WO2017163986A1 - 放射装置及び放射装置を用いた処理装置 - Google Patents
放射装置及び放射装置を用いた処理装置 Download PDFInfo
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- WO2017163986A1 WO2017163986A1 PCT/JP2017/010019 JP2017010019W WO2017163986A1 WO 2017163986 A1 WO2017163986 A1 WO 2017163986A1 JP 2017010019 W JP2017010019 W JP 2017010019W WO 2017163986 A1 WO2017163986 A1 WO 2017163986A1
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- Prior art keywords
- radiation device
- support substrate
- back surface
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- metal layer
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- 230000005855 radiation Effects 0.000 title claims abstract description 112
- 229910052751 metal Inorganic materials 0.000 claims abstract description 67
- 239000002184 metal Substances 0.000 claims abstract description 67
- 239000000758 substrate Substances 0.000 claims description 74
- 238000005192 partition Methods 0.000 claims description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 230000020169 heat generation Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 125
- 239000010931 gold Substances 0.000 description 14
- 239000000919 ceramic Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/18—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
- F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
- F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
- F26B3/30—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun from infrared-emitting elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
- H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/30—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material on or between metallic plates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
- H05B3/66—Supports or mountings for heaters on or in the wall or roof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/013—Heaters using resistive films or coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/032—Heaters specially adapted for heating by radiation heating
Definitions
- the technology disclosed herein relates to a radiation device that emits radiation energy of a specific wavelength by using a meta-material structural layer.
- JP-A-2015-198063 discloses an infrared heater (an example of a radiation device) using a metamaterial structure layer.
- the infrared heater includes a heating element, and a micro-cavity forming body (an example of a metamaterial structure layer) disposed on the surface side of the heating element.
- the thermal energy output from the heating element is emitted as radiant energy of a specific wavelength through the microcavity formation.
- the heat energy output from the heat source can be radiated from the surface on the metamaterial structure layer side as radiation energy of a specific wavelength.
- the thermal energy flowing out from the surface other than the surface on the metamaterial structural layer side is large, and there is a problem that a large thermal energy loss occurs.
- the present specification provides a radiation device that can suppress thermal energy loss as compared to conventional radiation devices.
- the radiation device disclosed herein is a radiation device that emits radiation energy of a specific wavelength range, and is disposed on the heat source and on the surface side of the heat source, and the heat energy input from the heat source is specified.
- a heat source is disposed between the metamaterial structure layer and the back surface metal layer.
- the emissivity of the back surface metal layer is made smaller than the emissivity of the metamaterial structure layer. For this reason, the heat energy loss from the back surface metal layer can be reduced, and the heat energy loss can be suppressed as compared with the conventional radiation device.
- the above-mentioned “average emissivity” means the average emissivity in the entire wavelength region (0.7 ⁇ m to 1 mm) of infrared light. Therefore, even if the emissivity of the back surface metal layer is larger than that of the metamaterial structure layer in some wavelength regions, the average emissivity of the back surface metal layer is the average emissivity of the metamaterial structure layer in all infrared wavelength regions If smaller, it corresponds to the above-mentioned “average emissivity of back surface metal layer is made smaller than average emissivity of metamaterial structure layer”.
- said "average emissivity” means the “average emissivity” measured when setting a back surface metal layer and a metamaterial structure layer as the same preset temperature. For this reason, when the temperature of the back surface metal layer and the temperature of the metamaterial structure layer differ when operating the radiation device, "average emissivity” is measured with the back surface metal layer as the set temperature, and the metamaterial structure layer is set. The “average emissivity” is measured as the temperature, and the magnitudes are compared by these measured "average emissivity”.
- the above-mentioned "set temperature” can be, for example, the temperature of the metamaterial structure layer when the radiation device is operated at the rated output, or the temperature of the back surface metal layer.
- the present specification discloses a novel processing apparatus that processes an object using the above-described radiation apparatus.
- the processing apparatus disclosed in the present specification includes the above-mentioned radiation device disposed opposite to the object to be treated, a housing portion for housing the object to be treated and the radiation device, and one end thereof attached to the inner wall surface of the housing portion. And the other end is attached to a part of the radiation device, and the holding portion holds the radiation device in the housing.
- the metamaterial structural layer of the radiation device faces the object to be treated.
- the back metal layer of the radiation device faces the inner wall surface of the housing. And, a gap is provided between the back surface metal layer and the inner wall surface of the housing portion.
