WO2016166079A1 - Piège cryogénique - Google Patents

Piège cryogénique Download PDF

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Publication number
WO2016166079A1
WO2016166079A1 PCT/EP2016/057964 EP2016057964W WO2016166079A1 WO 2016166079 A1 WO2016166079 A1 WO 2016166079A1 EP 2016057964 W EP2016057964 W EP 2016057964W WO 2016166079 A1 WO2016166079 A1 WO 2016166079A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
flow
housing
insert
cooling elements
Prior art date
Application number
PCT/EP2016/057964
Other languages
German (de)
English (en)
Inventor
Thomas KRÜCKEN
Walter Franken
Original Assignee
Aixtron Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aixtron Se filed Critical Aixtron Se
Publication of WO2016166079A1 publication Critical patent/WO2016166079A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0003—Condensation of vapours; Recovering volatile solvents by condensation by using heat-exchange surfaces for indirect contact between gases or vapours and the cooling medium
    • B01D5/0012—Vertical tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0003—Condensation of vapours; Recovering volatile solvents by condensation by using heat-exchange surfaces for indirect contact between gases or vapours and the cooling medium
    • B01D5/0015—Plates

Definitions

  • the invention relates to a cleaning device for condensing volatile constituent of a gas stream, as used downstream of a reactor of a CVD coating plant, in particular a MOCVD plant.
  • a CVD coating apparatus gaseous starting materials are introduced into a reactor where they react chemically with each other or with substrates contained in the reactor.
  • the starting materials or the reaction products are volatiles in a gas stream leaving the reactor.
  • the gas stream flows through a cold trap, which is cooled by a cooling medium, so that on surfaces of the cold trap, a condensation of the volatile constituents takes place, as long as the temperature of the wall is below the condensation temperature of the volatile constituent. With such a cold trap, the remaining process gases or the reaction products to be removed from the gas stream, which is subsequently further purified and / or flows through a vacuum pump.
  • DE 299 04465 Ul describes a cold trap with mutually parallel cooling elements, which can be flowed through by a cooling liquid and which are arranged parallel to each other. From a first plenum, a cooling liquid is fed into the cooling elements. The cooling liquid exits the cooling elements into a second plenum.
  • DE 86 25 127 Ul describes a cold trap in which a gas stream is diverted several times.
  • DE 69736 124 T2 describes a cold trap with a housing in which a delgangartige cooling coil sits and the medium to be cooled must flow past cooled gas baffles.
  • Heat exchangers are known from US 4,142,580 and US 3,681,936
  • DE 2 537 639 AI describes a device for freezing solid components from vapor-gas mixtures, wherein a coolant is passed through a plurality of juxtaposed cooling elements.
  • the cooling elements formed as tubes extend from a lower plenum to an upper plenum.
  • the supply line to the lower plenum is made by a central supply pipe.
  • DE 1 203 226 also describes a device for separating sublimatable substances, wherein side surfaces are fixed to cooling tubes whose distance decreases in the flow direction.
  • FR 2 146 100 describes a cold trap with a container which is insolated towards the outside and in which there is an inner container in which a cooling liquid is stored.
  • the cooling liquid flows through a multiplicity of torus-shaped cooling channels.
  • US 7,067,088 B2 describes a polymerization reactor having a plurality of evenly spaced temperature exchange surface elements.
  • a device for condensing volatiles of a gas stream which has a housing.
  • the housing has a cup-shaped lower part with an opening and a gas-tight closing the opening lid.
  • the cover can rest gas-tight on the opening edge of the lower part by means of seals and be braced with the edge.
  • the insert has a plurality of cooling elements. The cooling elements are arranged so that they cross a multi-section gas channel.
  • the gas channel consists of a plurality of gas flow channels arranged one behind the other in the flow direction.
  • the gas flow channels can be parallel to each other. to run.
  • the cooling elements can likewise run parallel to one another and preferably transversely to the gas flow channels. It is an upper and a lower plenary provided.
  • One of the Plena is fed by a coolant.
  • the other of the Plena has a coolant drainage.
  • the cooling elements extend from one plenum to the other plenum, preferably from an upper plenum to a lower plenum.
  • the housing which is a container, has a gas inlet and a gas outlet.
  • the gas inlet may be formed by a pipe arranged near the opening pipe.
  • the gas outlet may be formed by a pipe socket arranged near the bottom of the housing.
  • a gaseous medium can pass through an opening in the wall of the container into the container and exit through a wall of the container again from the container.
  • Inside the housing are gas guide elements, which redirect the gas flow from the gas inlet to the gas outlet several times. In this case, it is provided in particular that the gas flow diverted several times crosses the cooling elements several times.
  • the cooling elements may be formed by rectilinear tubes which are held at their opposite ends in openings of plates forming walls of upper or lower plenums, respectively.
  • the gas guide plates may be flat plate-shaped objects which are arranged parallel to the plates holding the free ends of the cooling elements.
  • the Gasleitbleche may alternately have opposite gas passage openings, which are each arranged at the edge of the housing.
