WO2016103668A1 - 鋼帯の線状溝形成方法および方向性電磁鋼板の製造方法 - Google Patents
鋼帯の線状溝形成方法および方向性電磁鋼板の製造方法 Download PDFInfo
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- WO2016103668A1 WO2016103668A1 PCT/JP2015/006332 JP2015006332W WO2016103668A1 WO 2016103668 A1 WO2016103668 A1 WO 2016103668A1 JP 2015006332 W JP2015006332 W JP 2015006332W WO 2016103668 A1 WO2016103668 A1 WO 2016103668A1
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- steel strip
- linear groove
- mask member
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- resist
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/14—Etching locally
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/06—Surface hardening
- C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/68—Temporary coatings or embedding materials applied before or during heat treatment
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D10/00—Modifying the physical properties by methods other than heat treatment or deformation
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D3/00—Diffusion processes for extraction of non-metals; Furnaces therefor
- C21D3/02—Extraction of non-metals
- C21D3/04—Decarburising
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/12—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties
- C21D8/1244—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties the heat treatment(s) being of interest
- C21D8/1255—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties the heat treatment(s) being of interest with diffusion of elements, e.g. decarburising, nitriding
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/12—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties
- C21D8/1277—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties involving a particular surface treatment
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/12—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties
- C21D8/1294—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties involving a localized treatment
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/46—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for sheet metals
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/02—Ferrous alloys, e.g. steel alloys containing silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/06—Etching of iron or steel
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/201—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by an oblique exposure; characterised by the use of plural sources; characterised by the rotation of the optical device; characterised by a relative movement of the optical device, the light source, the sensitive system or the mask
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/24—Curved surfaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/24—Magnetic cores
- H01F27/245—Magnetic cores made from sheets, e.g. grain-oriented
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F3/00—Cores, Yokes, or armatures
- H01F3/02—Cores, Yokes, or armatures made from sheets
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0206—Manufacturing of magnetic cores by mechanical means
- H01F41/0233—Manufacturing of magnetic circuits made from sheets
- H01F41/024—Manufacturing of magnetic circuits made from deformed sheets
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C2202/00—Physical properties
- C22C2202/02—Magnetic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/16—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of sheets
Definitions
- the present invention relates to a method for forming a linear groove on a steel strip such as a grain-oriented electrical steel sheet used for an iron core or the like in an electric device such as a transformer, and a method for producing a grain-oriented electrical steel sheet using this linear groove forming method. .
- Oriented electrical steel sheets are mainly used as transformer core materials and are required to have good magnetic properties.
- it is required to reduce the iron loss among the magnetic characteristics in order to reduce the energy loss.
- Patent Document 1 there is a method of irradiating a surface of a steel plate that has been subjected to finish annealing with a laser.
- this method is effective in improving the iron loss after laser irradiation, there is a problem that the iron loss is deteriorated by the stress relief annealing performed thereafter. For this reason, it is not preferable to apply this method to a magnetic steel sheet for a wound iron core that requires strain relief annealing.
- Patent Document 2 discloses a technique of forming a linear groove by performing etching after applying a resist ink in a linear pattern as a technique that can suppress deterioration of iron loss even if strain relief annealing is performed. ing.
- Patent Document 3 discloses a method of forming a linear groove by applying a negative type photo-etching resist to form a precise linear groove pattern.
- Patent Document 4 describes a method of forming a linear groove pattern by applying a positive resist to form a linear groove pattern.
- the resist ink flows due to the leveling action in the vicinity of the boundary between the application portion and the non-application portion of the resist ink.
- the film thickness becomes thin and sufficient insulation cannot be secured.
- the vicinity of the boundary between the resist ink application part and the non-application part will be reduced. Another problem arises that the groove shape is uneven in the thin film portion.
- Patent Document 3 no consideration is given to the method of exposing a continuously running steel strip, and the method remains to produce a small cut plate. Therefore, it could not be used in the application of the magnetic domain refinement technique that requires forming a thin linear groove pattern on a steel strip having a large strip area.
