JP3360606B2 - Linear motor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor used in, for example, a semiconductor manufacturing apparatus or a factory automation (FA) apparatus, which dislikes cogging force, thrust ripple and heat generation, and requires high-speed or high-precision positioning.

[0002]

2. Description of the Related Art In a conventional linear motor, as disclosed in Japanese Patent Application No. 9-82133 filed by the present applicant, two stators are opposed to each other, and a mover moves between them. There is something. The structure of the mover of these linear motors is such that the split cores are connected to each other after being wound on split cores in advance, so that the winding space factor in the slot is high and the heat generation is small. It has become. Another conventional linear motor is disclosed in Japanese Patent Application Laid-Open No. Hei 7-245932, in which two stators each having a permanent magnet for a field disposed inside are shifted by a half pitch. The effect of reducing the thrust ripple is obtained. Other conventional linear motors include those disclosed in Japanese Patent Application Laid-Open No. H10-52025, which has the effect of reducing the thrust ripple similarly to the above-described motor.

[0003]

However, the prior art has the following problems. That is, in the linear motor described in Japanese Patent Application No. Hei 9-82133 filed by the present applicant, the mover may be tilted due to slight care when mounting the table. And a large cogging force is generated. Furthermore, since the permeance is greatly different between where the iron core near the ends of the mover is and where it is not, this also causes a problem in that the cogging force is increased. Further, in the linear motor described in Japanese Patent Application Laid-Open No. 7-245932, since two stators are arranged offset, the main magnetic flux passing between opposed magnets is not sufficient, and the thrust is extremely low. Therefore, when trying to obtain a large thrust, heat generation becomes large, which is a problem. Further, in the linear motor described in JP-A-10-52025, for example, the number of slots per pole / phase is 3 /
When an attempt is made to construct the motor of No. 8, the thrust ripple can be reduced, but there is a disadvantage that the thrust is reduced. This indicates that the same is true even if the phase sequence of the pair of armatures is simply reversed and a different phase current is supplied. Therefore, a large amount of current is required to obtain a predetermined thrust, so that an increase in the power supply capacity and heat generation of the linear motor portion have become problems. Therefore, the present invention has been made to solve such a problem in the linear motor.

[0004]

Therefore, a linear motor according to the present invention comprises a left and right parallel stator in which a plurality of permanent magnets are fixed at equal intervals inside so that the plurality of permanent magnets have different polarities sequentially in the direction of movement. The split cores wound with the armature windings are arranged in the moving direction and mechanically coupled, and are arranged at the center of the stator and supported so as to be movable in the moving direction. In a linear motor consisting of a mover forming a magnetic pole surface so as to face through an air gap, the moving direction positions of the permanent magnets provided on the left and right stators are shifted from each other by a half pitch, and the left and right The moving direction positions of the armature windings are shifted from each other by one slot or more, and the connection of the left and right armature windings is characterized in that windings of the same phase are connected in series or in parallel. According to the present invention, the left and right parallel stators in which a plurality of permanent magnets are fixed inside at equal intervals so as to be sequentially different poles along the moving direction, and an armature winding are wound. The rotated split cores are arranged in the moving direction and mechanically connected, and are arranged at the center of the stator and supported so as to be movable in the moving direction, and the side surfaces of the split core face the permanent magnet via an air gap. In the linear motor including the mover forming the magnetic pole surface, the moving direction positions of the left and right magnetic pole surfaces are shifted from each other by a half pitch, and the moving direction positions of the left and right armature windings are at least one slot or more from each other. The connection of the armature windings on the left and right is shifted by ± 0.5 slot, and the same-phase windings are connected in series or in parallel. According to a third aspect of the present invention, there is provided a linear motor including a permanent magnet unit having permanent magnets arranged at equal intervals and two armature units having armature windings wound on both sides of the permanent magnet. In a linear motor in which two permanent magnet units are arranged in parallel and the two permanent magnet units are part of the same mover,
The permanent magnets provided in the permanent magnet units are located at the same position in the moving direction with respect to each other, and the moving direction positions of the armature units on both sides of the permanent magnet unit are shifted by half a pitch from each other, and the left and right The moving direction positions of the armature windings are shifted from each other by at least one slot ± 0.5 slot, and the connection of the left and right armature windings is such that windings of the same phase are connected in series or in parallel. It is. Further, the present invention according to claim 4 is a linear motor comprising a permanent magnet unit having permanent magnets arranged at equal intervals and two armature units having armature windings wound on both sides of the permanent magnet. In a linear motor in which two permanent magnet units are arranged in parallel and two permanent magnet units are part of the same mover, the moving direction positions of the permanent magnets provided on the two permanent magnet units are mutually different. The slot pitch is shifted by half, the left and right armature units are located at the same position in the moving direction, the left and right armature windings are shifted by one or more slots in the moving direction. The connection is characterized in that in-phase windings are connected in series or in parallel.