  • a gas stream can thus be deflected in stages and meandering flow between two opposite wall portions of the preferably cylindrical housing.
  • the gas stream flows in each case in the transverse direction to the cylinder axis of the housing via a guide plate, in order then to enter through an adjacent the wall of the housing arranged gas passage opening in an axially offset plane, and then below the Gasleitblechs in the opposite direction to flow another gas passage opening.
  • the gas flow channels have different free cross-sectional areas from each other.
  • Free cross-sectional areas are to be understood as meaning the cross-sectional areas in which no flow guidance elements or cooling elements run, that is, for example, an area that is delimited by two opposing gas guide plates and two adjacent cooling elements. Since a plurality of cooling elements intersect the gas flow channel, the free cross-sectional area is many times smaller than the total cross-sectional area of the gas flow channel. These free cross-sectional areas are to be smaller according to an aspect of the invention in the flow direction. This can be achieved structurally by reducing the distance of parallel gas guide plates in the flow direction. It is also envisaged that for this purpose, the distances of cooling elements in the flow direction decreases. In detail, two adjacent cooling elements or two adjacent gas guide plates have a minimum distance from each other in a direction transverse to the flow direction.
  • the insert or the cooling volume of the container has two volume sections, wherein first cooling elements are arranged in an upstream section and second cooling elements are provided in a downstream section.
  • the second cooling elements are more closely spaced than the first cooling elements.
  • the cooling surface flow volume ratio is smaller than in a downstream region, so that in an upstream region, the cooling performance is lower than in the downstream region.
  • the larger free cross-sectional areas have the advantage that they adhere to the free surface.
  • the cooling elements or the Gasleitblechen thicker condensate layers can be deposited without clogging the gas flow channels, as in the downstream area, where a gas phase depletion has already taken place on the volatile components, so that there is to be reckoned with a lower deposition rate, as in the upstream region ,
  • the coolant flows in the opposite direction to the gas flow through the cavity of the container.
  • the coolant inlet in the lid of the housing, the coolant inlet is connected to a coolant line that directs the coolant to a lower plenum.
  • the lower plenum is connected to the upper plenum with several parallel tubes.
  • the coolant thus flows from bottom to top through the tubular cooling elements to the upper plenum, which is connected to a coolant outlet.
  • the gas to be cleaned flows from top to bottom through the cold trap, where it is deflected several times, crossing the cooling elements several times.
  • further cooling of the gas takes place through the second cooling elements. It may also be to be flowed through by a cooling liquid tubes or lumens.
  • the cooling elements in the second section are solid, preferably highly conductive bodies, in particular rods, which are connected to the plenum in a manner which is highly thermally conductive.
  • the upper plenum and lower plenum may occupy equal volumes; however, the upstream portion preferably occupies a larger volume than the downstream portion.
  • the volume ratios are preferably three quarters to one quarter.
  • the cooling trap according to the invention is used in particular in the gas outlet system of a MOCVD system, wherein the gases used for dry etching or the reaction products formed during dry etching are frozen out inside the cold trap.
  • the cold trap according to the invention is thus used in an in-situ cleaning step used.
  • the inventive cold trap can be particularly chlorides of main group III, ie GaCl x and A1C1 X freeze.
  • FIG. 1 is a perspective view of a cold trap
  • Fig. 7 is a view according to Figure 1, wherein the attached to the cover 2
  • Insert 3 is removed from the lower housing part 1 is in a first perspective view and
  • the exemplary embodiment illustrated in the drawings is a cleaning device for use in the exhaust gas duct of a coating installation, for example a MOCVD coating installation, and is used for the deposition of layers or for in situ cleaning of the reactor of the coating installation extruded out gaseous reaction products or starting materials from a carrier gas stream.
  • the device has a housing which consists of a lower housing part 1 and a housing cover 2.
  • the lower housing part 1 is a cup-shaped body with a circular bottom 23 and with a cylindrical side wall 24.
  • the side wall has in the region of its opening a fixedly connected to the side wall opening edge 7, which projects radially.
  • a gas inlet 16 in the form of a pipe socket through which the exhaust gas to be cleaned can flow into the cylindrical internal volume of the container.
  • a gas outlet 17 in the form of a pipe socket, through which the gas can emerge from the container.
  • the container wall 24 has a large gas passage opening in the region of the gas inlet 16.
  • the gas passage opening 27 of the wall 24 of the gas outlet 17 is smaller than the cross-sectional area of the gas outlet nozzle, so that the gas passage opening 27 is spaced from the bottom 23. It thus forms a ground level
  • the housing cover 2 Surrounded by the opening edge 7 opening of the lower housing part 1 is closed by a housing cover 2.
  • the housing cover 2 has a cover plate 8, which rests on the opening edge 7 with the interposition of a seal 25.