- the present invention advantageously solves the above-described problems, and forms a resist film obtained by drying a negative type photo-etching resist ink on a continuously running steel strip at high speed and with high accuracy. And it aims at providing the linear groove
- An object of the present invention is to provide a method for producing a grain-oriented electrical steel sheet.
- the gist configuration of the present invention is as follows. 1. A negative resist ink that is exposed to light and solidified is applied to a continuously running steel strip, dried to form a resist coating, and then a mask member that covers the resist coating surface and blocks light is used as a steel strip. The resist film not covered with the mask member is solidified by irradiating with light while moving in synchronization with the traveling speed, and then the resist film other than the solidified portion is removed with a developer, and the resist film is further etched. A method for forming a linear groove in a steel strip, in which a portion of the steel strip from which the resist film has been removed is dissolved and removed to form a linear groove.
- the endless belt-shaped mask member is wound around a pair of rotating rolls arranged close to the steel strip and arranged in parallel in the traveling direction of the steel strip, and at that time, the mask member 2.
- the mask member is formed into a cylindrical shape, and the cylindrical mask member is disposed close to the steel strip so that the axis is parallel to the width direction of the steel strip, and the cylindrical member is disposed at the arrangement position.
- the silicon-containing steel slab is hot-rolled to form a hot-rolled sheet, and after performing hot-rolled sheet annealing as necessary, it is subjected to one or more cold rollings sandwiching intermediate annealing.
- a grain-oriented electrical steel sheet through a series of steps of applying a final finishing annealing after applying a decarburizing annealing to the steel strip and then applying an annealing separator.
- a fine and uniform linear groove is formed on a continuously running steel strip by patterning a resist film using a negative type photo-etching resist at high speed and with high accuracy. Moreover, there is no need for re-baking after etching. As a result, a grain-oriented electrical steel sheet having extremely high magnetic properties can be obtained under a reduced process.
- the present invention is a method for forming a linear groove on a steel strip that runs continuously (through plate) by etching (dissolution and removal of the steel strip) through the steps shown in FIG.
- a negative resist ink that is exposed to light and solidified is applied to a steel strip using a coating device.
- the coating method at that time is particularly limited as long as it can form a resist film having a film thickness of 15 ⁇ m or less in terms of dry film thickness (in the present invention, unless otherwise specified, the resist film means a dry film).
- a roll coater or the like often used for coating a steel strip can be used.
- a slit die method, a curtain coater method, an ink jet method, a spray method, and the like can be appropriately selected according to the installation space of the coating device and the physical properties of the paint.
- the negative resist ink can be used even if it is not liquid, and the resist film of the present invention can also be obtained by laminating a film formed in advance such as a dry film on a steel strip. Can be formed.
- the resist ink to be used is a negative resist ink that is solidified by light irradiation prepared with a photosensitive resin material and the light irradiated portion remains as a mask during etching.
- a negative resist ink it is not necessary to form a resist ink application or non-application part, so the groove pattern is not interrupted or stuck due to poor ink application. Can be formed.
- the resist film itself has a good insulating property without performing a baking process at a high temperature again in order to solidify the remaining film like a positive resist ink. Can be granted. Therefore, since the insulating properties of the steel strip can be improved with fewer steps than when positive ink is used, the steel strip etching process described later can be performed accurately. Therefore, the present invention can produce a sharp groove pattern at a low cost.
- the drying temperature of the paint it is sufficient if the drying temperature of the paint can be ensured, and an induction heating furnace or a hot air drying furnace can be appropriately selected depending on the utility environment of the factory. At that time, it is important that the film thickness of the resist film obtained by applying the resist ink and drying is 15 ⁇ m or less. This is because, if it is 15 ⁇ m or less, as shown in FIG. 2A, a groove-shaped resist pattern from which portions other than the light irradiation portion are removed can be appropriately formed.
- the thickness of the resist film is preferably 15 ⁇ m or less.
- the film thickness of the resist film is more preferably 10 ⁇ m or less.
- the thickness of the resist film may be further reduced, but the insulation resistance during etching is secured to about 0.5 ⁇ m.
