200941900 六、發明說明： 【發明所屬之技術領域】 本發明，是有關於具有成爲三相線性馬達的驅動部的 複數線圈的三相線性馬達用線圈單元及三相線性馬達。 - 【先前技術】 . 習知的三相線性馬達，是將構成可動子（驅動部）的複 G 數線圈在可動子的移動方向呈一列地並列，藉由收容並固 定於保持體（殼）中而一體地被組裝，構成線圈單元（例如專 利文獻1參照）。第9圖，是揭示於專利文獻1的複數線 圈的形狀及配置的立體圖。如同圖所示，複數線圈1〇〇, 其直線部102即朝與可動子的移動方向垂直的方向延伸且 受到磁場發生推力的部分，是交互地組合使相鄰接的線圈 100的環的內部呈鎖狀地嵌合。 [專利文獻1]日本特開平1 0-52022號公報 〇 【發明內容】 (本發明所欲解決的課題） 但是，將複數線圏如專利文獻1記載的方式組合的情 況時，與位於線圈單元的兩端的線圏鄰接的線圏因爲只有 一個’所以在該線圈的環的內部中，只有相鄰接的—個線 圈的直線部被嵌入。因此，將複數線圈的環的大小作爲全 部同一的情況時，位於線圈單元的兩端的線圏的環的內部 因爲會產生空隙（圖中的A部分），所以可動子的推力有效 -5- 200941900 部中的線圈密度（線圈占積率）變小，可動子的驅動效率下 降。 本發明是有鑑於上述的問題點，其目的爲提供一種三 相線性馬達用線圈單元及三相線性馬達，可以提高推力有 效部中的線圈密度（線圈占積率），提高驅動效率。 (用以解決課題的手段） 爲了解決上述的課題，本發明的三相線性馬達用線圈 單元，其特徵爲，具備：各別包含將第1方向作爲各長度 方向且朝與該第1方向交叉的第2方向並列設置的一對的 直線部、及將該一對的直線部的兩端彼此連結的一對的連 結部之第1、第2及第3線圈；前述第1、第2及第3線 圈的各前述一對的直線部之中一方的直線部，是朝前述第 2方向依前述第1、第2及第3線圈的順序彼此鄰接地配 列，前述第1、第2及第3線圈的各前述一對的直線部之 中另一方的直線部，是從前述第3線圈的前述一方的直線 部連續地朝前述第2方向依前述第1、第2及第3線圈的 順序彼此鄰接地配列。 上述的三相線性馬達用線圈單元中，藉由3個線圈（ 第1、第2及第3線圈）構成一個獨立的線圈單元，各線圈 的直線部是以依順鄰接配置的方式彼此組合。由此，各線 圈的環的大小可一定，且可防止線圈的環的內側中的空隙 的發生，可以加大該三相線性馬達用線圈單元的推力有效 部中的線圈密度（線圈占積率），可以提高驅動效率。 200941900 且，三相線性馬達用線圈單元，是第2線圏的連結部 及一對的直線部是沿著一平面被配置，第1及第3線圈的 各連結部，是將第2線圈的連結部挾於彼此之間的方式對 於直線部彎曲地配設也可以。藉由這種構成，上述的各線 圈的直線部的配置可以最佳地實現。且，此情況，第1及 、 第3線圈是彼此具有同一形狀的話更佳。由此，可以削減 _ 零件的種類，提高信賴性及生産性。 〇 且，三相線性馬達用線圈單元，是第1線圈的連結部 及一對的直線部是沿著一平面被配置，第2及第3線圈的 各連結部，是將第1線圈的連結部挾於彼此之間的方式對 於直線部彎曲地配設也可以。藉由這種構成，上述的各線 圏的直線部的配置也可以最佳地實現。且，此情況，第2 及第3線圈是彼此具有同一形狀的話更佳。由此，可以削 減零件的種類，可以提高信賴性及生産性。 且，本發明的三相線性馬達，是具備一或是複數上述 © 任一的三相線性馬達用線圈單元。依據這種三相線性馬達 ’可以提高推力有效部中的線圈密度（線圈占積率），提高 驅動效率。 [發明的效果] 依據本發明的三相線性馬達用線圈單元及三相線性馬 達’可以提高推力有效部中的線圈密度（線圈占積率），提 高驅動效率。 200941900 【實施方式】 以下，一邊參照添付圖面一邊詳細說明本發明的三相 線性馬達用線圈單元及三相線性馬達的實施例。又，對於 圖面的說明中同一的要素附加同一的符號，省略重複的說 明。 (第1實施例） 第1圖，是顯示本發明的第1實施例的三相線性馬達 1的立體圖，第2圖，是如第1圖所示的可動子2的橫剖 面圖。如第1圖所示，三相線性馬達1，是具備：將線圈 4〜6(第2圖參照）收容的可動子2、及一邊將可動子2朝 其進行方向導引一邊移動用的磁鐵單元8，例如作爲XY 平台（載台）的驅動部等使用。又，對於第1圖，可動子2 的進行方向爲Y軸方向，與其垂直的水平方向爲X軸方 向，與X軸方向及Y軸方向垂直的垂直方向爲Z軸方向 。乙軸方向是相當於申請專利範圍中的第1方向，Y軸方 向是相當於申請專利範圍中的第2方向。 可動子2，是具備一或是複數由線圈4(第1線圈）、線 圈5(第2線圈）及線圈6(第3線圈）所構成的三相線性馬達 用線圈單元（以下稱線圈單元），藉由模具材9被覆此線圈 單元的全面，並藉由支架10覆蓋該被覆的上端部而形成 。此可動子2的橫剖面，是如第2圖所示，具有朝Z軸方 向延伸的本體部2a、及呈寬度廣的上端部2b及下端部2c ，且形成略I字狀的形狀，這種剖面形狀是在Y軸方向延 -8- 200941900 伸。且，可動子2 ’是藉由朝線圈4〜6的通電使發生電磁 力，並沿著γ軸方向移動。又’對於由線圈4〜6所構成 的線圏單元的詳細的構成是如後述。 如第1圖所示’磁鐵單元8’是藉由在底部設置基座 轭8a、在兩側部設置彼此相面對的一對的側轭8b組合而 、 成。在側輕8b的內壁中’ N極的磁鐵81及S極的磁鐵82 是沿著Y軸方向交互地並設。 φ 這些的磁鐵81、82’是對於可動子2的本體部2a的 兩側面2d隔有預定的間隙地相面對地配置。且’基座軛 8a，是對於可動子2的下端部2c隔有預定的間隙地相面 對地配置。且，可動子2，是在磁鐵81及82之間藉由通 電而發生電磁力，對於磁鐵單元8朝Y軸方向移動。 在此，詳細說明由線圈4〜6所構成的線圈單元的結 構。第3圖（a)，是將由線圏4〜6所構成的線圈單元7從 X軸方向所見的前視圖，第3圖（b)，是沿著如第3圖（a) 〇 所示的線圈單元7的Illb-IIIb線的剖面圖，第3圖（c)， 是沿著如第3圖（a)所示的線圈單元7的IIIc-IIIc線的剖 面圖。且，第4圖（a)是線圈單元7的分解立體圖，第4圖 (b)是線圈單元7的立體圖，第4圖（c)是對應如第4圖（a) 所示的分解立體圖的俯視圖。可動子2，是具備一或是複 數第3圖及第4圖所示的線圈單元7，可動子2是具備複 數線圈單元7的情況時，該複數線圈單元7是在γ軸方向 被並設。 本實施例的線圈單元7，是如前述藉由3個線圈4、5 -9 - 200941900 及6構成。線圈4〜6，是藉由將導電線略矩形狀捲繞而構 成，各線圈4〜6的環的大小幾乎成爲同一。又，線圈4〜 6，是各別對應三相線性馬達1中的U相、V相及W相。 線圈4，是包含：一對的直線部4a、4b、及將該一對 的直線部4a、4b的兩端彼此連結的一對的連結部4c、4d 。同樣地，線圈5是包含一對的直線部5a、5b及一對的 連結部5c、5d，線圈6是包含一對的直線部6a、6b及一 對的連結部6c、6d。 各直線部4a、4b、5a、5b、6a及6b，是將如第1圖 所示的Z軸方向作爲長度方向配設，在Y軸方向並列地設 置。具體而言，如第3圖（a)、第3圖（c)及第4圖（b)所示 ，線圈4〜6中的一方的直線部4a、5a及6a，是在Y軸方 向由此順序彼此鄰接地配列，線圏4〜6中的另一方的直 線部4b、5b及6b，是在Y軸方向從直線部6a連續地由 此順序彼此鄰接地配置。又，各直線部4a、4b、5a、5b、 6a及6b，是X軸方向中的厚度彼此同一，那些的中心線 是彼此平行，且與沿著Y軸方向的架空的直線及全部的中 心線交叉的方式被配置。因此，各直線部4a ; 4b、5a、5b 、6a及6b中的一方的側面是被包含於沿著YZ平面的一 個平面，另一方的側面是被包含於沿著成爲ΥΖ平面的別 的一個平面。 線圈4的連結部4c，是將該線圏4的直線部4a及4b 的上端彼此連結，線圈4的連結部4d，是將該線圈4的直 線部4a及4b的下端彼此連結。連結部4c及4d，是對於 -10- 200941900 直線部4a、4b朝X軸方向的一方的方向彎曲地配設。且 ，線圈5的連結部5c，是將該線圈5的直線部5a及5b的 上端彼此連結，線圈5的連結部5d’是將該線圈5的直線 部5a及5b的下端彼此連結。連結部5c及5d未如連結部 4c及4d地彎曲，而是沿著與直線部5a、5b相同的平面被 . 配設。由此，線圏5是呈扁平的環狀。線圈6的連結部6c _ ，是將該線圏6的直線部6a及6b的上端彼此連結’線圈 Q 6的連結部6d，是將該線圈6的直線部6a及6b的下端彼 此連結。連結部6c及6d，是對於直線部6a、6b朝X軸 方向的另一方的方向（即與連結部4c及4d反向）彎曲地配 設。具有這些的形狀的線圈4、6是藉由從線圈5的兩側 彼此組合，使線圈4、6的各連結部4c、6c成爲將線圈5 的連結部5c挾於彼此之間，且，各連結部4d、6d成爲將 連結部5d挾於彼此之間。又，線圈4及線圈6，是彼此具 有同一形狀較佳。由此，可以削減零件的種類，可以提高 〇 信賴性及生産性。 在本實施例的線圈單元7中，藉由3個線圈4〜6構 成一個獨立的線圈單元7，如第3圖及第4圖所示，各線 圏4〜6的直線部4a、5a、6a、4b、5b及6b是依順鄰接 地配置的方式彼此組合。由此，因爲各線圈4〜6的環的 大小一定，可防止線圈4〜6的環的內側中的空隙的發生 ，所以可以加大該線圈單元7的推力有效部（即對於線圈 單元7與磁鐵81、82相面對的部位）中的線圈密度（線圈占 積率），可以提高驅動效率。 -11 - 200941900 (第2實施例） 接著，說明本發明的第2實施例的三相線性馬達。又 ，本實施例的三相線性馬達的結構之中，有關除了線圈單 兀的部分的結構因爲是與第1實施例同樣，省略其說明。 第5圖及第6圖’是顯示具備本實施例的三相線性馬 達的線圈單元17的結構的圖。第5圖（a)，是將線圈單元 17從X軸方向所見的前視圖，第5圖（b)，是沿著如第5 圖（a)所示的線圈單元17的Vb-Vb線的剖面圖，第5圖（c) ，是沿著如第5圖（a)所示的線圈單元17的Vc-Vc線的剖 面圖。