WO2016147410A1 - 加工ノズルおよびレーザ加工装置 - Google Patents
加工ノズルおよびレーザ加工装置 Download PDFInfo
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- WO2016147410A1 WO2016147410A1 PCT/JP2015/058365 JP2015058365W WO2016147410A1 WO 2016147410 A1 WO2016147410 A1 WO 2016147410A1 JP 2015058365 W JP2015058365 W JP 2015058365W WO 2016147410 A1 WO2016147410 A1 WO 2016147410A1
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- Prior art keywords
- nozzle
- processing
- flow path
- gap
- flange
- Prior art date
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- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 11
- 238000004891 communication Methods 0.000 claims abstract description 9
- 239000007789 gas Substances 0.000 description 45
- 238000003754 machining Methods 0.000 description 22
- 230000004048 modification Effects 0.000 description 17
- 238000012986 modification Methods 0.000 description 17
- 238000000034 method Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 5
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 4
- 238000005553 drilling Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
- B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
- B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/02—Iron or ferrous alloys
- B23K2103/04—Steel or steel alloys
Definitions
- the present invention relates to a processing nozzle and a laser processing apparatus used for laser processing.
- Some laser processing apparatuses that perform laser processing using a laser beam emitted from a processing nozzle eject an assist gas from the tip of the processing nozzle.
- the assist gas ejected from the machining nozzle is blown to the machining site of the workpiece.
- Patent Document 1 As a processing nozzle of a laser processing apparatus, as shown in Patent Document 1, there is a double nozzle type processing nozzle in which an inner nozzle is fitted inside an outer nozzle.
- the assist gas is allowed to pass through both the inner flow path formed inside the inner nozzle and the outer flow path formed between the inner nozzle and the outer nozzle. It is made to squirt out from the tip.
- the ratio of the flow rate of the assist gas passing through the inner flow path and the flow rate of the assist gas passing through the outer flow path is adjusted to form the work piece by laser processing.
- a sufficient and appropriate amount of assist gas can be supplied to the inside of the slit and the surface of the workpiece.
- the processing quality of laser processing can be improved. Specifically, the processing quality can be improved by suppressing the flow rate of the assist gas passing through the outer flow path.
- the assist gas is supplied to the outer flow path through the hole formed in the inner nozzle. Therefore, by reducing the size of the hole formed in the inner nozzle, the flow rate of the assist gas passing through the outer channel can be suppressed. However, if the hole is made small in order to suppress the flow rate of the assist gas to the outer channel, the flow rate variation due to the decrease in the hole processing accuracy or the processing cost for securing the hole processing accuracy will increase. End up.
- the present invention has been made in view of the above, and provides a machining nozzle capable of reducing the manufacturing cost and suppressing the flow rate of the assist gas passing through the outer flow path and improving the machining quality of laser machining.
- the purpose is to obtain.
- the present invention is a machining nozzle comprising an outer nozzle formed with a flow path and an inner nozzle fitted into the flow path of the outer nozzle, A flange that closes the outer nozzle is formed in the nozzle, and a communication path that connects the upstream side and the downstream side of the flange of the flow path is formed in the flange, and the downstream side of the flange of the flow path And a gap forming part for forming a gap between the outer nozzle and the inner nozzle.
- the processing nozzle according to the present invention has an effect that the manufacturing cost can be reduced, the flow rate of the assist gas passing through the outer flow path can be suppressed, and the processing quality of laser processing can be improved.
- FIG. 4 is a cross-sectional view of the outer nozzle included in the laser processing apparatus according to the first embodiment, and is a cross-sectional view taken along line AA shown in FIG. 3.
- Cross-sectional perspective view of the outer nozzle shown in FIG. The top view which looked at the inner nozzle with which the laser processing apparatus concerning Embodiment 1 is provided from the incident side of a laser beam FIG.
- FIG. 6 is a cross-sectional view of the inner nozzle included in the laser processing apparatus according to the first embodiment, and is a cross-sectional view taken along line BB shown in FIG. 6.
- Sectional drawing which shows the modification of the process nozzle with which the laser processing apparatus concerning Embodiment 1 is provided.
- Sectional perspective view which shows the modification of the outer side nozzle with which the process nozzle shown in FIG. 8 is equipped.
- Sectional drawing of the process nozzle concerning Embodiment 3 of this invention The top view of the annular member with which the process nozzle concerning Embodiment 3 of this invention is provided.
- Sectional perspective view of the annular member with which the process nozzle concerning Embodiment 3 of this invention is provided.
