WO2017002535A1 - Dispositif de mesure - Google Patents

Dispositif de mesure Download PDF

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Publication number
WO2017002535A1
WO2017002535A1 PCT/JP2016/066636 JP2016066636W WO2017002535A1 WO 2017002535 A1 WO2017002535 A1 WO 2017002535A1 JP 2016066636 W JP2016066636 W JP 2016066636W WO 2017002535 A1 WO2017002535 A1 WO 2017002535A1
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Prior art keywords
spectrum
light
sample
discrete
frequency
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PCT/JP2016/066636
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English (en)
Japanese (ja)
Inventor
安井　武史
岩田　哲郎
水谷　康弘
丈夫 南川
宜達 謝
栄治 長谷
裕紹 山本
Original Assignee
国立大学法人徳島大学
国立大学法人宇都宮大学
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Priority to JP2017526246A priority Critical patent/JPWO2017002535A1/ja
Publication of WO2017002535A1 publication Critical patent/WO2017002535A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes

Definitions

  • the present invention relates to a measuring device.
  • This application claims priority based on Japanese Patent Application No. 2015-130249 filed in Japan on June 29, 2015, the contents of which are incorporated herein by reference.
  • a microscope equipped with a confocal optical system (hereinafter referred to as a confocal microscope) is known as an optical microscope that enables high-resolution imaging (see, for example, Patent Document 1).
  • a predetermined range of a sample is uniformly irradiated, whereas in a confocal optical system, irradiation light emitted from a point light source is condensed on one point of the sample by an objective lens.
  • the irradiation light laser light having excellent monochromaticity and straightness is used.
  • a pinhole is arranged at a position conjugate with the focal position of the objective lens, so that only transmitted light or reflected light (or fluorescence, Raman scattered light, etc.) at a position in focus on the sample is used. Is detected through the pinhole.
  • the irradiation light is first condensed at one point of the sample, and the transmitted light or reflected light at the focal position of the sample passes through the pinhole, whereas the light from other than the focal position is pinhole. It is cut with. Therefore, compared with a normal optical microscope, the contrast is improved without being affected by stray light from the lateral direction adjacent to the focal point. Furthermore, since only information on the focal position of the irradiation light is detected, it has a three-dimensional spatial resolution.
  • the confocal microscope that can form a clear three-dimensional image as described above is used in a wide range of fields, such as a bio field such as life function analysis using a fluorescent protein.
  • the confocal microscope is expected to become more important in the future because of its high resolution and quantitativeness.
  • the confocal microscope can only obtain point information of the focal position. Therefore, in order to image two-dimensional information in the sample surface, it is necessary to relatively scan the focal position of the irradiation light emitted from the point light source within the sample.
  • a galvanometer mirror is known as a scanning device that can relatively scan the focal position of irradiation light with respect to a sample.
  • these scanning devices it takes time to scan a wide range at a high speed.
  • Patent Document 2 discloses a transmission confocal microscope in which focus scanning units are provided before and after an inspection target (sample).
  • This scanning unit includes a rotating polyhedral mirror that swings the angle of light from the light source and scans the focal position of the inspection object via the objective lens.
  • the rotating polyhedral mirrors of the first and second scanning units provided before and after the sample are operable in synchronization.
  • the present invention has been made to solve the above-described problems, and provides a measuring apparatus capable of acquiring sample information at high speed while maintaining high accuracy and without requiring mechanical scanning.
  • the measuring device of the present invention includes a point light source that emits a discrete spectrum light including two or more spectra distributed at different frequencies, and a wavelength of the discrete spectrum light emitted from the point light source in a different direction for each spectrum.
  • the dispersion part to disperse, the light collecting part for condensing the spectrum wavelength-dispersed by the dispersion part at different positions of the sample, and the spectrum collected by the light collecting part are different from each other.
  • a superimposing unit that spatially superimposes each spectrum transmitted or reflected from a position, and discrete spectral light including information on the sample superimposed by the superimposing unit, of the spectrum that has been wavelength-dispersed by the dispersing unit.
  • the confocal effect is obtained by focusing light at a position conjugate with the light collecting position on the sample and spatial filtering.
  • spatial filtering optics to obtain, for the discrete spectrum light including information of the sample that is spatially filtered by the spatial filtering optics, a detection unit for acquiring a mode decomposition spectra, characterized in that it comprises.
  • mode-resolved spectrum refers to a spectrum that can be individually separated from discrete spectrum light.
  • the measurement apparatus according to the present invention can acquire only a mode-resolved spectrum (hereinafter referred to as a mode-resolved intensity spectrum) of intensity (square of amplitude).
  • the measurement apparatus can acquire a mode-resolved spectrum of amplitude and phase (hereinafter, a mode-resolved amplitude spectrum and a mode-resolved phase spectrum).
  • a mode-resolved amplitude spectrum and a mode-resolved phase spectrum a mode-resolved spectrum of amplitude and phase
  • mode-resolved spectrum a mode-resolved spectrum of amplitude and phase
  • two or more spectra included in the discrete spectrum light are wavelength-dispersed in different directions by a single irradiation of the discrete spectrum light to the dispersion portion, and are condensed at different positions on the sample. Accordingly, two or more spectra that are independent of each other can be simultaneously focused on the sample.
  • “independent” indicates that the sample information can be uniquely included in other spectra by being distributed at different frequencies. Therefore, the information of the sample at the condensing position of the spectrum is added to each of the two or more spectra.
  • the mode-resolved spectrum to which the image information of the sample is added in this way can be spatially filtered by the spatial filtering optical system and added with the confocal effect, and then detected by the detection unit.
  • the frequency interval of the spectrum adjacent to the frequency position on the frequency axis is a second adjacent frequency interval different from the first adjacent frequency interval
  • the second adjacent frequency interval is A second comb light source that emits a second optical frequency comb spectrum that is coincident with each other
  • the detection unit is generated by causing the first optical frequency comb spectrum and the second optical frequency comb spectrum to interfere with each other
  • the mode-resolved spectrum may be acquired based on an interference signal (interference spectrum or interferogram) (dual optical comb spectroscopy).
  • the interference spectrum is an optical beat spectrum of the first and second optical frequency comb spectra obtained by frequency downscaling the first optical frequency comb spectrum.
  • a mode-resolved phase spectrum can be acquired in addition to the mode-resolved amplitude spectrum.
  • the dispersive unit includes a dispersive element that spatially separates incident light for each wavelength, and the discrete spectrum light emitted from the point light source has different directions depending on the spectrum by the dispersive element.
  • the superimposing unit may spatially superimpose a spectrum including information on the sample transmitted through the sample.
  • the dispersion unit and the superposition unit share one dispersion element that wavelength-disperses incident light, and the discrete spectrum light emitted from the point light source has different directions for each spectrum by the one dispersion element. And a spectrum including information of the sample reflected from the sample may be spatially superimposed.
  • each spectrum when discrete light is irradiated once on the dispersive element, each spectrum is wavelength-dispersed at a dispersion angle depending on the optical frequency (wavelength) of the spectrum. That is, two or more spectra distributed at different optical frequencies can be simultaneously dispersed in different directions. Further, in the above configuration, it is possible to detect discrete spectrum light that passes through the sample, is spatially superimposed by the overlapping unit, and includes sample information. Also, it is possible to detect discrete spectrum light including information on the sample that is reflected from the sample and similarly spatially overlapped by the overlapping unit.
  • the dispersive element includes a first dispersive element that wavelength-disperses the discrete spectrum light in a first direction different for each spectrum, and the wavelength disperse by the first dispersive element.
  • a second dispersive element that disperses the wavelength of the discrete spectrum light in a second direction that intersects the first direction.
  • the dispersive element may be composed of a diffraction grating.
  • the individual spectrum is converted by the first dispersive element into the optical frequency (that is, wavelength) of the spectrum, the pitch of the first dispersive element, the incident angle, and the like.
  • the wavelength dispersion is performed in the first direction at a dispersion angle determined by the dispersion performance that depends on.
  • each spectrum that could not be separated by the first dispersion element depends on the optical frequency (that is, wavelength) of the spectrum, the pitch of the second dispersion element, the incident angle, and the like by the second dispersion element.
  • Wavelength dispersion is performed in the second direction at a dispersion angle determined by the dispersion performance.
  • two or more spectra distributed at different optical frequencies can be simultaneously dispersed in different directions in two stages using the first and second dispersion elements. If a diffraction grating is used as the first and second dispersive elements, two or more such spectrums are two-dimensionally oriented in different directions at desired intervals by appropriately adjusting the dispersion performance of the diffraction grating. Can be dispersed.
  • the center wavelength of the discrete spectrum light, the frequency interval between the adjacent spectra, the dispersion performance of the dispersion unit, the numerical aperture of the lens used in the light collection unit, and the discrete spectrum light are set such that the center interval between the spots of the spectrum condensed at different positions of the sample by the condensing unit is equal to or larger than the diameter of the spots of the spectrum. May be.
  • the two-dimensional spot group of the optical frequency comb mode is formed on the sample in a discrete and high-density manner.
  • crosstalk between adjacent spots (that is, pixels) of the two-dimensional spot group is suppressed, the center wavelength of the discrete spectrum light, the dispersion performance of the dispersion unit.
  • the numerical aperture of the lens used in the light converging unit and the frequency interval between adjacent spectrums of discrete spectrum light are not set as described above, an image with less blur is obtained from the mode-resolved spectrum.
  • the center wavelength of the discrete spectrum light, the frequency interval between the adjacent spectra, the numerical aperture of the lens arranged between the sample and the overlapping portion, and the overlapping portion may be set so that the spots of the spectrum collected at different positions of the sample are spatially superimposed by the lens at a predetermined position of the overlapping portion.
  • interval of the frequency of an adjacent spectrum, the numerical aperture of the lens used for a superimposition part, and the resolution of a spatial filtering optical system are not set as mentioned above.
  • a two-dimensional spot group focused at different positions on the sample can be used to obtain a more accurate image without loss of information from different positions on the sample in accordance with the center interval between spectral spots. Obtained from mode-resolved spectra.
  • the measurement apparatus may include a deconvolution processing unit that performs a deconvolution process on the two-dimensional spot group of the spectrum collected at different positions of the sample.
  • the image blur that is, the spread of the spot light
  • the image blur that is, the spread of the spot light
  • the measurement apparatus includes a third comb light source that emits a third optical frequency comb spectrum that is different from a phase of the first optical frequency comb spectrum, and the detection unit includes the first optical frequency comb.