且’第6圖（a)是線圈單元的分解立體圖，第6 圖（b)是線圈單元17的立體圖，第6圖（c)是對應如第6圖 (a)所示的分解立體圖的俯視圖。 本實施例的線圈單元17，是藉由3個線圈即線圈14( 第1線圈）、線圈15(第2線圈）及線圈16(第3線圈）所構 成。線圈14〜16，是藉由將導電線略矩形狀捲繞而構成， 各線圈14〜16的環的大小幾乎成爲同一。線圈14〜16是 各別對應三相線性馬達1中的U相、V相及W相。 線圈14，是包含：一對的直線部14a、14b、及將該 一對的直線部14a、14b的兩端彼此連結的一對的連結部 14c、14d。同樣地，線圈15是包含一對的直線部15a、 15b及一對的連結部15c、15d，線圈16是包含一對的直 線部16a、16b及一對的連結部16c、16d。[Technical Field] The present invention relates to a three-phase linear motor coil unit and a three-phase linear motor having a plurality of coils serving as a drive unit of a three-phase linear motor. - [Prior Art] A conventional three-phase linear motor in which a complex G-number coil constituting a movable member (driving portion) is arranged in a row in the moving direction of the movable member, and is housed and fixed to the holding body (shell). It is integrally assembled to form a coil unit (for example, refer to Patent Document 1). Fig. 9 is a perspective view showing the shape and arrangement of the plurality of coils disclosed in Patent Document 1. As shown in the figure, the complex coil 1 is a portion in which the linear portion 102 extends in a direction perpendicular to the moving direction of the movable member and receives a thrust from the magnetic field, and the inside of the ring of the adjacent coil 100 is alternately combined. It is fitted in a lock shape. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Since the ends of the coils of the two ends are only one, so in the inside of the loop of the coil, only the straight portions of the adjacent coils are embedded. Therefore, when the sizes of the loops of the plurality of coils are all the same, the inside of the loops of the turns located at both ends of the coil unit is generated by the gap (part A in the figure), so the thrust of the mover is effective -5 - 200941900 The coil density (coil occupation ratio) in the portion is reduced, and the driving efficiency of the movable member is lowered. The present invention has been made in view of the above problems, and an object thereof is to provide a three-phase linear motor coil unit and a three-phase linear motor, which can improve the coil density (coil occupation ratio) in the thrust effective portion and improve the driving efficiency. In order to solve the above problems, the coil unit for a three-phase linear motor according to the present invention is characterized in that each of the coil units includes a first direction as a longitudinal direction and intersects the first direction. a pair of linear portions arranged in parallel in the second direction, and first, second and third coils of a pair of connecting portions connecting the two ends of the pair of straight portions; the first and second One of the straight portions of the pair of straight portions of the third coil is arranged adjacent to each other in the order of the first, second, and third coils in the second direction, and the first, second, and third The other straight portion of each of the pair of straight portions of the three coils is in the order of the first, second, and third coils continuously from the straight portion of the third coil toward the second direction. Arranged adjacent to each other. In the above-described three-phase linear motor coil unit, three coils (the first, second, and third coils) constitute one independent coil unit, and the straight portions of the coils are combined with each other so as to be adjacent to each other. Thereby, the size of the loop of each coil can be made constant, and the occurrence of the gap in the inner side of the loop of the coil can be prevented, and the coil density (coil occupation ratio) in the thrust effective portion of the coil unit for the three-phase linear motor can be increased. ), can improve the driving efficiency. In the coil unit for a three-phase linear motor, the connecting portion of the second coil and the pair of straight portions are arranged along a plane, and the respective connecting portions of the first and third coils are the second coil. The manner in which the connecting portions are placed between each other may be curved in a straight line portion. With such a configuration, the arrangement of the straight portions of the respective coils described above can be optimally realized. Further, in this case, it is