KR20080112573A - Fabricating method of valve unit for controlling microfluid, valve unit for controlling microfluid, and microfluidic device with the valve unit - Google Patents

Abstract

A fabricating method of a valve unit for controlling microfluid is provided to improve the productivity and to save the manufacturing costs by forming all valves of substrate at the same time through heating the whole of a substrate once. A fabricating method of a valve unit for controlling microfluid comprises a valve injection step for injecting the fused valve fill into a valve injection hole(112) connected to channels(115) for transferring the fluid, wherein the valve fill includes a phase change material which is fused at the room temperature if it is solid-state but it absorbs the energy; a valve curing step; a valve melt step for melting the hardened valve fill to be movable and moving at least a part to a channel; and a valve re-curing step for forming valves(125) closing a channel by curing the moved valve fill again.

Description

Fabrication method of valve unit for controlling microfluid, valve unit for controlling microfluid, and microfluidic device with the valve unit

1 is a partial cutaway perspective view of a valve unit according to a preferred embodiment of the present invention.

2A to 2D are cross-sectional views sequentially illustrating a method of manufacturing the valve unit of FIG. 1.

Figure 3 is a plan view showing a disk-type microfluidic device having a plurality of valve units of the present invention.

<Description of the symbols for the main parts of the drawings>

30 ... spindle motor 40 ... laser light source

50 A, 50 B, 50 C ... dispenser 100 ... microfluidic device

101 ... substrate 102 ... bottom plate

103 ... Top plate 110A, 110B, 110C ... valve unit

112 ... valve injection hole 115 ... channel

116, 117 Channel groove 118 Projection

119 ... the valve gap 125 ... the valve

126 ... micro-heating particles 130 ... chamber

The present invention relates to microfluidics, and more particularly, to a method of manufacturing a microfluidic control valve unit for controlling a flow of a fluid flowing along a channel, a microfluidic control valve unit, and the valve unit. It relates to a microfluidic device having a.

In the field of microfluidics, research on microfluidic devices that can perform various biochemical reactions using biochemical fluids such as blood and urine, and detect the results of the reactions is being actively conducted. have. The microfluidic device may comprise, for example, a chip-like device called a lab-on-a-chip, and may be rotatable, called a lab-on-a-disk. It may also include a device in the form of a disk. The microfluidic device may be provided with a microchannel for transporting a fluid, and may be provided with a microfluidic control valve unit for controlling the flow of fluid flowing along the microchannel.

Anal. Published in 2004. Chem. Vol. The biochemical reaction substrates known from pages 1824 to 1831 of 76 and the biochemical reaction substrates from pages 3740 to 3748 of the same document are provided with valves composed of only paraffin wax, and a heating means for melting the paraffin wax is provided. Equipped. However, the valve provided therein requires a considerable amount of paraffin wax to close the microchannel, and a large heating means must be provided to melt the large amount of paraffin wax, thereby miniaturizing and integrating the substrate for biochemical reaction. it's difficult. In addition, heating takes a long time until the melting of paraffin wax, and precise control of the channel opening time is difficult.

The present invention is to solve the above problems, to provide a method for manufacturing a microfluidic control valve unit capable of improving productivity and reducing manufacturing costs, a microfluidic control valve unit having a small valve size, and a microfluidic device having the same. It is technical problem to do.

In order to achieve the above technical problem, the present invention, in the valve injection hole connected to the channel (transport) for transporting the fluid, including a phase transition material (phase transition material) that is melted when absorbing the solid state or energy at room temperature A valve injection step of injecting the made valve filling in a molten state; A valve curing step of curing the valve filling; A valve melting step of fluidly melting the cured valve fill to move at least a portion into the channel; And a valve re-curing step of hardening the valve filling remaining in the valve gap again to form a valve closing the channel.

