WO2016121681A1 - Inspection device - Google Patents

Inspection device Download PDF

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Publication number
WO2016121681A1
WO2016121681A1 PCT/JP2016/051993 JP2016051993W WO2016121681A1 WO 2016121681 A1 WO2016121681 A1 WO 2016121681A1 JP 2016051993 W JP2016051993 W JP 2016051993W WO 2016121681 A1 WO2016121681 A1 WO 2016121681A1
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WIPO (PCT)
Prior art keywords
cup
mirror
inspection
camera
image
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PCT/JP2016/051993
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French (fr)
Japanese (ja)
Inventor
和見 坂野
勝蘭 李
創太 土屋
裕行 木部
邦光 豊島
Original Assignee
株式会社エヌテック
株式会社ヤクルト本社
東邦商事株式会社
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Application filed by 株式会社エヌテック, 株式会社ヤクルト本社, 東邦商事株式会社 filed Critical 株式会社エヌテック
Priority to JP2016572012A priority Critical patent/JP6772071B2/en
Publication of WO2016121681A1 publication Critical patent/WO2016121681A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/90Investigating the presence of flaws or contamination in a container or its contents

Definitions

  • the present invention relates to an inspection apparatus for inspecting an inspection object such as a cup, for example.
  • Patent Document 1 an inspection apparatus as shown in Patent Document 1 is known as an apparatus for inspecting the appearance of, for example, a cup of food or beverage.
  • the inner surface of the cup is imaged while rotating the cup by a single line sensor camera, and the defect of the cup is inspected by comparing the captured image with, for example, a reference image.
  • a flange photographing mirror is arranged so that the side surface of the flange of the cup that becomes a blind spot from the line sensor camera is reflected, and an image of the side surface of the flange reflected on the flange photographing mirror is captured by the line sensor camera is doing.
  • the flange photographing mirror is composed of two flat mirrors combined in an L shape. Therefore, the illumination light from the light source is blocked by the flange shooting mirror, and the portion of the side surface of the cup flange that is shielded by the flange shooting mirror is insufficiently illuminated. As a result, there is a problem that the image captured by the line sensor camera of the image of the side surface of the flange reflected on the flange photographing mirror becomes dark, and the inspection accuracy of the side surface of the flange decreases.
  • An object of the invention is to provide an inspection apparatus capable of accurately inspecting an inspection object from a plurality of directions at a time.
  • An inspection apparatus that solves the above problem includes an illumination unit that illuminates an inspection object, an imaging unit that can image the inspection object from a first direction, and a second direction that intersects the inspection object with the first direction.
  • the mirror is disposed in an imaging region that can be imaged by the imaging unit, and is disposed at a position that does not interfere with illumination of the inspection object by the illumination unit.
  • the object and the image of the inspection object reflected on the mirror are captured as one image at a time.
  • the imaging unit can capture the inspection object and the image of the inspection object reflected in the mirror as a single image in a bright state at once (together). Therefore, it is possible to accurately inspect the inspection object from a plurality of directions at a time.
  • the illumination unit has an annular shape and is arranged so as to surround the imaging unit when viewed from the first direction. According to this configuration, the inspection object imaged by the imaging unit can be effectively illuminated by the illumination unit.
  • the mirror is arranged so as to surround the inspection object as viewed from the first direction. According to this configuration, it is possible to indirectly image all portions of the inspection target that cannot be directly imaged by the imaging unit via the mirror by the imaging unit.
  • the mirror is arranged at a position closer to the imaging unit than the inspection object in the first direction. According to this configuration, for example, when imaging is performed while moving a plurality of inspection objects continuously, it is possible to prevent the movement of the inspection object from being hindered by the mirror.
  • the illumination unit includes a light source and a reflection surface that reflects light from the light source and irradiates the inspection object. According to this configuration, since the inspection object is indirectly illuminated by the light from the light source, for example, when the inspection object is made of a material that easily reflects light, the image captured by the imaging unit is halated. Can be prevented from occurring.
  • the cross-sectional schematic diagram which shows schematic structure of the cup test
  • the schematic diagram which shows the defect image of the cup imaged with the camera.
  • a cup inspection device 11 as an example of an inspection device moves a plurality of cups 12 as an example of an inspection object from an upstream side (right side in FIG. 1) to a downstream side (left side in FIG. 1).
  • the cup 12 has a bottomed cylindrical shape with an upper end opened, and is conveyed by the belt conveyor 13 in a state where the opening side faces the upper side which is the cup inspection device 11 side.
  • the cup 12 includes a white main body portion 14 made of a synthetic resin having a bottomed cylindrical shape with an open upper end, an annular flange portion 15 provided at the upper end of the main body portion 14, and a main body portion. 14 and a cylindrical film 16 provided so as to cover the outer peripheral surface. A pattern or the like is printed on the film 16.
  • the main body 14 has a tapered peripheral wall so that the diameter on the bottom side is smaller than that on the opening side.
  • the flange portion 15 slightly protrudes from the main body portion 14 on both radial sides.
  • the cup 12 contains food such as yogurt and jelly, and beverages such as juice, it is necessary to inspect the inner bottom surface, the inner side surface, and the top surface of the flange portion 15 for foreign matter or dirt. .
  • the cup 12 is manufactured by integrally forming the main body portion 14, the flange portion 15, and the film 16. For this reason, when the cup 12 is molded, the ink 17 on which the film 16 is printed may ooze out and harden between the lower surface of the flange portion 15 and the inner peripheral surface of the main body portion 14. Therefore, this hardened ink 17 also needs to be inspected.
  • the cup inspection device 11 includes a control unit 20 that comprehensively controls the operating state of the cup inspection device 11 and an optical sensor 21 that detects the cup 12 conveyed by the belt conveyor 13. Yes. Furthermore, the cup inspection apparatus 11 is an example of an imaging unit that illuminates the cup 12 detected by the optical sensor 21 from above, and an imaging unit that images the cup 12 illuminated by the illumination unit 22 from directly above.
  • One camera 23 and a plurality (four in this embodiment) of mirrors 24 that reflect between the inner peripheral surface of the cup 12 and the lower surface of the flange portion 15 are provided.
  • the camera 23 is an area sensor camera, and is arranged so that the cup 12 can be imaged from a first direction which is a vertically downward direction.
