WO2016051855A1 - Linear motor - Google Patents

Linear motor Download PDF

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Publication number
WO2016051855A1
WO2016051855A1 PCT/JP2015/064670 JP2015064670W WO2016051855A1 WO 2016051855 A1 WO2016051855 A1 WO 2016051855A1 JP 2015064670 W JP2015064670 W JP 2015064670W WO 2016051855 A1 WO2016051855 A1 WO 2016051855A1
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WIPO (PCT)
Prior art keywords
linear motor
support
support component
magnetic
magnetic pole
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PCT/JP2015/064670
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French (fr)
Japanese (ja)
Inventor
康明 青山
勝彦 白石
大輔 海老澤
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株式会社日立製作所
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Publication of WO2016051855A1 publication Critical patent/WO2016051855A1/en

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Definitions

  • the present invention relates to a linear motor, and more particularly to a linear motor suitable for generating a thrust force for relatively horizontal movement between a permanent magnet of a mover and an armature.
  • Patent Documents 1 to 3 relate to linear motors that generate thrust for moving horizontally between a permanent magnet of a mover and an armature.
  • Patent Document 1 the total attractive force between the mover and the armature that works perpendicular to the moving direction of the mover is canceled out to zero, thereby reducing the attractive force between the magnetic pole surface of the mover and the armature. It is described that the burden on the support mechanism of the mover can be reduced.
  • Patent Document 2 includes an electromagnet that excites a plurality of magnetic pole pairs opposed via an air gap with one coil, and the magnetic pole pairs are arranged in a straight line at a pitch P and are adjacent to each other by excitation of the coil.
  • a stator configured such that the direction of the magnetic field of the pair is reversed; a mover in which permanent magnets are arranged at equal intervals at a pitch P; and the direction of the magnetic field of the magnetic poles of adjacent permanent magnets is reversed;
  • the linear motor is provided with a mover permanent magnet that moves between air gaps, and the magnetic attractive force acting between the stator and mover cancels on both sides of the permanent magnet. Therefore, it is described that the burden on the support mechanism of the mover is small, and there are effects such as improving the reliability of the linear motor.
  • the magnet case for fixing the permanent magnet of the mover has a four-axis configuration, and the magnet case configured to the four axes is connected by connecting parts, and between the magnetic poles of each phase and of the magnetic poles. It is described that the end is sandwiched between magnetic pole holding parts, and the magnet case is held by a support part (consisting of a roller, a roller bearing, or a linear guide) installed on the magnetic pole holding part.
  • the linear motors described in Patent Documents 1 and 2 have an unbalanced attractive force because the magnetic material including the magnetic pole, iron core, and magnetic pole teeth with respect to the permanent magnet is not symmetrical. Further, when magnetic saturation of a magnetic body composed of a magnetic pole, an iron core, and magnetic pole teeth occurs, there is a problem that the magnetic flux of the winding acts directly on the permanent magnet and the attractive force increases. In addition, the use of large thrust has been expanded to increase the size of the linear motor transported goods and the productivity of equipment equipped with the linear motor, and the attraction force is generated by increasing the opposing area between the permanent magnet and the magnetic pole due to the increased thrust. Was a problem.
  • Patent Document 3 describes that a magnet case for fixing a permanent magnet of a mover is held by a support component installed in a magnetic pole holding component, but deformation or the like occurs in the magnet case (mover). No countermeasures are described at all.
  • the present invention has been made in view of the above-mentioned points, and the object of the present invention is to obtain a large thrust and to suppress a failure caused by a deformation of the mover due to an unbalance of suction force or a reaction force during operation.
  • the object is to provide a highly reliable linear motor.
  • the linear motor of the present invention is arranged so as to sandwich a mover formed by arranging a plurality of permanent magnets or magnetic materials while reversing the magnetization direction, and the permanent magnets or magnetic materials.
  • a plurality of magnetic poles arranged in the advancing direction of the mover, and the support member includes the plurality of the support members.
  • the magnetic poles installed are disposed at both ends and a center of the moving element in the traveling direction.
  • FIG. 3 is a view taken along the line AA of the linear motor in FIG. 2 and viewed from the Z-axis direction.
  • FIG. 3 is a view taken along the line BB of the linear motor in FIG. 2 and viewed from the Z-axis direction.
  • It is the perspective view of the state which cut off the upper side of the linear motor in FIG. It is a figure which shows the positional relationship of the coil
  • FIG. 8 is a top view of the linear motor in FIG. 7 (viewed from the Y-axis direction) for explaining the effect of the linear motor according to the second embodiment of the present invention.
  • FIG. 7 It is a schematic diagram for demonstrating the deformation
  • FIG. 3 shows the 1st supporting member in Example 3 of the linear motor of this invention.
  • the linear motor of the present invention will be described based on the illustrated embodiment.
  • the same reference numerals are used for the same components, and the same description is not repeated.
  • the X direction, the Y direction, and the Z direction represent directions as shown in the drawings, and the X direction, the Y direction, and the Z direction are referred to as the left-right direction, the up-down direction, and the front-back direction, respectively.
  • the vertical direction is not need for the vertical direction to be parallel to the direction of gravity.
  • the horizontal direction, the front-rear direction, and other directions are allowed to be parallel to the direction of gravity.
  • 1 to 6 show a first embodiment of the linear motor of the present invention.
  • the linear motor of the present embodiment is arranged so that the permanent magnet 3 is sandwiched between the movers 5a and 5b formed by arranging a plurality of permanent magnets (or magnetic materials) 3 while reversing the magnetization direction.
  • the magnetic pole teeth 1a and 1d as the first magnetic pole teeth and the magnetic pole teeth 1b and 1c as the second magnetic pole teeth and the magnetic pole teeth 1a, 1b, 1c and 1d are connected to form a magnetic body 1e which forms a magnetic flux path.
  • the movers 5 a and 5 b of this embodiment are composed of a permanent magnet 3 and a mover holder 4, and the permanent magnet 3 is fixed to the magnet holder 4. Further, the permanent magnets 3 of the movers 5a and 5b are arranged so that a pole is formed on the surface facing the magnetic pole 1. Accordingly, the magnetization direction of the permanent magnet 3 is the X direction or the ⁇ X direction, and the polarities alternate between the N pole and the S pole between the adjacent permanent magnets 3.
  • the number of phases of the linear motor formed by the pitch P in the Z direction between the permanent magnet 3 and the magnetic pole 1 changes. For example, if the pitch of the magnetic poles 1 is 2P with respect to the pitch P in the Z direction of the permanent magnet 3, a single-phase drive linear motor is obtained.
  • the number of phases of the linear motor is changed by changing the pitch of the permanent magnet 3 and the magnetic pole 1 in the Z direction. Note that the present invention does not limit the number of phases of the linear motor.
  • This embodiment is an example in which a linear motor is constituted by 12 magnetic poles 1, and 12 magnetic poles 1 are provided side by side in the traveling direction of the movers 5a and 5b.
  • a first support member 11 a is arranged at one end of the twelve magnetic poles 1, and a second support member 11 b is arranged at the other end, and at the intermediate portion (center portion) of the twelve magnetic poles 1.
  • a third support member 11c is arranged.
  • the first support member 11a, the second support member 11b, and the third support member 11c include a first support component 10a, a second support component 10b, and a third support member for supporting the movers 5a and 5b.
  • Support parts 10c are respectively provided, and the first support part 10a, the second support part 10b, and the third support part 10c are supported at both ends in the width direction (Y direction) of the movers 5a and 5b.
  • the movers 5a and 5b support the first support so as to sandwich both ends in the width direction of the movers 5a and 5b. It is supported by the component 10a, the second support component 10b, and the third support component 10c.
  • the first support component 10a, the second support component 10b, and the third support component 10c are any one of a roller, a linear guide, and a sliding bearing, and can support the movers 5a and 5b. If possible, the method does not matter.
  • FIG. 3 is an example of the arrangement of the first support component 10a installed on the first support member 11a.
  • the left and right (X direction) movers 5a and 5b are first support components 10a provided on the first support member 11a, respectively, and the widthwise ends of the movers 5a and 5b are respectively connected. It is held so as to be sandwiched from the left and right.
  • the first support component 10a at the end of one magnetic pole 1 is used as the first support point
  • the second support component 10b at the end of the other magnetic pole 1 is used as the first support point.
  • the second support point by providing a third support point (third support component 10c) at the center between the first support point and the second support point, the movers 5a and 5b The deformation (deflection) is suppressed.
  • FIG. 4 is an example of the force acting on the permanent magnets 3 of the movers 5a and 5b supported by the second support component 10b installed on the second support member 11b.
  • the magnetic pole teeth 1a and the magnetic pole teeth 1b are arranged so as to face the front and back of the permanent magnet 3 of the mover 5a.
  • a winding 2a is wound around the magnetic pole tooth 1a
  • a winding 2b is wound around the magnetic pole tooth 1b.
  • the magnetic pole teeth 1a and the magnetic pole teeth 1b have the same shape, but if there is a difference in the currents of the windings 2a and 2b due to an imbalance in the electrical resistance between the windings 2a and 2b, the permanent magnet 3 Receives suction in the X direction. The same applies to the permanent magnet 3 of the mover 5b.
  • a winding 2a is provided on the left side ( ⁇ X side) of the permanent magnet 3 of the mover 5a.
  • the winding 2b, the winding 2c wound around the magnetic pole teeth 1c, and the winding 2d wound around the magnetic pole teeth 1d exist on the right side (+ X side) of the permanent magnet 3 of the mover 5a.
  • a suction force is also generated by the left-right imbalance between the winding 2a, the winding 2b, the winding 2c, and the winding 2d.
  • the magnetic pole teeth 1a, 1b, 1c and 1d form a closed magnetic circuit by the magnetic body 1e connecting the magnetic pole teeth 1a, 1b, 1c and 1d.
  • the influence of the left and right imbalance between the winding 2a and the winding 2b, the winding 2c and the winding 2d is small, when the magnetic saturation occurs in the magnetic pole 1, the influence of the left and right imbalance becomes large and the permanent magnet 3 is not affected.
  • the suction power increases. Due to this influence, the deformation of the movers 5a and 5b becomes large.
  • the first support component 10a at one end of the magnetic pole 1 is the first support point
  • the second support component 10b at the end of the other magnetic pole 1 is the second support point.
  • third support point third support component 10c
  • FIG. 5 shows the top surface of the linear motor cut out in the XZ plane for the sake of explanation.
  • the first support component 10a, the second support component 10b, and the third support component 10a of the left movable element 5a are shown using FIG.
  • the arrangement of the support component 10c will be described.
  • a first support member 11a having a first support component 10a is installed on the front side ( ⁇ Z side) of 12 magnetic poles 1 arranged side by side, and the back side (+ Z side) of the magnetic pole 1 ) Is provided with a second support member 11b having a second support component 10b, and in the present embodiment, a third support member 11b is provided at the center between the first support member 11a and the second support member 11b.
  • a third support member 11c having a support component 10c is arranged, and the movable element 5a is supported by each of the first support member 11a, the second support member 11b, and the third support member 11c.
  • the first support part As described above, when the movable element 5a is deformed by the attractive force generated by unbalance between the windings 2 and the like, and there is no third support member 11c having the third support part 10c, the first support part The moment at the suction force generation point away from 10a and the second support component 10b increases, and the amount of deformation of the mover 5a becomes the largest.
  • the suction force generation point away from the first support component 10a and the second support component 10b is an intermediate point (center point) in the Z direction between the first support component 10a and the second support component 10b. This is the position of the support component 10c.
