WO2016059916A1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- WO2016059916A1 WO2016059916A1 PCT/JP2015/075521 JP2015075521W WO2016059916A1 WO 2016059916 A1 WO2016059916 A1 WO 2016059916A1 JP 2015075521 W JP2015075521 W JP 2015075521W WO 2016059916 A1 WO2016059916 A1 WO 2016059916A1
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- WIPO (PCT)
- Prior art keywords
- resin
- fixing member
- resin block
- resin case
- block portion
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
- H01L23/057—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body the leads being parallel to the base
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L2023/4075—Mechanical elements
- H01L2023/4087—Mounting accessories, interposers, clamping or screwing parts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to a semiconductor device.
- FIG. 12A is a plan view of a power semiconductor module described in Patent Document 1 regarding a conventional semiconductor device
- FIG. 12B is a cross-sectional view thereof.
- the laminated substrate 12 is fixed on the heat dissipation base 11.
- the laminated substrate 12 is formed by laminating a metal plate, an insulating plate, and a circuit board.
- the lower end of the main terminal 13 is electrically and mechanically bonded to the circuit board of the multilayer substrate 12 by a bonding material such as solder or direct bonding, and the lower end of the control terminal 140 is directly bonded to a bonding material such as solder. Electrically and mechanically joined by joining.
- a resin case 500 is provided so as to cover the multilayer substrate 12 and is fixed to the heat dissipation base 11 with an adhesive.
- FIG. 12 (c) shows an enlarged view of the main part near the upper end of the main terminal 13.
- the upper end of the main terminal 13 has a U shape by an upper surface portion 13a and two side surface portions 13b connected to both ends of the upper surface portion.
- the upper end of the main terminal 13 protrudes outward through the opening of the resin case 500.
- a nut glove 510 which is a resin body in which a nut is embedded, is inserted between the two side surface portions 13b of the main terminal 13.
- FIG. 12D shows an enlarged view near the upper end of the control terminal 140.
- the control terminal 140 has a first protrusion 140a and a second protrusion 140b with a space therebetween.
- a recess 140c is formed between the first protrusion 140a and the second protrusion 140b.
- a resin block 520 having a convex stepped portion that fits into the concave portion 140 c of the control terminal 140 is inserted into the opening for the control terminal 140 of the resin case 500.
- the recess 140c is engaged with the tip of the resin block 520.
- the control terminal 140 is accurately positioned in the horizontal direction, and the vertical movement due to an external load is suppressed.
- the insertion direction of the nut glove attached to the resin case is different from the insertion direction of the resin block. For this reason, when manufacturing the semiconductor device, it is necessary to separately perform a process of attaching the nut glove to the resin case and a process of attaching the resin block, and time and labor are required for the installation work.
- the present invention advantageously solves the above-described problems, and provides a semiconductor device that can reduce time and labor for mounting work when manufacturing a semiconductor device such as a power semiconductor module. Objective.
- the semiconductor device of the present invention includes a main terminal and a control terminal respectively bonded to the multilayer substrate, and a resin case having an opening through which the control terminal passes and covering the multilayer substrate.
- the control terminal has a recess between the laminated substrate and the opening of the resin case.
- the resin case has a fixing member and a resin case main body to which the fixing member can be attached.
- the fixing member includes a resin block portion having a convex stepped portion that engages with the concave portion of the control terminal, a nut housing portion in which a nut aligned with the main terminal is embedded, the resin block portion, and the nut And a beam portion integrated by connecting the housing portions.
- the resin case body includes a hollow portion into which the resin block portion can be inserted, and the nut housing portion and the resin block portion can be attached from one direction.
- the semiconductor device of the present invention it is possible to reduce the time and labor of the mounting work when manufacturing the semiconductor device.
- FIG. 1 is an explanatory diagram of a power semiconductor module according to Embodiment 1 of the present invention.
- FIG. 2 is an explanatory view of the fixing member.
- FIG. 3 is an enlarged view of the distal end portion of the resin block portion.
- FIG. 4 is a side view of the resin case main body.
- FIG. 5 is an explanatory view of a fixing member of a modified example.
- FIG. 6 is an explanatory diagram of a fixing member according to the second embodiment of the present invention.
- FIG. 7 is a side view of the resin case main body.
- FIG. 8 is a partially enlarged cross-sectional view of a resin case main body and a fixing member according to Embodiment 3 of the present invention.
- FIG. 9 is a plan view of a fixing member according to Embodiment 4 of the present invention.
