KR20090091029A - Coil unit for three-phase linear motor and linear motor - Google Patents

Abstract

A coil unit for a three-phase linear motor and a three-phase linear motor are provided to improve driving efficiency by increasing coil density in a thrust effective part. A coil unit(7) for a three-phase linear motor includes a first coil(4), a second coil(5), and a third coil(6). Each coil has a first straight part, a second straight part, a first connection part, and a second connection part. The first straight part and the second straight part are arranged into Y-axis direction. The first straight parts are adjacent into the Y-axis direction. The second straight part is arranged into the Y-axis direction from the first straight part of the third coil. The first connection part and the second connection part connect both ends of the first straight part and the second straight part. The first coil and the third coil have the same shape.

Description

Coil unit for three-phase linear motor and linear motor

The present invention relates to a coil unit for a three-phase linear motor having a plurality of coils serving as driving portions of a three-phase linear motor, and a three-phase linear motor.

Background Art Conventionally, as a three-phase linear motor, a plurality of coils constituting a mover (drive part) are arranged in a line in the moving direction of the mover, housed in a support (case), fixed together, and integrally assembled to form a coil unit. It is known (for example, refer patent document 1). 9 is a perspective view showing the shape and arrangement of a plurality of coils described in Patent Document 1. FIG. As shown in the figure, the plurality of coils 100 extend in the straight portion 102, that is, the direction orthogonal to the moving direction of the mover, and receive a magnetic field to generate thrust. The parts are alternately combined so as to fit in a chain shape inside the ring of the adjacent coil 100.

[Patent Document 1] Japanese Patent Application Laid-Open No. 10-00522

However, in the case where a plurality of coils are combined as described in Patent Literature 1, since there is only one coil adjacent to the coils located at both ends of the coil unit, the coils of the adjacent coils Only the straight part is fitted. Therefore, in the case where the ring sizes of the plurality of coils are the same, voids (part A in the drawing) are generated inside the ring of the coil located at both ends of the coil unit. Coil density (coil spot ratio) becomes small, and the drive efficiency of a mover falls.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and a coil unit for a three-phase linear motor and a three-phase linear motor which can improve the driving efficiency by increasing the coil density (coil spot ratio) in the thrust effective portion. It aims to provide.

In order to solve the above problems, the three-phase linear motor coil unit according to the present invention is a pair of straight lines arranged in a lengthwise direction, each arranged in a second direction crossing the first direction. And a pair of straight lines each of the first, second, and third coils, each of the first, second, and third coils each including a pair of connecting portions connecting both ends of the pair of straight portions; One straight portion of the portion is arranged adjacent to each other in the order of the first, second and third coils in the second direction, and the other straight portion of the pair of straight portions of each of the first, second and third coils is And are arranged adjacent to each other in the order of the first, second and third coils in a second direction continuously from one straight portion of the third coil.

In the above-described three-phase linear motor coil unit, one independent coil unit is constituted by three coils (first, second and third coils), and the linear parts of each coil are sequentially arranged adjacent to each other. Combined. This makes it possible to prevent the generation of voids inside the ring of the coil while keeping the ring size of each coil constant, so that the coil density in the thrust effective portion of the coil unit for three-phase linear motor (coil drop rate). ), The driving efficiency can be improved.

In addition, in the coil unit for a three-phase linear motor, the connection part of a 2nd coil and a pair of linear part are arrange | positioned along one flat surface, and each connection part of a 1st and 3rd coil is a connection part of a 2nd coil. It may be characterized in that it is provided to bend to the straight portion so as to sandwich the between each other. By such a structure, the arrangement | positioning of the linear part of each coil mentioned above can be implement | achieved suitably. In this case, the first and third coils may further have the same shape. Thereby, the kind of components can be reduced and reliability and productivity can be improved.