  • the mode-resolved phase spectrum may be acquired based on a phase difference obtained by causing the spectrum and the third optical frequency comb spectrum to interfere with each other.
  • the frequency interval of the spectrum of the third optical frequency comb spectrum is a second adjacent frequency interval different from the first adjacent frequency interval, and the second adjacent frequency interval matches each other, and the detection unit May acquire the mode-resolved phase spectrum based on an interference spectrum generated by causing the first optical frequency comb spectrum and the third optical frequency comb spectrum to interfere with each other.
  • phase information in the confocal volume at different positions of the sample can be obtained, and from the depth resolution determined by the confocal characteristics (confocal depth resolution)
  • confocal depth resolution since information acquisition is performed with a depth resolution with higher accuracy, information in the thickness direction of the sample can be acquired with higher accuracy than in the case of only confocal characteristics.
  • the second comb light source and the third comb light source are provided separately by sharing the second comb light source as the third comb light source. In comparison, the apparatus can be simplified.
  • two or more independent spectra are simultaneously collected by one irradiation of the discrete spectrum light without performing mechanical scanning of the discrete spectrum light, and two or more focal points are focused on the sample. Can be formed simultaneously.
  • the spatial filtering optical system cuts off light from other than the focal position of the spectrum on the sample and simultaneously detects only two or more spectra including the sample information from the mode-resolved spectrum. Clear information of dimension space decomposition can be obtained. Furthermore, by using the mode-resolved phase spectrum, a depth resolution that greatly exceeds the confocal depth resolution can be obtained. Therefore, according to the present invention, it is possible to provide a measuring apparatus capable of acquiring sample information at high speed while maintaining high accuracy.
  • FIG. 1 is a schematic diagram of an optical system according to Example 1.
  • FIG. 2 is a test chart used in Example 1.
  • FIG. It is a figure which shows the line space
  • FIG. 6 is a graph showing the wavelength dependence of reflectance with respect to a range R1 of a test chart measured in Example 1.
  • FIG. 6 is a graph showing the wavelength dependence of reflectance with respect to a range R2 of a test chart measured in Example 1.
  • FIG. 6 is a graph showing the wavelength dependence of reflectance with respect to a range R3 of the test chart measured in Example 1.
  • FIG. 2 is a data showing a part of a test chart measured in Example 1.
  • FIG. 6 is a schematic diagram of a confocal microscopic line imaging apparatus according to Embodiment 2.
  • FIG. It is the upper side figure and side view which show a part of confocal microscopic line imaging apparatus of Example 2.
  • FIG. 6 is a graph showing the effect of limiting the depth resolution by pinholes in the spatial filtering optical system in Example 2.
  • FIG. 27 shows data related to a range R5 of the test chart measured in Example 2, and shows data when pinholes are arranged in the confocal microscopic line imaging apparatus shown in FIG.
  • FIG. 6 is a schematic diagram of a confocal microscopic line imaging apparatus according to Embodiment 3.
  • FIG. It is the mode decomposition spectrum acquired in Example 3.
  • It is the mode decomposition spectrum acquired in Example 3, and is the elements on larger scale of FIG.
  • It is the data regarding range R6 of the test chart measured in Example 3.
  • FIG. FIG. 6 is a schematic diagram of a confocal microscopic imaging apparatus according to a fourth embodiment. It is the mode decomposition spectrum acquired in Example 4. It is a mode decomposition spectrum acquired in Example 4, and is the elements on larger scale of FIG.
  • FIG. It is a two-dimensional confocal microscopic image of the group 4 element 1 of the test chart acquired in Example 4, and is an image when the measurement position is a position shifted by +10 ⁇ m from the condensing position of the optical frequency comb spectrum.
  • FIG. 1 is a schematic diagram of a measurement apparatus 10A according to the first embodiment.
  • the measurement device 10A is a measurement device that can acquire information on a sample S such as a cell, and includes a point light source 12, a dispersion unit 14, a first light collection unit (light collection unit) 15, The second condensing unit 17, the overlapping unit 19, the spatial filtering optical system 18, and the detection unit 20 are provided.
  • the point light source 12 includes a discrete spectrum light source (first comb light source) 22 and a condenser lens 24.
  • the discrete spectrum light source 22 is a light source that emits discrete spectrum light LA.
  • FIG. 2 is a schematic diagram for explaining the discrete spectrum light LA.
  • the discrete spectrum light LA includes two or more spectra MA distributed at different frequencies.
  • Examples of such discrete spectrum light LA include an optical frequency comb spectrum (first optical frequency comb spectrum) LX0.
  • the optical frequency comb spectrum LX0 includes, for example, two or more spectra MA distributed at a frequency interval fr on the frequency axis (f-axis shown in FIG. 2).
  • the number of the spectrum MA is assumed to be n.
  • the frequency interval fr is the frequency interval between the spectra MA and MA whose frequency positions are adjacent on the frequency axis.
  • n spectrums MA have a carrier envelope offset frequency f0 (hereinafter referred to as offset frequency f0) and a spectrum envelope NA having a distribution of a predetermined light intensity
  • the time interval between the centers of adjacent pulses ⁇ 1, ⁇ 2,..., ⁇ m is 1 / fr.
  • the optical carrier electric field CA of the plurality of pulses ⁇ 1, ⁇ 2,... ⁇ m has a time distribution obtained by inverse Fourier transform of the plurality of spectra MA.
  • the pulse envelope WA of the plurality of pulses ⁇ 1, ⁇ 2,..., ⁇ n has a time distribution obtained by inverse Fourier transform of the spectrum envelope NA.
  • the frequency of the spectrum MA in a predetermined order is determined.
  • the frequency ⁇ n of the nth spectrum MA with respect to the spectrum MA having the offset frequency f0 is determined as the following equation (1).
  • the frequency interval fr and the offset frequency f0 are stabilized with reference to the frequency standard, and the frequency of the spectrum MA hardly changes on the frequency axis and is fixed. “No change on the frequency axis” means that the different modes of the plurality of spectrum MAs are phase-synchronized and the frequency of the spectrum MA changes so that it can be achieved by phase-synchronizing with the frequency standard. Indicates a state that does not.
  • the discrete spectrum light source 22 a known comb light source capable of emitting the optical frequency comb spectrum LX0 described above can be used. Below, the structural example of the discrete spectrum light source 22 is demonstrated. Detailed descriptions of known components in each example are omitted. The configuration of the discrete spectrum light source 22 is not limited to the following examples.
  • FIG. 3 is a schematic diagram of a comb light source 22A which is a first configuration example of the discrete spectrum light source 22.
  • the comb light source 22 ⁇ / b> A includes a mode-locked fiber laser 77 and an amplifier 78.
  • the mode-locked fiber laser 77 includes an excitation semiconductor laser 82, an optical fiber 80G including an optical isolator 87A, an optical coupler 84A, an optical fiber 80A including a doped fiber 86A such as ytterbium (Yb), an optical fiber 80B, 80C and an optical isolator 85A.
  • the amplifier 78 is connected to the mode-locked fiber laser 77 via an optical coupler 84D disposed between the optical fibers 80B and 80C.
  • the amplifier 78 includes an optical fiber 80D connected to the output side of the optical coupler 84D, an optical isolator 85B, a pumping semiconductor laser 83, an optical fiber 80F including the optical isolator 87B, an optical coupler 84C, an ytterbium (Yb ) Or the like, and an optical isolator 85C.
  • a pulse with high frequency stability is oscillated from the mode-locked fiber laser 77 toward the optical coupler 84A from the optical isolator 85A.
  • a part of the oscillated pulse is extracted from the optical coupler 84D, and a part of the pulse travels through the optical fiber 80D, and the amplifier 78 amplifies the intensity thereof.
  • the remaining pulses travel through the optical fiber 80C and loop inside the mode-locked fiber laser 77.
  • FIG. 4 is a schematic diagram of a comb light source 22 ⁇ / b> B that is a second configuration example of the discrete spectrum light source 22.
  • the comb light source 22 ⁇ / b> B includes an optical modulator 90 and a microwave oscillator 93.
  • the light modulator 90 includes mirrors 92A and 92B that are spaced apart by a predetermined distance, and an electro-optic crystal 94 that is disposed between the two mirrors 92A and 92B.
  • lithium niobate LiNbO 3
  • LiNbO 3 lithium niobate
  • the single spectrum light incident on the optical modulator 90 is externally phase-modulated by the microwave oscillator 93.
  • the electro-optic crystal 94 is arranged in the Fabry-Perot resonator composed of the two mirrors 92A and 92B as described above, deep modulation is applied, and about 1000 or more spectra MA are generated.
  • the frequency interval fr of the spectrum MA matches the modulation frequency of the microwave oscillator 93.
  • the optical modulator 90 is composed of passive components, an optical frequency comb spectrum LX0 including two or more spectra MA that is very stable on the frequency axis is generated.
  • the center frequency of the spectrum envelope NA is determined by an input light source (not shown).
  • FIG. 5 is a schematic diagram of a comb light source 22 ⁇ / b> C which is a third configuration example of the discrete spectrum light source 22.
  • the comb light source 22C includes a waveguide type Mach-Zehnder modulator (MZM) type ultra-flat optical comb generator (MZ-FCG) 95.
  • MZM Mach-Zehnder modulator
  • MZ-FCG ultra-flat optical comb generator
  • an input waveguide 96A, two branch waveguides 96B and 96C, and an output waveguide 96D are formed.
  • Each of the two branch waveguides 96B and 96C is coupled with a waveguide capable of inputting a radio frequency (RF) signal and a phase modulation signal.
  • RF radio frequency
  • FIG. 6 is a schematic diagram of a comb light source 22 ⁇ / b> D that is a fourth configuration example of the discrete spectrum light source 22.
  • the comb light source 22D is a broadband comb / ultra short pulse light source using the MZ-FCG95 of the comb light source 22C.
  • the comb light source 22D includes a pumping semiconductor laser 98, a polarization controller (PC) 99, an MZM 100, a single mode fiber (SMF) 108, an erbium-doped fiber amplifier 109, a dispersion flat laser A dispersion reducing fiber (DF-DDF) 110.
  • the optical comb signal generated by the MZ-FCG 95 is input to the standard SMF 108 and then input to the DF-DDF, thereby generating an optical frequency comb spectrum LX0 extending to about 20 THz.
  • a condenser lens 24 is disposed in the emission direction of the discrete spectrum light source 22 exemplified by the comb light sources 22A to 22D described above.