  • the insert 3 is fixedly connected to the cover 2. But it can also be firmly connected to the lower housing part.
  • the insert 3 consists essentially of a plurality of mutually parallel cooling elements 4, which are each formed by tubes.
  • the upper mouth sections 4 'of the cooling elements 4 are stuck in openings of the cover plate 8, so that the tubular cooling elements 4 open into an upper plenum 5 arranged above the cover plate 8.
  • the plenum 5 forms a collecting volume to collect cooling medium emerging from the cooling elements 4 and to transport it away through a coolant outlet 14.
  • the coolant outlet 14 is seated on a plenum wall 9, which extends parallel to the cover plate 8.
  • the existing in particular of a metal cooling elements 4 are connected with its second mouth end 4 "with a lower plenum 6. They put this in openings in a bottom plate 18 which is parallel to the cover plate 8 and the wall of the lower plenum 6 forms at A further base plate 19 bounds the lower plenum 6 downwards, and a coolant inlet 13 arranged in the region of the cover is connected to the lower plenum 6 via a coolant connection line 15, so that through the coolant inlet 13 fed cooling medium, for example, a cooling liquid, such as liquid nitrogen, ethanol, glycol or water can flow into the lower plenum 6, and then pass through the mutually parallel cooling elements 4 in the upper plenum 5, from which it emerges through the coolant outlet 14 ,
  • the cooling elements 4 are carriers of a plurality of mutually parallel Gasleitbleche 10.
  • the Gasleitbleche 10 extend between the two Plena 5, 6 and have an outline contour, which is substantially a circular shape, so that with its edge to the inside the wall 24 reach.
  • the Gasleitbleche 10, 10 'have an edge portion which extends approximately 60 to 90 °, which is spaced from the wall 24, so that there forms a gas passage opening 11, through which in an upper flow channel 12, 12' flowing gas stream can flow through into an underlying flow channel 12.
  • the gas passage openings 11 are alternately facing each other, so that the gas flow zigzag flows from the gas inlet 16 to the gas outlet 17.
  • the distance of the uppermost lying Gasleitblechs 10 'of the cover plate 8 is greater than the distance of the second Gasleitblechs 10 to uppermost lying gas guide plate 10'. It is further provided that the distances of the Gasleitbleche 10, 10 'in the flow direction of the gas stream, that is reduced in the axial direction of the container from top to bottom, so that the free flow cross-section of the gas flow channels 12, 12' decreases in the flow direction.
  • the lower plenum 6 is located above the gas outlet 17 and limits about three quarters of the volume of the container down.
  • a second cooling section with second cooling elements 20, which are formed in the embodiment of highly conductive cylindrical rods.
  • the second cooling elements 20 are spaced less than the first cooling elements 4, so that the flow channels in the lower portion have a smaller free cross-sectional area.
  • the cooling bars are be 20 connected at one end to the bottom plate 19, which is cooled by the inflowing cooling medium.
  • the free ends of the cooling rods 20 protrude directly to the bottom 23 of the housing zoom.
  • a device characterized by condensing out volatiles of a gas stream with a housing having a cup-shaped lower part 1 and a cover 2 closing the opening, with an arranged in the cavity of the lower part 1 insert 3, which has a plurality of cooling elements 4 which intersect one or more gas flow channels 12 and extend in a parallel arrangement from an upper plenum 5 to a lower plenum 6, the two plenums 4, 5 respectively communicating with a coolant inlet 13 or with a coolant outlet 14 are, wherein the insert 3 Gasleitieri 10, 10 ', 21, to divert the gas flow from a gas inlet 16 to a gas outlet 17 multiple times.
  • a device characterized in that a first, upstream portion of the insert 3 comprises first cooling elements 4, which are arranged at a first distance from each other and a downstream second portion of the insert 3, second cooling elements 20 having a second distance have each other, wherein the second distance is smaller than the first distance.
  • a device which is characterized in that a coolant can flow through the first cooling elements 4 and the second cooling elements 20 can either be flowed through by a coolant or in heat-conducting connection to a plenum 6.
  • a device characterized in that the first portion fills about three quarters of the total volume of the housing and the second portion fills about a quarter of the total volume of the housing.
  • a device which is characterized in that the insert 3 is fixedly connected to the cover 2 and a cover plate 8 forms a wall of the upper plenum 5.
  • a device which is characterized in that the gas guide plates 10, 10 ', 21 have gas passage openings 11, 22 for diverting a gas flowing in above the gas guide plate 10, 10', 21 into an opposite direction of flow below the gas guide plate 10, 10 ', 21, so that the gas flow is deflected several times in a meandering manner, the cooling elements 4, 20 passing through the cold trap with multiple crossing.
  • a device which is characterized in that the gas inlet 16 is arranged near the opening of the housing lower part 1 and the gas outlet 17 is arranged near the bottom 23 of the housing lower part 1.
  • a device is characterized by a gas passage opening 27 for the exit of the gas flow from the cold trap, wherein the gas passage opening 27 is spaced from the bottom 23 of the housing lower part 1.
  • a device which is characterized in that the flow of the coolant passing through the cooling elements 4 cooling medium is opposite to the flow direction of the gas stream.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

