WO2016184517A1 - Dispositif convoyeur pour le transport de marchandises sans contact - Google Patents

Dispositif convoyeur pour le transport de marchandises sans contact Download PDF

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Publication number
WO2016184517A1
WO2016184517A1 PCT/EP2015/061125 EP2015061125W WO2016184517A1 WO 2016184517 A1 WO2016184517 A1 WO 2016184517A1 EP 2015061125 W EP2015061125 W EP 2015061125W WO 2016184517 A1 WO2016184517 A1 WO 2016184517A1
Authority
WO
WIPO (PCT)
Prior art keywords
transport
superconductor
transport means
guide arrangement
contactless
Prior art date
Application number
PCT/EP2015/061125
Other languages
German (de)
English (en)
Inventor
Wilfried Stoll
Georg Berner
Elvira STEGMEYER
Marco STOCKER
Jens FÖRSTER
Original Assignee
Festo Ag & Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo Ag & Co. Kg filed Critical Festo Ag & Co. Kg
Priority to PCT/EP2015/061125 priority Critical patent/WO2016184517A1/fr
Priority to DE112015006310.2T priority patent/DE112015006310B4/de
Publication of WO2016184517A1 publication Critical patent/WO2016184517A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L13/00—Electric propulsion for monorail vehicles, suspension vehicles or rack railways; Magnetic suspension or levitation for vehicles
    • B60L13/04—Magnetic suspension or levitation for vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L13/00—Electric propulsion for monorail vehicles, suspension vehicles or rack railways; Magnetic suspension or levitation for vehicles
    • B60L13/10—Combination of electric propulsion and magnetic suspension or levitation