The present invention also provides a channel for transporting a fluid; A valve injection hole connected to the channel for injecting a valve filler including a phase transition material that melts when absorbing a solid state or energy at room temperature in a molten state; And a valve filling the valve injection hole by hardening on the channel to close the channel and absorbing energy to melt the valve to open the channel again. Provided is a valve unit, and a microfluidic device including at least one of the valve units, wherein an inner diameter of the inflow portion of the inflow portion is larger than an inner diameter of the outflow portion of the valve filling material.

Preferably, the valve injection hole may have an inner diameter of an inlet portion through which the valve filling is introduced, and an inner diameter of an outlet portion through which the valve filling is discharged.

Preferably, in the valve injection step, the valve filling may be injected so as not to leave the valve injection hole.

Preferably, in the valve melting step, the molten valve filling may move into the channel by capillary force.

Advantageously, said valve curing step and valve resetting step may comprise the step of not energizing said molten valve fill.

Preferably, the valve melting step may include supplying thermal energy to the cured valve fill.

Preferably, the channel is partially overlapped with the valve injection hole and has a protrusion having a first channel depth, a channel groove portion extending in the channel direction with a second channel depth being stepped with respect to the protrusion, A valve gap may be provided at a portion of the protrusion that does not overlap with the valve injection hole.

Advantageously, said valve melting step may comprise leaving at least a portion of said molten valve fill in said valvegap.

Preferably, the valve unit is provided in a microfluidic device, the manufacturing method of the valve unit further comprises a substrate preparation step of preparing a substrate of the microfluidic device having the channel and the valve injection hole Can be.

Preferably, the channel is partially overlapped with the valve injection hole and has a protrusion having a first channel depth, a channel groove portion extending in the channel direction with a second channel depth being stepped with respect to the protrusion, A valve gap may be provided in a portion of the protrusion that does not overlap with a valve injection hole, and the valve melting step may include leaving at least a portion of the molten valve filling in the valve gap.

Preferably, the microfluidic device includes a plurality of valve units, the substrate prepared in the substrate preparation step includes at least one channel and a plurality of valve injection holes connected to the at least one channel. The valve injection step may include injecting the molten valve filling into all valve injection holes provided in the substrate.

Preferably, the valve injection step may include the step of simultaneously injecting the molten valve filling in at least two valve injection holes of the plurality of valve injection holes provided in the substrate.

Preferably, the molten valve filling can be injected simultaneously into at least two valve injection holes using at least two dispensers capable of injecting the valve filling into one valve injection hole at a time. .

Preferably, the valve melting step may include heating the substrate to simultaneously melt valve fills injected into all the valve injection holes.

Preferably, the substrate can be heated by conduction, convection, or radiant heat.

Preferably, the method may further include a valve injection hole closing step of closing the valve injection hole after the valve injection step.

Preferably, the phase change material of the valve filling may be a wax, a gel, or a thermoplastic resin.

Preferably, the wax may be at least one selected from the group consisting of paraffin wax, microcrystalline wax, synthetic wax, and natural wax. .

Preferably, the gel may be at least one selected from the group consisting of polyacrylamide, polyacrylates, polymethacrylates, and polyvinylamides.

Preferably, the thermoplastic resin is a cyclic olefin copolymer (COC), polymethylmethacrylate (PMMA), polycarbonate (PC), polystyrene (PS), polyoxymethylene (POM), perfluoralkoxy (PFA), polyvinylchloride (PVC), polypropylene (PP) It may be at least one selected from the group consisting of polyethylene terephthalate (PET), polyetheretherketone (PEEK), polyamide (PA), polysulfone (PSU), and polyvinylidene fluoride (PVDF).

Preferably, the valve filling may include a plurality of fine heating particles dispersed in the phase change material and absorbing energy to generate heat.

Preferably, the fine heating particles may be metal oxide particles.

Preferably, the metal oxide may include at least one selected from the group consisting of Al ₂ O ₃ , TiO ₂ , Ta ₂ O ₃ , Fe ₂ O ₃ , Fe ₃ O _4, and HfO ₂ .