  • the illumination unit 22 has an annular shape in which the upper end portion of the dome-shaped one is cut to reduce the thickness, and is arranged so as to surround the camera 23 when viewed from the first direction. That is, the camera 23 is inserted from the upper side of the illuminating unit 22 into the central part of the illuminating unit 22, and is arranged such that the lower end is positioned slightly above the opening 29 at the lower end of the illuminating unit 22.
  • An annular flange 25 is provided at the lower end of the annular peripheral wall of the illumination unit 22 so as to follow the peripheral wall.
  • the flange portion 25 slightly protrudes from the peripheral wall of the illumination portion 22 on both radial sides.
  • An annular groove 26 is formed on the upper surface of a portion of the collar portion 25 located inside the peripheral wall of the illumination portion 22.
  • a plurality of light sources 27 are arranged at equal intervals along the circumferential direction of the groove 26.
  • the light source 27 is composed of, for example, a light emitting diode, and is disposed over the entire groove 26.
  • the inner peripheral surface of the illuminating unit 22 is a concave curved reflecting surface 28 along the inner surface of the dome shape.
  • the reflecting surface 28 is an opening at the lower end of the illuminating unit 22 that diffuses diffused light from the light source 27.
  • the cup 12 is irradiated through the part 29.
  • Each mirror 24 has a rectangular plate shape and is arranged closer to the camera 23 than the cup 12 in the first direction. That is, each mirror 24 is disposed between the cup 12 and the illumination unit 22.
  • the four mirrors 24 surround the cup 12 when viewed from the first direction, and are arranged at substantially equal intervals along the circumferential direction of the cup 12. In this case, the four mirrors 24 are arranged in a position where the illumination of the cup 12 by the illumination unit 22 is not hindered in the imaging region R (see FIG. 3) that can be captured by the camera 23. That is, the four mirrors 24 are arranged so as not to overlap the cup 12 in the first direction.
  • the four mirrors 24 project the entire circumference of the cup 12 between the inner peripheral surface of the cup 12 and the lower surface of the flange portion 15 from the second direction, which is a lateral direction intersecting the first direction, and the images of those mirrors.
  • the angles are adjusted so that the captured image can be captured by the camera 23. Therefore, the camera 23 can capture the cup 12 and the images of the cups 12 reflected on the four mirrors 24 as one image at a time (together).
  • the illumination unit 22, the camera 23, and the four mirrors 24 are supported by a frame (not shown) that is raised and lowered by a lifting mechanism (not shown), and the height is arbitrarily changed by raising and lowering the frame. Can be done.
  • the optical sensor 21 in this embodiment is arrange
  • control unit 20 is electrically connected to the optical sensor 21, the camera 23, and the display unit 31, respectively.
  • the display unit 31 is configured by a liquid crystal monitor, for example.
  • control part 20 receives the signal transmitted from the optical sensor 21, and controls the imaging operation of the camera 23 based on the said received signal.
  • the control unit 20 includes a CPU, a ROM, and a RAM. Then, the control unit 20 executes the cup inspection program stored in the ROM to construct the image processing unit 32, the determination unit 33, and the display control unit 34, and a part of the RAM is configured as the storage unit 35. is doing.
  • the storage unit 35 stores a predetermined value N, which will be described later, for determining whether or not the cup 12 is inspected.
  • the image processing unit 32 binarizes or shades the image data captured by the camera 23 to form black and white image data.
  • this black and white image data a region where there is no abnormality in the cup 12 is white, while a portion of the cup 12 where foreign matter such as ink or dirt is attached is black.
  • the determination unit 33 is a predetermined value in which black pixels are set in advance in an area where the cup 12 including the image of the cup 12 reflected on each mirror 24 exists. It is determined whether or not N or more are present.
  • the display control unit 34 determines that the black pixels are solidified by a determination unit 33 in a region where the cup 12 including the image of the cup 12 reflected on each mirror 24 is present at a predetermined value N or more. In this case, the character “NG” indicating that the cup 12 is defective is displayed on the display unit 31. On the other hand, the display control unit 34 determines that the black pixels do not exist in a region where the cup 12 including the image of the cup 12 reflected on each mirror 24 by the determination unit 33 is more than a predetermined value N. When the determination is made, the characters “OK” indicating that the cup 12 is non-defective are displayed on the display unit 31.
  • the cup 12 conveyed by the belt conveyor 13 is detected by the optical sensor 21.
  • the cup 12 detected by the optical sensor 21 is picked up by the camera 23 while being illuminated by the illuminating unit 22 when transported to just below the camera 23.
  • the camera 23 is reflected on the cup 12 and each mirror 24 in a state where the cup 12 is sufficiently illuminated by the illumination unit 22.
  • An image is taken once (together) as one image. For this reason, a bright image is picked up at a time by the camera 23.
  • the image of the actual cup 12 includes a part of the lump of ink 17, but the image of the actual cup 12 does not include the lump of ink 17 and is reflected in the mirror 24. In some cases, only the image of the image of the cup 12 includes a lump of the ink 17. In any case, the control unit 20 determines whether or not the cup 12 is inspected based on the image captured by the camera 23, and the determination result is displayed on the display unit 31.
  • each mirror 24 is disposed in an imaging region R that can be imaged by the camera 23 and at a position that does not interfere with the illumination of the cup 12 by the illumination unit 22.
  • the image of the cup 12 shown in 24 is taken as one image at a time. For this reason, since the cup 12 is sufficiently illuminated by the illumination unit 22, a bright image can be taken at a time by the camera 23. Therefore, the cup 12 can be accurately inspected from a plurality of directions at a time.
  • the cup 12 and the image of the cup 12 reflected on each mirror 24 are captured as one image at a time, a quick inspection can be performed.
  • the illumination unit 22 has an annular shape and is arranged so as to surround the camera 23 when viewed from the first direction. For this reason, the cup 12 imaged by the camera 23 can be effectively illuminated by the illumination unit 22.
  • the four mirrors 24 are arranged so as to surround the cup 12 when viewed from the first direction. For this reason, the area between the lower surface of the flange portion 15 and the inner peripheral surface of the main body portion 14 of the cup 12 that cannot be directly imaged by the camera 23 can be indirectly imaged by the camera 23 via the four mirrors 24. .
  • each mirror 24 is disposed at a position closer to the camera 23 than the cup 12 in the first direction. For this reason, when a plurality of cups 12 are continuously conveyed by the belt conveyor 13 and these cups 12 are sequentially imaged by the camera 23, it is possible to prevent the conveyance of each cup 12 by the mirrors 24. it can.
