WO2016051855A1 - Moteur linéaire - Google Patents

Moteur linéaire Download PDF

Info

Publication number
WO2016051855A1
WO2016051855A1 PCT/JP2015/064670 JP2015064670W WO2016051855A1 WO 2016051855 A1 WO2016051855 A1 WO 2016051855A1 JP 2015064670 W JP2015064670 W JP 2015064670W WO 2016051855 A1 WO2016051855 A1 WO 2016051855A1
Authority
WO
WIPO (PCT)
Prior art keywords
linear motor
support
support component
magnetic
magnetic pole
Prior art date
Application number
PCT/JP2015/064670
Other languages
English (en)
Japanese (ja)
Inventor
康明 青山
勝彦 白石
大輔 海老澤
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Publication of WO2016051855A1 publication Critical patent/WO2016051855A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Definitions

  • the present invention relates to a linear motor, and more particularly to a linear motor suitable for generating a thrust force for relatively horizontal movement between a permanent magnet of a mover and an armature.
  • Patent Documents 1 to 3 relate to linear motors that generate thrust for moving horizontally between a permanent magnet of a mover and an armature.
  • Patent Document 1 the total attractive force between the mover and the armature that works perpendicular to the moving direction of the mover is canceled out to zero, thereby reducing the attractive force between the magnetic pole surface of the mover and the armature. It is described that the burden on the support mechanism of the mover can be reduced.
  • Patent Document 2 includes an electromagnet that excites a plurality of magnetic pole pairs opposed via an air gap with one coil, and the magnetic pole pairs are arranged in a straight line at a pitch P and are adjacent to each other by excitation of the coil.
  • a stator configured such that the direction of the magnetic field of the pair is reversed; a mover in which permanent magnets are arranged at equal intervals at a pitch P; and the direction of the magnetic field of the magnetic poles of adjacent permanent magnets is reversed;
  • the linear motor is provided with a mover permanent magnet that moves between air gaps, and the magnetic attractive force acting between the stator and mover cancels on both sides of the permanent magnet. Therefore, it is described that the burden on the support mechanism of the mover is small, and there are effects such as improving the reliability of the linear motor.
  • the magnet case for fixing the permanent magnet of the mover has a four-axis configuration, and the magnet case configured to the four axes is connected by connecting parts, and between the magnetic poles of each phase and of the magnetic poles. It is described that the end is sandwiched between magnetic pole holding parts, and the magnet case is held by a support part (consisting of a roller, a roller bearing, or a linear guide) installed on the magnetic pole holding part.
  • the linear motors described in Patent Documents 1 and 2 have an unbalanced attractive force because the magnetic material including the magnetic pole, iron core, and magnetic pole teeth with respect to the permanent magnet is not symmetrical. Further, when magnetic saturation of a magnetic body composed of a magnetic pole, an iron core, and magnetic pole teeth occurs, there is a problem that the magnetic flux of the winding acts directly on the permanent magnet and the attractive force increases. In addition, the use of large thrust has been expanded to increase the size of the linear motor transported goods and the productivity of equipment equipped with the linear motor, and the attraction force is generated by increasing the opposing area between the permanent magnet and the magnetic pole due to the increased thrust. Was a problem.
  • Patent Document 3 describes that a magnet case for fixing a permanent magnet of a mover is held by a support component installed in a magnetic pole holding component, but deformation or the like occurs in the magnet case (mover). No countermeasures are described at all.
  • the present invention has been made in view of the above-mentioned points, and the object of the present invention is to obtain a large thrust and to suppress a failure caused by a deformation of the mover due to an unbalance of suction force or a reaction force during operation.
  • the object is to provide a highly reliable linear motor.
  • the linear motor of the present invention is arranged so as to sandwich a mover formed by arranging a plurality of permanent magnets or magnetic materials while reversing the magnetization direction, and the permanent magnets or magnetic materials.
  • a plurality of magnetic poles arranged in the advancing direction of the mover, and the support member includes the plurality of the support members.
  • the magnetic poles installed are disposed at both ends and a center of the moving element in the traveling direction.
  • FIG. 3 is a view taken along the line AA of the linear motor in FIG. 2 and viewed from the Z-axis direction.
  • FIG. 3 is a view taken along the line BB of the linear motor in FIG. 2 and viewed from the Z-axis direction.
  • It is the perspective view of the state which cut off the upper side of the linear motor in FIG. It is a figure which shows the positional relationship of the coil