- the film thickness of the resist film is defined as the dry film thickness after drying, and the average film thickness of 10 film thicknesses randomly selected by observation of the film cross section is used as the film thickness.
- the light irradiation in the present invention is performed with light containing light in a specific wavelength region for solidifying the resist ink.
- the specific wavelength region is specifically 200 to 400 nm.
- the sufficient irradiation amount in the present invention is specifically about 100 to 1000 J / m 2, although it depends on the sensitivity at the start of curing of the resist ink.
- any device can be used as long as it can irradiate the above-mentioned predetermined light with an ultra-high pressure mercury lamp, an excimer lamp or the like.
- the mask member When performing light irradiation according to the present invention, the mask member is configured to be able to move in synchronization with the traveling speed of the steel strip. In fields such as semiconductors and electronic parts where photoetching is often used, exposure processing by light irradiation is generally performed with the substrate stationary, but a large-area steel strip runs at high speed. In the steel industry, it is not preferable to perform light irradiation in a stationary state from the viewpoint of productivity, and therefore it is necessary to continuously treat the substrate.
- FIG. 3 For example, the mask member is hung on a pair of rotating rolls arranged close to the steel strip, and the rotating roll is rotated to move the mask member hung between the rotating rolls. At that time, it is conceivable to adopt a method of irradiating light with the moving speed of the mask member synchronized with the traveling speed of the steel strip. In the present specification, the movement of the mask member by wrapping between the rotating rolls in this way is referred to as rotational movement.
- 1 is a steel strip
- 2 is a rotating roll
- 3 is a light irradiation device (light source)
- 4 is a mask member.
- the moving speed of the mask member and the traveling speed of the steel strip can be completely synchronized.
- FIG. 3 shows a case where an endless belt-like mask member is wound around two rotating rolls to synchronize with the traveling speed of the steel strip
- the rotating roll may be one or more than three.
- the mask member may be a mask member that is not an endless belt, such as a belt-shaped mask member wound in a coil shape, which is taken out on one side to mask the steel strip and then wound on the other side.
- the mask member is cylindrical, and the mask member itself is a self-rotating mask member 5 that is rotated by a rotating shaft with cantilever support.
- the peripheral speed and steel of the cylindrical mask member are as follows. It is also conceivable to adopt a method of irradiating light with synchronizing the traveling speed of the belt.
- the cylindrical shape is not particularly limited as long as the circumferential irradiation speed of the mask member can be synchronized with the traveling speed of the steel strip, and is not particularly limited, but considering the gap between the resist film and the mask member described below. A thing with a small curvature is preferable.
- the gap between the resist film and the mask member in the present invention, it means a range of close proximity arrangement
- it is preferably 150 ⁇ m or less.
- the gap between the resist film and the mask member is larger than 150 ⁇ m, the light is diffracted and the mask part is also exposed. This is because the resist film is solidified at the mask portion and the resist pattern after development becomes non-uniform.
- the gap between the resist film and the mask member is 100 ⁇ m or less, and 0 ⁇ m is particularly preferable as shown in FIG.
- the width other than the solidified portion (non-solidified portion) in the present invention is preferably 20 ⁇ m or more and 500 ⁇ m or less. If the thickness is smaller than 20 ⁇ m, the light blocking portion of the mask member associated therewith becomes narrow, and there is a risk that the light blocking when the light is irradiated cannot be sufficiently blocked and the entire surface is solidified. On the other hand, if the width other than the solidified portion is wider than 500 ⁇ m, a sufficient iron loss improvement effect may not be obtained.
- the rotating roll used in the present invention is not particularly limited as long as it can synchronize the moving speed of the mask member and the traveling speed of the steel strip, such as a rotating type and a belt driving type. It is preferable because adjustment is easy.
- the material of the mask member is not particularly limited as long as it covers the resist coating surface and can block the light during light irradiation.
- a mask member or the like formed on a glass substrate having a thickness of several millimeters in a pattern shape for exposing a metal thin film such as chromium to a thickness of about 0.1 to 1 ⁇ m is used.
- a flexible material is suitable, and a mask in which a metal thin film such as chromium is formed on a transparent film sheet that can transmit light can be suitably used.
