WO2016136551A1 - Vanne, dispositif à fluide et procédé de production de dispositif à fluide - Google Patents

Vanne, dispositif à fluide et procédé de production de dispositif à fluide Download PDF

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Publication number
WO2016136551A1
WO2016136551A1 PCT/JP2016/054546 JP2016054546W WO2016136551A1 WO 2016136551 A1 WO2016136551 A1 WO 2016136551A1 JP 2016054546 W JP2016054546 W JP 2016054546W WO 2016136551 A1 WO2016136551 A1 WO 2016136551A1
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Prior art keywords
shape memory
substrate
flow path
valve
fluid
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PCT/JP2016/054546
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English (en)
Japanese (ja)
Inventor
一木　隆範
晨陽 蒋
博文 塩野
太郎 上野
Original Assignee
国立大学法人東京大学
株式会社ニコン
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Application filed by 国立大学法人東京大学, 株式会社ニコン filed Critical 国立大学法人東京大学
Priority to JP2017502292A priority Critical patent/JPWO2016136551A1/ja
Publication of WO2016136551A1 publication Critical patent/WO2016136551A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N37/00—Details not covered by any other group of this subclass

Definitions

  • the present invention relates to a valve, a fluid device, and a fluid device manufacturing method.
  • ⁇ -TAS is superior to conventional testing equipment in that it can be measured and analyzed with a small amount of sample, can be carried, and can be disposable at low cost. Furthermore, in the case of using an expensive reagent or in the case of testing a small amount of a large number of specimens, the method is attracting attention as a highly useful method.
  • a microvalve is an indispensable element for controlling the flow of a fluid containing a biological sample or the like in a channel in a chip.
  • microvalves that have been proposed use a movable member such as an actuator, but in recent years, microvalves that close the flow path by applying gas pressure to the ceiling of the flow path have been proposed (for example, see Patent Document 1 and Non-Patent Document 1.)
  • the present invention provides a valve that can be easily manufactured at low cost and has a high degree of freedom in designing a fluid device.
  • the present invention also provides a flow channel device including the valve and a method for manufacturing the flow channel device.
  • the present invention includes the following aspects.
  • a substance having shape memory property is accommodated in an accommodating portion provided in the flow path, and the fluid in the flow path is formed by the deformation of the substance having shape memory property. It is characterized by adjusting the flow of the water.
  • a valve according to an embodiment of the present invention includes a flat plate portion that is provided in the flow path and includes a material having shape memory, and a protruding portion that protrudes from the first surface of the flat plate portion, The flow of the fluid in the flow path is adjusted by deforming the flat plate portion.
  • a fluid device includes the valve described above.
  • a fluid device includes a flow path substrate having a flow path, and a substrate bonded to the flow path substrate at a first surface, the substrate facing the flow path. And a valve that adjusts the flow of fluid in the flow path when the substance having shape memory property is deformed.
  • a fluid device manufacturing method is a fluid device manufacturing method including a channel substrate having a channel and a substrate bonded to the channel substrate on a first surface.
  • (b) containing a substance having shape memory property in the housing part is containing a substance having shape memory property in the housing part.
  • the valve in one embodiment of the present invention is provided locally in the flow path through which the fluid flows, and includes a storage portion in which the shape memory polymer is stored. It is characterized by adjusting the flow of the fluid therein.
  • the valve according to one embodiment of the present invention includes a shape memory polymer that is locally provided in the flow path through which the fluid flows and has a flat plate portion and a protruding portion protruding from the first surface of the flat plate portion, The flat plate portion and the protruding portion are made of the same shape memory polymer, and the second surface of the flat plate portion opposite to the first surface forms at least a part of the flow path, and the flat plate portion The flow of the fluid in the flow path is adjusted by deforming the part.
  • a fluid device includes the valve described above.
  • a fluid device includes a flow path substrate having a flow path, and a substrate bonded to the flow path substrate on a first surface, the substrate facing the flow path.
  • a storage portion that is locally provided at a position where the shape memory polymer is stored; and a valve that adjusts the flow of fluid in the flow path when the shape memory polymer is deformed.
  • a fluid device manufacturing method is a fluid device manufacturing method including a channel substrate having a channel and a substrate bonded to the channel substrate on a first surface.
  • FIG. 3 is a photograph showing a manufacturing process of the fluidic device of Example 1.
  • FIG. It is a photograph which shows the 2nd board
  • 3 is a photograph showing a manufacturing process of the fluidic device of Example 1.
  • FIG. 2 is a photograph showing a fluidic device of Example 1.
  • FIG. It is a graph which shows the relationship between applied voltage and measured fluorescence intensity, and time.
  • Example 2 It is the fluorescence-microscope photograph of the flow path when a valve is an open state, and a flow path when a valve is a closed state. It is a graph which shows the relationship between the response time of a valve
  • Example 2 it is a photograph which shows the 2nd board
  • 6 is a photograph showing a second substrate after wiring formation in Example 2.
  • a substance having shape memory property is accommodated in an accommodating part provided in the flow channel, and the flow of fluid in the flow channel is adjusted by the deformation of the material having shape memory property.
  • the substance having the shape memory property is a substance having a property (shape memory effect) that even when deformed at a certain temperature or lower, recovers to its original shape when heated to the temperature or higher.
  • it may be a shape memory alloy or a shape memory polymer.
  • the valve is locally provided in the flow path through which the fluid flows, and includes a storage portion in which the shape memory polymer is stored.
  • the shape memory polymer is deformed to adjust the flow of the fluid in the flow path.
  • a valve may be used.
  • the fluid flowing means that the fluid moves.
  • adjusting the flow of the fluid in the flow path means, for example, blocking the flow of the fluid or causing the stopped fluid to flow.
  • the amount of deformation of the substance having shape memory property may be controlled by controlling the heating conditions, and the flow rate and flow rate may be adjusted quantitatively. Examples of heating conditions include heating time and heat.
  • the valve of this embodiment can be manufactured easily and at low cost, and the flow of fluid can be controlled easily and freely. Moreover, it is not a sandwich structure device in which a sheet of shape memory polymer is sandwiched between two substrates, but is configured by a housing part that is locally provided in the flow path and contains a substance having shape memory properties. . Therefore, the upper and lower substrates are not separated by the shape memory polymer sheet, and the degree of freedom in designing the fluid device is high.
  • the valve according to this embodiment includes a storage portion that is locally provided in the flow path and stores a substance having shape memory properties.
  • the accommodating portion will be described with reference to FIG.
  • FIG. 2 is a schematic cross-sectional view showing one embodiment of the valve of this embodiment.
  • a valve 200 shown in FIG. 2 is provided locally in a flow path 210 through which a fluid flows, and includes a housing portion 230 in which a material 220 having shape memory properties is housed. The material 220 having shape memory properties is deformed. The flow of the fluid in the flow path 210 is adjusted.
  • the flow path 210 includes a flow path substrate 240 having a flow path (for example, a groove), and a substrate 250 joined to the flow path substrate 240 by the first surface 251.
  • the accommodating part 230 is locally provided in the flow path 210.
  • the housing part 230 is locally provided at a position facing a part of the flow path 210 in the substrate 250.
  • “Locally provided in the flow path 210” means that the accommodating portion 230 is formed not in the entire first surface 251 constituting the flow path 210 but in a limited region of the first surface 251.
  • a part of the channel 210 faces the substance 220 having shape memory property, and at least a part of the channel 210 that does not face the substance 220 having shape memory property faces the first surface 251.
  • a part of the fluid flowing through the flow path 210 is in contact with the first surface 251 of the substrate 250 and in contact with the surface of the substance 220 having shape memory property in the valve portion.
  • the accommodating portion 230 is, for example, a concave shape or a hole having an opening on the first surface 251 and is a portion in which the substance 220 having shape memory property is accommodated.
  • the accommodating portion 230 is a space surrounded by a surface that forms a recess formed in the substrate 250, that is, a side surface and a bottom surface of the recess.
  • the accommodating portion may be common to the plurality of valves.
  • the plurality of valves when a plurality of valves are adjacent to each other, the plurality of valves may be formed of a material having shape memory property accommodated in a common accommodating portion.
  • the plurality of valves may be formed of a material having shape memory property accommodated in different accommodating portions.
  • the substance having shape memory property may be a shape memory alloy or a shape memory polymer.
  • shape memory alloys include alloys of titanium and nickel, and iron-manganese-silicon alloys.
  • a shape memory polymer is a polymer that recovers its original shape when heated above a certain temperature, even if deformed by applying external force after molding, and is reversible and has fluidity at a certain temperature (hereinafter referred to as the shape recovery temperature). It is composed of a stationary phase composed of a phase and a physical or chemical bonding site (crosslinking point) that does not deform at a temperature at which the reversible phase deforms.
