WO2016150069A1 - Chip scale packaging method and structure for light-emitting device - Google Patents
Chip scale packaging method and structure for light-emitting device Download PDFInfo
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- WO2016150069A1 WO2016150069A1 PCT/CN2015/086438 CN2015086438W WO2016150069A1 WO 2016150069 A1 WO2016150069 A1 WO 2016150069A1 CN 2015086438 W CN2015086438 W CN 2015086438W WO 2016150069 A1 WO2016150069 A1 WO 2016150069A1
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- chip
- light
- encapsulant
- emitting device
- flip
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 33
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/005—Processes relating to semiconductor body packages relating to encapsulations
Definitions
- the present invention relates to the field of semiconductor packaging, and in particular to a chip scale packaging method and package structure of a light emitting device.
- the LED chips used in these packages are basically a formal structure, and the packaging process involves solid crystal bonding, wire bonding, and dispensing in the holder. It is then attached to the carrier of the luminaire as a carrier. From the perspective of heat dissipation, the thermal resistance of the system from the chip and the bracket to the lamp carrier is large, which affects the light efficiency and light decay of the LED.
- the chip-level package of flip-chip LED chips is formed by flip-chip mounting on a small-sized submount after the LED chip is completed, and then covering the package or phosphor paste.
- a flip-chip LED chip with a support substrate is cut and cut, that is, a so-called chip scale package (CSP), such as a flip chip LED chip disclosed in US Pat. No. 8,232,564 B2 to Cree.
- CSP chip scale package
- This packaging method requires an additional support substrate, which increases the manufacturing process and cost, and also increases the thermal resistance, which is not conducive to heat dissipation of the chip;
- the support substrate also increases the volume of the packaged chip, which is disadvantageous for miniaturization of the product.
- Another way is to apply encapsulation or fluorescent glue on the sapphire surface and four sides of the flip-chip LED chip, chip-level package without support substrate, obviously, its process, cost, thermal resistance, etc. are better than the former one. .
- the present invention discloses a chip-level packaging method for a light emitting device, including:
- the conversion base film Aligning at least one flip-chip light emitting device equidistantly on the conversion base film, the main light-emitting surface of the flip-chip light-emitting device facing away from the conversion base film, wherein the conversion base film is a conversion of a surface having a certain viscosity and a high temperature resistant material a base film for adhering the flip-chip light emitting device;
- an encapsulant on the flip-chip light-emitting device and the conversion base film, respectively, the encapsulant being one of a photocurable adhesive, a thermosetting adhesive or a combination of a thermal curing and a photocuring;
- the conversion base film is removed, and the chip-level package structure is obtained after the film is inverted.
- the material of the dam is a plastic film or a light sensitive glue.
- the encapsulant is further a silicone type encapsulant or a resin type encapsulant, wherein
- the conversion base film has a viscosity of between 1 and 100 gf / 25 mm.
- the conversion base film is a blue film, a white film or a UV film.
- the conversion base film when the conversion base film is a UV film, the conversion base film has a viscosity of between 1 and 100 gf / 25 mm after being irradiated with ultraviolet light.
- the main light-emitting surface of the flip-chip light-emitting device is covered with a dielectric film connecting the encapsulant and the main light-emitting surface.
- the dielectric film has a transmittance of 70% or more and a thickness of 50 nm to 200 nm, and the dielectric film is composed of an oxide or a nitride.
- the present invention also discloses a chip scale package structure fabricated by the chip scale packaging method of the light emitting device according to any of the above.
- the chip-level packaging method and structure of the light-emitting device described in the present application achieve the following effects:
- the invention adopts a plastic film as a conversion base film for supporting and arranging chips, directly encapsulating the chip, greatly simplifying the packaging process steps of the chip, and saving the material cost required for transferring the chip to other support substrates, and reducing the chip package. Cost is of great importance, in addition to solving the problem of adhesion between fluorescent glue or encapsulant and sapphire substrate;
- the invention saves the chip supporting substrate or the bracket which is usually used in packaging, and only encapsulates the light emitting device, reduces the thermal resistance of the system, and improves the overload capability of the light emitting device;
- the dam Since the dam is installed, the height of the encapsulant is limited. After cutting, the thickness of the encapsulant around the chip-scale package structure is uniform, so that the light emitted by the illuminating device and the phosphor-converted light are mixed in all directions. Uniform light ensures uniform color temperature.
- the invention has great significance in greatly simplifying the packaging process steps of the chip, saving the supporting substrate of the chip, reducing the cost and more convenient for the user to improve the work efficiency.
- FIG. 1 is a cross-sectional view of the flip-chip light emitting device array according to Embodiments 1 and 2 on a conversion base film;
- FIGS. 2A and 2B are cross-sectional views showing the flip-chip light emitting device array coated with a transparent encapsulant and an encapsulant mixed with a luminescence conversion material, respectively;
- FIG. 3 is a schematic view showing a cutting position of the flip-chip light emitting device array after applying the encapsulant according to the first embodiment
- FIG. 4 is a cross-sectional view showing a chip scale package structure in which a dicing cut is performed and a conversion base film is removed;
- FIG. 5 is a cross-sectional view showing a structure in which the chip scale package structure is flipped on a support substrate;
- Figure 6 is a schematic view showing the formation of a dam around the chip according to the third embodiment of the present invention.
- FIG. 7A and 7B are plan views of the chip and the dam shown in Fig. 6, respectively;
- FIGS. 8A and 8B are cross-sectional views of a flip-chip light-emitting device array having a dam surrounding, coated with a transparent encapsulant and an encapsulant mixed with a luminescence conversion material;
- FIG. 9 is a schematic view showing the formation of a dielectric film on a light-emitting device substrate as described in Embodiment 4;
- FIG. 10 is a flow chart of a chip scale packaging method of the light emitting device according to the first embodiment.
- first device if a first device is coupled to a second device, the first device can be directly electrically coupled to the second device, or electrically coupled indirectly through other devices or coupling means. Connected to the second device.
- the description of the specification is intended to be illustrative of the preferred embodiments of the invention. The scope of protection of the application is subject to the definition of the appended claims.
- the present specification does not limit the components and method steps disclosed in the claims to the components and method steps of the embodiments.
- the dimensions, materials, shapes, structural order, adjacent sequence, and manufacturing method of the structural members described in the embodiments are merely illustrative examples, and the scope of the present invention is not limited thereto. .
- the size and positional relationship of the structural components shown in the drawings are shown enlarged for the sake of clarity.
- Embodiment 1 is a diagrammatic representation of Embodiment 1:
- a chip-level packaging method for a light-emitting device is provided for a package of a light-emitting device that does not need to be converted into white light, and includes the steps of:
- Step 101 Arranging at least one flip-chip light emitting device equidistantly on the conversion base film, the main light-emitting surface of the flip-chip light-emitting device facing away from the conversion base film, wherein the surface of the conversion base film has a certain viscosity and is resistant
- the high temperature is used to adhere the flip-chip light-emitting device;
- the equidistance in the present invention means that the arrangement distances of the plurality of flip-chip light-emitting devices in the x-axis and y-axis directions are equal.
- the conversion base film needs to be resistant to at least 150 ° C, depending on the nature of the conversion base film.
- Step 102 forming a dam between and/or around the flip-chip light-emitting devices on the conversion base film; the advantage of providing the dam in step 102 is to control the thickness of the encapsulant, and when applying the encapsulant, according to Set the height of the dam to add the encapsulant and make the glue more uniform.
- the flip-chip light emitting device of the present invention is a light emitting device at a certain wavelength band.
- Step 103 coating a package adhesive on the flip-chip light-emitting device and the conversion base film, respectively, the package adhesive being a photo-curable encapsulant, a thermo-curing encapsulant or a photo-curing and heat-curing encapsulant;
- Step 104 removing the dam when the encapsulant is cured to no fluidity
- Step 105 After the encapsulant is cured, the encapsulant is subsequently cut;
- Step 106 The conversion base film is removed, and a chip-scale structure is obtained after the film is poured.
- the light-emitting device of the present invention comprises a semiconductor device having a light-emitting active region, such as a light-emitting diode (LED), on which the electrode or lead is not required to be drawn out from the main light-emitting surface.
- the light-emitting wavelength of the semiconductor device is not limited to blue light, and may also include the entire visible light band, the ultraviolet and infrared wavelength bands, or a mixed light composed of light of the aforementioned wavelength band.
- a chip-scale packaging method and a package structure of the present invention are illustrated by taking a light-emitting diode as an example.
