以下である相と、格子定数が0.755nm以上0.810nm以下である相とを含む、被覆切削工具。
[2]前記第1複合窒化物層は、結晶系が立方晶であり、格子定数が0.410nm以上0.420nm以下である相と、結晶系が立方晶であり、格子定数が0.770nm以上0.795nm以下である相とを含む、[1]に記載の被覆切削工具。
[3]前記第2複合窒化物層は、結晶系が立方晶であり、格子定数が0.400nm以上0.430nm以下である相からなる、[1]または[2]に記載の被覆切削工具。
[4]前記第1複合窒化物層の1層当たりの平均厚さT1は、4nm以上200nm以下である、[1]~[3]のいずれか1つに記載の被覆切削工具。
[5]前記第2複合窒化物層の1層当たりの平均厚さT2は、4nm以上200nm以下である、[1]~[4]のいずれか1つに記載の被覆切削工具。
[6]前記第2複合窒化物層の1層当たりの平均厚さT2に対する前記第1複合窒化物層の1層当たりの平均厚さT1の比[T1/T2]は、0.10以上1.30以下である、請求項1~5のいずれか1つに記載の被覆切削工具。
[7]前記第2複合窒化物層の1層当たりの厚さ平均T2に対する前記第1複合窒化物層の1層当たりの平均厚さT1の比[T1/T2]は、0.10以上0.90以下である、[1]~[6]のいずれか1つに記載の被覆切削工具。
[8]前記交互積層構造の平均厚さは、1.5μm以上12.0μm以下である、[1]~[7]のいずれか1つに記載の被覆切削工具。
[9]前記被覆層は、前記基材と前記交互積層構造との間に、下部層を有し、前記下部層は、Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Al、SiおよびYからなる群より選ばれる少なくとも1種の元素と、C、N、OおよびBからなる群より選ばれる少なくとも1種の元素とからなる化合物の単層または積層であり、前記下部層の平均厚さは、0.1μm以上3.5μm以下である、[1]~[8]のいずれか1つに記載の被覆切削工具。
[10]前記被覆層は、前記交互積層構造の表面に、上部層を有し、前記上部層は、Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Al、SiおよびYからなる群より選ばれる少なくとも1種の元素と、C、N、OおよびBからなる群より選ばれる少なくとも1種の元素とからなる化合物の単層または積層であり、前記上部層の平均厚さは、0.1μm以上3.5μm以下である、[1]~[9]のいずれか1つに記載の被覆切削工具。
[11]前記被覆層全体の平均厚さは、1.5μm以上15.0μm以下である、[1]~[10]のいずれか1つに記載の被覆切削工具。
[12]前記基材は、超硬合金、サーメット、セラミックスまたは立方晶窒化硼素焼結体のいずれかである、[1]~[11]のいずれか1つに記載の被覆切削工具。
(TixAl1-x)N (1)
で表される組成を有する化合物を含有するため、耐酸化性に優れる。本実施形態の第1複合窒化物層において上記式(1)で表される組成を有する化合物は、立方晶、または立方晶と六方晶とを含むと好ましい。なお、上記式(1)において、xはTi元素とAl元素との合計に対するTi元素の原子比を表し、0.10≦x≦0.35を満足する。Ti元素の原子比xは、0.10以上であると、Alの含有量が少なくなることにより、六方晶の存在比率をより低く抑えることができ、その結果、耐摩耗性の低下を抑制できる。一方、Ti元素の原子比xは、0.35以下であると、Alの含有量が多くなることにより、耐酸化性の低下を抑制できる。その中でも、xが0.15以上0.35以下であると、耐酸化性と耐摩耗性とのバランスにより優れるため好ましく、同様の観点から、xが0.20以上0.35以下であるとより好ましい。
(TiyAlzM1-y-z)N (2)
で表される組成を有する化合物を含有するため、耐摩耗性に優れる。本実施形態の第2複合窒化物層において上記式(2)で表される組成を有する化合物は、立方晶、または立方晶と六方晶とを含むと好ましい。なお、上記式(2)において、MはZr、Hf、V、Nb、Ta、Cr、Mo、W、SiおよびYからなる群より選ばれる少なくとも1種の元素を示し、yはTi元素とAl元素とMで表される元素との合計に対するTi元素の原子比を示し、zはTi元素とAl元素とMで表される元素との合計に対するAl元素の原子比を示し、0.30≦y≦0.90、0.10≦z≦0.70、y+z≦1を満足する。Ti元素の原子比yは、0.30以上であると、Tiの含有量が多くなることにより、耐摩耗性の低下を抑制でき、0.90以下であると、Alの含有量が多くなることにより、耐酸化性の低下を抑制できる。