WO2017068813A1 - Dispositif de mesure de caractéristiques d'élément optique - Google Patents

Dispositif de mesure de caractéristiques d'élément optique Download PDF

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Publication number
WO2017068813A1
WO2017068813A1 PCT/JP2016/069774 JP2016069774W WO2017068813A1 WO 2017068813 A1 WO2017068813 A1 WO 2017068813A1 JP 2016069774 W JP2016069774 W JP 2016069774W WO 2017068813 A1 WO2017068813 A1 WO 2017068813A1
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Prior art keywords
optical element
lens
light
ring
test
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PCT/JP2016/069774
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English (en)
Japanese (ja)
Inventor
光広 桂
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株式会社カツラ・オプト・システムズ
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Application filed by 株式会社カツラ・オプト・システムズ filed Critical 株式会社カツラ・オプト・システムズ
Priority to KR1020187006824A priority Critical patent/KR102587880B1/ko
Priority to CN201680059885.XA priority patent/CN108139205B/zh
Priority to JP2017515869A priority patent/JP6218261B2/ja
Publication of WO2017068813A1 publication Critical patent/WO2017068813A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses

Definitions

  • the characteristic value of the test lens is obtained by simultaneously irradiating the convergent light having a ring-shaped light intensity distribution and the parallel light irradiated near the center of the test lens, as viewed from the optical axis of the reflected light sensor unit.
  • the present invention relates to an apparatus for measuring In particular, an apparatus for measuring the thickness of a thin test lens of 200 ⁇ m or less, or an adjustment so that the lens central axis of the test lens (the normal of the first surface of the test lens) is aligned with the optical axis of the reflected light sensor unit After that, by measuring the condensing point position of the ring-shaped focused light that has passed through the test lens or the parallel rays irradiated near the center of the test lens, the test lens is not rotated.
  • the present invention relates to a lens surface deviation amount measuring apparatus capable of measuring a lens surface deviation amount.
  • a test optical element 11 is arranged on a straight line connecting two displacement meters 10a and 10b, and two displacement meters are arranged.
  • 10a and 10b irradiate the test optical element 11 with light beams 12a and 12b, respectively, and the distance a1 to the surface of the test optical element 11 measured by one displacement meter 10a and the test measured by the other displacement meter 10b.
  • the distance a2 to the back surface of the optical element 11 is measured, and the thickness of the optical element 11 to be measured is measured by subtracting the distance a1 and the distance a2 from the distance a0 between the two displacement meters 10a and 10b.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 1-235806
  • Patent Document 2 Japanese Patent Application Laid-Open No. 10-239046
  • a focused light 13 is irradiated onto a test optical element 15 installed on a holding frame 14.
  • the reference plane of the swivel stage 16 was photographed by an imaging optical system (not shown) provided in the sensor unit 20 while moving the optical element 15 to be measured in the z-axis direction as shown in FIG.
  • the light intensity of the image generated on the front and back surfaces of the optical element 15 to be tested is measured, and the light intensity with respect to the z axis is sampled as digital data by a processing unit (not shown) to extract the maximum value of the two light intensities.
  • a technique for measuring the thickness of the optical element in a non-contact manner for calculating the thickness of the optical element 21 to be measured based on the z-axis interval (measured value d) is known.
  • a transmission type eccentricity measuring device capable of measuring the amount of eccentricity of a subject lens by rotating the subject lens with reference to the outer circumference thereof. -206031 (Patent Document 3).
  • an image of an index of a predetermined shape is formed on the focal plane of the test surface while rotating the test surface of the test optical element (test lens) around a predetermined rotation axis. Measure the radius of the circle in which the index image relayed through the test surface and imaged on the imaging surface moves so that the index image draws a circular trajectory as the test surface rotates
  • an eccentricity measuring device for obtaining the eccentricity of the test surface is disclosed in, for example, Japanese Patent Application Laid-Open No. 2008-298739 (Patent Document 4) or Japanese Patent Application Laid-Open No. 2007-327771 (Patent Document 5). ing.
  • JP-A-1-235806 Japanese Patent Laid-Open No. 10-239046 JP 2007-206031 A JP 2008-298739 A JP 2007-327771 A
  • the focused light 201 is used.
  • the image 204a is generated on the front surface 203a of the test optical element 203 and the image 204b is generated on the back surface 203b of the test optical element 203.
  • the image 204a generated on the front surface 203a and the image 204b generated on the back surface 203b are focused light beams. It is difficult to measure with the axis 210, ie, Z, overlapping and separated.
  • FIG. 4 shows the results of graphing the light intensity measured as data. As shown in FIG. 4, the difference between the maximum value and the minimum value of the light intensity of the image is relatively small, and the change in the peak and valley of the graph is slow. This indicates that it is difficult to measure the interval (measured value d) on the z-axis corresponding to the maximum value.
  • a convex-shaped optical lens (hereinafter also referred to as “test lens”) has an upper surface (hereinafter also referred to as “first surface”) and.
  • the lower surface (hereinafter also referred to as “second surface”) is a spherical surface.
  • the centers of the upper surface and the lower surface are not on the optical axis in the design of the lens to be examined, and surface deviation may occur in the manufacturing process. Due to such surface deviation, decentering (eccentricity) occurs in the test lens. For example, a process of measuring the amount of eccentricity for each lot of optical lenses and inspecting the quality is beneficial.
  • a measuring device for measuring the surface deviation amount (eccentricity) of a lens to be measured, a measuring device based on a method of measuring a center deflection amount, a surface deflection angle, and the like by rotating the lens to be tested is used. .
  • the present invention has been made on the basis of the above-described circumstances, and an object of the present invention is to focus the ring-shaped focused light with a light intensity distribution near the center of the lens to be examined as viewed from the optical axis of the reflected light sensor unit. It is intended to provide an apparatus for measuring the characteristic value of a lens to be examined by simultaneously irradiating with parallel light rays.
  • An object of the present invention is to provide a lens surface deviation amount measuring apparatus capable of measuring the lens surface deviation amount.
  • the above object of the present invention is to irradiate a test optical element with focused light having a ring-shaped light intensity distribution on a plane perpendicular to the optical axis and parallel rays having the center of the light intensity distribution on the optical axis.
  • An optical element characteristic measuring apparatus including a ring-shaped focused light irradiation light portion that performs a surface on the ring-shaped focused light irradiation light portion side of the optical element to be tested as a front surface, and an opposite side of the surface as a back surface.
  • the above-described object of the present invention is to provide the ring-shaped focused light irradiation light section having a light source, a first optical element, and a first lens, in the order of the light source, the first optical element, and the first lens.
  • the first lens is disposed along the optical axis, and the first optical element has a ring-shaped gap perpendicular to the optical axis, and a first lens having a diameter smaller than the inner diameter of the ring-shaped gap.
  • a reflected light detector for forming a second ring image on a light receiving surface and generating data for calculating the light intensity of the first ring image and the second ring image;
  • Two maximum values in the change in the light intensity of the ring image 2 are detected, and a measured value d, which is a difference in moving distance of the test optical element corresponding to the two maximum values, of the material of the test optical element
  • the refractive index n the radius of curvature r of the optical element to be measured
  • the converging angle ⁇ 1 of the focused light which is the angle formed by the central point of the radius of curvature r and the optical axis and the focused light
  • the test optical element is a concave surface
  • the sign of the composite same order of the distance e adopts a negative value
  • the lens thickness t of the test optical element is Or a ring-shaped parallel light beam reflected by the surface of the optical element to be tested, which has the ring-shaped focused light irradiation light section for irradiating the test optical element with the ring-shaped focused light.