Preferably, the micro heating particles may be polymer particles, quantum dots, or magnetic beads.

Hereinafter, a method for manufacturing a microfluidic control valve unit, a microfluidic control valve unit, and a microfluidic device including the valve unit will be described in detail with reference to the accompanying drawings.

1 is a partial cutaway perspective view showing a valve unit according to a preferred embodiment of the present invention, Figure 3 is a plan view showing a microfluidic device in the form of a disk having a plurality of valve units of the present invention.

Referring to FIG. 1, a valve unit 110A according to a preferred embodiment of the present invention includes a channel 115 for transferring fluid, a valve injection hole 112 connected to the channel 115, and the channel. A valve 125 for closing 115 is provided. The channel 115 is partially overlapped with the valve injection hole 112 and has a protrusion 118 having a first channel depth D1, and is recessed with respect to the protrusion 118 so as to have a second channel depth ( D2) and channel grooves 116 and 117 extending along the direction in which the channel 115 extends. In a preferred embodiment the first channel depth D1 is approximately 0.1 mm and the second channel depth D2 is approximately 1 mm, where D2 is greater than D1. The channel grooves 116 and 117 are separated into two parts by the protrusions 118. In addition, the channel 115 includes a valve gap 119 at a portion of the protrusion 118 that does not overlap with the valve injection hole 112. The valve 125 is formed in the valve gap 119. The valve injection hole 112 has an inner diameter of the inlet 113 through which the valve filler 124 is introduced is larger than an inner diameter of the outlet 114 through which the valve filler 124 flows to the channel 115. . This can alleviate the required level of ejection accuracy of the dispenser 50A (see FIG. 2A) for discharging the valve filling 124, thereby manufacturing cost of the valve unit 110A and the microfluidic device 100 (see FIG. 3) having the same. And productivity can be improved.

The channel 115 and the valve injection hole 112 may be formed in the substrate 101. Specifically, the substrate 101 includes a lower plate 102 and an upper plate 103 bonded to each other. The protrusion 118 and the channel grooves 116 and 117 of the channel 115 are formed by etching or micromachining the upper surface of the lower plate 102, and the valve injection hole 112. The silver upper plate 103 may be formed by fine machining. The lower plate 102 and the upper plate 103 may be bonded by using an adhesive or double-sided adhesive tape, and the adhesive surface is oxygen plasma (O ₂ plasma) according to the material of the lower plate 102 and the upper plate 103. After the treatment, the adhesive may be adhered closely or by anodic bonding.

The valve unit 110A further includes a transparent adhesive tape 122 for closing the valve injection hole 112 after injecting the valve filler 124 (see FIG. 2B) into the valve injection hole 112. The transparent adhesive tape 122 is only one example of a means for closing the valve injection hole 112, but the present invention is not limited thereto.

The valve 125 constitutes fluid flow control means for controlling the flow of fluid flowing along the channel 115. Specifically, the valve 125 is a means for openingly blocking the flow of the fluid through the channel 115. The valve 125 closes the channel 115 in a hardened state in the valve gap 119, but melts when the energy is absorbed to open the channel 115. The valve 125 may be melted by, for example, energy of a laser incident from an energy source such as laser light source 40. On the other hand, the laser light source 40 is only one example of an energy source for supplying energy to the valve 125, the present invention is not limited thereto.

The valve 125 includes a phase transition material that melts when absorbing a solid state or energy at room temperature, and a plurality of micro heating particles 126 dispersed in the phase transition material and absorbing energy to generate heat. .

The phase change material may be a wax. The wax melts when heated to turn into a liquid state and expands in volume. As the wax, for example, a paraffin wax, a microcrystalline wax, a synthetic wax, a natural wax, or the like can be employed.

