WO2016201823A1 - 亲水光刻胶、量子点层图案化的方法及量子点发光二极管 - Google Patents
亲水光刻胶、量子点层图案化的方法及量子点发光二极管 Download PDFInfo
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- WO2016201823A1 WO2016201823A1 PCT/CN2015/091031 CN2015091031W WO2016201823A1 WO 2016201823 A1 WO2016201823 A1 WO 2016201823A1 CN 2015091031 W CN2015091031 W CN 2015091031W WO 2016201823 A1 WO2016201823 A1 WO 2016201823A1
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- photoresist
- quantum dot
- hydrophilic
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- dot layer
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 184
- 239000002096 quantum dot Substances 0.000 title claims abstract description 149
- 238000000059 patterning Methods 0.000 title claims abstract description 78
- 238000000034 method Methods 0.000 title claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 51
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- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 15
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 14
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 12
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- 239000007864 aqueous solution Substances 0.000 claims description 11
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- 239000002253 acid Substances 0.000 claims description 8
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- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 claims description 4
- 229940092714 benzenesulfonic acid Drugs 0.000 claims description 4
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 claims description 4
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- 235000006408 oxalic acid Nutrition 0.000 claims description 4
- 229920001568 phenolic resin Polymers 0.000 claims description 4
- 239000011975 tartaric acid Substances 0.000 claims description 4
- 235000002906 tartaric acid Nutrition 0.000 claims description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims description 4
- YNJBWRMUSHSURL-UHFFFAOYSA-N trichloroacetic acid Chemical compound OC(=O)C(Cl)(Cl)Cl YNJBWRMUSHSURL-UHFFFAOYSA-N 0.000 claims description 4
- 239000011260 aqueous acid Substances 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 claims 1
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- 238000006243 chemical reaction Methods 0.000 description 6
- VEIYJWQZNGASMA-UHFFFAOYSA-N cyclohex-3-en-1-ylmethanol Chemical compound OCC1CCC=CC1 VEIYJWQZNGASMA-UHFFFAOYSA-N 0.000 description 6
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- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
Definitions
- Embodiments of the present invention relate to a hydrophilic photoresist, a quantum dot layer patterning method, and a quantum dot light emitting diode (QLED), a quantum dot color film, and a display device.
- QLED quantum dot light emitting diode
- Quantum Dot also known as nanocrystal, is a nanoparticle composed of II-VI or III-V elements. Since electrons and holes are quantum confined, continuous band structure changes. It is a discrete energy level structure with molecular characteristics. It can emit fluorescence after being excited. Its luminescence spectrum can be controlled by changing the size of quantum dots. The fluorescence intensity and stability are very good. It is a good electroluminescent material. .
- quantum dots have been widely used as display materials in the field of display, for example, quantum dot light-emitting diodes fabricated using quantum dots as luminescent materials for luminescent layers.
- Embodiments of the present invention provide a method of quantum dot layer patterning in response to the problem of prior art patterned methods of destroying quantum dots.
- a method of quantum dot layer patterning comprising the steps of:
- a step of forming a photoresist material layer on the substrate a step of patterning the photoresist, and a step of performing hydrophilic treatment on the photoresist;
- the step of stripping the photoresist The step of stripping the photoresist.
- the step of forming a photoresist material layer on the substrate, the step of patterning the photoresist, and the step of performing hydrophilic treatment on the photoresist do not limit the order;
- the step of subjecting the photoresist to hydrophilic treatment may be performed before patterning after forming a photoresist material layer on the substrate, or after forming a photoresist material layer and patterning.
- the step of forming a photoresist material layer on the substrate, the step of patterning the photoresist, and the step of hydrophilically treating the photoresist together form a hydrophilic photoresist pattern.
- the pattern of the hydrophilic photoresist just exposes the area on the substrate where the quantum dots need to be coated.
- the step of performing a hydrophilic treatment on the photoresist is performed before the step of forming a layer of the photoresist material; the step of forming a layer of the photoresist material on the substrate and pro-contacting the photoresist
- the steps of water treatment include:
- Patterning is performed after the above-described hydrophilic photoresist material layer is formed on the substrate.
- the hydrophilic photoresist has a hydrophilic dialdehyde content of from 1 to 20% by weight.
