JP6765864B2 - Linear motor and linear slider - Google Patents

Description

Embodiments of the present invention relate to linear motors and linear sliders.

A coreless linear motor is a motor having a magnetic circuit structure. The coreless linear motor has a structure effective when magnets or coils are arranged side by side in a direction orthogonal to the moving direction of the mover. In this type of linear motor, when a large thrust is required, for example, a device for increasing the coil amount is taken. However, since there is a limit to the increase in the amount of coil, it is difficult to meet the demand for further improvement in thrust.

Japanese Unexamined Patent Publication No. 2016-025812

An object to be solved by the present invention is to provide a linear motor and a linear slider that can contribute to the improvement of thrust.

The linear motor of the embodiment includes a stator and a mover, a first plate-shaped member, a second plate-shaped member, and a base member. The first plate-shaped member is erected from one first member of the stator and the mover toward the second member of the other, and is arranged side by side in the thickness direction. The second plate-shaped member is erected from the second member toward the first member, and is arranged side by side in the thickness direction with each of the plurality of first plate-shaped members interposed therebetween. A magnet or coil is supported on the surface facing the plate-shaped member. The plurality of second plate-shaped members include an end plate-shaped member and an intermediate plate-shaped member. The end plate-like member is arranged at the end in the thickness direction. The intermediate plate-shaped member is arranged other than the end portion in the thickness direction. A plurality of the intermediate plate-shaped members are provided. The base member connects the plurality of intermediate plate-shaped members, the end plate-shaped member, and the intermediate plate-shaped member. The base member is made of austenitic stainless steel, copper, aluminum or resin. The base member has a shape that is symmetrical (line symmetric) with respect to the center line in the width direction in a plan view. A plurality of the base members are provided. The thickness of the intermediate plate-shaped member is less than twice the thickness of the end plate-shaped member.

The perspective view of the linear motor of one Embodiment. An exploded perspective view of the linear motor of one embodiment. A plan sectional view of the connection between the yoke of the stator and the base. Perspective view of the mover. FIG. 3 is a perspective view of a linear slider including the linear motor of one embodiment. (A) is a perspective view of a linear motor having one stator, and (B) is a perspective view of three linear motors having one stator arranged side by side.

Hereinafter, the linear motor of the embodiment will be described with reference to the drawings.
Members common to each embodiment may be given a common number and the description thereof may be omitted. Further, the X direction shown in FIG. 1 is also referred to as a width direction, the Y direction is also referred to as a depth direction, and the Z direction is also referred to as a height direction. Further, one side (the side looking at the arrow) in the X direction is also referred to as "right side", and the other side is also referred to as "left side". One side in the Y direction (the side looking at the arrow) is also called the "back side", and the other side is also called the "front side". One side in the Z direction (the side looking at the arrow) is also called "upper side", and the other side is also called "lower side".

FIG. 1 is a perspective view of the linear motor of one embodiment, and FIG. 2 is an exploded perspective view of the linear motor of one embodiment. As shown in FIGS. 1 and 2, the linear motor 10 includes a stator (second member) 20 and a mover (first member) 30. The linear motor 10 is a so-called coreless motor in which the mover 30 is not provided with an iron core.

The stator 20 includes four yokes 21 (second plate-shaped member) and three bases (base member) 22. Hereinafter, with respect to the four yokes 21, the first yoke 21A (end plate-shaped member), the second yoke 21B (intermediate plate-shaped member), and the third yoke 21C (intermediate) are arranged in order from one side in the width direction (thickness direction). (Plate-shaped member), 4th yoke 21D (end plate-shaped member). Similarly, the three bases 22 may be referred to as a first base 22A, a second base 22B, and a third base 22C in order from one side in the width direction.

The yoke 21 has a plate shape. The yoke 21 is provided so as to extend in the height direction and the depth direction. The yoke 21 is erected from the stator 20 toward the mover 30. Of the four yokes 21, adjacent yokes 21 are all arranged with substantially the same width.
The yoke 21 is made of steel. The yoke 21 may be made of stainless steel other than steel or another magnetic material.

The first yoke 21A to the fourth yoke 21D are arranged side by side in the width direction. The first yoke 21A and the fourth yoke 21D are arranged at the end in the width direction. The second yoke 21B and the third yoke 21C are arranged between the first yoke 21A and the fourth yoke 21D. The position between the first yoke 21A and the fourth yoke 21D is a position other than the end portion in the width direction.
The thicknesses of the first yoke 21A to the fourth yoke 21D are the same as each other. Therefore, the thickness of the second yoke 21B is thinner than twice the thickness of the first yoke 21A and the thickness of the fourth yoke 21D. Similarly, the thickness of the third yoke 21C is less than twice the thickness of the first yoke 21A and the thickness of the fourth yoke 21D.