- FIG. Sectional drawing which shows the modification of the process nozzle concerning Embodiment 3.
- the top view which looked at the hole of the processing nozzle concerning Embodiment 4 from the incident side of the laser beam
- FIG. 1 is a diagram showing a schematic configuration of a laser processing apparatus according to Embodiment 1 of the present invention.
- the laser processing apparatus 100 is an apparatus that performs laser processing by irradiating a workpiece 101 held on a holding table 103 with a laser beam 102.
- the laser processing apparatus 100 includes a laser oscillator 104, a reflection mirror 105, a processing head 1, and an assist gas supply source 106.
- the laser oscillator 104 outputs a laser beam 102.
- the reflection mirror 105 reflects the laser beam 102 output from the laser oscillator 104 to the processing head 1 side.
- the processing head 1 includes a processing lens 6 inside. Further, the machining head 1 includes a machining nozzle 2 on the emission side of the laser beam 102. The laser beam 102 reflected by the reflection mirror 105 and incident on the processing head 1 is collected by the processing lens 6. The laser beam 102 collected by the processing lens 6 is emitted from the processing nozzle 2 and applied to the workpiece 101.
- the assist gas supply source 106 stores an assist gas that is a processing gas to be sent to the processing head 1, and sends the assist gas to the gas path 107.
- the assist gas is oxygen, for example.
- the gas path 107 is connected to the supply port 7 formed in the machining head 1.
- the assist gas sent from the assist gas supply source 106 is supplied into the machining head 1 through the supply port 7.
- the assist gas supplied to the inside of the processing head 1 is ejected from the processing nozzle 2 and sprayed to a position where the laser beam 102 of the workpiece 101 is irradiated.
- the workpiece 101 is cut by changing the irradiation position of the laser beam 102 on the workpiece 101 by moving the machining head 1 or the holding table 103.
- FIG. 2 is a cross-sectional view of the processing nozzle 2 provided in the laser processing apparatus 100 according to the first embodiment.
- the processing nozzle 2 includes an outer nozzle 3 that has a cylindrical shape, and an inner nozzle 5 that has a cylindrical shape and is fitted inside the outer nozzle 3.
- FIG. 3 is a plan view of the outer nozzle 3 provided in the laser processing apparatus 100 according to the first embodiment when viewed from the incident side of the laser beam 102.
- FIG. 4 is a cross-sectional view of the outer nozzle 3 provided in the laser processing apparatus 100 according to the first embodiment, and is a cross-sectional view taken along the line AA shown in FIG.
- FIG. 5 is a cross-sectional perspective view of the outer nozzle 3 shown in FIG.
- the inside of the outer nozzle 3 having a cylindrical shape is a flow path 4 through which the assist gas passes.
- the inner shape of the outer nozzle 3 is narrower toward the jet port 21 from which the assist gas is jetted.
- a flange fitting portion 8 into which a flange portion of the inner nozzle 5 described later is fitted is formed inside the outer nozzle 3.
- annular protruding portion 9 On the inner side of the outer nozzle 3, an annular protruding portion 9 is formed that protrudes toward the flange fitted in the flange fitting portion 8.
- the annular projecting portion 9 has an annular shape that is coaxial with the cylindrical central axis of the outer nozzle 3.
- the cylindrical central axis exhibited by the outer nozzle 3 is referred to as the central axis of the processing nozzle 2.
- a contact surface 9 a that contacts the flange of the inner nozzle 5 is formed at the tip of the annular protrusion 9.
- a plurality of grooves 9 b are formed at equal intervals on the contact surface 9 a of the annular protrusion 9. The groove 9b is formed so as to penetrate between the outer side surface and the inner side surface of the annular protrusion 9.
- FIG. 6 is a plan view of the inner nozzle 5 provided in the laser processing apparatus 100 according to the first embodiment when viewed from the incident side of the laser beam 102.
- FIG. 7 is a cross-sectional view of the inner nozzle 5 included in the laser processing apparatus 100 according to the first embodiment, and is a cross-sectional view taken along the line BB shown in FIG.
- the inner nozzle 5 is formed with a flange 11 that closes the space between the inner nozzle 5 and the outer nozzle 3.
- the outer surface of the flange 11 contacts the inner surface of the outer nozzle 3.
- a tubular portion 12 having a tubular shape is formed so as to protrude from the flange 11 toward the ejection port 21 of the outer nozzle 3.
- the inside of the cylindrical part 12 becomes the inner flow path 10 through which the assist gas passes.
