WO2016136551A1

WO2016136551A1 - Valve, fluid device, and method for producing fluid device

Info

Publication number: WO2016136551A1
Application number: PCT/JP2016/054546
Authority: WO
Inventors: 一木　隆範; 晨陽蒋; 博文塩野; 太郎上野
Original assignee: 国立大学法人東京大学; 株式会社ニコン
Priority date: 2015-02-25
Filing date: 2016-02-17
Publication date: 2016-09-01
Also published as: JPWO2016136551A1

Abstract

　A valve wherein a substance having shape memory properties is accommodated in a housing part provided to a flow path, and the substance having shape memory properties is deformed, thereby regulating the flow of the fluid in the flow path. This valve can be manufactured simply and at low cost, and offers a high degree of freedom to the design of fluid devices, and is therefore useful.

Description

Valve, fluid device, and fluid device manufacturing method

The present invention relates to a valve, a fluid device, and a fluid device manufacturing method. This application claims priority based on Japanese Patent Application No. 2015-035920 filed in Japan on February 25, 2015, the contents of which are incorporated herein by reference.

In recent years, the development of μ-TAS (Micro-Total Analysis Systems) aimed at increasing the speed, efficiency, and integration of tests in the in-vitro diagnostic field, or the miniaturization of test equipment has attracted attention. Active research is ongoing worldwide.

Μ-TAS is superior to conventional testing equipment in that it can be measured and analyzed with a small amount of sample, can be carried, and can be disposable at low cost. Furthermore, in the case of using an expensive reagent or in the case of testing a small amount of a large number of specimens, the method is attracting attention as a highly useful method.

In μ-TAS, a microvalve is an indispensable element for controlling the flow of a fluid containing a biological sample or the like in a channel in a chip. Conventionally, microvalves that have been proposed use a movable member such as an actuator, but in recent years, microvalves that close the flow path by applying gas pressure to the ceiling of the flow path have been proposed ( For example, see Patent Document 1 and Non-Patent Document 1.)

Special table 2003-516129 gazette

However, in the microvalves described in Patent Document 1 and Non-Patent Document 1, it is necessary to form a network of gas flow channels above the flow channels through which the fluid flows, and the microvalves are manufactured easily and at low cost. There is room for improvement in terms. Further, the use of such a microvalve deprives the design freedom of the fluid device.

The present invention provides a valve that can be easily manufactured at low cost and has a high degree of freedom in designing a fluid device. The present invention also provides a flow channel device including the valve and a method for manufacturing the flow channel device.

The present invention includes the following aspects.
(1) In the valve according to an embodiment of the present invention, a substance having shape memory property is accommodated in an accommodating portion provided in the flow path, and the fluid in the flow path is formed by the deformation of the substance having shape memory property. It is characterized by adjusting the flow of the water.
(2) A valve according to an embodiment of the present invention includes a flat plate portion that is provided in the flow path and includes a material having shape memory, and a protruding portion that protrudes from the first surface of the flat plate portion, The flow of the fluid in the flow path is adjusted by deforming the flat plate portion.
(3) A fluid device according to an embodiment of the present invention includes the valve described above.
(4) A fluid device according to an embodiment of the present invention includes a flow path substrate having a flow path, and a substrate bonded to the flow path substrate at a first surface, the substrate facing the flow path. And a valve that adjusts the flow of fluid in the flow path when the substance having shape memory property is deformed. Features.
(5) A fluid device manufacturing method according to an embodiment of the present invention is a fluid device manufacturing method including a channel substrate having a channel and a substrate bonded to the channel substrate on a first surface. A substrate having a flow path, and a substrate bonded to the flow path substrate on a first surface, wherein a housing portion is locally formed at a position facing the flow channel on the first surface. And (b) containing a substance having shape memory property in the housing part.
(6) The valve in one embodiment of the present invention is provided locally in the flow path through which the fluid flows, and includes a storage portion in which the shape memory polymer is stored. It is characterized by adjusting the flow of the fluid therein.
(7) The valve according to one embodiment of the present invention includes a shape memory polymer that is locally provided in the flow path through which the fluid flows and has a flat plate portion and a protruding portion protruding from the first surface of the flat plate portion, The flat plate portion and the protruding portion are made of the same shape memory polymer, and the second surface of the flat plate portion opposite to the first surface forms at least a part of the flow path, and the flat plate portion The flow of the fluid in the flow path is adjusted by deforming the part.
(8) A fluid device according to an embodiment of the present invention includes the valve described above.
(9) A fluid device according to an embodiment of the present invention includes a flow path substrate having a flow path, and a substrate bonded to the flow path substrate on a first surface, the substrate facing the flow path. A storage portion that is locally provided at a position where the shape memory polymer is stored; and a valve that adjusts the flow of fluid in the flow path when the shape memory polymer is deformed. .
(10) A fluid device manufacturing method according to an embodiment of the present invention is a fluid device manufacturing method including a channel substrate having a channel and a substrate bonded to the channel substrate on a first surface. A substrate having a flow path, and a substrate bonded to the flow path substrate on a first surface, wherein a housing portion is locally formed at a position facing the flow channel on the first surface. The step (a) which prepares, and the process (b) which accommodates a shape memory polymer in the said accommodating part, It is characterized by the above-mentioned.

It is a figure explaining the characteristic of a shape memory polymer. It is a schematic sectional drawing which shows one Embodiment of the normally open valve | bulb. It is a schematic sectional drawing which shows one Embodiment of the normally open valve | bulb. It is a schematic sectional drawing which shows one Embodiment of the normally closed valve | bulb. It is a schematic sectional drawing which shows one Embodiment of the normally closed valve | bulb. It is a schematic sectional drawing which shows one Embodiment of a series valve. It is a mimetic diagram showing one embodiment of a fluid device. It is a figure explaining a temperature change part. It is a mimetic diagram showing one embodiment of a fluid device. It is a schematic sectional drawing which shows 1st Embodiment of a fluid device. It is a schematic sectional drawing which shows 2nd Embodiment of a fluid device. It is a schematic sectional drawing which shows 2nd Embodiment of a fluid device. It is a schematic sectional drawing which shows 3rd Embodiment of a fluid device. It is a schematic sectional drawing which shows 3rd Embodiment of a fluid device. It is a schematic sectional drawing which shows 3rd Embodiment of a fluid device. It is a schematic sectional drawing which shows 4th Embodiment of a fluid device. It is a schematic sectional drawing which shows 4th Embodiment of a fluid device. It is a schematic sectional drawing which shows 4th Embodiment of a fluid device. It is a schematic sectional drawing explaining 3rd Embodiment of the manufacturing method of a fluid device. It is a schematic sectional drawing explaining 4th Embodiment of the manufacturing method of a fluid device. It is a schematic sectional drawing explaining 4th Embodiment of the manufacturing method of a fluid device. It is a schematic sectional drawing explaining 4th Embodiment of the manufacturing method of a fluid device. 3 is a photograph showing a manufacturing process of the fluidic device of Example 1. FIG. It is a photograph which shows the pattern of the heater formed in the surface of MS board | substrate. 3 is a photograph showing a manufacturing process of the fluidic device of Example 1. FIG. It is a photograph which shows the board | substrate which has the convex part in which the pattern of the heater was formed in the top part. 3 is a photograph showing a manufacturing process of the fluidic device of Example 1. FIG. It is a photograph which shows the 2nd board | substrate after wiring formation. 3 is a photograph showing a manufacturing process of the fluidic device of Example 1. FIG. It is a photograph which shows a mode that the 1st board | substrate and the 2nd board | substrate were joined. 3 is a photograph showing a manufacturing process of the fluidic device of Example 1. FIG. 2 is a photograph showing a fluidic device of Example 1. FIG. It is a graph which shows the relationship between applied voltage and measured fluorescence intensity, and time. It is the fluorescence-microscope photograph of the flow path when a valve is an open state, and a flow path when a valve is a closed state. It is a graph which shows the relationship between the response time of a valve | bulb, and power consumption. In Example 2, it is a photograph which shows the 2nd board | substrate which has the convex part by which the pattern of the heater was formed in the top part. 6 is a photograph showing a second substrate after wiring formation in Example 2. In Example 2, it is a photograph which shows a mode that the 1st board | substrate and the 2nd board | substrate were joined. It is a photograph which shows the fluid device of Example 2 completed. It is a schematic sectional drawing explaining 5th Embodiment of a fluid device. It is a schematic sectional drawing explaining 6th Embodiment of a fluid device. It is a schematic sectional drawing explaining 7th Embodiment of a fluid device. It is a schematic sectional drawing explaining 7th Embodiment of a fluid device. It is a schematic sectional drawing explaining 7th Embodiment of a fluid device. It is a schematic sectional drawing explaining 7th Embodiment of a fluid device.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as the case may be. In the drawings, the same or corresponding parts are denoted by the same or corresponding reference numerals, and redundant description is omitted. Note that the dimensional ratio in each drawing is exaggerated for the sake of explanation, and does not necessarily match the actual dimensional ratio.

Further, the following embodiments are described as examples for better understanding of the gist of the invention, and do not limit the present invention unless otherwise specified.

<Valve>
In one embodiment, according to the present invention, a substance having shape memory property is accommodated in an accommodating part provided in the flow channel, and the flow of fluid in the flow channel is adjusted by the deformation of the material having shape memory property. Provide a valve. The substance having the shape memory property is a substance having a property (shape memory effect) that even when deformed at a certain temperature or lower, recovers to its original shape when heated to the temperature or higher. For example, it may be a shape memory alloy or a shape memory polymer.

The valve is locally provided in the flow path through which the fluid flows, and includes a storage portion in which the shape memory polymer is stored. The shape memory polymer is deformed to adjust the flow of the fluid in the flow path. A valve may be used. In this specification, the fluid flowing means that the fluid moves.

In this valve, adjusting the flow of the fluid in the flow path means, for example, blocking the flow of the fluid or causing the stopped fluid to flow. Further, the amount of deformation of the substance having shape memory property may be controlled by controlling the heating conditions, and the flow rate and flow rate may be adjusted quantitatively. Examples of heating conditions include heating time and heat.

The valve of this embodiment can be manufactured easily and at low cost, and the flow of fluid can be controlled easily and freely. Moreover, it is not a sandwich structure device in which a sheet of shape memory polymer is sandwiched between two substrates, but is configured by a housing part that is locally provided in the flow path and contains a substance having shape memory properties. . Therefore, the upper and lower substrates are not separated by the shape memory polymer sheet, and the degree of freedom in designing the fluid device is high.

[Container]
The valve according to this embodiment includes a storage portion that is locally provided in the flow path and stores a substance having shape memory properties. The accommodating portion will be described with reference to FIG. FIG. 2 is a schematic cross-sectional view showing one embodiment of the valve of this embodiment.

A valve 200 shown in FIG. 2 is provided locally in a flow path 210 through which a fluid flows, and includes a housing portion 230 in which a material 220 having shape memory properties is housed. The material 220 having shape memory properties is deformed. The flow of the fluid in the flow path 210 is adjusted. The flow path 210 includes a flow path substrate 240 having a flow path (for example, a groove), and a substrate 250 joined to the flow path substrate 240 by the first surface 251.