  • FIG. 1 is a diagram for explaining the characteristics of a shape memory polymer.
  • the shape memory polymer memorizes the shape formed by molding or machining by the stationary phase in the resin, and the memorized shape at a temperature within the temperature range between the shape recovery temperature and the melting point. It can be transformed into a free shape.
  • the deformation can be fixed by cooling to a temperature lower than the shape recovery temperature while maintaining the deformed state.
  • the shape formed by molding or machining is restored by heating the fixed deformation after cooling to a temperature below the shape recovery temperature to a temperature above the shape recovery temperature and below the melting point.
  • the shape memory polymer material is not particularly limited, and examples thereof include polymer materials such as elastomers having shape memory properties.
  • Specific examples of the elastomer having shape memory property include polyurethane, polyisoprene, polyethylene, polynorbornene, styrene-butadiene copolymer, epoxy resin, phenol resin, acrylic resin, polyester, melanin resin, polycaprolactone, polyvinyl chloride, Polymers such as polystyrene, polybutylene succinate, polyethylene terephthalate, polybutylene terephthalate, polyphenylene sulfide, etc., which have been crosslinked by a chemical crosslinking method using heat or the like using a peroxide such as an organic peroxide or benzoyl peroxide. Is mentioned.
  • the valve is molded from a material having shape memory by molding or machining.
  • the valve is formed in an open state in which a fluid flows in the flow path or a closed state in which a fluid flow is blocked.
  • the deformation is fixed by cooling to a temperature lower than the shape recovery temperature.
  • This deformation is a deformation for closing the valve in the open state or a deformation for opening the valve in the closed state.
  • the modified valve is disposed in the flow path.
  • the deformed valve is in the open state, the fluid freely flows in the flow path after the valve is disposed.
  • the shape of the deformed valve is in the closed state, the fluid flow in the flow path is blocked after the valve is disposed.
  • valve molding is restored by heating the valve at a temperature within the temperature range between the shape recovery temperature of the substance having shape memory property and lower than the melting point.
  • the valve that has been deformed so as to be in the open state is closed by being heated, and the flow of the fluid in the flow path is blocked.
  • the valve, which has been deformed so as to be in the closed state is opened when heated, so that the fluid flows freely in the flow path.
  • the valve of this embodiment in the flow path, the flow of fluid in the flow path can be freely controlled.
  • at least a part of the substance having shape memory property forms at least a part of the flow path.
  • the fluid flowing through the flow path is in contact with at least a portion of the substance having shape memory properties. Therefore, it can be manufactured simply and at low cost, and the open state and the closed state can be controlled easily and freely.
  • the valve of this embodiment can be deformed into an open state in which a fluid flows in the flow path or a closed state in which the fluid flow is blocked by a temperature change such as heating.
  • FIG. 2 is a schematic cross-sectional view showing one embodiment of the valve of this embodiment.
  • a valve 200 shown in FIG. 2 is provided locally on a flow path 210 through which a fluid flows, and includes a storage portion 230 in which a material 220 having shape memory property is stored, and the material 220 having shape memory property is deformed.
  • the flow path 210 includes a flow path substrate 240 having a flow path, a substrate 250 bonded to the flow path substrate 240 by the first surface 251, and a part of the substance 220 having shape memory properties.
  • a part of the material 220 having shape memory property that is, a part 220 a of the material 220 having shape memory property that is in contact with the flow channel 210 forms a part of the flow channel 210.
  • the first region in which the substance 220 having shape memory property faces a part of the channel 210 and the substance (substrate 250) different from the substance 220 having shape memory property faces a part of the channel 210.
  • a second area exists.
  • the valve of this embodiment is a valve that is suitably used for a fluid device.
  • Examples of the valve include a normally open valve and a normally closed valve. Details of each valve will be described below.
  • FIG. 2 is a schematic cross-sectional view showing one embodiment of a normally open valve.
  • the valve of the present embodiment is a normally open valve that is deformed from an open state in which a fluid flows in the flow path 210 to a closed state in which the flow of the fluid is blocked by heating when heated. It is.
  • the normally open valve 200 includes a flow path 210 and a storage portion 230 in which a substance 220 having shape memory property is stored, and the fluid 220 in the flow path 210 is deformed when the substance 220 having shape memory property is deformed. Adjust the flow.
  • the flow path 210 is formed by stacking a flow path substrate 240 having a flow path and a substrate 250 bonded to the flow path substrate 240 and the first surface 251.
  • the flow path substrate 240 is laminated on the substrate 250 to form the flow path 210.
  • the positional relationship is not limited, and for example, the substrate 250 is laminated on the flow path substrate 240.
  • the flow path 210 may be formed by this lamination.
  • the flow path substrate 240 has a weir 245, and the flow of the fluid in the flow path 210 is blocked by the weir 245.
  • the normally open valve 200 functions as a flow path (bypass path) as a bypass for bypassing the fluid blocked by the weir 245 in a steady state.
  • the substance 220 having shape memory property memorizes a flat shape when formed.
  • the normally open valve 200 is formed into a concave shape by applying an external force at a temperature in the range of the shape recovery temperature of the substance 220 having shape memory property and higher than the melting point.
  • the normally open valve 200 has a shape for bypassing the closed state in which the fluid flow is blocked before heating, and is in an open state in which the fluid flows through the flow path 210.
  • the normally open valve 200 is in an open state having a concave shape for bypassing the closed state.
  • normally open valve 200 is in a concave open state in a steady state.
  • the material 220 having shape memory property is restored to a flat shape, so that the fluid flow is deformed into a closed state where the fluid flow is blocked.
  • FIG. 3 is a schematic cross-sectional view showing an embodiment of a normally open valve.
  • the valve of this embodiment is a normally open valve that is deformed from an open state in which a fluid flows through the flow path 310 to a closed state in which the flow of the fluid is blocked by heating when heated. It is.
  • the normally open valve 300 includes a flow path 310 and a storage portion 330 in which a substance 320 having a shape memory property is accommodated.
  • the deformation of the substance 320 having a shape memory property causes the fluid in the flow path 310 to flow. Adjust the flow.
  • the flow path 310 is formed by stacking a flow path substrate 340 having a flow path and a substrate 350 bonded to the flow path substrate 340 on the first surface 351.
  • the flow path substrate 340 is laminated on the substrate 350 to form the flow path 310, but their positional relationship is not limited, for example, the substrate 350 is laminated on the flow path substrate 340.
  • the flow path 310 may be formed by this lamination.
  • the open state is a state having a through shape (a shape having a through hole) for bypassing the closed state.
  • the normally open valve 300 is formed into a penetrating shape by applying an external force at a temperature in the temperature range between the shape recovery temperature and the melting point of the substance 320 having shape memory properties. That is, normally open valve 300 is in the open state of the penetrating shape in the steady state.
  • the material 320 having shape memory property is restored to a flat shape, so that the normally open valve 300 is deformed to a closed state in which the fluid flow is blocked.
  • FIG. 4 is a schematic cross-sectional view showing an embodiment of a normally closed valve.
  • the valve of this embodiment is a normally closed valve that is deformed from a closed state in which the flow of fluid in the flow path 410 is blocked by heating to an open state in which the fluid flows. It is.
  • the normally closed valve 400 includes a flow path 410 and a storage portion 430 in which a substance 420 having shape memory property is stored.
  • the deformation of the substance 420 having shape memory ability causes the fluid in the flow path 410 to flow. Adjust the flow.
  • the flow path 410 is formed by stacking a flow path substrate 440 having a flow path and a substrate 450 bonded to the flow path substrate 440 and the first surface 451.
  • the flow path substrate 440 is laminated on the substrate 450 to form the flow path 410.
  • the positional relationship is not limited, and for example, the substrate 450 is laminated on the flow path substrate 440.
  • the flow path 410 may be formed by this lamination.
  • the flow path substrate 440 has a weir 445, and the flow of the fluid in the flow path 410 is blocked by the weir 445.
  • the normally closed valve 400 has a flat shape in a steady state, and the fluid flow is blocked.
  • the substance 420 having shape memory has a concave shape when it is formed.
  • the normally closed valve 400 is formed into a flat shape by applying an external force at a temperature in the range of the shape recovery temperature of the substance 420 having shape memory property and higher than the melting point.
  • the normally closed valve 400 has a shape for bypassing the closed state in which the fluid flow is blocked after heating, and is in an open state in which the fluid flows through the flow path 410.
  • the normally closed valve 400 in the open state is a state having a concave shape for bypassing the closed state.