Al元素の原子比zは、0.10以上であると、Alの含有量が多くなることにより、耐酸化性の低下を抑制でき、0.70以下であると、Tiの含有量が多くなることにより、耐摩耗性の低下を抑制できる。また、Mで表される元素を含有することにより、耐摩耗性および耐欠損性が向上する。その中でも、Ti元素の原子比yが0.30以上0.80以下である、及び/又はAl元素の原子比zが0.20以上0.70以下であると、耐摩耗性と耐酸化性とのバランスにより優れるため、好ましい。同様の観点から、Ti元素の原子比yが0.50以上0.70以下である、及び/又はAl元素の原子比zが0.30以上0.50以下であると、より好ましい。また、y+zが0.05以上0.30以下であると、耐摩耗性と耐酸化性とのバランスにより優れるため、好ましく、同様の観点から、y+zが0.10以上0.20以下であるとより好ましい。さらに、Mで表される元素は、本発明による作用効果をより有効かつ確実に奏する観点から、Zr、V、Nb、Cr、Mo、WおよびSiからなる群より選ばれる少なくとも1種の元素であると好ましい。
ブラッグの式:2d=λ/sinθ
立方晶の場合:a2=d2×(h2+k2+l2)
六方晶の場合:a2=d2×{4/3×(h2+k2+l2)+l2×(c/a)2}
ここで、dは格子面間隔、λは測定に用いた管球の波長、θは入射角、aは格子定数であり、h、k、lは面指数を示す。
基材として、ISO規格SEEN1203AGTN形状のインサートに加工し、90.2WC-9.8Co(以上質量%)の組成を有する超硬合金を用意した。アークイオンプレーティング装置の反応容器内に、表1および表2に示す各層の組成になるよう金属蒸発源を配置した。用意した基材を、反応容器内の回転テーブルの固定金具に固定した。
被削材:SCM440、
被削材形状:120mm×230mm×60mmの直方体、
切削速度:260m/min、
送り:0.15mm/tooth、
切り込み:2.0mm、
クーラント:無し、
切削幅:50mm、
評価項目:最大逃げ面摩耗幅が0.2mmに至ったときを工具寿命とし、工具寿命に至るまでの加工長を測定した。
被削材:SCM440、
被削材形状:120mm×230mm×60mmの直方体(但し、正面フライス加工を行う直方体の120mm×230mmの面に直径φ30mmの穴が4箇所明けられている。)、
切削速度:240m/min、
送り:0.40mm/tooth、
切り込み:2.2mm、
クーラント:無し、
切削幅:105mm、
評価項目:試料が欠損(試料の切れ刃部に欠けが生じる)したときを工具寿命とし、工具寿命に至るまでの加工長を測定した。
また、発明品の耐欠損性試験の評価はいずれも「A」または「B」の評価であり、比較品の評価は、すべて「C」であった。
基材として、ISO規格SEEN1203AGTN形状のインサートに加工し、90.2WC-9.8Co(以上質量%)の組成を有する超硬合金を用意した。アークイオンプレーティング装置の反応容器内に、表8および表9に示す各層の組成になるよう金属蒸発源を配置した。用意した基材を、反応容器内の回転テーブルの固定金具に固定した。
また、発明品の耐欠損性試験の評価はいずれも「A」または「B」の評価であり、比較品の評価は、すべて「C」であった。
Claims (12)
- 基材と、前記基材の表面に形成された被覆層と、を含む被覆切削工具であって、
前記被覆層は、下記式(1):
(TixAl1-x)N (1)
(式中、xはTi元素とAl元素との合計に対するTi元素の原子比を示し、0.10≦x≦0.35を満足する。)
で表される組成を有する化合物を含有する第1複合窒化物層と、下記式(2):
(TiyAlzM1-y-z)N (2)
(式中、MはZr、Hf、V、Nb、Ta、Cr、Mo、W、SiおよびYからなる群より選ばれる少なくとも1種の元素を示し、yはTi元素とAl元素とMで表される元素との合計に対するTi元素の原子比を示し、zはTi元素とAl元素とMで表される元素との合計に対するAl元素の原子比を示し、0.30≦y≦0.90、0.10≦z≦0.70、y+z≦1を満足する。)
で表される組成を有する化合物を含有する第2複合窒化物層とが交互に積層された交互積層構造を有し、
前記第1複合窒化物層は、格子定数が0.400nm以上0.430nm以下である相と、格子定数が0.755nm以上0.810nm以下である相とを含む、被覆切削工具。 - 前記第1複合窒化物層は、結晶系が立方晶であり、格子定数が0.410nm以上0.420nm以下である相と、結晶系が立方晶であり、格子定数が0.770nm以上0.795nm以下である相とを含む、請求項1に記載の被覆切削工具。
- 前記第2複合窒化物層は、結晶系が立方晶であり、格子定数が0.400nm以上0.430nm以下である相からなる、請求項1または2に記載の被覆切削工具。