  • FIG. 8 is a top view of the linear motor in FIG. 7 (viewed from the Y-axis direction) for explaining the effect of the linear motor according to the second embodiment of the present invention.
  • FIG. 7 It is a schematic diagram for demonstrating the deformation
  • FIG. 3 shows the 1st supporting member in Example 3 of the linear motor of this invention.
  • the linear motor of the present invention will be described based on the illustrated embodiment.
  • the same reference numerals are used for the same components, and the same description is not repeated.
  • the X direction, the Y direction, and the Z direction represent directions as shown in the drawings, and the X direction, the Y direction, and the Z direction are referred to as the left-right direction, the up-down direction, and the front-back direction, respectively.
  • the vertical direction is not need for the vertical direction to be parallel to the direction of gravity.
  • the horizontal direction, the front-rear direction, and other directions are allowed to be parallel to the direction of gravity.
  • 1 to 6 show a first embodiment of the linear motor of the present invention.
  • the linear motor of the present embodiment is arranged so that the permanent magnet 3 is sandwiched between the movers 5a and 5b formed by arranging a plurality of permanent magnets (or magnetic materials) 3 while reversing the magnetization direction.
  • the magnetic pole teeth 1a and 1d as the first magnetic pole teeth and the magnetic pole teeth 1b and 1c as the second magnetic pole teeth and the magnetic pole teeth 1a, 1b, 1c and 1d are connected to form a magnetic body 1e which forms a magnetic flux path.
  • the movers 5 a and 5 b of this embodiment are composed of a permanent magnet 3 and a mover holder 4, and the permanent magnet 3 is fixed to the magnet holder 4. Further, the permanent magnets 3 of the movers 5a and 5b are arranged so that a pole is formed on the surface facing the magnetic pole 1. Accordingly, the magnetization direction of the permanent magnet 3 is the X direction or the ⁇ X direction, and the polarities alternate between the N pole and the S pole between the adjacent permanent magnets 3.
  • the number of phases of the linear motor formed by the pitch P in the Z direction between the permanent magnet 3 and the magnetic pole 1 changes. For example, if the pitch of the magnetic poles 1 is 2P with respect to the pitch P in the Z direction of the permanent magnet 3, a single-phase drive linear motor is obtained.
  • the number of phases of the linear motor is changed by changing the pitch of the permanent magnet 3 and the magnetic pole 1 in the Z direction. Note that the present invention does not limit the number of phases of the linear motor.
  • This embodiment is an example in which a linear motor is constituted by 12 magnetic poles 1, and 12 magnetic poles 1 are provided side by side in the traveling direction of the movers 5a and 5b.
  • a first support member 11 a is arranged at one end of the twelve magnetic poles 1, and a second support member 11 b is arranged at the other end, and at the intermediate portion (center portion) of the twelve magnetic poles 1.
  • a third support member 11c is arranged.
  • the first support member 11a, the second support member 11b, and the third support member 11c include a first support component 10a, a second support component 10b, and a third support member for supporting the movers 5a and 5b.
  • Support parts 10c are respectively provided, and the first support part 10a, the second support part 10b, and the third support part 10c are supported at both ends in the width direction (Y direction) of the movers 5a and 5b.
  • the movers 5a and 5b support the first support so as to sandwich both ends in the width direction of the movers 5a and 5b. It is supported by the component 10a, the second support component 10b, and the third support component 10c.
  • the first support component 10a, the second support component 10b, and the third support component 10c are any one of a roller, a linear guide, and a sliding bearing, and can support the movers 5a and 5b. If possible, the method does not matter.
  • FIG. 3 is an example of the arrangement of the first support component 10a installed on the first support member 11a.
  • the left and right (X direction) movers 5a and 5b are first support components 10a provided on the first support member 11a, respectively, and the widthwise ends of the movers 5a and 5b are respectively connected. It is held so as to be sandwiched from the left and right.
  • the first support component 10a at the end of one magnetic pole 1 is used as the first support point
  • the second support component 10b at the end of the other magnetic pole 1 is used as the first support point.
  • the second support point by providing a third support point (third support component 10c) at the center between the first support point and the second support point, the movers 5a and 5b The deformation (deflection) is suppressed.
  • FIG. 4 is an example of the force acting on the permanent magnets 3 of the movers 5a and 5b supported by the second support component 10b installed on the second support member 11b.
  • the magnetic pole teeth 1a and the magnetic pole teeth 1b are arranged so as to face the front and back of the permanent magnet 3 of the mover 5a.