  • the deformation of the mover 5a can be effectively suppressed by disposing the third support component 10c at the intermediate point in the Z direction between the first support component 10a and the second support component 10b.
  • FIG. 5 a plurality of upper support parts that exist in the Y direction of the mover 5a have been described.
  • the upper support parts are not limited to one, and the same applies to the lower support parts.
  • FIG. 6 is an example of the second support component 10b installed on the second support member 11b.
  • the second support component 10b can be arranged without interfering with the windings 2a, 2b, 2c and 2d (the same applies to the first support component 10a and the third support component 10c). Therefore, there is an effect that the second support component 10b can be arranged without increasing the interval between the magnetic poles 1 (the same applies to the first support component 10a and the third support component 10c).
  • a large thrust can be obtained, and failures caused by the deformation of the movers 5a and 5b due to the unbalance of the suction force or the reaction force during operation are suppressed, and reliability is improved.
  • High linear motor can be obtained.
  • the linear motor according to the present embodiment includes a first support member 11a having a first support component 10a at one end of twelve magnetic poles 1 and a second support at the other end.
  • a second support member 11b including the support component 10b is disposed, and a third support member 11c including the third support component 10c is disposed at the center of the 12 magnetic poles 1 in the Z direction. Yes.
  • the lead portions 2e of the windings 2a, 2b, 2c, and 2d are projected from between the magnetic poles 1, and at the end portions of the two movers 5a and 5b in the Z direction, 5 b are connected by a connecting member 12.
  • the first support member 11a having the first support component 10a and the third support member 11c having the third support component 10c are provided.
  • the fourth support member 11d provided with the fourth support component 10d is composed of the second support member 11b provided with the second support component 10b and the third support member 11c provided with the third support component 10c.
  • fifth support members 11e each having a fifth support component 10e are arranged. That is, between each of the first, second, and third support members 11a, 11b, and 11c disposed at both ends and the center of the moving elements 5a and 5b of the magnetic pole 1 provided in plurality, The fourth and fifth support members 11d and 11e are arranged.
  • the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e can be disposed therebetween.
  • the first support member 11a, the second support member 11b, the third support member 11c, the fourth support member 11d, and the fifth support member 11e are arranged between the plurality of magnetic poles 1.
  • the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d and the fifth support component 10e can be arranged without increasing the interval between the magnetic poles 1. Even if a large number of the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e are installed, the size of the linear motor does not increase. .
  • the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e are connected to the magnetic pole teeth 1a, 1b, 1c, and 1d.
  • the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e are damaged.
  • it is not necessary to prevent scattering and to make a protrusion on the linear motor, and a small linear motor can be configured.
  • FIG. 9 shows a configuration example of the fourth support member 11d including the above-described fourth support component 10d.
  • the fourth support member 11d includes four fourth support components 10d on the upper side and the lower side, respectively, and the fourth support member 11d includes windings 2a and 2b.
  • 2c and 2d are provided in the grooves 13, and the windings 2a, 2b, 2c and 2d are held in the grooves 13, so that the windings 2a, 2b, 2c and 2d can be made electromagnetically Damage to the windings 2a, 2b, 2c and 2d due to the working force can be reduced, and the reliability of the linear motor can be improved.
  • the first support member 11a, the second support member 11b, the third support member 11c, the fourth support member 11d, and the fifth support are provided between both ends of the twelve magnetic poles 1 and between the magnetic poles 1.
  • the member 11e is arranged, and the movers 5a and 5b are arranged so as to penetrate the twelve magnetic poles 1.
  • the movers 5a and 5b are connected by connecting members 12 at both ends in the Z direction.
  • the mover 5a on the ⁇ X direction side has a winding 2a on the ⁇ X direction side of the mover 5a, and the + X direction. On the side are windings 2b, 2c and 2d.
  • the number of the windings 2b, 2c and 2d in the + X direction becomes unbalanced, and a suction force in the + X direction is generated as viewed from the mover 5a.
  • the winding 2d is on the + X direction side of the mover 5b, and the windings 2a, 2b, and 2c are on the -X direction side. Therefore, the suction force works in the ⁇ X direction. That is, a suction force acts on the central axis 22 side in the traveling direction of the movers 5a and 5b when viewed from the movers 5a and 5b. Therefore, it is effective to dispose the support component on the side of the central axis 22 in the traveling direction of the movers 5a and 5b when viewed from the movers 5a and 5b.
  • FIG. 11A shows a case where the first support component 10a and the second support component 10b are provided on both sides of the magnetic pole range 21 in the Z direction.
  • the moving direction of the movers 5a and 5b is shown.
  • a suction force 20 acts on the central axis 22 side. Therefore, by providing the third support component 10c at the center of the range 21 of the magnetic pole 1, as shown in FIG. 11B, the attractive force 20 toward the central axis 22 in the traveling direction of the movers 5a and 5b.
  • transformation with respect to can be suppressed.
  • FIG. 12 shows a third embodiment of the linear motor of the present invention.
  • the first support member 11a is provided at the intermediate portion between the first support components 10a supporting the upper and lower ends in the width direction (Y direction) of the movers 5a and 5b.
  • Another provided first support component 10a ' is installed. That is, in addition to the configuration of the first embodiment shown in FIG. 3, another first support component 10a ′ is installed in the intermediate portion between the first support components 10a.
  • another first support component 10a ′ is provided in the middle part between the first support components 10a that support the upper and lower ends of the movers 5a and 5b in the Y direction, so The bending and deformation of the movers 5a and 5b are suppressed.
  • FIGS. 13 to 15 show a fourth embodiment of the linear motor of the present invention.
  • the present embodiment shown in the figure is a modification of the third embodiment shown in FIG.
  • first support components 10a ′ are provided between the first support components 10a that support the upper and lower ends of the movers 5a and 5b in the Y direction, and are movable at four locations.
  • the elements 5a and 5b are supported to suppress the bending and deformation of the movers 5a and 5b in the XY plane.
  • the first support component 10a, the second support component 10a, and the second support component 10a are arranged at both ends of the twelve magnetic poles 1 and the central portion of the twelve magnetic poles 1.
  • the first support member 11a, the second support member 11b, and the third support member 11c having the three support components 10c are provided, and the first support member 11a, the second support member 11b, and the second support member 11c are provided.
  • a plurality of support members including the three support members 11c are arranged alternately with the magnetic poles 1 between the twelve magnetic poles 1 arranged so as to support the movers 5a and 5b with support parts.
  • first support components 10a ′, 12 both end portions of the 12 magnetic poles 1 and 12 are arranged between the first support components 10a that support both ends in the Y direction.
  • a support member provided with support parts may be arranged intermittently between twelve magnetic poles 1 arranged, or a support member provided with support parts every three magnetic poles 1 may be provided.
  • a support member provided with a holding part can be selected arbitrarily.
  • 16 to 17 show a fifth embodiment of the linear motor of the present invention.
  • 16 shows an example of the first support component 10a installed on the first support member 11a
  • FIG. 17 shows an example of the third support component 10c installed on the third support member 11c.
  • the movers 5a and 5b in the linear motor of the present embodiment shown in FIG. 16 are fixed to the permanent magnet 3, the first magnet holder 4a for fixing the permanent magnet 3, and the first magnet holder 4a.
  • the portion of the second magnet holder 4b in contact with the first support component 10a and the portion of the second magnet holder 4b in contact with the first support component 10a are made thicker so that the mover 5a and The deformation of 5b can be suppressed.
  • the cross-sectional shapes of the movers 5a and 5b are H-shaped by the upper and lower (Y direction) second magnet holder 4b, the first magnet holder 4a and the permanent magnet 3 connecting them, and the windings 2a,
  • a linear motor can be configured without interference between 2b, 2c and 2d and the magnetic pole 1.
  • the shape of the first support component 10a that supports the movers 5a and 5b into a stepped shape, it becomes possible to suppress the Y direction of the movers 5a and 5b, and the Y direction of the movers 5a and 5b. It is possible to prevent the windings 2a, 2b, 2c and 2d and the movers 5a and 5b from coming into contact with each other due to vibration and displacement.
  • the movers 5a and 5b when the thickness of the second magnet holder 4b in the portion in contact with the first support component 10a is increased in the X direction, the movers 5a and 5b The windings 2a, 2b, 2c, and 2d and the movers 5a and 5b come into contact with each other due to vibration and displacement in the Y direction, and the insulating layers of the windings 2a, 2b, 2c, and 2d are damaged. May occur.
  • the first support component 10a that supports the movers 5a and 5b has a stepped shape, so that the operations of the movers 5a and 5b are stabilized, and the movers 5a and 5b are stable.
  • the operation of the movers 5a and 5b can also be stabilized by making the shape of the first support component 10a or the contact portions of the movers 5a and 5b with the first support component 10a V-shaped.
  • the installation area of the third support component 11c formed of a magnetic material disposed between the magnetic poles 1 in this embodiment will be described with reference to FIG.
  • the third support component 11c disposed between the magnetic poles 1 is formed of a magnetic material.
  • the magnetic path can be expanded. 1 can be relaxed.
  • a magnetic material is disposed on the outer peripheral side of the windings 2a, 2b, 2c, and 2d.
  • the outer peripheral side region 23 of the windings 2a, 2b, 2c and 2d is arranged on the outer peripheral side of the windings 2a, 2b, 2c and 2d which are arranged so as to sandwich the permanent magnet 3, thereby reducing the leakage magnetic flux. is there.
  • the linear motor when twelve magnetic poles 1 are arranged has been described.
  • the linear motor of the present invention is not limited to this number of magnetic poles.
  • the linear motor can be used as a linear drive system such as an injection molding machine or a press machine, or as an operating device for a power switchgear.
  • this invention is not limited to the above-mentioned Example, Various modifications are included.
  • the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. It is possible to add, delete, and replace the configuration of a part of the configuration of the embodiment.

Abstract

The present invention provides a linear motor which is capable of achieving large thrust, inhibits failures occurring as a result of reaction force during operation and movable-element deformation caused by attraction force imbalance, and exhibits excellent reliability. This linear motor is characterized by being provided with: a movable element formed by arranging a plurality of permanent magnets or pieces of magnetic material while inversing the magnetization directions thereof; magnetic poles comprising first and second magnetic pole teeth disposed so as to sandwich the permanent magnets or the pieces of magnetic material, and magnetic bodies which connect the first and second magnetic pole teeth, and which form a magnetic flux path; windings which are wound around each of the first and second magnetic pole teeth; and support members for supporting the movable element. The linear motor is further characterized in that: the plurality of magnetic poles are installed in the travel direction of the movable element; and the support members are provided to central parts and both end parts of the plurality of installed magnetic poles in the travel direction of the movable element.

Description

リニアモータLinear motor
　本発明はリニアモータに係り、特に、可動子の永久磁石と電機子との間に相対的に水平移動するための推力を発生するものに好適なリニアモータに関する。 The present invention relates to a linear motor, and more particularly to a linear motor suitable for generating a thrust force for relatively horizontal movement between a permanent magnet of a mover and an armature.
　可動子の永久磁石と電機子との間に相対的に水平移動するための推力を発生するリニアモータに関しては、特許文献１乃至３に記載されたものがある。 Patent Documents 1 to 3 relate to linear motors that generate thrust for moving horizontally between a permanent magnet of a mover and an armature.