With the above arrangement, the two stators on which the field permanent magnets are arranged are shifted by a half pitch, and the moving directions of the armature windings are also shifted from each other. Thrust ripple can be reduced. In addition, two movable elements provided with field permanent magnets are shifted, or a field permanent magnet is sandwiched between the two movers.
The same effect can be obtained by disposing the armatures in a shifted manner. In addition, according to the shifted field permanent magnet or armature, the armature winding is also shifted by the shifted electrical angle or an electrical angle close to it, so that there is almost no reduction in thrust. Can be.

[0006]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a horizontal sectional view of a main part showing a structure of a linear motor according to a first embodiment of the present invention, and FIG. 2 is a front sectional view of a main part. FIG. 1 is a cross-sectional view taken along the line AA ′ of FIG. This motor is a three-phase motor, and is a moving coil linear motor having 3/8 of the number of slots per pole and phase. In these figures, the stator is composed of two stators, a left stator 111 and a right stator 112, which have substantially the same structure, and permanent magnets 113 are fixed to opposing inner surfaces at a constant pitch in the moving direction, that is, in the longitudinal direction. And are rigidly fixed to each other by other structural components (not shown). Adjacent permanent magnets 113 are magnetized to have different polarities, and the right stator 1
The permanent magnets 113 of the left stator 111 are shifted by a half pitch λ / 2 in the negative direction (downward in the figure) with respect to the 12 permanent magnets 113.
Are shifted from each other. That is, the arrangement is shifted by -90 degrees in electrical angle.

The mover 120 includes a cross-shaped split core 125 in which a left armature winding 123 and a right armature winding 124 are concentratedly wound around left and right magnetic poles, a mover upper member 121, a mover lower member 122, It comprises a guide and a support mechanism (not shown). Nine cruciform split cores 125 are mechanically connected in the longitudinal direction, and are further clamped between upper and lower mover members 121 and 122 by bolts 126 passed through through holes 127 and vertically clamped. It is fixed rigidly. The cross-shaped split core 125 is located between the left stator 111 and the right stator 112, and the upper surface of the movable member upper member 121 is fixed to a load (not shown), and is movable in the longitudinal direction by a guide and a support mechanism.

As shown in FIG. 3, the right armature winding 124 is composed of three UR-XR, VR-YR, and WR-ZR.
The left armature winding 123 is UL-XL, VL-YL, WL
-ZL, which are connected as shown in FIG. Here, the connection method of the armature winding is shown in FIG.
This will be described with reference to FIG. The numbers in the figure represent slot numbers. As shown in the figure, the right armature winding 1
Reference numeral 24 indicates a positive direction from the left armature winding 123 (right direction in the figure).
5 slots, and the three armature windings 1
The winding end of 24 and the winding start of the left armature winding 123 are connected. Here, if the deviation between the left and right armature windings is represented by an electrical angle, 5 × 160 = 800 degrees, that is, 800−2
× 360 = 80 degrees.