- the above processing apparatus not only the heat energy loss due to radiation from the back surface metal layer can be suppressed, but also the heat energy loss due to heat conduction from the back surface metal layer can be suppressed. For this reason, processing of the to-be-processed object using a radiation apparatus can be performed efficiently.
- the longitudinal cross-sectional view of the radiation apparatus of a present Example The principal part enlarged view which shows the structure of a MIM structure layer typically.
- the figure for demonstrating an example of the heat balance of the radiation apparatus which concerns on an Example The figure for demonstrating an example of the heat balance of the radiation apparatus which concerns on a comparative example.
- Sectional drawing which shows typically the structure of the processing apparatus using the radiation apparatus of a present Example Sectional drawing which shows typically the structure of the other processing apparatus using the radiation apparatus of a present Example.
- the metamaterial structural layer may be disposed on the surface of the first support substrate.
- the back surface metal layer may be disposed on the back surface of the second support substrate.
- the heat source may be disposed between the first support substrate and the second support substrate.
- the thermal conductivity of the second support substrate may be smaller than the thermal conductivity of the first support substrate. According to such a configuration, the heat energy flowing from the heat source to the second support substrate can be suppressed low, and the heat energy loss from the back surface metal layer can be suitably suppressed.
- the first support substrate may be an AlN substrate.
- the second support substrate may be an Al 2 O 3 substrate.
- the back surface metal layer may be an Au layer. According to such a configuration, it is possible to preferably suppress the heat loss from the Au layer which is the back surface metal layer.
- the thickness of the first support substrate may be smaller than the thickness of the second support substrate. According to such a configuration, the heat from the heat source easily flows to the first support substrate which is the substrate on the metamaterial structure layer side, and the heat energy from the heat source can be efficiently used.
- the space in the storage unit is separated into a first space in which the object to be treated is stored and a second space in which the radiation device is stored.
- a partition wall may further be provided.
- the partition wall may transmit radiant energy of a specific wavelength. According to such a configuration, while it is possible to preferably suppress the temperature rise of the object to be treated, it is possible to perform the process of irradiating the object to be treated with radiation energy of a specific wavelength.
- the drying processing of the object may be performed in the storage unit.
- the radiation device 10 of the present embodiment is a radiation device (emitter) that emits radiation energy in a specific wavelength range within the entire wavelength range (0.7 ⁇ m to 1 mm) of infrared light.
- the radiation device 10 has a laminated structure in which a plurality of layers are laminated, and the heat generating layer 16 (an example of a heat generating source) and a first support disposed on the surface side of the heat generating layer 16
- the heat generating layer 16 is a layer that converts the input power energy into heat energy.
- Various known heat generating layers can be used as the heat generating layer 16.
- a heat generating line (conductive material) is formed by pattern printing on the surface of the second support substrate 18, or a carbon sheet heater Can be used.
- the heat generating layer 16 is connected to an external power supply (not shown), and power energy is supplied from the external power supply. By controlling the amount of power energy supplied from the external power source, the amount of heat energy generated in the heat generating layer 16 is controlled. Since the heat generating layer 16 is disposed between the first support substrate 14 and the second support substrate 18, the heat energy generated in the heat generation layer 16 flows to the first support substrate 14 side and the second support substrate 18 side. It becomes.
- the first support substrate 14 is in contact with the surface of the heat generating layer 16.
- the first support substrate 14 can be formed of a material having a high thermal conductivity, and for example, an aluminum nitride (AlN) substrate, a silicon carbide (SiC) substrate, or the like can be used.
- AlN aluminum nitride
- SiC silicon carbide
- the first support substrate 14 and the heat generating layer 16 may be bonded using an adhesive or may be bonded (so-called pressure contact) by applying pressure between them using a casing or the like. It is also good.
- a MIM (Metal-Insulator-Metal) structural layer 12 is a type of metamaterial structural layer and is formed on the surface of the first support substrate 14.
- the MIM structural layer 12 radiates the thermal energy input from the heat generating layer 16 from the surface as radiant energy of a specific wavelength range. That is, the MIM structural layer 12 is configured to emit radiation energy of the peak wavelength and a narrow wavelength region (specific wavelength region) around the peak wavelength, and not to emit radiation energy other than the specific wavelength region. That is, the MIM structural layer 12 has high emissivity (for example, 0.85 to 0.9) at the peak wavelength, and has extremely low emissivity (0.1 or less) in wavelength regions other than the specific wavelength region. doing.
- the average emissivity of the MIM structural layer 12 in the entire infrared wavelength range is 0.15 to 0.3.