Definitions

  • the invention relates to a conveyor for contactless transport of goods, with a transport, which is designed for assignment to a cargo and with a guide assembly, which is formed for contactless guidance of the transport along a transport path, wherein the transport means at least one magnet assembly, in particular one Permanent magnet, and wherein the guide assembly comprises at least one superconductor, wherein the guide assembly is associated with at least one cooling device, which is designed for cooling of the superconductor for providing superconducting properties for contactless spacing of the transport means.
  • a conveyor device is known from EP 0 483 748 A2, in which a magnetic path created from a plurality of permanent magnets is designed for the contactless, floating guidance of a superconductor, which is provided for the transport of goods to be transported.
  • a multiplicity of coils is provided, which extend along the path of movement of the superconductor and which, by means of targeted activation, can exert a driving force without contact with the superconductor.
  • the invention is based on the object to provide a conveyor, which allows a more flexible design of the transport route.
  • This object is achieved in that the superconductor in two mutually perpendicular spatial directions each having an extension which is greater than an extension of the transport in the respective spatial directions to allow a freely selectable design of the transport route.
  • the invention thus provides that the superconductor has a surface area which is determined by the two mutually perpendicular spatial directions.
  • the superconductor extends in a plane.
  • the surface area of the superconductor in particular a plane, determines, for example, a work table that extends in the horizontal.
  • the surface, in particular the plane in which the superconductor extends is dimensioned so that its dimensions are substantially larger than the dimensions of the means of transport. It may be in the one spatial direction and / or in the other spatial direction, ie in the X and / or Y direction, by 5 to 500 times, in particular by 10 to 100 times, preferably by 50 times greater than the means of transport.
  • the surface or plane can then, for example, form the basis of a handling and processing system, on which the transport means with the transported goods picked up thereon can be moved in a contactless manner away from the surface or plane.
  • the superconductor has a three-dimensionally shaped surface, for example a curved surface.
  • the magnetic means associated with the transport means may, for example, comprise a permanent magnet arrangement or be designed as a permanent magnet arrangement for providing a constant magnetic flux.
  • the magnet device may comprise one or more electrically operable magnetic coils, which are provided for a demand-dependent, dynamic provision of magnetic flux.
  • the drive arrangement and / or the transport means is associated with a drive device in order to effect a transport movement of the transport means along the transport path.
  • the drive means can now be effected along the transport path, the desired movement of the transport means and the associated cargo.
  • the means of transport not only carries the transported goods, but is also equipped with the drive device in order to be able to form propulsion forces with respect to the superconductor.
  • the superconductor is assigned a drive device. This can be designed for a provision of driving forces on the means of transport, for example by means of magnetic coupling and / or fluid streams, in particular air jets.
  • the drive device associated with the superconductor can be designed as an actuator for a displacement of the superconductor, in particular a tilting of the superconductor, in order thereby to cause a movement of the transport means.
  • the drive device is stationary along the superconductor, that is arranged in the plane.
  • the transport is used in this variant as a purely passive component for transporting the cargo.
  • the drive device is thus optionally in the means of transport and / or along the transport route.
  • the means of transport can be dimensioned substantially smaller and has a considerably lower weight, which is why the means of transport can accommodate larger and / or heavier goods to be transported.
  • the means of transport according to the invention are much more flexible compared to means of transport with integrated cooling devices.
  • the drive device for a movement initiation between transport and guide arrangement is an.
  • the means of transport this includes, for example, a Energyver supply and a controller. If the drive device is located in the work table, then in the means of transport, e.g. only correspondingly arranged permanent magnets for the contactless, spaced floating state relative to the superconductor.
  • the drive device is designed as a coil device which is assigned to the means of transport or the superconductor.
  • a coil device with a plurality of discrete coils has the advantage that these coils corre sponding permanent magnets can face each other, whereby the propulsion is generated.
  • a change in direction can be carried out (forward and reverse) and it can be selectively run over points, which can be traveled to each other alternative transport sections.
  • the guide assembly includes a superconductor and is preferably disposed within the table.
  • the Sup- Raleiter is preferably formed as a high-temperature superconductor or type II superconductor, in particular of materials such as yttrium barium copper oxide (YBCO) and provides superconducting properties when cooled to or below its material-specific transition temperature.
  • YBCO yttrium barium copper oxide
  • the superconductor provides at least magnetic interactions with the magnetic means equipped with the means of transport, which allow a contactless floating of the transport over the superconductor.
