WO2017002340A1 - 非接触式給電システム - Google Patents

非接触式給電システム Download PDF

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Publication number
WO2017002340A1
WO2017002340A1 PCT/JP2016/003038 JP2016003038W WO2017002340A1 WO 2017002340 A1 WO2017002340 A1 WO 2017002340A1 JP 2016003038 W JP2016003038 W JP 2016003038W WO 2017002340 A1 WO2017002340 A1 WO 2017002340A1
Authority
WO
WIPO (PCT)
Prior art keywords
power supply
circuit unit
capacitor
carrier wave
electrode
Prior art date
Application number
PCT/JP2016/003038
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
傑之 鈴木
大輔 川久保
展史 南
和博 武者
Original Assignee
株式会社アルバック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社アルバック filed Critical 株式会社アルバック
Priority to KR1020187003267A priority Critical patent/KR101904145B1/ko
Priority to CN201680039186.9A priority patent/CN107852030A/zh
Priority to JP2017526170A priority patent/JP6298933B2/ja
Publication of WO2017002340A1 publication Critical patent/WO2017002340A1/ja

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B25J19/0045—Contactless power transmission, e.g. by magnetic induction
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
    • H02J50/005—Mechanical details of housing or structure aiming to accommodate the power transfer means, e.g. mechanical integration of coils, antennas or transducers into emitting or receiving devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/06—Safety devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
    • H02J50/05—Circuit arrangements or systems for wireless supply or distribution of electric power using capacitive coupling
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
    • H02J50/10—Circuit arrangements or systems for wireless supply or distribution of electric power using inductive coupling
    • H02J50/12—Circuit arrangements or systems for wireless supply or distribution of electric power using inductive coupling of the resonant type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J7/00—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
    • H02J7/02—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries for charging batteries from ac mains by converters