more preferable that the first and third coils have the same shape. This makes it possible to reduce the types of _ parts and improve reliability and productivity. In the coil unit for a three-phase linear motor, the connection portion of the first coil and the pair of straight portions are arranged along one plane, and the connection portions of the second and third coils are connected to the first coil. The manner in which the parts are placed between each other may be curved in a straight line portion. With such a configuration, the arrangement of the straight portions of the respective turns can be optimally realized. Further, in this case, it is more preferable that the second and third coils have the same shape. This makes it possible to reduce the types of parts and improve reliability and productivity. Further, the three-phase linear motor of the present invention is a coil unit for a three-phase linear motor having one or a plurality of the above-mentioned ©. According to this three-phase linear motor', the coil density (coil occupation ratio) in the effective portion of the thrust can be increased, and the driving efficiency can be improved. [Effects of the Invention] According to the three-phase linear motor coil unit and the three-phase linear motor of the present invention, the coil density (coil occupation ratio) in the thrust effective portion can be improved, and the driving efficiency can be improved. [Embodiment] Hereinafter, an embodiment of a three-phase linear motor coil unit and a three-phase linear motor according to the present invention will be described in detail with reference to a drawing surface. In the description of the drawings, the same elements are denoted by the same reference numerals, and the description thereof will not be repeated. (First Embodiment) Fig. 1 is a perspective view showing a three-phase linear motor 1 according to a first embodiment of the present invention, and Fig. 2 is a transverse cross-sectional view of the movable member 2 as shown in Fig. 1. As shown in Fig. 1, the three-phase linear motor 1 includes a movable member 2 that accommodates the coils 4 to 6 (refer to FIG. 2), and a magnet that moves while guiding the movable member 2 in the direction. The unit 8 is used as, for example, a drive unit of an XY stage (stage). Further, in Fig. 1, the moving direction of the movable member 2 is the Y-axis direction, the horizontal direction perpendicular thereto is the X-axis direction, and the vertical direction perpendicular to the X-axis direction and the Y-axis direction is the Z-axis direction. The direction of the y-axis is equivalent to the first direction in the patent application range, and the y-axis direction is equivalent to the second direction in the patent application range. The movable member 2 is a three-phase linear motor coil unit (hereinafter referred to as a coil unit) including one or a plurality of coils 4 (first coil), coil 5 (second coil), and coil 6 (third coil) The entire surface of the coil unit is covered by the mold material 9, and the upper end portion of the cover is covered by the bracket 10. The cross section of the movable member 2 has a main body portion 2a extending in the Z-axis direction and an upper end portion 2b and a lower end portion 2c having a wide width as shown in Fig. 2, and has a substantially I-shaped shape. The cross-sectional shape is extended in the Y-axis direction -8-200941900. Further, the movable member 2' is electromagnetically generated by energization of the coils 4 to 6, and moves in the γ-axis direction. Further, the detailed configuration of the coil unit constituted by the coils 4 to 6 will be described later. As shown in Fig. 1, the magnet unit 8' is formed by combining a base yoke 8a at the bottom and a pair of side yokes 8b facing each other at both side portions. In the inner wall of the side light 8b, the 'N-pole magnet 81 and the S-pole magnet 82 are alternately arranged along the Y-axis direction. The magnets 81 and 82' of these φ are disposed to face each other with a predetermined gap therebetween on the both side faces 2d of the main body portion 2a of the movable member 2. Further, the base yoke 8a is disposed to face the lower end portion 2c of the movable member 2 with a predetermined gap therebetween. Further, the movable member 2 generates an electromagnetic force by the electric power between the magnets 81 and 82, and moves the magnet unit 8 in the Y-axis direction. Here, the structure of the coil unit constituted by the coils 4 to 6 will be described in detail. Fig. 3(a) is a front view of the coil unit 7 composed of the turns 4 to 6 as seen from the X-axis direction, and Fig. 3(b) is along the line as shown in Fig. 3(a). A cross-sectional view of the coil unit 7 taken along line Illb-IIIb, and Fig. 3(c) is a cross-sectional view taken along line IIIc-IIIc of the coil unit 7 shown in Fig. 3(a). 