  • the illumination unit 22 includes a light source 27 and a reflection surface 28 that reflects the light from the light source 27 and irradiates the cup 12. For this reason, since the cup 12 can be indirectly illuminated by the light from the light source 27, an image of the cup 12 captured by the camera 23 even if the cup 12 is made of a synthetic resin that is relatively easy to reflect light. The occurrence of halation can be suppressed.
  • the said embodiment can also be changed and actualized as follows.
  • the illumination unit 22 may directly illuminate the cup 12 with the light source 27.
  • the light source 27 may be a light bulb or a fluorescent lamp.
  • the illumination unit 22 does not necessarily have an annular shape, and does not necessarily have to be disposed so as to surround the camera 23 when viewed from the first direction.
  • the illumination unit 22 may be a ring illumination device.
  • each mirror 24 does not necessarily have to be arranged at a position closer to the camera 23 than the cup 12 in the first direction. In this case, it is preferable to arrange each mirror 24 at a position that does not hinder the conveyance of the cup 12. Further, when each mirror 24 is disposed at a position that prevents the cup 12 from being transported, it is necessary to move each mirror 24 to a position that does not prevent the cup 12 from being transported after photographing the cup 12.
  • the four mirrors 24 do not necessarily have to be arranged so as to surround the cup 12 when viewed from the first direction.
  • the number of mirrors 24 may be one or more, and may be changed arbitrarily.
  • an annular mirror 24 is adopted if there is only one mirror 24, If there are two mirrors 24, a semi-annular mirror 24 may be used, and if there are three or more mirrors 24, a flat mirror 24 may be used.
  • the cup inspection device 11 may include an angle changing mechanism that can change the angle of each mirror 24.
  • -Cup inspection device 11 may be constituted so that the height of illumination part 22, the height of camera 23, and the height of mirror 24 can be changed individually.
  • the cup inspection device 11 may include an exclusion mechanism that excludes the cup 12 that is determined to be rejected (defective product) on the belt conveyor 13. -The inspection apparatus may inspect articles other than the cup 12.
  • the image processing unit 32, the determination unit 33, and the display control unit 34 are realized by software constructed by the CPU executing a program, but these are realized by hardware such as an IC. It may be configured. Further, these may be realized by cooperation of software and hardware.

Abstract

Provided is a cup inspection device (11) comprising: an illumination unit (22) for illuminating a cup (12); a camera (23) capable of imaging the cup (12) from a first direction; and mirrors (24) for reflecting the cup (12) from a second direction intersecting the first direction. The mirrors (24) are arranged at locations within an imaging area that can be imaged by the camera (23), and at which illumination of the cup (12) by the illumination unit (22) is unimpeded. The camera (23) simultaneously images the cup (12) and the reflected images of the cup (12) in the mirrors (24) as a single image.

Description

検査装置Inspection device
 本発明は、例えば、カップなどの検査対象物を検査するための検査装置に関する。 The present invention relates to an inspection apparatus for inspecting an inspection object such as a cup, for example.
 従来、例えば食品や飲料のカップなどの外観を検査する装置として特許文献1に示すような検査装置が知られている。こうした検査装置では、1つのラインセンサカメラによって、カップを回転させながら当該カップの内側面を撮像し、その撮像した画像を例えば基準画像と比較することによってカップの欠陥を検査している。 2. Description of the Related Art Conventionally, an inspection apparatus as shown in Patent Document 1 is known as an apparatus for inspecting the appearance of, for example, a cup of food or beverage. In such an inspection apparatus, the inner surface of the cup is imaged while rotating the cup by a single line sensor camera, and the defect of the cup is inspected by comparing the captured image with, for example, a reference image.
 また、この検査装置では、ラインセンサカメラから死角となるカップのフランジの側面が映るようにフランジ撮影用鏡を配置し、そのフランジ撮影用鏡に映ったフランジの側面の像をラインセンサカメラで撮像している。 In addition, in this inspection apparatus, a flange photographing mirror is arranged so that the side surface of the flange of the cup that becomes a blind spot from the line sensor camera is reflected, and an image of the side surface of the flange reflected on the flange photographing mirror is captured by the line sensor camera is doing.
特開2002-214154号公報JP 2002-214154 A
 ところで、上述のような検査装置では、カップを照明するための光源が配置されていないため、ラインセンサカメラで撮像した画像が暗くなって、カップの検査精度が低下してしまうという問題がある。 By the way, in the inspection apparatus as described above, since the light source for illuminating the cup is not arranged, there is a problem that the image picked up by the line sensor camera becomes dark and the inspection accuracy of the cup is lowered.
 また、この検査装置においては、たとえカップを照明するための光源をカップの上方位置に配置したとしても、フランジ撮影用鏡が2枚の平板状の鏡をL字状に組み合わせたもので構成されているため、光源からの照明光がフランジ撮影用鏡に遮られて、カップのフランジの側面におけるフランジ撮影用鏡によって遮光される部分の照明が不足する。この結果、フランジ撮影用鏡に映ったフランジの側面の像のラインセンサカメラによる撮像画像が暗くなって、フランジの側面の検査精度が低下するという問題がある。 In this inspection apparatus, even if the light source for illuminating the cup is arranged above the cup, the flange photographing mirror is composed of two flat mirrors combined in an L shape. Therefore, the illumination light from the light source is blocked by the flange shooting mirror, and the portion of the side surface of the cup flange that is shielded by the flange shooting mirror is insufficiently illuminated. As a result, there is a problem that the image captured by the line sensor camera of the image of the side surface of the flange reflected on the flange photographing mirror becomes dark, and the inspection accuracy of the side surface of the flange decreases.
 本発明は、このような従来技術に存在する問題点に着目してなされたものである。その目的とするところは、検査対象物を一度に複数の方向から精度よく検査することができる検査装置を提供することにある。 The present invention has been made paying attention to such problems existing in the prior art. An object of the invention is to provide an inspection apparatus capable of accurately inspecting an inspection object from a plurality of directions at a time.