　特許文献１には、可動子の進行方向に対して垂直に働く可動子と電機子間の全体の吸引力を零に相殺することで、可動子と電機子の磁極面間の吸引力を小さくすることができ、可動子の支持機構の負担を小さくすることが記載されている。 In Patent Document 1, the total attractive force between the mover and the armature that works perpendicular to the moving direction of the mover is canceled out to zero, thereby reducing the attractive force between the magnetic pole surface of the mover and the armature. It is described that the burden on the support mechanism of the mover can be reduced.
　また、特許文献２には、エアギャップを介して対向する複数の磁極対を１つのコイルで励磁する電磁石を含み、複数の磁極対がピッチＰで直線状に並び、コイルの励磁により隣り合う磁極対の磁界の向きが逆向きとなるように構成された固定子と、ピッチＰで等間隔に永久磁石が並べられ、隣り合う永久磁石の磁極の磁界の向きが逆向きである可動子と、を備えたリニアモータであって、エアギャップの間を可動子の永久磁石が移動するようにしたリニアモータが記載され、固定子と可動子間に働く磁気吸引力が永久磁石の両側面で相殺されるので、可動子の支持機構に与える負担が小さく、リニアモータの信頼性を高めるなどの効果があることが記載されている。 Patent Document 2 includes an electromagnet that excites a plurality of magnetic pole pairs opposed via an air gap with one coil, and the magnetic pole pairs are arranged in a straight line at a pitch P and are adjacent to each other by excitation of the coil. A stator configured such that the direction of the magnetic field of the pair is reversed; a mover in which permanent magnets are arranged at equal intervals at a pitch P; and the direction of the magnetic field of the magnetic poles of adjacent permanent magnets is reversed; The linear motor is provided with a mover permanent magnet that moves between air gaps, and the magnetic attractive force acting between the stator and mover cancels on both sides of the permanent magnet. Therefore, it is described that the burden on the support mechanism of the mover is small, and there are effects such as improving the reliability of the linear motor.
　一方、特許文献３には、可動子の永久磁石を固定する磁石ケースを４軸構成にし、この４軸に構成された磁石ケースを連結部品で連結すると共に、各相の磁極の間及び磁極の端は磁極保持部品で挟み込む構成にし、上記磁極保持部品に設置された支持部品（ローラやローラ軸受或いはリニアガイド等から構成）で磁石ケースを保持することが記載されている。 On the other hand, in Patent Document 3, the magnet case for fixing the permanent magnet of the mover has a four-axis configuration, and the magnet case configured to the four axes is connected by connecting parts, and between the magnetic poles of each phase and of the magnetic poles. It is described that the end is sandwiched between magnetic pole holding parts, and the magnet case is held by a support part (consisting of a roller, a roller bearing, or a linear guide) installed on the magnetic pole holding part.
特許第３９０６４４３号公報Japanese Patent No. 3906443 特許第４１０６５７１号公報Japanese Patent No. 4106571 特開２０１１－２２３６９７号公報JP 2011-223697 A
　しかしながら、特許文献１及び２に記載されているリニアモータは、永久磁石に対する磁極や鉄心及び磁極歯からなる磁性体が対称でないため、吸引力のアンバランスが生じていた。更に、磁極や鉄心及び磁極歯からなる磁性体の磁気飽和が生じた場合、巻線の磁束が永久磁石に直接作用し、吸引力が大きくなる問題があった。また、リニアモータの搬送物の大型化や、リニアモータを搭載した機器の生産性を向上するため大推力の用途が拡大し、大推力化による永久磁石と磁極の対向面積増大による吸引力の発生が問題になっていた。 However, the linear motors described in Patent Documents 1 and 2 have an unbalanced attractive force because the magnetic material including the magnetic pole, iron core, and magnetic pole teeth with respect to the permanent magnet is not symmetrical. Further, when magnetic saturation of a magnetic body composed of a magnetic pole, an iron core, and magnetic pole teeth occurs, there is a problem that the magnetic flux of the winding acts directly on the permanent magnet and the attractive force increases. In addition, the use of large thrust has been expanded to increase the size of the linear motor transported goods and the productivity of equipment equipped with the linear motor, and the attraction force is generated by increasing the opposing area between the permanent magnet and the magnetic pole due to the increased thrust. Was a problem.
　また、大推力化のため、リニアモータの巻線を複数配置した場合、巻線間のアンバランス（例えば、巻線の引き出し線の長さや製作誤差による線の長さ、巻線の連結部の接触抵抗等のばらつきなど）により、巻線間のアンバランスによる吸引力が生じ、可動子の変形などを生じさせ、可動子と磁極の接触などによる故障が生じていた。 Also, in order to increase the thrust, when multiple windings of a linear motor are arranged, imbalance between the windings (for example, the length of the lead wire of the winding, the length of the wire due to manufacturing errors, Due to variations in contact resistance and the like, an attractive force is generated due to imbalance between the windings, causing deformation of the mover, and failure due to contact between the mover and the magnetic pole.
　一方、特許文献３には、可動子の永久磁石を固定する磁石ケースを磁極保持部品に設置された支持部品で保持することが記載されているが、磁石ケース（可動子）に変形などが生じた際の対策については、全く記載されていない。 On the other hand, Patent Document 3 describes that a magnet case for fixing a permanent magnet of a mover is held by a support component installed in a magnetic pole holding component, but deformation or the like occurs in the magnet case (mover). No countermeasures are described at all.
　本発明は上述の点に鑑みなされたもので、その目的とするところは、大推力を得られ、かつ、吸引力のアンバランスによる可動子の変形や動作時の反力などによって生じる故障を抑制し、信頼性の高いリニアモータを提供することにある。 The present invention has been made in view of the above-mentioned points, and the object of the present invention is to obtain a large thrust and to suppress a failure caused by a deformation of the mover due to an unbalance of suction force or a reaction force during operation. The object is to provide a highly reliable linear motor.
　本発明のリニアモータは、上記目的を達成するために、永久磁石又は磁性材を磁化方向を反転させつつ複数個並べて形成された可動子と、前記永久磁石又は磁性材を挟み込むように配置された第一の磁極歯及び第二の磁極歯、前記第一の磁極歯及び前記第二の磁極歯をつなぎ磁束の経路を形成する磁性体からなる磁極と、前記第一の磁極歯及び前記第二の磁極歯のそれぞれに巻回された巻線と、前記可動子を支持する支持部材とを備え、前記磁極を前記可動子の進行方向に複数個設置すると共に、前記支持部材は、前記複数個設置された磁極の前記可動子の進行方向両端部及び中心部に配置されていることを特徴とする。 In order to achieve the above object, the linear motor of the present invention is arranged so as to sandwich a mover formed by arranging a plurality of permanent magnets or magnetic materials while reversing the magnetization direction, and the permanent magnets or magnetic materials. A first magnetic pole tooth and a second magnetic pole tooth; a magnetic pole formed of a magnetic material that connects the first magnetic pole tooth and the second magnetic pole tooth to form a magnetic flux path; and the first magnetic pole tooth and the second magnetic pole tooth A plurality of magnetic poles arranged in the advancing direction of the mover, and the support member includes the plurality of the support members. The magnetic poles installed are disposed at both ends and a center of the moving element in the traveling direction.
　本発明によれば、大推力を得られ、かつ、吸引力のアンバランスによる可動子の変形や動作時の反力などによって生じる故障を抑制し、信頼性の高いリニアモータを得ることができる。 According to the present invention, it is possible to obtain a high-reliability linear motor by obtaining a large thrust and suppressing a failure caused by a deformation of the mover due to an unbalance of suction force or a reaction force during operation.
本発明のリニアモータの実施例１を示す斜視図である。It is a perspective view which shows Example 1 of the linear motor of this invention. 図１におけるリニアモータの側面図（Ｘ軸方向から見た図）である。It is a side view (figure seen from the X-axis direction) of the linear motor in FIG. 図２におけるリニアモータのＡ－Ａ断面で切り取り、Ｚ軸方向から見た図である。FIG. 3 is a view taken along the line AA of the linear motor in FIG. 2 and viewed from the Z-axis direction. 図２におけるリニアモータのＢ－Ｂ断面で切り取り、Ｚ軸方向から見た図である。FIG. 3 is a view taken along the line BB of the linear motor in FIG. 2 and viewed from the Z-axis direction. 図１におけるリニアモータの上側を切り取った状態の斜視図である。It is the perspective view of the state which cut off the upper side of the linear motor in FIG. 本発明のリニアモータの実施例１における巻線と支持部品の位置関係を示す図である。It is a figure which shows the positional relationship of the coil | winding and support component in Example 1 of the linear motor of this invention. 本発明のリニアモータの実施例２を示す斜視図である。It is a perspective view which shows Example 2 of the linear motor of this invention. 図７におけるリニアモータの上側を切り取った状態の斜視図である。It is a perspective view of the state which cut off the upper side of the linear motor in FIG. 本発明のリニアモータの実施例２に採用される第四の支持部品を備えた第四の支持部材を示す斜視図である。It is a perspective view which shows the 4th supporting member provided with the 4th supporting component employ | adopted as Example 2 of the linear motor of this invention. 本発明のリニアモータの実施例２の効果を説明するための図７のリニアモータの上面図（Ｙ軸方向から見た図）である。FIG. 8 is a top view of the linear motor in FIG. 7 (viewed from the Y-axis direction) for explaining the effect of the linear motor according to the second embodiment of the present invention. 本発明のリニアモータの実施例２における可動子の変形及び支持部品の効果を説明するための模式図である。It is a schematic diagram for demonstrating the deformation | transformation of a needle | mover in Example 2 of the linear motor of this invention, and the effect of a support component. 本発明のリニアモータの実施例３における第一の支持部材を示す図である。It is a figure which shows the 1st supporting member in Example 3 of the linear motor of this invention. 本発明のリニアモータの実施例４を示す斜視図である。It is a perspective view which shows Example 4 of the linear motor of this invention. 図１３におけるリニアモータの上側を切り取った状態の斜視図である。It is a perspective view of the state which cut off the upper side of the linear motor in FIG. 図１３におけるリニアモータの側面側を切り取った状態の斜視図である。It is a perspective view of the state which cut off the side surface side of the linear motor in FIG. 本発明のリニアモータの実施例５における第一の支持部材を示す図である。It is a figure which shows the 1st supporting member in Example 5 of the linear motor of this invention. 本発明のリニアモータの実施例５における第三の支持部材を示す図である。It is a figure which shows the 3rd supporting member in Example 5 of the linear motor of this invention.
　以下、図示した実施例に基づいて本発明のリニアモータを説明する。なお、各実施例において、同一の構成要素には同符号を使用し、同様の説明は繰り返さない。また、各実施例において、Ｘ方向、Ｙ方向及びＺ方向は、各図に示す通りの方向を表し、Ｘ方向、Ｙ方向及びＺ方向を、それぞれ左右方向、上下方向及び前後方向と呼称することがあるが、上下方向が重力方向と平行である必要はない。例えば、左右方向、前後方向、それ以外の方向が重力方向と平行であることを許容する。 Hereinafter, the linear motor of the present invention will be described based on the illustrated embodiment. In each embodiment, the same reference numerals are used for the same components, and the same description is not repeated. In each embodiment, the X direction, the Y direction, and the Z direction represent directions as shown in the drawings, and the X direction, the Y direction, and the Z direction are referred to as the left-right direction, the up-down direction, and the front-back direction, respectively. There is no need for the vertical direction to be parallel to the direction of gravity. For example, the horizontal direction, the front-rear direction, and other directions are allowed to be parallel to the direction of gravity.