  • the substance 420 having shape memory property is restored to the concave shape, so that the normally closed valve 400 is deformed to an open state in which a fluid flows in the flow path.
  • FIG. 5 is a schematic cross-sectional view showing an embodiment of a normally closed valve.
  • the valve of this embodiment is a normally closed valve that is deformed from an open state in which a fluid flows through the flow path 510 to a closed state in which the flow of the fluid is blocked by heating when heated. It is.
  • the normally closed valve 500 includes a flow path 510 and a storage portion 530 in which a substance 520 having a shape memory property is accommodated.
  • the deformation of the substance 520 having a shape memory property causes the fluid in the flow path 510 to flow. Adjust the flow.
  • the flow path 510 is formed by stacking a flow path substrate 540 having a flow path and a substrate 550 bonded to the flow path substrate 540 with the first surface 551.
  • the flow path substrate 540 is stacked on the substrate 550 to form the flow path 510, but the positional relationship thereof is not limited, for example, the substrate 550 is stacked on the flow path substrate 540.
  • the flow path 510 may be formed by this lamination.
  • the open state is a state having a through shape (a shape having a through hole) for bypassing the closed state.
  • a normally closed valve 500 is formed into a flat shape by applying an external force at a temperature in the range of the shape recovery temperature of the substance 520 having a shape memory property and less than the melting point. That is, the normally closed valve 500 is in a closed state having a flat shape in a steady state.
  • the substance 520 having shape memory property is restored to the penetrating shape, so that the normally closed valve 500 is deformed to an open state in which a fluid flows.
  • Examples of the material having shape memory that constitutes a normally closed valve include the same materials as those having shape memory that constitute a normally open valve.
  • the present invention provides a fluidic device comprising the valve described above.
  • the fluidic device of this embodiment can be manufactured easily and at low cost, and has a high degree of design freedom.
  • the substance having shape memory property is locally disposed in the valve portion of the fluid device, it is used for a fluid device having a region where light irradiation is required only for the fluid.
  • Cheap For example, it is possible to easily observe without performing precise optical design in consideration of the refractive index of a material having shape memory by making the material having shape memory in the observation region so that it does not exist. Become.
  • the size of the fluid device may be a millifluidic device in which the flow path and the structure are millimeter (mm) size, and the microfluidic device in which the flow path and the structure are micrometer ( ⁇ m) size. There may be.
  • the fluidic device of this embodiment may include a plurality of the valves described above.
  • a normally open valve and a normally closed valve arranged in series may be provided.
  • normally open valves and normally closed valves arranged in series may be referred to as “series valves”.
  • FIG. 6 is a schematic sectional view showing one embodiment of the series valve.
  • two valves a normally closed valve 660 and a normally open valve 670, are arranged in this order from the upstream side of the flow path 610 with a space between them.
  • a series valve 680 is formed.
  • the arrangement of the normally closed valve 660 and the normally open valve 670 is not limited to this, and the normally open valve 670 and the normally closed valve 660 may be arranged in this order from the upstream side of the flow path 610. Good.
  • both the normally closed valve 660 and the normally open valve 670 are in the open state.
  • both may be a through-type shape, or It may be a combination of penetrating shapes.
  • the flow path 610 is formed by laminating a flow path substrate 640 having a flow path and a substrate 650 bonded to the flow path substrate 640 by the first surface 651.
  • the flow path substrate 640 is stacked on the substrate 650 to form the flow path 610, but the positional relationship thereof is not limited, and for example, the substrate 650 is stacked on the flow path substrate 640.
  • the flow path 610 may be formed by this lamination.
  • the flow path substrate 640 has a weir 645a and a weir 645b in this order from the upstream side, and a normally closed valve 660 and a normally open valve 670 are the weir 645a and the weir 645, respectively, as valves corresponding to the weirs. It is provided immediately below 645b.
  • the fluid flow is first blocked by a weir 645 a located on the upstream side of the flow path 610.
  • the normally closed valve 660 has a flat shape in a steady state, and the fluid flow remains blocked. Therefore, the series valve 680 is closed as a whole.
  • the normally closed valve 660 is transformed into an open state in which a fluid flows.
  • the fluid that bypasses the weir 645a can further bypass the weir 645b located on the downstream side when the normally open valve 670 is in the open state. Therefore, the series valve 680 is in an open state as a whole.
  • the normally open valve 670 is deformed to a closed state in which the fluid flow is blocked.
  • the flow of the fluid bypassing the weir 645a is blocked by the weir 645b when the normally open valve 670 is changed to the closed state. Therefore, the series valve 680 is closed as a whole.
  • a valve made of a substance having shape memory property is generally considered to be irreversible in the open / closed state, but according to the fluidic device of the present embodiment, The fluid flow can be flexibly controlled by changing from the closed state to the open state and from the open state to the closed state.
  • FIG. 7 is a schematic diagram illustrating a basic configuration of a fluidic device 700 according to one embodiment.
  • the fluid device 700 includes a drive source 710, a branch flow path 721, a normally open valve 730, a normally close valve 740, and a series valve 750.
  • the branch channel 721 includes an upstream channel 720 that is a channel upstream of the branch point 722 and downstream channels 723, 724, and 725 that are channels downstream of the branch point 722.
  • the drive source 710 is connected to the upstream flow path 720 and sends fluid to the downstream side with a predetermined pushing force.
  • Examples of the drive source 710 include a syringe pump.
  • a normally open valve 730, a normally closed valve 740, and a series valve 750 are provided in the downstream flow paths 723, 724, and 725, respectively, and selectively (locally) the flow of fluid in each flow path. Arranged at adjustable positions.
  • normally open valve 730, the normally closed valve 740, and the series valve 750 are provided with temperature changing portions 730a, 740a, and 750a, respectively.
  • the fluidic device 700 of the present embodiment can be used for a purified sample recovery unit when purifying a biomolecule such as a nucleic acid from a specimen such as blood.
  • the sample lysate washed away by the drive source such as the buffer solution by the drive source 710 passes through a branching point 722 through a purification device such as a column (not shown) existing in the upstream flow path 720. Since the first solution that passes through the branch point 722 in the sample lysate is an unnecessary substance, it is discharged through the downstream flow path 723 provided with the normally open valve 730 that is open.
  • the normally open valve 730 is closed by heating by the temperature changing unit 730a.
  • the series valve 750 is opened by heating by the temperature changing unit 750a.
  • the second sample passing through the branch point 722 in the sample lysate passes through the downstream flow path 725 and is collected as the first fraction material.
  • the series valve 750 is closed by heating by the temperature changing unit 750a, and the normally closed valve 740 is opened by heating by the temperature changing unit 740a.
  • the sample that passes through the branch point 722 third in the sample lysate passes through the downstream channel 724 and is collected as the second fraction material.
  • the sample solution can be efficiently fractionated in the purified sample recovery unit.
  • the temperature changing units 730a, 740a, and 750a provided in the normally open valve 730, the normally closed valve 740, and the series valve 750 are, for example, an electrothermal converter that converts electrical energy such as a heater into thermal energy.
  • an electrothermal converter that converts electrical energy such as a heater into thermal energy.
  • a photothermal conversion unit that converts light energy such as laser light into heat energy may be used.
  • the electrothermal converter include electrodes and conductive wires.
  • the amount of change in the substance having shape memory can be further controlled by controlling the heating conditions.
  • the electrode has a configuration in which the electric resistance value decreases from the upstream side to the downstream side of the flow path.
  • FIG. 8 is a diagram for explaining the temperature changing portion using a normally open valve 800 as an example.
  • a photothermal conversion layer 830a is provided at the bottom of the storage portion 830 for storing the substance 820 having shape memory properties. It may be.
  • the photothermal conversion layer 830a includes a light absorber. Radiant energy applied to the photothermal conversion layer 830a by the laser light is absorbed by the light absorber and converted to thermal energy. Due to the generated thermal energy, the substance 820 having shape memory property is heated and deformed. That is, the fluid device of the present embodiment may include a temperature changing unit using a light absorbent. Note that heating by laser light irradiation may be performed selectively (locally) using a mask or the like.
  • the light absorber a material that absorbs radiation energy at a wavelength to be used can be used.
  • the wavelength of the radiant energy is, for example, 300 to 2000 nm, for example, 300 to 1500 nm.
  • the light absorber examples include fine particle metal powders such as carbon black, graphite powder, iron, aluminum, copper, nickel, cobalt, manganese, chromium, zinc, and tellurium; metal oxide powders such as black titanium oxide; aromatic diamino -Based metal complexes, aliphatic diamine-based metal complexes, aromatic dithiol-based metal complexes, mercaptophenol-based metal complexes, squarylium-based compounds, cyanine-based dyes, methine-based dyes, naphthoquinone-based dyes, anthraquinone-based dyes, etc. Can be mentioned.
