Classifications

• • C—CHEMISTRY; METALLURGY
  • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
  • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
  • C25D7/00—Electroplating characterised by the article coated
  • C25D7/06—Wires; Strips; Foils
  • C25D7/0614—Strips or foils
  • C25D7/0621—In horizontal cells
• • C—CHEMISTRY; METALLURGY
  • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
  • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
  • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
  • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
  • C23C18/1601—Process or apparatus
  • C23C18/1619—Apparatus for electroless plating
• • C—CHEMISTRY; METALLURGY
  • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
  • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
  • C25D21/00—Processes for servicing or operating cells for electrolytic coating
  • C25D21/08—Rinsing

Definitions

• the present invention relates to a flooding device for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated.
• the present invention is further directed to a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated.
• the substrates to be treated have been relatively thick, stiff and heavy compared to the presence.
• the market requires more and more in consequence of the on-going worldwide technical miniaturization in the printed circuit board area devices and process lines, which can also safely treat substrates to be treated, which are much thinner than anything, which has been processed up to now.
• the weight of each individual substrate to be treated is largely re- prised while the flexibility of the substrate to be treated is largely increased.
• a flooding device having all features of claim 1 .
• Appropriate modifications to the inventive device are protected in dependent claims 2 to 1 1 .
• claim 12 comprises a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated comprising at least one pair of oppositely arranged such flooding devices.
• Appropriate modifications to the inventive treating module are protected in dependent claims 13 to 15.
• the present invention accordingly provides a flooding device for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated, wherein the flooding device comprises at least a flooding element and at least a first substrate guiding element, wherein said flooding element is mechanically connected to the at least first substrate guiding element, and wherein the first substrate guiding element is spatially arranged on the entry side of the flooding element.
• the inventive flooding device avoids that thin flexible substrates run between individual transport elements, which are commonly arranged above and below of the transport level of the process line.
• the inventive flooding device avoids that at the most dangerous site, namely around the flooding device itself, the flexible thin substrates to be treated will flow upwards or downwards between the individual transport elements directly after having passed the flooding devices.
• inventive device can be easily installed in already existing process lines without any large effort or cost.
• Fig. 1 shows a schematic side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with a first embodiment of the present invention.
• FIG. 2 shows a schematic perspective side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with the first embodiment of the present invention shown in Figure 1 .
• FIG. 3 shows another schematic perspective side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with the first embodiment of the present invention shown in Figure 1 .
• Fig. 4 shows a schematic perspective top view of an individual inventive flooding device in accordance with the first embodiment of the present invention shown in Figure 1 .
• Fig. 5 shows a schematic perspective top view of the first, second and third substrate guiding element of the individual inventive flooding device shown in Figure 4 in accordance with the first embodiment of the present invention shown in Figure 1 .
• Fig. 6 shows a schematic side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with a second embodiment of the present invention.
• Fig. 7 shows a schematic perspective side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with the second embodiment of the present invention shown in Figure 6.
• Fig. 8 shows a schematic perspective top view of an individual inventive flooding device in accordance with the second embodiment of the present invention shown in Figure 6.
• Fig. 9 shows a schematic side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with a third embodiment of the present invention.
• Fig. 10 shows a schematic perspective side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with the third embodiment of the present invention shown in Figure 9.
• Fig. 1 1 shows a schematic perspective top view of an individual inventive flooding device in accordance with the third embodiment of the present invention shown in Figure 9.
• the term "flooding device” refers to a device, which is required to provide a process liquid into a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated.
• substrate guiding element refers to an element, which is required, intended or supposed to support the transportation of a substrate to be treated in such a way that the substrate to be treated will not run between two adjacent individual transport elements of the horizontal process line. Conclusively, such a substrate guiding element serves the purpose of avoiding damages of the substrates to be treated during passing the horizontal process line.
• the term "entry side” refers to said side of a flooding device of a horizontal process line, wherein a substrate to be treated will arrive in transport direction in the transportation area at the flooding device before entering the flooding device through which the substrate to be treated will run subsequently-
• exit side refers to said side of a flooding device of a horizontal process line, wherein a substrate to be treated will arrive in transport direction in the transportation area at the flooding device after leaving the flooding device through which the substrate to be treated has been run before.
• the flooding device further comprises at least a second substrate guiding element, wherein the flooding element is mechanically connected to the at least second substrate guiding element, and wherein the second substrate guiding element is spatially arranged on the exit side of the flooding element.
• the first substrate guiding element and the second substrate guiding element comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element are extending in axial direction from the flooding element against the transport direction of the substrates to be treated, and wherein the protrusions of the second substrate guiding element are extending in axial direction from the flooding element in transport direction of the substrates to be treated.
• the plurality of protrusions can be extending in axial direction in a strictly linear manner or more or less bent up in order to simplify the substrates to be treated to enter or to pass, in particular to enter, the respective flooding device and flooding element.
• a bent down of the protrusions would be disadvantageous due to an increased risk of damaging the respective substrates to be treated, which will enter or leave, in particular to enter, the flooding element.
• the plurality of protrusions of the first substrate guiding element have longer axial dimensions against the transport direction of the substrate to be treated than the plurality of protrusions of the second substrate guiding element in transport direction of the substrate to be treated.
• the plurality of protrusions on both sides of the flooding element can be of the same length or other spoken of the same axial dimension.
• Entering or leaving of the flooding elements in the sense of the present invention means of course the entering of the substrate to be treated into the area between the oppositely arranged two individual flooding elements of a treating module as it can be seen exemplary in the enclosed Figures 1 , 2, 3, 6, 7, 9, and 10.