　図１乃至図６に、本発明のリニアモータの実施例１を示す。 1 to 6 show a first embodiment of the linear motor of the present invention.
　該図に示す如く、本実施例のリニアモータは、永久磁石（又は磁性材）３を磁化方向を反転させつつ複数個並べて形成された可動子５ａ及び５ｂと、永久磁石３を挟み込むように配置された第一の磁極歯である磁極歯１ａ、１ｄ及び第二の磁極歯である磁極歯１ｂ、１ｃ、磁極歯１ａ、１ｂ、１ｃ、１ｄをつなぎ磁束の経路を形成する磁性体１ｅからなる磁極１と、磁極歯１ａ、１ｂ、１ｃ、１ｄのそれぞれに巻回された巻線２ａ、２ｂ、２ｃ、２ｄと、可動子５ａ及び５ｂを支持する第一の支持部材１１ａ、第二の支持部材１１ｂ及び第三の支持部材１１ｃとから概略構成されている。 As shown in the figure, the linear motor of the present embodiment is arranged so that the permanent magnet 3 is sandwiched between the movers 5a and 5b formed by arranging a plurality of permanent magnets (or magnetic materials) 3 while reversing the magnetization direction. The magnetic pole teeth 1a and 1d as the first magnetic pole teeth and the magnetic pole teeth 1b and 1c as the second magnetic pole teeth and the magnetic pole teeth 1a, 1b, 1c and 1d are connected to form a magnetic body 1e which forms a magnetic flux path. The magnetic pole 1, the windings 2a, 2b, 2c, and 2d wound around the magnetic pole teeth 1a, 1b, 1c, and 1d, the first support member 11a that supports the movers 5a and 5b, and the second support It is roughly composed of a member 11b and a third support member 11c.
　更に、具体的に説明すると、本実施例の可動子５ａ及び５ｂは、永久磁石３と可動子ホルダー４から構成され、永久磁石３は磁石ホルダー４に固着されている。また、可動子５ａ及び５ｂの永久磁石３は、磁極１と対向する面に極ができるように配置されている。従って、永久磁石３の磁化方向は、Ｘ方向又は－Ｘ方向であり、隣り合う永久磁石３間で極性がＮ極とＳ極と交互になる。巻線２ａ、２ｂ、２ｃ、２ｄに電流を流すことにより、磁極歯１ａ、１ｂ、１ｃ及び１ｄに極が生じ、磁極歯１ａ、１ｂ、１ｃ及び１ｄの極と永久磁石３の極の相互作用にて、可動子５ａ及び５ｂはＺ方向に駆動される。 More specifically, the movers 5 a and 5 b of this embodiment are composed of a permanent magnet 3 and a mover holder 4, and the permanent magnet 3 is fixed to the magnet holder 4. Further, the permanent magnets 3 of the movers 5a and 5b are arranged so that a pole is formed on the surface facing the magnetic pole 1. Accordingly, the magnetization direction of the permanent magnet 3 is the X direction or the −X direction, and the polarities alternate between the N pole and the S pole between the adjacent permanent magnets 3. By passing a current through the windings 2a, 2b, 2c and 2d, poles are generated in the magnetic pole teeth 1a, 1b, 1c and 1d, and the interaction between the poles of the magnetic pole teeth 1a, 1b, 1c and 1d and the poles of the permanent magnet 3 Thus, the movers 5a and 5b are driven in the Z direction.
　また、永久磁石３と磁極１のＺ方向のピッチＰによって構成されるリニアモータの相数が変わる。例えば、永久磁石３のＺ方向のピッチＰに対し、磁極１のピッチを２Ｐにすると単相駆動のリニアモータになる。 Also, the number of phases of the linear motor formed by the pitch P in the Z direction between the permanent magnet 3 and the magnetic pole 1 changes. For example, if the pitch of the magnetic poles 1 is 2P with respect to the pitch P in the Z direction of the permanent magnet 3, a single-phase drive linear motor is obtained.
　このように、永久磁石３と磁極１のＺ方向のピッチが変わることにより、リニアモータの相数が変わる。なお、本発明は、リニアモータの相数を限定するものでない。 Thus, the number of phases of the linear motor is changed by changing the pitch of the permanent magnet 3 and the magnetic pole 1 in the Z direction. Note that the present invention does not limit the number of phases of the linear motor.
　本実施例は、１２個の磁極１でリニアモータを構成した例であり、可動子５ａ及び５ｂの進行方向に磁極１が１２個併設されている。そして、１２個の磁極１の一方の端部に第一の支持部材１１ａが、もう一方の端部に第二の支持部材１１ｂが配置され、１２個の磁極１の中間部（中心部）に第三の支持部材１１ｃが配置されている。 This embodiment is an example in which a linear motor is constituted by 12 magnetic poles 1, and 12 magnetic poles 1 are provided side by side in the traveling direction of the movers 5a and 5b. A first support member 11 a is arranged at one end of the twelve magnetic poles 1, and a second support member 11 b is arranged at the other end, and at the intermediate portion (center portion) of the twelve magnetic poles 1. A third support member 11c is arranged.
　第一の支持部材１１ａ、第二の支持部材１１ｂ及び第三の支持部材１１ｃには、可動子５ａ及び５ｂを支持するための第一の支持部品１０ａ、第二の支持部品１０ｂ及び第三の支持部品１０ｃがそれぞれ設けられ、この第一の支持部品１０ａ、第二の支持部品１０ｂ及び第三の支持部品１０ｃは、可動子５ａ及び５ｂの幅方向（Ｙ方向）両端部で支持する位置の第一の支持部材１１ａ、第二の支持部材１１ｂ及び第三の支持部材１１ｃに設けられ、可動子５ａ及び５ｂは、該可動子５ａ及び５ｂの幅方向両端部を挟み込むように第一の支持部品１０ａ、第二の支持部品１０ｂ及び第三の支持部品１０ｃで支持されている。 The first support member 11a, the second support member 11b, and the third support member 11c include a first support component 10a, a second support component 10b, and a third support member for supporting the movers 5a and 5b. Support parts 10c are respectively provided, and the first support part 10a, the second support part 10b, and the third support part 10c are supported at both ends in the width direction (Y direction) of the movers 5a and 5b. Provided on the first support member 11a, the second support member 11b, and the third support member 11c, the movers 5a and 5b support the first support so as to sandwich both ends in the width direction of the movers 5a and 5b. It is supported by the component 10a, the second support component 10b, and the third support component 10c.
　なお、第一の支持部品１０ａ、第二の支持部品１０ｂ及び第三の支持部品１０ｃは、ローラ、リニアガイド或いはすべり軸受けのいずれか１つから成るが、可動子５ａ及び５ｂを支持することができれば、その方法は問わない。 The first support component 10a, the second support component 10b, and the third support component 10c are any one of a roller, a linear guide, and a sliding bearing, and can support the movers 5a and 5b. If possible, the method does not matter.
　次に、可動子５ａ及び５ｂを支持する第一の支持部品１０ａ、第二の支持部品１０ｂ及び第三の支持部品１０ｃの配置について図３を用いて説明する。図３は、第一の支持部材１１ａに設置された第一の支持部品１０ａの配置についての例である。 Next, the arrangement of the first support component 10a, the second support component 10b, and the third support component 10c that support the movers 5a and 5b will be described with reference to FIG. FIG. 3 is an example of the arrangement of the first support component 10a installed on the first support member 11a.
　該図に示す如く、左右（Ｘ方向）の可動子５ａ及び５ｂは、それぞれ、第一の支持部材１１ａに設けられた第一の支持部品１０ａで、可動子５ａ及び５ｂの幅方向両端部を左右から挟み込むように保持されている。 As shown in the figure, the left and right (X direction) movers 5a and 5b are first support components 10a provided on the first support member 11a, respectively, and the widthwise ends of the movers 5a and 5b are respectively connected. It is held so as to be sandwiched from the left and right.
　リニアモータの大推力化のために、永久磁石３と磁極１の対向面積を増やすことが効果的であるが、個々の永久磁石３と磁極１の対向面積を増やした結果、最端部の磁極１間のＺ方向の間隔が長くなり、可動子５ａ及び５ｂに撓みが生じてしまう。 In order to increase the thrust of the linear motor, it is effective to increase the facing area between the permanent magnet 3 and the magnetic pole 1, but as a result of increasing the facing area between each permanent magnet 3 and the magnetic pole 1, The interval in the Z direction between 1 becomes longer, and the movers 5a and 5b are bent.
　そこで、本実施例では、上述した如く、一方の磁極１の端部の第一の支持部品１０ａを第一の支持点とし、もう一方の磁極１の端部の第二の支持部品１０ｂを第二の支持点とした場合、第一の支持点と第二の支持点の間の中心部に、第三の支持点（第三の支持部品１０ｃ）を設けることで、可動子５ａ及び５ｂの変形（撓み）を抑制するようにしたものである。 Therefore, in this embodiment, as described above, the first support component 10a at the end of one magnetic pole 1 is used as the first support point, and the second support component 10b at the end of the other magnetic pole 1 is used as the first support point. In the case of the second support point, by providing a third support point (third support component 10c) at the center between the first support point and the second support point, the movers 5a and 5b The deformation (deflection) is suppressed.
　図４を用いて、２つの可動子５ａ及び５ｂの永久磁石３に働く力について説明する。図４は、第二の支持部材１１ｂに設置された第二の支持部品１０ｂで支持された可動子５ａ及び５ｂの永久磁石３に働く力についての例である。 The force acting on the permanent magnet 3 of the two movers 5a and 5b will be described with reference to FIG. FIG. 4 is an example of the force acting on the permanent magnets 3 of the movers 5a and 5b supported by the second support component 10b installed on the second support member 11b.
　該図に示すように、可動子５ａの永久磁石３の表裏に対向するように、磁極歯１ａと磁極歯１ｂが配置されている。磁極歯１ａには巻線２ａが巻かれ、磁極歯１ｂには巻線２ｂが巻かれている。磁極歯１ａと磁極歯１ｂは同一形状であるが、巻線２ａと巻線２ｂの電気抵抗のアンバランスなどによって、巻線２ａと巻線２ｂの電流に差が生じた場合、永久磁石３がＸ方向の吸引力を受ける。可動子５ｂの永久磁石３についても同様である。更に、可動子５ａの永久磁石３の左側（－Ｘ側）には巻線２ａがある。一方、可動子５ａの永久磁石３の右側（＋Ｘ側）には、巻線２ｂ、磁極歯１ｃに巻かれている巻線２ｃ及び磁極歯１ｄに巻かれている巻線２ｄが存在するため、この巻線２ａと巻線２ｂ、巻線２ｃ及び巻線２ｄとの左右アンバランスによっても吸引力が生じる。 As shown in the figure, the magnetic pole teeth 1a and the magnetic pole teeth 1b are arranged so as to face the front and back of the permanent magnet 3 of the mover 5a. A winding 2a is wound around the magnetic pole tooth 1a, and a winding 2b is wound around the magnetic pole tooth 1b. The magnetic pole teeth 1a and the magnetic pole teeth 1b have the same shape, but if there is a difference in the currents of the windings 2a and 2b due to an imbalance in the electrical resistance between the windings 2a and 2b, the permanent magnet 3 Receives suction in the X direction. The same applies to the permanent magnet 3 of the mover 5b. Further, a winding 2a is provided on the left side (−X side) of the permanent magnet 3 of the mover 5a. On the other hand, the winding 2b, the winding 2c wound around the magnetic pole teeth 1c, and the winding 2d wound around the magnetic pole teeth 1d exist on the right side (+ X side) of the permanent magnet 3 of the mover 5a. A suction force is also generated by the left-right imbalance between the winding 2a, the winding 2b, the winding 2c, and the winding 2d.