- the flip-chip LED chip (ie, flip-chip light emitting device) includes a substrate 10, a first semiconductor layer 11, an active region 12, and a second semiconductor layer 13, respectively, a second electrode 14 and a first electrode 15 and a second semiconductor layer 13 is electrically connected to the first semiconductor layer 11.
- the first semiconductor layer 11 and the second semiconductor layer 13 have opposite conductivity types.
- the first electrode 15 and the second electrode 14 may comprise a plurality of layers or a single layer comprising a conductive material layer having a high reflectance, such as a conductive layer composed of a high reflectivity metal such as Ag, Ru, Al, or the like, or a high transmission conductive
- a conductive material layer having a high reflectance such as a conductive layer composed of a high reflectivity metal such as Ag, Ru, Al, or the like, or a high transmission conductive
- the composite optical film composed of a film and a highly reflective multilayer dielectric film does not specifically limit the structure of the flip-chip light-emitting device according to the actual situation.
- the conversion base film is a blue film, a white film or a UV film.
- the conversion base film is a UV film
- the conversion base film has a viscosity after irradiation with ultraviolet light of between 1 and 100 gf / 25 mm, preferably between 20 and 80 gf / 25 mm.
- the encapsulant is further a silicone type encapsulant or a resin type encapsulant, wherein
- the conversion base film has a viscosity of between 1 and 100 gf / 25 mm.
- the material of the dam is a plastic film or a light sensitive glue.
- the dam in this embodiment is a grid-like or square-shaped plastic film.
- the height of the dam is equal to the height of the encapsulating glue after cutting, that is, the height of the dam is equal to the distance between the flip-chip illuminating devices minus the thickness of the dicing blade and then divided by 2, that is, the height of the dam is arranged after the flip-chip illuminating device is arranged Can be calculated.
- a dielectric film connecting the encapsulant and the main light-emitting surface may be covered on the main light-emitting surface of the flip-chip light-emitting device for improving the adhesion of the encapsulant to the main light-emitting surface.
- the transmittance of the film is 70% or more.
- the dielectric film is further composed of an oxide or a nitride, and the dielectric film described herein is an oxide or nitride having better adhesion to the encapsulant.
- the dielectric film is a dielectric film of silicon oxide, and the thickness is preferably between 50 nm and 200 nm.
- the width of the knife can be seen from Figure 3.
- the thickness of the encapsulant after cutting is approximately equal to the thickness of the four weeks after the separation. Since the flip-chip light-emitting device of the present invention is equidistantly arranged in the x-axis and y-axis directions, w is uniform in both the x-axis and y-axis directions. After cutting, the thickness of the encapsulant around the chip-scale package structure is uniform, so that the light emitted by the LED chip and the phosphor-converted light are uniformly mixed in all directions to ensure uniformity of color temperature.
- the present invention also provides a chip scale package structure fabricated by the chip scale packaging method of any of the above light emitting devices
- FIG. 4 is a cross-sectional view of the chip scale package structure obtained according to the above method, and the conversion base film 30 is taken from the LED chip. After the surface is separated, the surfaces of the first electrode 15 and the second electrode 14 are exposed.
- 5 is a cross-sectional view showing the structure in which the chip scale package structure of FIG. 4 is flipped on a support substrate.
- the chip scale package structure is mounted in a circuit board or bracket 70.
- the first electrode 15 and the second electrode 14 of the chip scale package structure are soldered, bonded, or the like to the corresponding electrode pads 71 on the circuit board or the bracket 70. Fixed and electrically connected to 72.
- Embodiment 2 is a diagrammatic representation of Embodiment 1:
- the LED chip of the flip-chip structure includes a substrate 10, a first semiconductor layer 11, an active region 12, and a second semiconductor layer 13, the second electrode 14 and the first electrode 15 and the second semiconductor layer 13 and the first semiconductor layer 11, respectively Electrical connection.
- the first semiconductor layer 11 and the second semiconductor layer 13 have opposite conductivity types.
- the first electrode 15 and the second electrode 14 may comprise a plurality of layers or a single layer comprising a conductive material layer having a high reflectance, such as a conductive layer composed of a high reflectivity metal such as Ag, Ru, Al, or the like, or a high transmission conductive A composite optical film composed of a film and a highly reflective multilayer dielectric film.
- a plurality of flip-chip LED structure LED chips 1, 2, 3 are arranged at a certain interval 20 on the transition base film 30 which functions as a transition. Only three flip-chip LED chips are shown in FIG. Any one, for example, in order to increase the yield and reduce the cost, the LED chips 1, 2, 3 can fill the entire conversion base film 30.
- the conversion base film 30 may be a surface viscous plastic film, that is, a blue film, a white film, or a UV film for performing chip dicing; the conversion base film 30 has the following characteristics: moderate viscosity, high temperature resistance, at 180 The film thickness is several tens of micrometers or more than 100 micrometers; the conversion base film 30 is easy to realize the filming of the chip, that is, the chip is easily flipped to another blue film or white with higher viscosity. On the film; after the conversion base film 30 is coated with a phosphor-containing encapsulant (referred to as a fluorescent glue) on its viscous side, the fluorescent glue can be cured.
- the conversion base film 30 herein may also be a high-temperature ultraviolet film having a moderate viscosity after irradiation with ultraviolet light having the above characteristics, which is not specifically limited in the present invention.
- an encapsulant 50 is applied to the conversion base film 30 and the LED chips 1, 2, 3, or an encapsulant 50 in which a conversion material 55 of a certain wavelength band is mixed is applied.
- the encapsulant may be a high optical and physical property gel that is photocured or thermally cured, and may be of a silicone type or a resin type.
- the viscosity of the conversion base film 30 is between 1 and 100 gf / 25 mm; if the conversion base film 30 is a UV film, the viscosity of the film after UV irradiation is between 1 and 100 gf / 25 mm.
- the viscosity of the conversion base film 30 is also between 1 and 100 gf / 25 mm.
- the curing properties of the silicone type encapsulant may be affected by the adhesion layer on the conversion base film 30, that is, it is difficult to cure after being "poisoned" by the adhesion layer. Therefore, the above requirements are imposed on the conversion base film 30.
- the composition of the conversion base film and the amount of the viscous material in the present invention do not cause the encapsulant to fail to cure.
- the invention adopts a plastic film as a conversion base film for supporting and arranging chips, directly encapsulating the chip, greatly simplifying the packaging process steps of the chip, and saving the material cost required for transferring the chip to other supporting substrates, thereby reducing the cost of the chip packaging. Significance.
- the thickness D of the encapsulant 50 above the LED chips 1, 2, 3 is substantially equivalent to the thickness (about (wr)/2) of the periphery of the encapsulation 50, so that the light emitted by the LED chip 1-3 and the phosphor 55 are converted.
- the rear light is uniformly mixed in all directions to ensure uniformity of color temperature
- w is the pitch of the LED chips 1 to 3 along the x and y directions on the conversion base film 30
- r is the thickness of the dicing blade.
- the control of the color temperature is determined by the ratio of the gel to the phosphor and the thickness of the final encapsulant, and is not specifically limited herein.
- the encapsulant 50 used has a suitable hardness after curing on the conversion base film 30, and has a hardness of not less than 70 shore. It is easy to cut by mechanical methods, does not collapse, and has the quality requirements of the current general-purpose LED encapsulant.
- the encapsulant here has in particular solder heat resistance, and the applied film is not peeled off.
- FIG. 4 is a chip-scale package structure that completes the cutting and separation after packaging.
- the conversion base film 30 is separated from the surfaces of the LED chips 1, 2, 3, exposing the surfaces of the first electrode 15 and the second electrode 14.
- the chip scale package structure is mounted in a circuit board or bracket 70, and the first electrode 15 and the second electrode 14 of the chip scale package structure are soldered, bonded, or the like to the circuit board or the bracket 70.
- the corresponding electrode pads 71 and 72 are fixed and electrically connected.
- Embodiment 3 is a diagrammatic representation of Embodiment 3
- a dam is formed between and/or around the flip-chip light-emitting devices on the conversion base film.
- a "dam" 80 is formed around the LED chips 1-3.
- the dam 80 may be formed by filming or the like, and may be a large dam 80 (as shown in FIG. 7A) or a plurality of grids (as shown in FIG. 7B) distributed only around all chips or a part of the chips. Structure, but requires the dam 80 to be uniform in height.
- the formulated encapsulant 50 is evenly coated in the dam and is guaranteed to be free of air bubbles.