The phase change material may be a gel or a thermoplastic resin. As the gel, polyacrylamide, polyacrylates, polymethacrylates, polyvinylamides, or the like may be employed. In addition, the thermoplastic resin, COC (cyclic olefin copolymer), PMMA (polymethylmethacrylate), PC (polycarbonate), PS (polystyrene), POM (polyoxymethylene), PFA (perfluoralkoxy), PVC (polyvinylchloride), PP (polypropylene), Polyethylene terephthalate (PET), polyetheretherketone (PEEK), polyamide (PA), polysulfone (PSU), and polyvinylidene fluoride (PVDF) may be employed.

The micro heating particles 126 have a diameter of 1 nm to 100 μm to freely pass through the fine channel 115. The micro heating particles 126 have a property of rapidly generating heat by rapidly raising the temperature when electromagnetic wave energy is supplied by a method such as laser (L) irradiation, and evenly dispersed in wax. In order to have such a property, the micro heating particles 126 may have a core including a metal component and a hydrophobic surface structure. For example, the micro heating particle 126 may have a molecular structure including a core made of Fe and a plurality of surfactants bound to the Fe to surround the Fe.

Typically, the micro heating particles 126 are stored in a dispersed state in a carrier oil. The carrier oil is preferably hydrophobic so that the micro heating particles 126 having a hydrophobic surface structure can be evenly dispersed. The valve filler 124 for forming the valve 125 may be manufactured by pouring and mixing the carrier oil in which the fine exothermic particles 126 are dispersed in a molten phase-transfer material.

The micro heating particles 126 are not limited to the above-described polymer particles, and may also be in the form of quantum dots or magnetic beads. In addition, the micro heating particles 126 may be, for example, metal oxide particles such as Al ₂ O ₃ , TiO ₂ , Ta ₂ O ₃ , Fe ₂ O ₃ , Fe ₃ O _4, or HfO ₂ . On the other hand, the valve 125 is not necessarily to include the micro heating particles 126, it may be made of a phase change material only without the micro heating particles (126).

When the laser is irradiated to the valve 125 using the laser light source 40, the micro heating particles 126 included in the valve 125 rapidly generate heat, and the phase change material is rapidly heated. Accordingly, the valve 125 melts rapidly, opening the channel 115 and leaving a state in which fluid can flow along the channel 115.

Referring to FIG. 3, the valve unit 110A may be provided in the microfluidic device 100 capable of performing various functions using biochemical fluids. The channel 115 and the valve injection hole 112 may be formed in the substrate 101 of the microfluidic device 100. The microfluidic device 100 may be provided with a plurality of valve units 110A, 110B, and 110C to control the flow of fluid moving between the plurality of chambers 130. The substrate 101 is a disk-type substrate rotatable mounted on the spindle motor 30, which is an example of the rotation driving means, also called a CD platform. Accordingly, the microfluidic device 100 is a so-called centrifugal force-based microfluidic device in which fluid contained in the substrate 101 is pumped toward the outer circumference of the substrate 101 by centrifugal force due to the rotation of the substrate 101. to be.

2A to 2D are cross-sectional views sequentially illustrating a method of manufacturing the valve unit 110A of FIG. 1. Hereinafter, a method of manufacturing the valve unit 110A will be described with reference to FIGS. 2A to 2D and 3. It will be described a method of manufacturing the microfluidic device 100 having the same.

2A and 3, a substrate 101 having a channel 115 and a valve injection hole 112 is formed to form the valve unit 110A. Since the method of forming the channel 115 and the valve injection hole 112 in the substrate 101 has been described with reference to FIG. 2, redundant description thereof will be omitted. However, since the microfluidic device 100 further includes valve units 110B and 110C having the same structure as the valve unit 110A, the channel and the valve injection hole substrate 101 constituting the valve units 110B and 110C are provided. ) Should be formed.