- the step of performing a hydrophilic treatment on the photoresist is performed after the step of forming a layer of the photoresist material; and the step of performing the hydrophilic treatment on the photoresist comprises:
- the substrate is heated and the surface of the photoresist forms a hydrophilic group.
- the acid is selected from one or more of oxalic acid, maleic acid, maleic anhydride, acetic acid, trichloroacetic acid, benzenesulfonic acid, tartaric acid, citric acid, racemic malic acid.
- the hydrophilic dialdehyde aqueous solution has a mass concentration of 3 to 20% and a pH of 2 to 5.5.
- the soaking time is between 5 and 30 minutes.
- the heating the substrate comprises: heating at a temperature of 90 to 160 ° C for 5 to 60 minutes.
- the hydrophilic dialdehyde structure is:
- R is a hydrophilic group
- n 1 is 0 or a positive integer
- n 2 is a positive integer
- n 3 is 0 or a positive integer
- n 4 is a positive integer
- (n 1 +n 2 +n 3 )*n 4 3 ⁇ 10.
- the hydrophilic group comprises one or more of a carboxyl group, a carboxyl salt, a hydroxyl group, an amino group, a quaternary ammonium salt, an ester group, a hydrazide group, an amide group, or a sulfonic acid group.
- the photoresist comprises a phenolic resin.
- the step of forming a layer of photoresist material on the substrate further comprises the step of performing quantum dot anchoring force treatment on the substrate.
- the quantum dot anchoring force treatment increases the adhesion of the substrate to the quantum dots.
- Embodiments of the present invention provide a method for preparing a hydrophilic dialdehyde, which is a synthesis of 2-ethanol-hexanedialdehyde: using 3-cyclohexene-1-methanol (CAS: 1679-51-2) as a raw material.
- the three-step reaction produces hydrophilic dialdehyde 2-ethanol-hexanedialdehyde.
- the reaction process is as follows:
- hydrophilic dialdehyde The above method for preparing a hydrophilic dialdehyde is merely an example, and those skilled in the art can empirically prepare other hydrophilic group-containing hydrophilic dialdehydes by using other similar raw materials.
- Embodiments of the present invention also provide a photoresist for quantum dot patterning, the photoresist containing a hydrophilic group.
- Embodiments of the present invention also provide a quantum dot light emitting diode (QLED) comprising a light emitting layer comprising the quantum dot layer prepared by the patterning method described above.
- QLED quantum dot light emitting diode
- Embodiments of the present invention also provide a quantum dot color film comprising the quantum dot layer prepared by the above-described patterning method.
- Embodiments of the present invention also provide a display device comprising the QLED or quantum dot color film described above.
- the method of quantum dot layer patterning of the embodiment of the present invention comprises the step of hydrophilically treating the photoresist, which can improve the hydrophilic property of the photoresist, and the quantum dots are in the photoresist due to the lipophilicity of the quantum dots.
- the adhesion on the top is extremely low.
- the quantum dot patterning method of an embodiment of the present invention is applicable to including quantum dots Light-emitting diodes.
- FIG. 1 is a schematic diagram showing the steps of a conventional quantum dot layer patterning method.
- FIG. 2 is a schematic view showing the steps of a method of patterning a quantum dot layer according to Embodiment 2 of the present invention.
- FIG. 3 is a schematic diagram showing the steps of another method of quantum dot layer patterning according to Embodiment 2 of the present invention.
- FIG. 4 is a schematic view showing the structure of a quantum dot according to Embodiment 2 of the present invention.
- reference numerals have the following meanings: 1. a substrate; 2. a photoresist; 3. a quantum dot; 31, a luminescent core; 32, a semiconductor shell; 33, an organic ligand.
- the substrate 1 shows a quantum dot patterning method comprising coating a photoresist 2 on a substrate 1 and exposing it, and then coating an entire layer of quantum dots 3 on the substrate 1, wherein the substrate 1 is lithographically free.
- the quantum dot 3 at the glue 2 is required to be retained. Since the bonding force of the quantum dot 3 and the photoresist 2 is strong, if the quantum dot 3 on the photoresist 2 is directly cleaned at this time, the substrate 1 is also washed away without the photoresist 2; It is a complete layer. If the photoresist 2 is directly stripped at this time, the photoresist 2 is under the quantum dot 3 and cannot be brought into contact with the stripping liquid, and the stripping is not possible.