　磁極１に磁気飽和が生じない比較的小さな電流値では、磁極歯１ａ、１ｂ、１ｃ及び１ｄは、磁極歯１ａ、１ｂ、１ｃ及び１ｄをつなぐ磁性体１ｅにより閉磁路を構成しているため、巻線２ａと巻線２ｂ、巻線２ｃ及び巻線２ｄとの左右アンバランスの影響は小さいが、磁極１に磁気飽和が生じた場合、左右アンバランスの影響が大きくなり、永久磁石３への吸引力が大きくなる。この影響により可動子５ａ及び５ｂの変形などが大きくなる。 At a relatively small current value at which magnetic saturation does not occur in the magnetic pole 1, the magnetic pole teeth 1a, 1b, 1c and 1d form a closed magnetic circuit by the magnetic body 1e connecting the magnetic pole teeth 1a, 1b, 1c and 1d. Although the influence of the left and right imbalance between the winding 2a and the winding 2b, the winding 2c and the winding 2d is small, when the magnetic saturation occurs in the magnetic pole 1, the influence of the left and right imbalance becomes large and the permanent magnet 3 is not affected. The suction power increases. Due to this influence, the deformation of the movers 5a and 5b becomes large.
　そこで、本実施例では、磁極１の一方の端部の第一の支持部品１０ａを第一の支持点、もう一方の磁極１の端部の第二の支持部品１０ｂを第二の支持点とした場合、第一の支持点と第二の支持点の間の中心部に、第三の支持点（第三の支持部品１０ｃ）を設けることで、上述した影響による可動子５ａ及び５の変形を抑制するようにしたものである。 Therefore, in this embodiment, the first support component 10a at one end of the magnetic pole 1 is the first support point, and the second support component 10b at the end of the other magnetic pole 1 is the second support point. In this case, by providing a third support point (third support component 10c) at the center between the first support point and the second support point, the movable elements 5a and 5 are deformed due to the above-described influence. It is intended to suppress.
　図５を用いて、本実施例の可動子５ａ及び５ｂを支持する第一の支持部品１０ａ、第二の支持部品１０ｂ及び第三の支持部品１０ｃの配置について説明する。図５は、説明のためリニアモータの上面をＸＺ面で切り取って示すものであり、本図を用いて、左側の可動子５ａの第一の支持部品１０ａ、第二の支持部品１０ｂ及び第三の支持部品１０ｃの配置について説明する。 The arrangement of the first support component 10a, the second support component 10b, and the third support component 10c that support the movers 5a and 5b of this embodiment will be described with reference to FIG. FIG. 5 shows the top surface of the linear motor cut out in the XZ plane for the sake of explanation. The first support component 10a, the second support component 10b, and the third support component 10a of the left movable element 5a are shown using FIG. The arrangement of the support component 10c will be described.
　該図に示す如く、１２個並んだ磁極１の手前側（－Ｚ側）に第一の支持部品１０ａを有する第一の支持部材１１ａが設置されていると共に、磁極１の奥側（＋Ｚ側）に第二の支持部品１０ｂを有する第二の支持部材１１ｂが設置され、かつ、本実施例では、第一の支持部材１１ａ及び第二の支持部材１１ｂの間の中心部に、第三の支持部品１０ｃを有する第三の支持部材１１ｃが配置され、それぞれの第一の支持部材１１ａと第二の支持部材１１ｂ及び第三の支持部材１１ｃで可動子５ａを支持している。 As shown in the figure, a first support member 11a having a first support component 10a is installed on the front side (−Z side) of 12 magnetic poles 1 arranged side by side, and the back side (+ Z side) of the magnetic pole 1 ) Is provided with a second support member 11b having a second support component 10b, and in the present embodiment, a third support member 11b is provided at the center between the first support member 11a and the second support member 11b. A third support member 11c having a support component 10c is arranged, and the movable element 5a is supported by each of the first support member 11a, the second support member 11b, and the third support member 11c.
　上述した如く、巻線２間のアンバランスなどにより生じた吸引力によって可動子５ａが変形した際に、第三の支持部品１０ｃを有する第三の支持部材１１ｃがない場合、第一の支持部品１０ａと第二の支持部品１０ｂから離れた吸引力発生点のモーメントが大きくなり、可動子５ａの変形量が最も大きくなる。第一の支持部品１０ａと第二の支持部品１０ｂから離れた吸引力発生点は、第一の支持部品１０ａと第二の支持部品１０ｂのＺ方向の中間点（中心点）であり、第三の支持部品１０ｃの位置になる。 As described above, when the movable element 5a is deformed by the attractive force generated by unbalance between the windings 2 and the like, and there is no third support member 11c having the third support part 10c, the first support part The moment at the suction force generation point away from 10a and the second support component 10b increases, and the amount of deformation of the mover 5a becomes the largest. The suction force generation point away from the first support component 10a and the second support component 10b is an intermediate point (center point) in the Z direction between the first support component 10a and the second support component 10b. This is the position of the support component 10c.
　従って、第一の支持部品１０ａと第二の支持部品１０ｂのＺ方向の中間点に、第三の支持部品１０ｃを配置することにより、効果的に可動子５ａの変形を抑制できる。 Therefore, the deformation of the mover 5a can be effectively suppressed by disposing the third support component 10c at the intermediate point in the Z direction between the first support component 10a and the second support component 10b.
　なお、図５においては、可動子５ａのＹ方向に複数存在する上側の支持部品について説明したが、片方に限定されるわけではなく、下側の支持部品についても同様である。 In FIG. 5, a plurality of upper support parts that exist in the Y direction of the mover 5a have been described. However, the upper support parts are not limited to one, and the same applies to the lower support parts.
　図６を用いて、巻線２ａ、２ｂ、２ｃ及び２ｄと第一の支持部品１０ａ、第二の支持部品１０ｂ及び第三の支持部品１０ｃの関係を説明する。図６は、第二の支持部材１１ｂに設置された第二の支持部品１０ｂについての例である。 The relationship between the windings 2a, 2b, 2c and 2d and the first support component 10a, the second support component 10b and the third support component 10c will be described with reference to FIG. FIG. 6 is an example of the second support component 10b installed on the second support member 11b.
　該図に示す如く、巻線２ａ、２ｂ、２ｃ及び２ｄのＹ方向の幅Ｌｗに対し、Ｙ方向に並んだ第二の支持部品１０ｂの間隔をＬｐとした場合、Ｌｗ≦Ｌｐとすることにより、巻線２ａ、２ｂ、２ｃ及び２ｄと干渉することなく、第二の支持部品１０ｂを配置できる（第一の支持部品１０ａ及び第三の支持部品１０ｃについても同様である）。従って、磁極１の間隔を広げることなく、第二の支持部品１０ｂを配置できる効果がある（第一の支持部品１０ａ及び第三の支持部品１０ｃについても同様である）。 As shown in the figure, when the interval between the second support parts 10b arranged in the Y direction is Lp with respect to the width Lw in the Y direction of the windings 2a, 2b, 2c and 2d, Lw ≦ Lp The second support component 10b can be arranged without interfering with the windings 2a, 2b, 2c and 2d (the same applies to the first support component 10a and the third support component 10c). Therefore, there is an effect that the second support component 10b can be arranged without increasing the interval between the magnetic poles 1 (the same applies to the first support component 10a and the third support component 10c).
　このように、本実施例の構成によれば、大推力を得られ、かつ、吸引力のアンバランスによる可動子５ａ及び５ｂの変形や動作時の反力などによって生じる故障を抑制し、信頼性の高いリニアモータを得ることができる。 Thus, according to the configuration of the present embodiment, a large thrust can be obtained, and failures caused by the deformation of the movers 5a and 5b due to the unbalance of the suction force or the reaction force during operation are suppressed, and reliability is improved. High linear motor can be obtained.
　図７乃至図９に、本発明のリニアモータの実施例２を示す。 7 to 9 show a second embodiment of the linear motor of the present invention.
　図７に示す如く、本実施例のリニアモータは、１２個の磁極１の一方の端部に第一の支持部品１０ａを備えた第一の支持部材１１ａ及びもう一方の端部に第二の支持部品１０ｂを備えた第二の支持部材１１ｂが配置され、また、１２個の磁極１のＺ方向の中心部に、第三の支持部品１０ｃを備えた第三の支持部材１１ｃが配置されている。 As shown in FIG. 7, the linear motor according to the present embodiment includes a first support member 11a having a first support component 10a at one end of twelve magnetic poles 1 and a second support at the other end. A second support member 11b including the support component 10b is disposed, and a third support member 11c including the third support component 10c is disposed at the center of the 12 magnetic poles 1 in the Z direction. Yes.
　そして、本実施例では、各磁極１の間から巻線２ａ、２ｂ、２ｃ及び２ｄの引き出し部２ｅが出ていると共に、２つの可動子５ａ及び５ｂのＺ方向端部で、可動子５ａ及び５ｂが連結部材１２により連結されている。 In the present embodiment, the lead portions 2e of the windings 2a, 2b, 2c, and 2d are projected from between the magnetic poles 1, and at the end portions of the two movers 5a and 5b in the Z direction, 5 b are connected by a connecting member 12.
　更に、本実施例では、図７及び図８に示す如く、第一の支持部品１０ａを備えた第一の支持部材１１ａと第三の支持部品１０ｃを備えた第三の支持部材１１ｃの間に、第四の支持部品１０ｄを備えた第四の支持部材１１ｄが、第二の支持部品１０ｂを備えた第二の支持部材１１ｂと第三の支持部品１０ｃを備えた第三の支持部材１１ｃの間に、第五の支持部品１０ｅを備えた第五の支持部材１１ｅが、それぞれ配置されている。即ち、複数個設置された磁極１の可動子５ａ及び５ｂの進行方向両端部と中心部に配置された第一、第二及び第三の支持部材１１ａ、１１ｂ及び１１ｃのそれぞれの間に、更に第四、第五の支持部材１１ｄ、１１ｅが配置されていることになる。 Further, in this embodiment, as shown in FIGS. 7 and 8, the first support member 11a having the first support component 10a and the third support member 11c having the third support component 10c are provided. The fourth support member 11d provided with the fourth support component 10d is composed of the second support member 11b provided with the second support component 10b and the third support member 11c provided with the third support component 10c. In the middle, fifth support members 11e each having a fifth support component 10e are arranged. That is, between each of the first, second, and third support members 11a, 11b, and 11c disposed at both ends and the center of the moving elements 5a and 5b of the magnetic pole 1 provided in plurality, The fourth and fifth support members 11d and 11e are arranged.