In addition, in the coil unit for a three-phase linear motor, the connection part of a 1st coil and a pair of linear part are arrange | positioned along one plane, and each connection part of a 2nd and 3rd coil has the connection part of a 1st coil mutually mutually. It may be characterized by being bent relative to the straight portion so as to fit in the. Even with such a configuration, it is possible to appropriately arrange the above-described linear portion of each coil. In this case, the second and third coils may further have the same shape. Thereby, the kind of components can be reduced and reliability and productivity can be improved.

In addition, the three-phase linear motor according to the present invention is characterized by comprising one or a plurality of coil units for the three-phase linear motor described above. According to such a three-phase linear motor, the coil density (coil spot ratio) in a thrust effective part can be raised, and driving efficiency can be improved.

According to the coil unit for three-phase linear motor and the three-phase linear motor which concerns on this invention, the coil density (coil spot ratio) in a thrust effective part can be raised, and driving efficiency can be improved.

Hereinafter, embodiments of the three-phase linear motor coil unit and the three-phase linear motor according to the present invention will be described in detail with reference to the accompanying drawings. In addition, in description of drawing, the same code | symbol is attached | subjected to the same element, and the overlapping description is abbreviate | omitted.

(First embodiment)

FIG. 1 is a perspective view showing a three-phase linear motor 1 according to the first embodiment of the present invention, and FIG. 2 is a cross sectional view of the mover 2 shown in FIG. As shown in FIG. 1, the three-phase linear motor 1 moves while guiding the mover 2 to accommodate the coils 4 to 6 (see FIG. 2) and the mover 2 in the advancing direction thereof. The magnet unit 8 is provided, and is used as a drive part of an XY stage, for example. 1, the advancing direction of the movable element 2 is called Y-axis direction, the horizontal direction orthogonal to it is called the X-axis direction, and the vertical direction orthogonal to the X-axis direction and the Y-axis direction is referred to as Z-axis. It is called a direction. The Z-axis direction corresponds to the first direction in the claims, and the Y-axis direction corresponds to the second direction in the claims.

The mover 2 is a coil unit for a three-phase linear motor (hereinafter, referred to as a coil 4 (first coil), a coil 5 (second coil), and a coil 6 (third coil). One or more units), the entire surface of the coil unit is covered with a mold material 9, and the holder 10 is attached to cover the upper end of the coating. As shown in FIG. 2, the cross section of the movable element 2 includes a main body portion 2a extending in the Z-axis direction, a wide upper end portion 2b, and a lower end portion 2c. The branch has a substantially I-shape, and this cross-sectional shape extends in the Y-axis direction. The mover 2 generates an electromagnetic force by energizing the coils 4 to 6 and moves along the Y axis direction. In addition, the detailed structure of the coil unit which consists of coils 4-6 is mentioned later.

As shown in FIG. 1, the magnet unit 8 has the structure which combined the base yoke 8a as the bottom part, and the pair of side yokes 8b which oppose each other as both sides. N-pole magnets 81 and S-pole magnets 82 are alternately arranged on the inner wall of the side yoke 8b along the Y-axis direction.

These magnets 81 and 82 are disposed to face the two side surfaces 2d of the main body portion 2a of the mover 2 with a predetermined gap therebetween. Moreover, the base yoke 8a is arrange | positioned facing the lower end part 2c of the mover 2 at predetermined intervals. Then, the movable element 2 generates an electromagnetic force by energizing between the magnets 81 and 82 to move in the Y-axis direction with respect to the magnet unit 8.

Here, the structure of the coil unit which consists of coils 4-6 is demonstrated in detail. FIG. 3: is a front view which looked at the coil unit 7 which consists of coils 4-6 from the X-axis direction, and FIG. 3: is sectional drawing along the IIIb-IIIb line of the coil unit 7 shown in FIG. 3: is sectional drawing along the IIIc-IIIc line of the coil unit 7 shown in FIG. 4B is an exploded perspective view of the coil unit 7, FIG. 4B is a perspective view of the coil unit 7, and FIG. 4B is a top view corresponding to the exploded perspective view shown in FIG. The movable element 2 is provided with one or more coil units 7 as shown to FIG. 3 and FIG. 4, and when the movable element 2 is equipped with two or more coil units 7, these multiple The coil unit 7 is provided in the Y axis direction.

The coil unit 7 according to the present embodiment is constituted by three coils 4, 5, 6 as described above. The coils 4 to 6 are formed by winding a conductive wire in a substantially rectangular shape, and the ring sizes of the coils 4 to 6 are substantially the same. Here, the coils 4 to 6 correspond to the U phase, the V phase, and the W phase in the three-phase linear motor 1, respectively.

The coil 4 includes a pair of straight portions 4a and 4b and a pair of connecting portions 4c and 4d that connect both ends of the pair of straight portions 4a and 4b. Similarly, the coil 5 includes a pair of straight portions 5a and 5b and a pair of connecting portions 5c and 5d, and the coil 6 is paired with a pair of straight portions 6a and 6b. The connecting portions 6c and 6d are included.

Each linear part 4a, 4b, 5a, 5b, 6a, 6b is provided in the Z-axis direction shown in FIG. 1 in the longitudinal direction, and is arrange | positioned in the Y-axis direction. Specifically, as shown in FIGS. 3B, 3B, and 4B, one straight portion 4a, 5a, 6a in the coils 4 to 6 are mutually in this order in the Y-axis direction. The other straight portions 4b, 5b and 6b in the coils 4 to 6 are arranged adjacent to each other in this order consecutively from the straight portions 6a in the Y-axis direction. . Here, each of the straight portions 4a, 4b, 5a, 5b, 6a, and 6b has the same thickness in the X-axis direction, their center lines are parallel to each other, and the processing along the Y-axis direction. The straight line and all the centerlines are arranged to intersect. Therefore, one side in each straight portion 4a, 4b, 5a, 5b, 6a, 6b is included in one plane along the YZ plane, and the other side is included in the other plane along the YZ plane. It becomes.

The connection part 4c of the coil 4 connects the upper ends of the linear part 4a, 4b of this coil 4, and the connection part 4d of the coil 4 is the straight line of this coil 4 Lower ends of the portions 4a and 4b are connected to each other. The connecting portions 4c and 4d are bent in one direction in the X-axis direction with respect to the straight portions 4a and 4b. Moreover, the connection part 5c of the coil 5 connects the upper ends of the linear part 5a, 5b of this coil 5, and the connection part 5d of the coil 5 is this coil 5 Lower ends of the straight portions 5a and 5b are connected to each other. The connection parts 5c and 5d are not bent like the connection parts 4c and 4d, but are provided along the same plane as the straight parts 5a and 5b. Thereby, the coil 5 has shown the flat ring shape. The connection part 6c of the coil 6 connects the upper ends of the linear part 6a, 6b of this coil 6, and the connection part 6d of the coil 6 is the straight line of this coil 6 Lower ends of the sections 6a and 6b are connected to each other. The connection parts 6c and 6d are bend | folded with respect to the linear part 6a, 6b in the other direction of the X-axis direction (namely, the direction opposite to the connection parts 4c and 4d). The coils 4 and 6 having these shapes are combined with each other from both sides of the coil 5, so that the connecting portions 4c and 6c of the coils 4 and 6 connect the connecting portions 5c of the coil 5 to each other. The fitting portions 4d and 6d are sandwiched between the connecting portions 5d and 6d. Here, it is preferable that the coil 4 and the coil 6 have the same shape mutually. Thereby, the kind of components can be reduced and reliability and productivity can be improved.

In the coil unit 7 according to the present embodiment, one independent coil unit 7 is configured by three coils 4 to 6, and as shown in Figs. The linear portions 4a, 5a, 6a, 4b, 5b, and 6b of ˜6 are combined with each other so as to be disposed adjacent to each other in order. Thereby, while making the ring size of each coil 4-6 constant, the generation | occurrence | production of the space | gap in the ring inside of the coils 4-6 can be prevented, and the thrust effective part of this coil unit 7 ( That is, the coil density (coil spot ratio) in the coil unit 7 facing the magnets 81 and 82 can be increased, and driving efficiency can be improved.