  • a "programming" of the superconductor is tuned to the means of transport and the magnetic device provided thereon, that the transport means along a "programmed" in the superconductor movement path is guided floating and thereby can be moved in at least one spatial direction along the superconductor.
  • the superconductor is made of a thin, superconducting strip material.
  • the strip material is relatively flexible and forms the transport route in a work table.
  • the strip material at least partially forms a surface of the guide arrangement facing the transport means or is arranged below an insulation layer which determines a surface of the guide arrangement facing the transport means.
  • the insulation layer can be formed by way of example from a foam material or also from an evacuated area.
  • a cooling of the superconductor is made possible, for example, by a cooling device being stationary in the artery. Beitsston is integrated or that the entire conveyor is disposed in an environment in which prevail temperatures at or below the critical temperature of the superconductor.
  • the "programming magnetic field" provided to the superconductor during the cooling process is at or below its critical temperature along the
  • Constructed transport path consistently and forms a support path for the contactless floating state of the transport.
  • drive magnetic fields extending parallel to the support stretch and formed during the cooling of the superconductor can be "programmed in” during cooling of the superconductor to its critical temperature with a transport device assigned to the provision of magnetic alternating fields drive means for providing propulsive forces.
  • a flexible, permanent-magnetic strip is designed for abutment on the guide arrangement in order to enable the transport path to be fixed as a "programming magnet" during cooling of the superconductor to or below its transition temperature
  • the transport route can be freely defined and changed be provided differently shaped processing stations, which may be located in a variety of positions.
  • the "programming magnet” comprises one or more permanent magnet arrangements and / or coil arrangements which are designed to provide magnetic fields to the superconductor and at least determine the carrying path of the transport path provide alternating magnetic fields that allow magnetic interaction with the means of transport to provide propulsive forces.
  • the flexible, permanent-magnetic strip has at least one magnetization extending continuously along an extension line and at least one magnet array arranged parallel thereto and structured along the extension line, in particular with alternating magnetic polarization.
  • the permanent magnetic band provides a magnetic field that is formed in defined spatial directions, so that in the "storage" of this magnetic field in the superconductor, which takes place during the cooling of the superconductor at or below its critical temperature, a clear spatial association between the permanent magnetic band and at least one superconductor is achieved.
  • a particularly preferred embodiment of the invention provides that the guide arrangement is assigned at least one approachable by the transport processing station.
  • the conveyor is a handling system on which one or more handling and / or processing stations is / are provided, which can be approached. On In this way, more or less large system tables can be formed, on which a plurality of stations are provided. One or more handling and / or processing stations can be approached consciously, whereby other stations are passed.
  • a variant of the invention provides that the processing station is associated with a propulsion device, which is designed for a, preferably contactless, interaction with the transport means for providing propulsive forces for the transport.
  • the means of transport can be transported without own drive device at least until the next processing station.
  • the means of transport itself does not require any active drive, but is itself passive.
  • Such a propulsion device can in particular for the contact-type or contactless provision of a pulse on the
  • Transport means may be formed, for example by means of a fluid flow or magnetic repulsion forces.
  • the transport path has at least one branch, wherein the guide arrangement in the region of the branch is associated with a switching device for influencing a direction of movement for the means of transport at the junction and / or wherein a transport means associated with the drive means for influencing a Movement direction is formed for the means of transport at the junction.
  • a plurality of transport sections are "programmed in" in the superconductor, which can preferably be driven by the means of transport at random,
  • switches are arranged at the branches of the transport routes, so that the means of transport have different transitions. can drive on sections of port sections.
  • the means of transport herewith can approach a plurality of handling and / or processing stations freely selectable in different order.
  • the transport path in the region of the branching by a coil arrangement arranged below the superconductor, which can provide a strong magnetic field is reprogrammed while maintaining or falling below the critical temperature, so that without any action of the transport means in each case a default for each driving section of transport can be made.
  • Figure 1 is a plan view of a handling and processing system
  • Figure 2 is a side view of the handling and processing system of Figure 1;
  • Figure 3 is a plan view of a transport
  • Figure 4 shows a section IV - IV by the transport means according to Figures 3 and 5;
  • FIG. 5 shows a view of the underside of the transport medium.
  • Figure 6 is an enlarged view of the section VI of Figure 1 of the transport path;