- hydrophilic treatment refers to treating the contact angle of the photoresist with water to be less than 40°.
- the hydrophilically treated photoresist has a contact angle to water of less than or equal to 35°.
- quantum dots when a substance is modified by "hydrophobic” or “lipophilic”, it means that the contact angle of the substance described with water is greater than 40°.
- quantum dots have a contact angle with water of greater than 40 due to the presence of lipophilic groups (or hydrophobic groups) on the surface.
- the quantum dots have a contact angle with water of greater than or equal to 45°.
- hydrophilic photoresist pattern means that the surface of the photoresist pattern is hydrophilic.
- the surface of the photoresist pattern is hydrophilic so that the adhesion between the quantum dots having hydrophobicity (or lipophilicity) on the surface and the photoresist is low, and it is relatively easy to remove quantum dots on the surface of the photoresist pattern.
- Embodiment 1 A method of quantum dot layer patterning, comprising the steps of:
- Forming a hydrophilic photoresist pattern including:
- the photoresist pattern is stripped.
- the forming a hydrophilic photoresist pattern includes:
- the layer of hydrophilic photoresist material is then patterned to form a photoresist pattern.
- the hydrophilic treatment of the photoresist includes:
- the substrate is heated and the surface of the layer of photoresist material forms a hydrophilic group.
- the method of patterning a quantum dot layer according to embodiment 4, wherein the heating the substrate comprises: heating at a temperature of 90 to 160 ° C for 5 to 60 minutes. For example, it is heated at a temperature of 90 to 100 ° C for 5 to 60 minutes.
- R is a hydrophilic group
- n 1 is 0 or a positive integer
- n 2 is a positive integer
- n 3 is 0 or a positive integer
- n 4 is a positive integer
- (n 1 +n 2 +n 3 )*n 4 3 ⁇ 10.
- hydrophilic group is selected from the group consisting of a carboxyl group, a carboxyl salt, a hydroxyl group, an amino group, a quaternary ammonium salt, and an ester group. And a hydrazide group, an amide group, and a sulfonic acid group.
- Performing quantum dot anchoring treatment on the substrate includes treating the substrate with a silane coupling agent.
- a silane coupling agent is a type of organosilicon compound containing two different chemical groups in a molecule, which can be represented by the formula YSiX 3 .
- Y is a non-hydrolyzable group, including an alkenyl group (e.g., a vinyl group), and a functional group having a terminal such as Cl, NH 2 , SH, an epoxy, N 3 , a (meth)acryloyloxy group, or an isocyanate group; a hydrocarbon group, that is, a carbon functional group;
- X is a hydrolyzable group, including Cl, OMe, OEt, OC 2 H 4 OCH 3 , OSiMe 3 and OAc, and the like.
- the silane coupling agent has a reactive group capable of chemically bonding with an inorganic material (such as glass, silica sand, metal, etc.) and a reactive group chemically bonded to an organic material (synthetic resin or the like) in its molecule, it can be used. For surface treatment.
- an inorganic material such as glass, silica sand, metal, etc.
- an organic material synthetic resin or the like
- the silane coupling agent When the silane coupling agent is used for treatment, the silane coupling agent is formulated into a dilute solution having a concentration of 0.5 to 1%, and only a thin solution of a silane coupling agent is applied to the cleaned surface to be used after drying. You can apply the glue.
- the solvent used may be water, alcohol (methanol selected for methoxysilane, ethanol selected from ethoxysilane), or a mixture of hydroalcohols. In some embodiments, the solvent used is selected from the group consisting of water without fluoride ions, inexpensive non-toxic ethanol, and isopropanol.
- the silane coupling agent does not contain an aminoalkylsilane, the solution prepared from the silane coupling agent needs to be added with acetic acid as a hydrolysis catalyst to adjust the pH to 3.5 to 5.5.
- An exemplary method of quantum dot anchoring treatment involves placing the substrate in hexamethyldisilazane (HMDS) vapor, heating to 100-180 ° C, placing it for 20-120 min, and then taking it out for cooling.
- HMDS hexamethyldisilazane
- Embodiment 13 The method of quantum dot layer patterning according to embodiment 1, wherein the photoresist pattern just exposes a region on the substrate where quantum dots need to be coated.