Next, the principle of thrust generation will be described.
When a peak current flows in the U phase of the armature winding, the magnetic flux generated by the magnetomotive force of the right armature winding 124 and the left armature winding 123 by the armature winding shown in FIG. A minute shift occurs. FIG. 5 shows the distribution of these magnetic fluxes and the direction of the generated thrust.
0 = 800 degrees, that is, 800−2 × 360 = 80 degrees. Permanent magnet 1 for left and right stators 111, 112
13 is shifted by +90 degrees in electrical angle, so if the magnetic poles of the permanent magnet 113 of the left armature winding 123 and the left stator 111 are shifted by +5 degrees in electrical angle, the right armature winding 124 and The magnetic poles of the permanent magnet 113 of the right stator 112 are shifted by + 5-90 + 80 = -5 degrees in electrical angle. Therefore, the magnetic flux distribution due to the armature magnetomotive force and the permanent magnet 1
There is only a 5 degree electrical angle deviation from the 13 magnetic poles, and the reduction in thrust is 100-100 × cos (5 degrees) = 0.4%, indicating that the thrust hardly drops. Further, since the magnetic pole center position of the permanent magnet 113 and the peak or the valley of the magnetic flux distribution due to the armature magnetomotive force are shifted by about 90 degrees (more precisely, 85 degrees and 105 degrees) in electrical angle, the movable element 12
In the case of 0, a thrust is generated in the direction of the arrow by the attraction and repulsion by the magnetic force. By sequentially switching the armature current according to the position of the mover 120, the mover 120 can move in the direction of the arrow. Here, if only the order of the phases is changed as in the invention described in Japanese Patent Application Laid-Open No. H10-52025, which is a conventional example, the following is obtained. To shift the phase order, the left and right armature windings are equivalent to three slots, that is, 3 × 160 = 480 degrees in electrical angle, ie, 480−
360 = 120 degrees. Similarly, when the magnetic flux distribution due to the armature magnetomotive force is determined from the deviation from the magnetic pole of the permanent magnet, (120-90) / 2 = 15 degrees. That is, the thrust reduction is 100-100 × COS (15 degrees) = 3.4%. This is about 8 times lower than that of the present embodiment, and it can be seen that the present invention is preferable.

FIG. 6A shows the waveform of the cogging force generated in the linear motor of this embodiment. For comparison, FIG. 6B shows that the positions of the permanent magnets of the left and right stators 111 and 112 are not shifted from each other. 7 shows a waveform of a cogging force generated in a linear motor having a conventional structure. According to (b),
Since the cogging forces generated between the left and right stators 111 and 112 and the mover 120 have the same phase with the pole pitch as the basic period, the two cogging forces are added to generate a very large cogging force. On the other hand, in the case of the present embodiment shown in (a), since the phase difference of the cogging force generated between the left and right stators 111 and 112 and the mover 120 is 180 degrees, the basic period is 2 And the amplitude is also small.

Next, a second embodiment of the present invention will be described. FIG. 7 is a horizontal sectional view of a main part showing the structure of the second embodiment, and FIG. 8 is a front sectional view of the main part. FIG. 7 is a sectional view taken along line AA ′ of FIG.
It is sectional drawing of a cross section. This motor is also a three-phase motor,
This is a moving coil type linear motor in which the number of slots for each pole and each phase is 3/8. In these figures, the permanent magnets 213 facing the left and right stators 211 and 212 are arranged at the same position without being shifted with respect to the moving direction, and have the same polarity as the first embodiment. Is different. The mover 220 has the same configuration as that of the first embodiment except that the split core 225 is different. The split core 225 has a shape in which the magnetic poles on one side of the cross-shaped split core 125 of the first embodiment are cut off, and 18 same split cores 225 are mechanically connected so that the magnetic poles are alternately left and right. I have. The left armature winding 223 is wound around the magnetic pole of the split core 225 extending to the left, and the right armature winding 224 is wound around the magnetic pole of the split core 225 extending to the right. At both ends in the longitudinal direction, split cores with half the area of the tip of the magnetic pole and no winding are attached.

As shown in FIG. 9, the right armature winding 224 includes three windings UR-XR, VR-YR, and WR-ZR.
The left armature winding 223 is UL-XL, VL-YL, WL
-ZL, which are connected as shown in FIG. Here, the method of connecting the armature windings is shown in FIG.
This will be described with reference to FIG. The numbers in the figure represent slot numbers. As shown in the figure, the right armature winding 2
24 and the left armature winding 223 are shifted by 4.5 slots in the + direction (right direction in the figure), and the end of the winding of the right armature winding 224 and the beginning of the winding of the left armature winding 223 are all three. It is connected. Here, the displacement of the left and right armature windings is represented by an electrical angle of 4 × 160 + 160/2 = 720 degrees.