  • a reflected light sensor unit that generates first condensing position data for calculating a reflection angle of the optical axis of
  • a transmitted light sensor unit that generates second condensing position data for calculating a condensing point position of a light beam irradiated from the ring-shaped focused light irradiation light unit and transmitted through the test optical element;
  • a data processing unit that calculates the reflection angle based on the first condensing position data, and calculates the condensing point position of the light beam that has passed through the test optical element based on the second condensing position data.
  • the data processing unit adjusts the position of the test optical element based on the first data so that the lens central axis of the test optical element matches the optical axis of the ring-shaped focused light irradiation light unit.
  • the amount of deviation calculated based on the position of the condensing point of the transmitted parallel light beam that has passed through the vicinity of the center of the test optical element is ⁇ 1 , the refractive index n of the material of the test optical element, and the By calculating the surface deviation amount ⁇ 2 using the curvature radius r 1 of the front surface, the curvature radius radius r 2 of the back surface of the optical element to be tested, and the thickness t of the optical element to be tested, or The surface displacement amount ⁇ 2 is Or the test optical element is a lens, and the focused light condensed at the focal point on the
  • the refraction angle ⁇ 1 ′ of the transmitted parallel light beam calculated based on the position of the condensing point of the transmitted light sensor portion of the parallel light beam, the refractive index n of the material of the test optical element, the back surface of the test optical element with radius of curvature r 2 of, by calculating the surface deviation amount delta 2, or the surface deviation amount delta 2, Or by using non-ring-shaped focused light in which a plurality of three or more light beams are arranged at substantially equal intervals on the circumference, instead of the ring-shaped focused light, Alternatively, the first optical element is more effectively achieved by forming the plurality of holes through which the light flux passes.
  • the optical element characteristic measuring apparatus of the present invention when viewed from the optical axis of the reflected light sensor unit, the light intensity distribution is simultaneously irradiated with the ring-shaped focused light and the parallel light irradiated near the center of the test lens.
  • the optical axis of the reflected light sensor unit and the optical axis of the test lens are combined to analyze the intensity or optical path (condensing position) of the light beam reflected from the surface of the test lens or transmitted through the test lens. By doing so, it becomes possible to measure the characteristic value of the test lens.
  • the optical element characteristic measuring apparatus of the present invention the light intensity of the ring-shaped (ring-shaped) images on the front and back surfaces of the lens to be examined through the optical element having a ring-shaped (ring-shaped) transmission hole (slit). By observing this change, it is possible to measure the thickness of a thin test lens (thickness t to 200 ⁇ m or less).
  • the lens central axis of the test lens (the normal line of the first surface of the test lens) is adjusted so as to be aligned with the optical axis of the reflected light sensor unit.
  • FIG. 1 It is a schematic block diagram of the conventional optical element thickness measuring apparatus by two non-contact displacement meters.
  • A is a block diagram of the thickness measuring apparatus of the optical element by the conventional one non-contact displacement meter.
  • B is a figure which shows the xyz coordinate system in the measuring apparatus shown to (A). The figure which shows the mode of the image produced on the surface of a to-be-tested optical element in case the focused light exists in the surface of a to-be-tested optical element, and the image produced on the back surface of a to-be-tested optical element in the conventional thickness measuring apparatus of an optical element It is.
  • FIG. In a measurement apparatus according to an embodiment of the present invention, a ring-shaped focused light irradiation optical system capable of simultaneously irradiating focused light with a ring-shaped light intensity distribution and parallel rays irradiated near the center of a lens to be examined. It is a detailed block diagram. It is a figure which shows the shape of the optical element 34 of the ring-shaped focused light irradiation optical system in embodiment of this invention.
  • FIG. 1 is a block diagram of the optical element thickness measuring apparatus in 1st Embodiment of this invention.
  • B is a diagram showing the x-axis, y-axis, and z-axis of the reference plane.
  • C is a diagram showing the tilt angle ⁇ x.
  • D is a view showing the tilt angle ⁇ y.
  • the apparatus for measuring the thickness of a test optical element when focused light having a ring-shaped (annular) light intensity is present on the back surface of the test optical element when viewed from the optical axis of the focused light. It is a figure which shows the mode of the image which arises on the surface of a test optical element, and the image which arises on the back surface of a test optical element.
  • (A) is a thickness measuring device of a test optical element according to the first embodiment of the present invention, where a condensing point is present on the surface of the test optical element, and a surface image is formed on the light receiving surface of the CCD camera. It is a figure which shows the ring-shaped surface imaging performed.
  • (B) is a thickness measuring device for a test optical element according to the first embodiment of the present invention, in which a condensing point exists on the back surface of the test optical element, and a back image is formed on the light receiving surface of the CCD camera. It is a figure which shows the ring-shaped back surface imaging performed.
  • (A) is a test optical element thickness measurement apparatus according to the first embodiment of the present invention, in which the focal point is present inside the test optical element, and the front and back images are on the light receiving surface of the CCD camera. It is a figure which shows a mode that the ring-shaped surface image formation imaged by 1 is partially interrupted
  • (B) is a test optical element thickness measurement apparatus according to the first embodiment of the present invention, in which the focal point exists near the center in the thickness direction of the test optical element, and the front and back images are those of the CCD camera. It is a figure which shows a mode that the ring-shaped back surface image formation imaged on a light-receiving surface is mostly interrupted
  • focused light having a ring-like (annular) light intensity as viewed from the focused light optical axis is used, and the front and back surfaces of the test optical element are used.
  • test optical element thickness measurement apparatus when the test optical element has a convex surface (r> 0), the focused light is incident on the convex test optical element, It is the figure which showed a mode that it refracts on the surface of an optical analysis element, and condenses on a back surface.
  • the focused light is incident on the convex test optical element, and the surface of the test optical element It is the figure which showed a mode that it refracted
  • the focused point of the focused light having such a light intensity that the light beam is arranged along the virtual ring as viewed from the focused optical axis is measured.
  • FIG. 1 It is a figure which shows the mode of the image produced on the surface of a to-be-tested optical element in the case of existing on the surface of a to-be-tested optical element, and the image produced on the back surface of a to-be-tested optical element.
  • (A) And (B) is a figure which shows the outline of the shape of the optical elements 61 and 62 of the thickness measuring apparatus of the optical element to be tested in 2nd Embodiment of this invention, respectively.
  • FIG. 1 A) and (B) respectively show the outline of the shape of the optical element which converts into the ring-shaped light ray of the lens surface deviation amount measurement, and the pinhole type optical element in the fourth embodiment of the present invention.
  • the measuring apparatus simultaneously irradiates a convergent light having a ring-shaped light intensity distribution and a parallel light beam irradiated near the center of the lens to be measured, as viewed from the optical axis of the reflected light sensor unit, and the reflected light sensor.
  • a convergent light having a ring-shaped light intensity distribution and a parallel light beam irradiated near the center of the lens to be measured, as viewed from the optical axis of the reflected light sensor unit, and the reflected light sensor.
  • the ring-shaped focused light irradiation optics capable of simultaneously irradiating the ring-shaped focused light having a light intensity distribution and the parallel light beam irradiated near the center of the lens to be examined.
  • the system 29 the relationship between components and the function of each component will be described in the order of propagation of light rays.
