CN108139205B - 光学元件特性测定装置 - Google Patents
光学元件特性测定装置 Download PDFInfo
- Publication number
- CN108139205B CN108139205B CN201680059885.XA CN201680059885A CN108139205B CN 108139205 B CN108139205 B CN 108139205B CN 201680059885 A CN201680059885 A CN 201680059885A CN 108139205 B CN108139205 B CN 108139205B
- Authority
- CN
- China
- Prior art keywords
- optical element
- light
- inspected
- lens
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015-209258 | 2015-10-23 | ||
JP2015209258 | 2015-10-23 | ||
JP2016091259 | 2016-04-28 | ||
JP2016-091259 | 2016-04-28 | ||
PCT/JP2016/069774 WO2017068813A1 (fr) | 2015-10-23 | 2016-07-04 | Dispositif de mesure de caractéristiques d'élément optique |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108139205A CN108139205A (zh) | 2018-06-08 |
CN108139205B true CN108139205B (zh) | 2020-01-03 |
Family
ID=58557193
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201680059885.XA Active CN108139205B (zh) | 2015-10-23 | 2016-07-04 | 光学元件特性测定装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6218261B2 (fr) |
KR (1) | KR102587880B1 (fr) |
CN (1) | CN108139205B (fr) |
TW (1) | TWI649535B (fr) |
WO (1) | WO2017068813A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102198274B1 (ko) * | 2019-06-27 | 2021-01-04 | 주식회사 엠아이텍 | 곡면 및 평면 틸트 측정이 가능한 오토콜리메이터와 이를 이용한 핸드폰용 카메라 렌즈 구동검사기 |
US20230236085A1 (en) * | 2022-01-26 | 2023-07-27 | Oren Aharon | Non Rotating Lens Centering Device |
CN114894712B (zh) * | 2022-03-25 | 2023-08-25 | 业成科技(成都)有限公司 | 光学量测设备及其校正方法 |
CN116793231B (zh) * | 2023-07-03 | 2024-06-07 | 深圳市易显传感技术有限公司 | 镜片厚度检测方法和装置 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS568081Y2 (fr) * | 1978-11-24 | 1981-02-23 | ||
JPS6370110A (ja) * | 1986-09-12 | 1988-03-30 | Canon Inc | 距離測定装置 |
JPS6370110U (fr) * | 1986-10-27 | 1988-05-11 | ||
JPH0674968B2 (ja) | 1988-03-15 | 1994-09-21 | 三菱電機株式会社 | 光学式測定装置 |
EP0561178B1 (fr) * | 1992-03-14 | 1997-10-29 | Roke Manor Research Limited | Mesure de la curvature d'une surface |
GB9205655D0 (en) * | 1992-03-14 | 1992-04-29 | Roke Manor Research | Improvements in or relating to surface curvature measurement |
JPH09101116A (ja) * | 1995-10-05 | 1997-04-15 | Hitachi Ltd | 自動焦点合わせ方法及びその装置並びにパターン検出方法及びその装置 |
JP3799708B2 (ja) | 1996-12-24 | 2006-07-19 | 松下電工株式会社 | 光学式変位測定システム |
JP3374736B2 (ja) * | 1997-12-16 | 2003-02-10 | ミノルタ株式会社 | レンズ調整装置 |
JP4307764B2 (ja) * | 2001-07-27 | 2009-08-05 | パイオニア株式会社 | 光ピックアップ装置 |
JP2005090962A (ja) * | 2003-09-11 | 2005-04-07 | Ricoh Co Ltd | 光学素子の測定方法および測定装置 |
US7667829B2 (en) * | 2004-08-09 | 2010-02-23 | Nikon Corporation | Optical property measurement apparatus and optical property measurement method, exposure apparatus and exposure method, and device manufacturing method |
JP2007206031A (ja) | 2006-02-06 | 2007-08-16 | Paerl Optical Industry Co Ltd | 透過式偏心測定装置 |
JP4774332B2 (ja) | 2006-06-06 | 2011-09-14 | 富士フイルム株式会社 | 偏芯量測定方法 |
JP5084327B2 (ja) * | 2007-04-04 | 2012-11-28 | オリンパス株式会社 | 偏心検査装置及び偏心調整装置 |