- the spout 22 that is the tip of the cylindrical portion 12 is located inside the flow path 4 relative to the spout 21 of the outer nozzle 3.
- the inner flow path 10 is narrowed toward the jet port 22.
- the flange 11 is fitted into the flange fitting portion 8 of the outer nozzle 3, that is, the inner nozzle 5 is fitted into the flow passage 4 of the outer nozzle 3, so that the flow passage is formed outside the tubular portion 12.
- 4 is divided into an upstream side and a downstream side in the passage direction of the assist gas by the flange 11.
- the upstream side of the flange 11 is the upstream flow path 4 a
- the downstream side of the flange 11 is the outer side of the cylindrical portion 12 of the inner nozzle 5.
- a space between the nozzle 3 and the nozzle 3 is defined as an outer flow path 4b.
- the contact surface 9 a formed on the annular protrusion 9 of the outer nozzle 3 comes into contact with the flange 11.
- Positioning in the depth direction in the flow path 4 of the inner nozzle 5 is performed by the contact surface 9a contacting the flange 11. Since the contact surface 9a contacts the flange 11, a gap is formed between the flange 11 and the groove 9b. That is, the annular protrusion 9 is a gap forming part.
- the radial positioning of the inner nozzle 5 is performed by contacting the outer surface of the flange 11 and the inner surface of the outer nozzle 3.
- the flange 11 is formed with a plurality of holes 13 that are communication paths that allow the upstream flow path 4 a and the outer flow path 4 b to communicate with each other at equal intervals around the center axis of the processing nozzle 2. Yes.
- the laser beam 102 is emitted from the processing nozzle 2 through the upstream flow path 4a, the inner flow path 10, the jet port 22, and the jet port 21.
- the assist gas supplied to the upstream flow path 4a passes through the inner flow path 10, the jet outlet 22, and the jet outlet 21, and passes through the hole 13, the outer flow path 4b, and the jet outlet 21. And squirted.
- the assist gas ejected through the inner flow path 10 is referred to as an inner airflow
- the assist gas ejected through the outer flow path 4b is referred to as an outer airflow.
- the inner airflow is supplied into the slit 108 formed in the workpiece 101 mainly by laser processing.
- the outside airflow is supplied to the boundary portion between the slit 108 and the surface 101a formed in the workpiece 101 mainly by laser machining.
- the speed difference between the inner airflow and the outside air is reduced by the outer airflow flowing between the outside air and the inner airflow that exist outside the outer airflow.
- a mild steel cutting process in which the workpiece 101 is mild steel will be described.
- high-purity oxygen is mainly used as an assist gas.
- the oxidation reaction is promoted by the supply of the assist gas, resulting in a higher temperature.
- the slit 108 is formed in the workpiece 101, and the cutting process can be advanced efficiently.
- the oxidation reaction is suppressed by suppressing the supply amount of the assist gas, and the surface 101a is prevented from being unstablely processed by melting the surface 101a. be able to. Thereby, the sharp slit 108 can be formed.
- the supply amount of the assist gas to the boundary portion between the surface 101a of the workpiece 101 and the slit 108, it is necessary to suppress the amount of the outside airflow.
- high accuracy is required to adjust the flow rate of the outside airflow.
- the area of the flow path through which the outer airflow in the processing nozzle 2 passes may be reduced.
- the area of the flow path through which the outer airflow passes can be reduced by the size of the gap formed between the groove 9b formed in the annular protrusion 9 and the flange 11. That is, by reducing the width and depth of the groove 9b, the area of the flow path through which the outer airflow passes can be reduced.
- the total area of the flow paths formed by the gaps between the plurality of grooves 9b and the flange 11 is smaller than the sum of the opening areas (flow path areas) of the plurality of holes 13. ing.
- the processing nozzle 2 by reducing the width and depth of the groove 9b formed in the annular projecting portion 9, the area of the flow path through which the outer airflow passes can be reduced. .
- the processing accuracy is hardly lowered. Therefore, it is easy to reduce the processing cost necessary to ensure the processing accuracy of the groove processing. For example, even when the diameter of the ejection port 21 is 1.5 mm to 3 mm, a general tolerance of ⁇ 0.1 mm can be adopted as the processing accuracy of the groove 9b.
- the flow rate is suppressed at the groove 9b portion, the hole 13 formed in the flange 11 can be formed large. Thereby, the cost of drilling can be suppressed. Therefore, in the processing nozzle 2 according to the first embodiment, the manufacturing cost can be suppressed, the flow rate of the assist gas passing through the outer flow path can be suppressed, and the processing quality of laser processing can be improved.