Next, the principle of thrust generation will be described.
When a peak current flows in the U-phase of the armature winding, the magnetic flux generated by the magnetomotive force of the right armature winding 224 and the left armature winding 223 by the armature winding shown in FIG. A shift of 5 slots occurs. FIG. 10 shows the distribution of these magnetic fluxes and the direction of the generated thrust.
20 degrees, ie, 720-2 × 360 = 0 degrees. Therefore, the magnetic flux distribution due to the magnetomotive force and the magnetic pole of the permanent magnet 213 have no deviation in electrical angle, and the thrust does not decrease at all. In addition, the permanent magnet 213
The magnetic pole center position and the peak or valley of the magnetic flux distribution due to the armature magnetomotive force are shifted by 90 degrees in electrical angle.
Generates a thrust in the direction of the arrow due to attraction and repulsion by a magnetic force. By sequentially switching the armature current according to the position of the mover 220, the mover 220 can move in the direction of the arrow. The waveform of the cogging force generated in this embodiment is similar to that of the first embodiment shown in FIG.

In this embodiment, when the finishing accuracy of the connecting portion of the divided cores is not good, a minute gap may be generated in the connecting portion, and the armature may be warped or undulated in the longitudinal direction. There is a concern that cogging force may be generated due to variations in the gap between the armature teeth.
However, as in the first embodiment, as shown in FIGS. 7 and 8, the bolt 22 is inserted into the through hole 227 of the split core 225.
6, the movable member upper member 221 and the movable member lower member 222 are sandwiched and fixed from above and below, so that warpage and undulation are forcibly suppressed.

Next, a third embodiment of the present invention will be described. FIG. 11 is a horizontal sectional view of a main part showing the structure of the fourth embodiment. The difference from the second embodiment of FIG.
25 is that the split core 325 is integrally formed. For this reason, the rigidity of the mover is improved as compared with the second embodiment, and the generation of distortion and the resulting thrust ripple is further suppressed. Since the winding method is the same as that of the second embodiment, there is an effect of reducing the cogging force as in the second embodiment, and there is an effect that the number of parts is small and the assembling time can be reduced.

Next, a fourth embodiment of the present invention will be described. FIG. 12 is a horizontal sectional view of a main part showing the structure of the fourth embodiment, and FIG. 13 is a front sectional view of the main part. FIG. 12 is a cross-sectional view taken along the line AA ′ of FIG. This motor is a three-phase motor, and is a movable magnet type linear motor in which the number of slots in each pole and each phase is 3/8. The mover 420 of this motor includes two permanent magnet units 421 and 422 on the left and right.
Armature units 414 and 415 are provided on the left and right of the permanent magnet unit 421 via an air gap, and armature units 416 and 417 are provided on the left and right of the permanent magnet unit 422 via an air gap. Nine permanent magnets 423 are fixed to the permanent magnet units 421 and 422 at equal intervals in the longitudinal direction, and are magnetized so as to have different polarities sequentially in the longitudinal direction. Permanent magnet unit 41
The permanent magnets 423 fixed to the armature units 4 and 413 are located in the same moving direction (the vertical direction in FIG. 12).
14, 415, 416, and 417 are configured by arranging equally-divided cores 412, each having an armature winding 413 wound thereon, at a pitch τ. And each armature unit 41
4, 415, 416, and 417 in the moving direction of the split core 412 correspond to the armature units 414 and 41.
6, the armature unit 415 and the armature unit 41
7 are the same, and the armature units 415, 417
Move with respect to the armature units 414 and 416 (FIG. 1).
(Upward direction 2) by a half pitch.