  • FIG. 5 is a detailed configuration diagram of the ring-shaped focused light irradiation optical system 29.
  • the light source 31 (for example, a laser diode) is disposed at the focal length f1 of the collimating lens 32, and the light beam emitted from the light source 31 is converted into a parallel light beam by the collimating lens 32.
  • the parallel light beam is converted into a parallel ring light beam 49a by the optical element 34 having a ring-shaped transmission hole.
  • the parallel ring-shaped light beam 49a is emitted as a ring-shaped focused light 50a by the lens 35 having a focal length f2 disposed at the propagation destination.
  • the parallel light beam 49b near the center of the optical axis is condensed at a point N located at the focal distance f4 away from the small diameter lens 34b by the small diameter lens 34b disposed on the optical element 34 and having the focal distance f4. Then, the light is converted again into a parallel light beam 50b by the lens 35 having a focal length f2 located away from the point N and having a focal length f2.
  • the ring-shaped focused light irradiation optical system 29 can simultaneously emit the ring-shaped focused light 50a and the parallel light beam 50b.
  • the ring-shaped focused light 50a and the parallel light beam 50b have a common optical axis.
  • the shape of the optical element 34 is shown in FIG.
  • the optical element 34 has a structure in which a ring-shaped part 34g is disposed inside an outer ring-shaped part 34h, and a small-diameter lens 34b having a focal length f4 is disposed on the inner ring-shaped part 34g. Since the ring-shaped transmission hole 34a is formed, incident light is converted into a ring-shaped light beam having a diameter in a predetermined range and transmitted. Furthermore, since the small diameter lens 34b having the focal length f4 is disposed in the vicinity of the center, the optical element 34 converts parallel light into focused light.
  • the optical element 34 includes a ring-shaped component 34g as a frame that supports the small-diameter lens 34b. Since the transmission hole 34a is a gap (space) existing between the outer ring-shaped part 34h and the frame part 34g, the support parts 34c to 34f are provided between the outer ring-shaped part 34h and the frame part 34g. Place.
  • the reflection angle or light of the light beam reflected from the front or back surface of the test lens by the ring-shaped focused light 50a is necessary to analyze the strength.
  • the reflected light detection unit 48 is provided in the ring-shaped focused light irradiation optical system 29 is shown in FIG.
  • a ring-shaped image formed on the front or back surface of the test lens by the ring-shaped focused light 50a is used. It is necessary to measure the light intensity.
  • a beam splitter (half mirror) 33 is disposed between the optical element 34 and the collimating lens 32 at an angle of approximately 45 ° with respect to the optical axis. Further, a reflected light detector 48 is disposed at the tip of the beam splitter 33.
  • This reflected light detection unit 48 has a CCD camera at the focal length f3 of the optical element (for example, ring-shaped passage hole) 39, the lens 40, and finally the lens 40 in the order in which the light rays coming from the ring-shaped image are incident. It consists of the components arranged in 41.
  • the angle of the reflected light with respect to the optical axis can be measured. Based on the measured angle of the reflected light, the shape characteristic of the test lens can be calculated, and the optical axis of the test lens can be adjusted as will be described later.
  • the optical element 39 functions to shield light transmitted through the small-diameter lens 34b. Then, as shown in FIG. 8, the optical element 39 has a structure in which an inner circular component 39c is arranged at the center of the outer ring-shaped component 39b, thereby forming a ring-shaped transmission hole 39a, and incident light. On the other hand, it functions to transmit a ring-shaped light beam having a predetermined range of diameters and to block light beams having a diameter other than the predetermined range. Since 39a is a gap (space), support parts 39d to 39g are arranged to connect 39b and 39c.
  • FIG. 9A shows a configuration diagram of the optical element thickness measuring apparatus according to the first embodiment of the present invention.
  • focused light having a ring-shaped light intensity as viewed from the optical axis is incident on a test optical element, and the target is measured via an optical element having a ring-shaped (ring-shaped) transmission hole.
  • the thickness of the test optical element is measured by observing the change in the light intensity of the front and back images of the test optical element.
  • the optical element to be tested include a lens having a curved surface, a transparent substrate, a flat glass plate, and the like.
  • a measuring apparatus for measuring the thickness of a lens to be tested having a convex surface curvature (r> 0) will be described.
  • FIGS. 9B to 9D The coordinate system of the overall configuration diagram in the first embodiment is shown in FIGS. 9B to 9D.
  • the test optical element holding unit 36 for installing the test optical element is installed on the swivel stage 43 having a function of adjusting the x-axis, y-axis, z-axis, tilt angle ⁇ x, and tilt angle ⁇ y of the reference plane 300. Is done. Then, before measuring the thickness of the optical element 37 to be measured, it is necessary to adjust the x-axis, y-axis, tilt angle ⁇ x, and ⁇ y of the swivel stage 43.
  • the optical axis Z of the focused light and the test optical element Adjustment (vertical alignment) is performed so that the reference plane 300 on which the holding unit 36 is installed is vertical.
  • a mirror (not shown) is installed on the reference plane 300 of the swivel stage 43.
  • the tilt angles ⁇ x and ⁇ y are adjusted so that the optical axis of the reflected light of the mirror coincides with the optical axis Z of the focused light.
  • Such adjustment is performed at the time of initial setting of the optical element thickness measuring apparatus of the present invention.
  • the second adjustment is performed when the test optical element 37 is installed in the optical element holding unit 36. After the second adjustment, the optical axis Z of the focused light coincides with the optical axis of the optical element 37 to be tested.
  • the optical system 30 in the apparatus of the first embodiment of the present invention emits the parallel light 50b as the swivel stage adjustment together with the focused light 50a used for measurement. To do.
  • a mirror (not shown) installed on the swivel stage 43 reflects the parallel light 50b.
  • the angle of the reflected light is measured by the autocollimator unit 47 of the optical system 30. Next, the principle of measuring the angle of the reflected light will be described.
  • the incident parallel light 50b Reflected in the direction.
  • the reflected light follows a path opposite to the incident path and reaches the beam splitter (half mirror) 33.
  • a part of the reflected light is deflected and travels toward the beam splitter (half mirror) 38. Therefore, the reflected light is deflected by a beam splitter (half mirror) 38 and enters an autocollimator unit 47 including an optical element 44 having a transmission hole 44 a, a lens 45, and a CCD camera 46.
  • the shape of the optical element 44 of the autocollimator unit 47 is shown in FIG.
  • the reflected light is condensed on the light receiving surface of the CCD camera 46 connected to the processing unit 42 by a cable. If the reflected light is condensed at a predetermined position on the light receiving surface, the processing unit 42 determines that the reference plane 300 is perpendicular to the optical axis Z of the focused light. However, if the processing unit 42 determines that the light is not condensed at a predetermined position, the tilt angle ⁇ x of the swivel stage 43 and the tilt are determined based on the condensing position (digital data transmitted from the CCD camera 41). The swivel stage 43 is adjusted by changing the angle ⁇ y so that the reflected light is irradiated to a predetermined position.
  • FIG. 11 shows how the focused light is reflected from the surface of the optical element to be tested.
  • the radius of curvature of the test optical element 302 is r
  • the angle between the optical axis Z of the reflected light 303a, the optical axis Zr of 303b focused beam is theta 4.
  • the distance h between the optical axis Z of the focusing optical (optical axis Z'the target optical element 302) measuring axis, theta 4 with the radius of curvature r, the distance h r ⁇ sin ( ⁇ 4 /2 ).