The accommodating part 230 is locally provided in the flow path 210. In other words, the housing part 230 is locally provided at a position facing a part of the flow path 210 in the substrate 250. “Locally provided in the flow path 210” means that the accommodating portion 230 is formed not in the entire first surface 251 constituting the flow path 210 but in a limited region of the first surface 251. To do. A part of the channel 210 faces the substance 220 having shape memory property, and at least a part of the channel 210 that does not face the substance 220 having shape memory property faces the first surface 251. Further, a part of the fluid flowing through the flow path 210 is in contact with the first surface 251 of the substrate 250 and in contact with the surface of the substance 220 having shape memory property in the valve portion.

The accommodating portion 230 is, for example, a concave shape or a hole having an opening on the first surface 251 and is a portion in which the substance 220 having shape memory property is accommodated. Here, at least a part of the material 220 having shape memory property may be accommodated in the accommodating portion 230, and not all of the material 220 having shape memory property may be accommodated. It can also be said that the accommodating portion 230 is a space surrounded by a surface that forms a recess formed in the substrate 250, that is, a side surface and a bottom surface of the recess.

In addition, in the fluid device having a plurality of valves, which will be described later, the accommodating portion may be common to the plurality of valves. For example, when a plurality of valves are adjacent to each other, the plurality of valves may be formed of a material having shape memory property accommodated in a common accommodating portion. In addition, the plurality of valves may be formed of a material having shape memory property accommodated in different accommodating portions.

[Material with shape memory]
The substance having shape memory property may be a shape memory alloy or a shape memory polymer. Examples of shape memory alloys include alloys of titanium and nickel, and iron-manganese-silicon alloys.

A shape memory polymer is a polymer that recovers its original shape when heated above a certain temperature, even if deformed by applying external force after molding, and is reversible and has fluidity at a certain temperature (hereinafter referred to as the shape recovery temperature). It is composed of a stationary phase composed of a phase and a physical or chemical bonding site (crosslinking point) that does not deform at a temperature at which the reversible phase deforms.

FIG. 1 is a diagram for explaining the characteristics of a shape memory polymer. As shown in FIG. 1, the shape memory polymer memorizes the shape formed by molding or machining by the stationary phase in the resin, and the memorized shape at a temperature within the temperature range between the shape recovery temperature and the melting point. It can be transformed into a free shape. The deformation can be fixed by cooling to a temperature lower than the shape recovery temperature while maintaining the deformed state. The shape formed by molding or machining is restored by heating the fixed deformation after cooling to a temperature below the shape recovery temperature to a temperature above the shape recovery temperature and below the melting point.

The shape memory polymer material is not particularly limited, and examples thereof include polymer materials such as elastomers having shape memory properties. Specific examples of the elastomer having shape memory property include polyurethane, polyisoprene, polyethylene, polynorbornene, styrene-butadiene copolymer, epoxy resin, phenol resin, acrylic resin, polyester, melanin resin, polycaprolactone, polyvinyl chloride, Polymers such as polystyrene, polybutylene succinate, polyethylene terephthalate, polybutylene terephthalate, polyphenylene sulfide, etc., which have been crosslinked by a chemical crosslinking method using heat or the like using a peroxide such as an organic peroxide or benzoyl peroxide. Is mentioned.

In this embodiment, the valve is molded from a material having shape memory by molding or machining. The valve is formed in an open state in which a fluid flows in the flow path or a closed state in which a fluid flow is blocked.

Furthermore, after deforming the valve at a temperature within the temperature range between the shape recovery temperature and the melting point of the substance having the shape memory property, the deformation is fixed by cooling to a temperature lower than the shape recovery temperature. This deformation is a deformation for closing the valve in the open state or a deformation for opening the valve in the closed state. Thus, the modified valve is disposed in the flow path. When the deformed valve is in the open state, the fluid freely flows in the flow path after the valve is disposed. When the shape of the deformed valve is in the closed state, the fluid flow in the flow path is blocked after the valve is disposed.

Next, the shape at the time of valve molding is restored by heating the valve at a temperature within the temperature range between the shape recovery temperature of the substance having shape memory property and lower than the melting point. The valve that has been deformed so as to be in the open state is closed by being heated, and the flow of the fluid in the flow path is blocked. The valve, which has been deformed so as to be in the closed state, is opened when heated, so that the fluid flows freely in the flow path.

Thus, by disposing the valve of this embodiment in the flow path, the flow of fluid in the flow path can be freely controlled. In the valve of this embodiment, at least a part of the substance having shape memory property forms at least a part of the flow path. The fluid flowing through the flow path is in contact with at least a portion of the substance having shape memory properties. Therefore, it can be manufactured simply and at low cost, and the open state and the closed state can be controlled easily and freely. Further, the valve of this embodiment can be deformed into an open state in which a fluid flows in the flow path or a closed state in which the fluid flow is blocked by a temperature change such as heating.

Here, a state in which at least a part of the substance having shape memory property forms at least a part of the flow path will be described with reference to FIG. FIG. 2 is a schematic cross-sectional view showing one embodiment of the valve of this embodiment.

A valve 200 shown in FIG. 2 is provided locally on a flow path 210 through which a fluid flows, and includes a storage portion 230 in which a material 220 having shape memory property is stored, and the material 220 having shape memory property is deformed. Thus, the flow of the fluid in the flow path 210 is adjusted. The flow path 210 includes a flow path substrate 240 having a flow path, a substrate 250 bonded to the flow path substrate 240 by the first surface 251, and a part of the substance 220 having shape memory properties.

In FIG. 2, it can be said that a part of the material 220 having shape memory property, that is, a part 220 a of the material 220 having shape memory property that is in contact with the flow channel 210 forms a part of the flow channel 210. In other words, the first region in which the substance 220 having shape memory property faces a part of the channel 210 and the substance (substrate 250) different from the substance 220 having shape memory property faces a part of the channel 210. A second area exists.

The valve of this embodiment is a valve that is suitably used for a fluid device. Examples of the valve include a normally open valve and a normally closed valve. Details of each valve will be described below.

[Normally Open Valve]
FIG. 2 is a schematic cross-sectional view showing one embodiment of a normally open valve. The valve of the present embodiment is a normally open valve that is deformed from an open state in which a fluid flows in the flow path 210 to a closed state in which the flow of the fluid is blocked by heating when heated. It is.

The normally open valve 200 includes a flow path 210 and a storage portion 230 in which a substance 220 having shape memory property is stored, and the fluid 220 in the flow path 210 is deformed when the substance 220 having shape memory property is deformed. Adjust the flow.

(Concave shape)
As shown in FIG. 2, the flow path 210 is formed by stacking a flow path substrate 240 having a flow path and a substrate 250 bonded to the flow path substrate 240 and the first surface 251. In FIG. 2, the flow path substrate 240 is laminated on the substrate 250 to form the flow path 210. However, the positional relationship is not limited, and for example, the substrate 250 is laminated on the flow path substrate 240. The flow path 210 may be formed by this lamination.

The flow path substrate 240 has a weir 245, and the flow of the fluid in the flow path 210 is blocked by the weir 245.

On the other hand, the normally open valve 200 functions as a flow path (bypass path) as a bypass for bypassing the fluid blocked by the weir 245 in a steady state.

The substance 220 having shape memory property memorizes a flat shape when formed. In FIG. 2, the normally open valve 200 is formed into a concave shape by applying an external force at a temperature in the range of the shape recovery temperature of the substance 220 having shape memory property and higher than the melting point.

The normally open valve 200 has a shape for bypassing the closed state in which the fluid flow is blocked before heating, and is in an open state in which the fluid flows through the flow path 210. Here, in FIG. 2, the normally open valve 200 is in an open state having a concave shape for bypassing the closed state. In other words, normally open valve 200 is in a concave open state in a steady state.

And after heating, the material 220 having shape memory property is restored to a flat shape, so that the fluid flow is deformed into a closed state where the fluid flow is blocked.

(Through shape)
FIG. 3 is a schematic cross-sectional view showing an embodiment of a normally open valve. The valve of this embodiment is a normally open valve that is deformed from an open state in which a fluid flows through the flow path 310 to a closed state in which the flow of the fluid is blocked by heating when heated. It is.

The normally open valve 300 includes a flow path 310 and a storage portion 330 in which a substance 320 having a shape memory property is accommodated. The deformation of the substance 320 having a shape memory property causes the fluid in the flow path 310 to flow. Adjust the flow.

The flow path 310 is formed by stacking a flow path substrate 340 having a flow path and a substrate 350 bonded to the flow path substrate 340 on the first surface 351. In FIG. 3, the flow path substrate 340 is laminated on the substrate 350 to form the flow path 310, but their positional relationship is not limited, for example, the substrate 350 is laminated on the flow path substrate 340. The flow path 310 may be formed by this lamination.

In the normally open valve 300, the open state is a state having a through shape (a shape having a through hole) for bypassing the closed state. In FIG. 3, the normally open valve 300 is formed into a penetrating shape by applying an external force at a temperature in the temperature range between the shape recovery temperature and the melting point of the substance 320 having shape memory properties. That is, normally open valve 300 is in the open state of the penetrating shape in the steady state.

After heating, the material 320 having shape memory property is restored to a flat shape, so that the normally open valve 300 is deformed to a closed state in which the fluid flow is blocked.

[Normally closed valve]
FIG. 4 is a schematic cross-sectional view showing an embodiment of a normally closed valve. The valve of this embodiment is a normally closed valve that is deformed from a closed state in which the flow of fluid in the flow path 410 is blocked by heating to an open state in which the fluid flows. It is.

The normally closed valve 400 includes a flow path 410 and a storage portion 430 in which a substance 420 having shape memory property is stored. The deformation of the substance 420 having shape memory ability causes the fluid in the flow path 410 to flow. Adjust the flow.

(Concave shape)
As shown in FIG. 4, the flow path 410 is formed by stacking a flow path substrate 440 having a flow path and a substrate 450 bonded to the flow path substrate 440 and the first surface 451. In FIG. 4, the flow path substrate 440 is laminated on the substrate 450 to form the flow path 410. However, the positional relationship is not limited, and for example, the substrate 450 is laminated on the flow path substrate 440. The flow path 410 may be formed by this lamination.

The flow path substrate 440 has a weir 445, and the flow of the fluid in the flow path 410 is blocked by the weir 445.

On the other hand, the normally closed valve 400 has a flat shape in a steady state, and the fluid flow is blocked.

The substance 420 having shape memory has a concave shape when it is formed. In FIG. 4, the normally closed valve 400 is formed into a flat shape by applying an external force at a temperature in the range of the shape recovery temperature of the substance 420 having shape memory property and higher than the melting point.

The normally closed valve 400 has a shape for bypassing the closed state in which the fluid flow is blocked after heating, and is in an open state in which the fluid flows through the flow path 410. Here, in FIG. 4, the normally closed valve 400 in the open state is a state having a concave shape for bypassing the closed state.