　ここで、第一の支持部材１１ａ、第二の支持部材１１ｂ、第三の支持部材１１ｃ、第四の支持部材１１ｄ及び第五の支持部材１１ｅの第一の支持部品１０ａ、第二の支持部品１０ｂ、第三の支持部品１０ｃ、第四の支持部品１０ｄ及び第五の支持部品１０ｅと巻線２ａ、２ｂ、２ｃ及び２ｄの関係を、図６に示したＬｗ≦Ｌｐとすることにより、巻線２ａ、２ｂ、２ｃ及び２ｄと第一の支持部品１０ａ、第二の支持部品１０ｂ、第三の支持部品１０ｃ、第四の支持部品１０ｄ及び第五の支持部品１０ｅの干渉をなくし、磁極１間に第一の支持部品１０ａ、第二の支持部品１０ｂ、第三の支持部品１０ｃ、第四の支持部品１０ｄ及び第五の支持部品１０ｅを配置できる。 Here, the first support member 11a, the second support member 11b, the third support member 11c, the fourth support member 11d, the first support component 10a of the fifth support member 11e, and the second support component. 10b, the third support component 10c, the fourth support component 10d and the fifth support component 10e and the relationship between the windings 2a, 2b, 2c and 2d, Lw ≦ Lp shown in FIG. Interference between the wires 2a, 2b, 2c and 2d and the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d and the fifth support component 10e is eliminated. The first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e can be disposed therebetween.
　このように、複数の磁極１との間に第一の支持部材１１ａ、第二の支持部材１１ｂ、第三の支持部材１１ｃ、第四の支持部材１１ｄ及び第五の支持部材１１ｅを配置することで、磁極１の間隔を広げずに第一の支持部品１０ａ、第二の支持部品１０ｂ、第三の支持部品１０ｃ、第四の支持部品１０ｄ及び第五の支持部品１０ｅを配置できるため、第一の支持部品１０ａ、第二の支持部品１０ｂ、第三の支持部品１０ｃ、第四の支持部品１０ｄ及び第五の支持部品１０ｅを多く設置しても、リニアモータの体格が大きくなることはない。 In this way, the first support member 11a, the second support member 11b, the third support member 11c, the fourth support member 11d, and the fifth support member 11e are arranged between the plurality of magnetic poles 1. Thus, the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d and the fifth support component 10e can be arranged without increasing the interval between the magnetic poles 1. Even if a large number of the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e are installed, the size of the linear motor does not increase. .
　更に、磁極１間の第一の支持部材１１ａ、第二の支持部材１１ｂ、第三の支持部材１１ｃ、第四の支持部材１１ｄ及び第五の支持部材１１ｅを磁性体とすることにより、磁路を拡大することができ、磁極１の磁気飽和を緩和できるため吸引力を低減することが可能となる。 Further, by using the first support member 11a, the second support member 11b, the third support member 11c, the fourth support member 11d, and the fifth support member 11e between the magnetic poles 1 as magnetic bodies, the magnetic path Since the magnetic saturation of the magnetic pole 1 can be relaxed, the attractive force can be reduced.
　また、第一の支持部品１０ａ、第二の支持部品１０ｂ、第三の支持部品１０ｃ、第四の支持部品１０ｄ及び第五の支持部品１０ｅを、磁極歯１ａ、１ｂ、１ｃ及び１ｄをつなぐ磁性体１ｅの内側に配置することで、第一の支持部品１０ａ、第二の支持部品１０ｂ、第三の支持部品１０ｃ、第四の支持部品１０ｄ及び第五の支持部品１０ｅの破損時の部品の飛散防止やリニアモータに突起部を作らなくて済む利点があり、また、小型のリニアモータを構成できる。 The first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e are connected to the magnetic pole teeth 1a, 1b, 1c, and 1d. By disposing inside the body 1e, the first support component 10a, the second support component 10b, the third support component 10c, the fourth support component 10d, and the fifth support component 10e are damaged. There is an advantage in that it is not necessary to prevent scattering and to make a protrusion on the linear motor, and a small linear motor can be configured.
　図９に、上述した第四の支持部品１０ｄを備えた第四の支持部材１１ｄの構成例を示す。 FIG. 9 shows a configuration example of the fourth support member 11d including the above-described fourth support component 10d.
　該図に示す如く、第四の支持部材１１ｄは、上側及び下側に、それぞれ４個の第四の支持部品１０ｄを備えていると共に、第四の支持部材１１ｄには、巻線２ａ、２ｂ、２ｃ及び２ｄの引き出し線を保持する溝１３が設けられ、巻線２ａ、２ｂ、２ｃ及び２ｄの引き出し線を溝１３で保持することにより、電磁力によって巻線２ａ、２ｂ、２ｃ及び２ｄに働く力による巻線２ａ、２ｂ、２ｃ及び２ｄの損傷を低減でき、リニアモータの信頼性を向上できる。 As shown in the figure, the fourth support member 11d includes four fourth support components 10d on the upper side and the lower side, respectively, and the fourth support member 11d includes windings 2a and 2b. 2c and 2d are provided in the grooves 13, and the windings 2a, 2b, 2c and 2d are held in the grooves 13, so that the windings 2a, 2b, 2c and 2d can be made electromagnetically Damage to the windings 2a, 2b, 2c and 2d due to the working force can be reduced, and the reliability of the linear motor can be improved.
　次に、本実施例による効果を、図１０乃至図１１を用いて説明する。 Next, the effect of this embodiment will be described with reference to FIGS.
　上述した如く、１２個の磁極１の両端部及び磁極１間に、第一の支持部材１１ａ、第二の支持部材１１ｂ、第三の支持部材１１ｃ、第四の支持部材１１ｄ及び第五の支持部材１１ｅが配置され、１２個の磁極１を貫通するように可動子５ａ及び５ｂが配置されている。可動子５ａ及び５ｂは、Ｚ方向の両端部で連結部材１２で連結されており、－Ｘ方向側の可動子５ａにおいては、可動子５ａの－Ｘ方向側に巻線２ａがあり、＋Ｘ方向側に巻線２ｂ、２ｃ及び２ｄがある。 As described above, the first support member 11a, the second support member 11b, the third support member 11c, the fourth support member 11d, and the fifth support are provided between both ends of the twelve magnetic poles 1 and between the magnetic poles 1. The member 11e is arranged, and the movers 5a and 5b are arranged so as to penetrate the twelve magnetic poles 1. The movers 5a and 5b are connected by connecting members 12 at both ends in the Z direction. The mover 5a on the −X direction side has a winding 2a on the −X direction side of the mover 5a, and the + X direction. On the side are windings 2b, 2c and 2d.
　従って、＋Ｘ方向の巻線２ｂ、２ｃ及び２ｄの数がアンバランスになり、可動子５ａから見て＋Ｘ方向への吸引力が発生する。可動子５ｂから見た場合は、可動子５ｂの＋Ｘ方向側に巻線２ｄがあり、－Ｘ方向側に巻線２ａ、２ｂ及び２ｃがある。よって、吸引力は－Ｘ方向に働く。つまり、可動子５ａ及び５ｂから見て可動子５ａ及び５ｂの進行方向の中心軸２２側に吸引力が働くこととなる。従って、可動子５ａ及び５ｂから見て可動子５ａ及び５ｂの進行方向の中心軸２２側に支持部品を配置することが効果的である。 Therefore, the number of the windings 2b, 2c and 2d in the + X direction becomes unbalanced, and a suction force in the + X direction is generated as viewed from the mover 5a. When viewed from the mover 5b, the winding 2d is on the + X direction side of the mover 5b, and the windings 2a, 2b, and 2c are on the -X direction side. Therefore, the suction force works in the −X direction. That is, a suction force acts on the central axis 22 side in the traveling direction of the movers 5a and 5b when viewed from the movers 5a and 5b. Therefore, it is effective to dispose the support component on the side of the central axis 22 in the traveling direction of the movers 5a and 5b when viewed from the movers 5a and 5b.
　図１１（ａ）は、磁極の範囲２１のＺ方向の両側に、第一の支持部品１０ａ及び第二の支持部品１０ｂを設けた場合であり、この場合は、可動子５ａ及び５ｂの進行方向の中心軸２２側に吸引力２０が働く。そこで、磁極１の範囲２１の中央部に第三の支持部品１０ｃを設けることで、図１１（ｂ）に示すように、可動子５ａ及び５ｂの進行方向の中心軸２２側への吸引力２０に対する変形を抑制できる。 FIG. 11A shows a case where the first support component 10a and the second support component 10b are provided on both sides of the magnetic pole range 21 in the Z direction. In this case, the moving direction of the movers 5a and 5b is shown. A suction force 20 acts on the central axis 22 side. Therefore, by providing the third support component 10c at the center of the range 21 of the magnetic pole 1, as shown in FIG. 11B, the attractive force 20 toward the central axis 22 in the traveling direction of the movers 5a and 5b. The deformation | transformation with respect to can be suppressed.
　ところで、可動子５ａ及び５ｂは、可動子５ａ及び５ｂの進行方向の中心軸２２側への吸引力２０によって、可動子５ａ及び５ｂの端部が可動子５ａ及び５ｂの進行方向の中心軸２２と反対側に広がろうとする。そこで、図１１（ｃ）に示すように、可動子５ａ及び５ｂの端部に連結部材１２を設置することで、可動子５ａ及び５ｂの中央部の変位も抑制できるため、可動子５ａ及び５ｂと磁極歯１ａ、１ｂ、１ｃ及び１ｄの接触を防止できる。 By the way, the end portions of the movers 5a and 5b are moved toward the center axis 22 in the moving direction of the movers 5a and 5b by the suction force 20 toward the center axis 22 in the moving direction of the movers 5a and 5b. And try to spread to the other side. Therefore, as shown in FIG. 11 (c), by disposing the connecting member 12 at the ends of the movers 5a and 5b, the displacement of the central part of the movers 5a and 5b can be suppressed. And the magnetic pole teeth 1a, 1b, 1c and 1d can be prevented.
　このように構成しても、実施例１と同様な効果を得ることができる。 Even with this configuration, the same effect as in the first embodiment can be obtained.
　図１２に、本発明のリニアモータの実施例３を示す。 FIG. 12 shows a third embodiment of the linear motor of the present invention.
　該図に示す本実施例は、可動子５ａ及び５ｂの幅方向（Ｙ方向）の上下両端部を支持している第一の支持部品１０ａの間の中間部に、第一の支持部材１１ａに設けられている別の第一の支持部品１０ａ´が設置されている。即ち、図３に示した実施例１の構成に加え、第一の支持部品１０ａの間の中間部に、別の第一の支持部品１０ａ´を設置したものである。 In the present embodiment shown in the figure, the first support member 11a is provided at the intermediate portion between the first support components 10a supporting the upper and lower ends in the width direction (Y direction) of the movers 5a and 5b. Another provided first support component 10a 'is installed. That is, in addition to the configuration of the first embodiment shown in FIG. 3, another first support component 10a ′ is installed in the intermediate portion between the first support components 10a.
　つまり、永久磁石３と磁極歯１ａ、１ｂ、１ｃ及び１ｄの対向面積の増加に伴い、図１２に示すＸＹ面内での可動子５ａ及び５ｂの撓みや変形が生じる。そこで、本実施例では、可動子５ａ及び５ｂのＹ方向の上下両端を支持する第一の支持部品１０ａの間の中間部に、別の第一の支持部品１０ａ´を設けて、ＸＹ面内での可動子５ａ及び５ｂの撓みや変形を抑制するようにしたものである。 That is, as the opposing area of the permanent magnet 3 and the magnetic pole teeth 1a, 1b, 1c, and 1d increases, the movers 5a and 5b bend and deform in the XY plane shown in FIG. Therefore, in the present embodiment, another first support component 10a ′ is provided in the middle part between the first support components 10a that support the upper and lower ends of the movers 5a and 5b in the Y direction, so The bending and deformation of the movers 5a and 5b are suppressed.
　このように構成しても、実施例１と同様な効果を得ることができることは勿論、ＸＹ面内での可動子５ａ及び５ｂの撓みや変形を抑制することができる。 Even with this configuration, the same effects as those of the first embodiment can be obtained, and the bending and deformation of the movers 5a and 5b in the XY plane can be suppressed.