- 前記第1複合窒化物層の1層当たりの平均厚さT1は、4nm以上200nm以下である、請求項1~3のいずれか1項に記載の被覆切削工具。
- 前記第2複合窒化物層の1層当たりの平均厚さT2は、4nm以上200nm以下である、請求項1~4のいずれか1項に記載の被覆切削工具。
- 前記第2複合窒化物層の1層当たりの平均厚さT2に対する前記第1複合窒化物層の1層当たりの平均厚さT1の比[T1/T2]は、0.10以上1.30以下である、請求項1~5のいずれか1項に記載の被覆切削工具。
- 前記第2複合窒化物層の1層当たりの厚さ平均T2に対する前記第1複合窒化物層の1層当たりの平均厚さT1の比[T1/T2]は、0.10以上0.90以下である、請求項1~6のいずれか1項に記載の被覆切削工具。
- 前記交互積層構造の平均厚さは、1.5μm以上12.0μm以下である、請求項1~7のいずれか1項に記載の被覆切削工具。
- 前記被覆層は、前記基材と前記交互積層構造との間に、下部層を有し、
前記下部層は、Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Al、SiおよびYからなる群より選ばれる少なくとも1種の元素と、C、N、OおよびBからなる群より選ばれる少なくとも1種の元素とからなる化合物の単層または積層であり、
前記下部層の平均厚さは、0.1μm以上3.5μm以下である、請求項1~8のいずれか1項に記載の被覆切削工具。 - 前記被覆層は、前記交互積層構造の表面に、上部層を有し、
前記上部層は、Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Al、SiおよびYからなる群より選ばれる少なくとも1種の元素と、C、N、OおよびBからなる群より選ばれる少なくとも1種の元素とからなる化合物の単層または積層であり、
前記上部層の平均厚さは、0.1μm以上3.5μm以下である、請求項1~9のいずれか1項に記載の被覆切削工具。 - 前記被覆層全体の平均厚さは、1.5μm以上15.0μm以下である、請求項1~10のいずれか1項に記載の被覆切削工具。
- 前記基材は、超硬合金、サーメット、セラミックスまたは立方晶窒化硼素焼結体のいずれかである、請求項1~11のいずれか1項に記載の被覆切削工具。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018202533A (ja) * | 2017-06-01 | 2018-12-27 | 住友電気工業株式会社 | 表面被覆切削工具 |
JP6583763B1 (ja) * | 2018-06-15 | 2019-10-02 | 住友電工ハードメタル株式会社 | 表面被覆切削工具、及びその製造方法 |
JP7124267B1 (ja) * | 2021-06-30 | 2022-08-24 | 住友電工ハードメタル株式会社 | 切削工具 |
JP2023086393A (ja) * | 2021-12-10 | 2023-06-22 | 株式会社タンガロイ | 被覆切削工具 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11298748B2 (en) * | 2018-03-07 | 2022-04-12 | Sumitomo Electric Hardmetal Corp. | Surface coated cutting tool and method for manufacturing the same |
CN113195139A (zh) * | 2018-10-11 | 2021-07-30 | 株式会社不二越 | 硬质皮膜包覆钻头 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008545063A (ja) * | 2005-07-04 | 2008-12-11 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | 硬質膜被覆された物体およびその製造方法 |
JP2011189419A (ja) * | 2010-03-12 | 2011-09-29 | Hitachi Metals Ltd | 耐摩耗性に優れた被覆工具 |
JP2016026893A (ja) * | 2014-06-27 | 2016-02-18 | 三菱マテリアル株式会社 | 耐異常損傷性と耐摩耗性にすぐれた表面被覆切削工具 |
WO2016113956A1 (ja) * | 2015-01-14 | 2016-07-21 | 住友電工ハードメタル株式会社 | 硬質被膜、切削工具および硬質被膜の製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2979921B2 (ja) | 1993-09-30 | 1999-11-22 | 住友電気工業株式会社 | 超薄膜積層体 |