- the formation pattern of the linear grooves is preferably an angle within 30 ° with respect to the steel strip width direction. If the angle is larger than this, the effect of improving the iron loss in the final product is not sufficient.
- the term “linear” includes not only a straight line but also a broken line or a continuous line of dots.
- the formation pattern of the linear groove is a pitch in the longitudinal direction of the steel strip, and the range is 20 mm or less. This is because if the pitch is wider than this range, a sufficient iron loss improvement effect cannot be obtained.
- the pitch is preferably 1 mm or more.
- the method of removing the resist film in the non-solidified portion other than the portion solidified by light irradiation is appropriately selected depending on the resist composition, but a method of immersing in an organic solvent or an alkaline solution is easy. Further, in order to increase the removal speed of the resist film, a method of heating the steel strip in advance, raising the solution temperature, generating a flow in the solution tank, or providing a jet nozzle may be taken.
- the etching of the steel strip may be either chemical etching or electrolytic etching.
- electrolytic etching has better controllability.
- electrolytic etching it is preferable to carry out in an electrolytic bath such as NaCl aqueous solution or KCl aqueous solution, but detailed limitation is not necessary, and it may be carried out according to a conventional method.
- the groove depth to be etched is preferably 5 ⁇ m or more. If the groove depth is shallower than that, a sufficient iron loss improvement effect cannot be obtained.
- the upper limit of the groove depth to be etched is not particularly limited, but is about 1 ⁇ 2 of the plate thickness in consideration of productivity and the like.
- the steel strip after etching is transported to a resist coating stripping facility.
- the unnecessary resist film after etching that adversely affects the downstream process is removed by a resist stripping facility, and the steel sheet is cleaned.
- the peeling method is not particularly specified. For example, there is a method in which the steel strip is immersed in an alkaline solution such as an organic solvent, sodium hydroxide, or sodium orthosilicate.
- an alkaline solution such as an organic solvent, sodium hydroxide, or sodium orthosilicate.
- the grain-oriented electrical steel sheet after heating and hot rolling a silicon-containing steel slab to be a hot-rolled sheet, is subjected to hot-rolled sheet annealing as necessary, and once or two times with intermediate annealing. It is manufactured by a series of processes in which the above cold rolling is performed to form a cold rolled steel strip, and then the cold rolled steel strip is decarburized and annealed, and then an annealing separator is applied, followed by final finish annealing.
- the above-described cold-rolled steel strip linear groove forming method is applied to the cold-rolled steel strip after cold rolling to form linear grooves on the steel strip surface. Then, the magnetic domain subdivision is effectively achieved, and a grain-oriented electrical steel sheet having excellent magnetic properties can be obtained.
- the cold-rolled steel strip after the formation of the linear groove is subjected to decarburization annealing (primary recrystallization annealing) and then final finishing annealing (secondary recrystallization annealing) according to a conventional method.
- decarburization annealing primary recrystallization annealing
- secondary recrystallization annealing final finishing annealing
- composition of the steel strip other than those described above and the manufacturing process of the grain-oriented electrical steel sheet may follow conventional methods.
- a resist ink containing an acrylic group-containing resin or the like as a component was used.
- the drying furnace was dried at a furnace temperature of 250 ° C. using a hot air drying furnace.
- An ultra-high pressure mercury lamp was used as the light source. Removal of the resist film other than the solidified portion was performed by immersion in an alkaline solution.
- a resist ink was subjected to pattern printing by conventional offset gravure roll printing, and an etched steel plate was also produced and evaluated for magnetic properties.
- the material of each roll was a grooved roll with a hard chrome plating for the gravure roll, and a rubber roll with a rubber lining for the offset roll.
- a non-application portion having a rotation direction width of 100 ⁇ m and an application portion having a rotation direction width of 3 mm was used.
- Rubber lining thickness is 20mm, rubber is urethane rubber, hardness is Hs80 °.
- the roll diameter of each roll is 250 mm for both the gravure roll and the offset roll.
- the used coating liquid is a resist ink mainly composed of an alkyd resin.