Then, the valve filler 124 (see FIG. 2B) is injected into the valve injection hole 112 using the dispenser 50A. The valve fill 124 is heated and injected in a molten state. Since the valve filler 124 is cured to form the valve 125, the composition of the valve filler 124 is the same as that of the valve 125 (see FIG. 2D), and the valve ( Since the composition of 125) has been described with reference to FIG. 1, redundant description thereof will be omitted.

As described with reference to FIG. 1, the valve injection hole 112 has an inner diameter of an inflow portion 113 into which the valve filling 124 flows, and an outflow from which the valve filling 124 flows out to move to the channel 115. It is larger than the inner diameter of the unit 114, it is possible to relax the discharge precision required level of the dispenser (50A) for discharging the valve filling 124, which is because of the valve unit (110A) and the microfluidic device 100 having the same Manufacturing costs and productivity can be improved. Meanwhile, in the manufacture of the microfluidic device 100, a valve filling material is provided in the valve injection holes provided in the plurality of valve units 110A, 110B, and 110C of the microfluidic device 100 by using one dispenser 50A. Although 124 may be injected, the valve filler 124 may be injected into the plurality of valve injection holes at the same time by using the plurality of dispensers 50A, 50B, and 50C to improve productivity.

Referring to FIG. 2B, the valve filling 124 injected using the dispenser 50A (see FIG. 2A) is radiated and cured in the top plate 103 at about the same time as it comes into contact with the top plate 103 at room temperature. Although not separately illustrated, the same process as that illustrated in FIG. 2B may also occur in the case of other valve units 110B and 110C of the microfluidic device 100.

Referring to FIG. 2C, after the valve filler 124 is injected, the valve injection hole 112 is closed by, for example, a closing means such as a transparent adhesive tape 122. Thermal energy is then applied to the cured valve fill 124 to melt the valve fill 124. The valve filling 124 may be melted by applying thermal energy to the substrate 101. Specifically, the substrate 101 is placed on a heat plate to heat the substrate 101 by conduction, or The substrate 101 may be placed in an oven to heat the substrate 101 by convection and radiation. On the other hand, in the case of the microfluidic device 100 having a plurality of valve units (see FIG. 4), the valve filling is injected into all the valve injection holes on the substrate 101, and then the substrate 101 is heated to all the injected valves. The filling can be melted at the same time.

When the valve filling 124 is melt expanded by heating the substrate 101, the pressure between the closed valve inlet 112 and the molten valve filling 124 is increased so that the molten valve filling 124 is channel 115. Go to. When a portion of the valve filler 124 moved into the channel 115 enters the valve gap 119, the valve gap 119 is filled with the valve filler 124 by capillary force. The interruption of heating to the substrate 101 causes the valve fill 124 to cure again, forming a valve 125 that closes the channel 115 as shown in FIG. 2D.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible. Therefore, the true scope of protection of the present invention should be defined only by the appended claims.

According to the present invention, the productivity of the valve unit manufacturing can be improved, and the manufacturing cost can be reduced. In particular, in manufacturing a microfluidic device having a plurality of valve units, all the valves of the substrate can be simultaneously formed by heating the entire substrate once without partially heating the substrate several times, thereby improving productivity and reducing manufacturing costs. Is even larger.

In addition, the small size of the valve is advantageous in miniaturizing the microfluidic device.

Claims (42)