Definitions

  • the present invention relates to a non-contact power supply system, and more specifically, an electrode to be fed is a suction electrode of an electrostatic chuck provided in a robot hand of a transfer robot, and is used to feed power to the suction electrode in a non-contact manner.
  • an electrode to be fed is a suction electrode of an electrostatic chuck provided in a robot hand of a transfer robot, and is used to feed power to the suction electrode in a non-contact manner.
  • Patent Document 1 This type of contactless power supply system is known from Patent Document 1, for example.
  • a so-called frog-leg type transfer robot feeds power to a suction electrode provided in the robot hand in a non-contact manner
  • a capacitor, a power supply circuit unit connected to one of the electrodes, and a power receiving circuit unit connected between the other electrode and the adsorption electrode In this case, one electrode of the capacitor is formed of a cylindrical member provided concentrically with the rotation shaft, and the other electrode is rotated relative to the one electrode while maintaining a constant distance between the electrodes.
  • the power supply circuit unit includes a self-excited oscillator that oscillates at a resonance frequency of a resonance circuit including a capacitor, a modulator, and a first control unit that controls the operation of these components, and a carrier wave modulated to a predetermined amplitude. Supply.
  • the power receiving circuit unit includes a resistor provided in parallel to the suction electrode, a rectifier circuit that rectifies the carrier wave at both ends of the resistor, a polarity switching circuit that applies a reverse voltage between the suction electrodes, and controls the operation of these components. And a second control means for applying a DC voltage to the pair of suction electrodes to electrostatically attract or release a substrate such as a silicon wafer to the robot hand.
  • a capacitor mechanically separated between a pair of opposed electrodes, a power supply circuit unit connected to one electrode of the capacitor, and a power reception connected to the other electrode of the capacitor
  • the non-contact type power feeding system of the present invention includes a circuit unit and applies a DC voltage to a power supply target electrode.
  • the power feeding circuit unit includes an oscillator that forms a series resonance circuit together with a capacitor, a modulator that applies amplitude modulation, and power feeding.
  • a first control means for controlling the operation of the circuit unit and capable of supplying a carrier wave modulated to a different amplitude to one electrode of the capacitor, and the power receiving circuit unit is a carrier wave supplied through the capacitor.
  • the first control is performed by supplying the control signal carrier wave modulated to a different amplitude in a form superimposed on the power supply carrier wave supplied from the power supply circuit unit to the power receiving circuit unit via the capacitor. Since the configuration in which communication is performed between the first control unit and the second control unit is adopted, control signal communication can be performed when performing non-contact power feeding without using a separate communication device. Since it can be omitted, the apparatus on which the non-contact power feeding system is mounted is not complicated, and in addition, power consumption and cost can be reduced.
  • a DC voltage is selectively applied to a power supply target electrode
  • a reverse potential DC voltage is applied, or The case where the application of the DC voltage is stopped is included.
  • the second control means may be configured to grasp the control content by the number of times the control signal carrier is supplied, for example.
  • the power supply circuit unit further includes an ammeter for monitoring a current when the carrier wave modulated to the first amplitude is output, and the power receiving circuit unit loads the carrier wave modulated to the first amplitude.
  • a first control means configured to receive a feedback control signal from a change in a current value accompanying a load variation when the load connection circuit is controlled by the second control means.
  • the power supply target electrode can be applied to a suction electrode of an electrostatic chuck provided in a robot hand of a transfer robot.
  • the perspective view which shows the structure of the conveyance robot carrying the non-contact-type electric power feeding system of embodiment of this invention.
  • the graph which shows the change of the electric current value measured with the 1st carrier wave or the 2nd carrier wave from the electric power feeding circuit unit at the time of mutual communication between both the 1st and 2nd control means, and an ammeter, and an ammeter.
  • the electrode to be fed is an electrostatic chuck attracting electrode provided in the robot hand of the transport robot Tr. .
  • Tr is a so-called frog-leg type transfer robot equipped with the non-contact power supply system PS of the present invention.
  • the transfer robot Tr is, for example, arranged in a transfer chamber of a vacuum processing apparatus having a plurality of processing chambers, and transfers a wafer W as a processing object between the processing chambers.
  • the rotary shafts 1a and 1b are respectively driven to rotate by a source, and are connected to the rotary shafts 1a and 1b, and a robot arm 3 having a robot hand 2 at the tip.
  • the robot hand 2 is provided with electrostatic chuck attracting electrodes 4a and 4b.
  • the rotary shafts 1a and 1b are provided with elevating means such as a linear motion motor and an air cylinder, the rotary shafts 1a and 1b and thus when the wafer W is received or delivered in each processing chamber.
  • the robot hand 2 can be moved up and down in the vertical direction.
  • the non-contact type power feeding system PS includes a capacitor 5 mechanically separated between a pair of electrodes 5 a and 5 b arranged opposite to each other, a power feeding circuit unit 6 connected to one electrode 5 a of the capacitor 5, And a power receiving circuit unit 7 connected to the other electrode 5b.
  • the other electrode 5b of the capacitor 5 is integrally provided on the outer surface of the rotating shaft 1b located on the outer side in the radial direction, and the one electrode 5a has a rotating shaft so as to relatively move while maintaining the distance between the electrodes constant. It is comprised from the metal cylindrical member extrapolated to 1b (what is called an air gap type).
  • the distance between the electrodes 5a and 5b is appropriately selected so that the voltage applied to the capacitor 5 is equal to or lower than the discharge voltage limited by Paschen's law, depending on the application.
  • the surface areas of the electrodes 5a and 5b can be selected as appropriate according to the load of the circuit such as the switching circuit 73, and the opposing areas of the electrodes 5a and 5b do not have to be the same.
  • the capacitor 5 having a capacitance in the range of 50 pF to 300 pF can be used. If the capacitance is smaller than 50 pF, there is a stray capacitance with respect to the ground potential such as the capacitor 5 or the wiring, which is not practical. If the capacitance is larger than 300 pF, both electrodes 5a and 5b become too large. There arises a problem that the assembly to the transport robot Tr becomes difficult.
  • the power supply circuit unit 6 is provided outside the transfer chamber where the transfer robot Tr is disposed, for example, and is connected to one electrode 5a of the capacitor 5 by wiring.
  • the power supply circuit unit 6 includes an oscillator 61 that forms a series resonance circuit together with the capacitor 5, a modulator 62 that applies amplitude modulation, and a first control unit 63 that controls the operation of the power supply circuit unit 6, and are different from each other.
  • the carrier wave modulated in amplitude can be supplied to one electrode 5 a of the capacitor 5.