- the encapsulant 50 coated on and around the LED chips 1-3 is separated by the dam 80. Height of the dam 80 The thickness exceeds the thickness of the LED chip 1, so that when the LED chip 1 is packaged with the encapsulant 50, the thickness of the encapsulant over the LED chip 1 is equivalent to the thickness of the sidewall, as shown in FIG. 8A, so that the entire chip is along each of the light emitting surfaces.
- the emitted light is mild and/or uniform in brightness.
- the curing of the glue is combined with thermal curing and ultraviolet curing to ensure a certain hardness and toughness after curing, which is convenient for cutting.
- a wavelength converting material 55 such as a phosphor may be mixed in the encapsulant 50.
- the dam 80 is removed, and the curing conditions are adjusted twice according to the hardness and toughness of the package adhesive 50, and then the film is cut and cut to form a single chip scale package structure.
- the dam 80 is used to prevent the encapsulating glue from intruding between the chip and the conversion base film, and contaminating the electrode layer on the surface of the chip.
- Embodiment 4 is a diagrammatic representation of Embodiment 4:
- a layer is further formed on the surface of the substrate 10.
- a dielectric film 16 having a high transmittance for visible light is shown in FIG.
- the dielectric film 16 is composed of silicon oxide or the like and has good adhesion to both the encapsulant 50 and the substrate 10.
- the thickness of the dielectric film 16 is such that it has a transmittance of at least 70% or more for visible light, preferably 90% or more. Thickness in a few It is between several micrometers, preferably in the range of 50 nm to 200 nm.
- the dielectric film 16 may be a single layer film or a multilayer film, and may be formed by vapor deposition, sputtering, or spin coating.
- the chip-level packaging method and structure of the light-emitting device of the present invention achieve the following effects:
- the invention adopts a plastic film as a conversion base film for supporting and arranging chips, directly encapsulating the chip, greatly simplifying the packaging process steps of the chip, and saving the material cost required for transferring the chip to other support substrates, and reducing the chip package. Cost is of great importance, in addition to solving the problem of adhesion between fluorescent glue or encapsulant and sapphire substrate;
- the present invention eliminates the chip supporting substrate or the bracket which is usually used in packaging, and only encapsulates the light emitting device, thereby reducing the thermal resistance of the system;
- the dam is installed, the height of the encapsulant is limited. After cutting, the thickness of the encapsulant around the chip-scale package structure is uniform, so that the light emitted by the LED chip and the phosphor-converted light are The light is evenly mixed in all directions to ensure uniformity of color temperature.
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Abstract
A chip scale packaging method for a light-emitting device, comprising the steps: arranging at least one of flip-chip light-emitting devices (1, 2, 3) on a conversion base membrane (30) at equal distances, main light-emitting surfaces of the flip-chip light-emitting devices (1, 2, 3) facing away from the conversion base membrane (30); forming surrounding dams (80) among the flip-chip light-emitting devices (1, 2, 3) on the conversion base membrane (3) and/or at the peripheries of the flip-chip light-emitting devices (1, 2, 3); separately coating a packaging adhesive (50) on the flip-chip light-emitting devices (1, 2, 3) and the conversion base membrane (30); when the packaging adhesive (5) is solidified until having no fluidity, removing the surrounding dams (80); after the packaging adhesive (50) is completely solidified, cutting the packaging adhesive (50); and removing the conversion base membrane (30), and obtaining a chip scale packaging structure after membrane pouring. Also disclosed is a chip scale packaging structure for a light-emitting device. Important significances in aspects of simplifying packaging technology steps of chips, saving submounts of the chips, reducing the cost, being more convenient for a user to increase the working efficiency, and the like are obtained.
Description
本发明涉及半导体封装领域,具体地,是涉及一种发光器件的芯片级封装方法及封装结构。The present invention relates to the field of semiconductor packaging, and in particular to a chip scale packaging method and package structure of a light emitting device.
从LED的封装形式的发展来看,早期以子弹头型封装体为主。随着市场的需求,不同形式的封装支架相继出现。例如,目前市场上最为普遍使用的表面黏着型(Suface-mount devices,SMD)及大功率的集成封装型等。From the development of the LED package form, the early bullet-type package was the main one. With the market demand, different forms of packaged brackets have appeared one after another. For example, Suface-mount devices (SMD), which are the most commonly used on the market, and high-power integrated package types.
上述这些封装中使用的LED芯片基本上是正装结构,其封装过程涉及到了在支架中固晶、打线、点胶。然后以其为载体贴在灯具的载板上。从散热角度来看,从芯片、支架到灯具载板的系统热阻较大,影响LED的光效和光衰。The LED chips used in these packages are basically a formal structure, and the packaging process involves solid crystal bonding, wire bonding, and dispensing in the holder. It is then attached to the carrier of the luminaire as a carrier. From the perspective of heat dissipation, the thermal resistance of the system from the chip and the bracket to the lamp carrier is large, which affects the light efficiency and light decay of the LED.
新型倒装结构LED(flip-chip LED)的出现,将倒装LED芯片的P,N电极焊盘直接焊接到灯具的载板上。这样,减小了正装结构LED中蓝宝石衬底引起的热阻,省去了支架、固晶焊料等,进一步降低了系统热阻,提高了LED的可靠性和大电流使用下的承载能力。从光学角度来看,这种封装,减小了传统封装架构中因反射杯对光的多次反射产生的光损耗,同时具有更大的发光角度,为LCD背光,灯具业提供了更大的弹性设计空间。因此,与正装芯片相比倒装芯片在大电流使用,减少生产环节和降低成本等方面具有明显优势。The emergence of a new flip-chip LED (Flip-chip LED) directly solders the P and N electrode pads of the flip-chip LED chip to the carrier of the lamp. In this way, the thermal resistance caused by the sapphire substrate in the LED of the formal structure is reduced, the bracket and the solid crystal solder are omitted, the thermal resistance of the system is further reduced, the reliability of the LED and the bearing capacity under the use of a large current are improved. From an optical point of view, this package reduces the optical loss caused by multiple reflections of light from the reflector cup in the traditional package architecture, and has a larger illumination angle, which provides a larger backlight for the LCD industry. Flexible design space. Therefore, compared with the packaged chip, the flip chip has obvious advantages in high current use, reducing production links and reducing costs.
目前倒装结构LED芯片的芯片级封装,一种方式是将LED芯片制作完成之后,倒装排列在尺寸较小的支撑基板(submount)上,接着覆盖封装胶或荧光粉胶,待胶固化之后切割切割成带有支撑基板的倒装结构LED芯片,即所谓芯片级封装(Chip Scale Package,CSP),如Cree公司的美国专利US8232564B2中所披露的倒装LED芯片。这种封装方法需要额外的支撑基板,增加了制作流程和成本,同时也增加了热阻,不利于芯片散热;此外,
支撑基板也增加了封装后芯片的体积,不利于实现产品小型化。At present, the chip-level package of flip-chip LED chips is formed by flip-chip mounting on a small-sized submount after the LED chip is completed, and then covering the package or phosphor paste. A flip-chip LED chip with a support substrate is cut and cut, that is, a so-called chip scale package (CSP), such as a flip chip LED chip disclosed in US Pat. No. 8,232,564 B2 to Cree. This packaging method requires an additional support substrate, which increases the manufacturing process and cost, and also increases the thermal resistance, which is not conducive to heat dissipation of the chip;
The support substrate also increases the volume of the packaged chip, which is disadvantageous for miniaturization of the product.
另一种方式是在倒装结构LED芯片的蓝宝石面及四个侧面涂覆封装胶或荧光胶,无支撑基板的芯片级封装,显然,其制程、成本、热阻等更优于前一种。Another way is to apply encapsulation or fluorescent glue on the sapphire surface and four sides of the flip-chip LED chip, chip-level package without support substrate, obviously, its process, cost, thermal resistance, etc. are better than the former one. .
但是,如何实现无支撑基板而只对该发光器件进行封装,以及如何解决荧光胶或封装胶胶与蓝宝石衬底之间的粘附性等问题,而不影响芯片的可靠性,成为亟待解决的问题。However, how to realize the unsupported substrate and only encapsulate the light emitting device, and how to solve the problem of adhesion between the fluorescent glue or the encapsulant and the sapphire substrate without affecting the reliability of the chip has become an urgent problem to be solved. problem.