The base 22 is arranged between the lower ends of the adjacent yokes 21 in the height direction. The four yokes 21 are connected by three bases 22. The base 22 has an elongated plate shape. The base 22 is provided so as to extend in the width direction and the depth direction.
The base 22 is made of, for example, austenitic stainless steel. The base 22 may be made of a metal other than stainless steel, such as copper or aluminum. Further, it may be formed of a material other than metal, for example, resin.

A plurality of permanent magnets 23 are supported on one surface of the yoke 21 (the surface of the mover 30 facing the storage portion 31B (see FIG. 4)). The plurality of permanent magnets 23 are arranged side by side in the depth direction. The adjacent permanent magnets 23 have opposite magnetic poles. For example, when the magnetic pole of the permanent magnet 23 provided at the tip of the yoke 21 is the north pole, the magnetic pole of the permanent magnet 23 next to it is the south pole.
A plurality of permanent magnets 23 are supported on both the left side (one side) and the right side (back surface behind one side) of the yoke 21. For example, a plurality of permanent magnets 23 are supported on the right surface of the first yoke 21A and the left surface of the second yoke 21B, respectively. Similarly, a plurality of permanent magnets 23 are supported on the right surface of the second yoke 21B and the left surface of the third yoke 21C. Further, the magnetic poles of the permanent magnets 23 that are symmetrical with respect to the yoke 21 are considered to be opposite magnetic poles.
Of the adjacent yokes 21, the magnetic poles of the facing permanent magnets 23 supported on the left surface of one yoke 21 and the right surface of the other yoke 21 are opposite magnetic poles. For example, the permanent magnet 23 supported on the right surface of the first yoke 21A faces the permanent magnet 23 supported on the left surface of the second yoke 21B. Of these, the magnetic poles of the permanent magnets 23 supported on the right side of the first yoke 21A are opposite to the magnetic poles of the permanent magnets 23 supported on the left side of the second yokes 21B facing each other.

Bolt fastening portions (fastening portions) 24 are provided at the lower ends of the yoke 21 and the base 22. As shown in FIG. 3, the bolt fastening portion 24 includes a first fastening hole (first fastening portion) 24A, a second fastening hole (second fastening portion) 24B, and a third fastening hole 24C. The first fastening hole 24A and the second fastening hole 24B are formed in the yoke 21. The third fastening hole 24C is formed in the base 22.
In the yoke 21, the first fastening hole 24A and the second fastening hole 24B are arranged at equal intervals along the depth direction. The first fastening hole 24A and the second fastening hole 24B are arranged alternately. In the base 22, the third fastening holes 24C are arranged at equal intervals along the depth direction. The yoke 21 includes three first fastening holes 24A and three second fastening holes 24B. The base 22 includes six third fastening holes 24C.

The distance between the shafts of the adjacent first fastening hole 24A and the second fastening hole 24B in the yoke 21 is the same as the distance between the shafts of the adjacent third fastening hole 24C in the base 22.
The distance A from the first fastening hole 24A located closest to the tip of the yoke 21 to the tip of the yoke 21 is defined as the distance A. The distance from the second fastening hole 24B located closest to the rear end of the yoke 21 to the rear end of the yoke 21 is defined as the distance B. At this time, the distance A and the distance B are the same.
Let the distance C be the distance from the third fastening hole 24C arranged at the position closest to the tip of the base 22 to the tip of the base 22. Let the distance D be the distance from the third fastening hole 24C arranged at the position closest to the rear end of the base 22 to the rear end of the base 22. At this time, the distance C and the distance D are the same.

Both the yoke 21 and the base 22 have a shape (hereinafter referred to as "symmetrical shape") that is symmetrical (line symmetric) with respect to the center line in the width direction in a plan view. Therefore, the yoke 21 and the base 22 can be fastened by tightening the first fastening holes 24A to the third fastening holes 24C with bolts (fastening members) 25 even if the positions of the front end portion and the rear end portion are exchanged. ..
In the example shown in FIG. 3, in the first yoke 21A, the first fastening hole 24A is arranged at a position close to the tip end portion. In the second yoke 21B, the second fastening hole 24B is arranged at a position close to the tip end portion. In the first yoke 21A and the second yoke 21B, the first fastening hole 24A and the second fastening hole 24B are arranged in a staggered manner. Similarly, in the first yoke 21A to the fourth yoke 21D, the first fastening hole 24A and the second fastening hole 24B are arranged in a staggered manner between the adjacent yokes 21.