  • fine particle metal powders such as carbon black, graphite powder, iron, aluminum, copper, nickel, cobalt, manganese, chromium, zinc, and tellurium
  • metal oxide powders such as black titanium oxide
  • aromatic diamino -Based metal complexes aliphatic diamine-based metal complexes, aromatic dithiol-based metal
  • the photothermal conversion layer 830a may be formed of a resin containing these dyes or pigments.
  • the resin used for the photothermal conversion layer 830a is not particularly limited, and may be the same as the substance having shape memory properties, for example.
  • the photothermal conversion layer 830a may be a film-like form containing these light absorbers including a metal vapor deposition film.
  • FIG. 8 shows that the substance 820 having shape memory and the photothermal conversion layer 830a are independent
  • the substance 820 having shape memory may itself contain the above-described light absorber.
  • a substance having shape memory property containing a light absorbing material is locally introduced only into the bulb portion. Therefore, even if the excitation light is irradiated to a wide range including the target valve without carrying out precise optical design considering the refractive index of the transparent material and polymer forming the flow path, only the desired valve portion is applied. Can be deformed.
  • the valve structure provided with the material having shape memory property locally in the flow path suppresses optical restrictions in the fluid device design and increases the degree of freedom in design.
  • the concentration of the light absorber in the photothermal conversion layer 830a varies depending on the type of light absorber, the particle form, the degree of dispersion, etc., but is, for example, 5 to 70% by volume.
  • concentration of the light absorber is 5% by volume or more, the substance 820 having shape memory property tends to be efficiently deformed due to the heat generation of the photothermal conversion layer 830a.
  • concentration of the light absorber is 70% by volume or less, the film-forming property of the photothermal conversion layer is good, and the adhesiveness with the substance 820 having shape memory property tends to be good.
  • the thickness of the photothermal conversion layer 830a is, for example, 0.1 to 5 ⁇ m. If the thickness of the photothermal conversion layer 830a is 0.1 ⁇ m or more, sufficient light absorption is possible. Therefore, the required concentration of the photoabsorbent does not become too high, and the film formability of the photothermal conversion layer is good. Also, the adhesiveness with the substance 820 having shape memory property tends to be improved. Further, when the thickness of the light-to-heat conversion layer is 5 ⁇ m or less, the light transmittance in the light-to-heat conversion layer 830a is good and the heat generation efficiency tends to be good.
  • the material of the substrate 850 a material having transparency to the laser beam is used, and the photothermal conversion layer 830a is irradiated with the laser beam from the substrate 850 side, thereby irradiating the substance in the channel with the laser beam. Adverse effects can be suppressed.
  • FIG. 9 is a schematic diagram illustrating a basic configuration of a fluidic device 900 according to one embodiment.
  • the fluid device 900 can be used, for example, in a purifier introduction part when purifying a biomolecule such as nucleic acid from a specimen such as blood.
  • the fluid device 900 has four liquid reservoirs 921, 922, 923, and 924 downstream of the drive source 910. Liquid, cleaning liquid, and liquid specimens are stored. A driving liquid is stored in a liquid reservoir 925 located upstream of the driving source 910. Furthermore, a normally closed valve 930, a normally open valve 940, and a series valve 950 are provided in the flow paths upstream of the liquid reservoirs 921, 922, 923, and 924, respectively.
  • the drive liquid pushed out from the drive source 910 selectively pushes out the liquid stored in the liquid reservoir located downstream of each valve by opening and closing these valves, so that each liquid becomes a liquid reservoir.
  • 921, 922, 923, and 924 are selectively extruded into a purifier 960 located downstream.
  • the liquid sample stored in the liquid reservoir 924 and the dissolved liquid stored in the liquid reservoir 922 provided downstream of the normally open valve 940 in the open state by the drive source 910 The biomolecules in the specimen are dissolved and captured by the purification device 960 after passing through the purification device 960 constituted by a column or the like.
  • the normally open valve 940 is closed by heating by the temperature changing unit 940a provided in the normally open valve 940, and the inflow of the solution to the purifier 960 is stopped.
  • the series valve 950 is opened by heating by the temperature change unit 950a provided in the series valve 950, and the cleaning liquid stored in the liquid reservoir 923 flows into the purifier 960, and unnecessary substances are removed from the purifier 960. Discharged.
  • the series valve 950 is closed by heating by the temperature changing unit 950a, and the flow of the cleaning liquid into the purifier 960 is stopped.
  • the normally closed valve 930 is opened by heating by the temperature changing unit 930a provided in the normally closed valve 930, and the eluate stored in the liquid reservoir 921 flows into the purifier 960, A purified sample is eluted from the purification device 960.
  • the fluidic device 900 of this embodiment biomolecules can be purified efficiently.
  • the valves may be deformed by heating and used as a liquid feed pump for microfluids in the flow path.
  • the flow path substrate constituting the fluidic device according to this embodiment will be described.
  • the flow path substrate is provided with a concave portion that constitutes a storage portion of a substance having shape memory property and a substance having shape memory property, and constitutes a fluid device together with the substrate bonded to the flow path substrate at the first surface. .
  • the channel substrate is not particularly limited, but may be a resin substrate with a channel from the viewpoint of easily manufacturing a fluid device.
  • the material of the flow path substrate is polyisoprene, polybutadiene, polychloroprene, polyisobutylene, poly (styrene-butadiene-styrene), polyurethane, silicone polymer, poly (bis (fluoroalkoxy) phosphazene) (PNF, Eypel-F), Poly (carborane-siloxane) (Dexsil), poly (acrylonitrile-butadiene) (nitrile rubber), poly (1-butene), poly (chlorotrifluoroethylene-vinylidene fluoride) copolymer (Kel-F), poly (Ethyl vinyl ether), poly (vinylidene fluoride), poly (vinylidene fluoride-hexafluoropropylene) copolymer (Viton), polyvinyl chloride (PVC) elastomer composition, police Hong, polycarbonate, polymethyl methacrylate (PMMA), polyt
  • the dimensions of the flow path formed on the flow path substrate made of these materials are not particularly limited as long as the flow of the fluid can be controlled by the above-described valve.
  • the following dimensions may be used.
  • the ratio of width to depth is for example 0.1: 1 to 100: 1, for example 1: 1 to 50: 1, for example 2: 1 to 20: 1, for example 3: 1 to 15: 1.
  • the width of the flow path is, for example, 0.01 to 1000 ⁇ m, for example, 0.05 to 1000 ⁇ m, for example, 0.2 to 500 ⁇ m, for example, 1 to 250 ⁇ m, for example, 10 to 200 ⁇ m. Further, as an example, the width of the flow path is 0.01 to 100 mm, 0.05 to 100 mm, 0.2 to 50 mm, 1 to 25 mm, and 1.5 to 15 mm.
  • the depth of the channel is, for example, 0.01 to 1000 ⁇ m, for example 0.05 to 500 ⁇ m, for example 0.2 to 250 ⁇ m, for example 1 to 100 ⁇ m, for example 2 to 20 ⁇ m. Further, as an example, the depth of the channel may be 0.01 to 100 mm, 0.05 to 100 mm, 0.2 to 50 mm, 1 to 25 mm, 1.5 to 15 mm.
  • FIG. 10 is a schematic cross-sectional view showing the structure of the fluidic device 1000 of this embodiment.
  • the valve of the fluid device 1000 is a normally open valve, but may be a normally closed valve.
  • the fluid device 1000 includes a flow path substrate 1040 having a flow path 1010, and a substrate 1050 bonded to the flow path substrate 1040 at the first surface 1051.
  • a valve is locally provided on the first surface 1051 of the substrate 1050 at a position facing the flow path 1010.
  • the valve includes a housing portion 1030 in which a substance 1020 having shape memory properties is accommodated, and the flow of the fluid in the flow path 1010 is adjusted by the deformation of the substance 1020 having shape memory properties.
  • the flow path 1010 includes a groove formed in the flow path substrate 1040, and the first flow path portion 1010a in which the groove formed in the flow path substrate 1040 and the first surface 1051 of the substrate 1050 are in contact with the fluid. And a second flow path portion 1010b in which a groove formed in the flow path substrate 1040 and the substance 1020 having shape memory property are in contact with the fluid.
  • the reason why the first flow path portion 1010a and the second flow path portion 1010b are present in the fluid device of the present embodiment is because the valves are locally provided.
  • the accommodating portion 1030 may have a concave shape, and may be expressed as a “concave portion” below.
