WO2017122620A1 - Procédé permettant de produire un élément de montage - Google Patents

Procédé permettant de produire un élément de montage Download PDF

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Publication number
WO2017122620A1
WO2017122620A1 PCT/JP2017/000438 JP2017000438W WO2017122620A1 WO 2017122620 A1 WO2017122620 A1 WO 2017122620A1 JP 2017000438 W JP2017000438 W JP 2017000438W WO 2017122620 A1 WO2017122620 A1 WO 2017122620A1
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WO
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Prior art keywords
mounting member
carbon nanotube
smooth plate
carbon nanotubes
catalyst layer
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PCT/JP2017/000438
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English (en)
Japanese (ja)
Inventor
将太郎 増田
智昭 市川
前野　洋平
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日東電工株式会社
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Publication of WO2017122620A1 publication Critical patent/WO2017122620A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/152—Fullerenes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

Definitions

  • the present invention relates to a method for manufacturing a mounting member.
  • the conventional mounting member is made of an elastic material such as a resin, and there is a problem that the elastic material is likely to adhere to the workpiece and contaminate the workpiece.
  • the mounting member made of an elastic material such as resin has low heat resistance, and there is a problem that the gripping force is reduced in a high heat environment.
  • the workpiece When a material such as ceramics is used as a mounting member, the workpiece is prevented from being contaminated and the temperature dependence of the grip force is reduced.
  • the mounting member made of such a material has a problem that the grip force is essentially low and the workpiece cannot be sufficiently held even at room temperature.
  • An object of the present invention is to provide a method for manufacturing a mounting member that is excellent in gripping power and heat resistance, and that is excellent in low dust generation and hardly contaminates the mounted object.
  • the mounting member manufacturing method of the present invention includes a step a for preparing a smooth plate A1 having a predetermined shape, a step b for forming a catalyst layer on the smooth plate A1, and a smooth plate A2 on which a catalyst layer is formed. And a step c of forming the carbon nanotube aggregate, wherein the smooth plate A1 prepared in the step a and the smooth plate A3 after the step c are substantially the same shape and substantially the same. Size.
  • the manufacturing method includes forming the catalyst layer by sputtering after the pretreatment of the smooth plate A1 in the step b.
  • the pretreatment is a heating treatment.
  • the heating temperature in the heating process is 25 ° C. to 80 ° C.
  • the catalyst layer has a thickness of 0.5 nm to 2 nm.
  • the present invention it is possible to provide a method for manufacturing a mounting member that is excellent in gripping force and heat resistance, and that is excellent in low dust generation and hardly contaminates the mounted object.
  • the method for manufacturing a mounting member of the present invention includes forming a carbon nanotube aggregate on a smooth plate.
  • the mounting member obtained by the manufacturing method of the present invention includes a carbon nanotube aggregate.
  • the aggregate of carbon nanotubes constitutes a placement surface of the placement member.
  • the aggregate of carbon nanotubes has good adhesiveness (friction), and can favorably hold an object placed on the placement member.
  • the manufacturing method of the mounting member of the present invention is: (Step a) Preparing a smooth plate A1 having a predetermined shape; (Step b) forming a catalyst layer on the smooth plate A1, (Step c) including a step of forming a carbon nanotube aggregate on the smooth plate A2 on which the catalyst layer is formed.
  • any appropriate smooth plate can be adopted as the smooth plate.
  • the material which has smoothness and the high temperature heat resistance which can endure manufacture of a carbon nanotube is mentioned.
  • examples of such a material include quartz glass, silicon (silicon wafer, etc.), and a metal plate such as aluminum.
  • the smooth plate A1 may have any appropriate shape depending on the purpose. Typically, it has a rectangular shape.
  • step a includes dividing the large area smooth plate A0 into pieces by any appropriate method to obtain a smooth plate A1 having a predetermined shape.