 以下、上記課題を解決するための手段及びその作用効果について記載する。
 上記課題を解決する検査装置は、検査対象物を照明する照明部と、前記検査対象物を第1方向から撮像可能な撮像部と、前記検査対象物を前記第1方向と交差する第2方向から映す鏡と、を備え、前記鏡は、前記撮像部によって撮像可能な撮像領域内であって前記照明部による前記検査対象物の照明を妨げない位置に配置され、前記撮像部は、前記検査対象物と前記鏡に映った前記検査対象物の像とを1つの画像として一度に撮像する。
Hereinafter, means for solving the above-described problems and the effects thereof will be described.
An inspection apparatus that solves the above problem includes an illumination unit that illuminates an inspection object, an imaging unit that can image the inspection object from a first direction, and a second direction that intersects the inspection object with the first direction. The mirror is disposed in an imaging region that can be imaged by the imaging unit, and is disposed at a position that does not interfere with illumination of the inspection object by the illumination unit. The object and the image of the inspection object reflected on the mirror are captured as one image at a time.
 この構成によれば、照明部による検査対象物の照明が鏡によって妨げられないので、照明部によって検査対象物が十分に照明される。このため、撮像部によって、検査対象物と鏡に映った検査対象物の像とを1つの画像として明るい状態で一度(一緒)に撮像することができる。したがって、検査対象物を一度に複数の方向から精度よく検査することが可能となる。 According to this configuration, since the illumination of the inspection object by the illumination unit is not hindered by the mirror, the inspection object is sufficiently illuminated by the illumination unit. For this reason, the imaging unit can capture the inspection object and the image of the inspection object reflected in the mirror as a single image in a bright state at once (together). Therefore, it is possible to accurately inspect the inspection object from a plurality of directions at a time.
 上記検査装置において、前記照明部は、環状をなしており、前記第1方向から見て前記撮像部を囲むように配置されていることが好ましい。
 この構成によれば、撮像部によって撮像される検査対象物を照明部によって効果的に照明することが可能となる。
In the inspection apparatus, it is preferable that the illumination unit has an annular shape and is arranged so as to surround the imaging unit when viewed from the first direction.
According to this configuration, the inspection object imaged by the imaging unit can be effectively illuminated by the illumination unit.
 上記検査装置において、前記鏡は、前記第1方向から見て前記検査対象物を囲むように配置されていることが好ましい。
 この構成によれば、検査対象物における撮像部によって直接撮像できない箇所の全てを、撮像部によって鏡を介して間接的に撮像することが可能となる。
In the inspection apparatus, it is preferable that the mirror is arranged so as to surround the inspection object as viewed from the first direction.
According to this configuration, it is possible to indirectly image all portions of the inspection target that cannot be directly imaged by the imaging unit via the mirror by the imaging unit.
 上記検査装置において、前記鏡は、前記第1方向において前記検査対象物よりも前記撮像部側の位置に配置されていることが好ましい。
 この構成によれば、例えば検査対象物を複数連続して移動させながら撮像する場合に、鏡によって検査対象物の移動が妨げられないようにすることが可能となる。
In the inspection apparatus, it is preferable that the mirror is arranged at a position closer to the imaging unit than the inspection object in the first direction.
According to this configuration, for example, when imaging is performed while moving a plurality of inspection objects continuously, it is possible to prevent the movement of the inspection object from being hindered by the mirror.
 上記検査装置において、前記照明部は、光源と、前記光源からの光を反射して前記検査対象物に照射する反射面とを備えていることが好ましい。
 この構成によれば、光源からの光によって検査対象物が間接的に照明されるので、例えば検査対象物が光を反射し易い材料で構成されている場合に、撮像部によって撮像した画像にハレーションが発生することを抑制することが可能となる。
In the inspection apparatus, it is preferable that the illumination unit includes a light source and a reflection surface that reflects light from the light source and irradiates the inspection object.
According to this configuration, since the inspection object is indirectly illuminated by the light from the light source, for example, when the inspection object is made of a material that easily reflects light, the image captured by the imaging unit is halated. Can be prevented from occurring.
 本発明によれば、検査対象物を一度に複数の方向から精度よく検査することができる。 According to the present invention, it is possible to accurately inspect an inspection object from a plurality of directions at once.
一実施形態のカップ検査装置の概略構成を示す断面模式図。The cross-sectional schematic diagram which shows schematic structure of the cup test | inspection apparatus of one Embodiment. カップの断面模式図。The cross-sectional schematic diagram of a cup. カメラによって撮像されたカップの不良画像を示す模式図。The schematic diagram which shows the defect image of the cup imaged with the camera.
 以下、検査装置をカップの検査を行うカップ検査装置に具体化した一実施形態を図面に基づいて説明する。
 図1に示すように、検査装置の一例としてのカップ検査装置11は、検査対象物の一例としての複数のカップ12を上流側(図1では右側)から下流側(図1では左側)へ向かって順次搬送するベルトコンベア13の真上に配置されている。カップ12は、上端が開口した有底円筒状をなしており、開口側がカップ検査装置11側となる上側を向いた状態でベルトコンベア13によって搬送される。
Hereinafter, an embodiment in which the inspection device is embodied as a cup inspection device that inspects a cup will be described with reference to the drawings.
As shown in FIG. 1, a cup inspection device 11 as an example of an inspection device moves a plurality of cups 12 as an example of an inspection object from an upstream side (right side in FIG. 1) to a downstream side (left side in FIG. 1). Are disposed immediately above the belt conveyor 13 that sequentially conveys the belt. The cup 12 has a bottomed cylindrical shape with an upper end opened, and is conveyed by the belt conveyor 13 in a state where the opening side faces the upper side which is the cup inspection device 11 side.
 図2に示すように、カップ12は、上端が開口した有底円筒状をなす合成樹脂製の白い本体部14と、本体部14の上端に設けられた円環状のフランジ部15と、本体部14の外周面を覆うように設けられた円筒状のフィルム16とを備えている。フィルム16には絵柄などが印刷されている。本体部14は、底部側の方が開口側よりも径が小さくなるように、周壁にテーパーが付いている。そして、フランジ部15は、その径方向の両側において本体部14から若干突出している。 As shown in FIG. 2, the cup 12 includes a white main body portion 14 made of a synthetic resin having a bottomed cylindrical shape with an open upper end, an annular flange portion 15 provided at the upper end of the main body portion 14, and a main body portion. 14 and a cylindrical film 16 provided so as to cover the outer peripheral surface. A pattern or the like is printed on the film 16. The main body 14 has a tapered peripheral wall so that the diameter on the bottom side is smaller than that on the opening side. The flange portion 15 slightly protrudes from the main body portion 14 on both radial sides.