The armature units 414, 415, 416,
417 is a mountain-shaped fixing member 41 having two concave portions in cross section.
1 and is fixed inside the concave portion, and constitutes a stator 410 together with a base supporting the fixing member. Mover 42
A linear guide 430 that supports the movable member only in the moving direction is provided between the left and right ends of the stator 410 and the left and right ends of the stator 410.

Here, the method of connecting the armature windings is shown in FIG.
15 will be described. The numbers in the figure represent slot numbers. The armature unit 414 has U1-X1, V1
-Y1 and three windings of W1-Z1 are wound, and the armature unit 415 has U2-X2, V2-Y2, and W2-Z2.
Are wound, and the armature unit 416 has U
Three windings of 3-X3, V3-Y3, and W3-Z3 are wound, and the armature unit 417 has U4-X4, V4-Y
4, three windings of W4-Z4 are wound. As shown in the figure, the armature units 414 and 416 and the armature units 415 and 417 are shifted by a half pitch in the moving direction, and the armature windings are also shifted by 4.5 slots. This shift is an electrical angle of 4.5 × 160 = 720 degrees, that is, 720−2 × 360 = 0.

Next, the principle of thrust generation will be described.
When a peak current flows in the U phase of the armature winding, FIG.
The armature winding shown in FIG.
4, 416 and the magnetic flux distributions formed by the armature units 415, 417 are shifted by 4.5τ in mechanical angle. That is, a shift of electrical angle of 4.5 × 160 = 720 degrees occurs, and the winding start and end of the armature units 414 and 416 are inverted, so that the magnetic flux distribution waveform is inverted. Thus, since the phase difference of the electrical angle between the peak or valley of the magnetic flux distribution created by the magnetomotive force and the magnetic pole of the permanent magnet of the mover is 90 degrees, thrust is generated in the mover in the direction of the arrow. I do. Similarly, by changing the armature current according to the position of the mover, the mover moves in the direction of the arrow. Further, the armature units 414 and 416 and the armature unit 41 at this time are
Since the magnetic fluxes produced by the magnetic fluxes 5 and 417 are shifted by an electrical angle of 720 degrees, that is, there is no electrical phase difference, the thrust does not decrease at all even if the armature units 415 and 417 are shifted by τ / 2.

As described above, the armature units 414, 4
16 and the cogging force generated between the armature units 415 and 417 and the permanent magnets 421 and 422 are generated with the slot pitch τ as the basic period, but are offset by each other. Similarly to the first embodiment, the fundamental period is set to τ / 2, and the amplitude is also reduced.

Next, a fifth embodiment of the present invention will be described. FIG. 17 is a horizontal sectional view of a main part showing the structure of the fifth embodiment, and a front sectional view of the main part is the same as that of the fourth embodiment. This motor is also a three-phase motor, and the number of slots for each phase is 3 /
8 is a movable magnet type linear motor. This motor is
Compared with the embodiment, the permanent magnet unit 522 provided on the mover is arranged with a half pitch shift in the moving direction (downward in FIG. 17) with respect to the permanent magnet unit 521, and is shifted by -80 degrees in electrical angle. And that the magnetic poles of the split cores 512 constituting the armature units 514, 515, 516, 517 are located in the same moving direction.

Here, the method of connecting the armature windings is shown in FIG.
This will be described with reference to FIG. The numbers in the figure represent slot numbers. As shown in the figure, the armature unit 5
The 14 armature windings are shifted by 3 slots (3 × τ) in the + direction with respect to the armature windings of the armature unit 516,
The beginning and end of winding are reversed. The armature unit 515 and the armature unit 517 have the same relationship, and the armature units 514 and 516 and the armature unit 515,
The armature winding 517 is also inverted. The displacement of the armature windings of the armature units 514 and 516 is 3 × 160 = 480 degrees in electrical angle, ie, 480−3.
60 = 120 degrees.