  • a winding 2a is wound around the magnetic pole tooth 1a
  • a winding 2b is wound around the magnetic pole tooth 1b.
  • the magnetic pole teeth 1a and the magnetic pole teeth 1b have the same shape, but if there is a difference in the currents of the windings 2a and 2b due to an imbalance in the electrical resistance between the windings 2a and 2b, the permanent magnet 3 Receives suction in the X direction. The same applies to the permanent magnet 3 of the mover 5b.
  • a winding 2a is provided on the left side ( ⁇ X side) of the permanent magnet 3 of the mover 5a.
  • the winding 2b, the winding 2c wound around the magnetic pole teeth 1c, and the winding 2d wound around the magnetic pole teeth 1d exist on the right side (+ X side) of the permanent magnet 3 of the mover 5a.
  • a suction force is also generated by the left-right imbalance between the winding 2a, the winding 2b, the winding 2c, and the winding 2d.
  • the magnetic pole teeth 1a, 1b, 1c and 1d form a closed magnetic circuit by the magnetic body 1e connecting the magnetic pole teeth 1a, 1b, 1c and 1d.
  • the influence of the left and right imbalance between the winding 2a and the winding 2b, the winding 2c and the winding 2d is small, when the magnetic saturation occurs in the magnetic pole 1, the influence of the left and right imbalance becomes large and the permanent magnet 3 is not affected.
  • the suction power increases. Due to this influence, the deformation of the movers 5a and 5b becomes large.
  • the first support component 10a at one end of the magnetic pole 1 is the first support point
  • the second support component 10b at the end of the other magnetic pole 1 is the second support point.
  • third support point third support component 10c
  • FIG. 5 shows the top surface of the linear motor cut out in the XZ plane for the sake of explanation.
  • the first support component 10a, the second support component 10b, and the third support component 10a of the left movable element 5a are shown using FIG.
  • the arrangement of the support component 10c will be described.
  • a first support member 11a having a first support component 10a is installed on the front side ( ⁇ Z side) of 12 magnetic poles 1 arranged side by side, and the back side (+ Z side) of the magnetic pole 1 ) Is provided with a second support member 11b having a second support component 10b, and in the present embodiment, a third support member 11b is provided at the center between the first support member 11a and the second support member 11b.
  • a third support member 11c having a support component 10c is arranged, and the movable element 5a is supported by each of the first support member 11a, the second support member 11b, and the third support member 11c.
  • the first support part As described above, when the movable element 5a is deformed by the attractive force generated by unbalance between the windings 2 and the like, and there is no third support member 11c having the third support part 10c, the first support part The moment at the suction force generation point away from 10a and the second support component 10b increases, and the amount of deformation of the mover 5a becomes the largest.
  • the suction force generation point away from the first support component 10a and the second support component 10b is an intermediate point (center point) in the Z direction between the first support component 10a and the second support component 10b. This is the position of the support component 10c.
  • the deformation of the mover 5a can be effectively suppressed by disposing the third support component 10c at the intermediate point in the Z direction between the first support component 10a and the second support component 10b.
  • FIG. 5 a plurality of upper support parts that exist in the Y direction of the mover 5a have been described.
  • the upper support parts are not limited to one, and the same applies to the lower support parts.
  • FIG. 6 is an example of the second support component 10b installed on the second support member 11b.
  • the second support component 10b can be arranged without interfering with the windings 2a, 2b, 2c and 2d (the same applies to the first support component 10a and the third support component 10c). Therefore, there is an effect that the second support component 10b can be arranged without increasing the interval between the magnetic poles 1 (the same applies to the first support component 10a and the third support component 10c).
  • a large thrust can be obtained, and failures caused by the deformation of the movers 5a and 5b due to the unbalance of the suction force or the reaction force during operation are suppressed, and reliability is improved.
  • High linear motor can be obtained.
  • the linear motor according to the present embodiment includes a first support member 11a having a first support component 10a at one end of twelve magnetic poles 1 and a second support at the other end.
  • a second support member 11b including the support component 10b is disposed, and a third support member 11c including the third support component 10c is disposed at the center of the 12 magnetic poles 1 in the Z direction. Yes.