Therefore, after heating, the substance 420 having shape memory property is restored to the concave shape, so that the normally closed valve 400 is deformed to an open state in which a fluid flows in the flow path.

(Through shape)
FIG. 5 is a schematic cross-sectional view showing an embodiment of a normally closed valve. The valve of this embodiment is a normally closed valve that is deformed from an open state in which a fluid flows through the flow path 510 to a closed state in which the flow of the fluid is blocked by heating when heated. It is.

The normally closed valve 500 includes a flow path 510 and a storage portion 530 in which a substance 520 having a shape memory property is accommodated. The deformation of the substance 520 having a shape memory property causes the fluid in the flow path 510 to flow. Adjust the flow.

The flow path 510 is formed by stacking a flow path substrate 540 having a flow path and a substrate 550 bonded to the flow path substrate 540 with the first surface 551. In FIG. 5, the flow path substrate 540 is stacked on the substrate 550 to form the flow path 510, but the positional relationship thereof is not limited, for example, the substrate 550 is stacked on the flow path substrate 540. The flow path 510 may be formed by this lamination.

In the normally closed valve 500, the open state is a state having a through shape (a shape having a through hole) for bypassing the closed state. In FIG. 5, a normally closed valve 500 is formed into a flat shape by applying an external force at a temperature in the range of the shape recovery temperature of the substance 520 having a shape memory property and less than the melting point. That is, the normally closed valve 500 is in a closed state having a flat shape in a steady state.

Then, after heating, the substance 520 having shape memory property is restored to the penetrating shape, so that the normally closed valve 500 is deformed to an open state in which a fluid flows.

Examples of the material having shape memory that constitutes a normally closed valve include the same materials as those having shape memory that constitute a normally open valve.

<Fluid device>
In one embodiment, the present invention provides a fluidic device comprising the valve described above. The fluidic device of this embodiment can be manufactured easily and at low cost, and has a high degree of design freedom. In the embodiment of the present invention, since the substance having shape memory property is locally disposed in the valve portion of the fluid device, it is used for a fluid device having a region where light irradiation is required only for the fluid. Cheap. For example, it is possible to easily observe without performing precise optical design in consideration of the refractive index of a material having shape memory by making the material having shape memory in the observation region so that it does not exist. Become.

In this embodiment, the size of the fluid device may be a millifluidic device in which the flow path and the structure are millimeter (mm) size, and the microfluidic device in which the flow path and the structure are micrometer (μm) size. There may be.

[Series valve]
The fluidic device of this embodiment may include a plurality of the valves described above. For example, a normally open valve and a normally closed valve arranged in series may be provided. Hereinafter, normally open valves and normally closed valves arranged in series may be referred to as “series valves”.

FIG. 6 is a schematic sectional view showing one embodiment of the series valve. In the fluidic device 600 of this embodiment, two valves, a normally closed valve 660 and a normally open valve 670, are arranged in this order from the upstream side of the flow path 610 with a space between them. A series valve 680 is formed. The arrangement of the normally closed valve 660 and the normally open valve 670 is not limited to this, and the normally open valve 670 and the normally closed valve 660 may be arranged in this order from the upstream side of the flow path 610. Good.

In the present embodiment, the case where both the normally closed valve 660 and the normally open valve 670 are in the open state will be described. However, both may be a through-type shape, or It may be a combination of penetrating shapes.

As shown in FIG. 6, the flow path 610 is formed by laminating a flow path substrate 640 having a flow path and a substrate 650 bonded to the flow path substrate 640 by the first surface 651. In FIG. 6, the flow path substrate 640 is stacked on the substrate 650 to form the flow path 610, but the positional relationship thereof is not limited, and for example, the substrate 650 is stacked on the flow path substrate 640. The flow path 610 may be formed by this lamination.

The flow path substrate 640 has a weir 645a and a weir 645b in this order from the upstream side, and a normally closed valve 660 and a normally open valve 670 are the weir 645a and the weir 645, respectively, as valves corresponding to the weirs. It is provided immediately below 645b.

The fluid flow is first blocked by a weir 645 a located on the upstream side of the flow path 610. The normally closed valve 660 has a flat shape in a steady state, and the fluid flow remains blocked. Therefore, the series valve 680 is closed as a whole.

Next, by heating the substance 620a having shape memory property, the normally closed valve 660 is transformed into an open state in which a fluid flows. The fluid that bypasses the weir 645a can further bypass the weir 645b located on the downstream side when the normally open valve 670 is in the open state. Therefore, the series valve 680 is in an open state as a whole.

Next, by heating the substance 620b having shape memory property, the normally open valve 670 is deformed to a closed state in which the fluid flow is blocked. As a result, the flow of the fluid bypassing the weir 645a is blocked by the weir 645b when the normally open valve 670 is changed to the closed state. Therefore, the series valve 680 is closed as a whole.

Due to the nature of the substance having shape memory property, a valve made of a substance having shape memory property is generally considered to be irreversible in the open / closed state, but according to the fluidic device of the present embodiment, The fluid flow can be flexibly controlled by changing from the closed state to the open state and from the open state to the closed state.

[Example of fluid device configuration]
(First embodiment)
FIG. 7 is a schematic diagram illustrating a basic configuration of a fluidic device 700 according to one embodiment. As shown in FIG. 7, the fluid device 700 includes a drive source 710, a branch flow path 721, a normally open valve 730, a normally close valve 740, and a series valve 750. The branch channel 721 includes an upstream channel 720 that is a channel upstream of the branch point 722 and

downstream channels

723, 724, and 725 that are channels downstream of the branch point 722.

The drive source 710 is connected to the upstream flow path 720 and sends fluid to the downstream side with a predetermined pushing force. Examples of the drive source 710 include a syringe pump.

A normally open valve 730, a normally closed valve 740, and a series valve 750 are provided in the

downstream flow paths

723, 724, and 725, respectively, and selectively (locally) the flow of fluid in each flow path. Arranged at adjustable positions.

Further, the normally open valve 730, the normally closed valve 740, and the series valve 750 are provided with

temperature changing portions

730a, 740a, and 750a, respectively.

The fluidic device 700 of the present embodiment can be used for a purified sample recovery unit when purifying a biomolecule such as a nucleic acid from a specimen such as blood.

The sample lysate washed away by the drive source such as the buffer solution by the drive source 710 passes through a branching point 722 through a purification device such as a column (not shown) existing in the upstream flow path 720. Since the first solution that passes through the branch point 722 in the sample lysate is an unnecessary substance, it is discharged through the downstream flow path 723 provided with the normally open valve 730 that is open.

Next, the normally open valve 730 is closed by heating by the temperature changing unit 730a. Next, the series valve 750 is opened by heating by the temperature changing unit 750a. The second sample passing through the branch point 722 in the sample lysate passes through the downstream flow path 725 and is collected as the first fraction material.

Next, the series valve 750 is closed by heating by the temperature changing unit 750a, and the normally closed valve 740 is opened by heating by the temperature changing unit 740a. The sample that passes through the branch point 722 third in the sample lysate passes through the downstream channel 724 and is collected as the second fraction material.

As described above, according to the fluidic device 700 of the present embodiment, the sample solution can be efficiently fractionated in the purified sample recovery unit.

In this embodiment, the

temperature changing units

730a, 740a, and 750a provided in the normally open valve 730, the normally closed valve 740, and the series valve 750 are, for example, an electrothermal converter that converts electrical energy such as a heater into thermal energy. For example, a photothermal conversion unit that converts light energy such as laser light into heat energy may be used. Examples of the electrothermal converter include electrodes and conductive wires. In the case where an electrode is provided as the heating means, the amount of change in the substance having shape memory can be further controlled by controlling the heating conditions. As an example, the electrode has a configuration in which the electric resistance value decreases from the upstream side to the downstream side of the flow path.

FIG. 8 is a diagram for explaining the temperature changing portion using a normally open valve 800 as an example. In the case where the temperature change portion uses heating by laser light irradiation, as shown in FIG. 8, a photothermal conversion layer 830a is provided at the bottom of the storage portion 830 for storing the substance 820 having shape memory properties. It may be.

The photothermal conversion layer 830a includes a light absorber. Radiant energy applied to the photothermal conversion layer 830a by the laser light is absorbed by the light absorber and converted to thermal energy. Due to the generated thermal energy, the substance 820 having shape memory property is heated and deformed. That is, the fluid device of the present embodiment may include a temperature changing unit using a light absorbent. Note that heating by laser light irradiation may be performed selectively (locally) using a mask or the like.

As the light absorber, a material that absorbs radiation energy at a wavelength to be used can be used. The wavelength of the radiant energy is, for example, 300 to 2000 nm, for example, 300 to 1500 nm.

Examples of the light absorber include fine particle metal powders such as carbon black, graphite powder, iron, aluminum, copper, nickel, cobalt, manganese, chromium, zinc, and tellurium; metal oxide powders such as black titanium oxide; aromatic diamino -Based metal complexes, aliphatic diamine-based metal complexes, aromatic dithiol-based metal complexes, mercaptophenol-based metal complexes, squarylium-based compounds, cyanine-based dyes, methine-based dyes, naphthoquinone-based dyes, anthraquinone-based dyes, etc. Can be mentioned.

The photothermal conversion layer 830a may be formed of a resin containing these dyes or pigments. The resin used for the photothermal conversion layer 830a is not particularly limited, and may be the same as the substance having shape memory properties, for example. Moreover, the photothermal conversion layer 830a may be a film-like form containing these light absorbers including a metal vapor deposition film.

Although FIG. 8 shows that the substance 820 having shape memory and the photothermal conversion layer 830a are independent, the substance 820 having shape memory may itself contain the above-described light absorber. In the embodiment of the present invention, a substance having shape memory property containing a light absorbing material is locally introduced only into the bulb portion. Therefore, even if the excitation light is irradiated to a wide range including the target valve without carrying out precise optical design considering the refractive index of the transparent material and polymer forming the flow path, only the desired valve portion is applied. Can be deformed. As described above, the valve structure provided with the material having shape memory property locally in the flow path suppresses optical restrictions in the fluid device design and increases the degree of freedom in design.

The concentration of the light absorber in the photothermal conversion layer 830a varies depending on the type of light absorber, the particle form, the degree of dispersion, etc., but is, for example, 5 to 70% by volume. When the concentration of the light absorber is 5% by volume or more, the substance 820 having shape memory property tends to be efficiently deformed due to the heat generation of the photothermal conversion layer 830a. When the concentration of the light absorber is 70% by volume or less, the film-forming property of the photothermal conversion layer is good, and the adhesiveness with the substance 820 having shape memory property tends to be good.

The thickness of the photothermal conversion layer 830a is, for example, 0.1 to 5 μm. If the thickness of the photothermal conversion layer 830a is 0.1 μm or more, sufficient light absorption is possible. Therefore, the required concentration of the photoabsorbent does not become too high, and the film formability of the photothermal conversion layer is good. Also, the adhesiveness with the substance 820 having shape memory property tends to be improved. Further, when the thickness of the light-to-heat conversion layer is 5 μm or less, the light transmittance in the light-to-heat conversion layer 830a is good and the heat generation efficiency tends to be good.