  • the smooth plate A1 prepared in the step a and the smooth plate A3 after the step c have substantially the same shape and the same size. That is, after step a, it is preferable not to include a step of separating the smooth plate A1, the smooth plate A2 on which the catalyst layer is formed, and the smooth plate A3 on which the carbon nanotube aggregate is formed. Conventionally, after the catalyst layer is formed, the smooth plate with the catalyst layer is separated into a desired size, and then the carbon nanotube assembly forming step is performed. In the present invention, before the catalyst layer is formed, By separating into individual pieces, a mounting member having excellent low dust generation can be obtained.
  • the smooth plate A3 is a portion other than the carbon nanotube aggregate in the mounting member including the carbon nanotube aggregate, and means the smooth plate itself. Further, after the carbon nanotube aggregate is formed (after step c), the obtained mounting member may be singulated.
  • the aggregate of carbon nanotubes is a method of growing a carbon nanotube by forming a catalyst layer on the smooth plate A1 in step b, filling a carbon source with the catalyst layer activated in step c, ie, chemical vapor. It can be formed by a phase growth method (Chemical Vapor Deposition: CVD method).
  • any appropriate device can be adopted as a device for forming the carbon nanotube aggregate.
  • a thermal CVD apparatus as shown in FIG. 1, a hot wall type configured by surrounding a cylindrical reaction vessel with a resistance heating type electric tubular furnace can be cited.
  • a heat-resistant quartz tube is preferably used as the reaction vessel.
  • Any suitable catalyst can be used as a catalyst (catalyst layer material) that can be used to form an aggregate of carbon nanotubes.
  • metal catalysts such as iron, cobalt, nickel, gold, platinum, silver, copper, are mentioned.
  • an alumina / hydrophilic film may be provided between the smooth plate and the catalyst layer as necessary.
  • any appropriate method can be adopted as a method for producing the alumina / hydrophilic film.
  • it can be obtained by forming a SiO 2 film on a smooth plate, evaporating Al and then raising the temperature to 450 ° C. to oxidize.
  • Al 2 O 3 interacts with the SiO 2 film hydrophilic, different Al 2 O 3 surface particle diameters than those deposited Al 2 O 3 directly formed.
  • Al is deposited and heated to 450 ° C. and oxidized without forming a hydrophilic film on a smooth plate, Al 2 O 3 surfaces with different particle diameters may not be formed easily. .
  • a hydrophilic film is prepared on a smooth plate and Al 2 O 3 is directly deposited, it is difficult to form Al 2 O 3 surfaces having different particle diameters.
  • any appropriate method can be adopted as the method for forming the catalyst layer.
  • a method of depositing a metal catalyst by EB (electron beam), sputtering or the like, a method of applying a suspension of metal catalyst fine particles on a smooth plate, and the like can be mentioned.
  • the catalyst layer is formed by sputtering.
  • Arbitrary appropriate conditions can be employ
  • the smooth plate A1 is pretreated before performing the sputtering treatment.
  • pre-processing the process which heats the smooth plate A1 is mentioned.
  • the smooth plate A1 is preferably heated to 25 ° C. to 80 ° C., more preferably 25 ° C. to 40 ° C., by the heating treatment. By performing the pretreatment, it is possible to obtain a mounting member that has few defects in the aggregate of carbon nanotubes and is excellent in low dust generation.
  • the thickness of the catalyst layer is preferably 0.01 nm to 20 nm, more preferably 0.1 nm to 10 nm, still more preferably 0.1 nm or more and less than 3 nm, particularly preferably 0, in order to form fine particles. .5 nm to 2 nm.
  • a carbon nanotube aggregate having excellent uniformity that is, a carbon nanotube aggregate having a small standard deviation of the diameter and / or the number of layers of the carbon nanotubes can be formed.
  • any appropriate carbon source can be used as the carbon source to be filled in step c.