  • the housing portion 1030 since the housing portion 1030 is locally provided, it is not necessary to sandwich a shape memory polymer sheet between the flow path substrate 1040 and the substrate 1050 (entire surface), and the fluid device 1000 is locally provided in the flow path.
  • the flow path since the upper and lower substrates are not separated by the sheet of shape memory polymer, the flow path can be three-dimensionally arranged and the degree of freedom in design is high.
  • the same material as the material of the flow path substrate described above can be used.
  • the flow path substrate and the substrate 1050 may be made of different materials or the same material. When the same material is used, the substrates can be easily bonded to each other.
  • FIG. 11A is a schematic cross-sectional view showing the structure of the fluidic device 1100 of the present embodiment.
  • the valve of the fluid device 1100 is a normally open valve, but may be a normally closed valve.
  • the fluidic device 1100 includes a flow path substrate 1140 having a flow path 1110 and a substrate 1150 bonded to the flow path substrate 1140 on the first surface 1151.
  • a concave portion 1130 is locally provided on the first surface of the substrate 1150, and the concave portion 1130 constitutes an accommodating portion 1130 that accommodates a substance 1120 having shape memory properties.
  • the substance having shape memory property may be a shape memory polymer.
  • the accommodating portion 1130 has a bottom portion 1131
  • the substrate 1150 has a through hole 1160 that penetrates the second surface 1152 opposite to the first surface 1151 and the bottom portion 1131.
  • the through-hole 1160 constitutes a supply unit that serves as an inlet for the substance 1120 having shape memory properties.
  • the substrate 1150 may further include a discharge portion 1170 that passes through the second surface 1152 and the bottom portion 1131 and serves as an air vent when injecting the material 1120 having shape memory properties.
  • a substance 1120 having shape memory property can be injected from the supply unit 1160. Further, if the discharge portion 1170 is provided, it is easy to remove air from the storage portion 1130, and the material 1120 having shape memory property can be reliably injected by the storage portion 1130. The discharge unit 1170 may be released to the atmosphere or may be sucked from the discharge unit 1170.
  • FIG. 11B is a diagram illustrating the structure of the substance 1120 having shape memory property in the fluid device 1100.
  • the material 1120 having shape memory inside the accommodating portion 1130 forms a flat plate portion 1120a (plate, thin film portion), and the material having shape memory property remaining in the supply portion 1160 is the first surface of the flat plate portion 1120a.
  • a leg portion (protruding portion) 1120b protruding from 1121 (corresponding to the bottom portion 1131 of the accommodating portion 1130) is formed.
  • the second surface 1122 (the main surface on the flow path side) opposite to the first surface 1121 (the main surface on the non-flow path side) of the flat plate portion 1120a forms at least a part of the flow path 1110.
  • the flow of the fluid in the flow path 1110 is adjusted by deforming the flat plate portion 1120a (the material 1120 having shape memory property).
  • the substance 1120 having shape memory property when the substance 1120 having shape memory property is injected from the supply unit 1160, a part of the substance having shape memory property may remain in the discharge unit 1170.
  • the material having the shape memory property remaining in the discharge portion 1170 forms the leg portion 1120c.
  • the protrusion 1120b protrudes in the direction of the second surface 1122 facing the flow path. Therefore, the protruding portion may be called a protruding portion or a raised portion.
  • the protruding portion 1120b has, for example, a column shape or a rod shape, and may have a hook shape formed on the substrate.
  • the cross section of the protrusion 1120b is smaller than the first surface and the second surface of the flat plate portion.
  • the thickness of the protruding portion 1120b is thicker than that of the flat plate portion 1120a. Note that a plurality of protrusions may be provided for the flat plate portion 1120a.
  • the first leg portion 1120b may be provided on the flat plate portion 1120a
  • the second leg portion 1120c may be provided on the opposite side of the first leg portion 1120b with respect to the center of the flat plate portion 1120a.
  • the structure in which the first leg portion 1120b and the second leg portion 1120c are provided on the opposite side across the center of the flat plate portion 1120a is the same as the structure in which the supply portion 1160 and the discharge portion 1170 are located on the opposite side across the center of the housing portion. It is made when it is. In this case, when a material having shape memory property is injected from the supply unit 1160, bubbles are unlikely to remain in the housing portion, and the flat plate portion 1120a can be easily formed from the material having shape memory property without mixing bubbles.
  • the first leg portion 1120b and the second leg portion 1120c may be provided on the outer edge portion of the flat plate portion.
  • the structure in which the first leg portion 1120b and the second leg portion 1120c are provided at the outer edge portion of the flat plate portion is produced by providing the supply portion 1160 and the discharge portion 1170 at the outer edge of the housing portion. In this case, when a material having shape memory property is injected from the supply unit 1160, bubbles are unlikely to remain at the edge of the housing portion, and formation of the flat plate portion 1120a with the material having shape memory property without air bubble mixing can be realized.
  • the leg part 1120b or the leg part 1120c may extend in the thickness direction of the flat plate part 1120a.
  • the leg 1120b or the leg 1120c may extend in a direction intersecting the thickness direction of the flat plate 1120a.
  • the leg portion 1120b or the leg portion 1120c is hardly detached from the substrate 1150, and the material has shape memory property. 1120 becomes difficult to peel off from the accommodating portion 1130.
  • the leg 1120b or the leg 1120c may be a non-linear shape with a circular or polygonal cross section. That is, it may be bent.
  • a circle includes an ellipse.
  • the number of sides constituting the polygon is not particularly limited, and may be, for example, a triangle, a quadrangle, or an octagon.
  • the surface area of the first surface 1121 of the flat plate portion 1120a may be larger than the surface area of the second surface 1122.
  • the shape of the flat plate portion 1120a and the shape of the accommodating portion 1130 are not particularly limited, and may be a columnar shape, a truncated cone shape, a polygonal columnar shape, or a polygonal frustum shape.
  • the first surface 1121 of the flat plate portion 1120a is disposed so as to be in contact with a temperature changing portion described later directly or indirectly. Accordingly, heat can be transferred to the material 1120 having shape memory property, and the material 1120 having shape memory property can be deformed.
  • the flat plate portion 1120a may be a thin film that is thin enough to deform the material 1120 having shape memory by heat transferred from the temperature changing portion.
  • the first surface 1151 constituting the flow path 1110 is formed as flat as possible.
  • the first surface 1151 of the substrate 1150 and the surface 1122 in contact with the fluid of the substance 1120 having shape memory properties are preferably flush with each other.
  • being flush means that the flat surface has no step, and the interface (connection) between the substrate 1150 and the material 1120 having shape memory property is in contact with the first surface 1151 (or the surface 1122). Part)), it means that there is no step or it is flat enough that it does not adversely affect the operation of the valve.
  • the step is 10 ⁇ m or less, for example 5 ⁇ m or less, for example 1 ⁇ m or less, for example 0.5 ⁇ m or less.
  • the first surface 1151 constituting the flow path 1110 and the surface 1122 of the substance 1120 having shape memory can be formed as flat as possible.
  • a flat lid substrate is disposed on the surface 1151 of the substrate 1150 or bonded removably to cover the opening of the housing portion 1130 and a material having shape memory property is injected from the supply portion 1160.
  • the first surface 1151 constituting the channel 1110 and the surface 1122 of the substance 1120 having shape memory property can be formed as flat as possible.
  • FIGS. 12A to 12C are schematic cross-sectional views showing the structure of the fluidic device 1200 of this embodiment.
  • the valve of the fluidic device 1200 is a normally open valve, but may be a normally closed valve.
  • the fluidic device 1200 includes a flow path substrate 1240 having a flow path 1210 and a substrate 1250 bonded to the flow path substrate 1240 at the first surface 1251.
  • a concave portion 1230 is locally provided on the first surface 1251 of the substrate 1250, and the concave portion 1230 constitutes an accommodating portion 1230 for accommodating the substance 1220 having shape memory properties.
  • the substrate 1250 includes a first substrate 1250a including the first surface 1251 and bonded to the flow path substrate 1240, and a second substrate 1250b bonded to the first substrate 1250a and a surface 1253 opposite to the first surface 1251.
  • the accommodating portion 1230 includes a through hole 1260a that penetrates the first substrate 1250a, and the second substrate 1250b is provided with a support portion 1254 that supports the material 1220 having shape memory at the tip, and is inserted into the through hole 1260a.
  • Convex part 1255 is provided.