发明内容Summary of the invention
为了解决上述技术问题,本发明公开了一种发光器件的芯片级封装方法,包括:In order to solve the above technical problem, the present invention discloses a chip-level packaging method for a light emitting device, including:
将至少一个倒装发光器件等距离排列在转换基膜上,所述倒装发光器件的主出光面背离所述转换基膜,其中,所述转换基膜为表面具有一定粘度耐高温材料的转换基膜,用于粘附所述倒装发光器件;Aligning at least one flip-chip light emitting device equidistantly on the conversion base film, the main light-emitting surface of the flip-chip light-emitting device facing away from the conversion base film, wherein the conversion base film is a conversion of a surface having a certain viscosity and a high temperature resistant material a base film for adhering the flip-chip light emitting device;
在所述转换基膜上的倒装发光器件之间和/或周围形成围坝;Forming a dam between and/or around the flip-chip light-emitting devices on the conversion substrate;
分别在所述倒装发光器件和转换基膜上涂覆封装胶,所述封装胶为光固化胶、热固化胶或热固化与光固化结合的封装胶中的一种;Applying an encapsulant on the flip-chip light-emitting device and the conversion base film, respectively, the encapsulant being one of a photocurable adhesive, a thermosetting adhesive or a combination of a thermal curing and a photocuring;
待所述封装胶固化到无流动性时去除所述围坝;Removing the dam when the encapsulant is cured to no fluidity;
待所述封装胶完全固化后切割所述封装胶;Cutting the encapsulant after the encapsulant is completely cured;
去除所述转换基膜,倒膜后得到芯片级封装结构。The conversion base film is removed, and the chip-level package structure is obtained after the film is inverted.
优选地,所述围坝的材料为塑料膜或光敏感型胶。Preferably, the material of the dam is a plastic film or a light sensitive glue.
优选地,所述封装胶,进一步为,有机硅型封装胶或树脂型封装胶,其中,Preferably, the encapsulant is further a silicone type encapsulant or a resin type encapsulant, wherein
当所述封装胶为有机硅型封装胶或树脂型封装胶时,所述转换基膜的粘度在1-100gf/25mm之间。When the encapsulant is a silicone type encapsulant or a resin type encapsulant, the conversion base film has a viscosity of between 1 and 100 gf / 25 mm.
优选地,所述转换基膜为蓝膜、白膜或UV膜。Preferably, the conversion base film is a blue film, a white film or a UV film.
优选地,当所述转换基膜为UV膜时,所述转换基膜经紫外光照射后粘度在1-100gf/25mm之间。Preferably, when the conversion base film is a UV film, the conversion base film has a viscosity of between 1 and 100 gf / 25 mm after being irradiated with ultraviolet light.
优选地,所述倒装发光器件的主出光面覆盖一层连接所述封装胶与主出光面之间的介质膜。
Preferably, the main light-emitting surface of the flip-chip light-emitting device is covered with a dielectric film connecting the encapsulant and the main light-emitting surface.
优选地,所述介质膜的透射率大于等于70%,厚度在50nm至200nm之间,该介质膜由氧化物或氮化物组成。Preferably, the dielectric film has a transmittance of 70% or more and a thickness of 50 nm to 200 nm, and the dielectric film is composed of an oxide or a nitride.
优选地,所述切割所述封装胶后,所述倒装发光器件上方的封装胶厚度d=(w-r)/2,其中,w为所述倒装发光器件之间的距离,r为切割刀宽度。Preferably, after the encapsulation is cut, the thickness of the encapsulant above the flip-chip device is d=(wr)/2, where w is the distance between the flip-chip devices, and r is a cutter width.
本发明还公开了一种应用上述任一所述的发光器件的芯片级封装方法制成的芯片级封装结构。The present invention also discloses a chip scale package structure fabricated by the chip scale packaging method of the light emitting device according to any of the above.
与现有技术相比,本申请所述的发光器件的芯片级封装方法及结构,达到了如下效果:Compared with the prior art, the chip-level packaging method and structure of the light-emitting device described in the present application achieve the following effects:
1)本发明采用塑料膜作为支撑和排列芯片的转换基膜,直接对芯片进行封装,大大简化芯片的封装工艺步骤,同时节省了将芯片转移到其他支撑基板所需材料成本,对于降低芯片封装成本具有重要意义,此外还解决了荧光胶或封装胶与蓝宝石衬底之间的粘附性的问题;1) The invention adopts a plastic film as a conversion base film for supporting and arranging chips, directly encapsulating the chip, greatly simplifying the packaging process steps of the chip, and saving the material cost required for transferring the chip to other support substrates, and reducing the chip package. Cost is of great importance, in addition to solving the problem of adhesion between fluorescent glue or encapsulant and sapphire substrate;
2)与现有技术相比,本发明省去了通常封装时要用的芯片支撑基板或支架,而只对该发光器件进行封装,降低了系统热阻,提高了发光器件的过载能力;2) Compared with the prior art, the invention saves the chip supporting substrate or the bracket which is usually used in packaging, and only encapsulates the light emitting device, reduces the thermal resistance of the system, and improves the overload capability of the light emitting device;
3)与现有技术相比不但简化了制程还使产品小型化,降低了成本,方便终端用户,提高了生产效率,并拓宽了应用范围;3) Compared with the prior art, it not only simplifies the process but also miniaturizes the product, reduces the cost, facilitates the end user, improves the production efficiency, and broadens the application range;
4)由于设置了围坝,限制了封装胶的高度,切割后,在芯片级封装结构周围的封装胶厚度一致,以使得发光器件发出的光与经荧光粉转化后的光在各个方向上混光均匀,保证了色温均匀性。4) Since the dam is installed, the height of the encapsulant is limited. After cutting, the thickness of the encapsulant around the chip-scale package structure is uniform, so that the light emitted by the illuminating device and the phosphor-converted light are mixed in all directions. Uniform light ensures uniform color temperature.
本发明在大大简化芯片的封装工艺步骤、节省芯片的支撑基板、降低成本及更加方便用户提高工作效率等方面具有重要意义。The invention has great significance in greatly simplifying the packaging process steps of the chip, saving the supporting substrate of the chip, reducing the cost and more convenient for the user to improve the work efficiency.
此处所说明的附图用来提供对本发明的进一步理解,构成本发明的一部分,本发明的示意性实施例及其说明用于解释本发明,并不构成对本发明的不当限定。在附图中:The drawings described herein are intended to provide a further understanding of the invention, and are intended to be a part of the invention. In the drawing:
图1为实施例一和二所述的倒装发光器件阵列在转换基膜上的剖视图;1 is a cross-sectional view of the flip-chip light emitting device array according to Embodiments 1 and 2 on a conversion base film;
图2A和2B分别为实施例一所述的倒装发光器件阵列涂覆透明封装胶和混有发光转换材料的封装胶后的剖视图;
2A and 2B are cross-sectional views showing the flip-chip light emitting device array coated with a transparent encapsulant and an encapsulant mixed with a luminescence conversion material, respectively;
图3为实施例一所述的倒装发光器件阵列涂覆封装胶后的切割位置示意图;3 is a schematic view showing a cutting position of the flip-chip light emitting device array after applying the encapsulant according to the first embodiment;
图4为完成切割切割并去除转换基膜的芯片级封装结构剖视图;4 is a cross-sectional view showing a chip scale package structure in which a dicing cut is performed and a conversion base film is removed;
图5为将所述芯片级封装结构倒装在支撑基板上的结构剖视图;5 is a cross-sectional view showing a structure in which the chip scale package structure is flipped on a support substrate;
图6为本发明的实施例三所述的在芯片周围形成围坝的示意图;Figure 6 is a schematic view showing the formation of a dam around the chip according to the third embodiment of the present invention;
图7A和7B分别为图6所示芯片和围坝的俯视图;7A and 7B are plan views of the chip and the dam shown in Fig. 6, respectively;
图8A和8B为周围具有围坝的倒装发光器件阵列上涂覆透明封装胶和混有发光转换材料的封装胶后的剖视图;8A and 8B are cross-sectional views of a flip-chip light-emitting device array having a dam surrounding, coated with a transparent encapsulant and an encapsulant mixed with a luminescence conversion material;
图9为实施例四中所述的在发光器件衬底上形成介质薄膜的示意图;9 is a schematic view showing the formation of a dielectric film on a light-emitting device substrate as described in Embodiment 4;
图10为实施例一所述的发光器件的芯片级封装方法流程图。FIG. 10 is a flow chart of a chip scale packaging method of the light emitting device according to the first embodiment.