  • hydrocarbons such as methane, ethylene, acetylene, and benzene
  • alcohols such as methanol and ethanol
  • Arbitrary appropriate temperature can be employ
  • the temperature is preferably 400 ° C to 1000 ° C, more preferably 500 ° C to 900 ° C, and further preferably 600 ° C to 800 ° C. .
  • an aggregate of carbon nanotubes can be formed on the smooth plate.
  • a structure including a carbon nanotube aggregate and a smooth plate is used as a mounting member.
  • the smooth plate A3 corresponds to the base material (base material 20 in FIG. 2).
  • a carbon nanotube aggregate is transferred from a smooth plate to a substrate to obtain a mounting member.
  • FIG. 2 is a schematic cross-sectional view of a mounting member manufactured by a manufacturing method according to one embodiment of the present invention.
  • the mounting member 100 is composed of a carbon nanotube assembly 10.
  • the mounting member 100 further includes a base material 20 as shown in FIG. 2 (and FIG. 3 to be described later) shows a form in which the carbon nanotube aggregates 10 are arranged on one side of the base material 20, but the carbon nanotube aggregates 10 are arranged on both sides of the base material 20. May be.
  • the carbon nanotube aggregate 10 is composed of a plurality of carbon nanotubes 11. One end of the carbon nanotube 11 is fixed to the base material 20.
  • the carbon nanotubes 11 are oriented in the direction of the length L, and the carbon nanotube aggregate 10 is configured as a fibrous columnar structure.
  • the carbon nanotubes 11 are preferably oriented in a direction substantially perpendicular to the base material 20.
  • the “substantially perpendicular direction” means that the angle with respect to the surface of the substrate 20 is preferably 90 ° ⁇ 20 °, more preferably 90 ° ⁇ 15 °, and further preferably 90 ° ⁇ 10 °. And particularly preferably 90 ° ⁇ 5 °.
  • the mounting member 200 further includes a base material 20 and a binder 30.
  • one end of the carbon nanotube 11 is fixed to the binder 30.
  • the “carbon nanotube aggregate side surface” is a mounting surface of the mounting member, and in FIGS. 2 and 3, is a surface 10 a on the opposite side of the base 20 of the carbon nanotube aggregate 10.
  • the mounting member manufactured by the above manufacturing method is excellent in low dust generation. If such a mounting member is used, the contamination of the mounted object can be remarkably prevented.
  • the mounting member of the present invention is suitably used for a mounted object that requires high cleanliness because of its low dust generation.
  • the mounting member of the present invention is preferably used for transporting a workpiece (for example, a semiconductor wafer, a glass substrate, etc.) in a semiconductor element manufacturing process, an optical member manufacturing process, and the like. If the workpiece is placed on the workpiece and the workpiece is conveyed, the process can proceed while maintaining the cleanliness of the workpiece.
  • the mounting member of this invention can be used suitably also as a mounting member used for an analyzer.
  • the mounting member composed of the carbon nanotube aggregate is excellent in heat resistance, it can be used in a high temperature environment (eg, 400 ° C. or higher, preferably 500 ° C. to 1000 ° C., more preferably 500 ° C. to 700 ° C.). Excellent friction characteristics. Since the mounting member of the present invention is excellent in low dust generation and heat resistance, it is particularly useful in, for example, a wafer processing step (so-called pre-process) in a semiconductor element manufacturing process.
  • the ratio of the planar view area of the recesses formed on the carbon nanotube aggregate side surface of the placement member is preferably 5% or less, more preferably 4% or less, with respect to the total area of the carbon nanotube aggregate side surface, More preferably, it is 3% or less, more preferably 2% or less, particularly preferably 1% or less, and most preferably 0%. If it is such a range, the mounting member excellent in low dust generation property can be obtained.
  • the “area in plan view of the recesses” means the total area of the openings of the recesses on the carbon nanotube aggregate side surface, and can be measured by observing the carbon nanotube aggregate side surface using a microscope such as SEM.