  • the lead portions 2e of the windings 2a, 2b, 2c, and 2d are projected from between the magnetic poles 1, and at the end portions of the two movers 5a and 5b in the Z direction, 5 b are connected by a connecting member 12.
  • the first support member 11a having the first support component 10a and the third support member 11c having the third support component 10c are provided.
  • the fourth support member 11d provided with the fourth support component 10d is composed of the second support member 11b provided with the second support component 10b and the third support member 11c provided with the third support component 10c.
  • fifth support members 11e each having a fifth support component 10e are arranged. That is, between each of the first, second, and third support members 11a, 11b, and 11c disposed at both ends and the center of the moving elements 5a and 5b of the magnetic pole 1 provided in plurality, The fourth and fifth support members 11d and 11e are arranged.
  • the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e can be disposed therebetween.
  • the first support member 11a, the second support member 11b, the third support member 11c, the fourth support member 11d, and the fifth support member 11e are arranged between the plurality of magnetic poles 1.
  • the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d and the fifth support component 10e can be arranged without increasing the interval between the magnetic poles 1. Even if a large number of the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e are installed, the size of the linear motor does not increase. .
  • the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e are connected to the magnetic pole teeth 1a, 1b, 1c, and 1d.
  • the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e are damaged.
  • it is not necessary to prevent scattering and to make a protrusion on the linear motor, and a small linear motor can be configured.
  • FIG. 9 shows a configuration example of the fourth support member 11d including the above-described fourth support component 10d.
  • the fourth support member 11d includes four fourth support components 10d on the upper side and the lower side, respectively, and the fourth support member 11d includes windings 2a and 2b.
  • 2c and 2d are provided in the grooves 13, and the windings 2a, 2b, 2c and 2d are held in the grooves 13, so that the windings 2a, 2b, 2c and 2d can be made electromagnetically Damage to the windings 2a, 2b, 2c and 2d due to the working force can be reduced, and the reliability of the linear motor can be improved.
  • the first support member 11a, the second support member 11b, the third support member 11c, the fourth support member 11d, and the fifth support are provided between both ends of the twelve magnetic poles 1 and between the magnetic poles 1.
  • the member 11e is arranged, and the movers 5a and 5b are arranged so as to penetrate the twelve magnetic poles 1.
  • the movers 5a and 5b are connected by connecting members 12 at both ends in the Z direction.
  • the mover 5a on the ⁇ X direction side has a winding 2a on the ⁇ X direction side of the mover 5a, and the + X direction. On the side are windings 2b, 2c and 2d.
  • the number of the windings 2b, 2c and 2d in the + X direction becomes unbalanced, and a suction force in the + X direction is generated as viewed from the mover 5a.
  • the winding 2d is on the + X direction side of the mover 5b, and the windings 2a, 2b, and 2c are on the -X direction side. Therefore, the suction force works in the ⁇ X direction. That is, a suction force acts on the central axis 22 side in the traveling direction of the movers 5a and 5b when viewed from the movers 5a and 5b. Therefore, it is effective to dispose the support component on the side of the central axis 22 in the traveling direction of the movers 5a and 5b when viewed from the movers 5a and 5b.
  • FIG. 11A shows a case where the first support component 10a and the second support component 10b are provided on both sides of the magnetic pole range 21 in the Z direction.
  • the moving direction of the movers 5a and 5b is shown.
  • a suction force 20 acts on the central axis 22 side. Therefore, by providing the third support component 10c at the center of the range 21 of the magnetic pole 1, as shown in FIG. 11B, the attractive force 20 toward the central axis 22 in the traveling direction of the movers 5a and 5b.
  • transformation with respect to can be suppressed.
  • FIG. 12 shows a third embodiment of the linear motor of the present invention.
  • the first support member 11a is provided at the intermediate portion between the first support components 10a supporting the upper and lower ends in the width direction (Y direction) of the movers 5a and 5b.
  • Another provided first support component 10a ' is installed. That is, in addition to the configuration of the first embodiment shown in FIG. 3, another first support component 10a ′ is installed in the intermediate portion between the first support components 10a.
  • another first support component 10a ′ is provided in the middle part between the first support components 10a that support the upper and lower ends of the movers 5a and 5b in the Y direction, so The bending and deformation of the movers 5a and 5b are suppressed.
  • FIGS. 13 to 15 show a fourth embodiment of the linear motor of the present invention.