如在说明书及权利要求当中使用了某些词汇来指称特定组件。本领域技术人员应可理解,硬件制造商可能会用不同名词来称呼同一个组件。本说明书及权利要求并不以名称的差异来作为区分组件的方式,而是以组件在功能上的差异来作为区分的准则。如在通篇说明书及权利要求当中所提及的“包含”为一开放式用语,故应解释成“包含但不限定于”。“大致”是指在可接收的误差范围内,本领域技术人员能够在一定误差范围内解决所述技术问题,基本达到所述技术效果。此外,“耦接”一词在此包含任何直接及间接的电性耦接手段。因此,若文中描述一第一装置耦接于一第二装置,则代表所述第一装置可直接电性耦接于所述第二装置,或通过其他装置或耦接手段间接地电性耦接至所述第二装置。说明书后续描述为实施本申请的较佳实施方式,然所述描述乃以说明本申请的一般原则为目的,并非用以限定本申请的范围。本申请的保护范围当视所附权利要求所界定者为准。Certain terms are used throughout the description and claims to refer to particular components. Those skilled in the art will appreciate that hardware manufacturers may refer to the same component by different nouns. The present specification and the claims do not use the difference in the name as the means for distinguishing the components, but the difference in function of the components as the criterion for distinguishing. The word "comprising" as used throughout the specification and claims is an open term and should be interpreted as "including but not limited to". "Substantially" means that within the range of acceptable errors, those skilled in the art will be able to solve the technical problems within a certain error range, substantially achieving the technical effects. In addition, the term "coupled" is used herein to include any direct and indirect electrical coupling means. Therefore, if a first device is coupled to a second device, the first device can be directly electrically coupled to the second device, or electrically coupled indirectly through other devices or coupling means. Connected to the second device. The description of the specification is intended to be illustrative of the preferred embodiments of the invention. The scope of protection of the application is subject to the definition of the appended claims.
另外,本说明书并没有将权利要求书公开的构件和方法步骤限定于实施方式的构件和方法步骤。特别是,在实施方式中记载的结构部件的尺寸、材质、形状、其结构顺序和邻接顺序以及制造方法等只要没有具体的限定,就仅作为说明例,而不是将本发明的范围限定于此。附图中所示的结构部件的大小和位置关系是为了清楚地进行说明而放大示出。In addition, the present specification does not limit the components and method steps disclosed in the claims to the components and method steps of the embodiments. In particular, the dimensions, materials, shapes, structural order, adjacent sequence, and manufacturing method of the structural members described in the embodiments are merely illustrative examples, and the scope of the present invention is not limited thereto. . The size and positional relationship of the structural components shown in the drawings are shown enlarged for the sake of clarity.
以下结合附图对本申请作进一步详细说明,但不作为对本申请的限定。
The present application is further described in detail below with reference to the accompanying drawings, but is not to be construed as limiting.
实施例一:Embodiment 1:
如图10所示,为本实施例提供的一种发光器件的芯片级封装方法,用于不需要转换为白光的发光器件的封装,包括步骤:As shown in FIG. 10, a chip-level packaging method for a light-emitting device according to the embodiment is provided for a package of a light-emitting device that does not need to be converted into white light, and includes the steps of:
步骤101:将至少一个倒装发光器件等距离排列在转换基膜上,所述倒装发光器件的主出光面背离所述转换基膜,其中,所述转换基膜的表面具有一定粘度而且耐高温,用于粘附所述倒装发光器件;本发明中的等距离是指多个倒装发光器件在x轴和y轴方向的排列距离均相等。这里的转换基膜至少需要耐150℃高温,具体依照转换基膜的性质而定。步骤102:在所述转换基膜上的倒装发光器件之间和/或周围形成围坝;步骤102中设置围坝的好处是有利于控制封装胶的厚度,在涂覆封装胶时,按照设置的围坝的高度来添加封装胶,涂胶更均匀。本发明中的倒装发光器件是处于某一波段的发光器件。Step 101: Arranging at least one flip-chip light emitting device equidistantly on the conversion base film, the main light-emitting surface of the flip-chip light-emitting device facing away from the conversion base film, wherein the surface of the conversion base film has a certain viscosity and is resistant The high temperature is used to adhere the flip-chip light-emitting device; the equidistance in the present invention means that the arrangement distances of the plurality of flip-chip light-emitting devices in the x-axis and y-axis directions are equal. Here, the conversion base film needs to be resistant to at least 150 ° C, depending on the nature of the conversion base film. Step 102: forming a dam between and/or around the flip-chip light-emitting devices on the conversion base film; the advantage of providing the dam in step 102 is to control the thickness of the encapsulant, and when applying the encapsulant, according to Set the height of the dam to add the encapsulant and make the glue more uniform. The flip-chip light emitting device of the present invention is a light emitting device at a certain wavelength band.
步骤103:分别在所述倒装发光器件和转换基膜上涂覆封装胶,所述封装胶为光固化封装胶、热固化封装胶或光固化与热固化结合的封装胶;Step 103: coating a package adhesive on the flip-chip light-emitting device and the conversion base film, respectively, the package adhesive being a photo-curable encapsulant, a thermo-curing encapsulant or a photo-curing and heat-curing encapsulant;
步骤104:待所述封装胶固化到无流动性时去除所述围坝;Step 104: removing the dam when the encapsulant is cured to no fluidity;
步骤105:待所述封装胶固化,后切割所述封装胶;Step 105: After the encapsulant is cured, the encapsulant is subsequently cut;
步骤106:去除所述转换基膜,倒膜后得到芯片级结构。Step 106: The conversion base film is removed, and a chip-scale structure is obtained after the film is poured.
本发明中的发光器件包含发光二极管(LED)在内的具有发光有源区的半导体器件,所述发光器件的主出光面上无需引出电极或引线。所述半导体器件发光波长不限于蓝光,还可以包括整个可见光波段、紫外和红外波段,或者由前述波段的光组成的混合光。本实施例以发光二极管为例说明本发明的芯片级封装方法和封装结构。The light-emitting device of the present invention comprises a semiconductor device having a light-emitting active region, such as a light-emitting diode (LED), on which the electrode or lead is not required to be drawn out from the main light-emitting surface. The light-emitting wavelength of the semiconductor device is not limited to blue light, and may also include the entire visible light band, the ultraviolet and infrared wavelength bands, or a mixed light composed of light of the aforementioned wavelength band. In this embodiment, a chip-scale packaging method and a package structure of the present invention are illustrated by taking a light-emitting diode as an example.
倒装结构的LED芯片(即倒装发光器件)包含衬底10、第一半导体层11、有源区12和第二半导体层13,第二电极14和第一电极15分别与第二半导体层13和第一半导体层11电连接。所述第一半导体层11和第二半导体层13的导电类型相反。第一电极15和第二电极14可以包含多层或单层,其中包含由反射率较高的导电材料层,如由Ag、Ru、Al等高反射率金属组成的导电层,或高透射导电膜与高反射多层介质膜组成的复合光学膜,本发明不对倒装发光器件的结构做具体限定,具体依实际情况而定。
The flip-chip LED chip (ie, flip-chip light emitting device) includes a substrate 10, a first semiconductor layer 11, an active region 12, and a second semiconductor layer 13, respectively, a second electrode 14 and a first electrode 15 and a second semiconductor layer 13 is electrically connected to the first semiconductor layer 11. The first semiconductor layer 11 and the second semiconductor layer 13 have opposite conductivity types. The first electrode 15 and the second electrode 14 may comprise a plurality of layers or a single layer comprising a conductive material layer having a high reflectance, such as a conductive layer composed of a high reflectivity metal such as Ag, Ru, Al, or the like, or a high transmission conductive The composite optical film composed of a film and a highly reflective multilayer dielectric film does not specifically limit the structure of the flip-chip light-emitting device according to the actual situation.
优选地,所述转换基膜为蓝膜、白膜或UV膜。当所述转换基膜为UV膜时,所述转换基膜经紫外光照射后粘度在1-100gf/25mm之间,优选在20-80gf/25mm之间。Preferably, the conversion base film is a blue film, a white film or a UV film. When the conversion base film is a UV film, the conversion base film has a viscosity after irradiation with ultraviolet light of between 1 and 100 gf / 25 mm, preferably between 20 and 80 gf / 25 mm.
所述封装胶,进一步为,有机硅型封装胶或树脂型封装胶,其中,The encapsulant is further a silicone type encapsulant or a resin type encapsulant, wherein
当所述封装胶为有机硅型封装胶或树脂型封装胶时,所述转换基膜的粘度在1-100gf/25mm之间。When the encapsulant is a silicone type encapsulant or a resin type encapsulant, the conversion base film has a viscosity of between 1 and 100 gf / 25 mm.