4(a) is an exploded perspective view of the coil unit 7, FIG. 4(b) is a perspective view of the coil unit 7, and FIG. 4(c) is an exploded perspective view corresponding to FIG. 4(a). Top view. The movable member 2 is provided with one or a plurality of coil units 7 shown in Figs. 3 and 4, and when the movable member 2 is provided with the plurality of coil units 7, the plurality of coil units 7 are arranged in the γ-axis direction. . The coil unit 7 of the present embodiment is constituted by three coils 4, 5 -9 - 200941900 and 6 as described above. The coils 4 to 6 are formed by winding the conductive wires in a substantially rectangular shape, and the loops of the respective coils 4 to 6 are almost the same size. Further, the coils 4 to 6 are the U phase, the V phase, and the W phase in the respective three-phase linear motors 1 . The coil 4 includes a pair of straight portions 4a and 4b and a pair of connecting portions 4c and 4d that connect the ends of the pair of straight portions 4a and 4b to each other. Similarly, the coil 5 includes a pair of straight portions 5a and 5b and a pair of connecting portions 5c and 5d. The coil 6 includes a pair of straight portions 6a and 6b and a pair of connecting portions 6c and 6d. The linear portions 4a, 4b, 5a, 5b, 6a, and 6b are arranged in the longitudinal direction as shown in Fig. 1, and are arranged in parallel in the Y-axis direction. Specifically, as shown in Fig. 3 (a), Fig. 3 (c), and Fig. 4 (b), one of the coils 4 to 6 is linearly 4a, 5a, and 6a in the Y-axis direction. This order is arranged adjacent to each other, and the other straight portions 4b, 5b, and 6b of the turns 4 to 6 are arranged adjacent to each other in this order from the straight portion 6a in the Y-axis direction. Further, each of the straight portions 4a, 4b, 5a, 5b, 6a, and 6b has the same thickness in the X-axis direction, and the center lines of those are parallel to each other and to the overhead straight line and the entire center along the Y-axis direction. The way the lines intersect is configured. Therefore, one of the straight portions 4a; 4b, 5a, 5b, 6a, and 6b is included in one plane along the YZ plane, and the other side is included in the other plane along the plane flat. The connecting portion 4c of the coil 4 connects the upper ends of the straight portions 4a and 4b of the coil 4 to each other, and the connecting portion 4d of the coil 4 connects the lower ends of the straight portions 4a and 4b of the coil 4 to each other. The connecting portions 4c and 4d are curved in one direction in the X-axis direction with respect to the -10 200941900 linear portions 4a and 4b. Further, the connecting portion 5c of the coil 5 connects the upper ends of the straight portions 5a and 5b of the coil 5 to each other, and the connecting portion 5d' of the coil 5 connects the lower ends of the straight portions 5a and 5b of the coil 5 to each other. The connecting portions 5c and 5d are not bent as the connecting portions 4c and 4d, but are disposed along the same plane as the straight portions 5a and 5b. Thereby, the turns 5 are in a flat annular shape. The connecting portion 6c__ of the coil 6 is a connecting portion 6d that connects the upper ends of the straight portions 6a and 6b of the coil 6 to the coil Q6, and the lower ends of the straight portions 6a and 6b of the coil 6 are connected to each other. The connecting portions 6c and 6d are curvedly disposed in the other direction (i.e., opposite to the connecting portions 4c and 4d) of the straight portions 6a and 6b in the X-axis direction. The coils 4 and 6 having these shapes are combined with each other from