  • Figure 7 is an enlarged view of the section VII of Figure 1 of the transport path
  • FIG. 8 shows a detail of the underside of a permanent magnetic strip
  • FIG. 9 shows a section IX - IX through the band according to FIG. 8.
  • FIG. 10 shows a detail of the underside of a permanent magnetic strip for a first switch part
  • Figure 10 shows a section on the underside of a permanent magnetic belt for a second switch part.
  • FIG. 1 shows a handling and processing system 8 which comprises a plurality of handling and / or processing stations 28, 30, 32, 34 and 36.
  • a freely designable transport path 24 extends on a surface of a work table such that the processing stations 28, 30, 32, 34 and 36 can be approached by a transport means 22.
  • the transport means 22 transports a transported material 38, which is supplied in the individual stations 28 to 36, there processed, for example, and then discharged again.
  • the item to be transported 38 is supplied to the transport means 22 in an infeed station 50 and removed and removed by the transport means 22 in a discharge station 52.
  • Figure 1 is still an alternative, free shapable transport path 25 can be seen, which deviates by means of a switch 54 from the transport path 24 and is incorporated in a switch 56 in this again.
  • the transport path 25 may also extend in sections parallel to the transport path 24, which is shown as an indication.
  • FIG. 2 shows a side view of the handling and processing system 8, wherein the internal structure is apparent.
  • a cooling device 42 for example a Stirling engine with a cold finger 58, with which a superconductor 10, in particular a high-temperature superconductor, can be cooled to or below its transition temperature.
  • the superconductor 10 is formed as a surface superconductor of a strip material, in particular YBCO, with superconducting properties and is exemplified on a suitable insulating layer 60 and is otherwise surrounded by a vacuum 64, which, together with the superconductor 10, the insulating layer 60 and the cold finger 58 prevails in a fluid-tight container 62 in order to effect an advantageous isolation of the superconductor 10.
  • a vacuum 64 which, together with the superconductor 10, the insulating layer 60 and the cold finger 58 prevails in a fluid-tight container 62 in order to effect an advantageous isolation of the superconductor 10.
  • Any spacers between superconductor 10 and container 62 are preferably not required, but at least not shown for the sake of simplicity.
  • On or above the work table 26 are the handling and / or processing stations 28, 30 and 36, while the transport means 22 with the transported material 38 floats above the surface of the superconductor 10.
  • the transport path 24 "programmed in” in the superconductor 10 is located underneath the transport means 22, as can be seen in Figure 1. Furthermore, it can be seen from Figure 1 that the work table comprising the superconductor 10 serving as a guide arrangement is arranged in an x direction and in a for this vertical y-direction respectively Basically, it is assumed that the transport path "programmed" in the superconductor 10 for an at least almost completely constant distance of the
  • Transport means 22 is formed opposite the superconductor 10. In a further embodiment of the handling and processing system, not shown, it is provided to provide the transport path 24 "programmed" in the superconductor 10 with a variable depth component, so that the distance between the transport means 22 and the superconductor 10 changes along the transport path be provided that the transport 22, the processing stations with a smaller distance relative to the superconductor 10 anelle than in other areas of the transport path 24th
  • FIG. 3 shows in an enlarged view and purely schematically a plan view of the transport means 22, which is designed in the manner of a shuttle and the transported material 38 carries.
  • section IV - IV shown in FIG. 4 it can be seen that a magnet arrangement formed by way of example as a permanent magnet 18 is located on the underside.
  • the permanent magnet 18 is rod-shaped and extends, as can be seen from the bottom view of Figure 5, along the center line of the transport means 22 exemplarily, the permanent magnet 18 a according to the illustration of Figure 4 in the vertical direction extending, not graphically illustrated magnetization so that, for example, the north pole of the permanent magnet 18 is arranged on an underside of the transport means 22.
  • the permanent magnet 18 is flanked on its two longitudinal sides by a plurality of discrete electric coils 66, which can be controlled individually and whose winding axis sen are also aligned in the vertical direction according to the illustration of Figure 4.
  • the coil 66 serve to provide magnetic fields and are each electrically connected to a controller 68 and a power supply device 70, such as an accumulator.
  • the controller 68 can provide each of the coils 66 with electrical energy in a predeterminable polarity, so that the coils 66 can provide magnetic fields along their winding axes, the field direction depending on the electrical polarity.
  • Figures 6 and 7 show an enlarged view of the sections VI and VII of the illustrated in Figure 1
  • the continuous path 72 formed with always the same orientation of the stored magnetic field lines can be seen, which extends continuously along the transport path 24.
  • the superconductor 10 embossed, soap-shaped regions 74, which were impressed or "programmed” by external magnetic fields with different polarity during the cooling of the superconductor 10 at or below its transition temperature in the superconductor 10 and purely by way of example alternately have a north pole N or a south pole S.
  • the trajectory 72 has e.g. a polarity south-north-south.
  • FIG. 7 also shows the course of the track 72 and the embossed indo-shaped areas 74 extending laterally next to it.
  • the path 72 divides and forms the switch 54.