  • the condensing lens 24 is an optical element that condenses the discrete spectrum light LA emitted from the discrete spectrum light source 22 at the condensing position P1. Accordingly, the various parameters of the condenser lens 24 are set in consideration of the frequency ⁇ of the spectrum MA, the distance between the position of the condenser lens 24 and the condenser position P1, and the like, and are not particularly limited.
  • the point light source 12 may be configured by replacing the lens with a mirror.
  • a mirror instead of the lens, it is possible to avoid the influence of the chromatic aberration of the lens on the frequency of each spectrum MA of the optical frequency comb spectrum LX0 emitted from the discrete spectrum light source 22.
  • the pinhole 26 has an opening having a predetermined size and shape. In the direction of the optical axis X, the opening of the pinhole 26 is located at the condensing position P1.
  • the size and shape of the opening are not particularly limited, and are set in consideration of the frequency of the spectrum MA and the desired resolution for acquiring information on the sample S.
  • the collimating lens 28 is an optical element that collimates the discrete spectrum light LA emitted from the condensing position P1.
  • the various parameters of the collimating lens 28 are set in consideration of the frequency of the spectrum MA, the distance between the condensing position P1 and the position of the collimating lens 28, etc., and are not particularly limited.
  • the pinhole 26, the condensing lens 24, and the collimating lens 28 can be replaced with other configurations as long as the discrete spectrum light LA can be condensed in at least one arbitrary direction at the condensing position P1.
  • a combination of a cylindrical lens and a slit may be used, and an encoding pattern may be used instead of the pinhole 26.
  • the dispersion unit 14 is disposed between the collimating lens 28 and the first light collecting unit 15 in the optical axis X direction, and is configured to disperse the discrete spectrum light LA in different directions for each spectrum MA.
  • the dispersion unit 14 of the first embodiment includes a dispersion element 32.
  • FIG. 1 shows a case where a diffraction grating is used as the dispersion element 32.
  • the dispersive element 32 is disposed in a posture in which an axis J1 orthogonal to the dispersive surface 32a is inclined with respect to the optical axis X by an angle ⁇ 0.
  • the dispersive element 32 wavelength-disperses light incident at an angle ⁇ 0 one-dimensionally, two-dimensionally, or three-dimensionally for each spectrum MA at angles ⁇ 1, ⁇ 2,..., ⁇ n corresponding to the frequencies of n spectra MA. It has a function.
  • the dispersive element 32 having such a function include a diffraction grating, a prism, a Virtual imaged Phased array (VIPA: registered trademark), a computer generated hologram (Computer Generated Hologram: CGH), and the like.
  • VIPA Virtual imaged Phased array
  • CGH Computer Generated Hologram
  • the pitch of the diffraction grating is set based on a known grating equation in consideration of the angle ⁇ 0 at which the spectrum MA is incident, the frequency of the spectrum MA, a desired resolution for obtaining information on the sample S, and the like, and is not particularly limited. .
  • the dispersion beam is wavelength-dispersed two-dimensionally (in a plane).
  • CGH is used as the dispersive element 32, the depth of the condensing position can be changed for each spectrum by giving the CGH lens characteristics.
  • the first condensing unit 15 is arranged between the dispersion unit 14 and the sample S in the optical axis X direction, and the spectrum MA wavelength-dispersed by the dispersion unit 14 is located at different positions p1, p2,. It is the structure for condensing each.
  • the first light collecting unit 15 includes relay lenses 34 and 36 and an objective lens 38.
  • the relay lenses 34 and 36 are used to transfer the beam emission state of the dispersive element 32 to the entrance pupil (point P4) of the objective lens.
  • the relay lens 34 condenses the plurality of spectra MA at different positions in the direction orthogonal to the optical axis X (that is, in the direction of the arrow D2 or the arrow D3 shown in FIG. 1).
  • the relay lens 36 collimates a plurality of spectrums MA diverged after condensing, and passes the point P4 which is the entrance pupil of the objective lens in common, and enters the objective lens 38.
  • the objective lens 38 forms a focal point at a different position depending on the beam incident angle at the point P4. However, since the incident angle is different for each spectrum MA, the spectrum MA from the incident point P4 is converted into the sample S for each spectrum MA. Are condensed at different positions in the direction of arrow D2 or D3.
  • the first condensing unit 15 is not limited to the above-described configuration as long as the spectrum MA dispersed by the dispersing unit 14 can be condensed at different positions p1, p2,.
  • the sample S is disposed between the first light collecting unit 15 and the second light collecting unit 17 in the optical axis X direction.
  • the sample S is not particularly limited as long as it is an object that transmits the spectrum MA and can add the information to the spectrum MA by modulation of amplitude or phase, such as a cell.
  • the second light collecting unit 17 is disposed between the sample S and the overlapping unit 19 in the optical axis X direction, and includes an objective lens 39 and relay lenses 35 and 37.
  • the relay lenses 35 and 37 are used to transfer the beam emission state of the entrance pupil (point P5) of the objective lens to the dispersion element 33. These components correspond to the objective lens 38 and the relay lenses 34 and 36, respectively. That is, the second light collecting unit 17 is configured by folding the first light collecting unit 15 with respect to the sample S in the optical axis X direction.
  • the objective lens 39 collimates each transmitted spectrum (hereinafter referred to as a transmission spectrum) transmitted from different positions p1, p2,..., Pn, and passes the point P5 in common to be incident on the relay lens 37. .
  • the relay lens 37 condenses the plurality of transmission spectra that have passed through the point P5 at different positions in the direction orthogonal to the optical axis X (that is, in the direction of the arrow D2 or the arrow D3 shown in FIG. 1).
  • the relay lens 35 collimates a plurality of transmission spectra diverged after condensing.
  • the 2nd condensing part 17 is not limited to the said structure, It is omissible.
  • the superimposing unit 19 is disposed between the second light collecting unit 17 and the spatial filtering optical system 18 in the optical axis X direction, and spatially superimposes transmission spectra from different positions p1, p2,. It is the structure for.
  • the overlapping portion 19 of the first embodiment includes a dispersive element 33.
  • the dispersive element 33 is arranged in a posture in which an axis J2 orthogonal to the wavelength dispersion surface 33a is inclined with respect to the optical axis X by an angle ⁇ 0.
  • the dispersive element 33 has a function to simultaneously disperse light incident at angles ⁇ 1, ⁇ 2,..., ⁇ n corresponding to the frequencies of n spectrum MAs at a common angle ⁇ 0.
  • n spectra MA are superimposed on the optical axis X.
  • the dispersing element 33 having such a function include a diffraction grating, a prism, VIPA, and CGH.
  • the dispersive element 33 preferably has the same performance as the dispersive element 32.
  • the spatial filtering optical system 18 is disposed between the overlapping unit 19 and the detection unit 20 in the optical axis X direction, and is conjugated with each of the positions p1, p2,..., Pn collected on the sample S of the spectrum MA. This is a configuration for condensing light at the correct position P3.
  • the spatial filtering optical system 18 includes a condenser lens 40, a pinhole 42, and a collimator lens 44, and these components are arranged in the order described above from the rear side in the optical axis X direction.
  • the condensing lens 40 condenses the transmission spectrum incident on the optical axis X at a position P3 conjugate to the focal point on the sample S of the spectrum MA (hereinafter sometimes simply referred to as a position P3 conjugate to the focal point). . Therefore, the various parameters of the condenser lens 40 are set in consideration of the frequency of the spectrum MA and the distance between the position of the condenser lens 40 and the position P3 conjugate to the focal point, and are not particularly limited.
  • the pinhole 42 has an opening having a predetermined size and shape. In the direction of the optical axis X, the opening of the pinhole 42 is located at a position P3 conjugate to the focal point.
  • the size and shape of the opening are set in consideration of the frequency of the spectrum MA and the light condensing performance of the condensing lens 40, and are not particularly limited.
  • the pinhole 42 allows the transmission spectrum from the positions p1, p2,.
  • the collimating lens 44 is an optical element that collimates the transmission spectrum emitted from the position P3 conjugate to the focal point. Therefore, the various parameters of the collimating lens 44 are set in consideration of the frequency of the spectrum MA and the distance between the position P3 conjugate to the focal point and the position of the collimating lens 44, etc., and are not particularly limited.
  • the detection unit 20 is disposed at the end of the measuring device 10A in the optical axis X direction.
  • the detection unit 20 is configured to acquire a mode-resolved spectrum including information on the sample S from the discrete spectrum light LB that is spatially filtered by the spatial filtering optical system 18 and includes information on the sample S.
  • a known detection optical system 46 or a spectroscopic device capable of acquiring a mode-resolved spectrum from the discrete spectrum light LB can be used.
  • a configuration example of the detection optical system 46 will be described. Detailed descriptions of known components in each example are omitted.
  • the configuration of the detection optical system 46 is not limited to the following examples.
  • FIG. 7 is a schematic diagram of an optical system 46A which is a first configuration example of the detection optical system 46.
  • the optical system 46 ⁇ / b> A includes a cylindrical lens 48, a VIPA 50, a spherical lens 52, and a diffraction grating 54.
  • the VIPA 50 is formed of a semi-transmissive film (not shown) on one surface of a thin glass plate 50b and a reflective film 50r on the other surface, and has sharp wavelength dispersion characteristics due to etalon. Then, the chromatic dispersion angle is changed by moving the VIPA.
  • the light collected by the cylindrical lens 48 along the direction of the arrow x shown in FIG. 7 is dispersed by the VIPA 50 in the direction of the arrow y (first direction).
  • the dispersion angle of the dispersed light is an angle resulting from the frequency of the light, the thickness of the VIPA 50, and the incident angle within an angle ⁇ with respect to the optical axis.
  • the light dispersed by the VIPA 50 is deflected by the spherical lens 52 in a direction parallel to the optical axis for each light, and enters the diffraction grating 54.
  • the extending direction of the diffraction grating 54 is parallel to the arrow y direction, the light reflected from the diffraction grating 54 is reflected in a direction orthogonal to the one direction at the same time as the reflection (the direction of the arrow x shown in FIG. Diffracted in the second direction)) and thereby dispersed by frequency. Accordingly, a plurality of mode-resolved spectra are two-dimensionally expanded in the directions of the arrow D1 and the arrow D3, and a two-dimensional spatial distribution of each mode-resolved intensity spectrum is detected by an imaging device or the like.