  • the “concave portion” means that the opening has a diameter of 10 ⁇ m or more. A “recess” can typically be caused by a defect in a carbon nanotube aggregate.
  • the diameter of the opening of the recess is preferably 1000 ⁇ m or less, more preferably 500 ⁇ m or less, and even more preferably 100 ⁇ m or less.
  • the number of the recesses is preferably 80 pieces / cm 2 or less, more preferably 50 pieces / cm 2 or less, further preferably 20 pieces / cm 2 or less, and further preferably 10 pieces / cm 2 or less. Particularly preferably, it is 5 pieces / cm 2 or less, and most preferably 0 piece / cm 2 .
  • the static friction coefficient with respect to the glass surface of the carbon nanotube aggregate side surface of the mounting member is preferably 1.0 or more.
  • the upper limit of the static friction coefficient is preferably 20. If it is such a range, the mounting member excellent in grip property can be obtained.
  • the above-mentioned mounting member with a large friction coefficient with respect to the glass surface can express strong grip property also to the mounted object (for example, semiconductor wafer) comprised from materials other than glass.
  • Carbon nanotube aggregate The carbon nanotube aggregate is composed of a plurality of carbon nanotubes.
  • the diameter (individual value) of the carbon nanotube is preferably 0.3 nm to 1000 nm, more preferably 1 nm to 500 nm, still more preferably 2 nm to 200 nm, and particularly preferably 2 nm to 100 nm.
  • the carbon nanotubes can have excellent mechanical properties and a high specific surface area. Furthermore, the carbon nanotubes have excellent friction properties. It can be a body.
  • the average value of the diameter of the carbon nanotube is preferably 1 nm to 800 nm, more preferably 2 nm to 100 nm, further preferably 5 nm to 50 nm, particularly preferably 5 nm to 40 nm, and most preferably 5 nm or more. It is less than 10 nm. If it is such a range, the mounting member excellent in low dust generation property can be obtained.
  • the average value of the diameters of the carbon nanotubes is obtained by observing the carbon nanotubes constituting the aggregate of carbon nanotubes with a transmission electron microscope (TEM), measuring the diameters of 30 carbon nanotubes extracted randomly, and measuring the measured values.
  • TEM transmission electron microscope
  • Mean value (number basis) calculated from The sample for TEM observation is prepared by putting the carbon nanotube to be measured and about 5 mL of ethanol into a 10 mL glass bottle, performing ultrasonic treatment for about 10 minutes to prepare a carbon nanotube dispersion, and then using a micropipette.
  • the taken dispersion can be prepared by dropping several drops on a microgrid (sample holding mesh) for TEM observation and then air-drying.
  • the standard deviation of the diameter of the carbon nanotube is preferably 3 nm or less, more preferably 2.5 nm or less, further preferably 2 nm or less, particularly preferably 1.8 nm or less, and most preferably 1 nm or less. It is. By reducing the standard deviation of the diameters of the carbon nanotubes, that is, by forming a carbon nanotube aggregate with little variation in diameter, it is possible to obtain a mounting member that is excellent in low dust generation.
  • the standard deviation of the diameter of the carbon nanotube is preferably as small as possible, but the lower limit is, for example, 0.1 nm.
  • the standard deviation of the diameter of the carbon nanotube is determined by observing the carbon nanotubes constituting the aggregate of carbon nanotubes with a transmission electron microscope (TEM), measuring the diameter of 30 randomly extracted carbon nanotubes, and measuring the measured value. And a standard deviation based on the average value (number basis) of the measured values.
  • TEM transmission electron microscope
  • the shape of the carbon nanotube it is sufficient that its cross section has any appropriate shape.
  • the cross section may be substantially circular, elliptical, n-gonal (n is an integer of 3 or more), and the like.
  • the carbon nanotubes have a multi-layer structure.
  • the standard deviation of the number of the carbon nanotubes having a multilayer structure is preferably 3 or less, more preferably 2 or less, still more preferably 1.7 or less, and particularly preferably 1 or less.