L'invention concerne un dispositif pour l'élimination par condensation des composants volatiles d'un courant de gaz. Le dispositif comprend un boîtier, qui comporte une partie inférieure (1) en forme de pot et un couvercle (2) fermant l'ouverture de celle-ci, un insert (3) qui est agencé dans la cavité de la partie inférieure (1) et qui comprend une section amont et une section aval, la section amont comprenant une pluralité d'éléments de refroidissement (4) qui peuvent être traversés par un réfrigérant, qui sont agencés à une première distance les uns des autres, et qui croisent un ou plusieurs canaux d'écoulement de gaz (12) et qui s'étendent selon une disposition parallèle d'un plénum supérieur (5) à un plénum inférieur (6), les deux plénums (4, 5) étant chacun en liaison fluidique avec une entrée de réfrigérant (13) ou avec une sortie de réfrigérant (14). L'insert (3) comprend des éléments d'acheminement de gaz (10, 10', 21) destinés à dévier à plusieurs reprises le courant de gaz d'une entrée de gaz (16) à une sortie de gaz (17), et la section aval de l'insert (3) comprend deux éléments de refroidissement (20), qui sont en liaison thermoconductrice avec le plénum inférieur (6) et qui présentent un deuxième écart l'un par rapport à l'autre, le deuxième écart étant inférieur au premier écart.
PCT/EP2016/057964 2015-04-13 2016-04-12 Piège cryogénique WO2016166079A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202015101792.8U DE202015101792U1 (de) 2015-04-13 2015-04-13 Kühlfalle
DE202015101792.8 2015-04-13