both sides of the coil 5, and the respective connecting portions 4c and 6c of the coils 4 and 6 are placed between the connecting portions 5c of the coil 5, and each of them The connecting portions 4d and 6d are placed between the connecting portions 5d. Further, it is preferable that the coil 4 and the coil 6 have the same shape. As a result, the number of parts can be reduced, and reliability and productivity can be improved. In the coil unit 7 of the present embodiment, three independent coil units 7 are formed by three coils 4 to 6, and as shown in Figs. 3 and 4, the straight portions 4a, 5a, and 6a of the respective turns 4 to 6 are formed. 4b, 5b, and 6b are combined with each other in a manner of being arranged adjacent to each other. Thereby, since the size of the loop of each of the coils 4 to 6 is constant, it is possible to prevent the occurrence of the gap in the inner side of the loop of the coils 4 to 6, so that the thrust effective portion of the coil unit 7 can be enlarged (that is, for the coil unit 7 and The coil density (coil occupation ratio) in the portion where the magnets 81 and 82 face each other can improve the driving efficiency. -11 - 200941900 (Second Embodiment) Next, a three-phase linear motor according to a second embodiment of the present invention will be described. In the configuration of the three-phase linear motor of the present embodiment, the configuration of the portion other than the coil unit is the same as that of the first embodiment, and the description thereof will be omitted. Figs. 5 and 6' are views showing the configuration of the coil unit 17 including the three-phase linear motor of the present embodiment. Fig. 5(a) is a front view of the coil unit 17 as seen from the X-axis direction, and Fig. 5(b) is a line along the Vb-Vb line of the coil unit 17 as shown in Fig. 5(a). The cross-sectional view, Fig. 5(c), is a cross-sectional view taken along line Vc-Vc of the coil unit 17 as shown in Fig. 5(a). And Fig. 6(a) is an exploded perspective view of the coil unit, Fig. 6(b) is a perspective view of the coil unit 17, and Fig. 6(c) is a plan view corresponding to the exploded perspective view shown in Fig. 6(a). . The coil unit 17 of the present embodiment is constituted by three coils, that is, a coil 14 (first coil), a coil 15 (second coil), and a coil 16 (third coil). The coils 14 to 16 are formed by winding a conductive wire in a substantially rectangular shape, and the loops of the coils 14 to 16 are almost the same size. The coils 14 to 16 are U-phase, V-phase, and W-phase in the respective three-phase linear motors 1. The coil 14 includes a pair of straight portions 14a and 14b and a pair of connecting portions 14c and 14d that connect the ends of the pair of straight portions 14a and 14b to each other. Similarly, the coil 15 is a pair of linear portions 15a and 15b and a pair of connecting portions 15c and 15d. The coil 16 includes a pair of straight portions 16a and 16b and a pair of connecting portions 16c and 16d.
各直線部 14a、14b、15a，15b、16a 及 16b，是將 Z -12- 200941900 軸方向作爲長度方向配設，在γ軸方向並列地被設置。具 體而言，如第5圖（a)、第5圖（c)及第6圖（b)所示，線圏 14〜16中的一方的直線部14a、15a及16a，是在Y軸方 向由此順序彼此鄰接地配列，線圈14〜16中的另一方的 直線部14b、15b及16b，是在Y軸方向從直線部16a連 - 續地由此順序彼此鄰接地配置。又，對於各直線部1 4a、 14b、15a、15b、16a及16b的外觀及這些的一體的形狀， 0 是與第1實施例的各直線部4a、4b、5a、5b、6a及6b同 樣。 線圈14的連結部14c，是將該線圈14的直線部14a 及14b的上端彼此連結，線圈14的連結部14d，是將該線 圈14的直線部14a及14b的下端彼此連結。連結部14c 及14d，是未如後述的連結部15c、15d和16c、16d的方 式被彎曲，而是沿著與直線部1 4a、1 41?相同的平面配設 。由此，線圈14是呈扁平的環狀。且’線圈15的連結部 〇 15c，是將該線圏15的直線部15a及15b的上端彼此連結 ，線圈15的連結部15d，是將該線圈15的直線部15a及 * 15b的下端彼此連結。連結部15c及15d ’是對於直線部 15a、15b在X軸方向的一方的方向彎曲地配設。線圏16 的連結部16c，是將該線圈16的直線部16a及16b的上端 彼此連結，線圈16的連結部16d’是將該線圈16的直線 部16a及16b的下端彼此連結。連結部16c及16d，是對 於直線部16a、16b朝X軸方向的另一方的方向（即與連結 部15c及15d逆向）彎曲地配設。具有這些的形狀的線圈 -13- 200941900 15、16是藉由從線圈14的兩側彼此組合，線圏15、16的 各連結部15c、16c成爲將線圈14的連結部14c挾於彼此 之間，且，各連結部15d、16dc成爲將連結部14d挾於彼 此之間。又，線圈15及線圈16，是彼此具有同一形狀較 佳。由此，可以削減零件的種類，可以提高信賴性及生産 性。 在本實施例的線圈單元17中，與前述的第1實施例 同樣’藉由3個線圈14〜16構成一個獨立的線圈單元17 ，如第5圖及第6圖所示，各線圈14〜16的直線部14a、 15a、16a、14b、15b及16b是依順鄰接地配置的方式彼此 組合。由此，因爲各線圈14〜16的環的大小一定，可防 止線圈14〜16的環的內側中的空隙的發生，所以可以加 大該線圈單元17的推力有效部中的線圈密度（線圈占積率） ，可以提高驅動效率。 (第3實施例） @ 接著’說明本發明的第3實施例的三相線性馬達。第 7圖（a)，是顯示本實施例的三相線性馬達！丨的結構的立 — 體圖。且’第7圖（b) ’是具備三相線性馬達1 1的可動子 12的側面圖。又’本實施例的三相線性馬達n的結構之 中’有關除了可動子12的部分的結構因爲是與第1實施 例同樣，所以在第7圖（a)中省略其圖示。 