• each individual protrusion of the plurality of protrusions of the first substrate guiding element and of the second substrate guiding element is directly connected to the flooding element and works independently from the adjacent protrusions.
• first substrate guiding element and/or the second substrate guiding element each comprises at least one section of at least two adjacent protrusions, which are mechanically connected by at least a mechanical connecting element.
• Each section of connected protrusions on each side of the flooding element can be individually adapted to customer needs, such as specific substrate materials, thicknesses or compositions.
• Such sections offer the advantage of having more flexibility for adapting the first and/or second substrate guiding element in dependence of the process line conditions.
• all protrusions of the first substrate guiding element and/or all protrusions of the second substrate guiding element are mechanically connected by at least a mechanical connecting element on the respective side of the flooding element.
• the first and/or second substrate guiding element can be easily adapted to existing flooding elements of already running process lines, which are making use of wheel axis as transport elements. An expensive modification of the transport system can be thereby avoided.
• the sole requirement is the adaption of the free space between the adjacent protrusions of the first and/or second substrate guiding element to the size of the wheels of the wheel axis.
• the flooding element further comprises at least a third substrate guiding element, which is connecting the first substrate guiding element from the entry side of the flooding element with the second substrate guiding element of the exit side of the flooding element; wherein the first, second and third substrate guiding element form an attachment part, which is mechanically connected in one piece to the flooding element.
• the flooding element comprises at least a first step and a second step on the flooding element surface, which is directed to the transport pathway of the substrate to be treated, and wherein the process liquid flows out of said flooding element surface.
• the first substrate guiding element and/or the second substrate guiding element is/are a continuous piece, such as a sheet or plate, wherein the first substrate guiding element is extending in axial direction from the flooding element against the transport direction of the substrates to be treated, and wherein the second substrate guiding element is extending in axial direction from the flooding element in transport direction of the substrates to be treated.
• the first substrate guiding element has longer axial dimensions against the transport direction of the substrate to be treated than the second substrate guiding element in transport direction of the substrate to be treated.
• the present invention also relates to a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated characterized in thatthe treating module comprises at least one pair of oppositely arranged such inventive flooding devices as described above, wherein each flooding device comprises at least a flooding element and at least a first substrate guiding element, wherein said flooding element is mechanically connected to the at least first substrate guiding element, and wherein the first substrate guiding element is spatially arranged on the entry side of the flooding element.
• Such a pair of flooding devices generates a defined flow of treatment liquid, which enters the respective treating module thereby.
• Said flow of treatment liquid can cause problems if the substrate to be treated is thin and flexible.
• the substrates to be treated will be influenced by the generated treatment liquid flow and will leave the desired transportation level by running between the first transport elements, which are in front of or behind the respective flooding device. This problem of the prior art can be solved by said treating module.
• each flooding element comprises at least a first step and a second step on the flooding element surface, which is directed to the transport pathway of the substrate to be treated, and wherein the process liquid flows out of said flooding element surface.
• each flooding device further comprises at least a second substrate guiding element, wherein the flooding element is mechanically connected to the at least second substrate guiding element, and wherein the second substrate guiding element is spatially arranged on the exit side of the flooding element; and wherein each flooding element further comprises at least a third substrate guiding element, which is connecting the first substrate guiding element from the entry side of the flooding element with the second substrate guiding element of the exit side of the flooding element; wherein the first, second and third substrate guiding element form an attachment part, which is mechanically connected in one piece to the flooding element.
• the first substrate guiding element and the second substrate guiding element comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element are extending in axial direction from each flooding element against the transport direction of the substrates to be treated, and wherein the protrusions of the second substrate guiding element are extending in axial direction from each flooding element in transport direction of the substrates to be treated; wherein all protrusions of the first substrate guiding element and/or all protrusions of the second substrate guiding element are mechanically connected by at least a mechanical connecting element on the respective side of the flooding element.
• the present invention thus addresses the problem of transporting thin (down to 25 micrometers) and flexible substrates to be treated through a horizontal process line without damaging them.
• the flexible thin substrates to be treated cannot more flow upwards or downwards between the individual transport elements directly after having passed the flooding devices.
• inventive substrate guiding elements might also be attached to less dangerous sites of a horizontal galvanic or wet-chemical process line for metal.
• they can be attached to ultrasonic devices being included in corresponding process lines.
• a first embodiment is shown in the following Figures 1 to 5.
• Figure 1 shows a schematic side view of the inventive treating module 1 of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated wherein the treating module 1 comprises one pair of oppositely arranged such inventive flooding devices in accordance with a first embodiment of the present invention.
• each of the two shown flooding devices comprises a flooding element 2 and a first substrate guiding element 5, wherein said flooding element 2 is mechanically connected to the first substrate guiding element 5, and wherein the first substrate guiding element 5 is spatially arranged on the entry side 8 of the flooding element 2.
• Each shown flooding device further comprises a second substrate guiding element 6, wherein the flooding element 2 is mechanically connected to the second substrate guiding element 6, and wherein the second substrate guiding element 6 is spatially arranged on the exit side 9 of the flooding element 2.
• the first substrate guiding element 5 and the second substrate guiding element 6 comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element 5 are extending in axial direction from the flooding element 2 against the transport direction of the substrates to be treated.
• the protrusions of the second substrate guiding element 6 are extending in axial direction from the flooding element 2 in transport direction of the substrates to be treated.
• the plurality of protrusions of the first substrate guiding element 5 have longer axial dimensions against the transport direction of the substrate to be treated than the plurality of protrusions of the second substrate guiding element 6 in transport direction of the substrate to be treated.