  • substrate 1250b is locally arrange
  • the substrate 1250b may include a supply portion 1260 that penetrates the surface 1252 and the bottom portion 1231 of the substrate 1250b and serves as an inlet for the substance 1220 having shape memory properties. Further, the substrate 1250b may further include a discharge portion 1270 that passes through the second surface 1252 and the bottom portion 1231 and serves as an air vent when injecting the material 1220 having shape memory properties.
  • a substance 1220 having shape memory property can be injected from the supply unit 1260.
  • the discharge portion 1270 it is easy to remove the air from the storage portion 1230, and the material 1220 having shape memory property can be reliably injected by the storage portion 1230.
  • FIG. 12B is a schematic cross-sectional view showing the structure of the first substrate 1250a
  • FIG. 12C is a schematic cross-sectional view showing the structure of the second substrate 1250b.
  • the substrate 1250 includes the first substrate 1250a and the second substrate 1250b, so that a temperature change portion can be formed on the surface of the support portion 1254, for example.
  • the temperature changing portion include an electrothermal conversion portion such as a heater formed from wiring, and a photothermal conversion portion such as a photothermal conversion layer that performs heating by irradiation with laser light or the like.
  • the first surface 1251 constituting the flow path 1210 it is preferable to form the first surface 1251 constituting the flow path 1210 as flat as possible.
  • the substrate 1250 since the substrate 1250 includes the first substrate 1250a and the second substrate 1250b, a temperature change portion can be formed inside the substrate 1250 (for example, the surface of the support portion 1254). . There is no need to arrange the temperature changing portion on the first surface 1251, and the first surface 1251 can be formed as flat as possible without affecting the processing accuracy of the flow path 1210.
  • the temperature change portion is preferably formed in the very vicinity of the material 1220 having shape memory properties, and the viewpoint of efficiently conducting heat. Therefore, it is preferable that the thickness of the substance 1220 having shape memory property is small.
  • the substrate 1250 since the substrate 1250 includes the first substrate 1250a and the second substrate 1250b, the temperature change portion can be formed in the very vicinity of the substance 1220 having shape memory property, The material 1220 having shape memory properties can be thinned.
  • FIGS. 13A to 13C are schematic cross-sectional views showing the structure of the fluidic device 1300 of this embodiment.
  • the valve of the fluid device 1300 is a normally open valve, but may be a normally closed valve.
  • the fluid device 1300 includes a flow path substrate 1340 having a flow path 1310, and a substrate 1350 bonded to the flow path substrate 1340 on the first surface 1351.
  • a concave portion 1330 is locally provided on the first surface 1351 of the substrate 1350, and the concave portion 1330 constitutes a housing portion 1330 for housing the substance 1320 having shape memory properties.
  • the substrate 1350 includes a first substrate 1350a including the first surface 1351 and bonded to the flow path substrate 1340, and a second substrate 1350b bonded to the first substrate 1350a and the surface 1353 opposite to the first surface 1351.
  • the accommodating portion 1330 includes a through hole 1360a that penetrates the first substrate 1350a, and the second substrate 1350b is provided with a support portion 1354 that supports a material 1320 having shape memory at the tip, and is inserted into the through hole 1360a.
  • Convex part 1355 is provided.
  • the substrate 1350b may include a supply portion 1360 that penetrates the surface 1352 and the bottom portion 1331 of the substrate 1350b and serves as an inlet for the substance 1320 having shape memory properties.
  • the substrate 1350b may further include a discharge portion 1370 that passes through the second surface 1352 and the bottom portion 1331 and serves as an air vent when injecting the material 1220 having shape memory properties.
  • the effect which the discharge part 1370 produces is the same as the effect which the discharge part 1270 in the fluid device 1200 of 3rd Embodiment mentioned above shows.
  • the side surface 1356 of the convex portion 1355 is an inclined surface that increases in diameter toward the surface 1357 of the second substrate 1350b.
  • the temperature change part provided in the bottom part 1331 is an electrothermal conversion part, it can wire easily because the side surface 1356 is an inclined surface. For example, wiring can be performed on the side surface 1356 without disconnection by sputtering, photolithography, screen printing, or the like.
  • FIG. 13B is a schematic cross-sectional view showing the structure of the first substrate 1350a
  • FIG. 13C is a schematic cross-sectional view showing the structure of the second substrate 1350b.
  • the substrate 1350 includes the first substrate 1350a and the second substrate 1350b.
  • the effect obtained by the substrate 1250 of the fluid device 1200 according to the third embodiment described above is the first substrate 1250a.
  • the second substrate 1250b are the same as the effects produced.
  • FIG. 20 is a schematic cross-sectional view showing the structure of the fluidic device 2000 of the present embodiment.
  • the fluidic device 2000 includes a flow path 2010 and valves 2020 and 2030.
  • Valves 2020 and 2030 may be normally open valves or normally closed valves.
  • the flow path 2010 may be arranged three-dimensionally (three-dimensionally).
  • the substance having shape memory property is locally provided in the valve 2020 and the valve 2030, and the flow path 2010 includes a portion that does not contact the substance having shape memory property.
  • the valve may be manufactured by locally providing a substance having shape memory after the flow path 2010 is formed on the substrate.
  • a valve having a flow path shape memory property may be locally provided to form a valve, and the remaining flow path may be formed.
  • a plurality of flow paths may be arranged three-dimensionally.
  • valve can be disposed locally, a fluid device having a high degree of design freedom can be configured in this way.
  • a normally closed valve and a normally open valve may be disposed to face each other.
  • FIG. 21 is a schematic diagram showing the basic configuration of the fluidic device 241 of the present embodiment.
  • the fluid device 241 of the present embodiment includes a normally open valve 242 disposed on the first surface and a normally closed valve 243 disposed on the second surface facing the first surface. And.
  • the normally open valve 242 and the normally closed valve 243 are disposed to face each other.
  • the fluid bypasses the normally closed valve 243 functioning as a weir through the normally open valve 242 formed in the lower part of the flow path 240.
  • the normally open valve 242 is closed by the heating means 242a provided at the lower part of the normally open valve 242, and the fluid flow is blocked by the normally close valve 243.
  • the normally closed valve 243 is opened by the heating means 243a provided on the upper part of the normally closed valve 243, and the fluid that has been dammed flows out again.
  • the flow of the fluid can be flexibly controlled because the valve is deformed from the open state to the closed state and from the closed state to the open state as a whole. Further, in the fluid device 241 of the present embodiment, since the valve structure in which the substance having shape memory property is locally provided in the flow path, the normally open valve and the normally closed valve can be simply and at low cost. A structure facing the valve can be manufactured.
  • the size of the flow path can be changed by heating by adjusting the deformation amount of the substance having shape memory property.
  • the valve variously “half-open”, the width and depth of the flow path are limited, and the fluid flow can be selectively controlled freely.
  • the width of the flow path constituting the flow path device to the millimeter size, the amount of change in the substance having shape memory property according to the change in the heating condition is strictly controlled.
  • molecules having a desired size in the fluid can be selected as shown in FIG. 22B without providing a separate gel filtration column device or the like in the fluid device.
  • red blood cells and circulating tumor cells (CTC; circulating blood cancer cells) in blood can be sorted by size.
  • CTC circulating tumor cells
  • FIG. 22C when a plurality of structures are arranged in the flow path, by adjusting the distance between the structures (microstructures) in advance, molecules of a desired size in the liquid can be obtained. Sorting can be done.
  • the flow of fluid can be selectively controlled freely by controlling the deformation amount of the structure according to the process.
  • a structure was used to select a molecule of a desired size in the fluid and temporarily damped it, and then the structure was dammed by being completely opened by heating or the like.
  • a microstructure is provided in the fluidic device that allows small particles to pass through and large particles to be damped. In this case, the structure functions as a normally closed valve only for large particles. After that, by deforming the structure and opening the valve so that large particles pass through, it is possible to sort only large particles.
  • the valve in the present embodiment can function as a filter in the flow path by selectively controlling the deformation amount of the structure.
  • the fluidic device of the present embodiment may include a plurality of structures, and the plurality of structures may be made of a material having shape memory properties that are housed in independent housing portions. Further, the deformation amounts of the plurality of structures may be the same or different. The deformation amount of the structure body may be controlled by the heating time, or a structure body having a different deformation amount may be made. In the fluidic device of the present embodiment, when the plurality of structures are made of substances having independent shape memory properties, it is possible to create a plurality of structures having different deformation amounts easily and at low cost.
  • the present invention provides a fluid device manufacturing method comprising a flow path substrate having a flow path and a substrate bonded to the flow path substrate on a first surface, the flow path substrate having a flow path. And a step (a) of preparing a substrate having a housing portion locally formed at a position facing the flow path on the first surface, and a step of housing a substance having shape memory property in the housing portion ( b) and a method of manufacturing a fluidic device.