- each of the plurality of holes 13 and the plurality of grooves 9b is formed at equal intervals, the flow rate of the outer airflow is made uniform in the circumferential direction around the inner airflow. Therefore, it is possible to suppress variations in processing quality due to the direction of cutting processing.
- the number of the plurality of holes 13 and the plurality of grooves 9b is preferably three or more.
- the inclination of the inner surface of the outer nozzle 3 with respect to the central axis is made larger than the inclination of the outer surface of the cylindrical portion 12 with respect to the central axis, thereby making the outer airflow more uniform. Can be achieved.
- the laser processing apparatus 100 is illustrated as propagating the laser beam 102 from the laser oscillator 104 to the processing head 1 using the reflection mirror 105, it is not limited to this.
- a laser processing apparatus that propagates a laser beam from the laser oscillator 104 to the processing head 1 using a fiber may be used.
- lasers propagated by fibers include fiber lasers and direct diode lasers.
- FIG. 8 is a cross-sectional view showing a modification of the machining nozzle 2 provided in the laser machining apparatus 100 according to the first embodiment.
- FIG. 9 is a cross-sectional perspective view showing a modification of the outer nozzle 3 provided in the processing nozzle 2 shown in FIG.
- no groove is formed on the tip surface 9 c of the annular protrusion 9
- a gap that reduces the channel area of the outer channel 4 b is formed between the entire tip surface 9 c and the flange 11.
- the positioning protrusion 14 since the annular protrusion 9 does not contact the flange 11, a positioning protrusion 14 that positions the inner nozzle 5 in the depth direction is formed on the outer nozzle 3.
- the positioning protrusion 14 is formed with a contact surface 14a that contacts the flange 11 on the outer peripheral side of the position where the hole 13 is formed.
- the groove is not formed in the annular protruding portion 9, the shape of the outer nozzle 3 can be simplified, and the manufacturing cost can be suppressed.
- the sum of the areas of the flow paths formed by the gap between the tip surface 9c of the annular protrusion 9 and the flange 11 is greater than the sum of the opening areas (flow path areas) of the plurality of holes 13. It is getting smaller.
- FIG. FIG. 10 is a cross-sectional view of a processing nozzle according to the second embodiment of the present invention.
- symbol is attached
- an annular protrusion 39 is formed on the inner nozzle 5.
- the tip of the annular protrusion 39 is an abutting surface 39 a that abuts against the abutting surface 34 of the outer nozzle 3.
- a plurality of grooves 39b are formed at equal intervals on the contact surface 39a of the annular projecting portion 39 as in the first embodiment, and the gap formed between the groove 39b and the abutting surface 34 is defined as an outer flow.
- the flow path area of the path 4b is reduced.
- the formation of the groove 39b can reduce the flow area of the outer flow path 4b, thereby reducing the manufacturing cost and reducing the outer flow path.
- the processing quality of laser processing can be improved.
- the total area of the flow paths formed by the gaps between the plurality of grooves 39b and the abutting surface 34 is smaller than the sum of the opening areas (flow path areas) of the plurality of holes 13. It has become.
- the outer flow path 4b is formed by a gap formed between the entire tip surface and the abutting surface 34 without forming a groove on the tip surface of the annular protrusion 39.
- the flow channel area may be reduced.
- the positioning protrusion 14 in order to position the inner nozzle 5 in the depth direction, the positioning protrusion 14 (see also FIG. 8) formed with the contact surface 14a is used as the outer nozzle. 3 is formed. Further, the total area of the flow paths formed by the gap between the tip surface of the annular protrusion 39 and the contact surface 34 is smaller than the sum of the opening areas (flow path areas) of the plurality of holes 13. Yes.
- FIG. FIG. 11 is a cross-sectional view of a processing nozzle according to the third embodiment of the present invention.
- the processing nozzle 42 according to the third embodiment is a ring-shaped annular member that is separate from the outer nozzle 3 and the inner nozzle 5 in place of the annular protrusions shown in the first and second embodiments. 49.
- the annular member 49 is a sandwiched portion that is sandwiched between the outer nozzle 3 and the inner nozzle 5.
- FIG. 12 is a plan view of the annular member 49 provided in the processing nozzle 42 according to the third embodiment of the present invention.
- FIG. 13 is a cross-sectional perspective view of the annular member 49 provided in the processing nozzle 42 according to the third embodiment of the present invention.