本實施例的可動子12，是在γ軸方向複數連結而構 成連結型可動子13。各可動子12，是只有包含如第1實 -14- 200941900 施例所示的線圏單元7，及如第2實施例將所示的線圈單 兀17之中任一方的1單元（第7圖（b)參照），藉由模具材 19被覆此線圈單元7(或是17)的全面，藉由安裝支架2〇 的方式將該被覆的上端部覆蓋。又，可動子12的橫剖面 形狀，是與第1實施例所示的可動子2的橫剖面形狀同樣 * 。由複數可動子12所構成的連結型可動子13，是藉由朝 . 線圈單元7(17)的通電使發生電磁力，並沿著γ軸方向移 〇 動。又，依據需要的推力來改變連結型可動子13的數量 也可以，一個也可以。 (第4實施例） 接著’說明本發明的第4實施例的三相線性馬達。第 8圖（a)’是顯示本實施例的三相線性馬達21的結構的立 體圖。且’第8圖（b) ’是具備三相線性馬達2丨的可動子 22的側面圖。又’本實施例的三相線性馬達2 1的結構之 〇 中，有關除了可動子22的部分的結構因爲是與第1實施 例同樣，所以在第8圖（a)中省略其圖示。 本實施例的可動子22’是包含複數如第1實施例所示 的線圈單元7’及如第2實施例所示的線圈單元17之中任 一方（第8圖（b)參照）。複數線圈單元7(17)是在γ軸方向 無間隙地並設，藉由模具材29被覆此複數線圈單元7(或 是17)的全面，藉由安裝支架30的方式覆蓋該被覆的上端 部而構成可動子22。又，可動子22的橫剖面形狀，是與 第1實施例所示的可動子2的橫剖面形狀同樣。 -15- 200941900 且，藉由在Y軸方向中的可動子22的兩端各別連結 可動子12而構成連結型可動子23。這種連結型可動子23 ，是藉由朝線圏單元7(1 7)的通電使發生電磁力，並沿著 Υ軸方向移動。 本發明的三相線性馬達的可動子是如第3實施例或是 第4實施例的形態也可以，可以最佳地達成如前述的第！ 實施例或是第2實施例的效果。 本發明的三相線性馬達用線圈單元及三相線性馬達不 限定上述的實施例，可進行其他各式各樣的變形。例如， 在第1實施例中雖例示將第2線圈（線圈5)作爲扁平的形 狀將此第2線圏藉由第1線圈（線圈4)及第3線圈（線圈6) 挾持的形態，在第2實施例中例示將第1線圈（線圈14)作 爲扁平的形狀將此第1線圈藉由第2線圈（線圈15)及第3 線圏（線圈16)挾持的形態，但是在本發明中第1〜第3線 圈之中任一是具有扁平形狀也可以，或是第1〜第3線圈 的連結部是全部彎曲也可以。且，上述實施例雖說明將線 圈側作爲可動子，但是將磁鐵側作爲可動子的情況時也可 適用本發明。 【圖式簡單說明】 [第1圖]顯示本發明的第1實施例的三相線性馬達的 立體圖。 [第2圖]第1實施例的可動子的橫剖面圖。 [第3圖]第1實施例，（a)將線圈單元從X軸方向所見 -16- 200941900 的前視圖，（b)沿著如（a)所示的線圈單元的nib-IIIb線的 剖面圖，（c)沿著如（a)所示的線圈單元的IIIc-Ilie線的剖 面圖。 [第4圖]第1實施例’（a)線圈單元的分解立體圖，（b) 線圈單元的立體圖’（c)對應如（a)所示的分解立體圖的俯 • 視圖。 . [第5圖]第2實施例’（a)將線圈單元從X軸方向所見 © 的前視圖，（b)沿著如（a)所示的線圈單元的Vb-Vb線的剖 面圖，（c)沿著如（a)所示的線圈單元的Vc-Vc線的剖面圖 〇 [第6圖]第2實施例，（a)線圈單元的分解立體圖，（b) 線圈單元的立體圖，（c)對應如（a)所示的分解立體圖的俯 視圖。 [第7圖](a)顯示第3實施例的三相線性馬達的結構的 立體圖。（b)具備三相線性馬達的可動子的側面圖。 ® [第8圖](a)顯示第4實施例的三相線性馬達的結構的 _ 立體圖。（b)具備三相線性馬達的可動子的側面圖。 [第9圖]被揭示於專利文獻1的複數線圈的形狀及配 置的立體圖。 【主要元件符號說明】 1 :三相線性馬達 2 :可動子 2a :本體部 -17- 200941900 2b :上端部 2c :下端部 2 d :兩側面 4 :線圈 4a :直線部 4b :直線部 4 c .連結部 4d :連結部 5 :線圈 5 a :直線部 5b :直線部 5 c ·連結部 5d :連結部 6 :線圈 6 a :直線部 6b :直線部 6c :連結部 6d :連結部 7 :線圈單元 8 :磁鐵單元 8a :基座軛 8b :側軛 9 :模具材 1 0 :支架 -18- 200941900 1 1 :三相線性馬達 12 :可動子 13 :連結型可動子 1 4 :線圈 14a :直線部 - 14b :直線部 • 1 4 C _連結部 © 14d :連結部 1 5 :線圈 1 5 a :直線部 1 5 b :直線部 15c :連結部 15d :連結部 1 6 :線圈 16a :直線部 O 16b :直線部 16c :連結部 1 6 d :連結部 1 7 :線圈單元 1 9 :模具材 20 :支架 2 1 :三相線性馬達 22 :可動子 23 :連結型可動子 -19 200941900 29 :模具材 30 :支架 81 :磁鐵 82 :磁鐵 1 0 0 :線圈 1 0 2 :直線部 -20-Each of the straight portions 14a, 14b, 15a, 15b, 16a, and 16b is disposed such that the Z -12 - 200941900 axial direction is arranged in the longitudinal direction and is arranged in parallel in the γ axis direction. Specifically, as shown in FIGS. 5(a), 5(c), and 6(b), one of the turns 14a, 15a, and 16a of the turns 14 to 16 is in the Y-axis direction. In this order, the other straight portions 14b, 15b, and 16b of the coils 14 to 16 are arranged adjacent to each other in this order from the straight portion 16a in the Y-axis direction. Further, the appearance of each of the straight portions 14a, 14b, 15a, 15b, 16a, and 16b and the integrated shape of these are 0, which are the same as the respective straight portions 4a, 4b, 5a, 5b, 6a, and 6b of the first embodiment. . The connecting portion 14c of the coil 14 connects the upper ends of the straight portions 14a and 14b of the coil 14 to each other, and the connecting portion 14d of the coil 14 connects the lower ends of the straight portions 14a and 14b of the coil 14 to each other. The connecting portions 14c and 14d are bent in the same manner as the connecting portions 15c, 15d, 16c, and 16d, which will be described later, but are arranged along the same plane as the straight portions 14a and 141. Thereby, the coil 14 has a flat annular shape. Further, the connecting portion c 15c of the coil 15 connects the upper ends of the straight portions 15a and 15b of the coil 15 to each other, and the connecting portion 15d of the coil 15 connects the lower ends of the straight portions 15a and 15b of the coil 15 to each other. . The connecting portions 15c and 15d' are curved in a direction in one of the straight portions 15a and 15b in the X-axis direction. The connecting portion 16c of the coil 16 connects the upper ends of the straight portions 16a and 16b of the coil 16 to each other, and the connecting portion 16d' of the coil 16 connects the lower ends of the straight portions 16a and 16b of the coil 16 to each other. The connecting portions 16c and 16d are curved in the other direction (i.e., opposite