- Embodiment 14 A photoresist for quantum dot layer patterning, wherein the photoresist contains a hydrophilic group, wherein the hydrophilic group is derived from a hydrophilic dialdehyde.
- Embodiment 15 The photoresist for quantum dot layer patterning of Embodiment 14, wherein the structural formula of the hydrophilic dialdehyde is:
- R is a hydrophilic group
- n 1 is 0 or a positive integer
- n 2 is a positive integer
- n 3 is 0 or a positive integer
- n 4 is a positive integer
- (n 1 +n 2 +n 3 )*n 4 3 ⁇ 10.
- Embodiment 16 The photoresist for quantum dot layer patterning of Embodiment 14 or 15, wherein the hydrophilic group is selected from the group consisting of a carboxyl group, a carboxyl salt, a hydroxyl group, an amino group, a quaternary ammonium salt, an ester group, a hydrazide group, Amido group, and sulfonic acid group.
- the hydrophilic group is selected from the group consisting of a carboxyl group, a carboxyl salt, a hydroxyl group, an amino group, a quaternary ammonium salt, an ester group, a hydrazide group, Amido group, and sulfonic acid group.
- Embodiment 17 A quantum dot light emitting diode (QLED) comprising a light emitting layer, wherein the light emitting layer comprises the quantum dot layer prepared by the method of quantum dot layer patterning according to any one of embodiments 1-13.
- QLED quantum dot light emitting diode
- Embodiment 18 A quantum dot color film comprising the quantum dot according to any one of embodiments 1-13 A quantum dot layer prepared by a layer patterning method.
- Embodiment 19 A display device comprising the QLED described in Embodiment 17 or the quantum dot color film described in Embodiment 18.
- This embodiment provides a method for quantum dot layer patterning, including the following steps:
- a step of forming a photoresist material layer on the substrate by using a photoresist a step of patterning the photoresist material layer to form a photoresist pattern, and a step of performing hydrophilic treatment on the photoresist;
- the step of stripping the photoresist pattern is the step of stripping the photoresist pattern.
- the steps are not limited;
- the step of subjecting the photoresist to a hydrophilic treatment may be performed before patterning after forming the photoresist material layer, or after forming a photoresist material layer and patterning.
- the method for patterning a quantum dot layer of the present embodiment includes the step of performing a hydrophilic treatment on the photoresist, so that the hydrophilicity of the photoresist can be improved, and since the quantum dots are lipophilic (or hydrophobic), The adhesion of the quantum dots to the photoresist is extremely low.
- the photoresist is stripped, the quantum dots on the target position of the substrate are not peeled off.
- the target position refers to a region on the substrate where quantum dots need to be coated.
- the method of quantum dot patterning of embodiments of the present invention is applicable to light emitting diodes including quantum dots.
- This embodiment provides a method for patterning a quantum dot layer, as shown in FIG. 2-4, including the following steps:
- the photoresist 2 is subjected to a hydrophilic treatment to improve the hydrophilic property of the photoresist 2.
- the quantum dot 3 includes three portions, namely a luminescent core 31, a semiconductor shell 32, and an organic ligand 33.
- the quantum dot patterning method of an embodiment of the present invention is suitable for preparing a light emitting diode display including quantum dots.
- the step of performing a hydrophilic treatment on the photoresist 2 is performed after the step of forming a material layer of the photoresist 2; the step of performing the hydrophilic treatment on the photoresist 2 includes:
- the substrate 1 is heated, and the surface of the photoresist 2 layer forms a hydrophilic group.
- the surface of the photoresist 2 can be modified only to modify the surface of the photoresist 2 to be hydrophilic, so as to reduce the quantum dot 3 on the photoresist 2. Adhesion.
- the patterning method is an example of exposure and development.
- the photoresist 2 may be subjected to hydrophilic treatment, then exposed and developed to form a hydrophilic photoresist pattern, coated with quantum dots 3, and then washed.
- the quantum dots 3 remaining on the surface of the photoresist 2 are removed, and finally the photoresist 2 is stripped.
- the photoresist 2 is exposed, developed, and then subjected to a hydrophilic treatment, and the quantum dots 3 are coated, and the quantum dots 3 remaining on the surface of the photoresist 2 are washed away, and finally the photolithography is performed.