Publications (1)

Publication Number Publication Date
WO2016166079A1 true WO2016166079A1 (fr) 2016-10-20

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PCT/EP2016/057964 WO2016166079A1 (fr) 2015-04-13 2016-04-12 Piège cryogénique

Country Status (3)

Country Link
DE (1) DE202015101792U1 (fr)
TW (1) TWI685376B (fr)
WO (1) WO2016166079A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023155610A1 (fr) * 2022-02-15 2023-08-24 卢允庄 Piège froid à écoulement radial

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017106431A1 (de) 2017-03-24 2018-09-27 Aixtron Se Vorrichtung und Verfahren zum Herabsetzen des Wasserpartialdrucks in einer OVPD-Beschichtungseinrichtung
CN111054174B (zh) * 2018-10-17 2023-08-08 伊利诺斯工具制品有限公司 废气净化装置
TWI755296B (zh) * 2021-03-05 2022-02-11 志聖工業股份有限公司 氣體冷凝裝置

Citations (15)

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Publication number Priority date Publication date Assignee Title
DE1203226B (de) 1958-06-23 1965-10-21 Halcon International Inc Vorrichtung zur Abscheidung sublimierbarer Substanzen
US3226936A (en) 1961-09-20 1966-01-04 Philips Corp Method of maintaining the continuous operation of a device for separating constituents in the solid state from a gas mixture by cooling and devices for carrying out these methods
US3681936A (en) 1970-10-26 1972-08-08 Oklahoma Mfg Co Heat exchanger
FR2146100A2 (fr) 1971-07-16 1973-03-02 Air Liquide
DE2537639A1 (de) 1975-08-23 1977-02-24 Deggendorfer Werft Eisenbau Apparat zum abschneiden von sublimierenden stoffen aus dampf-gas-gemischen
US4142580A (en) 1976-11-19 1979-03-06 Phillips Petroleum Company Bayonet heat exchanger having means for positioning bayonet tube in sheath tube
US4538423A (en) 1983-05-05 1985-09-03 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Cooling apparatus and cooling trap including such an apparatus
DE8625127U1 (fr) 1986-09-19 1987-01-29 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen, De
DE29904465U1 (de) 1999-03-11 1999-06-17 Dresden Vakuumtech Gmbh Kühlfalle
US20040069224A1 (en) * 2002-10-11 2004-04-15 Taiwan Semiconductor Manufacturing Co., Ltd. Cold trap for CVD furnace
US7067088B2 (en) 2002-01-12 2006-06-27 Saudi Basic Industries Corporation Stratified flow chemical reactor
DE69736124T2 (de) 1996-02-09 2007-01-04 Mks Instruments Inc., Andover Flussigkeitsgekühlte kühlfalle
WO2007129820A1 (fr) * 2006-05-04 2007-11-15 Milaebo Co., Ltd. Dispositif de collecte de sous-produit pour appareil de fabrication de semi-conducteurs
WO2011135333A2 (fr) 2010-04-26 2011-11-03 Dumitru Fetcu Échangeur thermique
US20140261702A1 (en) * 2013-03-15 2014-09-18 Macronix International Co., Ltd. Apparatus and method for collecting powder generated during film deposition process

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TWI555961B (zh) * 2013-04-22 2016-11-01 Adpv Technology Ltd Condensation device for vacuum coating equipment

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1203226B (de) 1958-06-23 1965-10-21 Halcon International Inc Vorrichtung zur Abscheidung sublimierbarer Substanzen
US3226936A (en) 1961-09-20 1966-01-04 Philips Corp Method of maintaining the continuous operation of a device for separating constituents in the solid state from a gas mixture by cooling and devices for carrying out these methods
US3681936A (en) 1970-10-26 1972-08-08 Oklahoma Mfg Co Heat exchanger
FR2146100A2 (fr) 1971-07-16 1973-03-02 Air Liquide
DE2537639A1 (de) 1975-08-23 1977-02-24 Deggendorfer Werft Eisenbau Apparat zum abschneiden von sublimierenden stoffen aus dampf-gas-gemischen
US4142580A (en) 1976-11-19 1979-03-06 Phillips Petroleum Company Bayonet heat exchanger having means for positioning bayonet tube in sheath tube
US4538423A (en) 1983-05-05 1985-09-03 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Cooling apparatus and cooling trap including such an apparatus
DE8625127U1 (fr) 1986-09-19 1987-01-29 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen, De
DE69736124T2 (de) 1996-02-09 2007-01-04 Mks Instruments Inc., Andover Flussigkeitsgekühlte kühlfalle
DE29904465U1 (de) 1999-03-11 1999-06-17 Dresden Vakuumtech Gmbh Kühlfalle
US7067088B2 (en) 2002-01-12 2006-06-27 Saudi Basic Industries Corporation Stratified flow chemical reactor
US20040069224A1 (en) * 2002-10-11 2004-04-15 Taiwan Semiconductor Manufacturing Co., Ltd. Cold trap for CVD furnace
WO2007129820A1 (fr) * 2006-05-04 2007-11-15 Milaebo Co., Ltd. Dispositif de collecte de sous-produit pour appareil de fabrication de semi-conducteurs
WO2011135333A2 (fr) 2010-04-26 2011-11-03 Dumitru Fetcu Échangeur thermique
US20140261702A1 (en) * 2013-03-15 2014-09-18 Macronix International Co., Ltd. Apparatus and method for collecting powder generated during film deposition process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023155610A1 (fr) * 2022-02-15 2023-08-24 卢允庄 Piège froid à écoulement radial

Also Published As

Publication number Publication date
TW201701935A (zh) 2017-01-16
DE202015101792U1 (de) 2015-04-28
TWI685376B (zh) 2020-02-21

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