• each individual protrusion of the plurality of protrusions of the second substrate guiding element 6 is directly connected to the flooding element 2 and works independently from the adjacent protrusions.
• Each flooding element 2 shown in Figure 1 further comprises a third substrate guiding element 4, which is connecting the first substrate guiding element 5 from the entry side 8 of the flooding element 2 with the second substrate guiding element 6 of the exit side 9 of the flooding element 2; wherein the first 5, second 6, and third 4 substrate guiding element form an attachment part, which is mechanically connected in one piece to the flooding element 2.
• the flooding element 2 comprises a first step 7a and a second step 7b on the flooding element 2 surface, which is directed to the transport pathway of the substrate to be treated, and wherein the process liquid flows out of said flooding element 2 surface.
• the transport elements 3 of the first preferred embodiment are wheel axis.
• Figure 2 shows a schematic perspective side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with the first embodiment of the present invention shown in Figure 1 .
• a fastening element 10 which serves the purpose of detachably connecting the attachment part comprising the first 5, second 6, and third 4 substrate guiding element to the respective flooding element 2.
• Such an attachment part can be also used as reinforcement for providing an increased overall stiffness of the flooding device, if the flooding element is manufactured of polymeric material, such as polypropylene, polyvinylchloride or polyethylene.
• the attachment part would be made of metal or metal alloys, such as stainless steel, titanium, or nickel alloys.
• Such a combination of a plastic flooding element 2 and an attachment part of metal is exempla- rily advantageous in rinsing modules of a horizontal process line.
• Figure 3 shows another schematic perspective side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with the first embodiment of the present invention shown in Figure 1 .
• Figure 3 is basically identical to Figure 2 besides the fact that herein now all transport elements 3 are now shown.
• Figure 4 shows a schematic perspective top view of an individual inventive flooding device in accordance with the first embodiment of the present invention shown in Figure 1 .
• FIGs 4 and 5 serve both the purpose of individual illustration of a single attachment part comprising the first 5, second 6, and third 4 substrate guiding element.
• FIG 4 there is still included the respective flooding element 2, while in Figure 5 said flooding element 2 has been removed for illustration purposes.
• a second embodiment is shown in the following Figures 6 to 8.
• Figure 6 shows a schematic side view of the inventive treating module 1 ' of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated wherein the treating module ⁇ comprises one pair of oppositely arranged such inventive flooding devices in accordance with a second embodiment of the present invention.
• each of the two shown flooding devices comprises a flooding element 2 ' and a first substrate guiding element 5 ' , wherein said flooding element 2 ' is mechanically connected to the first substrate guiding element 5 ' , and wherein the first substrate guiding element 5 ' is spatially arranged on the entry side 8 ' of the flooding element 2 ' .
• Each shown flooding device further comprises a second substrate guiding element 6 ' , wherein the flooding element 2 ' is mechanically connected to the second substrate guiding element 6 ' , and wherein the second substrate guiding element 6 ' is spatially arranged on the exit side 9 ' of the flooding element 2 ' .
• first substrate guiding element 5 ' and the second substrate guiding element 6 ' comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element 5 ' are extending in axial direction from the flooding element 2 ' against the transport direction of the sub- strates to be treated.
• the protrusions of the second substrate guiding element 6 ' are extending in axial direction from the flooding element 2 ' in transport direction of the substrates to be treated.
• the transport elements 3 ' of the second preferred embodiment are wheel axis.
• this second embodiment is preferably used, if the treating module 1 ' requires the application of higher temperatures inside of the respective treating module 1 ' or if it requires the application of aggressive or oxidizing chemicals, such as permanganate.
• the entire flooding device will be made of metal, preferably of stainless steel, in order to provide on the one hand a good chemical resistance of the material of the flooding device and on the other hand a sufficient mechanical stiffness to avoid material distortions. Such distortions are exemplarily taking place if flooding devices made of plastic materials are getting used at higher process liquid temperatures.
• Figure 7 shows a schematic perspective side view of the inventive treating module 1 ' comprising one pair of oppositely arranged inventive flooding devices in accordance with the second embodiment of the present invention shown in Figure 6.
• FIG. 8 shows a schematic perspective top view of an individual inventive flooding device in accordance with the second embodiment of the present invention shown in Figure 6.
• a third embodiment is shown in the following Figures 9 to 1 1 .
• Figure 9 shows a schematic side view of the inventive treating module 1 " of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated wherein the treating module 1 comprises one pair of oppositely arranged such inventive flooding devices in accordance with a third embodiment of the present invention.
• each of the two shown flooding devices comprises a flooding element 2 " and a first substrate guiding element 5 " , wherein said flooding element 2 " is mechanically connected to the first substrate guiding element 5 " , and wherein the first substrate guiding element 5 " is spatially arranged on the entry side 8 " of the flooding element 2 " .
• Each shown flooding device further comprises a second substrate guiding element 6 " , wherein the flooding element 2 " is mechanically connected to the second substrate guiding element 6 " , and wherein the second substrate guiding element 6 " is spatially arranged on the exit side 9 " of the flooding element 2 " .
• first substrate guiding element 5 " and the second substrate guiding element 6 " comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element 5 " are extending in axial direction from the flooding element 2 " against the transport direction of the substrates to be treated.
• the protrusions of the second substrate guiding element 6 " are extending in axial direction from the flooding element 2 " in transport direction of the substrates to be treated.
• the flooding element 2 " comprises a first step 7a ' and a second step 7b ' on the flooding element 2 " surface, which is directed to the transport pathway of the substrate to be treated, and wherein the process liquid flows out of said flooding element 2 " surface.
• the transport elements 3 " of the first preferred embodiment are rollers, wherein each roller comprises a plurality of recesses 13. Said recesses serve the purpose of being in conjunction with a corresponding protrusion in order to minimize the amount of process liquid, which can flow upwards or downwards (depending if the recess, the roller with the recesses, and the corresponding protrusions are arranged above or below the transportation level of the substrates to be treated).
• the flooding device provides a reinforcement element 12 for the flooding element 2 " , which can be necessary to increase the stiffness, if the flooding element 2 " is made of plastics.
• a dam roller 14 is also shown for illustrative purposes.
• Figure 10 shows a schematic perspective side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with the third embodiment of the present invention shown in Figure 9.
• FIG. 1 1 shows a schematic perspective top view of an individual inventive flooding device in accordance with the third embodiment of the present invention shown in Figure 9.