  • the scattered band d1 in the direction of the arrow D1 and the pitch d2 in the direction of the arrow D3 depend on the Free Spectrum Range (FSR) of the VIPA 50 and the grating pitch of the diffraction grating 54. Further, the pitch d3 in the direction of the arrow D1 depends on the frequency interval of the spectrum of light incident on the VIPA 50 (that is, the frequency interval fr in this embodiment).
  • FIG. 8 is a schematic diagram of an optical system 46B which is a second configuration example of the detection optical system 46.
  • the optical system 46 ⁇ / b> B is a dispersive spectrometer including an entrance slit 120, reflection concave mirrors 121 and 123, a diffraction grating 122, and an output slit 124.
  • the light incident from the opening of the entrance slit 120 is collimated by the reflective concave mirror 121 and enters the diffraction grating 122. Since the extending direction of the grating of the diffraction grating 122 is a predetermined direction (a direction penetrating the paper surface of FIG. 8), the light reflected from the diffraction grating 122 is diffracted in a predetermined direction simultaneously with the reflection, and thereby, for each frequency. Are distributed in different directions. Subsequently, the light dispersed for each frequency is applied to the output slit 124 by the reflecting concave mirror 123, and the light at the position of the opening of the output slit 124 is extracted.
  • the mode-resolved spectrum dispersed by the diffraction grating 122 is detected for each frequency.
  • a similar mode-resolved intensity spectrum is detected by rotating the diffraction grating 122 while the output slit 124 is fixed.
  • FIG. 9 is a schematic diagram of an optical system 46C which is a third configuration example of the detection optical system 46.
  • the optical system 46 ⁇ / b> C includes a Michelson interferometer type Fourier filter including a mirror 127, a beam splitter 128, right-angle (prism) mirrors 129 and 130, a detector 131, and a Fourier transform unit 132. This is a conversion spectroscopic optical system.
  • one right-angle mirror 129 is moved in the direction of arrow D12 parallel to the optical axis, and the interference waveform of the light reflected from each of the right-angle mirrors 129 and 130 is detected by the detector 131. Subsequently, a mode-resolved intensity spectrum for each frequency (wavelength) is detected by Fourier transforming the interference waveform in the Fourier transform unit 132.
  • the discrete spectrum light LA emitted from the discrete spectrum light source 22 of the point light source 12 is condensed at the condensing position P ⁇ b> 1 and passes through the opening of the pinhole 26.
  • the discrete spectrum light LA diverging from the condensing position P1 is collimated by the collimating lens 28 and enters the dispersion element 32 of the dispersion unit 14.
  • Two or more (here, n) spectrum MA of the discrete spectrum light LA incident on the dispersive element 32 and having a common angle ⁇ 0 with respect to the axis J1 is an angle corresponding to the frequency of each spectrum MA. Disperse simultaneously at ⁇ 1, ⁇ 2,. That is, each spectrum MA is simultaneously dispersed in different directions. Subsequently, n spectra MA dispersed at different angles ⁇ 1, ⁇ 2,..., ⁇ n for each spectrum are incident on the first condensing unit 15 and are condensed for each spectrum by the relay lens 34, and the relay lens 36 is obtained. Is collimated toward position P4. The n spectra MA passing through the position P4 are simultaneously condensed by the objective lens 38 at different positions p1, p2,.
  • Information relating to the sample S at the positions p1, p2,..., Pn is added to the n spectrums MA simultaneously condensed at different positions p1, p2,.
  • the irradiation spot for measurement which consists of n spectrum MA is simultaneously formed in the sample S by one irradiation of discrete spectrum light LA. Further, the information on the sample S is added to each of the n spectra MA that are independent of each other.
  • Discrete spectrum light LB including information on the sample S is transmitted from mutually different positions p1, p2,.
  • the spectrum of the discrete spectrum light LB (hereinafter referred to as a transmission spectrum) is collimated by the objective lens 39 of the second condenser 17 and passes through the point P5 in common.
  • transmission spectra are incident on the relay lens 37 and are collected by the relay lens 37 at different positions in the direction perpendicular to the optical axis X (that is, the direction of the arrow D2 or D3 shown in FIG. 1).
  • the plurality of transmission spectra diverged after condensing are collimated by the relay lens 35 and deflected toward the overlapping portion 19.
  • Transmission spectra from different positions p1, p2,..., Pn are incident on the dispersive element 33 of the overlapping section 19 at angles ⁇ 1, ⁇ 2,..., ⁇ n corresponding to the frequencies of the n transmission spectra. Then, the dispersion element 33 simultaneously performs wavelength dispersion at a common angle ⁇ 0 with respect to the axis J2, and is spatially and simultaneously superimposed on the optical axis X.
  • the n transmission spectra that are spatially superimposed and include information of the sample S are incident on the spatial filtering optical system 18, collected at the conjugate position P3 by the condenser lens 40, and passed through the opening of the pinhole 42. To do. Light and spectra other than the n transmission spectra are cut by the pinhole 42. The n transmission spectra that have passed through the opening of the pinhole 42 are collimated by the collimating lens 44 and enter the detection unit 20.
  • the detection unit 20 acquires n mode-resolved spectra including the information of the sample S from the discrete spectrum light LB including the information of the sample S (that is, the transmission spectrum described above). If n mode-resolved spectra are arranged one-dimensionally, two-dimensionally or three-dimensionally according to different positions p1, p2,... pn of the sample S by the detection optical system 46 or other configurations, Information on the sample S included in the mode-resolved spectrum is easy to see. Regardless of such a method, if n mode-resolved spectra are acquired from the discrete spectrum light LB, the measurement of the sample S is completed.
  • FIG. 10 illustrates the light operations (reflection arrangement) performed by the point light source 12, the dispersion unit 14, the first light collection unit 15, the second light collection unit 17, the superposition unit 19, and the spatial filtering optical system 18 described above. It is a schematic diagram for demonstrating. As shown in FIG. 10, according to the measurement apparatus 10 ⁇ / b> A described above, discrete spectrum light that is emitted from the point light source 12 including the spatial filtering optical system 18 and includes two or more spectra MA that are independent from each other on the frequency axis.
  • FIG. 10 illustrates a state in which n spectrums MA are two-dimensionally plane-converted according to the respective frequencies (wavelengths).
  • the plurality of dispersed spectra s1, s2,..., Sn are simultaneously condensed at different positions p1, p2,. That is, a plurality of spectra MA can be condensed at different positions on the sample S by one irradiation (one shot) of the discrete spectrum light LA. In addition, unlike the case where continuous spectrum light is used, the plurality of spectra MA are independent from each other, so that information on the sample S can be simultaneously and simultaneously collected at the condensing positions p1, p2,. Each of the n spectrums MA can be added in parallel. Therefore, if the condensing positions p1, p2,..., Pn of the n spectra are matched with the measurement target range of the sample S, the information of the sample S in the measurement range can be acquired non-mechanically at high speed.
  • the discrete spectrum light LB to which the information of the sample S is added is spatially superimposed by the second condensing unit 17 and the overlapping unit 19, and the spatial filtering optical system 18 is spatially filtered.
  • the information of the sample S is added to each of the n spectra MA from the superposition unit 19, and n mode-resolved spectra MA2 are generated, and the spectrum envelope NA is changed to the spectrum envelope NA2.
  • the aperture of the pinhole 42 of the spatial filtering optical system 18 is disposed at a position P3 conjugate with the positions p1, p2,.
  • the frequency intervals of the n spectrum MAs can coincide with each other, and the first adjacent frequency interval fr1 can be obtained.
  • the n spectra MA are collected at different positions on the sample S and at a predetermined interval corresponding to the first adjacent frequency interval fr1. Therefore, information within the measurement range of the sample S can be acquired at regular intervals.
  • the measurement apparatus 10A of the first embodiment it is possible to detect the discrete spectrum light LB that passes through the sample S and is spatially superimposed by the overlapping unit 19.
  • the high speed and high resolution are greatly improved as compared with the conventional confocal microscope, and clear information with high contrast can be acquired with one shot of the discrete spectrum light LA. it can.
  • FIG. 11 is a schematic diagram of a measuring apparatus 10B according to the second embodiment to which the present invention is applied.
  • symbol is attached
  • the measurement device 10 ⁇ / b> B includes a half mirror 55 and a discrete spectrum light source (second comb light source) 60 in addition to the components of the measurement device 10 ⁇ / b> A.
  • the half mirror 55 is disposed between the detection optical system 46 of the detection unit 20 and the collimator lens 44 in the optical axis X direction.
  • the mirror surface of the half mirror 55 is inclined at a predetermined angle with respect to the optical axis X.
  • the discrete spectrum light source 60 is a light source that emits discrete spectrum light LC.
  • the discrete spectrum light LC includes two or more spectra MA2 distributed at different frequencies (see FIG. 12).
  • An example of such a discrete spectrum light LC is an optical frequency comb spectrum (second optical frequency comb spectrum) LX2.
  • the discrete spectrum light source 60 is disposed so that the discrete spectrum light LC is incident on the half mirror 55 at a predetermined angle.
  • FIG. 11 illustrates a discrete spectrum light source 60 that is disposed at a position that advances in the direction opposite to the arrow D1 direction from the center position of the half mirror 55 in the optical axis X direction.
  • FIG. 12 is a schematic diagram for explaining an interference spectrum generation process (that is, dual optical comb spectroscopy) between the discrete spectrum light LB including the information of the sample S and the discrete spectrum light LC emitted from the discrete spectrum light source 60. It is. As shown in FIG. 12, regarding the discrete spectrum light LB including the information of the sample S, the frequency interval between the mode-resolved spectra MA1 and MA1 whose frequency positions are adjacent on the frequency axis of the optical region is the first adjacent frequency interval fr1. is there. The first adjacent frequency intervals fr1 coincide with each other.
  • the frequency interval between the mode-resolved spectra MA2 and MA2 whose frequency positions are adjacent on the frequency axis of the optical region is the second adjacent frequency interval fr2 different from the first adjacent frequency interval fr1.
  • the second adjacent frequency intervals fr2 also coincide with each other. That is, the discrete spectrum lights LB and LC are each provided with n spectrums MA1 and MA2 distributed at equal intervals on the frequency axis, and the first adjacent frequency interval fr1 and the second adjacent frequency interval fr2 are different from each other. ing.
  • the discrete spectrum light LB collimated by the collimating lens 44 interferes with the discrete spectrum light LC emitted from the discrete spectrum light source 60 by the half mirror 55 by multi-frequency heterodyne interference (that is, dual optical comb spectroscopy).