Bolts 25 are arranged in the first fastening hole 24A, the second fastening hole 24B, and the third fastening hole 24C. The first fastening hole 24A includes a small diameter hole 24A1 having a diameter substantially the same as the diameter of the threaded portion of the bolt 25, and a large diameter hole 24A2 having a diameter larger than the diameter of the head of the bolt. The large diameter holes 24A2 are provided on both the left and right sides of the yoke 21. Therefore, the bolt 25 can be screwed into the first fastening hole 24A from either the left or right side in the width direction.
The small diameter hole 24A1 is provided by connecting two large diameter holes 24A2. The first fastening hole 24A penetrates the yoke 21 in the width direction. The small diameter hole 24A1 is provided with a thread groove into which the threaded portion of the bolt 25 is screwed.
The second fastening hole 24B has substantially the same diameter as the diameter of the threaded portion of the bolt. The second fastening hole 24B has a threaded groove into which the threaded portion of the bolt 25 is screwed. Therefore, the bolt 25 can be tightened to the second fastening hole 24B. The second fastening hole 24B penetrates the yoke 21. Therefore, the yoke 21 and the base 22 can be fastened by bolts 25 screwed from either the left or right side of the second fastening hole 24B.
The third fastening hole 24C in the base 22 is a through hole and is not threaded. Therefore, the threaded portion of the bolt 25 penetrates the third fastening hole 24C. Further, the third fastening hole 24C may be provided with a thread groove into which the threaded portion of the bolt 25 is screwed. In this case, the threaded portion of the bolt 25 is screwed into the threaded portion of the bolt 25 penetrating the base 22.

A bolt 25 is screwed into the first fastening hole 24A of the first yoke 21A. The threaded portion of the bolt 25 penetrates the third fastening hole 24C of the first base 22A and is screwed into the second fastening hole 24B of the second yoke 21B. Bolts 25 are screwed into the three first fastening holes 24A in the first yoke 21A. The first yoke 21A, the first base 22A, and the second yoke 21B are tightened by three bolts.

Similarly, the first fastening hole 24A of the second yoke 21B, the third fastening hole 24C of the second base 22B, and the second fastening hole 24B of the third yoke 21C are tightened by the bolt 25. The first fastening hole 24A of the third yoke 21C, the third fastening hole 24C of the third base 22C, and the second fastening hole 24B of the fourth yoke 21D are tightened by the bolt 25.

The mover 30 is arranged between two adjacent yokes 21. The mover 30 is arranged in each of the three grooves formed by the four yokes 21. The linear motor 10 includes three movers 30. FIG. 4 is a perspective view of the mover 30. As shown in FIG. 4, the mover 30 includes a case 31, a coil 32, and a connecting portion 33.

The case 31 is made of a non-magnetic material such as resin. The case 31 includes a case upper portion 31A and a storage portion (first plate-shaped member) 31B. The case 31 has a substantially T-shape when viewed from the front. The upper part 31A of the case is solid. The storage portion 31B is hollow. The case upper portion 31A may be hollow.
The upper portion 31A of the case is a plate material extending in the width direction. The width of the case upper portion 31A is wider than the width between the inner sides of the adjacent yokes 21. The width of the case upper portion 31A is narrower than the width between the outer side sides of the adjacent yokes 21. The length of the case upper portion 31A in the depth direction is shorter than the length of the yoke 21 in the depth direction.

The storage portion 31B is arranged between the adjacent yokes 21. The storage portion 31B is a plate material extending in the height direction. The storage portion 31B is erected from the mover 30 toward the stator 20. The storage portion 31B is connected to the lower surface of the case upper portion 31A. The width of the storage portion 31B is narrower than the width between the inner sides of the adjacent yokes 21. The storage portion 31B is narrower than the width between the permanent magnets 23 attached to the inner side surfaces of the adjacent yokes 21. The length of the storage portion 31B in the depth direction is the same as the length of the case upper portion 31A in the depth direction.

The coil 32 is arranged in the hollow space of the storage portion 31B. The coil 32 is a coreless coil without an iron core. Three coils 32 are stored in the hollow space of the storage portion 31B. The three coils 32 are arranged side by side along the depth direction. Therefore, the coil 32 is arranged at a position sandwiched between the permanent magnets 23 when viewed in the width direction. Further, the three coils 32 adjacent to each other in the depth direction are arranged at positions sandwiched between the three permanent magnets 23.