  • the transport means 22 is guided without contact floating along the transport path 24, since the permanent magnet 18 due to its magnetic field has a magnetic interaction with those contained in the superconductor 10 and by the "programming The "permanent magnet 18" thus becomes non-contact floating at a certain distance above the working table 26 and exactly above the path of the track 72 held.
  • the coils 66 of the transport means 22 By suitable control and energization of the coils 66 of the transport means 22, this can come into magnetic interaction with the areas 74, whereby propulsion forces on the transport means 22 can be caused.
  • the coils 66 are supplied by the controller 68 with alternating electrical currents and thereby generate magnetic traveling fields for interaction with the areas 74.
  • the transport means 22 along the transport path shown in Figure 6 24 to move, with a speed of movement of the means of transport in particular of a Frequency of the traveling fields provided by the coils 66 depends.
  • the transport means 22 In the area of the switch 56, the transport means 22 can follow either the transport route 24 or the transport route 25. In this way, in the superconductor 10 of the work table 26, which is advantageously designed as a surface superconductor 44, two different transport paths 24 and 25 are stored, which can take the transport means 22 optional.
  • a permanent magnetic belt 48 is placed on the work table 26 by way of example, which exemplarily consists of plastic and in the manner of a flexible ruler in at least one spatial direction is curvable.
  • FIG. 8 A section of such a band 48 is shown in FIG. 8, whereby FIG. 9 shows the cross section IX - IX.
  • Within the band 48 are a first permanent magnet strand 76 and a plurality of discrete permanent magnets 78, which are arranged laterally next to the permanent magnet strand 76.
  • the position of the position of the permanent magnet strand 76 and the individual permanent magnets 78 is selected so that they correspond to the position of the permanent magnet 18 and the coils 66 in the transport means 22.
  • the magnetic field of the central permanent magnet strand 76 is, for example, oriented in such a way that its north pole points towards the underside of the band 48, while the magnetic fields of the laterally adjacent permanent magnet strands are aligned in the opposite direction.
  • the individual permanent magnets 78 have alternating magnetic fields, so that the permanent magnets 78 alternate with their north pole N and south pole S in the direction of the underside of the band 48.
  • a flexible band steel 80 which gives the band 48 a certain dimensional stability, is integrated in the band 48.
  • the undersides of the permanent magnet strand 76 and the lateral permanent magnets 78 have a distance 82 to the underside of the band lying on the upper side of the work table. This distance 82 serves as a spacer for the permanent magnet strands 76 and the permanent magnets 78.
  • the permanent magnets 76, 78 are now placed with the band 48 along the desired transport path 24 for the transport means 22 on the surface of the work table 26.
  • such a band can be provided hen that this is formed without the steel strip and thus can also be arranged with respect to the planar surface of the superconductor 10 in regions with less or greater distance to determine a transport path, not shown, in which the transport a variable distance from the superconductor 10th occupies.
  • the magnetic fields of the permanent magnet strand 76 and the lateral permanent magnets 78 penetrate the surface superconductor 44 formed as a type II superconductor whose temperature, e.g. is reduced below the material-specific transition temperature by means of the cooling device 42.
  • the impressed magnetic field is now stored and the band 48 can be removed.
  • FIGs 10 and 11 each show a switch part 84 and 86 of a switch 54 or 56.
  • the switch part 84 has a permanent strand 76 and is provided on one side with the permanent magnets 78, which, as shown in Figure 8, alternately a north pole N and a Assign south pole S to the underside of the switch part 84. Accordingly, the switch part 86 is formed, in which the permanent strand 76 and on the other side, the permanent magnets 78 are provided provided.
  • the two switch parts 84 and 86 are now assembled before performing the cooling of the superconductor 10 at the intended position for the switch 54 and 56 and form the direction indicated in Figure 1 switch 54 and 56. After the cooling of the superconductor 10 on or below its transition temperature, the switch parts 84, 86 can be removed as well as the other bands and other switch parts, not shown, and the transport lines 24, 25 are impressed in the superconductor 10, as long as the transition temperature is reached or exceeded.
  • Transport means 22 occupy either one or the other path 72 or 73, so that the transport means 22 takes one or the other direction.
  • a group of coils 66 which are arranged on the left of the permanent magnet 18, may temporarily be provided with electrical energy.
  • a right of the permanent magnet 18 arranged group of coils 66 is supplied with electrical energy.
  • it can be influenced in which direction the transporting means 22 moves in the area of the switch 56.
  • a demand-dependent "reprogramming" of the transport path in the region of a switch takes place by mounting a coil arrangement below the superconductor in the switch region which can optionally provide a magnetic field extending in one or the other direction Magnetic field is chosen so that, despite maintaining or falling below the critical temperature for the superconductor, a realignment of the present in the superconductor
  • Flushing can make in the switch so that a local reprogramming of the superconductor can be done without temperature change.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Non-Mechanical Conveyors (AREA)