  • the discrete spectrum light LB is the optical frequency comb spectrum LX1 obtained by adding the information of the sample S to the optical frequency comb spectrum LX0
  • the discrete spectrum light LC is the optical frequency comb spectrum. LX2.
  • the interference spectrum LZ is incident on the detection optical system 46, and the interference spectrum LZ is directly measured by, for example, an RF spectrum analyzer and converted to the frequency scale of the original optical region.
  • the interference spectrum LZ can also be obtained by acquiring a time change (interferogram) of the interference waveform with a digitizer and subjecting it to Fourier transform. In this way, a mode-resolved amplitude spectrum and a mode-resolved phase spectrum are obtained based on the interference spectrum LZ.
  • the same effects as the measurement device 10A of the first embodiment can be obtained.
  • the dual optical comb spectroscopy described above is employed.
  • the modes of the optical frequency comb spectra LX1 and LX2 are often incapable of being decomposed due to insufficient resolution with commercially available spectroscopes that are widely used.
  • the optical frequency comb spectrum LX1 can be downscaled to the interference spectrum LZ in the electromagnetic wave region by multi-frequency heterodyne interference.
  • a mode-resolved amplitude spectrum and a mode-resolved phase spectrum can be acquired with high resolution, high accuracy, wide bandwidth and high speed without using a spectrometer.
  • FIG. 13 is a schematic diagram of a measuring apparatus 10C according to a third embodiment to which the present invention is applied.
  • symbol is attached
  • the measurement device 10 ⁇ / b> C is obtained by changing the configuration of the transmission type measurement device 10 ⁇ / b> A to a reflection type configuration.
  • the measurement device 10 ⁇ / b> C includes a point light source 12, a half mirror 30, a dispersion unit 14, a third light collection unit (light collection unit) 16, a superposition unit 19, a spatial filtering optical system 18, and a detection unit 20. It is equipped with.
  • the pinhole 26 and the collimating lens 28 are arranged in this order in front of the point light source 12.
  • the discrete spectrum light LA emitted from the collimator lens 28 enters the half mirror 30.
  • the half mirror 30 makes the discrete spectrum light LA incident on the axis J3 of the dispersion element 32 at an angle ⁇ 0.
  • the dispersion element 32 serves as both the dispersion part 14 and the overlapping part 19.
  • the third condensing unit 16 condenses the spectrum MA dispersed in different directions for each spectrum by the dispersive element 32 at different positions p1, p2,.
  • the dispersive element 32 spatially superimposes spectra (hereinafter referred to as reflection spectra) reflected from different positions p1, p2,. Then, the reflection spectrum is emitted in the direction opposite to the direction in which the discrete spectrum light LA travels.
  • the sample S may be an object that reflects the n number of irradiated spectrums MA, and may be reflective by being colored or the like. Further, a reflecting plate or the like may be installed behind the sample S in the optical axis X direction (that is, the back side of the sample S in the direction of arrow D1).
  • the collimated discrete spectrum light LA has its path changed at a right angle by the half mirror 30 and is incident on the dispersion element 32 of the dispersion unit 14.
  • the n spectrums MA wavelength-dispersed at different angles ⁇ 1, ⁇ 2,..., ⁇ n for each spectrum by the dispersive element 32 are incident on the third condensing unit 16, and are collected for each spectrum by the relay lens 34. It is collimated by the relay lens 36 toward the position P7.
  • the n spectra MA passing through the position P7 are simultaneously condensed by the objective lens 38 at different positions p1, p2,.
  • the discrete spectrum light LB including the information of the sample S is reflected from mutually different positions p1, p2,..., Pn and is incident on the third light collecting unit 16 again.
  • the reflection spectrum of the discrete spectrum light LB is collimated by the objective lens 38 of the third condenser 16 and passes through the point P7 in common.
  • the n reflection spectra are incident on the relay lens 36 and are collected by the relay lens 36 at different positions in the direction orthogonal to the optical axis X (that is, the direction of the arrow D2 or D3 shown in FIG. 1). Then, the plurality of reflection spectra diverged after condensing are collimated by the relay lens 34 and deflected toward the dispersion element 32 of the overlapping portion 19.
  • the reflection spectra from different positions p1, p2,..., Pn are incident on the dispersion element 32 of the overlapping portion 19 at angles ⁇ 1, ⁇ 2,..., ⁇ n corresponding to the frequencies of the n reflection spectra. Then, the dispersion element 32 simultaneously performs wavelength dispersion at a common angle ⁇ 0 with respect to the axis J2, and is spatially and simultaneously superimposed on the optical axis X.
  • the n reflection spectra that are spatially superimposed and include the information of the sample S are transmitted through the half mirror 30 and go straight and enter the spatial filtering optical system 18. Then, the light is condensed at a conjugate position P 3 by the condenser lens 40 and passes through the opening of the pinhole 42. Light and spectrum other than n reflection spectra are cut by the pinhole 42. The n reflection spectra that have passed through the opening of the pinhole 42 are collimated by the collimator lens 44 and enter the detection unit 20.
  • the detection unit 20 acquires n mode-resolved spectra including the information of the sample S from the discrete spectrum light LB including the information of the sample S (that is, the reflection spectrum). If n mode-resolved spectra are arranged one-dimensionally, two-dimensionally or three-dimensionally according to different positions p1, p2,... pn of the sample S by the detection optical system 46 or other configurations, Information on the sample S included in the mode-resolved spectrum is easy to see. Regardless of such a method, if n mode-resolved spectra are acquired from the discrete spectrum light LB, the measurement of the sample S is completed.
  • the same effects as those of the measurement device 10A of the first embodiment can be obtained.
  • the discrete spectrum light LB including the information of the sample S, which is reflected from the sample S and similarly spatially superimposed by the overlapping unit 19, is detected. be able to.
  • the first and second light collecting units 15 and 17 in the measurement device 10A are the third light collecting unit 16 having a common configuration, and the individual dispersion units 14 and The superposition part 19 is comprised by the dispersive element 32 which is a common structure. Therefore, the size of the measuring device 10C can be reduced.
  • FIG. 14 is a schematic diagram of a measurement apparatus 10D according to the fourth embodiment.
  • symbol is attached
  • dual optical comb spectroscopy can also be adopted for the reflective measurement apparatus 10C.
  • the measurement device 10 ⁇ / b> D includes a half mirror 55 and a discrete spectrum light source (second comb light source) 60 in addition to the components of the measurement device 10 ⁇ / b> C.
  • the discrete spectrum light source 60 is disposed so that the discrete spectrum light LC is incident on the half mirror 55 at a predetermined angle.
  • FIG. 14 illustrates a discrete spectrum light source 60 arranged at a position that advances in the direction opposite to the arrow D1 direction from the center position of the half mirror 55 in the optical axis X direction.
  • the discrete spectrum light LB collimated by the collimator lens 44 interferes with the discrete spectrum light LC emitted from the discrete spectrum light source 60 by the half mirror 55 by multi-frequency heterodyne interference.
  • the interference spectrum LZ is incident on the detection optical system 46, and the interference spectrum LZ is directly measured by, for example, an RF spectrum analyzer and converted to the frequency scale of the original optical region.
  • the interference spectrum LZ can also be obtained by acquiring a time change (interferogram) of the interference waveform with a digitizer and subjecting it to Fourier transform. In this way, a mode-resolved amplitude spectrum and a mode-resolved phase spectrum are obtained based on the interference spectrum LZ.
  • the same operational effects as those of the measurement device 10C of the third embodiment can be obtained.
  • the dual optical comb spectroscopy is employed, so that the optical frequency comb spectrum LX1 can be downscaled to the interference spectrum LZ in the electromagnetic wave region by multi-frequency heterodyne interference. .
  • a mode-resolved amplitude spectrum and a mode-resolved phase spectrum can be acquired with high resolution, high accuracy, wide bandwidth and high speed without using a spectrometer.
  • FIG. 15 is a schematic diagram of a measuring apparatus 10E according to a fifth embodiment to which the present invention is applied.
  • symbol is attached
  • the measuring device 10E changes the condensing lens 24, the pinhole 26, and the collimating lens 28 of the transmissive measuring device 10A to a cylindrical lens 174, a slit 176, and a cylindrical lens 178, respectively.
  • the lens 40, the pinhole 42, and the collimating lens 44 are changed to a cylindrical lens 180, a slit 182 and a cylindrical lens 184, respectively.
  • the cylindrical lenses 174, 178, 180, and 184 have a curved surface only in the direction of the arrow D1, collect the incident light in the same direction, or collimate, and do not have a curved surface in the direction of the arrow D5. Does not act on the lens.
  • the dimensions of the slits 176 and 182 in the arrow D1 direction are the same as the dimensions of the pinholes 26 and 42 in the same direction.
  • the dimensions of the slits 176 and 182 in the direction of arrow D5 are the same as the dimensions of the cylindrical lenses 174 and 178 in the same direction.
  • the discrete spectrum light LA is line-condensed by the cylindrical lens 174 in the direction of the arrow D1 to be a line light source.
  • Discrete spectrum light LA condensed into a linear shape passes through slit 176 and is collimated by cylindrical lens 178 in the direction of arrow D1.
  • the discrete spectrum light LA that has passed through the cylindrical lens 178 enters a one-dimensional wavelength dispersion element (dispersion element) 32 such as a diffraction grating.
  • the incident discrete spectrum light LA is dispersed at an angle of ⁇ 1 to ⁇ n in a direction orthogonal to the axis of the slit 176 (that is, in a plane parallel to the paper surface of FIG. 15).
  • the wavelength dispersion power of the one-dimensional wavelength dispersion element 32 is set to a desired concentration in the direction of the arrow D2 or D3 in the sample S in consideration of the frequency interval between the plurality of spectra MA and the angles ⁇ 0, ⁇ 1,.
  • two or more spectra MA of the discrete spectrum light LA wavelength-dispersed by the one-dimensional wavelength dispersion element 32 are D5 direction (that is, perpendicular to the paper surface of FIG. 15) for each wavelength component in the sample S by the first condenser 15. Line) along each direction.
  • the principle of measurement using the measuring device 10E is the same as the principle of measurement using the measuring device 10A until it is incident on the one-dimensional wavelength dispersion element (dispersing element) 33 by the second condensing unit 17; Description is omitted.
  • a linear light collection pattern having a certain length in the arrow D5 direction is formed at a position different from each other for each wavelength in the arrow D2 or D3 direction of the sample S.