- This resist ink was diluted with ethylene glycol monobutyl ether and used by adjusting the viscosity at 20 ° C. to be about 1500 mPa ⁇ s.
- the electrolytic etching was performed in a NaCl electrolytic bath at a current density of 30 A / dm 2 for several tens of seconds until a groove depth of 30 ⁇ m was achieved.
- W 17/50 was evaluated for iron loss at 1.7 T and 50 Hz.
- the appearance is ⁇ ⁇ ⁇ , where there is a break or deformation in the linear groove, ⁇ ⁇ ⁇ , if there is a slight change in the groove depth, or deformation, taking into account the superiority or inferiority of the iron loss evaluation.
- the case where the grooves were formed to a uniform depth was marked with ⁇ .
- Table 1 shows the evaluation results of the iron loss and the appearance of the inventive examples and the comparative examples.
- the present invention is not limited to this.
- the present invention can be similarly applied to steel strips and electromagnetic steel sheets having other thicknesses.
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Abstract
Description
また、特許文献4には、ポジ型レジストを塗布して線状溝パターンを形成し、これを利用して線状溝を形成する方法が記載されている。
なお、上記したレジストインクの流れに起因した問題を解決するために、エッチング処理時間を短縮しようと、最初から強力なエッチング処理を施すと、レジストインクの塗布部と未塗布部との境界付近の薄膜部分で溝形状にムラができてしまうという別の問題が生じる。
しかしながら、特許文献4のようにポジ型のレジストインクを用いた場合は、露光した部分が反応して、可溶化する方式であるため、除去した部分以外のレジスト被膜は、強い絶縁性を有していない。
そこで、レジスト被膜を強力に固化して鋼帯に強い絶縁性を持たせるために、再度焼付け処理を施す必要がある。すなわち、ポジ型のレジストインクを用いる場合には、新たに焼付け工程を追加しなければいけないという問題が残っている。
また、本発明は、上記した線状溝形成方法を利用して、方向性電磁鋼板用の鋼帯に線状溝を形成することにより、最終的に高い磁気特性を有する方向性電磁鋼板を得ることができる方向性電磁鋼板の製造方法を提供することを目的とする。
1.連続して走行する鋼帯に対し、感光して固化するネガ型のレジストインクを塗布し、乾燥してレジスト被膜を形成したのち、該レジスト被膜面を覆って光を遮断するマスク部材を鋼帯の走行速度と同期させて移動させながら光照射を行って、上記マスク部材で覆われないレジスト被膜を固化させたのち、現像液にて該固化部分以外のレジスト被膜を除去し、さらにエッチングにより該レジスト被膜を除去した部分の鋼帯を溶解、除去して線状溝を形成する鋼帯の線状溝形成方法。
上記冷間圧延後の鋼帯に対して、前記1~8のいずれかに記載の線状溝形成方法を適用して、該鋼帯の表面に線状溝を形成する方向性電磁鋼板の製造方法。
本発明は、連続して走行(通板)する鋼帯に、図1に示す工程を経て、エッチング(鋼帯の溶解、除去)により線状溝を形成する方法である。
まず、本発明では、鋼帯に、塗布装置を用いて、感光して固化するネガ型のレジストインクを塗布する。その際の塗布方法は、ドライ膜厚換算で15μm以下の膜厚を有するレジスト被膜(本発明で、特に断らない場合は、レジスト被膜は乾燥被膜を意味する)を形成できる方式であれば特に限定されず、鋼帯への被膜塗装によく用いられるロールコーター等を使用することができる。その他の塗布方法としては、塗布装置の設置スペースや塗料の物性等に応じて、スリットダイ方式、カーテンコーター方式、インクジェット方式およびスプレー方式などが適宜選択できる。
また、本発明において、ネガ型のレジストインクは、液状のものでなくても使用可能であり、ドライフィルム等、予め成膜されたフィルムを鋼帯にラミネートすることによっても本発明のレジスト被膜が形成できる。
ゆえに、本発明は、低コストでかつ鮮鋭な溝パターンを作製することが可能となる。
その際、レジストインクを塗布後乾燥して得られたレジスト被膜の膜厚は15μm以下とすることが重要である。というのは、15μm以下であれば、図2のAに示すように、光照射部以外を除去した溝形状のレジストパターンが、適切に形成できるからである。
従って、レジスト被膜の膜厚は、好ましくは15μm以下とする。なお、レジスト被膜の膜厚は、より好ましくは10μm以下である。
一方、エッチング時の絶縁抵抗さえ確保できれば、レジスト被膜の膜厚は、更に薄くても構わないが、エッチング時の絶縁抵抗が確保されるのは0.5μm程度までである。
フォトエッチングがよく使用される半導体や、電子部品などの分野では、光照射による露光処理を、基材が静止した状態で行うのが一般的であるが、大面積の鋼帯が高速で走行する鉄鋼業界においては、光照射を静止状態で行うことは、生産性の観点から好ましくないので、基材を連続処理する必要がある。
なお、本発明において、線状とは、直線だけではなく、破断線や点の連なり線などを含むものとする。
鋼帯のエッチングは、化学エッチング、電解エッチングどちらでもよいが、通電量により溝深さを設定できるため、電解エッチングの方が制御性は良好である。電解エッチングの場合には、NaCl水溶液、KCl水溶液等の電解浴中で行うのが好ましいが、詳細な限定は必要なく、常法に従って行えば良い。
エッチングする溝深さは、5μm以上とすることが好ましい。それより溝深さが浅いと十分な鉄損改善効果が得られない。なお、エッチングする溝深さの上限は、特に限定されないが、生産性等を考慮すると板厚の1/2程度である。
すなわち、上記した方向性電磁鋼板の製造に際し、冷間圧延後の冷延鋼帯に対して上述した冷延鋼帯の線状溝形成方法を適用して、鋼帯表面に線状溝を形成すると、磁区の細分化が効果的に達成されて、磁気特性に優れた方向性電磁鋼板を得ることができる。
なお、線状溝形成後の冷延鋼帯は、その後、常法に従って脱炭焼鈍(一次再結晶焼鈍)を施した後、最終仕上げ焼鈍(二次再結晶焼鈍)を施すことによって、本発明に従う方向性電磁鋼板とすることができる。
なお、今回、作製した線状溝の溝形状は、鋼帯幅方向に対する角度を10°、鋼帯長手方向の溝ピッチを3mm、溝深さを30μmとした。
レジスト被膜の形成には、アクリル基含有樹脂等を成分とするレジストインキを用いた。乾燥炉は、熱風乾燥炉を用いて炉温250℃にて乾燥した。光源は、超高圧水銀灯を用いた。固化部分以外のレジスト被膜の除去はアルカリ溶液中への浸漬により行った。
オフセットグラビアロール塗布装置において、各ロールの材質はグラビアロールが硬質クロムめっきを施した溝付ロール、オフセットロールがゴムをライニングしたゴムロールを使用した。グラビアロールの溝形状は、非塗布部の回転方向幅が100μm、塗布部の回転方向幅が3mmのものを用いた。ゴムライニング厚は20mm、ゴムはウレタンゴムで硬度はHs80°である。各ロールのロール径はグラビアロール、オフセットロール共に250mmである。使用した塗布液はアルキド系樹脂を主成分とするレジストインクである。このレジストインクをエチレングリコールモノブチルエーテルで希釈し、20℃時での粘度が1500 mPa・s程度となるよう調整して使用した。
電解エッチングは、NaCl電解浴中にて、電流密度:30A/dm2で、30μmの溝深さとなるまで数十秒間の処理を行った。
発明例および比較例の鉄損および外観の評価結果を表1に併記する。
2 回転ロール
3 光照射装置(光源)
4 マスク部材
5 自転型マスク部材
Claims (9)
- 連続して走行する鋼帯に対し、感光して固化するネガ型のレジストインクを塗布し、乾燥してレジスト被膜を形成したのち、該レジスト被膜面を覆って光を遮断するマスク部材を鋼帯の走行速度と同期させて移動させながら光照射を行って、上記マスク部材で覆われないレジスト被膜を固化させたのち、現像液にて該固化部分以外のレジスト被膜を除去し、さらにエッチングにより該レジスト被膜を除去した部分の鋼帯を溶解、除去して線状溝を形成する鋼帯の線状溝形成方法。
- 前記鋼帯に近接し、かつ該鋼帯の進行方向に並列に配置した一対の回転ロールに、無端ベルト状の前記マスク部材を掛け回して回動移動させるものとし、その際、該マスク部材の回動移動速度を、該鋼帯の走行速度と同期させる請求項1に記載の鋼帯の線状溝形成方法。
- 前記マスク部材を円筒形にし、該円筒形としたマスク部材を、その軸心が前記鋼帯の幅方向に平行として、該鋼帯に近接して配置し、この配置位置にて該円筒形のマスク部材を、該軸心を回転軸として回転させるものとし、その際、該円筒形のマスク部材の周速を、該鋼帯の走行速度と同期させる請求項1に記載の鋼帯の線状溝形成方法。
- 前記レジスト被膜の膜厚を15μm以下とする請求項1~3のいずれか1項に記載の鋼帯の線状溝形成方法。
- 前記マスク部材と、前記レジスト被膜とのギャップを150μm以下とする請求項1~4のいずれか1項に記載の鋼帯の線状溝形成方法。
- 前記固化部分以外の非固化部分の幅を、20μm以上500μm以下とする請求項1~5のいずれか1項に記載の鋼帯の線状溝形成方法。
- 前記線状溝を、鋼帯の幅方向に対する角度が30°以下で、かつ鋼帯長手方向に20mm以下のピッチで形成する請求項1~6のいずれか1項に記載の鋼帯の線状溝形成方法。
- 前記線状溝の溝深さを5μm以上とする請求項1~7のいずれか1項に記載の鋼帯の線状溝形成方法。
- 含けい素鋼スラブを、加熱後、熱間圧延して熱延板とし、必要に応じて熱延板焼鈍を施したのち、1回または中間焼鈍を挟む2回以上の冷間圧延を施して鋼帯とし、ついで該鋼帯に脱炭焼鈍を施したのち、焼鈍分離剤を塗布してから、最終仕上げ焼鈍を施す一連の工程によって方向性電磁鋼板を製造するに当たり、
上記冷間圧延後の鋼帯に対して、請求項1~8のいずれか1項に記載の線状溝形成方法を適用して、該鋼帯の表面に線状溝を形成する方向性電磁鋼板の製造方法。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62179105A (ja) * | 1986-02-03 | 1987-08-06 | Nippon Steel Corp | 低鉄損一方向性電磁鋼板の製造方法 |
JPH0442159A (ja) * | 1990-06-08 | 1992-02-12 | Kato Hatsujo Kaisha Ltd | フォトレジストにおける露光方法および装置 |
JPH11288080A (ja) * | 1998-04-02 | 1999-10-19 | Mitsubishi Alum Co Ltd | フォトレジスト印刷用マスクと印刷装置および印刷方法と電極箔の製造方法および印刷用ロール |
JP2011059196A (ja) * | 2009-09-07 | 2011-03-24 | Fujifilm Corp | 凸状シートの製造方法および凸状シートの製造装置 |
-
2015
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62179105A (ja) * | 1986-02-03 | 1987-08-06 | Nippon Steel Corp | 低鉄損一方向性電磁鋼板の製造方法 |
JPH0442159A (ja) * | 1990-06-08 | 1992-02-12 | Kato Hatsujo Kaisha Ltd | フォトレジストにおける露光方法および装置 |
JPH11288080A (ja) * | 1998-04-02 | 1999-10-19 | Mitsubishi Alum Co Ltd | フォトレジスト印刷用マスクと印刷装置および印刷方法と電極箔の製造方法および印刷用ロール |
JP2011059196A (ja) * | 2009-09-07 | 2011-03-24 | Fujifilm Corp | 凸状シートの製造方法および凸状シートの製造装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3257973A4 (en) * | 2015-02-10 | 2018-03-21 | JFE Steel Corporation | Method for producing grain-oriented electrical steel sheet |
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