 カップ12は、内部に、ヨーグルトやゼリーなどの食品やジュースなどの飲料などが収容されるため、内底面、内側面、及びフランジ部15の上面に異物や汚れなどがないか検査する必要がある。また、カップ12は、本体部14、フランジ部15、及びフィルム16を一体成形することによって製造されている。このため、カップ12の成形時に、フランジ部15の下面と本体部14の内周面との間に、フィルム16を印刷したインク17が染み出して固まることがある。したがって、この固まったインク17も検査の対象とする必要がある。 Since the cup 12 contains food such as yogurt and jelly, and beverages such as juice, it is necessary to inspect the inner bottom surface, the inner side surface, and the top surface of the flange portion 15 for foreign matter or dirt. . The cup 12 is manufactured by integrally forming the main body portion 14, the flange portion 15, and the film 16. For this reason, when the cup 12 is molded, the ink 17 on which the film 16 is printed may ooze out and harden between the lower surface of the flange portion 15 and the inner peripheral surface of the main body portion 14. Therefore, this hardened ink 17 also needs to be inspected.
 図1に示すように、カップ検査装置11は、カップ検査装置11の稼働状態を統括的に制御する制御部20と、ベルトコンベア13によって搬送されるカップ12を検出する光センサ21とを備えている。さらに、カップ検査装置11は、光センサ21によって検出されたカップ12を上側から照明する1つの照明部22と、照明部22によって照明されたカップ12を真上から撮像する撮像部の一例としての1つのカメラ23と、カップ12における内周面とフランジ部15の下面との間を映す複数(本実施形態では4つ)の鏡24とを備えている。 As shown in FIG. 1, the cup inspection device 11 includes a control unit 20 that comprehensively controls the operating state of the cup inspection device 11 and an optical sensor 21 that detects the cup 12 conveyed by the belt conveyor 13. Yes. Furthermore, the cup inspection apparatus 11 is an example of an imaging unit that illuminates the cup 12 detected by the optical sensor 21 from above, and an imaging unit that images the cup 12 illuminated by the illumination unit 22 from directly above. One camera 23 and a plurality (four in this embodiment) of mirrors 24 that reflect between the inner peripheral surface of the cup 12 and the lower surface of the flange portion 15 are provided.
 カメラ23は、エリアセンサカメラであり、鉛直下向きの方向である第1方向からカップ12を撮像可能に配置されている。照明部22は、ドーム形状のものの上端部を切除して厚さを薄くした円環状をなしており、第1方向から見てカメラ23を囲むように配置されている。すなわち、カメラ23は、照明部22の上側から照明部22の中心部に挿入され、下端が照明部22の下端の開口部29よりも若干上側に位置するように配置されている。 The camera 23 is an area sensor camera, and is arranged so that the cup 12 can be imaged from a first direction which is a vertically downward direction. The illumination unit 22 has an annular shape in which the upper end portion of the dome-shaped one is cut to reduce the thickness, and is arranged so as to surround the camera 23 when viewed from the first direction. That is, the camera 23 is inserted from the upper side of the illuminating unit 22 into the central part of the illuminating unit 22, and is arranged such that the lower end is positioned slightly above the opening 29 at the lower end of the illuminating unit 22.
 照明部22の円環状の周壁の下端部には、当該周壁に沿うように円環状の鍔部25が設けられている。鍔部25は、その径方向の両側において照明部22の周壁から若干突出している。鍔部25における照明部22の周壁の内側に位置する部分の上面には、円環状の溝26が形成されている。 An annular flange 25 is provided at the lower end of the annular peripheral wall of the illumination unit 22 so as to follow the peripheral wall. The flange portion 25 slightly protrudes from the peripheral wall of the illumination portion 22 on both radial sides. An annular groove 26 is formed on the upper surface of a portion of the collar portion 25 located inside the peripheral wall of the illumination portion 22.
 溝26内には、複数の光源27が溝26の周方向に沿うように等間隔となるように配置されている。光源27は、例えば発光ダイオードなどによって構成され、溝26全体にわたって配置されている。照明部22の内周面はドーム形状の内面に沿った凹曲面状の反射面28になっており、反射面28は光源27からの光を乱反射させた拡散光を照明部22の下端の開口部29を通じてカップ12に照射する。 In the groove 26, a plurality of light sources 27 are arranged at equal intervals along the circumferential direction of the groove 26. The light source 27 is composed of, for example, a light emitting diode, and is disposed over the entire groove 26. The inner peripheral surface of the illuminating unit 22 is a concave curved reflecting surface 28 along the inner surface of the dome shape. The reflecting surface 28 is an opening at the lower end of the illuminating unit 22 that diffuses diffused light from the light source 27. The cup 12 is irradiated through the part 29.
 各鏡24は、矩形板状をなしており、第1方向においてカップ12よりもカメラ23側に配置されている。すなわち、各鏡24は、カップ12と照明部22との間に配置されている。4つの鏡24は、第1方向から見てカップ12を囲むとともに、カップ12の周方向に沿ってほぼ等間隔となるように配置されている。この場合、4つの鏡24は、カメラ23の撮像可能な撮像領域R(図3参照)内であって、照明部22によるカップ12の照明を妨げない位置に配置される。つまり、4つの鏡24は、第1方向においてカップ12と重ならないように配置されている。 Each mirror 24 has a rectangular plate shape and is arranged closer to the camera 23 than the cup 12 in the first direction. That is, each mirror 24 is disposed between the cup 12 and the illumination unit 22. The four mirrors 24 surround the cup 12 when viewed from the first direction, and are arranged at substantially equal intervals along the circumferential direction of the cup 12. In this case, the four mirrors 24 are arranged in a position where the illumination of the cup 12 by the illumination unit 22 is not hindered in the imaging region R (see FIG. 3) that can be captured by the camera 23. That is, the four mirrors 24 are arranged so as not to overlap the cup 12 in the first direction.
 4つの鏡24は、第1方向と交差する横方向である第2方向からカップ12における内周面とフランジ部15の下面との間をカップ12の全周にわたって隈無く映すとともに、それらの映した像がカメラ23で撮像可能となるように、それぞれ角度調整がなされている。したがって、カメラ23は、カップ12と4つの鏡24に映ったそれぞれのカップ12の像とを1つの画像として一度(一緒)に撮像することが可能となっている。 The four mirrors 24 project the entire circumference of the cup 12 between the inner peripheral surface of the cup 12 and the lower surface of the flange portion 15 from the second direction, which is a lateral direction intersecting the first direction, and the images of those mirrors. The angles are adjusted so that the captured image can be captured by the camera 23. Therefore, the camera 23 can capture the cup 12 and the images of the cups 12 reflected on the four mirrors 24 as one image at a time (together).