  • the standard deviation of the number of carbon nanotube layers was determined by observing the carbon nanotubes constituting the carbon nanotube aggregate with a transmission electron microscope (TEM), measuring the number of randomly extracted 30 carbon nanotubes, It means the standard deviation based on the measured value and the average value (number basis) of the measured value.
  • TEM transmission electron microscope
  • the mode value of the number distribution of carbon nanotubes exists in 10 or less layers, and the relative frequency of the mode value is 30% or more.
  • the distribution width of the number distribution of carbon nanotubes is preferably 9 or less, more preferably 1 to 9 layers, still more preferably 2 to 8 layers, and particularly preferably 3 to 8 layers. is there. By adjusting the distribution width of the number distribution of the carbon nanotubes within such a range, it is possible to form a mounting member having a high grip force and a low dust generation property.
  • the maximum number of carbon nanotubes is preferably 1 to 20 layers, more preferably 2 to 15 layers, and further preferably 3 to 10 layers. By adjusting the maximum number of carbon nanotube layers within such a range, it is possible to form a mounting member having a high grip force and a low dust generation property.
  • the minimum number of carbon nanotube layers is preferably 1 to 10 layers, and more preferably 1 to 5 layers. By adjusting the minimum number of carbon nanotube layers within such a range, it is possible to form a mounting member that has a high grip force and is excellent in low dust generation.
  • the relative frequency of the mode value of the number distribution of the carbon nanotubes is preferably 30% or more, more preferably 30% to 100%, still more preferably 30% to 90%, and particularly preferably 30%. -80%, most preferably 30-70%.
  • the carbon nanotubes can have excellent mechanical properties and a high specific surface area. It can be an aggregate of carbon nanotubes exhibiting excellent friction characteristics. Therefore, the mounting member having such a carbon nanotube aggregate is excellent in grip force and low dust generation.
  • the mode of the number distribution of the carbon nanotubes is preferably present in the number of layers of 10 or less, more preferably in the number of layers from 1 to 10 and even more preferably from 2 to 8 It exists in the layer, and particularly preferably, it exists in the number of layers from 2 to 6.
  • the carbon nanotubes can have excellent mechanical properties and a high specific surface area, and the carbon nanotubes have excellent friction properties. It can become the carbon nanotube aggregate which shows. Therefore, the mounting member having such a carbon nanotube aggregate is excellent in grip force and low dust generation.
  • the length of the carbon nanotube is preferably 50 ⁇ m or more, more preferably 100 ⁇ m to 3000 ⁇ m, still more preferably 300 ⁇ m to 1500 ⁇ m, still more preferably 400 ⁇ m to 1000 ⁇ m, and particularly preferably 500 ⁇ m to 900 ⁇ m.
  • the carbon nanotubes can have excellent mechanical properties and a high specific surface area.
  • the carbon nanotubes have excellent friction properties. It can be a body. Therefore, the mounting member having such a carbon nanotube aggregate is excellent in grip force and low dust generation.
  • the specific surface area and density of the carbon nanotube can be set to any appropriate value.
  • the carbon nanotube is covered with an inorganic material at a portion including the tip.
  • the “part including the tip” herein means a part including at least the tip of the carbon nanotube (tip on the side opposite to the carbon nanotube substrate).
  • the portion including the tip may be coated with an inorganic material, and in the part of the carbon nanotube constituting the carbon nanotube aggregate, the portion including the tip is an inorganic material. It may be covered with.
  • the content ratio of the carbon nanotube in which the portion including the tip is covered with the inorganic material is preferably 50% by weight to 100% by weight, more preferably 60% by weight with respect to the total amount of carbon nanotubes constituting the carbon nanotube aggregate. Wt% to 100 wt%, more preferably 70 wt% to 100 wt%, more preferably 80 wt% to 100 wt%, particularly preferably 90 wt% to 100 wt%, most preferably Is substantially 100% by weight. If it is such a range, the mounting member which is high in grip force and excellent in low dust generation property can be formed.