  • a test optical element 302 having a convex surface facing the optical system 30 is installed in a test optical element holding unit 304.
  • the principle by which the processing unit 42 causes the optical element 302 to be tested to match the position of the uppermost point T of the convex surface with the optical axis of the optical system 30, that is, the focused optical axis Z will be described below. First, as shown in FIG.
  • the focused lights 301a and 301b of the optical system 30 are used for measurement.
  • the focused lights 301 a and 301 b are reflected toward the lens 35 as parallel reflected lights 303 a and 303 b when irradiated on the optical element 302 to be tested.
  • the optical axes of the reflected lights 303a and 303b are Since it coincides with the optical axis Z, a spot should be irradiated to a predetermined position on the light receiving surface of the CCD camera 46 in the autocollimator unit 47.
  • the reflected light forms an image as a spot on the light receiving surface of the CCD camera 46 disposed at the focal length f5 of the lens 45.
  • the processing unit 42 is connected to the CCD camera 46 of the optical system 30 via a cable, and the spot irradiated on the light receiving surface of the CCD camera 46 is transmitted to the processing unit 42 as digital data. For this reason, the processing unit 42 detects the spot position based on the transmitted digital data, detects the difference in direction and distance between the measured spot position and the predetermined spot position, and based on the difference. Thus, the swivel stage 43 is instructed to move in the x-axis direction and the y-axis direction on the reference plane 300 on which the test optical element holding unit 36 is installed, so that the spot position matches the predetermined position. You may make it adjust automatically.
  • the reflection angle ⁇ 4 corresponds to the position of the spot (condensing point) on the light receiving surface of the CCD camera 46, and the reflection angle ⁇ 4 may be calculated by the processing unit 42 based on the position. At that time, the processing unit calculates the light intensity and the angle ⁇ 4 of the incident light based on the images received by the CCD cameras 41 and 46, for example, on the monitor of the PC provided in the processing unit 42. You may make it output and display.
  • the concave test optical element with the concave surface facing the optical system 30 is shown as the test optical element.
  • the adjustment is performed so that the position of the lowermost portion of the concave surface of the concave optical element to be tested is placed on the optical axis of the optical system 30, that is, the focused optical axis Z. Adjustments can be made.
  • FIGS. 12 and 13 show images formed on the front and back surfaces of the test optical element 311 of the ring-shaped focused light 310 irradiated to the test optical element 37 installed on the test optical element holding unit 36.
  • An image formed on the light receiving surface of the CCD camera 41 is shown in FIG.
  • the test optical element 21 is irradiated with the focused light 24 from the sensor unit 20 and the thickness of the optical element is measured
  • the test optical element 203 formed on a light receiving element (not shown) of the sensor unit 20 is imaged. Since the image 204a generated when the focusing point 202 is aligned with the front surface 203a is close to or overlaps with the back image 204b, there is a problem that separation is difficult as shown in FIG.
  • the above problem is solved by using a light beam (for example, a ring shape or a ring shape) in which the center of the focused light is shielded.
  • a light beam for example, a ring shape or a ring shape
  • the ring-shaped (ring-shaped) focused light 310 enters the test optical element 311, and two images are generated by the reflected light at the boundary between the front surface and air of the test optical element 311 and the boundary between the back surface and air. Is shown in FIG. These images will be described.
  • the condensing point 312 exists on the front surface 311a
  • the image of the front surface 311a becomes a point
  • a small ring-shaped back surface image 313 is formed at the boundary of the back surface
  • the focused light reflected at the boundary of the back surface 311b A ring-shaped (annular) surface image 314 larger than the back surface is formed at 311a.
  • the ring-shaped image 313 and the ring-shaped image 314 are separated without overlapping.
  • the condensing point 322 exists on the back surface 311b
  • the image of the back surface 311b becomes a point and reflects to form a small ring-shaped image 323 on the front surface 311a.
  • the focused light reflected by the surface forms a ring-shaped (annular) image 324 larger than the ring-shaped image 323 of the front surface 311a on the back surface 311b.
  • the ring-shaped image 323 and the ring-shaped image 324 do not overlap and are separated, so that when the condensing point 312 exists on the surface 311a while moving the swivel stage 43 in the z-axis direction.
  • the ring-shaped surface image 314 formed on the front surface 311a and the ring-shaped back surface image 324 formed on the back surface 311b when the condensing point 322 exists on the back surface 311b can be efficiently separated from other images. it can.
  • the two local maximum values (peak value) based on the light intensity of the surface image 313 and the back surface image 324 can be detected accurately.
  • the thickness t of the test optical element 37 can be calculated with higher accuracy based on the difference between the z axes corresponding to the two light intensities.
  • FIG. 14A shows a ring-shaped surface image 402 a in which the surface image 314 of FIG. 12 is formed on the light receiving surface of the CCD camera 41. Since the optical element 34 has the ring-shaped transmission hole 34a as described above, the outer virtual region represented by the dotted line in FIG. 14 represents the region where the parallel light beam passes through the transmission hole 43a and is irradiated on the light receiving surface of the CCD camera 41. It can be shown as a passing area 401c sandwiched between an inner virtual line 401b represented by a line 401a and a dotted line.
  • FIG. 14B shows a ring-shaped back surface imaging 402 b in which the back surface image 324 of FIG. 13 is formed on the light receiving surface of the CCD camera 41.
  • the light intensity of the front surface image 324 is not affected by the light intensity of other images. It can be easily detected by the CCD camera 41.
  • the ring-shaped (annular) focused light 314 formed by reflecting on the boundary surface of the back surface 311b is also used when the condensing point 322 exists on the back surface 311b.
  • the inner diameter and the outer shape of the ring-shaped transmission hole 34a are designed so that both the ring-shaped (ring-shaped) focused light 324 reflected and formed on the boundary surface of the back surface 311b forms an image in the range of the passing region 410c.
  • the light intensity when the condensing point 312 exists on the front surface 311a and the light intensity when the condensing point 322 exists on the back surface 311b are set as the maximum value (peak value) of the light intensity change with respect to the z-axis. It can be enlarged and detected effectively.
  • the ring-shaped surface imaging 404a and the ring-shaped back surface imaging 404b formed by the light rays from the front image and the back image are shown in FIG.
  • FIG. 4 and FIG. 16 show graphs of actual measurement results of the optical element 37 (lens having a thickness of 200 ⁇ m).
  • FIG. 4 is a graph of the light intensity with respect to the z axis measured using a light beam having a circular light intensity distribution on the optical axis cross section, that is, without using a ring-shaped (ring-shaped) light beam.
  • FIG. 16 is a graph of the light intensity with respect to the z axis measured using the luminous flux of the ring-shaped (annular) focused light according to the first embodiment of the present invention.
  • the difference between the maximum value and the minimum value of the light intensity read from the graph is “11” in FIG. 4 and “70” in FIG.
  • the processing unit 42 can detect the maximum value (peak) of the two light intensities based on the measurement data, and calculate the difference between the z-axis values of the two maximum values as the measurement value d. it can.
  • the measurement value d calculated using the optical system 30 and the processing unit 42 cannot be used as the thickness t of the test optical element 37 as it is. This is because the focused lights 501a and 501b are refracted at the surface 502a of the test optical element 502, that is, at the interface between the test optical element 502 and air, as shown in FIG.
  • the measurement of the position of point A, which is the focal point of the surface 502a, is not affected by refraction.