The connecting portion 33 is made of metal, for example. The connecting portion 33 may be made of another material such as resin. The outer shape of the connecting portion 33 is substantially the same as the outer shape of the case upper portion 31A of the case 31. The connecting portion 33 is joined to the case upper portion 31A of the case 31 by a bolt or the like (not shown). The connecting portion 33 moves as the case 31 moves.

An electric circuit (not shown) is connected to the coil 32, and the electric circuit supplies the coil 32 with a three-phase alternating current. A magnetic force is generated in the coil 32 to which electric power is supplied to form a magnetic circuit. The mover 30 provided with the coil 32 moves by the magnetic circuit generated by the magnetic force generated in the coil 32 and the magnetic force of the permanent magnet 23 supported by the yoke 21 of the stator 20. The permanent magnets 23 supported by the yoke 21 of the stator 20 are arranged side by side in the depth direction with the storage portion 31B for accommodating the coil 32 interposed therebetween. Therefore, the mover 30 moves in the depth direction.
Further, when reversing the forward and reverse direction of the current supplied to the coil 32, also reverses the force acting on the movable element 30. Therefore, by changing the direction of the current supplied to the coil 32, the mover 30 reciprocates along the depth direction.

The first yoke 21A to the fourth yoke 21D are arranged in the width direction. Further, the mover 30 moves in the depth direction. In this way, the first yoke 21A to the fourth yoke 21D are arranged in a direction orthogonal to the moving direction of the mover 30.

FIG. 5 is a perspective view of a linear slider including the linear motor of one embodiment. As shown in FIG. 5, the linear slider 4 includes the linear motor 10 shown in FIGS. 1 and 2 and the slider 40. The slider 40 is arranged above the linear motor 10. The slider 40 includes a slider base 41, a rail 42, and a slider member (connecting member) 43.
The slider base 41 has a substantially U-shape with an opening at the top. A linear motor 10 is housed inside the slider base 41.
The rails 42 are provided on the upper surfaces of both wall portions of the slider base 41, respectively. The rail 42 extends along the depth direction. The rail 42 extends in the depth direction of the first yoke 21A and the fourth yoke 21D and substantially the entire length.

The slider member 43 includes a flat surface portion 43A, a vertical portion 43B, and a traveling portion 43C. The slider member 43 is made of metal, for example. The slider member 43 may be made of another material such as resin.
The flat surface portion 43A has a plate shape. The flat surface portion 43A is joined to the connecting portions 33 of the three movers 30 by bolts or the like (not shown). The flat surface portion 43A connects three movers 30. The slider member 43 moves integrally with the three movers 30.

The vertical portion 43B is provided on each of the left and right end sides of the flat surface portion 43A in the width direction. The vertical portion 43B extends downward from the left and right ends of the flat surface portion 43A. The length of the vertical portion 43B in the height direction is shorter than the length of the connecting portion 33 in the mover 30 in the height direction.

The traveling portion 43C is attached to the front end portion and the rear end portion on the bottom surfaces of both the left and right vertical portions 43B, respectively. The traveling portion 43C has a sliding structure and meshes with the rail 42. The slide structure is a structure that can move along the longitudinal direction of the rail 42. The traveling portion 43C can move along the longitudinal direction of the rail 42.

A current is supplied to the coils 32 provided in the three movers 30 in the direction in which each mover 30 moves in the same direction. Therefore, the three movers 30 always move in the same direction. The slider member 43 moves on the rail 42 as the three movers 30 move. Therefore, the slider member 43 can be reciprocated along the depth direction.

The linear motor 10 includes three movers 30, and the coils 32 of these movers 30 are arranged so as to be sandwiched between yokes 21. A plurality of permanent magnets 23 are arranged on both side surfaces of the yoke 21. Therefore, a magnetic circuit is formed for each of the coils 32 in the three movers 30, and thrust is applied to each of the three movers 30. The slider member 43 of the slider 40 is joined to these three movers 30. Therefore, it is possible to contribute to improvement of the thrust of the slider member 43 of the slider 40.

By the way, as shown in FIG. 6A, it is assumed that a linear motor 10A is provided with a mover (not shown) on two yokes 21. In this linear motor 10A, when the thrust is small and the thrust is to be increased, it is conceivable to arrange the linear motors 10A in parallel as shown in FIG. 6 (B). By arranging three linear motors 10A side by side, a large thrust can be obtained.