- Glue 2 is an example of exposure and development.
- the photoresist 2 may be subjected to hydrophilic treatment, then exposed and developed to form a hydrophilic photoresist pattern, coated with quantum dots 3, and then washed.
- the quantum dots 3 remaining on the surface of the photoresist 2 are removed, and finally the photoresist 2 is stripped.
- the acid is selected from one or more of the group consisting of oxalic acid, maleic acid, maleic anhydride, acetic acid, trichloroacetic acid, benzenesulfonic acid, tartaric acid, citric acid, and racemic malic acid.
- hydrophilic dialdehyde aqueous solution can be prepared by using any of the above acids.
- the hydrophilic dialdehyde aqueous solution has a mass concentration of 3 to 20% and a pH of 2 to 5.5.
- the aqueous hydrophilic dialdehyde solution is adjusted with an acid to a mass concentration of 3 to 20% and a pH of 2 to 5.5.
- the soaking time is between 5 and 30 minutes.
- heating the substrate comprises: heating at a temperature of 90 to 160 ° C for 5 to 60 minutes.
- heating at a temperature of 90 to 160 ° C for 5 to 60 minutes allows the surface of the photoresist 2 to sufficiently react with the aqueous solution of the hydrophilic dialdehyde.
- the hydrophilic dialdehyde structure is:
- R is a hydrophilic group
- n 1 is 0 or a positive integer
- n 2 is a positive integer
- n 3 is 0 or a positive integer
- n 4 is a positive integer
- (n 1 +n 2 +n 3 )*n 4 3 ⁇ 10.
- Embodiments of the present invention provide a method for preparing a hydrophilic dialdehyde, which is a synthesis of 2-ethanol-hexanedialdehyde: using 3-cyclohexene-1-methanol (CAS: 1679-51-2) as a raw material.
- the three-step reaction produces hydrophilic dialdehyde 2-ethanol-hexanedialdehyde.
- the reaction process is as follows:
- the hydrophilic group includes one or more of a carboxyl group, a carboxyl salt, a hydroxyl group, an amino group, a quaternary ammonium salt, an ester group, a hydrazide group, an amide group, or a sulfonic acid group.
- the photoresist comprises a phenolic resin.
- a linear phenol resin is reacted with a hydrophilic dialdehyde to form a bulk phenol resin, and a hydrophilic group is introduced into the phenol resin.
- the step of forming a layer of photoresist 2 material on the substrate 1 further includes the step of performing quantum dot anchoring treatment on the substrate 1.
- the substrate is subjected to quantum dot 3 anchoring treatment before the photoresist 2 is coated on the board 1.
- the step of performing hydrophilic treatment on the photoresist 2 may also be performed before the step of forming a material layer of the photoresist 2;
- the step of forming a layer of the photoresist 2 material and the step of performing the hydrophilic treatment on the photoresist 2 include:
- the photoresist 2 is mixed with a hydrophilic dialdehyde to obtain a hydrophilic photoresist containing a hydrophilic group;
- hydrophilic photoresist 2 material layer is formed on the substrate 1.
- the photoresist 2 can be modified into a photoresist 2 containing a hydrophilic group to reduce the adhesion of the quantum dots 3 on the photoresist 2.
- the hydrophilic photoresist has a hydrophilic dialdehyde content of from 1 to 20% by weight.
- the hydrophilic dialdehyde content is 1 to 20% by weight.
- the present embodiment provides a photoresist for quantum dot layer patterning, the photoresist containing a hydrophilic group, wherein the hydrophilic group is derived from a hydrophilic dialdehyde.
- the structural formula of the hydrophilic dialdehyde is:
- R is a hydrophilic group
- n 1 is 0 or a positive integer
- n 2 is a positive integer
- n 3 is 0 or a positive integer
- n 4 is a positive integer
- (n 1 +n 2 +n 3 )*n 4 3 ⁇ 10.
- the hydrophilic group is selected from the group consisting of a carboxyl group, a carboxyl salt, a hydroxyl group, an amino group, a quaternary ammonium salt, an ester group, a hydrazide group, an amide group, and a sulfonic acid group.
- the dialdehyde is 2-ethanol-hexanedialdehyde.