 また、照明部22、カメラ23、及び4つの鏡24は、昇降機構(図示略)によって昇降されるフレーム(図示略)に支持されており、当該フレームを昇降させることによって高さを任意に変更することができるようになっている。なお、本実施形態における光センサ21は、照明部22に対してカップ12の上流側で隣り合う位置に配置されているが、カメラ23のシャッタースピード、ベルトコンベア13によるカップ12の搬送速度、及び光センサ21の性能などに基づいて適宜配置場所が変更される。 The illumination unit 22, the camera 23, and the four mirrors 24 are supported by a frame (not shown) that is raised and lowered by a lifting mechanism (not shown), and the height is arbitrarily changed by raising and lowering the frame. Can be done. In addition, although the optical sensor 21 in this embodiment is arrange | positioned in the position adjacent to the illumination part 22 in the upstream of the cup 12, the shutter speed of the camera 23, the conveyance speed of the cup 12 by the belt conveyor 13, and The location is appropriately changed based on the performance of the optical sensor 21 and the like.
 図1に示すように、制御部20は、光センサ21、カメラ23、及び表示部31とそれぞれ電気的に接続されている。表示部31は、例えば液晶モニタなどによって構成される。そして、制御部20は、光センサ21から送信される信号を受信し、当該受信した信号に基づきカメラ23の撮像動作を制御する。 As shown in FIG. 1, the control unit 20 is electrically connected to the optical sensor 21, the camera 23, and the display unit 31, respectively. The display unit 31 is configured by a liquid crystal monitor, for example. And the control part 20 receives the signal transmitted from the optical sensor 21, and controls the imaging operation of the camera 23 based on the said received signal.
 制御部20は、CPU、ROM及びRAMを備えた構成とされている。そして、制御部20は、ROMに記憶されたカップ検査用プログラムを実行することで、画像処理部32、判定部33、表示制御部34を構築するとともに、RAMの一部を記憶部35として構成している。記憶部35には、カップ12の検査の合否判定を行うための後述する所定値Nなどが記憶されている。 The control unit 20 includes a CPU, a ROM, and a RAM. Then, the control unit 20 executes the cup inspection program stored in the ROM to construct the image processing unit 32, the determination unit 33, and the display control unit 34, and a part of the RAM is configured as the storage unit 35. is doing. The storage unit 35 stores a predetermined value N, which will be described later, for determining whether or not the cup 12 is inspected.
 画像処理部32は、カメラ23によって撮像された画像データを2値化あるいは濃淡変換して白黒の画像データを形成する。この白黒の画像データでは、カップ12における異常の無い領域は白くなる一方、カップ12におけるインクなどの異物や汚れが付着した部分は黒くなる。判定部33は、画像処理部32で形成された白黒の画像データに基づいて、各鏡24に映ったカップ12の像を含むカップ12の存在する領域に黒色の画素が予め設定された所定値N以上固まって存在しているか否かを判定する。 The image processing unit 32 binarizes or shades the image data captured by the camera 23 to form black and white image data. In this black and white image data, a region where there is no abnormality in the cup 12 is white, while a portion of the cup 12 where foreign matter such as ink or dirt is attached is black. Based on the black and white image data formed by the image processing unit 32, the determination unit 33 is a predetermined value in which black pixels are set in advance in an area where the cup 12 including the image of the cup 12 reflected on each mirror 24 exists. It is determined whether or not N or more are present.
 表示制御部34は、判定部33により各鏡24に映ったカップ12の像を含むカップ12の存在する領域に黒色の画素が予め設定された所定値N以上固まって存在していると判定された場合に、カップ12が不良品であることを示す「NG」の文字を表示部31に表示させる。一方、表示制御部34は、判定部33により各鏡24に映ったカップ12の像を含むカップ12の存在する領域に黒色の画素が予め設定された所定値N以上固まって存在していないと判定された場合に、カップ12が良品であることを示す「OK」の文字を表示部31に表示させる。 The display control unit 34 determines that the black pixels are solidified by a determination unit 33 in a region where the cup 12 including the image of the cup 12 reflected on each mirror 24 is present at a predetermined value N or more. In this case, the character “NG” indicating that the cup 12 is defective is displayed on the display unit 31. On the other hand, the display control unit 34 determines that the black pixels do not exist in a region where the cup 12 including the image of the cup 12 reflected on each mirror 24 by the determination unit 33 is more than a predetermined value N. When the determination is made, the characters “OK” indicating that the cup 12 is non-defective are displayed on the display unit 31.
 次に、カップ検査装置11でカップ12を検査するときの動作について説明する。
 さて、ベルトコンベア13によって搬送されるカップ12が光センサ21によって検出される。光センサ21によって検出されたカップ12は、カメラ23の真下まで搬送されると、照明部22によって照明された状態でカメラ23によって撮像される。このとき、照明部22によるカップ12の照明が各鏡24によって妨げられないので、照明部22によってカップ12が十分に照明された状態でカメラ23がカップ12と各鏡24に映ったカップ12の像とを1つの画像として一度(一緒)に撮像する。このため、カメラ23によって明るい画像が一度に撮像される。
Next, an operation when the cup inspection apparatus 11 inspects the cup 12 will be described.
Now, the cup 12 conveyed by the belt conveyor 13 is detected by the optical sensor 21. The cup 12 detected by the optical sensor 21 is picked up by the camera 23 while being illuminated by the illuminating unit 22 when transported to just below the camera 23. At this time, since the illumination of the cup 12 by the illumination unit 22 is not hindered by each mirror 24, the camera 23 is reflected on the cup 12 and each mirror 24 in a state where the cup 12 is sufficiently illuminated by the illumination unit 22. An image is taken once (together) as one image. For this reason, a bright image is picked up at a time by the camera 23.