Here, as the material of the substrate 850, a material having transparency to the laser beam is used, and the photothermal conversion layer 830a is irradiated with the laser beam from the substrate 850 side, thereby irradiating the substance in the channel with the laser beam. Adverse effects can be suppressed.

(Second Embodiment)
FIG. 9 is a schematic diagram illustrating a basic configuration of a fluidic device 900 according to one embodiment. The fluid device 900 can be used, for example, in a purifier introduction part when purifying a biomolecule such as nucleic acid from a specimen such as blood.

As shown in FIG. 9, the fluid device 900 has four

liquid reservoirs

921, 922, 923, and 924 downstream of the drive source 910. Liquid, cleaning liquid, and liquid specimens are stored. A driving liquid is stored in a liquid reservoir 925 located upstream of the driving source 910. Furthermore, a normally closed valve 930, a normally open valve 940, and a series valve 950 are provided in the flow paths upstream of the

liquid reservoirs

921, 922, 923, and 924, respectively.

The drive liquid pushed out from the drive source 910 selectively pushes out the liquid stored in the liquid reservoir located downstream of each valve by opening and closing these valves, so that each liquid becomes a liquid reservoir. 921, 922, 923, and 924 are selectively extruded into a purifier 960 located downstream.

First, the liquid sample stored in the liquid reservoir 924 and the dissolved liquid stored in the liquid reservoir 922 provided downstream of the normally open valve 940 in the open state by the drive source 910 The biomolecules in the specimen are dissolved and captured by the purification device 960 after passing through the purification device 960 constituted by a column or the like. Next, the normally open valve 940 is closed by heating by the temperature changing unit 940a provided in the normally open valve 940, and the inflow of the solution to the purifier 960 is stopped.

Next, the series valve 950 is opened by heating by the temperature change unit 950a provided in the series valve 950, and the cleaning liquid stored in the liquid reservoir 923 flows into the purifier 960, and unnecessary substances are removed from the purifier 960. Discharged.

Next, the series valve 950 is closed by heating by the temperature changing unit 950a, and the flow of the cleaning liquid into the purifier 960 is stopped. Next, the normally closed valve 930 is opened by heating by the temperature changing unit 930a provided in the normally closed valve 930, and the eluate stored in the liquid reservoir 921 flows into the purifier 960, A purified sample is eluted from the purification device 960.

Thus, according to the fluidic device 900 of this embodiment, biomolecules can be purified efficiently. In a fluid device in which a plurality of valves are arranged, the valves may be deformed by heating and used as a liquid feed pump for microfluids in the flow path.

[Channel substrate]
The flow path substrate constituting the fluidic device according to this embodiment will be described. The flow path substrate is provided with a concave portion that constitutes a storage portion of a substance having shape memory property and a substance having shape memory property, and constitutes a fluid device together with the substrate bonded to the flow path substrate at the first surface. .

The channel substrate is not particularly limited, but may be a resin substrate with a channel from the viewpoint of easily manufacturing a fluid device.

The material of the flow path substrate is polyisoprene, polybutadiene, polychloroprene, polyisobutylene, poly (styrene-butadiene-styrene), polyurethane, silicone polymer, poly (bis (fluoroalkoxy) phosphazene) (PNF, Eypel-F), Poly (carborane-siloxane) (Dexsil), poly (acrylonitrile-butadiene) (nitrile rubber), poly (1-butene), poly (chlorotrifluoroethylene-vinylidene fluoride) copolymer (Kel-F), poly (Ethyl vinyl ether), poly (vinylidene fluoride), poly (vinylidene fluoride-hexafluoropropylene) copolymer (Viton), polyvinyl chloride (PVC) elastomer composition, police Hong, polycarbonate, polymethyl methacrylate (PMMA), polytetrafluoroethylene, chlorosilanes, methylsilane, ethylsilane, phenylsilane, polydimethylsiloxane (PDMS), include styrene-based polymers such as methacrylic styrene.

The dimensions of the flow path formed on the flow path substrate made of these materials are not particularly limited as long as the flow of the fluid can be controlled by the above-described valve. For example, the following dimensions may be used.

The ratio of width to depth is for example 0.1: 1 to 100: 1, for example 1: 1 to 50: 1, for example 2: 1 to 20: 1, for example 3: 1 to 15: 1.

The width of the flow path is, for example, 0.01 to 1000 μm, for example, 0.05 to 1000 μm, for example, 0.2 to 500 μm, for example, 1 to 250 μm, for example, 10 to 200 μm. Further, as an example, the width of the flow path is 0.01 to 100 mm, 0.05 to 100 mm, 0.2 to 50 mm, 1 to 25 mm, and 1.5 to 15 mm.

The depth of the channel is, for example, 0.01 to 1000 μm, for example 0.05 to 500 μm, for example 0.2 to 250 μm, for example 1 to 100 μm, for example 2 to 20 μm. Further, as an example, the depth of the channel may be 0.01 to 100 mm, 0.05 to 100 mm, 0.2 to 50 mm, 1 to 25 mm, 1.5 to 15 mm.

[Structure of fluid device]
Hereinafter, a plurality of embodiments relating to the structure of the fluidic device will be described.

(First embodiment)
FIG. 10 is a schematic cross-sectional view showing the structure of the fluidic device 1000 of this embodiment. The valve of the fluid device 1000 is a normally open valve, but may be a normally closed valve.

The fluid device 1000 includes a flow path substrate 1040 having a flow path 1010, and a substrate 1050 bonded to the flow path substrate 1040 at the first surface 1051. A valve is locally provided on the first surface 1051 of the substrate 1050 at a position facing the flow path 1010. The valve includes a housing portion 1030 in which a substance 1020 having shape memory properties is accommodated, and the flow of the fluid in the flow path 1010 is adjusted by the deformation of the substance 1020 having shape memory properties.

In the fluid device 1000, the flow path 1010 includes a groove formed in the flow path substrate 1040, and the first flow path portion 1010a in which the groove formed in the flow path substrate 1040 and the first surface 1051 of the substrate 1050 are in contact with the fluid. And a second flow path portion 1010b in which a groove formed in the flow path substrate 1040 and the substance 1020 having shape memory property are in contact with the fluid. The reason why the first flow path portion 1010a and the second flow path portion 1010b are present in the fluid device of the present embodiment is because the valves are locally provided.

In the fluidic device of the present embodiment, the accommodating portion 1030 may have a concave shape, and may be expressed as a “concave portion” below.

In the fluid device 1000, since the housing portion 1030 is locally provided, it is not necessary to sandwich a shape memory polymer sheet between the flow path substrate 1040 and the substrate 1050 (entire surface), and the fluid device 1000 is locally provided in the flow path. There is a substance having shape memory property in the accommodating portion. Therefore, it is not necessary to bond the shape memory polymer and the substrate, and the shape memory polymer can be easily manufactured. In addition, it is possible to manufacture at a low cost without using a substance having shape memory properties more than necessary. In addition, since the upper and lower substrates are not separated by the sheet of shape memory polymer, the flow path can be three-dimensionally arranged and the degree of freedom in design is high.

As the material of the substrate 1050, the same material as the material of the flow path substrate described above can be used. The flow path substrate and the substrate 1050 may be made of different materials or the same material. When the same material is used, the substrates can be easily bonded to each other.

(Second Embodiment)
FIG. 11A is a schematic cross-sectional view showing the structure of the fluidic device 1100 of the present embodiment. The valve of the fluid device 1100 is a normally open valve, but may be a normally closed valve.

The fluidic device 1100 includes a flow path substrate 1140 having a flow path 1110 and a substrate 1150 bonded to the flow path substrate 1140 on the first surface 1151. A concave portion 1130 is locally provided on the first surface of the substrate 1150, and the concave portion 1130 constitutes an accommodating portion 1130 that accommodates a substance 1120 having shape memory properties. In the present embodiment, the substance having shape memory property may be a shape memory polymer.

Further, the accommodating portion 1130 has a bottom portion 1131, and the substrate 1150 has a through hole 1160 that penetrates the second surface 1152 opposite to the first surface 1151 and the bottom portion 1131. The through-hole 1160 constitutes a supply unit that serves as an inlet for the substance 1120 having shape memory properties. The substrate 1150 may further include a discharge portion 1170 that passes through the second surface 1152 and the bottom portion 1131 and serves as an air vent when injecting the material 1120 having shape memory properties.

Although the manufacturing method of the fluid device will be described later, in manufacturing the fluid device 1100, a substance 1120 having shape memory property can be injected from the supply unit 1160. Further, if the discharge portion 1170 is provided, it is easy to remove air from the storage portion 1130, and the material 1120 having shape memory property can be reliably injected by the storage portion 1130. The discharge unit 1170 may be released to the atmosphere or may be sucked from the discharge unit 1170.

FIG. 11B is a diagram illustrating the structure of the substance 1120 having shape memory property in the fluid device 1100. In the manufacture of the fluid device 1100, when the substance 1120 having shape memory property is injected from the supply unit 1160, a part of the substance having shape memory property may remain in the supply unit 1160. In this case, the material 1120 having shape memory inside the accommodating portion 1130 forms a flat plate portion 1120a (plate, thin film portion), and the material having shape memory property remaining in the supply portion 1160 is the first surface of the flat plate portion 1120a. A leg portion (protruding portion) 1120b protruding from 1121 (corresponding to the bottom portion 1131 of the accommodating portion 1130) is formed. The second surface 1122 (the main surface on the flow path side) opposite to the first surface 1121 (the main surface on the non-flow path side) of the flat plate portion 1120a forms at least a part of the flow path 1110. In the fluidic device 1100, the flow of the fluid in the flow path 1110 is adjusted by deforming the flat plate portion 1120a (the material 1120 having shape memory property).

Further, in the manufacture of the fluid device 1100, when the substance 1120 having shape memory property is injected from the supply unit 1160, a part of the substance having shape memory property may remain in the discharge unit 1170. In this case, the material having the shape memory property remaining in the discharge portion 1170 forms the leg portion 1120c. The protrusion 1120b protrudes in the direction of the second surface 1122 facing the flow path. Therefore, the protruding portion may be called a protruding portion or a raised portion. The protruding portion 1120b has, for example, a column shape or a rod shape, and may have a hook shape formed on the substrate. At this time, the cross section of the protrusion 1120b is smaller than the first surface and the second surface of the flat plate portion. Further, the thickness of the protruding portion 1120b is thicker than that of the flat plate portion 1120a. Note that a plurality of protrusions may be provided for the flat plate portion 1120a.

The first leg portion 1120b may be provided on the flat plate portion 1120a, and the second leg portion 1120c may be provided on the opposite side of the first leg portion 1120b with respect to the center of the flat plate portion 1120a. The structure in which the first leg portion 1120b and the second leg portion 1120c are provided on the opposite side across the center of the flat plate portion 1120a is the same as the structure in which the supply portion 1160 and the discharge portion 1170 are located on the opposite side across the center of the housing portion. It is made when it is. In this case, when a material having shape memory property is injected from the supply unit 1160, bubbles are unlikely to remain in the housing portion, and the flat plate portion 1120a can be easily formed from the material having shape memory property without mixing bubbles. The first leg portion 1120b and the second leg portion 1120c may be provided on the outer edge portion of the flat plate portion. The structure in which the first leg portion 1120b and the second leg portion 1120c are provided at the outer edge portion of the flat plate portion is produced by providing the supply portion 1160 and the discharge portion 1170 at the outer edge of the housing portion. In this case, when a material having shape memory property is injected from the supply unit 1160, bubbles are unlikely to remain at the edge of the housing portion, and formation of the flat plate portion 1120a with the material having shape memory property without air bubble mixing can be realized.