  • the above-described fluidic device can be manufactured.
  • a plurality of embodiments of a fluid device manufacturing method will be described.
  • FIG. 10 is a schematic cross-sectional view showing a fluid device including a flow path substrate 1040 having a flow path 1010 and a substrate 1050 bonded to the flow path substrate 1040 on the first surface 1051.
  • a housing portion (concave portion) 1030 is locally formed at a position facing the flow path 1010 on the first surface 1051 of the substrate 1050.
  • the formation method in particular of the recessed part 1030 is not restrict
  • a substance 1020 having shape memory properties is accommodated.
  • the storage of the substance 1020 having shape memory property can be performed by, for example, injecting a shape memory polymer composition before curing from the opening of the storage unit 1030 and curing the composition in the storage unit 1030. .
  • FIG. 11A is a schematic cross-sectional view showing a fluid device including a flow path substrate 1140 having a flow path 1110 and a substrate 1150 bonded to the flow path substrate 1140 on the first surface 1151.
  • a housing portion (concave portion) 1130 is locally provided on the first surface of the substrate 1150.
  • the substrate 1150 includes a supply unit 1160 that passes through the second surface 1152 opposite to the first surface 1151 and the bottom 1131 of the housing unit 1130 and serves as an inlet for the substance 1120 having shape memory properties.
  • step (a) may be performed in the same manner as in the first embodiment described above.
  • step (b) the shape memory polymer composition shown in FIG. 11B is injected by injecting the shape memory polymer composition before curing from the supply unit 1160 into the housing unit 1130 and curing the composition in the housing unit 1030.
  • the substance 1120 having the above is accommodated in the accommodating portion 1130.
  • FIG. 14 is a schematic cross-sectional view for explaining a third embodiment of the fluid device manufacturing method.
  • the concave portion 1430 is locally formed on the first surface 1451 of the substrate 1450 to form the accommodating portion 1430.
  • a supply portion 1460 that penetrates the second surface 1452 of the substrate 1450 and the bottom portion 1431 of the recess 1430 and serves as an inlet for the substance 1420 having shape memory properties may be formed.
  • a discharge portion 1470 that penetrates through the second surface 1452 of the substrate 1450 and the bottom portion 1431 of the recess 1430 and serves to release air when the material 1420 having shape memory property is injected may be further formed.
  • the formation method in particular of the recessed part 1430, the supply part 1460, and the discharge part 1470 is not restrict
  • a lid substrate 1480 that closes the accommodating portion 1430 is bonded to the first surface 1451 of the substrate 1450.
  • the lid substrate 1480 may contact the first surface 1451 of the substrate 1450 so that the shape memory polymer composition described later does not leak.
  • the material of the lid substrate 1480 is not particularly limited, and examples thereof include glass, metal, semiconductor, plastic, and rubber.
  • the lid substrate 1480 is preferably as flat as possible on the first surface 1451 of the substrate 1450.
  • the first surface 1451 can be formed as flat as possible when the substance 1420 having shape memory property is accommodated in the accommodating portion 1430. That is, the lid substrate 1480 has a transfer surface 1481 that is transferred to the substance 1420 having shape memory properties at a position facing the housing portion 1430.
  • the substance 1420 having shape memory property is accommodated.
  • the material 1420 having shape memory property can be accommodated by injecting a shape memory polymer composition before curing from the supply unit 1460 using a syringe or the like and curing the composition.
  • the shape memory polymer composition can be cured by heat curing, photocuring, or the like.
  • the shape memory polymer composition may shrink when cured. Therefore, the lid substrate 1480 may have a recess having a depth corresponding to the amount of contraction of the shape memory polymer 1420 accommodated in the accommodating portion 1430. Thereby, the 1st surface 1451 can be formed more flatly.
  • the temperature is within a temperature range of the shape recovery temperature of the substance having shape memory property and less than the melting point.
  • the method may further include a step (c) of forming a structure body that is deformed by applying an external force to the material having shape memory property accommodated in the accommodating portion, and returns to the original shape by heating. Step (c) will be described later.
  • FIG. 15A to 15C are schematic cross-sectional views illustrating a fourth embodiment of a fluid device manufacturing method.
  • a recess 1530 having a bottom 1531 is locally formed on the first surface 1551 of the substrate 1550, and a storage portion 1530 in which a substance 1520 having shape memory properties is stored.
  • a substance 1520 having shape memory properties is stored.
  • step (a2) a supply portion 1560 that penetrates the second surface 1552 of the substrate 1550 and the bottom portion 1531 of the concave portion 1530 and serves as an injection port of the substance 1520 having shape memory properties is formed. Further, a discharge portion 1570 that passes through the second surface 1552 of the substrate 1550 and the bottom portion 1531 of the recess 1530 and serves as an air vent when injecting the material 1520 having shape memory property may be further formed.
  • the formation method in particular of the recessed part 1530, the supply part 1560, and the discharge part 1570 is not restrict
  • step (b1) the shape memory polymer composition before curing is injected from the supply unit 1560 using a syringe or the like, and the material 1520 having shape memory properties is accommodated by curing the composition.
  • the shape memory polymer composition can be cured by heat curing, photocuring, or the like.
  • a normally open valve, a normally closed valve, a series valve, etc. are formed by performing at least one of the following.
  • a normally open valve molding process and a normally closed valve molding process are combined.
  • FIG. 15B shows the structure of a molded first normally open valve.
  • the shape memory polymer 1520 is provided with a first recess by applying an external force to the shape memory polymer 1520 at a temperature in the range of the shape recovery temperature of the shape memory polymer 1520 and lower than the melting point, and the first normally open valve is provided on the shape memory polymer 1520. Mold.
  • the shape memory polymer 1520 is provided with a first through-hole by applying an external force to the shape memory polymer 1520 at a temperature in the range of the shape recovery temperature of the shape memory polymer 1520 and below the melting point, and the shape memory polymer 1520 is provided with a second normally open valve. Mold.
  • a second recess is formed in the shape memory polymer 1520 by molding or machining at a temperature lower than the melting point of the shape memory polymer 1520, and at a temperature in the temperature range of the shape memory polymer 1520 to a temperature higher than the shape recovery temperature and lower than the melting point. An external force is applied to the second recess to flatten the second recess, and the first normally closed valve is molded on the shape memory polymer 1520.
  • a second through-hole is formed in the shape memory polymer 1520 by molding or machining at a temperature lower than the melting point of the shape memory polymer 1520, and at a temperature in a temperature range not lower than the shape recovery temperature of the shape memory polymer 1520 and lower than the melting point. Then, an external force is applied to the second through hole to flatten the second through hole, and a second normally closed valve is formed on the shape memory polymer 1520.
  • FIG. 15C shows a schematic cross-sectional view of a fluidic device 1500 manufactured by the manufacturing method of the present embodiment.
  • a substrate 1350 of a fluidic device 1300 manufactured by the manufacturing method of the present embodiment includes a first substrate 1350a including a first surface 1351 and bonded to a flow path substrate 1340, a first substrate 1350a, 2nd board
  • the first substrate 1350a is formed with a through-hole 1360a serving as a storage portion 1330 in which the substance 1320 having shape memory property is stored.
  • the second substrate 1350b is provided with a support portion 1354 that supports the substance 1320 having the shape memory property at the tip, and is inserted into the through hole 1360a.
  • a supply portion 1360 that penetrates the portion 1355, the surface 1352 opposite to the surface provided with the convex portion 1355, and the support portion 1354 and serves as an inlet for the material 1320 having shape memory properties, and the material 1320 having shape memory properties
  • a temperature changing portion (not shown) for changing at least a part of the temperature.
  • a discharge portion 1370 may be further formed, which passes through the surface 1352 opposite to the surface provided with the convex portion 1355 and the support portion 1354 and serves as an air vent when injecting the material 1320 having shape memory properties.
  • the temperature change portion may be formed on the surface of the support portion 1354.
  • the temperature change unit may be an electrothermal conversion unit that converts electrical energy such as a heater into thermal energy, for example, and may be a photothermal conversion unit that converts optical energy such as laser light into thermal energy.
  • a heater made of wiring it can be formed by sputtering of Cr / Au thin film, photolithography, screen printing, or the like.
  • step (a3) the first substrate 1350a and the second substrate 1350b are joined by inserting the convex portion 1355 into the through hole 1360a to form the accommodating portion 1330 including the through hole 1360a and the support portion 1354.
  • the shape memory polymer composition before curing is injected from the supply unit 1360 using a syringe or the like, and the material 1320 having shape memory is accommodated by curing the composition.
  • the shape memory polymer composition can be cured by heat curing, photocuring, or the like.