 そして、このカメラ23では、図3に示すように、カップ12の内底面、内側面、及びフランジ部15の上面だけでなく、通常はカメラ23の死角となるフランジ部15の下面と本体部14の内周面との間の領域も各鏡24を介して撮像される。この場合、カップ12におけるフランジ部15の下面と本体部14の内周面との間にインク17の固まりが存在する場合には、図3に示すように、インク17の固まりが存在する領域を映す鏡24にインク17の固まりが映る。 In this camera 23, as shown in FIG. 3, not only the inner bottom surface and inner surface of the cup 12 and the upper surface of the flange portion 15, but also the lower surface of the flange portion 15 and the main body portion 14 which are normally blind spots of the camera 23. A region between the inner peripheral surface of the image is also imaged through each mirror 24. In this case, when there is a lump of ink 17 between the lower surface of the flange portion 15 and the inner peripheral surface of the main body portion 14 of the cup 12, as shown in FIG. A lump of ink 17 is reflected on the mirror 24 to be projected.
 また、図3には実物のカップ12の画像にインク17の固まりの一部が含まれているが、実物のカップ12の画像にインク17の固まりが全く含まれておらず、鏡24に映ったカップ12の像の画像にのみインク17の固まりが含まれる場合もある。いずれの場合でも、制御部20により、カメラ23によって撮像された画像に基づいてカップ12の検査の合否が判定され、その判定結果が表示部31に表示される。 In FIG. 3, the image of the actual cup 12 includes a part of the lump of ink 17, but the image of the actual cup 12 does not include the lump of ink 17 and is reflected in the mirror 24. In some cases, only the image of the image of the cup 12 includes a lump of the ink 17. In any case, the control unit 20 determines whether or not the cup 12 is inspected based on the image captured by the camera 23, and the determination result is displayed on the display unit 31.
 以上詳述した実施形態によれば次のような効果が発揮される。
 (1)カップ検査装置11において、各鏡24はカメラ23によって撮像可能な撮像領域R内であって照明部22によるカップ12の照明を妨げない位置に配置され、カメラ23はカップ12と各鏡24に映ったカップ12の像とを1つの画像として一度に撮像する。このため、照明部22によってカップ12が十分に照明されるので、カメラ23によって明るい画像を一度に撮像することができる。したがって、カップ12を一度に複数の方向から精度よく検査することができる。また、カップ12と各鏡24に映ったカップ12の像とを1つの画像として一度に撮像するため、迅速な検査ができる。
According to the embodiment detailed above, the following effects are exhibited.
(1) In the cup inspection apparatus 11, each mirror 24 is disposed in an imaging region R that can be imaged by the camera 23 and at a position that does not interfere with the illumination of the cup 12 by the illumination unit 22. The image of the cup 12 shown in 24 is taken as one image at a time. For this reason, since the cup 12 is sufficiently illuminated by the illumination unit 22, a bright image can be taken at a time by the camera 23. Therefore, the cup 12 can be accurately inspected from a plurality of directions at a time. In addition, since the cup 12 and the image of the cup 12 reflected on each mirror 24 are captured as one image at a time, a quick inspection can be performed.
 (2)カップ検査装置11において、照明部22は、円環状をなしており、第1方向から見てカメラ23を囲むように配置されている。このため、カメラ23によって撮像されるカップ12を照明部22によって効果的に照明することができる。 (2) In the cup inspection apparatus 11, the illumination unit 22 has an annular shape and is arranged so as to surround the camera 23 when viewed from the first direction. For this reason, the cup 12 imaged by the camera 23 can be effectively illuminated by the illumination unit 22.
 (3)カップ検査装置11において、4つの鏡24は、第1方向から見てカップ12を囲むように配置されている。このため、カメラ23によって直接撮像できないカップ12におけるフランジ部15の下面と本体部14の内周面との間の領域を、カメラ23によって4つの鏡24を介して間接的に撮像することができる。 (3) In the cup inspection apparatus 11, the four mirrors 24 are arranged so as to surround the cup 12 when viewed from the first direction. For this reason, the area between the lower surface of the flange portion 15 and the inner peripheral surface of the main body portion 14 of the cup 12 that cannot be directly imaged by the camera 23 can be indirectly imaged by the camera 23 via the four mirrors 24. .
 (4)カップ検査装置11において、各鏡24は、第1方向においてカップ12よりもカメラ23側の位置に配置されている。このため、複数のカップ12をベルトコンベア13で連続して搬送しながらこれらのカップ12を順次カメラ23で撮像する場合に、各鏡24によって各カップ12の搬送が妨げられないようにすることができる。 (4) In the cup inspection apparatus 11, each mirror 24 is disposed at a position closer to the camera 23 than the cup 12 in the first direction. For this reason, when a plurality of cups 12 are continuously conveyed by the belt conveyor 13 and these cups 12 are sequentially imaged by the camera 23, it is possible to prevent the conveyance of each cup 12 by the mirrors 24. it can.
 (5)カップ検査装置11において、照明部22は、光源27と、光源27からの光を反射してカップ12に照射する反射面28とを備えている。このため、光源27からの光によってカップ12を間接的に照明することができるので、カップ12が比較的光を反射しやすい合成樹脂で構成されていても、カメラ23によってカップ12を撮像した画像にハレーションが発生することを抑制することができる。 (5) In the cup inspection apparatus 11, the illumination unit 22 includes a light source 27 and a reflection surface 28 that reflects the light from the light source 27 and irradiates the cup 12. For this reason, since the cup 12 can be indirectly illuminated by the light from the light source 27, an image of the cup 12 captured by the camera 23 even if the cup 12 is made of a synthetic resin that is relatively easy to reflect light. The occurrence of halation can be suppressed.
 (変更例)
 なお、上記実施形態は、次のように変更して具体化することも可能である。
 ・カップ検査装置11において、照明部22は、カップ12を光源27によって直接照明するものであってもよい。この場合、光源27には電球や蛍光灯を採用してもよい。
(Example of change)
In addition, the said embodiment can also be changed and actualized as follows.
In the cup inspection apparatus 11, the illumination unit 22 may directly illuminate the cup 12 with the light source 27. In this case, the light source 27 may be a light bulb or a fluorescent lamp.
 ・照明部22は、必ずしも円環状をなしている必要はなく、必ずしも第1方向から見てカメラ23を囲むように配置する必要はない。
 ・カップ検査装置11において、照明部22は、リング照明装置であってもよい。
The illumination unit 22 does not necessarily have an annular shape, and does not necessarily have to be disposed so as to surround the camera 23 when viewed from the first direction.
In the cup inspection device 11, the illumination unit 22 may be a ring illumination device.