- FIG. 10 is a side view of a resin case main body according to Embodiment 4 of the present invention.
- FIG. 11 is a side view of a modified resin case main body.
- FIG. 12 is an explanatory diagram of a conventional power semiconductor module.
- the terms “upper” and “lower” mean the positional relationship between the upper side and the lower side in the drawing, and do not mean the positional relationship between the upper and lower sides in the actual use state.
- FIG. 1 is an explanatory diagram of a power semiconductor module 10 which is an embodiment of a semiconductor device of the present invention.
- 1A is a plan view of the power semiconductor module 10
- FIG. 1B is a cross-sectional view taken along line BB of FIG. 1A.
- the power semiconductor module 10 includes a heat dissipation base 11, a laminated substrate 12, a main terminal 13, a control terminal 14, and a resin case 15.
- the laminated substrate 12 is fixed on the heat dissipation base 11.
- the laminated substrate 12 is formed by laminating a metal plate, an insulating plate, and a circuit board, and is fixed to a heat radiating base 11 with a bonding material (not shown), for example, solder, facing the metal plate.
- a predetermined electrical circuit pattern is selectively formed on the circuit board of the laminated substrate 12.
- a power semiconductor chip (not shown) is electrically and mechanically bonded to the circuit board of the laminated substrate 12 by a bonding material. Further, the power semiconductor chip is electrically connected to the circuit board, the main terminal 13 and the control terminal 14 of the laminated substrate 12 by a wiring member (not shown).
- a wiring member not shown
- the power semiconductor chip and the wiring member are not characteristic parts of the present invention, and are not shown.
- the lower end of the main terminal 13 is electrically and mechanically bonded to the circuit board of the multilayer substrate 12 by a bonding material such as solder or direct bonding, and the lower end of the control terminal 14 is directly bonded to a bonding material such as solder. Electrically and mechanically joined by joining.
- the resin case 15 is provided so as to cover the multilayer substrate 12, and is fixed to the heat dissipation base 11 with an adhesive.
- the resin case 15 includes a resin case main body 151 and a fixing member 152 attached to the resin case main body 151.
- the resin case 15 has an opening 15a for projecting the upper end of the main terminal 13 outward, an opening 15b for projecting (penetrating) the upper end of the control terminal 14 outward, and a screw hole 15c. In the illustrated example, there are three main terminals 13 and four control terminals 14.
- FIG. 1 (c) shows an enlarged view of the main part near the upper end of the main terminal 13.
- the upper end of the main terminal 13 has a U shape by an upper surface portion 13a and two side surface portions 13b connected to both ends of the upper surface portion.
- the upper end of the main terminal 13 protrudes outward through the opening of the resin case 15.
- Bolt holes 13c are formed in the upper surface portion 13a.
- a nut accommodating portion 153 of a fixing member 152 constituting the resin case 15 is inserted between the two side surface portions 13 b of the main terminal 13.
- FIG. 1 (d) shows an enlarged view near the upper end of the control terminal 14.
- the control terminal 14 has a first protrusion 14 a and a second protrusion 14 b spaced from each other between the multilayer substrate 12 and the opening 15 b of the resin case 15.
- a recess 14c is formed between the first protrusion 14a and the second protrusion 14b.
- the recess 14 c engages with the tip end portion of the resin block portion 154 of the fixing member 152 of the resin case 15.
- the control terminal 14 is accurately positioned in the horizontal direction, that is, the direction parallel to the in-plane direction of the front surface of the heat radiating base 11, and the vertical movement due to the external load is suppressed. .
- FIG. 2A is a plan view of the fixing member 152 including the nut housing portion 153 and the resin block portion 154.
- FIG. 2B shows a side view of the fixing member 152.
- the fixing member 152 has a shape in which a nut housing portion 153 and two resin block portions 154 provided on both sides of the nut housing portion 153 are connected by a beam portion 155.
- the beam portion 155 connects the nut housing portion 153 and the two resin block portions 154 on one end side in the longitudinal direction of the fixing member 152.
- Each of the nut housing portion 153 and the resin block portion 154 has an elongated bar (box) shape.
- the longitudinal direction of the nut housing part 153 and the longitudinal direction of the resin block part 154 are substantially parallel.
- the fixing member 152 can be attached to the resin case main body 151 in one direction, specifically, from the left direction to the right direction in FIG. 1 (a) and FIG. 2 (a).
- the nut housing portion 153 is a resin body in which nuts 156 for connecting external wiring to the main terminals 13 are embedded.