However, when three linear motors 10A are arranged side by side, the yokes 21 that support the permanent magnets 23 are arranged so that the adjacent surfaces on the left and right sides are aligned. For this reason, since two yokes are arranged side by side in addition to the yokes 21 arranged at both ends, the area for providing the yokes 21 must be widened, which requires a large space. Further, two yokes 21 are required for one mover.

In this respect, in the above linear motor 10, permanent magnets 23 are provided on both the left and right sides of the yoke 21. The width of the inner second yoke 21B and the third yoke 21C is the same as the width of the outer first yoke 21A and the fourth yoke 21D, and is more than twice the width of the first yoke 21A and the fourth yoke 21D. Is also thin. Therefore, since it is not necessary to arrange the two yokes side by side, it is not necessary to widen the area for providing the yokes 21. Therefore, it can contribute to space saving. Further, the three movers 30 are provided so as to be sandwiched between the four yokes 21 of the first yoke 21A to the fourth yoke 21D. Therefore, since only four yokes 21 are required for the three movers 30, it is possible to contribute to the reduction of the number of parts.

Further, in the linear motor 10 described above, it is not necessary to arrange the two yokes 21 in close proximity to each other. Therefore, since no gap is generated between the yokes 21, it is possible to further contribute to space saving. Moreover, since the number of yokes 21 arranged side by side can be reduced, the decrease in accuracy at the time of positioning can be reduced, and the number of steps at the time of assembling the linear motor 10 can be reduced.

Further, in the example of juxtaposed three linear motors 10A shown in FIG. 6 (B), it is necessary to perform positioning with respect to each of the linear motors 10A yoke 21. Therefore, in the example of arranging three linear motors 10A side by side, positioning at at least three places is required.
In this respect, in the above linear motor 10, four yokes 21 are connected by three bases 22. Therefore, the entire four yokes 21 can be positioned only by positioning one yoke 21. Therefore, it is possible to reduce the time and effort required for positioning.

Further, in the above linear motor 10, the yoke 21 and the base 22 are fastened by bolts 25. Therefore, positioning when assembling the yoke 21 and the base 22 can be easily performed. Further, the yoke 21 and the base 22 both have a symmetrical shape. Therefore, the linear motor 10 can be assembled without increasing the types of the yoke 21 and the base 22.
Further, in the above linear motor 10, the mover 30 has a coil 32 and the stator 20 has a permanent magnet 23. Therefore, the mover 30 is equipped with a coil 32 having a relatively small weight instead of a permanent magnet 23 having a relatively large weight. Accordingly, the mover 30 can be lightweight.
Further, although the linear motor 10 is provided with four yokes 21, five or more yokes 21 may be provided to form a linear motor having a large thrust. Even in this case, the yoke 21 and the base 22 may be sequentially connected to the sides of the first yoke 21A or the fourth yoke 21D. Therefore, it is possible to provide a linear motor having a large thrust without increasing the types of members.

Further, in the above linear motor 10, in addition to the first yoke 21A and the fourth yoke 21D arranged on the outside, the permanent magnet 23 is provided on the second yoke 21B and the third yoke 21C arranged between them. Therefore, thrust can be applied to each of the three movers 30 arranged between the first yoke 21A and the fourth yoke 21D, which can contribute to the improvement of the thrust.

Further, if the second yoke 21B and the third yoke 21C in which the permanent magnet 23 is provided only on one side are erected, the permanent magnet 23 is provided in the second yoke 21B and the third yoke 21C. There will be an unfinished surface. On the surface where the permanent magnet 23 is not provided, a magnetic circuit cannot be formed, and thrust cannot be applied to the mover 30. When the second yoke 21B and the third yoke 21C in which the permanent magnet 23 is provided on only one side are erected, when thrust is applied to the mover 30, the second yoke 21B and the third yoke 21C are 2 respectively. You have to line up the yokes.
In this regard, in the above linear motor 10, permanent magnets 23 are supported on the left and right surfaces of the second yoke 21B and the third yoke 21C, respectively. Therefore, thrust can be applied to the mover 30 without arranging two yokes as the second yoke 21B and the third yoke 21C, respectively. Therefore, the linear motor 10 can contribute to space saving.