 ・カップ検査装置11において、各鏡24は、必ずしも第1方向においてカップ12よりもカメラ23側の位置に配置する必要はない。この場合、各鏡24をカップ12の搬送を妨げない位置に配置することが好ましい。また、各鏡24をカップ12の搬送を妨げる位置に配置する場合には、カップ12の撮影後に、各鏡24をカップ12の搬送を妨げない位置に移動させる必要がある。 In the cup inspection apparatus 11, each mirror 24 does not necessarily have to be arranged at a position closer to the camera 23 than the cup 12 in the first direction. In this case, it is preferable to arrange each mirror 24 at a position that does not hinder the conveyance of the cup 12. Further, when each mirror 24 is disposed at a position that prevents the cup 12 from being transported, it is necessary to move each mirror 24 to a position that does not prevent the cup 12 from being transported after photographing the cup 12.
 ・カップ検査装置11において、4つの鏡24は、必ずしも第1方向から見てカップ12を囲むように配置する必要はない。
 ・カップ検査装置11において、鏡24の数量は、1つでも複数でもよく、任意に変更してもよい。また、カップ12におけるフランジ部15の下面と本体部14の内周面との間の全周の領域を鏡24に映す場合、鏡24が1つであれば円環状の鏡24を採用し、鏡24が2つであれば半円環状の鏡24を採用し、鏡24が3つ以上であれば平板状の鏡24を採用すればよい。
In the cup inspection device 11, the four mirrors 24 do not necessarily have to be arranged so as to surround the cup 12 when viewed from the first direction.
-In cup inspection device 11, the number of mirrors 24 may be one or more, and may be changed arbitrarily. Further, when the entire region between the lower surface of the flange portion 15 and the inner peripheral surface of the main body portion 14 in the cup 12 is reflected on the mirror 24, an annular mirror 24 is adopted if there is only one mirror 24, If there are two mirrors 24, a semi-annular mirror 24 may be used, and if there are three or more mirrors 24, a flat mirror 24 may be used.
 ・カップ検査装置11は、各鏡24の角度を変更可能な角度変更機構を備えていてもよい。
 ・カップ検査装置11は、照明部22の高さ、カメラ23の高さ、及び鏡24の高さを個別に変更できるように構成してもよい。
The cup inspection device 11 may include an angle changing mechanism that can change the angle of each mirror 24.
-Cup inspection device 11 may be constituted so that the height of illumination part 22, the height of camera 23, and the height of mirror 24 can be changed individually.
 ・カップ検査装置11は、ベルトコンベア13上の不合格(不良品)であると判定されたカップ12を排除する排除機構を備えていてもよい。
 ・検査装置は、カップ12以外の物品を検査するものであってもよい。
The cup inspection device 11 may include an exclusion mechanism that excludes the cup 12 that is determined to be rejected (defective product) on the belt conveyor 13.
-The inspection apparatus may inspect articles other than the cup 12.
 ・上記実施形態のカップ検査装置11では、画像処理部32、判定部33、及び表示制御部34をCPUがプログラムを実行して構築されるソフトウェアにより実現したが、これらをICなどのハードウェアにより構成してもよい。さらに、これらをソフトウェアとハードウェアとの協働により実現される構成にしてもよい。 In the cup inspection apparatus 11 of the above embodiment, the image processing unit 32, the determination unit 33, and the display control unit 34 are realized by software constructed by the CPU executing a program, but these are realized by hardware such as an IC. It may be configured. Further, these may be realized by cooperation of software and hardware.
 11…検査装置の一例としてのカップ検査装置、12…検査対象物の一例としてのカップ、22…照明部、23…撮像部の一例としてのカメラ、24…鏡、27…光源、28…反射面、R…撮像領域。 DESCRIPTION OF SYMBOLS 11 ... Cup inspection apparatus as an example of inspection apparatus, 12 ... Cup as an example of inspection object, 22 ... Illumination part, 23 ... Camera as an example of imaging part, 24 ... Mirror, 27 ... Light source, 28 ... Reflecting surface , R: imaging region.

Claims (5)

  1.  検査対象物を照明する照明部と、
     前記検査対象物を第1方向から撮像可能な撮像部と、
     前記検査対象物を前記第1方向と交差する第2方向から映す鏡と、
    を備え、
     前記鏡は、前記撮像部によって撮像可能な撮像領域内であって前記照明部による前記検査対象物の照明を妨げない位置に配置され、
     前記撮像部は、前記検査対象物と前記鏡に映った前記検査対象物の像とを1つの画像として一度に撮像することを特徴とする検査装置。
    An illumination unit for illuminating the inspection object;
    An imaging unit capable of imaging the inspection object from a first direction;
    A mirror that reflects the inspection object from a second direction intersecting the first direction;
    With
    The mirror is disposed in an imaging region that can be imaged by the imaging unit and at a position that does not interfere with illumination of the inspection object by the illumination unit,
    The said imaging part images the said test target object and the image of the said test target object reflected on the said mirror at once as one image, The inspection apparatus characterized by the above-mentioned.
  2.  前記照明部は、環状をなしており、前記第1方向から見て前記撮像部を囲むように配置されていることを特徴とする請求項1に記載の検査装置。 2. The inspection apparatus according to claim 1, wherein the illumination unit has an annular shape and is disposed so as to surround the imaging unit when viewed from the first direction.
  3.  前記鏡は、前記第1方向から見て前記検査対象物を囲むように配置されていることを特徴とする請求項1または請求項2に記載の検査装置。 3. The inspection apparatus according to claim 1, wherein the mirror is disposed so as to surround the inspection object as viewed from the first direction.
  4.  前記鏡は、前記第1方向において前記検査対象物よりも前記撮像部側の位置に配置されていることを特徴とする請求項1~請求項3のうちいずれか一項に記載の検査装置。 The inspection apparatus according to any one of claims 1 to 3, wherein the mirror is arranged at a position closer to the imaging unit than the inspection object in the first direction.
  5.  前記照明部は、光源と、前記光源からの光を反射して前記検査対象物に照射する反射面とを備えていることを特徴とする請求項1~請求項4のうちいずれか一項に記載の検査装置。 The illumination unit includes a light source and a reflection surface that reflects the light from the light source and irradiates the inspection object. The inspection device described.
PCT/JP2016/051993 2015-01-26 2016-01-25 Inspection device WO2016121681A1 (en)

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