- a specific wavelength range for example, it may be adjusted to have a peak wavelength (for example, 5 to 7 ⁇ m) in a near infrared wavelength range (for example, 2 to 10 ⁇ m) and a half width of about 1 ⁇ m. it can.
- the MIM structural layer 12 includes a first metal layer 26 formed on the surface of the first support substrate 14, an insulating layer 24 formed on the surface of the first metal layer 26, and an insulating layer 24.
- a plurality of convex metal portions 22 formed on the surface are provided.
- the first metal layer 26 can be formed of a metal such as gold (Au), aluminum (Al), molybdenum (Mo) or the like, and is formed of gold (Au) in this embodiment.
- the first metal layer 26 is formed on the entire surface of the first support substrate 14.
- the insulating layer 24 can be formed of an insulating material such as ceramics, and is formed of aluminum oxide (Al 2 O 3 ) in this embodiment.
- the insulating layer 24 is formed on the entire surface of the first metal layer 26.
- the convex metal portion 22 is formed in a cylindrical shape by a metal such as gold (Au), aluminum (Al), molybdenum (Mo) or the like, and is formed by gold (Au) in this embodiment.
- the convex metal portion 22 is formed on part of the surface of the insulating layer 24.
- a plurality of convex metal portions 22 are disposed on the surface of the insulating layer 24 at intervals in the x and y directions.
- the peak wavelength of the radiation energy emitted from the MIM structural layer 12 can be adjusted by adjusting the dimensions (diameter and height of the cylindrical shape) of the convex metal portion 22.
- the MIM structural layer 12 described above can be manufactured using known nano-processing techniques.
- the MIM structural layer 12 is used in the radiation device 10 of the present embodiment, a metamaterial structural layer other than the MIM structural layer may be used.
- the microcavity structure disclosed in Japanese Patent Laid-Open No. 2015-198063 may be formed on the surface of the first support substrate 14.
- the second support substrate 18 is in contact with the back surface of the heat generating layer 16.
- the second support substrate 18 can be formed of a material having a small thermal conductivity as compared to the thermal conductivity of the first support substrate 14.
- an aluminum oxide (Al 2 O 3 ) substrate can be used.
- the second support substrate 18 and the heat generating layer 16 may be bonded using an adhesive or may be bonded (so-called pressure contact) by applying pressure between them using a casing or the like. It is also good.
- the thickness of the second support substrate 18 is larger than the thickness of the first support substrate 14.
- the thermal resistance of the second support substrate 18 is made larger than the thermal resistance of the first support substrate 14 by adjusting the thermal conductivity and the thickness. Therefore, the heat energy generated in the heat generating layer 16 flows more to the first support substrate 14 side than to the second support substrate 18 side.
- the back surface metal layer 20 is disposed on the back surface of the second support substrate 18.
- the back surface metal layer 20 is formed of a metal material with low emissivity (eg, gold (Au), aluminum (Al), etc.).
- the back surface metal layer 20 is formed of gold (Au).
- the average emissivity in the entire wavelength region of infrared rays of the back surface metal layer 20 is about 0.05. Therefore, the average emissivity of the back surface metal layer 20 is smaller than the average emissivity of the MIM structure layer 12.
- the back surface metal layer 20 can be formed on the entire back surface of the second support substrate 18 using sputtering or the like.
- the heat generating layer 16 converts the power energy into heat energy, and the heat energy is conducted from the heat generating layer 16 to the first support substrate 14 or the second support substrate 18.
- the first support substrate 14 has a high thermal conductivity and a small thickness as compared with the second support substrate 18. Therefore, the heat energy conducted from the heat generating layer 16 to the first support substrate 14 is larger than the heat energy conducted from the heat generating layer 16 to the second support substrate 18. Therefore, the temperature of the first support substrate 14 is higher than the temperature of the second support substrate 18.
- Thermal energy conducted to the first support substrate 14 is conducted (input) to the MIM structural layer 12.
- the MIM structural layer 12 radiates thermal energy input from the first support substrate 14 from the surface as radiant energy of a specific wavelength range.
- the heat energy conducted to the second support substrate 18 is conducted to the back surface metal layer 20 and radiated from the back surface of the back surface metal layer 20.
- the emissivity of the back surface metal layer 20 is lowered, the amount of radiant energy radiated from the back surface metal layer 20 is suppressed.
- the temperature of the second support substrate 18 becomes lower than the temperature of the first support substrate 14, and as a result, the temperature of the back surface metal layer 20 also becomes lower. Also by this, the amount of thermal energy radiated from the back surface metal layer 20 can be reduced.