to the connecting portions 15c and 15d) of the straight portions 16a and 16b in the X-axis direction. The coils 13-200941900 15 and 16 having these shapes are combined with each other from both sides of the coil 14, and the respective connecting portions 15c and 16c of the turns 15 and 16 are placed between the joint portions 14c of the coils 14 Further, each of the connecting portions 15d and 16dc is such that the connecting portion 14d is placed between each other. Further, the coil 15 and the coil 16 have the same shape as each other. This makes it possible to reduce the types of parts and improve reliability and productivity. In the coil unit 17 of the present embodiment, as in the first embodiment described above, "an independent coil unit 17 is constituted by three coils 14 to 16, as shown in Figs. 5 and 6, each coil 14~ The straight portions 14a, 15a, 16a, 14b, 15b, and 16b of the 16 are combined with each other so as to be adjacent to each other. Thereby, since the size of the loop of each of the coils 14 to 16 is constant, the occurrence of the gap in the inner side of the loop of the coils 14 to 16 can be prevented, so that the coil density in the effective portion of the thrust of the coil unit 17 can be increased (coil occupation) Acceleration rate) can improve drive efficiency. (Third embodiment) @ Next, a three-phase linear motor according to a third embodiment of the present invention will be described. Fig. 7(a) is a three-phase linear motor showing the present embodiment! The vertical structure of the structure of the skeleton. Further, Fig. 7(b)' is a side view of the movable member 12 including the three-phase linear motor 1 1. In the configuration of the three-phase linear motor n of the present embodiment, the configuration of the portion other than the movable member 12 is the same as that of the first embodiment, and therefore the illustration thereof is omitted in Fig. 7(a). The movable member 12 of the present embodiment is connected in plural in the γ-axis direction to constitute a connecting type movable member 13. Each of the movable members 12 is only one of the coil unit 7 including the first embodiment of the first embodiment of the present invention, and the one of the coil units 17 as shown in the second embodiment (the seventh unit). (b) refers to the entire surface of the coil unit 7 (or 17) covered by the mold material 19, and the upper end portion of the cover is covered by attaching the bracket 2''. Further, the cross-sectional shape of the movable member 12 is the same as the cross-sectional shape of the movable member 2 shown in the first embodiment. The connecting type movable member 13 composed of the plurality of movable members 12 is electromagnetically driven by the energization of the coil unit 7 (17), and is moved in the γ-axis direction. Further, the number of the link type movable members 13 may be changed depending on the required thrust. One may be used. (Fourth Embodiment) Next, a three-phase linear motor according to a fourth embodiment of the present invention will be described. Fig. 8(a)' is a perspective view showing the structure of the three-phase linear motor 21 of the present embodiment. Further, 'Fig. 8(b)' is a side view of the movable member 22 having the three-phase linear motor 2A. Further, in the configuration of the three-phase linear motor 2 1 of the present embodiment, the configuration of the portion excluding the movable member 22 is the same as that of the first embodiment, and therefore the illustration thereof is omitted in Fig. 8(a). The movable member 22' of the present embodiment includes any one of the coil unit 7' as shown in the first embodiment and the coil unit 17 as shown in the second embodiment (see Fig. 8(b)). The plurality of coil units 7 (17) are disposed in the γ-axis direction without a gap, and the plurality of coil units 7 (or 17) are covered by the mold material 29, and the upper end portion of the cover is covered by mounting the bracket 30. The movable member 22 is formed. Further, the cross-sectional shape of the movable member 22 is the same as the cross-sectional shape of the movable member 2 shown in the first embodiment. -15-200941900 Further, the movable movable member 12 is connected to each other at both