  • the linear discrete spectrum LB including the information of the sample S is transmitted from positions p1, p2,..., Pn different from each other in the direction of the arrow D2 or D3, and the one-dimensional wavelength dispersion of the overlapping unit 19 by the second condensing unit 17. ..., .Theta.n is incident on the element 33, and simultaneously wavelength-dispersed at the angle .theta.0 in common with the axis J2 and superimposed on the optical axis X.
  • the n transmission spectra that are spatially and simultaneously overlapped are line-collected by the cylindrical lens 180 in the direction of the arrow D 1, pass through the slit 182, collimated by the cylindrical lens 184, and enter the detection unit 20. In the direction of arrow D5, the size and collimated state of the discrete spectrum light LA emitted from the discrete spectrum light source 22 are maintained.
  • the discrete spectrum light LB is line-condensed by a cylindrical lens 188 in a direction parallel to the D5 direction, and a mode-resolved spectrum, that is, a spectral line image at each position of the condensing line is acquired.
  • a multi-channel spectroscope 192 that can enter through a slit 190 using a two-dimensional sensor such as a CCD or CMOS as a detector can be used.
  • the same operational effects as those of the measurement device 10A of the first embodiment can be obtained.
  • the sample S is irradiated two-dimensionally by forming a linear condensing pattern at different positions for each of two or more spectra MA in the sample S. be able to.
  • a measurement result can be obtained as a spectral line image.
  • a two-dimensional image can also be acquired using a two-dimensional wavelength dispersion element.
  • the discrete spectrum light source 22 is not limited to a known comb light source and the like as long as it can emit discrete spectrum light LA including two or more spectra MA.
  • the discrete spectrum light source 22 may be configured by combining a plurality of light sources that emit a single spectrum. Further, for example, when measuring two specific ranges of the sample S that are separated from each other, two spectra MA having a frequency interval fr corresponding to the separated distance may be used. In that case, two laser light sources emitting each of the two spectra MA as a single spectrum may be prepared, and the single spectrum from these laser light sources may be photomixed.
  • the measurement apparatus if the spectrum MA is two-dimensionally condensed in the first condensing unit 15 at different positions p1, p2,.
  • two-dimensional simultaneous measurement can be performed.
  • the spectrum MA is collected one-dimensionally in the first light collecting unit 15, in other words, at different positions on one line, one shot of the discrete spectrum light LA is obtained.
  • simultaneous measurement on the line can be performed. That is, if the spectrum MA is condensed in k-dimensionally different positions in the first condensing unit 15, the measuring apparatus according to the present invention can be applied to k-dimensional imaging.
  • the confocal effect in the measurement apparatus of the present invention can also be exhibited in a measurement apparatus (not shown) provided with continuous spectrum light instead of the discrete spectrum light LB. That is, a confocal effect can be obtained even in a measurement apparatus including a point light source that emits continuous spectrum light, a dispersion unit, a condensing unit, a spatial filtering optical system, and a detection unit.
  • the dispersion unit chromatically disperses the continuous spectrum light emitted from the point light source in a predetermined direction.
  • a condensing part condenses the said continuous spectrum wavelength-dispersed by the dispersion
  • the spatial filtering optical system spatially filters the continuous spectrum light transmitted or reflected from the sample and containing the sample information at a position conjugate to the condensing position on the sample of the continuous spectrum dispersed by the dispersion unit. .
  • a detection part acquires the information of a sample from the continuous spectrum light containing the information of the sample spatially filtered by the spatial filtering optical system.
  • a continuous focus group is formed at a predetermined position of the sample, and the accuracy is lower than that of the measurement device of the present invention, and information with lower resolution than that of the measurement device of the present invention is acquired. It will be.
  • the center wavelength ⁇ 0 of the discrete spectrum light LA, the resolution of the dispersion unit 14, and the objective lens 38 The numerical aperture fr and the frequency interval fr of the adjacent spectra MA, MA of the discrete spectrum light LA (optical frequency comb spectra LX0, LX1, LX2) are changed to positions p1, p2,. It is preferable that the center interval between the spots of the spectrum MA focused on pn (that is, the distance between the positions p1, p2,..., pn) is set to be equal to or larger than the diameter of the spot of the spectrum MA.
  • the center wavelength ⁇ 0 of the discrete spectrum light LA, the resolution of the dispersion unit 14, the numerical aperture of the objective lens 38, and the adjacent spectra MA, MA (or spectra) of the discrete spectrum light LA optical frequency comb spectra LX0, LX1, LX2.
  • the crosstalk between the pixels is further suppressed by condensing the two-dimensional spot group, which is spatially distributed in a discrete and high-density manner, at a position corresponding to each pixel on the condensing area of the sample S.
  • the mode-resolved spectrum, that is, the confocal image can be acquired with higher accuracy.
  • the second optical system 17 is set so as to be spatially superimposed at a predetermined position of the overlapping portion 19.
  • the center wavelength ⁇ 0 of the discrete spectrum light LA, the frequency interval ⁇ fr between the adjacent spectra MA, MA, the numerical aperture of the lenses 35, 35, 37 used in the second optical system 17 and the resolution of the overlapping portion 19 are described above.
  • the sample is not set as above, from the two-dimensional spot group condensed at different positions p1, p2,.
  • a more accurate mode-resolved spectrum can be obtained without missing or overlapping information from different positions p1, p2,..., Pn of the sample S.
  • a VIPA (first dispersion element) 50 and a diffraction grating (second dispersion element) as the dispersion element 32 of the dispersion unit 14 of each of the measurement apparatuses 10A, 10B, 10C, 10D, and 10E from the first embodiment to the fifth embodiment. ) 54 can be used in combination.
  • the dispersion portion 14A made of the optical system shown in FIG. 16 can be employed.
  • the light collected by the cylindrical lens 48 along the direction of the arrow x is dispersed by the VIPA 50 in the direction of the arrow y.
  • spots of a plurality of spectra MA are spatially superimposed at individual spatial positions along the arrow y direction.
  • a band d1 in which these spot-like spectra MA are scattered in the direction of the arrow y corresponds to the FSR of the VIPA 50.
  • the interval d3 between the plurality of spectrum MA groups in the direction of the arrow y corresponds to the frequency interval fr of the plurality of spectra MA.
  • the diameter of the spots of the plurality of spectra MA depends on the VIPA 50 FSR and finesse (about 1 / 100th of the FSR).
  • the light dispersed in the arrow y direction by the VIPA 50 is diffracted by the diffraction grating 54 in the arrow x direction at the same time as being reflected, and is dispersed for each frequency. Accordingly, the spots of the spectrum MA that have been spatially superimposed are dispersed in the direction of the arrow x, and as a result, the plurality of modes MA are two-dimensionally expanded in the directions of the arrows D1 and D3.
  • the band d4 where the spot-like spectrum MA is scattered in the direction of the arrow x is the spot sp1 of the spectrum MA having the shortest wavelength and the spot sp2 of the spectrum MA having the longest wavelength. This corresponds to an optical frequency difference (ie, wavelength difference) ⁇ .
  • the pitch d2 of the plurality of spectra MA in the direction of the arrow x corresponds to the FSR of the VIPA 50.
  • the center optical frequency ⁇ 0 of the discrete spectrum light LA (optical frequency comb spectrum LX0, LX1, LX2) is set to 194 THz (center wavelength ⁇ 0). 1.55 ⁇ m), the frequency interval fr of the spectrum MA adjacent on the frequency axis of the discrete spectrum light LA is 250 MHz, and the optical frequency difference between the spot sp1 of the spectrum MA with the shortest wavelength and the spot sp2 of the spectrum MA with the longest wavelength Assume ⁇ is 900 GHz, VIPA50 FSR and finesse are 15 GHz and 100.
  • the band d1 in which the spot-like spectrum MA is scattered in the direction of the arrow y is , About 100 ⁇ m.
  • the interval d3 between the plurality of spectrum MA groups in the arrow y direction is 1.67 ⁇ m.
  • a band d4 where the spot-like spectrum MA is scattered in the direction of the arrow x is 600 ⁇ m.
  • the pitch d2 of the plurality of spectra MA in the arrow x direction is 10 ⁇ m.
  • the diameters of the spots of the plurality of spectra MA are 0.1 ⁇ m in the arrow x direction and 1 ⁇ m in the arrow y direction. Therefore, in the dispersion unit 14A and the measuring apparatus 10A adopting the above-described numerical examples, the entire width is 600 ⁇ m in the direction of the arrow x, 60 points at intervals of 10 ⁇ m, and the total width of 100 ⁇ m in the direction of arrow y is 60 points at intervals of 1.67 ⁇ m.
  • the spot-like spectrum MA of the points is two-dimensionally developed and scattered, and the sample S can be irradiated simultaneously.
  • the diffraction limit at the focal point of each spectrum MA is expressed by the following equation (2).
  • NA in the above equation (2) indicates the numerical aperture of the objective lens 38 of the first light condensing unit 15.
  • Each spot diameter of the two-dimensional spot group of the actual spectrum MA is limited by the diffraction limit of the objective lens 38 and the dispersion performance of the diffraction grating.
  • each parameter is appropriately set based on the mutual relationship between the parameters.
  • the sample S is irradiated with light of an optical comb mode independent of each other and composed of a two-dimensional spot group with a fine interval, and the distribution of the mode-resolved amplitude spectrum and the mode-resolved phase spectrum is examined, thereby approaching the diffraction limit.
  • Optical information of the sample S at the irradiation position of the two-dimensional spot group scattered at intervals of ⁇ m order can be acquired instantaneously.
  • a plurality of spectra MA of the discrete spectrum light LA (optical frequency comb spectra LX0, LX1, and LX2). Is a size smaller than the interval between adjacent spots from the center of a plurality of spots forming the two-dimensional spot group.
  • a spectral spot duplicating section for generating a plurality of two-dimensional spot groups in which the centers of the spots are arranged at positions separated by.
  • the measuring device including the spectrum spot replicating unit scans the frequency of the discrete spectrum light LA and interpolates the gaps between adjacent spots of the plurality of spectra MA with the newly generated two-dimensional spot group. Therefore, the measurement apparatus including the spectrum spot replication unit can further improve the resolution as compared with the case where the spectrum spot replication unit is not included.
  • the discrete spectrum light source 22 by changing the frequency interval fr of the adjacent spectra MA and MA on the frequency axis (f axis shown in FIG. 2) of the optical frequency comb spectrum LX0, different positions of the sample S are obtained.