US5882777A (en) * | 1994-08-01 | 1999-03-16 | Sumitomo Electric Industries, Ltd. | Super hard composite material for tools |
US8409702B2 (en) * | 2011-02-07 | 2013-04-02 | Kennametal Inc. | Cubic aluminum titanium nitride coating and method of making same |
US9476114B2 (en) * | 2012-08-03 | 2016-10-25 | Walter Ag | TiAlN-coated tool |
EP3437771B1 (en) * | 2016-03-31 | 2021-09-15 | Tungaloy Corporation | Coated cutting tool |
-
2017
- 2017-04-05 US US16/091,004 patent/US10737332B2/en active Active
- 2017-04-05 EP EP17779181.1A patent/EP3441168A4/en active Pending
- 2017-04-05 JP JP2018510641A patent/JP6709517B2/ja active Active
- 2017-04-05 WO PCT/JP2017/014268 patent/WO2017175803A1/ja active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008545063A (ja) * | 2005-07-04 | 2008-12-11 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | 硬質膜被覆された物体およびその製造方法 |
JP2011189419A (ja) * | 2010-03-12 | 2011-09-29 | Hitachi Metals Ltd | 耐摩耗性に優れた被覆工具 |
JP2016026893A (ja) * | 2014-06-27 | 2016-02-18 | 三菱マテリアル株式会社 | 耐異常損傷性と耐摩耗性にすぐれた表面被覆切削工具 |
WO2016113956A1 (ja) * | 2015-01-14 | 2016-07-21 | 住友電工ハードメタル株式会社 | 硬質被膜、切削工具および硬質被膜の製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP3441168A4 * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018202533A (ja) * | 2017-06-01 | 2018-12-27 | 住友電気工業株式会社 | 表面被覆切削工具 |
JP6583763B1 (ja) * | 2018-06-15 | 2019-10-02 | 住友電工ハードメタル株式会社 | 表面被覆切削工具、及びその製造方法 |
JP7124267B1 (ja) * | 2021-06-30 | 2022-08-24 | 住友電工ハードメタル株式会社 | 切削工具 |
WO2023276067A1 (ja) * | 2021-06-30 | 2023-01-05 | 住友電工ハードメタル株式会社 | 切削工具 |
US11802333B2 (en) | 2021-06-30 | 2023-10-31 | Sumitomo Electric Hardmetal Corp. | Cutting tool |
EP4364875A4 (en) * | 2021-06-30 | 2024-05-08 | Sumitomo Electric Hardmetal Corp. | CUTTING TOOL |
JP2023086393A (ja) * | 2021-12-10 | 2023-06-22 | 株式会社タンガロイ | 被覆切削工具 |
JP7319600B2 (ja) | 2021-12-10 | 2023-08-02 | 株式会社タンガロイ | 被覆切削工具 |
JP7319600B6 (ja) | 2021-12-10 | 2023-08-18 | 株式会社タンガロイ | 被覆切削工具 |
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