Further, in the above linear motor 10, first base 22A to third base 22C for connecting the first yoke 21A to the fourth yoke 21D are provided. Therefore, the first yoke 21A to the fourth yoke 21D can be connected in a stable state. Further, the distance between each of the first yoke 21A to the fourth yoke 21D can be easily made constant.
Further, in the above linear motor 10, a bolt fastening portion 24 for fastening adjacent yokes 21 among the first yoke 21A to the fourth yoke 21D via a base 22 is provided. Therefore, the adjacent yokes 21 can be easily connected to each other.
Further, in the above linear motor 10, a slider member 43 for connecting three movers 30 is provided. Therefore, the mover 30 can be easily interlocked and moved.

In the above linear motor 10, the coil 32 is provided on the mover 30, and the permanent magnet 23 is provided on the stator 20. On the other hand, the mover may be provided with a permanent magnet and the stator may be provided with a coil. Further, in the linear motor 10 described above, a permanent magnet 23 is provided with the coil 32 interposed therebetween. On the other hand, a coil may be provided with a permanent magnet sandwiched between them.
Further, in the linear motor 10 described above, the three movers 30 are connected by the slider member 43, but the three movers 30 may not be connected. In this case, the movement directions of the three movers 30 may not be the same, but may be moved in different directions.
Further, in the above linear motor 10, four yokes 21, three bases 22, and three movers 30 are provided, but these numbers may be other numbers as appropriate.

According to at least one embodiment described above, moving the slider with a plurality of stators can contribute to the improvement of thrust. Further, since the thickness of the intermediate plate-shaped member is thinner than twice the thickness of the end plate-shaped member, it is possible to contribute to space saving.

Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention as well as the invention described in the claims and the equivalent scope thereof.

4 ... Linear slider, 10 ... Linear motor, 10A ... Linear motor, 20 ... Stator (second member), 21 ... Yoke, 21A ... 1st yoke, 21B ... 2nd yoke, 21C ... 3rd yoke, 21D ... No. 4 yoke, 22 ... base (base member), 22A ... 1st base, 22B ... 2nd base, 22C ... 3rd base, 23 ... permanent magnet (magnet), 24 ... bolt fastening part (fastening part), 24A ... 1 fastening hole (first fastening portion), 24A1 ... small diameter hole, 24A2 ... large diameter hole, 24B ... second fastening hole (second fastening portion), 25 ... bolt (fastening member), 30 ... mover (first) Member), 31 ... Case, 31A ... Case upper part, 31B ... Storage part (first plate-shaped member), 32 ... Coil, 33 ... Connection part, 40 ... Slider, 41 ... Slider base, 42 ... Rail, 43 ... Slider member (Connecting member), 43A ... Flat part, 43B ... Vertical part, 43C ... Running part

Claims (6)

Stator and mover,
A plurality of first plate-shaped members erected from one first member of the stator and the mover toward the other second member and arranged side by side in the thickness direction.
It is erected from the second member toward the first member, is arranged side by side in the thickness direction with each of the plurality of first plate-shaped members sandwiched between them, and is a surface facing the plurality of first plate-shaped members. Provided with a plurality of second plate-like members, which support a magnet or a coil.
The plurality of second plate-shaped members include an end plate-shaped member arranged at an end portion in the thickness direction and an intermediate plate-shaped member arranged at an end portion other than the end portion in the thickness direction.
A plurality of the intermediate plate-shaped members are provided,
It is made of austenitic stainless steel, copper, aluminum, or resin that connects the plurality of intermediate plate-shaped members, the end plate-shaped member, and the intermediate plate-shaped member, and is symmetrical about the center line in the width direction in a plan view. Equipped with a base member shaped to be (line symmetric)
A plurality of the base members are provided,
The thickness of the intermediate plate-shaped member is thinner than twice the thickness of the end plate-shaped member.
Linear motor. The mover has the coil and
The stator has the magnet.
The linear motor according to claim 1. The linear motor according to claim 1 or 2, wherein the magnet or coil is supported on one surface of the intermediate plate-shaped member and the back surface behind the one surface. The linear motor according to any one of claims 1 to 3, wherein a fastening member for fastening the end plate-shaped member and the intermediate plate-shaped member is provided. The end plate-shaped member and the intermediate plate-shaped member are provided with a fastening portion on which the fastening member is arranged.
The fastening portion has a first fastening portion and a second fastening portion.
The linear motor according to claim 4, wherein the first fastening portion and the second fastening portion are provided alternately side by side on the intermediate plate-shaped member. The linear motor according to any one of claims 1 to 5.
A linear slider comprising a connecting member for connecting the plurality of first plate-shaped members.

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