Next, the principle of thrust generation will be described.
When a peak current flows in the U phase of the armature winding, FIG.
9, armature units 514,
The magnetic flux generated by the magnetomotive force of the 516 and the armature units 515 and 517 has a mechanical angle of 3 × τ. FIG. 20 shows the distribution of the generated magnetic flux and the direction of the thrust. This shift is 3 × 160 = 480 degrees in electrical angle, that is, 480−3.
This indicates that a shift of 60 = 120 degrees has occurred. Here, since the permanent magnet units 521 and 522 are shifted by -80 degrees in electrical angle, if the armature unit 51
If the magnetic poles of the permanent magnet units 521 and 522 are different from the magnetic poles of the armature units 515 and 517 by -20 degrees in electrical angle, the magnetic poles of the armature units 515 and 517 are shifted by -20 degrees in electrical angle. It means that the degree is shifted by 120 degrees = 120 degrees. Therefore, the magnetic flux distribution due to the magnetomotive force and the magnetic pole of the permanent magnet are only shifted by an electrical angle of 20 degrees, and the thrust reduction at this time is 100-100 × cos (20 degrees) =
Since it is 6%, it can be said that the thrust hardly drops. Further, the magnetic pole of the permanent magnet of the mover and the peak or valley of the magnetic flux distribution generated by the armature magnetomotive force has a phase difference of about 90 degrees (more precisely, 70 degrees and 110 degrees) in electrical angle. Thrust is generated in the direction indicated by the arrow.

Next, the thrust ripple will be described. Since the thrust ripple of the movable magnet type linear motor is generated separately from the cogging force due to the influence of the permanent magnets at both ends of the mover, the waveform of the thrust ripple generated in the linear motor of this embodiment is as shown in FIG. Become. For comparison, (b)
2 shows a waveform of a thrust ripple generated in a linear motor having a conventional structure in which two permanent magnet units are not displaced from each other in the moving direction. In (b), the thrust generated between the armature unit and the permanent magnet unit fluctuates with the slot pitch as the basic period, and the pulsation width is about 4%. However, from the waveforms of the present embodiment shown in (a), the armature units 514, 516 and the permanent magnet units 521, 52
2 and the armature units 515, 5
17 and the thrust generated between the permanent magnet units 521 and 522 have a phase difference of half the slot pitch, so that the basic cycle of the thrust ripple is doubled and the amplitude width is also about 1
%.

In the above embodiment, the number of slots for each pole and each phase has been described as 3/8. However, according to the gist of the present invention, the present invention is not limited to this, and it is clear that other combinations may be used. is there. In the first, second and third embodiments, the moving coil type linear motor has been described. In the fourth and fifth embodiments, the moving magnet type linear motor has been described.
According to the gist of the present invention, the movable side of each of the above embodiments is used as the fixed side, and the fixed side can be used as the movable side without any problem. Can be.

[0026]

As described above, according to the present invention, since the left and right permanent magnets are displaced and the left and right armature teeth are displaced, the space factor of the winding in the slot is improved. The cogging force and the thrust ripple can be reduced while maintaining. In addition, simply connecting the armature teeth alternately left and right causes a phase difference in the interlinkage magnetic flux of the left and right armature windings to reduce the thrust. However, according to the present invention, the left and right armature windings are shifted. The electric motor is wound with a shift of the electric angle or an electric angle close to the electric angle, so that a smooth driving force can be obtained without lowering the thrust, and there is an effect of improving the practicality of the linear motor.

[Brief description of the drawings]

FIG. 1 is a horizontal sectional view of a main part showing a structure of a first embodiment.

FIG. 2 is a front sectional view of a main part showing the structure of the first embodiment;

FIG. 3 is a winding diagram of the first embodiment.

FIG. 4 is a wiring diagram of a winding according to the first embodiment.

FIG. 5 is a diagram showing a magnetic flux distribution and a thrust direction according to the first embodiment.

FIGS. 6A and 6B are diagrams showing a cogging force waveform of the first embodiment. FIG. 6A shows the case of the first embodiment, and FIG.

FIG. 7 is a horizontal sectional view of a main part showing the structure of the second embodiment.

FIG. 8 is a front sectional view of a main part showing the structure of the second embodiment.

FIG. 9 is a winding diagram of a second embodiment.

FIG. 10 is a diagram showing a magnetic flux distribution and a thrust direction according to the second embodiment.

FIG. 11 is a horizontal sectional view of a main part showing the structure of the third embodiment.