  • the measurement of the position of point B, which is the condensing point on the back surface 502b is affected by the refraction of the focused light.
  • the problem is that the measured value d is calculated as being at the point E where the focused light 501a and 501b intersect as the condensing point of the back surface 502b. It is. Therefore, in order to calculate the correct thickness t of the test optical element 37, the measurement value d described above, the converging angle ⁇ 1 of the focused lights 501a and 501b, the curvature radius r of the surface 502a of the test optical element 502, Based on the refractive index n of the material of the test optical element 502, it is necessary to find a mathematical formula that can calculate the thickness t of the test optical element 502.
  • FIG. 17 the focused lights 501a and 501b are incident on the convex optical element 502 to be measured, refracted at points C and F located in the front surface 502a of the optical element 502 to be measured, and in the back surface 502b.
  • FIG. 6 is a diagram showing that light is condensed at a point B.
  • the intersection of the optical axes of the focused light on the front surface 502a is point A
  • the condensing point on the back surface 502b is point B
  • the positions where the focused light 501a and 501b are refracted on the front surface 502a are points C and F
  • the center of curvature of the front surface 502a is pointed.
  • D and the intersection point of the focused light not considering refraction at the surface 502a be point E. From these, the length of the line segment AE corresponds to the measured value d, and the length of the line segment AB corresponds to the thickness t of the optical element.
  • the converging angle is ⁇ 1
  • the angle formed by the line segment BC and the optical axis Z is ⁇ 2
  • the focused light 501a, 501b and the surface 502a the angle of intersection point C or point F and the surface line connecting point D which is the center of curvature of 502a and theta 3.
  • the point D of the center of curvature on the surface of the optical element can be used as the origin of coordinates, and the line segment CE can be expressed as Equation 1, which is an equation of a straight line with a slope a and an intercept b.
  • Equation 4 the surface 502a of the optical element 502 to be tested.
  • Equation 5 The equation for calculating the X coordinate e (expressed as x in Equation 5) of the point C can be expressed as Equation 5 using Equation 1 and Equation 4.
  • the distance e between the point C and the optical axis Z of the focused lights 501a and 501b can be expressed as in Equation 6 from the solution formula.
  • the thickness t can be calculated.
  • Equation 7 which is the angle of the line connecting the intersection point C of the focused light and the surface, and the center of curvature of the surface, is expressed by Equation 7 using the length e and the surface curvature radius r. Can be represented.
  • f which is the y coordinate of the point C
  • f can be expressed as in Expression 8 using ⁇ 3 and the surface curvature radius r, and the surface 502a of the optical element 502 to be tested is based on the Y coordinate of the point C.
  • the distance ⁇ to the uppermost point A can be expressed as shown in Equation 9.
  • Equation 10 Equation 11
  • g which is a distance from the point C to the back surface 502b of the optical element 502 to be tested, can be expressed as in Expression 12.
  • the lens thickness t can be expressed as shown in Equation 13 and can be expressed as shown in Equation 14 using Equations 9 to 13.
  • the measurement value d, the refractive index n of the material of the optical element to be tested, the surface radius of curvature r, and the focused light collection angle ⁇ 1 are calculated. Based on e, it was possible to find a calculation formula that can calculate the lens thickness t of the optical element to be tested.
  • the optical axis of the optical system 30, that is, the focused light optical axis Z and the reference plane 300 of the optical element holder 36 to be tested are perpendicularly projected.
  • the angle between the optical axis of the optical system 30 and the reference plane 300 of the optical element holding unit is measured, and adjustment is performed by the swivel stage 43.
  • the position of the test optical element 37 is adjusted so that the optical axis of the optical system 30 and the optical axis of the test optical element 37 coincide with each other in the xy plane by adjusting the x axis and the y axis of the swivel stage 43. Adjust. Specifically, when the test optical element 37 is arranged on the test optical element holding unit 36 and the focused light is irradiated onto the test optical element 37, the light is reflected from the surface of the test optical element 37 as parallel rays. Then, it passes through the optical system 30 and reaches the autocollimator unit 47 and forms an image on the CCD camera 46.
  • the reflection angle of the parallel light beam reflected from the optical element 37 to be detected is measured so that the spot on the light receiving surface of the CCD camera 46 of the autocollimator unit 47 is minimized with respect to the imaged spot. Adjustment is made by the x-axis and y-axis of the swivel stage 43 on which the optical element holding unit 37 is installed.
  • the optical element 37 to be tested is moved in the z-axis direction, and a ring-shaped image on the light receiving surface of the CCD camera 41 is detected, converted into digital data, and processed.
  • the processing unit 42 stores the z-axis value and measurement data in which the light intensity calculated based on the digital data is associated.
  • the processing unit 42 detects the local maximum values (peaks) of the two light intensities based on the measurement data, and calculates the difference between the z axes of the two local maximum values as the measured value d.
  • the processing unit 42 determines the test based on the measurement value d, the refractive index n of the material of the optical element to be tested, the surface curvature radius r, and e calculated using the converging angle ⁇ 1 of the focused light.
  • the lens thickness t of the optical element is calculated.
  • a second embodiment of the present invention will be described.
  • a plurality of light beams for example, four light beams as shown in FIG. 19 are arranged so as to be included in the cross section of the virtual ring-shaped graphic.
  • the invention can be implemented. If the condensing point 320 exists on the front surface 311a of the optical element 311 to be detected, an image composed of four back images 333a, 333b, 333c, and 333d is formed, reflected on the front surface 311a, and 334a, 334b, 334c, and 334d. An image consisting of is formed. In FIG.
  • the number of the plurality of light beams is not limited as long as it is two or more. Further, regarding the arrangement of each focused light in the region sandwiched between the outer circumference and inner circumferences 335a and 335b of the virtual ring-shaped figure, 0 °, 90 °, 180 ° with respect to the center point of the virtual ring-shaped figure. It is not necessary to be fixedly arranged in the direction of 270 °, and any direction can be selected and is not limited. Further, the distribution of the light intensity or the light amount of each light beam is not limited to the same, and an arbitrary distribution ratio may be selected.
  • the optical element 61 may be used, and an optical element 62 having four circular passage holes as shown in FIG. 20B may be used instead of the optical element 39 of FIG.
  • the optical element 61 has a small-diameter lens 61b arranged at the center of a circular frame 61a, and the center is set as a reference point in directions of 0 °, 90 °, 180 °, and 270 °.
  • the passage holes 61c to 61f are arranged. Further, as shown in FIG.
  • the passage holes 62b to 62e are arranged in directions of 0 °, 90 °, 180 °, and 270 ° with the center of the circular frame 62a as a reference point. It has a structure.
  • the position and diameter of each said through-hole should just be designed corresponding to the number and arrangement
  • FIG. 21 is a diagram showing a state in which focused lights 501a and 501b are incident on an optical element whose front and back surfaces of the test optical element 512 are flat, refracted at the front surface 512a, and condensed at the back surface 512b.
  • the collection angle is ⁇ 1 and the angle refracted on the surface is ⁇ 6 .
  • Equation 15 the relationship between ⁇ 1 and ⁇ 6 can be expressed as Equation 15, and by transforming Equation 15, ⁇ 6 can be expressed as Equation 16.
  • the thickness t of the flat plate can be expressed as in Expression 19 using Expression 17 and Expression 18.
  • the flat plate is formed based on the measured value d, the refractive index n of the optical element material, and the focused light converging angle ⁇ 1.