- three nuts 156 corresponding to the three main terminals 13 are connected to the main terminals 13. It is arranged linearly at the same interval as the interval.
- Each nut 156 of the nut accommodating portion 153 is aligned with each of the main terminals 13. The connection between the main terminal 13 and the external wiring is performed by screwing a bolt or a screw (not shown) to the nut 156 of the nut housing portion 153 through the bolt hole 13c of the main terminal 13.
- FIG. 3 shows an enlarged view of the distal end portion of the resin block portion 154.
- 3A is a top view of the distal end portion of the resin block portion 154
- FIG. 3B is a bottom view of the distal end portion of the resin block portion 154
- FIG. 3C is a side view of the distal end portion of the resin block portion 154.
- a groove 154 a that engages with the resin case is formed at the tip of the resin block portion 154.
- a step portion 154b having a convex shape that engages with the concave portion 14c of the control terminal 14 is formed.
- one projection 154c is formed on each side surface.
- a protrusion 154 d is formed on the bottom surface of the resin block portion 154.
- the step portions 154b are formed on both side surfaces of the front end portion of the resin block portion 154, the concave portions 14c of the control terminals 14 positioned in the step portions 154b can be engaged. Therefore, the two control terminals 14 can be engaged and fixed by one resin block portion 154.
- the protrusions 154c and 154d formed on the side surface and the bottom surface of the front end portion of the resin block portion 154 are engaged with the recesses formed on the inner surface of the recess for the resin block portion 154 provided on the resin case main body 151, thereby resin.
- the block unit 154 is fixed.
- the beam portion 155 of the fixing member 152 shown in FIG. 2 is made of resin and connected to both the nut housing portion 153 and the resin block portion 154.
- the beam portion 155 does not interfere with the main terminal 13 and does not interfere with the screw hole 15 c of the resin case 15 when attached to the resin case main body 151. Therefore, in this embodiment shown in FIG.1 and FIG.2, the beam part 155 is provided in the position between the main terminal 13 and the screw hole 15c.
- the beam portion 155 can be integrally formed with the nut housing portion 153 and the resin block portion 154 by molding.
- FIG. 4 shows a side view of the resin case main body 151.
- a recess 151a for placing the nut housing portion 153 of the fixing member 152, an opening 151b into which the resin block portion 154 is inserted, and a groove 151c to which the beam portion is attached are formed.
- the fixing member 152 can be attached and inserted into the resin case main body 151 from one direction.
- a hollow portion extending in the horizontal direction of the resin case 15 is formed from the two openings 151b for the resin block portion 154 formed on one side surface of the resin case main body 151. The hollow portion reaches the control terminal 14. Yes.
- the resin block portion 154 is inserted into the hollow portion to fix the control terminal 14 (see the plan view of FIG. 1A). Therefore, the hollow portion has a cross-sectional shape into which the resin block portion 154 can be inserted. Further, the extending directions of the two hollow portions corresponding to the two resin block portions 154 are substantially parallel to each other.
- the resin case main body 151 and the fixing member 152 are fixed by engaging the protrusions 154c and 154d of the resin block portion 154 shown in FIG. 2 with a recess formed on the inner surface of the hollow portion of the resin case main body 151. . Therefore, the resin case main body 151 and the fixing member 152 can be fixed without using an adhesive. However, in this embodiment, fixing the resin case main body 151 and the fixing member 152 with an adhesive is not excluded.
- FIG. 5 shows a modification of this embodiment.
- the fixing member 157 shown in a plan view in FIG. 5A and in a side view in FIG. 5B has a protrusion 158 a for fixing to the resin case main body 151 at the rear end of the resin block portion 158.
- the position of the protrusion for engaging the fixing member with the resin case main body may be the front end side or the rear end side.
- the nut housing portion 153 and the resin block portion 154 are integrally formed by the beam portion 155, so that the semiconductor device can be fixed to the resin case main body from one direction. Moreover, the nut accommodating part 153 and the resin block part 154 can be fixed at once. Therefore, when manufacturing a semiconductor device, time and labor can be reduced for the mounting operation.
- FIG. 6 illustrates the fixing member 252 of the present embodiment constituting the resin case as a characteristic configuration of the present embodiment
- FIG. 7 illustrates the resin case main body 251 of the present embodiment.
- the other configuration is basically the same as that of the power semiconductor module 10 shown in FIG. 6 and 7, the same members as those in the above-described embodiment are denoted by the same reference numerals. Therefore, the description which overlaps already demonstrated in previous embodiment is abbreviate
- the fixing member 252 includes a nut housing portion 153, a resin block portion 254, and a beam portion 155.