  • an oscillator having a known structure can be used as the series resonant circuit.
  • the inductance of the power receiving circuit unit 7 is limited to about 50 mH in consideration of the size that can be incorporated.
  • the driving frequency is set in the range of 100 kHz to 1 MHz in consideration of the electrostatic capacity.
  • the first control means 63 a publicly known one provided with a microcomputer, a memory, and the like that comprehensively controls the operation of the oscillator 61 and the modulator 62 is used.
  • the power supply circuit unit 6 is provided with an ammeter 64 for monitoring the current when the carrier wave modulated to the first amplitude is output. As will be described later, the feedback control signal is obtained from the change in the current value due to the load fluctuation.
  • the first control means 63 receives the data.
  • the power receiving circuit unit 7 is housed in a metal housing 7 a attached to the lower surface of the robot arm 3, and rectifies the carrier wave supplied to both ends of the resistor 71 through the resistor 71 and the other electrode 5 b of the capacitor 5.
  • a load connection circuit 74 to be connected and a known second control means 75 having a microcomputer, a memory, and the like for controlling these operations are provided.
  • As the rectifier circuit 72 a known circuit using a diode or the like can be used.
  • the switching circuit 73 for example, a publicly known circuit in which a bridge circuit is configured using four switching transistors can be used, and the second control means 75 appropriately controls on / off of each switching transistor of the bridge circuit.
  • a DC voltage is applied to the pair of adsorption electrodes 4a and 4b
  • a reverse DC voltage is applied to the pair of adsorption electrodes 4a and 4b
  • each switching transistor is turned off.
  • the pair of adsorption electrodes 4a and 4b can be grounded.
  • a carrier wave is inputted to the second control means 75 via a demodulation circuit (not shown) so that it can be recognized that the second carrier wave is outputted.
  • the load connection circuit 74 includes a switching element such as a relay circuit, and can be grounded through a resistor (not shown) by switching the switching element.
  • a DC voltage is applied to the attracting electrodes 4a and 4b and mutual communication between the power feeding circuit unit 6 and the power receiving circuit unit 7 is performed. Will be described with reference to FIG.
  • a carrier wave having a predetermined frequency is output from the oscillator 61 of the power feeding circuit unit 6, the first amplitude is modulated by the modulator 62, and the one modulated to the first amplitude is used as the power supply carrier wave Pw through the capacitor 5.
  • all the switching transistors of the switching circuit 73 are turned off.
  • the modulator 62 modulates the second amplitude, which is different from the first amplitude, and modulates the second amplitude.
  • the signal is supplied as a control signal carrier Cw through the capacitor 5.
  • the second control means 75 grasps the control content by the number of times of supply of the control signal carrier Cw output in a predetermined cycle, that is, as shown in the upper side of FIG.
  • the second control means 75 controls the load connection circuit 74 to intermittently connect to the load in a preset correspondence relationship.
  • the current value measured by the ammeter 64 of the power supply circuit unit 6 is changed a plurality of times, for example, twice as shown in the lower side in FIG.
  • the first control means 63 of the power feeding circuit unit 6 can recognize that the second control means 75 of the power receiving circuit unit 7 has received the control content output by the first control means 63.
  • each switching transistor of the switching circuit 73 is appropriately turned on by the second control means 75, and a positive voltage (for example, + 450V) is applied to one of the adsorption electrodes 4a, and a negative voltage (for example, to the other adsorption electrode 4b). , ⁇ 450 V) is applied, whereby the wafer W is electrostatically attracted to the robot hand 2.
  • a positive voltage for example, + 450V
  • a negative voltage for example, to the other adsorption electrode 4b
  • the modulator 62 applies amplitude modulation to the second amplitude different from the first amplitude in the same manner as described above, and the second amplitude.
  • the modulated signal is supplied as a control signal carrier Cw through the capacitor 5.
  • the second control means 75 grasps the control content by the number of times of supply of the control signal carrier wave output in a predetermined cycle, that is, the second control means that the control signal carrier wave Pw is supplied three times, for example.
  • all the switching transistors of the switching circuit 73 are turned off, the pair of chucking electrodes 4a and 4b are grounded, and the electrostatic chucking of the wafer W is released.
  • each switching transistor of the switching circuit 73 is appropriately controlled prior to grounding the pair of chucking electrodes 4a and 4b, so that one chucking is performed.
  • a negative voltage for example, ⁇ 450 V
  • a positive voltage for example, + 450V
  • the second control means 75 may control the load connection circuit 74 so that it is intermittently connected to the load with a preset correspondence relationship.
  • the current value measured by the ammeter 64 of the power supply circuit unit 6 is changed a plurality of times, for example, three times as shown in the lower side in FIG.
  • the first control means 63 of the power feeding circuit unit 6 can recognize that the second control means 75 of the power receiving circuit unit 7 has received the control content output by the first control means 63.
  • the same polarity is continuously applied to one of the attracting electrodes 4a and the other attracting electrode 4b. It is preferable to control so that no voltage is applied.
  • control signal carrier Cw modulated with different amplitudes is supplied in a form superimposed on the power supply carrier Pw supplied from the power supply circuit unit 6 to the power receiving circuit unit 7 via the capacitor 5.
  • communication of control signals is also performed when performing non-contact power feeding without using a separate communication device.
  • the communication device can be omitted, the apparatus on which the non-contact power feeding system is mounted is not complicated, and in addition, power consumption and cost can be reduced.
  • the present invention is not limited to the above.
  • the case where the single oscillator 61 is used has been described as an example.
  • a plurality of oscillators may be used, and a carrier wave may be output by appropriately switching the oscillators.
  • the power receiving circuit unit 7 is provided with the load connection circuit 74 as an example.
  • the switching circuit 73 may be used by omitting this.
  • the second control means 75 has been described as an example in which the control content is grasped by the number of times of supply of the control signal carrier wave output in a predetermined cycle, but the present invention is not limited to this. It is also possible to grasp the control content from the amplitude modulation time.
  • a load fluctuation is caused by the load connection circuit 74, and the current value measured by the ammeter 64 of the power feeding circuit unit 6 is changed a plurality of times, so that this is used as a feedback control signal from the power receiving circuit unit 7.
  • the present invention is not limited to this.
  • the control content can be grasped from the voltage fluctuation value.
  • PS Non-contact power feeding system
  • 5 Capacitor, 5a, 5b ... Pair of electrodes
  • 6 Power feeding circuit unit
  • 61 Oscillator
  • 62 ... Modulator
  • 63 First control means
  • 64 ... Ammeter
  • 7 Power receiving circuit unit
  • 72 Rectifier circuit
  • 73 Switching circuit