JP4943946B2 (ja) | 2007-06-04 | 2012-05-30 | 富士フイルム株式会社 | 偏芯量測定装置 |
CN201096611Y (zh) * | 2007-11-08 | 2008-08-06 | 西安工业大学 | 一种非球面透镜的偏心测量装置 |
KR100947464B1 (ko) * | 2008-02-13 | 2010-03-17 | 에스엔유 프리시젼 주식회사 | 두께 측정장치 |
JP2009229144A (ja) * | 2008-03-19 | 2009-10-08 | Olympus Corp | 偏心測定機 |
JP5540614B2 (ja) * | 2009-09-08 | 2014-07-02 | コニカミノルタ株式会社 | オートコリメータを用いた光学素子の偏心調整方法及び偏心測定方法、並びにレンズ加工方法 |
CN101788271A (zh) * | 2010-03-17 | 2010-07-28 | 北京理工大学 | 共焦透镜中心厚度测量方法与装置 |
CN102822656B (zh) * | 2010-04-13 | 2016-05-11 | 柯尼卡美能达先进多层薄膜株式会社 | 偏心量测量方法 |
CN101922919B (zh) * | 2010-09-07 | 2013-06-19 | 西安工业大学 | 一种光学零件几何参数非接触测量方法及其测量装置 |
JP6087754B2 (ja) * | 2013-07-09 | 2017-03-01 | シャープ株式会社 | レンズチルト検出装置 |
KR101537854B1 (ko) * | 2013-09-23 | 2015-07-21 | 에스엔유 프리시젼 주식회사 | 두께 측정 장치 및 이를 이용한 두께 측정 방법 |
-
2016
- 2016-07-04 WO PCT/JP2016/069774 patent/WO2017068813A1/fr active Application Filing
- 2016-07-04 JP JP2017515869A patent/JP6218261B2/ja active Active
- 2016-07-04 KR KR1020187006824A patent/KR102587880B1/ko active IP Right Grant
- 2016-07-04 CN CN201680059885.XA patent/CN108139205B/zh active Active
- 2016-10-20 TW TW105133835A patent/TWI649535B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20180071249A (ko) | 2018-06-27 |
TWI649535B (zh) | 2019-02-01 |
WO2017068813A1 (fr) | 2017-04-27 |
CN108139205A (zh) | 2018-06-08 |
JP6218261B2 (ja) | 2017-10-25 |
JPWO2017068813A1 (ja) | 2017-10-19 |
KR102587880B1 (ko) | 2023-10-10 |
TW201728870A (zh) | 2017-08-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110045386B (zh) | 用于光检测与测距光学对准的方法与系统 | |
JP6818702B2 (ja) | 光学検査装置及び光学検査方法 | |
CN108139205B (zh) | 光学元件特性测定装置 | |
US10864570B2 (en) | Bending angle measuring apparatus and method for measuring a bending angle by means of the bending angle measuring apparatus | |
JP2008541101A (ja) | 物体の表面測定装置およびその表面測定方法 | |
CN106323199B (zh) | 组合调零激光大工作距自准直装置与方法 | |
JPWO2008072369A1 (ja) | 測定装置および測定方法 | |
KR20100133409A (ko) | 기준구 검출 장치, 기준구 위치 검출 장치 및 3차원 좌표 측정 장치 | |
KR20140019227A (ko) | 이미지 센서 포지셔닝 장치 및 방법 | |
JP2001021449A (ja) | 光学物体の光学特性の自動非接触測定のための方法およびシステム | |
WO2006028183A1 (fr) | Dispositif de réglage de système de lentille et procédé de réglage de système de lentille utilisant celui-ci, et dispositif de fabrication pour dispositif d’imagerie et procédé de fabrication de dispositif d’imagerie | |
US9239237B2 (en) | Optical alignment apparatus and methodology for a video based metrology tool | |
CN109358435B (zh) | 一种双远心镜头垂直度的调整装置和调整方法 | |
WO2016031935A1 (fr) | Dispositif de mesure de forme de surface | |
CN106017364B (zh) | 一种高精度激光大工作距自准直装置与方法 | |
JP7076586B2 (ja) | 撮像装置 | |
JP2008256689A (ja) | 表面傾斜センサおよび検出方法 | |
JP2009229144A (ja) | 偏心測定機 | |
CN106017441B (zh) | 一种便携式高精度激光大工作距自准直装置与方法 | |
JP2007240168A (ja) | 検査装置 | |
JP2003177292A (ja) | レンズの調整装置および調整方法 | |
CN106052659B (zh) | 一种便携式激光大工作距自准直装置与方法 | |
CN106225731B (zh) | 组合调零高精度激光大工作距自准直装置与方法 | |
JP2018189517A (ja) | 計測装置、および物品製造方法 | |
JP7289780B2 (ja) | 偏芯計測方法および偏芯計測装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |