WO2016082280A1 - 一种石墨导热膜的制造方法 - Google Patents

一种石墨导热膜的制造方法 Download PDF

Info

Publication number
WO2016082280A1
WO2016082280A1 PCT/CN2014/095479 CN2014095479W WO2016082280A1 WO 2016082280 A1 WO2016082280 A1 WO 2016082280A1 CN 2014095479 W CN2014095479 W CN 2014095479W WO 2016082280 A1 WO2016082280 A1 WO 2016082280A1
Authority
WO
WIPO (PCT)
Prior art keywords
temperature
per minute
graphite
film
polyimide film
Prior art date
Application number
PCT/CN2014/095479
Other languages
English (en)
French (fr)
Inventor
赖优萍
Original Assignee
苏州格优碳素新材料有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 苏州格优碳素新材料有限公司 filed Critical 苏州格优碳素新材料有限公司
Publication of WO2016082280A1 publication Critical patent/WO2016082280A1/zh

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/20Graphite
    • C01B32/205Preparation
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08Materials not undergoing a change of physical state when used
    • C09K5/14Solid materials, e.g. powdery or granular

Definitions

  • the invention relates to a method for producing a graphite heat conductive film.
  • the traditional heat dissipating material is a high thermal conductivity metal such as copper, silver or aluminum, but with the increase in the heat generation of electronic components, the product needs cannot be met.
  • Natural graphite film has a higher thermal conductivity, lower density, and good material stability, so it is widely used in the electronics industry.
  • the natural graphite film is made of natural flake graphite or coal tar pitch. After acidifying the raw material, the natural graphite layer is expanded by heating to obtain a worm-like structure, and then calendered under high temperature and high pressure conditions with the bonding material to obtain a film-like graphite sheet.
  • patent application numbers 201010240207.8 and 201110002281.0 are examples of patent application numbers 201010240207.8 and 201110002281.0.
  • the graphite film involved is mainly made of polyimide (PI) film and placed in a boat. 3-50 sheets of PI film are placed in each of the two graphite papers, and carbonized and graphitized to prepare the main film. A crystalline foam having a carbon content. Then, through a rolling or laminating process, a highly thermally conductive graphite film having a soft surface and a uniform thickness is obtained.
  • PI polyimide
  • the technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a method for manufacturing a graphite heat conductive film.
  • a method for manufacturing a graphite heat conductive film comprising: the following steps:
  • the carbon foam film is processed into a graphite heat conductive film having a smooth surface by rolling or lamination.
  • said step (2) comprises:
  • said step (2) comprises:
  • the temperature was further raised at 4 ° C per minute, and the temperature was oscillated for 10 minutes for each temperature rise of 100 ° C, and the amplitude was 10 ° C. After the temperature was raised to 2,900 ° C and the temperature was kept for 30 minutes, the temperature was naturally lowered to obtain a crystalline carbon foam film.
  • the inert gas introduced in step (2-4) is argon.
  • the boat is placed in a carbonization furnace and a graphitization furnace.
  • the present invention has the following advantages compared with the prior art:
  • the production method of the graphite heat conductive film according to the present invention has a productivity of 1-5 times higher than that of the prior art, and the yield is stable.
  • the surface of the product is soft and smooth, and the surface thermal conductivity is not more than 1800w/(m.k), which is higher than the highest value of 1000 Panasonic Patent Application No. CN1816504A. w/(m.k).
  • the polyimide film is subjected to plasma treatment and has two functions: surface cleaning, surface activation, especially surface defects such as pinholes. By plasma treatment, the shrinkage of the graphite film and some surface defects can be reduced.
  • the polyimide film was subjected to plasma treatment, and graphite paper and polyimide film were placed in the boat. There were 15 polyimide films in the middle of each two layers of graphite paper.
  • the boat was placed in a carbonization furnace and evacuated. To 0.2 KPa, the temperature was raised to 500 ° C at 10 ° C per minute; then, the temperature was raised to 800 ° C at 8 ° C per minute, and finally raised to 1100 ° C at 6 ° C per minute for half an hour. Turn off the equipment, naturally cool down to normal temperature, take out the boat and put it into the graphitization furnace.
  • the polyimide film is subjected to plasma treatment, and graphite paper and polyimide film are placed in the boat. There are three polyimide films in the middle of each two layers of graphite paper, and the boat is placed in a carbonization furnace to evacuate. To 0.05 KPa, the temperature was raised to 400 ° C at 5 ° C per minute; then, the temperature was raised to 700 ° C at 5 ° C per minute, and finally heated to 1000 ° C at 2 ° C per minute for half an hour. Turn off the equipment, naturally cool down to normal temperature, take out the boat and put it into the graphitization furnace.
  • pure argon is introduced to an internal pressure of 1.05 atm, and the temperature is raised to 1000 ° C at 5 ° C per minute, and the pressure is increased to 1.3 atm; then, the temperature is raised at 5 ° C per minute, and the temperature is oscillated at 200 ° C per temperature. The amplitude was 15 ° C for 5 minutes. After the temperature was raised to 2300 ° C, the pressure was lowered to 1.05 atm, the temperature was raised by 2 ° C per minute, and the temperature was oscillated for 5 minutes per 100 ° C with an amplitude of 5 ° C.
  • the carbon foam film is processed into a graphite heat conductive film having a smooth surface by rolling or lamination.
  • the polyimide film was subjected to plasma treatment, and graphite paper and polyimide film were placed in the boat. There were 50 polyimide films in the middle of each two layers of graphite paper.
  • the boat was placed in a carbonization furnace and evacuated. To 0.5 KPa, the temperature was raised to 600 ° C at 30 ° C per minute; then, the temperature was raised to 900 ° C at 10 ° C per minute, and finally heated to 1200 ° C at 8 ° C per minute for half an hour. Turn off the equipment, naturally cool down to normal temperature, take out the boat and put it into the graphitization furnace.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

提供一种石墨导热膜的制造方法,包括:(1)将聚酰亚胺薄膜经过等离子处理;(2)在两张石墨纸之间放置3-50张经过步骤(1)处理过的聚酰亚胺薄膜,进行升温处理得到结晶性的碳泡沫膜;(3)通过辊压或层压,将碳泡沫膜加工为表面光滑的石墨导热膜。该方法的产能比现有技术中的制造方法提高1-5倍,且产品表面柔软光滑、导热系数大于1800w/(m.k)。

Description

一种石墨导热膜的制造方法
技术领域
本发明涉及一种石墨导热膜的制造方法。
背景技术
随着半导体技术的快速发展,以及数码产品如手机、平板电脑等对便携性能的要求越来越高,这使得相关厂家迫切需要提高电子产品内部空间的利用率。但是,运行中所产生的热量不易排出、易于迅速积累而形成高温。很显然,高温会降低电子设备的性能、可靠性和使用寿命。因此,当前电子行业对于作为热控系统核心部件的散热材料提出越来越高的要求,迫切需要一种高效导热、轻便的材料迅速将热量传递出去,保障电子设备正常运行。
传统的散热材料是铜、银、铝之类的高导热的金属,但是随着电子元器件发热量的提高,已无法满足产品需要。而天然石墨膜具有更高的导热性,较低的密度,良好的材料稳定性,所以逐步在电子行业得到广泛的应用。天然石墨膜是以天然鳞片石墨或煤沥青为原料,将原料酸化后,加热使得天然石墨层间膨胀,得到蠕虫状结构,然后通过与粘结材料高温高压条件下压延,得到膜状的石墨片。如专利申请号201010240207.8和201110002281.0。
但是天然石墨膜的导热系数一般不超过400W(M.K)-1,还有易于掉粉等缺点,所以日益无法满足当前便携式数码产品的散热要求。如中国专利申请公开号CN1816504A、CN103193221A所述,是一种不同于天然石墨膜的工艺,采用以高分子薄膜或相关单体为原料,通过近3000度高温处理得到人工合成石墨膜。
本发明的目的在于提供一种用新型人工合成石墨导热膜的制造方法。所涉及到的石墨膜,以聚酰亚胺(PI)薄膜为主要原料,放置于舟皿中,每两张石墨纸内放置3-50张PI膜,经过碳化和石墨化处理,制备出主要成分为碳元素的结晶性泡沫材料。再通过辊压或层压工艺,得到表面柔软光滑、厚度均匀的高导热石墨膜。
发明内容
本发明所要解决的技术问题是克服现有技术的不足,提供一种石墨导热膜的制造方法。
为解决以上技术问题,本实用新型采取如下技术方案:
一种石墨导热膜的制造方法,其特征在于:包括以下步骤:
(1)将聚酰亚胺薄膜经过等离子处理;
(2)在两张石墨纸之间放置3~50张经过步骤(1)处理过的聚酰亚胺薄膜,进行升温处理得到结晶性的碳泡沫膜;
(3)通过辊压或层压,将碳泡沫膜加工为表面光滑的石墨导热膜。
优选地,所述的步骤(2)包括:
(2-1)将所述的石墨纸和聚酰亚胺薄膜放入碳化炉,将碳化炉内的气压控制在0.05~0.5KPa,以每分钟5~30℃度升温至400~600℃;
(2-2)以每分钟5~10℃继续升温至700~900℃;
(2-2)以每分钟2~8℃继续升温至1000~1200℃,恒温半小时;
(2-3)关闭碳化炉,自然降温后,取出石墨纸和聚酰亚胺薄膜;
(2-4)将石墨纸和聚酰亚胺薄膜放入石墨化炉,将石墨化炉抽真空后,通入惰性气体至内压为1.05~1.25atm,以每分钟5-30℃升温至1000~1200℃,内压增加至1.3~1.8atm;
(2-5)以每分钟5-15℃继续升温,每升温200℃,温度震荡5~30分钟,振幅为15-30℃,直至升温至2300~2500℃,降低压力至1.05~1.2atm;
(2-6)以每分钟2~5℃继续升温,每升温100℃,温度震荡5~20分钟,振幅为5-20℃。直至升温至2800~3000℃,恒温20~50分钟后,自然降温,得到结晶性的碳泡沫膜。
优选地,所述的步骤(2)包括:
(2-1)将所述的石墨纸和聚酰亚胺薄膜放入碳化炉,将碳化炉内的气压控制在0.2KPa,以每分钟10℃度升温至500℃;
(2-2)以每分钟8℃继续升温至800℃;
(2-2)以每分钟6℃继续升温至1100℃,恒温半小时;
(2-3)关闭碳化炉,自然降温后,取出石墨纸和聚酰亚胺薄膜;
(2-4)将石墨纸和聚酰亚胺薄膜放入石墨化炉,将石墨化炉抽真空后,通入惰性气体至内压为1.2atm,以每分钟10℃升温至1100℃,内压增加至1.4atm;
(2-5)以每分钟6℃继续升温,每升温200℃,温度震荡20分钟,振幅为20℃,直至升温至2400℃,降低压力至1.1atm;
(2-6)以每分钟4℃继续升温,每升温100℃,温度震荡10分钟,振幅为10℃。直至升温至2900℃,恒温30分钟后,自然降温,得到结晶性的碳泡沫膜。
优选地,在步骤(2-4)中通入的惰性气体为氩气。
优选地,将所述的石墨纸和聚酰亚胺薄膜装入舟皿后,将舟皿放入碳化炉和石墨化炉中。
由于以上技术方案的采用,本发明与现有技术相比具有如下优点:
本发明所述的石墨导热膜的制造方法的产能比现有技术中的制造方法提高1-5倍,且良率稳定。产品表面柔软光滑,没有表面不良导热系数大于1800w/(m.k),高于日本松下的专利申请号CN1816504A所表达最高值1000 w/(m.k)。将聚酰亚胺薄膜经过等离子处理,有两种作用:表面清洁、表面活化特别是表面缺陷如针孔。通过等离子处理,可减少石墨膜的收缩率和某些表面点状不良。
具体实施方式
以下结合具体实施例对本发明做进一步详细说明。应理解,这些实施例是用于说明本发明的基本原理、主要特征和优点,而本发明不受以下实施例的范围限制。实施例中采用的实施条件可以根据具体要求做进一步调整,未注明的实施条件通常为常规实验中的条件。
实施例1
将聚酰亚胺薄膜经过等离子处理,在舟皿内放置石墨纸和聚酰亚胺薄膜,每两层石墨纸中间有15张的聚酰亚胺薄膜,将舟皿放入碳化炉,抽真空至0.2KPa,以每分钟10℃升温至500℃;然后以每分钟8℃升温至800℃,最后以每分钟6℃升温至1100℃,恒温半小时。关闭设备,自然降温至常温后取出舟皿,放入石墨化炉。将石墨化炉抽真空后,通入纯氩至内压为1.2atm,以每分钟10℃升温至1100℃,增加压力至1.4atm;然后以每分钟6℃升温,每升温200℃会温度震荡20分钟,振幅为20℃。温度升至2400℃后,降低压力至1.1atm,每分钟升温4℃,每100℃会温度震荡10分钟,振幅为10℃。温度升至2900℃后,恒温30分钟后关机,自然降温得到结晶性的碳泡沫膜。通过辊压或层压,将碳泡沫膜加工为表面光滑的石墨导热膜。
实施例2
将聚酰亚胺薄膜经过等离子处理,在舟皿内放置石墨纸和聚酰亚胺薄膜,每两层石墨纸中间有3张的聚酰亚胺薄膜,将舟皿放入碳化炉,抽真空至0.05KPa,以每分钟5℃升温至400℃;然后以每分钟5℃升温至700℃,最后以每分钟2℃升温至1000℃,恒温半小时。关闭设备,自然降温至常温后取出舟皿,放入石墨化炉。将石墨化炉抽真空后,通入纯氩至内压为1.05atm,以每分钟5℃升温至1000℃,增加压力至1.3atm;然后以每分钟5℃升温,每升温200℃会温度震荡5分钟,振幅为15℃。温度升至2300℃后,降低压力至1.05atm,每分钟升温2℃,每100℃会温度震荡5分钟,振幅为5℃。温度升至2800℃后,恒温20分钟后关机,自然降温得到结晶性的碳泡沫膜。通过辊压或层压,将碳泡沫膜加工为表面光滑的石墨导热膜。
实施例3
将聚酰亚胺薄膜经过等离子处理,在舟皿内放置石墨纸和聚酰亚胺薄膜,每两层石墨纸中间有50张的聚酰亚胺薄膜,将舟皿放入碳化炉,抽真空至0.5KPa,以每分钟30℃升温至600℃;然后以每分钟10℃升温至900℃,最后以每分钟8℃升温至1200℃,恒温半小时。关闭设备,自然降温至常温后取出舟皿,放入石墨化炉。将石墨化炉抽真空后,通入纯氩至内压为1.25atm,以每分钟30℃升温至1200℃,增加压力至1.8atm;然后以每分钟15℃升温,每升温200℃会温度震荡20分钟,振幅为20℃。温度升至3000℃后,降低压力至1.2atm,每分钟升温5℃,每100℃会温度震荡20分钟,振幅为20℃。温度升至3000℃后,恒温50分钟后关机,自然降温得到结晶性的碳泡沫膜。通过辊压或层压,将碳泡沫膜加工为表面光滑的石墨导热膜。
以上对本发明做了详尽的描述,实施例的说明只是用于帮助理解本发明的方法及其核心思想,其目的在于让熟悉此领域技术的人士能够了解本发明的内容并据以实施,并不能以此限制本发明的保护范围。凡根据本发明精神实质所作的等效变化或修饰,都应涵盖在本发明的保护范围之内。

Claims (5)

1. 一种石墨导热膜的制造方法,其特征在于:包括以下步骤:
(1)将聚酰亚胺薄膜经过等离子处理;
(2)在两张石墨纸之间放置3~50张经过步骤(1)处理过的聚酰亚胺薄膜,进行升温处理得到结晶性的碳泡沫膜;
(3)通过辊压或层压,将碳泡沫膜加工为表面光滑的石墨导热膜。
2. 根据权利要求1所述的一种石墨导热膜的制造方法,其特征在于:所述的步骤(2)包括:
(2-1)将所述的石墨纸和聚酰亚胺薄膜放入碳化炉,将碳化炉内的气压控制在0.05~0.5KPa,以每分钟升高5~30℃的方式升温至400~600℃;
(2-2)以每分钟升高5~10℃的方式继续升温至700~900℃;
(2-2)以每分钟升高2~8℃的方式继续升温至1000~1200℃,恒温半小时;
(2-3)关闭碳化炉,自然降温后,取出石墨纸和聚酰亚胺薄膜;
(2-4)将石墨纸和聚酰亚胺薄膜放入石墨化炉,将石墨化炉抽真空后,通入惰性气体至内压为1.05~1.25atm,以每分钟升高5-30℃的方式升温至1000~1200℃,内压增加至1.3~1.8atm;
(2-5)以每分钟升高5-15℃的方式继续升温,每升温200℃,温度震荡5~30分钟,振幅为15-30℃,直至升温至2300~2500℃,降低压力至1.05~1.2atm;
(2-6)以每分钟升高2~5℃的方式继续升温,每升温100℃,温度震荡5~20分钟,振幅为5-20℃,直至升温至2800~3000℃,恒温20~50分钟后,自然降温,得到结晶性的碳泡沫膜。
3. 根据权利要求1所述的一种石墨导热膜的制造方法,其特征在于:所述的步骤(2)包括:
(2-1)将所述的石墨纸和聚酰亚胺薄膜放入碳化炉,将碳化炉内的气压控制在0.2KPa,以每分钟升高10℃的方式升温至500℃;
(2-2)以每分钟升高8℃的方式继续升温至800℃;
(2-2)以每分钟升高6℃的方式继续升温至1100℃,恒温半小时;
(2-3)关闭碳化炉,自然降温后,取出石墨纸和聚酰亚胺薄膜;
(2-4)将石墨纸和聚酰亚胺薄膜放入石墨化炉,将石墨化炉抽真空后,通入惰性气体至内压为1.2atm,以每分钟10℃升温至1100℃,内压增加至1.4atm;
(2-5)以每分钟6℃继续升温,每升温200℃,温度震荡20分钟,振幅为20℃,直至升温至2400℃,降低压力至1.1atm;
(2-6)以每分钟升高4℃的方式继续升温,每升温100℃,温度震荡10分钟,振幅为10℃,直至升温至2900℃,恒温30分钟后,自然降温,得到结晶性的碳泡沫膜。
4. 根据权利要求2所述的一种石墨导热膜的制造方法,其特征在于:在步骤(2-4)中通入的惰性气体为氩气。
5. 根据权利要求2所述的一种石墨导热膜的制造方法,其特征在于:将所述的石墨纸和聚酰亚胺薄膜装入舟皿后,将舟皿放入碳化炉和石墨化炉中。
PCT/CN2014/095479 2014-11-28 2014-12-30 一种石墨导热膜的制造方法 WO2016082280A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201410700634.8A CN104495798B (zh) 2014-11-28 2014-11-28 一种石墨导热膜的制造方法
CN201410700634.8 2014-11-28

Publications (1)

Publication Number Publication Date
WO2016082280A1 true WO2016082280A1 (zh) 2016-06-02

Family

ID=52937279

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2014/095479 WO2016082280A1 (zh) 2014-11-28 2014-12-30 一种石墨导热膜的制造方法

Country Status (2)

Country Link
CN (1) CN104495798B (zh)
WO (1) WO2016082280A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111548161A (zh) * 2020-04-26 2020-08-18 安徽恒炭新材料科技有限公司 一种超厚人工石墨膜的制造方法

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105666979A (zh) * 2016-01-13 2016-06-15 山东安诺克新材料有限公司 一种石墨导热膜及其制备方法
CN106115670A (zh) * 2016-06-23 2016-11-16 苏州格优碳素新材料有限公司 一种卷装人造石墨散热膜制造方法
US10676362B2 (en) * 2017-02-27 2020-06-09 Shenzhen Danbond Technology Co., Ltd Roll-shaped and continuous graphene film and manufacturing method therefor
CN106829930B (zh) * 2017-02-27 2019-09-13 深圳丹邦科技股份有限公司 一种卷状连续石墨烯薄膜及其制备方法
WO2018219000A1 (zh) * 2017-05-27 2018-12-06 杭州高烯科技有限公司 一种高导热的聚酰亚胺基复合碳膜及其制备方法
CN107090275A (zh) * 2017-05-27 2017-08-25 杭州高烯科技有限公司 一种高导热的石墨烯/聚酰亚胺复合碳膜及其制备方法
CN107162594A (zh) * 2017-05-31 2017-09-15 杭州高烯科技有限公司 一种高导热的聚酰亚胺基复合碳膜及其制备方法
CN110092374A (zh) * 2019-05-28 2019-08-06 宇冠芯龙(武汉)科技有限公司 一种人工石墨膜的制备方法以及石墨膜材料
CN110451964A (zh) * 2019-09-10 2019-11-15 北京中石伟业科技无锡有限公司 一种高取向性石墨块材料的制备方法
CN112897521A (zh) * 2021-01-15 2021-06-04 王立勇 一种石墨薄膜复合材料的制备方法
CN113666369A (zh) * 2021-09-10 2021-11-19 东莞市鸿亿导热材料有限公司 一种烯碳膜及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103011141A (zh) * 2012-12-20 2013-04-03 宁波今山新材料有限公司 高导热石墨膜的制造方法
CN103568418A (zh) * 2012-08-09 2014-02-12 绿晶能源股份有限公司 柔性石墨纸材料的堆叠结构及柔性石墨纸的制造方法
CN103864068A (zh) * 2014-03-26 2014-06-18 苏州格优碳素新材料有限公司 一种高导热石墨膜的制备方法
CN103922324A (zh) * 2014-04-11 2014-07-16 江苏悦达新材料科技有限公司 一种高导热石墨膜的制备方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103568418A (zh) * 2012-08-09 2014-02-12 绿晶能源股份有限公司 柔性石墨纸材料的堆叠结构及柔性石墨纸的制造方法
CN103011141A (zh) * 2012-12-20 2013-04-03 宁波今山新材料有限公司 高导热石墨膜的制造方法
CN103864068A (zh) * 2014-03-26 2014-06-18 苏州格优碳素新材料有限公司 一种高导热石墨膜的制备方法
CN103922324A (zh) * 2014-04-11 2014-07-16 江苏悦达新材料科技有限公司 一种高导热石墨膜的制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111548161A (zh) * 2020-04-26 2020-08-18 安徽恒炭新材料科技有限公司 一种超厚人工石墨膜的制造方法

Also Published As

Publication number Publication date
CN104495798A (zh) 2015-04-08
CN104495798B (zh) 2016-05-11

Similar Documents

Publication Publication Date Title
WO2016082280A1 (zh) 一种石墨导热膜的制造方法
WO2015143908A1 (zh) 一种高导热石墨膜的制备方法
JP6814267B2 (ja) グラファイトシート、高熱伝導性放熱基板、及びグラファイトシートの製造方法
CN107804843B (zh) 一种均匀高导热石墨膜卷材的制备工艺
CN103045119B (zh) 超高导热系数散热双面胶带
WO2017148105A1 (zh) 一种柔性聚酰亚胺制备的碳膜及其制备方法
CN108707770B (zh) 一种镀锆金刚石颗粒增强铝基复合材料的制备方法
CN106520003A (zh) 用于笔记本电脑的导热石墨胶带
TW201406537A (zh) 柔性石墨紙之材料的堆疊結構及柔性石墨紙的製造方法
US11535567B2 (en) Polyimide-based composite carbon film with high thermal conductivity and preparation method therefor
CN104828808A (zh) 一种石墨烯薄膜的制备方法
JP6793296B2 (ja) グラファイトプレート及びその製造方法
CN104812205B (zh) 抗拉伸散热石墨贴片
CN107043258A (zh) 笔记本电脑用散热片的制造方法
JP5479304B2 (ja) シリコン単結晶ウェーハの熱酸化膜形成方法
CN114318517A (zh) 一种籽晶粘接结构及其提高籽晶粘接均匀性的方法
CN105969224A (zh) 用于电子器件的均热胶带
JP2017202938A (ja) グラファイトプレートとその製造方法
CN106433500A (zh) 用于电子产品的压敏胶带
KR101814805B1 (ko) 탄화규소 소결체, 이의 제조방법 및 이를 포함하는 서셉터
US20140242531A1 (en) Reaction container and vacuum heat treatment apparatus having the same
TW201912688A (zh) 碳化膜之製造方法
CN115534494A (zh) 一种Cu/石墨烯薄膜层状复合材料及其制备方法
TWM444939U (zh) 人造石墨散熱基板
TW201912575A (zh) 石墨膜之製造方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14907028

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14907028

Country of ref document: EP

Kind code of ref document: A1