  • a step of bonding a lid substrate that closes the accommodating portion 1330 to the first surface 1351 of the substrate 1350a may be provided before the step (b1 ′).
  • the lid substrate may be peeled off before the step (c).
  • a normally open valve, a normally closed valve, a series valve and the like are formed in the same manner as in the step (c) of the third embodiment described above.
  • step (d) a flow path substrate 1340 having a flow path is bonded to the first surface 1351 of the substrate 1350.
  • Example 1 A flow channel device shown in FIG. 13A was produced. Hereinafter, the manufacture of the flow path device of Example 1 will be described with reference to FIGS. 13A, 16A, 16B, and 17A to 17C.
  • a through-hole 1360a was formed in an acrylic plastic substrate (hereinafter referred to as “MS substrate”) to produce a first substrate 1350a.
  • FIG. 16A is a photograph showing a pattern of the heater formed on the surface of the MS substrate.
  • FIG. 16B is a photograph showing a substrate 1350b having a convex portion with a heater pattern formed on the top.
  • the diameter of the support portion 1354 was 2 mm, and the diameter of the bottom surface of the convex portion 1355 was 4 mm.
  • FIG. 17A is a photograph showing the second substrate 1350b after wiring formation.
  • first substrate 1350a and the second substrate 1350b were joined. Specifically, first, toluene vapor was exposed for 30 minutes to the first substrate 1350a on which no heater wiring was formed. Subsequently, vacuuming was performed for 3 minutes to evaporate toluene molecules on the surface of the first substrate 1350a.
  • first substrate 1350a and the second substrate 1350b were joined by inserting the convex portion 1355 of the second substrate 1350b into the through-hole 1360a of the first substrate 1350a and press-bonding with a pressure of 6 MPa for 30 minutes.
  • FIG. 17B is a photograph showing a state in which the first substrate 1350a and the second substrate 1350b are bonded.
  • PCL Polycaprolactone
  • IRGACURE819 bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide
  • a glass substrate coated with a fluororesin (trade name “CYTOP (CTL-809M)” manufactured by Asahi Glass Co., Ltd.) was used as a lid substrate and was brought into close contact with the first surface 1351 of the substrate 1350.
  • the above composition was filled from the supply unit 1360 to the housing unit 1330 using a syringe. Subsequently, UV light having an illuminance of 7.8 mW / cm 2 and a wavelength of 365 nm is irradiated from the upper part of the lid substrate toward the housing portion 1330 for 4 minutes to crosslink and cure the PCL in the composition, and the shape memory polymer is cured. Obtained.
  • a flow path substrate 1340 having a flow path formed of an MS substrate was bonded to the substrate 1350. Specifically, toluene vapor was exposed to the flow path substrate 1340 for 30 minutes. Subsequently, evacuation was performed for 3 minutes to evaporate toluene molecules on the surface of the flow path substrate 1340.
  • the flow path substrate 1340 and the first surface 1351 of the substrate 1350 were laminated, and the flow path substrate 1340 and the substrate 1350 were joined by pressure bonding at a pressure of 6 MPa for 30 minutes.
  • FIG. 17C is a photograph showing the completed fluidic device of Example 1.
  • Example 1 (Valve drive) The valve of the fluid device of Example 1 was driven. First, a conductive silver paste was used to connect the conducting wire to the fluidic device. Next, a liquid containing a fluorescent dye was sent to the flow path of the fluid device.
  • FIG. 18A is a graph showing the relationship between applied voltage and measured fluorescence intensity and time.
  • FIG. 18B is a fluorescence micrograph of the channel when the valve is open and the channel when the valve is closed.
  • FIG. 18C is a graph showing the relationship between valve response time and power consumption.
  • Example 2 (Production of fluidic devices with integrated valves) A fluid device of Example 2 in which nine valves were integrated was produced by the same procedure as in Example 1.
  • FIG. 19A is a photograph showing a second substrate having a convex portion with a heater pattern formed on the top.
  • FIG. 19B is a photograph showing the second substrate after wiring formation.
  • FIG. 19C is a photograph showing a state in which the first substrate and the second substrate are bonded.
  • FIG. 19D is a photograph showing the completed fluidic device of Example 2.
  • the present invention it is possible to provide a valve that can be manufactured easily and at a low cost and has a high degree of freedom in designing a fluid device. Moreover, the flow path device provided with the said valve
  • Normally open valve 210, 240, 310, 410, 510, 610, 1010, 1110, 1210, 1310, 2010 ... flow path, 2020, 2030 ... valve , 220, 220 a, 320, 420, 520, 620 a, 620 b, 820, 1020, 1120, 1220, 1320, 1420, 1520...
  • Shape memory polymer (substance having shape memory), 230, 330, 430, 530, 830 , 1030, 1130, 1230, 1330, 1430, 1530 ...
  • receiving portion (recess), 240, 340, 440, 540, 640, 1040, 1140, 1240, 1340, 1540 ... flow path substrate, 242a, 243a ... heating means, 245, 445, 645a, 6 5b ... weir, 250, 350, 450, 550, 650, 1050, 1150, 1250, 1350, 1450, 1550 ... substrate, 251, 351, 451, 551, 651, 1051, 1151, 1251, 1351, 1451, 1551 ... 1st surface, 243,400,500,660,740,930 ... normally closed valve, 241,600,700,900,1000,1100,1200,1300,1500,2000 ...
  • Fluid device 680,750,950 ... Series valve, 710, 910 ... Driving source, 720 ... Upstream channel, 721 ... Branch channel, 722 ... Branch point, 723, 724, 725 ... Downstream channel, 730a, 740a, 750a, 930a, 940a, 950a ... Temperature changing portion, 830a ... photothermal conversion layer, 921, 922, 9 3,924,925 ... Liquid reservoir, 960 ... Purification device, 1010a ... First flow path, 1010b ... Second flow path, 1131, 1231, 1331, 1431, 1531 ... Bottom, 1152, 1252, 1352, 1452, 1552 ...

Landscapes

  • Micromachines (AREA)
  • Temperature-Responsive Valves (AREA)

Abstract

　L'invention concerne une vanne dans laquelle une substance ayant des propriétés de mémoire de forme est accueillie dans une partie enveloppe située sur un trajet d'écoulement, et la substance ayant des propriétés de mémoire de forme est déformée, ce qui régule le débit du fluide dans le trajet d'écoulement. Cette vanne peut être fabriquée simplement et à faible coût, et offre un degré élevé de liberté de conception de dispositifs à fluide, et elle est donc utile.
PCT/JP2016/054546 2015-02-25 2016-02-17 Vanne, dispositif à fluide et procédé de production de dispositif à fluide WO2016136551A1 (fr)

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WO2019187294A1 (fr) * 2018-03-30 2019-10-03 富士フイルム株式会社 Embout, dispositif et procédé de mélange
WO2019207644A1 (fr) * 2018-04-24 2019-10-31 株式会社ニコン Dispositif fluidique, dispositif de valve et dispositif de détection

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WO2013153912A1 (fr) * 2012-04-12 2013-10-17 国立大学法人東京大学 Soupape, dispositif microfluidique, microstructure, siège de soupape, procédé de fabrication de siège de soupape, et procédé de fabrication de dispositif microfluidique

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JPH03181684A (ja) * 1989-12-11 1991-08-07 Matsushita Electric Ind Co Ltd 流体制御装置
WO2013153912A1 (fr) * 2012-04-12 2013-10-17 国立大学法人東京大学 Soupape, dispositif microfluidique, microstructure, siège de soupape, procédé de fabrication de siège de soupape, et procédé de fabrication de dispositif microfluidique

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019187294A1 (fr) * 2018-03-30 2019-10-03 富士フイルム株式会社 Embout, dispositif et procédé de mélange
JPWO2019187294A1 (ja) * 2018-03-30 2021-04-08 富士フイルム株式会社 チップ、混合装置及び混合方法
JP7123125B2 (ja) 2018-03-30 2022-08-22 富士フイルム株式会社 チップ、混合装置及び混合方法
US11448332B2 (en) 2018-03-30 2022-09-20 Fujifilm Corporation Chip, mixing device, and mixing method
WO2019207644A1 (fr) * 2018-04-24 2019-10-31 株式会社ニコン Dispositif fluidique, dispositif de valve et dispositif de détection
JPWO2019207644A1 (ja) * 2018-04-24 2021-05-27 株式会社ニコン 流体デバイス、バルブ装置及び検出装置
JP7192859B2 (ja) 2018-04-24 2022-12-20 株式会社ニコン 流体デバイス、バルブ装置及び検出装置

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