(2nd Example)

Next, a three-phase linear motor according to the second embodiment of the present invention will be described. However, since the configuration of the portion excluding the coil unit in the configuration of the three-phase linear motor of the present embodiment is the same as that of the first embodiment, the description thereof is omitted.

5 and 6 are views showing the configuration of the coil unit 17 included in the three-phase linear motor according to the present embodiment. FIG. 5: is a front view which looked at the coil unit 17 from the X-axis direction, FIG. 5: is sectional drawing along the Vb-Vb line of the coil unit 17 shown in FIG. 5, and FIG. It is sectional drawing along the Vc-Vc line of the coil unit 17 shown to 5 Hz. 6B is an exploded perspective view of the coil unit 17, FIG. 6B is a perspective view of the coil unit 17, and FIG. 6B is a top view corresponding to the exploded perspective view shown in FIG.

The coil unit 17 according to the present embodiment is composed of three coils, namely, a coil 14 (first coil), a coil 15 (second coil), and a coil 16 (third coil). have. The coils 14 to 16 are formed by winding a conductive wire in a substantially rectangular shape, and the ring sizes of the coils 14 to 16 are substantially the same. The coils 14 to 16 correspond to the U phase, V phase, and W phase in the three-phase linear motor 1, respectively.

The coil 14 includes a pair of straight portions 14a and 14b and a pair of connecting portions 14c and 14d that connect both ends of the pair of straight portions 14a and 14b. Similarly, the coil 15 includes a pair of straight portions 15a and 15b and a pair of connecting portions 15c and 15d, and the coil 16 includes a pair of straight portions 16a and 16b. A pair of connecting portions 16c and 16d are included.

Each of the straight portions 14a, 14b, 15a, 15b, 16a, and 16b is provided with the Z axis direction in the longitudinal direction, and arranged in the Y axis direction. Specifically, as shown in FIGS. 5B, 5B, and 6B, one straight portion 14a, 15a, 16a in the coils 14 to 16 is mutually in this order in the Y-axis direction. The other straight portions 14b, 15b, and 16b in the coils 14 to 16 are arranged adjacent to each other in this order successively from the straight portions 16a in the Y-axis direction. . Here, with respect to the appearance of the straight portions 14a, 14b, 15a, 15b, 16a, and 16b and their integral shapes, each of the straight portions 4a, 4b, 5a, 5b, 6a, and 6b of the first embodiment is described. Same as

The connecting portion 14c of the coil 14 connects the upper ends of the straight portions 14a and 14b of the coil 14, and the connecting portion 14d of the coil 14 is a straight line of the coil 14. Lower ends of the portions 14a and 14b are connected to each other. The connecting portions 14c and 14d are not bent like the connecting portions 15c, 15d, 16c, and 16d described later, and are provided along the same plane as the straight portions 14a and 14b. As a result, the coil 14 exhibited a flat ring shape. Moreover, the connection part 15c of the coil 15 connects the upper ends of the linear part 15a, 15b of this coil 15, and the connection part 15d of the coil 15 is this coil 15 Lower ends of the straight portions 15a and 15b are connected to each other. The connecting portions 15c and 15d are bent in one direction in the X-axis direction with respect to the straight portions 15a and 15b. The connection part 16c of the coil 16 connects the upper ends of the linear part 16a, 16b of this coil 16, and the connection part 16d of the coil 16 of the coil 16 Lower ends of the straight portions 16a and 16b are connected to each other. The connecting portions 16c and 16d are bent to the straight portions 16a and 16b in the other direction in the X-axis direction (that is, the direction opposite to the connecting portions 15c and 15d). The coils 15 and 16 having these shapes are combined with each other from both sides of the coil 14, so that the connecting portions 15c and 16c of the coils 15 and 16 connect the connecting portions 14c of the coil 14 to each other. It is sandwiched between, and each of the connecting portions 15d and 16d sandwiches the connecting portion 14d between each other. Here, it is preferable that the coil 15 and the coil 16 have the same shape mutually. Thereby, the kind of components can be reduced and reliability and productivity can be improved.