A valve injection injecting a valve filling made of a phase transition material, which is melted when absorbing a solid state or energy at room temperature, into a valve injection hole connected to a channel for transporting fluid in a molten state. step; A valve curing step of curing the valve filling; A valve melting step of fluidly melting the cured valve filling to move at least a portion into the channel; And, And a valve re-curing step of hardening the valve filling moved to the channel to form a valve closing the channel. According to claim 1, The valve injection hole is a valve unit manufacturing method, characterized in that the inner diameter of the inlet portion in which the valve filling is inflow is larger than the inner diameter of the outlet portion in which the valve filling flows out. According to claim 1, And injecting the valve filling so that the valve filling does not leave the valve injection hole in the valve injection step. According to claim 1, And wherein said molten valve filling moves to said channel by capillary force in said valve melting step. According to claim 1, The valve curing step and the valve resetting step include the step of not supplying energy to the molten valve filling. According to claim 1, The valve melting step includes supplying thermal energy to the cured valve fill. According to claim 1, The channel is partially overlapped with the valve injection hole, and has a protrusion having a first channel depth, a channel groove portion extending in the channel direction with a second channel depth being stepped with respect to the protrusion, and overlapping with the valve injection hole. And a valve gap in a portion of the protrusion that is not supported. The method of claim 7, wherein Said valve melting step comprises leaving at least a portion of said molten valve filling in said valve gap. According to claim 1, The valve unit is provided in a microfluidic device, The method of manufacturing the valve unit further comprises a substrate preparation step of preparing a substrate of the microfluidic device having the channel and the valve injection hole. The method of claim 9, The channel is partially overlapped with the valve injection hole, and has a protrusion having a first channel depth, a channel groove portion extending in the channel direction with a second channel depth being stepped with respect to the protrusion, and overlapping with the valve injection hole. A valve gap is provided on a portion of the protrusion that is not supported, Said valve melting step comprises leaving at least a portion of said molten valve filling in said valve gap. The method of claim 9, The microfluidic device is provided with a plurality of the valve unit, The substrate prepared in the substrate preparation step includes at least one channel and a plurality of valve injection holes connected to the at least one channel, The valve injection step of the valve unit manufacturing method comprising the step of injecting the molten valve filling to all the valve injection hole provided in the substrate. The method of claim 11, wherein The valve injection step of the valve unit manufacturing method comprising the step of injecting the molten valve filling in at least two valve injection holes of the plurality of valve injection holes provided in the substrate at the same time. The method of claim 12, A valve unit characterized in that the molten valve filling is injected into at least two valve injection holes simultaneously using at least two dispensers capable of injecting the valve filling into one valve injection hole at a time. Manufacturing method. The method of claim 11, The valve melting step includes the step of heating the substrate to melt the valve fillings injected into all the valve injection holes at the same time manufacturing method of a valve unit. The method of claim 14, And the substrate is heated by conduction, convection, or radiant heat. According to claim 1, And a valve injection hole closing step of closing the valve injection hole after the valve injection step. According to claim 1, And the phase change material of the valve filling is wax, gel, or thermoplastic resin. The method of claim 17, The wax is at least one selected from the group consisting of paraffin wax, microcrystalline wax, synthetic wax, and natural wax. Manufacturing method. The method of claim 17, The gel is at least one selected from the group consisting of polyacrylamide, polyacrylates, polymethacrylates, and polyvinylamides. Manufacturing method. The method of claim 17, The thermoplastic resin is a cyclic olefin copolymer (COC), polymethylmethacrylate (PMMA), polycarbonate (PC), polystyrene (PS), polyoxymethylene (POM), perfluoralkoxy (PFA), polyvinylchloride (PVC), polypropylene (PP), PET (polyethylene) terephthalate), PEEK (polyetheretherketone), PA (polyamide), PSU (polysulfone), PVDF (polyvinylidene fluoride) at least any one selected from the group consisting of a valve unit manufacturing method. According to claim 1, The valve filling is dispersed in the phase change material, the manufacturing method of the valve unit, characterized in that it comprises a plurality of fine heating particles that absorb the energy to generate heat. The method of claim 