　図１３乃至図１５に、本発明のリニアモータの実施例４を示す。該図に示す本実施例は、図１２に示した実施例３の変形例である。 FIGS. 13 to 15 show a fourth embodiment of the linear motor of the present invention. The present embodiment shown in the figure is a modification of the third embodiment shown in FIG.
　即ち、本実施例では、可動子５ａ及び５ｂのＹ方向の上下両端を支持する第一の支持部品１０ａの間に、２つの別の第一の支持部品１０ａ´を設けて、４ヶ所で可動子５ａ及び５ｂを支持して、ＸＹ面内での可動子５ａ及び５ｂの撓みや変形を抑制するようにしたものである。 That is, in this embodiment, two other first support components 10a ′ are provided between the first support components 10a that support the upper and lower ends of the movers 5a and 5b in the Y direction, and are movable at four locations. The elements 5a and 5b are supported to suppress the bending and deformation of the movers 5a and 5b in the XY plane.
　また、本実施例では、上述した実施例と同様に、１２個並んだ磁極１の両端部及び１２個並んだ磁極１の中心部に第一の支持部品１０ａ、第二の支持部品１０ａ及び第三の支持部品１０ｃを備えた第一の支持部材１１ａ、第二の支持部材１１ｂ及び第三の支持部材１１ｃを設けているが、これら第一の支持部材１１ａ、第二の支持部材１１ｂ及び第三の支持部材１１ｃを含む複数の支持部材が、１２個並んだ磁極１の間に、磁極１と交互に配置されて支持部品で可動子５ａ及び５ｂを支持するように構成されている。 In the present embodiment, similarly to the above-described embodiment, the first support component 10a, the second support component 10a, and the second support component 10a are arranged at both ends of the twelve magnetic poles 1 and the central portion of the twelve magnetic poles 1. The first support member 11a, the second support member 11b, and the third support member 11c having the three support components 10c are provided, and the first support member 11a, the second support member 11b, and the second support member 11c are provided. A plurality of support members including the three support members 11c are arranged alternately with the magnetic poles 1 between the twelve magnetic poles 1 arranged so as to support the movers 5a and 5b with support parts.
　このような本実施例の構成とすることにより、実施例１と同様な効果を得ることができることは勿論、可動子５ａ及び５ｂの変形を抑制でき、可動子５ａ及び５ｂを磁極歯１ａ、１ｂ、１ｃ及び１ｄの接触などによる交渉を低減できる。 By adopting such a configuration of the present embodiment, it is possible to obtain the same effect as that of the first embodiment, and of course, it is possible to suppress the deformation of the movers 5a and 5b, and to move the movers 5a and 5b to the magnetic pole teeth 1a and 1b. Negotiations due to contact of 1c and 1d can be reduced.
　なお、本実施例では、Ｙ方向の両端を支持する第一の支持部品１０ａの間に２つの別の第一の支持部品１０ａ´と、１２個並んだ磁極１の両端部及び１２個並んだ磁極１の中心部に第一の支持部品１０ａ、第二の支持部品１０ｂ及び第三の支持部品１０ｃと、１２個並んだ磁極１の間全てに、磁極１と支持部材を交互に設けた構成について説明したが、例えば、１２個並んだ磁極１間に断続して支持部品を備えた支持部材を配置しても良いし、磁極１を３つ毎に支持部品を備えた支持部材を配置するなど、任意に保持部品を備えた支持部材を選ぶことができる。 In the present embodiment, two other first support components 10a ′, 12 both end portions of the 12 magnetic poles 1 and 12 are arranged between the first support components 10a that support both ends in the Y direction. A configuration in which the magnetic poles 1 and the supporting members are alternately provided in the central portion of the magnetic pole 1 between the first supporting component 10a, the second supporting component 10b, the third supporting component 10c, and the twelve magnetic poles 1 aligned. However, for example, a support member provided with support parts may be arranged intermittently between twelve magnetic poles 1 arranged, or a support member provided with support parts every three magnetic poles 1 may be provided. A support member provided with a holding part can be selected arbitrarily.
　図１６乃至図１７に、本発明のリニアモータの実施例５を示す。図１６は、第一の支持部材１１ａに設置された第一の支持部品１０ａについての例、図１７は、第三の支持部材１１ｃに設置された第三の支持部品１０ｃについての例である。 16 to 17 show a fifth embodiment of the linear motor of the present invention. 16 shows an example of the first support component 10a installed on the first support member 11a, and FIG. 17 shows an example of the third support component 10c installed on the third support member 11c.
　図１６に示す本実施例のリニアモータにおける可動子５ａ及び５ｂは、永久磁石３と、永久磁石３を固着する部分の第一の磁石ホルダー４ａと、この第一の磁石ホルダー４ａに固着され、第一の支持部品１０ａに接触する部分の第二の磁石ホルダー４ｂとで構成され、第一の支持部品１０ａに接触する部分の第二の磁石ホルダー４ｂを、より厚くすることで可動子５ａ及び５ｂの変形を抑制できるようにしている。 The movers 5a and 5b in the linear motor of the present embodiment shown in FIG. 16 are fixed to the permanent magnet 3, the first magnet holder 4a for fixing the permanent magnet 3, and the first magnet holder 4a. The portion of the second magnet holder 4b in contact with the first support component 10a and the portion of the second magnet holder 4b in contact with the first support component 10a are made thicker so that the mover 5a and The deformation of 5b can be suppressed.
　これにより、可動子５ａ及び５ｂの断面形状は、上下（Ｙ方向）の第二の磁石ホルダー４ｂ、第一の磁石ホルダー４ａとそれをつなぐ永久磁石３とでＨ字形状となり、巻線２ａ、２ｂ、２ｃ及び２ｄと磁極１とが干渉することなく、リニアモータを構成できる。 Thereby, the cross-sectional shapes of the movers 5a and 5b are H-shaped by the upper and lower (Y direction) second magnet holder 4b, the first magnet holder 4a and the permanent magnet 3 connecting them, and the windings 2a, A linear motor can be configured without interference between 2b, 2c and 2d and the magnetic pole 1.
　また、可動子５ａ及び５ｂを支持する第一の支持部品１０ａの形状を段つき形状とすることで、可動子５ａ及び５ｂのＹ方向の抑制も可能になり、可動子５ａ及び５ｂのＹ方向への振動や変位による巻線２ａ、２ｂ、２ｃ及び２ｄと可動子５ａ及び５ｂの接触を防止できる。 In addition, by making the shape of the first support component 10a that supports the movers 5a and 5b into a stepped shape, it becomes possible to suppress the Y direction of the movers 5a and 5b, and the Y direction of the movers 5a and 5b. It is possible to prevent the windings 2a, 2b, 2c and 2d and the movers 5a and 5b from coming into contact with each other due to vibration and displacement.
　特に、Ｈ字形状の可動子５ａ及び５ｂの場合、第一の支持部品１０ａに接触する部分の第二の磁石ホルダー４ｂの厚さをＸ方向に厚くしていくと、可動子５ａ及び５ｂのＹ方向への振動や変位により、巻線２ａ、２ｂ、２ｃ及び２ｄと可動子５ａ及び５ｂが接触し、巻線２ａ、２ｂ、２ｃ及び２ｄの絶縁層の破損や、場合によっては地絡が生じる場合がある。 In particular, in the case of the H-shaped movers 5a and 5b, when the thickness of the second magnet holder 4b in the portion in contact with the first support component 10a is increased in the X direction, the movers 5a and 5b The windings 2a, 2b, 2c, and 2d and the movers 5a and 5b come into contact with each other due to vibration and displacement in the Y direction, and the insulating layers of the windings 2a, 2b, 2c, and 2d are damaged. May occur.
　しかし、本実施例のように、可動子５ａ及び５ｂを支持する第一の支持部品１０ａの形状を段つき形状とすることで、可動子５ａ及び５ｂの動作が安定し、可動子５ａ及び５ｂのＺ方向以外の変位を小さくできる利点がある。また、第一の支持部品１０ａの形状又は可動子５ａ及び５ｂの第一の支持部品１０ａとの接触部をＶ字状にすることでも、可動子５ａ及び５ｂの動作を安定させることができる。 However, as in the present embodiment, the first support component 10a that supports the movers 5a and 5b has a stepped shape, so that the operations of the movers 5a and 5b are stabilized, and the movers 5a and 5b are stable. There is an advantage that the displacement other than in the Z direction can be reduced. The operation of the movers 5a and 5b can also be stabilized by making the shape of the first support component 10a or the contact portions of the movers 5a and 5b with the first support component 10a V-shaped.
　本実施例における磁極１間に配置した磁性体で形成された第三の支持部品１１ｃの設置領域について、図１７を用いて説明する。 The installation area of the third support component 11c formed of a magnetic material disposed between the magnetic poles 1 in this embodiment will be described with reference to FIG.
　図１７では、磁極１間に配置した第三の支持部品１１ｃを磁性体で形成したもので、第三の支持部品１１ｃを磁性体で形成することにより、磁路を拡大することができ、磁極１の磁気飽和を緩和できる。この場合は、巻線２ａ、２ｂ、２ｃ及び２ｄにより生じた磁束を効果的に永久磁石３に鎖交させるため、巻線２ａ、２ｂ、２ｃ及び２ｄの外周側に磁性体を配置するのが好ましい。巻線２ａ、２ｂ、２ｃ及び２ｄの外周側領域２３は、永久磁石３を挟み込むように配置した巻線２ａ、２ｂ、２ｃ及び２ｄの外周側に配置することにより、漏れ磁束を低減できる効果がある。 In FIG. 17, the third support component 11c disposed between the magnetic poles 1 is formed of a magnetic material. By forming the third support component 11c of a magnetic material, the magnetic path can be expanded. 1 can be relaxed. In this case, in order to effectively link the magnetic flux generated by the windings 2a, 2b, 2c, and 2d to the permanent magnet 3, a magnetic material is disposed on the outer peripheral side of the windings 2a, 2b, 2c, and 2d. preferable. The outer peripheral side region 23 of the windings 2a, 2b, 2c and 2d is arranged on the outer peripheral side of the windings 2a, 2b, 2c and 2d which are arranged so as to sandwich the permanent magnet 3, thereby reducing the leakage magnetic flux. is there.
　なお、上述した本発明の各実施例においては、磁極１が１２個並んだ場合のリニアモータを用いて説明したが、本発明のリニアモータは、この磁極数に限定されるものではない。 In each of the embodiments of the present invention described above, the linear motor when twelve magnetic poles 1 are arranged has been described. However, the linear motor of the present invention is not limited to this number of magnetic poles.
　また、上述した本発明の各実施例においては、可動子が２段で構成された場合について説明したが、２つ以上の巻線のアンバランスを解消するものであり、３段以上の可動子構成や可動子が１段の場合においても同様の効果が得られる。 Further, in each of the above-described embodiments of the present invention, the case where the mover is configured in two stages has been described. However, the unbalance of two or more windings is eliminated, and the mover having three or more stages is used. The same effect can be obtained even when the structure and the mover are one stage.
　また、上述した各実施例にリニアモータは、射出成型機やプレス機等の直線駆動システム、或いは電力用の開閉装置の操作器として使用することができる。 Also, in each of the embodiments described above, the linear motor can be used as a linear drive system such as an injection molding machine or a press machine, or as an operating device for a power switchgear.