In the coil unit 17 according to the present embodiment, one independent coil unit 17 is constituted by three coils 14 to 16, similarly to the first embodiment described above, and FIGS. 5 and 6. As shown in Fig. 1, the straight portions 14a, 15a, 16a, 14b, 15b, and 16b of the coils 14 to 16 are combined with each other so as to be disposed adjacent to each other in order. Thereby, while making the ring size of each coil 14-16 constant, the generation | occurrence | production of the space | gap in the ring inside of the coils 14-16 can be prevented, and the thrust effective part of this coil unit 17 is prevented. Coil density (coil spot ratio) in a process can be made large, and driving efficiency can be improved.

(Third Embodiment)

Next, a three-phase linear motor according to the third embodiment of the present invention will be described. FIG. 7: is a perspective view which shows the structure of the three-phase linear motor 11 which concerns on a present Example. 7 is a side view of the mover 12 with which the three-phase linear motor 11 is equipped. However, in the configuration of the three-phase linear motor 11 of the present embodiment, the configuration of the portion excluding the mover 12 is the same as that of the first embodiment, and thus the illustration is omitted in FIG. .

The mover 12 of this embodiment is connected in multiple numbers in the Y-axis direction, and comprises the connected type mover 13. Each mover 12 includes only one unit of either the coil unit 7 shown in the first embodiment or the coil unit 17 shown in the second embodiment (see Fig. 7). The whole surface of the coil unit 7 (or 17) is covered with the mold material 19, and the holder 20 is attached so that the upper end of the coating | cover may be attached. Here, the cross sectional shape of the movable element 12 is the same as the cross sectional shape of the movable element 2 shown in the first embodiment. The connection type movable element 13 which consists of the some movable element 12 generate | occur | produces an electromagnetic force by the electricity supply to the coil unit 7 (17), and moves along a Y-axis direction. Here, the number of the connected movable elements 13 may be changed or may be one by the required thrust.

(Example 4)

Next, a three-phase linear motor according to the fourth embodiment of the present invention will be described. FIG. 8: is a perspective view which shows the structure of the three-phase linear motor 21 which concerns on a present Example. 8 is a side view of the movable body 22 which the three-phase linear motor 21 is equipped with. However, in the configuration of the three-phase linear motor 21 of the present embodiment, the configuration of the portion excluding the mover 22 is the same as that of the first embodiment, and thus the illustration is omitted in FIG. .

The mover 22 of the present embodiment includes a plurality of the coil units 7 shown in the first embodiment and one of the coil units 17 shown in the second embodiment (see Fig. 8B). The plurality of coil units 7 (17) are arranged side by side without a gap in the Y-axis direction, and the entire surface of the plurality of coil units 7 (or 17) is covered by the mold material 29, and the The mover 22 is comprised by attaching the holder 30 so that an upper end may be covered. Here, the cross sectional shape of the movable body 22 is the same as the cross sectional shape of the movable body 2 shown in 1st Example.

And the movable type | mold mover 23 is comprised by connecting the movable part 12 to each both ends of the movable part 22 in a Y-axis direction. Such a connection type movable member 23 generates an electromagnetic force by energizing the coil unit 7 (17) and moves along the Y axis direction.

The mover of the three-phase linear motor according to the present invention may be in the same form as in the third or fourth embodiment, and can appropriately exert the effects according to the first or second embodiment described above.

The three-phase linear motor coil unit and the three-phase linear motor according to the present invention are not limited to the above-described embodiments, but various modifications are possible. For example, in the first embodiment, the second coil (coil 5) is made into a flat shape and the second coil is sandwiched between the first coil (coil 4) and the third coil (coil 6). In the second embodiment, the first coil (coil 14) is a flat shape, and the first coil is formed by a second coil (coil 15) and a third coil (coil 16). Although the form sandwiched between was illustrated, in this invention, any one of the 1st-3rd coil may have a flat shape, or all the connection parts of a 1st-3rd coil may be bent. Moreover, although the said Example demonstrated the coil side as a mover, this invention is applicable also when the magnet side is a mover.