优选地,所述围坝的材料为塑料膜或光敏感型胶。本实施例中的所述围坝是网格状或方框形的塑料贴膜。这里围坝的高度等于切割后封装胶的高度,即围坝高度等于倒装发光器件之间的距离减去切割刀厚度后除以2,即围坝的高度在排列了倒装发光器件之后就可以计算出来的。Preferably, the material of the dam is a plastic film or a light sensitive glue. The dam in this embodiment is a grid-like or square-shaped plastic film. Here, the height of the dam is equal to the height of the encapsulating glue after cutting, that is, the height of the dam is equal to the distance between the flip-chip illuminating devices minus the thickness of the dicing blade and then divided by 2, that is, the height of the dam is arranged after the flip-chip illuminating device is arranged Can be calculated.
此外,还可在所述倒装发光器件的主出光面覆盖一层连接所述封装胶与主出光面之间的介质膜,用于提高封装胶与主出光面的粘附性,所述介质膜的透射率大于等于70%。In addition, a dielectric film connecting the encapsulant and the main light-emitting surface may be covered on the main light-emitting surface of the flip-chip light-emitting device for improving the adhesion of the encapsulant to the main light-emitting surface. The transmittance of the film is 70% or more.
优选地,所述介质膜,进一步由氧化物或氮化物组成,这里所述的介质膜是与所述封装胶粘附性比较好的氧化物或氮化物。本实施例中介质膜为氧化硅的介质膜,厚度优选在50nm至200nm之间。Preferably, the dielectric film is further composed of an oxide or a nitride, and the dielectric film described herein is an oxide or nitride having better adhesion to the encapsulant. In the present embodiment, the dielectric film is a dielectric film of silicon oxide, and the thickness is preferably between 50 nm and 200 nm.
步骤103中,所述切割所述封装胶后,所述倒装发光器件上方的封装胶厚度d=(w-r)/2,其中,w为所述倒装发光器件之间的距离,r为切割刀宽度,从图3中可以看到切割位置,切割后封装胶的厚度约等于切割分离后四周的厚度。由于本发明中的倒装发光器件在x轴和y轴方向上均是等距离排列,所以在x轴和y轴方向上w均一致。切割后,在芯片级封装结构周围的封装胶厚度一致,以使得LED芯片发出的光与经荧光粉转化后的光在各个方向上混光均匀,保证其色温均匀性。In step 103, after the encapsulating glue is cut, the thickness of the encapsulant above the flip-chip device is d=(wr)/2, where w is the distance between the flip-chip devices, and r is the cutting. The width of the knife can be seen from Figure 3. The thickness of the encapsulant after cutting is approximately equal to the thickness of the four weeks after the separation. Since the flip-chip light-emitting device of the present invention is equidistantly arranged in the x-axis and y-axis directions, w is uniform in both the x-axis and y-axis directions. After cutting, the thickness of the encapsulant around the chip-scale package structure is uniform, so that the light emitted by the LED chip and the phosphor-converted light are uniformly mixed in all directions to ensure uniformity of color temperature.
本发明还提供一种应用上述任一的发光器件的芯片级封装方法制成的芯片级封装结构,图4中为根据上述方法后得到的芯片级封装结构剖视图,转换基膜30被从LED芯片表面分离后,暴露第一电极15和第二电极14的表面。图5为将图4中的芯片级封装结构倒装在支撑基板上的结构剖视图。将芯片级封装结构安装在电路板或支架70内,所述芯片级封装结构的第一电极15和第二电极14通过焊接、粘接等方式与电路板或支架70上对应的电极焊盘71和72固定并电连接。
The present invention also provides a chip scale package structure fabricated by the chip scale packaging method of any of the above light emitting devices, and FIG. 4 is a cross-sectional view of the chip scale package structure obtained according to the above method, and the conversion base film 30 is taken from the LED chip. After the surface is separated, the surfaces of the first electrode 15 and the second electrode 14 are exposed. 5 is a cross-sectional view showing the structure in which the chip scale package structure of FIG. 4 is flipped on a support substrate. The chip scale package structure is mounted in a circuit board or bracket 70. The first electrode 15 and the second electrode 14 of the chip scale package structure are soldered, bonded, or the like to the corresponding electrode pads 71 on the circuit board or the bracket 70. Fixed and electrically connected to 72.
实施例二:Embodiment 2:
在实施例一的基础上,结合图1至图5以及图10对本发明进行详细说明:Based on the first embodiment, the present invention will be described in detail with reference to FIGS. 1 to 5 and FIG.
倒装结构的LED芯片包含衬底10、第一半导体层11、有源区12和第二半导体层13,第二电极14和第一电极15分别与第二半导体层13和第一半导体层11电连接。所述第一半导体层11和第二半导体层13的导电类型相反。第一电极15和第二电极14可以包含多层或单层,其中包含由反射率较高的导电材料层,如由Ag、Ru、Al等高反射率金属组成的导电层,或高透射导电膜与高反射多层介质膜组成的复合光学膜。The LED chip of the flip-chip structure includes a substrate 10, a first semiconductor layer 11, an active region 12, and a second semiconductor layer 13, the second electrode 14 and the first electrode 15 and the second semiconductor layer 13 and the first semiconductor layer 11, respectively Electrical connection. The first semiconductor layer 11 and the second semiconductor layer 13 have opposite conductivity types. The first electrode 15 and the second electrode 14 may comprise a plurality of layers or a single layer comprising a conductive material layer having a high reflectance, such as a conductive layer composed of a high reflectivity metal such as Ag, Ru, Al, or the like, or a high transmission conductive A composite optical film composed of a film and a highly reflective multilayer dielectric film.
多个倒装LED结构LED芯片1、2、3以一定的间隔20排列在起着过渡作用的转换基膜30上,图1中仅示出了三个倒装结构LED芯片,事实上可以是任意个,例如为了提高产率和降低成本,LED芯片1、2、3可以排满整个转换基膜30。所述转换基膜30可以是表面有粘性塑料膜,即用于进行芯片倒膜的蓝膜、白膜,或者UV膜;所述转换基膜30具有如下特性:粘度适中,抗高温,在180度下数分钟不起皱;厚度为几十微米或大于100微米的膜厚;所述转换基膜30易实现芯片的倒膜,即芯片容易被翻转到另一粘度更高的蓝膜或白膜上;所述转换基膜30在其有粘性的一面涂覆上混有荧光粉的封装胶(简称荧光胶)后,荧光胶可以固化。当然这里的转换基膜30也可以是一种具有上述特性的经过紫外光照射后粘度适度的高温紫外膜,本发明不做具体限定。A plurality of flip-chip LED structure LED chips 1, 2, 3 are arranged at a certain interval 20 on the transition base film 30 which functions as a transition. Only three flip-chip LED chips are shown in FIG. Any one, for example, in order to increase the yield and reduce the cost, the LED chips 1, 2, 3 can fill the entire conversion base film 30. The conversion base film 30 may be a surface viscous plastic film, that is, a blue film, a white film, or a UV film for performing chip dicing; the conversion base film 30 has the following characteristics: moderate viscosity, high temperature resistance, at 180 The film thickness is several tens of micrometers or more than 100 micrometers; the conversion base film 30 is easy to realize the filming of the chip, that is, the chip is easily flipped to another blue film or white with higher viscosity. On the film; after the conversion base film 30 is coated with a phosphor-containing encapsulant (referred to as a fluorescent glue) on its viscous side, the fluorescent glue can be cured. Of course, the conversion base film 30 herein may also be a high-temperature ultraviolet film having a moderate viscosity after irradiation with ultraviolet light having the above characteristics, which is not specifically limited in the present invention.