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
PCT/JP2016/003038 2015-07-02 2016-06-23 非接触式給電システム WO2017002340A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020187003267A KR101904145B1 (ko) 2015-07-02 2016-06-23 비접촉 방식의 급전 시스템
CN201680039186.9A CN107852030A (zh) 2015-07-02 2016-06-23 非接触式供电系统
JP2017526170A JP6298933B2 (ja) 2015-07-02 2016-06-23 基板搬送方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015133632 2015-07-02
JP2015-133632 2015-07-02

Publications (1)

Publication Number Publication Date
WO2017002340A1 true WO2017002340A1 (ja) 2017-01-05

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Application Number Title Priority Date Filing Date
PCT/JP2016/003038 WO2017002340A1 (ja) 2015-07-02 2016-06-23 非接触式給電システム

Country Status (5)

Country Link
JP (1) JP6298933B2 (zh)
KR (1) KR101904145B1 (zh)
CN (2) CN107852030A (zh)
TW (1) TWI645643B (zh)
WO (1) WO2017002340A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019042824A (ja) * 2017-08-30 2019-03-22 株式会社ダイヘン ロボットシステム
JP2019161123A (ja) * 2018-03-15 2019-09-19 株式会社ダイヘン 搬送装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MX2020010865A (es) 2018-04-16 2020-12-11 Sekisui Chemical Co Ltd Pelicula de capa intermedia para vidrio laminado, y vidrio laminado para techo de automovil.
CN113452148B (zh) * 2021-06-08 2022-09-16 华中科技大学 用于模块化变换器的具备信息传输功能的辅助电源

Citations (3)

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JP2010537613A (ja) * 2007-08-17 2010-12-02 Ｔｍｍｓ株式会社 電気双極子間の近接場における遠隔縦結合によって電気エネルギを伝達し、分配し、かつ管理するための方法および装置
JP2012085404A (ja) * 2010-10-08 2012-04-26 Murata Mfg Co Ltd 電力伝送システム及び電子棚札システム
JP2013235991A (ja) * 2012-05-10 2013-11-21 Ulvac Japan Ltd 給電装置

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JP2009089520A (ja) * 2007-09-28 2009-04-23 Takenaka Komuten Co Ltd 電力供給システム
JP5238420B2 (ja) * 2008-09-11 2013-07-17 矢崎総業株式会社 車両用ワイヤレス充電システム
CN101924396B (zh) * 2009-06-16 2014-02-05 上海科勒电子科技有限公司 用于洁具上的无线充/供电系统
JP5677875B2 (ja) * 2011-03-16 2015-02-25 日立マクセル株式会社 非接触電力伝送システム
US9502920B2 (en) * 2011-11-16 2016-11-22 Semiconductor Energy Laboratory Co., Ltd. Power receiving device, power transmission device, and power feeding system

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2010537613A (ja) * 2007-08-17 2010-12-02 Ｔｍｍｓ株式会社 電気双極子間の近接場における遠隔縦結合によって電気エネルギを伝達し、分配し、かつ管理するための方法および装置
JP2012085404A (ja) * 2010-10-08 2012-04-26 Murata Mfg Co Ltd 電力伝送システム及び電子棚札システム
JP2013235991A (ja) * 2012-05-10 2013-11-21 Ulvac Japan Ltd 給電装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019042824A (ja) * 2017-08-30 2019-03-22 株式会社ダイヘン ロボットシステム
JP7006910B2 (ja) 2017-08-30 2022-01-24 株式会社ダイヘン ロボットシステム
JP2019161123A (ja) * 2018-03-15 2019-09-19 株式会社ダイヘン 搬送装置
JP7080074B2 (ja) 2018-03-15 2022-06-03 株式会社ダイヘン 搬送装置

Also Published As

Publication number Publication date
JP6298933B2 (ja) 2018-03-20
KR101904145B1 (ko) 2018-10-04
KR20180025937A (ko) 2018-03-09
JPWO2017002340A1 (ja) 2018-04-05
CN107852030A (zh) 2018-03-27
TW201707339A (zh) 2017-02-16
TWI645643B (zh) 2018-12-21
CN114050667A (zh) 2022-02-15

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