- the resin block portion 254 has a protrusion 254e on the upper surface.
- the resin case main body 251 includes a groove for guiding the protrusion 254e of the resin block portion 254 on the upper surface of the inner surface of the hollow portion into which the resin block portion 254 is inserted. This groove appears as a depression 251ba above the opening 251b in FIG.
- the two resin block portions 254 are joined by a beam portion 155.
- the extending directions of the two resin block portions 254 may not always maintain parallel. Even in this case, according to the present embodiment, since the protrusion 254e formed on the resin block portion 254 is guided to the groove of the hollow portion, the resin block portion 254 comes into contact with the inner surface of the hollow portion to cause a catch. This can be suppressed, and the resin block portion 254 can be inserted smoothly.
- the protrusion 254 e is formed on the upper surface of the resin block portion 254.
- the position where the protrusion 254e is formed is not limited to the upper surface of the resin block portion 254.
- the position of the protrusion 254e in the longitudinal direction of the resin block portion 254 is not particularly limited.
- the protrusion 254e is preferably formed in the vicinity of the tip portion of the resin block portion 254.
- the protrusion 254 e is formed on each of the two resin block portions 254, but may be formed only on one of the resin block portions 254.
- FIG. 8 is a partial enlarged cross-sectional view of the hollow portion of the resin case main body 351 constituting the resin case and the distal end portion of the resin block 354 of the fixing member inserted into the hollow portion. Indicated.
- the other configuration is basically the same as that of the power semiconductor module 10 shown in FIG.
- a stopper 351f is formed on the inner surface of the hollow portion of the resin case body 351. Further, the resin block 354 has a protrusion 354f that is engaged with the stopper 351f.
- the protrusions 154c and 154d are formed at the front end of the resin block 154.
- the front and rear ends of the resin block 354 are not the front end.
- a protrusion 354f is formed between the protrusions 354f.
- the position of the engaging means for fixing the resin block of the fixing member is not limited.
- the protrusion 254e of the resin block portion 254 described in the previous embodiment and shown in FIG. 6 is provided with a protrusion 354f for engaging with the stopper 351f of the hollow portion of this embodiment. It can be set as the structure which serves also.
- FIG. 9 shows a plan view of the fixing member 452 constituting the resin case as a characteristic configuration of the present embodiment.
- the other configuration is basically the same as that of the power semiconductor module 10 shown in FIG.
- the nut housing portion 453 has a taper 453a at the tip thereof.
- the nut housing portion 453 can be smoothly inserted between the two side surface portions 13b forming the U-shape of the upper end of the main terminal 13. Can do.
- a protrusion is formed on the upper surface of the resin block portion 154, and the resin case main body into which the resin block portion 154 is inserted.
- a groove may be formed in the hollow portion to guide the protrusion.
- FIG. 10 shows a side view of a resin case main body 451 constituting the resin case.
- the resin case main body 451 in FIG. 10 has a taper 451ba in the opening 451b into which the resin block portion 154 of the fixing member 452 in FIG. 9 is inserted. Thereby, the resin block part 154 can be smoothly inserted into the hollow part.
- the resin block portion of the fixing member is not limited to the one inserted into the hollow portion formed in the resin case body.
- a groove for guiding the resin block portion is formed on the upper surface of the resin case main body, and the resin block portion is guided along this groove to fix the control terminal. In the case of this configuration, the resin block portion is exposed on the upper surface of the resin case.
- FIG. 11 is a modification of the resin case main body shown in FIG. 7, and a part of the upper side of the opening 251b is also opened on the upper surface of the resin case to form a slit. Accordingly, the protrusion 254e of the resin block portion 254 of the fixing member 252 shown in FIG. 6 is guided by this slit.