- the heat balance calculation in the case of heating the workpiece W (an example of the object to be processed) using the above-described radiation device 10 will be described with reference to FIG.
- the radiation device 10 is disposed such that the MIM structural layer 12 faces downward, and the MIM structural layer 12 faces the workpiece W.
- furnace walls 30a and 30b made of SUS are disposed. Further, air in the furnace is assumed to flow in the direction of the arrow in the space above and below the radiation device 10.
- the heat balance calculation was performed under the condition that power energy was supplied to the heat generating layer 16 such that the surface temperature of the MIM structural layer 12 was 280 ° C.
- the radiation device of the comparative example includes the first support substrate 14 and the MIM structural layer 12 as in the radiation device 10, but a ceramic heater 32 is used instead of the heat generating layer 16, and a ceramic heater The difference is that the second support substrate 18 and the back surface metal layer 20 are not disposed on the back side 32 (the upper side in FIG. 4) of 32.
- the radiation device of the comparative example is also disposed to face the workpiece W, and furnace walls 34 d and 34 e formed of SUS are disposed on the left and right thereof.
- the heat insulators 34 a, 34 b, 34 c are disposed on the back surface side (upper side in FIG. 4) of the radiation device of the comparative example, and the ceramic heater 32 is thermally insulated. Further, in order to prevent heat conduction from the ceramic heater 32, a space is formed between the ceramic heater 32 and the heat insulating material 34a.
- the conditions of heat balance calculation were performed on the same conditions as the case of FIG. That is, the process was performed under the condition that power energy was supplied to the ceramic heater 32 so that the surface temperature of the MIM structural layer 12 was 280 ° C.
- the thermal energy input to the ceramic heater 32 about 10% is radiated to the workpiece W as radiant energy, and about 10% is utilized for heating the workpiece W by convective heat transfer, and the remaining about The heat energy loss was 80%.
- the breakdown of the heat energy loss was mainly the heat loss due to the heat conduction to the furnace walls 30a and 30b and the heat loss due to the heat conduction to the heat insulating materials 34b and 34c.
- the processing apparatus shown in FIG. 5 includes a furnace body 40 (an example of a housing portion) and a plurality of radiation devices 10 housed in a space 46 in the furnace body 40.
- the plurality of radiation devices 10 are arranged side by side at intervals in the transport direction of the work W.
- the radiation device 10 is arranged such that the MIM structural layer faces downward. Accordingly, the back surface metal layer 20 of the radiation device 10 faces the inner wall surface 40 a of the furnace body 40.
- the inner wall surface 40a can be formed of a material with high reflectance such as SUS.
- Each of the plurality of radiation devices 10 is held on the inner wall surface 40 a of the furnace body 40 by holding members 44 a and 44 b (an example of a holding portion).
- casings 42 a and 42 b are attached to the left and right ends of the radiation device 10.
- the casings 42 a, 42 b are in contact with the radiation device 10 only at the end of the radiation device 10.
- the upper end of the holding member 44a is fixed to the inner wall surface 40a, and the lower end of the holding member 44a is fixed to the casing 42a.
- the upper end of the holding member 44b is fixed to the inner wall surface 40a, and the lower end of the holding member 44b is fixed to the casing 42b.
- the radiation device 10 is held by the inner wall surface 40 a of the furnace body 40.
- the back surface metal layer 20 of the radiation device 10 and the inner wall surface 40a are not in direct contact with each other, and a space 49 is formed between them.
- the workpiece W is transported in the furnace body 40 along the arrow 48. Radiant energy of a specific wavelength range is radiated from each of the plurality of radiation devices 10 to the workpiece W transported in the furnace body 40. Further, the work W is heated by heat conduction by convection of air flowing in the furnace.
- the end of the radiation device 10 is connected to the furnace body 40 via the casings 42a and 42b and the holding members 44a and 44b. Therefore, it is possible to effectively suppress the heat loss due to the heat conduction from the radiation device 10 to the furnace body 40.
- the back surface metal layer 20 of the radiation device 10 and the inner wall surface 40 a of the furnace body 40 face each other with the space 49 interposed therebetween, heat loss due to radiation occurs from the back surface metal layer 20.
- the emissivity of the back surface metal layer 20 is lowered, it is possible to suppress the heat loss due to the radiation from the back surface metal layer 20 to the inner wall surface 40a low.
- a work W containing a flammable solvent eg, N-methyl-pyrrolidone, methyl isobutyl ketone, butyl acetate, toluene, etc.