1 is a perspective view showing a three-phase linear motor according to the first embodiment of the present invention.

2 is a cross-sectional view of the mover according to the first embodiment.

3 is a front view of the coil unit viewed from the X-axis direction, 단면도 is a sectional view taken along line IIIb-IIIb of the coil unit shown in ⒜, ⒞ is IIIc of the coil unit shown in ⒜ It is sectional drawing along the Ⅲc line.

4 is an exploded perspective view of the coil unit, ⒜ is a perspective view of the coil unit, and ⒞ is a top view corresponding to the exploded perspective view shown in ⒜.

Fig. 5 relates to the second embodiment, in which V is a front view of the coil unit viewed from the X-axis direction, V is a cross-sectional view along the Vb-Vb line of the coil unit shown in V, and V is the Vc of the coil unit shown in V; It is sectional drawing along the VC line.

6 is a top view corresponding to an exploded perspective view of the coil unit, wherein 사시도 is a perspective view of the coil unit, and 분해 is an exploded perspective view shown in FIG.

FIG. 7 is a perspective view showing the configuration of the three-phase linear motor according to the third embodiment, and FIG. 7 is a side view of the mover provided by the three-phase linear motor.

Fig. 8B is a perspective view showing the configuration of the three-phase linear motor according to the fourth embodiment, and Fig. 8B is a side view of the mover included in the three-phase linear motor.

9 is a perspective view showing the shape and arrangement of a plurality of coils described in Patent Document 1. FIG.

* Description of the sign *

1: 3-phase linear motor

2: mover

2a: main body

2b: upper part

2c: lower part

2d: both sides

4 to 6 and 14 to 16 coils

4a-6a, 4b-6b, 14a-16a, 14b-16b: straight portion

4c-6c, 4d-6d, 14c-16c, 14d-16d: connection portion

7: Coil unit (for 3-phase linear motor)

8: magnet unit

8a: base yoke

8b: side yoke

9: mold material

10: holder

81, 82: Magnet

Claims (8)

A pair of straight portions arranged in a second direction intersecting the first direction with a first direction as the longitudinal direction, and a pair of connecting both ends of the pair of straight portions; A first coil, a second coil, and a third coil, each of which comprises a connecting portion; One straight portion of the pair of straight portions of each of the first, second, and third coils is arranged adjacent to each other in the order of the first, second, and third coils in the second direction. The other straight portion of the pair of straight portions of each of the first, second, and third coils is formed of the first, second, and third coils in the second direction continuously from the one straight portion of the third coil. A coil unit for a three-phase linear motor, characterized by being arranged adjacent to each other in sequence. The method according to claim 1, The connecting portion of the second coil and the pair of straight portions are arranged along one plane, Coil units for three-phase linear motors, wherein the connecting portions of the first and third coils are bent relative to the straight portions so as to sandwich the connecting portions of the second coil between each other. The method according to claim 2, The coil unit for a three-phase linear motor, characterized in that the first and the third coil have the same shape. The method according to claim 1, The connecting portion of the first coil and the pair of straight portions are disposed along one plane, Coil units for three-phase linear motors, wherein the connecting portions of the second and third coils are bent to the straight portions so as to sandwich the connecting portions of the first coil between each other. The method according to claim 4, The coil unit for a three-phase linear motor, characterized in that the second and third coils have the same shape. The three-phase linear motor provided with the coil unit for three phase linear motors of any one of Claims 1-5. The method according to any one of claims 1 to 5, The coil unit for three-phase linear motors is formed as a mover by arranging one or more coil units for the three-phase linear motors in the second direction. The method according to claim 6, The three-phase linear motor coil unit is formed as a mover by arranging one or more in the second direction.

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