  • the thickness t can be calculated.
  • an optical element of the apparatus of the present invention is measured by measuring a measured value d for an optical element 522 having a refractive index n and a known thickness t and whose front and back surfaces are parallel.
  • a method for determining the converging angle ⁇ 1 of the focused light which is a setting value unique to the thickness measuring apparatus, will be described.
  • a glass plate may be used for the test optical element 522.
  • sin ⁇ 1 and sin ⁇ 6 can be expressed as in Expression 20 and Expression 21, respectively, and by substituting into Expression 15 described above, a relationship as shown in Expression 22 can be found.
  • the converging angle of the focused light from the measured value d, the refractive index n of the material of the optical element, and the known thickness t of the optical element. ⁇ 1 can be calculated. Since the condensing angle ⁇ 1 is a setting value unique to the optical element thickness measuring apparatus of the present invention, the present invention can be obtained by performing inspection work such as adjusting the apparatus so as to obtain the condensing angle ⁇ 1 specific to the apparatus. It can be used for calibration of the optical element thickness measuring apparatus.
  • the lens surface deviation amount measuring apparatus irradiates the ring-shaped focused light and the vicinity of the center of the lens to be examined as seen from the optical axis of the reflected light sensor unit. Simultaneously radiate parallel rays, adjust the lens center axis of the test lens (normal line of the first surface of the test lens) to match the optical axis of the reflected light sensor unit, and pass through the test lens By measuring the position of the condensing point, it is possible to measure the amount of surface deviation of the test lens without rotating the test lens.
  • the surface deviation amount of the lens to be measured (test optical element) measured by the lens surface deviation measurement apparatus (optical element characteristic measurement apparatus) of the present invention is defined with reference to FIG.
  • the test lens 20 is installed in the test lens holder 112.
  • the upper surface of the lens holding unit 111 is set as a reference plane LS.
  • the spherical center (center point of the first surface) CN1 of the first surface is on the normal line LN1 of the first lens surface 20a perpendicular to the reference plane LS, and the reference plane LS is on the reference plane LS.
  • the arrangement is such that the spherical center (center point of the second surface) CN2 of the second surface is on the normal line LN2 of the second surface 110b of the vertical test lens.
  • the lens holder holding stage portion 23 is configured to support the test lens holding portion 111 that holds the lens holder 22, and the reference plane LS is secured.
  • the distance between the normal line of the first surface (front surface) 110a perpendicular to the reference plane LS and the normal line of the second surface (back surface) 110b of the lens to be measured is the amount of surface deviation ⁇ . 2 .
  • the normal line LN1 of the first lens surface 110a is defined as the lens central axis of the lens to be tested.
  • FIG. 23 shows a block diagram of a lens surface deviation amount measuring apparatus (optical element characteristic measuring apparatus) in the fourth embodiment of the present invention.
  • the outline of the configuration of the lens surface deviation measuring apparatus will be described below with reference to a block diagram.
  • the lens surface deviation amount measuring apparatus 120 of the present invention holds a test lens holder 121 on which a test lens 121a is installed, a test lens holder 121, and moves it in three axial directions.
  • a lens holder holding mechanism stage unit 122 that is fixed to a stage that can be rotated (tilted) along one axis, and a reflected light sensor unit that measures the angle of the light beam reflected by the lens 121a with respect to the optical axis.
  • 124 is moved in three axial directions, and the transmitted light sensor unit is fixed to a stage that can rotate (tilt) along two axes.
  • a data processing unit 125 that calculates the amount of surface deviation of the lens 121a based on the outputs of the mechanism stage unit 124c, the reflected light sensor unit autocollimator 123b, the transmitted light sensor unit autocollimator 124a, and the optical sensor unit 124b, and data processing
  • the monitor 125 is configured to display the surface deviation amount calculated by the unit 125.
  • FIG. 24 a detailed configuration diagram of the lens surface deviation measuring device 30 is shown in FIG. 24 and will be described with reference to the configuration diagram.
  • the lens surface deviation amount measuring device 130 is a lens holder holding mechanism capable of moving in five axes (X, Y, Z, ⁇ , ⁇ ) having a reference plane for holding a test lens holder 131b for fixing the test lens 131a.
  • a test part 130a having a stage part 131c and an autocollimator function for irradiating the test lens 131a with ring-shaped focused light and measuring the reflected light angle from the first surface of the test lens with respect to the lens central axis are incorporated.
  • the reflected light sensor unit 130b the function of detecting the condensing point position of the transmitted light beam through which the parallel light beam irradiated simultaneously with the ring-shaped focused light from the reflected light sensor unit 130b passes through the lens 131a, and the lens central axis
  • a transmitted light sensor unit 130c incorporating an autocollimator function for measuring the angle of transmitted light with respect to the light beam, and five axes (X, Y, Z, ⁇ , Data processing having a movable stage unit 139, a function of calculating the amount of surface deviation from the measurement processing of each autocollimator described above and the focal point position data, and a function of calculating the amount of surface deviation from the angle of transmitted light It comprises a part 130d and a display part 30e.
  • the lens holder holding mechanism stage portion 131c includes a test lens holding portion (not shown) having a reference plane, and a swivel stage may be used.
  • the light source unit 132 includes a light source (for example, a laser diode) 132a and a lens (focal length f2) 132b, and emits parallel rays. Then, an optical element 133 that converts the light beam emitted from the light source unit 132 into a ring-shaped light beam and a condensed light beam is disposed in the reflected light sensor unit 130b. Then, a lens (focal length f4) 134 for converting the ring-shaped light beam into the focused light and converting the light beam collected at the point C into the parallel light beam is disposed, and irradiates the lens 131a to be examined.
  • a light source for example, a laser diode
  • An optical element is disposed immediately before the light beam reflected from the test lens 131a enters the reflected light sensor unit autocollimator unit 136.
  • the shapes of the optical elements 133 and 135 are shown in FIGS. 25A and 25B, respectively.
  • the optical element 133 has a structure in which the inner ring-shaped component 133g is arranged at the center of the outer ring-shaped component 133h, thereby forming a ring-shaped transmission hole 133a, and a diameter within a predetermined range with respect to incident light.
  • the ring-shaped light beam is transmitted.
  • a small-diameter lens 133b having a focal length f5 is disposed near the center, and has a function of using parallel rays as focused light.
  • a ring-shaped part 133g is arranged as a frame for supporting the small-diameter lens 133b, and support parts 133c to 133f are arranged between the frame part 133g and the frame part 133h because they are a transmission hole 133a, that is, a space.
  • the optical element 135 has a structure in which a transmission hole 135a through which a light beam passes is arranged at the center of the outer frame 135b.
  • a plane mirror (not shown) is installed on the reference plane LS of the test lens holder 131b. . Then, the parallel light emitted from the reflected light sensor unit 130b is reflected, and the reflected light sensor unit autocollimator 136 including the lens (focal length f7) 136a and the reflected light sensor unit light receiving device 136b in the reflected light sensor unit 130b. Measure the angle of the reflected beam. Then, the lens holder holding mechanism stage 131c adjusts the angle to 0 degrees with respect to the optical axis of the reflected light sensor 30b.
  • the transmitted light sensor unit autocollimator 138 and the transmitted light sensor unit of the transmitted light sensor unit 130c are adjusted by adjusting the position on the XY plane of the transmitted light sensor unit 130c with respect to the optical axis of the reflected light sensor unit 130b.