The leg part 1120b or the leg part 1120c may extend in the thickness direction of the flat plate part 1120a.

Alternatively, the leg 1120b or the leg 1120c may extend in a direction intersecting the thickness direction of the flat plate 1120a. Thereby, for example, even when an external force is applied to the material 1120 having shape memory property during the manufacture of the fluid device 1100, the leg portion 1120b or the leg portion 1120c is hardly detached from the substrate 1150, and the material has shape memory property. 1120 becomes difficult to peel off from the accommodating portion 1130.

The leg 1120b or the leg 1120c may be a non-linear shape with a circular or polygonal cross section. That is, it may be bent. In this specification, a circle includes an ellipse. Further, the number of sides constituting the polygon is not particularly limited, and may be, for example, a triangle, a quadrangle, or an octagon.

The surface area of the first surface 1121 of the flat plate portion 1120a may be larger than the surface area of the second surface 1122. Further, the shape of the flat plate portion 1120a and the shape of the accommodating portion 1130 are not particularly limited, and may be a columnar shape, a truncated cone shape, a polygonal columnar shape, or a polygonal frustum shape.

Further, the first surface 1121 of the flat plate portion 1120a is disposed so as to be in contact with a temperature changing portion described later directly or indirectly. Accordingly, heat can be transferred to the material 1120 having shape memory property, and the material 1120 having shape memory property can be deformed. The flat plate portion 1120a may be a thin film that is thin enough to deform the material 1120 having shape memory by heat transferred from the temperature changing portion.

In the fluid device, it is preferable that the first surface 1151 constituting the flow path 1110 is formed as flat as possible. In other words, the first surface 1151 of the substrate 1150 and the surface 1122 in contact with the fluid of the substance 1120 having shape memory properties are preferably flush with each other. Here, being flush means that the flat surface has no step, and the interface (connection) between the substrate 1150 and the material 1120 having shape memory property is in contact with the first surface 1151 (or the surface 1122). Part)), it means that there is no step or it is flat enough that it does not adversely affect the operation of the valve. For example, the step is 10 μm or less, for example 5 μm or less, for example 1 μm or less, for example 0.5 μm or less.

As will be described later, in the fluid device 1100, by using the supply unit 1160, the first surface 1151 constituting the flow path 1110 and the surface 1122 of the substance 1120 having shape memory can be formed as flat as possible. . For example, a flat lid substrate is disposed on the surface 1151 of the substrate 1150 or bonded removably to cover the opening of the housing portion 1130 and a material having shape memory property is injected from the supply portion 1160. By doing so, the first surface 1151 constituting the channel 1110 and the surface 1122 of the substance 1120 having shape memory property can be formed as flat as possible.

(Third embodiment)
12A to 12C are schematic cross-sectional views showing the structure of the fluidic device 1200 of this embodiment. The valve of the fluidic device 1200 is a normally open valve, but may be a normally closed valve.

As shown in FIG. 12A, the fluidic device 1200 includes a flow path substrate 1240 having a flow path 1210 and a substrate 1250 bonded to the flow path substrate 1240 at the first surface 1251. A concave portion 1230 is locally provided on the first surface 1251 of the substrate 1250, and the concave portion 1230 constitutes an accommodating portion 1230 for accommodating the substance 1220 having shape memory properties.

The substrate 1250 includes a first substrate 1250a including the first surface 1251 and bonded to the flow path substrate 1240, and a second substrate 1250b bonded to the first substrate 1250a and a surface 1253 opposite to the first surface 1251. The accommodating portion 1230 includes a through hole 1260a that penetrates the first substrate 1250a, and the second substrate 1250b is provided with a support portion 1254 that supports the material 1220 having shape memory at the tip, and is inserted into the through hole 1260a. Convex part 1255 is provided. The convex part 1255 of the 2nd board | substrate 1250b is locally arrange | positioned on the board | substrate 1250b corresponding to the position where a valve | bulb is installed.

Further, the substrate 1250b may include a supply portion 1260 that penetrates the surface 1252 and the bottom portion 1231 of the substrate 1250b and serves as an inlet for the substance 1220 having shape memory properties. Further, the substrate 1250b may further include a discharge portion 1270 that passes through the second surface 1252 and the bottom portion 1231 and serves as an air vent when injecting the material 1220 having shape memory properties.

Although the manufacturing method of the fluid device will be described later, in manufacturing the fluid device 1200, a substance 1220 having shape memory property can be injected from the supply unit 1260. In addition, if the discharge portion 1270 is provided, it is easy to remove the air from the storage portion 1230, and the material 1220 having shape memory property can be reliably injected by the storage portion 1230.

FIG. 12B is a schematic cross-sectional view showing the structure of the first substrate 1250a, and FIG. 12C is a schematic cross-sectional view showing the structure of the second substrate 1250b.

In the fluid device 1200, the substrate 1250 includes the first substrate 1250a and the second substrate 1250b, so that a temperature change portion can be formed on the surface of the support portion 1254, for example. Examples of the temperature changing portion include an electrothermal conversion portion such as a heater formed from wiring, and a photothermal conversion portion such as a photothermal conversion layer that performs heating by irradiation with laser light or the like.

In the fluid device, it is preferable to form the first surface 1251 constituting the flow path 1210 as flat as possible. In the fluidic device 1200, since the substrate 1250 includes the first substrate 1250a and the second substrate 1250b, a temperature change portion can be formed inside the substrate 1250 (for example, the surface of the support portion 1254). . There is no need to arrange the temperature changing portion on the first surface 1251, and the first surface 1251 can be formed as flat as possible without affecting the processing accuracy of the flow path 1210.

In order to efficiently control the shape of the material 1220 having shape memory properties, the temperature change portion is preferably formed in the very vicinity of the material 1220 having shape memory properties, and the viewpoint of efficiently conducting heat. Therefore, it is preferable that the thickness of the substance 1220 having shape memory property is small.

In the fluidic device 1200, since the substrate 1250 includes the first substrate 1250a and the second substrate 1250b, the temperature change portion can be formed in the very vicinity of the substance 1220 having shape memory property, The material 1220 having shape memory properties can be thinned.

(Fourth embodiment)
13A to 13C are schematic cross-sectional views showing the structure of the fluidic device 1300 of this embodiment. The valve of the fluid device 1300 is a normally open valve, but may be a normally closed valve.

As shown in FIG. 13A, the fluid device 1300 includes a flow path substrate 1340 having a flow path 1310, and a substrate 1350 bonded to the flow path substrate 1340 on the first surface 1351. A concave portion 1330 is locally provided on the first surface 1351 of the substrate 1350, and the concave portion 1330 constitutes a housing portion 1330 for housing the substance 1320 having shape memory properties.

The substrate 1350 includes a first substrate 1350a including the first surface 1351 and bonded to the flow path substrate 1340, and a second substrate 1350b bonded to the first substrate 1350a and the surface 1353 opposite to the first surface 1351. The accommodating portion 1330 includes a through hole 1360a that penetrates the first substrate 1350a, and the second substrate 1350b is provided with a support portion 1354 that supports a material 1320 having shape memory at the tip, and is inserted into the through hole 1360a. Convex part 1355 is provided.

Further, the substrate 1350b may include a supply portion 1360 that penetrates the surface 1352 and the bottom portion 1331 of the substrate 1350b and serves as an inlet for the substance 1320 having shape memory properties. The substrate 1350b may further include a discharge portion 1370 that passes through the second surface 1352 and the bottom portion 1331 and serves as an air vent when injecting the material 1220 having shape memory properties. The effect which the discharge part 1370 produces is the same as the effect which the discharge part 1270 in the fluid device 1200 of 3rd Embodiment mentioned above shows.

In the fluid device 1300, the side surface 1356 of the convex portion 1355 is an inclined surface that increases in diameter toward the surface 1357 of the second substrate 1350b. When the temperature change part provided in the bottom part 1331 is an electrothermal conversion part, it can wire easily because the side surface 1356 is an inclined surface. For example, wiring can be performed on the side surface 1356 without disconnection by sputtering, photolithography, screen printing, or the like.

FIG. 13B is a schematic cross-sectional view showing the structure of the first substrate 1350a, and FIG. 13C is a schematic cross-sectional view showing the structure of the second substrate 1350b.

In the fluid device 1300, the substrate 1350 includes the first substrate 1350a and the second substrate 1350b. The effect obtained by the substrate 1250 of the fluid device 1200 according to the third embodiment described above is the first substrate 1250a. And the second substrate 1250b are the same as the effects produced.

(Fifth embodiment)
FIG. 20 is a schematic cross-sectional view showing the structure of the fluidic device 2000 of the present embodiment. The fluidic device 2000 includes a flow path 2010 and

valves

2020 and 2030.

Valves

2020 and 2030 may be normally open valves or normally closed valves.

Like the fluid device 2000, the flow path 2010 may be arranged three-dimensionally (three-dimensionally). In the fluid device 2000, the substance having shape memory property is locally provided in the valve 2020 and the valve 2030, and the flow path 2010 includes a portion that does not contact the substance having shape memory property. The valve may be manufactured by locally providing a substance having shape memory after the flow path 2010 is formed on the substrate. Alternatively, after a part of the flow path is manufactured, a valve having a flow path shape memory property may be locally provided to form a valve, and the remaining flow path may be formed. Moreover, although only one flow path is shown in FIG. 20, a plurality of flow paths may be arranged three-dimensionally.

Since the above-described valve can be disposed locally, a fluid device having a high degree of design freedom can be configured in this way.

(Sixth embodiment)
In the fluidic device, a normally closed valve and a normally open valve may be disposed to face each other.

FIG. 21 is a schematic diagram showing the basic configuration of the fluidic device 241 of the present embodiment. As shown in FIG. 21, the fluid device 241 of the present embodiment includes a normally open valve 242 disposed on the first surface and a normally closed valve 243 disposed on the second surface facing the first surface. And. In the fluid device 241 of the present embodiment, the normally open valve 242 and the normally closed valve 243 are disposed to face each other.

In the steady state, the fluid bypasses the normally closed valve 243 functioning as a weir through the normally open valve 242 formed in the lower part of the flow path 240.

Next, the normally open valve 242 is closed by the heating means 242a provided at the lower part of the normally open valve 242, and the fluid flow is blocked by the normally close valve 243.

Next, the normally closed valve 243 is opened by the heating means 243a provided on the upper part of the normally closed valve 243, and the fluid that has been dammed flows out again.