如图2A和2B所示,在转换基膜30和LED芯片1、2、3上涂覆封装胶50,或涂覆混合有某波段光的转换材料55的封装胶50。封装胶可以是光固化或热固化的高光学性能及物理性能胶,可以是有机硅型或树脂型。当采用有机硅型封装胶时,上述转换基膜30的粘度在1-100gf/25mm之间;若转换基膜30采用UV膜,则该膜经UV照射后粘度在1-100gf/25mm之间,优选在20-80gf/25mm之间。当采用树脂型封装胶时,转换基膜30的粘度也在1-100gf/25mm之间。有机硅型封装胶的固化性能会受到转换基膜30上的粘附层的影响,即被所述粘附层“毒化”后难于固化。因此,对转换基膜30有上述要求。总之,本发明中所述转换基膜的组分和粘性材料的量不会导致封装胶无法固化。
As shown in FIGS. 2A and 2B, an encapsulant 50 is applied to the conversion base film 30 and the LED chips 1, 2, 3, or an encapsulant 50 in which a conversion material 55 of a certain wavelength band is mixed is applied. The encapsulant may be a high optical and physical property gel that is photocured or thermally cured, and may be of a silicone type or a resin type. When the silicone type encapsulant is used, the viscosity of the conversion base film 30 is between 1 and 100 gf / 25 mm; if the conversion base film 30 is a UV film, the viscosity of the film after UV irradiation is between 1 and 100 gf / 25 mm. Preferably, it is between 20-80 gf / 25 mm. When a resin type encapsulant is used, the viscosity of the conversion base film 30 is also between 1 and 100 gf / 25 mm. The curing properties of the silicone type encapsulant may be affected by the adhesion layer on the conversion base film 30, that is, it is difficult to cure after being "poisoned" by the adhesion layer. Therefore, the above requirements are imposed on the conversion base film 30. In summary, the composition of the conversion base film and the amount of the viscous material in the present invention do not cause the encapsulant to fail to cure.
本发明采用塑料膜作为支撑和排列芯片的转换基膜,直接对芯片进行封装,大大简化芯片的封装工艺步骤,同时节省了将芯片转移到其他支撑基板所需材料成本,对于降低芯片封装成本具有重要意义。The invention adopts a plastic film as a conversion base film for supporting and arranging chips, directly encapsulating the chip, greatly simplifying the packaging process steps of the chip, and saving the material cost required for transferring the chip to other supporting substrates, thereby reducing the cost of the chip packaging. Significance.
待固化后沿着图3所示的箭头方向切割切割。封装胶50在LED芯片1、2、3上方的厚度D与切割分离后其四周的厚度(约(w-r)/2)大致相当,以使得LED芯片1-3发出的光与经荧光粉55转化后的光在各个方向上混光均匀,保证其色温均匀性,w为LED芯片1至3在转换基膜30上沿着x和y方向的摆放间距,r为切割刀的厚度。色温的控制依胶和荧光粉的配比和最终封装胶的厚度来确定,这里不做具体限定。After curing, the cut is cut in the direction of the arrow shown in FIG. The thickness D of the encapsulant 50 above the LED chips 1, 2, 3 is substantially equivalent to the thickness (about (wr)/2) of the periphery of the encapsulation 50, so that the light emitted by the LED chip 1-3 and the phosphor 55 are converted. The rear light is uniformly mixed in all directions to ensure uniformity of color temperature, w is the pitch of the LED chips 1 to 3 along the x and y directions on the conversion base film 30, and r is the thickness of the dicing blade. The control of the color temperature is determined by the ratio of the gel to the phosphor and the thickness of the final encapsulant, and is not specifically limited herein.
所采用的封装胶50,在转换基膜30上固化后具有合适的硬度,硬度不低于70shore,易于利用机械方法切割,不崩边并具有目前通用LED封装胶的品质要求。此外,这里的封装胶尤其要具有焊锡耐热性,所涂胶膜无剥离。The encapsulant 50 used has a suitable hardness after curing on the conversion base film 30, and has a hardness of not less than 70 shore. It is easy to cut by mechanical methods, does not collapse, and has the quality requirements of the current general-purpose LED encapsulant. In addition, the encapsulant here has in particular solder heat resistance, and the applied film is not peeled off.
应用上述方法得到了芯片级封装结构,图4为封装好后完成切割分离的芯片级封装结构。所述转换基膜30被从LED芯片1、2、3表面分离,暴露第一电极15和第二电极14的表面。The chip-level package structure is obtained by the above method, and FIG. 4 is a chip-scale package structure that completes the cutting and separation after packaging. The conversion base film 30 is separated from the surfaces of the LED chips 1, 2, 3, exposing the surfaces of the first electrode 15 and the second electrode 14.
如图5所示,将芯片级封装结构安装在电路板或支架70内,所述芯片级封装结构的第一电极15和第二电极14通过焊接、粘接等方式与电路板或支架70上对应的电极焊盘71和72固定并电连接。As shown in FIG. 5, the chip scale package structure is mounted in a circuit board or bracket 70, and the first electrode 15 and the second electrode 14 of the chip scale package structure are soldered, bonded, or the like to the circuit board or the bracket 70. The corresponding electrode pads 71 and 72 are fixed and electrically connected.
实施例三:Embodiment 3:
在实施例一和二的基础上,结合图6至图8B,提供了另一个实施例:On the basis of the first and second embodiments, in conjunction with FIG. 6 to FIG. 8B, another embodiment is provided:
如图6所示,在实施例二的基础上,在所述转换基膜上的倒装发光器件之间和/或周围形成围坝。As shown in FIG. 6, on the basis of the second embodiment, a dam is formed between and/or around the flip-chip light-emitting devices on the conversion base film.
具体地:在多个倒装LED结构LED芯片1、2、3以一定的间隔20排列在转换基膜30上之后,在LED芯片1-3的周围形成“围坝”80。围坝80可以采用贴膜方式或其它形成,可以是一个只分布在所有芯片或部分芯片周围的大的围坝80(如图7A所示)也可是多个网格状(如图7B所示)结构,但要求围坝80高度均匀一致。Specifically, after the plurality of flip-chip LED structure LED chips 1, 2, 3 are arranged on the conversion base film 30 at a certain interval 20, a "dam" 80 is formed around the LED chips 1-3. The dam 80 may be formed by filming or the like, and may be a large dam 80 (as shown in FIG. 7A) or a plurality of grids (as shown in FIG. 7B) distributed only around all chips or a part of the chips. Structure, but requires the dam 80 to be uniform in height.
将调配好的封装胶50在围坝内均匀涂敷,并保证无气泡。通过所述围坝80将涂覆在LED芯片1-3上方和周围的封装胶50分隔开来。围坝80的高
度超过LED芯片1的厚度,使得采用封装胶50封装LED芯片1时,覆盖在LED芯片1上方的封装胶厚度与侧壁的厚度相当,如图8A所示,以使得整个芯片沿各个发光面发出的光色温和/或亮度均匀。胶的固化采用热固化和紫外光固化相结合的方式,保证固化后具有一定的硬度和韧性,便于切割。The formulated encapsulant 50 is evenly coated in the dam and is guaranteed to be free of air bubbles. The encapsulant 50 coated on and around the LED chips 1-3 is separated by the dam 80. Height of the dam 80
The thickness exceeds the thickness of the LED chip 1, so that when the LED chip 1 is packaged with the encapsulant 50, the thickness of the encapsulant over the LED chip 1 is equivalent to the thickness of the sidewall, as shown in FIG. 8A, so that the entire chip is along each of the light emitting surfaces. The emitted light is mild and/or uniform in brightness. The curing of the glue is combined with thermal curing and ultraviolet curing to ensure a certain hardness and toughness after curing, which is convenient for cutting.
如图8B所示,所述封装胶50中可以混有波长转换材料55,如荧光粉。As shown in FIG. 8B, a wavelength converting material 55 such as a phosphor may be mixed in the encapsulant 50.
封装胶50适度固化后去除围坝80,再依封装胶50的硬度和韧性二次调整固化条件,之后进行倒膜,切割,形成单个的芯片级封装结构。After the package adhesive 50 is moderately cured, the dam 80 is removed, and the curing conditions are adjusted twice according to the hardness and toughness of the package adhesive 50, and then the film is cut and cut to form a single chip scale package structure.
采用围坝80要避免封装胶侵入芯片与转换基膜之间,沾污芯片表面的电极层。The dam 80 is used to prevent the encapsulating glue from intruding between the chip and the conversion base film, and contaminating the electrode layer on the surface of the chip.