  • the thickness of the coating layer is preferably 1 nm or more, more preferably 3 nm or more, further preferably 5 nm or more, further preferably 7 nm or more, particularly preferably 9 nm or more, and most preferably 10 nm. That's it.
  • the upper limit of the thickness of the coating layer is preferably 50 nm, more preferably 40 nm, still more preferably 30 nm, particularly preferably 20 nm, and most preferably 15 nm. Within such a range, it is possible to form a mounting member that has a high grip force and is excellent in low dust generation.
  • the length of the coating layer is preferably 1 nm to 1000 nm, more preferably 5 nm to 700 nm, still more preferably 10 nm to 500 nm, particularly preferably 30 nm to 300 nm, and most preferably 50 nm to 100 nm. is there. If it is such a range, the mounting member which is high in grip force and excellent in low dust generation property can be formed.
  • inorganic material arbitrary appropriate inorganic materials can be employ
  • examples of such inorganic materials include SiO 2 , Al 2 O 3 , Fe 2 O 3 , TiO 2 , MgO, Cu, Ag, and Au.
  • Base material As a base material, arbitrary appropriate base materials can be employ
  • the thickness of the substrate can be set to any appropriate value depending on the purpose.
  • the thickness of the silicon substrate is preferably 100 ⁇ m to 10,000 ⁇ m, more preferably 100 ⁇ m to 5000 ⁇ m, and still more preferably 100 ⁇ m to 2000 ⁇ m.
  • the surface of the substrate is chemically treated with conventional surface treatments such as chromic acid treatment, ozone exposure, flame exposure, high piezoelectric impact exposure, ionizing radiation treatment, etc., in order to improve adhesion and retention with adjacent layers.
  • conventional surface treatments such as chromic acid treatment, ozone exposure, flame exposure, high piezoelectric impact exposure, ionizing radiation treatment, etc.
  • a physical treatment or a coating treatment with a primer for example, the above-mentioned adhesive substance
  • the substrate may be a single layer or a multilayer.
  • Binder Any appropriate binder can be adopted as the binder as long as it has an effect of joining the base material and the carbon nanotube aggregate.
  • binders include carbon paste, alumina paste, silver paste, nickel paste, gold paste, aluminum paste, titanium oxide paste, iron oxide paste, chromium paste, aluminum, nickel, chromium, copper, gold, and silver. Is mentioned. Moreover, you may form a binder with arbitrary appropriate adhesives.
  • Example 1 A silicon substrate (manufactured by VALQUA FT Co., Ltd., thickness: 700 ⁇ m, size: 10 mm ⁇ 10 mm) was prepared (step a). Thereafter, an Al 2 O 3 thin film (degree of ultimate vacuum: 8.0 ⁇ 10 ⁇ 4 Pa, sputtering gas: Ar is formed on the silicon substrate by a sputtering apparatus (trade name “CFS-4ES” manufactured by Shibaura Mechatronics). Gas pressure: 0.50 Pa, growth rate: 0.12 nm / sec, thickness: 20 nm).
  • an Fe thin film was further formed as a catalyst layer (sputtering gas: Ar, gas pressure: 0.75 Pa, growth rate: 0) using a sputtering apparatus (trade name “CFS-4ES” manufactured by Shibaura Mechatronics). .012 nm / sec, thickness: 1.0 nm) (step b). Thereafter, this base material was placed in a quartz tube of 30 mm ⁇ , and a helium / hydrogen (105/80 sccm) mixed gas maintained at a moisture content of 700 ppm was allowed to flow through the quartz tube for 30 minutes to replace the inside of the tube. Thereafter, the inside of the tube was heated to 765 ° C.
  • Step c a mixed gas of helium / hydrogen / ethylene (105/80/15 sccm, water content 700 ppm) was filled into the tube and left for 60 minutes to orient the carbon nanotubes vertically on the substrate. (Step c) to obtain a mounting member.