According to the fluid device 241 of the present embodiment, the flow of the fluid can be flexibly controlled because the valve is deformed from the open state to the closed state and from the closed state to the open state as a whole. Further, in the fluid device 241 of the present embodiment, since the valve structure in which the substance having shape memory property is locally provided in the flow path, the normally open valve and the normally closed valve can be simply and at low cost. A structure facing the valve can be manufactured.

(Seventh embodiment)
In the normally open valve and the normally closed valve, the size of the flow path can be changed by heating by adjusting the deformation amount of the substance having shape memory property. For example, as shown in FIG. 22A, by making the valve variously “half-open”, the width and depth of the flow path are limited, and the fluid flow can be selectively controlled freely. As an example, by setting the width of the flow path constituting the flow path device to the millimeter size, the amount of change in the substance having shape memory property according to the change in the heating condition is strictly controlled.

According to the valve of the present embodiment, molecules having a desired size in the fluid can be selected as shown in FIG. 22B without providing a separate gel filtration column device or the like in the fluid device. For example, according to the structure of the present embodiment, red blood cells and circulating tumor cells (CTC; circulating blood cancer cells) in blood can be sorted by size. Further, as shown in FIG. 22C, when a plurality of structures are arranged in the flow path, by adjusting the distance between the structures (microstructures) in advance, molecules of a desired size in the liquid can be obtained. Sorting can be done.

Further, according to the valve of this embodiment, the flow of fluid can be selectively controlled freely by controlling the deformation amount of the structure according to the process. As an example, as shown in FIG. 22D, a structure was used to select a molecule of a desired size in the fluid and temporarily damped it, and then the structure was dammed by being completely opened by heating or the like. Can flow molecules. For example, a microstructure is provided in the fluidic device that allows small particles to pass through and large particles to be damped. In this case, the structure functions as a normally closed valve only for large particles. After that, by deforming the structure and opening the valve so that large particles pass through, it is possible to sort only large particles.

As described above, the valve in the present embodiment can function as a filter in the flow path by selectively controlling the deformation amount of the structure. Note that the fluidic device of the present embodiment may include a plurality of structures, and the plurality of structures may be made of a material having shape memory properties that are housed in independent housing portions. Further, the deformation amounts of the plurality of structures may be the same or different. The deformation amount of the structure body may be controlled by the heating time, or a structure body having a different deformation amount may be made. In the fluidic device of the present embodiment, when the plurality of structures are made of substances having independent shape memory properties, it is possible to create a plurality of structures having different deformation amounts easily and at low cost.

<Method for manufacturing fluid device>
In one embodiment, the present invention provides a fluid device manufacturing method comprising a flow path substrate having a flow path and a substrate bonded to the flow path substrate on a first surface, the flow path substrate having a flow path. And a step (a) of preparing a substrate having a housing portion locally formed at a position facing the flow path on the first surface, and a step of housing a substance having shape memory property in the housing portion ( b) and a method of manufacturing a fluidic device.

According to the manufacturing method of this embodiment, the above-described fluidic device can be manufactured. Hereinafter, a plurality of embodiments of a fluid device manufacturing method will be described.

[First Embodiment]
A first embodiment of a fluid device manufacturing method will be described with reference to FIG. FIG. 10 is a schematic cross-sectional view showing a fluid device including a flow path substrate 1040 having a flow path 1010 and a substrate 1050 bonded to the flow path substrate 1040 on the first surface 1051.

First, in step (a), a housing portion (concave portion) 1030 is locally formed at a position facing the flow path 1010 on the first surface 1051 of the substrate 1050. The formation method in particular of the recessed part 1030 is not restrict | limited, For example, injection molding, machining, hot embossing, an etching etc. are mentioned.

Subsequently, in the step (b), a substance 1020 having shape memory properties is accommodated. The storage of the substance 1020 having shape memory property can be performed by, for example, injecting a shape memory polymer composition before curing from the opening of the storage unit 1030 and curing the composition in the storage unit 1030. .

[Second Embodiment]
A second embodiment of a fluid device manufacturing method will be described with reference to FIGS. 11A and 11B. FIG. 11A is a schematic cross-sectional view showing a fluid device including a flow path substrate 1140 having a flow path 1110 and a substrate 1150 bonded to the flow path substrate 1140 on the first surface 1151. A housing portion (concave portion) 1130 is locally provided on the first surface of the substrate 1150. In addition, the substrate 1150 includes a supply unit 1160 that passes through the second surface 1152 opposite to the first surface 1151 and the bottom 1131 of the housing unit 1130 and serves as an inlet for the substance 1120 having shape memory properties.

In the fluid device manufacturing method of the present embodiment, step (a) may be performed in the same manner as in the first embodiment described above. Subsequently, in step (b), the shape memory polymer composition shown in FIG. 11B is injected by injecting the shape memory polymer composition before curing from the supply unit 1160 into the housing unit 1130 and curing the composition in the housing unit 1030. The substance 1120 having the above is accommodated in the accommodating portion 1130.

[Third Embodiment]
FIG. 14 is a schematic cross-sectional view for explaining a third embodiment of the fluid device manufacturing method. First, in the step (a), the concave portion 1430 is locally formed on the first surface 1451 of the substrate 1450 to form the accommodating portion 1430.

In the present embodiment, a supply portion 1460 that penetrates the second surface 1452 of the substrate 1450 and the bottom portion 1431 of the recess 1430 and serves as an inlet for the substance 1420 having shape memory properties may be formed. Further, a discharge portion 1470 that penetrates through the second surface 1452 of the substrate 1450 and the bottom portion 1431 of the recess 1430 and serves to release air when the material 1420 having shape memory property is injected may be further formed.

The formation method in particular of the recessed part 1430, the supply part 1460, and the discharge part 1470 is not restrict | limited, For example, an etching etc. are mentioned.

Subsequently, a lid substrate 1480 that closes the accommodating portion 1430 is bonded to the first surface 1451 of the substrate 1450. The lid substrate 1480 may contact the first surface 1451 of the substrate 1450 so that the shape memory polymer composition described later does not leak. The material of the lid substrate 1480 is not particularly limited, and examples thereof include glass, metal, semiconductor, plastic, and rubber. The lid substrate 1480 is preferably as flat as possible on the first surface 1451 of the substrate 1450.

Since the lid substrate 1480 is present, the first surface 1451 can be formed as flat as possible when the substance 1420 having shape memory property is accommodated in the accommodating portion 1430. That is, the lid substrate 1480 has a transfer surface 1481 that is transferred to the substance 1420 having shape memory properties at a position facing the housing portion 1430.

Thereafter, in the step (b), the substance 1420 having shape memory property is accommodated. The material 1420 having shape memory property can be accommodated by injecting a shape memory polymer composition before curing from the supply unit 1460 using a syringe or the like and curing the composition. The shape memory polymer composition can be cured by heat curing, photocuring, or the like.

Note that the shape memory polymer composition may shrink when cured. Therefore, the lid substrate 1480 may have a recess having a depth corresponding to the amount of contraction of the shape memory polymer 1420 accommodated in the accommodating portion 1430. Thereby, the 1st surface 1451 can be formed more flatly.

In the fluid device manufacturing method according to the first to third embodiments described above, after a substance having shape memory property is accommodated in the accommodating part, the temperature is within a temperature range of the shape recovery temperature of the substance having shape memory property and less than the melting point. The method may further include a step (c) of forming a structure body that is deformed by applying an external force to the material having shape memory property accommodated in the accommodating portion, and returns to the original shape by heating. Step (c) will be described later.

[Fourth Embodiment]
15A to 15C are schematic cross-sectional views illustrating a fourth embodiment of a fluid device manufacturing method. First, as shown in FIG. 15A, in step (a1), a recess 1530 having a bottom 1531 is locally formed on the first surface 1551 of the substrate 1550, and a storage portion 1530 in which a substance 1520 having shape memory properties is stored. Form.

Subsequently, in step (a2), a supply portion 1560 that penetrates the second surface 1552 of the substrate 1550 and the bottom portion 1531 of the concave portion 1530 and serves as an injection port of the substance 1520 having shape memory properties is formed. Further, a discharge portion 1570 that passes through the second surface 1552 of the substrate 1550 and the bottom portion 1531 of the recess 1530 and serves as an air vent when injecting the material 1520 having shape memory property may be further formed.

There is no restriction | limiting in particular in the order of a process (a1) and a process (a2), which may be implemented first and may be implemented simultaneously.

The formation method in particular of the recessed part 1530, the supply part 1560, and the discharge part 1570 is not restrict | limited, For example, an etching etc. are mentioned.

Thereafter, in step (b1), the shape memory polymer composition before curing is injected from the supply unit 1560 using a syringe or the like, and the material 1520 having shape memory properties is accommodated by curing the composition. The shape memory polymer composition can be cured by heat curing, photocuring, or the like.

Subsequently, in step (c), a normally open valve, a normally closed valve, a series valve, etc. are formed by performing at least one of the following. In the series valve molding, a normally open valve molding process and a normally closed valve molding process are combined. As an example, FIG. 15B shows the structure of a molded first normally open valve.

(Forming the first normally open valve)
The shape memory polymer 1520 is provided with a first recess by applying an external force to the shape memory polymer 1520 at a temperature in the range of the shape recovery temperature of the shape memory polymer 1520 and lower than the melting point, and the first normally open valve is provided on the shape memory polymer 1520. Mold.

(Formation of second normally open valve)
The shape memory polymer 1520 is provided with a first through-hole by applying an external force to the shape memory polymer 1520 at a temperature in the range of the shape recovery temperature of the shape memory polymer 1520 and below the melting point, and the shape memory polymer 1520 is provided with a second normally open valve. Mold.

(Forming the first normally closed valve)
A second recess is formed in the shape memory polymer 1520 by molding or machining at a temperature lower than the melting point of the shape memory polymer 1520, and at a temperature in the temperature range of the shape memory polymer 1520 to a temperature higher than the shape recovery temperature and lower than the melting point. An external force is applied to the second recess to flatten the second recess, and the first normally closed valve is molded on the shape memory polymer 1520.

(Formation of second normally closed valve)
A second through-hole is formed in the shape memory polymer 1520 by molding or machining at a temperature lower than the melting point of the shape memory polymer 1520, and at a temperature in a temperature range not lower than the shape recovery temperature of the shape memory polymer 1520 and lower than the melting point. Then, an external force is applied to the second through hole to flatten the second through hole, and a second normally closed valve is formed on the shape memory polymer 1520.

Subsequently, in step (d), a flow path substrate 1540 having a flow path is bonded to the first surface 1551 of the substrate 1550. FIG. 15C shows a schematic cross-sectional view of a fluidic device 1500 manufactured by the manufacturing method of the present embodiment.

[Fifth Embodiment]
A fifth embodiment of the fluid device manufacturing method will be described with reference to FIGS. 13A to 13C. As shown in FIG. 13A, a substrate 1350 of a fluidic device 1300 manufactured by the manufacturing method of the present embodiment includes a first substrate 1350a including a first surface 1351 and bonded to a flow path substrate 1340, a first substrate 1350a, 2nd board | substrate 1350b joined by the surface 1353 on the opposite side of the 1st surface 1351 is provided.