  • the present embodiment shown in the figure is a modification of the third embodiment shown in FIG.
  • first support components 10a ′ are provided between the first support components 10a that support the upper and lower ends of the movers 5a and 5b in the Y direction, and are movable at four locations.
  • the elements 5a and 5b are supported to suppress the bending and deformation of the movers 5a and 5b in the XY plane.
  • the first support component 10a, the second support component 10a, and the second support component 10a are arranged at both ends of the twelve magnetic poles 1 and the central portion of the twelve magnetic poles 1.
  • the first support member 11a, the second support member 11b, and the third support member 11c having the three support components 10c are provided, and the first support member 11a, the second support member 11b, and the second support member 11c are provided.
  • a plurality of support members including the three support members 11c are arranged alternately with the magnetic poles 1 between the twelve magnetic poles 1 arranged so as to support the movers 5a and 5b with support parts.
  • first support components 10a ′, 12 both end portions of the 12 magnetic poles 1 and 12 are arranged between the first support components 10a that support both ends in the Y direction.
  • a support member provided with support parts may be arranged intermittently between twelve magnetic poles 1 arranged, or a support member provided with support parts every three magnetic poles 1 may be provided.
  • a support member provided with a holding part can be selected arbitrarily.
  • 16 to 17 show a fifth embodiment of the linear motor of the present invention.
  • 16 shows an example of the first support component 10a installed on the first support member 11a
  • FIG. 17 shows an example of the third support component 10c installed on the third support member 11c.
  • the movers 5a and 5b in the linear motor of the present embodiment shown in FIG. 16 are fixed to the permanent magnet 3, the first magnet holder 4a for fixing the permanent magnet 3, and the first magnet holder 4a.
  • the portion of the second magnet holder 4b in contact with the first support component 10a and the portion of the second magnet holder 4b in contact with the first support component 10a are made thicker so that the mover 5a and The deformation of 5b can be suppressed.
  • the cross-sectional shapes of the movers 5a and 5b are H-shaped by the upper and lower (Y direction) second magnet holder 4b, the first magnet holder 4a and the permanent magnet 3 connecting them, and the windings 2a,
  • a linear motor can be configured without interference between 2b, 2c and 2d and the magnetic pole 1.
  • the shape of the first support component 10a that supports the movers 5a and 5b into a stepped shape, it becomes possible to suppress the Y direction of the movers 5a and 5b, and the Y direction of the movers 5a and 5b. It is possible to prevent the windings 2a, 2b, 2c and 2d and the movers 5a and 5b from coming into contact with each other due to vibration and displacement.
  • the movers 5a and 5b when the thickness of the second magnet holder 4b in the portion in contact with the first support component 10a is increased in the X direction, the movers 5a and 5b The windings 2a, 2b, 2c, and 2d and the movers 5a and 5b come into contact with each other due to vibration and displacement in the Y direction, and the insulating layers of the windings 2a, 2b, 2c, and 2d are damaged. May occur.
  • the first support component 10a that supports the movers 5a and 5b has a stepped shape, so that the operations of the movers 5a and 5b are stabilized, and the movers 5a and 5b are stable.
  • the operation of the movers 5a and 5b can also be stabilized by making the shape of the first support component 10a or the contact portions of the movers 5a and 5b with the first support component 10a V-shaped.
  • the installation area of the third support component 11c formed of a magnetic material disposed between the magnetic poles 1 in this embodiment will be described with reference to FIG.
  • the third support component 11c disposed between the magnetic poles 1 is formed of a magnetic material.
  • the magnetic path can be expanded. 1 can be relaxed.
  • a magnetic material is disposed on the outer peripheral side of the windings 2a, 2b, 2c, and 2d.
  • the outer peripheral side region 23 of the windings 2a, 2b, 2c and 2d is arranged on the outer peripheral side of the windings 2a, 2b, 2c and 2d which are arranged so as to sandwich the permanent magnet 3, thereby reducing the leakage magnetic flux. is there.
  • the linear motor when twelve magnetic poles 1 are arranged has been described.
  • the linear motor of the present invention is not limited to this number of magnetic poles.
  • the linear motor can be used as a linear drive system such as an injection molding machine or a press machine, or as an operating device for a power switchgear.
  • this invention is not limited to the above-mentioned Example, Various modifications are included.
  • the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. It is possible to add, delete, and replace the configuration of a part of the configuration of the embodiment.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)