  • the origin of the optical system 137 (light receiving element for detecting the focal point position) is determined.
  • FIG. 26 shows the state of the optical path 146 of the ring-shaped focused light 145a, the ring-shaped reflected light beam 145b, and the parallel light beam that passes through the vicinity of the lens central axis.
  • the adjustment lens 142 is set in the lens holder 143 with the convex surface of the adjustment lens 142 facing the reflected light sensor unit 141a.
  • the position on the light receiving element can be stored in the data processing unit 140c as an origin, and the XY position that is the origin of the reflected light sensor unit 141a and the transmitted light sensor unit 141b can be fixed.
  • the lens central axis (of the adjustment lens 42) is made to coincide with the optical axis of the reflected light sensor unit 141a, and the optical path 146 of the parallel light beam is irradiated near the lens center (of the adjustment lens 142). So that
  • the optical axis of the reflected light sensor unit 130b and the reference plane LS of the test lens holding unit (not shown) that holds the test lens holder 131b are brought out vertically.
  • a plane mirror is set on the lens holder 131b to reflect the parallel light rays emitted from the reflected light sensor unit 130b.
  • the angle with respect to an optical axis is measured by the reflected light sensor part autocollimator 36 of the reflected light sensor part 30b. Based on the measured angle, the angle of the test lens holder (not shown) that holds the test lens holder 131b is adjusted to be 0 degree with respect to the optical axis of the reflected light sensor unit 130b.
  • the test lens holding unit holds the test lens holder 131b and forms the reference plane LS in the same manner as the test lens holding unit 111 described above.
  • the autocollimator 136 of the reflected light sensor unit 130b measures the angle of the reflected light beam from the test lens 131a, and the lens holder holding mechanism stage unit 131c that holds the test lens holding unit 131b so that the measurement angle becomes 0 degrees.
  • the optical axis of the reflected light sensor unit 130b (the optical axis of the ring-shaped focused light irradiated from the reflected light sensor unit 130b) coincide with the center axis of the lens It is.
  • the state in which the optical axis of the reflected light beam in the test lens is reflected as a parallel light beam that does not coincide with the central axis of the first surface of the test lens, that is, is not adjusted.
  • FIG. 28 shows a state in which the optical axis of the reflected light beam in the lens to be examined is reflected as a parallel light beam that matches the central axis of the first surface of the lens to be examined, that is, the adjusted state.
  • test lens 150 is mounted on the test lens holder 151 (dedicated lens holder for the test lens) and placed on the reference plane LS of the test lens holding portion (not shown).
  • the focus point position FP1 where the ring-shaped focused lights 152a and 152b irradiated from the reflected light sensor unit 130b are focused is determined as the test lens. It is moved to an intermediate position between the first surface 150a and the ball center CN1 of the first lens surface 150a to be examined. As a result, the reflected light beams 152c and 152d from the first lens surface 150a become parallel light beams and enter the reflected light sensor unit 30b. The parallel light is further reflected by 90 degrees at the half mirror 32c, and is incident on the reflected light sensor unit autocollimator unit 136 of the reflected light sensor unit 130b.
  • the reflected light sensor unit autocollimator unit 136 can measure the angle ⁇ 0 between the parallel light beam and the lens central axis (the normal line of the first lens surface to be examined). Then, based on this angle ⁇ 0 , the in-plane XY of the lens holder 131b between the condensing point position FP1 where the focused light beam is focused and the lens central axis (normal line of the first surface of the lens to be tested) LZ. The amount of deviation can be calculated.
  • the lens holder holding mechanism stage 131c is adjusted by moving it in the XY plane, and the lens center axis is the optical axis of the lens surface deviation amount measuring device, that is, the optical axis of the ring-shaped focused light. Match.
  • the lens center axis is the optical axis of the lens surface deviation amount measuring device, that is, the optical axis of the ring-shaped focused light. Match.
  • the lens surface deviation measuring device 130 uses the optical axis of the parallel light emitted from the reflected light sensor unit 130b as a reference axis, and the optical axes of the lens holder holding unit 131b and the transmitted light sensor unit 130c. By adjusting the respective stage mechanisms (the lens holder holding mechanism stage portion 131c and the transmitted light sensor portion holding mechanism stage portion 139), the optical axis alignment of the entire lens surface deviation amount measuring device can be performed.
  • the condensing point FP1 of the ring-shaped focused light (converged light) irradiated by the reflected light sensor unit 130b is set between the spherical center CN1 of the first lens surface and the first lens surface 150a. Then, the lens holder holding mechanism stage 131c is moved in the Z-axis direction. In this state, the lens holder holding mechanism stage portion 131c is not adjusted on the XY plane, and as shown in FIG.
  • the optical axis LF of the focused light 152a, 152b and the center axis of the lens (the method of the first surface of the lens to be tested) line) LZ and distance (deviate XY displacement amount) L 1, reflective light 152c, 152d are inclined with respect to the central axis LZ of the lens.
  • the lens holder holding mechanism stage 131c is set so that the reflected light rays 152c and 152d from the lens first surface 150a become light rays parallel to the central axis LZ (normal line of the first lens surface to be examined) LZ.
  • the distance (XY deviation amount) L 1 is expressed as Equation 25.
  • the angle ⁇ 0 is measured by the autocollimator of the reflected light sensor unit.
  • the angle theta 0 is 0 degrees
  • the optical axes of the parallel light beams 162c and 162d reflected by the focused lights 162a and 162b on the first lens surface 150a are changed to the central axis of the first lens surface to be tested. Can be matched.
  • FIG. 29 shows the shape of the ring-shaped focused light 180a and the ring-shaped intensity distribution 180b irradiated to the test lens 150 from the reflected light sensor unit 130b or 141a, respectively.
  • the light beam has a ring-shaped intensity distribution 180b on a plane perpendicular to the optical axis of the focused light 180a.
  • a state in which the light is reflected as a parallel light beam 181a maintaining a ring-shaped intensity distribution 181b on the first lens surface 150a is shown.
  • Lens surface deviation amount measuring apparatus An initial setting method of the apparatus 130, particularly, adjustment of the optical axis angle of the transmitted light sensor unit 130c will be described.
  • the optical axis of the transmitted light sensor unit 130c is used as a reference for the optical axis of the light beam emitted from the reflected light sensor unit 130b.
  • the light beam from the reflected light sensor unit 130b is converted into a parallel light beam by the lens 138a, and the parallel light beam enters the transmitted light sensor unit optical system 137.
  • the transmitted light sensor unit holding mechanism stage unit 139 of the transmitted light sensor unit 130c is moved to adjust the optical axis angle of the transmitted light sensor unit 130c to 0 degree.
  • the transmitted light sensor unit holding mechanism stage unit 139 may use a swivel stage.
  • the surface deviation amount ⁇ 2 of the test lens is obtained from the measured value of the refraction angle ⁇ 1 of the transmitted light of the test lens 150 as shown in FIG.
  • a method for calculating the value will be briefly described.
  • Parallel beam Li in parallel to the lens center axis to the sample lens 150 is incident, the second surface 150b of the lens, due to surface deviation amount delta 2 generated in the test lens 150, parallel light Li is refracted
  • FIG. 30 shows the state of the above.
  • the transmitted light sensor optical system 137 is used to measure the refracted angle ⁇ 1 as shown in FIG.