- a contact surface 49a that contacts the flange 11 is formed on the surface of the annular member 49 that faces the flange 11, and a plurality of grooves 49b are formed on the contact surface 49a at equal intervals.
- the groove 49 b penetrates the outer surface and the inner surface of the annular member 49.
- the annular member 49 is positioned by fitting in a positioning groove 44 formed in a circular shape in the outer nozzle 3.
- the flow path area of the outer flow path 4b can be reduced by the gap formed between the groove 49b formed in the annular member 49 and the flange 11. Therefore, similarly to the first embodiment, the manufacturing cost can be suppressed, the flow rate of the assist gas passing through the outer flow path 4b can be suppressed, and the processing quality of laser processing can be improved. Further, by changing to the annular member 49 having a different width and depth of the groove 49b, the flow rate of the outside airflow can be easily changed. In the third embodiment, the total sum of the areas of the flow paths formed by the gaps between the plurality of grooves 49b and the flanges 11 is smaller than the sum of the opening areas (flow path areas) of the plurality of holes 13. ing.
- FIG. 14 is a cross-sectional view showing a modification of the machining nozzle 42 according to the third embodiment.
- a positioning groove 44 is formed in the flange 11 of the inner nozzle 5 and an annular member 49 is provided so as to be inverted upside down from the example shown in FIG.
- the channel area of the outer channel 4 b can be reduced by the gap formed between the groove 49 b formed in the annular member 49 and the outer nozzle 3.
- the sum of the areas of the flow paths formed by the gaps between the plurality of grooves 49 b and the outer nozzle 3 is smaller than the sum of the opening areas (flow path areas) of the plurality of holes 13. Yes.
- FIG. 15 is a sectional view of the processing nozzle 52 according to the fourth embodiment of the present invention.
- FIG. 16 is a plan view of the holes of the processing nozzle 52 according to the fourth embodiment when viewed from the incident side of the laser beam 102.
- symbol is attached
- a part of the outlet from the hole 13 formed in the flange 11 to the outer flow path 4 b is blocked by a contact surface 55 formed in the outer nozzle 3 and contacting the flange 11.
- the contact surface 55 is hatched for easy understanding of the drawing.
- the flow path area of the outer flow path 4b is reduced by the gap formed by the contact surface 55 that is the gap forming portion and the outlet of the hole 13.
- the area of the gap is determined by the position of the edge portion 55 a of the contact surface 55. Since the position of the edge portion 55a is adjusted by cutting, as in the first embodiment, the flow of assist gas passing through the outer flow path 4b is suppressed while suppressing the manufacturing cost, and the processing quality of laser processing is reduced. Can be improved.
- FIG. 17 and FIG. 18 are diagrams showing modifications of the shape of the flange 11 of the inner nozzle 5.
- a notch 15 may be formed on the outer periphery of the flange 11 in place of the hole 13 with respect to the flange 11 of the inner nozzle 5.
- the space between the inner surface of the outer nozzle 3 and the notch 15 functions as a communication path for communicating the upstream flow path 4a and the outer flow path 4b. If the notch 15 is used, the processing cost can be reduced more easily than the formation of the hole 13, so that the manufacturing cost of the processing nozzle can be reduced.
- the configuration described in the above embodiment shows an example of the contents of the present invention, and can be combined with another known technique, and can be combined with other configurations without departing from the gist of the present invention. It is also possible to omit or change the part.