- 2-ethanol-hexanedialdehyde was synthesized by the following method: 3-cyclohexene-1-methanol (CAS: 1679-51-2) was used as a raw material to form a hydrophilic dialdehyde 2-ethanol-hexane after three steps of reaction.
- Aldehyde the reaction process is as follows:
- This embodiment provides a QLED comprising the quantum dot layer prepared by the patterning method described in Example 2.
- the QLED further includes a cathode, an anode, and an electron injection layer, an electron transport layer, a hole blocking layer, a hole transport layer, and a hole injection layer between the cathode and the anode; the pattern described in Embodiment 2
- the quantum dot prepared by the method is provided as a light-emitting layer between the hole blocking layer and the hole transport layer.
- the present embodiment provides a quantum dot color film comprising the quantum dot layer prepared by the patterning method of Embodiment 2.
- the embodiment provides a display device including the QLED of Embodiment 4 or the quantum dot color film of Embodiment 5.
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Abstract
Description
Claims (19)
- 一种量子点层图案化的方法,包括以下步骤:形成亲水光刻胶图案,包括:用光刻胶在基板上形成光刻胶材料层,对光刻胶材料层进行构图从而形成光刻胶图案,和对光刻胶进行亲水处理;涂布量子点;除去保留在光刻胶图案上的量子点;和剥离光刻胶图案。
- 根据权利要求1所述的量子点层图案化的方法,其中,所述对光刻胶进行亲水处理在形成光刻胶材料层之前进行;所述的形成亲水光刻胶图案包括:将光刻胶与亲水性二醛混合得到含有亲水基团的亲水性光刻胶;在基板上形成所述亲水性光刻胶材料层;和然后对所述亲水性光刻胶材料层进行构图从而形成光刻胶图案。
- 根据权利要求2所述的量子点层图案化的方法,其中,所述亲水性光刻胶中亲水性二醛含量为1-20wt%。
- 根据权利要求1所述的量子点层图案化的方法,其中,所述对光刻胶进行亲水处理在形成光刻胶材料层之后进行;对光刻胶进行亲水处理包括:配制含酸的亲水性二醛水溶液,所述亲水性二醛中含有亲水基团;将形成光刻胶材料层的基板浸泡于所述水溶液中;将基板加热,光刻胶材料层的表面形成亲水基团。
- 根据权利要求4所述的量子点层图案化的方法,其中,所述酸选自草酸、马来酸、马来酸酐、乙酸、三氯乙酸、苯磺酸、酒石酸、柠檬酸、和消旋苹果酸。
- 根据权利要求4或5所述的量子点层图案化的方法,其中,所述亲水性二醛水溶液的质量浓度为3~20wt%、pH为2~5.5。
- 根据权利要求4-6中任一项所述的量子点层图案化的方法,其中,所述浸泡的时间为5~30min。
- 根据权利要求4所述的量子点层图案化的方法,其中,所述将基板加热包括:在90~160℃的温度下加热5~60min。
- 根据权利要求2-9中任一项所述的量子点层图案化的方法,其中,所述亲水基团选自羧基、羧盐、羟基、氨基、季铵盐、酯基、酰肼基、酰胺基、和磺酸基。
- 根据权利要求1-10中任一项所述的量子点层图案化的方法,其中,所述光刻胶包括酚醛树脂。
- 根据权利要求1所述的量子点层图案化的方法,其中所述方法还包括,在形成所述光刻胶材料层之前,对所述基板进行量子点锚定力处理。
- 根据权利要求1所述的量子点层图案化的方法,其中,所述光刻胶图案在基板上恰好暴露出需要涂覆量子点的区域。
- 一种量子点层图案化用光刻胶,其中,所述光刻胶含有亲水基团,其中所述亲水基团源自亲水性二醛。
- 根据权利要求14或15的量子点层图案化用光刻胶,其中,所述亲水基团选自羧基、羧盐、羟基、氨基、季铵盐、酯基、酰肼基、酰胺基、和磺酸基。
- 一种量子点发光二极管(QLED),包括发光层,其中,所述发光层包括权利要求1-13任一项所述的量子点层图案化的方法制备的量子点层。
- 一种量子点彩膜,包括权利要求1-13任一项所述的量子点层图案化的方法制备的量子点层。
- 一种显示装置,包括权利要求17中所述的QLED或权利要求18中所述的量子点彩膜。
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