ends of the movable member 22 in the Y-axis direction to constitute the connecting movable member 23. The connecting type movable member 23 generates electromagnetic force by energization of the winding unit 7 (17) and moves in the z-axis direction. The movable member of the three-phase linear motor of the present invention may be in the form of the third embodiment or the fourth embodiment, and the above-described first embodiment can be optimally achieved! The effect of the embodiment or the second embodiment. The three-phase linear motor coil unit and the three-phase linear motor of the present invention are not limited to the above-described embodiments, and various other modifications can be made. For example, in the first embodiment, the second coil (coil 5) has a flat shape, and the second coil is held by the first coil (coil 4) and the third coil (coil 6). In the second embodiment, the first coil (coil 14) has a flat shape, and the first coil is held by the second coil (coil 15) and the third coil (coil 16). However, in the present invention, Any one of the first to third coils may have a flat shape, or the connection portions of the first to third coils may be all curved. Further, in the above embodiment, the present invention is also applicable to the case where the coil side is used as a movable member, but the magnet side is used as a movable member. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] Fig. 1 is a perspective view showing a three-phase linear motor according to a first embodiment of the present invention. [Fig. 2] A cross-sectional view of the movable body of the first embodiment. [Fig. 3] The first embodiment, (a) a front view of the coil unit seen from the X-axis direction - 16-200941900, and (b) a section along the nib-IIIb line of the coil unit as shown in (a) Figure (c) is a cross-sectional view taken along line IIIc-Ilie of the coil unit as shown in (a). [Fig. 4] Fig. 4 is an exploded perspective view of the coil unit, (b) a perspective view of the coil unit (c) corresponds to a top view of the exploded perspective view shown in (a). [Fig. 5] The second embodiment '(a) is a front view of the coil unit seen from the X-axis direction, and (b) is a cross-sectional view taken along line Vb-Vb of the coil unit as shown in (a). (c) a cross-sectional view along the line Vc-Vc of the coil unit as shown in (a) 〇 [Fig. 6] Second embodiment, (a) an exploded perspective view of the coil unit, and (b) a perspective view of the coil unit, (c) A plan view corresponding to the exploded perspective view as shown in (a). [Fig. 7] (a) is a perspective view showing the structure of a three-phase linear motor of a third embodiment. (b) A side view of a movable body having a three-phase linear motor. ® [Fig. 8] (a) shows a perspective view of the structure of the three-phase linear motor of the fourth embodiment. (b) A side view of a movable body having a three-phase linear motor. [Fig. 9] A perspective view showing the shape and arrangement of the plurality of coils disclosed in Patent Document 1. [Description of main component symbols] 1 : Three-phase linear motor 2 : Movable 2a : Main body part -17- 200941900 2b : Upper end part 2c : Lower end part 2 d : Both side faces 4 : Coil 4a : Linear part 4b : Linear part 4 c Connecting portion 4d: connecting portion 5: coil 5 a : straight portion 5 b : straight portion 5 c · connecting portion 5d : connecting portion 6 : coil 6 a : straight portion 6 b : straight portion 6 c : connecting portion 6 d : connecting portion 7 : Coil unit 8: Magnet unit 8a: Base yoke 8b: Side yoke 9: Mold material 1 0: Bracket -18- 200941900 1 1 : Three-phase linear motor 12: Movable member 13: Link type movable member 1 4 : Coil 14a: Straight line - 14b : Straight line part 1 4 C _ Connection part © 14d : Connection part 1 5 : Coil 1 5 a : Linear part 1 5 b : Linear part 15c : Connection part 15d : Connection part 1 6 : Coil 16a : Straight line Part O 16b : Straight line portion 16c : Connection portion 1 6 d : Connection portion 1 7 : Coil unit 1 9 : Mold material 20 : Bracket 2 1 : Three-phase linear motor 22 : Movable member 23 : Connection type movable member - 19 200941900 29 : Mold material 30 : Bracket 81 : Magnet 82 : Magnet 1 0 0 : Coil 1 0 2 : Straight line -20-