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Abstract
Description
図1は、本発明の実施の形態1にかかるレーザ加工装置の概略構成を示す図である。レーザ加工装置100は、保持テーブル103に保持された被加工物101にレーザビーム102を照射してレーザ加工を行う装置である。レーザ加工装置100は、レーザ発振器104と、反射ミラー105と、加工ヘッド1と、アシストガス供給源106と、を備える。
図10は、本発明の実施の形態2にかかる加工ノズルの断面図である。なお、上記実施の形態1と同様の構成については、同様の符号を付して詳細な説明を省略する。本実施の形態2にかかる加工ノズル32は、環状突出部39が内側ノズル5に形成されている。環状突出部39の先端は、外側ノズル3の当て面34に当接する当接面39aとなっている。環状突出部39の当接面39aには、実施の形態1と同様に複数の溝39bが等間隔で形成されており、溝39bと当て面34との間に形成される間隙が、外側流路4bの流路面積を小さくする。
図11は、本発明の実施の形態3にかかる加工ノズルの断面図である。なお、上記実施の形態1と同様の構成については、同様の符号を付して詳細な説明を省略する。本実施の形態3にかかる加工ノズル42は、上記実施の形態1および上記実施の形態2で示した環状突出部に代えて、外側ノズル3および内側ノズル5とは別体のリング状の環状部材49を備える。環状部材49は、外側ノズル3と内側ノズル5との間に挟持される被挟持部である。
図15は、本発明の実施の形態4にかかる加工ノズル52の断面図である。図16は、実施の形態4にかかる加工ノズル52の孔をレーザビーム102の入射側から見た平面図である。なお、上記実施の形態1と同様の構成については、同様の符号を付して詳細な説明を省略する。本実施の形態4では、フランジ11に形成された孔13からの外側流路4bへの流出口の一部を、外側ノズル3に形成されてフランジ11に当接する当て面55で塞いでいる。図16では、図面の理解容易化のために当て面55にハッチングを付して示している。
Claims (12)
- 流路が形成された外側ノズルと、前記外側ノズルの流路に嵌め込まれた内側ノズルと、を備える加工ノズルであって、
前記内側ノズルには、前記外側ノズルとの間を閉塞するフランジが形成され、
前記フランジには、前記流路の前記フランジよりも上流側と下流側とを連通させる連通路が形成され、
前記流路の前記フランジよりも下流において、前記外側ノズルとの間、または前記内側ノズルとの間に間隙を形成させる間隙形成部をさらに備えることを特徴とする加工ノズル。 - 前記間隙形成部は、前記外側ノズルと一体に形成され、前記内側ノズルとの間に前記間隙を形成することを特徴とする請求項1に記載の加工ノズル。
- 前記間隙形成部は、前記内側ノズルに当接する当接面を有し、
前記当接面には、溝が形成され、
前記溝部分で前記間隙が形成されることを特徴とする請求項2に記載の加工ノズル。 - 前記間隙形成部は、前記内側ノズルと一体に形成され、前記外側ノズルとの間に前記間隙を形成することを特徴とする請求項1に記載の加工ノズル。
- 前記間隙形成部は、前記外側ノズルに当接する当接面を有し、
前記当接面には、溝が形成され、
前記溝部分で前記間隙が形成されることを特徴とする請求項4に記載の加工ノズル。 - 前記間隙形成部は、前記外側ノズルと前記内側ノズルとの間に挟持される被挟持部であり、
前記間隙は、前記被挟持部と前記外側ノズルとの間に形成されることを特徴とする請求項1に記載の加工ノズル。 - 前記被挟持部は、前記外側ノズルに当接する当接面を有し、
前記当接面には、溝が形成され、
前記溝部分で前記間隙が形成されることを特徴とする請求項6に記載の加工ノズル。 - 前記間隙形成部は、前記外側ノズルと前記内側ノズルとの間に挟持される被挟持部であり、
前記間隙は、前記被挟持部と前記内側ノズルとの間に形成されることを特徴とする請求項1に記載の加工ノズル。 - 前記被挟持部は、前記内側ノズルに当接する当接面を有し、
前記当接面には、溝が形成され、
前記溝部分で前記間隙が形成されることを特徴とする請求項8に記載の加工ノズル。 - 前記連通路は、前記フランジに形成された孔であり、
前記間隙形成部は、前記外側ノズルと一体に形成され、前記孔の一部を塞いで前記間隙を形成することを特徴とする請求項1に記載の加工ノズル。 - 前記連通路での流路面積の総和よりも、前記間隙での流路面積の総和のほうが小さいことを特徴とする請求項1から10のいずれか1つに記載の加工ノズル。
- 請求項1から請求項11のいずれか1つに記載の加工ノズルと、
前記加工ノズルを通して出射されるレーザビームを発振するレーザ発振器と、を備えることを特徴とするレーザ加工装置。
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WO2019142239A1 (ja) * | 2018-01-16 | 2019-07-25 | 三菱電機株式会社 | レーザ加工装置 |
JP7467019B1 (ja) | 2023-05-02 | 2024-04-15 | 小池酸素工業株式会社 | レーザ切断ノズル |
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DE102019103659B4 (de) * | 2019-02-13 | 2023-11-30 | Bystronic Laser Ag | Gasführung, Laserschneidkopf und Laserschneidmaschine |
CN112030155A (zh) * | 2020-07-30 | 2020-12-04 | 陕西天元智能再制造股份有限公司 | 一种同轴环形多束送粉喷嘴 |
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JP7467019B1 (ja) | 2023-05-02 | 2024-04-15 | 小池酸素工業株式会社 | レーザ切断ノズル |
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