  • a two-dimensional spot group in which the centers of the spots are arranged at positions away from the centers of a plurality of spots of the two-dimensional spot group condensed on p1, p2,. Multiple) can be generated.
  • the two-dimensional spot group is duplicated in this way, it can be said that the pixel at the measurement position in the sample S can be superimposed as shown in FIG.
  • the measuring apparatus which adjusted the frequency interval fr of spectrum MA and MA appropriately compared with the case where it does not adjust, the space
  • the dimension can be made smaller than the interval between adjacent spots in the dimension spot group.
  • each of the measuring devices 10A, 10B, 10C, 10D, and 10E from the first embodiment to the fifth embodiment described above is condensed at different positions p1, p2,.
  • a deconvolution processing unit that performs a deconvolution process on the two-dimensional spot group of the spectrum MA may be provided.
  • a measuring apparatus including a deconvolution processing unit is a spectrum generated from blur characteristics of optical systems such as the first light collecting unit 15 and the second light collecting unit 17 when the sample is irradiated with a two-dimensional spot group of the spectrum MA. The image blur of the two-dimensional spot group of MA can be eliminated.
  • the PSF A deconvolution process is performed by performing an inverse operation using.
  • the detector 20 may be provided with a deconvolution processing unit such as an arithmetic unit that performs such deconvolution processing.
  • the measuring device including the deconvolution processing unit can further suppress crosstalk between the pixels, and the mode-resolved spectrum, that is, the confocal image is more accurately detected. Can be obtained.
  • the phase of the spectrum MA of the optical frequency comb spectrum (first optical frequency comb spectrum) LX0 A third comb light source (not shown) that emits a third optical frequency comb spectrum different from the above may be provided. Further, the detection unit 20 may acquire a mode-resolved phase spectrum based on a phase difference obtained by causing the optical frequency comb spectrum LX0 and the third optical frequency comb spectrum to interfere with each other.
  • the measurement apparatus that does not include the third comb light source has a spot diameter of the spectrum MA at the condensing position on the sample S, and the confocal depth resolution based on the measurement principle of the confocal microscope.
  • Optical information (that is, confocal volume) obtained by integrating the entire ⁇ z can be acquired.
  • the measurement apparatus equipped with the third comb light source as described above, when the confocal depth resolution ⁇ z is set to be in the wavelength order, the spectrum of the first optical frequency comb spectrum and the third optical frequency comb are set.
  • the measurement apparatus including the third comb light source has an amplitude image on the virtual plane where the positions p1, p2,.
  • the phase image of the sample S can be acquired over the range of the confocal depth resolution ⁇ z in the direction of the arrow D1 orthogonal to the virtual plane, and information in the thickness direction of the sample S can be obtained with higher accuracy.
  • the second comb light source may also serve as the third comb light source. That is, the second comb light source may be a light source that emits a third optical frequency comb spectrum in which the phase of the spectrum whose frequency positions are adjacent on the frequency axis is different from the phase of the spectrum MA of the optical frequency comb spectrum LX0. . According to such a configuration, it is possible to acquire the amplitude image and the phase image of the sample S while saving the space of the entire measuring apparatus.
  • the measurement apparatus to which the present invention is applied clear information with high contrast can be obtained at ultra high speed while maintaining high accuracy, and can be applied to industrial confocal laser microscopes and cell observation microscopes. Become. Therefore, the measuring device to which the present invention is applied can be used in a wide field such as a medical field and a measuring field, as well as a bio field for performing a life function analysis. Further, the measurement apparatus to which the present invention is applied is expected to be developed in a field that requires high resolution imaging.
  • a confocal microscope and a phase-contrast microscope which have been used independently so far, can be integrated, so that a three-dimensional image having a very wide depth dynamic range extending from several tens of nm to several mm or more. Can be obtained.
  • Example 1 Two or more spectra MA were wavelength-dispersed one-dimensionally and then condensed into a line shape, and the principle confirmation measurement was performed. As shown in FIG. 19, a laser beam was emitted from an optical comb 61 (manufacturer: Imla America ink, center wavelength: 780 nm, without frequency stabilization control). This optical comb was passed through the half-wave plate 62 and made incident on the diffraction grating 66. The grating pitch of the diffraction grating 66 was 2000 lines / mm.
  • the distance between the diffraction grating 66 and the spherical lens 68 (focal length f1) and the distance between the spherical lens 68 and the index T are both set to the focal length f1.
  • the Fourier plane FP is located on the light irradiation surface of the target and is condensed in a line shape.
  • the light reflected from the index T is again incident on the diffraction grating 66, folded back by the half mirror 64, and incident on the multimode optical fiber 74 by the condenser lens 72.
  • the spectral waveform of the light incident on the multimode optical fiber 74 was acquired by a photodetector 76 such as an optical spectrum analyzer.
  • the focal length f1 was 150 mm. Note that “FP” in FIG. 19 indicates a Fourier plane.
  • FIG. 21 shows the elements and line widths of each group of the test chart.
  • the measurement results of the reflectance dependency (scan position) in each of the predetermined ranges R1, R2, and R3 of the index T are shown in FIGS. 22, 23, and 24, respectively. 22, 23, and 24, it can be seen that the test chart lines can be disassembled. For the range R4, the test chart line could not be disassembled.
  • the spherical lens 68 is changed to an objective lens (not shown), and a line image is obtained from the waveform of the optical comb spectrum (see FIGS. 22, 23, and 24).
  • the index T was moved in the orthogonal direction.
  • a two-dimensional microscopic image of element numbers 2 to 6 of the group 4 in the test chart of the index T was acquired.
  • the acquired microscopic image is shown in FIG.
  • On the “wavelength axis” that is, the optical frequency axis) shown in FIG.
  • a microscopic image was constructed from a spectrum waveform composed of 1000 points with a spectrum acquisition range of 10 nm and a sampling interval of 0.01 nm.
  • the moving range of the index T is set to 232 ⁇ m
  • the moving step is set to 1 ⁇ m / step
  • a microscopic image is constructed from the data of 232 steps.
  • the two-dimensional microscopic images of the element numbers 2 to 6 of the group 4 can be accurately acquired.
  • Example 2 a confocal microscopic line imaging apparatus 150 shown in FIG. 26 was prepared.
  • the same constituent elements as those of the optical system shown in FIG.
  • FIG. 27 shows the arrangement of the diffraction grating 66, the relay lenses 69A (focal length: f2) and 69B (focal length: f2), and the objective lens 70 (focal length: f3).
  • the upper part of FIG. 27 is a view when viewed from above the confocal microscopic line imaging apparatus 150, and the lower part of FIG. 27 is a view when viewed from the side of the confocal microscopic line imaging apparatus 150.
  • the distance between the diffraction position in the diffraction grating 66 and the relay lens 69A is the focal length f2.
  • the interval between the relay lenses 69A and 69B was set to twice the focal length f2.
  • FIG. 28 shows the detection signal intensity when the sample position is changed in the optical axis direction.
  • no pinhole that is, when no pinhole 144 is arranged in the confocal microscope line imaging apparatus 150
  • ⁇ 0.0 mm from the “depth position” of the sample position
  • the signal is detected only within the range of ⁇ 15 ⁇ m from the focus, and the depth is 20 ⁇ m. It turns out that it has resolution. That is, the half width ⁇ of the normalized light intensity was 20 ⁇ m.
  • the index T is moved in the direction orthogonal to the line image (that is, the arrow D30 direction). .
  • a two-dimensional microscopic image of a predetermined range R5 in the test chart of the index T shown in FIG. 20 was acquired.
  • the acquired microscopic images are shown in FIGS.
  • FIG. 29 shows the case of “with pinhole”
  • FIG. 30 shows the case of “without pinhole”.
  • 29 and 30 includes a two-dimensional microscopic image at “depth position 0 ⁇ m” as a sample position and an optical axis direction from “depth position 0 ⁇ m” (that is, an arrow D30 shown in FIG. 26).
  • a two-dimensional microscopic image at a position moved by 100 ⁇ m in a direction orthogonal to the direction) is shown side by side.
  • the microscopic image was constructed from the envelope spectrum of 1000 points with an envelope spectrum acquisition range of 10 nm and a sampling interval of 0.01 nm.
  • the microscopic image was constructed from 100 step data, with the moving range of the index T being 100 ⁇ m and the moving step being 1 ⁇ m / step.
  • FIG. 29 in the case of “with pinhole”, a two-dimensional image in the range R5 of the index T is obtained at “depth position 0 ⁇ m”, and the two-dimensional image is moved by 100 ⁇ m from “depth position 0 ⁇ m”. The image has disappeared. From these results, it can be seen that the confocal microscope line imaging apparatus 150 in which the pinhole 144 is arranged has a high depth resolution and can accurately acquire a two-dimensional confocal microscope image from the discrete spectrum light LA.
  • FIG. 30 shows that in the case of “no pinhole”, two-dimensional images in the range R5 of the index T are obtained at the “depth position 0 ⁇ m”, but originally two-dimensional images in the range R5 are obtained.
  • Example 3 a confocal microscopic line imaging device 152 employing dual optical comb spectroscopy was prepared.
  • the confocal microscopic line imaging apparatus 152 includes a comb light source 102 and a half mirror 148 in addition to the components of the confocal microscopic line imaging apparatus 150. Further, the confocal microscopic line imaging apparatus 152 uses a comb light source 101 phase-locked to the rubidium frequency standard in place of the optical comb 61 which is not controlled for stabilization, employs dual optical comb spectroscopy, and the comb light source 101 is the first one.
  • the comb light source 102 is a second comb light source.
  • the second adjacent frequency intervals fr2 of the plurality of spectra included in the discrete spectrum light LC emitted from the comb light source 102 are included in the discrete spectrum light LB emitted from the comb light source 101. Different from the first adjacent frequency interval fr1 of the plurality of spectra.
  • the half mirror 148 is disposed between the two collimating lenses 145A and 145B. The mirror surface of the half mirror 148 is inclined at a predetermined angle with respect to the optical axis.
  • the comb light source 102 is arranged so that the emitted discrete spectrum light LC is incident on the half mirror 148 at a predetermined angle. With such an arrangement, the laser light that has passed through the pinhole 144 is collimated by the collimating lens 145A. Thereafter, the laser light reflected from the index T and the laser light emitted from the comb light source 102 (that is, the discrete spectrum light LC) are spatially superimposed by the half mirror 148. Therefore, an interferogram repetitive signal (that is, an interferogram sequence) is obtained by detecting the interference signal of the two laser beams by the photodetector 76. In Example 3, a mode-resolved spectrum was acquired by performing Fourier transform on the repetitive signal.