First, as shown in FIG. 13B, in the step (a1 ′), the first substrate 1350a is formed with a through-hole 1360a serving as a storage portion 1330 in which the substance 1320 having shape memory property is stored.

Next, as shown in FIG. 13C, in step (a2 ′), the second substrate 1350b is provided with a support portion 1354 that supports the substance 1320 having the shape memory property at the tip, and is inserted into the through hole 1360a. A supply portion 1360 that penetrates the portion 1355, the surface 1352 opposite to the surface provided with the convex portion 1355, and the support portion 1354 and serves as an inlet for the material 1320 having shape memory properties, and the material 1320 having shape memory properties And a temperature changing portion (not shown) for changing at least a part of the temperature.

In addition, a discharge portion 1370 may be further formed, which passes through the surface 1352 opposite to the surface provided with the convex portion 1355 and the support portion 1354 and serves as an air vent when injecting the material 1320 having shape memory properties. .

The temperature change portion may be formed on the surface of the support portion 1354. The temperature change unit may be an electrothermal conversion unit that converts electrical energy such as a heater into thermal energy, for example, and may be a photothermal conversion unit that converts optical energy such as laser light into thermal energy. For example, when a heater made of wiring is formed as the temperature changing portion, it can be formed by sputtering of Cr / Au thin film, photolithography, screen printing, or the like.

There is no restriction | limiting in particular in order of a process (a1 ') and a process (a2'), which may be implemented first and may be implemented simultaneously.

Subsequently, in step (a3), the first substrate 1350a and the second substrate 1350b are joined by inserting the convex portion 1355 into the through hole 1360a to form the accommodating portion 1330 including the through hole 1360a and the support portion 1354. .

Thereafter, in the step (b1 ′), the shape memory polymer composition before curing is injected from the supply unit 1360 using a syringe or the like, and the material 1320 having shape memory is accommodated by curing the composition. The shape memory polymer composition can be cured by heat curing, photocuring, or the like.

Further, before the step (b1 ′), a step of bonding a lid substrate that closes the accommodating portion 1330 to the first surface 1351 of the substrate 1350a may be provided. In this case, the lid substrate may be peeled off before the step (c). The effects produced by using the lid substrate material and the lid substrate are the same as those in the fluid device manufacturing method of the second embodiment described above.

Subsequently, in the step (c), a normally open valve, a normally closed valve, a series valve and the like are formed in the same manner as in the step (c) of the third embodiment described above.

Subsequently, in step (d), a flow path substrate 1340 having a flow path is bonded to the first surface 1351 of the substrate 1350. Through the above steps, the fluid device 1300 can be manufactured.

Next, the present invention will be described in more detail with reference to examples, but the present invention is not limited to the following examples.

<Example 1>
A flow channel device shown in FIG. 13A was produced. Hereinafter, the manufacture of the flow path device of Example 1 will be described with reference to FIGS. 13A, 16A, 16B, and 17A to 17C.

[Fabrication of the first substrate]
A through-hole 1360a was formed in an acrylic plastic substrate (hereinafter referred to as “MS substrate”) to produce a first substrate 1350a.

[Production of second substrate]
(Heater formation)
A Cr / Au thin film was formed on the surface of the MS substrate 1350b by sputtering. Subsequently, a zigzag heater pattern (temperature change portion) was formed by photolithography. Since the MS substrate has high chemical resistance, wet etching of Cr and Au can be performed without any problem. FIG. 16A is a photograph showing a pattern of the heater formed on the surface of the MS substrate.

(Formation of convex parts)
Subsequently, the surface of the MS substrate 1350b was cut to form a convex portion 1355 having a mountain shape. The heater pattern is formed on the top (supporting portion) 1354 of the convex portion 1355. FIG. 16B is a photograph showing a substrate 1350b having a convex portion with a heater pattern formed on the top. The diameter of the support portion 1354 was 2 mm, and the diameter of the bottom surface of the convex portion 1355 was 4 mm.

(Wiring formation)
Subsequently, the mask was put on and sputtering was performed again to form a wiring made of a Cr / Au thin film. This wiring supplies power to the heater. FIG. 17A is a photograph showing the second substrate 1350b after wiring formation.

[Bonding of the first substrate and the second substrate]
Subsequently, the first substrate 1350a and the second substrate 1350b were joined. Specifically, first, toluene vapor was exposed for 30 minutes to the first substrate 1350a on which no heater wiring was formed. Subsequently, vacuuming was performed for 3 minutes to evaporate toluene molecules on the surface of the first substrate 1350a.

Subsequently, the first substrate 1350a and the second substrate 1350b were joined by inserting the convex portion 1355 of the second substrate 1350b into the through-hole 1360a of the first substrate 1350a and press-bonding with a pressure of 6 MPa for 30 minutes.

Thereby, the top portion (support portion) 1354 of the convex portion and the accommodating portion 1330 including the side surface of the through hole 1360a were formed. The height of the accommodating portion 1330 was 200 μm. FIG. 17B is a photograph showing a state in which the first substrate 1350a and the second substrate 1350b are bonded.

[Filling of shape memory polymer]
Polycaprolactone (PCL) macromonomer, 1-hydroxy-cyclohexyl-phenyl-ketone (trade name “IRGACURE184”, manufactured by BASF Japan Ltd.) and bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide (trade name “ IRGACURE819 ”(manufactured by BASF Japan) was mixed at a mass ratio of 100: 10: 1, and a composition was prepared by heating and melting at 70 ° C.

A glass substrate coated with a fluororesin (trade name “CYTOP (CTL-809M)” manufactured by Asahi Glass Co., Ltd.) was used as a lid substrate and was brought into close contact with the first surface 1351 of the substrate 1350.

Subsequently, the above composition was filled from the supply unit 1360 to the housing unit 1330 using a syringe. Subsequently, UV light having an illuminance of 7.8 mW / cm ² and a wavelength of 365 nm is irradiated from the upper part of the lid substrate toward the housing portion 1330 for 4 minutes to crosslink and cure the PCL in the composition, and the shape memory polymer is cured. Obtained.

Subsequently, it was cooled to room temperature and the lid substrate was removed. In addition, when it cools to normal temperature, a shape memory polymer will shrink | contract and a clearance gap will be made in one part. Therefore, a glass substrate whose surface was dry-etched by anticipating shrinkage and was cut by several μm was used as the lid substrate.

[Hot embossing]
Subsequently, a glass mold having a dome-shaped projection having a height of about 50 μm and a diameter of about 400 μm was pressed against the surface 1351 of the shape memory polymer at a temperature of 60 ° C. and a pressure of 1 MPa, and held for 3 minutes.

Subsequently, the temperature was returned to room temperature and kept for 2 hours while the pressure was applied. As a result, a concave portion serving as a normally open valve was formed on the shape memory polymer surface. Then, the pressure application was stopped and the glass mold was removed.

[Bonding of flow path substrates]
Subsequently, a flow path substrate 1340 having a flow path formed of an MS substrate was bonded to the substrate 1350. Specifically, toluene vapor was exposed to the flow path substrate 1340 for 30 minutes. Subsequently, evacuation was performed for 3 minutes to evaporate toluene molecules on the surface of the flow path substrate 1340.

Subsequently, the flow path substrate 1340 and the first surface 1351 of the substrate 1350 were laminated, and the flow path substrate 1340 and the substrate 1350 were joined by pressure bonding at a pressure of 6 MPa for 30 minutes.

Through the above steps, the fluid device of Example 1 was obtained. FIG. 17C is a photograph showing the completed fluidic device of Example 1.

<Experimental example 1>
(Valve drive)
The valve of the fluid device of Example 1 was driven. First, a conductive silver paste was used to connect the conducting wire to the fluidic device. Next, a liquid containing a fluorescent dye was sent to the flow path of the fluid device.

Subsequently, while measuring the fluorescence intensity of the bulb portion of the fluid device, a pulse voltage of 1000 milliseconds was applied to the bulb heater to drive the bulb. FIG. 18A is a graph showing the relationship between applied voltage and measured fluorescence intensity and time. FIG. 18B is a fluorescence micrograph of the channel when the valve is open and the channel when the valve is closed. FIG. 18C is a graph showing the relationship between valve response time and power consumption.

As a result, a response time of 463 ± 35 milliseconds (n = 3) was obtained with a power of 1.5 × 10 ² mW. Further, when the valve was driven by changing the electric power, it was shown that it can be driven with lower electric power than the conventional seat-type shape memory polymer valve. This was probably due to a decrease in the melting point (phase transition point) of PCL due to the crosslinking of PCL without solvent.

<Example 2>
(Production of fluidic devices with integrated valves)
A fluid device of Example 2 in which nine valves were integrated was produced by the same procedure as in Example 1. FIG. 19A is a photograph showing a second substrate having a convex portion with a heater pattern formed on the top. FIG. 19B is a photograph showing the second substrate after wiring formation. FIG. 19C is a photograph showing a state in which the first substrate and the second substrate are bonded. FIG. 19D is a photograph showing the completed fluidic device of Example 2.

According to the present invention, it is possible to provide a valve that can be manufactured easily and at a low cost and has a high degree of freedom in designing a fluid device. Moreover, the flow path device provided with the said valve | bulb and the manufacturing method of a flow path device can be provided.

200,242,300,670,730,800,940 ... Normally open valve, 210, 240, 310, 410, 510, 610, 1010, 1110, 1210, 1310, 2010 ... flow path, 2020, 2030 ... valve , 220, 220 a, 320, 420, 520, 620 a, 620 b, 820, 1020, 1120, 1220, 1320, 1420, 1520... Shape memory polymer (substance having shape memory), 230, 330, 430, 530, 830 , 1030, 1130, 1230, 1330, 1430, 1530 ... receiving portion (recess), 240, 340, 440, 540, 640, 1040, 1140, 1240, 1340, 1540 ... flow path substrate, 242a, 243a ... heating means, 245, 445, 645a, 6 5b ... weir, 250, 350, 450, 550, 650, 1050, 1150, 1250, 1350, 1450, 1550 ... substrate, 251, 351, 451, 551, 651, 1051, 1151, 1251, 1351, 1451, 1551 ... 1st surface, 243,400,500,660,740,930 ... normally closed valve, 241,600,700,900,1000,1100,1200,1300,1500,2000 ... fluid device, 680,750,950 ... Series valve, 710, 910 ... Driving source, 720 ... Upstream channel, 721 ... Branch channel, 722 ... Branch point, 723, 724, 725 ... Downstream channel, 730a, 740a, 750a, 930a, 940a, 950a ... Temperature changing portion, 830a ... photothermal conversion layer, 921, 922, 9 3,924,925 ... Liquid reservoir, 960 ... Purification device, 1010a ... First flow path, 1010b ... Second flow path, 1131, 1231, 1331, 1431, 1531 ... Bottom, 1152, 1252, 1352, 1452, 1552 ... 2nd surface, 1160, 1260, 1360, 1460, 1560 ... supply part, 1170, 1270, 1370, 1470, 1570 ... discharge part, 1250a, 1350a ... first board, 1250b, 1350b ... second board, 1120a ... Flat plate part, 1120b, 1120c ... Leg part (protruding part), 1121, 1122, 1253, 1353 ... surface, 1254, 1354 ... support part, 1255, 1355 ... convex part, 1260a, 1260a, 1360a ... through hole, 1356 ... side face 1357 ... surface, 1480 ... lid substrate, 1481 ... transfer surface.