21, The fine heating particle is a manufacturing method of the valve unit, characterized in that the metal oxide particles. The method of claim 22, The metal oxide is Al ₂ O ₃ , TiO ₂ , Ta ₂ O ₃ , Fe ₂ O ₃ , Fe ₃ O ₄ And HfO ₂ The manufacturing method of the valve unit characterized in that it comprises at least one selected from the group consisting of . The method of claim 21, The micro heating particle is a manufacturing method of the valve unit, characterized in that the polymer particles, quantum dot (quantum dot), or magnetic beads (magnetic bead). A channel for transporting the fluid; A valve injection hole connected to the channel for injecting a valve filler including a phase transition material that melts when absorbing a solid state or energy at room temperature in a molten state; And a valve filling the valve injection hole to harden on the channel to close the channel, and to open the channel again when the energy is absorbed and melted. The valve injection hole is a valve unit, characterized in that the inner diameter of the inlet portion in which the valve filling is introduced is larger than the inner diameter of the outlet portion in which the valve filling flows out. The method of claim 25, The valve injection hole is a valve unit, characterized in that provided in the upper side of the channel. The method of claim 25, The channel is partially overlapped with the valve injection hole, and has a protrusion having a first channel depth, a channel groove portion extending in the channel direction with a second channel depth being stepped with respect to the protrusion, and overlapping with the valve injection hole. And a valve gap in a portion of the protruding portion not supported, wherein the valve is formed in the valve gap. The method of claim 25, And a means for closing the valve injection hole. The method of claim 25, And the phase change material of the valve filling is wax, gel, or thermoplastic. The method of claim 29, The wax is at least one selected from the group consisting of paraffin wax, microcrystalline wax, synthetic wax, and natural wax. . The method of claim 29, The gel is a valve unit, characterized in that at least one selected from the group consisting of polyacrylamide, polyacrylates, polymethacrylates, and polyvinylamides. The method of claim 29, The thermoplastic resin is a cyclic olefin copolymer (COC), polymethylmethacrylate (PMMA), polycarbonate (PC), polystyrene (PS), polyoxymethylene (POM), perfluoralkoxy (PFA), polyvinylchloride (PVC), polypropylene (PP), PET (polyethylene) and a valve unit selected from the group consisting of terephthalate (PEEK), polyetheretherketone (PEEK), polyamide (PA), polysulfone (PSU), and polyvinylidene fluoride (PVDF). The method of claim 25, The valve filling is a valve unit, characterized in that it comprises a plurality of fine heating particles dispersed in the phase change material, and absorbs energy to generate heat. The method of claim 33, wherein The fine heating particle is a valve unit, characterized in that the metal oxide particles. The method of claim 34, wherein The metal oxide valve unit, characterized in that it comprises at least one selected from the group consisting of Al ₂ O ₃ , TiO ₂ , Ta ₂ O ₃ , Fe ₂ O ₃ , Fe ₃ O _4, and HfO ₂ . The method of claim 33, wherein The micro heating particle is a valve unit, characterized in that the polymer particles, quantum dot (quantum dot), or magnetic beads (magnetic bead). A channel for transporting the fluid; A valve injection hole connected to the channel for injecting a valve filler including a phase transition material which melts when absorbing a solid state or energy at room temperature in a molten state; At least one valve unit; and a valve filling the valve injection hole by hardening on the channel to close the channel, and absorbing energy to melt the valve to open the channel again. , The channel and the valve injection hole is formed in the substrate, The valve injection hole is a microfluidic device, characterized in that the inner diameter of the inlet through which the valve filling is introduced is larger than the inner diameter of the outlet through which the valve filling flows out. The method of claim 37, The substrate is a microfluidic device, characterized in that the disk is mounted on the rotation drive means in the form of a disk (disk). The method of claim 37, The valve injection hole is microfluidic device, characterized in that provided in the upper side of the channel. The method of claim 37, The channel is partially overlapped with the valve injection hole, and has a protrusion having a first channel depth, a channel groove portion extending in the channel direction with a second channel depth being stepped with respect to the protrusion, and overlapping with the valve injection hole. And a valve gap in a portion of the protrusion that does not support, wherein the valve is formed in the valve gap. The method of claim 37, The valve unit further comprises a means for closing the valve injection hole. The method of claim 37, The valve filling is microfluidic device, characterized in that it comprises a plurality of fine heating particles dispersed in the phase change material, and absorbs energy to generate heat.

Images