  • the size of the mounting member was 10 mm ⁇ 10 mm, that is, after step a, the mounting member was obtained without including the individualization step.
  • the obtained mounting member was subjected to the evaluation (1). The results are shown in Table 1.
  • Example 2 A silicon substrate (manufactured by VALQUA FT Co., Ltd., thickness: 700 ⁇ m, size: 10 mm ⁇ 10 mm) was prepared (step a). Thereafter, as a pretreatment, the silicon substrate was heated to 26 ° C. Next, an Al 2 O 3 thin film (degree of ultimate vacuum: 8.0 ⁇ 10 ⁇ 4 Pa, sputtering gas: Ar is formed on the silicon substrate by a sputtering apparatus (trade name “CFS-4ES” manufactured by Shibaura Mechatronics). Gas pressure: 0.50 Pa, growth rate: 0.12 nm / sec, thickness: 20 nm).
  • an Fe thin film was further formed as a catalyst layer (sputtering gas: Ar, gas pressure: 0.75 Pa, growth rate: 0) using a sputtering apparatus (trade name “CFS-4ES” manufactured by Shibaura Mechatronics). .012 nm / sec, thickness: 1.0 nm) (step b). Thereafter, this base material was placed in a quartz tube of 30 mm ⁇ , and a helium / hydrogen (105/80 sccm) mixed gas maintained at a moisture content of 700 ppm was allowed to flow through the quartz tube for 30 minutes to replace the inside of the tube. Thereafter, the inside of the tube was heated to 765 ° C.
  • Step c a mixed gas of helium / hydrogen / ethylene (105/80/15 sccm, water content 700 ppm) was filled into the tube and left for 60 minutes to orient the carbon nanotubes vertically on the substrate. (Step c) to obtain a mounting member.
  • the size of the mounting member was 10 mm ⁇ 10 mm, that is, after step a, the mounting member was obtained without including the individualization step.
  • the obtained mounting member was subjected to the evaluation (1). The results are shown in Table 1.
  • a silicon base material manufactured by Silicon Technology Co., Ltd., thickness 700 ⁇ m, size: 200 mm ⁇ (as it is an 8-inch wafer) was prepared (step a). Thereafter, an Al 2 O 3 thin film (degree of ultimate vacuum: 8.0 ⁇ 10 ⁇ 4 Pa, sputtering gas: Ar is formed on the silicon substrate by a sputtering apparatus (trade name “CFS-4ES” manufactured by Shibaura Mechatronics). Gas pressure: 0.50 Pa, growth rate: 0.12 nm / sec, thickness: 20 nm).
  • an Fe thin film was further formed as a catalyst layer (thickness: 3.0 nm) using a sputtering apparatus (trade name “CFS-4ES” manufactured by Shibaura Mechatronics) (step b).
  • a sputtering apparatus trade name “CFS-4ES” manufactured by Shibaura Mechatronics
  • the silicon substrate on which the catalyst layer was formed was cut into a size of 10 mm ⁇ 10 mm.
  • the base material obtained by cutting was placed in a 30 mm ⁇ quartz tube, and a helium / hydrogen (105/80 sccm) mixed gas maintained at a moisture content of 700 ppm was allowed to flow through the quartz tube for 30 minutes to replace the inside of the tube. Thereafter, the inside of the tube was heated to 765 ° C.
  • Step c a mixed gas of helium / hydrogen / ethylene (105/80/15 sccm, water content 700 ppm) was filled into the tube and left for 60 minutes to orient the carbon nanotubes vertically on the substrate. (Step c) to obtain a mounting member.
  • the obtained mounting member was subjected to the evaluation (1). The results are shown in Table 1.
  • Comparative Example 2 A mounting member was obtained in the same manner as in Comparative Example 1 except that the thickness of the catalyst layer was 1.0 nm. The obtained mounting member was subjected to the evaluation (1). The results are shown in Table 1.