  • FIG. 32 shows a mode-resolved amplitude spectrum acquired by the confocal microscopic line imaging device 152.
  • FIG. 33 is a partially enlarged view of the mode-resolved amplitude spectrum shown in FIG. It can be seen from FIG. 33 that each of the plurality of mode-resolved amplitude spectra is acquired with high contrast in a state where it can be individually separated from the discrete spectrum light including the information of the index T. In addition, from FIG. 32, it can be seen that the mode-resolved amplitude spectrum has irregularities and the information of the index T is reflected.
  • the index T is moved in the direction orthogonal to the line image (that is, the direction of arrow D30). . Then, by repeating the acquisition of the line image and the movement of the index T, the two-dimensional microscopic image of the predetermined range R6 in the test chart of the index T shown in FIG. 20 is obtained as “depth position 0 ⁇ m” and “depth position +120 ⁇ m”. ”
  • the acquired microscopic image is shown in FIG.
  • the microscopic image was constructed from the envelope spectrum of 5000 points with the acquisition range of the envelope spectrum being 1.5 THz and the sampling interval being 250 MHz.
  • the moving range of the index T was set to 150 ⁇ m
  • the moving step was set to 1 ⁇ m / step
  • the microscopic image was constructed from 150 step data.
  • a two-dimensional image having an index T range R6 was obtained at the “depth position 0 ⁇ m”.
  • the two-dimensional image disappeared. Therefore, it can be seen that the confocal microscope line imaging apparatus 152 employing the dual optical comb spectroscopy and having the pinhole 144 can accurately acquire a two-dimensional confocal microscope image from the discrete spectrum light LA.
  • Example 4 Next, as shown in FIG. 35, a confocal microscopic imaging apparatus 160 using a two-dimensional spectral spot group was prepared. 35, the measurement apparatuses 10A, 10B, 10C, 10D, and 10E (particularly the measurement apparatus 10D) of each embodiment and the components thereof and the confocal elements shown in FIG. The same components as those of the microscopic line imaging apparatus 150 are denoted by the same reference numerals, and the description thereof is omitted.
  • the confocal microscopic imaging device 160 includes a discrete spectrum light source 22, a beam splitter 30, a dispersion unit 14, a third condensing unit (condensing unit) 16, an overlapping unit 19, a spatial filtering optical system 18,
  • a half mirror 30 and a discrete spectrum light source (second comb light source) 60 are provided.
  • the detector 20 is a dual optical comb spectrometer and incorporates a so-called discrete spectrum light source 60.
  • the center wavelength ⁇ 0 of the discrete spectrum light LA (optical frequency comb spectrum LX0, LX1, LX2) of the discrete spectrum light source 22 is 1.55 ⁇ m
  • the frequency interval between the adjacent spectrums MA on the frequency axis of the discrete spectrum light LA. fr is 250 MHz
  • optical frequency difference ⁇ between spot sp1 of spectrum MA with the shortest wavelength and spot sp2 of spectrum MA with the longest wavelength is 900 GHz
  • FSR of VIPA50 is 15 GHz
  • pitch of diffraction grating 54 is 2000 grooves / mm
  • pin The diameter of the hole 42 was 50 ⁇ m.
  • the discrete spectrum LA emitted from the discrete spectrum light source 22 passes through the half mirror 30, and is condensed by the cylindrical lens 48 along the direction of the arrow x shown in FIG. Subsequently, the VIPA 50 disperses in a direction orthogonal to the one direction. The light dispersed by the VIPA 50 enters the adjacent diffraction grating 54. Since the extending direction of the diffraction grating 54 is parallel to the arrow y direction, the light reflected by the diffraction grating 54 is diffracted in the direction orthogonal to the one direction at the same time as the reflection, and thereby dispersed for each frequency. Is done.
  • a plurality of mode-resolved spectra are two-dimensionally developed in the directions of the arrow D1 and the arrow D3. Subsequently, the plurality of spectra MA dispersed at different angles for each spectrum are incident on the third condensing unit 16, pass through the relay lenses 34 and 36, and then are respectively positioned at different positions on the sample S by the objective lens 38. Condensed at the same time.
  • Information about the sample S is added to the plurality of spectra MA simultaneously condensed at different positions of the sample S.
  • Discrete spectrum light LB including information on the sample S is reflected from different positions on the sample S, enters the third light collecting unit 16, and is condensed or diffused as appropriate by the third light collecting unit 16.
  • the light passes through the light part 16 and is introduced into the overlapping part 19.
  • the plurality of reflection spectra are incident on the diffraction grating 54 of the overlapping portion 19 at an angle corresponding to each frequency of the plurality of reflection spectra.
  • the plurality of reflection spectra are simultaneously wavelength-dispersed at a common angle with respect to the diffraction grating 54, and are spatially and simultaneously superimposed on the optical axis.
  • a plurality of spatially superimposed reflection spectra are reflected by the beam splitter 30, folded back by the mirror 31, and incident on the spatial filtering optical system 18.
  • the reflection spectrum including the information of the sample S and incident on the spatial filtering optical system 18 is condensed at a conjugate position by the condenser lens 40 and passes through the opening of the pinhole 42.
  • Light and spectrum other than the reflection spectrum including the information of the sample S are cut by the pinhole 42.
  • the reflection spectrum that has passed through the opening of the pinhole 42 is collimated by the collimating lens 44 and enters the detection unit 20.
  • the detection unit 20 acquires a mode-resolved spectrum including information about the sample S from the discrete spectrum light LB including information about the sample S.
  • a plurality of mode-resolved amplitude spectra and mode-resolved phase spectra are two-dimensionally arranged in accordance with different positions of the sample S, so that it is converted into desired information such as an amplitude image and a phase image, and the measurement of the sample S is performed. Complete.
  • a two-dimensional microscopic image of group 4, element 1 of the test chart of index T shown in FIG. 20 was acquired at a depth position of 0 ⁇ m.
  • the acquired mode decomposition spectrum is shown in FIGS. 36 and 37, and the microreflection image is shown in FIG.
  • the microscopic image acquisition range was 580 ⁇ m ⁇ 100 ⁇ m, and a microscopic image of 58 pixels ⁇ 60 pixels was constructed.
  • FIG. 36 and FIG. 37 it means that the optical comb mode number of a huge spectrum is realized, and the information of a huge number of pixels can be acquired collectively.
  • the transmission image of group 4 and element 1 of the index T test chart shown in FIG. 20 corresponding to the measurement region of the microscopic image shown in FIG. 38 is obtained from a near-infrared camera (Goldeye P-008 SWIR (NIR-300), manufacturer: A photograph taken by Allied Vision Technologies) is shown in FIG. Comparing FIG. 38 and FIG. 39, it can be seen that a two-dimensional confocal microscopic image can be accurately acquired from the discrete spectrum light LA although there is a difference in relative ratio. In addition, it was confirmed that the image contrast was reversed from the relationship between the reflection image and the transmission image.
  • the confocal microscopic imaging apparatus 160 can accurately acquire a two-dimensional confocal microscopic image from the discrete spectrum light LA at intervals of the ⁇ m order.
  • FIG. 41 shows an amplitude image of the acquired test target group 3 and element 1
  • FIG. 42 shows a phase image
  • FIG. 43 shows a transmission image of test chart group 4 and element 1 taken by the above-described near-infrared light camera.
  • the comparison between the amplitude image and the near-infrared light camera shows that the region of the amplitude image is the region surrounded by the broken line of the image acquired using the near-infrared light camera. Yes, it was confirmed that the image contrast was reversed from the relationship between the reflection image and the transmission image.
  • the phase image has a lower contrast than the amplitude image. This is because the amplitude image reflects the reflectance of the detection target S, whereas the phase image reflects the depth information of the detection target S. Therefore, the actual size is determined from the phase difference between the portion of the test target where the reflective coat is provided (the white portion of the amplitude image shown in FIG.
  • the portion where the reflective coat is not provided was calculated to be 72 nm.
  • the difference in level between the portion of the test target where the reflective coat was provided and the portion where it was not provided was measured and found to be 75 nm. Therefore, it was confirmed that the measurement value using the confocal microscopic imaging apparatus 160 to which the present invention was applied and the measurement value by digital holography coincided with each other with high accuracy.
  • this is also measured with the confocal microscopic imaging device 160 (CLM shown in the graph of FIG. 44).
  • Example 1 to Example 4 above information can be obtained simultaneously from a plurality of independent mode-resolved spectra having depth resolution, while maintaining high accuracy.
  • Sample information can be acquired at high speed.
  • 10A, 10B, 10C, 10D ... measuring device 14 ... dispersion part 15 ... first light collecting part (light collecting part) 16 ... Third condensing part (condensing part) DESCRIPTION OF SYMBOLS 19 ... Overlapping part 18 ... Spatial filtering optical system 20 ... Detection part 22 ... Point light source (1st comb light source) 32, 33 ... Dispersion element 60 ... Second comb light source LA ... Discrete spectrum light LB ... Discrete spectrum light p1, p2, ..., pn including information on the sample, different positions of the sample, condensing position P3 on the sample ... Conjugate position S ... sample

Abstract

La présente invention est pourvue d'une source de lumière ponctuelle (12) pour émettre la lumière à spectre discret (LA) comprenant au moins deux spectres répartis à des fréquences mutuellement différentes, une partie de diffusion (14) pour diffusion de la lumière à spectre discret dans des directions mutuellement différentes pour chaque spectre, une première partie de condensation de lumière (15) pour condenser des spectres dans des positions mutuellement différentes (p1... pn) d'un échantillon (S), une partie de superposition (19) pour superposer de manière spatiale chaque spectre émis ou réfléchi à partir des positions mutuellement différentes de l'échantillon, un système optique de filtrage spatial (18) pour condenser la lumière à spectre discret (LB) comprenant des informations de l'échantillon sur une position (P3) conjuguée avec la position de condensation sur l'échantillon du spectre diffusé par la partie de diffusion et effectuant le filtrage spatial, et une partie de détection (20) pour acquérir un spectre de décomposition modale comprenant les informations de l'échantillon à partir de la lumière à spectre discret comprenant les informations de l'échantillon.
PCT/JP2016/066636 2015-06-29 2016-06-03 Dispositif de mesure WO2017002535A1 (fr)

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