　なお、本発明は上記した実施例に限定されるものではなく、さまざまな変形例が含まれる。例えば、上記した実施例は本発明を分かりやすく説明するために詳細に説明したものであり、必ずしも説明した全ての構成を備えるものに限定されるものではない。実施例の構成の一部について、構成の追加・削除・置換をすることが可能である。 In addition, this invention is not limited to the above-mentioned Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. It is possible to add, delete, and replace the configuration of a part of the configuration of the embodiment.
　１…磁極、１ａ、１ｂ、１ｃ、１ｄ…磁極歯、１ｅ…磁極歯をつなぐ磁性体、２ａ、２ｂ、２ｃ、２ｄ…巻線、２ｅ…巻線引き出し部、３…永久磁石、４…磁石ホルダー、４ａ…第一の磁石ホルダー、４ｂ…第二の磁石ホルダー、５ａ、５ｂ…可動子、１０ａ…第一の支持部品、１０ｂ…第二の支持部品、１０ｃ…第三の支持部品、１０ｄ…第四の支持部品、１０ｅ…第五の支持部品、１０ａ´…別の第一の支持部品、１１ａ…第一の支持部材、１１ｂ…第二の支持部材、１１ｃ…第三の支持部材、１１ｄ…第四の支持部材、１１ｅ…第五の支持部材、１２…連結部材、１３…溝、２０…吸引力、２１…磁極の範囲、２２…可動子の中心方向の中心軸、２３…巻線の外周側領域。 DESCRIPTION OF SYMBOLS 1 ... Magnetic pole, 1a, 1b, 1c, 1d ... Magnetic pole tooth, 1e ... Magnetic body which connects magnetic pole tooth, 2a, 2b, 2c, 2d ... Winding, 2e ... Winding extraction part, 3 ... Permanent magnet, 4 ... Magnet Holder, 4a ... first magnet holder, 4b ... second magnet holder, 5a, 5b ... mover, 10a ... first support component, 10b ... second support component, 10c ... third support component, 10d ... fourth support component, 10e ... fifth support component, 10a '... another first support component, 11a ... first support member, 11b ... second support member, 11c ... third support member, 11d: fourth support member, 11e: fifth support member, 12: connecting member, 13: groove, 20 ... attractive force, 21 ... magnetic pole range, 22 ... central axis in the central direction of the mover, 23 ... winding The outer area of the line.

Claims (15)

  1. 　永久磁石又は磁性材を磁化方向を反転させつつ複数個並べて形成された可動子と、前記永久磁石又は磁性材を挟み込むように配置された第一の磁極歯及び第二の磁極歯、前記第一の磁極歯及び前記第二の磁極歯をつなぎ磁束の経路を形成する磁性体からなる磁極と、前記第一の磁極歯及び前記第二の磁極歯のそれぞれに巻回された巻線と、前記可動子を支持する支持部材とを備え、
    　前記磁極を前記可動子の進行方向に複数個設置すると共に、前記支持部材は、前記複数個設置された磁極の前記可動子の進行方向両端部及び中心部に配置されていることを特徴とするリニアモータ。     A mover formed by arranging a plurality of permanent magnets or magnetic materials while reversing the magnetization direction, and first and second magnetic pole teeth arranged so as to sandwich the permanent magnets or magnetic materials, the first A magnetic pole made of a magnetic material that connects the second magnetic pole teeth and the second magnetic pole teeth to form a path of magnetic flux, a winding wound around each of the first magnetic pole teeth and the second magnetic pole teeth, and A support member for supporting the mover,
    A plurality of the magnetic poles are installed in the moving direction of the mover, and the support members are arranged at both ends and a center of the moving poles in the moving direction of the mover. Linear motor.
  2. 　請求項１に記載のリニアモータにおいて、
    　前記各支持部材には、それぞれ前記可動子を支持する支持部品が設けられていることを特徴とするリニアモータ。     The linear motor according to claim 1,
    Each of the support members is provided with a support component that supports the mover.
  3. 　請求項２に記載のリニアモータにおいて、
    　前記支持部材は、磁性体から成ることを特徴とするリニアモータ。     The linear motor according to claim 2,
    The linear motor is characterized in that the support member is made of a magnetic material.
  4. 　請求項２に記載のリニアモータにおいて、
    　前記支持部品は、前記可動子の幅方向両端部で支持する位置の前記各支持部材に設けられていると共に、前記可動子は、該可動子の幅方向両端部を挟み込むように前記支持部品で支持されていることを特徴とするリニアモータ。     The linear motor according to claim 2,
    The support component is provided on each support member at a position to be supported at both ends in the width direction of the mover, and the mover is supported by the support component so as to sandwich the both ends in the width direction of the mover. A linear motor characterized by being supported.
  5. 　請求項４に記載のリニアモータにおいて、
    　前記支持部品は、前記第一の磁極歯及び前記第二の磁極歯をつなぎ磁束の経路を形成する前記磁性体の内側に配置されていることを特徴とするリニアモータ     The linear motor according to claim 4,
    The linear motor is characterized in that the support component is arranged inside the magnetic body that connects the first magnetic pole teeth and the second magnetic pole teeth to form a magnetic flux path.
  6. 　請求項４に記載のリニアモータにおいて、
    　前記支持部品は、ローラ、リニアガイド或いはすべり軸受けのいずれか１つから成ることを特徴とするリニアモータ。     The linear motor according to claim 4,
    The linear motor according to claim 1, wherein the support component is one of a roller, a linear guide, and a sliding bearing.
  7. 　請求項４に記載のリニアモータにおいて、
    　前記第一の磁極歯及び前記第二の磁極歯のそれぞれに巻回された前記巻線の幅をＬｗ、前記可動子の幅方向両端部で支持する位置の前記各支持部材に設けられている前記支持部品の幅方向間隔をＬｐとしたときに、Ｌｗ≦Ｌｐの関係であることを特徴とするリニアモータ。     The linear motor according to claim 4,
    The width of the winding wound around each of the first magnetic pole teeth and the second magnetic pole teeth is Lw, and is provided on each of the support members at a position to be supported at both ends in the width direction of the mover. A linear motor having a relationship of Lw ≦ Lp, where Lp is the interval in the width direction of the support component.
  8. 　請求項１に記載のリニアモータにおいて、
    　前記複数個設置された磁極の前記可動子の進行方向両端部と中心部に配置された前記支持部材のそれぞれの間に、更に支持部材が少なくとも１つ配置されていることを特徴とするリニアモータ。     The linear motor according to claim 1,
    A linear motor in which at least one support member is further arranged between each of the plurality of magnetic poles arranged in the direction of travel of the mover and the support members arranged at the center. .
  9. 　請求項８に記載のリニアモータにおいて、
    　前記複数個設置された磁極の前記可動子の進行方向両端部と中心部のそれぞれの間に配置された前記支持部材に、前記巻線の引き出し線を保持する溝が設けられていることを特徴とするリニアモータ。     The linear motor according to claim 8, wherein
    A groove for holding a lead wire of the winding is provided in the support member disposed between both end portions and a center portion of the mover in the moving direction of the plurality of magnetic poles. A linear motor.
  10. 　請求項１に記載のリニアモータにおいて、
    　前記可動子の進行方向が略平行になるように少なくとも２つの前記可動子が併設され、かつ、２つの前記可動子は、該可動子の進行方向の端部が連結部材で連結されていることを特徴とするリニアモータ。     The linear motor according to claim 1,
    At least two of the movable elements are provided side by side so that the moving directions of the movable elements are substantially parallel, and the two movable elements are connected to each other in the moving direction by a connecting member. A linear motor characterized by
  11. 　請求項４に記載のリニアモータにおいて、
    　前記可動子の幅方向両端部を支持している前記支持部品の間に、前記各支持部材に設けられている別の支持部品が少なくとも１つ設置されていることを特徴とするリニアモータ。     The linear motor according to claim 4,
    A linear motor, wherein at least one other support component provided on each of the support members is installed between the support components supporting both ends of the movable element in the width direction.
  12. 　請求項１１に記載のリニアモータにおいて、
    　前記可動子の進行方向両端部に配置された前記支持部材の間に、前記支持部材を備えた前記支持部材と前記磁極が交互又は断続的に、或いは３個の前記磁極毎に前記支持部材が配置されていることを特徴とするリニアモータ。     The linear motor according to claim 11,
    The support member provided with the support member and the magnetic pole are alternately or intermittently between the support members disposed at both ends of the mover in the traveling direction, or the support member is provided for every three magnetic poles. A linear motor characterized by being arranged.
  13. 　請求項４に記載のリニアモータにおいて、
    　前記可動子は、永久磁石と、該永久磁石を固着する第一の磁石ホルダーと、該第一の磁石ホルダーに固着され、前記支持部品に接触支持する第二の磁石ホルダーとから成り、前記可動子は、その断面形状がＨ字形状を成していることを特徴とするリニアモータ。     The linear motor according to claim 4,
    The movable element includes a permanent magnet, a first magnet holder that fixes the permanent magnet, and a second magnet holder that is fixed to the first magnet holder and supports the support component in contact with the movable magnet. The child is a linear motor characterized in that its cross-sectional shape is H-shaped.
  14. 　請求項４に記載のリニアモータにおいて、
    　前記可動子は、永久磁石と、該永久磁石を固着する第一の磁石ホルダーと、該第一の磁石ホルダーに固着され、前記支持部品に接触支持する第二の磁石ホルダーとから成り、前記可動子を支持する前記支持部品が、段つき形状を成していることを特徴とするリニアモータ。     The linear motor according to claim 4,
    The movable element includes a permanent magnet, a first magnet holder that fixes the permanent magnet, and a second magnet holder that is fixed to the first magnet holder and supports the support component in contact with the movable magnet. A linear motor characterized in that the support component for supporting a child has a stepped shape.
  15. 　請求項４に記載のリニアモータにおいて、
    　前記可動子は、永久磁石と、該永久磁石を固着する第一の磁石ホルダーと、該第一の磁石ホルダーに固着され、前記支持部品に接触支持する第二の磁石ホルダーとから成り、前記可動子を支持する前記支持部品の形状又はその接触部がＶ字状を成していることを特徴とするリニアモータ。     The linear motor according to claim 4,
    The movable element includes a permanent magnet, a first magnet holder that fixes the permanent magnet, and a second magnet holder that is fixed to the first magnet holder and supports the support component in contact with the movable magnet. A linear motor characterized in that the shape of the support component for supporting the child or the contact portion thereof is V-shaped.
PCT/JP2015/064670 2014-10-02 2015-05-22 Linear motor WO2016051855A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247264A (en) * 1985-04-23 1986-11-04 Yaskawa Electric Mfg Co Ltd Linear motor
JP2005287185A (en) * 2004-03-30 2005-10-13 Hitachi Ltd Linear motor
JP2011223697A (en) * 2010-04-07 2011-11-04 Hitachi Metals Ltd Linear motor
WO2014065308A1 (en) * 2012-10-24 2014-05-01 株式会社日立製作所 Linear motor and linear motor drive system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247264A (en) * 1985-04-23 1986-11-04 Yaskawa Electric Mfg Co Ltd Linear motor
JP2005287185A (en) * 2004-03-30 2005-10-13 Hitachi Ltd Linear motor
JP2011223697A (en) * 2010-04-07 2011-11-04 Hitachi Metals Ltd Linear motor
WO2014065308A1 (en) * 2012-10-24 2014-05-01 株式会社日立製作所 Linear motor and linear motor drive system

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