Abstract

La présente invention concerne un moteur linéaire qui est capable de générer une importante poussée, contrecarre les pannes survenant du fait d'une force de réaction pendant le fonctionnement et d'une déformation de l'élément mobile causée par un déséquilibre des forces d'attraction, et présente une excellente fiabilité. Ce moteur linéaire est caractérisé en ce qu'il comporte: un élément mobile formé en agençant une pluralité d'aimants permanents ou de pièces en matériau magnétique de manière à inverser leurs sens d'aimantation; des pôles magnétiques comportant des premières et deuxièmes dents de pôles magnétiques disposées de façon à prendre en sandwich les aimants permanents ou les pièces en matériau magnétique, et des corps magnétiques qui relient les premières et deuxièmes dents de pôles magnétiques et qui forment un circuit de flux magnétique; des enroulements qui sont enroulés autour de chacune des premières et deuxièmes dents de pôles magnétiques; et des éléments de soutien servant à soutenir l'élément mobile. Le moteur linéaire est en outre caractérisé en ce que: la pluralité de pôles magnétiques est installée dans la direction de déplacement de l'élément mobile; et les éléments de soutien équipent des parties centrales et les deux parties d'extrémités de la pluralité de pôles magnétiques installés dans la direction de déplacement de l'élément mobile.
PCT/JP2015/064670 2014-10-02 2015-05-22 Moteur linéaire WO2016051855A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014203613A JP2016073164A (ja) 2014-10-02 2014-10-02 リニアモータ
JP2014-203613 2014-10-02

Publications (1)

Publication Number Publication Date
WO2016051855A1 true WO2016051855A1 (fr) 2016-04-07

Family

ID=55629911

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2015/064670 WO2016051855A1 (fr) 2014-10-02 2015-05-22 Moteur linéaire

Country Status (2)

Country Link
JP (1) JP2016073164A (fr)
WO (1) WO2016051855A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247264A (ja) * 1985-04-23 1986-11-04 Yaskawa Electric Mfg Co Ltd リニアモ−タ
JP2005287185A (ja) * 2004-03-30 2005-10-13 Hitachi Ltd リニアモータ
JP2011223697A (ja) * 2010-04-07 2011-11-04 Hitachi Metals Ltd リニアモータ
WO2014065308A1 (fr) * 2012-10-24 2014-05-01 株式会社日立製作所 Moteur linéaire, et système d'entraînement de celui-ci

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247264A (ja) * 1985-04-23 1986-11-04 Yaskawa Electric Mfg Co Ltd リニアモ−タ
JP2005287185A (ja) * 2004-03-30 2005-10-13 Hitachi Ltd リニアモータ
JP2011223697A (ja) * 2010-04-07 2011-11-04 Hitachi Metals Ltd リニアモータ
WO2014065308A1 (fr) * 2012-10-24 2014-05-01 株式会社日立製作所 Moteur linéaire, et système d'entraînement de celui-ci

Also Published As

Publication number Publication date
JP2016073164A (ja) 2016-05-09

Similar Documents

Publication Publication Date Title
CN106469968B (zh) 直线电动机
JP5991326B2 (ja) リニアモータ
WO2014065308A1 (fr) Moteur linéaire, et système d'entraînement de celui-ci
JP5648873B2 (ja) リニアモータ
JP3360606B2 (ja) リニアモータ
EP2712070A1 (fr) Moteur vernier linéaire
JPWO2011154995A1 (ja) リニアモータおよびそれを用いた位置決め装置
KR20090091029A (ko) 3상 리니어모터용 코일유닛 및 3상 리니어모터
CN105075081A (zh) 直线电机
EP3326276B1 (fr) Moteur linéaire à flux transversal
JP5488831B2 (ja) リニアモータ及びステージ装置
WO2013047610A1 (fr) Actionneur
WO2016051855A1 (fr) Moteur linéaire
US10811950B2 (en) Linear motor and device provided with linear motor
JP6854158B2 (ja) リニアモータ
JP2002101636A (ja) リニアモータ
JP2015089189A (ja) リニアモータ
JP6389690B2 (ja) リニアモータ及びそれを用いた遮断器
JP6061372B2 (ja) 電磁石形アクチュエータ及びこれを用いた平面モータ
JP5909973B2 (ja) リニア駆動装置
JP5067438B2 (ja) リニアモータおよびそれを用いたテーブル送り装置
JP2024049435A (ja) ヨーク組立体及びリニアモータ
JP2018137873A (ja) リニアモータ
JP2006014391A (ja) リニアモータ電機子、リニアモータおよび平面モータ
JP2012060853A (ja) ２自由度アクチュエータ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15846089

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 15846089

Country of ref document: EP

Kind code of ref document: A1