- a substrate having a coating layer the solvent is contained in the coating layer
- the work W can be dried by evaporating only the solvent while keeping the temperature of the work W low. Since the solvent can be efficiently dried, the drying process can be performed in a short time with low power consumption.
- the radiation device 10 of this embodiment can also be used in the processing device shown in FIG.
- the space in the furnace 50 is divided by the muffle plate 58 (an example of a partition plate), and a space 56b for accommodating the radiation device 10 and the work W It differs greatly in that it is divided into the space 56a to be transported.
- the furnace body 50 includes a main body portion 54 having a space 56 a which the work W transports, and a support beam 52 installed above the main body portion 54. The opening at the upper end of the main body 54 is closed by a muffle plate 58.
- the muffle plate 58 is formed of a material that transmits the radiation energy of the specific wavelength range emitted from the radiation device 10.
- the support beam 52 carries a plurality of radiation devices 10.
- the holding structure for holding the radiation device 10 to the support beam 52 is similar to the holding structure in the processing device shown in FIG.
- the radiation energy of the specific wavelength region emitted from each of the radiation devices 10 passes through the muffle plate 58 and is irradiated to the work W.
- the work W is heated by this.
- the muffle plate 58 is provided between the radiation device 10 and the work W, the transfer of thermal energy other than the radiation energy radiated from the radiation device 10 to the work W can be further suppressed. As a result, the temperature rise of the workpiece W can be further suppressed as compared with the processing apparatus shown in FIG.
- the radiation device 10 of the present embodiment since the heat loss from the back surface metal layer 20 can be effectively suppressed, the radiation of more specific wavelength regions with less power energy can be performed. It can output energy. For this reason, energy saving and heat treatment (for example, drying treatment of a solvent) of the work W can be performed in a short time.
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Abstract
Description
Claims (7)
- 特定の波長領域の放射エネルギーを放射する放射装置であり、
発熱源と、
前記発熱源の表面側に配置され、前記発熱源から入力される熱エネルギーを前記特定の波長領域の放射エネルギーとして放射するメタマテリアル構造層と、
前記発熱源の裏面側に配置された裏面金属層と、を備えており、
前記裏面金属層の平均放射率は、前記メタマテリアル構造層の平均放射率よりも小さくされている、放射装置。 - 前記メタマテリアル構造層は、第1の支持基板の表面上に配置されており、
前記裏面金属層は、第2の支持基板の裏面上に配置されており、
前記発熱源は、前記第1の支持基板と前記第2の支持基板の間に配置されており、
前記第2の支持基板の熱伝導率は、前記第1の支持基板の熱伝導率よりも小さい、請求項1に記載の放射装置。 - 前記第1の支持基板は、AlN基板であり、
前記第2の支持基板は、Al2O3基板であり、
前記裏面金属層は、Au層である、請求項2に記載の放射装置。 - 前記第1の支持基板の厚みは、前記第2の支持基板の厚みよりも小さい、請求項2又は3に記載の放射装置。
- 被処理物を処理する処理装置であり、
前記被処理物と対向して配置される請求項1~4のいずれか一項に記載の放射装置と、
前記被処理物と前記放射装置とを収容する収容部と、
その一端が前記収容部の内壁面に取付けられ、その他端が前記放射装置の一部に取付けられ、前記放射装置を前記収容部内で保持する保持部と、を備えており、
前記放射装置の前記メタマテリアル構造層が前記被処理物と対向しており、
前記放射装置の前記裏面金属層が前記収容部の前記内壁面と対向しており、
前記裏面金属層と前記収容部の前記内壁面との間には隙間が設けられている、処理装置。 - 前記収容部内の空間を、前記被処理物が収容される第1空間と、前記放射装置が収容される第2空間とに分離する仕切り壁をさらに備えており、
前記仕切り壁は、前記特定の波長の放射エネルギーを透過する、請求項5に記載の処理装置。 - 前記収容部内で、前記被処理物の乾燥処理が行われる、請求項5又は6に記載の処理装置。
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EP17770029.1A EP3435735B1 (en) | 2016-03-24 | 2017-03-13 | Radiation device and processing device using same radiation device |
CN201780019839.1A CN108925146B (zh) | 2016-03-24 | 2017-03-13 | 辐射装置以及使用辐射装置的处理装置 |
KR1020187030409A KR102352533B1 (ko) | 2016-03-24 | 2017-03-13 | 방사 장치 및 방사 장치를 이용한 처리 장치 |
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