Landscapes

• Chemical & Material Sciences (AREA)
• Organic Chemistry (AREA)
• Engineering & Computer Science (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Materials Engineering (AREA)
• Metallurgy (AREA)
• Electrochemistry (AREA)
• Chemically Coating (AREA)
• Manufacturing Of Printed Circuit Boards (AREA)
• General Chemical & Material Sciences (AREA)
• Mechanical Engineering (AREA)
• Electroplating Methods And Accessories (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Manufacturing Of Printed Wiring (AREA)

Priority Applications (3)

Applications Claiming Priority (2)

Publications (1)

Family

ID=52737006

Family Applications (1)

Country Status (6)

Families Citing this family (1)

Citations (4)

Family Cites Families (1)

• 2015
  • 2015-03-27 EP EP15161394.0A patent/EP3072994B1/en active Active
• 2016
  • 2016-03-18 CN CN201680018314.1A patent/CN107636210B/zh active Active
  • 2016-03-18 JP JP2017550763A patent/JP6748106B2/ja active Active
  • 2016-03-18 KR KR1020177030116A patent/KR102056528B1/ko active IP Right Grant
  • 2016-03-18 WO PCT/EP2016/055971 patent/WO2016156067A1/en active Application Filing
  • 2016-03-25 TW TW105109546A patent/TWI685589B/zh active

Patent Citations (4)

Also Published As

Similar Documents

Legal Events