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- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
Description
樹脂ケース500の制御端子140用の開口に、この制御端子140の凹部140cに嵌まり合う凸形状の段差部を有する樹脂ブロック520が挿入されている。凹部140cは、樹脂ブロック520の先端部と係合される。これにより制御端子140は、水平な方向に精度よく位置決めされ、また、外部からの荷重による上下方向の移動が抑制される。
本発明は、上記の問題を有利に解決するものであり、パワー半導体モジュールを例とする半導体装置を製造する際に、取り付け作業に時間及び手間を軽減することのできる半導体装置を提供することを目的とする。
図1は、本発明の半導体装置の一実施形態であるパワー半導体モジュール10の説明図である。図1中、図1(a)はパワー半導体モジュール10の平面図であり、図1(b)は図1(a)のB-B線視の断面図である。パワー半導体モジュール10は、放熱ベース11、積層基板12、主端子13、制御端子14及び樹脂ケース15を備えている。
本発明の半導体装置の別の実施形態を図6、図7を用いて説明する。本実施形態のパワー半導体モジュールは、図1に示したパワー半導体モジュール10と基本的に同様の構成を有している。したがって、本実施形態の特徴的な構成として図6は、樹脂ケースを構成する本実施形態の固定部材252を図示し、図7は、本実施形態の樹脂ケース本体251を図示した。それ以外の構成は、図1に示したパワー半導体モジュール10と基本的に同じである。なお、図6及び図7において、先に示した実施形態と同一部材については同一符号を付している。したがって、先の実施形態ですでに説明したのと重複する説明は省略する。
更に、図6及び図7では、突起254eは2本の樹脂ブロック部254の各々に形成されているが、何れか一方の樹脂ブロック部254のみに形成されていてもよい。
本発明の別の実施形態を、図8を用いて説明する。本実施形態のパワー半導体モジュールは、図1に示したパワー半導体モジュール10と基本的に同様の構成を有している。したがって、本実施形態の特徴的な構成として図8は、樹脂ケースを構成する樹脂ケース本体351の中空部及び当該中空部に挿入された固定部材の樹脂ブロック354の先端部の部分拡大断面図を示した。それ以外の構成は、図1に示したパワー半導体モジュール10と基本的に同じである。
また、本実施形態の変形例として、先の実施形態で説明し、図6に示した樹脂ブロック部254の突起254eが、本実施形態の中空部のストッパー351fと係合するための突起354fを兼ねる構成とすることができる。
本発明の別の実施形態を、図9を用いて説明する。本実施形態のパワー半導体モジュールは、図1に示したパワー半導体モジュール10と基本的に同様の構成を有している。したがって、本実施形態の特徴的な構成として図9は、樹脂ケースを構成する固定部材452の平面図を示した。それ以外の構成は、図1に示したパワー半導体モジュール10と基本的に同じである。
12 積層基板
13 主端子
14 制御端子
14c 凹部
15 樹脂ケース
15b 開口
151、251、351 樹脂ケース本体
151b、251b 中空部
251ba 溝
351f ストッパー
152、252、452 固定部材
153、453 ナット収容部
453a テーパー
154、254、354 樹脂ブロック部
254e 突起
354f 突起
154c、154d 突起
155 梁部
156 ナット
Claims (5)
- 積層基板にそれぞれ接合された主端子及び制御端子と、
前記制御端子が貫通した開口を有し、前記積層基板を覆う樹脂ケースと、
を備え、
前記制御端子が、前記積層基板と前記樹脂ケースの開口との間に凹部を有し、
前記樹脂ケースが、固定部材及び、前記固定部材を取り付け可能な樹脂ケース本体を有し、
前記固定部材は、前記制御端子の凹部と係合する凸形状の段差部を有する樹脂ブロック部と、前記主端子に位置合わせされるナットが埋め込まれたナット収容部と、前記樹脂ブロック部及び前記ナット収容部を連結して一体化した梁部と、を含み、
前記樹脂ケース本体は、前記樹脂ブロック部を挿入可能な中空部を備え、前記ナット収容部及び樹脂ブロック部を、一方向から取り付け可能であることを特徴とする半導体装置。 - 前記固定部材の樹脂ブロック部が、前記樹脂ケース本体と係合する突起を備える請求項1記載の半導体装置。
- 前記樹脂ケース本体の中空部の内面に、前記固定部材の樹脂ブロック部を案内する溝が形成され、
前記固定部材の樹脂ブロック部が、前記溝に案内される突起を備える請求項1記載の半導体装置。 - 前記樹脂ケース本体の中空部の内面に、前記固定部材の樹脂ブロック部を固定するストッパーが形成され、
前記固定部材の樹脂ブロック部が、前記ストッパーと係合する突起を備える請求項1記載の半導体装置。 - 前記固定部材のナット収容部の先端にテーパーが形成された請求項1記載の半導体装置。
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JP2016554015A JP6233528B2 (ja) | 2014-10-14 | 2015-09-08 | 半導体装置 |
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WO2013027826A1 (ja) * | 2011-08-25 | 2013-02-28 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
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