FIG. 12 is a horizontal sectional view of a main part showing the structure of the fourth embodiment;

FIG. 13 is a front sectional view of a main part showing the structure of a fourth embodiment;

FIG. 14 is a wiring diagram of a winding according to a fourth embodiment.

FIG. 15 is a winding diagram of a fourth embodiment.

FIG. 16 is a diagram showing a magnetic flux distribution and a thrust direction according to a fourth embodiment.

FIG. 17 is a horizontal sectional view of a main part showing the structure of the fifth embodiment.

FIG. 18 is a winding diagram of the fifth embodiment.

FIG. 19 is a wiring diagram of a winding according to a fifth embodiment.

FIG. 20 is a diagram showing a magnetic flux distribution and a thrust direction according to a fifth embodiment.

FIGS. 21A and 21B are diagrams showing thrust ripple waveforms of the fifth embodiment. FIG. 21A shows the case of the fifth embodiment, and FIG.

[Explanation of symbols]

111, 211, 311 Left stator 112, 212, 312 Right stator 113, 213, 313, 423, 523 Permanent magnet 120, 220, 420 Mover 121, 221 Mover upper member 122, 222 Mover lower member 123, 223, 323 Left armature winding 124, 224, 324 Right armature winding 125 Cross-shaped split core 126, 226 Bolt 127, 227, 327 Through hole 410 Stator 411 Mountain-shaped fixing member 225, 325, 412, 512 Cores 413, 513 Armature windings 414, 415, 416, 417, 514, 515, 5
16, 517 Armature unit 421, 422, 521, 522 Permanent magnet unit 430 Linear guide

Claims (4)

(57) [Claims] 1. A left and right parallel stator in which a plurality of permanent magnets are fixed at equal intervals inside so as to be sequentially different in polarity along a moving direction, and a split core wound with an armature winding in a moving direction. And are mechanically coupled and arranged at the center of the stator and supported so as to be movable in the moving direction, and form a magnetic pole surface such that a side surface of the split core faces the permanent magnet via an air gap. In the linear motor including the mover, the moving direction positions of the permanent magnets provided on the left and right stators are shifted from each other by a half pitch, and the moving direction positions of the left and right armature windings are one slot or more from each other. A linear motor, wherein the left and right armature windings are connected by in-phase windings connected in series or in parallel. 2. A left and right parallel stator in which a plurality of permanent magnets are fixed at equal intervals inside so as to be sequentially different poles along the moving direction, and a divided core wound with an armature winding. And are mechanically coupled and arranged at the center of the stator and supported so as to be movable in the moving direction, and form a magnetic pole surface such that a side surface of the split core faces the permanent magnet via an air gap. In the linear motor including the mover, the moving direction positions of the left and right magnetic pole surfaces are shifted from each other by a half pitch, and the moving direction positions of the left and right armature windings are shifted from each other by at least one slot ± 0.5 slot. A linear motor, wherein left and right armature windings are connected in series or in parallel with in-phase windings. 3. The same linear motor comprising a permanent magnet unit having permanent magnets arranged at equal intervals and two armature units having armature windings wound on both sides of the permanent magnet are arranged in parallel. In addition, in the linear motor in which the two permanent magnet units are part of the same mover, the permanent magnets provided in the two permanent magnet units are at the same position in the moving direction, The moving direction positions of the armature units on both sides of the magnet unit are shifted from each other by a half pitch, and the moving direction positions of the left and right armature windings are shifted from each other by at least one slot ± 0.5 slot. A linear motor in which armature windings are connected in series or in parallel with windings of the same phase. 4. Two parallel linear motors each comprising a permanent magnet unit having permanent magnets arranged at equal intervals and two armature units having armature windings wound on both sides of the permanent magnet. In addition, in the linear motor in which the two permanent magnet units are part of the same mover, the moving direction positions of the permanent magnets provided in the two permanent magnet units are shifted from each other by half the slot pitch. The left and right armature units are located in the same moving direction position, the left and right armature windings are shifted by one slot or more from each other, and the left and right armature windings are connected in the same phase. Are connected in series or in parallel.