  • the transmitted light sensor unit optical system 137 includes a lens (focal length f11) 137a and a transmitted light sensor unit light receiving device 137b. Then, the light beam that has passed through the test lens 150 is once condensed at point D as shown in FIG. 24, then becomes a parallel light beam by the action of the lens (focal length f10) 138a, and passes through the half mirror 138c. Then, the light beam is condensed in the transmitted light sensor unit light receiving device 137b by the action of the subsequent lens (focal length f11) 137a.
  • a condensing point position is detectable by the transmitted light sensor part light-receiving device 137b.
  • the position of the point D and the focal point position are in an imaging relationship.
  • the data processing unit can measure ⁇ 1 based on the XY position data of the condensing point position.
  • a distance B (hereinafter referred to as “back focus B” or simply “B”) from the lowest point of the second surface of the test lens to the condensing point is calculated as described later. It is calculated using an equation. Then, at the focal position of the lens 150, to measure the XY position of the focal point of the parallel rays, by setting the origin on the lens center axis LZ based on XY position, it calculates the amount of deviation delta 1. Next, the angle ⁇ 1 at which the laser incident parallel light beam transmitted through the second surface 150 b of the lens 150 to be tested is refracted with respect to the lens central axis LZ is calculated using the shift amount ⁇ 1 and the back focus B.
  • a distance B (hereinafter referred to as “back focus B” or simply “B”) from the lowest point of the second surface of the test lens to the condensing point is calculated as described later. It is calculated using an equation. Then, at the focal position of the lens 150, to measure the XY position of the focal point of the parallel rays, by setting the origin on the lens center axis LZ based on XY position, it calculates the amount of deviation delta 1. Next, the angle ⁇ 1 at which the laser incident parallel light beam transmitted through the second surface 150 b of the lens 150 to be tested is refracted with respect to the lens central axis LZ is calculated using the shift amount ⁇ 1 and the back focus B.
  • the lens surface deviation amount measuring apparatus 130 measures the amount of surface deviation ⁇ 2 using the transmitted light near the center of the lens 131a. For this reason, since the transmitted light passes through the paraxial axis of the lens to be examined, the following calculation is performed by paraxial approximation.
  • the back focus B of the test lens 150 can be calculated by the following Expression 26.
  • the laser incident parallel light beam transmitted through the second surface of the test lens 150 is refracted at an angle ⁇ 1 with respect to the lens central axis.
  • the angle ⁇ 1 can be expressed as Equation 27 using the shift amount ⁇ 1 and the back focus B based on the geometric arrangement.
  • Equation 29 ⁇ 1 is deleted, and Equation 27 is transformed into Equation 30.
  • Equation 31 the surface deviation amount ⁇ 2 can be expressed as shown in Equation 31 from the geometrical arrangement.
  • equation 30 By substituting equation 30 into equation 31, it can be transformed into equation 32.
  • target lens is a convex lens, either concave lens.
  • the surface deviation amount ⁇ 2 can be calculated even using ring-shaped focused light.
  • the condensing point of the ring-shaped focused light diffuses from a focal point FF (hereinafter referred to as “front focal position”) located on the first lens surface side (reflected light sensor side).
  • front focal position located on the first lens surface side (reflected light sensor side).
  • the surface deviation amount ⁇ 2 can be calculated from ⁇ 1 ′.
  • ⁇ 1 ′ is an angle between the parallel light beam LB emitted from the second surface 150b of the lens to be examined and the lens central axis LZ. Therefore, ⁇ 1 ′ can be measured using the transmitted light sensor unit 130c.
  • the transmitted light sensor unit autocollimator 138 since the lens central axis LZ is 0 degree as a reference, the transmitted light sensor unit autocollimator 138 obtains ⁇ 1 ′ as a measured value.
  • the transmitted light sensor unit autocollimator 138 includes a lens (focal length f10) 138a, a transmitted light sensor unit light receiving device 138b, and a half mirror 138c.
  • the parallel light beam LB transmitted through the test lens 150 is condensed by the transmitted light sensor unit autocollimator light receiving device 138b through the half mirror 138c by the action of the lens (focal length f10) 138a. Therefore, the condensing point position can be detected using the transmitted light sensor unit autocollimator light receiving device 138b.
  • the data processing unit can measure ⁇ 1 ′ based on the XY position data of the condensing point position.
  • shift amount (DELTA) 2 using several 10 the to-be-tested lens is restricted to a convex lens.
  • the light intensity distribution is applied to the ring-shaped focused light and the vicinity of the center of the lens to be measured as viewed from the optical axis of the reflected light sensor unit. Simultaneously irradiate with the parallel light beam, adjust the lens center axis of the test lens (normal line of the first surface of the test lens) to match the optical axis of the reflected light sensor unit, and transmit the test lens By measuring the condensing point position of the light beam, it is possible to measure the amount of surface deviation of the test lens without rotating the test lens.
  • the diffused light is irradiated from the above-mentioned front focal position in the test lens.
  • the lens rotation mechanism to be tested is unnecessary, so that the measurement time can be shortened with a simpler configuration than the conventional apparatus.
  • the characteristic value of the test lens is obtained by simultaneously irradiating the convergent light having a ring-shaped light intensity distribution and the parallel light irradiated near the center of the test lens, as viewed from the optical axis of the reflected light sensor unit.
  • an apparatus for measuring the thickness of a thin test lens of 200 ⁇ m or less or an adjustment so that the lens central axis of the test lens (the normal of the first surface of the test lens) is aligned with the optical axis of the reflected light sensor unit
  • the test lens is not rotated. This can be applied to measuring the amount of lens surface deviation.

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

Le problème décrit par l'invention est de fournir un dispositif permettant : d'émettre simultanément des rayons lumineux convergents présentant une distribution d'intensité lumineuse en forme d'anneau et des rayons lumineux parallèles qui rayonnent à proximité du centre d'une lentille testée, lorsqu'on les observe depuis l'axe optique d'une unité capteur de lumière réfléchie ; et de mesurer les valeurs caractéristiques de la lentille testée. En outre, pour fournir un dispositif de mesure du degré de défaut d'alignement de la surface d'une lentille, le dispositif mesure la position de condensation de lumière de rayons lumineux convergents en forme d'anneau qui ont traversé la lentille testée ou de rayons lumineux parallèles qui rayonnent à proximité du centre de la lentille testée, étant par là-même possible de mesurer le degré de défaut d'alignement de la surface de la lentille testée, sans faire tourner la lentille testée. La solution selon l'invention porte sur un dispositif de mesure des caractéristiques d'un élément optique, pourvu d'une unité de rayonnement de rayons lumineux convergents en forme d'anneau permettant de soumettre un élément optique testé à un rayonnement de rayons lumineux convergents qui ont une distribution d'intensité de lumière en forme d'anneau et de rayons lumineux parallèles, les caractéristiques de forme de l'élément optique testé étant mesurées par analyse de l'intensité ou du trajet optique des rayons lumineux qui ont traversé l'élément optique testé ou qui ont été réfléchis à partir de la surface avers ou de la surface revers de l'élément optique testé, la surface avers étant la surface de l'élément optique testé la plus proche de l'unité de rayonnement de rayons lumineux convergents en forme d'anneau, et la surface revers étant la surface opposée à la surface avers.
PCT/JP2016/069774 2015-10-23 2016-07-04 Dispositif de mesure de caractéristiques d'élément optique WO2017068813A1 (fr)

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CN201680059885.XA CN108139205B (zh) 2015-10-23 2016-07-04 光学元件特性测定装置
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