实施例四:Embodiment 4:
在实施例一至实施例三中提供的芯片级封装方法的基础上,本实施例中为增加封装胶50与所述衬底10表面的粘附性,进一步在衬底10的表面先形成一层对可见光有高透射率的介质薄膜16,如图9所示。所述介质薄膜16由氧化硅等组成,与封装胶50和衬底10都有良好的粘附性。所述介质薄膜16的厚度保证其对可见光具有至少70%以上的透射率,优选在90%以上。厚度在几到几微米之间,优选在50nm-200nm之内。所述介质薄膜16可以是单层膜,也可以是多层膜,可以通过气相沉积、溅射或旋涂等方式形成。On the basis of the chip-level packaging method provided in the first embodiment to the third embodiment, in this embodiment, in order to increase the adhesion between the encapsulant 50 and the surface of the substrate 10, a layer is further formed on the surface of the substrate 10. A dielectric film 16 having a high transmittance for visible light is shown in FIG. The dielectric film 16 is composed of silicon oxide or the like and has good adhesion to both the encapsulant 50 and the substrate 10. The thickness of the dielectric film 16 is such that it has a transmittance of at least 70% or more for visible light, preferably 90% or more. Thickness in a few It is between several micrometers, preferably in the range of 50 nm to 200 nm. The dielectric film 16 may be a single layer film or a multilayer film, and may be formed by vapor deposition, sputtering, or spin coating.
与现有技术相比,本发明所述的发光器件的芯片级封装方法及结构,达到了如下效果:Compared with the prior art, the chip-level packaging method and structure of the light-emitting device of the present invention achieve the following effects:
1)本发明采用塑料膜作为支撑和排列芯片的转换基膜,直接对芯片进行封装,大大简化芯片的封装工艺步骤,同时节省了将芯片转移到其他支撑基板所需材料成本,对于降低芯片封装成本具有重要意义,此外还解决了荧光胶或封装胶与蓝宝石衬底之间的粘附性的问题;1) The invention adopts a plastic film as a conversion base film for supporting and arranging chips, directly encapsulating the chip, greatly simplifying the packaging process steps of the chip, and saving the material cost required for transferring the chip to other support substrates, and reducing the chip package. Cost is of great importance, in addition to solving the problem of adhesion between fluorescent glue or encapsulant and sapphire substrate;
2)与现有技术相比,本发明省去了通常封装时要用的芯片支撑基板或支架,而只对该发光器件进行封装,降低了系统热阻;2) Compared with the prior art, the present invention eliminates the chip supporting substrate or the bracket which is usually used in packaging, and only encapsulates the light emitting device, thereby reducing the thermal resistance of the system;
3)与现有技术相比不但简化了制程还使产品小型化,降低了成本,方便终端用户,提高了生产效率,并拓宽了应用范围;3) Compared with the prior art, it not only simplifies the process but also miniaturizes the product, reduces the cost, facilitates the end user, improves the production efficiency, and broadens the application range;
4)由于设置了围坝,限制了封装胶的高度,切割后,在芯片级封装结构周围的封装胶厚度一致,以使得LED芯片发出的光与经荧光粉转化后的光在
各个方向上混光均匀,保证了色温均匀性。4) Because the dam is installed, the height of the encapsulant is limited. After cutting, the thickness of the encapsulant around the chip-scale package structure is uniform, so that the light emitted by the LED chip and the phosphor-converted light are
The light is evenly mixed in all directions to ensure uniformity of color temperature.
由于方法部分已经对本申请实施例进行了详细描述,这里对实施例中涉及的结构与方法对应部分的展开描述省略,不再赘述。对于结构中具体内容的描述可参考方法实施例的内容,这里不再具体限定。The method of the present invention has been described in detail in the method section, and the description of the corresponding parts of the structure and method involved in the embodiment is omitted here, and will not be described again. For the description of the specific content in the structure, reference may be made to the content of the method embodiment, which is not specifically limited herein.
上述说明示出并描述了本申请的若干优选实施例,但如前所述,应当理解本申请并非局限于本文所披露的形式,不应看作是对其他实施例的排除,而可用于各种其他组合、修改和环境,并能够在本文所述申请构想范围内,通过上述教导或相关领域的技术或知识进行改动。而本领域人员所进行的改动和变化不脱离本申请的精神和范围,则都应在本申请所附权利要求的保护范围内。
The above description shows and describes several preferred embodiments of the present application, but as described above, it should be understood that the application is not limited to the forms disclosed herein, and should not be construed as Other combinations, modifications, and environments are possible and can be modified by the above teachings or related art or knowledge within the scope of the application concept described herein. All changes and modifications made by those skilled in the art are intended to be within the scope of the appended claims.
Claims (9)
- 一种发光器件的芯片级封装方法,其特征在于,包括:A chip scale packaging method for a light emitting device, comprising:将至少一个倒装发光器件等距离排列在转换基膜上,所述倒装发光器件的主出光面背离所述转换基膜,其中,所述转换基膜的表面具有一定粘度而且耐高温,用于粘附所述倒装发光器件;Arranging at least one flip-chip light emitting device equidistantly on the conversion base film, the main light-emitting surface of the flip-chip light-emitting device facing away from the conversion base film, wherein the surface of the conversion base film has a certain viscosity and high temperature resistance, Adhering to the flip-chip light emitting device;在所述转换基膜上的倒装发光器件之间和/或周围形成围坝;Forming a dam between and/or around the flip-chip light-emitting devices on the conversion substrate;分别在所述倒装发光器件和转换基膜上涂覆封装胶,所述封装胶为光固化胶、热固化胶或热固化与光固化结合的封装胶中的一种;Applying an encapsulant on the flip-chip light-emitting device and the conversion base film, respectively, the encapsulant being one of a photocurable adhesive, a thermosetting adhesive or a combination of a thermal curing and a photocuring;待所述封装胶固化到无流动性时去除所述围坝;Removing the dam when the encapsulant is cured to no fluidity;待所述封装胶完全固化后切割所述封装胶;Cutting the encapsulant after the encapsulant is completely cured;去除所述转换基膜,倒膜后得到芯片级封装结构。The conversion base film is removed, and the chip-level package structure is obtained after the film is inverted.
- 根据权利要求1所述的发光器件的芯片级封装方法,其特征在于,所述围坝的材料为塑料膜或光敏感型胶。The chip scale packaging method of a light emitting device according to claim 1, wherein the material of the dam is a plastic film or a light sensitive glue.
- 根据权利要求1所述的发光器件的芯片级封装方法,其特征在于,所述封装胶,进一步为,有机硅型封装胶或树脂型封装胶,其中,The chip-level packaging method of the light-emitting device according to claim 1, wherein the encapsulant is further a silicone-type encapsulant or a resin-type encapsulant, wherein当所述封装胶为有机硅型封装胶或树脂型封装胶时,所述转换基膜的粘度在1-100gf/25mm之间。When the encapsulant is a silicone type encapsulant or a resin type encapsulant, the conversion base film has a viscosity of between 1 and 100 gf / 25 mm.
- 根据权利要求1所述的发光器件的芯片级封装方法,其特征在于,所述转换基膜为蓝膜、白膜或UV膜。The chip scale packaging method of a light emitting device according to claim 1, wherein the conversion base film is a blue film, a white film or a UV film.
- 根据权利要求4所述的发光器件的芯片级封装方法,其特征在于,当所述转换基膜为UV膜时,所述转换基膜经紫外光照射后粘度在1-100gf/25mm之间。 The chip scale packaging method of a light-emitting device according to claim 4, wherein when the conversion base film is a UV film, the conversion base film has a viscosity of between 1 and 100 gf/25 mm after being irradiated with ultraviolet light.
- 根据权利要求1所述发光器件的芯片级封装方法,其特征在于,所述倒装发光器件的主出光面覆盖一层连接所述封装胶与主出光面之间的介质膜。The chip-level packaging method of a light-emitting device according to claim 1, wherein the main light-emitting surface of the flip-chip light-emitting device is covered with a dielectric film connecting the encapsulant and the main light-emitting surface.
- 根据权利要求6所述发光器件的芯片级封装方法,其特征在于,所述介质膜的透射率大于等于70%,厚度在50nm至200nm之间,该介质膜由氧化物或氮化物组成。The chip scale packaging method of a light-emitting device according to claim 6, wherein the dielectric film has a transmittance of 70% or more and a thickness of 50 nm to 200 nm, and the dielectric film is composed of an oxide or a nitride.
- 根据权利要求1所述发光器件的芯片级封装方法,其特征在于,所述切割所述封装胶后,所述倒装发光器件上方的封装胶厚度d=(w-r)/2,其中,w为所述倒装发光器件之间的距离,r为切割刀宽度。The chip-level packaging method of the light emitting device according to claim 1, wherein after the encapsulating the encapsulant, the thickness of the encapsulant above the flip-chip device is d=(wr)/2, wherein w is The distance between the flip-chip light emitting devices, r is the cutter width.
- 一种应用权利要求1至8中任一所述的发光器件的芯片级封装方法制成的芯片级封装结构。 A chip scale package structure produced by the chip scale packaging method of the light emitting device according to any one of claims 1 to 8.
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