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Abstract

La présente invention concerne un procédé permettant de produire un élément de montage qui présente une excellente force de préhension et une excellente résistance à la chaleur, une faible émission de poussière, et qui n'a pas tendance à contaminer un objet qui doit être monté. Ce procédé permettant de produire un élément de montage comprend une étape a consistant à préparer une plaque lisse (A1) ayant une forme prescrite, une étape b consistant à former une couche de catalyseur sur la plaque lisse (A1) et une étape c consistant à former un agrégat de nanotubes de carbone sur la plaque lisse (A2) sur laquelle est formée la couche de catalyseur, la plaque lisse (A1) préparée au cours de l'étape a et une plaque lisse (A3) préparée après l'étape c ayant approximativement la même forme et approximativement la même taille.
PCT/JP2017/000438 2016-01-15 2017-01-10 Procédé permettant de produire un élément de montage WO2017122620A1 (fr)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006035379A (ja) * 2004-07-27 2006-02-09 Society Of Chemical Engineers Japan カーボンナノチューブデバイス及びカーボンナノチューブデバイスの製造方法
WO2008152940A1 (fr) * 2007-06-13 2008-12-18 Ulvac, Inc. Mécanisme de support de substrat
WO2010092786A1 (fr) * 2009-02-10 2010-08-19 日本ゼオン株式会社 Matériau support utilisable en vue de la production d'un agrégat de nanotubes de carbone orientés et procédé de production d'un agrégat de nanotubes de carbone orientés
WO2013039156A1 (fr) * 2011-09-14 2013-03-21 株式会社フジクラ Structure pour former une nanofibre de carbone, structure de nanofibre de carbone et procédé de production de celle-ci, et électrode de nanofibre de carbone
JP2014028733A (ja) * 2012-07-04 2014-02-13 Toyota Motor Corp カーボンナノチューブの製造方法
JP2014046231A (ja) * 2012-08-29 2014-03-17 Hitachi Chemical Co Ltd カーボンナノチューブ合成用触媒の製造方法
JP2015135963A (ja) * 2013-12-23 2015-07-27 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 改善されたウェハ・ハンドリングのための微細構造体
JP2015201638A (ja) * 2014-04-03 2015-11-12 エーエスエム アイピー ホールディング ビー．ブイ． ファンデルワールス力を用いてワークピースを搬送するアンチスリップエンドエフェクタ

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006035379A (ja) * 2004-07-27 2006-02-09 Society Of Chemical Engineers Japan カーボンナノチューブデバイス及びカーボンナノチューブデバイスの製造方法
WO2008152940A1 (fr) * 2007-06-13 2008-12-18 Ulvac, Inc. Mécanisme de support de substrat
WO2010092786A1 (fr) * 2009-02-10 2010-08-19 日本ゼオン株式会社 Matériau support utilisable en vue de la production d'un agrégat de nanotubes de carbone orientés et procédé de production d'un agrégat de nanotubes de carbone orientés
WO2013039156A1 (fr) * 2011-09-14 2013-03-21 株式会社フジクラ Structure pour former une nanofibre de carbone, structure de nanofibre de carbone et procédé de production de celle-ci, et électrode de nanofibre de carbone
JP2014028733A (ja) * 2012-07-04 2014-02-13 Toyota Motor Corp カーボンナノチューブの製造方法
JP2014046231A (ja) * 2012-08-29 2014-03-17 Hitachi Chemical Co Ltd カーボンナノチューブ合成用触媒の製造方法
JP2015135963A (ja) * 2013-12-23 2015-07-27 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 改善されたウェハ・ハンドリングのための微細構造体
JP2015201638A (ja) * 2014-04-03 2015-11-12 エーエスエム アイピー ホールディング ビー．ブイ． ファンデルワールス力を用いてワークピースを搬送するアンチスリップエンドエフェクタ

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