Abstract

L'invention concerne un dispositif convoyeur pour le transport de marchandises (38) sans contact, qui comprend un moyen de transport (22), conçu pour être associé à une marchandise transportée (38), et un système de guidage (23), conçu pour guider sans contact le moyen de transport (22) le long d'une voie de transport (24), ledit moyen de transport (22) comprenant au moins un dispositif magnétique, en particulier un aimant permanent (18), et le système de guidage (23) comprenant au moins un supraconducteur (10), au moins un dispositif de refroidissement (42) étant associé audit système de guidage (23), ledit dispositif de refroidissement étant conçu pour refroidir le supraconducteur (10) afin de développer des caractéristiques supraconductrices permettant une mise à distance sans contact du moyen de transport (22). Selon l'invention, le supraconducteur (10) présente une étendue dans deux directions (X, Y) dans l'espace perpendiculaires l'une à l'autre qui est supérieure à une étendue du moyen de transport (22) dans chacune desdites directions (X, Y) dans l'espace, ce qui permet d'offrir une certaine liberté de choix en termes de configuration de la voie de transport (24).
PCT/EP2015/061125 2015-05-20 2015-05-20 Dispositif convoyeur pour le transport de marchandises sans contact WO2016184517A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/EP2015/061125 WO2016184517A1 (fr) 2015-05-20 2015-05-20 Dispositif convoyeur pour le transport de marchandises sans contact
DE112015006310.2T DE112015006310B4 (de) 2015-05-20 2015-05-20 Fördereinrichtung zur kontaktlosen Förderung von Transportgütern und Verfahren zum Betreiben einer Fördereinrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2015/061125 WO2016184517A1 (fr) 2015-05-20 2015-05-20 Dispositif convoyeur pour le transport de marchandises sans contact

Publications (1)

Publication Number Publication Date
WO2016184517A1 true WO2016184517A1 (fr) 2016-11-24

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WO (1) WO2016184517A1 (fr)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
DE102019206653A1 (de) * 2019-05-08 2020-11-12 Festo Se & Co. Kg Transportverfahren und Transportsystem

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Publication number Priority date Publication date Assignee Title
DE102022102692B3 (de) 2022-02-04 2023-07-20 Syntegon Technology Gmbh Transportvorrichtung zu einem Transport von Produkten und Verfahren zu einem Transportieren von Produkten mittels einer Transportvorrichtung

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US3327265A (en) * 1963-09-24 1967-06-20 Philips Corp Superconductive device for causing stable and free floating of a magnet in space
JPS63299760A (ja) * 1987-05-28 1988-12-07 Canon Inc 搬送装置および半導体製造装置
JPH01295606A (ja) * 1988-05-20 1989-11-29 Hitachi Ltd 浮上搬送システム
EP0483748A2 (fr) * 1990-10-29 1992-05-06 Hitachi, Ltd. Appareil de lévitation magnétique à supraconducteur
US5467718A (en) * 1992-07-20 1995-11-21 Daifuku Co., Ltd. Magnetic levitation transport system with non-contact inductive power supply and battery charging
JP2007189820A (ja) * 2006-01-12 2007-07-26 Railway Technical Res Inst 小規模の磁気浮上式搬送システム
JP2008001496A (ja) * 2006-06-23 2008-01-10 Kochi Univ Of Technology 移動ユニット

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EP0695026A3 (fr) 1991-06-28 1997-03-26 Hitachi Ltd Caps supraconducteur composite et système de lévitation magnétique
JP3094104B1 (ja) 1999-08-31 2000-10-03 工業技術院長 超電導磁気浮上輸送システム
DE10357264B4 (de) 2003-12-02 2010-12-30 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Einrichtung zur Erzielung von Fahrtrichtungsänderungen für supraleitende Magnetschwebesysteme

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3327265A (en) * 1963-09-24 1967-06-20 Philips Corp Superconductive device for causing stable and free floating of a magnet in space
JPS63299760A (ja) * 1987-05-28 1988-12-07 Canon Inc 搬送装置および半導体製造装置
JPH01295606A (ja) * 1988-05-20 1989-11-29 Hitachi Ltd 浮上搬送システム
EP0483748A2 (fr) * 1990-10-29 1992-05-06 Hitachi, Ltd. Appareil de lévitation magnétique à supraconducteur
US5467718A (en) * 1992-07-20 1995-11-21 Daifuku Co., Ltd. Magnetic levitation transport system with non-contact inductive power supply and battery charging
JP2007189820A (ja) * 2006-01-12 2007-07-26 Railway Technical Res Inst 小規模の磁気浮上式搬送システム
JP2008001496A (ja) * 2006-06-23 2008-01-10 Kochi Univ Of Technology 移動ユニット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019206653A1 (de) * 2019-05-08 2020-11-12 Festo Se & Co. Kg Transportverfahren und Transportsystem
DE102019206653B4 (de) 2019-05-08 2021-08-12 Festo Se & Co. Kg Transportverfahren und Transportsystem

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DE112015006310B4 (de) 2021-11-04
DE112015006310A5 (de) 2017-12-21

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