Claims

A valve that adjusts the flow of fluid in the flow path when a substance having shape memory property is accommodated in a housing portion provided in the flow path, and the material having shape memory property is deformed.
The valve according to claim 1, wherein the accommodating portion is a hole formed in the flow path.
The valve according to claim 1 or 2, wherein the accommodating portion has a concave shape having an opening in the flow path.
The valve according to any one of claims 1 to 3, wherein the substance having shape memory property is a shape memory polymer.
The valve according to any one of claims 1 to 4, wherein at least a part of the substance having shape memory property forms at least a part of the flow path.
The deformation according to any one of claims 1 to 5, wherein the fluid can be transformed into an open state in which the fluid flows in the flow path or a closed state in which the fluid flow is blocked. The valve described.
The normally open valve which is deformed from an open state in which the fluid flows through the flow path to a closed state in which the fluid flow is blocked by being heated. The valve described.
The valve has a weir for damming a fluid, and the substance having shape memory property has a recess serving as a bypass for allowing the fluid to bypass the weir, and the recess disappears by the heating. 7. The valve according to 7.
The valve according to claim 7, wherein the substance having shape memory property has a through hole through which a fluid passes, and the through hole disappears by the heating.
The normally closed valve which is deformed from a closed state in which the flow of the fluid in the flow path is blocked by heating to an open state in which the fluid flows. The valve described.
Provided in the flow path,
A flat plate portion made of a material having shape memory, and a protruding portion protruding from the first surface of the flat plate portion,
A valve that adjusts the flow of fluid in the flow path when the flat plate portion is deformed.
The valve according to claim 11, wherein the flat plate portion and the protruding portion are made of a material having the same shape memory property.
The valve according to claim 11 or 12, wherein the substance having shape memory property is a shape memory polymer.
The valve according to any one of claims 11 to 13, wherein the protruding portion extends in a thickness direction of the flat plate portion.
The valve according to any one of claims 11 to 13, wherein the protruding portion extends in a direction intersecting a thickness direction of the flat plate portion.
The projecting portion includes a first projecting portion provided on the flat plate portion, and a second projecting portion provided on the opposite side of the center of the flat plate portion from the first projecting portion. The valve according to any one of 15.
The valve according to any one of claims 11 to 16, wherein the protruding portion has a non-linear shape having a circular or polygonal cross section.
A second surface opposite to the first surface of the flat plate portion forms at least a part of the flow path;
The valve according to any one of claims 11 to 17, wherein a surface area of the first surface is larger than a surface area of the second surface.
The valve according to any one of claims 11 to 18, wherein the flat plate portion has a columnar shape, a truncated cone shape, a polygonal column shape, or a polygonal frustum shape.
The valve according to any one of claims 11 to 19, further comprising a temperature changing portion, wherein the first surface of the flat plate portion directly or indirectly contacts the temperature changing portion.
A fluidic device comprising the valve according to any one of claims 1 to 20.
The fluid device according to claim 21, comprising a plurality of the valves.
23. The fluidic device according to claim 22, comprising two of the valves spaced apart from each other in the one flow path.
The fluid device according to claim 22 or 23, comprising the valve according to any one of claims 7 to 9 and the valve according to claim 10, which are arranged in series.
The valve according to any one of claims 6 to 20, and a temperature changing unit that changes the temperature of at least a part of the substance having shape memory properties. Fluid device.
The fluid device according to claim 25, wherein the temperature changing unit includes an electrothermal converting unit that converts electrical energy into thermal energy.
The fluid device according to claim 25, wherein the temperature changing unit includes a photothermal conversion unit that converts light energy into heat energy.
A channel substrate having a channel;
A substrate bonded to the flow path substrate and the first surface;
The substrate includes a valve provided at a position facing the flow path, and the valve includes a storage portion in which a substance having shape memory property is stored, and the substance having shape memory property is deformed. , A fluidic device for regulating the flow of fluid in the flow path.
The fluid device according to claim 28, wherein the accommodating portion is a space surrounded by a side surface and a bottom surface of a recess formed in the substrate.
30. The fluidic device according to claim 28 or 29, wherein the substance having shape memory property is a shape memory polymer.
The flow path includes a groove formed in the flow path substrate,
A first flow path portion in which the groove formed in the flow path substrate and the first surface of the substrate are in contact with the fluid, and a groove formed in the flow path substrate and the substance having shape memory property are in contact with the fluid. The fluidic device according to any one of claims 28 to 30, comprising a two-channel portion.
32. The fluidic device according to claim 31, wherein the first surface of the substrate is flush with a surface of the substance having shape memory property that is in contact with the fluid.
The receiving portion has a bottom;
The fluidic device according to any one of claims 28 to 32, wherein the substrate has a through-hole penetrating the second surface opposite to the first surface and the bottom portion.
The substrate includes a first substrate including the first surface and bonded to the flow path substrate, and a second substrate bonded to the first substrate and a surface opposite to the first surface;
The accommodating portion includes a through hole penetrating the first substrate,
The fluidic device according to any one of claims 28 to 33, wherein the second substrate is provided with a support part that supports the substance having shape memory property at a tip thereof, and a convex part that is inserted into the through hole.
35. The fluid according to claim 34, wherein the second substrate has a supply portion that penetrates the surface opposite to the surface on which the convex portion is provided and the support portion and serves as an inlet for the substance having the shape memory property. device.
36. The fluidic device according to claim 34 or 35, wherein the temperature changing portion is provided in the support portion.
The fluidic device according to any one of claims 34 to 36, wherein a side surface of the convex portion is an inclined surface that increases in diameter toward the surface of the second substrate.
The fluidic device according to any one of claims 21 to 37, wherein the flow path is three-dimensionally arranged.
The fluid device according to claim 38, wherein the plurality of flow paths are three-dimensionally arranged.
A fluid device manufacturing method comprising a channel substrate having a channel and a substrate bonded to the channel substrate on a first surface,
A flow path substrate having a flow path, and a substrate bonded to the flow path substrate on a first surface, the substrate having a housing portion locally formed at a position facing the flow path on the first surface. Preparing step (a);
A step (b) of containing a substance having shape memory in the containing portion;
A method for manufacturing a fluidic device.
41. The method of manufacturing a fluid device according to claim 40, wherein the substance having shape memory property is a shape memory polymer.
42. The method of manufacturing a fluid device according to claim 41, wherein, in the step (b), the shape memory polymer composition before curing is injected into the housing portion and cured in the housing portion.
The substrate includes a supply portion that penetrates the second surface opposite to the first surface and the bottom of the housing portion and serves as an inlet for the shape memory polymer,
43. The method of manufacturing a fluid device according to claim 42, wherein in the step (b), a shape memory polymer composition before curing is injected from the supply unit into the housing unit.
Under the temperature in the temperature range of the shape memory polymer above the shape recovery temperature and below the melting point, an external force is applied to the shape memory polymer housed in the housing portion to deform and form a structure that returns to its original shape by heating. The method for producing a fluidic device according to any one of claims 41 to 43, further comprising a step (c).
The method for producing a fluidic device according to any one of claims 40 to 44, further comprising a step of bonding a lid substrate that closes the housing portion to the first surface of the substrate before the step (b).
46. The method of manufacturing a fluid device according to claim 45, wherein the lid substrate has a transfer surface to be transferred to the substance having shape memory property at a position facing the housing portion.
The fluid device manufacturing method according to claim 45 or 46, wherein the lid substrate has a recess having a depth corresponding to a contraction amount of the substance having shape memory property accommodated in the accommodating portion.
The step (c)
An external force is applied to the shape memory polymer at a temperature in the temperature range from the shape recovery temperature of the shape memory polymer to less than the melting point to provide a first recess, and the first normally open Forming a valve;
A first through hole is provided by applying an external force to the shape memory polymer at a temperature in the temperature range from the shape recovery temperature of the shape memory polymer to less than the melting point, and the shape memory polymer has a second normally open Forming a valve;
By forming or machining at a temperature lower than the melting point of the shape memory polymer, a second recess is formed in the shape memory polymer, and at a temperature in a temperature range not lower than the melting point of the shape memory polymer and lower than the melting point, Applying an external force to the second recess to flatten the second recess and molding a first normally closed valve on the shape memory polymer; and
A second through-hole is formed in the shape memory polymer by molding or machining at a temperature lower than the melting point of the shape memory polymer, and the temperature is within a temperature range not lower than the melting point of the shape memory polymer and lower than the melting point. Applying at least one external force to the second through hole to flatten the second through hole, and forming at least one step selected from the group consisting of forming a second normally closed valve on the shape memory polymer. Yes,
The method for manufacturing a fluidic device according to any one of claims 41 to 47, further comprising a step (d) of joining a flow path substrate having a flow path to the first surface of the substrate.
The substrate includes a first substrate that includes the first surface and is bonded to the flow path substrate, and a second substrate that is bonded to the first substrate and a surface opposite to the first surface;
The step (a) is a step (a1 ′) of forming a through-hole serving as a storage portion in which the shape memory polymer is stored in the first substrate;
The second substrate is provided with a convex portion that supports the shape memory polymer at the tip and is inserted into the through hole, a surface opposite to the surface where the convex portion is disposed, and the support portion. A step (a2 ′) of forming a supply part that penetrates and serves as an inlet for the shape memory polymer, and a temperature change part that changes the temperature of at least a part of the shape memory polymer;
A step (a3) of joining the first substrate and the second substrate by inserting the convex portion into the through hole and forming a housing portion including the through hole and the support portion,
49. The manufacture of a fluidic device according to claim 48, wherein the step (b) includes a step (b1 ′) of injecting a shape memory polymer composition before curing from the supply unit into the housing unit and curing the composition. Method.
In the step (a2 ′), the second substrate is provided with a support portion that supports the shape memory polymer at the tip and is inserted into the through hole, and the opposite side of the surface on which the protrusion portion is provided. The shape memory polymer is injected through the supply portion penetrating the surface and the support portion and serving as the injection port of the shape memory polymer, the surface opposite to the surface provided with the convex portion, and the support portion. 50. The method of manufacturing a fluid device according to claim 49, wherein the fluid device is a step of forming a discharge portion for releasing air when the temperature is changed and a temperature changing portion for changing the temperature of at least a part of the shape memory polymer.
51. The method of manufacturing a fluid device according to claim 49, wherein the temperature change unit includes an electrothermal conversion unit that converts electrical energy into thermal energy.
The said temperature change part is a manufacturing method of the fluid device of Claim 49 or 50 provided with the photothermal conversion part which converts light energy into heat energy.
A step of bonding a lid substrate that closes the housing portion to the first surface of the substrate before the step (b); and a step of peeling the lid substrate before the step (c) A method for producing a fluidic device according to any one of claims 40 to 52.